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TW370571B - A continuous process for growing diamond-like carbon film with improved adherence of the film on various substrates - Google Patents

A continuous process for growing diamond-like carbon film with improved adherence of the film on various substrates

Info

Publication number
TW370571B
TW370571B TW087117245A TW87117245A TW370571B TW 370571 B TW370571 B TW 370571B TW 087117245 A TW087117245 A TW 087117245A TW 87117245 A TW87117245 A TW 87117245A TW 370571 B TW370571 B TW 370571B
Authority
TW
Taiwan
Prior art keywords
film
diamond
carbon film
continuous process
various substrates
Prior art date
Application number
TW087117245A
Other languages
Chinese (zh)
Inventor
Min-Hsiung Hung
Wen-Jin Wu
Original Assignee
Nat Science Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Council filed Critical Nat Science Council
Priority to TW087117245A priority Critical patent/TW370571B/en
Application granted granted Critical
Publication of TW370571B publication Critical patent/TW370571B/en

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Abstract

The invention provides a continuous process for depositing a diamond-like carbon (DLC) film on a substrate. A Si-C interlayer with a gradient composition is first deposited on the substrate and a diamond-like carbon film (or silicon-containing diamond-like carbon film) is then deposited on the interlayer. With this low stress interlayer the diamond-like carbon film is successfully deposited on various substrates such as silicon water, glass, KBr, Ti-6A1-4V, SKD61 and SKH9 etc. The Si-C interlayer and the diamond-like carbon film (or silicon-containing diamond-like carbon film) are preferably grown by a plasma-enhanced chemical vapor deposition (PECVD).
TW087117245A 1998-10-19 1998-10-19 A continuous process for growing diamond-like carbon film with improved adherence of the film on various substrates TW370571B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087117245A TW370571B (en) 1998-10-19 1998-10-19 A continuous process for growing diamond-like carbon film with improved adherence of the film on various substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087117245A TW370571B (en) 1998-10-19 1998-10-19 A continuous process for growing diamond-like carbon film with improved adherence of the film on various substrates

Publications (1)

Publication Number Publication Date
TW370571B true TW370571B (en) 1999-09-21

Family

ID=57941477

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087117245A TW370571B (en) 1998-10-19 1998-10-19 A continuous process for growing diamond-like carbon film with improved adherence of the film on various substrates

Country Status (1)

Country Link
TW (1) TW370571B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10508342B2 (en) 2016-08-29 2019-12-17 Creating Nano Technologies, Inc. Method for manufacturing diamond-like carbon film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10508342B2 (en) 2016-08-29 2019-12-17 Creating Nano Technologies, Inc. Method for manufacturing diamond-like carbon film

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees