TW202440300A - Laminate molding system, tension assist system and laminated molding method - Google Patents

Abstract

In the previous lamination forming system, there is a problem of positional deviation caused by the warping of the carrier film. The lamination forming system of the present invention has: a roll-out device 20, which rolls out the carrier film while the laminated body is clamped by a pair of carrier films; a lamination forming device 10, which performs a lamination forming step of pressurizing the laminated body by a pressurizing part in a manner that at least one side of the laminated body is laminated with the laminated film; a winding device 30 , which moves the laminated body after the lamination forming step out of the lamination forming device 10 by rolling up a pair of carrier films; and a tension auxiliary device 11, which is arranged on at least one of the roll-out device 20 side and the roll-up device 30 side of the pressurizing part, and temporarily enhances the tension of the carrier film CFL arranged under the pair of carrier films.

Description

Laminated forming system, tension-assisted system and laminated forming method

The present invention relates to a lamination forming system, a tension-assisted system and a lamination forming method for laminating a thin film material for filling the unevenness on a substrate material having unevenness on the surface.

In recent years, the number of wiring layers forming wiring in semiconductor substrates or electronic circuit substrates has been increasing. In such multi-layer wiring substrates, there is a method of forming them by attaching interlayer insulating films formed between layers using a stamping process. Therefore, a lamination forming system is proposed for laminating a thin film material as an interlayer insulating film on a substrate material for forming such an electronic circuit. Patent document 1 discloses an example of such a lamination forming system.

The laminated forming system described in Patent Document 1 is a system for performing laminated forming on a laminated formed body using a laminated device, wherein at least one of at least two prepared laminated devices is replaceably arranged between a supply device and a recovery device to form a series of forming lines. [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent Publication No. 2022-15589

(Invent the problem you want to solve)

In the lamination apparatus described in Patent Document 1, a laminate is carried in and out of the lamination apparatus via carrier films arranged above and below. However, the carrier film is warped when the laminate is carried, and there is a risk that the laminate may be displaced from its position in the lamination apparatus due to the warping.

The present invention is completed in view of the above situation, and its purpose is to suppress the position deviation of the laminated body caused by the warping of the carrier film, so as to perform high-precision laminate forming. (Technical means to solve the problem)

A lamination forming system in one embodiment comprises: a roll-out device for rolling out a carrier film for conveying a laminated body; a lamination forming device for performing a lamination forming step of pressurizing the laminated body by a pressurizing unit; a take-up device for taking up the carrier film and conveying the laminated body after the lamination forming step from the lamination forming device to a lamination forming unit; out; and a tension assisting device, which is arranged between the aforementioned lamination forming device and the aforementioned unwinding device, and at least one of the aforementioned lamination forming device and the aforementioned winding device, and supports the lower surface of the aforementioned carrier film; and the aforementioned tension assisting device is arranged between the aforementioned pressurizing portion and the aforementioned tension assisting device and is not separated by a structure.

One embodiment of the tension-assisting system is combined with a lamination forming device, which conveys a laminated body and performs a lamination forming step of pressurizing the laminated body by a pressurizing section in such a manner that at least one side of the laminated body is laminated with a laminate film; the tension-assisting system comprises a tension-assisting device, which, when the laminated body stops at a stop position set at the pressurizing section, supports the lower side of the carrier film on which the laminated body is carried in such a manner that the tension in the conveying direction of the laminated body is substantially the same before and after the conveying direction.

A method for forming a laminated body using a laminate forming system in an embodiment, wherein the laminate forming system comprises: a roll-out device for rolling out a carrier film for conveying the laminated body; a laminate forming device for laminating the laminated body by laminating at least one side of the laminated body with the laminate film, and performing a lamination process by pressurizing the laminated body using a pressurizing unit. forming step; a winding device, which moves the aforementioned laminated body after the aforementioned lamination forming step out of the aforementioned lamination forming device by winding the aforementioned carrier film; the aforementioned lamination forming method is that when the aforementioned laminated body stops at a stop position set in the aforementioned pressurizing part, the lower side of the aforementioned carrier film is supported while the aforementioned laminated body is pressurized.

In a laminate forming system, a tension assisting system and a laminate forming method in one embodiment, in a tension assisting device disposed near a pressurizing portion, after the laminated body is transported to a stop position, the amount of bending of the lower carrier film is suppressed by increasing the tension of the lower carrier film. (Compared to the effect of the prior art)

According to a lamination forming system, a tension assisting system and a lamination forming method in one embodiment, positional deviation caused by warping of a carrier film can be suppressed to perform high-precision lamination forming.

In order to make the description more clear, the following description and drawings are appropriately omitted and simplified. In addition, in each drawing, the same elements are given the same symbols, and repeated descriptions are omitted as necessary.

(Implementation Form 1) The lamination forming system 1 of Implementation Form 1 has a lamination forming device, which performs a lamination forming step of pressurizing the laminated body by a pressurizing unit in a state where the laminated body is sandwiched by a pair of carrier films and transported so that at least one side of the laminated body is laminated with the laminated film. The lamination forming system 1 of Implementation Form 1 sandwiches and transports the laminated body by a carrier film while the laminated film is placed on the laminated body. Furthermore, in the lamination forming system 1, a roll-out device for supplying a carrier film and a roll-up device for recovering a carrier film are combined with the lamination forming device into one system. Furthermore, in the lamination forming system 1 of the embodiment 1, when the laminated body is transported to the stop position of the pressurizing section set in the lamination forming device, the tension of the lower carrier film in a pair of carrier films is increased to prevent the carrier film from buckling. Therefore, the lamination forming system 1 having a carrier film tension adjustment mechanism is described in detail below.

FIG1 is a schematic diagram showing a lamination forming system of embodiment 1. The diagram shown in FIG1 mainly shows the structure of a tension assisting device 11 for temporarily increasing the tension of the lower carrier film in the lamination forming system 1, and simplifies the specific structure of the lamination forming system 1. In the following description, the lamination film laminated on the laminated body is omitted from the diagram.

As shown in FIG1 , the lamination forming system 1 is combined with a tension assisting device 11 and a clamping device 12 with respect to the lamination forming device 10. In addition, in the lamination forming system 1, a roll-out device and a roll-up device for supplying a carrier film are combined in order to carry in and out of the lamination forming device 10 a laminated film temporarily placed on the laminated body WK1 in a state of being clamped by a pair of carrier films. FIG1 shows a lower supply roller 21, a driven roller 22, an upper supply roller 23, a driven roller 24, and a mounting table 25 in the roll-out device. In addition, the lower recovery roller 31, the driven roller 32, the upper recovery roller 33, the driven roller 34, and the recovery table 35 in the winding device are shown. Furthermore, in the lamination forming system 1 of the embodiment 1, the laminated body WK1 and the laminated film are overlapped by the mounting table 25. In the following description, the description of the laminated film is omitted, but the lamination forming system 1 of the embodiment 1 is used to laminate the laminated film on the laminated body WK1, and this point has not changed.

In FIG. 1 , as the structure of the lamination forming apparatus 10, an upper die 101, an upper pressure plate 102, a lower die 103, a lower pressure plate 104, a punch 105, and a pressure generating device 106 are shown. The lamination forming apparatus 10 is formed by assembling the upper die 101 and the lower die 103 to form a cavity that can maintain the inner space in a depressurized state that is more depressurized than the outer space. The upper pressure plate 102 is provided on the surface of the upper die 101 that faces the lower die 103, and the lower pressure plate 104 is provided on the surface of the lower pressure plate 104 that faces the upper die 101. The lower mold 103 is configured such that the punch 105 is pushed up by a pressure generating device 106 such as a hydraulic unit disposed on the lower side of the lower mold 103 and approaches the upper pressure plate 102. That is, the upper pressure plate 102 and the lower mold 103 are disposed in the aforementioned cavity and serve as a pressure stage for applying pressure to the laminated body WK2. Furthermore, the lamination forming apparatus 10 is a vacuum lamination forming apparatus for performing vacuum lamination forming, and the vacuum lamination forming is to pressurize the laminated body WK2 using the upper pressure plate 102 and the lower pressure plate 104 while making the cavity vacuum. That is, in the lamination forming apparatus 10, the upper pressure plate 102 and the lower pressure plate 104 are used to pressurize the laminated body WK2. In addition, in the lamination forming apparatus 10, in order to perform vacuum lamination forming, the upper mold 101 and the upper pressure plate 102, and the lower mold 103 and the lower pressure plate 104 can also be considered as the pressurizing part. Furthermore, the upper pressure plate 102 and the lower pressure plate 104 can also be used as flexible sheets, respectively. In addition, when vacuum lamination forming is not performed, the structure for forming the cavity is not required. Furthermore, the pressure generating device 106 may be a servo motor, and the plunger 105 may be a ball screw.

In the lamination forming system 1 of the embodiment 1, the laminated body WK1 is placed on the lower carrier film CFL on the placing table 25. Then, by overlapping the upper carrier film CFU on the laminated body WK1, the laminated body WK1 is transported to the lamination forming apparatus 10 in a state where the laminated body WK1 is sandwiched between the lower carrier film CFL and the upper carrier film CFU. In FIG. 1 , the laminated body transported to the stop position in the laminated forming apparatus 10 is shown as the laminated body WK2. Then, in the lamination forming system 1, by moving the lower carrier film CFL and the upper carrier film CFU, the lamination forming device 10 carries out the lamination body WK3 on which the lamination film has been laminated to the collection station 35. Furthermore, the thin film laminated on the lamination body WK2 is not limited to the upper carrier film CFU, and it only needs to be at least one of the lower carrier film CFL and the upper carrier film CFU.

Furthermore, in embodiment 1, when conveying the laminated body, the lower carrier film CFL rolled out from the lower supply roller 21 is assisted by the driven rollers 22 and 32 and taken up by the lower recovery roller 31, and the upper carrier film CFU rolled out from the upper supply roller 23 is assisted by the driven rollers 24 and 34 and taken up by the upper recovery roller 33.

Then, in the lamination forming apparatus 10, the tension auxiliary device 11 and the clamping device 12 are used to temporarily increase the tension of the lower carrier film CFL. Here, in FIG. 1, the motion control unit CU for controlling the entire lamination forming system 1 is shown. The motion control unit CU controls the movement of the carrier film, the time point and the pressure of the pressurization in the lamination forming apparatus 10, and the motion of the tension auxiliary device 11 and the clamping device 12. The specific control method will be described later.

In the example shown in FIG. 1 , the tension assisting device 11 is provided between the lamination forming device 10 and the unwinding device. More specifically, the tension assisting device 11 is disposed between the pressurizing portion of the lamination forming device 10 and the tension assisting device 11 and at a position where no structure is interposed therebetween. Furthermore, the clamping device 12 is provided between the unwinding device and the lamination forming device 10. More specifically, the clamping device 12 is disposed between the pressurizing portion of the lamination forming device 10 and the clamping device 12 and at a position where no structure is interposed therebetween. Here, in the example shown in FIG. 1 , the pressurizing section of the lamination forming device 10 is a chamber having a pressurizing mechanism composed of an upper mold 101 and an upper pressurizing plate 102, and a lower mold 103 and a lower pressurizing plate 104. Furthermore, the clamping device 12 is arranged on the opposite side of the tension assisting device 11 across the pressurizing section of the lamination forming device 10. Furthermore, a tension assisting device that is paired with the tension assisting device 11 may be provided instead of the clamping device 12, and the lower carrier film may be fixed by stopping the rotation of the lower recovery roller 31 instead of the clamping device 12.

Then, in the laminate forming system 1, according to the arrival of the laminated body WK2 at the stop position set in the pressurizing part, the motion control unit CU instructs the clamping device 12 to clamp the lower carrier film CFL and the upper carrier film CFU. Thereafter, in the laminate forming system 1, the motion control unit CU instructs the tension assisting device 11 to increase the tension of the lower carrier film. Thus, in the laminate forming system 1, before pressurizing the laminated body WK2, the tension of the lower carrier film CFL is increased to suppress the bending of the lower carrier film CFL.

Here, the structure and operation of the tension assisting device 11 are described in more detail. Furthermore, the tension assisting device 11 can also be supplied separately from the lamination forming system 1 together with the operation control unit CU as a tension assisting system of the lamination forming system 1. Moreover, although the tension assisting device 11 can have a plurality of forms, two structure examples are described in the following description.

Fig. 2 is a diagram for explaining a first configuration and a first operation example of the tension assisting device 11 of the embodiment 1. As shown in Fig. 2 , in the first example, the tension assisting device 11 includes a first roller 111, a second roller 112, and a third roller 113.

The first roller 111 is a driven roller disposed on the unwinding device side. The second roller 112 is a driven roller disposed on the winding device side. The third roller 113 is a roller that allows the carrier film CFL conveyed from the first roller 111 to the lower side of the second roller 112 to be detoured to a lower side than the conveying height of the laminated body WK1. Furthermore, in the first embodiment, the conveying height of the laminated body WK1 can be defined as a straight line connecting the highest position of the circle of the first roller 111 and the highest position of the circle of the second roller 112. In the first configuration example, the third roller 113 acts as a driven roller when the laminate WK1 is transported, and acts as a driving roller that rotates in a rotation direction that stretches the lower carrier film CFL in a direction opposite to the transport direction of the laminate WK1 during a tension assisting action to increase the tension of the lower carrier film CFL. In the example shown in FIG. 2 , the following state is shown: by generating a driving force counterclockwise during the tension assisting action, the third roller 113 stretches the lower carrier film CFL in a direction opposite to the transporting direction, thereby increasing the tension of the lower carrier film CFL. Furthermore, the action of the third roller 113 is controlled by the action control unit CU.

Next, Fig. 3 shows a diagram for explaining a second configuration and a second operation example of the tension assisting device 11 of the embodiment 1. As shown in Fig. 3, in the second example, the tension assisting device 11 also has a first roller 111, a second roller 112, and a third roller 113.

In the second configuration example shown in FIG3 , the first roller 111 is a driven roller disposed on the unwinding device side (e.g., the front section) of the laminate forming device 10. The second roller 112 is a driven roller disposed on the winding device side (e.g., the rear section) of the laminate forming device 10. The third roller 113 is a roller that allows the carrier film CFL conveyed from the first roller 111 to the lower side of the second roller 112 to detour to a lower side than the conveying height of the laminated body WK1. In the second configuration example, the third roller 113 acts as a driven roller when the laminated body WK1 is transported, and in the tension-assisting action of increasing the tension of the lower carrier film CFL, the tension of the lower carrier film CFL is increased by stretching the lower carrier film CFL to a position lower than the transport position during the transport action of transporting the laminated body WK1 into the laminate forming apparatus 10. The action of the third roller 113 is controlled by the action control unit CU.

Next, Fig. 4 shows a diagram for explaining a third configuration and a third operation example of the tension assisting device 11 of the embodiment 1. As shown in Fig. 4 , in the third configuration example, the tension assisting device 11 also has a first roller 111, a second roller 112, and a third roller 113.

Furthermore, in the third configuration example, the first roller 111 is a driven roller disposed on the unwinding device side (e.g., the front section) of the laminate forming device 10. The second roller 112 is a driven roller disposed on the winding device side (e.g., the rear section) of the laminate forming device 10. The third roller 113 is a driven roller that moves along an arc centered on the roller rotation center point. In the third configuration example, the third roller 113 moves in a direction opposite to the conveying direction of the laminated body along an arc centered on the roller rotation center point during the tension assisting action of increasing the tension of the lower carrier film CFL. By the movement of the third roller 113, in the third configuration example, the tension of the lower carrier film CFL is increased by stretching the lower carrier film CFL. The movement of the third roller 113 is controlled by the movement control unit CU.

Next, Fig. 5 shows a diagram for explaining a fourth configuration and a fourth operation example of the tension assisting device 11 of the embodiment 1. As shown in Fig. 5 , in the fourth configuration example, the tension assisting device 11 also has a first roller 111, a second roller 112, and a third roller 113.

Furthermore, in the fourth configuration example, the first roller 111 is a driven roller disposed on the unwinding device side (e.g., the front section) of the laminate forming device 10. The second roller 112 is a driven roller disposed on the winding device side (e.g., the rear section) of the laminate forming device 10. The third roller 113 is a driven roller that moves linearly in a direction having an angle θ with the vertical axis VX. Here, the angle θ is for increasing the tension of the lower carrier film CFL, and is preferably in the range of 90°≦θ≦270°. In the fourth configuration example, the third roller 113 moves linearly in a direction having an angle θ with the lead-vertical axis VX during the tension-assisting action of increasing the tension of the lower carrier film CFL. By such movement of the third roller 113, in the fourth configuration example, the tension of the lower carrier film CFL is increased by stretching the lower carrier film CFL. Furthermore, the action of the third roller 113 is controlled by the action control unit CU.

Furthermore, in FIG. 2 and FIG. 3, the tension auxiliary device 11 using three rollers is described, but in the tension auxiliary device 11, at least one roller for enhancing the tension of the lower carrier film CFL is sufficient. In addition, the supporting form of the roller can be single-sided support, can be two-end support, can be suspended from the top, and can also be supported by a crossbeam. That is, the supporting form of the roller is not particularly limited. In the structure of the tension auxiliary device 11 shown in FIG. 2, the roller that exerts the driving force can also be at least one of the first roller 111 and the second roller 112.

Furthermore, the diameters of the three rollers constituting the tension assisting device 11 may all be the same diameter, or at least one roller may be different. As an example of the diameters of the three rollers, the first roller 111 and the second roller 112 have the same diameter, and the third roller 113 has a diameter smaller than the other rollers. More preferably, the diameters of the first roller 111 and the second roller 112 are set to 0.2 to 1.9 times the diameter of the third roller 113. By setting such a structure, space saving can be improved.

Furthermore, there is no particular limitation on the raw materials of the three rollers constituting the tension assisting device 11, and metal, resin, rubber, etc. can be considered. Furthermore, at least one of the three rollers constituting the tension assisting device 11 can also be coated with cloth or attached with anti-slip material on the surface. Furthermore, the three rollers constituting the tension assisting device 11 can also be provided with a temperature control function. The temperature control function is preferably a heating or cooling roller, and more preferably a cooling roller.

Here, in the lamination forming system 1 of the embodiment 1, when the tension assisting action of the lower carrier film CFL is performed, the action control unit CU performs the following action. In the absence of the clamping device 12, the action control unit CU gives an instruction to the tension assisting device 11 to increase the tension of the lower carrier film CFL when the laminated body WK2 stops at the pressurizing position of the pressurizing unit. In addition, when the clamping device 12 is present, the action control unit CU gives an instruction to the tension assisting device 11 to increase the tension of the lower carrier film CFL when the laminated body WK1 stops at the pressurizing position of the pressurizing unit and a pair of carrier films are fixed by the clamping device 12. In the following description, the operation of the layered forming system 1 in a state with the clamping device 12 is described.

Fig. 6 is a flow chart for explaining the operation of the multilayer forming system 1 according to the embodiment 1. The operation of the multilayer forming system 1 described below is performed according to the instruction of the operation control unit CU.

As shown in FIG6 , the lamination forming system 1 starts the subsequent operation (step S1) when the lamination object WK1 is placed on the stage 25. When the lamination object WK1 is placed on the stage 25 in step S1, the operation control unit CU instructs each roller to roll out a pair of carrier films by the lower supply roller 21 and the upper supply roller 23, and to roll up a pair of carrier films by the lower recovery roller 31 and the upper recovery roller 33, thereby carrying the lamination object WK1 into the lamination forming apparatus 10 (step S2). Then, the carrying-in action of step S2 is continued until the unwinding amount of the carrier film reaches the specified amount. When the unwinding amount of the carrier film reaches the specified amount, the lower supply roller 21, the upper supply roller 23, the lower recovery roller 31 and the upper recovery roller 33 are instructed to stop unwinding the carrier film, and the conveying action of the stacked layer WK1 is stopped (steps S3 and S4). Thus, the stacked layer WK1 becomes the stacked layer WK2 placed at the stop position.

Thereafter, the action control unit CU instructs the clamping device 12 to clamp the carrier film (step S5). Thereafter, the action control unit CU instructs the tension assisting device 11 to perform a tension assisting action to roll back the lower carrier film CFL (step S6). Furthermore, the action control unit CU continues the tension assisting action of step S6 until the roll-back amount of the lower carrier film CFL by the tension assisting device 11 reaches a prescribed amount (step S7). Furthermore, when the roll-back amount of the lower carrier film CFL reaches a prescribed amount, the action control unit CU instructs the lamination forming device 10 to perform vacuum lamination forming processing (step S8).

In the vacuum lamination forming process of step S8, the following steps are performed: chamber closing, which closes the upper mold 101 and the lower mold 103; vacuum extraction, which makes the closed chamber a vacuum; lamination forming processing, which pressurizes the laminated body WK2; vacuum release, which releases the vacuum in the chamber; and chamber opening, which opens the upper mold 101 and the lower mold 103. Thereafter, based on the fact that the laminated body WK1 has been placed on the loading table 25 in S1, the action control unit CU instructs each roller to make the lower supply roller 21 and the upper supply roller 23 roll out a pair of carrier films, and the lower recovery roller 31 and the upper recovery roller 33 roll up a pair of carrier films, thereby moving the laminated body WK2 out of the lamination forming device 10 (step S9).

Next, the detailed configuration of the tension assisting device 11 is described. Here, FIG7 shows a specific configuration diagram of the lamination forming system of the embodiment 1. As shown in FIG7, the lamination forming system 1 of the embodiment 1 has a lamination forming device 10, a roll-out device 20, and a roll-up device 30. An upper mold 101, an upper pressure plate 102, a lower mold 103, and a lower pressure plate 104 are assembled in the lamination forming device 10. Furthermore, in the example shown in FIG7, the tension assisting device 11 and the clamping device 12 are assembled in the lamination forming device 10. The unwinding device 20 is assembled with a lower feed roller 21, a driven roller 22, an upper feed roller 23, a driven roller 24, and a loading table 25. The take-up device 30 is assembled with a lower recovery roller 31, a driven roller 32, an upper recovery roller 33, a driven roller 34, and a recovery table 35. Furthermore, the structure assembled in each device is a part of the structure actually assembled. In addition, in FIG. 7, although the motion control unit CU is not explicitly shown, the motion control unit CU can be assembled in the lamination forming device 10, and can also be assembled in a frame different from the lamination forming device 10, the unwinding device 20, and the take-up device 30.

Moreover, as shown in FIG. 7 , in the lamination forming system 1, in order to shorten the length of the carrier film used for conveying as much as possible, the lamination forming device 10, the unwinding device 20, and the winding device 30 are closely arranged. Therefore, the tension assisting device 11 and the clamping device 12 are assembled in the narrow space between the upper mold 101 and the lower mold 103 of the lamination forming device 10. Among them, the upper mold 101 is a fixed mold, and the lower mold 103 is a movable mold. Therefore, considering the space between the upper mold 101 and the lower mold 103, the tension assisting device 11 is ideally fastened to the upper mold 101 by bolts or the like. FIG. 7 shows an enlarged view of a portion where the tension assisting device 11 and the clamping device 12 are assembled.

In the lamination molding apparatus 10, a gate 107 is provided in conjunction with the lower mold 103, and a cavity is formed by raising the lower mold 103 equipped with the gate 107. When the cavity is formed, a pair of carrier films are sandwiched by the upper mold 101 and the gate 107. Thereafter, in the lamination molding apparatus 10, the laminated body WK2 is pressurized by raising the lower mold 103. Since such a pressurizing action is performed, the tension assisting device 11 needs to be maintained at a height that does not contact the lower mold 103 after the maximum rise, and is maintained at a position lower than the conveying position of the laminated body composed of the carrier film. In this case, by setting the tension assisting device 11 to the first configuration example shown in FIG. 2 , the height of the tension assisting device 11 in the vertical direction can be suppressed. That is, in the first configuration example of the tension assisting device 11, there is an advantage that it can be set in a narrow position. On the other hand, when the tension assisting device 11 is set to the second configuration example, although a space is required for the third roller 113 to move up and down, since a driving force in the rotational direction is not required, there is an advantage that the configuration of the tension assisting device 11 can be simplified.

Furthermore, the clamping device 12 is also configured to press the carrier film from the upper side of the upper carrier film CFU relative to the workbench disposed below the lower carrier film CFL, thereby enabling the clamping device 12 to be disposed in the narrow space between the upper mold 101 and the upper mold carrier film CFU.

7, there is shown an example in which a workbench and a clamping device 26 for suppressing a pair of carrier films are provided in the unwinding device 20. However, by providing the workbench and the clamping device 26, the driving force of the third roller 113 can be reduced when the tension assisting device 11 performs the tension assisting action.

According to the above description, in the lamination forming system 1 of the embodiment 1, the bending of the lower carrier film CFL can be suppressed by using the tension assisting device 11. At this time, by arranging the tension assisting device 11 at a position where there is no other structure between the tension assisting device 11 and the pressurizing part (for example, a position directly in front of the pressurizing part), tension can be effectively applied to the lower carrier film CFL.

Here, the carrier film is mostly a resin film such as PET (polyethylene terephthalate resin). In such a resin film, since elongation is generated by tension, as described above, by setting the tension auxiliary device 11 as close to the pressurizing part as possible, tension can be effectively applied to the lower carrier film CFL. Here, the distance between the surface of the roller closest to the pressurizing part among the rollers constituting the tension auxiliary device 11 and the end of the tension auxiliary device side of the pressurizing part is preferably within 500 mm, and more preferably within 100 mm.

Furthermore, by providing the clamping device 12 at a position opposite to the tension assisting device 11 across the pressurizing portion, the starting point of the tension can be made closer to the pressurizing portion side than the lower recovery roller 31 or the driven roller 32, thereby further improving the efficiency of adding tension to the lower carrier film CFL.

Therefore, by suppressing the deflection of the lower carrier film CFL by the tension assist device 11 as in the lamination forming system 1, the position accuracy of the laminated body WK2 can be improved, and the accuracy of lamination forming can be improved.

Here, FIG8 shows a diagram for explaining the bending of the lower carrier film CFL, and explains the bending of the lower carrier film CFL in detail. In FIG8, the upper diagram shows the bending of the lower carrier film CFL in the comparative example without using the tension assisting device 11, and the lower diagram shows the bending of the lower carrier film CFL in the lamination forming system 1 of the embodiment 1 having the tension assisting device 11. In addition, FIG8 shows an example in which both the lamination forming system 1 of the embodiment 1 and the lamination forming system of the comparative example have a clamping device 26 provided on the side of the unwinding device 20.

As shown in the upper figure of FIG. 8 , in the comparative example lamination forming system, the distance L1 between the center position CENT of the laminated body WK2 that has reached the preset stop position and the end of the workbench that serves as the fulcrum on the film conveying source side is much longer than the distance L0 between the center position CENT and the end of the workbench that serves as the fulcrum on the film conveying destination side. That is, in the comparative example lamination forming system, L0＜L1. Therefore, in the comparative example lamination forming system, due to the balance between the center position of the laminated body WK2 that has reached the stop position and the distances L0 and L1, the laminated body WK2 is greatly tilted, resulting in a positional deviation of the laminated body WK2. In addition, in FIG. 8 , the maximum bending amount in the multilayer forming system of the comparative example is represented as DL0.

On the other hand, in the lamination forming system 1 of the embodiment 1 shown in the lower figure of Fig. 8, by arranging the tension assisting device 11 near the chamber, the distance L2 between the center position CENT of the laminated body WK2 and the end of the second roller 112 of the tension assisting device 11 closest to the chamber position, which is the fulcrum on the film conveying source side, is substantially the same distance as the distance L0 between the center position CENT and the end of the worktable, which is the fulcrum on the film conveying destination side. Thus, since the center position CENT of the laminated body WK2 reaches the center of the center position CENT and the fulcrum on the film conveying source side and the center position CENT and the fulcrum on the film conveying destination side, the tilt of the laminated body WK2 is suppressed. Furthermore, the maximum deflection amount of the carrier film CFL on the lower side where the laminate WK2 is mounted is DL1, which is smaller than DL0.

Thus, by arranging the tension assisting device 11 near the chamber, the tilt of the laminate WK2 can be suppressed, and the buckling of the lower carrier film CFL can be effectively suppressed. Moreover, as shown in the lower figure of FIG8 , the tension assisting device 11 can suppress the tilt of the laminate WK2 even when there is only one second roller 112 and no driving force. Furthermore, as shown in FIG2 and FIG3 , the buckling suppression effect can be further improved by providing the tension assisting device 11 with the third roller 113 having driving force.

Furthermore, the arrangement of the tension assisting device 11 for reducing the difference between the distance L2 and the distance L0 as described above is preferably arranged between the end of the gate 107 and the end of the upper mold 101 when viewed from the winding device 30 toward the unwinding device 20. That is, the tension assisting device 11 is preferably arranged within 100 mm from the end of the gate 107, and more preferably within 50 mm. Here, FIG. 9 shows a more preferred arrangement of the tension assisting device 11. FIG. 9 is a diagram illustrating an example of the arrangement of the tension assisting device 11 and the clamping device 12.

As shown in FIG9 , the lamination molding device 10 is provided with a connecting rod 108 penetrating the upper mold 101 and the lower mold 103. The connecting rod 108 is disposed, for example, at the four corners of the chamber. Here, the second roller 112 is disposed so that at least a portion of the second roller 112 of the tension assisting device 11 is overlapped on the area A (projection area of the connecting rod 108) that connects the outer periphery of the connecting rod 108 disposed opposite to the direction perpendicular to the carrier film conveying direction. That is, the fulcrum for the tension assisting device 11 to support the lower carrier film CFL is set at a position overlapping an area A (projection area of the connecting rod 108) connecting the outer peripheries of two connecting rods 108 arranged opposite to each other in a direction perpendicular to the conveying direction of the lower carrier film CFL in the connecting rod 108 provided on the outer periphery of the pressurizing portion in the lamination forming device 10. In addition, the first roller 111 may be further arranged so that at least a portion of the first roller 111 of the tension assisting device 11 overlaps with the area B which is line-symmetrically opposite to the area A. That is, the supporting point for supporting the lower carrier film CFL by two or more tension assisting devices 11 can also be set at a position overlapping with the area A and the area B which are line symmetrical with the pressurizing part of the lamination forming device 10 as a boundary. By arranging the tension assisting device 11 in this way, the difference between the distance L2 and the distance L0 becomes smaller, and the bending amount of the lower carrier film CFL can be further suppressed.

(Implementation Form 2) In Implementation Form 2, a multilayer forming system 2 which is a variation of the multilayer forming system 1 of Implementation Form 1 is described. In the description of Implementation Form 2, the same symbols as those of Implementation Form 1 are assigned to the same components as those of Implementation Form 1, and the description thereof is omitted.

Fig. 10 is a schematic diagram showing the structure of the lamination forming system 2 according to the second embodiment. As shown in Fig. 10, the arrangement of the tension assisting device 11 and the clamping device 12 in the lamination forming system 2 according to the second embodiment is opposite to that in the lamination forming system 1 according to the first embodiment.

In this way, even if the tension assisting device 11 and the clamping device 12 are opposite, tension can be applied to the lower carrier film CFL in the same manner as the lamination forming system 1 of the embodiment 1.

That is, in the lamination forming system described in this specification, the tension assisting device 11 only needs to be arranged on at least one of the unwinding device 20 side and the winding device 30 side of the pressurizing section of the lamination forming device 10. Furthermore, in the lamination forming system 2 of the second embodiment, it is preferred that the tension assisting device 11 be arranged within 500 mm, more preferably within 100 mm, from the end of the pressurizing section of the lamination forming device 10, thereby suppressing the amount of deflection of the lower carrier film CFL.

(Implementation Form 3) In Implementation Form 3, a multilayer forming system 3 which is a variation of the multilayer forming system 1 of Implementation Form 1 is described. In the description of Implementation Form 3, the same symbols as those of Implementation Form 1 are assigned to the same components as those of Implementation Form 1, and the description thereof is omitted.

FIG11 shows a configuration diagram of a lamination forming system of embodiment 3. As shown in FIG11, the lamination forming system 3 is provided with at least one punching device between the lamination forming device 10 and the winding device 30. The punching device further applies a pressure to the laminated body carried out from the lamination forming device 10. In the example shown in FIG11, a punching device 40 and a punching device 50 are provided between the lamination forming device 10 and the winding device 30.

The punching device 40 presses the laminated body by means of the upper pressurizing plate 402 provided on the upper mold 401 and the lower pressurizing plate 404 provided on the lower mold 403. The punching device 50 presses the laminated body by means of the upper pressurizing plate 502 provided on the upper mold 501 and the lower pressurizing plate 504 provided on the lower mold 503. In this way, by providing one or more punching devices at the rear stage of the laminate forming device 10, the flatness of the laminate forming surface can be improved step by step.

On the other hand, if the punching device 40, 50 is provided between the lamination forming device 10 and the winding device 30, the distance from the unwinding device 20 to the winding device 30 becomes longer, and the bending amount of the lower carrier film CFL becomes larger. However, by providing the tension assisting device 11 in the lamination forming device 10 and the punching device 40, 50, the bending amount of the lower carrier film CFL can be suppressed. Furthermore, at this time, by providing the tension assisting device 11 that generates a driving force, the bending amount of the lower carrier film CFL can be further suppressed.

Furthermore, as shown in FIG. 11 , by providing the clamping devices 42 and 52 to the punching device 40 and the punching device 50 , respectively, the increase in the amount of deflection in the punching device can be suppressed.

Furthermore, the present invention is not limited to the above-mentioned embodiments and can be modified appropriately without departing from the scope of the present invention.

1~3: Lamination forming system 10: Lamination forming device 11: Tension assist device 12, 26, 42, 52: Clamping device 20: Rolling device 21: Lower supply roller 22, 24, 32, 34: Driven roller 23: Upper supply roller 25: Loading table 30: Rolling device 31: Lower recovery roller 33: Upper recovery roller 35: Recovery table 40, 50: Punching device 101, 401, 501: Upper mold 102, 402, 502: Upper pressure plate 103, 403, 503: Lower mold 104, 404, 504: Lower pressure plate 105: Punch 106: Pressure generating device 107: Gate 108: Connecting rod 111: 1st roller 112: 2nd roller 113: 3rd roller θ: Angle A, B: Area CENT: Center position CFU: Upper carrier membrane CFL: Lower carrier membrane CU: Motion control unit DL0, DL1: Maximum bending amount L0, L1, L2: Distance S1~S9: Steps WK1, WK2: Integral layer WK3: Layer VX: Lead vertical axis

FIG. 1 is a schematic diagram of the multilayer forming system of embodiment 1. FIG. 2 is a diagram of the first structure and the first operation example of the tension assisting device of embodiment 1. FIG. 3 is a diagram of the second structure and the second operation example of the tension assisting device of embodiment 1. FIG. 4 is a diagram of the third structure and the third operation example of the tension assisting device of embodiment 1. FIG. 5 is a diagram of the fourth structure and the fourth operation example of the tension assisting device of embodiment 1. FIG. 6 is a flow chart of the operation of the multilayer forming system of embodiment 1. FIG. 7 is a specific diagram of the multilayer forming system of embodiment 1. FIG8 is a diagram for explaining the bending of the lower carrier film. FIG9 is a diagram for explaining the setting position of the supporting point of the lower carrier film. FIG10 is a diagram for explaining the general structure of the multilayer forming system of the implementation form 2. FIG11 is a diagram for explaining the specific structure of the multilayer forming system of the implementation form 3.

1:Layered forming system

10: Layer forming device

11: Tension auxiliary device

12, 26: Clamping device

20: Roll-out device

21: Lower supply roller

22, 24, 32, 34: driven roller

23: Offering to the roller

25: Loading platform

30: Rolling device

31: Lower recovery roller

33: Upper recovery roller

35: Recycling station

101: Upper mold

102: Upper pressure plate

103: Lower mold

104: Lower pressure plate

107: Gate

111: Roll 1

112: Roller 2

113: Roller 3

CFU: upper carrier membrane

CFL: Lower carrier film

Claims (13)

A laminate forming system comprises: a roll-out device that rolls out a carrier film for conveying a laminated body; a laminate forming device that performs a laminate forming step of pressurizing the laminated body by a pressurizing unit; a take-up device that takes the laminated body out of the laminate forming device after the laminate forming step by rolling up the carrier film; and a tension assisting device that is arranged between the laminate forming device and the roll-out device, and between the laminate forming device and the take-up device, and supports the lower surface of the carrier film. A layered forming system as claimed in claim 1, wherein the tension assisting device is arranged between the pressurizing portion and the tension assisting device without being separated by a structure. The laminate forming system of claim 1, wherein the pressurizing section comprises: a chamber that can maintain the internal space in a depressurized state that is more depressurized than the external space; and a pressurizing mechanism that is disposed in the chamber and applies pressure to the laminated body. The laminate forming system of claim 1 further comprises a motion control device, wherein the motion control device gives an instruction to the tension assisting device to increase the tension of the carrier film when the laminated body stops at the pressurizing position of the pressurizing portion. The tension assisting device increases the tension applied to the carrier film according to the instruction from the motion control device. A layered forming system as claimed in claim 1, wherein at least a portion of a component that enables the tension assisting device to generate a fulcrum for supporting the carrier film is disposed at a position overlapping with a projection area obtained by projecting the periphery of two connecting rods, and the two connecting rods are disposed on the outer periphery of the pressurizing portion in the layered forming device and are arranged opposite to each other in a direction orthogonal to the conveying direction of the carrier film. The layer forming system of claim 1, wherein the tension assisting device comprises: a first roller disposed on the side of the unwinding device; a second roller disposed on the side of the taking-up device; and a third roller that allows the carrier film to be detoured to a lower side than the conveying height of the layered body before being conveyed from the first roller to the second roller. A lamination forming system as claimed in claim 6, wherein the third roller increases the tension of the carrier film by rotating in a direction of stretching the carrier film in a direction opposite to the conveying direction of the laminated body. As in claim 6, the third roller increases the tension of the carrier film by stretching the carrier film to a position lower than the transport position when the laminated object is transported into the laminated forming device. As in claim 1, the lamination forming system, wherein at least one punching device is arranged between the lamination forming device and the winding device to further apply pressure to the laminated body removed from the lamination forming device, and the tension assisting device is arranged in at least one of the lamination forming device and the punching device. A tension assisting system is combined with a lamination forming device, the lamination forming device is used to transport a laminated body and implement a lamination forming step of laminating the laminated body with a lamination film by using a pressurizing unit; The tension assisting system has a tension assisting device, which supports the lower side of a carrier film that transports the laminated body while the laminated body is carried when the laminated body stops at a stop position set in the pressurizing unit. As in claim 10, the tension assisting system, wherein the tension assisting device supports the lower side of the carrier film so that the tension in the conveying direction of the deposited layer is substantially the same before and after the conveying direction. A method for forming a laminated body in a laminated body forming system, the laminated body forming system comprising: a roll-out device for rolling out a carrier film for conveying the laminated body; a laminated body forming device for performing a laminated body forming step of pressurizing the laminated body by a pressurizing unit in a manner that at least one side of the laminated body is laminated with the laminated film; and a take-up device for taking the carrier film and conveying the laminated body after the laminated body forming step out of the laminated body forming device; The laminate forming method is to pressurize the laminated body while supporting the lower side of the carrier film when the laminated body stops at the stop position set in the pressurizing section. As in claim 12, the laminate forming method comprises supporting the lower side of the carrier film while conveying the laminated body so that the tension of the laminated body in the conveying direction is substantially the same before and after the conveying direction.