422919 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（ 技術領域 本發明係關於—種偵測氣動_漏方法，特別是有關 於一種可偵測氣動閥内漏情形之方法。 技術背景： 在半導體業界中，係需輸人製程氣體至各製程反應室， 使得積體電路之製作得則貞概行。在工終全衛生之考量 下’為避免有毒/有害的危雜製減體危害作業人員安全， 目刖業界之氣體輸送系統係利用一種氣動閥(NupR〇 valve)，進行製程氣體流通控制。常用常時關閉的為 NC(Normal Close)式的氣動閥，係以通入高壓力純度低之廠 務氮氣(G-N2)或壓縮氣體(Clean Dry Air, CDA)傳輸的方式， 來控制氣動閥開關的狀態，該氣動閥開關的狀態係可用以控 制管路内流體通至製程反應室與否，在沒有高壓力純度低之 廠務氣體供輪驅動時’氣動閥的閥門維持常時關閉，不使製 程氣體在管線中流動。只有在高壓力低純度的廠務氣體進入 氣動閥内時，該廠務氣體驅動閥門使閥開啟，而使管路内之 製程流體通至製程反應室内。 請參閱圖一A所示’係為習知之半導體製程設備上氣體 輸送系統的示意圖。在組裝氣體輸送線之氣體盤上，通常一 製程氣體輸送管線10係包括一手動閥12、氣動閥16、一流量 控制器(I4 Mass Flow Controller，MFC)以及第二氣動閥(圖中 未示）。首先將製程氣體輸送管線10上之手動閥12開啟後， 便以氣動閥16内之伸縮氣門(BeUow)20來控制製程氣體A之 輸入，接著請參閱圖一B，氣動閥16係屬一業界習用的常時 ------1T (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度逋用中國國家橾隼（CNS )八4洗格（.2丨0X291^·釐） 42291 9 A7 _______B7 五、發明説明（y) 關閉之NC式氣動閥’利用其相對應之NC式電磁閥（圖中未 示)控制’當NC式電磁閥控制廠務氣體輸送管線18，使得廠 務氣體B—如廠務氮氣(G-N2)或壓縮氣體(CDA)通入氣動閥 16内’以南屋之脈衝(Pulse)方式’而驅動氣動閥16内之伸縮 氣門20始行打開，使製裎氣體得以通過，而該製程氣體之流 速量係以一流體流量控制器14來控制，之後再通過第二氣動 閥(圖中未示）’同樣以廠務氣體控制第二氣動闊之開啟，最 後製程氣體得以進入製程反應餘室(Chamber)内參與製程。 因製程氣體A流往製程反應室’需由氣動閥16來控制， 但由於氣動閥經多次使用並以高壓驅動，或是製造過程有缺 陷，將會導致具彈性元件而可伸縮之氣室20有破裂或乾損之 現象’以致氣動閥發生廠務氣體直接洩漏至製程氣體輸送管 線之情形’如圖一B中之箭頭B’所示。因薇務氣體之純度低， 係含有如氧氣(eg、水氣(民0)或雜質等，當氣動閥如發生 廠務鐵1體》贫漏之狀況，將造成要求南純度之製程氣體線上的 污染，使後續的製程產生微粒(particle)、品質受損等問題。 而習用偵測氣體洩漏之情形，係利用氦氣偵測器(He_ detector)來偵測，其雖可偵測到有無自大氣至管路製程氣體 洩漏之情形，但因氣動閥發生廠務氣體直接洩漏至製程氣體 輸送管線备内漏之情形，不為經大氣之外漏，且該氣動閥亦 需以高壓氣體來驅動，所以一般氦氣偵測器無法驅動氣動 閥’而直接量測廠務氮氣或壓縮氣體管線經氣動閥内漏之情 形。 本紙張尺度適用中國國家棣準（CNS ) A4規格（210X2$公釐） f請先閲讀背面之注意事項再填寫本頁} -. 經濟部智慧財產局員工消費合作社印製 422919 A7 B7 發明説明（〉） 目前一般業界偵測廠務氣體内漏之情形，係侷限在氣體 官路上某一特定氣動閥，在其無動作的靜態常時關閉狀態 下’檢查製程反應驗室(Chamber)内壓力是否上升，以判斷 廠務氣體之内漏情形，但對氣動閥在高壓力低純度廠務氣體 驅動而使閥門開啟之狀態下，薇務氣體内漏之情形並無法偵 測。另以直接更換某一可能内漏之閥件，但以目前的產業界 手法，因氣體盤面結構複雜，拆卸、更換閥件不但困難且危 險，此為最後之手段，但同樣不理想，而且若是更換到正常 之閥件，徒然增加成本，此為競爭激烈之半導體業界所不願 見到之事。所以發展設計出一個可偵測氣動閥中内漏之洩漏 偵測系統’用來偵測是否有純度低之廠務氮氣洩漏至要求高 純度之製程氣體，以避免後續製程產生微粒的問題，則是必 要且刻不容緩的。 有鑑於上述習用技術之缺失，本發明人乃提出一種偵測 氣動閥洩漏方法，主要係將氣動閥連接一氣動閥洩漏偵測裝 置’以偵測是否有廠務氣體經氣動閥洩漏至製程氣體，可以 有效解決製程氣體線上污染，致後續製程產生微粒等問題。 發明之簡要說明： 本發明之主要目的在於提供一種偵測氣動閥洩漏之方 法’其係科用一氣動閥洩漏偵測裝置，由廠務氣體流速可判 斷是否有内漏發生。 本發明之另一目的在於提供一種氣動閥洩漏偵測裝置， 其主要係包括連接一起之一流體流量偵測器以及一記錄器， 本紙張尺度適用中國國家榡準（CNS) A4規格（2I0x29^公襲） (請先閲讀背面之注項再填寫本頁) ' 經濟部智慧財產局員工消費合作社印製 422919 A7 五、發明説明（十)— ''— - 該氣動閥汽漏债測裝置之兩端各包含一管件，依所值測記錄 之流體流速，可判斷是否有内漏之情形。 為連上述之目的’本發明係提供一種偵測氣動間汽漏之 裝置’主要係設有連接-起之一流體流量偵測器⑽舰fi〇w Meter，MFM)以及-記錄n(Rec()rder)，該氣動閥茂漏摘測裝 置之兩端各包含-管件，該管件係為柔軟可f #(Flex竭之 塑膠材料所製成’並可輕易將偵測氣動_漏之裝置與待測 之氣動閥裝置連接上，且不會影響製程氣體正常運作以及發 生危害作業人員安全。 待製程氣體輸送管線上之手動閥開啟後，首先將本發 明之氣動閥浪漏偵測裝置以其兩端之管件接上一廠務氣體 輸送管線’再由電磁閥控制通入廠務氣體，如薇務氣氣或 壓縮空氣’啟動氣動閥裝置，使製程氣體得以通行；以該 氣動閥洩漏偵測裝置偵測及記錄該廠務氣體質量 所述記錄器所記載之數據判斷廠務氣體是否有内漏之情 形；卸下該氣動閥賴侧裝置，再將該氣動閥浪漏偵測 裝置以其兩端之該管件接上另一廠務氣體輸送管線，摘測 及a己錄該薇務氣體質量流速；重複如此步驟，完成所需檢 測之所有廠務氣體輸送管線是否經氣動閥内漏之製程氣體 輸送管線。- 本發明與習知技藝之最大不同處在於，該氣動閥浪漏 憤測裝置可作如同聽剌之診斷功能(DiagnGstie)，在製程 氣體之輸送過程中’即可_所述該薇務氣體於氣動闕之 内漏情形’而不必如同習知需在靜態之狀況下俄測，不會 本紙張尺度適用中國國豕樣準（CNS ) A4说格（210_〆29^公董） (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 42 291 9 A7 五、發明说明（f ) 經濟部智慧財產局員工消費合作社印製 妨礙製程:敢可以其兩端之管件輕易接切複 Ξ二廠務氣體輸送_内漏偵測’並輕ΐ自 為使胃審查委員對於本發明之目的、特徵及 有更進—步之認識與瞭解，舰合圖式詳細酬如后二’ 圖式之簡要說明： 圖-Α為習知半導體製程設備上氣體輸送系統未通入廠 務氣體之示意圖。 圖一 B為習知半導體製程設備上氣體輸送系統通入廠務 氣體之示意圖。 圖二為本發明較佳實施例之一種偵測氣動閥洩漏方法與 裝置之示意圖。 圖三為本發明較佳實施例中之原理依據，其繪示運作正 常之氣動閥。 圖四為本發明較佳實施例中之原理依據，其繪示運作不 正常之氣動閥。 圖號說明： 1〇-製程氣體輸送管線 ϋ手動閥 流體流量控制器 Μ-氣動閥 18-廠務氣體輸送管線 2α伸縮氣門 WO-氣動閥洩漏偵測裝置 能 (請先閱讀背面之注意事項再填寫本頁)422919 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (Technical Field The present invention relates to a method for detecting a pneumatic leak, in particular, a method for detecting a leak in a pneumatic valve. Technology Background: In the semiconductor industry, it is necessary to input human process gas to each process reaction chamber, so that the integrated circuit can be produced in an orderly manner. Under the consideration of complete hygiene at the end of work, 'to avoid toxic / harmful hazardous system reduction Endangering the safety of workers. The gas delivery system in the industry uses a pneumatic valve (NupRovalve) to control the process gas flow. The normally closed NC (Normal Close) pneumatic valve is used to pass high pressure. Low-purity factory nitrogen (G-N2) or compressed dry air (CDA) transmission mode to control the state of the pneumatic valve switch. The state of the pneumatic valve switch can be used to control the flow of fluid in the pipeline to the process. The reaction chamber or not, when there is no high-pressure and low-purity factory gas for wheel drive, the valve of the pneumatic valve is kept closed constantly, so that the process gas does not flow in the pipeline. Only When high-pressure low-purity factory gas enters the pneumatic valve, the factory gas drives the valve to open the valve, so that the process fluid in the pipeline passes into the process reaction chamber. Please refer to Figure 1A. Schematic diagram of the gas delivery system on a semiconductor process equipment. On the gas tray of an assembly gas delivery line, usually a process gas delivery line 10 includes a manual valve 12, a pneumatic valve 16, and a flow controller (I4 Mass Flow Controller, MFC). And the second pneumatic valve (not shown). After opening the manual valve 12 on the process gas delivery line 10, the telescopic valve (BeUow) 20 in the pneumatic valve 16 is used to control the input of the process gas A, then please Refer to Figure 1B. Pneumatic valve 16 is a common practice in the industry. -1T (Please read the precautions on the back before filling out this page.) This paper size uses China National Standard (CNS) 8-4 washing Grid (.2 丨 0X291 ^ · cent) 42291 9 A7 _______B7 V. Description of the invention (y) The closed NC pneumatic valve 'uses its corresponding NC solenoid valve (not shown) to control' when the NC solenoid valve Control of factory gas transmission lines 18 So that factory service gas B—such as factory service nitrogen (G-N2) or compressed gas (CDA) —passes into the pneumatic valve 16 'in the pulse mode of Nanwu' and drives the telescopic valve 20 in the pneumatic valve 16 The line is opened to allow the tritium gas to pass, and the flow rate of the process gas is controlled by a fluid flow controller 14, and then passed through a second pneumatic valve (not shown). When the aerodynamic valve is turned on, the final process gas can enter the process reaction chamber (Chamber) to participate in the process. Because the process gas A flows to the process reaction chamber ', it needs to be controlled by the pneumatic valve 16, but because the pneumatic valve has been used for many times and has high pressure Defective driving or manufacturing process will lead to the rupture or dry damage of the retractable air chamber 20 with elastic components. 'As a result, the factory valve gas directly leaks to the process gas transmission pipeline' in the pneumatic valve. The arrow B 'in B is shown. Because the purity of Weiwu gas is low, it contains such as oxygen (eg, water gas (min. 0) or impurities). When the pneumatic valve is in a state of leanness, it will cause the process gas line that requires South purity. Pollution, which causes problems such as particles and quality deterioration in subsequent processes. The conventional detection of gas leaks is detected using a helium detector (He_ detector), which can detect the presence or absence of The process gas leaks from the atmosphere to the pipeline, but due to the fact that the factory valve gas leaks directly to the process gas transmission pipeline internal leakage due to the pneumatic valve, it is not a leak through the atmosphere, and the pneumatic valve also needs to use high pressure gas to Driven, so the general helium detector cannot drive the pneumatic valve, and directly measure the leakage of the factory service nitrogen or compressed gas pipeline through the pneumatic valve. This paper size is applicable to China National Standard (CNS) A4 specification (210X2 $ public) F) Please read the notes on the back before filling out this page}-. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 422919 A7 B7 Invention Description (>) At present, the general industry detects the leakage of factory gas. Confined to a specific pneumatic valve on the gas official road, in its static and always closed state without action, 'check whether the pressure in the process reaction chamber (Chamber) has risen to determine the leakage of factory gas, but the pneumatic valve is in the In the state that the high-pressure and low-purity factory gas is driven to open the valve, the internal leakage of Weiwu gas cannot be detected. In addition, a valve that may leak internally is directly replaced, but in the current industrial method, due to The structure of the gas disk is complicated, and it is not only difficult and dangerous to remove and replace the valve. This is the last resort, but it is also not ideal. If it is replaced with a normal valve, it will increase the cost in vain. Therefore, we have developed a leak detection system that can detect internal leaks in pneumatic valves. It is used to detect whether there is low-purity plant nitrogen leaking to the process gas that requires high purity to avoid the production of particles in subsequent processes. In order to solve the problem, it is necessary and urgent. In view of the lack of the above-mentioned conventional technology, the inventor has proposed a method for detecting the leakage of a pneumatic valve. It is necessary to connect the pneumatic valve with a pneumatic valve leakage detection device to detect whether there is any factory service gas leaking to the process gas through the pneumatic valve, which can effectively solve the problem of contamination on the process gas line, causing particles in subsequent processes and so on. Brief description of the invention ： The main object of the present invention is to provide a method for detecting the leakage of a pneumatic valve. It uses a pneumatic valve leakage detection device, which can determine whether there is an internal leakage from the factory gas flow rate. Another object of the present invention is to provide A pneumatic valve leak detection device, which mainly includes a fluid flow detector and a recorder connected together. The paper size is applicable to China National Standard (CNS) A4 specification (2I0x29 ^ public attack) (please read the back first) Please fill in this page for the note items) 'Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 422919 A7 V. Description of the Invention (10) — ”—-The two ends of the pneumatic valve steam leakage debt testing device each contain a pipe fitting. The measured flow velocity of the recorded fluid can determine whether there is any internal leakage. In order to achieve the above-mentioned purpose, the present invention provides a device for detecting air leakage between pneumatics, which is mainly provided with a fluid flow detector, such as a fiow meter (MFM) and a record n (Rec ( ) rder), the two ends of the pneumatic valve leakage detection device contain-pipe fittings, which are made of flexible and flexible # (Flex exhausted plastic material), and can easily detect the pneumatic_leak device and The pneumatic valve device to be tested is connected without affecting the normal operation of the process gas and endangering the safety of the operator. After the manual valve on the process gas delivery pipeline is opened, the pneumatic valve wave leakage detection device of the present invention is first used to The pipe fittings at both ends are connected to a factory service gas transmission line, and then the factory service gas is controlled by the solenoid valve to pass in the factory service gas, such as Wei service gas or compressed air, to start the pneumatic valve device to allow the process gas to pass; The measuring device detects and records the data recorded by the recorder of the factory service gas quality to determine whether there is an internal leak in the factory service gas; remove the pneumatic valve side device, and then use the pneumatic valve wave leakage detection device to Deserve Connect another piece of factory service gas transmission line, take a measurement and record the mass flow rate of the Wei service gas; repeat this step to complete the required inspection of all factory service gas transmission lines through the process gas transmission line of the pneumatic valve -The biggest difference between the present invention and the conventional technique is that the pneumatic valve wave leakage detection device can be used as a diagnostic function (DiagnGstie), which can be used in the process of gas transportation. The leakage of gas in aerodynamic maggots' does not need to be tested in Russia under static conditions as it is known. It does not apply the Chinese national standard (CNS) A4 standard (210_〆29 ^ 公 董) in this paper standard (210_〆29 ^ 公 董) ( Please read the notes on the back before filling this page.) Order printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs 42 291 9 A7 V. Description of Invention (f) Printing by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs may hinder the process: The pipe fittings at both ends can be easily cut and restored. The second factory's gas transmission _internal leakage detection 'and lightly make the stomach review committee understand and understand the purpose, characteristics and further of the present invention. Detailed Remuneration is like a brief description of the second two diagrams: Figure -A is a schematic diagram of the conventional semiconductor process equipment without the gas delivery system gas flow into the factory. Figure 1B is the conventional semiconductor process equipment with the gas delivery system into the factory business Schematic diagram of gas. Fig. 2 is a schematic diagram of a method and a device for detecting a leak of a pneumatic valve according to a preferred embodiment of the present invention. Fig. 3 is a principle basis of a preferred embodiment of the present invention, which shows a normally operated pneumatic valve. The fourth is the principle basis in the preferred embodiment of the present invention, which shows the pneumatic valve that does not work properly. Explanation of the drawing number: 10-process gas delivery lineϋmanual valve fluid flow controller M-pneumatic valve 18-factory gas Transmission line 2α telescopic valve WO-pneumatic valve leak detection device can (please read the precautions on the back before filling this page)
，1T -: 本紙張从適财軸家縣（CNS ) A4^ (2|Gx2970 ) 42 29 1 9 A7 B7 五、發明説明（b ) 110-記錄器 120-流體流量偵測器 Π0-管件 發明之詳細說明： 鑑於習用技術無法有效且精準偵測氣動闕洩漏之缺失， 本發明人乃提出-種制__漏方法，主要係將氣動闕 連接一氣動閥洩漏偵測裝置，該氣動閥洩漏偵測裝置主要係 設有連接一起之一流體流量偵測器(Mass H〇w Meter，mfm) 以及一記錄器(Recorder),該氣動閥洩漏偵測裝置之兩端各 包含有一官件，該管件係為一塑膠材質，並可輕易將該偵測 氣動閥洩漏之裝置與待測之氣動閥裝置連接上。 請參閱圖二，係為本發明之偵測氣動閥洩漏方法與裝置 較佳實施例之示意圖’在組裝氣體輸送之氣體盤(圖中未示) 上之一製程氣體輸送管線1〇，主要係包括一手動閥12 '氣動 閥16、一流體流量控制器14(Mass Flow Controller，MFC)以及 第二氣動閥（圖中未示）。待手動閥12開啟(通常為開啟)以使 製程氣體A進入後’將本發明氣動閥泡漏偵測裝置1〇〇，以 其兩端之管件130接於製程氣體輸送管線18上，該氣動閥洩 漏偵測裝置100所包含之一流體流量偵測器12 0可測量氣體質 量流速’所包含之一記錄器110可記錄流體質量流速，而該 管件130係為一柔軟可彎曲(Flexible)之塑膠材料所製成；接 著以製程氣體輸送線18上之電磁閥(圖中未示)控制使廠務氣 體B—如廠務氮氣(G-N2)或壓縮氣體(CDA)進入氣動閥16 ’ 該電磁閥係為NC式安全設計，可控制廠務氣體是否輸入氣 本紙張尺度適用中國國家標準（CNS > A4規格（210父2^>釐） (請先閱讀背面之泣意事項再填寫本頁) -訂 經濟部智慧財產局員工涓費合作社印製 422919 五 、發明説明（ A7 B7 動閥16，控制其開啟、關閉；以廠務氣體高壓驅動氣動閥i6 内之伸縮氣門20，使製程氣體b得以通行，並以流體流量控 制器14控制該製程氣體B之流量。 如氣動閥4¾經長久多次使用而衰退磨損或製作不良， 可能發生不經大氣之内漏的狀況，薇務氮氣洩漏至高純度要 求之製程氣體線上，如箭頭B，所示，因此，以連接上廠務 氣體輪送線18之氣動閥洩漏偵測裝置1〇〇，測量及控制氣體 質量流速，偵測是否有洩漏至製程氣體的不正常狀況，以避 免製程氣體線上污染，後續製程產生微粒(particle)的問題。 再請參閱圖三所繪示，係本發明較佳實施例中之原理 依據’其繪示正常之氣動閥。於時間〇即了丨處，控制電磁 闕始開啟’廠務氣體B(廠務氮氣或壓縮氣體)輸入氣動閥16 , 以馬壓之脈衝(Pulse)方式驅動伸縮氣門20，使氣動閥16開 啟，此時G-N2流速上升。 接著’於時間點T2處’結束氣動閥比開啟機能，此時 測量廠務氣體B流速係回至既定值Q。而後之時間丁3，測量 廠務氣體B流速一直在靜止狀態。由此記錄廠務氣體B之流 速’可偵知所偵測之氣動閥16未發生内漏之情形。 再請參閱圖四所繪示，係本發明較佳實施例中之原理 依據’其繪示不正常之氣動閥。於時間〇mT1處，控制電 磁閥始開啟，廠務氣體B輸入氣動閥16，以高壓之脈衝(Pulse) 方式驅動伸縮氣門2〇，使氣動閥16開啟，此時廠務氣體B流 速上升。 本紙張尺度速用中國國家標準（CNS ) A4規格（210X25^公董） (請先閱讀背面之注意事項再填寫本頁) ，ve 經濟部智慧財產局員工消費合作社印製 A7 ^22919 ______B7___ 五、發明説明（& ) 接著’於時間點T2處，結束氣動閥16開啟機能，然， 此時測量廠務氣體B流速未回至既定值〇，而有一段時間即 未處在靜止狀態，之後廠務氣體B之流速才於時間點T3處在 靜止狀態。由此偵測記錄之廠務氣體B流速，可得知所測知 氣動閥16發生内漏情況，而達到所述偵測氣動闊内漏之目 的。 偵測完該氣動閥16的内漏情形之後，將該氣動閥洩漏裝 置100自廠務氣體輸送線18上卸下，再將該氣動閥洩漏裝置 100以管件130接上戶斤待測之另一廠務氣體輸送線，檢測下一 氣動閥之内瀉情形；重複如此步驟，直至檢測完所有欲測之 氣動閥裝置。 綜上所述，習用偵測裝置只能偵測大氣洩漏之外漏的 發生’並不能於氣動閥動作開啟時’對廠務氣體洩漏至製程 氣體進行偵測，而本發明與習知最大不同點在於可完全解決 習用無法偵測内漏的問題，並可輕易連接於複雜組裝之氣體 輸送線上，及自該氣體輸送線體線上輕易卸下，達到如同聽 診器準確且方便之診斷功能(Diagnostic)，而充份顯示出本發 明之目的及功效上均深富實施之進步性，可解決習知長久所 不能解決之問題，極具產業之利用價值，且為目前業界所未 使用之新發明’完全符合發明專利之要件，爰依法提出申請。 唯以上所述者’僅為本發明之較佳實施例而已，當不 能以之限定本發明所實施之範圍。即大凡依本發明申請專利 範圍所作之均等變化與修飾，皆應仍屬於本發明專利涵蓋之 本紙張尺度適用中國國家標準（CMS ) A4说格（210X2导7公釐） f請先閲讀背面之注意事項再填寫本頁}, 1T-: This paper is from Shicai County (CNS) A4 ^ (2 | Gx2970) 42 29 1 9 A7 B7 V. Description of the invention (b) 110-Recorder 120-Fluid flow detector Π0-Pipe fitting invention Detailed description: In view of the fact that conventional technology cannot effectively and accurately detect the lack of pneumatic radon leakage, the inventor has proposed a method of making leaks, which is mainly connected to a pneumatic valve leakage detection device, which leaks. The detection device is mainly provided with a fluid flow detector (Mfm) and a recorder connected to each other, and two ends of the pneumatic valve leakage detection device each include an official piece, the The pipe is made of plastic material, and the device for detecting the leakage of the pneumatic valve can be easily connected with the pneumatic valve device to be tested. Please refer to FIG. 2, which is a schematic diagram of a preferred embodiment of a method and a device for detecting a leakage of a pneumatic valve according to the present invention, which is a process gas delivery line 10 on an assembly gas delivery gas plate (not shown), mainly It includes a manual valve 12 ', a pneumatic valve 16, a fluid flow controller 14 (Mass Flow Controller, MFC), and a second pneumatic valve (not shown). After the manual valve 12 is opened (usually open) so that the process gas A enters, the pneumatic valve bubble leak detection device 100 of the present invention is connected to the process gas delivery line 18 with the pipe fittings 130 at both ends. A fluid flow detector 120 included in the valve leak detection device 100 can measure the mass flow rate of gas. A recorder 110 included can record the mass flow rate of the fluid, and the pipe member 130 is a flexible and flexible Made of plastic material; then the solenoid valve (not shown) on the process gas delivery line 18 is used to control the factory gas B—such as factory nitrogen (G-N2) or compressed gas (CDA) into the pneumatic valve 16 ' The solenoid valve is of NC type safety design, which can control whether the factory gas is input. The paper size is applicable to the Chinese national standard (CNS > A4 specification (210 father 2 ^ > centimeter)) (Please read the weeping matters on the back before (Fill in this page)-Ordered by the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by the cooperative 422919 V. Description of the invention (A7 B7 actuates the valve 16 to control its opening and closing; the factory service gas drives the telescopic valve 20 in the pneumatic valve i6, Enables the passage of process gas b And the fluid flow controller 14 is used to control the flow rate of the process gas B. If the pneumatic valve 4¾ is worn out or made poorly after being used for a long time, there may be a situation where the air leaks through the atmosphere, and the nitrogen gas leaks to high purity requirements. On the process gas line, as shown by arrow B, the pneumatic valve leak detection device 100 connected to the factory gas delivery line 18 is used to measure and control the mass flow rate of the gas and detect whether there is any leakage to the process gas. Abnormal conditions to avoid contamination on the gas line of the process and particles in subsequent processes. Please refer to FIG. 3 for the principle of the preferred embodiment of the present invention, which shows a normal pneumatic valve. At time 丨, the control solenoid starts to open the 'factory gas B (factory nitrogen or compressed gas) input to the pneumatic valve 16, and the telescopic valve 20 is driven by the pulse pressure (Pulse) to open the pneumatic valve 16 At this time, the G-N2 flow rate rises. Then, at the time point T2, the pneumatic valve ratio opening function is ended. At this time, the measurement of the factory gas B flow rate is returned to the predetermined value Q. Then the time D3, the measurement The flow rate of factory service gas B has been at a static state. By recording the flow rate of factory service gas B ', it can be detected that there is no internal leakage in the detected pneumatic valve 16. Please refer to FIG. 4 for a comparison. The principle in the preferred embodiment is based on 'it shows an abnormal pneumatic valve. At time 0mT1, the control solenoid valve opens, and the factory service gas B is input to the pneumatic valve 16 to drive the telescopic valve 2 in a high-pressure pulse (Pulse) mode. 〇, the pneumatic valve 16 is opened, and the factory gas B flow rate is increased at this time. The paper standard is quickly used in China National Standard (CNS) A4 specification (210X25 ^ gongdong) (Please read the precautions on the back before filling this page), ve printed A7 by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ^ 22919 ______B7___ V. Description of the invention (&) Then at the time point T2, the opening function of the pneumatic valve 16 is ended. However, at this time, the flow rate of the factory gas B is not returned. To a predetermined value of 0, and for a period of time it is not in a stationary state, and then the flow rate of the plant service gas B is in a stationary state at time point T3. By detecting the recorded factory gas B flow rate, it can be known that the measured leakage of the pneumatic valve 16 has reached the purpose of detecting the pneumatic wide internal leakage. After detecting the internal leakage of the pneumatic valve 16, the pneumatic valve leakage device 100 is removed from the factory gas transmission line 18, and then the pneumatic valve leakage device 100 is connected to the household weight by pipe 130 to be tested. A factory service gas delivery line detects the diarrhea of the next pneumatic valve; repeat this step until all the pneumatic valve devices to be tested are detected. In summary, the conventional detection device can only detect the occurrence of atmospheric leakage and external leakage, and cannot detect the leakage of factory gas to the process gas when the pneumatic valve is opened. However, the present invention is most different from the conventional one. The point is that it can completely solve the problem that conventional leakage cannot be detected, and can be easily connected to a complex assembly gas transmission line, and easily removed from the gas transmission line body line, to achieve an accurate and convenient diagnostic function (Diagnostic) like a stethoscope. And it fully shows that the purpose and effect of the present invention are deeply implemented and progressive, which can solve problems that can not be solved for a long time, has great industrial use value, and is a new invention that has not been used in the industry at present. Completely in accordance with the requirements of the invention patent, apply in accordance with the law. The above-mentioned ones are only preferred embodiments of the present invention, and it should not be used to limit the scope of the present invention. That is to say, all the equal changes and modifications made according to the scope of the patent application of the present invention should still belong to the paper size covered by the patent of the present invention. Applicable to China National Standard (CMS) A4 grid (210X2 guide 7 mm) f Please read the back Note to fill out this page again}
J-1T 經濟部智慧財產局員工消費合作社印製 t 4229 彳 9 A7 __B7_五、發明説明（^ )範圍内，謹請貴審查委員明鑑，並祈惠准，是所至禱。 ----!--^----V1-- (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度逋用中國國家標準（CNS ) A4規格（210X29?昤釐）Printed by the J-1T Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs t 4229 彳 9 A7 __B7_ V. Within the scope of the description of the invention (^), I would like to ask your reviewing committee to make a clear reference and pray for your approval. ----!-^ ---- V1-- (Please read the notes on the back before filling in this page) Order the paper standard printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs and use the Chinese National Standard (CNS) A4 specifications (210X29? Centimeter)