TW202505649A - Transporting apparatus, resin molding apparatus and resin molded product manufacturing method - Google Patents
Transporting apparatus, resin molding apparatus and resin molded product manufacturing method Download PDFInfo
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- TW202505649A TW202505649A TW113121564A TW113121564A TW202505649A TW 202505649 A TW202505649 A TW 202505649A TW 113121564 A TW113121564 A TW 113121564A TW 113121564 A TW113121564 A TW 113121564A TW 202505649 A TW202505649 A TW 202505649A
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- 238000000465 moulding Methods 0.000 title claims abstract description 260
- 239000011347 resin Substances 0.000 title claims description 205
- 229920005989 resin Polymers 0.000 title claims description 205
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 230000007246 mechanism Effects 0.000 claims abstract description 137
- 230000002093 peripheral effect Effects 0.000 claims abstract description 19
- 210000000078 claw Anatomy 0.000 claims description 98
- 238000003860 storage Methods 0.000 claims description 80
- 238000012546 transfer Methods 0.000 claims description 71
- 238000000034 method Methods 0.000 claims description 23
- 238000000926 separation method Methods 0.000 claims description 10
- 230000032258 transport Effects 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 164
- 239000000463 material Substances 0.000 description 37
- 238000005516 engineering process Methods 0.000 description 17
- 238000010586 diagram Methods 0.000 description 9
- 230000007723 transport mechanism Effects 0.000 description 8
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 4
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000012790 confirmation Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Abstract
Description
本發明是有關於一種搬送裝置、樹脂成形裝置及樹脂成形品的製造方法。The present invention relates to a conveying device, a resin molding device and a method for manufacturing a resin molded product.
先前,作為對工件進行樹脂模製的樹脂模製裝置,考慮有專利文獻1中所示的裝置。該樹脂模製裝置中,使用包括機械手的搬送機器人來進行工件自供給庫的取出或成形品向收納庫的收納等。此處,於機械手中,於多關節機器人的前端使用在與工件的形狀相應的叉狀的構件上包括吸附機構的機構。 [現有技術文獻] [專利文獻] Previously, as a resin molding device for performing resin molding on a workpiece, the device shown in Patent Document 1 was considered. In this resin molding device, a transport robot including a manipulator is used to take out the workpiece from a supply warehouse or store the molded product in a storage warehouse. Here, in the manipulator, a mechanism including a suction mechanism on a fork-shaped member corresponding to the shape of the workpiece is used at the front end of the multi-joint robot. [Prior art document] [Patent document]
[專利文獻1]日本專利特開2019-145548號公報[Patent Document 1] Japanese Patent Publication No. 2019-145548
[發明所欲解決之課題][The problem that the invention wants to solve]
然而,於專利文獻1中未揭示相對於機械手對工件進行定位的結構。若工件相對於機械手的定位不充分,則機械手所放置的工件的位置變得不適當,因此會報告錯誤,樹脂模製裝置的動作會停止。於製成不報告錯誤的結構的情況下,機械手會將工件配置於不適當的位置,於之後的處理中產生不良情況,結果會產生外觀不良等樹脂成形品的不良。However, Patent Document 1 does not disclose a structure for positioning the workpiece relative to the robot. If the workpiece is not positioned sufficiently relative to the robot, the position of the workpiece placed by the robot becomes inappropriate, so an error is reported and the operation of the resin molding device stops. In the case of a structure that does not report an error, the robot will place the workpiece at an inappropriate position, causing defects in subsequent processing, resulting in defects in the appearance of the resin molded product.
再者,亦考慮於機械手設置定位銷並將定位銷插入至形成於工件的定位用孔中進行定位,但存在如下情況:因工件的翹曲或位置偏移等而定位銷無法插入至定位用孔中。Furthermore, it is also considered to provide a positioning pin on the robot and insert the positioning pin into a positioning hole formed in the workpiece for positioning. However, there is a case where the positioning pin cannot be inserted into the positioning hole due to warping or positional deviation of the workpiece.
因此,本發明是為了解決所述問題而完成,其主要課題在於,不使用定位銷地對成形對象物進行定位並加以保持。 [解決課題之手段] Therefore, the present invention is completed to solve the above-mentioned problem, and its main subject is to position and hold the formed object without using positioning pins. [Means for solving the problem]
即,本發明的搬送裝置為對成形對象物進行搬送的搬送裝置,且特徵在於包括:保持單元,對所述成形對象物進行保持;以及多關節的臂部,使所述保持單元移動,所述保持單元包括:基座構件,連接於所述臂部的前端部;以及定位機構,與所述成形對象物的外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。 [發明的效果] That is, the conveying device of the present invention is a conveying device for conveying a molding object, and is characterized by comprising: a holding unit for holding the molding object; and a multi-jointed arm for moving the holding unit, wherein the holding unit comprises: a base member connected to the front end of the arm; and a positioning mechanism for contacting the outer peripheral end surface of the molding object and positioning the molding object relative to the base member. [Effect of the invention]
藉由如此般構成的本發明,可不使用定位銷地對成形對象物進行定位並加以保持。According to the present invention thus constituted, the object to be formed can be positioned and held without using positioning pins.
接下來,舉例來進一步詳細說明本發明的技術。但是,本發明並不由以下的技術限定。Next, examples are given to further illustrate the technology of the present invention. However, the present invention is not limited to the following technology.
本發明的技術1的搬送裝置為對成形對象物進行搬送的搬送裝置,且特徵在於包括:保持單元,對所述成形對象物進行保持;以及多關節臂部,使所述保持單元移動,所述保持單元包括:基座構件,連接於所述多關節臂部的前端部;以及定位機構,與所述成形對象物的外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。 若為該搬送裝置,則與成形對象物的外周端面接觸而相對於基座構件對成形對象物進行定位,因此可不使用定位銷地對成形對象物進行定位並加以保持。其結果,可將成形對象物搬送至適當的位置,於之後的處理中可避免報告由成形對象物的位置偏移引起的錯誤,從而防止樹脂成形的動作停止。另外,於製成不報告錯誤的結構的情況下,可防止因成形對象物的位置偏移而產生外觀不良等樹脂成形品的不良。 The conveying device of the technology 1 of the present invention is a conveying device for conveying a molding object, and is characterized in that it includes: a holding unit for holding the molding object; and a multi-joint arm for moving the holding unit, and the holding unit includes: a base member connected to the front end of the multi-joint arm; and a positioning mechanism for contacting the outer peripheral end surface of the molding object and positioning the molding object relative to the base member. In the case of this conveying device, the molding object is contacted with the outer peripheral end surface of the molding object and positioned relative to the base member, so that the molding object can be positioned and held without using a positioning pin. As a result, the molding object can be conveyed to an appropriate position, and in subsequent processing, it is possible to avoid reporting errors caused by the positional deviation of the molding object, thereby preventing the resin molding action from stopping. In addition, by making a structure that does not report errors, defects in the resin molded product such as poor appearance caused by positional deviation of the molded object can be prevented.
理想的是,本發明的技術2的搬送裝置除了所述技術1的結構以外,所述定位機構包括:保持爪,對所述成形對象物進行保持;以及保持爪移動部,使所述保持爪移動,所述保持爪移動部使所述保持爪在對所述成形對象物進行保持的保持位置與自該保持位置退避的退避位置之間移動,位於所述保持位置的所述保持爪與所述外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。
若為該結構,則藉由保持爪而相對於基座構件對成形對象物進行定位,因此可於對成形對象物進行定位的同時保持該經定位的成形對象物。
Ideally, in addition to the structure of the above-mentioned technique 1, the conveying device of the
理想的是,本發明的技術3的搬送裝置除了所述技術2的結構以外,所述成形對象物於俯視下呈矩形形狀,所述保持爪與所述成形對象物的四邊分別對應地設置。
若為該結構,則可確實地保持於俯視下呈矩形形狀的成形對象物,同時相對於基座構件對成形對象物進行定位。
Ideally, in addition to the structure of the above-mentioned
理想的是,本發明的技術4的搬送裝置除了所述技術3的結構以外,所述保持爪移動部包括:聯動機構,使與所述四邊分別對應地設置的所述保持爪聯動;以及保持爪驅動部,經由所述聯動機構而使與所述四邊分別對應地設置的所述保持爪移動。
若為該結構,則可藉由與四邊分別對應地設置的保持爪而一舉定位成形前基板。另外,可藉由共同的保持爪驅動部而使與四邊分別對應地設置的保持爪移動,且可避免保持單元的大型化。
Ideally, in addition to the structure of the above-mentioned
理想的是,本發明的技術5的搬送裝置除了所述技術2至技術4的任一個結構以外,更包括保持板,所述保持板在與位於所述保持位置的所述保持爪之間夾著並保持所述成形對象物。
若為該結構,則利用保持板及保持爪來夾著藉由保持爪而定位的成形對象物,因此可確實地保持成形對象物,可防止於搬送時成形對象物發生偏移。
Ideally, the conveying device of
理想的是,本發明的技術6的搬送裝置除了所述技術5的結構以外,所述保持板與所述成形對象物對應地於俯視下呈矩形形狀,所述保持爪設置成包圍所述保持板的四邊,於所述保持位置與所述保持板接觸。
若為該結構,則保持爪於保持位置與保持板接觸,因此可將保持爪物理性地留於保持位置。其結果,可相對於基座構件確實地定位成形對象物。
Ideally, in addition to the structure of the above-mentioned
理想的是,本發明的技術7的搬送裝置除了所述技術5或技術6的結構以外,更包括板移動部,所述板移動部使所述保持板在和藉由所述定位機構而定位的所述成形對象物接觸的接觸位置與自所述成形對象物離開的分離位置之間移動。
若為該結構,則可分別進行基於定位機構的定位動作與基於保持板的保持動作。其結果,可避免保持板妨礙基於定位機構的定位動作。
Ideally, the conveying device of
具體而言,理想的是,本發明的技術8的搬送裝置除了所述技術7的結構以外,於藉由所述板移動部而使所述保持板處於所述分離位置的狀態下,藉由所述定位機構而對所述成形對象物進行定位,並於藉由所述定位機構而將所述成形對象物定位後,藉由所述板移動部而使所述保持板處於所述接觸位置。
若為該結構,則保持板不會妨礙基於定位機構的成形對象物的定位,可藉由保持板而確實地保持經定位的成形對象物。
Specifically, it is desirable that the conveying device of the technique 8 of the present invention, in addition to the structure of the
本發明的技術9的搬送裝置除了所述技術1至技術8的任一個結構以外,可對在一面固定有電子零件的所述成形對象物進行搬送。 此處,於樹脂成形裝置中,有如下結構的裝置:以所述電子零件處於上側的第一狀態(上翻(tip up)狀態)收容成形對象物,以所述電子零件處於下側的第二狀態(下翻(tip down)狀態)將成形對象物設置於移載平台或成形模等。為了用於該樹脂成形裝置,理想的是,本技術9的搬送裝置對以所述電子零件處於上側的第一狀態載置的所述成形對象物進行保持,設為所述電子零件處於下側的第二狀態而交給移載平台。 若為該結構,則可以第一狀態收容成形前的成形對象物,可防止塵埃附著於成形前的成形對象物中與電子零件為相反側的背面(被成形模保持的面)。其結果,可防止樹脂成形品的外觀不良。 The conveying device of technology 9 of the present invention can convey the molding object having an electronic component fixed on one side in addition to any one of the structures of technology 1 to technology 8. Here, in the resin molding device, there is a device having the following structure: the molding object is accommodated in a first state (tip up state) in which the electronic component is on the upper side, and the molding object is set on a transfer platform or a molding mold in a second state (tip down state) in which the electronic component is on the lower side. In order to be used in the resin molding device, it is ideal that the conveying device of technology 9 holds the molding object placed in the first state in which the electronic component is on the upper side, and hands it over to the transfer platform in the second state in which the electronic component is on the lower side. With this structure, the pre-molding object can be contained in the first state, and dust can be prevented from adhering to the back side (the side held by the molding die) of the pre-molding object opposite to the electronic component. As a result, the appearance of the resin molded product can be prevented from being poor.
於本發明的技術10的搬送裝置中,所述保持單元可相對於所述基座構件對成形前的所述成形對象物及成形後的所述成形對象物分別於共同的位置進行保持。於本發明的技術10中,為於保持單元未設置用於對成形對象物進行定位的定位銷的結構,可不區別地保持成形前的成形對象物與成形後的成形對象物。
若為該結構,則無需相對於成形前的成形對象物及成形後的成形對象物分別設置搬送機構,可使搬送機構的設置空間小型化,且可使樹脂成形裝置的設置空間小型化。
In the conveying device of
另外,具有所述技術1至技術10的任一個搬送裝置的樹脂成形裝置亦為本發明的一態樣。In addition, a resin molding device having any one of the conveying devices of Techniques 1 to 10 is also an aspect of the present invention.
理想的是,本發明的技術12的樹脂成形裝置除了所述技術11以外,包括:成形對象物供給部,供給成形前的所述成形對象物;成形對象物收納部,收納成形後的所述成形對象物;第一移載平台,供成形前的所述成形對象物臨時設置;第二移載平台,供成形後的所述成形對象物臨時設置;以及交接機構,在所述各移載平台與成形模之間進行成形前的所述成形對象物及成形後的所述成形對象物的交接,所述搬送裝置在所述成形對象物供給部與所述第一移載平台之間進行成形前的所述成形對象物的交接,在所述成形對象物收納部與所述第二移載平台之間進行成形後的所述成形對象物的交接。
若為該結構,則可於藉由交接機構而在各移載平台與成形模之間交接成形對象物的期間,自成形對象物供給部將成形前的成形對象物搬送至第一移載平台,並自第二移載平台將成形後的成形對象物收納於成形對象物收納部。其結果,可縮短至自成形對象物供給部向成形模搬送成形前的成形對象物並自成形模將成形後的成形對象物收容於成形對象物收納部為止的時間。
Ideally, the resin forming device of the
理想的是,本發明的技術13的樹脂成形裝置除了所述技術12的結構以外,所述交接機構具有:成形前搬送部,對成形前的所述成形對象物進行搬送;以及成形後搬送部,對成形後的所述成形對象物進行搬送。
若為該結構,則可藉由共同的交接機構來搬送成形前的成形對象物及成形後的成形對象物。其結果,可於交接機構在各移載平台與成形模之間往返一次的期間,進行成形前的成形對象物的交接與成形後的成形對象物的交接,且可縮短該些的搬送所花費的時間。
Ideally, in addition to the structure of the above-mentioned
理想的是,本發明的技術14的樹脂成形裝置除了所述技術12或技術13的結構以外,所述成形對象物於一面固定有電子零件,所述成形對象物供給部以所述電子零件處於上側的第一狀態(上翻狀態)供給成形前的所述成形對象物,於所述第一移載平台以所述電子零件處於下側的第二狀態(下翻狀態)設置成形前的所述成形對象物。
若為該結構,則藉由搬送裝置的多關節臂部而使保持單元表背反轉,藉此可將藉由成形對象物供給部而以第一狀態供給的成形前的成形對象物設為第二狀態並搬送至第一移載平台。即,於由搬送裝置搬送之前,可將成形前的成形對象物設為第一狀態,因此可防止塵埃附著於成形前的成形對象物中與電子零件為相反側的背面(被成形模保持的面)。其結果,可防止樹脂成形品的外觀不良。
Ideally, in addition to the structure of the above-mentioned
而且,樹脂成形品的製造方法亦為本發明的一態樣,所述樹脂成形品的製造方法為對成形對象物進行樹脂成形的製造方法,且包括:搬送步驟,藉由所述技術1至技術10中任一項所述的搬送裝置來搬送所述成形對象物;以及樹脂成形步驟,對所述成形對象物進行樹脂成形。Moreover, a method for manufacturing a resin molded product is also an aspect of the present invention, wherein the method for manufacturing a resin molded product is a method for performing resin molding on a molding object, and comprises: a conveying step, in which the molding object is conveyed by a conveying device described in any one of Techniques 1 to 10; and a resin molding step, in which the molding object is resin molded.
<本發明的一實施形態> 以下,參照圖式對本發明的樹脂成形裝置的一實施形態進行說明。 再者,以下所示的任一圖中,為了便於理解,均適宜省略或誇張而示意性地描繪。對於相同的結構要素,標註相同的符號並適宜省略說明。 <One embodiment of the present invention> Hereinafter, one embodiment of the resin molding device of the present invention will be described with reference to the drawings. In any of the following drawings, for the sake of ease of understanding, the drawings are schematically depicted with appropriate omissions or exaggerations. For the same structural elements, the same symbols are marked and the description is appropriately omitted.
<樹脂成形裝置的整體結構>
第一實施形態的樹脂成形裝置100中,藉由使用樹脂材料J的樹脂成形而對作為於一面固定有電子零件Wx的成形對象物的基板W進行樹脂密封來製造樹脂成形品P。再者,以下,將樹脂成形前的成形對象物(基板W)稱為「成形前基板W」,將樹脂成形後的成形對象物(基板W)稱為「成形完畢基板W」或「樹脂成形品P」。
<Overall structure of resin molding device>
In the
此處,作為基板W,於俯視下呈矩形形狀,例如可列舉:金屬製基板、樹脂製基板、玻璃製基板、陶瓷製基板、電路基板、半導體製基板、引線框架、矽晶圓、玻璃晶圓等。除此以外,基板W亦可為未施有配線的載體。Here, the substrate W is rectangular in a plan view, and examples thereof include metal substrates, resin substrates, glass substrates, ceramic substrates, circuit substrates, semiconductor substrates, lead frames, silicon wafers, glass wafers, etc. In addition, the substrate W may be a carrier without wiring.
另外,作為樹脂材料J,例如可列舉粉粒體狀樹脂(包含顆粒狀樹脂)、液狀樹脂等。另外,作為電子零件Wx,例如可列舉:半導體晶片、電阻元件、電容器元件等電子元件或將該些電子元件的至少一個樹脂密封的形態的電子零件。In addition, examples of the resin material J include powdered resins (including granular resins), liquid resins, etc. In addition, examples of the electronic components Wx include electronic components such as semiconductor chips, resistor elements, capacitor elements, or electronic components in a form where at least one of these electronic components is sealed with resin.
如圖1所示,該樹脂成形裝置100包括基板供給/收納模組A、兩個樹脂成形模組B以及樹脂材料供給模組C作為結構要素。再者,各結構要素(各模組A~C)相對於各個結構要素能夠拆裝且能夠更換。As shown in Fig. 1, the
如圖1所示,基板供給/收納模組A包括:基板供給部2,供給成形前基板W;成形品收納部3,收容成形完畢基板W(樹脂成形品P);第一移載平台4,供成形前基板W臨時設置;第二移載平台5,供樹脂成形品P臨時設置;第一搬送機構6,為將成形前基板W自基板供給部2搬送至第一移載平台4並將樹脂成形品P自第二移載平台5搬送至成形品收納部3的搬送裝置;以及第二搬送機構7,為在各移載平台4、5與樹脂成形模組B的成形模10、成形模11之間進行成形前基板W及樹脂成形品P的搬送即交接的交接機構。再者,基板供給/收納模組A的各部的具體結構將於下文敘述。此外,儘管基板供給/收納模組A設置有控制樹脂成形裝置100操作的控制部COM,但是其他模組B和模組C也可以設置有控制部COM。As shown in FIG. 1 , the substrate supply/storage module A includes: a
如圖2所示,各樹脂成形模組B具有:上模10,為對基板W進行保持的第一模;下模11,為形成有模腔11C的第二模;以及合模機構12,將上模10及下模11合模。上模10介隔上台板101而設置於上部固定盤(未圖示)。下模11介隔下台板103而設置於藉由合模機構12而升降的可動盤102。As shown in FIG2 , each resin molding module B comprises: an
此處,上模10對基板W的背面(未固定電子零件Wx的面)進行吸附並加以保持。於上模10的下表面形成有抽吸口(未圖示),於上模10的內部形成有與抽吸口相連的抽吸流路(未圖示)。該抽吸流路連接於外部的抽吸裝置(未圖示)。Here, the
另外,下模11具有收容固定於基板W的電子零件Wx及樹脂材料J的模腔11C。具體而言,下模11具有:底面構件111,形成模腔11C的底面;以及側面構件112,包圍該底面構件111。藉由該底面構件111的上表面與側面構件112的內周面而形成模腔11C。另外,側面構件112設置成相對於底面構件111能夠相對地上下移動。具體而言,側面構件112相對於下模11的基座板113而由螺旋彈簧等多個彈性構件114支撐。進而,為了使樹脂成形品P的脫模性提高,下模11由脫模膜F覆蓋。另外,亦可於側面構件112的上表面設置排氣孔(未圖示)以排出空氣或氣體。除此以外,於上模10及下模11的周圍設置有用於在樹脂成形時對成形模10、成形模11的周圍進行抽真空的包含側壁部及O型環等密封構件等的密閉結構13。In addition, the
本實施形態的合模機構12為使用將伺服馬達等的旋轉轉換為直線移動的滾珠螺桿機構來使可動台板升降的直線移動方式的機構。再者,作為合模機構12,除此以外,亦可為使用例如曲柄連桿等連桿機構將伺服馬達等的動力源傳遞至可動台板的連桿方式的機構等。The
如圖1所示,樹脂材料供給模組C具有:移動平台14;樹脂材料收容部15,載置於移動平台14上;樹脂材料投入機構16,計量樹脂材料J並投入至樹脂材料收容部15;以及樹脂材料搬送機構17,對樹脂材料收容部15進行搬送而向下模11的模腔11C供給樹脂材料J。此處,樹脂材料收容部15是使用對脫模膜F進行保持的保持框而構成,藉由樹脂材料投入機構16而將樹脂材料J投入至被保持框保持的脫模膜F上。As shown in FIG1 , the resin material supply module C includes: a moving
移動平台14於樹脂材料供給模組C內,在樹脂材料投入機構16的樹脂投入位置與用於將樹脂材料收容部15交給樹脂材料搬送機構17的搬送位置之間移動。The
另外,樹脂材料搬送機構17將收容有樹脂材料J的樹脂材料收容部15自樹脂材料供給模組C搬送至樹脂成形模組B,並於樹脂成形模組B中將脫模膜F及樹脂材料J供給至成形模10、成形模11。之後,樹脂材料搬送機構17將供給樹脂材料J後的樹脂材料收容部15自樹脂成形模組B搬送至樹脂材料供給模組C。本實施形態的樹脂材料搬送機構17具有:樹脂材料搬送部171,對收容有樹脂材料J的樹脂材料收容部15進行搬送;以及膜回收部172,自下模11的模腔11C回收使用完畢的脫模膜F。In addition, the resin
<基板供給/收納模組A的各部的具體結構>
如圖1所示,基板供給/收納模組A包括基板供給部2、成形品收納部3、第一移載平台4、第二移載平台5、第一搬送機構6及第二搬送機構7。
<Specific structure of each part of substrate supply/storage module A>
As shown in FIG1 , substrate supply/storage module A includes
如圖1及圖3所示,基板供給部2包括:收納箱21,收納有成形前基板W;以及取出機構22,自收納箱21取出成形前基板W。收納箱21上下多層地收納多個成形前基板W。另外,收納箱21將成形前基板W以電子零件Wx位於上側的第一狀態(所謂上翻狀態)收納。收納箱21構成為能夠自樹脂成形裝置100取出。取出機構22例如夾著一個成形前基板W自收納箱21取出,並使成形前基板W位於基板供給部2的成形前基板平台23。再者,在收納箱21與成形前基板平台23之間設置有導軌24。As shown in FIG. 1 and FIG. 3 , the
再者,成形前基板平台23亦可為於導軌24上滑動的結構。於該情況下,於成形前基板平台23位於收納箱21附近的狀態下,取出機構22自收納箱21取出成形前基板W,並將所取出的成形前基板W配置於成形前基板平台23。成形前基板平台23例如對成形前基板W進行吸附並加以保持。之後,成形前基板平台23沿著導軌24而向自收納箱21離開的方向移動。除此以外,於基板供給部2例如設置有對電子零件Wx是否適當地配置於成形前基板W上進行確認的確認機構(未圖示)。於該結構中,例如,於成形前基板平台23於導軌24上移動的期間,確認機構自上方對電子零件Wx是否適當地配置於成形前基板W上進行確認。確認機構為雷射位移計或相機等。Furthermore, the
如圖1及圖3所示,成形品收納部3包括:收納箱31,收納樹脂成形品P;以及收納機構32,將樹脂成形品P收納於該收納箱31。收納箱31上下多層地收納多個樹脂成形品P。另外,收納箱31將樹脂成形品P以經樹脂密封的電子零件Wx位於上側的第一狀態(所謂上翻狀態)收納。收納箱31構成為能夠自樹脂成形裝置100取出。收納機構32藉由對位於成形品收納部3的樹脂成形品平台33的樹脂成形品P進行按壓而收納於收納箱31。再者,在收納箱31與樹脂成形品平台33之間設置有導軌34。另外,收納機構32亦可夾著樹脂成形品P移動至收納箱31的附近。於該情況下,樹脂成形品P移動至收納箱31附近後,藉由收納機構32等來按壓樹脂成形品P而收納於收納箱31。As shown in FIG. 1 and FIG. 3 , the molded
此處,關於基板供給部2及成形品收納部3,於圖1中,為了方便而示出了在前後方向上排列配置的狀態,為了使樹脂成形裝置100(基板供給/收納模組A)的設置空間小型化,如圖3所示,本實施形態的基板供給部2及成形品收納部3上下配置。再者,基板供給部2及成形品收納部3均可配置於上方。另外,亦可將基板供給部2及成形品收納部3橫向排列配置。Here, regarding the
如圖1及圖3所示,第一移載平台4供藉由基板供給部2而供給的成形前基板W臨時設置,用於將成形前基板W交給第二搬送機構7。此處,於第一移載平台4上,成形前基板W以電子零件Wx位於下側的第二狀態(所謂下翻狀態)設置。第一移載平台4具有對第二狀態的成形前基板W的端部進行鉤掛並加以保持的保持爪(未圖示),藉由使該保持爪開閉來保持第二狀態的成形前基板W。再者,於第一移載平台4亦可設置定位銷41,所述定位銷41插入至形成於成形前基板W的定位用孔中(參照圖3)。As shown in FIG. 1 and FIG. 3 , the
如圖1及圖3所示,第二移載平台5供經樹脂成形的樹脂成形品P臨時載置,自第二搬送機構7接收樹脂成形品P。此處,於第二移載平台5上,樹脂成形品P以經樹脂密封的電子零件Wx位於下側的第二狀態(所謂下翻狀態)設置。第二移載平台5具有對第二狀態的樹脂成形品P的端部進行鉤掛並加以保持的保持爪(未圖示),藉由使該保持爪開閉來保持第二狀態的樹脂成形品P。As shown in Fig. 1 and Fig. 3, the
再者,如圖1及圖3所示,第一移載平台4及第二移載平台5在左右方向上橫向排列配置,另外,該些的高度位置處於相同高度。1 and 3, the
如圖1所示,第一搬送機構6在基板供給部2與第一移載平台4之間交接成形前基板W,在第二移載平台5與成形品收納部3之間交接樹脂成形品P。該第一搬送機構6於俯視下設置於基板供給部2及成形品收納部3與各移載平台4、5之間。As shown in FIG1 , the first conveying
具體而言,第一搬送機構6具有:保持單元61,對成形前基板W及樹脂成形品P分別進行保持;以及多關節臂部62,使該保持單元61移動。Specifically, the
多關節臂部62例如為垂直多關節型的機器人(例如,具有六個關節的多關節機器人)。多關節臂部62可對保持單元61的位置及姿態進行控制。具體而言,多關節臂部62可使保持著成形前基板W或樹脂成形品P的保持單元61表背反轉。另外,多關節臂部62使保持單元61在基板供給部2與第一移載平台4之間及成形品收納部3與第二移載平台5之間移動。再者,第一搬送機構6的具體結構將於下文敘述。The
如圖1所示,第二搬送機構7在基板供給/收納模組A與樹脂成形模組B之間來回移動,沿著遍及基板供給/收納模組A與樹脂成形模組B設置的軌道(未圖示)移動。該第二搬送機構7接收臨時設置於第一移載平台4的成形前基板W,並搬送至樹脂成形模組B的上模10。另外,於成形前基板W的樹脂成形後,第二搬送機構7自樹脂成形模組B的上模10接收樹脂成形品P,並搬送至第二移載平台5。As shown in FIG1 , the second conveying
如圖1及圖3所示,本實施形態的第二搬送機構7具有:基板搬送部71,對成形前基板W進行搬送;以及成形品搬送部72,對樹脂成形品P進行搬送。再者,於基板搬送部71亦可設置定位銷711,所述定位銷711插入至形成於成形前基板W的定位用孔中(參照圖3)。而且,第二搬送機構7構成為基板搬送部71及成形品搬送部72同時移動。基板搬送部71及成形品搬送部72與第一移載平台4及第二移載平台5的配置關係對應地設置。於本實施形態中,第一移載平台4及第二移載平台5在左右方向上橫向排列配置,因此基板搬送部71及成形品搬送部72亦與其對應地在左右方向上橫向排列配置。另外,基板搬送部71及成形品搬送部72的高度位置亦為相同的高度。As shown in FIG. 1 and FIG. 3 , the second conveying
藉由該結構,可於第二搬送機構7在基板供給/收納模組A與樹脂成形模組B之間往返一次的期間,進行將成形前基板W自第一移載平台4搬送至上模10的動作、與將樹脂成形品P自上模10搬送至第二移載平台5的動作。With this structure, the pre-molding substrate W can be transported from the
<第一搬送機構6的具體結構>
而且,本實施形態的第一搬送機構6構成為可對成形前基板W及樹脂成形品P分別進行定位並加以保持。
<Specific structure of the first conveying
具體而言,如圖4~圖8所示,保持單元61包括:基座構件63,連接於多關節臂部62的前端部621;以及定位機構64,與成形前基板W或樹脂成形品P的外周端面Wa接觸而相對於基座構件63對成形前基板W或樹脂成形品P進行定位。再者,於圖4、圖6及圖7中示出了保持著成形前基板W的例子,樹脂成形品P亦可同樣地保持。Specifically, as shown in FIGS. 4 to 8 , the holding
基座構件63與成形前基板W對應地於俯視下呈矩形形狀(參照圖8)。該基座構件63的長邊部側連接於多關節臂部62的前端部621(參照圖4及圖5)。再者,多關節臂部62的前端部621構成為能夠繞圖4的在左右方向上延伸的軸旋轉,藉此,可使保持單元61表背反轉。The
本實施形態的定位機構64不僅對成形前基板W或樹脂成形品P進行定位,而且對該些進行保持,如圖4~圖8所示,包括:保持爪641,對成形前基板W或樹脂成形品P進行保持;以及保持爪移動部642,使保持爪641移動。The
保持爪641相對於基座構件63於共同的位置對成形前基板W及樹脂成形品P的端部進行鉤掛並加以保持,且與成形前基板W及樹脂成形品P的四邊分別對應地設置。各保持爪641以能夠旋轉的方式設置於基座構件63,且設為能夠在對成形前基板W或樹脂成形品P進行保持的保持位置R(參照圖4)與自保持位置R退避的退避位置Q(參照圖5)之間旋轉。The holding
而且,各保持爪641於保持位置R,藉由其自由端部鉤掛於成形前基板W或樹脂成形品P的端部而對成形前基板W及樹脂成形品P分別進行保持。另外,各保持爪641於保持位置R,其自由端部的內表面與成形前基板W或樹脂成形品P的外周端面Wa接觸而相對於基座構件63於共同的位置對成形前基板W及樹脂成形品P分別進行定位。藉由相對於基座構件63對成形前基板W或樹脂成形品P進行定位,而亦相對於後述的保持板65的保持面65a對成形前基板W及樹脂成形品P進行定位。Furthermore, each holding
保持爪移動部642使保持爪641在對成形前基板W或樹脂成形品P進行保持的保持位置R與自該保持位置R退避的退避位置Q之間移動。The holding
具體而言,如圖4~圖8所示,保持爪移動部642具有:聯動機構642a,使與四邊分別對應地設置的保持爪641聯動;以及保持爪驅動部642b,經由聯動機構642a而使與四邊分別對應地設置的保持爪641移動。再者,於圖6~圖8中省略了保持爪驅動部642b的圖示。Specifically, as shown in FIGS. 4 to 8 , the holding
聯動機構642a使與四邊分別對應地設置的保持爪641聯動,而將該些保持爪641同時於保持位置R與退避位置Q切換。具體而言,特別是如圖8所示,聯動機構642a具有:連接軸642a1,將設置於各邊的一個或多個保持爪641連接;以及連結部642a2,使各邊的連接軸642a1相互連結。各連接軸642a1設置成相對於基座構件63能夠繞沿著各邊的軸旋轉,藉由該連接軸642a1繞軸旋轉,各保持爪641在保持位置R與退避位置Q之間移動。The
圖8所示的例子為如下結構:相互相向的長邊部的連接軸642a1藉由連結部642a2而連結,一個短邊部的連接軸642a1藉由連結部642a2而連結於各長邊部的連接軸642a1。作為將長邊部的連接軸642a1彼此連結的連結部642a2,例如可使用連桿機構,作為將長邊部的連接軸642a1及短邊部的連接軸642a1連結的連結部642a2,例如可使用萬向接頭(universal joint)。除此以外,作為聯動機構642a,亦可為使用齒輪機構的機構。The example shown in FIG8 is a structure in which the connecting shafts 642a1 of the long sides facing each other are connected by a connecting portion 642a2, and the connecting shaft 642a1 of one short side is connected to the connecting shafts 642a1 of each long side by a connecting portion 642a2. As the connecting portion 642a2 that connects the connecting shafts 642a1 of the long sides, for example, a connecting rod mechanism can be used, and as the connecting portion 642a2 that connects the connecting shafts 642a1 of the long sides and the connecting shafts 642a1 of the short sides, for example, a universal joint can be used. In addition, as the
如圖4及圖5所示,保持爪驅動部642b使藉由聯動機構642a而連結的多個保持爪641在保持位置R與退避位置Q之間移動。該保持爪驅動部642b使設置於任一邊的連接軸642a1旋轉,例如可使用氣缸來構成。As shown in Fig. 4 and Fig. 5, the holding
進而,如圖4~圖7所示,保持單元61更包括具有用於對成形前基板W或樹脂成形品P進行保持的保持面65a的保持板65,以便即便於表背反轉的情況下亦確實地保持成形前基板W或樹脂成形品P。Furthermore, as shown in FIGS. 4 to 7 , the holding
保持板65與成形前基板W對應地於俯視下呈矩形形狀。該保持板65在與位於保持位置R的保持爪641之間夾著並保持成形前基板W或樹脂成形品P。The holding
具體而言,保持板65形成有收容第一狀態的成形前基板W的電子零件Wx或第一狀態的樹脂成形品P的樹脂成形部分的收容部651,於該收容部651的周圍形成有對成形前基板W或樹脂成形品P的周緣部進行保持的保持面65a。另外,該保持板65藉由板移動部66而相對於基座構件63進行升降移動。Specifically, the holding
另外,保持板65設置於與成形前基板W或樹脂成形品P的四邊分別對應地設置的保持爪641的內側。即,保持爪641設置成包圍保持板65的四邊。而且,保持板65於四邊的保持爪641的內側進行升降移動。進而,保持爪641構成為於保持位置R與保持板65的外周端面接觸而使保持爪641物理性地停止於保持位置R。In addition, the holding
板移動部66使保持板65在保持面65a和藉由定位機構64而定位的成形前基板W或樹脂成形品P接觸的接觸位置T(參照圖7)與保持面65a自成形前基板W或樹脂成形品P離開的分離位置U(參照圖6)之間移動。如圖6及圖7所示,板移動部66具有:引導機構661,對保持板65在接觸位置T與分離位置U之間進行引導;以及板驅動部662,使保持板65移動。引導機構661具有:引導部661a,設置於基座構件63;以及滑動部661b,設置於保持板65並沿著引導部661a滑動。板驅動部662例如可使用氣缸來構成。The
此處,參照圖9的(a)至圖9的(e)及圖10的(a)至圖10的(e)對第一搬送機構6的動作進行說明。再者,於圖9的(a)至圖9的(e)中示出了對成形前基板W進行搬送的例子,於圖10的(a)至圖10的(e)中示出了對樹脂成形品P進行搬送的例子。Here, the operation of the
第一搬送機構6於藉由板移動部66而使保持板65處於分離位置U的狀態下,藉由定位機構64的保持爪641來對成形前基板W或樹脂成形品P進行定位並加以保持(參照圖9的(a)→圖9的(b)、圖10的(a)→圖10的(b))。然後,第一搬送機構6於藉由定位機構64的保持爪641而將成形前基板W或樹脂成形品P定位後,藉由板移動部66而使保持板65處於接觸位置T(參照圖9的(b)→圖9的(c)、圖10的(b)→圖10的(c))。使保持板65移動至接觸位置T,藉此經定位的成形前基板W或樹脂成形品P由保持爪641及保持板65保持。於該狀態下,第一搬送機構6藉由多關節臂部62而使保持單元61表背反轉(參照圖9的(d)→圖9的(e)、圖10的(d)→圖10的(e)),藉此可穩定地進行成形前基板W或樹脂成形品P的第一狀態及第二狀態的切換。The
<第一搬送機構6及第二搬送機構7的動作>
接下來,參照圖3、圖9的(a)至圖9的(e)及圖10的(a)至圖10的(e)對第一搬送機構6及第二搬送機構7的搬送動作進行說明。
<Operation of the first conveying
首先,自基板供給部2的收納箱21藉由取出機構22而將成形前基板W載置於成形前基板平台23(參照圖3)。此處,於成形前基板平台23上,成形前基板W為第一狀態(所謂上翻狀態)。First, the pre-molding substrate W is placed on the pre-molding substrate stage 23 (see FIG. 3 ) from the
於對位於成形前基板平台23的成形前基板W進行保持的情況下,第一搬送機構6的多關節臂部62使保持單元61移動至成形前基板平台23的上方。此時,保持單元61的保持爪641處於退避位置Q(參照圖9的(a))。When holding the pre-molding substrate W on the
然後,使保持單元61移動至用於對成形前基板W進行保持的高度位置,藉由保持爪移動部642而使保持爪641處於保持位置R(參照圖9的(b))。藉此,保持爪641與成形前基板W的外周端面Wa接觸,成形前基板W相對於基座構件63被定位,並且由保持爪641保持。於成形前基板W由該保持爪641保持之前,保持板65處於分離位置U。Then, the holding
於保持爪641保持成形前基板W後,板移動部66使位於分離位置U的保持板65移動至接觸位置T(參照圖9的(c))。藉此,經定位的成形前基板W被保持爪641及保持板65夾著並保持(參照圖9的(d))。於設為該狀態後,第一搬送機構6的多關節臂部62使保持單元61表背反轉,並且使其移動至第一移載平台4(參照圖9的(e))。After the holding
藉由以上的動作,第一搬送機構6對位於成形前基板平台23的第一狀態的成形前基板W進行保持,將成形前基板W設為第二狀態而搬送並交給第一移載平台4。此處,第一搬送機構6藉由解除保持爪641的保持而將成形前基板W交給第一移載平台4。By the above actions, the
接下來,第二搬送機構7接收位於第一移載平台4的第二狀態的成形前基板W(參照圖3),並搬送至上模10而將成形前基板W交給上模10。此處,第二搬送機構7於自第一移載平台4接收成形前基板W時,在保持著樹脂成形品P的情況下,將第二狀態的樹脂成形品P交給第二移載平台5(參照圖3)。Next, the second conveying
於在第二移載平台5設置有樹脂成形品P的情況下,第一搬送機構6的多關節臂部62使保持單元61移動至第二移載平台5的下方。此時,保持單元61的保持爪641處於退避位置Q(參照圖10的(a))。When the resin molded product P is placed on the
然後,使保持單元61移動至用於對樹脂成形品P進行保持的高度位置,藉由保持爪移動部642而使保持爪641處於保持位置R(參照圖10的(b))。藉此,保持爪641與樹脂成形品P的外周端面Wa接觸,樹脂成形品P相對於基座構件63被定位,並且由保持爪641保持。於樹脂成形品P由該保持爪641保持之前,保持板65處於分離位置U。Then, the holding
於保持爪641保持樹脂成形品P後,板移動部66使位於分離位置U的保持板65移動至接觸位置T(參照圖10的(c))。藉此,經定位的樹脂成形品P被保持爪641及保持板65夾著並保持(參照圖10的(d))。於設為該狀態後,第一搬送機構6的多關節臂部62使保持單元61表背反轉,並且使其移動至成形品收納部3的樹脂成形品平台33(參照圖10的(e))。此處,第一搬送機構6解除保持爪641的保持,藉此將第一狀態(所謂上翻狀態)的樹脂成形品P載置於樹脂成形品平台33。After the holding
於將樹脂成形品P以第一狀態載置於樹脂成形品平台33後,成形品收納部3的收納機構32對位於樹脂成形品平台33的樹脂成形品P進行按壓而收納於收納箱31(參照圖3)。
再者,於將樹脂成形品P以第一狀態載置於樹脂成形品平台33後,成形品收納部3的收納機構32亦可如上所述般夾著樹脂成形品P移動至收納箱31附近。於該情況下,如上所述,於樹脂成形品P移動至收納箱31附近後,藉由收納機構32等來按壓樹脂成形品P而收納於收納箱31。
After the resin molded product P is placed on the resin molded
<本實施形態的效果>
藉由本實施形態的樹脂成形裝置100,第一搬送機構6與成形前基板W的外周端面Wa接觸而相對於基座構件63對成形前基板W進行定位,因此可不使用定位銷地對成形前基板W進行定位並加以保持。其結果,可將成形前基板W搬送至適當的位置,於之後的處理中可避免報告由成形前基板W的位置偏移引起的錯誤,從而防止樹脂成形的動作停止。另外,於製成不報告錯誤的結構的情況下,可防止因成形前基板W的位置偏移而產生外觀不良等樹脂成形品P的不良。
<Effects of the present embodiment>
According to the
<其他變形實施形態> 再者,本發明並不限於所述實施形態。 <Other variant implementation forms> Furthermore, the present invention is not limited to the above-mentioned implementation forms.
例如,成形品收納部3為收納第一狀態(所謂上翻狀態)的樹脂成形品P的結構,但亦可設為收納第二狀態(所謂下翻狀態)的樹脂成形品P的結構。於該情況下,第一搬送機構6成為如下結構:於自第二移載平台5向樹脂成形品平台33搬送樹脂成形品P時,不使保持單元61表背反轉。For example, the molded
另外,所述實施形態的第一搬送機構6為對成形前基板W及樹脂成形品P此兩者進行搬送的共同的機構,但亦可為分別包括對成形前基板W進行搬送的第一搬送機構6以及對樹脂成形品P進行搬送的第一搬送機構6的結構。同樣地,第二搬送機構7為對成形前基板W及樹脂成形品P此兩者進行搬送的共同的機構,但亦可為分別包括對成形前基板W進行搬送的第二搬送機構7以及對樹脂成形品P進行搬送的第二搬送機構7的結構。In addition, the first conveying
進而,所述實施形態的第一搬送機構6為使保持單元61表背反轉的結構,但亦可設為不使保持單元61表背反轉的結構。Furthermore, the
另外,保持爪移動部642亦可藉由將設置於相向的邊的保持爪641彼此的間隔擴大或縮小來切換保持位置R與退避位置Q。In addition, the holding
而且,所述實施形態的定位機構64具有使用保持爪641來保持成形對象物的功能,但亦可不具有對成形對象物進行保持的功能,而僅具有與成形對象物的外周端面接觸來進行定位的功能。於該情況下,保持單元61成為獨立於定位機構64的、具有對藉由定位機構64而定位的成形對象物進行保持的保持部的結構。Furthermore, the
此外,保持單元61亦可設為不具有保持板65的結構。於該情況下,例如考慮設為如下結構:於保持爪641形成供成形對象物W的端部進入的凹部,該凹部與成形對象物的外周端面接觸,並且夾著成形對象物W的表面及背面。藉由該結構,即便於表背反轉的情況下,亦可維持成形對象物W在平面方向上被定位的狀態。Furthermore, the holding
而且,亦可設為於樹脂成形模組B具有多層成形模10、11。於該情況下,如圖11所示,第二搬送機構7成為與多層成形模10、11對應地具有多個基板搬送部71及多個成形品搬送部72的結構。另外,如圖11所示,第一移載平台4及第二移載平台5亦與多層成形模10、11對應地成為多層結構。於該結構中,第一搬送機構6自成形前基板平台23向多層第一移載平台4一個一個地搬送成形前基板W,並自多層第二移載平台5向樹脂成形品平台33一個一個地搬送樹脂成形品P。Furthermore, the resin molding module B may include a plurality of molding dies 10 and 11. In this case, as shown in FIG. 11 , the second conveying
除此以外,本發明並不限於所述實施形態,當然能夠於不脫離其主旨的範圍內進行各種變形。 [產業上的可利用性] In addition, the present invention is not limited to the above-described embodiments, and various modifications are possible without departing from the gist of the invention. [Industrial Applicability]
根據本發明,可不使用定位銷地對成形對象物進行定位並加以保持。According to the present invention, the object to be formed can be positioned and held without using positioning pins.
10:成形模(上模) 100:樹脂成形裝置 101:上台板 102:可動盤 103:下台板 11:成形模(下模) 111:底面構件 112:側面構件 113:基座板 114:彈性構件 11C:模腔 12:合模機構 13:密閉結構 14:移動平台 15:樹脂材料收容部 16:樹脂材料投入機構 17:樹脂材料搬送機構 171:樹脂材料搬送部 172:膜回收部 2:基板供給部(成形對象物供給部) 21、31:收納箱 22:取出機構 23:成形前基板平台 24、34:導軌 3:成形品收納部(成形對象物收納部) 32:收納機構 33:樹脂成形品平台 4:第一移載平台(移載平台) 41、711:定位銷 5:第二移載平台(移載平台) 6:第一搬送機構(搬送裝置) 61:保持單元 62:多關節臂部 621:前端部 63:基座構件 64:定位機構 641:保持爪 642:保持爪移動部 642a:聯動機構 642a1:連接軸 642a2:連結部 642b:保持爪驅動部 65:保持板 65a:保持面 651:收容部 66:板移動部 661:引導機構 661a:引導部 661b:滑動部 662:板驅動部 7:第二搬送機構(交接機構) 71:基板搬送部 72:成形品搬送部 A:基板供給/收納模組 B:樹脂成形模組 C:樹脂材料供給模組 COM:控制部 F:脫模膜 P:樹脂成形品(成形對象物) Q:退避位置 R:保持位置 T:接觸位置 U:分離位置 W:成形前基板(成形對象物/基板/成形完畢基板) Wa:外周端面 Wx:電子零件 10: Forming mold (upper mold) 100: Resin forming device 101: Upper platen 102: Movable platen 103: Lower platen 11: Forming mold (lower mold) 111: Bottom member 112: Side member 113: Base plate 114: Elastic member 11C: Cavity 12: Clamping mechanism 13: Sealing structure 14: Moving platform 15: Resin material storage unit 16: Resin material feeding mechanism 17: Resin material conveying mechanism 171: Resin material conveying unit 172: Film recovery unit 2: Substrate supply unit (molding object supply unit) 21, 31: Storage box 22: Take-out mechanism 23: Pre-molding substrate platform 24, 34: Guide rail 3: Molded product storage section (molding object storage section) 32: Storage mechanism 33: Resin molded product platform 4: First transfer platform (transfer platform) 41, 711: Positioning pin 5: Second transfer platform (transfer platform) 6: First conveying mechanism (conveying device) 61: Holding unit 62: Multi-joint arm section 621: Front end section 63: Base member 64: Positioning mechanism 641: Holding claw 642: Holding claw moving section 642a: Linking mechanism 642a1: Connecting shaft 642a2: Connecting section 642b: Holding claw driving section 65: Holding plate 65a: Holding surface 651: Receiving section 66: Plate moving part 661: Guide mechanism 661a: Guide part 661b: Sliding part 662: Plate driving part 7: Second conveying mechanism (handover mechanism) 71: Substrate conveying part 72: Molded product conveying part A: Substrate supply/storage module B: Resin molding module C: Resin material supply module COM: Control unit F: Mold release film P: Resin molded product (molding object) Q: Retract position R: Holding position T: Contact position U: Separation position W: Substrate before molding (molding object/substrate/molding completed substrate) Wa: Peripheral end surface Wx: Electronic parts
圖1是表示本發明的一實施形態的樹脂成形裝置的結構的示意圖。 圖2是表示所述一實施形態的樹脂成形模組的結構的示意圖。 圖3是示意性地表示所述一實施形態的基板供給部及成形品收納部的結構,並且表示該些與各移載平台之間的成形前基板的搬送動作及樹脂成形品的搬送動作的圖。 圖4是示意性地表示於所述一實施形態的第一搬送機構中保持爪位於保持位置的狀態的與長邊方向正交的剖面圖。 圖5是示意性地表示於所述一實施形態的第一搬送機構中保持爪位於退避位置的狀態的與長邊方向正交的剖面圖。 圖6是示意性地表示於所述一實施形態的第一搬送機構中保持板位於分離位置的狀態的與短邊方向正交的剖面圖。 圖7是示意性地表示於所述一實施形態的第一搬送機構中保持板位於接觸位置的狀態的與短邊方向正交的剖面圖。 圖8是表示所述一實施形態的保持爪移動部中的聯動機構的結構的示意圖。 圖9的(a)至圖9的(e)是表示所述一實施形態的保持單元所進行的成形前基板的定位/保持動作及搬送動作的示意圖。 圖10的(a)至圖10的(e)是表示所述一實施形態的保持單元所進行的樹脂成形品的定位/保持動作及搬送動作的示意圖。 圖11是表示變形實施形態的基板供給/收納模組的結構(兩層結構)的示意圖。 FIG. 1 is a schematic diagram showing the structure of a resin molding device of an embodiment of the present invention. FIG. 2 is a schematic diagram showing the structure of a resin molding module of the embodiment. FIG. 3 is a diagram schematically showing the structure of a substrate supply unit and a molded product storage unit of the embodiment, and showing the conveying action of a pre-molded substrate and a conveying action of a resin molded product between these and each transfer platform. FIG. 4 is a cross-sectional diagram orthogonal to the long side direction schematically showing a state in which a holding claw is in a holding position in a first conveying mechanism of the embodiment. FIG. 5 is a cross-sectional diagram orthogonal to the long side direction schematically showing a state in which a holding claw is in a retracted position in a first conveying mechanism of the embodiment. FIG. 6 is a cross-sectional view orthogonal to the short side direction schematically showing a state where the holding plate is located at a separated position in the first conveying mechanism of the embodiment. FIG. 7 is a cross-sectional view orthogonal to the short side direction schematically showing a state where the holding plate is located at a contact position in the first conveying mechanism of the embodiment. FIG. 8 is a schematic diagram showing the structure of the linkage mechanism in the holding claw moving part of the embodiment. FIG. 9 (a) to FIG. 9 (e) are schematic diagrams showing the positioning/holding action and conveying action of the pre-molding substrate performed by the holding unit of the embodiment. FIG. 10 (a) to FIG. 10 (e) are schematic diagrams showing the positioning/holding action and conveying action of the resin molded product performed by the holding unit of the embodiment. FIG11 is a schematic diagram showing the structure (two-layer structure) of a substrate supply/storage module of a modified implementation form.
6:第一搬送機構(搬送裝置) 6: First conveying mechanism (conveying device)
61:保持單元 61: Keep unit
62:多關節臂部 62: Multi-joint arm
621:前端部 621: Front end
63:基座構件 63: Base components
64:定位機構 64: Positioning mechanism
641:保持爪 641:Keep claws
642:保持爪移動部 642: Keep claw moving part
642a:聯動機構 642a: linkage mechanism
642a1:連接軸 642a1: Connecting shaft
642a2:連結部 642a2: Connection part
642b:保持爪驅動部 642b: Holding claw drive unit
65:保持板 65: Holding board
65a:保持面 65a: Keep the face
651:收容部 651: Containment Department
R:保持位置 R: Hold position
U:分離位置 U: Separation position
W:成形前基板(成形對象物/基板/成形完畢基板) W: Substrate before molding (molding object/substrate/molding completed substrate)
Wa:外周端面 Wa: peripheral end surface
Wx:電子零件 Wx: Electronic parts
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2023-117335 | 2023-07-19 | ||
JP2023117335A JP7579925B1 (en) | 2023-07-19 | 2023-07-19 | Conveying device, resin molding device, and method for manufacturing resin molded product |
Publications (1)
Publication Number | Publication Date |
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TW202505649A true TW202505649A (en) | 2025-02-01 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW113121564A TW202505649A (en) | 2023-07-19 | 2024-06-12 | Transporting apparatus, resin molding apparatus and resin molded product manufacturing method |
Country Status (3)
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JP (1) | JP7579925B1 (en) |
TW (1) | TW202505649A (en) |
WO (1) | WO2025017972A1 (en) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09189891A (en) * | 1996-01-08 | 1997-07-22 | Hitachi Electron Eng Co Ltd | Clamp mechanism for rectangular glass substrate cassette |
JP2001135701A (en) | 1999-11-02 | 2001-05-18 | Olympus Optical Co Ltd | Apparatus and method for substrate transfer |
JP2003273187A (en) | 2002-03-12 | 2003-09-26 | Matsushita Electric Ind Co Ltd | Method and apparatus for transferring thin sheet material |
JP6196870B2 (en) | 2013-10-09 | 2017-09-13 | 株式会社ディスコ | Wafer transfer device |
JP6128050B2 (en) | 2014-04-25 | 2017-05-17 | トヨタ自動車株式会社 | Non-contact transfer hand |
JP7148373B2 (en) | 2018-11-20 | 2022-10-05 | 株式会社東京精密 | Wafer delivery device |
JP7562146B2 (en) | 2021-10-21 | 2024-10-07 | アピックヤマダ株式会社 | Resin sealing device and resin sealing method |
-
2023
- 2023-07-19 JP JP2023117335A patent/JP7579925B1/en active Active
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2024
- 2024-03-27 WO PCT/JP2024/012480 patent/WO2025017972A1/en unknown
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WO2025017972A1 (en) | 2025-01-23 |
JP7579925B1 (en) | 2024-11-08 |
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