TW202432978A - Connector for connecting a vacuum pump and/or abatement apparatus to a fluid line - Google Patents

Abstract

A vacuum pump and/or abatement system connector (50) for connecting a vacuum pump and/or abatement apparatus (16) to a fluid line (6), the vacuum pump and/or abatement system connector (50) comprising: a conduit (56) for permitting the flow therethrough of a fluid, the conduit (56) having a first end (60) and a second end (64) opposite to the first end (60), the conduit (56) being expandable and compressible such that a length of the conduit (56) between the first end (60) and the second end (64) may be varied; a first flange (52) at or proximate to the first end (60) of the conduit (56); a second flange (54) at or proximate to the second end (64) of the conduit (56); and a pin (58); wherein the pin (58) is fixedly coupled to the first flange (52) and is received in an opening (62) through the second flange (54), thereby to substantially prevent or oppose lateral movement of the flanges (52, 54) with respect to each other.

Description

Connectors for connecting vacuum pumps and/or abatement equipment to fluid lines

The invention relates to a device for connecting a vacuum pump and/or a reduction device to a fluid circuit.

Vacuum pumps and abatement systems are used in a variety of different technical fields, such as semiconductor manufacturing. Typically, in such systems, vacuum pump equipment is used to pump gases (e.g., gases from an industrial process) out of a specific location, and abatement equipment is used to reduce (e.g., destroy or dispose of) undesirable substances (e.g., exhaust gases) that have been generated.

Corrugated tubular conduits or "bellows" are used in a variety of system applications and are commonly used between the system foreline and the vacuum pump. These bellows allow some flexibility to account for tolerances in the system. They also provide some vibration dampening from the pump to the rest of the system.

These bellows tend to consist of thin-walled flexible tubing that allows a limited range of movement.

The inventors have recognized that bellows are known to be brittle and susceptible to failure (e.g., leakage) when subjected to high lateral loads, particularly during a seismic event such as an earthquake. Such bellows are often the portion of the process gas path most susceptible to earthquakes. Leaks in the process gas path are dangerous and should be avoided.

Since the bellows are the weakest part of the process gas path and can be damaged relatively easily, they affect the seismic performance of the entire system. The bellows can be torn apart by lateral forces. To address this problem, the frame around the bellows can be made stiffer to dampen the lateral forces and prevent the resulting movement. This can be achieved by using thicker material and more structural support for the frames. However, this increases the cost and weight of the system.

Aspects provided herein provide a connector for connecting a vacuum pump and/or abatement equipment to a fluid line that tends to prevent or resist lateral forces and movement applied to a bellows. It also tends to achieve this without significantly increasing the weight or cost of the system frame.

In a first aspect, a vacuum pump and/or abatement system connector is provided for connecting a vacuum pump and/or abatement device to a fluid line. The vacuum pump and/or abatement system connector includes: a conduit for allowing a fluid to flow therethrough, the conduit having a first end and a second end opposite the first end, the conduit being expandable and compressible such that a length of the conduit between the first end and the second end is variable; a first flange located at or near the first end of the conduit; a second flange located at or near the second end of the conduit; and a pin. The pin is fixedly coupled to the first flange and is received in an opening through the second flange, thereby substantially preventing or resisting lateral movement of the flanges relative to each other.

The pin can be a metal pin. The pin can be a steel pin, a stainless steel pin or a carbon coated steel pin.

The pin may be substantially cylindrical. Advantageously, a cylindrical pin may provide a more uniform force distribution, for example, over the flange, compared to a non-cylindrical pin. In some embodiments, a cylindrical pin may allow for a certain degree of rotation. Nonetheless, the pin may be non-cylindrical.

The pin may be fixedly coupled to the first flange by a bolt passing through the first flange and into the pin.

At least a portion of the pin may be covered by an anti-vibration sleeve or coating (such as a rubber material, a plastic material or a silicone material). At least a portion of the pin received in the opening through the second flange may be covered by the anti-vibration sleeve or coating.

This pin can be configured to reciprocate in this opening through this second flange.In use, at least a portion of the pin that reciprocates in this opening through this second flange can be covered by this anti-vibration sleeve or coating.

The vacuum pump and/or reduction system connector may further include one or more further pins. Each of the further pins may be fixedly coupled to one of the first flange or the second flange. Each of the one or more further pins may be received in a respective further opening through the other of the first flange or the second flange.

The pin and the one or more further pins may be spaced apart at substantially equal intervals around an edge of the conduit. In use, this advantageously tends to provide forces that are evenly distributed around the structure, which may result in a reduced likelihood of damage or failure.

At least one of the first flange and the second flange may be configured to receive a plurality of bolts.

The conduit may include a corrugated tubular portion.

In a further aspect, a vacuum pump and/or abatement system is provided, comprising: a connector according to any of the preceding aspects; a fluid line coupled to either the first flange or the second flange; and a vacuum pump and/or abatement device coupled to the other of the first flange or the second flange.

In a further aspect, a method of connecting a vacuum pump and/or abatement device to a fluid line is provided. The method comprises: providing a connector according to any of the above aspects; connecting the fluid line to either the first flange or the second flange; and connecting a vacuum pump and/or abatement device to the other of the first flange or the second flange.

FIG. 1 is a schematic drawing (not to scale) showing a vacuum pump and/or abatement system 2. System 2 is fluidly connected to an entity 4 via a fluid input line 6 (often referred to as a "foreline") between system 2 and the entity 4. Entity 4 may be, for example, a chamber or space used in an industrial process such as semiconductor manufacturing. System 2 is also fluidly connected to an exhaust line 8.

In operation, system 2 pumps gas from entity 4 via fluid input line 6 and/or reduces (e.g., destroys or disposes of) undesirable substances (which may be present in the pumped gas) generated by entity 4. System 2 also pumps exhaust gas (which may be gas that has undergone an abatement process) from system 2 into exhaust line 8 to remove exhaust gas from system 2.

The system 2 is also connected to a facility supply 10 via a plurality of facility input lines 12. The term "facilities" is used herein to refer to resources used by the system 2 to support the primary pumping/reduction functions of the system 2. These facilities allow the system 2 to operate properly during use. Examples of facilities include facility fluids (e.g., liquid coolant, tap water, deionized water, clean dry air, methane, oxygen, nitrogen, hydrogen), power and/or electrical signals carried by electrical connections, and optical signals carried by optical connections (e.g., fiber optics). In operation, the system 2 receives facilities from the facility supply 10 via the plurality of facility input lines 12.

The system 2 includes a plurality of modules 14, which may also be referred to as "units" or "slices." Each module 14 includes one or more devices 16. Each device 16 is configured to perform a respective function within the system 2. For example, a device 16 may be a vacuum pump for pumping gas out of the entity 4, an abatement device for reducing undesirable substances produced by the entity 4, an inverter for converting DC power to AC power at a modified frequency, an electronic controller for controlling all or part of the operation of the system 2, or a facility device that performs a facility-related function. However, the one or more devices 16 are not so limited. In general, each device 16 may be any device used in a vacuum pump and/or abatement system. In some embodiments, two or more devices 16 are substantially identical to each other and/or perform substantially the same functions. The vacuum pump and/or abatement system 2 may be an integrated system. The term "integrated system" may be used to refer to two or more modules integrated together into a common system, the modules being selected from a group of modules consisting of: a module including a vacuum pump device, a module including a process gas abatement device, and a module including a controller for controlling the vacuum pump and/or abatement device.

2 is a schematic drawing (not to scale) showing a perspective view of the vacuum pump and/or abatement system 2. A plurality of modules 14 of the system 2 are positioned and coupled together in a side-by-side adjacent configuration to form the system 2. Each module 14 is attached to one or more adjacent modules 14 to link the modules 14 together.

System 2 includes a first facility line 20 and a vacuum pump and/or abatement line 21. Facility line 20 may include conduits (e.g., metal conduits) and/or electrical or optical connections (e.g., wires or optical fibers) configured to allow facility fluid to flow therethrough. Vacuum pump and/or abatement line 21 may include conduits (e.g., metal conduits) configured to allow pumped gas to flow therethrough.

FIG. 3 is a schematic drawing (not to scale) showing a perspective view of a module 14 of the vacuum pump and/or abatement system 2 .

The module 14 includes a frame 30 and a base 32 connected to the frame 30. The base 32 can be considered as a part of the frame 30.

The frame 30 and/or base 32 may be bolted to the ground/floor.

The module 14 includes an apparatus 16 (e.g., a vacuum pump or an abatement apparatus) disposed within a volume defined by a frame 30 and a base 32. The frame 30 includes a plurality of interconnecting bars coupled to the base 32.

The module 14 has a front side 34 , a rear side 36 , a top side 38 , a bottom side 40 and two opposing lateral sides 42 .

Module 14 also includes facility lines 20 and vacuum pump and/or abatement lines 21. A vacuum pump and/or abatement line 21 may be the foreline 6. At least some of the facility lines 20 may be lines configured to receive facility fluid from a location remote from module 14 (e.g., from facility supply 10 or another module 14), direct the facility fluid through module 14, and exhaust the facility fluid from module 14 (e.g., to another module or completely out of system 2). At least some of the facility lines 20 may be lines configured to transmit power or electrical or optical signals to module 14 from a location remote from module 14 (e.g., a controller or processor located in a different module or remote from system 2).

The vacuum pump and/or abatement line 21 is configured to receive gas pumped from the entity 4 by one or more vacuum pump devices within the system 2 (e.g., by the device 16 of the module 14 shown in FIG. 3 ), direct the pumped gas through the module 14, and exhaust the pumped gas from the module 14 (e.g., to another module or completely out of the system 2).

In this embodiment, as shown in FIG3 , the module 14 receives a fluid input line 6 from the entity 4. The portion of the fluid input line 6 inside the module 14 constitutes a vacuum pump and/or abatement line 21 of the module 14. The fluid input line 6 is connected to the equipment 16 of the module 14 via a connection system or connector 50.

FIG. 4 is a schematic drawing (not to scale) showing a perspective view of an embodiment of a connector 50 .

FIG. 5 is a schematic drawing (not to scale) showing a side view of connector 50 .

The connector 50 detachably connects the fluid input line 6 (i.e., the foreline) and the device 16 (e.g., a vacuum pump) of the module 14. Specifically, an inlet of the connector 50 is attached to an outlet of the fluid input line 6, and an outlet of the connector 50 is attached to an inlet of the device 16.

In this embodiment, the connector 50 includes a first flange 52, a second flange 54, a corrugated tube portion 56 and a nail or pin 58.

The first flange 52 and the second flange 54 are connected to the bellows portion 56 at opposite sides of the bellows portion 56. In other words, a first end of the bellows portion 56 is attached to the first flange 52, and a second end of the bellows portion 56 opposite to the first end is attached to the second flange 54.

The first flange 52 is an external flange. Therefore, the first flange 52 forms an edge or annulus extending radially outward at the first end of the corrugated tube portion 56.

The second flange 54 is an external flange. Therefore, the second flange 54 forms an edge or annulus extending radially outward at the second end of the corrugated tube portion 56.

The outlet end of the connector 50 is attached to the device 16 of the module 14 at a location on the side of the first flange 52 opposite the bellows portion 56. A sealing system, such as a gasket, may be disposed between the first flange 52 and the device 16. The first flange 52 may be configured to receive a plurality of bolts and may be connected to the device 16 by the plurality of bolts, for example, to a flange at the input of the device 16.

The second flange 54 (at the inlet of the connector 50) is further attached to the outlet of the fluid input line 6 received in the module 14. The second flange 54 is attached to the fluid input line 6 at the side of the second flange 54 opposite the bellows portion 56. A sealing system, such as a gasket, may be disposed between the second flange 54 and the fluid input line 6. The second flange 54 may be configured to receive a plurality of bolts and may be connected to the end of the fluid input line 6 by the plurality of bolts, for example, to a flange at the end of the fluid input line 6.

In this embodiment, the bellows portion 56 is a conduit (e.g., a tubular member) that allows process gas to flow therethrough. Thus, in operation, when the fluid input line 6 is attached to the apparatus 16 via the connector 50 as shown in FIG. 4 , the process gas from the entity 4 flows from the fluid input line 6 into the bellows portion 56 at a first end of the bellows portion 56, flows through the bellows portion 56, and flows out of the bellows portion 56 at a second end of the bellows portion 56 to the apparatus 16.

In this embodiment, the bellows portion 56 has a bellows-like structure and can be expanded or compressed in a foldable manner like a bellows or a concertina. In other words, the bellows portion 56 is expandable (i.e., can be elongated) and compressible (i.e., can be shortened). Therefore, a length between the first end and the second end of the bellows portion 56 can be varied.

In this embodiment, the pin 58 is a metal pin, such as a pin made of an alloy (such as steel). Advantageously, metal (especially steel) pins tend to be hard, tough, strong, and resistant to fatigue and corrosion.

In this embodiment, the pin 58 is substantially cylindrical. However, in other embodiments, the pin 58 can be a different shape.

The pin 58 is fixedly coupled to the first flange 52. Specifically, the pin 58 is attached to the first flange 52 at its first end 60, at the same side of the first flange 52 as the first end of the bellows portion 56. The pin 58 may be attached or secured to the first flange 52 by any suitable means, such as a bolt or a weld that passes through the first flange 52 and into the pin 58. Alternatively, the pin 58 may be integrally formed with the first flange 52.

The pin 58 is configured so that it is substantially parallel to the bellows portion 56, that is, so that a longitudinal axis of the pin 58 is substantially parallel to a longitudinal axis of the bellows portion 56. The pin 58 is spaced apart from the bellows portion 56 (ie, radially).

The pin 58 is received in a hole 62 through the second flange 54. Specifically, a second end 64 of the pin 58 (opposite to the first end 60) passes through the hole 62 in the second flange 54.

In this embodiment, a portion of the pin 58 is covered by an anti-vibration sleeve 66. The anti-vibration sleeve 66 can be formed by applying a coating of an anti-vibration material to at least a portion of the pin 58. In this embodiment, the anti-vibration sleeve 66 is located at or near the second end 64 of the pin 58 and extends along only a portion of the length of the pin 58 (e.g., 10% to 50%, or 20% to 40%).

In other embodiments, the anti-vibration sleeve 66 extends along the entire length of the pin 58 (i.e., 100% of the pin length). In other embodiments, the anti-vibration sleeve is omitted.

The anti-vibration sleeve 66 may be made of or include a rubber or plastic material (such as a silicone material). The anti-vibration sleeve 66 may be made of or include a Shore A80 silicone.

Preferably, at least a portion of the pin 58 received in the hole 62 passing through the second flange 54 is covered by the anti-vibration sleeve 66. Therefore, the anti-vibration sleeve 66 is disposed between the pin 58 and the second flange 54.

The pin 58 is configured to be able to reciprocate within the hole 62 passing through the second flange 54. Therefore, the expansion and contraction of the bellows portion 56 in the longitudinal direction of the bellows portion 56 tends not to be blocked by the pin 58. Therefore, relative axial movement of the first and second flanges 52, 54 (i.e., movement of the flanges 52, 54 closer together and farther apart in the axial direction (i.e., along their longitudinal axes)) tends to be permitted. This axial movement is indicated in FIG. 5 by a bidirectional arrow and element numeral 70. In contrast, the configuration of the pin 58 and the flanges 52, 54 tends to block or resist lateral movement of the flanges 52, 54 relative to each other. In other words, the relative movement of the flanges 52, 54 in a direction perpendicular to the longitudinal axis of the bellows portion 56/pin 58 tends to be substantially prevented or resisted. This lateral movement (often substantially prevented) is indicated by a bidirectional arrow and element symbol 72 in FIG. 5 .

Therefore, a connector is provided for connecting a vacuum pump and/or abatement equipment to a fluid line.

A method of connecting a vacuum pump and/or abatement equipment to a fluid line is further provided. FIG. 6 is a process flow chart showing certain steps of such a method 74.

At step s76, a connector 50 is provided.

At step s78, the fluid input line 6 is connected to the second flange 54, for example by bolting the fluid input line 6 to the second flange 54.

At step s80, the device 16 is connected to the first flange 52, for example by bolting the device 16 to the first flange 52.

Therefore, a method of connecting a vacuum pump and/or abatement device to a fluid line is provided.

The connector is intended to provide a gas-tight joint between a foreline and a vacuum pump and/or abatement equipment.

Advantageously, the above-described connector tends to provide a gas-tight connection of a fluid input line (ie, a pre-stage line from a physical body) to a vacuum pump and/or abatement equipment without the need to bolt the fluid input line directly to the equipment.

Advantageously, the use of bellows sections tends to accommodate movement due to vibration in the module. This tends to substantially prevent or reduce the disturbance of vibration to the connection system that may be sensitive to movement.

The above connector advantageously tends to limit the movement of the bellows. In particular, it tends to allow the bellows to expand and compress only in the axial direction. Lateral movement of the flanges relative to each other tends to be prevented or resisted by the use of a dowel or pin on the flanges. This tends to reduce or limit stresses in the bellows, for example, during a seismic event such as an earthquake.

By using connectors to prevent or resist lateral movement of the bellows, the stresses affecting the bellows tend to be significantly reduced. As a result, the required structural stiffness and cost of the frame tend to be reduced. This is often a significant advantage when meeting seismic codes.

The above-described connector advantageously tends to reduce or eliminate the need for a clamp that may be used to restrict movement of all bellows.

The above-described connector advantageously tends to reduce bellows stresses (e.g., during a seismic event) while still maintaining vibration damping and thus tending not to lose functionality.

Advantageously, the connector can be used on corrugated tubes mounted in different orientations.

The above connectors advantageously tend to allow the nails or pins to bear the lateral stress of earthquake activity and bypass the corrugated tube. This tends to enable the corrugated tube to withstand higher earthquake forces without excessive frame reinforcement to limit displacement.

Vibration suppression can be improved by using an anti-vibration sleeve or coating around the outside of the nail or pin. This sleeve or coating can be used to suppress pump vibration when the nail contacts the hole.

The parameters of the pin, such as its size (e.g., length, thickness or diameter), shape or material, may depend on the application. The pin may be designed (e.g., using computer modeling, simulation, finite element analysis, etc.) to be able to withstand a predetermined force corresponding to a seismic event (e.g., an earthquake of a given magnitude). Exemplary sizes for the pin include, but are not limited to, a length of about 50 mm to about 100 mm (e.g., about 50 mm to about 60 mm, about 60 mm to about 70 mm, about 70 mm to about 80 mm, about 80 mm to about 90 mm, about 90 mm to about 100 mm, about 80 mm, about 81 mm, about 82 mm, about 83 mm, about 84 mm, about 85 mm, about 86 mm, about 87 mm, about 88 mm, about 89 mm, or about 90 mm); and/or a diameter of about 15 mm to about 45 mm (e.g., about 20 mm to about 40 mm, about 25 mm to about 35 mm, about 25 mm, about 26 mm, about 27 mm, about 28 mm, about 29 mm, about 30 mm, about 31 mm, about 32 mm, about 33 mm, about 34 mm, or about 35 mm). In some embodiments, a length of the pin may vary by a multiple of the bellows winding pitch, such as 8.5 mm, although the pitch may vary depending on the bellows diameter. In some embodiments, the pin diameter may vary depending on the magnitude of the lateral force relative to the length. Suitable materials for the pin include, but are not limited to, steel, stainless steel, and coated carbon steel.

In the above-described embodiments, the connector is implemented in a modular vacuum pump and/or abatement system, which is described in more detail above with reference to Figures 1 and 2. The modules are arranged and connected together in a side-by-side adjacent configuration, with each module attached to one or more adjacent modules at one or both of its lateral sides. However, in other embodiments, the connector is implemented in a different type of vacuum pump and/or abatement system than described above.

In the above-mentioned embodiment, the connector connects the fluid input line with the vacuum pump and/or abatement equipment. However, in other embodiments, the connector is used to connect a pair of different entities together, such as a vacuum pump and/or abatement equipment can be connected to a discharge line by the connector.

In the above-described embodiments, the connector includes a bellows portion. However, in other embodiments, the connector includes a different type of expandable/compressible portion, such as a telescopic section.

In the above-described embodiments, the connector includes a hole through the second flange through which the pin is positioned and in which the pin reciprocates. However, in other embodiments, the pin is received in a different type of opening or cutout in the second flange rather than a through hole. For example, the second flange may include a slot or groove in which the pin is received. The use of a slot or groove may allow the flange to undergo some limited rotational movement.

In the above-described embodiments, the connector comprises only a single pin. However, in other embodiments, the connector may comprise a plurality of pins. In other words, in addition to the pin, the connector may further comprise one or more further pins. Each further pin may be fixedly coupled to one of the first flange or the second flange and may be received in a respective further opening (e.g. a hole or a slot) through the other of the first flange or the second flange. Preferably, in embodiments with a plurality of pins, the pins are equally spaced around the circumference of the corrugated tube, i.e., the pins are spaced at substantially equal intervals around the edge of the conduit.

In the above-described embodiments, the pin is fixedly coupled to the first flange and is received in an opening through the second flange. However, in other embodiments, the pin is fixedly coupled to the second flange and is received in an opening through the first flange.

2: vacuum pump and/or abatement system 4: entity 6: fluid input/fluid input line/foreline 8: exhaust line 10: facility supply 12: facility input line 14: module 16: equipment 20: first facility line 21: vacuum pump and/or abatement line 30: frame 32: base 34: front side 36: rear side 38: top side 40: bottom side 42: lateral side 50: connector 52: first flange 54: second flange 56: bellows section/conduit 58: dowel or pin 60: first end 62: hole/opening 64: second end 66: anti-vibration sleeve/coating 70: axial direction 72: transverse direction 74: method S76: step S78: step S80: step

FIG. 1 is a schematic drawing (not to scale) showing a vacuum pump and/or abatement system;

FIG. 2 is a schematic drawing (not to scale) showing a perspective view of the vacuum pump and/or abatement system;

FIG3 is a schematic drawing (not to scale) showing a perspective view of a module of the vacuum pump and/or abatement system;

FIG. 4 is a schematic drawing (not to scale) showing a perspective view of a connector system for connecting a fluid line and a vacuum pump and/or abatement equipment of the module;

FIG5 is a schematic drawing (not to scale) showing a side view of the connector; and

6 is a process flow chart showing certain steps of a method of connecting a fluid line to a vacuum pump and/or abatement equipment.

50: Connector

52: First flange

54: Second flange

56: Corrugated tube part/conducting tube

58: Nail or pin

60: First end

62: Hole/Opening

64: Second end

66: Anti-vibration sleeve/coating

Claims (15)

A vacuum pump and/or abatement system connector for connecting a vacuum pump and/or abatement device to a fluid line, the vacuum pump and/or abatement system connector comprising: A conduit for allowing a fluid to flow therethrough, the conduit having a first end and a second end opposite the first end, the conduit being expandable and compressible such that a length of the conduit between the first end and the second end is variable; A first flange located at or near the first end of the conduit; A second flange located at or near the second end of the conduit; and A pin; wherein The pin is fixedly coupled to the first flange and is received in an opening through the second flange, thereby substantially preventing or resisting lateral movement of the flanges relative to each other. A vacuum pump and/or reduction system connector as claimed in claim 1, wherein the pin is a metal pin. A vacuum pump and/or reduction system connector as claimed in claim 2, wherein the pin is a steel pin, a stainless steel pin or a carbon-coated steel pin. A vacuum pump and/or reduction system connector as claimed in any one of claims 1 to 3, wherein the pin is substantially cylindrical. A vacuum pump and/or reduction system connector as claimed in any one of claims 1 to 3, wherein the pin is fixedly coupled to the first flange by a bolt passing through the first flange and entering the pin. A vacuum pump and/or reduction system connector as claimed in any one of claims 1 to 3, wherein at least a portion of the pin is covered by an anti-vibration sleeve or coating. A vacuum pump and/or reduction system connector as claimed in claim 6, wherein a portion of the pin received in the opening passing through the second flange is covered by the anti-vibration sleeve or coating. A vacuum pump and/or reduction system connector as claimed in any one of claims 1 to 3, wherein the pin is configured to reciprocate within the opening passing through the second flange. A vacuum pump and/or reduction system connector as claimed in claim 6, wherein at least a portion of the pin that reciprocates in the opening through the second flange during use is covered by the anti-vibration sleeve or coating. A vacuum pump and/or reduction system connector as claimed in any one of claims 1 to 3, further comprising: one or more further pins; wherein each of the further pins is fixedly coupled to one of the first flange or the second flange and received in a respective further opening passing through the other of the first flange or the second flange. A vacuum pump and/or reduction system connector as claimed in claim 10, wherein the pin and the one or more further pins are separated by substantially equal intervals around an edge of the conduit. A vacuum pump and/or reduction system connector as in any one of claims 1 to 3, wherein at least one of the first flange and the second flange is configured to receive a plurality of bolts. A vacuum pump and/or reduction system connector as claimed in any one of claims 1 to 3, wherein the conduit includes a corrugated tubular portion. A vacuum pump and/or abatement system, comprising: a connector as in any one of claims 1 to 13; a fluid line coupled to either the first flange or the second flange; and a vacuum pump and/or abatement device coupled to the other of the first flange or the second flange. A method of connecting a vacuum pump and/or abatement equipment to a fluid line, the method comprising: Providing a connector as in any one of claims 1 to 13; Connecting the fluid line to either the first flange or the second flange; and Connecting a vacuum pump and/or abatement equipment to the other of the first flange or the second flange.