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TW404871B - Device and method for machining transparent medium by laser - Google Patents

Device and method for machining transparent medium by laser Download PDF

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Publication number
TW404871B
TW404871B TW88113152A TW88113152A TW404871B TW 404871 B TW404871 B TW 404871B TW 88113152 A TW88113152 A TW 88113152A TW 88113152 A TW88113152 A TW 88113152A TW 404871 B TW404871 B TW 404871B
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Taiwan
Prior art keywords
laser
laser beam
transparent medium
support
processing
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TW88113152A
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Chinese (zh)
Inventor
Tae-Kyung Yoo
Jun-Ho Jang
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Lg Electronics Inc
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Priority to TW88113152A priority Critical patent/TW404871B/en
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Publication of TW404871B publication Critical patent/TW404871B/en

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  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

Transparent medium having a high hardness and being poor in light absorption is cut or put script of characters or figures by a laser beam, the method including the steps of forming a support of a medium which is a good absorber of a laser beam, and placing the transparent medium on the support and focusing the laser beam onto the support through the transparent medium while the transparent medium and the laser beam are made a relative movement thereby machining the transparent medium, whereby permitting the laser beam to cut or scribe character of figure in a transparent medium.

Description

_^Π48ΐ1 五 '發明說明(1) 發明背景 發明領域 本發明之發明領域係有關於用於加工一透明介質的裝-置及方法,尤其是由雷射加工透明介質的裝置及方法,其 中透明介質的硬度相當高而光的吸收性則相當低,由雷射 束切割該透明介質或將文字或圖形描繪在該透明介質上。 相關技術之背景說明 由玻璃,藍寶石,碳化矽之類的具高硬度且透明的介 質已廣泛地加以應用,如應用在多種窗口,光裝置, LCD(液晶顯示器),PDP(電漿顯示面板),及需要高防蝕能 力的微調儀器中。而且,如藍寶石及碳化矽之類的材料已· 廣泛地作為光裝置的基體材料,如可見光(紅,綠,藍等)_ 發光二極體,及電子裝置,如HBT(異質雙載子電晶體), 及FET(場效電晶體)。因此,可簡便切割這些材料,或者 是描繪文字或圖形於這些材料上的加工技術在工業上具有 相當大的影響。高硬度的材料可接受加工處理或光處理。 在機械加工中,使用如鑽石尖端或鑽石葉片之比工作件還 要硬的切割工具。而且在光加工中,使用如雷射束之光的 熱能。 下文將說明加工一透明介質的相關技術及方法,請參_ ^ Π48ΐ1 5 'Description of the invention (1) Background of the invention The field of invention of the present invention relates to a device and method for processing a transparent medium, especially a device and method for processing a transparent medium by laser, wherein the transparent The hardness of the medium is relatively high and the light absorption is relatively low. The transparent medium is cut by a laser beam or text or graphics are drawn on the transparent medium. Background of related technology Description High-hardness and transparent media such as glass, sapphire, and silicon carbide have been widely used, such as in various windows, light devices, LCD (liquid crystal display), and PDP (plasma display panel). , And fine-tuning instruments that require high corrosion resistance. In addition, materials such as sapphire and silicon carbide have been widely used as substrate materials for optical devices, such as visible light (red, green, blue, etc.) _ light emitting diodes, and electronic devices such as HBT Crystal), and FET (field effect transistor). Therefore, the processing technology that can easily cut these materials, or draw text or graphics on these materials, has a considerable industrial impact. High hardness materials can be processed or light treated. In machining, cutting tools such as diamond tips or diamond blades that are harder than the work piece are used. Furthermore, in optical processing, thermal energy such as the light of a laser beam is used. The following will explain the related technologies and methods for processing a transparent medium, please refer to

五、發明說明(2「404671 ------- 考Z圖。圖1示使用習知技術之鑽石尖切割一玻璃基體的 不意圈,且圖2示相關技術鑽石葉片切割玻璃基體的示竟 圖。 〜 , 現在請參考圖1,在使用相關技術之鑽石尖端切割_ · 透明介質中,一如具有高硬度的玻璃板1之工作件應用鑽 石尖端2加以描繪,以在玻璃板丨上製造到痕3,且將—機 械應熱作用在其上方,以將玻璃板丨沿刮痕3割開或兩工作 件0 以及’現在請參考圖2,在使用相關技術之鑽石葉片 切割透明介質中,高速度轉動一碟形之鑽石葉片,及_玻-璃板5 ’ 一工作件以移動方式抵住鑽石葉片4以沿切割線磨) 蝕玻璃板5 ’因此切割玻璃板5。此時,因為高速轉動的鑽 石葉片將切割出玻璃等的微細粒子,因此使用如喷嘴喷灌 如水或油之類的液體於切割部位,以防止粉末飛揚。 . 圖3示應用二氧化碳雷射切割玻璃板的方式,而圖4則 顯示另外使用一補充切片及氣頂出喷嘴於二氧化碳雷射' 割玻璃板的作業中。 77 現在請參考圖3 ’在使用雷射時,來自雷射8的雷射束 9由透鏡1 〇聚焦在工作件11中,而移動工作件11以沿切割 線融化工作件11。雷射8可提供一雷射束,依據工作件u 介質的性質,此雷射束的波長可為工作件11吸收。此時, 可應用在透明介質上的補充裝置處理該透明介質,該裝置〜 如具有良好導線性而沿切割線配置的補充切片1 3,以設定 放熱方向’且使得在任意方向中介質的裂縫達到最小,及 五、發明說明⑶ 4〇4871 _____ 一微喷嘴14可將氣體吹向 下降。 割邛位以使得蝕化材料的溫度 因為相關技術中的透明 地考慮到工作件的特性及經 的加工方法之使用須適當、 方法的優點/缺點時,需要 ’在不同領域中考量不同 但是,用於加工透明'^好的工作能力及成本。 具有下列問題。 相關技術中的裝置及方法 第一,該方法為最簡單 用相關技術中的鑽石尖 早先使用的方法, 應力作用在工作件上以;:ς:件上產生刮痕,且= …展,以:::為二,此已 使將工作件/刀割,也可以使用 私,人手切割一線,且 其困難點為將工作件一分為二僑進行此作業,但是 得沿刮痕產生破裂相當因i y尤ί f因為到痕不夠深r使 時,工作件需要切割到疋某,,果介質為藍寶石 該厚度大於所允許的範圍時(在光裝眘〜厚度以下;如果 ::其範圍為100心),使用透明以電子裝置的例子 繪後更難使其破裂。為了得到適當薄、咬度之故,在描 之前進行一項複雜及小心的光研作業厚度,需要在破裂 致彎曲,且難使其破裂開。 、。而且,薄厚度可導 第二,當如玻璃板之具有高硬度 加以切割時,必需周期性地更換鑽石尖^作件由鑽石尖端 加額外的成本,尤其是在描繪及破裂3二此操作導致增 第三,相關技術之加工方法具有本相當高。 7割上的困難點,其V. Description of the invention (2 "404671 ------- Test Z diagram. Figure 1 shows the unintended circle of a glass substrate cut with a diamond tip of a conventional technology, and Figure 2 shows a diagram of a related technology diamond blade cut glass substrate Actually, please refer to Fig. 1. In the cutting of diamond tips using related technology, · In transparent media, the work piece of glass plate 1 with high hardness should be drawn with diamond tip 2 to be drawn on the glass plate. Manufacture to mark 3 and apply—mechanical heat should be applied to it to cut the glass plate 丨 scratch 3 or two work pieces 0 and 'now refer to FIG. 2 and use the related technology diamond blade to cut the transparent medium At a medium and high speed, a disc-shaped diamond blade is rotated, and _ glass-glass plate 5 ′ a work piece moves against the diamond blade 4 for grinding along the cutting line) etch the glass plate 5 ′ and therefore cut the glass plate 5. At this time Because the diamond blades that rotate at high speed will cut out fine particles such as glass, a nozzle such as water or oil is used to spray the cutting site to prevent the powder from flying. Figure 3 shows the method of cutting a glass plate using a carbon dioxide laser. Figure 4 shows the use of a supplemental slice and a gas ejection nozzle for carbon dioxide laser cutting of glass panels. 77 Now refer to Figure 3 'When using a laser, the laser beam 9 from laser 8 is used. The lens 10 is focused on the work piece 11 and the work piece 11 is moved to melt the work piece 11 along the cutting line. The laser 8 can provide a laser beam. According to the properties of the work piece u medium, the wavelength of this laser beam can be It is absorbed by the work piece 11. At this time, a supplementary device on the transparent medium may be used to process the transparent medium, such as a supplementary slice 1 3 having good conductivity and arranged along the cutting line to set the heat radiation direction 'and make the The cracks in the medium are minimized in any direction, and V. Description of the invention ⑶ 4487871 _____ A micro-nozzle 14 can blow the gas downward. Cut off the position so that the temperature of the etched material is considered transparently in the related technology. The characteristics of the parts and the use of the processing methods must be appropriate, and the advantages / disadvantages of the methods need to be 'considered differently in different fields, but used for processing transparency'. Good work ability and cost. The following questions: The device and method in the related art are the first. This method is the simplest method used earlier by the diamond tip in the related technology, and the stress acts on the work piece;: ς: scratches on the piece, and =… Show ::: as the second, this has made the work piece / knife cut, you can also use a private, manual cutting, and the difficulty is to divide the work piece into two overseas workers to perform this operation, but it must be scratched The breakage is quite due to the fact that when the mark is not deep enough, the work piece needs to be cut to 疋, if the medium is sapphire and the thickness is greater than the allowable range (in the case of light installation, the thickness is less than the thickness; if :: Its range is 100 hearts), it is more difficult to break it after drawing an example of using an electronic device with transparency. In order to obtain a proper thickness and bite, a complicated and careful light grinding operation is performed before the drawing, and it needs to be broken. It is bent and difficult to crack. . Moreover, the thin thickness can lead to the second, when the glass plate has high hardness for cutting, the diamond tip must be replaced periodically. The diamond tip adds extra cost, especially when drawing and breaking. Thirdly, the processing method of the related technology has a relatively high cost. 7 Difficulties on cutting, its

第6頁 m 五、發明說明(4) --- 切割出一曲線,而非直線,如在傳統的機工方法中一般, 速度相當慢,且不適於在切割板外描繪文字或圖形。以 及,有—項不方便處為工作件或裝置必需沿一晶體方向對 齊’且必需決定描繪及破裂的方向。 · 第四’雖然使用鑽石葉片的相關技術之方法可切割相 备ΐ的广質’但是錢石葉片對具有不良切割表面的工作件 而& ’部導致實際上的破壞,且因為葉另的厚度無法減少 在某一限制之下’工作件材料的耗損多於鑽石葉片的厚 度、導致產量相當低(即每單位面積中晶片的數目),且此 方法很難應用於微細切割時,而且,使用鑽石葉片之相關 =術的方法其切割表面非常慢,而生產董相當低且在工 t置附近將產生飛塵而導致環境污染,因此需要如圖2 一般應用噴嘴7灑水。 度,或者是,如圖4路- π π的溫度枨迎私丨以皿 置於切割線上具:良所二,導可二隨使用補充裝i,如具有 向,而使得在任意方向補充切片以設定放熱之方 =噴嘴以將氣體吹向切割部i,=痕達到最小,且具有一 降° 而使得融化材料溫度下 沐ί,雖然具有良好被吸收性的雷射束進行切割之方 部二需要的型式切割工作件,因為由於室溫中由局 率相i=件中產生隨機裂痕,所以切割失敗的機 度^是在:L時所可持續工作件的溫度㈣軟化溫 不’可伴隨使用補充裝置,如具有 ί導性的站+. W iL - 所以二氧代 體雷ΐ大部份在切割坡璃板φ 雷射很難聚焦在小於數百微米:f中使 _ v 1^域中Page 6 m 5. Description of the invention (4) --- Cut a curve instead of a straight line, as in the traditional mechanical method, the speed is quite slow, and it is not suitable for drawing text or graphics outside the cutting board. And, the inconvenience is that the work piece or device must be aligned along a crystal direction 'and the direction of drawing and breaking must be determined. · Fourth "Although the method of using the related technology of diamond blades can cut a wide range of relative quality", the money stone blade & 'part caused actual damage to the work piece with poor cutting surface, and The thickness cannot be reduced under a certain limit. 'The work piece material consumes more than the thickness of the diamond blade, resulting in a very low yield (ie, the number of wafers per unit area), and this method is difficult to apply to micro-cutting, and, The method of using the diamond blade-related method has a very slow cutting surface, and the production director is relatively low and flying dust will be generated near the work site, resulting in environmental pollution. Therefore, the nozzle 7 is generally used as shown in FIG. 2 to sprinkle water. Degrees, or, as shown in Figure 4-temperature of π π 枨 welcome private 丨 placed on the cutting line with a dish: Liang Suo II, Gui Ke II with the supplementary device i, if it has a direction, so that slices can be supplemented in any direction Let's set the exothermic square = nozzle to blow the gas to the cutting part i, = the mark is minimized, and it has a drop of ° to make the temperature of the melting material, although the square part of the laser beam with good absorption is cut Second, the required type of cutting work piece, because the random phase cracks are generated in the piece by the local rate phase i = at room temperature, so the chance of cutting failure is at the temperature of the work piece that is sustainable at L. Softening temperature is not acceptable. Accompanying the use of supplementary devices, such as a conductive station +. W iL-so most of the dioxo lasers are difficult to focus on cutting glass plates φ lasers focus on less than several hundred microns: f makes _ v 1 ^ Domain

第7頁 五、發明說明(5)Page 7 V. Description of Invention (5)

4MSTT 氣體雷射在微切割時會受限。 使用的雷射必須無誤地被工 作件介質充分吸收’呀為工作件介質充分吸收的雷射必需 另外增加以切割透明介質’甚至在小尺寸的可見光範圍或 近紅外線範圍内的小尺寸固態雷射也有必要,在工業上經-常使用此類型的雷射。 發明概述 因此’本發明係相關於由雷射加工透明介質的裝置及 方法’此裝置及方法可解決在相關技術上產生之限制的缺 點所導致的一或多項問題。 本發明的目的係提供一種由雷射加工一透明介質的裝 置及方法’其允許切割透明介質或將文字或圖形描繪在透、 明介質上,透明介質如玻璃,藍寶石或Sic等,或者是基 於可見光或紅外線範圍之固態雷射形成的不同介質,此 -型的雷射經常在工業上使用。 在下文中將說明本發明的特徵及優點,此說明應可了 中,或者是可由實際學習本發明而加以了解◊由文 他的缺j !申請專利範圍及附圖可得到本發明的目的及其 為了達到本發明之目 提供一種由一雷射加工透 構’其材料對於雷射的吸 的的這些及其他的優點 明介質的裝置,包含: 收性優於該透明介質, ,本發明 支撐件機 此支携·件4MSTT gas lasers are limited during micro-cutting. The laser used must be fully absorbed by the work piece medium without error. Yeah, the laser that is fully absorbed by the work piece medium must be additionally added to cut the transparent medium. Even the small-size solid-state laser in the small visible light range or near infrared range. It is also necessary to use this type of laser in industry. SUMMARY OF THE INVENTION Therefore, the present invention relates to an apparatus and method for processing a transparent medium by laser. This apparatus and method can solve one or more problems caused by the shortcomings of the limitation caused in the related art. The object of the present invention is to provide a device and method for processing a transparent medium by laser, which allows cutting of transparent medium or drawing text or graphics on transparent and transparent medium, such as glass, sapphire, or Sic, etc., or based on Different types of medium formed by solid-state lasers in the visible or infrared range. This type of laser is often used in industry. In the following, the features and advantages of the present invention will be described. This description should be acceptable, or it can be understood by actually learning the present invention. The reasons for the invention and its scope can be obtained by applying for the scope of the patent and the drawings. In order to achieve the purpose of the present invention, a device for processing these and other advantages of a laser by a laser processing structure whose material absorbs the laser is provided. The device includes: a better yield than the transparent medium, and a support member of the present invention. Machine support

五、發明說明⑹ 404871 係用於支撐透明介質;雷射束產生機構,用於 提供雷射束予支撐件機構;以及移動用於 :: 件機構或雷射束。 用於移動支撐 在本發明的另一設計理念中,本發明 雷射加工一透明介皙的方味 ^ . 、種應用一- 一 ^从逸月"質的方法,該方法包含下列步驟:形成 在ίϊ:上ΐίΓ 牛的材料為優良之雷射束吸收體;以及 =而透明介質與雷射束之間進行相對移動,以分開薄 須了解上述之說明係用於熟習本技術者可了解本發 明’而非在限制由申請專利範圍所定義的本發明。λ 圖式之簡單說明 由下文中的說明可更進一步了解本發明之特徵及優 點’閱讀時並請參考附圖。 各圖中 圖1為使用相關技術之鑽石尖端切割玻璃基體的示意 圖; 圖2示使用相關技術之鑽石葉片切割玻璃基體的示意 圖; 圖3示應用二氧化碳雷射切割玻璃板的示意圖; 囷4示另外使用一補充切片及氣體頂出喷嘴以應用一 氧*化碳雷射切割玻璃板的示意圖;V. Description of the Invention ⑹ 404871 is used to support transparent media; a laser beam generating mechanism is used to provide a laser beam to a support mechanism; and a movement is used to: a mechanism or a laser beam. For mobile support In another design concept of the present invention, the laser of the present invention processes a transparent and transparent square flavor ^. One kind of application-a ^ considerable quality method, the method includes the following steps: The material formed on the ϊ: 上 ΐίΓ cow is an excellent laser beam absorber; and the relative movement between the transparent medium and the laser beam to separate the thin beads must be understood. The above description is intended for those skilled in the art to understand. The invention is not intended to limit the invention as defined by the scope of the patent application. Brief description of the λ scheme The features and advantages of the present invention can be further understood from the following description 'When reading, please refer to the drawings. In each figure, FIG. 1 is a schematic diagram of cutting a glass substrate using a diamond tip of the related technology; FIG. 2 is a schematic diagram of cutting a glass substrate using a diamond blade of the related technology; FIG. 3 is a schematic diagram of cutting a glass plate by using a carbon dioxide laser; Schematic diagram of using a supplemental slice and gas ejection nozzle to apply an oxygenated carbon laser to cut a glass plate;

第9頁 五、發明說明(7) 圖5示依據i〇i8日n 一較佳實施例,應用雷射Page 9 V. Description of the invention (7) Fig. 5 shows a preferred embodiment according to i0i8n using laser

戚《II利咅妨女裝在支撐件上之透明工作件(圖中的 圈圈為刻意放大部位); J f ΐτ本發明第一較佳實施例中,在雷射束固定聚隹 時’移動工作件; 疋\焦 圖7示本發明第一實施例中,由兩個 聚焦之雷射束而切割工作件的視圖; 的鏡面反射 圖8為依據本發明之第二較佳實施例,應 之鏡面反射之聚焦雷射束,而將一圖开> 描緣於兩轉動 視圖; w什上的 圖9示依據本發明第三較佳實施例中一工作件 的條型式,以持續饋入到一雷射束聚焦點上; 及1〇B示由—介質如藍寶石或SiC形成之裝置 基本架構之侧視圖及,平面圖; < 装置的 = 11A及11B為依據本發明由如藍寶石或Sic形成之 的基本架構之侧視圖及平面圖,其中各 域已予分開; 罝甲特疋的區 之 圖12示依據本發明之雷射加工一透明介質之方法形成 作件中,一刮痕的照片; 圖13A示從一裝置之侧邊所視之11A及11B中之照片; 片 圖1 3 β不從介質侧所視之囷丨丨a及丨丨b中之裝置的照 以及 圖13C示依據本發明與圖11A及11B所示之裝置分開之 個別裝置的照片。QI "II benefits the transparent work piece of the women's clothing on the support (the circles in the figure are deliberately enlarged parts); J f ΐτ In the first preferred embodiment of the present invention, when the laser beam is fixed at the condenser ' Moving work piece; Fig. 7 shows a view of the work piece being cut by two focused laser beams in the first embodiment of the present invention; and specular reflection of Fig. 8 is a second preferred embodiment according to the present invention, In response to the specular reflection of the focused laser beam, a picture is drawn from two rotation views; FIG. 9 above shows a strip type of a work piece according to a third preferred embodiment of the present invention, in order to continue Fed into a laser beam focusing point; and 10B shows a side view and a plan view of the basic structure of a device formed by a medium such as sapphire or SiC; < = 11A and 11B of the device according to the present invention by such as sapphire Side view and plan view of the basic structure formed by SIC or Sic, in which the fields have been separated; FIG. 12 of the area of 罝 甲 特 疋 shows a scratch on the workpiece formed by the method of laser processing a transparent medium according to the present invention. Photo; Figure 13A shows 11A viewed from the side of a device And 11B; Fig. 1 3 β Photo of the device in 丨 丨 a and 丨 丨 b not viewed from the medium side, and FIG. 13C shows the individual separated from the device shown in FIGS. 11A and 11B according to the present invention. Photo of the installation.

第10頁 五、發明說明(8) 404871 2 0 工作件 21 雷射 22 雷射束 23 反射鏡 24 雷射 2 5,2 5 ’支撐件 26 火焰 2 7 深凹槽 28 切割線 2 9,2 9 ’馬達 30及30’反射鏡 33 薄膜裝置 34 作用區 3 5 場效區 37 透明基體 38 繞圈 較佳實施例之詳細說明: 下文將詳細本發明之較佳實施例,及在附圖中說明的 例子。Page 10 V. Description of the invention (8) 404871 2 0 Work piece 21 Laser 22 Laser beam 23 Reflector 24 Laser 2 5,2 5 'Support 26 Flame 2 7 Deep groove 28 Cutting line 2 9,2 9 'Motor 30 and 30' mirror 33 Thin film device 34 Active area 3 5 Field effect area 37 Transparent substrate 38 Detailed description of the preferred embodiment of the loop: The preferred embodiment of the present invention will be described in detail below, and in the drawings Illustrated example.

第11頁Page 11

4048'U 第一實施例 τι,5不依據本發明之第一較佳實施例,安敦一读明的 一 在支撐件上,而一雷射束導向透明的工作侔^ 工#杜發月之第一實施例,當固定聚焦雷射束時,移動 工作件,且圓7示在本發明之第一較佳實施例+听移動 兩轉動之鏡面反射之聚焦雷射束切割一工作件。應用而 現在請參考圖5,依據本發明第一較佳實施例,由一 雷射加工一透明介質的裝置包含一支撐件25,此 的材料可為鋁,鐵或銅,其為雷射束的良好吸收體了可由 強雷射脈衝產生一火燄,以安裝,玻璃,藍寶石,或碳化 矽之類的工作件於其中,雷射21可持續發射雷射束U,一 反射鏡23可單方向反射雷射束,一透鏡24,用於聚焦由反 射鏡23向工作件2〇反射的雷射束。如圖6所示,如果、固定 雷射束,而支撐件25在工作件的切割方向上移動,則另外 需要一在所需要之方向上移動支撐件25的移動襄置而 且’如圖7所示,如果工作件固定’而雷射束移動的例子 中’使用尚包含用於移動雷射束的兩反射鏡3〇及3〇,,用 於反射鏡的兩馬達29’ 29’ ,用於控制馬達的控制器(圖中 沒有顯示)。可加入其他的反射鏡及驅動馬達於反射鏡 30,30’及馬達29,29’中以進行微控制之用,且如圖5所 示的反射鏡23及雷射24可加以整合,其包含用於移動反射 鏡23及雷射24的驅動機構以控制機構。4048'U First Embodiment τι, 5 Not according to the first preferred embodiment of the present invention, settled on a support, and a laser beam guides the transparent work 侔 工 # 杜 发 月 之In the first embodiment, when the focused laser beam is fixed, the work piece is moved, and the circle 7 is shown in the first preferred embodiment of the present invention + the focus laser beam reflected by two rotating mirror surfaces cuts a work piece. Application Now please refer to FIG. 5. According to a first preferred embodiment of the present invention, a device for processing a transparent medium by a laser includes a support member 25. The material of this can be aluminum, iron or copper, which is a laser beam. A good absorber can generate a flame from a strong laser pulse to install work pieces such as glass, sapphire, or silicon carbide. The laser 21 can continuously emit a laser beam U, and a reflector 23 can be unidirectional. The reflected laser beam is a lens 24 for focusing the laser beam reflected by the mirror 23 toward the work piece 20. As shown in FIG. 6, if the laser beam is fixed and the support member 25 moves in the cutting direction of the work piece, a movement of the support member 25 in the required direction is additionally required and 'as shown in FIG. 7 In the example where the work piece is fixed and the laser beam is moved, 'use two mirrors 30 and 30 for moving the laser beam, and two motors 29' 29 'for mirrors, for Controller that controls the motor (not shown). Other mirrors and driving motors can be added to the mirrors 30, 30 'and the motors 29, 29' for micro-control, and the mirror 23 and laser 24 shown in FIG. 5 can be integrated, including A driving mechanism for moving the mirror 23 and the laser 24 to control the mechanism.

第12頁 五、發明說明(ίο) 下文說明依據本發明之第一較佳實施例,由 "Ϊ048Ϊ1 雷射加 工透明介質的方法。 當將從一雷射21中發射之雷射束22經一反射鏡2 3及透' 鏡24聚焦在安裝於支撐件25之透明工作件20上時,產生—. 火焰26 ’可在支撐件25的表面上局部加熱,而加熱且溶化 與支撐件25局部接觸之工作件2〇的背面,以在背面上形成 深凹槽27。當從雷射21發射的雷射束22可由Q開關的而置 於突然振蘯或突然不振堡的狀態,如圖6所示,可由沿— 切割線28,移動支撑件25而移動工作件2〇,如圖7中所示 者,或者是由馬達2 9及2 9’驅動配置在雷射束之路徑中的-兩個反射馬達30,30’ ,而支撐件25及工作件20則固定 住,以連續沿切割線移動雷射束2〇的聚焦點,以製造上述 凹槽。此時,經考量工作件的厚度及物理性質,而調整 射束,可在整個厚度上形成凹槽,以將工作件直接分 件,因此可切割該工作件,或者是在薄膜的某一深度^ 成該凹槽,以作用機械應力,因此將工作件分成兩件。= 移動支撐件而固定雷射束的例子中,支撐件如手動移動, 或者(圖巾沒有顯示)’提供用於㈣移動 及控制經由,使得使用者可將其置於—所示位置^機構 需要切割所需要的數據輸入於控制機構,使得控制 依據輸入數據控制驅動機構’因此沿 f$ Ϊ顯同樣射束而固定支擇件時,雖KG 有顯不,但疋可棱供用於控制馬達29及29, 支 使得使用者可將其置於切割位I Η iI刺機構, J剖位置,且將切割需要的數據置Page 12 5. Description of the Invention (() The following describes a method for processing a transparent medium by " Ϊ048Ϊ1 laser according to the first preferred embodiment of the present invention. When the laser beam 22 emitted from a laser 21 is focused on a transparent work piece 20 mounted on a support member 25 via a reflector 23 and a lens 24, a flame 26 'may be produced on the support member. The surface of 25 is partially heated, and the back surface of the work piece 20 in partial contact with the support member 25 is heated and melted to form a deep groove 27 on the back surface. When the laser beam 22 emitted from the laser 21 can be placed in the state of sudden vibration or sudden vibration by the Q switch, as shown in FIG. 6, the work piece 2 can be moved by moving the support member 25 along the cutting line 28 〇, as shown in FIG. 7, or two reflection motors 30, 30 'arranged in the path of the laser beam driven by the motors 29 and 29', and the support 25 and the work 20 are fixed Then, the focal point of the laser beam 20 is continuously moved along the cutting line to make the above groove. At this time, after considering the thickness and physical properties of the work piece, and adjusting the beam, a groove can be formed in the entire thickness to directly divide the work piece, so the work piece can be cut or a certain depth of the film ^ The groove is formed to apply mechanical stress, so the work piece is divided into two pieces. = In the example of moving the support and fixing the laser beam, the support is manually moved, or (not shown in the figure) 'provides for ㈣ movement and control through, so that the user can place it in the position shown-mechanism The data required for cutting is input to the control mechanism, so that the control controls the drive mechanism according to the input data. Therefore, when the optional support is fixed along the same beam along f $, although KG is displayed, it can be used to control the motor. 29 and 29, the user can put it in the cutting position I Η iI puncture mechanism, J section position, and set the data required for cutting

第13胃 五、發明說明(11) 404871---— 於控制機構中’使得控制機構可依據輸入數據控制馬達, 所以沿切割驅動移動切割。 第一實施例 圖8示經由第二較佳實施例中,應用由兩個轉動鏡反 射之聚焦雷射束,將一圖形描入工作件的方式,且圖9示 依據本發明之第三實施例中,一工作件支撐件的條件型 式,以連續饋入一雷射束。 現在請參考圖8,在雷射束路徑中定位兩鏡子3〇, 3 0, _ ’且由兩馬達2 9及29’驅動兩鏡面,使得雷射束入以不1 度入射透鏡24,以改變雷射束22的聚焦位置,因此 2可切割一介質,而且可將文字及圖形描在透明及硬的 7p w* μ 要 ’如重石頭。即(雖然圊中沒有顯示),如果提供需- ^9,字或圖形予一電腦,且使得電腦可控制馬達29, . 或圖馬達驅動鏡子30, 30’ ,使得鏡子30, 30’依據文字 形的型式改變雷射束的聚焦點,則可將所需要的文 4固形> + 田在填明及硬的介質上’如硬石塊。 第二實施例 —位^時’如果在第一實施例中的支樓件25 (圖5) ’其在 介質上ί產生一火焰,一功率雷射指向該位置,而在透明 件。因此生1凹槽用於一延長的時段,可耗損大量的支撐 如圖9中所示者,在本發明的第三實施例中,The 13th stomach V. Description of the invention (11) 404871 --- In the control mechanism 'so that the control mechanism can control the motor according to the input data, so the cutting movement is moved along the cutting drive. First Embodiment FIG. 8 shows a method of drawing a figure into a work piece by using a focused laser beam reflected by two rotating mirrors in a second preferred embodiment, and FIG. 9 shows a third embodiment according to the present invention. In the example, a conditional pattern of a work piece support is used to continuously feed a laser beam. Referring now to FIG. 8, two mirrors 30, 30, _ 'are positioned in the laser beam path, and the two mirrors are driven by two motors 29 and 29', so that the laser beam enters the lens 24 at a degree of 1 degree, and Change the focus position of the laser beam 22, so 2 can cut a medium, and the text and graphics can be drawn on a transparent and hard 7p w * μ like 'heavy stones. That is (though not shown in the figure), if you need to provide-^ 9, characters or graphics to a computer, and make the computer control the motor 29,. Or figure motor drive the mirror 30, 30 ', so that the mirror 30, 30' according to the text If the shape of the laser beam changes the focal point of the laser beam, the required text can be solid-formed + on a hard and solid medium, such as a hard rock. Second Embodiment-At the same time, if the branch member 25 (Fig. 5) in the first embodiment generates a flame on the medium, a power laser is directed to the position, and the transparent member. Therefore, generating a groove for an extended period of time can consume a large amount of support. As shown in FIG. 9, in the third embodiment of the present invention,

五、發明說明(12) 4D4871 ------ 如果支撐件2 5’的型式如一薄條,則提供一在其上用於繞 支撐件25,的繞圈38,及在雷射束22聚焦處用於導引支撐 件25’广滾筒32,該支撐件25,可連續饋入。經由使用此系. 統’若能維持良好的加工品質,則可減少支撐件2 5,的' 損量。 · 由雷射測試上述用於加工一透明介質的裝置及方法, 而得到下列結果。 第一,欲切割一透明介質的例子。 提供覆在鋁板或鋼板之黑色氧化膜的支撐件,在支樓 件上序列置於3mm厚度的玻璃板,及300从m厚度的藍寶 石’對具有1·〇6 /im之振盪波長之3 0W的固態雷射進行q感 測’且聚焦到玻璃板或藍寶石上,且移動雷射或支撐件。 、结果’可觀察到沿雷射聚焦及指引的線上切割工作件(玻 璃板或藍寶石)。且,在〇,532em之雷射的例子中,使用-上述雷射的第二諧波,則在相同的狀態下有可能切割該工 作件°因此,由雷射加工透明介質的裝置及方法可應用在 一透明介質的一般切割上,且可以切割成任意型式。 第四實施例 同時,經由在如藍寶石或碳化矽的介質上形成一薄膜丨 (GaN群材料),且應用多種不同的程序,而製造一光裝置 或電子裝置,以成為一 1作件。因為如果由上述的方法分 開的話’則有可能發生多種不同的問題,下列程序則使用V. Description of the invention (12) 4D4871 ------ If the type of the support member 2 5 'is a thin strip, provide a winding 38 on which the support member 25 is wound, and a laser beam 22 The focal point is used to guide the support member 25 'and the wide roller 32, and the support member 25 can be continuously fed in. By using this system, if the good processing quality can be maintained, the amount of loss of the support members 25 can be reduced. · The above apparatus and method for processing a transparent medium were tested by laser, and the following results were obtained. First, an example of cutting a transparent medium. Provide support members covered with black oxide film on aluminum plate or steel plate, and place 3mm thickness glass plates on the supporting parts in sequence, and 300 sapphire thickness from 300 m to 30W with an oscillation wavelength of 1.06 / im The solid-state laser is q-sensed and focused on a glass plate or sapphire, and the laser or support is moved. Result: You can observe the cutting of the work piece (glass plate or sapphire) along the line where the laser focuses and guides. And, in the case of the laser of 0,532em, using the second harmonic of the above laser, it is possible to cut the work piece in the same state. Therefore, the device and method for processing a transparent medium by laser can be It is applied to the general cutting of a transparent medium and can be cut into any type. Fourth Embodiment At the same time, an optical device or an electronic device is manufactured by forming a thin film (a GaN group material) on a medium such as sapphire or silicon carbide and applying a variety of different procedures to become a one-piece piece. Because if it ’s separated by the method described above, there may be many different problems. The following procedure is used

第15頁Page 15

在裝置的微平滑分開上。 圖10A及10B為由一如藍寶 結構的侧視圖及平面圖,依據 域中分開。圖12示依據本發明 之工作件上一刮痕照片。 現在請參考圖10A及10B, 具有在透明基體37上形成的作 件25置於其上有薄膜裝置33的 因為由聚焦雷射束所產生的熱 裝置所吸收或傳遞,所以有可 壞’因此雷射束欲切割的區域 的材料以存在於透明介質37中 在將切割區域上形成該裝置, 最好可視需要去除場效區35以 槽。在將分開之區域中曝露透 一薄凹槽’且只簡單地使該基 向均裂開,因為此將衝擊到該 均裂開,也有可能,此端視裝 的深度停止在下層介質中某一 開一非常細小的區域時,對一 感測頻率及雷射的跑動速度將 示’如果在Q對應頻率為10K Hz 則雷射束的跑動速度(running 射功率為5W,則形成一瑕疵( 石及SiC形成—裝置之基體 本發明將各裝置中的特定區' 由雷射加工-透明介質形成 如果具有一薄膜裝置33,其 用區34及場效區35。在支撑 透明基體3 7。在此例子中, 會被置於支撐件25上的薄膜 能使該薄膜裝置的特性變-可在形成該裝置時沉積清潔 。因此’如圖11所示,如果 存在沉積所留下的材料時, 形成曝露透明介質37的溝 明介質37後,在基體上形成 體裂開’而非使整個厚度方 装置。即甚至如果整個厚度 置的隔離區域而定,該凹槽 區域處,以防止如果需要分 表面上產生熱衝擊。例如, 對基體產生影響。如圖1 2所 的情況下,將雷射束指向, speed)為5Omm/sec,且雷 寬40从m且深25/zm)。此意On the slightly smooth part of the device. 10A and 10B are a side view and a plan view of a structure like a sapphire, separated according to the domain. Fig. 12 shows a photo of a scratch on a work piece according to the present invention. Referring now to FIGS. 10A and 10B, a work piece 25 formed on a transparent substrate 37 is placed thereon, and a thin film device 33 is placed on it, because it is absorbed or transmitted by a heat device generated by a focused laser beam, so it can be broken. The material of the area to be cut by the laser beam is formed in the transparent medium 37 to form the device on the area to be cut. The field effect area 35 is preferably removed as required. A thin groove is exposed through the separated area and the base is simply split evenly, because it will impact the split, and it is also possible that the depth of the end of the installation depends on a certain level in the underlying medium. When opening a very small area, the speed of the laser beam will be displayed for a sensing frequency and the laser's running speed. If the corresponding frequency of Q is 10K Hz, the laser beam's running speed (running radio power is 5W, forming a Defects (stone and SiC formation-device substrate) The present invention forms specific regions in each device 'from laser processing-transparent media. If a thin film device 33 is provided, the region 34 and field effect region 35 are used. The supporting transparent substrate 3 7. In this example, the thin film that will be placed on the support 25 can change the characteristics of the thin film device-it can be deposited clean when the device is formed. So 'as shown in Figure 11, if there is a deposit left behind In the case of materials, after forming the grooved medium 37 exposing the transparent medium 37, a body is formed on the substrate to rupture, rather than the entire thickness of the device. That is, even if the entire thickness of the isolation area is determined, the groove area is Prevent if needed Thermal shock is generated on the surface. For example, it has an impact on the substrate. In the case shown in Figure 12, the laser beam is pointed at a speed of 50 mm / sec, and the width of the laser is 40 m from the depth of 25 / zm). This intention

第16頁 404W1 五、發明說明(14) 謂著隨時有可能破裂《在依據上述程序破裂後,可量測裝 置的性能,以在裝置分開前’該裝置之性能沒有改變之 處。即沒有實質衝擊之故。 圖13A示圖11A及11B中之裝置的照片,其為從裝置侧 所視者。圖1 3 B示圖1 1 A及1 1 B之裝置的照片,係從介質侧 所視者’圖13C示依據本發明 中分開之個別裝置的照片。 雖然圖中沒有顯示,在一 切割成各別分開的裝置,而該 相當差’而且具有重複的圖樣 膜裝置的切割區域,而投射到 雷射束之間進行一相當的移動 向父錯掃猫形態的工作件中, 熱衝擊達到最小。而且在上述 受由聚焦雷射束之高熱能所產 作件。依據本發明,可冷卻聚 少熱衝擊的例子外,可調整冷 精確度。 從圖11A及11B所示之裝置 透明介質形成的多個裝置, 透明介質對雷射束的吸收性 ,可經由將一雷射束經由縳 一支撐件上,且在工作件及 量’使得聚焦的雷射束可導 如此可使得對於分開裝置的 實施例中,該支撐件易於承 生的熱破壞,此進而破壞工_ 焦點而控制熱衝擊。除了減 卻速率而達到處理工作件之 如上所 方法具有下列優點: 第 不―’在機工具有高硬度的透明介暂 ** SC & 石或碳化梦,因為支撐件由具有 如玻璃’藍賓 成,所以在吸收雷射時產生火焰 射束吸收體所开 撐件上而處理該工作件可#用φ;經由將工作件置於j 件可使用雷射束切割透明介質或本Page 16 404W1 V. Description of the invention (14) It may be broken at any time. "After breaking according to the above procedure, the performance of the device can be measured so that the performance of the device is not changed before the device is separated." That is, there is no substantial impact. Fig. 13A shows a photograph of the device in Figs. 11A and 11B, which is viewed from the device side. Fig. 13B shows photographs of the devices of Figs. 1A and 1B, as viewed from the medium side. Fig. 13C shows photographs of individual devices separated according to the present invention. Although it is not shown in the figure, one is cut into separate devices, which is rather poor, and has a cutting area with repeated pattern film devices, and a considerable movement is projected between the laser beams toward the parent to scan the cat by mistake In the shape of the work piece, the thermal shock is minimized. Moreover, the above-mentioned parts are produced by the high heat energy of the focused laser beam. According to the present invention, in addition to the case where the thermal shock can be reduced, the cooling accuracy can be adjusted. A plurality of devices formed from the transparent medium of the device shown in FIGS. 11A and 11B. The absorption of the laser beam by the transparent medium can be achieved by passing a laser beam on a support member, and focusing on the work piece and amount. The laser beam can be guided so that in the embodiment of the separating device, the support is susceptible to thermal damage, which in turn destroys the focal point and controls thermal shock. In addition to reducing the speed and achieving the above-mentioned method of processing work pieces, the above method has the following advantages: No. '' in-machine tools have high hardness and transparent media temporarily ** SC & stone or carbonized dream, because the support is made of glass with blue Therefore, when the laser beam is absorbed, a flame beam is generated on the supporting member opened by the absorber and the work piece can be treated with φ; by placing the work piece on the j piece, the laser beam can be used to cut the transparent medium or the workpiece.

第17頁 五、發明說明(15) 4〇4Β71 繪透明介質而形成圖形特徵,其中在透明介質僅吸收極少 量的雷射束。 第二,因為由雷射加工透明介質的裝置及方法簡化透 明介質(如廣泛應用的玻璃,如不同的窗戶,光裝置,液-晶及電漿顯示面板,及多種需要高度防蝕的微調儀器,如 具有廣泛應用領域的碳化矽,如光裝置的基體材料,如可 見光發光二極體或雷射上極體及電子裝置)之加工作業。 第三,因為使用一般不昂貴的固態雷射處理高硬度的 透明介質,而且不需要使用昂貴的儀器(如氣體雷射),所 以本發明中雷射加工透明介質的裝置及方法相當符合經濟 效益且可大量生產。 雖然文中已應較佳實施例說明本發明,但嫻熟本技術 者需了解可對上述由本發明之雷射加工的透明介質之裝置 及方法實施例加以更改及變更,而不偏離本發明的精神及 觀點,本發明的精神及觀點係由所附之申請專利範圍及其 對等之意義所定義。Page 17 V. Description of the invention (15) 4〇4B71 Drawing transparent media to form graphic features, in which only a very small amount of laser beams are absorbed in the transparent media. Second, because the device and method for processing the transparent medium by laser simplify the transparent medium (such as widely used glass, such as different windows, light devices, liquid crystal and plasma display panels, and many fine-tuning instruments that require high anti-corrosion, Such as silicon carbide with a wide range of applications, such as the base material of optical devices, such as visible light emitting diodes or laser upper poles and electronic devices) processing operations. Third, because a generally inexpensive solid-state laser is used to process high-hardness transparent media, and no expensive equipment (such as a gas laser) is required, the device and method for processing a transparent medium with a laser in the present invention is quite economical. And can be mass produced. Although the present invention should be explained with preferred embodiments, those skilled in the art need to understand that the above-mentioned apparatus and method embodiments of the transparent medium processed by the laser of the present invention can be modified and changed without departing from the spirit of the present invention and Viewpoints, the spirit and views of the present invention are defined by the scope of the attached patent applications and their equivalent meanings.

第18頁Page 18

Claims (1)

I 一種由雷射加工一透明介質的方法,該方沐由 列步驟: 古I含下 形成一介質支撐件,該介質為雷射束之良好吸收趙 及 將透明介質置於於支撐件上,當透明介質與雷射束相 對移動時,經該透明介質而將雷射束聚焦在支撐 此可加工該透明介質。 2. 如申請專利範圍第1項之一種由雷射加工一透明介 ^的方法,其中放置透明介質之支撐件移動,而雷射東固 弋,以加工透明介質。 3. 如申請專利範圍第1項之一種由雷射加工一透明介 質的方法’其中雷射束移動’而透明介質固定,以加工 明介質。 ^ 如申請專利範圍第1項之一種由雷射加工一透明介 I的方法,其中將雷射聚焦在支撐件上,以產生熱能,因 ,在切割透明介質時,該熱能可在與支撐件接觸的 介質中形成一凹槽。 質 得 且 質 因 •如申請專利範圍第1項之一種由雷射加工_透明介 ,方法,其中將雷射束聚焦在支撐件上以產生熱能, =與支撐件接觸的透明介質中,該熱可形成一淺凹槽, :透明介質切割時,將一機械應力作用在透明介質上。 6,如申請專利範圍第丨項之一種由雷射加工_透明介 法,其中該雷射束聚焦在該支撐件上以產生熱能, -在透明介質上描繪文字或圖形時,該熱能可在與支I A method for processing a transparent medium by laser. The method consists of the following steps: Ancient I forms a medium support, which is a good absorption of the laser beam and the transparent medium is placed on the support. When the transparent medium and the laser beam move relative to each other, the laser beam is focused on the support through the transparent medium to process the transparent medium. 2. For example, a method for processing a transparent medium by laser as described in item 1 of the scope of the patent application, wherein a support for placing a transparent medium is moved, and a laser is used to process the transparent medium. 3. A method for processing a transparent medium by laser as in item 1 of the scope of the patent application, 'where the laser beam moves' and the transparent medium is fixed to process the light medium. ^ For a method for processing a transparent substrate I by a laser, as described in item 1 of the scope of patent application, in which the laser is focused on a support to generate thermal energy, because when cutting a transparent medium, the thermal energy can be used in conjunction with the support A groove is formed in the contacting medium. Quality and quality • As described in item 1 of the scope of patent application, a method of laser processing_transparent medium, in which the laser beam is focused on a support to generate thermal energy, = in a transparent medium in contact with the support, the Heat can form a shallow groove. When cutting a transparent medium, a mechanical stress is applied to the transparent medium. 6, as described in the scope of application for a laser processing_transparent medium method, in which the laser beam is focused on the support to generate thermal energy,-when drawing text or graphics on a transparent medium, the thermal energy can be With support # 19頁 六、申請專利範圍41 樓件接觸的透明介質中形成一凹槽。 質的申,專利範圍第1項之一種由雷射加工一透明介 持锖入糾、辛尚包含步驟為移動支撐件,使得雷射束可-符續入射一固定的聚焦點。 8. 如申請專利範圍第丨項之一種由雷射加工一透明介· # ,其中尚包含步驟為調整熱衝擊至一雷射束聚焦 之支撐件上之一部位。 9, 如申請專利範圍第1項之一種由雷射加工一透明介 質的方法,其中從一固態雷射中發射出該雷射束。 1〇’種應用一雷射加工一透明介質的方法,以分離 具有多個作用區及作用區間之場效區的薄膜裝置,該方法 包含下列步驟: 在場效區上去除一薄膜,以曝露出透明介質; 形成一支撑件’此支撐件的材料為比該透明介質更優 良之雷射束吸收體;以及 在支樓件上置放薄膜裝置,經透明介質聚焦雷射束於 支撑件上’而透明介質與雷射束之間進行相對移動,以分 離薄膜裝置。 、11.如申請專利範圍第10項之一種應用一雷射加工一 透明介質的方法,其中聚焦之雷射束以交錯之掃瞄型式入 射。 12.—種由一雷射加工透明介質的裝置,包含: 支撐件機構,其材料對於雷射的吸收性優於該透明介 質’此支撐件係用於支撐透明介質;# 19 6. Application scope 41. A groove is formed in the transparent medium in contact with the floor. Qualified application, one of the scope of the patent is processed by a laser with a transparent support, and it includes a step of moving the support, so that the laser beam can be incident on a fixed focus point. 8. For example, one of the scope of the patent application applies a laser processing of a transparent medium. #, Which further includes the step of adjusting the thermal shock to a position on the support of the laser beam focus. 9. A method for processing a transparent medium from a laser as claimed in item 1 of the scope of patent application, wherein the laser beam is emitted from a solid-state laser. A method of applying a laser to process a transparent medium to separate a thin film device having a plurality of active areas and field effect areas, the method includes the following steps: removing a thin film on the field effect area to expose Forming a support member; the material of this support member is a laser beam absorber that is better than the transparent medium; and a thin film device is placed on the branch member, and the laser beam is focused on the support member by the transparent medium 'The relative movement between the transparent medium and the laser beam is performed to separate the thin film device. 11. A method of processing a transparent medium using a laser as in item 10 of the scope of the patent application, wherein the focused laser beam is incident in a staggered scanning pattern. 12.—A device for processing a transparent medium by a laser, comprising: a support mechanism whose material is better than the transparent medium in absorbing laser light; the support is used to support the transparent medium; 第20頁 六、申請專利範~1 ' 雷射束產生機構’用於經透明介質提供雷射束予支撐 件機構;以及 移動機構,用於移動支撐件機構或雷射束。 13. 如申請專利範圍第12項之一種由一雷射加工透明 介質的裝置’其中雷射束產生機構包含: 用於提供雷射束的固態雷射;以及 一將雷射束聚焦在支撐件機構的透鏡。 14. 如申請專利範圍第〗2項之一種由一雷射加工透明 介質的裝置’其中用於移動雷射束的移動機構包含: 多個配置在一雷射束路徑中的反射鏡; 用於移動反射鏡的馬達;以及 一控制器,用於控制該馬達。 15. 如申請專利範圍第12項之一種由一雷射加工透 介質的裝置,其中用於移動該雷射束的移動機構包含: 一配置在雷射束路徑中的反射鏡; 一透鏡’用於將為反射鏡反射的雷射束聚焦到支撑件 用於移動反射鏡及透鏡的馬達;以及 —用於控制馬達的控制器。 16.如申請專利範圍第12項之一種由一 介質的裝置,其中該支撐件機構包含支揮件 持續將支撐件饋入雷射束聚焦之點上。 17·如申請專利範圍第12項之—種由一 介質的裝置,其中該支撐件機構包含: 雷射加工透明 饋入機構,以 雷射加工透明Page 20 6. Patent application scope ~ 1 The 'laser beam generating mechanism' is used to provide a laser beam to the support mechanism via a transparent medium; and a moving mechanism is used to move the support mechanism or laser beam. 13. A device for processing a transparent medium by a laser according to item 12 of the patent application, wherein the laser beam generating mechanism includes: a solid-state laser for providing a laser beam; and a laser beam focused on a support Body lens. 14. A device for processing a transparent medium by a laser according to item 2 of the scope of the patent application, wherein the moving mechanism for moving the laser beam includes: a plurality of reflectors arranged in a laser beam path; A motor for moving the mirror; and a controller for controlling the motor. 15. A device for processing a transparent medium by a laser according to item 12 of the patent application scope, wherein the moving mechanism for moving the laser beam includes: a reflector disposed in the path of the laser beam; a lens for A motor for focusing the laser beam reflected by the reflector onto a support for moving the mirror and lens; and a controller for controlling the motor. 16. A device according to item 12 of the scope of patent application, wherein the support mechanism includes a support member to continuously feed the support to a point where the laser beam is focused. 17. As in item 12 of the scope of patent application-a device with a medium, wherein the support mechanism includes: laser processing transparent feed mechanism, laser processing transparent 404871 六、申請專利範圍 一用於吸收雷射束的條狀物質; 一環繞條狀物質的繞圈; 一滚筒,用於在雷射束聚焦處導引條狀物質。 I圓國 第22頁404871 VI. Scope of patent application: a strip-shaped substance for absorbing the laser beam; a circle surrounding the strip-shaped substance; a roller for guiding the strip-shaped substance at the focus of the laser beam. I round country page 22
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