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TW262590B - Multi-level ROM and process thereof - Google Patents

Multi-level ROM and process thereof

Info

Publication number
TW262590B
TW262590B TW84105858A TW84105858A TW262590B TW 262590 B TW262590 B TW 262590B TW 84105858 A TW84105858 A TW 84105858A TW 84105858 A TW84105858 A TW 84105858A TW 262590 B TW262590 B TW 262590B
Authority
TW
Taiwan
Prior art keywords
level rom
forming
substrate
dielectric layer
along
Prior art date
Application number
TW84105858A
Other languages
Chinese (zh)
Inventor
Yih-Jong Sheng
Jenn-Huei Jong
Guan-Cherng Su
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW84105858A priority Critical patent/TW262590B/en
Application granted granted Critical
Publication of TW262590B publication Critical patent/TW262590B/en

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Read Only Memory (AREA)

Abstract

A process of multi-level ROM, that is applicable to fabricate multi-level ROM on one substrate, includes the following steps: (1) planning one first direction and one second direction on the substrate; (2) along the first direction, forming parallel multiple bit lines separating each other; (3) forming one dielectric layer covering the substrate surface; (4) applying multiple coding selective deposit procedure, along the second direction, forming multiple parallel bit lines separating each other on the dielectric layer, in which the bit line width on the device channel region is selected from one number series; (5) implanting ion, completing coding of the multi-level ROM.
TW84105858A 1995-06-09 1995-06-09 Multi-level ROM and process thereof TW262590B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84105858A TW262590B (en) 1995-06-09 1995-06-09 Multi-level ROM and process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84105858A TW262590B (en) 1995-06-09 1995-06-09 Multi-level ROM and process thereof

Publications (1)

Publication Number Publication Date
TW262590B true TW262590B (en) 1995-11-11

Family

ID=51401995

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84105858A TW262590B (en) 1995-06-09 1995-06-09 Multi-level ROM and process thereof

Country Status (1)

Country Link
TW (1) TW262590B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19617646A1 (en) * 1996-05-02 1997-11-13 Siemens Ag Memory cell arrangement and method for its production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19617646A1 (en) * 1996-05-02 1997-11-13 Siemens Ag Memory cell arrangement and method for its production
DE19617646C2 (en) * 1996-05-02 1998-07-09 Siemens Ag Memory cell arrangement and a method for the production thereof

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