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TW202505649A - Transporting apparatus, resin molding apparatus and resin molded product manufacturing method - Google Patents

Transporting apparatus, resin molding apparatus and resin molded product manufacturing method Download PDF

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Publication number
TW202505649A
TW202505649A TW113121564A TW113121564A TW202505649A TW 202505649 A TW202505649 A TW 202505649A TW 113121564 A TW113121564 A TW 113121564A TW 113121564 A TW113121564 A TW 113121564A TW 202505649 A TW202505649 A TW 202505649A
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Taiwan
Prior art keywords
molding
holding
forming
resin
conveying
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TW113121564A
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Chinese (zh)
Inventor
長野大輝
中尾聡
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日商Towa股份有限公司
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Publication of TW202505649A publication Critical patent/TW202505649A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)

Abstract

The present invention positions and holds a molding object without using a positioning pin. A transporting apparatus 6 which transports a molding object W includes a holding unit 61 that holds the molding object W and an articulated arm portion 62 that moves the holding unit 61. The holding unit 6 includes a base member 63 connected to a tip portion 621 of the articulated arm portion 62 and a positioning mechanism 64 that contacts the outer peripheral end surface of the molding object W to position the molding object W relative to the base member 63.

Description

搬送裝置、樹脂成形裝置及樹脂成形品的製造方法Conveying device, resin molding device and method for manufacturing resin molded product

本發明是有關於一種搬送裝置、樹脂成形裝置及樹脂成形品的製造方法。The present invention relates to a conveying device, a resin molding device and a method for manufacturing a resin molded product.

先前,作為對工件進行樹脂模製的樹脂模製裝置,考慮有專利文獻1中所示的裝置。該樹脂模製裝置中,使用包括機械手的搬送機器人來進行工件自供給庫的取出或成形品向收納庫的收納等。此處,於機械手中,於多關節機器人的前端使用在與工件的形狀相應的叉狀的構件上包括吸附機構的機構。 [現有技術文獻] [專利文獻] Previously, as a resin molding device for performing resin molding on a workpiece, the device shown in Patent Document 1 was considered. In this resin molding device, a transport robot including a manipulator is used to take out the workpiece from a supply warehouse or store the molded product in a storage warehouse. Here, in the manipulator, a mechanism including a suction mechanism on a fork-shaped member corresponding to the shape of the workpiece is used at the front end of the multi-joint robot. [Prior art document] [Patent document]

[專利文獻1]日本專利特開2019-145548號公報[Patent Document 1] Japanese Patent Publication No. 2019-145548

[發明所欲解決之課題][The problem that the invention wants to solve]

然而,於專利文獻1中未揭示相對於機械手對工件進行定位的結構。若工件相對於機械手的定位不充分,則機械手所放置的工件的位置變得不適當,因此會報告錯誤,樹脂模製裝置的動作會停止。於製成不報告錯誤的結構的情況下,機械手會將工件配置於不適當的位置,於之後的處理中產生不良情況,結果會產生外觀不良等樹脂成形品的不良。However, Patent Document 1 does not disclose a structure for positioning the workpiece relative to the robot. If the workpiece is not positioned sufficiently relative to the robot, the position of the workpiece placed by the robot becomes inappropriate, so an error is reported and the operation of the resin molding device stops. In the case of a structure that does not report an error, the robot will place the workpiece at an inappropriate position, causing defects in subsequent processing, resulting in defects in the appearance of the resin molded product.

再者,亦考慮於機械手設置定位銷並將定位銷插入至形成於工件的定位用孔中進行定位,但存在如下情況:因工件的翹曲或位置偏移等而定位銷無法插入至定位用孔中。Furthermore, it is also considered to provide a positioning pin on the robot and insert the positioning pin into a positioning hole formed in the workpiece for positioning. However, there is a case where the positioning pin cannot be inserted into the positioning hole due to warping or positional deviation of the workpiece.

因此,本發明是為了解決所述問題而完成,其主要課題在於,不使用定位銷地對成形對象物進行定位並加以保持。 [解決課題之手段] Therefore, the present invention is completed to solve the above-mentioned problem, and its main subject is to position and hold the formed object without using positioning pins. [Means for solving the problem]

即,本發明的搬送裝置為對成形對象物進行搬送的搬送裝置,且特徵在於包括:保持單元,對所述成形對象物進行保持;以及多關節的臂部,使所述保持單元移動,所述保持單元包括:基座構件,連接於所述臂部的前端部;以及定位機構,與所述成形對象物的外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。 [發明的效果] That is, the conveying device of the present invention is a conveying device for conveying a molding object, and is characterized by comprising: a holding unit for holding the molding object; and a multi-jointed arm for moving the holding unit, wherein the holding unit comprises: a base member connected to the front end of the arm; and a positioning mechanism for contacting the outer peripheral end surface of the molding object and positioning the molding object relative to the base member. [Effect of the invention]

藉由如此般構成的本發明,可不使用定位銷地對成形對象物進行定位並加以保持。According to the present invention thus constituted, the object to be formed can be positioned and held without using positioning pins.

接下來,舉例來進一步詳細說明本發明的技術。但是,本發明並不由以下的技術限定。Next, examples are given to further illustrate the technology of the present invention. However, the present invention is not limited to the following technology.

本發明的技術1的搬送裝置為對成形對象物進行搬送的搬送裝置,且特徵在於包括:保持單元,對所述成形對象物進行保持;以及多關節臂部,使所述保持單元移動,所述保持單元包括:基座構件,連接於所述多關節臂部的前端部;以及定位機構,與所述成形對象物的外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。 若為該搬送裝置,則與成形對象物的外周端面接觸而相對於基座構件對成形對象物進行定位,因此可不使用定位銷地對成形對象物進行定位並加以保持。其結果,可將成形對象物搬送至適當的位置,於之後的處理中可避免報告由成形對象物的位置偏移引起的錯誤,從而防止樹脂成形的動作停止。另外,於製成不報告錯誤的結構的情況下,可防止因成形對象物的位置偏移而產生外觀不良等樹脂成形品的不良。 The conveying device of the technology 1 of the present invention is a conveying device for conveying a molding object, and is characterized in that it includes: a holding unit for holding the molding object; and a multi-joint arm for moving the holding unit, and the holding unit includes: a base member connected to the front end of the multi-joint arm; and a positioning mechanism for contacting the outer peripheral end surface of the molding object and positioning the molding object relative to the base member. In the case of this conveying device, the molding object is contacted with the outer peripheral end surface of the molding object and positioned relative to the base member, so that the molding object can be positioned and held without using a positioning pin. As a result, the molding object can be conveyed to an appropriate position, and in subsequent processing, it is possible to avoid reporting errors caused by the positional deviation of the molding object, thereby preventing the resin molding action from stopping. In addition, by making a structure that does not report errors, defects in the resin molded product such as poor appearance caused by positional deviation of the molded object can be prevented.

理想的是,本發明的技術2的搬送裝置除了所述技術1的結構以外,所述定位機構包括:保持爪,對所述成形對象物進行保持;以及保持爪移動部,使所述保持爪移動,所述保持爪移動部使所述保持爪在對所述成形對象物進行保持的保持位置與自該保持位置退避的退避位置之間移動,位於所述保持位置的所述保持爪與所述外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。 若為該結構,則藉由保持爪而相對於基座構件對成形對象物進行定位,因此可於對成形對象物進行定位的同時保持該經定位的成形對象物。 Ideally, in addition to the structure of the above-mentioned technique 1, the conveying device of the technique 2 of the present invention includes: a holding claw for holding the molding object; and a holding claw moving part for moving the holding claw, wherein the holding claw moving part moves the holding claw between a holding position for holding the molding object and a retreat position for retreating from the holding position, wherein the holding claw at the holding position contacts the outer peripheral end surface to position the molding object relative to the base member. If this structure is adopted, the molding object is positioned relative to the base member by the holding claw, so that the molded object can be positioned while the molded object is held.

理想的是,本發明的技術3的搬送裝置除了所述技術2的結構以外,所述成形對象物於俯視下呈矩形形狀,所述保持爪與所述成形對象物的四邊分別對應地設置。 若為該結構,則可確實地保持於俯視下呈矩形形狀的成形對象物,同時相對於基座構件對成形對象物進行定位。 Ideally, in addition to the structure of the above-mentioned technique 2, the conveying device of the technique 3 of the present invention has the following structure: the object to be formed is rectangular in plan view, and the holding claws are respectively provided corresponding to the four sides of the object to be formed. If this structure is adopted, the object to be formed, which is rectangular in plan view, can be surely held, and the object to be formed can be positioned relative to the base member.

理想的是,本發明的技術4的搬送裝置除了所述技術3的結構以外,所述保持爪移動部包括:聯動機構,使與所述四邊分別對應地設置的所述保持爪聯動;以及保持爪驅動部,經由所述聯動機構而使與所述四邊分別對應地設置的所述保持爪移動。 若為該結構,則可藉由與四邊分別對應地設置的保持爪而一舉定位成形前基板。另外,可藉由共同的保持爪驅動部而使與四邊分別對應地設置的保持爪移動,且可避免保持單元的大型化。 Ideally, in addition to the structure of the above-mentioned technique 3, the conveying device of the technique 4 of the present invention includes: a linkage mechanism that links the above-mentioned retaining claws arranged corresponding to the above-mentioned four sides; and a retaining claw driving unit that moves the above-mentioned retaining claws arranged corresponding to the above-mentioned four sides through the linkage mechanism. If it is this structure, the front substrate of the molding can be positioned in one move by the retaining claws arranged corresponding to the four sides. In addition, the retaining claws arranged corresponding to the four sides can be moved by the common retaining claw driving unit, and the enlargement of the retaining unit can be avoided.

理想的是,本發明的技術5的搬送裝置除了所述技術2至技術4的任一個結構以外,更包括保持板,所述保持板在與位於所述保持位置的所述保持爪之間夾著並保持所述成形對象物。 若為該結構,則利用保持板及保持爪來夾著藉由保持爪而定位的成形對象物,因此可確實地保持成形對象物,可防止於搬送時成形對象物發生偏移。 Ideally, the conveying device of technology 5 of the present invention includes, in addition to any one of the structures of technology 2 to technology 4, a retaining plate that clamps and holds the molding object between the retaining plate and the retaining claw located at the retaining position. If this structure is adopted, the retaining plate and the retaining claw are used to clamp the molding object positioned by the retaining claw, so that the molding object can be securely held, and the molding object can be prevented from being offset during conveyance.

理想的是,本發明的技術6的搬送裝置除了所述技術5的結構以外,所述保持板與所述成形對象物對應地於俯視下呈矩形形狀,所述保持爪設置成包圍所述保持板的四邊,於所述保持位置與所述保持板接觸。 若為該結構,則保持爪於保持位置與保持板接觸,因此可將保持爪物理性地留於保持位置。其結果,可相對於基座構件確實地定位成形對象物。 Ideally, in addition to the structure of the above-mentioned technique 5, the conveying device of the technique 6 of the present invention has a rectangular shape in a plan view corresponding to the above-mentioned object to be formed, and the above-mentioned retaining claw is arranged to surround the four sides of the above-mentioned retaining plate and contact the above-mentioned retaining plate at the above-mentioned retaining position. If it is this structure, the retaining claw contacts the retaining plate at the retaining position, so the retaining claw can be physically retained at the retaining position. As a result, the object to be formed can be accurately positioned relative to the base member.

理想的是,本發明的技術7的搬送裝置除了所述技術5或技術6的結構以外,更包括板移動部,所述板移動部使所述保持板在和藉由所述定位機構而定位的所述成形對象物接觸的接觸位置與自所述成形對象物離開的分離位置之間移動。 若為該結構,則可分別進行基於定位機構的定位動作與基於保持板的保持動作。其結果,可避免保持板妨礙基於定位機構的定位動作。 Ideally, the conveying device of technology 7 of the present invention includes a plate moving part in addition to the structure of technology 5 or technology 6, and the plate moving part moves the holding plate between a contact position with the molding object positioned by the positioning mechanism and a separation position away from the molding object. If it is this structure, the positioning action based on the positioning mechanism and the holding action based on the holding plate can be performed separately. As a result, it can be avoided that the holding plate interferes with the positioning action based on the positioning mechanism.

具體而言,理想的是,本發明的技術8的搬送裝置除了所述技術7的結構以外,於藉由所述板移動部而使所述保持板處於所述分離位置的狀態下,藉由所述定位機構而對所述成形對象物進行定位,並於藉由所述定位機構而將所述成形對象物定位後,藉由所述板移動部而使所述保持板處於所述接觸位置。 若為該結構,則保持板不會妨礙基於定位機構的成形對象物的定位,可藉由保持板而確實地保持經定位的成形對象物。 Specifically, it is desirable that the conveying device of the technique 8 of the present invention, in addition to the structure of the technique 7, positions the molding object by the positioning mechanism while the holding plate is in the separated position by the plate moving part, and after the molding object is positioned by the positioning mechanism, the holding plate is placed in the contact position by the plate moving part. If this structure is adopted, the holding plate will not hinder the positioning of the molding object by the positioning mechanism, and the positioned molding object can be reliably held by the holding plate.

本發明的技術9的搬送裝置除了所述技術1至技術8的任一個結構以外,可對在一面固定有電子零件的所述成形對象物進行搬送。 此處,於樹脂成形裝置中,有如下結構的裝置:以所述電子零件處於上側的第一狀態(上翻(tip up)狀態)收容成形對象物,以所述電子零件處於下側的第二狀態(下翻(tip down)狀態)將成形對象物設置於移載平台或成形模等。為了用於該樹脂成形裝置,理想的是,本技術9的搬送裝置對以所述電子零件處於上側的第一狀態載置的所述成形對象物進行保持,設為所述電子零件處於下側的第二狀態而交給移載平台。 若為該結構,則可以第一狀態收容成形前的成形對象物,可防止塵埃附著於成形前的成形對象物中與電子零件為相反側的背面(被成形模保持的面)。其結果,可防止樹脂成形品的外觀不良。 The conveying device of technology 9 of the present invention can convey the molding object having an electronic component fixed on one side in addition to any one of the structures of technology 1 to technology 8. Here, in the resin molding device, there is a device having the following structure: the molding object is accommodated in a first state (tip up state) in which the electronic component is on the upper side, and the molding object is set on a transfer platform or a molding mold in a second state (tip down state) in which the electronic component is on the lower side. In order to be used in the resin molding device, it is ideal that the conveying device of technology 9 holds the molding object placed in the first state in which the electronic component is on the upper side, and hands it over to the transfer platform in the second state in which the electronic component is on the lower side. With this structure, the pre-molding object can be contained in the first state, and dust can be prevented from adhering to the back side (the side held by the molding die) of the pre-molding object opposite to the electronic component. As a result, the appearance of the resin molded product can be prevented from being poor.

於本發明的技術10的搬送裝置中,所述保持單元可相對於所述基座構件對成形前的所述成形對象物及成形後的所述成形對象物分別於共同的位置進行保持。於本發明的技術10中,為於保持單元未設置用於對成形對象物進行定位的定位銷的結構,可不區別地保持成形前的成形對象物與成形後的成形對象物。 若為該結構,則無需相對於成形前的成形對象物及成形後的成形對象物分別設置搬送機構,可使搬送機構的設置空間小型化,且可使樹脂成形裝置的設置空間小型化。 In the conveying device of technology 10 of the present invention, the holding unit can hold the molding object before molding and the molding object after molding at a common position relative to the base member. In technology 10 of the present invention, the holding unit is not provided with a positioning pin for positioning the molding object, so the molding object before molding and the molding object after molding can be held indiscriminately. If it is this structure, there is no need to set a conveying mechanism respectively for the molding object before molding and the molding object after molding, which can make the installation space of the conveying mechanism smaller and the installation space of the resin molding device smaller.

另外,具有所述技術1至技術10的任一個搬送裝置的樹脂成形裝置亦為本發明的一態樣。In addition, a resin molding device having any one of the conveying devices of Techniques 1 to 10 is also an aspect of the present invention.

理想的是,本發明的技術12的樹脂成形裝置除了所述技術11以外,包括:成形對象物供給部,供給成形前的所述成形對象物;成形對象物收納部,收納成形後的所述成形對象物;第一移載平台,供成形前的所述成形對象物臨時設置;第二移載平台,供成形後的所述成形對象物臨時設置;以及交接機構,在所述各移載平台與成形模之間進行成形前的所述成形對象物及成形後的所述成形對象物的交接,所述搬送裝置在所述成形對象物供給部與所述第一移載平台之間進行成形前的所述成形對象物的交接,在所述成形對象物收納部與所述第二移載平台之間進行成形後的所述成形對象物的交接。 若為該結構,則可於藉由交接機構而在各移載平台與成形模之間交接成形對象物的期間,自成形對象物供給部將成形前的成形對象物搬送至第一移載平台,並自第二移載平台將成形後的成形對象物收納於成形對象物收納部。其結果,可縮短至自成形對象物供給部向成形模搬送成形前的成形對象物並自成形模將成形後的成形對象物收容於成形對象物收納部為止的時間。 Ideally, the resin forming device of the technology 12 of the present invention includes, in addition to the technology 11, a forming object supply section for supplying the forming object before forming; a forming object storage section for storing the forming object after forming; a first transfer platform for temporarily placing the forming object before forming; a second transfer platform for temporarily placing the forming object after forming; and a handover mechanism for handing over the forming object before forming and the forming object after forming between the transfer platforms and the forming mold, the conveying device for handing over the forming object before forming between the forming object supply section and the first transfer platform, and for handing over the forming object after forming between the forming object storage section and the second transfer platform. If this structure is adopted, during the period when the forming object is handed over between each transfer platform and the forming mold by the handover mechanism, the forming object before forming can be transported from the forming object supply section to the first transfer platform, and the forming object after forming can be stored in the forming object storage section from the second transfer platform. As a result, the time from the forming object supply section to the forming mold to the forming mold to the forming object after forming can be shortened.

理想的是,本發明的技術13的樹脂成形裝置除了所述技術12的結構以外,所述交接機構具有:成形前搬送部,對成形前的所述成形對象物進行搬送;以及成形後搬送部,對成形後的所述成形對象物進行搬送。 若為該結構,則可藉由共同的交接機構來搬送成形前的成形對象物及成形後的成形對象物。其結果,可於交接機構在各移載平台與成形模之間往返一次的期間,進行成形前的成形對象物的交接與成形後的成形對象物的交接,且可縮短該些的搬送所花費的時間。 Ideally, in addition to the structure of the above-mentioned technique 12, the resin molding device of the technique 13 of the present invention has the handover mechanism having: a pre-molding conveying section for conveying the molding object before molding; and a post-molding conveying section for conveying the molding object after molding. If it is this structure, the molding object before molding and the molding object after molding can be conveyed by a common handover mechanism. As a result, the molding object before molding and the molding object after molding can be handed over during the period when the handover mechanism goes back and forth between each transfer platform and the molding mold once, and the time spent on these conveyances can be shortened.

理想的是,本發明的技術14的樹脂成形裝置除了所述技術12或技術13的結構以外,所述成形對象物於一面固定有電子零件,所述成形對象物供給部以所述電子零件處於上側的第一狀態(上翻狀態)供給成形前的所述成形對象物,於所述第一移載平台以所述電子零件處於下側的第二狀態(下翻狀態)設置成形前的所述成形對象物。 若為該結構,則藉由搬送裝置的多關節臂部而使保持單元表背反轉,藉此可將藉由成形對象物供給部而以第一狀態供給的成形前的成形對象物設為第二狀態並搬送至第一移載平台。即,於由搬送裝置搬送之前,可將成形前的成形對象物設為第一狀態,因此可防止塵埃附著於成形前的成形對象物中與電子零件為相反側的背面(被成形模保持的面)。其結果,可防止樹脂成形品的外觀不良。 Ideally, in addition to the structure of the above-mentioned technique 12 or technique 13, the resin forming device of the technique 14 of the present invention has an electronic component fixed on one side of the forming object, and the forming object supply unit supplies the forming object before forming in a first state (upturned state) in which the electronic component is on the upper side, and sets the forming object before forming on the first transfer platform in a second state (downturned state) in which the electronic component is on the lower side. If it is this structure, the front and back of the holding unit are reversed by the multi-jointed arm of the conveying device, thereby setting the forming object before forming supplied in the first state by the forming object supply unit to the second state and conveying it to the first transfer platform. That is, the object to be formed before forming can be set to the first state before being transported by the transport device, thereby preventing dust from adhering to the back surface (the surface held by the forming mold) of the object to be formed before forming, which is opposite to the electronic component. As a result, the appearance of the resin molded product can be prevented from being poor.

而且,樹脂成形品的製造方法亦為本發明的一態樣,所述樹脂成形品的製造方法為對成形對象物進行樹脂成形的製造方法,且包括:搬送步驟,藉由所述技術1至技術10中任一項所述的搬送裝置來搬送所述成形對象物;以及樹脂成形步驟,對所述成形對象物進行樹脂成形。Moreover, a method for manufacturing a resin molded product is also an aspect of the present invention, wherein the method for manufacturing a resin molded product is a method for performing resin molding on a molding object, and comprises: a conveying step, in which the molding object is conveyed by a conveying device described in any one of Techniques 1 to 10; and a resin molding step, in which the molding object is resin molded.

<本發明的一實施形態> 以下,參照圖式對本發明的樹脂成形裝置的一實施形態進行說明。 再者,以下所示的任一圖中,為了便於理解,均適宜省略或誇張而示意性地描繪。對於相同的結構要素,標註相同的符號並適宜省略說明。 <One embodiment of the present invention> Hereinafter, one embodiment of the resin molding device of the present invention will be described with reference to the drawings. In any of the following drawings, for the sake of ease of understanding, the drawings are schematically depicted with appropriate omissions or exaggerations. For the same structural elements, the same symbols are marked and the description is appropriately omitted.

<樹脂成形裝置的整體結構> 第一實施形態的樹脂成形裝置100中,藉由使用樹脂材料J的樹脂成形而對作為於一面固定有電子零件Wx的成形對象物的基板W進行樹脂密封來製造樹脂成形品P。再者,以下,將樹脂成形前的成形對象物(基板W)稱為「成形前基板W」,將樹脂成形後的成形對象物(基板W)稱為「成形完畢基板W」或「樹脂成形品P」。 <Overall structure of resin molding device> In the resin molding device 100 of the first embodiment, a substrate W as a molding object having an electronic component Wx fixed on one side is resin-sealed by resin molding using a resin material J to manufacture a resin molded product P. In addition, hereinafter, the molding object (substrate W) before resin molding is referred to as "pre-molding substrate W", and the molding object (substrate W) after resin molding is referred to as "molded substrate W" or "resin molded product P".

此處,作為基板W,於俯視下呈矩形形狀,例如可列舉:金屬製基板、樹脂製基板、玻璃製基板、陶瓷製基板、電路基板、半導體製基板、引線框架、矽晶圓、玻璃晶圓等。除此以外,基板W亦可為未施有配線的載體。Here, the substrate W is rectangular in a plan view, and examples thereof include metal substrates, resin substrates, glass substrates, ceramic substrates, circuit substrates, semiconductor substrates, lead frames, silicon wafers, glass wafers, etc. In addition, the substrate W may be a carrier without wiring.

另外,作為樹脂材料J,例如可列舉粉粒體狀樹脂(包含顆粒狀樹脂)、液狀樹脂等。另外,作為電子零件Wx,例如可列舉:半導體晶片、電阻元件、電容器元件等電子元件或將該些電子元件的至少一個樹脂密封的形態的電子零件。In addition, examples of the resin material J include powdered resins (including granular resins), liquid resins, etc. In addition, examples of the electronic components Wx include electronic components such as semiconductor chips, resistor elements, capacitor elements, or electronic components in a form where at least one of these electronic components is sealed with resin.

如圖1所示,該樹脂成形裝置100包括基板供給/收納模組A、兩個樹脂成形模組B以及樹脂材料供給模組C作為結構要素。再者,各結構要素(各模組A~C)相對於各個結構要素能夠拆裝且能夠更換。As shown in Fig. 1, the resin molding apparatus 100 includes a substrate supply/storage module A, two resin molding modules B, and a resin material supply module C as structural elements. Furthermore, each structural element (each module A to C) is detachable and replaceable relative to each structural element.

如圖1所示,基板供給/收納模組A包括:基板供給部2,供給成形前基板W;成形品收納部3,收容成形完畢基板W(樹脂成形品P);第一移載平台4,供成形前基板W臨時設置;第二移載平台5,供樹脂成形品P臨時設置;第一搬送機構6,為將成形前基板W自基板供給部2搬送至第一移載平台4並將樹脂成形品P自第二移載平台5搬送至成形品收納部3的搬送裝置;以及第二搬送機構7,為在各移載平台4、5與樹脂成形模組B的成形模10、成形模11之間進行成形前基板W及樹脂成形品P的搬送即交接的交接機構。再者,基板供給/收納模組A的各部的具體結構將於下文敘述。此外,儘管基板供給/收納模組A設置有控制樹脂成形裝置100操作的控制部COM,但是其他模組B和模組C也可以設置有控制部COM。As shown in FIG. 1 , the substrate supply/storage module A includes: a substrate supply section 2 for supplying a pre-molding substrate W; a molded product storage section 3 for storing a molded substrate W (resin molded product P); a first transfer platform 4 for temporarily placing the pre-molding substrate W; a second transfer platform 5 for temporarily placing the resin molded product P; a first conveying mechanism 6 for conveying the pre-molding substrate W from the substrate supply section 2 to the first transfer platform 4 and conveying the resin molded product P from the second transfer platform 5 to the molded product storage section 3; and a second conveying mechanism 7 for conveying or handing over the pre-molding substrate W and the resin molded product P between the transfer platforms 4, 5 and the molding dies 10, 11 of the resin molding module B. Furthermore, the specific structure of each section of the substrate supply/storage module A will be described below. In addition, although the substrate supply/storage module A is provided with the control unit COM for controlling the operation of the resin molding apparatus 100, the other modules B and C may also be provided with the control unit COM.

如圖2所示,各樹脂成形模組B具有:上模10,為對基板W進行保持的第一模;下模11,為形成有模腔11C的第二模;以及合模機構12,將上模10及下模11合模。上模10介隔上台板101而設置於上部固定盤(未圖示)。下模11介隔下台板103而設置於藉由合模機構12而升降的可動盤102。As shown in FIG2 , each resin molding module B comprises: an upper mold 10, which is a first mold for holding a substrate W; a lower mold 11, which is a second mold having a mold cavity 11C formed therein; and a mold clamping mechanism 12 for clamping the upper mold 10 and the lower mold 11. The upper mold 10 is disposed on an upper fixed platen (not shown) via an upper platen 101. The lower mold 11 is disposed on a movable platen 102 which is raised and lowered by the mold clamping mechanism 12 via a lower platen 103.

此處,上模10對基板W的背面(未固定電子零件Wx的面)進行吸附並加以保持。於上模10的下表面形成有抽吸口(未圖示),於上模10的內部形成有與抽吸口相連的抽吸流路(未圖示)。該抽吸流路連接於外部的抽吸裝置(未圖示)。Here, the upper mold 10 sucks and holds the back side (the side without the electronic component Wx fixed) of the substrate W. A suction port (not shown) is formed on the lower surface of the upper mold 10, and a suction flow path (not shown) connected to the suction port is formed inside the upper mold 10. The suction flow path is connected to an external suction device (not shown).

另外,下模11具有收容固定於基板W的電子零件Wx及樹脂材料J的模腔11C。具體而言,下模11具有:底面構件111,形成模腔11C的底面;以及側面構件112,包圍該底面構件111。藉由該底面構件111的上表面與側面構件112的內周面而形成模腔11C。另外,側面構件112設置成相對於底面構件111能夠相對地上下移動。具體而言,側面構件112相對於下模11的基座板113而由螺旋彈簧等多個彈性構件114支撐。進而,為了使樹脂成形品P的脫模性提高,下模11由脫模膜F覆蓋。另外,亦可於側面構件112的上表面設置排氣孔(未圖示)以排出空氣或氣體。除此以外,於上模10及下模11的周圍設置有用於在樹脂成形時對成形模10、成形模11的周圍進行抽真空的包含側壁部及O型環等密封構件等的密閉結構13。In addition, the lower mold 11 has a mold cavity 11C for accommodating the electronic component Wx and the resin material J fixed to the substrate W. Specifically, the lower mold 11 has: a bottom member 111, which forms the bottom surface of the mold cavity 11C; and a side member 112, which surrounds the bottom member 111. The mold cavity 11C is formed by the upper surface of the bottom member 111 and the inner peripheral surface of the side member 112. In addition, the side member 112 is arranged to be able to move up and down relative to the bottom member 111. Specifically, the side member 112 is supported by a plurality of elastic members 114 such as coil springs relative to the base plate 113 of the lower mold 11. Furthermore, in order to improve the demolding properties of the resin molded product P, the lower mold 11 is covered with a mold release film F. In addition, an exhaust hole (not shown) may be provided on the upper surface of the side member 112 to exhaust air or gas. In addition, a sealing structure 13 including a side wall portion and a sealing member such as an O-ring is provided around the upper mold 10 and the lower mold 11 to evacuate the surroundings of the molding mold 10 and the molding mold 11 during resin molding.

本實施形態的合模機構12為使用將伺服馬達等的旋轉轉換為直線移動的滾珠螺桿機構來使可動台板升降的直線移動方式的機構。再者,作為合模機構12,除此以外,亦可為使用例如曲柄連桿等連桿機構將伺服馬達等的動力源傳遞至可動台板的連桿方式的機構等。The mold clamping mechanism 12 of this embodiment is a linear movement type mechanism that uses a ball screw mechanism that converts the rotation of a servo motor or the like into a linear movement to raise and lower the movable platen. In addition, the mold clamping mechanism 12 may also be a connecting rod type mechanism that uses a connecting rod mechanism such as a crank connecting rod to transmit the power source of the servo motor or the like to the movable platen.

如圖1所示,樹脂材料供給模組C具有:移動平台14;樹脂材料收容部15,載置於移動平台14上;樹脂材料投入機構16,計量樹脂材料J並投入至樹脂材料收容部15;以及樹脂材料搬送機構17,對樹脂材料收容部15進行搬送而向下模11的模腔11C供給樹脂材料J。此處,樹脂材料收容部15是使用對脫模膜F進行保持的保持框而構成,藉由樹脂材料投入機構16而將樹脂材料J投入至被保持框保持的脫模膜F上。As shown in FIG1 , the resin material supply module C includes: a moving platform 14; a resin material storage part 15 placed on the moving platform 14; a resin material feeding mechanism 16 for measuring the resin material J and feeding it into the resin material storage part 15; and a resin material conveying mechanism 17 for conveying the resin material storage part 15 to supply the resin material J to the cavity 11C of the lower mold 11. Here, the resin material storage part 15 is constructed using a holding frame for holding the release film F, and the resin material feeding mechanism 16 is used to feed the resin material J onto the release film F held by the holding frame.

移動平台14於樹脂材料供給模組C內,在樹脂材料投入機構16的樹脂投入位置與用於將樹脂材料收容部15交給樹脂材料搬送機構17的搬送位置之間移動。The movable platform 14 moves within the resin material supply module C between a resin input position of the resin material input mechanism 16 and a conveying position for delivering the resin material storage portion 15 to the resin material conveying mechanism 17 .

另外,樹脂材料搬送機構17將收容有樹脂材料J的樹脂材料收容部15自樹脂材料供給模組C搬送至樹脂成形模組B,並於樹脂成形模組B中將脫模膜F及樹脂材料J供給至成形模10、成形模11。之後,樹脂材料搬送機構17將供給樹脂材料J後的樹脂材料收容部15自樹脂成形模組B搬送至樹脂材料供給模組C。本實施形態的樹脂材料搬送機構17具有:樹脂材料搬送部171,對收容有樹脂材料J的樹脂材料收容部15進行搬送;以及膜回收部172,自下模11的模腔11C回收使用完畢的脫模膜F。In addition, the resin material conveying mechanism 17 conveys the resin material storage part 15 containing the resin material J from the resin material supply module C to the resin forming module B, and supplies the mold release film F and the resin material J to the forming mold 10 and the forming mold 11 in the resin forming module B. Thereafter, the resin material conveying mechanism 17 conveys the resin material storage part 15 after the resin material J is supplied from the resin forming module B to the resin material supply module C. The resin material conveying mechanism 17 of this embodiment includes: a resin material conveying part 171 for conveying the resin material storage part 15 containing the resin material J; and a film recovery part 172 for recovering the used mold release film F from the cavity 11C of the lower mold 11.

<基板供給/收納模組A的各部的具體結構> 如圖1所示,基板供給/收納模組A包括基板供給部2、成形品收納部3、第一移載平台4、第二移載平台5、第一搬送機構6及第二搬送機構7。 <Specific structure of each part of substrate supply/storage module A> As shown in FIG1 , substrate supply/storage module A includes substrate supply section 2, molded product storage section 3, first transfer platform 4, second transfer platform 5, first conveying mechanism 6 and second conveying mechanism 7.

如圖1及圖3所示,基板供給部2包括:收納箱21,收納有成形前基板W;以及取出機構22,自收納箱21取出成形前基板W。收納箱21上下多層地收納多個成形前基板W。另外,收納箱21將成形前基板W以電子零件Wx位於上側的第一狀態(所謂上翻狀態)收納。收納箱21構成為能夠自樹脂成形裝置100取出。取出機構22例如夾著一個成形前基板W自收納箱21取出,並使成形前基板W位於基板供給部2的成形前基板平台23。再者,在收納箱21與成形前基板平台23之間設置有導軌24。As shown in FIG. 1 and FIG. 3 , the substrate supply section 2 includes: a storage box 21 that stores a pre-molding substrate W; and a take-out mechanism 22 that takes out the pre-molding substrate W from the storage box 21. The storage box 21 stores a plurality of pre-molding substrates W in multiple layers, up and down. In addition, the storage box 21 stores the pre-molding substrates W in a first state (so-called flipped-up state) with the electronic components Wx located on the upper side. The storage box 21 is configured to be able to be taken out from the resin molding device 100. The take-out mechanism 22, for example, takes out a pre-molding substrate W by clamping it from the storage box 21, and positions the pre-molding substrate W on the pre-molding substrate platform 23 of the substrate supply section 2. Furthermore, a guide rail 24 is provided between the storage box 21 and the pre-molding substrate platform 23.

再者,成形前基板平台23亦可為於導軌24上滑動的結構。於該情況下,於成形前基板平台23位於收納箱21附近的狀態下,取出機構22自收納箱21取出成形前基板W,並將所取出的成形前基板W配置於成形前基板平台23。成形前基板平台23例如對成形前基板W進行吸附並加以保持。之後,成形前基板平台23沿著導軌24而向自收納箱21離開的方向移動。除此以外,於基板供給部2例如設置有對電子零件Wx是否適當地配置於成形前基板W上進行確認的確認機構(未圖示)。於該結構中,例如,於成形前基板平台23於導軌24上移動的期間,確認機構自上方對電子零件Wx是否適當地配置於成形前基板W上進行確認。確認機構為雷射位移計或相機等。Furthermore, the pre-molding substrate stage 23 may also be a structure that slides on the guide rail 24. In this case, when the pre-molding substrate stage 23 is located near the storage box 21, the removal mechanism 22 takes out the pre-molding substrate W from the storage box 21 and arranges the taken-out pre-molding substrate W on the pre-molding substrate stage 23. The pre-molding substrate stage 23, for example, adsorbs and holds the pre-molding substrate W. Thereafter, the pre-molding substrate stage 23 moves along the guide rail 24 in a direction away from the storage box 21. In addition, a confirmation mechanism (not shown) for confirming whether the electronic component Wx is properly arranged on the pre-molding substrate W is provided in the substrate supply section 2, for example. In this structure, for example, while the pre-molding substrate stage 23 moves on the guide rail 24, the confirmation mechanism confirms from above whether the electronic component Wx is properly arranged on the pre-molding substrate W. The confirmation mechanism is a laser displacement meter or a camera.

如圖1及圖3所示,成形品收納部3包括:收納箱31,收納樹脂成形品P;以及收納機構32,將樹脂成形品P收納於該收納箱31。收納箱31上下多層地收納多個樹脂成形品P。另外,收納箱31將樹脂成形品P以經樹脂密封的電子零件Wx位於上側的第一狀態(所謂上翻狀態)收納。收納箱31構成為能夠自樹脂成形裝置100取出。收納機構32藉由對位於成形品收納部3的樹脂成形品平台33的樹脂成形品P進行按壓而收納於收納箱31。再者,在收納箱31與樹脂成形品平台33之間設置有導軌34。另外,收納機構32亦可夾著樹脂成形品P移動至收納箱31的附近。於該情況下,樹脂成形品P移動至收納箱31附近後,藉由收納機構32等來按壓樹脂成形品P而收納於收納箱31。As shown in FIG. 1 and FIG. 3 , the molded product storage section 3 includes: a storage box 31 for storing the resin molded product P; and a storage mechanism 32 for storing the resin molded product P in the storage box 31. The storage box 31 stores a plurality of resin molded products P in multiple layers up and down. In addition, the storage box 31 stores the resin molded product P in a first state (so-called flipped-up state) in which the electronic component Wx sealed by the resin is located on the upper side. The storage box 31 is configured to be able to be taken out from the resin molding device 100. The storage mechanism 32 stores the resin molded product P in the storage box 31 by pressing the resin molded product P located on the resin molded product platform 33 of the molded product storage section 3. Furthermore, a guide rail 34 is provided between the storage box 31 and the resin molded product platform 33. Alternatively, the storage mechanism 32 may move to the vicinity of the storage box 31 while sandwiching the resin molded product P. In this case, after the resin molded product P is moved to the vicinity of the storage box 31, the resin molded product P is pressed by the storage mechanism 32 and the like and stored in the storage box 31.

此處,關於基板供給部2及成形品收納部3,於圖1中,為了方便而示出了在前後方向上排列配置的狀態,為了使樹脂成形裝置100(基板供給/收納模組A)的設置空間小型化,如圖3所示,本實施形態的基板供給部2及成形品收納部3上下配置。再者,基板供給部2及成形品收納部3均可配置於上方。另外,亦可將基板供給部2及成形品收納部3橫向排列配置。Here, regarding the substrate supply unit 2 and the molded product storage unit 3, FIG. 1 shows a state in which they are arranged in the front-rear direction for convenience. In order to miniaturize the installation space of the resin molding device 100 (substrate supply/storage module A), as shown in FIG. 3, the substrate supply unit 2 and the molded product storage unit 3 of this embodiment are arranged up and down. Furthermore, the substrate supply unit 2 and the molded product storage unit 3 can be arranged at the top. In addition, the substrate supply unit 2 and the molded product storage unit 3 can also be arranged in a horizontal direction.

如圖1及圖3所示,第一移載平台4供藉由基板供給部2而供給的成形前基板W臨時設置,用於將成形前基板W交給第二搬送機構7。此處,於第一移載平台4上,成形前基板W以電子零件Wx位於下側的第二狀態(所謂下翻狀態)設置。第一移載平台4具有對第二狀態的成形前基板W的端部進行鉤掛並加以保持的保持爪(未圖示),藉由使該保持爪開閉來保持第二狀態的成形前基板W。再者,於第一移載平台4亦可設置定位銷41,所述定位銷41插入至形成於成形前基板W的定位用孔中(參照圖3)。As shown in FIG. 1 and FIG. 3 , the first transfer platform 4 is temporarily provided for the pre-molding substrate W supplied by the substrate supply unit 2, and is used to deliver the pre-molding substrate W to the second conveying mechanism 7. Here, on the first transfer platform 4, the pre-molding substrate W is provided in the second state (so-called flip-down state) with the electronic component Wx located at the lower side. The first transfer platform 4 has a holding claw (not shown) for hooking and holding the end of the pre-molding substrate W in the second state, and the pre-molding substrate W in the second state is held by opening and closing the holding claw. Furthermore, a positioning pin 41 may also be provided on the first transfer platform 4, and the positioning pin 41 is inserted into a positioning hole formed in the pre-molding substrate W (refer to FIG. 3 ).

如圖1及圖3所示,第二移載平台5供經樹脂成形的樹脂成形品P臨時載置,自第二搬送機構7接收樹脂成形品P。此處,於第二移載平台5上,樹脂成形品P以經樹脂密封的電子零件Wx位於下側的第二狀態(所謂下翻狀態)設置。第二移載平台5具有對第二狀態的樹脂成形品P的端部進行鉤掛並加以保持的保持爪(未圖示),藉由使該保持爪開閉來保持第二狀態的樹脂成形品P。As shown in Fig. 1 and Fig. 3, the second transfer platform 5 is used to temporarily place the resin molded product P formed by resin, and receives the resin molded product P from the second conveying mechanism 7. Here, on the second transfer platform 5, the resin molded product P is set in the second state (so-called flipped-down state) with the electronic component Wx sealed by resin located at the lower side. The second transfer platform 5 has a holding claw (not shown) for hooking and holding the end of the resin molded product P in the second state, and the resin molded product P in the second state is held by opening and closing the holding claw.

再者,如圖1及圖3所示,第一移載平台4及第二移載平台5在左右方向上橫向排列配置,另外,該些的高度位置處於相同高度。1 and 3, the first transfer platform 4 and the second transfer platform 5 are arranged side by side in the left-right direction, and their height positions are at the same height.

如圖1所示,第一搬送機構6在基板供給部2與第一移載平台4之間交接成形前基板W,在第二移載平台5與成形品收納部3之間交接樹脂成形品P。該第一搬送機構6於俯視下設置於基板供給部2及成形品收納部3與各移載平台4、5之間。As shown in FIG1 , the first conveying mechanism 6 delivers the pre-molding substrate W between the substrate supply unit 2 and the first transfer platform 4, and delivers the resin molded product P between the second transfer platform 5 and the molded product storage unit 3. The first conveying mechanism 6 is provided between the substrate supply unit 2 and the molded product storage unit 3 and the transfer platforms 4 and 5 in a plan view.

具體而言,第一搬送機構6具有:保持單元61,對成形前基板W及樹脂成形品P分別進行保持;以及多關節臂部62,使該保持單元61移動。Specifically, the first transport mechanism 6 includes: a holding unit 61 for holding the pre-molding substrate W and the resin molded product P, respectively; and a multi-joint arm 62 for moving the holding unit 61.

多關節臂部62例如為垂直多關節型的機器人(例如,具有六個關節的多關節機器人)。多關節臂部62可對保持單元61的位置及姿態進行控制。具體而言,多關節臂部62可使保持著成形前基板W或樹脂成形品P的保持單元61表背反轉。另外,多關節臂部62使保持單元61在基板供給部2與第一移載平台4之間及成形品收納部3與第二移載平台5之間移動。再者,第一搬送機構6的具體結構將於下文敘述。The multi-joint arm 62 is, for example, a vertical multi-joint robot (for example, a multi-joint robot with six joints). The multi-joint arm 62 can control the position and posture of the holding unit 61. Specifically, the multi-joint arm 62 can reverse the front and back of the holding unit 61 holding the pre-molding substrate W or the resin molded product P. In addition, the multi-joint arm 62 moves the holding unit 61 between the substrate supply section 2 and the first transfer platform 4 and between the molded product storage section 3 and the second transfer platform 5. Furthermore, the specific structure of the first conveying mechanism 6 will be described below.

如圖1所示,第二搬送機構7在基板供給/收納模組A與樹脂成形模組B之間來回移動,沿著遍及基板供給/收納模組A與樹脂成形模組B設置的軌道(未圖示)移動。該第二搬送機構7接收臨時設置於第一移載平台4的成形前基板W,並搬送至樹脂成形模組B的上模10。另外,於成形前基板W的樹脂成形後,第二搬送機構7自樹脂成形模組B的上模10接收樹脂成形品P,並搬送至第二移載平台5。As shown in FIG1 , the second conveying mechanism 7 moves back and forth between the substrate supply/storage module A and the resin forming module B, and moves along a track (not shown) provided throughout the substrate supply/storage module A and the resin forming module B. The second conveying mechanism 7 receives the pre-molding substrate W temporarily provided on the first transfer platform 4, and conveys it to the upper mold 10 of the resin forming module B. In addition, after the resin of the pre-molding substrate W is formed, the second conveying mechanism 7 receives the resin molded product P from the upper mold 10 of the resin forming module B, and conveys it to the second transfer platform 5.

如圖1及圖3所示,本實施形態的第二搬送機構7具有:基板搬送部71,對成形前基板W進行搬送;以及成形品搬送部72,對樹脂成形品P進行搬送。再者,於基板搬送部71亦可設置定位銷711,所述定位銷711插入至形成於成形前基板W的定位用孔中(參照圖3)。而且,第二搬送機構7構成為基板搬送部71及成形品搬送部72同時移動。基板搬送部71及成形品搬送部72與第一移載平台4及第二移載平台5的配置關係對應地設置。於本實施形態中,第一移載平台4及第二移載平台5在左右方向上橫向排列配置,因此基板搬送部71及成形品搬送部72亦與其對應地在左右方向上橫向排列配置。另外,基板搬送部71及成形品搬送部72的高度位置亦為相同的高度。As shown in FIG. 1 and FIG. 3 , the second conveying mechanism 7 of the present embodiment comprises: a substrate conveying section 71 for conveying a pre-molding substrate W; and a molded product conveying section 72 for conveying a resin molded product P. Furthermore, a positioning pin 711 may be provided on the substrate conveying section 71, and the positioning pin 711 is inserted into a positioning hole formed in the pre-molding substrate W (refer to FIG. 3 ). Moreover, the second conveying mechanism 7 is configured so that the substrate conveying section 71 and the molded product conveying section 72 move simultaneously. The substrate conveying section 71 and the molded product conveying section 72 are arranged correspondingly to the configuration relationship of the first transfer platform 4 and the second transfer platform 5. In the present embodiment, the first transfer platform 4 and the second transfer platform 5 are arranged horizontally in the left-right direction, so the substrate conveying section 71 and the molded product conveying section 72 are also arranged horizontally in the left-right direction correspondingly thereto. In addition, the height positions of the substrate conveying unit 71 and the molded product conveying unit 72 are also the same height.

藉由該結構,可於第二搬送機構7在基板供給/收納模組A與樹脂成形模組B之間往返一次的期間,進行將成形前基板W自第一移載平台4搬送至上模10的動作、與將樹脂成形品P自上模10搬送至第二移載平台5的動作。With this structure, the pre-molding substrate W can be transported from the first transfer platform 4 to the upper mold 10, and the resin molded product P can be transported from the upper mold 10 to the second transfer platform 5 during one round trip of the second transfer mechanism 7 between the substrate supply/storage module A and the resin molding module B.

<第一搬送機構6的具體結構> 而且,本實施形態的第一搬送機構6構成為可對成形前基板W及樹脂成形品P分別進行定位並加以保持。 <Specific structure of the first conveying mechanism 6> In addition, the first conveying mechanism 6 of this embodiment is configured to position and hold the pre-molding substrate W and the resin molded product P, respectively.

具體而言,如圖4~圖8所示,保持單元61包括:基座構件63,連接於多關節臂部62的前端部621;以及定位機構64,與成形前基板W或樹脂成形品P的外周端面Wa接觸而相對於基座構件63對成形前基板W或樹脂成形品P進行定位。再者,於圖4、圖6及圖7中示出了保持著成形前基板W的例子,樹脂成形品P亦可同樣地保持。Specifically, as shown in FIGS. 4 to 8 , the holding unit 61 includes: a base member 63 connected to the front end portion 621 of the multi-joint arm 62; and a positioning mechanism 64 that contacts the outer peripheral end surface Wa of the pre-molding substrate W or the resin molded product P and positions the pre-molding substrate W or the resin molded product P relative to the base member 63. In addition, in FIGS. 4 , 6 and 7 , an example of holding the pre-molding substrate W is shown, and the resin molded product P can also be held in the same manner.

基座構件63與成形前基板W對應地於俯視下呈矩形形狀(參照圖8)。該基座構件63的長邊部側連接於多關節臂部62的前端部621(參照圖4及圖5)。再者,多關節臂部62的前端部621構成為能夠繞圖4的在左右方向上延伸的軸旋轉,藉此,可使保持單元61表背反轉。The base member 63 is rectangular in a plan view corresponding to the pre-molding substrate W (see FIG. 8 ). The long side of the base member 63 is connected to the front end 621 of the multi-joint arm 62 (see FIG. 4 and FIG. 5 ). Furthermore, the front end 621 of the multi-joint arm 62 is configured to be rotatable around an axis extending in the left-right direction of FIG. 4 , thereby enabling the front and back of the holding unit 61 to be reversed.

本實施形態的定位機構64不僅對成形前基板W或樹脂成形品P進行定位,而且對該些進行保持,如圖4~圖8所示,包括:保持爪641,對成形前基板W或樹脂成形品P進行保持;以及保持爪移動部642,使保持爪641移動。The positioning mechanism 64 of this embodiment not only positions the pre-molding substrate W or the resin molded product P, but also holds them, as shown in Figures 4 to 8, including: a holding claw 641, which holds the pre-molding substrate W or the resin molded product P; and a holding claw moving part 642, which moves the holding claw 641.

保持爪641相對於基座構件63於共同的位置對成形前基板W及樹脂成形品P的端部進行鉤掛並加以保持,且與成形前基板W及樹脂成形品P的四邊分別對應地設置。各保持爪641以能夠旋轉的方式設置於基座構件63,且設為能夠在對成形前基板W或樹脂成形品P進行保持的保持位置R(參照圖4)與自保持位置R退避的退避位置Q(參照圖5)之間旋轉。The holding claws 641 hook and hold the ends of the pre-molding substrate W and the resin molded product P at a common position relative to the base member 63, and are respectively provided corresponding to the four sides of the pre-molding substrate W and the resin molded product P. Each holding claw 641 is rotatably provided on the base member 63, and is provided to be rotatable between a holding position R (see FIG. 4 ) for holding the pre-molding substrate W or the resin molded product P and a retreat position Q (see FIG. 5 ) for retreating from the holding position R.

而且,各保持爪641於保持位置R,藉由其自由端部鉤掛於成形前基板W或樹脂成形品P的端部而對成形前基板W及樹脂成形品P分別進行保持。另外,各保持爪641於保持位置R,其自由端部的內表面與成形前基板W或樹脂成形品P的外周端面Wa接觸而相對於基座構件63於共同的位置對成形前基板W及樹脂成形品P分別進行定位。藉由相對於基座構件63對成形前基板W或樹脂成形品P進行定位,而亦相對於後述的保持板65的保持面65a對成形前基板W及樹脂成形品P進行定位。Furthermore, each holding claw 641 holds the pre-molded substrate W and the resin molded product P respectively by hooking the free end portion thereof at the holding position R. In addition, each holding claw 641 positions the pre-molded substrate W and the resin molded product P at a common position relative to the base member 63 by contacting the inner surface of the free end portion thereof with the outer peripheral end surface Wa of the pre-molded substrate W or the resin molded product P at the holding position R. By positioning the pre-molded substrate W or the resin molded product P relative to the base member 63, the pre-molded substrate W and the resin molded product P are also positioned relative to the holding surface 65a of the holding plate 65 described later.

保持爪移動部642使保持爪641在對成形前基板W或樹脂成形品P進行保持的保持位置R與自該保持位置R退避的退避位置Q之間移動。The holding claw moving section 642 moves the holding claw 641 between a holding position R for holding the pre-molding substrate W or the resin molded product P and a retreat position Q for retreating from the holding position R.

具體而言,如圖4~圖8所示,保持爪移動部642具有:聯動機構642a,使與四邊分別對應地設置的保持爪641聯動;以及保持爪驅動部642b,經由聯動機構642a而使與四邊分別對應地設置的保持爪641移動。再者,於圖6~圖8中省略了保持爪驅動部642b的圖示。Specifically, as shown in FIGS. 4 to 8 , the holding claw moving portion 642 includes: a linkage mechanism 642a that links the holding claws 641 provided at the four sides, respectively; and a holding claw driving portion 642b that moves the holding claws 641 provided at the four sides, respectively, via the linkage mechanism 642a. In addition, the holding claw driving portion 642b is omitted in FIGS. 6 to 8 .

聯動機構642a使與四邊分別對應地設置的保持爪641聯動,而將該些保持爪641同時於保持位置R與退避位置Q切換。具體而言,特別是如圖8所示,聯動機構642a具有:連接軸642a1,將設置於各邊的一個或多個保持爪641連接;以及連結部642a2,使各邊的連接軸642a1相互連結。各連接軸642a1設置成相對於基座構件63能夠繞沿著各邊的軸旋轉,藉由該連接軸642a1繞軸旋轉,各保持爪641在保持位置R與退避位置Q之間移動。The linkage mechanism 642a links the holding claws 641 provided at the four sides respectively, and switches the holding claws 641 between the holding position R and the retreat position Q at the same time. Specifically, as shown in FIG8 , the linkage mechanism 642a includes: a connecting shaft 642a1 connecting one or more holding claws 641 provided at each side; and a connecting portion 642a2 connecting the connecting shafts 642a1 at each side. Each connecting shaft 642a1 is provided to be rotatable around an axis along each side relative to the base member 63, and each holding claw 641 moves between the holding position R and the retreat position Q by the rotation of the connecting shaft 642a1 around the axis.

圖8所示的例子為如下結構:相互相向的長邊部的連接軸642a1藉由連結部642a2而連結,一個短邊部的連接軸642a1藉由連結部642a2而連結於各長邊部的連接軸642a1。作為將長邊部的連接軸642a1彼此連結的連結部642a2,例如可使用連桿機構,作為將長邊部的連接軸642a1及短邊部的連接軸642a1連結的連結部642a2,例如可使用萬向接頭(universal joint)。除此以外,作為聯動機構642a,亦可為使用齒輪機構的機構。The example shown in FIG8 is a structure in which the connecting shafts 642a1 of the long sides facing each other are connected by a connecting portion 642a2, and the connecting shaft 642a1 of one short side is connected to the connecting shafts 642a1 of each long side by a connecting portion 642a2. As the connecting portion 642a2 that connects the connecting shafts 642a1 of the long sides, for example, a connecting rod mechanism can be used, and as the connecting portion 642a2 that connects the connecting shafts 642a1 of the long sides and the connecting shafts 642a1 of the short sides, for example, a universal joint can be used. In addition, as the linkage mechanism 642a, a mechanism using a gear mechanism can also be used.

如圖4及圖5所示,保持爪驅動部642b使藉由聯動機構642a而連結的多個保持爪641在保持位置R與退避位置Q之間移動。該保持爪驅動部642b使設置於任一邊的連接軸642a1旋轉,例如可使用氣缸來構成。As shown in Fig. 4 and Fig. 5, the holding claw driving part 642b moves the plurality of holding claws 641 connected by the linkage mechanism 642a between the holding position R and the retreat position Q. The holding claw driving part 642b rotates the connecting shaft 642a1 provided on either side and can be constituted by using, for example, an air cylinder.

進而,如圖4~圖7所示,保持單元61更包括具有用於對成形前基板W或樹脂成形品P進行保持的保持面65a的保持板65,以便即便於表背反轉的情況下亦確實地保持成形前基板W或樹脂成形品P。Furthermore, as shown in FIGS. 4 to 7 , the holding unit 61 further includes a holding plate 65 having a holding surface 65a for holding the pre-molding substrate W or the resin molded product P, so that the pre-molding substrate W or the resin molded product P can be securely held even when the front and back are reversed.

保持板65與成形前基板W對應地於俯視下呈矩形形狀。該保持板65在與位於保持位置R的保持爪641之間夾著並保持成形前基板W或樹脂成形品P。The holding plate 65 has a rectangular shape in a plan view corresponding to the pre-molding substrate W. The holding plate 65 sandwiches and holds the pre-molding substrate W or the resin molded product P between the holding claws 641 located at the holding position R.

具體而言,保持板65形成有收容第一狀態的成形前基板W的電子零件Wx或第一狀態的樹脂成形品P的樹脂成形部分的收容部651,於該收容部651的周圍形成有對成形前基板W或樹脂成形品P的周緣部進行保持的保持面65a。另外,該保持板65藉由板移動部66而相對於基座構件63進行升降移動。Specifically, the holding plate 65 is formed with a receiving portion 651 for receiving the electronic component Wx of the pre-molding substrate W in the first state or the resin molded portion of the resin molded product P in the first state, and a holding surface 65a for holding the peripheral portion of the pre-molding substrate W or the resin molded product P is formed around the receiving portion 651. In addition, the holding plate 65 is moved up and down relative to the base member 63 by the plate moving portion 66.

另外,保持板65設置於與成形前基板W或樹脂成形品P的四邊分別對應地設置的保持爪641的內側。即,保持爪641設置成包圍保持板65的四邊。而且,保持板65於四邊的保持爪641的內側進行升降移動。進而,保持爪641構成為於保持位置R與保持板65的外周端面接觸而使保持爪641物理性地停止於保持位置R。In addition, the holding plate 65 is arranged inside the holding claws 641 respectively arranged corresponding to the four sides of the pre-molding substrate W or the resin molded product P. That is, the holding claws 641 are arranged to surround the four sides of the holding plate 65. Moreover, the holding plate 65 moves up and down inside the holding claws 641 on the four sides. Furthermore, the holding claws 641 are configured to contact the outer peripheral end surface of the holding plate 65 at the holding position R so that the holding claws 641 are physically stopped at the holding position R.

板移動部66使保持板65在保持面65a和藉由定位機構64而定位的成形前基板W或樹脂成形品P接觸的接觸位置T(參照圖7)與保持面65a自成形前基板W或樹脂成形品P離開的分離位置U(參照圖6)之間移動。如圖6及圖7所示,板移動部66具有:引導機構661,對保持板65在接觸位置T與分離位置U之間進行引導;以及板驅動部662,使保持板65移動。引導機構661具有:引導部661a,設置於基座構件63;以及滑動部661b,設置於保持板65並沿著引導部661a滑動。板驅動部662例如可使用氣缸來構成。The plate moving part 66 moves the holding plate 65 between a contact position T (see FIG. 7 ) where the holding surface 65 a contacts the pre-molding substrate W or the resin molded product P positioned by the positioning mechanism 64 and a separation position U (see FIG. 6 ) where the holding surface 65 a separates from the pre-molding substrate W or the resin molded product P. As shown in FIG. 6 and FIG. 7 , the plate moving part 66 includes: a guide mechanism 661 that guides the holding plate 65 between the contact position T and the separation position U; and a plate driving part 662 that moves the holding plate 65. The guide mechanism 661 includes: a guide part 661 a that is provided on the base member 63; and a sliding part 661 b that is provided on the holding plate 65 and slides along the guide part 661 a. The plate driving part 662 can be constituted by, for example, a cylinder.

此處,參照圖9的(a)至圖9的(e)及圖10的(a)至圖10的(e)對第一搬送機構6的動作進行說明。再者,於圖9的(a)至圖9的(e)中示出了對成形前基板W進行搬送的例子,於圖10的(a)至圖10的(e)中示出了對樹脂成形品P進行搬送的例子。Here, the operation of the first transport mechanism 6 is described with reference to Fig. 9 (a) to Fig. 9 (e) and Fig. 10 (a) to Fig. 10 (e). Fig. 9 (a) to Fig. 9 (e) show an example of transporting a pre-molding substrate W, and Fig. 10 (a) to Fig. 10 (e) show an example of transporting a resin molded product P.

第一搬送機構6於藉由板移動部66而使保持板65處於分離位置U的狀態下,藉由定位機構64的保持爪641來對成形前基板W或樹脂成形品P進行定位並加以保持(參照圖9的(a)→圖9的(b)、圖10的(a)→圖10的(b))。然後,第一搬送機構6於藉由定位機構64的保持爪641而將成形前基板W或樹脂成形品P定位後,藉由板移動部66而使保持板65處於接觸位置T(參照圖9的(b)→圖9的(c)、圖10的(b)→圖10的(c))。使保持板65移動至接觸位置T,藉此經定位的成形前基板W或樹脂成形品P由保持爪641及保持板65保持。於該狀態下,第一搬送機構6藉由多關節臂部62而使保持單元61表背反轉(參照圖9的(d)→圖9的(e)、圖10的(d)→圖10的(e)),藉此可穩定地進行成形前基板W或樹脂成形品P的第一狀態及第二狀態的切換。The first transport mechanism 6 positions and holds the pre-molding substrate W or the resin molded product P by the holding claws 641 of the positioning mechanism 64 while the holding plate 65 is in the separated position U by the plate moving part 66 (refer to FIG. 9 (a) → FIG. 9 (b), FIG. 10 (a) → FIG. 10 (b)). Then, after the pre-molding substrate W or the resin molded product P is positioned by the holding claws 641 of the positioning mechanism 64, the first transport mechanism 6 positions the pre-molding substrate W or the resin molded product P by the plate moving part 66 (refer to FIG. 9 (b) → FIG. 9 (c), FIG. 10 (b) → FIG. 10 (c)). The holding plate 65 is moved to the contact position T, whereby the positioned pre-molding substrate W or the resin molded product P is held by the holding claws 641 and the holding plate 65. In this state, the first conveying mechanism 6 reverses the front and back of the holding unit 61 through the multi-joint arm 62 (refer to Figure 9 (d) → Figure 9 (e), Figure 10 (d) → Figure 10 (e)), thereby stably switching the first state and the second state of the pre-molded substrate W or the resin molded product P.

<第一搬送機構6及第二搬送機構7的動作> 接下來,參照圖3、圖9的(a)至圖9的(e)及圖10的(a)至圖10的(e)對第一搬送機構6及第二搬送機構7的搬送動作進行說明。 <Operation of the first conveying mechanism 6 and the second conveying mechanism 7> Next, the conveying operation of the first conveying mechanism 6 and the second conveying mechanism 7 will be described with reference to FIG. 3, FIG. 9 (a) to FIG. 9 (e), and FIG. 10 (a) to FIG. 10 (e).

首先,自基板供給部2的收納箱21藉由取出機構22而將成形前基板W載置於成形前基板平台23(參照圖3)。此處,於成形前基板平台23上,成形前基板W為第一狀態(所謂上翻狀態)。First, the pre-molding substrate W is placed on the pre-molding substrate stage 23 (see FIG. 3 ) from the storage box 21 of the substrate supply unit 2 by the removal mechanism 22. Here, on the pre-molding substrate stage 23, the pre-molding substrate W is in a first state (so-called upturned state).

於對位於成形前基板平台23的成形前基板W進行保持的情況下,第一搬送機構6的多關節臂部62使保持單元61移動至成形前基板平台23的上方。此時,保持單元61的保持爪641處於退避位置Q(參照圖9的(a))。When holding the pre-molding substrate W on the pre-molding substrate stage 23, the multi-joint arm 62 of the first transfer mechanism 6 moves the holding unit 61 above the pre-molding substrate stage 23. At this time, the holding claw 641 of the holding unit 61 is at the retreat position Q (see FIG. 9(a)).

然後,使保持單元61移動至用於對成形前基板W進行保持的高度位置,藉由保持爪移動部642而使保持爪641處於保持位置R(參照圖9的(b))。藉此,保持爪641與成形前基板W的外周端面Wa接觸,成形前基板W相對於基座構件63被定位,並且由保持爪641保持。於成形前基板W由該保持爪641保持之前,保持板65處於分離位置U。Then, the holding unit 61 is moved to a height position for holding the pre-molding substrate W, and the holding claw 641 is placed at the holding position R (see FIG. 9( b )) by the holding claw moving portion 642. As a result, the holding claw 641 contacts the outer peripheral end surface Wa of the pre-molding substrate W, and the pre-molding substrate W is positioned relative to the base member 63 and held by the holding claw 641. Before the pre-molding substrate W is held by the holding claw 641, the holding plate 65 is placed at the separation position U.

於保持爪641保持成形前基板W後,板移動部66使位於分離位置U的保持板65移動至接觸位置T(參照圖9的(c))。藉此,經定位的成形前基板W被保持爪641及保持板65夾著並保持(參照圖9的(d))。於設為該狀態後,第一搬送機構6的多關節臂部62使保持單元61表背反轉,並且使其移動至第一移載平台4(參照圖9的(e))。After the holding claw 641 holds the pre-molding substrate W, the plate moving unit 66 moves the holding plate 65 located at the separation position U to the contact position T (see (c) of FIG. 9 ). Thus, the positioned pre-molding substrate W is clamped and held by the holding claw 641 and the holding plate 65 (see (d) of FIG. 9 ). After being set to this state, the multi-jointed arm 62 of the first transport mechanism 6 turns the holding unit 61 upside down and moves it to the first transfer platform 4 (see (e) of FIG. 9 ).

藉由以上的動作,第一搬送機構6對位於成形前基板平台23的第一狀態的成形前基板W進行保持,將成形前基板W設為第二狀態而搬送並交給第一移載平台4。此處,第一搬送機構6藉由解除保持爪641的保持而將成形前基板W交給第一移載平台4。By the above actions, the first transport mechanism 6 holds the pre-molding substrate W in the first state on the pre-molding substrate stage 23, sets the pre-molding substrate W to the second state, and transports and delivers it to the first transfer stage 4. Here, the first transport mechanism 6 delivers the pre-molding substrate W to the first transfer stage 4 by releasing the holding claws 641.

接下來,第二搬送機構7接收位於第一移載平台4的第二狀態的成形前基板W(參照圖3),並搬送至上模10而將成形前基板W交給上模10。此處,第二搬送機構7於自第一移載平台4接收成形前基板W時,在保持著樹脂成形品P的情況下,將第二狀態的樹脂成形品P交給第二移載平台5(參照圖3)。Next, the second conveying mechanism 7 receives the pre-molding substrate W in the second state located on the first transfer platform 4 (see FIG. 3 ), and conveys it to the upper mold 10 to hand over the pre-molding substrate W to the upper mold 10. Here, the second conveying mechanism 7 hands over the resin molded product P in the second state to the second transfer platform 5 while holding the resin molded product P when receiving the pre-molding substrate W from the first transfer platform 4 (see FIG. 3 ).

於在第二移載平台5設置有樹脂成形品P的情況下,第一搬送機構6的多關節臂部62使保持單元61移動至第二移載平台5的下方。此時,保持單元61的保持爪641處於退避位置Q(參照圖10的(a))。When the resin molded product P is placed on the second transfer platform 5, the multi-joint arm 62 of the first transfer mechanism 6 moves the holding unit 61 to the lower side of the second transfer platform 5. At this time, the holding claw 641 of the holding unit 61 is at the retreat position Q (see FIG. 10(a)).

然後,使保持單元61移動至用於對樹脂成形品P進行保持的高度位置,藉由保持爪移動部642而使保持爪641處於保持位置R(參照圖10的(b))。藉此,保持爪641與樹脂成形品P的外周端面Wa接觸,樹脂成形品P相對於基座構件63被定位,並且由保持爪641保持。於樹脂成形品P由該保持爪641保持之前,保持板65處於分離位置U。Then, the holding unit 61 is moved to a height position for holding the resin molded product P, and the holding claw 641 is placed in the holding position R (see FIG. 10( b) ) by the holding claw moving portion 642. As a result, the holding claw 641 contacts the outer peripheral end surface Wa of the resin molded product P, and the resin molded product P is positioned relative to the base member 63 and held by the holding claw 641. Before the resin molded product P is held by the holding claw 641, the holding plate 65 is placed in the separation position U.

於保持爪641保持樹脂成形品P後,板移動部66使位於分離位置U的保持板65移動至接觸位置T(參照圖10的(c))。藉此,經定位的樹脂成形品P被保持爪641及保持板65夾著並保持(參照圖10的(d))。於設為該狀態後,第一搬送機構6的多關節臂部62使保持單元61表背反轉,並且使其移動至成形品收納部3的樹脂成形品平台33(參照圖10的(e))。此處,第一搬送機構6解除保持爪641的保持,藉此將第一狀態(所謂上翻狀態)的樹脂成形品P載置於樹脂成形品平台33。After the holding claw 641 holds the resin molded product P, the plate moving part 66 moves the holding plate 65 located at the separation position U to the contact position T (refer to (c) in FIG. 10 ). Thereby, the positioned resin molded product P is clamped and held by the holding claw 641 and the holding plate 65 (refer to (d) in FIG. 10 ). After being set to this state, the multi-jointed arm part 62 of the first conveying mechanism 6 reverses the holding unit 61 front and back and moves it to the resin molded product platform 33 of the molded product storage part 3 (refer to (e) in FIG. 10 ). Here, the first conveying mechanism 6 releases the holding claw 641, thereby placing the resin molded product P in the first state (the so-called flipped-up state) on the resin molded product platform 33.

於將樹脂成形品P以第一狀態載置於樹脂成形品平台33後,成形品收納部3的收納機構32對位於樹脂成形品平台33的樹脂成形品P進行按壓而收納於收納箱31(參照圖3)。 再者,於將樹脂成形品P以第一狀態載置於樹脂成形品平台33後,成形品收納部3的收納機構32亦可如上所述般夾著樹脂成形品P移動至收納箱31附近。於該情況下,如上所述,於樹脂成形品P移動至收納箱31附近後,藉由收納機構32等來按壓樹脂成形品P而收納於收納箱31。 After the resin molded product P is placed on the resin molded product platform 33 in the first state, the storage mechanism 32 of the molded product storage section 3 presses the resin molded product P located on the resin molded product platform 33 and stores it in the storage box 31 (see FIG. 3 ). Furthermore, after the resin molded product P is placed on the resin molded product platform 33 in the first state, the storage mechanism 32 of the molded product storage section 3 may also move the resin molded product P to the vicinity of the storage box 31 as described above. In this case, as described above, after the resin molded product P is moved to the vicinity of the storage box 31, the resin molded product P is pressed by the storage mechanism 32 and the like and stored in the storage box 31.

<本實施形態的效果> 藉由本實施形態的樹脂成形裝置100,第一搬送機構6與成形前基板W的外周端面Wa接觸而相對於基座構件63對成形前基板W進行定位,因此可不使用定位銷地對成形前基板W進行定位並加以保持。其結果,可將成形前基板W搬送至適當的位置,於之後的處理中可避免報告由成形前基板W的位置偏移引起的錯誤,從而防止樹脂成形的動作停止。另外,於製成不報告錯誤的結構的情況下,可防止因成形前基板W的位置偏移而產生外觀不良等樹脂成形品P的不良。 <Effects of the present embodiment> According to the resin molding device 100 of the present embodiment, the first conveying mechanism 6 contacts the outer peripheral end surface Wa of the pre-molding substrate W and positions the pre-molding substrate W relative to the base member 63, so that the pre-molding substrate W can be positioned and held without using positioning pins. As a result, the pre-molding substrate W can be conveyed to an appropriate position, and the error caused by the positional deviation of the pre-molding substrate W can be avoided in the subsequent processing, thereby preventing the resin molding action from being stopped. In addition, when a structure that does not report errors is made, defects of the resin molded product P such as poor appearance caused by the positional deviation of the pre-molding substrate W can be prevented.

<其他變形實施形態> 再者,本發明並不限於所述實施形態。 <Other variant implementation forms> Furthermore, the present invention is not limited to the above-mentioned implementation forms.

例如,成形品收納部3為收納第一狀態(所謂上翻狀態)的樹脂成形品P的結構,但亦可設為收納第二狀態(所謂下翻狀態)的樹脂成形品P的結構。於該情況下,第一搬送機構6成為如下結構:於自第二移載平台5向樹脂成形品平台33搬送樹脂成形品P時,不使保持單元61表背反轉。For example, the molded product storage section 3 is a structure for storing the resin molded product P in the first state (so-called flip-up state), but it can also be a structure for storing the resin molded product P in the second state (so-called flip-down state). In this case, the first conveying mechanism 6 is configured as follows: when conveying the resin molded product P from the second transfer platform 5 to the resin molded product platform 33, the holding unit 61 is not reversed.

另外,所述實施形態的第一搬送機構6為對成形前基板W及樹脂成形品P此兩者進行搬送的共同的機構,但亦可為分別包括對成形前基板W進行搬送的第一搬送機構6以及對樹脂成形品P進行搬送的第一搬送機構6的結構。同樣地,第二搬送機構7為對成形前基板W及樹脂成形品P此兩者進行搬送的共同的機構,但亦可為分別包括對成形前基板W進行搬送的第二搬送機構7以及對樹脂成形品P進行搬送的第二搬送機構7的結構。In addition, the first conveying mechanism 6 of the above-described embodiment is a common mechanism for conveying both the pre-molding substrate W and the resin molded product P, but it may be a structure including the first conveying mechanism 6 for conveying the pre-molding substrate W and the first conveying mechanism 6 for conveying the resin molded product P. Similarly, the second conveying mechanism 7 is a common mechanism for conveying both the pre-molding substrate W and the resin molded product P, but it may be a structure including the second conveying mechanism 7 for conveying the pre-molding substrate W and the second conveying mechanism 7 for conveying the resin molded product P.

進而,所述實施形態的第一搬送機構6為使保持單元61表背反轉的結構,但亦可設為不使保持單元61表背反轉的結構。Furthermore, the first transport mechanism 6 in the above-described embodiment is a structure in which the holding unit 61 is reversed front and back, but it may be a structure in which the holding unit 61 is not reversed front and back.

另外,保持爪移動部642亦可藉由將設置於相向的邊的保持爪641彼此的間隔擴大或縮小來切換保持位置R與退避位置Q。In addition, the holding claw moving part 642 can also switch between the holding position R and the retreat position Q by expanding or reducing the interval between the holding claws 641 provided on the opposing sides.

而且,所述實施形態的定位機構64具有使用保持爪641來保持成形對象物的功能,但亦可不具有對成形對象物進行保持的功能,而僅具有與成形對象物的外周端面接觸來進行定位的功能。於該情況下,保持單元61成為獨立於定位機構64的、具有對藉由定位機構64而定位的成形對象物進行保持的保持部的結構。Furthermore, the positioning mechanism 64 of the embodiment has a function of holding the molding object using the holding claws 641, but may not have a function of holding the molding object, but may only have a function of positioning the molding object by contacting the outer peripheral end surface of the molding object. In this case, the holding unit 61 becomes a structure that is independent of the positioning mechanism 64 and has a holding portion that holds the molding object positioned by the positioning mechanism 64.

此外,保持單元61亦可設為不具有保持板65的結構。於該情況下,例如考慮設為如下結構:於保持爪641形成供成形對象物W的端部進入的凹部,該凹部與成形對象物的外周端面接觸,並且夾著成形對象物W的表面及背面。藉由該結構,即便於表背反轉的情況下,亦可維持成形對象物W在平面方向上被定位的狀態。Furthermore, the holding unit 61 may be configured without the holding plate 65. In this case, for example, a structure may be configured such that a recessed portion into which the end of the molding object W enters is formed in the holding claw 641, and the recessed portion contacts the outer peripheral end surface of the molding object and sandwiches the front and back surfaces of the molding object W. With this structure, even when the front and back surfaces are reversed, the molding object W can be maintained in a state of being positioned in the planar direction.

而且,亦可設為於樹脂成形模組B具有多層成形模10、11。於該情況下,如圖11所示,第二搬送機構7成為與多層成形模10、11對應地具有多個基板搬送部71及多個成形品搬送部72的結構。另外,如圖11所示,第一移載平台4及第二移載平台5亦與多層成形模10、11對應地成為多層結構。於該結構中,第一搬送機構6自成形前基板平台23向多層第一移載平台4一個一個地搬送成形前基板W,並自多層第二移載平台5向樹脂成形品平台33一個一個地搬送樹脂成形品P。Furthermore, the resin molding module B may include a plurality of molding dies 10 and 11. In this case, as shown in FIG. 11 , the second conveying mechanism 7 has a plurality of substrate conveying parts 71 and a plurality of molded product conveying parts 72 corresponding to the multi-layer molding dies 10 and 11. In addition, as shown in FIG. 11 , the first transfer platform 4 and the second transfer platform 5 also have a multi-layer structure corresponding to the multi-layer molding dies 10 and 11. In this structure, the first conveying mechanism 6 conveys the pre-molding substrates W one by one from the pre-molding substrate platform 23 to the multi-layer first transfer platform 4, and conveys the resin molded products P one by one from the multi-layer second transfer platform 5 to the resin molded product platform 33.

除此以外,本發明並不限於所述實施形態,當然能夠於不脫離其主旨的範圍內進行各種變形。 [產業上的可利用性] In addition, the present invention is not limited to the above-described embodiments, and various modifications are possible without departing from the gist of the invention. [Industrial Applicability]

根據本發明,可不使用定位銷地對成形對象物進行定位並加以保持。According to the present invention, the object to be formed can be positioned and held without using positioning pins.

10:成形模(上模) 100:樹脂成形裝置 101:上台板 102:可動盤 103:下台板 11:成形模(下模) 111:底面構件 112:側面構件 113:基座板 114:彈性構件 11C:模腔 12:合模機構 13:密閉結構 14:移動平台 15:樹脂材料收容部 16:樹脂材料投入機構 17:樹脂材料搬送機構 171:樹脂材料搬送部 172:膜回收部 2:基板供給部(成形對象物供給部) 21、31:收納箱 22:取出機構 23:成形前基板平台 24、34:導軌 3:成形品收納部(成形對象物收納部) 32:收納機構 33:樹脂成形品平台 4:第一移載平台(移載平台) 41、711:定位銷 5:第二移載平台(移載平台) 6:第一搬送機構(搬送裝置) 61:保持單元 62:多關節臂部 621:前端部 63:基座構件 64:定位機構 641:保持爪 642:保持爪移動部 642a:聯動機構 642a1:連接軸 642a2:連結部 642b:保持爪驅動部 65:保持板 65a:保持面 651:收容部 66:板移動部 661:引導機構 661a:引導部 661b:滑動部 662:板驅動部 7:第二搬送機構(交接機構) 71:基板搬送部 72:成形品搬送部 A:基板供給/收納模組 B:樹脂成形模組 C:樹脂材料供給模組 COM:控制部 F:脫模膜 P:樹脂成形品(成形對象物) Q:退避位置 R:保持位置 T:接觸位置 U:分離位置 W:成形前基板(成形對象物/基板/成形完畢基板) Wa:外周端面 Wx:電子零件 10: Forming mold (upper mold) 100: Resin forming device 101: Upper platen 102: Movable platen 103: Lower platen 11: Forming mold (lower mold) 111: Bottom member 112: Side member 113: Base plate 114: Elastic member 11C: Cavity 12: Clamping mechanism 13: Sealing structure 14: Moving platform 15: Resin material storage unit 16: Resin material feeding mechanism 17: Resin material conveying mechanism 171: Resin material conveying unit 172: Film recovery unit 2: Substrate supply unit (molding object supply unit) 21, 31: Storage box 22: Take-out mechanism 23: Pre-molding substrate platform 24, 34: Guide rail 3: Molded product storage section (molding object storage section) 32: Storage mechanism 33: Resin molded product platform 4: First transfer platform (transfer platform) 41, 711: Positioning pin 5: Second transfer platform (transfer platform) 6: First conveying mechanism (conveying device) 61: Holding unit 62: Multi-joint arm section 621: Front end section 63: Base member 64: Positioning mechanism 641: Holding claw 642: Holding claw moving section 642a: Linking mechanism 642a1: Connecting shaft 642a2: Connecting section 642b: Holding claw driving section 65: Holding plate 65a: Holding surface 651: Receiving section 66: Plate moving part 661: Guide mechanism 661a: Guide part 661b: Sliding part 662: Plate driving part 7: Second conveying mechanism (handover mechanism) 71: Substrate conveying part 72: Molded product conveying part A: Substrate supply/storage module B: Resin molding module C: Resin material supply module COM: Control unit F: Mold release film P: Resin molded product (molding object) Q: Retract position R: Holding position T: Contact position U: Separation position W: Substrate before molding (molding object/substrate/molding completed substrate) Wa: Peripheral end surface Wx: Electronic parts

圖1是表示本發明的一實施形態的樹脂成形裝置的結構的示意圖。 圖2是表示所述一實施形態的樹脂成形模組的結構的示意圖。 圖3是示意性地表示所述一實施形態的基板供給部及成形品收納部的結構,並且表示該些與各移載平台之間的成形前基板的搬送動作及樹脂成形品的搬送動作的圖。 圖4是示意性地表示於所述一實施形態的第一搬送機構中保持爪位於保持位置的狀態的與長邊方向正交的剖面圖。 圖5是示意性地表示於所述一實施形態的第一搬送機構中保持爪位於退避位置的狀態的與長邊方向正交的剖面圖。 圖6是示意性地表示於所述一實施形態的第一搬送機構中保持板位於分離位置的狀態的與短邊方向正交的剖面圖。 圖7是示意性地表示於所述一實施形態的第一搬送機構中保持板位於接觸位置的狀態的與短邊方向正交的剖面圖。 圖8是表示所述一實施形態的保持爪移動部中的聯動機構的結構的示意圖。 圖9的(a)至圖9的(e)是表示所述一實施形態的保持單元所進行的成形前基板的定位/保持動作及搬送動作的示意圖。 圖10的(a)至圖10的(e)是表示所述一實施形態的保持單元所進行的樹脂成形品的定位/保持動作及搬送動作的示意圖。 圖11是表示變形實施形態的基板供給/收納模組的結構(兩層結構)的示意圖。 FIG. 1 is a schematic diagram showing the structure of a resin molding device of an embodiment of the present invention. FIG. 2 is a schematic diagram showing the structure of a resin molding module of the embodiment. FIG. 3 is a diagram schematically showing the structure of a substrate supply unit and a molded product storage unit of the embodiment, and showing the conveying action of a pre-molded substrate and a conveying action of a resin molded product between these and each transfer platform. FIG. 4 is a cross-sectional diagram orthogonal to the long side direction schematically showing a state in which a holding claw is in a holding position in a first conveying mechanism of the embodiment. FIG. 5 is a cross-sectional diagram orthogonal to the long side direction schematically showing a state in which a holding claw is in a retracted position in a first conveying mechanism of the embodiment. FIG. 6 is a cross-sectional view orthogonal to the short side direction schematically showing a state where the holding plate is located at a separated position in the first conveying mechanism of the embodiment. FIG. 7 is a cross-sectional view orthogonal to the short side direction schematically showing a state where the holding plate is located at a contact position in the first conveying mechanism of the embodiment. FIG. 8 is a schematic diagram showing the structure of the linkage mechanism in the holding claw moving part of the embodiment. FIG. 9 (a) to FIG. 9 (e) are schematic diagrams showing the positioning/holding action and conveying action of the pre-molding substrate performed by the holding unit of the embodiment. FIG. 10 (a) to FIG. 10 (e) are schematic diagrams showing the positioning/holding action and conveying action of the resin molded product performed by the holding unit of the embodiment. FIG11 is a schematic diagram showing the structure (two-layer structure) of a substrate supply/storage module of a modified implementation form.

6:第一搬送機構(搬送裝置) 6: First conveying mechanism (conveying device)

61:保持單元 61: Keep unit

62:多關節臂部 62: Multi-joint arm

621:前端部 621: Front end

63:基座構件 63: Base components

64:定位機構 64: Positioning mechanism

641:保持爪 641:Keep claws

642:保持爪移動部 642: Keep claw moving part

642a:聯動機構 642a: linkage mechanism

642a1:連接軸 642a1: Connecting shaft

642a2:連結部 642a2: Connection part

642b:保持爪驅動部 642b: Holding claw drive unit

65:保持板 65: Holding board

65a:保持面 65a: Keep the face

651:收容部 651: Containment Department

R:保持位置 R: Hold position

U:分離位置 U: Separation position

W:成形前基板(成形對象物/基板/成形完畢基板) W: Substrate before molding (molding object/substrate/molding completed substrate)

Wa:外周端面 Wa: peripheral end surface

Wx:電子零件 Wx: Electronic parts

Claims (15)

一種搬送裝置,對成形對象物進行搬送,且所述搬送裝置包括: 保持單元,對所述成形對象物進行保持;以及 多關節臂部,使所述保持單元移動, 所述保持單元包括: 基座構件,連接於所述多關節臂部的前端部;以及 定位機構,與所述成形對象物的外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。 A conveying device is used to convey a molding object, and the conveying device includes: A holding unit for holding the molding object; and A multi-joint arm for moving the holding unit, and the holding unit includes: A base member connected to the front end of the multi-joint arm; and A positioning mechanism for contacting the outer peripheral end surface of the molding object and positioning the molding object relative to the base member. 如請求項1所述的搬送裝置,其中,所述定位機構包括: 保持爪,對所述成形對象物進行保持;以及 保持爪移動部,使所述保持爪移動, 所述保持爪移動部使所述保持爪在對所述成形對象物進行保持的保持位置與自所述保持位置退避的退避位置之間移動, 位於所述保持位置的所述保持爪與所述外周端面接觸而相對於所述基座構件對所述成形對象物進行定位。 The conveying device as described in claim 1, wherein the positioning mechanism includes: a holding claw for holding the molding object; and a holding claw moving unit for moving the holding claw, the holding claw moving unit moves the holding claw between a holding position for holding the molding object and a retreat position for retreating from the holding position, the holding claw at the holding position contacts the outer peripheral end surface to position the molding object relative to the base member. 如請求項2所述的搬送裝置,其中,所述成形對象物於俯視下呈矩形形狀, 所述保持爪與所述成形對象物的四邊分別對應地設置。 The conveying device as described in claim 2, wherein the object to be formed is rectangular in a plan view, and the retaining claws are arranged corresponding to the four sides of the object to be formed. 如請求項3所述的搬送裝置,其中,所述保持爪移動部包括: 聯動機構,使與所述四邊分別對應地設置的所述保持爪聯動;以及 保持爪驅動部,經由所述聯動機構而使與所述四邊分別對應地設置的所述保持爪移動。 The conveying device as described in claim 3, wherein the holding claw moving part includes: a linkage mechanism that causes the holding claws arranged corresponding to the four sides to be linked; and a holding claw driving part that causes the holding claws arranged corresponding to the four sides to be moved via the linkage mechanism. 如請求項2至4中任一項所述的搬送裝置,其更包括保持板,所述保持板在與位於所述保持位置的所述保持爪之間夾著並保持所述成形對象物。The conveying device as described in any one of claims 2 to 4 further includes a holding plate, which sandwiches and holds the forming object between the holding plate and the holding claw located at the holding position. 如請求項5所述的搬送裝置,其中,所述保持板與所述成形對象物對應地於俯視下呈矩形形狀, 所述保持爪設置成包圍所述保持板的四邊,於所述保持位置與所述保持板接觸。 The conveying device as described in claim 5, wherein the holding plate is rectangular in a plan view corresponding to the forming object, and the holding claw is arranged to surround the four sides of the holding plate and contact the holding plate at the holding position. 如請求項5或6所述的搬送裝置,其更包括板移動部,所述板移動部使所述保持板在和藉由所述定位機構而定位的所述成形對象物接觸的接觸位置與自所述成形對象物離開的分離位置之間移動。The conveying device as described in claim 5 or 6 further includes a plate moving part, which enables the retaining plate to move between a contact position in contact with the forming object positioned by the positioning mechanism and a separation position away from the forming object. 如請求項7所述的搬送裝置,其中,所述搬送裝置於藉由所述板移動部而使所述保持板處於所述分離位置的狀態下,藉由所述定位機構而對所述成形對象物進行定位,並於藉由所述定位機構而將所述成形對象物定位後,藉由所述板移動部而使所述保持板處於所述接觸位置。A conveying device as described in claim 7, wherein the conveying device positions the forming object by the positioning mechanism when the retaining plate is in the separated position by the plate moving part, and after the forming object is positioned by the positioning mechanism, the retaining plate is placed in the contact position by the plate moving part. 如請求項1至8中任一項所述的搬送裝置,其中,所述成形對象物於一面固定有電子零件, 所述搬送裝置對以所述電子零件處於上側的第一狀態載置的所述成形對象物進行保持,設為所述電子零件處於下側的第二狀態而交給移載平台。 A conveying device as described in any one of claims 1 to 8, wherein the object to be formed has an electronic component fixed on one side, and the conveying device holds the object to be formed in a first state in which the electronic component is on the upper side, and transfers the object to the transfer platform in a second state in which the electronic component is on the lower side. 如請求項1至9中任一項所述的搬送裝置,其中,所述保持單元相對於所述基座構件對成形前的所述成形對象物及成形後的所述成形對象物分別於共同的位置進行保持。The conveying device as described in any one of claims 1 to 9, wherein the holding unit holds the forming object before forming and the forming object after forming at a common position relative to the base member. 一種樹脂成形裝置,具有如請求項1至10中任一項所述的搬送裝置。A resin molding device comprises a conveying device as described in any one of claims 1 to 10. 如請求項11所述的樹脂成形裝置,其包括:成形對象物供給部,供給成形前的所述成形對象物; 成形對象物收納部,收納成形後的所述成形對象物; 第一移載平台,供成形前的所述成形對象物臨時設置; 第二移載平台,供成形後的所述成形對象物臨時設置;以及 交接機構,在所述各移載平台與成形模之間進行成形前的所述成形對象物及成形後的所述成形對象物的交接, 所述搬送裝置在所述成形對象物供給部與所述第一移載平台之間進行成形前的所述成形對象物的交接,在所述成形對象物收納部與所述第二移載平台之間進行成形後的所述成形對象物的交接。 The resin forming device as described in claim 11 comprises: a forming object supply section for supplying the forming object before forming; a forming object storage section for storing the forming object after forming; a first transfer platform for temporarily placing the forming object before forming; a second transfer platform for temporarily placing the forming object after forming; and a handover mechanism for handing over the forming object before forming and the forming object after forming between the transfer platforms and the forming mold, the conveying device for handing over the forming object before forming between the forming object supply section and the first transfer platform, and for handing over the forming object after forming between the forming object storage section and the second transfer platform. 如請求項12所述的樹脂成形裝置,其中,所述交接機構具有: 成形前搬送部,對成形前的所述成形對象物進行搬送;以及 成形後搬送部,對成形後的所述成形對象物進行搬送。 The resin molding device as described in claim 12, wherein the handover mechanism comprises: a pre-molding conveying unit for conveying the molding object before molding; and a post-molding conveying unit for conveying the molding object after molding. 如請求項12或13所述的樹脂成形裝置,其中,所述成形對象物於一面固定有電子零件, 所述成形對象物供給部以所述電子零件處於上側的第一狀態供給成形前的所述成形對象物, 於所述第一移載平台以所述電子零件處於下側的第二狀態設置成形前的所述成形對象物。 A resin molding device as described in claim 12 or 13, wherein the molding object has an electronic component fixed on one side, the molding object supply unit supplies the molding object before molding in a first state in which the electronic component is on the upper side, and the molding object before molding is set on the first transfer platform in a second state in which the electronic component is on the lower side. 一種樹脂成形品的製造方法,對成形對象物進行樹脂成形,所述樹脂成形品的製造方法包括: 搬送步驟,藉由如請求項1至10中任一項所述的搬送裝置來搬送所述成形對象物;以及 樹脂成形步驟,對所述成形對象物進行樹脂成形。 A method for manufacturing a resin molded product, wherein a molding object is subjected to resin molding, the method comprising: a conveying step, wherein the molding object is conveyed by a conveying device as described in any one of claims 1 to 10; and a resin molding step, wherein the molding object is subjected to resin molding.
TW113121564A 2023-07-19 2024-06-12 Transporting apparatus, resin molding apparatus and resin molded product manufacturing method TW202505649A (en)

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JPH09189891A (en) * 1996-01-08 1997-07-22 Hitachi Electron Eng Co Ltd Clamp mechanism for rectangular glass substrate cassette
JP2001135701A (en) 1999-11-02 2001-05-18 Olympus Optical Co Ltd Apparatus and method for substrate transfer
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