46 92 0 A7 B7 Μ济部中央標準局只工消贤合作社印製 五、發明説明（/ ) 【發明領域】 本發明係有關於一種放電加工裝置，其藉由將一工 具電極面向工件而垂直移動，且令在該工件及該工具電 極之間施予重複放電，因而可在工件上形成具有所需形 狀的空腔者。 · 【背景技術】 放電加工裝置（“EDM”）係廣泛地使用於對具有導電 性的實心工件進行精密加工使其成為鑄模或模具。該工 件係被固定在一位於工件槽上的檯面，一銅或石墨製的 工具電極藉由一適當的電極安裝裝置而設置於一可在垂 直方向移動的中空管上。在該工件槽内充滿介電液 (dielectnc fluid)，如煤油，且將該工具電極設於非常靠近該 工件的位置》在工件及工具電極之間的間隔被稱為間隙 (gap)，且此間隙的尺寸是從幾微求到幾十微米。當 在遑工件與工具電極之間以—種被控制之導通時間方式 而作，®力:脈衝時，則在間隙内的介電液之絕緣特性 將會崩潰且產生放電。此放電所產生的熱將使得工件的 少量材料蒸發或融化，且流人介電液中。當完成導通時 間後，間隙中介電液的絕緣特性將被回覆，因此該電力 脈衝，在一可控制的關斷時間之期間内停止作用。藉由 »玄放Μ可在工件的表面上形成一微小之漏斗形的坑洞。 杈電加工爰置通常可以將關斷時間及導通時間控制在1 微fhsec)或幾十之一毫秒（msec)之間，來將一電力脈衝 重複作用於該間隙中。放電加卫裝置係藉由將工具電極 向工件移動’且沿Z軸下降，而維持該間隙的^小不變。 本紙張尺度鱗（⑽…胁 ~此衣 訂r r請先閲讀背面之注意事項再填舄本頁j 4 經濟部中央標準局負工消費合作社印製 6 9 P 〇 1 A7 ________B7 五、發明説明（2) 該工具電極可從工件上去除微量的材料，而不會與工件 接觸，易言之’此將可於工件上形成一精密度、表面粗 度皆為良好且與該工具電極之間外形互補的坑洞。此類 型的放電加工裝置與一種使用可移動線電極而被稱為伸 克放電加工裝置（sinl^er EDM)顯然是有相當差異的。 就放電加工裝置而言清洗程序是非常重要的，即如 何促使介電液流經該間隙以去除間隙中的工件殘留碎 片。該清洗程序係用於防止在工具電極及從工件上去除 之殘留碎片之間產生的不需要之二次放電，以及確保在 關斷（OFF time)期間内恢愎成絕緣的狀態。習知技術係在 工具電極及工件上的適當位置處設置孔洞，以便在進行 加工之前用來將乾淨的介電液輸送到該間隙令，以及從 该間隙吸除党污染的介電液。由於這些孔洞之設置常受 限於該工具電極的尺寸及形狀，故有人乃於適當位置處 設置一可將介電液喷射到該間隙的喷射裝置。清洗固可 促進放電加工之速率及準减率，惟操作者必須為此去製 造一道可以流經整個該間隙的均勻液流；由於該工具電 極係沿著Z軸而以週期性的快速上、下方式而位移，據 此可以將工件凹穴内因放電加工所產生的受污染介電液 幾乎完全地移除’此即所謂的跳躍操作（Jump 〇perati〇n)。 一般而言，在跳躍操作期間’該工具電極以每分鐘幾百 毫米（mm/min)的速率移動如果工具電極返復移動的距 離相當大，將使得更多的乾淨的溶液流入該間隙令，以 及從該間隙中排除更多的已污染溶液。該工具電極之上 升最好應不少於工件上的該孔洞已被加工的深度，然而， 本紙張尺度適用中國國家標準（CNS ) A4現格（2i〇X297公羡） (請先閲讀背面之注意事項再填巧本頁)46 92 0 A7 B7 Μ Printed by the Central Standards Bureau of the Ministry of Economic Affairs, printed only by the Consumers ’Cooperatives. 5. Description of the Invention (/) [Field of the Invention] The present invention relates to an electrical discharge machining device, which is vertical by facing a tool electrode to a workpiece. It moves, and a repeated discharge is applied between the workpiece and the tool electrode, so that a cavity having a desired shape can be formed on the workpiece. [Background Art] Electrical discharge machining devices ("EDM") are widely used for precision machining of solid workpieces with electrical conductivity to make them into casting molds or dies. The work piece is fixed on a table surface located on a workpiece groove, and a tool electrode made of copper or graphite is provided on a hollow tube which can be moved in a vertical direction by an appropriate electrode mounting device. The workpiece groove is filled with a dielectric liquid (such as kerosene), and the tool electrode is located very close to the workpiece. The gap between the workpiece and the tool electrode is called a gap, and this The size of the gap is determined from a few micrometers to tens of micrometers. When a controlled on-time mode is used between the 遑 workpiece and the tool electrode, the force: pulse, the dielectric characteristics of the dielectric fluid in the gap will collapse and generate a discharge. The heat generated by this discharge will cause a small amount of material on the workpiece to evaporate or melt and flow into the dielectric fluid. When the on-time is completed, the dielectric characteristics of the dielectric fluid in the gap will be replied, so the power pulse will stop functioning within a controlled off-time. With Xuanfang M, a tiny funnel-shaped pit can be formed on the surface of the workpiece. The electro-mechanical setting can usually control the off time and on time between 1 micro-fhsec) or tens of milliseconds (msec) to repeatedly apply a power pulse to the gap. The electrical discharge guarding device moves the tool electrode toward the workpiece 'and lowers it along the Z-axis, thereby maintaining the gap constant. Scales of this paper (⑽ ... ~~ This clothing order rr Please read the notes on the back before filling in this page j 4 Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 6 9 P 〇1 A7 ________B7 V. Description of the invention ( 2) The tool electrode can remove a small amount of material from the workpiece without contacting the workpiece. In other words, 'this will form a precision on the workpiece with a good surface roughness and a shape between the tool electrode and the tool electrode. Complementary potholes. This type of EDM device is obviously quite different from a type called sinl ^ er EDM that uses removable wire electrodes. The cleaning procedure is very important for EDM devices. What is important is how to promote the dielectric fluid to flow through the gap to remove residual debris in the gap. The cleaning procedure is used to prevent unwanted secondary discharges between the tool electrode and the residual debris removed from the workpiece. , And to ensure that it is restored to an insulated state during the OFF time. The conventional technique is to set holes in the tool electrodes and the workpiece at appropriate positions so that they can be processed before processing. To transfer clean dielectric fluid to the gap, and to suck party contaminated dielectric fluid from the gap. Because the arrangement of these holes is often limited by the size and shape of the tool electrode, some people are in the proper place A spraying device can be set to spray the dielectric liquid into the gap. The cleaning solid can promote the rate and quasi-reduction rate of EDM, but the operator must create a uniform liquid flow that can flow through the gap; The tool electrode system is displaced along the Z axis in a periodic rapid up and down manner, thereby removing the contaminated dielectric fluid generated by the electrical discharge machining in the workpiece cavity almost completely. This is the so-called jump operation (Jump 〇perati〇n). In general, during the jumping operation, the tool electrode moves at a rate of several hundred millimeters per minute (mm / min). If the tool electrode moves back a considerable distance, it will make more The clean solution flows into the gap, and more contaminated solution is excluded from the gap. The rise of the tool electrode should preferably be not less than the depth at which the hole in the workpiece has been processed, And, this paper scale applicable Chinese National Standard (CNS) A4 format now (2i〇X297 male envy) (Please read the back of the precautions clever reloading the page)
11T 釕消部中央嵇準局員工消费合作衽印製 4 6 92 0 1 A7 --------- B7 五、發明翻（3 ) " ~ 由於在跳躍操作期間並沒有從工件上去除任何材料，所 以如果跳躍操作過於頻繁亦將導致材料去除率下降。 【發明概述】 因此，本發明的目的係提供一放電加工裝置’其可 有效地從該間隙中清除那些從工件上去除的碎片，而不 會導致材料去除速率減少。 本發明的另一目的為提供一放電加工裝置，其可有 效地從間隙中清除那些從工件上去除的碎片，而不需要 高度的技術。 本發明其他進一步的目的、優點及創新之特色將會 在後文中續予說明，熟習本項技術者當可據此實現本發 月，而本發明的目的、特徵係詳如申請專利範圍所載者。 為了達成上述說明的目的，本發明乃提供一種放電 加工裝置，其藉由將一工具電極面向工件而垂直移動且 在^工件及该工具電極之間施予重複放電以對工件加工 者，該裝置包含：一組可垂直移動的中空管；一組電極 女裝裝置，係設於中空管的下方，且與該中空管同軸而 配置，用以裝設固定工具電極；—對線性馬達動子’係 設置於該中空管上而且對稱該中空管的中心g ;以及一 對線性馬達靜子’分別與該對動子對稱而設置。 在本發明的另一設計理念中，本發明提供一種放電 加工裝置，其藉由將一工具電極面向工件而垂直移動且 在該工件及該工具電極之間施予重複放電以對工件加工 者，遠裝置包含：一組密度小於4g/cm3且可垂直移動的 -^-^------^ (請先閱讀背面之注意事項再填寫本頁)11T Ruthenium Consumer Ministry Central Bureau of Quasi-Bureau Consumption Co-operation of Employees 4 6 92 0 1 A7 --------- B7 V. Invented (3) " ~ As it was not removed from the workpiece during the jump operation Any material is removed, so if the jumping operation is too frequent, the material removal rate will also decrease. [Summary of the Invention] Therefore, an object of the present invention is to provide an electric discharge machining apparatus' which can effectively remove the debris removed from the workpiece from the gap without reducing the material removal rate. Another object of the present invention is to provide an electric discharge machining apparatus which can effectively remove those pieces removed from a workpiece from a gap without requiring a high degree of technology. Other further objects, advantages and innovative features of the present invention will be described later. Those skilled in the art can realize this month according to this, and the objects and features of the present invention are detailed in the scope of patent application. By. In order to achieve the purpose of the above description, the present invention provides an electric discharge machining device which vertically moves a tool electrode toward a workpiece and applies repeated discharges between the workpiece and the tool electrode to process the workpiece. The device Contains: a set of vertically movable hollow tubes; a set of electrode women's clothing devices, which are arranged below the hollow tube and are arranged coaxially with the hollow tube to install fixed tool electrodes;-a linear motor A mover 'is disposed on the hollow tube and is symmetrical to the center g of the hollow tube; and a pair of linear motor stators' are provided symmetrically to the pair of movers, respectively. In another design concept of the present invention, the present invention provides an electric discharge machining device which vertically moves a tool electrode toward a workpiece and applies repeated discharges between the workpiece and the tool electrode to process the workpiece, The remote device contains: a set of-^-^ ------ ^ with a density less than 4g / cm3 (please read the precautions on the back before filling this page)
經濟部中央#準扃责工消費合作社印31 469201 A7 ________B7 五、發明説明（4 ) 中空管；一組電極安裝裝置’係設於中空管的下方用以 裝設固定工具電極；一組設於中空管上的線性馬達動子； 以及一組相對於該動子而設置的線性馬達靜子。 【圓式之簡單說明】· 下文中的附圖係本說明書的一部份，用於舉證本發 明的實施例，而附圖及文中的說明可解釋本發明的原理。 圖1係本發明實施例之一的透視圖。 圖2係沿圖Ϊ之線A_A所視者，顯示一種用於移動 該中空管的裝置之水平戴面圖〇 圖3係沿圖】之線B-B所視者，顯示—種用於移動 該中空管的裝置之垂直戴面·圖。 圖4係圖]之線C-C所視者，顯示一種用於動 該中空管的裝置之垂直截面圖》 移動 圖5係沿圖1之線A_A所視者，顯示另一種用於導 引該中空管的裝置之水平裁面圖。 圖6係沿圖1之線A_A所視者，顯示另—種用於移 動該中空管的裝置之水平戠面圖。 w 圖7係沿圖1之線C-C所視者，顯示另一種用於移 動該中空管的裝置之垂直戴面圖。 圖8係本發明之另一實施例的透視圓。 圖9係沿圖8之線A_A所視者’顯示一種用於移動 該中空管的裝置之水平戴面圖。 圖10係沿圖8之線B-B所視者，顯示一種用於移 動該中空管的裝置之垂直截面圖。 ------------裝------,耵------線 (請先閲讀背面之注意事項再填寫本頁〕Ministry of Economic Affairs Central #Associated Responsible Workers' Cooperatives Seal 31 469201 A7 ________B7 V. Description of the Invention (4) Hollow tube; a set of electrode mounting devices is installed below the hollow tube to install fixed tool electrodes; a set A linear motor mover provided on the hollow tube; and a set of linear motor movers provided relative to the mover. [Brief description of the circular form] · The following drawings are a part of this specification, and are used to prove the embodiments of the present invention. The drawings and the description in the text can explain the principle of the present invention. FIG. 1 is a perspective view of one embodiment of the present invention. Figure 2 is a horizontal wearing view of a device for moving the hollow tube viewed from line A_A of Figure Ϊ. Figure 3 is viewed from line BB of the drawing]-showing a device for moving the hollow tube. The vertical face of the hollow tube device. FIG. 4 is a vertical cross-sectional view of a device for moving the hollow tube as viewed by line CC. Moving FIG. 5 is a view along line A_A of FIG. 1 and another is used to guide the device. Horizontal sectional view of the hollow tube device. Fig. 6 is a horizontal plan view of another device for moving the hollow tube as viewed along line A_A of Fig. 1. w Fig. 7 is a vertical face view of another device for moving the hollow tube as viewed along line C-C in Fig. 1. FIG. 8 is a perspective circle according to another embodiment of the present invention. Fig. 9 is a horizontal wearing view of a device for moving the hollow tube, as viewed along the line A_A of Fig. 8. Fig. 10 is a vertical cross-sectional view of a device for moving the hollow tube as viewed along line B-B of Fig. 8. ------------ install ------, 耵 ------ line (Please read the precautions on the back before filling this page)
^ 6 92 G 五、發明説明（夕） A7 B7 a 1 1係顯示有關圖8之該種用於移動該令空管的裝 置之透視圖。 圖〗2係顯示有關圓8之中空管上所產生的推力之透 視圖。 圖丨3係顯示另·一種放電加工裝置之中空管的之水平 經湳部中央標準局負工消費合作社印繁 截面圖。 圖號說明】 座床............... 柱體......................... - 2 前表面......... ……2a 滑動體............ ..3 鞍座................. 4 工件槽.............. ....5 工具電極. ....6 中空管. ..8 孔洞................. 板子................. 板子...................... .........8c 電極安裝裝置 ....9 永久磁鐵..... 11 磁板.............. 永久磁鐵......... ……..13 磁板............ 永久磁鐵......... .……15 永久磁鐵... ....16 滾珠承軌道........ …21 上轴承座.. .….22 下軸承座.............. -……·23 滾柱導件. .….24 滾柱導件.............. .........^5 框架... 窗口......................... 7a 窗σ 前壁面.................... ….7c 板子........... 板子.......................... .……7e 磁軛........... 電樞線圈.............. …32 管路.. w 磁軏.......................... ,..41 電樞線圈 本紙張尺度適用中國國家搮举(CMS ) A4規格（2丨0X297公釐） ；-------A-衣------訂 (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作牡印製 92 0 1 A7 ________ B7 五、發明説明（& ) 管路 43 線性刻度............ 感測器 52 汽缸........................ 活塞....... 活塞桿.................. 凸緣... 連結板.................. 上氣室 電極........................ 電極...... 【較佳實施例之詳細說明】 現在請參考圓1，圖2，圖3.及圓4，此將於下文中 加以說明本發明的放電加工裝置之一實施例。 如圖丨中所示者，將一柱體2定位在座床1的後方， 而且在座床1上提供一滑動體3，使得該滑動體可依γ 軸方向移動。一鞍座4位在滑動體3上，因此可在與γ 軸垂直之X軸方向上滑動。在鞍座4上提供内部盛填介 電流體的工件槽5。將一位在近工件處的工具電極<3被 安裝於電極安裝裝置9上。該電極安裝裝置9係固定於 可在2L軸方向移動的中空管8的下方。為了進行一項具 相當大移動量而不會導致物體去除速率減少的跳躍操 作’該放電加工裝置可在加速度超過1G(重力加速度）下 加速或減速，而且可在至少為10rn/min的速率下’以相 當良好準確度來移動該工具電極。如圓2所示，中空管 S具有一方形的戴面。如圖3及圊4所示，為電極安装 裝置9及工具電極6的配置位置係與中空管8同軸，此 意謂著有可能在相當良好的準確度下移動該工具電極。 圖中的參考文字QC表示中空管8的中心軸線。在方形 本紙張尺度適用中國國家標準（CNS )如说格（210X297公着） (請先閱讀背面之注意事項再填湾本頁) .訂 經濟部中央橾卒局另工消资合作社印装 Α7 ~~~____Β7 五、發明説明（7) 柱之中空管8的兩側壁面各配置一列永久磁鐵，其圍繞 中心軸線Q C呈對稱分佈。為了得到高速率，需要注意 保持中空管8的高剛性且減少其重量。在沿著垂直方向 沿伸的中心處’該中空管8有一圓枉形孔洞G ’而該中 空管的密度小於4 g/cm3。該中空管8最好是由具有低膨 脹係數、高楊氏係數的矽質陶瓷所製造而成者。尤其是， 密度為3‘2 g/cm3，楊氏係數為3 〇 _ 3丨x 106 kgf/cm2，且破壞 強度為4.5 - 5·0 Mpa · m1/2的氮化矽陶瓷（si3N4)為一項較佳的 選擇。下文中將簡單地說明一種用來製造該種陶瓷的方 法。首先’將為二氧化鋁（Al2〇3)，二氧化矽（Si〇2)或氮化 銘（A1N)的燒結促進劑加到氮化矽（Sj3N4)的顆粒中，而在一 方柱形中空體内使用如等靜態壓鑄法形成該項混合物。 然後使用一壓力燒結法，燒結此高密度的物體。由光金 屬的合成材料及40%的陶瓷來製造該中空管8。例如該 光金屬可為鋁化鎂或其合金。該陶瓷例如可為碳化矽（Sic) 陶究’氧化鋁（Al2〇3)陶瓷’或氮化矽（Si3N4)陶瓷，一鋁 合金及55%之氧化鋁的合成材料之密度為2 95 g/cm3，楊 氏係數為2.0xi〇6kgf/cm2,且破壞強度為1〇·5Μρα·ιτι1/2。 在700到800。(：的氮氣中，將一融化的光金屬浸入陶瓷 燒結體中而形成這些類型合成材料。 將永久磁鐵置於磁板中，該磁板為由如鐵所形成之 儘可能薄的軟質磁性材料’以在永久磁鐵之間形成一相 當良好的磁路。在中空管8及磁板之間則不提供任何組 件。在所示的實施例中，配置有雙列永久磁鐵]1的磁板 12設在中空管8之一壁面上，而另一具有雙列永久磁鐵 本紙張錢適用中國國家樣準（CNS) M祕（2i〇x297公後） t請先閱讀背面之注意事項再填寫本頁) % Τ -6 A7 B7 五、發明説明（冴） 13的磁板14則設在中空管8之另一壁面上、為了導引 °丁垂直移動的中空管8，將兩線性移動的滾珠承軌道21 以彼此相互平行之方式連接到柱體2的前表面2a上。中 空官S的後表面上設有上、下軸承座22、23可與軌道21 °齒合。面對永久磁鐵】丨、丨3之框架7支撐著靜子連而設 置於柱體2的前表面2a上。如圊2及圖4中所示者，該 靜子包含一電樞線圈’且將一磁軛設在板子及7e的 對應垂直表面上’因此可對稱於中空管8的中心軸線qc。 板子7d及7e固定到框架7兩側壁面所形成的窗口 7a及 7 b中。由薄片之矽鋼板所形成的磁軛3 1及* 1分別設於 板子7d及76上，且電枢線圈32、42分別纏繞在磁軛31， 4 1上。調整磁軛3 ]及永久磁鐵11之間的間距及磁軛4】 及永久磁鐵13之間的間距，使兩者具有相同的尺寸。例 如’利用數個位於板子7 d及7 e上的螺絲調整此兩間距， 使其具有相同的尺寸。藉此，在移動件及靜子之間所產 生的磁性吸引力將會彼此相互抵銷。將多個冷卻劑通過 的ϋ路3 3、43安裝在磁軛3 1及4 1内側所形成的孔洞中。 ••求J·上刻度5 1设於中空管8的側壁面，且在框架7之前 壁面7c的内側提供用於讀取中空管8之位置的感測器 52。一線性馬達（圖中沒有顯示）的驅動器用於接收來自 感測器52的偵測信號，且提供電流予電樞線圈32及42 ^ 當中空管8移動的重力加速度超過1g時，乃藉由一汽缸 61來承擔其負載，為了使得該機器更堅實，汽缸ό1係 設於與中空管8同軸之孔洞8a的内側，且汽缸6丨的上 端使用一Λ緣64固定到中空管8上。因為該汽缸61係 f紙張尺度適用中國國家標準（CNS ) Λ4規格（2】〇χ297公釐） ----------^------1Τ------皆’ (請先閱讀背而之泣$項再填寫本I) 經濟部中央橾準局員工消费合作杜印-5i d 6 9?. 0 A7 B7 五、發明説明（$) ---；-------^— (請先閱讀背面之注項再填寫本頁) 對準設於中空管8，故可確保其高度的反應能力。活塞 才干6 3的 ％連接到活塞6 2上，而另一端連接到一連結 板65上。該連結板65係自枉體2水平延伸而出且固定 於該柱體2上。在汽缸6丨的上氣室6U之空氣壓力係高 於該由空壓調節器維持在一固定數值下的活塞62。因為 汽缸61之故，所以當該令空管8靜止不動時$給該電樞 線圈32及42的電力可被節省起來。另在中^管8及框 架7之間的縫隙中設有若干個蛇腹形箱，以防止灰塵侵 入0 用於導引中空管8及設定線性刻度51位置的裝 置......等’其並不限於圊2 ’圖3及圖4所示之實施例。 例如’如圖5所示，也可以額外提供一橫向滾柱軸承， 使該中空管8得被引導於中空管8前壁面與框架7之前 壁面7c之間作垂直之移動。亦可將線性刻度51設於中 空管8之後壁面，且將用於偵測該中空管8位置的感應 器52設置於柱體2之前表面2a上。 經濟部中央標率局只工消費合作社印製 如圖6尽圖7，該磁辆31及41得利用板子8b及8c 而設置於中空管8的兩壁面上。在此例子中，該磁板12 藉由板子7 d而支撐在框架7上，且使其永久磁鐵11對 應於該磁軛3 1。而該磁板14藉由板子7e而支撐在框架 7上，且使其永久磁鐵1 3對應於該磁軛4 1。將從冷卻劑 管路33、43中延伸出來的韌性管子及從線圈32及42中 延伸出來的電源線連接到電極71及72上。 現在請參考圖8’圖9，圖10’圖Π及圊I2，此將 於下文中加以說明本發明之放電加工裝置的另一實施 本紙张尺度適用中國囤家標準（CNS ) Λ4規格（2IOX297公釐） d 6 02 Ο 1^ 6 92 G V. Description of the Invention (Evening) A7 B7 a 1 1 is a perspective view showing the device for moving the air tube according to FIG. 8. Figure 2 is a perspective view showing the thrust generated on the hollow tube of circle 8. Figure 3 is a cross-sectional view showing the level of an empty tube in another type of EDM device. [Illustration of drawing number] Seat bed .................. Cylinder ............- 2 Front surface ......... 2a Sliding body ......... 3 Saddle ... 4 Workpiece slot ............... 5 Tool electrode ... 6 Hollow tube ... 8 Hole ... ..... board .... board ..... .... 8c Electrode mounting device ... 9 Permanent magnet ... 11 Magnetic plate ......... Permanent magnet ......... ...... … .13 Magnetic plate ............ Permanent magnet .................. 15 Permanent magnet ... ... 16 Ball bearing track ... ....… 21 Upper Bearing Seat ........... 22 Lower Bearing Seat ..............-... 23 Roller Guide ... 24 Roller Guide ................... 5 Frame ... Window .... 7a Window σ front wall surface ..... 7c board ..... board ... ... 7e yoke .............. Armature coil ........ ...... 32 piping..w magnetic .................. 41. Armature coil paper Standards apply to China National Examination (CMS) A4 specifications (2 丨 0X297 mm ); ------- A-clothing ------ Order (please read the notes on the back before filling out this page) Printed by the Consumers' Cooperation of Central Standards Bureau of the Ministry of Economic Affairs 92 0 1 A7 ________ B7 5 、 Invention (&) Pipe 43 Linear Scale ............ Sensor 52 Cylinder .............. ... Piston ... Piston rod ... Flange ... Link plate ... ...... Upper air chamber electrode .............. Electrode ...... [Detailed description of the preferred embodiment] Reference is now made to circle 1, FIG. 2, FIG. 3, and circle 4, which will be described below as an embodiment of the electrical discharge machining apparatus of the present invention. As shown in FIG. 丨, a post 2 is positioned behind the seat bed 1, and a sliding body 3 is provided on the seat bed 1 so that the sliding body can move in the γ-axis direction. A saddle is positioned on the sliding body 3 so that it can slide in the X-axis direction perpendicular to the γ-axis. The saddle 4 is provided with a workpiece groove 5 filled with a dielectric fluid inside. A tool electrode < 3 at one position near the workpiece is mounted on the electrode mounting device 9. The electrode mounting device 9 is fixed below the hollow tube 8 that can be moved in the 2L axis direction. In order to perform a jump operation with a considerable amount of movement without reducing the object removal rate, the electrical discharge machining device can accelerate or decelerate at accelerations exceeding 1G (gravitational acceleration), and at a rate of at least 10rn / min 'Move the tool electrode with fairly good accuracy. As shown by circle 2, the hollow tube S has a square wearing surface. As shown in Figs. 3 and 圊 4, the arrangement positions of the electrode mounting device 9 and the tool electrode 6 are coaxial with the hollow tube 8, which means that it is possible to move the tool electrode with a relatively good accuracy. Reference character QC in the figure indicates a central axis of the hollow tube 8. Applicable to Chinese National Standards (CNS) such as Grid (210X297) on the square paper scale (please read the notes on the back before filling in this page). Order printed by the Central Government Bureau of the Ministry of Economy ~~~ ____ Β7 V. Description of the invention (7) A row of permanent magnets are arranged on each of the two side walls of the hollow tube 8 of the column, which are symmetrically distributed around the central axis QC. In order to obtain a high speed, care needs to be taken to maintain the high rigidity of the hollow tube 8 and reduce its weight. At the center extending along the vertical direction, 'the hollow tube 8 has a round 枉 -shaped hole G' and the density of the hollow tube is less than 4 g / cm3. The hollow tube 8 is preferably made of a silicon ceramic having a low expansion coefficient and a high Young's coefficient. In particular, a silicon nitride ceramic (si3N4) with a density of 3'2 g / cm3, a Young's coefficient of 3 〇_ 3 丨 x 106 kgf / cm2, and a breaking strength of 4.5-5.0 Mpa · m1 / 2 is A better choice. Hereinafter, a method for manufacturing the ceramic will be briefly explained. First, a sintering accelerator, which is aluminum oxide (Al203), silicon dioxide (SiO2), or nitride nitride (A1N), is added to the particles of silicon nitride (Sj3N4), and hollow in one column. The mixture is formed in vivo using, for example, isostatic die casting. This high density object is then sintered using a pressure sintering method. The hollow tube 8 is made of a composite material made of light metal and 40% ceramic. The light metal may be, for example, magnesium aluminide or an alloy thereof. The ceramic may be, for example, a silicon carbide (Sic) ceramic 'alumina (Al203) ceramic' or a silicon nitride (Si3N4) ceramic, a composite material of an aluminum alloy and 55% alumina has a density of 2 95 g / cm3, Young's coefficient is 2.0xi06kgf / cm2, and the breaking strength is 10.5Mρα · ιτι1 / 2. Between 700 and 800. (: In nitrogen, a molten light metal is immersed in a ceramic sintered body to form these types of composite materials. Permanent magnets are placed in a magnetic plate, which is a soft magnetic material made of iron as thin as possible 'To form a fairly good magnetic circuit between the permanent magnets. No components are provided between the hollow tube 8 and the magnetic plate. In the embodiment shown, a double-row permanent magnet is configured] 1 magnetic plate 12 is located on one wall of the hollow tube 8 and the other has a double row of permanent magnets. This paper is suitable for China National Standards (CNS) M secret (2i × 297 male) t Please read the notes on the back before filling (This page)% Τ-6 A7 B7 V. Description of the invention (ii) The magnetic plate 14 of 13 is provided on the other wall surface of the hollow tube 8. In order to guide the hollow tube 8 which moves vertically, two linear The moving ball bearing rails 21 are connected to the front surface 2a of the cylinder 2 in a manner parallel to each other. The rear surface of the hollow official S is provided with upper and lower bearing seats 22 and 23 which can be meshed with the track 21 °. Facing the permanent magnet], the frame 7 of the magnets 3 and 3 is supported on the front surface 2a of the column 2 and supports the stators. As shown in 圊 2 and FIG. 4, the stator contains an armature coil ' and a yoke is provided on the corresponding vertical surface of the plate and 7e ' and thus may be symmetrical to the central axis qc of the hollow tube 8. The plates 7d and 7e are fixed to windows 7a and 7b formed on both side walls of the frame 7. The yokes 3 1 and * 1 formed of a thin silicon steel plate are provided on the plates 7d and 76, respectively, and the armature coils 32 and 42 are wound on the yokes 31, 41, respectively. Adjust the distance between the yoke 3] and the permanent magnet 11 and the distance between the yoke 4] and the permanent magnet 13 so that they have the same size. For example, ‘the two pitches are adjusted with several screws on the boards 7 d and 7 e so that they have the same size. As a result, the magnetic attractive forces between the moving parts and the stator will cancel each other out. The loops 3, 43 through which a plurality of coolants pass are installed in holes formed inside the yokes 3 1 and 4 1. •• Find J. Upper scale 5 1 is provided on the side wall surface of the hollow tube 8 and a sensor 52 for reading the position of the hollow tube 8 is provided inside the wall surface 7c before the frame 7. The driver of a linear motor (not shown in the figure) is used to receive the detection signal from the sensor 52 and provide current to the armature coils 32 and 42. ^ When the gravity acceleration of the hollow tube 8 exceeds 1g, A cylinder 61 is used to bear its load. In order to make the machine more solid, the cylinder 1 is located on the inside of the hole 8a coaxial with the hollow pipe 8 and the upper end of the cylinder 6 丨 is fixed to the hollow pipe 8 . Because the cylinder 61 series f paper size is applicable to the Chinese National Standard (CNS) Λ4 specification (2) 0 × 297 mm) ---------- ^ ------ 1T ------ all '(Please read the Idols in the back and fill in this I before completing this I) Du Yin-5i d 6 9 ?. 0 A7 B7 V. Invention Description ($) ---;- ----- ^ — (Please read the note on the back before filling out this page) Alignment is set on the hollow tube 8, so it can ensure its high responsiveness. % Of the piston capacity 63 is connected to the piston 62, and the other end is connected to a link plate 65. The connecting plate 65 extends horizontally from the carcass 2 and is fixed on the pillar 2. The air pressure in the upper air chamber 6U of the cylinder 6 丨 is higher than the piston 62 maintained at a fixed value by the air pressure regulator. Because of the cylinder 61, the electric power to the armature coils 32 and 42 can be saved when the air tube 8 is stationary. In addition, there are several bellows-shaped boxes in the gap between the middle tube 8 and the frame 7 to prevent dust from invading. 0 A device for guiding the hollow tube 8 and setting the linear scale 51 position ... etc. 'It is not limited to 圊 2' The embodiment shown in FIGS. 3 and 4. For example, as shown in FIG. 5, a transverse roller bearing may be additionally provided so that the hollow tube 8 is guided between the front wall surface of the hollow tube 8 and the front wall surface 7c of the frame 7 to move vertically. The linear scale 51 can also be set on the wall surface behind the hollow tube 8, and the sensor 52 for detecting the position of the hollow tube 8 can be set on the front surface 2a of the cylinder 2. Printed by the Central Standards Bureau of the Ministry of Economic Affairs and printed by the Consumer Cooperative. As shown in Figure 6 and Figure 7, the magnetic cars 31 and 41 can be installed on the two walls of the hollow tube 8 using boards 8b and 8c. In this example, the magnetic plate 12 is supported on the frame 7 by a plate 7d, and its permanent magnet 11 corresponds to the yoke 31. The magnetic plate 14 is supported on the frame 7 by a plate 7e, and its permanent magnet 13 corresponds to the yoke 41. To the electrodes 71 and 72, flexible pipes extending from the coolant pipes 33 and 43 and power lines extending from the coils 32 and 42 are connected. Please refer to FIG. 8 ′, FIG. 9, FIG. 10 ′, FIG. Π and 圊 I2, which will be described below. Another implementation of the electrical discharge processing device of the present invention. Mm) d 6 02 Ο 1
經濟部中央標準局只工消费合作社印製 ^ 1至圖7 .中相同的元件在各圓中將以相同的標 示表示且忒篇文章在此列為本文之參考文件。 數列永久磁鐵15及16分別附著在磁板12及14之 上，並將该磁板分別設置於方柱形中空管8之前壁面及 後上面如圖〖1所示，該等各別的永久磁鐵16係以微 微傾斜於水平方向而設置於該磁板U上，據g可減少扭 力振動。在中空管8的中心部位開設一方形孔洞8a以減 少其重量。在中空管8及框架7的兩侧表面之間設有線 性橫向滾柱導件24及25，用以導引中空管8的位移9 槌圖1 0中可清楚地看出，在設有磁軛41的板子7e及柱 體2之間設置一汽缸6 1，用以承擔該中空管8的負載。 一活塞桿63藉一連結板65而連接於該中空管以下 將配合圖12來詳細說明用以驅動中空管8的力量。在該 圖中以GCL來標示該對稱而設I置的永久磁鐵列丨5及16 之間水平向中心線。在中空管中心線GCL上有一合力 丁F ’係由產生自該列永久磁鐵15及磁軛3〗之間的推力 FC及產生自該列永久磁鐵16及磁概41之間的推力FB 所組成。藉由該線性橫向滾柱導件24及25之設置，使 得該對應導引面所生的引力被引導作用於中心線GCL 上’據此’除了在垂直方向外，該力量不會作用在該線 性4¾向滾筒導件2 4及2 5上。然後一質量輕盈的中空管 8就可以在高速的以及良好準確度的情；兄下，於垂直方 向被移動。 當在工件上利用一底表面寬1 .Omm、長38mm且各 側表面均具1 °斜率的肋狀石墨工具電極來加工一深度為 本紙浪尺度適用中國國家標準（CNS ) Λ4见格（公釐） ： 裝 , 訂 (請先閱請1Ϊ-面之注意事項再填寫本頁) 46 92 Ο Λ7 Β7 五、發明説明（// ) 70mm的孔洞時，此時，設定導通時間為100微秒（；/S) ’ · 且設定關斷時間為140微秒，最高電流值設定為93A， 平均間隙電壓設定為5 5 V，無負載電壓設定為12 0伏， 設定躍進速率（Jump rate)為30公尺/分鐘，且每一循環的 躍進時間設定為〇.24秒。而工件的材料特性則可採用曰 本工業標準SKD Π令所定義者。甚至在沒有清洗的情況 下’其加工速率亦幾乎維持不變且在分鐘内完成加 工作業。 前述對於該等較佳實施例的說明係用於令讀者了解 本發明，而非用於限制本發明以精確型式，且熟習本技 術者可在本發明的精神及觀點内對上述進行多種不同的 修改及變更。實施例的觀點係由下文中的申‘專利範圍 所定義。例如，中空管8的水平“可不限為方形 二行:;=示。該戴面可為矩形，其可能具有二者彼此 1------------^------1T------^ (请先Μ讀背而之注意事項存填寫木頁) 經濟部中央標準/JK工消费合作社印製 組張尺ίϋ视格（210 X 297公iPrinted by the Central Bureau of Standards of the Ministry of Economic Affairs and Consumer Cooperatives ^ 1 to Figure 7. Identical components will be represented by the same symbols in each circle and the last article will be listed here as a reference document. A series of permanent magnets 15 and 16 are attached to the magnetic plates 12 and 14, respectively, and the magnetic plates are respectively disposed on the front wall surface and the rear surface of the square cylindrical hollow tube 8 as shown in FIG. The magnet 16 is disposed on the magnetic plate U with a slight inclination in the horizontal direction. According to g, torsional vibration can be reduced. A square hole 8a is opened in the center of the hollow tube 8 to reduce its weight. Linear lateral roller guides 24 and 25 are provided between the both sides of the hollow tube 8 and the frame 7 to guide the displacement of the hollow tube 8. 9 As can be clearly seen in Figure 10, A cylinder 61 is provided between the plate 7e with the yoke 41 and the cylinder 2 to bear the load of the hollow pipe 8. A piston rod 63 is connected below the hollow tube by a connecting plate 65. The force for driving the hollow tube 8 will be described in detail with reference to FIG. In the figure, GCL is used to mark the symmetrical permanent magnet rows 5 and 16 horizontally to the center line. There is a resultant force D ′ on the hollow tube center line GCL by the thrust force FC generated between the row of permanent magnets 15 and the yoke 3 and the thrust force FB generated between the row of permanent magnets 16 and the magnetic concept 41. composition. With the arrangement of the linear transverse roller guides 24 and 25, the gravitational force generated by the corresponding guide surface is guided to act on the centerline GCL. 'According to this', except in the vertical direction, the force will not act on the Linear 4¾ to the roller guides 2 4 and 25. Then a lightweight hollow tube 8 can be moved in the vertical direction with high speed and good accuracy. When a rib-shaped graphite tool electrode with a bottom surface width of 1.0 mm and a length of 38 mm and a slope of 1 ° on each side surface is used on the workpiece to process a depth of the paper, the Chinese National Standard (CNS) Λ4 see the grid (public (Centimeters): Assemble, order (please read the precautions of 1Ϊ-face before filling this page) 46 92 Ο Λ7 Β7 V. Description of the invention (//) When the hole is 70mm, at this time, set the conduction time to 100 microseconds (; / S) '· and set the turn-off time to 140 microseconds, the maximum current value is set to 93A, the average gap voltage is set to 5 5 V, the no-load voltage is set to 120 volts, and the jump rate is set to 30 meters / minute, and the jump time per cycle was set to 0.24 seconds. The material properties of the workpiece can be defined by the Japanese industry standard SKD Order. Even without cleaning, its processing rate remains almost constant and the processing job is completed in minutes. The foregoing descriptions of the preferred embodiments are intended to make the reader understand the present invention, rather than to limit the present invention to precise forms, and those skilled in the art can make many different changes to the above within the spirit and perspective of the present invention. Modifications and changes. The viewpoints of the examples are defined by the following application 'Patent Scope. For example, the level of the hollow tube 8 may not be limited to two square rows:; = shown. The wearing surface may be rectangular, which may have both of them 1 ------------ ^ --- --- 1T ------ ^ (please read the precautions first and save and fill in the wooden pages) Central Standards of the Ministry of Economic Affairs / JK Industry and Consumer Cooperatives Printing Group Zhang Jilongϋ Grid (210 X 297)