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TW344799B - Magnetic sensor utilizing impedance variation of a soft magnetic element in dependence upon a magnetic field strength and a method of manufacturing the same - Google Patents

Magnetic sensor utilizing impedance variation of a soft magnetic element in dependence upon a magnetic field strength and a method of manufacturing the same

Info

Publication number
TW344799B
TW344799B TW086113435A TW86113435A TW344799B TW 344799 B TW344799 B TW 344799B TW 086113435 A TW086113435 A TW 086113435A TW 86113435 A TW86113435 A TW 86113435A TW 344799 B TW344799 B TW 344799B
Authority
TW
Taiwan
Prior art keywords
field strength
dependence
magnetic
soft magnetic
manufacturing
Prior art date
Application number
TW086113435A
Other languages
Chinese (zh)
Inventor
Akihiro Isomura
Kenichi Arai
Original Assignee
Tokiin Corp
Kenichi Arai
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24486096A external-priority patent/JP3210933B2/en
Priority claimed from JP24507196A external-priority patent/JP3203547B2/en
Priority claimed from JP24672796A external-priority patent/JP3385501B2/en
Application filed by Tokiin Corp, Kenichi Arai filed Critical Tokiin Corp
Application granted granted Critical
Publication of TW344799B publication Critical patent/TW344799B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)

Abstract

A magnetic sensor for detecting magnetic field strength, which comprises: an insulator substrate having first and second surfaces opposite to each other; a soft magnetic element having first and second ends opposite to each other and mounted on the first surface of the insulator substrate; a conductor mounted on the second surface of the insulator substrate; and an output port coupled to the first and the second ends of the soft magnetic element for deriving an impedance of the soft magnetic element between the first and the second ends, the impedance being changing in dependence upon a magnetic field strength applied to the soft magnetic element.
TW086113435A 1996-09-17 1997-09-17 Magnetic sensor utilizing impedance variation of a soft magnetic element in dependence upon a magnetic field strength and a method of manufacturing the same TW344799B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24486096A JP3210933B2 (en) 1996-09-17 1996-09-17 Magnetic sensing element and method of manufacturing the same
JP24507196A JP3203547B2 (en) 1996-09-17 1996-09-17 Magnetic sensing element
JP24672796A JP3385501B2 (en) 1996-09-18 1996-09-18 Magnetic sensing element

Publications (1)

Publication Number Publication Date
TW344799B true TW344799B (en) 1998-11-11

Family

ID=27333293

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086113435A TW344799B (en) 1996-09-17 1997-09-17 Magnetic sensor utilizing impedance variation of a soft magnetic element in dependence upon a magnetic field strength and a method of manufacturing the same

Country Status (8)

Country Link
US (2) US6069475A (en)
EP (2) EP0965851B1 (en)
CN (2) CN1110794C (en)
DE (2) DE69705095T2 (en)
HK (1) HK1004822A1 (en)
MY (1) MY130911A (en)
SG (2) SG89311A1 (en)
TW (1) TW344799B (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3344468B2 (en) * 1998-12-21 2002-11-11 アルプス電気株式会社 Thin film magnetic head
JP2000284028A (en) * 1999-03-30 2000-10-13 Kaneo Mori Thin-film magnetic MI element
KR100378553B1 (en) * 1999-04-15 2003-03-31 마쯔시다덴기산교 가부시키가이샤 Magnetic reproduction device, magnetic head using the device and method for producing the magnetic head
US6538843B1 (en) * 1999-11-09 2003-03-25 Matsushita Electric Industrial Co., Ltd. Magnetic head
KR100383564B1 (en) * 2000-02-17 2003-05-12 주식회사 코디소프트 Method for forming impedance-valve type material and impedance-valve type material fabricated using the same
JP2002056510A (en) * 2000-08-07 2002-02-22 Matsushita Electric Ind Co Ltd Shielding type magnetic head and magnetic reproducing device
JP2002208118A (en) * 2001-01-04 2002-07-26 Tdk Corp Thin film magnetic head device
US6727692B2 (en) 2001-02-15 2004-04-27 Petru Ciureanu Magnetic field sensor with enhanced sensitivity, internal biasing and magnetic memory
US7145331B2 (en) 2001-07-19 2006-12-05 Matsushita Electric Industrial Co., Ltd. Magnetic sensor having a closed magnetic path formed by soft magnetic films
US7196514B2 (en) * 2002-01-15 2007-03-27 National University Of Singapore Multi-conductive ferromagnetic core, variable permeability field sensor and method
US6853186B2 (en) * 2002-01-15 2005-02-08 National University Of Singapore Variable permeability magnetic field sensor and method
EP1450378A3 (en) * 2003-02-24 2006-07-05 TDK Corporation Soft magnetic member, method for manufacturing thereof and electromagnetic wave controlling sheet
EP1647830A4 (en) * 2003-07-18 2007-02-28 Aichi Steel Corp Three-dimensional magnetic direction sensor, and magneto-impedance sensor element
US7554324B2 (en) * 2003-10-28 2009-06-30 Honeywell International Inc. Turbine blade proximity sensor and control system
US20050237197A1 (en) * 2004-04-23 2005-10-27 Liebermann Howard H Detection of articles having substantially rectangular cross-sections
US6998538B1 (en) 2004-07-30 2006-02-14 Ulectra Corporation Integrated power and data insulated electrical cable having a metallic outer jacket
US7208684B2 (en) 2004-07-30 2007-04-24 Ulectra Corporation Insulated, high voltage power cable for use with low power signal conductors in conduit
US7145321B2 (en) 2005-02-25 2006-12-05 Sandquist David A Current sensor with magnetic toroid
JP4283263B2 (en) * 2005-10-20 2009-06-24 本田技研工業株式会社 Manufacturing method of magnetostrictive torque sensor
JP4835805B2 (en) 2009-02-27 2011-12-14 愛知製鋼株式会社 Magnetoimpedance sensor element and manufacturing method thereof
US8269490B2 (en) * 2009-04-03 2012-09-18 Honeywell International Inc. Magnetic surface acoustic wave sensor apparatus and method
CN101880858B (en) * 2009-05-06 2015-07-29 光洋应用材料科技股份有限公司 High-magnetic-flux cobalt-iron-based alloy magnetic sputtering target material and manufacturing method thereof
US8994366B2 (en) * 2012-12-12 2015-03-31 Ascension Technology Corporation Magnetically tracked sensor
US20180266991A1 (en) * 2017-03-15 2018-09-20 Qualcomm Incorporated Magneto-impedance (mi) sensors employing current confinement and exchange bias layer(s) for increased sensitivity
JP7203490B2 (en) 2017-09-29 2023-01-13 昭和電工株式会社 Magnetic sensor assembly and magnetic sensor assembly manufacturing method
JP6516057B1 (en) * 2017-12-26 2019-05-22 Tdk株式会社 Magnetic sensor
CN111323737B (en) * 2020-04-09 2021-03-02 西安交通大学 An impedance-sensitive magnetic sensor and its hardware detection circuit
JP7540234B2 (en) * 2020-08-06 2024-08-27 株式会社レゾナック Magnetic sensor circuit and magnetic field detection device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4635152A (en) * 1983-07-29 1987-01-06 Kabushiki Kaisha Toshiba Magnetic resonance-type playback apparatus including a magnetic material having magnetic anisotropy
US5390061A (en) * 1990-06-08 1995-02-14 Hitachi, Ltd. Multilayer magnetoresistance effect-type magnetic head
JP3082377B2 (en) * 1991-02-28 2000-08-28 ソニー株式会社 Distributed constant circuit type magnetic field detector
JPH05303724A (en) * 1992-02-26 1993-11-16 Hitachi Ltd Magnetic disk device
JP3272423B2 (en) * 1992-12-01 2002-04-08 科学技術振興事業団 Method of manufacturing magnetic inductance element, magnetic inductance element, magnetic field sensor, and magnetic switch hybrid IC device
EP0640840B1 (en) * 1993-08-25 2002-10-30 Nippon Telegraph And Telephone Corporation Magnetic field sensing method and apparatus
JPH07248365A (en) * 1994-03-10 1995-09-26 Sumitomo Metal Mining Co Ltd Magnetism-magnetic direction sensor and magnetism-magnetic direction measuring method
JP3360519B2 (en) * 1995-03-17 2002-12-24 株式会社豊田中央研究所 Stacked magnetic field detector
US5978186A (en) * 1996-03-14 1999-11-02 Matsushita Electric Industrial Co., Ltd. Magnetic head and reproducing apparatus with head having central core with winding thereabout and wire therethrough

Also Published As

Publication number Publication date
SG89311A1 (en) 2002-06-18
DE69705095T2 (en) 2002-02-07
US6255813B1 (en) 2001-07-03
EP0831335B1 (en) 2001-06-06
DE69714613T2 (en) 2003-04-10
MY130911A (en) 2007-07-31
EP0831335A3 (en) 1998-06-03
EP0965851B1 (en) 2002-08-07
DE69714613D1 (en) 2002-09-12
EP0965851A3 (en) 2000-03-15
US6069475A (en) 2000-05-30
SG82576A1 (en) 2001-08-21
CN1186295A (en) 1998-07-01
CN1110794C (en) 2003-06-04
HK1004822A1 (en) 1998-12-11
CN1432998A (en) 2003-07-30
DE69705095D1 (en) 2001-07-12
EP0831335A2 (en) 1998-03-25
EP0965851A2 (en) 1999-12-22

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees