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TW343273B - Furnace type reactor and method of using the same - Google Patents

Furnace type reactor and method of using the same

Info

Publication number
TW343273B
TW343273B TW086107113A TW86107113A TW343273B TW 343273 B TW343273 B TW 343273B TW 086107113 A TW086107113 A TW 086107113A TW 86107113 A TW86107113 A TW 86107113A TW 343273 B TW343273 B TW 343273B
Authority
TW
Taiwan
Prior art keywords
gas inlet
type reactor
same
furnace type
gas
Prior art date
Application number
TW086107113A
Other languages
Chinese (zh)
Inventor
Hwang-Wen Chern
Shyh-Chyi Lin
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW086107113A priority Critical patent/TW343273B/en
Application granted granted Critical
Publication of TW343273B publication Critical patent/TW343273B/en

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Abstract

A furnace type reactor comprising: a reaction furnace having a first gas inlet for inputting the process gas of a first process, a second gas inlet for inputting the process gas of a second process, a discharge outlet for releasing the process gases of the first process and the second process, and an evacuation outlet for obtaining a desired vacuum level by removing the process gases in the reaction furnace; and a control unit for controlling the open/close of the first gas inlet, the second gas inlet, the discharge outlet and the evacuation outlet to provide environments suitable for the first process and the second process.
TW086107113A 1997-05-26 1997-05-26 Furnace type reactor and method of using the same TW343273B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086107113A TW343273B (en) 1997-05-26 1997-05-26 Furnace type reactor and method of using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086107113A TW343273B (en) 1997-05-26 1997-05-26 Furnace type reactor and method of using the same

Publications (1)

Publication Number Publication Date
TW343273B true TW343273B (en) 1998-10-21

Family

ID=58263631

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086107113A TW343273B (en) 1997-05-26 1997-05-26 Furnace type reactor and method of using the same

Country Status (1)

Country Link
TW (1) TW343273B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI456682B (en) * 2012-09-20 2014-10-11 Motech Ind Inc Semiconductor diffusion apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI456682B (en) * 2012-09-20 2014-10-11 Motech Ind Inc Semiconductor diffusion apparatus

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