TW319916B - - Google Patents
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- Publication number
- TW319916B TW319916B TW084109373A TW84109373A TW319916B TW 319916 B TW319916 B TW 319916B TW 084109373 A TW084109373 A TW 084109373A TW 84109373 A TW84109373 A TW 84109373A TW 319916 B TW319916 B TW 319916B
- Authority
- TW
- Taiwan
- Prior art keywords
- boundary layer
- light
- region
- layer
- emitting diode
- Prior art date
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 42
- 229910052760 oxygen Inorganic materials 0.000 claims description 42
- 239000001301 oxygen Substances 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 22
- 230000006798 recombination Effects 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 16
- 238000005215 recombination Methods 0.000 claims description 15
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 230000015556 catabolic process Effects 0.000 claims description 6
- 238000006731 degradation reaction Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 230000009977 dual effect Effects 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 210000004508 polar body Anatomy 0.000 claims 1
- 239000012535 impurity Substances 0.000 description 19
- 230000007547 defect Effects 0.000 description 17
- 239000000463 material Substances 0.000 description 9
- 239000013078 crystal Substances 0.000 description 8
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 7
- 238000004020 luminiscence type Methods 0.000 description 7
- 229910005540 GaP Inorganic materials 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000010931 gold Substances 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- -1 aluminum indium phosphorus Chemical compound 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000004943 liquid phase epitaxy Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- BXGYYDRIMBPOMN-UHFFFAOYSA-N 2-(hydroxymethoxy)ethoxymethanol Chemical compound OCOCCOCO BXGYYDRIMBPOMN-UHFFFAOYSA-N 0.000 description 1
- 206010002091 Anaesthesia Diseases 0.000 description 1
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- 241001417978 Channidae Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000207199 Citrus Species 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- 241001331845 Equus asinus x caballus Species 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 230000037005 anaesthesia Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 235000020971 citrus fruits Nutrition 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000002079 cooperative effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000005516 deep trap Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- CQYBWJYIKCZXCN-UHFFFAOYSA-N diethylaluminum Chemical compound CC[Al]CC CQYBWJYIKCZXCN-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/8242—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP characterised by the dopants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/8215—Bodies characterised by crystalline imperfections, e.g. dislocations; characterised by the distribution of dopants, e.g. delta-doping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
Landscapes
- Led Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46337195A | 1995-06-05 | 1995-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW319916B true TW319916B (de) | 1997-11-11 |
Family
ID=23839854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW084109373A TW319916B (de) | 1995-06-05 | 1995-09-07 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5909051A (de) |
| JP (1) | JP3682938B2 (de) |
| DE (1) | DE19615179B4 (de) |
| GB (1) | GB2301934B (de) |
| TW (1) | TW319916B (de) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6794731B2 (en) * | 1997-02-18 | 2004-09-21 | Lumileds Lighting U.S., Llc | Minority carrier semiconductor devices with improved reliability |
| JP3461112B2 (ja) * | 1997-12-19 | 2003-10-27 | 昭和電工株式会社 | Ｉｉｉ族窒化物半導体発光素子 |
| US20010020703A1 (en) | 1998-07-24 | 2001-09-13 | Nathan F. Gardner | Algainp light emitting devices with thin active layers |
| US6469314B1 (en) | 1999-12-21 | 2002-10-22 | Lumileds Lighting U.S., Llc | Thin multi-well active layer LED with controlled oxygen doping |
| US6486499B1 (en) | 1999-12-22 | 2002-11-26 | Lumileds Lighting U.S., Llc | III-nitride light-emitting device with increased light generating capability |
| US6885035B2 (en) | 1999-12-22 | 2005-04-26 | Lumileds Lighting U.S., Llc | Multi-chip semiconductor LED assembly |
| US6903376B2 (en) | 1999-12-22 | 2005-06-07 | Lumileds Lighting U.S., Llc | Selective placement of quantum wells in flipchip light emitting diodes for improved light extraction |
| US6573537B1 (en) | 1999-12-22 | 2003-06-03 | Lumileds Lighting, U.S., Llc | Highly reflective ohmic contacts to III-nitride flip-chip LEDs |
| US6514782B1 (en) | 1999-12-22 | 2003-02-04 | Lumileds Lighting, U.S., Llc | Method of making a III-nitride light-emitting device with increased light generating capability |
| US6555457B1 (en) * | 2000-04-07 | 2003-04-29 | Triquint Technology Holding Co. | Method of forming a laser circuit having low penetration ohmic contact providing impurity gettering and the resultant laser circuit |
| US6429460B1 (en) * | 2000-09-28 | 2002-08-06 | United Epitaxy Company, Ltd. | Highly luminous light emitting device |
| JP4619621B2 (ja) * | 2000-10-09 | 2011-01-26 | クアルコム，インコーポレイテッド | 無線リソースの管理 |
| US6608328B2 (en) * | 2001-02-05 | 2003-08-19 | Uni Light Technology Inc. | Semiconductor light emitting diode on a misoriented substrate |
| US6563142B2 (en) * | 2001-07-11 | 2003-05-13 | Lumileds Lighting, U.S., Llc | Reducing the variation of far-field radiation patterns of flipchip light emitting diodes |
| US6891202B2 (en) | 2001-12-14 | 2005-05-10 | Infinera Corporation | Oxygen-doped Al-containing current blocking layers in active semiconductor devices |
| KR100916489B1 (ko) * | 2007-07-27 | 2009-09-08 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
| US8237049B2 (en) * | 2007-08-29 | 2012-08-07 | The Boeing Company | Photovoltaic cells with selectively patterned transparent conductive coatings, and associated methods |
| DE102010035489A1 (de) * | 2010-08-26 | 2012-03-01 | Osram Opto Semiconductors Gmbh | Halbleiterbauelement und Verfahren zur Herstellung eines Halbleiterbauelement |
| JP6744521B1 (ja) | 2018-12-11 | 2020-08-19 | パナソニックセミコンダクターソリューションズ株式会社 | 窒化物系半導体発光素子及びその製造方法、並びに、窒化物系半導体結晶の製造方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3812516A (en) * | 1970-05-01 | 1974-05-21 | Bell Telephone Labor Inc | Spontaneously emitting hetero-structure junction diodes |
| US3806774A (en) * | 1972-07-10 | 1974-04-23 | Bell Telephone Labor Inc | Bistable light emitting devices |
| US3869281A (en) * | 1974-02-14 | 1975-03-04 | Nl Industries Inc | Removal of nickel from molten magnesium metal |
| US3936322A (en) * | 1974-07-29 | 1976-02-03 | International Business Machines Corporation | Method of making a double heterojunction diode laser |
| US4160261A (en) * | 1978-01-13 | 1979-07-03 | Bell Telephone Laboratories, Incorporated | Mis heterojunction structures |
| JPS54152485A (en) * | 1978-05-23 | 1979-11-30 | Toshiba Corp | Electrode forming method for gallium phosphide light- emitting diode |
| US4231050A (en) * | 1979-01-30 | 1980-10-28 | Bell Telephone Laboratories, Incorporated | Reduction of surface recombination current in GaAs devices |
| US4297783A (en) * | 1979-01-30 | 1981-11-03 | Bell Telephone Laboratories, Incorporated | Method of fabricating GaAs devices utilizing a semi-insulating layer of AlGaAs in combination with an overlying masking layer |
| US4548654A (en) * | 1983-06-03 | 1985-10-22 | Motorola, Inc. | Surface denuding of silicon wafer |
| US4719497A (en) * | 1984-06-15 | 1988-01-12 | Hewlett-Packard Company | High efficiency light-emitting diode |
| US4888624A (en) * | 1984-06-15 | 1989-12-19 | American Telephone And Telegraph Company, At&T Bell Laboratories | Semiconductor devices employing high resistivity in-based compound group III-IV epitaxial layer for current confinement |
| JPS61178497A (ja) * | 1985-02-04 | 1986-08-11 | Mitsubishi Monsanto Chem Co | 低転位密度ひ化ガリウム単結晶の成長方法 |
| US4610731A (en) * | 1985-04-03 | 1986-09-09 | At&T Bell Laboratories | Shallow impurity neutralization |
| JPS6286785A (ja) * | 1985-10-11 | 1987-04-21 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
| US5068204A (en) * | 1987-03-27 | 1991-11-26 | Misawa Co. Ltd. | Method of manufacturing a light emitting element |
| US4861976A (en) * | 1988-06-06 | 1989-08-29 | American Telephone And Telegraph Company, At&T Bell Laboratories | Optical or opto-electronic device having a trapping layer in contact with a semiconductive layer |
| US5153889A (en) * | 1989-05-31 | 1992-10-06 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
| JP2588280B2 (ja) * | 1989-07-10 | 1997-03-05 | シャープ株式会社 | 化合物半導体発光素子 |
| JPH0797780A (ja) * | 1993-05-17 | 1995-04-11 | Tokai Senko Kk | 捺染布帛の蒸熱処理における含水率調整装置 |
| JP2795195B2 (ja) * | 1994-09-28 | 1998-09-10 | 信越半導体株式会社 | 発光素子 |
-
1995
- 1995-09-07 TW TW084109373A patent/TW319916B/zh not_active IP Right Cessation
-
1996
- 1996-04-17 DE DE19615179A patent/DE19615179B4/de not_active Expired - Fee Related
- 1996-05-28 GB GB9611093A patent/GB2301934B/en not_active Expired - Fee Related
- 1996-06-05 JP JP14248196A patent/JP3682938B2/ja not_active Expired - Fee Related
-
1997
- 1997-02-18 US US08/802,183 patent/US5909051A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE19615179A1 (de) | 1996-12-12 |
| US5909051A (en) | 1999-06-01 |
| GB2301934B (en) | 2000-01-19 |
| GB9611093D0 (en) | 1996-07-31 |
| JPH08330626A (ja) | 1996-12-13 |
| JP3682938B2 (ja) | 2005-08-17 |
| GB2301934A (en) | 1996-12-18 |
| DE19615179B4 (de) | 2004-04-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |