[go: up one dir, main page]

TW202423573A - Copper powder, copper paste containing same, and method for producing conductive film - Google Patents

Copper powder, copper paste containing same, and method for producing conductive film Download PDF

Info

Publication number
TW202423573A
TW202423573A TW112137528A TW112137528A TW202423573A TW 202423573 A TW202423573 A TW 202423573A TW 112137528 A TW112137528 A TW 112137528A TW 112137528 A TW112137528 A TW 112137528A TW 202423573 A TW202423573 A TW 202423573A
Authority
TW
Taiwan
Prior art keywords
copper
particles
copper particles
particle
mass
Prior art date
Application number
TW112137528A
Other languages
Chinese (zh)
Inventor
秋澤瑞樹
澤本裕樹
佐佐木隆史
Original Assignee
日商三井金屬鑛業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商三井金屬鑛業股份有限公司 filed Critical 日商三井金屬鑛業股份有限公司
Publication of TW202423573A publication Critical patent/TW202423573A/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • B22F1/052Metallic powder characterised by the size or surface area of the particles characterised by a mixture of particles of different sizes or by the particle size distribution
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/07Metallic powder characterised by particles having a nanoscale microstructure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B22F1/102Metallic powder coated with organic material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/02Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers
    • B22F7/04Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers with one or more layers not made from powder, e.g. made from solid metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Composite Materials (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Conductive Materials (AREA)

Abstract

A copper powder comprising copper particle A and copper particle B, wherein the content of copper particle A is 60-99 mass% and the content of copper particle B is 1-40 mass% on the basis of the total amount of copper particle A and copper particle B. [Copper particle A] A copper particle having a primary particle size of 0.1-0.6 [mu]m and comprising a core particle made of copper and a coating layer covering the surface of the core particle, wherein the coating layer is formed of a copper salt of an aliphatic organic acid. [Copper particle B] A copper particle having a primary particle size of 0.1-2.0 [mu]m, wherein the ratio (S1/B) of first crystallite size S1 determined from the half width of a peak originating from (111) plane of copper in an X-ray diffraction measurement to BET diameter B is 0.23 or less, and the ratio (S1/S2) of S1 to second crystallite size S2 determined from the half width of a peak originating from (220) plane is 1.35 or less.

Description

銅粉及含此之銅漿以及導電膜之製造方法Copper powder, copper slurry containing the same, and method for producing conductive film

本發明係關於一種銅粉及含此之銅漿。又,本發明係關於一種導電膜之製造方法。The present invention relates to a copper powder and a copper slurry containing the same. In addition, the present invention relates to a method for manufacturing a conductive film.

銅為導電性較高之金屬,又,為通用性較高之材料,因此工業上廣泛用作導電材料。例如,作為銅粒子之集合體之銅粉廣泛用作用於製造積層陶瓷電容器(以下,亦稱為「MLCC」)之外部電極及內部電極、以及對各種基板之佈線等各種電子零件之原材料。Copper is a metal with high electrical conductivity and is a highly versatile material, so it is widely used as a conductive material in industry. For example, copper powder, which is a collection of copper particles, is widely used as a raw material for various electronic parts such as external electrodes and internal electrodes of multilayer ceramic capacitors (hereinafter also referred to as "MLCC"), and wiring on various substrates.

作為此種銅粉之一,本申請人率先提出一種關於球狀銅粒子之技術,該球狀銅粒子之一次粒子之平均粒徑為0.1 μm以上0.6 μm以下,且對粒子表面施加了表面處理劑(參照專利文獻1)。根據該技術,有銅粒子之低溫燒結性良好之優點。 先前技術文獻 專利文獻 As one of such copper powders, the applicant first proposed a technology for spherical copper particles, the average particle size of the primary particles of the spherical copper particles is 0.1 μm or more and 0.6 μm or less, and a surface treatment agent is applied to the particle surface (see patent document 1). According to this technology, the copper particles have the advantage of good low-temperature sintering properties. Prior art documents Patent document

專利文獻1:日本專利特開2015-168878號公報Patent document 1: Japanese Patent Publication No. 2015-168878

但是,於使用球狀銅粒子製備漿液,由該漿液製造各種導電膜之情形時,由於其粒子形狀,有時不易保證導電膜之連續性。 另一方面,作為銅粒子,亦已知扁平狀之銅粒子。但是,於使用扁平狀銅粒子製備漿液,由該漿液製造各種導電膜之情形時,由於其粒子形狀,有時不易提昇導電膜之緻密性。 因此,目前為了彌補彼此之缺點,多數情況下將球狀銅粒子與扁平狀銅粒子混合使用。但是,近來除導電膜之連續性及緻密性以外,還要求製造導電膜時之銅粒子之低溫燒結性。若單純將球狀銅粒子與扁平狀銅粒子混合使用,則混合銅粒子之低溫燒結性不會提高。 However, when spherical copper particles are used to prepare a slurry and various conductive films are manufactured from the slurry, it is sometimes difficult to ensure the continuity of the conductive film due to the shape of the particles. On the other hand, flat copper particles are also known as copper particles. However, when flat copper particles are used to prepare a slurry and various conductive films are manufactured from the slurry, it is sometimes difficult to improve the density of the conductive film due to the shape of the particles. Therefore, in order to compensate for each other's shortcomings, spherical copper particles and flat copper particles are often used in combination. However, recently, in addition to the continuity and density of the conductive film, the low-temperature sintering property of the copper particles when manufacturing the conductive film is also required. If spherical copper particles and flat copper particles are simply mixed and used, the low-temperature sintering properties of the mixed copper particles will not be improved.

因此,本發明之課題在於提供一種能夠製造連續性及緻密性較高之導電膜,且燒結溫度較低之銅粉。Therefore, the subject of the present invention is to provide a copper powder capable of manufacturing a conductive film with higher continuity and density and having a lower sintering temperature.

本發明提供一種銅粉,其包含以下之銅粒子A及銅粒子B,且 相對於銅粒子A與銅粒子B之合計,銅粒子A之含有比率為60質量%以上99質量%以下,銅粒子B之含有比率為1質量%以上40質量%以下。 [銅粒子A] 該銅粒子具備包含銅之核心粒子、及被覆該核心粒子之表面之被覆層, 上述被覆層由脂肪族有機酸之銅鹽形成,且 該銅粒子之一次粒徑為0.1 μm以上0.6 μm以下。 [銅粒子B] 該銅粒子根據X射線繞射測定中源自銅之(111)面之峰之半值寬並藉由謝樂公式所求出之第1微晶尺寸S1相對於根據BET比表面積所算出之BET直徑B的比(S1B)為0.23以下, 上述第1微晶尺寸S1相對於根據X射線繞射測定中源自銅之(220)面之峰之半值寬並藉由謝樂公式所求出之第2微晶尺寸S2的比(S1/S2)為1.35以下,且 該銅粒子之一次粒徑為0.1 μm以上2.0 μm以下。 The present invention provides a copper powder comprising the following copper particles A and copper particles B, and relative to the total of copper particles A and copper particles B, the content ratio of copper particles A is 60 mass% or more and 99 mass% or less, and the content ratio of copper particles B is 1 mass% or more and 40 mass% or less. [Copper particles A] The copper particles have a core particle containing copper and a coating layer covering the surface of the core particle, the coating layer is formed of a copper salt of an aliphatic organic acid, and the primary particle size of the copper particles is 0.1 μm or more and 0.6 μm or less. [Copper particles B] The ratio (S1B) of the first crystallite size S1 obtained by the Sherlock formula based on the half-value width of the peak originating from the (111) plane of copper in the X-ray diffraction measurement to the BET diameter B calculated based on the BET specific surface area is 0.23 or less, The ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 obtained by the Sherlock formula based on the half-value width of the peak originating from the (220) plane of copper in the X-ray diffraction measurement is 1.35 or less, and The primary particle size of the copper particles is 0.1 μm or more and 2.0 μm or less.

以下,對於本發明基於其較佳實施方式進行說明。本發明之銅粉包含以下之銅粒子A及銅粒子B。 [銅粒子A] 該銅粒子具備包含銅之核心粒子、及被覆該核心粒子之表面之被覆層, 上述被覆層由脂肪族有機酸之銅鹽形成,且 該銅粒子之一次粒徑為0.1 μm以上0.6 μm以下。 [銅粒子B] 該銅粒子根據X射線繞射測定中源自銅之(111)面之峰之半值寬並藉由謝樂公式所求出之第1微晶尺寸S1相對於根據BET比表面積所算出之BET直徑B的比(S1B)為0.23以下, 上述第1微晶尺寸S1相對於根據X射線繞射測定中源自銅之(220)面之峰之半值寬並藉由謝樂公式所求出之第2微晶尺寸S2的比(S1/S2)為1.35以下,且 該銅粒子之一次粒徑為0.1 μm以上2.0 μm以下。其中,符合銅粒子A者除外。 The present invention is described below based on its preferred embodiment. The copper powder of the present invention comprises the following copper particles A and copper particles B. [Copper particles A] The copper particles have a core particle comprising copper and a coating layer covering the surface of the core particle, the coating layer is formed of a copper salt of an aliphatic organic acid, and the primary particle size of the copper particles is 0.1 μm or more and 0.6 μm or less. [Copper particles B] The ratio (S1B) of the first crystallite size S1 obtained by the Sherlock formula based on the half-value width of the peak originating from the (111) plane of copper in X-ray diffraction measurement to the BET diameter B calculated based on the BET specific surface area is 0.23 or less, The ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 obtained by the Sherlock formula based on the half-value width of the peak originating from the (220) plane of copper in X-ray diffraction measurement is 1.35 or less, and The primary particle size of the copper particles is 0.1 μm or more and 2.0 μm or less. Among them, those meeting the requirements of copper particles A are excluded.

本發明人等進行了銳意研究,結果驚訝地發現,上述包含銅粒子A及B之銅粉之燒結溫度較低,且由包含該銅粉之銅漿所製造之導電膜具有較高之連續性及緻密性。The inventors of the present invention have conducted intensive research and surprisingly found that the sintering temperature of the copper powder containing copper particles A and B is relatively low, and the conductive film made from the copper slurry containing the copper powder has higher continuity and density.

就更進一步提高上述效果之觀點而言,銅粒子A較佳為具有球狀之形狀。另一方面,銅粒子B較佳為具有扁平狀之形狀。From the viewpoint of further improving the above-mentioned effect, the copper particles A are preferably spherical in shape. On the other hand, the copper particles B are preferably flat in shape.

就兼顧提昇本發明之銅粉於低溫下之燒結性及提昇藉由該粒子之燒結而獲得之導電膜之導電性之觀點而言,銅粒子A之一次粒子之平均圖像解析直徑較佳為0.1 μm以上0.6 μm以下,更佳為0.12 μm以上0.4 μm以下,進而較佳為0.15 μm以上0.3 μm以下。所謂一次粒子係指根據外形上之幾何學形態來判斷,被認定為作為粒子之最小單位之物體。 就相同之觀點而言,銅粒子B之一次粒子之平均圖像解析直徑較佳為0.1 μm以上2.0 μm以下,更佳為0.15 μm以上1.0 μm以下,進而較佳為0.2 μm以上0.6 μm以下。 From the perspective of improving the sinterability of the copper powder of the present invention at low temperatures and improving the conductivity of the conductive film obtained by sintering the particles, the average image resolution diameter of the primary particles of the copper particles A is preferably 0.1 μm to 0.6 μm, more preferably 0.12 μm to 0.4 μm, and further preferably 0.15 μm to 0.3 μm. The so-called primary particle refers to an object that is identified as the smallest unit of a particle based on its geometric shape. From the same point of view, the average image resolution diameter of the primary particles of copper particles B is preferably 0.1 μm to 2.0 μm, more preferably 0.15 μm to 1.0 μm, and further preferably 0.2 μm to 0.6 μm.

又,根據BET比表面積所算出之銅粒子A之粒徑(以下,亦稱為BET直徑A)較佳為0.1 μm以上0.6 μm以下,更佳為0.12 μm以上0.4 μm以下,進而較佳為0.15 μm以上0.3 μm以下。藉由使BET直徑A處於此種範圍,能夠提高本發明之銅粉之導熱性,有效地降低燒結溫度。 就相同之觀點而言,根據BET比表面積所算出之銅粒子B之粒徑(以下,亦稱為BET直徑B)較佳為0.1 μm以上2.0 μm以下,更佳為0.15 μm以上1.0 μm以下,進而較佳為0.2 μm以上0.6 μm以下。藉由使BET直徑B處於此種範圍,能夠提高本發明之銅粉之導熱性,有效地降低燒結溫度。 於本說明書中,亦將BET直徑B稱為銅粒子B之一次粒徑。 Furthermore, the particle size of copper particles A calculated based on the BET specific surface area (hereinafter, also referred to as BET diameter A) is preferably 0.1 μm to 0.6 μm, more preferably 0.12 μm to 0.4 μm, and further preferably 0.15 μm to 0.3 μm. By making the BET diameter A in such a range, the thermal conductivity of the copper powder of the present invention can be improved and the sintering temperature can be effectively reduced. From the same point of view, the particle size of copper particles B calculated based on the BET specific surface area (hereinafter, also referred to as BET diameter B) is preferably 0.1 μm to 2.0 μm, more preferably 0.15 μm to 1.0 μm, and further preferably 0.2 μm to 0.6 μm. By making the BET diameter B in this range, the thermal conductivity of the copper powder of the present invention can be improved and the sintering temperature can be effectively reduced. In this specification, the BET diameter B is also referred to as the primary particle size of the copper particle B.

關於銅粒子A及B之一次粒子之平均圖像解析直徑,例如可使用掃描式電子顯微鏡(日本電子股份有限公司製造之JSM-6330F),以倍率10000倍或30000倍觀察銅粒子,對視野中之200個粒子測定水平方向之最大斐瑞特直徑,根據該等測定值,算出換算為球之體積平均粒徑。 於本說明書中,亦將以此方式算出之銅粒子A之一次粒子之平均圖像解析直徑稱為銅粒子A之一次粒徑。 Regarding the average image resolution diameter of the primary particles of copper particles A and B, for example, a scanning electron microscope (JSM-6330F manufactured by JEOL Ltd.) can be used to observe the copper particles at a magnification of 10,000 or 30,000 times, and the maximum Feret diameter in the horizontal direction of 200 particles in the field of view is measured. Based on these measured values, the volume average particle diameter converted into a sphere is calculated. In this specification, the average image resolution diameter of the primary particles of copper particles A calculated in this way is also referred to as the primary particle diameter of copper particles A.

根據BET比表面積所算出之BET直徑A及B可基於BET法在以下條件下進行測定。具體而言,可使用Mountech股份有限公司製造之「Macsorb」,利用氮吸附法進行測定。測定粉末之量設為0.2 g,預脫氣條件設為於真空下在80℃下進行30分鐘。並且,BET直徑A及B係根據所測得之BET比表面積並藉由以下式(I)算出。 式(I)中,d為BET直徑A或B[μm],A BET為利用BET單點法所測得之比表面積[m 2/g],ρ為銅之密度[g/cm 3]。 d=6/(A BET×ρ)             (I) 以下,對於銅粒子A及B,分別詳細說明其較佳實施方式。 The BET diameters A and B calculated from the BET specific surface area can be measured based on the BET method under the following conditions. Specifically, the measurement can be performed using the nitrogen adsorption method using "Macsorb" manufactured by Mountech Co., Ltd. The amount of powder to be measured is set to 0.2 g, and the pre-degassing conditions are set to 30 minutes at 80°C under vacuum. In addition, the BET diameters A and B are calculated based on the measured BET specific surface area using the following formula (I). In formula (I), d is the BET diameter A or B [μm], A BET is the specific surface area measured using the BET single point method [m 2 /g], and ρ is the density of copper [g/cm 3 ]. d=6/( ABET ×ρ) (I) Hereinafter, preferred embodiments of the copper particles A and B are described in detail.

<銅粒子A之較佳實施方式> 銅粒子A係於該粒子之表面實施有包含脂肪族有機酸之銅鹽之表面處理劑者。藉此,以連續或不連續地覆蓋包含銅之核心粒子之表面之方式形成包含表面處理劑之被覆層。表面處理劑用於抑制銅之氧化及粒子之凝集這兩者。 又,核心粒子較佳為僅由銅及剩餘不可避免之雜質構成。 <Preferred embodiment of copper particle A> Copper particle A is a particle having a surface treatment agent containing a copper salt of an aliphatic organic acid applied to the surface of the particle. Thus, a coating layer containing the surface treatment agent is formed in a manner that continuously or discontinuously covers the surface of a core particle containing copper. The surface treatment agent is used to inhibit both oxidation of copper and aggregation of particles. In addition, the core particle is preferably composed only of copper and remaining inevitable impurities.

如上所述,本發明所使用之表面處理劑包含脂肪族有機酸之銅鹽。As mentioned above, the surface treatment agent used in the present invention comprises a copper salt of an aliphatic organic acid.

於本技術領域中,為了兼顧抑制銅粒子中之銅之氧化及抑制粒子彼此之凝集,使用脂肪酸或脂肪酸胺等表面處理劑。但是,此種處理劑存在該處理劑之分解溫度較高,銅粒子燒結時無法充分去除之情形。因此,存在燒結起始溫度上升,或銅粒子彼此燒結後所獲得之導電膜之電阻增高之情況。為了解決該問題,本發明人進行了銳意研究,結果發現,藉由使用脂肪族有機酸之銅鹽作為表面處理劑,能夠抑制銅之氧化及粒子彼此之凝集這兩者,並且降低燒結起始溫度,結果,能夠提昇粒子彼此之低溫燒結性,並且降低燒結後所獲得之導電膜之電阻。In the present technical field, in order to take into account both the inhibition of copper oxidation in copper particles and the inhibition of agglomeration between particles, surface treatment agents such as fatty acids or fatty acid amines are used. However, such treatment agents have a high decomposition temperature and cannot be fully removed during sintering of copper particles. Therefore, there is a situation where the sintering starting temperature rises or the resistance of the conductive film obtained after the copper particles are sintered with each other increases. In order to solve this problem, the inventors conducted intensive research and found that by using a copper salt of an aliphatic organic acid as a surface treatment agent, both the oxidation of copper and the agglomeration of particles can be suppressed, and the sintering starting temperature can be lowered. As a result, the low-temperature sintering property of the particles can be improved, and the resistance of the conductive film obtained after sintering can be reduced.

就降低本發明之銅粉之燒結溫度,並且兼顧抑制銅之氧化及抑制粒子彼此之凝集之觀點而言,構成脂肪族有機酸之銅鹽之脂肪族有機酸之碳原子數較佳為6以上18以下,更佳為8以上18以下,進而較佳為10以上18以下,進而更佳為12以上18以下。作為此種脂肪族有機酸,例如可例舉:直鏈或支鏈且飽和或不飽和之羧酸、或者具有直鏈或支鏈且飽和或不飽和之烴基之磺酸等,較佳為直鏈且飽和或不飽和之羧酸。又,脂肪族有機酸之銅鹽中之銅之價數為一價或二價,較佳為二價。From the viewpoint of lowering the sintering temperature of the copper powder of the present invention and taking into account both the inhibition of copper oxidation and the inhibition of aggregation of particles, the carbon number of the aliphatic organic acid constituting the copper salt of the aliphatic organic acid is preferably 6 to 18, more preferably 8 to 18, further preferably 10 to 18, further preferably 12 to 18. Examples of such aliphatic organic acids include linear or branched saturated or unsaturated carboxylic acids, or sulfonic acids having linear or branched saturated or unsaturated alkyl groups, preferably linear saturated or unsaturated carboxylic acids. The valence of copper in the copper salt of an aliphatic organic acid is monovalent or divalent, preferably divalent.

作為羧酸之具體例,可例舉檸檬酸、己酸、庚酸、辛酸、壬酸、癸酸、月桂酸、棕櫚酸、油酸、硬脂酸等,較佳為月桂酸、油酸及硬脂酸,進而較佳為月桂酸及硬脂酸。 作為磺酸之具體例,可例舉:己磺酸、庚磺酸、辛磺酸、壬磺酸、癸磺酸、月桂磺酸、棕櫚磺酸、油磺酸、硬脂磺酸等。該等脂肪族有機酸可單獨使用或組合兩種以上使用。 Specific examples of carboxylic acids include citric acid, caproic acid, heptanoic acid, caprylic acid, nonanoic acid, capric acid, lauric acid, palmitic acid, oleic acid, stearic acid, etc., preferably lauric acid, oleic acid and stearic acid, and more preferably lauric acid and stearic acid. Specific examples of sulfonic acids include hexanesulfonic acid, heptanesulfonic acid, octanesulfonic acid, nonanesulfonic acid, decanesulfonic acid, lauric sulfonic acid, palmitic acid, oleic acid, stearic acid, etc. These aliphatic organic acids can be used alone or in combination of two or more.

表面處理劑例如可在製造包含銅之核心粒子之後之步驟中,藉由使所獲得之核心粒子與作為表面處理劑之脂肪族有機酸之銅鹽接觸而施加於粒子表面。施加表面處理劑之量以該表面處理劑整體在施加了該表面處理劑之狀態下之銅粒子A中所占之比率(質量%)表示,以碳原子換算較佳為設為0.2質量%以上2.0質量%以下,進而較佳為設為0.3質量%以上1.0質量%以下。藉由處於此種範圍,能夠藉由利用表面處理劑去除銅粒子表面之氧化覆膜或共熔解所獲得之效果,而使銅粒子彼此之熔解溫度低溫化,結果,能夠降低燒結溫度。The surface treatment agent can be applied to the particle surface by bringing the obtained core particles into contact with a copper salt of an aliphatic organic acid as a surface treatment agent, for example, in a step after manufacturing the core particles containing copper. The amount of the surface treatment agent applied is expressed as the ratio (mass %) of the surface treatment agent as a whole in the copper particles A in the state where the surface treatment agent is applied, and is preferably set to 0.2 mass % or more and 2.0 mass % or less, and further preferably set to 0.3 mass % or more and 1.0 mass % or less in terms of carbon atoms. By being in this range, the oxide film on the surface of the copper particles can be removed by the surface treatment agent or the effect obtained by eutectic dissolution, thereby lowering the melting temperature of the copper particles, and as a result, the sintering temperature can be lowered.

施加於銅粒子A之表面之表面處理劑之比率(質量%)可以如下方式進行測定。利用碳-硫分析裝置(堀場製作所製造之EMIA-320V)將0.5 g之作為施加了表面處理劑之銅粒子A之集合體之銅粉於氧氣流中進行加熱,使銅粉中之碳成分分解為CO或CO 2並測定其量,藉此算出表面處理劑之比率。 The ratio (mass %) of the surface treatment agent applied to the surface of the copper particles A can be measured as follows. 0.5 g of copper powder, which is a collection of copper particles A to which the surface treatment agent is applied, is heated in an oxygen flow using a carbon-sulfur analyzer (EMIA-320V manufactured by Horiba, Ltd.) to decompose the carbon component in the copper powder into CO or CO 2 and measure its amount, thereby calculating the ratio of the surface treatment agent.

表面處理劑之定性及定量例如可單獨或組合使用核磁共振(NMR)法、拉曼光譜法、紅外光譜法、液相層析法、飛行時間型二次離子質譜法(TOF-SIMS)等方法來進行。The qualitative and quantitative analysis of the surface treatment agent can be performed using, for example, nuclear magnetic resonance (NMR), Raman spectroscopy, infrared spectroscopy, liquid chromatography, time-of-flight secondary ion mass spectrometry (TOF-SIMS), etc., alone or in combination.

銅粒子A於核心粒子之表面具有使用脂肪族有機酸之銅鹽作為表面處理劑而形成之被覆層,被覆層是否使用脂肪族有機酸之銅鹽來形成例如可藉由以下方法進行判定。詳細而言,以銅粒子A之質量成為5質量%之方式利用KBr進行稀釋,使用日本分光公司製造之紅外分光光度計(型號:FT-IR4600),藉由漫反射法,於分辨率4 cm -1、累計次數128次之條件下對經乳缽混合之測定試樣進行測定,獲得縱軸採用對吸光度進行庫貝卡-孟克轉換而得之值,橫軸採用波數(500~4000 cm -1)之曲線圖(光譜)。此時,若紅外線吸收峰於1504 cm -1以上1514 cm -1以下之範圍被觀察到,且於1584 cm -1以上1596 cm -1以下之範圍未被觀察到,則可判斷被覆層係使用脂肪族有機酸之銅鹽而形成。即,銅粒子A較佳為在基於紅外光譜法之測定中,於1504 cm -1以上1514 cm -1以下之範圍觀察到紅外線吸收峰,且於1584 cm -1以上1596 cm -1以下之範圍未觀察到紅外線吸收峰。 「具有紅外線吸收峰」係按照以下方法定義。首先,對以於2910 cm -1以上2940 cm -1以下之範圍觀測到之峰之最大值進行標準化之IR(Infrared Ray,紅外線)光譜資料進行二次微分,於1500 cm -1以上1600 cm -1以下之範圍內基於零上切法進行波形分離。繼而,根據源自經波形分離之各波形中之基準線(零)之振幅之絕對值,算出算術平均值。並且,於峰高之絕對值大於該算術平均值之一半值之情形時,作為「具有紅外線吸收峰」。 再者,於使用脂肪酸或脂肪族胺作為表面處理劑之銅粒子之情形時,於1584 cm -1以上1596 cm -1以下之範圍檢測出紅外線吸收峰,因此就該方面而言可區別於銅粒子A。 The copper particles A have a coating layer formed on the surface of the core particles using a copper salt of an aliphatic organic acid as a surface treatment agent. Whether the coating layer is formed using a copper salt of an aliphatic organic acid can be determined, for example, by the following method. Specifically, the copper particles A are diluted with KBr so that the mass of the copper particles A becomes 5 mass %, and the emulsified and mixed test sample is measured using an infrared spectrophotometer (model: FT-IR4600) manufactured by JASCO Corporation by diffuse reflectance method at a resolution of 4 cm -1 and a cumulative number of 128 times, and a curve (spectrum) is obtained with the value obtained by Kubeka-Munk conversion of the absorbance on the vertical axis and the wave number (500 to 4000 cm -1 ) on the horizontal axis. At this time, if an infrared absorption peak is observed in the range of 1504 cm -1 to 1514 cm -1 , and is not observed in the range of 1584 cm -1 to 1596 cm -1 , it can be determined that the coating layer is formed using a copper salt of an aliphatic organic acid. That is, the copper particle A preferably has an infrared absorption peak observed in the range of 1504 cm -1 to 1514 cm -1 , and no infrared absorption peak is observed in the range of 1584 cm -1 to 1596 cm -1 in the measurement based on infrared spectroscopy. "Having an infrared absorption peak" is defined as follows. First, the IR (Infrared Ray) spectrum data normalized by the maximum value of the peak observed in the range of 2910 cm -1 to 2940 cm -1 is subjected to secondary differentiation, and waveform separation is performed based on the zero-up cut method in the range of 1500 cm -1 to 1600 cm -1 . Then, the arithmetic mean is calculated from the absolute value of the amplitude derived from the reference line (zero) in each waveform separated by waveform. And, when the absolute value of the peak height is greater than half of the arithmetic mean, it is regarded as "having an infrared absorption peak". Furthermore, in the case of copper particles using fatty acids or aliphatic amines as the surface treatment agent, an infrared absorption peak is detected in the range of 1584 cm -1 or more and 1596 cm -1 or less, and thus it can be distinguished from copper particles A in this respect.

藉由使用脂肪族有機酸之銅鹽,可獲得能夠抑制銅之氧化及粒子彼此之凝集這兩者,並且降低本發明之銅粉之燒結溫度之銅粒子的理由並不明確,但本發明人推測如下。 如上所述,本發明之銅粒子及使用脂肪酸或脂肪族胺作為表面處理劑之銅粒子在有無特定波數下之紅外線吸收峰之方面具有差異。 紅外光譜法之測定原理在於藉由對測定對象之物質或分子照射紅外線,測定相當於分子中之結合之動能之光能量之吸收。一般而言,於在紅外光譜法中觀察到紅外吸收之情形時,表示於分子中存在某些結合。尤其是,於在高波數位置觀察到紅外吸收之情形時,由於高波數之紅外線之能量較高,因此可謂結合能量較大之結合存在於分子中。 若對銅粒子A與使用脂肪酸或脂肪族胺作為表面處理劑之銅粒子進行比較,則任一粒子均於1504 cm -1以上1514 cm -1以下之範圍之低波數區域觀測到紅外吸收,因此推測該區域之吸收意味著被覆層結合於核心粒子表面而存在。因此,認為能夠抑制核心粒子之銅之氧化及粒子彼此之凝集這兩者。 另一方面,若著眼於1584 cm -1以上1596 cm -1以下之範圍之高波數區域,則銅粒子A未觀察到上述高波數區域所觀測到之紅外吸收,相對於此,使用脂肪酸或脂肪族胺作為表面處理劑之銅粒子於上述高波數區域觀測到紅外吸收。即,意味著與使用脂肪酸或脂肪族胺作為表面處理劑之銅粒子相比,本發明之銅粒子在分子中結合能量較大之結合較少。由此認為,於本發明之銅粒子中,表面處理劑與核心粒子之結合相對較弱,因此認為表面處理劑於低溫下容易脫離,能夠於低溫下達成粒子彼此之燒結。 根據以上理由認為,藉由對銅粒子A之表面施加包含脂肪族有機酸之銅鹽之表面處理劑,能夠抑制銅之氧化及粒子彼此之凝集這兩者,並且達成燒結溫度降低。 The reason why copper particles that can inhibit both copper oxidation and particle aggregation and reduce the sintering temperature of the copper powder of the present invention can be obtained by using copper salts of aliphatic organic acids is not clear, but the inventors speculate as follows. As described above, the copper particles of the present invention and the copper particles using fatty acids or aliphatic amines as surface treatment agents differ in the presence or absence of infrared absorption peaks at specific wave numbers. The measurement principle of infrared spectroscopy is to measure the absorption of light energy equivalent to the kinetic energy of the bonds in the molecules by irradiating the substance or molecules of the measurement object with infrared rays. Generally speaking, when infrared absorption is observed in infrared spectroscopy, it indicates that certain bonds exist in the molecules. In particular, when infrared absorption is observed at a high wave number position, since the energy of infrared rays at high wave numbers is higher, it can be said that a bond with a larger bond energy exists in the molecule. When comparing copper particles A and copper particles using fatty acids or aliphatic amines as surface treatment agents, infrared absorption is observed in the low wave number region of 1504 cm -1 to 1514 cm -1 for both particles, so it is inferred that the absorption in this region means that the coating exists by bonding to the surface of the core particles. Therefore, it is believed that both oxidation of copper in the core particles and aggregation of particles can be suppressed. On the other hand, if we focus on the high wave number region in the range of 1584 cm -1 to 1596 cm -1 , the infrared absorption observed in the high wave number region is not observed in copper particle A. In contrast, the copper particles using fatty acids or aliphatic amines as surface treatment agents observe infrared absorption in the high wave number region. That is, compared with the copper particles using fatty acids or aliphatic amines as surface treatment agents, the copper particles of the present invention have fewer bonds with greater bonding energy in the molecules. It is believed that in the copper particles of the present invention, the bonding between the surface treatment agent and the core particles is relatively weak, so it is believed that the surface treatment agent is easily detached at low temperatures, and the particles can be sintered at low temperatures. Based on the above reasons, it is considered that by applying a surface treatment agent containing a copper salt of an aliphatic organic acid to the surface of the copper particles A, both oxidation of copper and aggregation of particles can be suppressed, and the sintering temperature can be lowered.

又,對於銅粒子A,為了特定出構成脂肪族有機酸之銅鹽之脂肪族有機酸為何種有機酸,例如可藉由TOF-SIMS進行分析。Furthermore, in order to identify the type of aliphatic organic acid constituting the copper salt of an aliphatic organic acid, the copper particles A can be analyzed by, for example, TOF-SIMS.

就進一步降低本發明之銅粉之燒結溫度之觀點而言,於將銅粒子A自25℃加熱至1000℃時之熱重量分析中,質量減少值相對於500℃下之質量減少值之比率成為10%時之溫度較佳為150℃以上220℃以下,進而較佳為180℃以上220℃以下。From the perspective of further lowering the sintering temperature of the copper powder of the present invention, in the thermogravimetric analysis when the copper particles A are heated from 25°C to 1000°C, the temperature at which the ratio of the mass loss value to the mass loss value at 500°C becomes 10% is preferably 150°C to 220°C, and further preferably 180°C to 220°C.

上述熱重量分析例如可藉由以下方法進行。即,使用Bruker AXS公司製造之TG-DTA2000SA,將測定樣品設為50 mg,測定自25℃加熱至1000℃時之質量減少率。氛圍設為氮氣,升溫速度設為10℃/min。質量減少率成為規定比率時之溫度越低,表示能夠去除形成被覆層之脂肪族有機酸之溫度越低,因此成為銅粒子A之低溫燒結性之評價標準。The above-mentioned thermogravimetric analysis can be performed, for example, by the following method. That is, using TG-DTA2000SA manufactured by Bruker AXS, the sample to be measured is set to 50 mg, and the mass reduction rate when heated from 25°C to 1000°C is measured. The atmosphere is set to nitrogen, and the heating rate is set to 10°C/min. The lower the temperature at which the mass reduction rate becomes a specified ratio, the lower the temperature at which the aliphatic organic acid forming the coating layer can be removed, and thus becomes the evaluation standard of the low-temperature sintering property of the copper particles A.

如上所述,銅粒子A之形狀較佳為球狀。為了獲得球狀之銅粒子A,例如將核心粒子之形狀設為球狀即可。再者,粒子為球狀係指利用以下方法所測得之圓度係數較佳為0.85以上,進而較佳為0.90以上。圓度係數係利用如下方法算出。拍攝金屬粒子之掃描式電子顯微鏡圖像,隨機選出1000個粒子彼此不重疊者。在將粒子之二維投影圖像之面積設為S,將周長設為L時,根據公式4πS/L 2算出粒子之圓度係數。將各粒子之圓度係數之算術平均值作為上述圓度係數。於粒子之二維投影圖像為真圓之情形時,粒子之圓度係數為1。 As mentioned above, the shape of the copper particle A is preferably spherical. In order to obtain a spherical copper particle A, for example, the shape of the core particle can be set to be spherical. Furthermore, the particle is spherical when the roundness coefficient measured by the following method is preferably 0.85 or more, and further preferably 0.90 or more. The roundness coefficient is calculated by the following method. Take a scanning electron microscope image of metal particles, and randomly select 1000 particles that do not overlap with each other. When the area of the two-dimensional projection image of the particle is set to S and the circumference is set to L, the roundness coefficient of the particle is calculated according to the formula 4πS/L 2. The arithmetic mean of the roundness coefficients of each particle is taken as the above-mentioned roundness coefficient. When the two-dimensional projection image of the particle is a true circle, the roundness coefficient of the particle is 1.

<銅粒子B之較佳實施方式> 銅粒子B之藉由X射線繞射測定所算出之特定結晶面之微晶尺寸處於規定關係。具體而言,在將根據BET比表面積所算出之粒徑設為BET直徑B,將根據X射線繞射測定中源自銅之(111)面之繞射峰並藉由謝樂公式所求出之微晶尺寸設為第1微晶尺寸S1時,第1微晶尺寸S1相對於BET直徑B之比(S1/B)較佳為0.23以下,更佳為0.02以上0.23以下,進而較佳為0.05以上0.23以下。 <Preferred implementation method of copper particles B> The crystallite size of a specific crystal plane of copper particles B calculated by X-ray diffraction measurement is in a prescribed relationship. Specifically, when the particle size calculated based on the BET specific surface area is set as the BET diameter B, and the crystallite size obtained by the Scherrer formula based on the diffraction peak originating from the (111) plane of copper in the X-ray diffraction measurement is set as the first crystallite size S1, the ratio (S1/B) of the first crystallite size S1 to the BET diameter B is preferably 0.23 or less, more preferably 0.02 or more and 0.23 or less, and further preferably 0.05 or more and 0.23 or less.

源自銅之(111)面之繞射峰係具有對銅粒子B進行X射線繞射測定所獲得之X射線繞射圖案之最大高度之峰。由此認為,第1微晶尺寸大於根據源自其他結晶面之繞射峰所算出之微晶尺寸,亦代表結晶性。因此,推測藉由成為第1微晶尺寸S1相對於BET直徑B而言較小之構成,晶界於一粒子中較多。結果,藉由對粒子進行加熱時所施加之熱能,微晶界面容易不穩定,原子擴散變得活躍,能夠提高粒子彼此於低溫下之熔接性,降低燒結溫度。 此種銅粒子例如可藉由下述製造方法獲得。 The diffraction peak originating from the (111) plane of copper is a peak with the maximum height of the X-ray diffraction pattern obtained by X-ray diffraction measurement of copper particle B. It is therefore considered that the first crystallite size is larger than the crystallite size calculated from the diffraction peaks originating from other crystal planes, and also represents crystallinity. Therefore, it is inferred that by forming a structure in which the first crystallite size S1 is smaller than the BET diameter B, there are more grain boundaries in one particle. As a result, by the heat energy applied when heating the particles, the crystallite interface is easily unstable, and atomic diffusion becomes active, which can improve the fusion of particles at low temperatures and reduce the sintering temperature. Such copper particles can be obtained, for example, by the following manufacturing method.

銅粒子B之第1微晶尺寸S1較佳為10 nm以上80 nm以下,更佳為20 nm以上75 nm以下,進而較佳為25 nm以上70 nm以下。藉由使微晶尺寸S1處於此種範圍,容易於一粒子中更多地形成晶界,能夠進一步提高加熱時之粒子之熔接性,有效地降低燒結溫度。The first crystallite size S1 of the copper particle B is preferably 10 nm to 80 nm, more preferably 20 nm to 75 nm, and further preferably 25 nm to 70 nm. By making the crystallite size S1 within such a range, it is easy to form more grain boundaries in one particle, which can further improve the weldability of the particle during heating and effectively reduce the sintering temperature.

又,銅粒子B亦較佳為在將根據X射線繞射測定中源自銅之(220)面之峰之半值寬並藉由謝樂公式所求出之微晶尺寸設為第2微晶尺寸S2時,第1微晶尺寸S1相對於第2微晶尺寸S2之比(S1/S2)為規定值以下。 具體而言,S1/S2比較佳為1.35以下,更佳為0.1以上1.3以下,進而較佳為0.1以上1.2以下。 In addition, the copper particles B are also preferably such that when the crystallite size obtained by the Scherrer formula based on the half-value width of the peak originating from the (220) plane of copper in the X-ray diffraction measurement is set as the second crystallite size S2, the ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 is less than a specified value. Specifically, the S1/S2 ratio is preferably less than 1.35, more preferably greater than 0.1 and less than 1.3, and further preferably greater than 0.1 and less than 1.2.

金屬銅容易採用面心立方結構之結晶結構,因此銅粒子B於粒子表面之特定面存在銅之(111)面,於與(111)面交叉之面存在銅之(220)面。並且,S1/S2比越小,表示銅粒子越不會於(111)面方向上生長,或越會於(220)面方向上生長。因此,S1/S2處於上述規定範圍與銅粒子B為扁平形狀等粒子形狀具有各向異性大致相關。所謂扁平形狀意指具有彼此相對向之一對主面及與該等主面交叉之側面之形狀。於銅粒子B為扁平形狀之情形時,推測於銅粒子B之主面存在銅之(111)面,於銅粒子B之側面存在銅之(220)面。 因此,藉由使S1/S2比處於上述範圍,在燒結時銅粒子B彼此排列時,銅粒子B之主面彼此、或粒子之側面彼此容易接觸,銅粒子B彼此之接觸部容易成為相同結晶面。施加了熱能之粒子相較於以不同結晶面彼此接觸之情形而言,於以相同結晶面彼此接觸之情形時,熱能之利用效率更高,微晶界面之原子更容易擴散。結果,能夠提高粒子彼此於低溫下之熔接性,降低銅粉之燒結溫度。與球狀粒子或機械性製造之扁平狀之銅粒子相比,此就燒結性能夠進一步提昇之方面而言有利。 又,銅粒子B彼此之接觸如上所述容易成為面彼此之接觸,因此與球狀銅粒子等相比,接觸面積增大。因此,由包含銅粒子B之本發明之銅粉所製造之導電膜具有較高之連續性。 此種銅粒子例如可藉由下述製造方法獲得。 Metallic copper easily adopts a face-centered cubic crystal structure, so copper particle B has a copper (111) plane on a specific surface of the particle surface, and a copper (220) plane on a surface intersecting the (111) plane. Furthermore, the smaller the S1/S2 ratio is, the less likely the copper particle will grow in the (111) plane direction, or the more likely it will grow in the (220) plane direction. Therefore, the S1/S2 being within the above-specified range is roughly related to the anisotropy of the particle shape, such as the copper particle B being flat. The so-called flat shape refers to a shape having a pair of main surfaces facing each other and side surfaces intersecting the main surfaces. When the copper particle B is flat, it is estimated that there is a copper (111) plane on the main surface of the copper particle B and a copper (220) plane on the side surface of the copper particle B. Therefore, by making the S1/S2 ratio within the above range, when the copper particles B are arranged with each other during sintering, the main surfaces of the copper particles B or the side surfaces of the particles are easy to contact each other, and the contact parts of the copper particles B are easy to become the same crystal plane. Compared with the case where the particles to which heat energy is applied are in contact with each other with different crystal planes, the utilization efficiency of heat energy is higher when the particles are in contact with each other with the same crystal plane, and the atoms at the microcrystalline interface are easier to diffuse. As a result, the welding property between the particles at low temperature can be improved, and the sintering temperature of the copper powder can be reduced. Compared with spherical particles or mechanically manufactured flat copper particles, this is advantageous in that the sintering performance can be further improved. In addition, the contact between the copper particles B is easily made into surface contact as described above, so the contact area is larger than that of spherical copper particles. Therefore, the conductive film made of the copper powder of the present invention containing the copper particles B has higher continuity. Such copper particles can be obtained, for example, by the following manufacturing method.

銅粒子B之第2微晶尺寸S2較佳為10 nm以上80 nm以下,更佳為20 nm以上75 nm以下,進而較佳為30 nm以上70 nm以下。藉由使微晶尺寸S2處於此種範圍,能夠提高因微晶尺寸相對較小而獲得之低溫燒結性,並且較多地形成源自銅粒子之形狀之導電路徑,能夠在燒結後形成低電阻之導電膜。The second crystallite size S2 of the copper particles B is preferably 10 nm to 80 nm, more preferably 20 nm to 75 nm, and further preferably 30 nm to 70 nm. By making the crystallite size S2 within such a range, the low-temperature sintering property obtained due to the relatively small crystallite size can be improved, and more conductive paths derived from the shape of the copper particles can be formed, so that a low-resistance conductive film can be formed after sintering.

銅粒子B較佳為在將根據X射線繞射測定中源自銅之(311)面之峰之半值寬並藉由謝樂公式所求出之微晶尺寸設為第3微晶尺寸S3時,第1微晶尺寸S1相對於第3微晶尺寸S3之比(S1/S3)為規定值以下。 具體而言,S1/S3比較佳為1.35以下,更佳為0.20以上1.30以下,進而較佳為0.50以上1.25以下。 The copper particles B preferably have a ratio (S1/S3) of the first crystallite size S1 to the third crystallite size S3 of less than a specified value when the crystallite size obtained by the Scherrer formula based on the half-value width of the peak originating from the (311) plane of copper in X-ray diffraction measurement is set as the third crystallite size S3. Specifically, the S1/S3 ratio is preferably less than 1.35, more preferably greater than 0.20 and less than 1.30, and further preferably greater than 0.50 and less than 1.25.

金屬銅容易採用面心立方結構之結晶結構,因此銅粒子B於粒子表面之特定面存在銅之(111)面,於與(111)面交叉之面存在銅之(311)面。並且,S1/S3比越小,表示銅粒子B越不會於(111)面方向上生長,或越會於(311)面方向上生長。因此,S1/S3處於上述規定範圍與銅粒子B為扁平形狀等粒子形狀具有各向異性大致相關。於該情形時,推測於銅粒子B之主面存在銅之(111)面,於銅粒子之側面存在銅之(311)面。 因此,藉由使S1/S3比處於上述範圍,在燒結時銅粒子B彼此排列時,銅粒子B之主面彼此、或銅粒子B之側面彼此容易接觸,銅粒子B彼此之接觸部容易成為相同結晶面。結果,能夠在對本發明之銅粉進行加熱時使銅粒子B之微晶界面之原子擴散變得活躍,提高粒子於低溫下之熔接性,降低銅粉之燒結溫度。與球狀粒子或機械性製造之扁平狀之銅粒子相比,此就燒結性能夠進一步提昇之方面而言有利。 此種銅粒子例如可藉由下述製造方法獲得。 Metallic copper tends to adopt a face-centered cubic crystal structure, so copper particle B has a copper (111) plane on a specific surface of the particle surface, and a copper (311) plane on a surface intersecting the (111) plane. Furthermore, the smaller the S1/S3 ratio is, the less likely copper particle B will grow in the (111) plane direction, or the more likely it will grow in the (311) plane direction. Therefore, the fact that S1/S3 is in the above-specified range is roughly related to the fact that the copper particle B is flat and has anisotropy in particle shape. In this case, it is estimated that the copper (111) plane exists on the main surface of copper particle B, and the copper (311) plane exists on the side surface of the copper particle. Therefore, by making the S1/S3 ratio within the above range, when the copper particles B are arranged with each other during sintering, the main surfaces of the copper particles B or the side surfaces of the copper particles B are easily in contact with each other, and the contact parts of the copper particles B are easy to become the same crystal plane. As a result, when the copper powder of the present invention is heated, the atomic diffusion of the microcrystalline interface of the copper particles B can be activated, the welding property of the particles at low temperature can be improved, and the sintering temperature of the copper powder can be reduced. Compared with spherical particles or mechanically manufactured flat copper particles, this is advantageous in that the sintering performance can be further improved. Such copper particles can be obtained, for example, by the following manufacturing method.

粒子B之第3微晶尺寸S3較佳為10 nm以上80 nm以下,更佳為20 nm以上75 nm以下,進而較佳為30 nm以上70 nm以下。藉由使微晶尺寸S3處於此種範圍,能夠提高因微晶尺寸相對較小而獲得之低溫燒結性,並且較多地形成源自銅粒子B之形狀之導電路徑,能夠在燒結後形成低電阻之導電膜。The third crystallite size S3 of the particle B is preferably 10 nm to 80 nm, more preferably 20 nm to 75 nm, and further preferably 30 nm to 70 nm. By making the crystallite size S3 within such a range, the low-temperature sintering property obtained due to the relatively small crystallite size can be improved, and more conductive paths derived from the shape of the copper particle B can be formed, so that a low-resistance conductive film can be formed after sintering.

第1微晶尺寸S1、第2微晶尺寸S2及第3微晶尺寸S3分別可根據藉由X射線繞射測定所獲得之源自銅之(110)面、(220)面或(311)面之繞射峰之半值寬之全寬並使用以下所示之謝樂公式算出。關於X射線繞射測定之條件,於下述實施例中進行詳細說明。PDF編號係使用00-004-0836。 ・謝樂公式:D=Kλ/βcosθ ・D:微晶尺寸 ・K:謝樂常數(0.94) ・λ:X射線之波長 ・β:半值寬[rad] ・θ:繞射角 The first crystallite size S1, the second crystallite size S2, and the third crystallite size S3 can be calculated using the Sherer formula shown below based on the full width of the half-value width of the diffraction peak originating from the (110) plane, (220) plane, or (311) plane of copper obtained by X-ray diffraction measurement. The conditions of the X-ray diffraction measurement are described in detail in the following examples. The PDF number is 00-004-0836. ・ Sherer formula: D = Kλ/βcosθ ・D: crystallite size ・K: Sherer constant (0.94) ・λ: wavelength of X-ray ・β: half-value width [rad] ・θ: diffraction angle

銅粒子B較佳為包含銅元素作為主體。包含銅元素作為主體係指銅粒子中之銅元素含量為97.0質量%以上,較佳為97.5質量%以上,更佳為98.0質量%以上,進而較佳為98.5質量%以上。銅元素之含量例如可藉由ICP(Inductively Coupled Plasma,感應耦合電漿)發射光譜分析法進行測定。The copper particles B preferably contain copper elements as a main component. The copper elements as a main component means that the copper content in the copper particles is 97.0 mass % or more, preferably 97.5 mass % or more, more preferably 98.0 mass % or more, and further preferably 98.5 mass % or more. The copper content can be measured, for example, by ICP (Inductively Coupled Plasma) emission spectrometry.

銅粒子B除包含銅元素以外,還包含除銅元素以外之其他元素,或包含銅元素,且除不可避免之雜質以外不含除銅元素以外之其他元素。只要不損害本發明之效果,則銅粒子B容許包含氧元素等微量之不可避免之雜質元素。於任一態樣中,銅粒子中之除銅元素以外之其他元素之含量均較佳為1.5質量%以下。該等元素之含量例如可藉由ICP發射光譜分析法進行測定。The copper particles B contain not only the copper element but also other elements other than the copper element, or contain the copper element and do not contain other elements other than the copper element except for inevitable impurities. The copper particles B are allowed to contain trace amounts of inevitable impurity elements such as oxygen elements as long as the effect of the present invention is not impaired. In any embodiment, the content of other elements other than the copper element in the copper particles is preferably less than 1.5 mass %. The content of these elements can be measured, for example, by ICP emission spectrometry.

銅粒子B亦較佳為該粒子中所包含之碳元素之含量較少。詳細而言,銅粒子B中之碳元素之含量較佳為5000 ppm以下,更佳為4500 ppm以下,進而較佳為4000 ppm以下,越少越佳,現實而言為100 ppm以上。藉由使碳元素之含量處於此種範圍,能夠相對抑制由銅粒子表面存在之有機物所導致之燒結阻礙。此種銅粒子例如可藉由下述製造方法來製造。The copper particle B also preferably has a lower carbon content. Specifically, the carbon content in the copper particle B is preferably 5000 ppm or less, more preferably 4500 ppm or less, and further preferably 4000 ppm or less, the less the better, and in practice it is 100 ppm or more. By making the carbon content within this range, the sintering barrier caused by the organic matter present on the surface of the copper particle can be relatively suppressed. Such copper particles can be manufactured, for example, by the following manufacturing method.

碳元素之含量例如可藉由氣體分析或燃燒式碳析等方法進行測定。測定碳元素之含量時,首先判斷是否對銅粒子B表面進行了被覆處理。關於該確認方法,例如可例舉單獨或組合使用X射線光電子光譜(XPS)法、核磁共振(NMR)法、拉曼光譜法、紅外光譜法、液相層析法、飛行時間型二次離子質譜法(TOF-SIMS)等方法來進行確認之方法。若藉由該方法判斷對粒子表面進行了被覆處理,則將上述方法單獨或組合複數種使用,對藉由被覆處理所形成之被覆層中所包含之元素之種類及其量進行定性分析及定量分析。除此以外,利用熱重量測定(TG),藉由燒成溫度前後所產生之質量變化及加熱至該溫度後之碳量之測定,能夠對有機物之物性進行評價。 於判斷未對粒子表面進行被覆處理之情形時,將作為測定對象之銅粒子B直接供測定使用,將所獲得之定量值作為銅粒子B中所包含之碳元素含量。 The carbon content can be measured, for example, by gas analysis or combustion carbon deposition. When measuring the carbon content, first determine whether the surface of the copper particle B has been coated. Regarding the confirmation method, for example, there can be cited methods of confirmation using X-ray photoelectron spectroscopy (XPS), nuclear magnetic resonance (NMR), Raman spectroscopy, infrared spectroscopy, liquid chromatography, time-of-flight secondary ion mass spectrometry (TOF-SIMS) and other methods alone or in combination. If it is determined by this method that the particle surface has been coated, the above methods are used alone or in combination to perform qualitative and quantitative analysis on the types and amounts of elements contained in the coating layer formed by the coating treatment. In addition, by using thermogravimetric measurement (TG), the physical properties of organic matter can be evaluated by measuring the mass change before and after the calcination temperature and the amount of carbon after heating to that temperature. When it is determined that the particle surface is not coated, the copper particle B as the measurement object is directly used for measurement, and the quantitative value obtained is used as the carbon content contained in the copper particle B.

銅粒子B亦較佳為該粒子中所包含之磷元素之含量處於規定範圍。詳細而言,銅粒子中之磷元素之含量較佳為300 ppm以上,更佳為300 ppm以上1500 ppm以下,進而較佳為300 ppm以上1000 ppm。藉由使磷元素之含量處於此種範圍,能夠充分維持銅所具有之導電性,並且產生熔點下降,進一步降低燒結溫度。此種銅粒子例如可藉由下述製造方法來製造。銅粒子B中之磷元素之有無及其含量例如可藉由ICP發射光譜分析法進行測定。The copper particle B also preferably has a phosphorus content within a specified range. Specifically, the phosphorus content in the copper particle is preferably 300 ppm or more, more preferably 300 ppm or more and 1500 ppm or less, and further preferably 300 ppm or more and 1000 ppm or more. By making the phosphorus content within such a range, the electrical conductivity of copper can be fully maintained, and the melting point is lowered, further reducing the sintering temperature. Such copper particles can be manufactured, for example, by the following manufacturing method. The presence and content of phosphorus in the copper particle B can be measured, for example, by ICP emission spectrometry.

如上所述,銅粒子B之碳含量越少,越不易引起燒結阻礙,越能夠於低溫下燒結銅粉。然而,若為上述碳元素之含量之範圍,則能夠相對抑制由銅粒子B之表面存在之有機物所導致之燒結阻礙,因此亦可有意地對銅粒子B之表面施加有機物。As described above, the less carbon content of copper particles B, the less likely it is to cause sintering resistance, and the copper powder can be sintered at a lower temperature. However, if the carbon content is within the above range, the sintering resistance caused by the organic matter on the surface of copper particles B can be relatively suppressed, so the organic matter can be intentionally applied to the surface of copper particles B.

作為施加於銅粒子B之表面之有機物,例如可例舉各種脂肪酸或脂肪族有機酸之銅鹽、及脂肪族胺。藉由將此種有機物施加於銅粒子B之表面,能夠抑制銅粒子間之凝集。就提昇銅粉之低溫燒結性之方面而言,尤佳為使用碳數6以上18以下、尤其是碳數10以上18以下之飽和或不飽和脂肪酸或脂肪族胺。作為此種脂肪酸或脂肪族胺之具體例,可例舉:苯甲酸、戊酸、己酸、辛酸、壬酸、癸酸、月桂酸、棕櫚酸、油酸、硬脂酸、戊胺、己胺、辛胺、癸胺、月桂胺、油胺、硬脂胺等。該等脂肪酸或脂肪族胺可單獨使用1種或組合2種以上使用。As the organic substance applied to the surface of the copper particle B, for example, copper salts of various fatty acids or aliphatic organic acids, and aliphatic amines can be cited. By applying such an organic substance to the surface of the copper particle B, the aggregation between the copper particles can be suppressed. In terms of improving the low-temperature sintering property of the copper powder, it is particularly preferred to use a saturated or unsaturated fatty acid or aliphatic amine with a carbon number of 6 to 18, especially a carbon number of 10 to 18. As specific examples of such fatty acids or aliphatic amines, benzoic acid, valeric acid, caproic acid, caprylic acid, nonanoic acid, capric acid, lauric acid, palmitic acid, oleic acid, stearic acid, amylamine, hexylamine, octylamine, decylamine, laurylamine, oleylamine, stearylamine, etc. These fatty acids or aliphatic amines can be used alone or in combination of two or more.

銅粒子B只要能夠發揮本發明之效果即可,其形狀並無特別限制,於藉由下述方法製造之情形時,較佳為扁平形狀。此種粒子具有彼此相對向之大致平坦之一對主面、及與兩主面交叉之側面,且為該主面之最大徑長大於厚度之板狀。於該情形時,亦較佳為在俯視銅粒子B中之主面時,其形狀具有藉由直線彼此之組合、或直線及曲線之組合所劃定之輪廓。The shape of the copper particle B is not particularly limited as long as it can exert the effect of the present invention. When produced by the following method, it is preferably flat. Such particles have a pair of substantially flat main surfaces facing each other, and side surfaces intersecting the two main surfaces, and are plate-shaped with the maximum diameter of the main surface being greater than the thickness. In this case, it is also preferred that when the main surface of the copper particle B is viewed from above, its shape has a contour defined by a combination of straight lines, or a combination of straight lines and curves.

由包含本發明之銅粉之銅漿所製造之導電膜具有較高之緻密性及連續性。就更進一步提高該導電膜之緻密性及連續性之觀點而言,相對於銅粒子A與銅粒子B之合計,銅粒子A之含有比率較佳為60質量%以上99質量%以下,更佳為65質量%以上88質量%以下,進而較佳為70質量%以上85質量%以下。 就相同之觀點而言,相對於銅粒子A與銅粒子B之合計,銅粒子B之含有比率較佳為1質量%以上40質量%以下,更佳為12質量%以上35質量%以下,進而較佳為15質量%以上30質量%以下。 The conductive film made of the copper slurry containing the copper powder of the present invention has high density and continuity. From the perspective of further improving the density and continuity of the conductive film, the content ratio of copper particles A is preferably 60 mass% to 99 mass%, more preferably 65 mass% to 88 mass%, and further preferably 70 mass% to 85 mass%. From the same perspective, the content ratio of copper particles B is preferably 1 mass% to 40 mass%, more preferably 12 mass% to 35 mass%, and further preferably 15 mass% to 30 mass%.

繼而,對本發明之銅粉之較佳製造方法進行說明。本發明之銅粉適宜藉由以上述較佳比率將銅粒子A及銅粒子B混合而製造。以下,依序對銅粒子A及銅粒子B之較佳製造方法、以及銅粒子A及銅粒子B之混合方法進行詳細說明。Next, the preferred method for producing the copper powder of the present invention is described. The copper powder of the present invention is preferably produced by mixing copper particles A and copper particles B at the above-mentioned preferred ratio. The preferred method for producing copper particles A and copper particles B, and the method for mixing copper particles A and copper particles B are described in detail below.

<銅粒子A之製造方法> 首先,對銅粒子A之較佳製造方法進行說明。本製造方法係使包含銅之核心粒子與包含脂肪族有機酸之銅鹽之溶液接觸,形成被覆核心粒子之表面之被覆層。 <Method for producing copper particles A> First, a preferred method for producing copper particles A is described. This method is to bring a core particle containing copper into contact with a solution containing a copper salt of an aliphatic organic acid to form a coating layer that covers the surface of the core particle.

首先,在藉由脂肪族有機酸之銅鹽進行表面處理之前,準備包含銅之核心粒子。關於銅之核心粒子之製造方法,例如可藉由日本專利特開2015-168878號公報中所記載之濕式方法進行製造。即,製備於包含水、及較佳為碳原子數為1以上5以下之一元醇之液體介質中包含氯化銅、乙酸銅、氫氧化銅、硫酸銅、氧化銅或氧化亞銅等一價或二價之銅源之反應液。以成為相對於銅1莫耳較佳為0.5莫耳以上50莫耳以下之比率之方式將該反應液與肼混合,還原該銅源,獲得包含銅之核心粒子。利用本方法所獲得之核心粒子於其表面未施加脂肪族有機酸之銅鹽等表面處理劑,且粒徑較小。First, before surface treatment with a copper salt of an aliphatic organic acid, core particles containing copper are prepared. The method for producing the copper core particles can be produced, for example, by a wet method described in Japanese Patent Publication No. 2015-168878. That is, a reaction solution containing a monovalent or divalent copper source such as copper chloride, copper acetate, copper hydroxide, copper sulfate, copper oxide or cuprous oxide in a liquid medium containing water and preferably a monohydric alcohol having 1 to 5 carbon atoms is prepared. The reaction solution is mixed with hydrazine in a ratio of preferably 0.5 to 50 mol relative to 1 mol of copper, and the copper source is reduced to obtain core particles containing copper. The core particles obtained by the method are not treated with a surface treatment agent such as copper salt of aliphatic organic acid, and have a smaller particle size.

利用上述步驟所獲得之核心粒子較佳為進行洗淨處理。作為洗淨方法,例如可例舉傾析法或旋轉過濾法等。於利用旋轉過濾法對核心粒子進行洗淨之情形時,例如製備使核心粒子分散於水等溶劑中而成之水性漿料,進行洗淨直至該漿料之導電率較佳為成為2.0 mS以下。關於此時之洗淨條件,例如於使用水作為洗淨溶劑之情形時,可將洗淨溫度設為15℃以上30℃以下,將洗淨時間設為10分鐘以上60分鐘以下。藉由使漿料之導電率處於上述範圍,能夠使洗淨對象之核心粒子不凝集而於均勻地分散之狀態下高效率地進行下述表面處理。就兼顧提昇洗淨效率及提昇粒子之分散性之觀點而言,該漿料中之包含銅之核心粒子之含有比率較佳為5質量%以上50質量%以下。The core particles obtained by the above steps are preferably washed. As a washing method, for example, decanting or rotary filtration can be cited. When the core particles are washed by rotary filtration, for example, an aqueous slurry is prepared in which the core particles are dispersed in a solvent such as water, and the slurry is washed until the conductivity of the slurry is preferably less than 2.0 mS. Regarding the washing conditions at this time, for example, when water is used as a washing solvent, the washing temperature can be set to be greater than 15°C and less than 30°C, and the washing time can be set to be greater than 10 minutes and less than 60 minutes. By making the conductivity of the slurry within the above range, the core particles of the cleaning object can be efficiently subjected to the following surface treatment in a uniformly dispersed state without agglomeration. From the perspective of improving both cleaning efficiency and particle dispersibility, the content ratio of the core particles containing copper in the slurry is preferably 5 mass % or more and 50 mass % or less.

又,作為包含銅之核心粒子之其他製造方法,例如亦可採用國際公開第2015/122251號說明書中所記載之直流熱電漿(DC電漿)法代替上述方法。詳細而言,可對銅之母粉進行作為PVD(Physical Vapor Deposition,物理氣相沈積)法之一種之直流熱電漿法,由該母粉生成核心粒子。利用本方法所獲得之核心粒子亦於其表面未施加脂肪族有機酸之銅鹽等表面處理劑,且粒徑較小。視需要可對所獲得之核心粒子進行壓碎處理或分級處理,分離或去除粗大粒子或微粒子。In addition, as another method for manufacturing core particles containing copper, for example, the direct current thermal plasma (DC plasma) method described in the specification of International Publication No. 2015/122251 can also be used instead of the above method. In detail, the direct current thermal plasma method, which is a type of PVD (Physical Vapor Deposition) method, can be performed on the copper mother powder to generate core particles from the mother powder. The core particles obtained by this method also do not have a surface treatment agent such as copper salt of aliphatic organic acid applied to their surface, and the particle size is relatively small. The obtained core particles can be crushed or graded as needed to separate or remove coarse particles or fine particles.

繼而,藉由表面處理劑對利用上述方法所獲得之核心粒子進行表面處理,形成被覆核心粒子之表面之被覆層。作為表面處理之方法,例如可採用使核心粒子與使脂肪族有機酸之銅鹽溶解於溶劑中而成之溶液接觸之方法。於本步驟中,與脂肪族有機酸之銅鹽接觸之核心粒子之形態可為使核心粒子分散於水等溶劑中而成之水性漿料,亦可為未分散於溶劑等中之乾燥狀態。又,關於本步驟中之接觸順序,可將核心粒子及脂肪族有機酸之銅鹽溶液中之一者添加於另一者,亦可使核心粒子及脂肪族有機酸之銅鹽之溶液同時接觸。 就藉由脂肪族有機酸之銅鹽均勻地對核心粒子進行表面處理之觀點而言,較佳為採用向分散有核心粒子之漿料中添加脂肪族有機酸之銅鹽之溶液之方法。 Next, the core particles obtained by the above method are surface treated with a surface treatment agent to form a coating layer covering the surface of the core particles. As a surface treatment method, for example, a method of contacting the core particles with a solution obtained by dissolving a copper salt of an aliphatic organic acid in a solvent can be adopted. In this step, the form of the core particles contacting the copper salt of an aliphatic organic acid can be an aqueous slurry in which the core particles are dispersed in a solvent such as water, or can be a dry state in which the core particles are not dispersed in a solvent, etc. In addition, regarding the contact sequence in this step, one of the core particles and the copper salt solution of an aliphatic organic acid can be added to the other, or the core particles and the copper salt solution of an aliphatic organic acid can be contacted at the same time. From the perspective of uniformly treating the surface of the core particles with the copper salt of an aliphatic organic acid, it is preferable to adopt a method of adding a solution of the copper salt of an aliphatic organic acid to the slurry in which the core particles are dispersed.

以下,以向脂肪族有機酸之銅鹽溶液中添加核心粒子,進行表面處理之方法為例進行說明。首先,將脂肪族有機酸之銅鹽溶液所使用之溶劑加熱至所使用之溶劑之沸點以下之溫度(例如25℃以上80℃以下),於該狀態下,向該溶劑中添加脂肪族有機酸之銅鹽,製備脂肪族有機酸之銅鹽溶液。繼而,將銅鹽溶液之溫度維持於脂肪族有機酸之銅鹽之熔點以上,於該狀態下將乾燥狀態之核心粒子或含有核心粒子之漿料添加於脂肪族有機酸之銅鹽溶液中,其後,攪拌1小時,對核心粒子之表面實施表面處理。藉由該方法所獲得之銅粒子A成為於包含銅之核心粒子之表面形成有包含脂肪族有機酸之銅鹽之被覆層者。於使用含有核心粒子之漿料進行表面處理之情形時,就於核心粒子之表面均勻地形成被覆層之觀點而言,較佳為將該漿料加熱至脂肪族有機酸之銅鹽之熔點以上之溫度。The following is an example of a method for surface treatment by adding core particles to a copper salt solution of an aliphatic organic acid. First, the solvent used for the copper salt solution of an aliphatic organic acid is heated to a temperature below the boiling point of the solvent used (for example, above 25°C and below 80°C), and in this state, the copper salt of an aliphatic organic acid is added to the solvent to prepare the copper salt solution of an aliphatic organic acid. Then, the temperature of the copper salt solution is maintained above the melting point of the copper salt of an aliphatic organic acid, and in this state, the dried core particles or the slurry containing the core particles are added to the copper salt solution of an aliphatic organic acid, and then stirred for 1 hour to perform surface treatment on the surface of the core particles. The copper particles A obtained by the method are formed with a coating layer containing a copper salt of an aliphatic organic acid formed on the surface of a core particle containing copper. When a slurry containing core particles is used for surface treatment, it is preferred to heat the slurry to a temperature above the melting point of the copper salt of an aliphatic organic acid in order to uniformly form the coating layer on the surface of the core particles.

於使用脂肪族有機酸之銅鹽之溶液之表面處理中,相對於未實施表面處理之核心粒子100質量份,包含核心粒子之反應溶液中之脂肪族有機酸之銅鹽之含量較佳為設為0.1質量份以上3.0質量份以下,更佳為設為0.2質量份以上2.0質量份以下。藉由以此種量進行表面處理,能夠獲得以上述碳原子比率進行了表面處理之銅粒子A。In the surface treatment using a solution of a copper salt of an aliphatic organic acid, the content of the copper salt of an aliphatic organic acid in the reaction solution containing the core particles is preferably set to 0.1 mass part or more and 3.0 mass parts or less, and more preferably set to 0.2 mass part or more and 2.0 mass parts or less, relative to 100 mass parts of the core particles that have not been surface treated. By performing the surface treatment with such an amount, copper particles A that have been surface treated with the above carbon atomic ratio can be obtained.

關於使脂肪族有機酸之銅鹽溶解之溶劑,可例舉:碳原子數為1以上5以下之一元醇、多元醇、多元醇之酯、酮、醚等有機溶劑。該等中,就與水之相溶性、經濟性、處理性及去除之容易性之觀點而言,較佳為使用碳原子數為1以上5以下之一元醇,進而較佳為使用甲醇水溶液、乙醇、1-丙醇或異丙醇。Solvents for dissolving copper salts of aliphatic organic acids include organic solvents such as monohydric alcohols having 1 to 5 carbon atoms, polyhydric alcohols, esters of polyhydric alcohols, ketones, and ethers. Among these, monohydric alcohols having 1 to 5 carbon atoms are preferably used from the viewpoints of compatibility with water, economy, handling properties, and ease of removal, and more preferably, aqueous methanol solutions, ethanol, 1-propanol, or isopropanol are used.

關於經以上步驟所獲得之銅粒子A,在視需要進行洗淨或固液分離之後,可以使銅粒子A分散於水或有機溶劑等溶劑中而成之漿料之形態與銅粒子B混合,亦可對銅粒子A進行乾燥,以作為銅粒子之集合體之乾燥粉末之形態與銅粒子B混合。於任一情形時,均能夠藉由使本發明之銅粉包含銅粒子A而成為抑制作為構成金屬之銅之氧化,且抑制粒子之凝集,並且燒結溫度較低的優異銅粉。The copper particles A obtained through the above steps can be washed or solid-liquid separated as needed, and then dispersed in water or an organic solvent to form a slurry and mixed with the copper particles B. Alternatively, the copper particles A can be dried and mixed with the copper particles B in the form of a dry powder of a collection of copper particles. In either case, the copper powder of the present invention can contain the copper particles A to obtain an excellent copper powder that suppresses oxidation of copper as a constituent metal, suppresses aggregation of particles, and has a lower sintering temperature.

<銅粒子B之製造方法> 繼而,對銅粒子B之較佳製造方法進行說明。本製造方法具備如下2個還原步驟:第1還原步驟,還原銅離子而生成氧化亞銅;及第2還原步驟,於二磷酸以上之多磷酸或其等之鹽(以下,亦將其稱為多磷酸類)之存在下還原氧化亞銅而生成銅粒子。 可使多磷酸類於進行第2還原步驟時、或進行第2還原步驟前之任一階段存在於反應系統中。即,可使多磷酸類於進行第1還原步驟前或進行第1還原步驟時存在於反應系統中,於該狀態下進行第2還原步驟。作為替代,亦可於第1還原步驟中不使多磷酸類存在於反應系統中,而於第1還原步驟結束後、進行第2還原步驟時或即將進行第2還原步驟之前使多磷酸類存在於反應系統中。 <Method for producing copper particles B> Next, a preferred method for producing copper particles B is described. This production method has the following two reduction steps: a first reduction step, reducing copper ions to produce cuprous oxide; and a second reduction step, reducing cuprous oxide to produce copper particles in the presence of polyphosphoric acid or salts thereof of diphosphoric acid or higher (hereinafter also referred to as polyphosphoric acids). The polyphosphoric acid may be present in the reaction system at any stage during or before the second reduction step. That is, the polyphosphoric acid may be present in the reaction system before or during the first reduction step, and the second reduction step may be performed in this state. Alternatively, the polyphosphoric acid may not be present in the reaction system in the first reduction step, but may be present in the reaction system after the first reduction step and during or just before the second reduction step.

就兼顧還原反應之均勻控制、及由此所獲得之銅粒子之生產性提昇、以及製造成本之降低之觀點而言,本製造方法較佳為任一還原步驟均於在水性液體中進行還原之濕式條件下進行,又,較佳為任一還原步驟均於同一反應系統中進行。以下,以於濕式條件下且在同一反應系統中之製造方法為例進行說明。From the perspective of uniform control of the reduction reaction, improved productivity of the copper particles obtained thereby, and reduced manufacturing costs, it is preferred that any reduction step of the present production method is carried out under wet conditions in an aqueous liquid, and it is also preferred that any reduction step is carried out in the same reaction system. The following is an example of a production method under wet conditions and in the same reaction system.

首先,製備包含銅源及還原性化合物之反應液,進行第1還原步驟,還原銅離子而於溶液中生成氧化亞銅。關於反應液之製備,可將各原料同時添加於溶劑中而製成反應液,亦可以任意順序將各原料添加於溶劑中。 就容易控制銅離子之還原反應,提高製造時之處理性之觀點而言,較佳為預先將銅源與溶劑混合而製成含銅溶液後,將固體之還原性化合物、或預先溶解於溶劑中之還原性化合物溶液添加於含銅溶液中。還原性化合物可一次添加,亦可逐次添加。 First, a reaction solution containing a copper source and a reducing compound is prepared, and the first reduction step is performed to reduce copper ions and generate cuprous oxide in the solution. Regarding the preparation of the reaction solution, each raw material can be added to a solvent at the same time to prepare the reaction solution, or each raw material can be added to the solvent in any order. From the perspective of easily controlling the reduction reaction of copper ions and improving the handling properties during manufacturing, it is better to pre-mix the copper source with a solvent to prepare a copper-containing solution, and then add a solid reducing compound or a reducing compound solution pre-dissolved in a solvent to the copper-containing solution. The reducing compound can be added all at once or successively.

於第1還原步驟中,如上所述,多磷酸類可包含於反應液中,亦可不包含於反應液中。於使多磷酸類存在於反應液中之情形時,就能夠有效地進行藉由還原性化合物所進行之銅離子之還原及結晶生長之控制之方面而言,較佳為依序添加銅源、多磷酸類及還原性化合物。In the first reduction step, as described above, polyphosphoric acid may or may not be contained in the reaction solution. When polyphosphoric acid is present in the reaction solution, it is possible to effectively control the reduction of copper ions and crystal growth by the reducing compound, and it is preferred to add the copper source, polyphosphoric acid, and reducing compound in sequence.

反應液中之溶劑可使用水、或甲醇、乙醇、丙醇等低級醇。該等可單獨使用或組合複數種使用。The solvent in the reaction solution may be water or a lower alcohol such as methanol, ethanol, propanol, etc. These may be used alone or in combination.

作為第1還原步驟所使用之銅源,可例舉於反應液中生成銅離子之化合物,較佳為例舉水溶性之銅化合物。作為此種銅源之具體例,可例舉:甲酸銅、乙酸銅、丙酸銅等銅有機酸鹽、或硝酸銅、硫酸銅等銅無機酸鹽等各種銅化合物。該等銅化合物可為無水物,亦可為水合物。該等銅化合物可單獨使用或組合複數種使用。The copper source used in the first reduction step may be a compound that generates copper ions in the reaction solution, preferably a water-soluble copper compound. Specific examples of such a copper source include copper compounds such as copper formate, copper acetate, copper propionate, and copper inorganic salts such as copper nitrate and copper sulfate. The copper compounds may be anhydrous or hydrated. The copper compounds may be used alone or in combination.

第1還原步驟中之反應系統中之銅源之含量以銅元素之莫耳濃度表示較佳為0.01 mol/L以上2.0 mol/L以下,更佳為0.1 mol/L以上1.5 mol/L以下。藉由處於此種範圍,能夠高生產性地製造粒徑較小且特定結晶面之微晶尺寸較小之銅粒子。The content of the copper source in the reaction system in the first reduction step is preferably 0.01 mol/L to 2.0 mol/L, more preferably 0.1 mol/L to 1.5 mol/L, expressed as the molar concentration of the copper element. By being within this range, copper particles with a smaller particle size and a smaller crystallite size on a specific crystal plane can be produced with high productivity.

作為還原性化合物,較佳為例舉水溶性化合物。作為還原性化合物之具體例,可例舉:肼、鹽酸肼、硫酸肼及水合肼等肼系化合物;硼氫化鈉或二甲胺硼烷等硼化合物及其鹽;亞硫酸鈉、亞硫酸氫鈉及硫代硫酸鈉等硫氧酸鹽;亞硝酸鈉及次硝酸鈉等氮氧酸鹽;亞磷酸、亞磷酸鈉、次磷酸及次磷酸鈉等磷氧酸及其鹽。該等還原性化合物可為無水物,亦可為水合物。該等還原性化合物可單獨使用1種或組合2種以上使用。As the reducing compound, water-soluble compounds are preferably exemplified. Specific examples of the reducing compound include: hydrazine compounds such as hydrazine, hydrazine hydrochloride, hydrazine sulfate and hydrazine hydrate; boron compounds such as sodium borohydride or dimethylamine borane and their salts; sulfuric acid salts such as sodium sulfite, sodium hydrogen sulfite and sodium thiosulfate; nitrogen acid salts such as sodium nitrite and sodium hyponitrite; phosphorous acid salts such as phosphorous acid, sodium phosphite, hypophosphorous acid and sodium hypophosphite and their salts. These reducing compounds may be anhydrous or hydrated. These reducing compounds may be used alone or in combination of two or more.

就容易控制第1還原步驟中之還原產物成為氧化亞銅,容易控制之後之還原步驟中之銅之晶粒生長而容易獲得具有規定之微晶尺寸之粒子之觀點、及減少還原後碳元素等雜質意外混入之觀點而言,還原性溶液中之還原性化合物較佳為使用肼系化合物,進而較佳為使用肼之無水物或水合物。From the viewpoint of easily controlling the reduction product in the first reduction step to become cuprous oxide, easily controlling the grain growth of copper in the subsequent reduction step and easily obtaining particles with a specified crystallite size, and reducing the accidental mixing of impurities such as carbon after reduction, the reducing compound in the reducing solution is preferably a hydrazine compound, and more preferably an anhydrate or a hydrate of hydrazine.

相對於銅元素1莫耳,第1還原步驟中之反應液中之還原性化合物之含量較佳為設為0.1莫耳以上2莫耳以下,更佳為設為0.1莫耳以上1莫耳以下。藉由將還原性化合物之濃度控制於此種範圍內,能夠適度地控制銅離子之還原反應及晶粒生長之進展,高生產性地獲得粒徑較小且特定結晶面之微晶尺寸較小之銅粒子。The content of the reducing compound in the reaction solution in the first reduction step is preferably set to 0.1 mol or more and 2 mol or less, and more preferably set to 0.1 mol or more and 1 mol or less, relative to 1 mol of the copper element. By controlling the concentration of the reducing compound within this range, the reduction reaction of copper ions and the progress of grain growth can be appropriately controlled, and copper particles with smaller particle size and smaller crystallite size on a specific crystal plane can be obtained with high productivity.

於使用還原性化合物、尤其是肼系化合物之情形時,就能夠將還原性之程度適度地控制為進行向氧化亞銅之還原,且不進行向金屬銅之還原之程度,並且容易使第2還原步驟中進行之銅之結晶生長具有各向異性之方面而言,第1還原步驟中之反應液較佳為處於其25℃下之pH值為3以上5以下之酸性條件下。就能夠適當地控制銅離子之還原之程度之方面而言,較佳為於第1還原步驟中,在進行了pH值之調整之後,添加還原性化合物。When a reducing compound, particularly a hydrazine compound, is used, the degree of reducing property can be appropriately controlled to the extent that reduction to cuprous oxide is performed and reduction to metallic copper is not performed, and the crystal growth of copper in the second reduction step can be easily made anisotropic. The reaction solution in the first reduction step is preferably under an acidic condition with a pH value of 3 or more and 5 or less at 25° C. In order to appropriately control the degree of reduction of copper ions, it is preferred to add the reducing compound after the pH value is adjusted in the first reduction step.

關於pH值之調整,只要發揮本發明之效果即可,可使用各種酸或鹼性物質,或使多磷酸類存在於反應液中。尤其是,調整pH值時,藉由使用多磷酸類,即便不將其他物質添加於反應系統中亦能夠有效率地進行之後之反應,因此就防止雜質意外混入,有效率地獲得目標銅粒子之方面而言有利。Regarding the adjustment of pH value, as long as the effect of the present invention is exerted, various acids or alkaline substances can be used, or polyphosphoric acid can be present in the reaction solution. In particular, when adjusting the pH value, by using polyphosphoric acid, the subsequent reaction can be efficiently carried out even without adding other substances to the reaction system, which is advantageous in preventing accidental mixing of impurities and efficiently obtaining the target copper particles.

關於第1還原步驟中之還原反應,可於不對反應液加熱之狀態下進行,亦可於加熱狀態下進行。於任一情形時,反應液之溫度均較佳為設為10℃以上60℃以下,更佳為設為20℃以上50℃以下。第1還原步驟中之反應時間以上述溫度範圍作為條件,較佳為設為0.1小時以上2小時以下,更佳為設為0.2小時以上1小時以下。又,就還原反應之均勻性之觀點而言,亦較佳為自反應開始時間點至反應結束時間點,持續攪拌反應液。The reduction reaction in the first reduction step can be carried out without heating the reaction solution or in a heated state. In either case, the temperature of the reaction solution is preferably set to 10°C to 60°C, more preferably 20°C to 50°C. The reaction time in the first reduction step is preferably set to 0.1 hour to 2 hours, more preferably 0.2 hour to 1 hour, under the above temperature range. In addition, from the perspective of uniformity of the reduction reaction, it is also preferred to continuously stir the reaction solution from the reaction start time point to the reaction end time point.

繼而,進行還原第1還原步驟中所獲得之氧化亞銅,生成金屬銅之粒子的第2還原步驟。第2還原步驟亦較佳為與第1還原步驟相同地於濕式條件下進行,又,更佳為兩還原步驟於同一反應系統中進行。Then, a second reduction step is performed to reduce the cuprous oxide obtained in the first reduction step to generate metal copper particles. The second reduction step is also preferably performed under wet conditions like the first reduction step, and more preferably, the two reduction steps are performed in the same reaction system.

如上所述,較佳為於進行第2還原步驟時、或進行第2還原步驟前之任一階段中,使多磷酸類存在於反應系統中。作為本製造方法所使用之多磷酸類,可例舉:二磷酸(H 4P 2O 7)、三磷酸(三聚磷酸、H 5P 3O 10)、四聚磷酸(H 6P 4O 13)等於結構中具有較佳為2個以上8個以下、更佳為2個以上5個以下之磷酸單體單元之多磷酸及該等之鹽。作為多磷酸鹽,可例舉鹼金屬鹽、或鹼土族金屬鹽、其他金屬鹽、銨鹽等。該等可單獨使用或組合複數種使用。 As described above, it is preferred that polyphosphoric acids are present in the reaction system during or before the second reduction step. Examples of polyphosphoric acids used in the present production method include diphosphoric acid (H 4 P 2 O 7 ), triphosphoric acid (tripolyphosphoric acid, H 5 P 3 O 10 ), tetrapolyphosphoric acid (H 6 P 4 O 13 ), and polyphosphoric acids having preferably 2 to 8, more preferably 2 to 5, phosphate monomer units in the structure, and salts thereof. Examples of polyphosphate salts include alkali metal salts, alkali earth metal salts, other metal salts, ammonium salts, and the like. These can be used alone or in combination.

相對於銅元素1莫耳,第2還原步驟中之多磷酸類之含量較佳為設為0.1毫莫耳以上,更佳為設為0.1毫莫耳以上1莫耳以下。藉由使多磷酸類之濃度處於此種範圍,能夠以使因氧化亞銅之還原反應所進行之銅之結晶生長具有各向異性之方式進行,能夠高生產性地獲得粒徑較小且特定結晶面之微晶尺寸較小之銅粒子。再者,於在第1還原步驟之時間點含有多磷酸類之情形時,多磷酸類在第1還原步驟之反應中未被消耗,多磷酸類之濃度在第1還原步驟前後實質上未發生變化,因此於第1還原步驟中藉由以上述濃度範圍將多磷酸類添加於反應系統中,能夠充分達成適於第2還原步驟中之向金屬銅之還原及晶粒生長之多磷酸類之存在量。The content of the polyphosphoric acid in the second reduction step is preferably set to 0.1 millimole or more, and more preferably set to 0.1 millimole or more and 1 mole or less, relative to 1 mole of the copper element. By making the concentration of the polyphosphoric acid in such a range, the crystal growth of copper due to the reduction reaction of cuprous oxide can be performed in an anisotropic manner, and copper particles with a smaller particle size and a smaller crystallite size on a specific crystal plane can be obtained with high productivity. Furthermore, when polyphosphoric acid is present at the time point of the first reduction step, the polyphosphoric acid is not consumed in the reaction of the first reduction step, and the concentration of the polyphosphoric acid does not substantially change before and after the first reduction step. Therefore, by adding polyphosphoric acid to the reaction system in the first reduction step within the above concentration range, the amount of polyphosphoric acid present that is suitable for reduction to metallic copper and grain growth in the second reduction step can be sufficiently achieved.

於第2還原步驟中,可添加上述還原性化合物,而還原為金屬銅。相對於銅元素1莫耳,第2還原步驟中之反應液中之還原性化合物之含量較佳為設為1莫耳以上8莫耳以下,更佳為設為2莫耳以上6莫耳以下。於在與第1還原步驟同一反應系統中進行第2還原步驟之情形時,就兼顧提昇還原性及控制雜質減少之觀點而言,較佳為以成為上述含量之方式進一步向溶液中添加還原性化合物。又,還原性化合物之種類亦較佳為於各還原步驟中使用相同化合物。 藉由將還原性化合物之濃度控制為此種範圍,能夠充分進行還原為金屬銅之反應,高生產性地獲得粒徑較小且特定結晶面之微晶尺寸較小之銅粒子。 In the second reduction step, the above-mentioned reducing compound can be added to reduce to metallic copper. The content of the reducing compound in the reaction solution in the second reduction step is preferably set to 1 mol or more and 8 mol or less, and more preferably set to 2 mol or more and 6 mol or less, relative to 1 mol of the copper element. When the second reduction step is carried out in the same reaction system as the first reduction step, from the perspective of both improving the reducing property and controlling the reduction of impurities, it is preferred to further add the reducing compound to the solution in a manner to achieve the above-mentioned content. In addition, the type of reducing compound is preferably the same compound used in each reduction step. By controlling the concentration of the reducing compound within this range, the reduction reaction to metallic copper can be fully carried out, and copper particles with smaller particle size and smaller crystallite size on specific crystal planes can be obtained with high productivity.

第2還原步驟中之還原性化合物可一次添加,亦可逐次添加。就高效率地獲得滿足上述微晶尺寸之比或粒徑之銅粒子之觀點而言,較佳為採用逐次添加。The reducing compound in the second reduction step may be added all at once or in succession. From the perspective of efficiently obtaining copper particles satisfying the above-mentioned crystallite size ratio or particle size, successive addition is preferred.

於使用還原性化合物、尤其是肼系化合物之情形時,就能夠有效率地進行反應液中殘存之銅離子及氧化亞銅向金屬銅之還原,使銅之結晶生長具有各向異性之方面而言,第2還原步驟中之反應液較佳為處於其25℃下之pH值為7.0以上之非酸性條件(中性或鹼性條件)下。就能夠適當地控制銅離子之還原之程度之方面而言,pH值之調整較佳為於第2還原步驟中添加還原性化合物之前進行。pH值之調整可使用各種酸或鹼性物質。 於在與第1還原步驟同一反應系統中進行第2還原步驟之情形時,第1還原步驟後之反應液成為酸性條件,因此較佳為藉由添加氫氧化鈉或氫氧化鉀等鹼性物質,而調整反應液之pH值。就能夠有效率地還原銅離子及氧化亞銅之方面而言,較佳為於第2還原步驟中,在進行了pH值之調整之後,添加還原性化合物。 When using reducing compounds, especially hydrazine compounds, the residual copper ions and cuprous oxide in the reaction solution can be efficiently reduced to metallic copper, so that the crystal growth of copper is anisotropic. The reaction solution in the second reduction step is preferably under non-acidic conditions (neutral or alkaline conditions) with a pH value of 7.0 or above at 25°C. In order to properly control the degree of reduction of copper ions, the pH value is preferably adjusted before adding the reducing compound in the second reduction step. Various acids or alkaline substances can be used to adjust the pH value. When the second reduction step is performed in the same reaction system as the first reduction step, the reaction solution after the first reduction step becomes acidic, so it is preferred to adjust the pH of the reaction solution by adding alkaline substances such as sodium hydroxide or potassium hydroxide. In order to efficiently reduce copper ions and cuprous oxide, it is preferred to add a reducing compound after adjusting the pH in the second reduction step.

就高效率地進行反應液中之銅離子及氧化亞銅之還原,高生產性地獲得具有規定之微晶尺寸之銅粒子之觀點而言,較佳為於第2還原步驟中,對反應液進行加熱。關於反應液之加熱條件,較佳為自第2還原步驟之開始時間點即還原性化合物之添加時間點至反應結束時間點,以維持於10℃以上60℃以下、尤其是20℃以上50℃以下之方式進行加熱。反應時間較佳為於上述溫度條件下設為30分鐘以上720分鐘以下。又,就均勻地發生還原反應,獲得粒徑之差異較小之銅粒子之觀點而言,亦較佳為自反應開始時間點至反應結束時間點,持續攪拌反應液。From the viewpoint of efficiently reducing the copper ions and cuprous oxide in the reaction solution and obtaining copper particles with a predetermined crystallite size with high productivity, it is preferred to heat the reaction solution in the second reduction step. Regarding the heating conditions of the reaction solution, it is preferred to heat the reaction solution in a manner that the temperature is maintained at 10°C to 60°C, especially 20°C to 50°C, from the start time point of the second reduction step, i.e., the time point of adding the reducing compound, to the end time point of the reaction. The reaction time is preferably set to 30 minutes to 720 minutes under the above temperature conditions. Furthermore, from the viewpoint of uniformly causing the reduction reaction and obtaining copper particles with smaller particle size differences, it is also preferred to continuously stir the reaction solution from the reaction start time point to the reaction end time point.

關於在本製造方法中,藉由進行銅離子經由氧化亞銅還原為金屬銅之兩個階段之還原步驟、及進行第2還原步驟時存在多磷酸類,能夠獲得燒結溫度較低之銅粒子之原因,本發明人推測如下。 首先,於第1還原步驟中,藉由反應液中之還原性化合物還原銅離子,於反應液中生成氧化亞銅之非常微小之粒子。繼而,於第2還原步驟中,自氧化亞銅粒子中溶出之一價銅離子被還原,形成金屬銅之核。該核非常不穩定,因此反覆進行核彼此之合體、或向反應液中之再溶解,最終粒子生長。若在該粒子生長時存在多磷酸類,則多磷酸類吸附於銅之特定結晶面,抑制該結晶面方向之生長。另一方面,未吸附多磷酸類之結晶面之生長未被抑制,進行該結晶面方向之生長。 基於金屬銅容易採用面心立方結構之結晶結構之方面及所獲得之銅粒子之X射線繞射測定之結果,推定吸附多磷酸類之結晶面為該粒子中之銅之(111)面,且推定未吸附多磷酸類之結晶面為位於銅之(111)面之垂直方向之銅之(220)面。由此認為,成為銅之(111)面之生長被抑制,且進行銅之(220)面之生長的各向異性生長,結果,成為燒結溫度較低之扁平狀之銅粒子。 The inventors speculate as follows as to why copper particles with a lower sintering temperature can be obtained by performing a two-stage reduction step in which copper ions are reduced to metallic copper via cuprous oxide and by the presence of polyphosphoric acid during the second reduction step in the present manufacturing method. First, in the first reduction step, copper ions are reduced by a reducing compound in the reaction solution to generate very fine particles of cuprous oxide in the reaction solution. Then, in the second reduction step, monovalent copper ions dissolved from the cuprous oxide particles are reduced to form metallic copper cores. The cores are very unstable, so the cores repeatedly combine with each other or redissolve in the reaction solution, and finally the particles grow. If polyphosphate is present during the growth of the particle, the polyphosphate is adsorbed on a specific crystal face of copper, inhibiting the growth in the direction of the crystal face. On the other hand, the growth of the crystal face that does not adsorb polyphosphate is not inhibited, and the growth in the direction of the crystal face proceeds. Based on the fact that metallic copper easily adopts a face-centered cubic structure and the results of X-ray diffraction measurement of the obtained copper particles, it is inferred that the crystal face that adsorbs polyphosphate is the (111) face of copper in the particle, and the crystal face that does not adsorb polyphosphate is inferred to be the (220) face of copper located in the perpendicular direction to the (111) face of copper. It is believed that the growth of the copper (111) plane is suppressed, and the growth of the copper (220) plane is anisotropic, resulting in flat copper particles with a lower sintering temperature.

又,關於銅粒子B之較佳製造方法,尤其是藉由於第1還原步驟中在酸性條件下進行還原反應,能夠控制為可將銅離子還原為氧化亞銅之程度且無法還原至金屬銅之程度之還原力。除此以外,亦容易控制之後之金屬銅生成反應。其後,藉由設為非酸性條件,能夠降低氧化亞銅之溶出速度,控制一價銅離子之供給。藉由於該環境下進行第2還原,能夠將還原為金屬銅之反應速度調整為緩慢之條件,因此就能夠控制核生長速度之方面而言特別有利。In addition, regarding the preferred method for producing copper particles B, in particular, by carrying out the reduction reaction under acidic conditions in the first reduction step, it is possible to control the reducing force to a degree that copper ions can be reduced to cuprous oxide and cannot be reduced to metallic copper. In addition, it is also easy to control the subsequent metallic copper generation reaction. Thereafter, by setting the conditions to non-acidic conditions, the dissolution rate of cuprous oxide can be reduced and the supply of monovalent copper ions can be controlled. By carrying out the second reduction in this environment, the reaction rate of reduction to metallic copper can be adjusted to a slow condition, which is particularly advantageous in terms of being able to control the nuclear growth rate.

經以上步驟所獲得之銅粒子B即便於不含有機胺或胺基醇、還原糖等控制結晶生長之有機成分之情形時,亦滿足上述較佳微晶尺寸及其比、較佳粒徑、碳元素等各種元素之較佳含量,且具有扁平狀之形狀。 又,以此方式獲得之銅粒子B之存在於主面且於與主面正交之方向上生長之結晶之結晶面、及存在於側面且於沿主面之方向上生長之結晶之結晶面分別具有特定之配向方向,於一個方向上均勻地形成了各結晶面。因此,於使用包含銅粒子B之銅粉,在銅粒子B之主面彼此接觸之狀態、或銅粒子B之側面彼此接觸之狀態下進行燒成之情形時,由於均等地排列之相同結晶面彼此接觸,因此不過度需要熔接所需之能量,能夠於低溫下燒結。 The copper particles B obtained through the above steps satisfy the above-mentioned preferred crystallite size and ratio, preferred particle size, preferred content of various elements such as carbon, and have a flat shape even when they do not contain organic components such as organic amines or amino alcohols, reducing sugars, etc. that control crystal growth. In addition, the crystal planes of the copper particles B obtained in this way that exist on the main surface and grow in a direction perpendicular to the main surface, and the crystal planes of the crystals that exist on the side surface and grow in a direction along the main surface have specific orientation directions, and each crystal plane is uniformly formed in one direction. Therefore, when copper powder containing copper particles B is used and sintered in a state where the main surfaces of the copper particles B are in contact with each other or the side surfaces of the copper particles B are in contact with each other, since the evenly arranged identical crystal planes are in contact with each other, the energy required for welding is not excessively required and sintering can be performed at a low temperature.

關於經以上步驟所獲得之銅粒子B,在視需要進行洗淨或固液分離之後,可以使銅粒子B分散於水或有機溶劑等溶劑中而成之漿料之形態與銅粒子A混合,亦可對該粒子進行乾燥,以作為銅粒子B之集合體之乾燥粉末之形態與銅粒子A混合。於任一情形時,銅粒子B均為燒結溫度較低之優異之銅粒子。銅粒子B視需要為了提昇粒子彼此之分散性,可進一步藉由脂肪酸或其鹽等有機物、或矽系化合物等無機物實施表面被覆處理。再者,只要發揮本發明之效果即可,容許所獲得之銅粒子B之表面不可避免地被微量氧化等而包含除銅元素以外之其他元素。The copper particles B obtained through the above steps can be washed or solid-liquid separated as needed, and then dispersed in water or an organic solvent to form a slurry and mixed with copper particles A. The particles can also be dried to form a dry powder of a collection of copper particles B and mixed with copper particles A. In either case, copper particles B are excellent copper particles with a lower sintering temperature. Copper particles B can be further surface coated with organic substances such as fatty acids or their salts, or inorganic substances such as silicon compounds, in order to improve the dispersibility of the particles. Furthermore, as long as the effect of the present invention is exerted, it is permitted that the surface of the obtained copper particle B is inevitably oxidized in a small amount and contains elements other than copper.

<銅粒子A及銅粒子B之混合方法> 銅粒子A及銅粒子B可以乾式或濕式進行混合,就混合之簡便性之觀點而言,較佳為以乾式進行混合。乾式混合可使用公知之乾式混合裝置來進行。關於濕式混合,具體而言,可於有機溶劑或水溶劑中進行混合。 <Method for mixing copper particles A and copper particles B> Copper particles A and copper particles B can be mixed in a dry or wet manner. From the perspective of the ease of mixing, it is preferred to mix in a dry manner. Dry mixing can be performed using a known dry mixing device. Regarding wet mixing, specifically, mixing can be performed in an organic solvent or an aqueous solvent.

本發明之銅粉亦可進而分散於有機溶劑或樹脂等中,以導電性油墨或銅漿等導電性組合物之形態使用。 於將本發明之銅粉製成導電性組合物之形態之情形時,導電性組合物至少包含銅粉及有機溶劑。作為有機溶劑,可無特別限制地使用與包含金屬粉之導電性組合物之技術領域中以往所使用者相同之溶劑。作為此種有機溶劑,例如可例舉:一元醇、多元醇、多元醇烷基醚、多元醇芳基醚、聚醚、酯類、含氮雜環化合物、醯胺類、胺類及飽和烴等。該等有機溶劑可單獨使用或組合兩種以上使用。該等中,就具有較高之還原作用,防止燒結時銅粒子意外氧化之觀點而言,較佳為使用聚乙二醇及聚丙二醇等聚醚。就相同之觀點而言,於使用聚乙二醇作為有機溶劑之情形時,其數量平均分子量較佳為120以上400以下,更佳為180以上400以下。 The copper powder of the present invention can also be further dispersed in an organic solvent or resin, etc., and used in the form of a conductive composition such as conductive ink or copper paste. When the copper powder of the present invention is made into a conductive composition, the conductive composition at least contains copper powder and an organic solvent. As an organic solvent, the same solvent as that used in the past in the technical field of conductive compositions containing metal powder can be used without particular restrictions. As such an organic solvent, for example: monohydric alcohol, polyhydric alcohol, polyhydric alcohol alkyl ether, polyhydric alcohol aryl ether, polyether, ester, nitrogen-containing heterocyclic compound, amide, amine and saturated hydrocarbon can be cited. These organic solvents can be used alone or in combination of two or more. Among them, polyethers such as polyethylene glycol and polypropylene glycol are preferred from the viewpoint of having a higher reduction effect and preventing accidental oxidation of copper particles during sintering. From the same viewpoint, when polyethylene glycol is used as an organic solvent, its number average molecular weight is preferably greater than 120 and less than 400, and more preferably greater than 180 and less than 400.

視需要亦可進而向包含本發明之銅粉之導電性組合物中添加分散劑、有機媒劑及玻璃料之至少一種。作為分散劑,可例舉:不含鈉、鈣、磷、硫及氯等之非離子性界面活性劑等分散劑等。作為有機媒劑,例如可例舉:包含丙烯酸系樹脂、環氧樹脂、乙基纖維素、羧乙基纖維素等樹脂成分、與萜品醇及二氫萜品醇等萜烯系溶劑、乙基卡必醇及丁基卡必醇等醚系溶劑等溶劑之混合物。作為玻璃料,例如可例舉:硼矽酸玻璃、硼矽酸鋇玻璃、硼矽酸鋅玻璃等。If necessary, at least one of a dispersant, an organic medium and a glass frit may be further added to the conductive composition containing the copper powder of the present invention. Examples of the dispersant include: a dispersant such as a non-ionic surfactant that does not contain sodium, calcium, phosphorus, sulfur and chlorine. Examples of the organic medium include: a mixture of a resin component such as an acrylic resin, an epoxy resin, ethyl cellulose, and carboxyethyl cellulose, and a terpene solvent such as terpineol and dihydroterpineol, and an ether solvent such as ethyl carbitol and butyl carbitol. Examples of the glass frit include: borosilicate glass, barium borosilicate glass, zinc borosilicate glass, etc.

包含本發明之銅粉之導電性組合物可藉由如下方式形成包含銅之導電膜:將其塗佈於基板上而形成塗膜,並對該塗膜進行燒成。導電膜例如適宜用於形成印刷佈線板之電路或確保陶瓷電容器之外部電極之電導通。作為基板,根據使用銅粒子之電子電路之種類,可例舉:包含玻璃環氧樹脂等之印刷基板、或包含聚醯亞胺等之軟性印刷基板。The conductive composition containing the copper powder of the present invention can be formed into a conductive film containing copper by coating it on a substrate to form a coating and firing the coating. The conductive film is suitable for forming a circuit of a printed wiring board or ensuring electrical conduction of an external electrode of a ceramic capacitor. As a substrate, depending on the type of electronic circuit using copper particles, examples include a printed circuit board containing glass epoxy resin or a flexible printed circuit board containing polyimide or the like.

包含本發明之銅粉之導電性組合物中之銅粉及有機溶劑之調配量可根據該導電性組合物之具體用途或該導電性組合物之塗佈方法進行調整,導電性組合物中之銅粉之含有比率較佳為5質量%以上95質量%以下,更佳為80質量%以上90質量%以下。作為塗佈方法,例如可使用噴墨法、分配法、微分配法、凹版印刷法、網版印刷法、浸漬塗佈法、旋轉塗佈法、噴塗法、棒式塗佈法、輥塗法等。The amount of copper powder and organic solvent in the conductive composition containing the copper powder of the present invention can be adjusted according to the specific use of the conductive composition or the coating method of the conductive composition. The content of copper powder in the conductive composition is preferably 5 mass % to 95 mass %, and more preferably 80 mass % to 90 mass %. As the coating method, for example, inkjet method, dispensing method, microdispensing method, gravure printing method, screen printing method, dip coating method, rotary coating method, spray coating method, rod coating method, roller coating method, etc. can be used.

對所形成之塗膜進行燒結時之加熱溫度為銅粉之燒結起始溫度以上即可,例如可設為150℃以上220℃以下。關於加熱時之氛圍,例如可於氧化性氛圍下或非氧化性氛圍下進行。作為氧化性氛圍,例如可例舉含氧氛圍。作為非氧化性氛圍,例如可例舉:氫氣或一氧化碳等還原性氛圍、氫氣-氮氣混合氛圍等弱還原性氛圍、氬氣、氖氣、氦氣及氮氣等惰性氛圍。於使用任一氛圍之情形時,加熱時間以於上述溫度範圍內進行加熱作為條件,均較佳為設為1分鐘以上3小時以下,進而較佳為設為3分鐘以上2小時以下。The heating temperature when sintering the formed coating film can be above the sintering starting temperature of the copper powder, for example, it can be set to be above 150°C and below 220°C. Regarding the atmosphere during heating, for example, it can be carried out in an oxidizing atmosphere or a non-oxidizing atmosphere. As an oxidizing atmosphere, for example, an oxygen-containing atmosphere can be cited. As a non-oxidizing atmosphere, for example, reducing atmospheres such as hydrogen or carbon monoxide, weakly reducing atmospheres such as a hydrogen-nitrogen mixed atmosphere, and inert atmospheres such as argon, neon, helium and nitrogen can be cited. When using any atmosphere, the heating time is preferably set to be above 1 minute and below 3 hours, and more preferably to be set to be above 3 minutes and below 2 hours, with heating being carried out within the above-mentioned temperature range.

以此方式獲得之導電膜係藉由本發明之銅粉之燒結而獲得,因此於在相對低溫之條件下進行燒結之情形時,亦能夠充分進行燒結。又,在燒結時,構成銅粉之銅粒子於低溫下亦會熔融,因此能夠增大銅粒子彼此、或銅粒子與基材之表面之接觸面積,結果,與接合對象物之密接性較高,且能夠高效率地形成緻密之燒結結構。進而,所獲得之導電膜之連續性、緻密性及導電可靠性較高。The conductive film obtained in this way is obtained by sintering the copper powder of the present invention, so it can be fully sintered even when sintering is performed under relatively low temperature conditions. In addition, during sintering, the copper particles constituting the copper powder will also melt at low temperatures, so the contact area between the copper particles or between the copper particles and the surface of the substrate can be increased, resulting in a higher adhesion with the bonding object and a dense sintered structure can be formed efficiently. Furthermore, the continuity, density and conductive reliability of the obtained conductive film are higher.

以上,對於本發明基於其較佳實施方式進行了說明,但本發明不限於上述實施方式。例如,本發明之銅粉亦可於發揮預期效果之範圍內包含除銅粒子A及銅粒子B以外之銅粒子。The present invention has been described above based on its preferred embodiments, but the present invention is not limited to the above embodiments. For example, the copper powder of the present invention may also contain copper particles other than copper particles A and copper particles B within the range of exerting the expected effect.

本發明之上述實施方式包含以下技術思想。 [1]一種銅粉,其包含以下之銅粒子A及銅粒子B,且 相對於銅粒子A與銅粒子B之合計,銅粒子A之含有比率為60質量%以上99質量%以下,銅粒子B之含有比率為1質量%以上40質量%以下, [銅粒子A] 該銅粒子具備包含銅之核心粒子、及被覆該核心粒子之表面之被覆層, 上述被覆層由脂肪族有機酸之銅鹽形成,且 該銅粒子之一次粒徑為0.1 μm以上0.6 μm以下; [銅粒子B] 該銅粒子根據X射線繞射測定中源自銅之(111)面之峰之半值寬並藉由謝樂公式所求出之第1微晶尺寸S1相對於根據BET比表面積所算出之BET直徑B的比(S1/B)為0.23以下, 上述第1微晶尺寸S1相對於根據X射線繞射測定中源自銅之(220)面之峰之半值寬並藉由謝樂公式所求出之第2微晶尺寸S2的比(S1/S2)為1.35以下,且 該銅粒子之一次粒徑為0.1 μm以上2.0 μm以下。 [2]如[1]中所記載之銅粉,其中銅粒子B之上述第1微晶尺寸S1相對於根據X射線繞射測定中源自銅之(311)面之峰之半值寬並藉由謝樂公式所求出之第3微晶尺寸S3的比(S1/S3)為1.35以下。 [3]如[1]或[2]中所記載之銅粉,其中銅粒子B包含碳元素,且該碳元素之含量為5000 ppm以下。 [4]如[1]至[3]中任一項所記載之銅粉,其中銅粒子B包含磷元素,且該磷元素之含量為300 ppm以上。 [5]一種銅漿,其包含如[1]至[4]中任一項所記載之銅粉。 [6]一種導電膜之製造方法,其係將如[5]中所記載之銅漿塗佈於基材而形成塗膜,並對該塗膜進行燒成。 實施例 The above-mentioned implementation method of the present invention includes the following technical ideas. [1] A copper powder, which includes the following copper particles A and copper particles B, and relative to the total of copper particles A and copper particles B, the content ratio of copper particles A is 60 mass% or more and 99 mass% or less, and the content ratio of copper particles B is 1 mass% or more and 40 mass% or less, [Copper particles A] The copper particles have a core particle containing copper and a coating layer covering the surface of the core particle, the coating layer is formed by a copper salt of an aliphatic organic acid, and the primary particle size of the copper particles is 0.1 μm or more and 0.6 μm or less; [Copper particles B] The ratio (S1/B) of the first crystallite size S1 of the copper particle obtained by the Sherlock formula based on the half-value width of the peak originating from the (111) plane of copper in the X-ray diffraction measurement to the BET diameter B calculated based on the BET specific surface area is 0.23 or less, the ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 obtained by the Sherlock formula based on the half-value width of the peak originating from the (220) plane of copper in the X-ray diffraction measurement is 1.35 or less, and the primary particle size of the copper particle is 0.1 μm or more and 2.0 μm or less. [2] The copper powder as described in [1], wherein the ratio (S1/S3) of the first crystallite size S1 of the copper particle B to the third crystallite size S3 calculated by the Scherrer equation based on the half width of the peak originating from the (311) plane of copper in X-ray diffraction measurement is 1.35 or less. [3] The copper powder as described in [1] or [2], wherein the copper particle B contains carbon element, and the content of the carbon element is 5000 ppm or less. [4] The copper powder as described in any one of [1] to [3], wherein the copper particle B contains phosphorus element, and the content of the phosphorus element is 300 ppm or more. [5] A copper slurry comprising the copper powder as described in any one of [1] to [4]. [6] A method for manufacturing a conductive film, comprising applying the copper slurry described in [5] to a substrate to form a coating, and then firing the coating. Example

以下,藉由實施例更加詳細地對本發明進行說明。然而,本發明之範圍不限於該實施例。除非特別說明,否則「%」意指「質量%」。The present invention is described in more detail below by way of examples. However, the scope of the present invention is not limited to the examples. Unless otherwise specified, "%" means "mass %".

於以下實施例及比較例中,使用銅粒子A-1、銅粒子A-2及銅粒子B-1至B-3作為銅粒子。該等中之銅粒子A-2使用日本專利特開2015-168878號公報中所記載之球狀銅粒子。 其他銅粒子係藉由以下方法製造。 In the following embodiments and comparative examples, copper particles A-1, copper particles A-2, and copper particles B-1 to B-3 are used as copper particles. Among them, copper particles A-2 use spherical copper particles described in Japanese Patent Publication No. 2015-168878. Other copper particles are manufactured by the following method.

[銅粒子A-1之製造] 按照日本專利特開2015-168878號公報之實施例1中所記載之方法,製造未施加表面處理劑之球狀核心粒子(銅:100質量%)分散於水中而成之漿料。藉由旋轉過濾器將該漿料於25℃下洗淨30分鐘,獲得經洗淨處理之核心粒子之漿料。洗淨後之導電率為1.0 mS,具有球狀之形狀。又,漿料中之包含銅之核心粒子之含量為1000 g(10質量%)。 [Manufacturing of copper particles A-1] According to the method described in Example 1 of Japanese Patent Publication No. 2015-168878, a slurry was prepared by dispersing spherical core particles (copper: 100 mass%) without applying a surface treatment agent in water. The slurry was washed at 25°C for 30 minutes by a rotary filter to obtain a slurry of washed core particles. The conductivity after washing was 1.0 mS, and the shape was spherical. In addition, the content of the core particles containing copper in the slurry was 1000 g (10 mass%).

繼而,將經洗淨處理之核心粒子之漿料加熱至50℃,於該狀態下,瞬時添加使17 g之月桂酸銅(II)溶解於4 L之異丙醇中而成之溶液作為表面處理劑,於50℃下攪拌1小時。其後,藉由過濾進行固液分離,以固形物成分獲得於核心粒子之表面形成有脂肪族有機酸之銅鹽之被覆層之銅粒子。所獲得之銅粒子之表面處理劑之含量以碳原子換算為0.7質量%。 繼而,對於銅粒子A-1及A-2,進行以下評價。 Next, the slurry of the washed core particles was heated to 50°C, and in this state, a solution of 17 g of copper laurate (II) dissolved in 4 L of isopropanol was instantly added as a surface treatment agent, and stirred at 50°C for 1 hour. Thereafter, solid-liquid separation was performed by filtration, and copper particles having a coating layer of copper salt of an aliphatic organic acid formed on the surface of the core particles were obtained as solid components. The content of the surface treatment agent of the obtained copper particles was 0.7% by mass in terms of carbon atoms. Next, the following evaluations were performed on copper particles A-1 and A-2.

[一次粒子之平均圖像解析直徑之測定] 銅粒子之一次粒子之平均圖像解析直徑係藉由上述方法進行測定。將結果示於以下表1。 [Measurement of the average image resolution diameter of primary particles] The average image resolution diameter of primary particles of copper particles was measured by the above method. The results are shown in Table 1 below.

[基於BET比表面積之BET直徑A之計算] 首先,藉由上述測定方法,基於BET單點法測定銅粒子A-1及A-2之比表面積,基於該比表面積算出BET直徑A。將結果示於表1。 [Calculation of BET diameter A based on BET specific surface area] First, the specific surface areas of copper particles A-1 and A-2 were measured by the BET single point method using the above-mentioned measurement method, and the BET diameter A was calculated based on the specific surface areas. The results are shown in Table 1.

[減少10%質量時之溫度之評價] 在上述條件下測定於自25℃加熱至1000℃時之熱重量分析中,質量減少值相對於500℃下之質量減少值之比率成為10%時之溫度。將結果示於表1。 [Evaluation of the temperature at which the mass decreases by 10%] In the thermogravimetric analysis conducted under the above conditions when heating from 25°C to 1000°C, the temperature at which the mass decrease becomes 10% relative to the mass decrease at 500°C is determined. The results are shown in Table 1.

[紅外線吸收峰之評價] 對於銅粒子A-1及A-2,藉由上述方法進行基於紅外光譜法之測定。將1504 cm -1以上1514 cm -1以下、及1584 cm -1以上1596 cm -1以下之各範圍作為對象,分別獨立地將具有紅外線吸收峰者評價為「有」,將不具有紅外線吸收峰者評價為「無」。將結果示於表1。 [Evaluation of infrared absorption peak] Copper particles A-1 and A-2 were measured by infrared spectroscopy using the above method. The ranges from 1504 cm -1 to 1514 cm -1 and from 1584 cm -1 to 1596 cm -1 were taken as the objects, and those with infrared absorption peaks were evaluated as "yes", and those without infrared absorption peaks were evaluated as "no". The results are shown in Table 1.

[表1] 銅粒子 銅粒子A-1 銅粒子A-2 表面處理劑 種類 月桂酸銅(II) 月桂酸 碳原子換算之添加量[%] 1.7 1.3 BET直徑A[μm] 0.21 0.22 一次粒子之平均圖像解析直徑(一次粒徑)[μm] 0.18 0.19 有無紅外線吸收峰 1504~1514 cm -1 1584~1596 cm -1 10%質量減少溫度[℃] 187 246 [Table 1] Copper particles Copper particles A-1 Copper particles A-2 Surface treatment agent Type Copper(II) laurate Lauric acid Added amount based on carbon atom conversion [%] 1.7 1.3 BET diameter A[μm] 0.21 0.22 Average image resolution diameter of primary particles (primary particle size) [μm] 0.18 0.19 Is there an infrared absorption peak? 1504~1514 cm -1 have have 1584~1596 cm -1 without have 10% mass reduction temperature [℃] 187 246

[銅粒子B-1之製造] <第1還原步驟> 向裝有5.0升之溫純水及5.0升之甲醇之不鏽鋼製罐中加入作為銅源之2.5 kg之乙酸銅一水合物及作為多磷酸類之8.0 g之三聚磷酸鈉(相對於銅元素1莫耳之莫耳比率:0.002),於液溫25℃下攪拌30分鐘,使兩者溶解。 繼而,將235.0 g之肼(相對於銅元素1莫耳之莫耳比率:1.55)添加於溶液中後,於液溫25℃之非加熱條件下持續攪拌30分鐘,於溶液中生成氧化亞銅之微粒子。生成氧化亞銅後,將反應液攪拌30分鐘。 [Production of copper particles B-1] <First reduction step> 2.5 kg of copper acetate monohydrate as a copper source and 8.0 g of sodium tripolyphosphate (molar ratio relative to 1 mol of copper element: 0.002) as a polyphosphoric acid were added to a stainless steel tank containing 5.0 liters of warm pure water and 5.0 liters of methanol, and stirred for 30 minutes at a liquid temperature of 25°C to dissolve both. Next, 235.0 g of hydrazine (molar ratio relative to 1 mol of copper element: 1.55) was added to the solution, and the solution was stirred for 30 minutes without heating at a liquid temperature of 25°C to generate microparticles of cuprous oxide in the solution. After the generation of cuprous oxide, the reaction solution was stirred for 30 minutes.

<第2還原步驟> 繼而,向第1還原步驟中之反應液中添加25%NaOH水溶液,將溶液之pH值調整為7.0。其後,將液溫加熱至40℃,歷時10分鐘向溶液中定量地逐次添加1900.0 g之肼(相對於銅元素1莫耳之莫耳比率:3.0),進行第2還原步驟。其後,進行冷卻以使液溫成為30℃,持續攪拌150分鐘,獲得氧化亞銅之微粒子被還原為金屬銅之銅粒子。 <Second reduction step> Then, a 25% NaOH aqueous solution was added to the reaction solution in the first reduction step to adjust the pH value of the solution to 7.0. Thereafter, the liquid temperature was heated to 40°C, and 1900.0 g of hydrazine (molar ratio relative to 1 mole of copper element: 3.0) was quantitatively added to the solution over 10 minutes to perform the second reduction step. Thereafter, the solution was cooled to a liquid temperature of 30°C, and stirring was continued for 150 minutes to obtain copper particles in which the cuprous oxide microparticles were reduced to metallic copper.

對以此方式獲得之銅粒子之水性漿料進行傾析洗淨,進行洗淨直至電導率成為1.0 mS為止(洗淨漿料)。 將經洗淨處理之核心粒子之漿料加熱至50℃,於該狀態下,瞬時添加使4 g之月桂酸銅(II)溶解於1 L之異丙醇中而成之溶液作為表面處理劑,於50℃下攪拌1小時。其後,藉由過濾進行固液分離,以固形物成分獲得於核心粒子之表面形成有脂肪族有機酸之銅鹽之被覆層之銅粒子。其後,進行乾燥,獲得包含銅粒子之集合體之銅粉。所獲得之銅粒子之銅元素含量超過98質量%,具有扁平狀之形狀。 The aqueous slurry of the copper particles obtained in this way was washed by decanting until the conductivity reached 1.0 mS (washed slurry). The washed core particle slurry was heated to 50°C, and in this state, a solution prepared by dissolving 4 g of copper laurate (II) in 1 L of isopropanol was instantly added as a surface treatment agent, and stirred at 50°C for 1 hour. Thereafter, solid-liquid separation was performed by filtration, and copper particles having a coating layer of copper salt of an aliphatic organic acid formed on the surface of the core particles were obtained as solid components. Thereafter, drying was performed to obtain copper powder containing aggregates of copper particles. The copper content of the obtained copper particles exceeds 98% by mass and they are flat in shape.

[銅粒子B-2之製造] 除將三聚磷酸鈉之添加量設為24 g(相對於銅元素1莫耳之莫耳比率:0.006)以外,以與銅粒子B-1相同之方式進行製造,獲得銅粒子B-2。所獲得之銅粒子之銅元素含量超過98質量%,具有扁平狀之形狀。 [Manufacturing of copper particles B-2] Copper particles B-2 were manufactured in the same manner as copper particles B-1, except that the amount of sodium tripolyphosphate added was set to 24 g (molar ratio relative to 1 mole of copper element: 0.006). The copper particles obtained had a copper element content of more than 98% by mass and had a flat shape.

[銅粒子B-3之製造] 使4 kg之硫酸銅五水合物及120 g之胺基乙酸溶解於水中,製作8 L之液溫70℃之銅鹽水溶液。然後,一面攪拌該水溶液,一面歷時約5分鐘以一定速度添加6.6 kg之25質量%氫氧化鈉溶液。繼而,於液溫70℃下攪拌60分鐘,進行熟化直至溶液顏色完全成為黑色為止,生成氧化銅。其後,放置30分鐘,添加1.5 kg之葡萄糖,進行1小時熟化,藉此將氧化銅還原為氧化亞銅。進而,歷時5分鐘定量地添加1 kg之水合肼,還原氧化亞銅,藉此製成金屬銅,生成銅粉漿料。對所獲得之銅粉漿料進行過濾,利用純水充分洗淨,再次過濾後,進行乾燥。使用日本專利4227373號所記載之扁平化方法使所獲得之Cu粉塑性變形,藉此使大致球形之銅粉成為扁平狀之銅粉。此時,所使用之顆粒直徑不為0.7 mm,而變更為0.2 mm。 [Production of copper particles B-3] 4 kg of copper sulfate pentahydrate and 120 g of aminoacetic acid were dissolved in water to prepare 8 L of copper salt aqueous solution at a liquid temperature of 70°C. Then, while stirring the aqueous solution, 6.6 kg of 25 mass% sodium hydroxide solution was added at a constant rate over a period of about 5 minutes. Then, the solution was stirred at a liquid temperature of 70°C for 60 minutes and aged until the solution color completely turned black to generate copper oxide. Thereafter, the solution was allowed to stand for 30 minutes, 1.5 kg of glucose was added, and the solution was aged for 1 hour to reduce the copper oxide to cuprous oxide. Furthermore, 1 kg of hydrazine hydrate was quantitatively added over a period of 5 minutes to reduce the cuprous oxide to produce metallic copper and generate copper powder slurry. The obtained copper powder slurry is filtered, washed thoroughly with pure water, filtered again, and then dried. The obtained Cu powder is plastically deformed using the flattening method described in Japanese Patent No. 4227373, thereby converting the roughly spherical copper powder into a flat copper powder. At this time, the particle diameter used is not 0.7 mm, but changed to 0.2 mm.

繼而,對銅粒子B-1至B-3進行以下評價。Next, the copper particles B-1 to B-3 were subjected to the following evaluations.

[一次粒子之平均圖像解析直徑之測定] 關於銅粒子B-1至B-3,各銅粒子之一次粒子之平均圖像解析直徑係藉由上述方法進行測定。將結果示於表2。 [Measurement of the average image resolution diameter of primary particles] Regarding copper particles B-1 to B-3, the average image resolution diameter of primary particles of each copper particle was measured by the above method. The results are shown in Table 2.

[基於BET比表面積之BET直徑B之計算] 利用與銅粒子A之BET直徑A相同之方法測定銅粒子B-1至B-3之BET直徑B。將結果示於以下表2。 [Calculation of BET diameter B based on BET specific surface area] The BET diameter B of copper particles B-1 to B-3 was measured using the same method as the BET diameter A of copper particle A. The results are shown in Table 2 below.

[碳元素及磷元素之含量之測定] 關於銅粒子B-1至B-3之銅粒子中之碳元素之含量,使用碳-硫分析裝置(LECO Japan有限責任公司製造之CS844),將0.50 g之銅粒子B-1至B-3之任一者加入至磁性坩堝中,以載氣為氧氣(純度:99.5%)、分析時間為40秒進行測定。將測定結果示於以下表2。 關於銅粒子中之磷元素之含量,將使1.00 g之銅粒子B-1至B-3之任一者溶解於50 mL之15%硝酸水溶液中而成之溶解液導入至ICP發射光譜分析裝置(Hitachi High-Tech Science股份有限公司製造之PS3520VDDII)中進行測定。將測定結果示於以下表2。 [Determination of the content of carbon and phosphorus] Regarding the content of carbon in copper particles B-1 to B-3, 0.50 g of any one of copper particles B-1 to B-3 was added to a magnetic crucible using a carbon-sulfur analyzer (CS844 manufactured by LECO Japan Co., Ltd.), and the analysis time was 40 seconds with oxygen (purity: 99.5%) as carrier gas. The measurement results are shown in Table 2 below. Regarding the content of phosphorus in copper particles, 1.00 g of any one of copper particles B-1 to B-3 was dissolved in 50 mL of 15% nitric acid aqueous solution and the solution was introduced into an ICP emission spectrometer (PS3520VDDII manufactured by Hitachi High-Tech Science Co., Ltd.) for measurement. The measurement results are shown in Table 2 below.

[微晶尺寸之測定] 利用以下方法對銅粒子B-1至B-3進行測定。首先,使用銅粒子B-1至B-3之洗淨漿料,製備20質量%水性漿料。其後,向加熱至50℃之該漿料中一次添加作為表面被覆處理劑之溶解有12 g之月桂酸銅之異丙醇溶液,攪拌1小時。其後,藉由過濾進行固液分離而獲得固形物成分,對該固形物成分進行真空乾燥,使用75 μm之網眼之篩對獲得實施了表面被覆處理之銅粒子之銅粉進行分級,將其篩下成分作為樣品。將該樣品填充於樣品架,使用X射線繞射裝置(Rigaku股份有限公司製造之Ultima IV),於以下條件下進行測定。 其後,將繞射峰中之相當於銅之(220)面、(111)面或(311)面之位置之主峰作為對象,基於該峰之半值寬之全寬,使用上述謝樂公式,算出各微晶尺寸S1至S3、以及S1/S2及S1/S3比。又,根據所獲得之各微晶尺寸,算出S1/B比。將結果示於以下表2。 [Determination of crystallite size] The copper particles B-1 to B-3 were measured using the following method. First, a 20 mass% aqueous slurry was prepared using the washed slurry of the copper particles B-1 to B-3. Then, an isopropyl alcohol solution containing 12 g of copper laurate was added to the slurry heated to 50°C as a surface coating treatment agent, and stirred for 1 hour. Thereafter, the solid-liquid separation was performed by filtration to obtain a solid component, which was vacuum dried, and the copper powder of the copper particles subjected to the surface coating treatment was graded using a sieve with a mesh size of 75 μm, and the sieved component was used as a sample. The sample was placed in a sample holder and measured using an X-ray diffraction device (Ultima IV manufactured by Rigaku Co., Ltd.) under the following conditions. Thereafter, the main peak corresponding to the position of the (220) plane, (111) plane or (311) plane of copper in the diffraction peak was taken as the object, and based on the full width at half maximum of the peak, the above-mentioned Scherrer formula was used to calculate the crystallite sizes S1 to S3, as well as the S1/S2 and S1/S3 ratios. In addition, the S1/B ratio was calculated based on the obtained crystallite sizes. The results are shown in Table 2 below.

<X射線繞射測定條件> ・管球:CuKα射線 ・管電壓:40 kV ・管電流:50 mA ・測定繞射角:2θ=20~100° ・測定步長:0.01° ・收集時間:3 sec/步 ・受光狹縫寬度:0.3 mm ・發散縱向限制狹縫寬度:10 mm ・檢測器:高速一維X射線檢測器 D/teX Ultra250 <X-ray diffraction measurement conditions> ・Tube: CuKα ray ・Tube voltage: 40 kV ・Tube current: 50 mA ・Measurement diffraction angle: 2θ=20~100° ・Measurement step: 0.01° ・Collection time: 3 sec/step ・Light receiving slit width: 0.3 mm ・Divergence longitudinal limiting slit width: 10 mm ・Detector: High-speed one-dimensional X-ray detector D/teX Ultra250

<X射線繞射用試樣之製備方法> 將測定對象之銅粉鋪滿測定架,以銅粉之厚度為0.5 mm且變得平滑之方式,使用玻璃板進行平滑化。 <Preparation method of samples for X-ray diffraction> The copper powder to be measured is spread all over the measuring frame, and smoothed using a glass plate until the copper powder thickness is 0.5 mm and becomes smooth.

使用於上述測定條件下獲得之X射線繞射圖案,於以下條件下,利用解析用軟體進行解析。解析時,峰寬之修正係使用LaB6值進行修正。微晶尺寸係使用峰之半值寬之全寬及謝樂常數(0.94)算出。The X-ray diffraction pattern obtained under the above measurement conditions was analyzed using the analysis software under the following conditions. During the analysis, the peak width was corrected using the LaB6 value. The crystallite size was calculated using the full width of the peak half-value width and the Scherrer constant (0.94).

<測定資料解析條件> ・解析軟體:Rigaku製造之PDXL2 ・平滑處理:高斯函數,平滑化參數=10 ・背景去除:擬合方式 ・Kα2去除:強度比為0.497 ・峰搜索:二次微分法 ・輪廓擬合:FP(Fundamental Parameter,基本參數)法 ・微晶尺寸分佈類型:勞倫茲模型 ・謝樂常數:0.9400 <Measurement data analysis conditions> ・Analysis software: PDXL2 manufactured by Rigaku ・Smoothing: Gaussian function, smoothing parameter = 10 ・Background removal: Fitting method ・Kα2 removal: Intensity ratio is 0.497 ・Peak search: Secondary differential method ・Profile fitting: FP (Fundamental Parameter) method ・Crystalline size distribution type: Lorenz model ・Scherrer constant: 0.9400

再者,進行解析時所使用之X射線繞射圖案之峰如下所示。以下所示之密勒指數與上述銅之結晶面同義。 ・位於2θ=71°~76°附近之以密勒指數(220)賦予指數之峰。 ・位於2θ=40°~45°附近之以密勒指數(111)賦予指數之峰。 ・位於2θ=87.5°~92.5°附近之以密勒指數(311)賦予指數之峰。 Furthermore, the peaks of the X-ray diffraction pattern used for the analysis are shown below. The Miller indices shown below are synonymous with the above-mentioned copper crystal planes. ・The peak indexed by the Miller index (220) located near 2θ=71°~76°. ・The peak indexed by the Miller index (111) located near 2θ=40°~45°. ・The peak indexed by the Miller index (311) located near 2θ=87.5°~92.5°.

[表2] 銅粒子 銅粒子B-1 銅粒子B-2 銅粒子B-3 BET直徑B[μm] 0.24 0.35 0.28 一次粒子之平均圖像解析直徑[μm] 0.32 0.44 0.42 (111)面微晶尺寸S1[nm] 35 32.8 28.8 (220)面微晶尺寸S2[nm] 34.3 29.6 18 (311)面微晶尺寸S3[nm] 30.4 30.4 12.9 S1/B比 0.14 0.09 0.10 S1/S2比 1.02 1.11 1.60 S1/S3比 1.15 1.08 2.23 碳元素之含量[ppm] 4000 2700 2000 磷元素之含量[ppm] 335 360 <10 [Table 2] Copper particles Copper particles B-1 Copper particles B-2 Copper particles B-3 BET diameter B[μm] 0.24 0.35 0.28 Average image resolution diameter of primary particles [μm] 0.32 0.44 0.42 (111) plane crystallite size S1[nm] 35 32.8 28.8 (220) plane crystallite size S2[nm] 34.3 29.6 18 (311) plane crystallite size S3[nm] 30.4 30.4 12.9 S1/B ratio 0.14 0.09 0.10 S1/S2 Ratio 1.02 1.11 1.60 S1/S3 Ratio 1.15 1.08 2.23 Carbon content [ppm] 4000 2700 2000 Phosphorus content [ppm] 335 360 <10

[實施例1至7及9以及比較例1至7] 按照以下表3所示之比率將銅粒子A-1、A-2及B-1至B-3混合,獲得各實施例及各比較例之銅粉。具體而言,以表3所示之比率向100 mL容器中加入各銅粒子,繼而,使用小型球磨機(Asahi Rika製造之AV-1)進行混合,藉此獲得各實施例及各比較例之銅粉。混合係以100 rpm進行1小時。 使用三輥混練機將以上述方式獲得之銅粉及數量平均分子量為200之聚乙二醇混合,獲得包含85質量%之銅粉之銅漿。 再者,表3中示出了各銅粒子成分相對於銅粒子之合計100質量份之含量。又,「固形物成分濃度」表示銅粉之質量相對於銅漿整體之質量之比率。 [Examples 1 to 7 and 9 and Comparative Examples 1 to 7] Copper particles A-1, A-2 and B-1 to B-3 were mixed in the ratios shown in Table 3 below to obtain copper powders of each example and each comparative example. Specifically, each copper particle was added to a 100 mL container in the ratio shown in Table 3, and then mixed using a small ball mill (AV-1 manufactured by Asahi Rika) to obtain copper powders of each example and each comparative example. The mixing was performed at 100 rpm for 1 hour. The copper powder obtained in the above manner and polyethylene glycol having a number average molecular weight of 200 were mixed using a three-roll mixer to obtain a copper slurry containing 85% by mass of copper powder. Furthermore, Table 3 shows the content of each copper particle component relative to the total mass of 100 parts by mass of copper particles. In addition, "solid content concentration" represents the ratio of the mass of copper powder to the mass of the entire copper slurry.

[漿液印刷性之評價] 基於以下評價基準對各實施例及各比較例之漿液印刷性進行評價。 <漿液印刷性之評價基準> 合格:能夠塗敷於以縱2 cm、橫1 cm之大小遮蔽之玻璃板上。 不合格:於上述條件下無法形成具有連續性之塗膜。 [Evaluation of slurry printability] The slurry printability of each embodiment and each comparative example was evaluated based on the following evaluation criteria. <Evaluation criteria of slurry printability> Acceptable: Can be applied to a glass plate shielded with a size of 2 cm in length and 1 cm in width. Unacceptable: Cannot form a continuous coating film under the above conditions.

[導電膜之製造] 將各實施例及各比較例之銅漿塗佈於玻璃基板上,將該基板於氮氣氛圍下在190℃下燒成10分鐘,於玻璃基板上形成導電膜。 所獲得之導電膜為縱2 cm、橫1 cm、厚度30 μm,對其等進行以下評價。 [Manufacturing of conductive film] The copper slurry of each embodiment and each comparative example was coated on a glass substrate, and the substrate was fired at 190°C for 10 minutes in a nitrogen atmosphere to form a conductive film on the glass substrate. The obtained conductive film was 2 cm in length, 1 cm in width, and 30 μm in thickness, and the following evaluation was performed on it.

[製膜強度之評價] 基於以下評價基準對各導電膜之製膜強度進行評價。 <製膜強度之評價基準> 高:對導電膜表面進行刮擦,手不沾粉。 低:對導電膜表面進行刮擦,手會沾粉。 [Evaluation of film strength] The film strength of each conductive film was evaluated based on the following evaluation criteria. <Evaluation criteria of film strength> High: No powder will be attached to the hand when the conductive film surface is scratched. Low: Powder will be attached to the hand when the conductive film surface is scratched.

[導電膜之電阻率之測定] 使用電阻率計(Mitsubishi Chemical Analytech股份有限公司製造之Loresta-GP MCP-T610)測定各導電膜之電阻率。對測定對象之導電膜進行3次測定,將其算術平均值作為電阻率(μΩ・cm)。電阻率越低,表示導電膜之電阻越小,較佳為50 μΩ・cm以下。將結果示於以下表3。 [Measurement of the resistivity of the conductive film] The resistivity of each conductive film was measured using a resistivity meter (Loresta-GP MCP-T610 manufactured by Mitsubishi Chemical Analytech Co., Ltd.). The conductive film to be measured was measured three times, and the arithmetic average was taken as the resistivity (μΩ・cm). The lower the resistivity, the smaller the resistance of the conductive film, preferably less than 50 μΩ・cm. The results are shown in Table 3 below.

[導電膜之厚度評價] 關於Cu漿液之燒成膜之厚度,使用數位測長機(Nikon公司製造之MFC-101),測定導電膜及玻璃基板之厚度與僅玻璃基板之厚度,求出該等厚度之差量作為導電膜之厚度。 [Evaluation of the thickness of the conductive film] Regarding the thickness of the film formed by the calcination of the Cu slurry, a digital length measuring machine (MFC-101 manufactured by Nikon) was used to measure the thickness of the conductive film and the glass substrate and the thickness of the glass substrate alone, and the difference between these thicknesses was calculated as the thickness of the conductive film.

[導電膜之表面粗糙度Ra之測定] 關於各導電膜之表面粗糙度(平均粗糙度Ra),使用表面粗糙度、輪廓形狀測定機(東京精密公司製造之SURFCOM 130A),對各導電膜測定3處,求出所獲得之值之平均值。將結果示於表3。 就電阻之觀點而言,表面粗糙度Ra較佳為2.0以下。又,導電膜之表面粗糙度Ra較小意指該導電膜之緻密性較高。 [Measurement of surface roughness Ra of conductive film] The surface roughness (average roughness Ra) of each conductive film was measured at 3 locations using a surface roughness and profile shape measuring machine (SURFCOM 130A manufactured by Tokyo Seimitsu Co., Ltd.), and the average value of the obtained values was calculated. The results are shown in Table 3. From the perspective of resistance, the surface roughness Ra is preferably 2.0 or less. In addition, a smaller surface roughness Ra of a conductive film means that the conductive film has a higher density.

[接合強度之測定] 對於單面經#800之研磨片研磨之5 mm見方之銅片,以2 mm×2 mm×30 μm之形狀將銅漿網版印刷至研磨側,以研磨面成為接合面之方式載置單面經#800之研磨片研磨之3 mm見方之銅片。其後,一面使用加壓燒成機(井元製作所製造之IMC-1AB6),以5 MPa進行加壓,一面於氮氣氛圍下在200℃下燒成30分鐘,使其接合。對於所獲得之接合體,使用黏結強度試驗機(XYZTEC公司製造之Condor Sigma)測定接合強度。 將上述測定實施3次,算出接合強度之最大值及平均值。將其示於表3。於表3中,接合強度係以比較例3之接合強度成為1.0之方式進行標準化之值。又,於表3中,「-」表示未測定。 [Measurement of bonding strength] For a 5 mm square copper sheet polished on one side with a #800 polishing sheet, a copper paste was screen-printed on the polished side in a shape of 2 mm×2 mm×30 μm, and a 3 mm square copper sheet polished on one side with a #800 polishing sheet was placed so that the polished surface became the bonding surface. Thereafter, a pressurized sintering machine (IMC-1AB6 manufactured by Imoto Seisakusho) was used to pressurize at 5 MPa while sintering at 200°C for 30 minutes in a nitrogen atmosphere to bond the obtained bonded body. The bonding strength of the obtained bonded body was measured using a bonding strength tester (Condor Sigma manufactured by XYZTEC). The above measurement was performed 3 times, and the maximum and average values of the bonding strength were calculated. They are shown in Table 3. In Table 3, the bonding strength is a value standardized in such a way that the bonding strength of Comparative Example 3 is 1.0. In Table 3, "-" means not measured.

[表3]    銅漿組成 評價結果 銅粒子A-1[質量份] 銅粒子A-2[質量份] 銅粒子B-1[質量份] 銅粒子B-2[質量份] 銅粒子B-3[質量份] 固形物成分濃度[%] 漿液印刷性 製膜強度 導電膜之厚度[μm] 電阻率[μΩ・cm] 表面粗糙度Ra[μm] 接合強度(標準化值) 最大值 平均值 實施例1 85 0 0 15 0 85 合格 31 37 1.5 -    實施例2 80 0 0 20 0 85 合格 29 36 1.8 1.6 1.3 實施例3 75 0 0 25 0 85 合格 33 44 1.4 - - 實施例4 70 0 0 30 0 85 合格 26 34 0.8 - - 實施例5 60 0 0 40 0 85 合格 24 32 1.9 - - 實施例6 80 0 20 0 0 85 合格 30 38 0.7 - - 實施例7 60 0 40 0 0 85 合格 24 42 0.8 - - 實施例9 95 0 0 5 0 85 合格 27 20 - 1.5 1.5 比較例1 80 0 0 0 20 85 合格 43 73917 0.9 - - 比較例2 0 80 0 20 0 85 合格 29 超過測定上限 無法測定 - - 比較例3 100 0 0 0 0 85 合格 35 58 4.0 1.0 1.0 比較例4 0 100 0 0 0 85 合格 35 超過測定上限 無法測定 - - 比較例5 0 0 100 0 0 85 合格 25 170 1.1 - - 比較例6 0 0 0 100 0 85 合格 26 384 1.8 0.7 0.5 比較例7 0 0 0 0 100 85 合格 42 超過測定上限 無法測定 - - [table 3] Copper slurry composition Evaluation results Copper particles A-1 [parts by mass] Copper particles A-2 [parts by mass] Copper particles B-1 [mass parts] Copper particles B-2 [mass parts] Copper particles B-3 [mass parts] Solid content concentration [%] Slurry printability Film strength Conductive film thickness [μm] Resistivity [μΩ・cm] Surface roughness Ra[μm] Bond strength (normalized value) Maximum average value Embodiment 1 85 0 0 15 0 85 qualified high 31 37 1.5 - Embodiment 2 80 0 0 20 0 85 qualified high 29 36 1.8 1.6 1.3 Embodiment 3 75 0 0 25 0 85 qualified high 33 44 1.4 - - Embodiment 4 70 0 0 30 0 85 qualified high 26 34 0.8 - - Embodiment 5 60 0 0 40 0 85 qualified high twenty four 32 1.9 - - Embodiment 6 80 0 20 0 0 85 qualified high 30 38 0.7 - - Embodiment 7 60 0 40 0 0 85 qualified high twenty four 42 0.8 - - Embodiment 9 95 0 0 5 0 85 qualified high 27 20 - 1.5 1.5 Comparison Example 1 80 0 0 0 20 85 qualified high 43 73917 0.9 - - Comparison Example 2 0 80 0 20 0 85 qualified Low 29 Exceeding the upper limit of measurement Unable to determine - - Comparison Example 3 100 0 0 0 0 85 qualified high 35 58 4.0 1.0 1.0 Comparison Example 4 0 100 0 0 0 85 qualified Low 35 Exceeding the upper limit of measurement Unable to determine - - Comparison Example 5 0 0 100 0 0 85 qualified high 25 170 1.1 - - Comparative Example 6 0 0 0 100 0 85 qualified high 26 384 1.8 0.7 0.5 Comparison Example 7 0 0 0 0 100 85 qualified Low 42 Exceeding the upper limit of measurement Unable to determine - -

如表3所示,儘管各實施例之導電膜均藉由190℃之相對低溫下之燒成而製造,但仍具有較低之電阻率。由此可知,各實施例所使用之銅粉具有較低之燒結溫度。又,亦可知各實施例之導電膜由於漿液印刷性優異,且表面粗糙度Ra較低,故而具有良好之連續性及緻密性。 又,由實施例2與比較例1之比較可知,即便為相同之扁平狀銅粒子,於使用銅粒子B-3等經機械性扁平化之銅粒子之情形時,銅粉之燒結溫度亦上升,導電膜之電阻率亦變高。 As shown in Table 3, although the conductive films of each embodiment are manufactured by sintering at a relatively low temperature of 190°C, they still have a relatively low resistivity. It can be seen that the copper powder used in each embodiment has a relatively low sintering temperature. In addition, it can be seen that the conductive films of each embodiment have good continuity and density due to excellent slurry printing properties and low surface roughness Ra. In addition, from the comparison between Example 2 and Comparative Example 1, it can be seen that even if the same flat copper particles are used, when mechanically flattened copper particles such as copper particles B-3 are used, the sintering temperature of the copper powder also increases, and the resistivity of the conductive film also becomes higher.

[實施例8、比較例8及比較例9] 如以下表4所示,使用三輥混練機將銅粉與數量平均分子量為200之聚乙二醇混合時,變更銅粉與聚乙二醇之混合比率,製作包含90質量%之銅粉之銅漿,除此以外,以與實施例2、比較例3及比較例5相同之方式,製作實施例8、比較例8、及比較例9之銅漿及其導電膜。對於該等銅漿及其導電膜,進行與實施例1至7及比較例1至7相同之評價。將結果示於表4。 [Example 8, Comparative Example 8 and Comparative Example 9] As shown in Table 4 below, when copper powder and polyethylene glycol with a number average molecular weight of 200 were mixed using a three-roll mixer, the mixing ratio of copper powder and polyethylene glycol was changed to prepare a copper slurry containing 90% by mass of copper powder. In addition, the copper slurries of Example 8, Comparative Example 8 and Comparative Example 9 and their conductive films were prepared in the same manner as in Example 2, Comparative Example 3 and Comparative Example 5. The copper slurries and their conductive films were evaluated in the same manner as in Examples 1 to 7 and Comparative Examples 1 to 7. The results are shown in Table 4.

[表4]    銅漿組成 評價結果 銅粒子A-1[質量份] 銅粒子B-1[質量份] 固形物成分濃度[%] 漿液印刷性 製膜強度 電阻率[μΩ・cm] 表面粗糙度Ra[μm] 實施例2 80 20 85 合格 36 1.8 實施例8 80 20 90 合格 33 2.6 比較例3 100 0 85 合格 58 4.0 比較例8 100 0 90 合格 825 3.5 比較例5 0 100 85 合格 170 1.1 比較例9 0 100 90 合格 超過測定上限 3.1 [Table 4] Copper slurry composition Evaluation results Copper particles A-1 [parts by mass] Copper particles B-1 [mass parts] Solid content concentration [%] Slurry printability Film strength Resistivity [μΩ・cm] Surface roughness Ra[μm] Embodiment 2 80 20 85 qualified high 36 1.8 Embodiment 8 80 20 90 qualified high 33 2.6 Comparison Example 3 100 0 85 qualified high 58 4.0 Comparative Example 8 100 0 90 qualified high 825 3.5 Comparison Example 5 0 100 85 qualified high 170 1.1 Comparative Example 9 0 100 90 qualified high Exceeding the upper limit of measurement 3.1

如表4所示,關於包含銅粒子A-1及B-1之兩者之實施例2及8之銅粉,即便於變更了銅漿中之有機溶劑之含量之情形時,導電膜之電阻率及表面粗糙度Ra亦不易受不良影響。另一方面,如比較例8及比較例9所示,可知於使用僅包含銅粒子A-1及B-1之任一者之銅粉之情形時,若將銅漿中之有機溶劑之含量設為10質量%,則尤其是導電膜之電阻率會大幅度上升。 [產業上之可利用性] As shown in Table 4, for the copper powders of Examples 2 and 8 containing both copper particles A-1 and B-1, even when the content of the organic solvent in the copper slurry is changed, the resistivity and surface roughness Ra of the conductive film are not easily adversely affected. On the other hand, as shown in Comparative Examples 8 and 9, when using copper powder containing only one of copper particles A-1 and B-1, if the content of the organic solvent in the copper slurry is set to 10 mass%, the resistivity of the conductive film in particular will increase significantly. [Industrial Applicability]

根據本發明,提供一種能夠製造連續性及緻密性較高之導電膜,且燒結溫度較低之銅粉。According to the present invention, a copper powder is provided which can be used to manufacture a conductive film with high continuity and density and has a low sintering temperature.

Claims (6)

一種銅粉,其包含以下之銅粒子A及銅粒子B,且 相對於銅粒子A與銅粒子B之合計,銅粒子A之含有比率為60質量%以上99質量%以下,銅粒子B之含有比率為1質量%以上40質量%以下, [銅粒子A] 該銅粒子具備包含銅之核心粒子、及被覆該核心粒子之表面之被覆層, 上述被覆層由脂肪族有機酸之銅鹽形成,且 該銅粒子之一次粒徑為0.1 μm以上0.6 μm以下; [銅粒子B] 該銅粒子根據X射線繞射測定中源自銅之(111)面之峰之半值寬並藉由謝樂公式所求出之第1微晶尺寸S1相對於根據BET比表面積所算出之BET直徑B的比(S1/B)為0.23以下, 上述第1微晶尺寸S1相對於根據X射線繞射測定中源自銅之(220)面之峰之半值寬並藉由謝樂公式所求出之第2微晶尺寸S2的比(S1/S2)為1.35以下,且 該銅粒子之一次粒徑為0.1 μm以上2.0 μm以下。 A copper powder comprising the following copper particles A and copper particles B, and relative to the total of copper particles A and copper particles B, the content ratio of copper particles A is 60 mass% or more and 99 mass% or less, and the content ratio of copper particles B is 1 mass% or more and 40 mass% or less, [Copper particles A] The copper particles have a core particle containing copper and a coating layer covering the surface of the core particle, the coating layer is formed by a copper salt of an aliphatic organic acid, and the primary particle size of the copper particles is 0.1 μm or more and 0.6 μm or less; [Copper particles B] The ratio (S1/B) of the first crystallite size S1 of the copper particle obtained by the Sherlock formula based on the half-value width of the peak originating from the (111) plane of copper in the X-ray diffraction measurement to the BET diameter B calculated based on the BET specific surface area is 0.23 or less, the ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 obtained by the Sherlock formula based on the half-value width of the peak originating from the (220) plane of copper in the X-ray diffraction measurement is 1.35 or less, and the primary particle size of the copper particle is 0.1 μm or more and 2.0 μm or less. 如請求項1之銅粉,其中銅粒子B之上述第1微晶尺寸S1相對於根據X射線繞射測定中源自銅之(311)面之峰之半值寬並藉由謝樂公式所求出之第3微晶尺寸S3的比(S1/S3)為1.35以下。The copper powder of claim 1, wherein the ratio (S1/S3) of the first crystallite size S1 of the copper particles B to the third crystallite size S3 obtained by the Sherlock formula based on the half width of the peak originating from the (311) plane of copper in X-ray diffraction measurement is less than 1.35. 如請求項1之銅粉,其中銅粒子B包含碳元素,且該碳元素之含量為5000 ppm以下。The copper powder of claim 1, wherein the copper particles B contain carbon element, and the content of the carbon element is less than 5000 ppm. 如請求項1之銅粉,其中銅粒子B包含磷元素,且該磷元素之含量為300 ppm以上。The copper powder of claim 1, wherein the copper particles B contain phosphorus, and the content of the phosphorus is greater than 300 ppm. 一種銅漿,其包含如請求項1至4中任一項之銅粉。A copper slurry comprising the copper powder as claimed in any one of claims 1 to 4. 一種導電膜之製造方法,其係將如請求項5之銅漿塗佈於基材而形成塗膜,並對該塗膜進行燒成。A method for manufacturing a conductive film comprises applying the copper slurry as claimed in claim 5 on a substrate to form a coating, and then firing the coating.
TW112137528A 2022-09-29 2023-09-28 Copper powder, copper paste containing same, and method for producing conductive film TW202423573A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022157049 2022-09-29
JP2022-157049 2022-09-29

Publications (1)

Publication Number Publication Date
TW202423573A true TW202423573A (en) 2024-06-16

Family

ID=90478056

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112137528A TW202423573A (en) 2022-09-29 2023-09-28 Copper powder, copper paste containing same, and method for producing conductive film

Country Status (4)

Country Link
JP (1) JP7498378B1 (en)
CN (1) CN119816388A (en)
TW (1) TW202423573A (en)
WO (1) WO2024071303A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025070074A1 (en) * 2023-09-28 2025-04-03 古河ケミカルズ株式会社 Method for producing copper powder and method for producing conductive paste

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4227373B2 (en) 2001-08-07 2009-02-18 三井金属鉱業株式会社 Flake copper powder and copper paste using the flake copper powder
JP2007234330A (en) * 2006-02-28 2007-09-13 Tdk Corp Conductor paste and electronic part
KR101671324B1 (en) 2014-02-14 2016-11-02 미쓰이금속광업주식회사 Copper powder
JP5941082B2 (en) * 2014-03-10 2016-06-29 三井金属鉱業株式会社 Copper powder
SG11201906718UA (en) * 2017-03-15 2019-10-30 Hitachi Chemical Co Ltd Metal paste for joints, assembly, production method for assembly, semiconductor device, and production method for semiconductor device
SG11202109544SA (en) * 2019-03-29 2021-10-28 Mitsui Mining & Smelting Co Bonding material and bonded structure
JP7315408B2 (en) * 2019-08-08 2023-07-26 三井金属鉱業株式会社 copper particles

Also Published As

Publication number Publication date
WO2024071303A1 (en) 2024-04-04
CN119816388A (en) 2025-04-11
JPWO2024071303A1 (en) 2024-04-04
JP7498378B1 (en) 2024-06-11

Similar Documents

Publication Publication Date Title
EP3034202B1 (en) Metal powder paste and method for producing same
Li et al. Inkjet-printed highly conductive transparent patterns with water based Ag-doped graphene
KR101186946B1 (en) Flaky copper powder, process for producing the same, and conductive paste
US10214656B2 (en) Copper nanoparticles and production method for same, copper nanoparticle fluid dispersion, copper nanoink, copper nanoparticle preservation method, and copper nanoparticle sintering method
JP5720693B2 (en) Method for producing conductive copper particles
WO2014080662A1 (en) Copper powder and method for producing same
JPWO2015122251A1 (en) Copper powder
JP7498378B1 (en) Method for producing copper powder, copper paste containing the same, and conductive film
JP4182234B2 (en) Copper powder for conductive paste and method for producing the same
JP2019108610A (en) Spherical silver powder and method for producing the same
TWI854617B (en) Spherical silver powder, method for producing spherical silver powder, device for producing spherical silver powder, and conductive paste
JP5255580B2 (en) Method for producing flake copper powder
WO2022230650A1 (en) Nickel powder and method for producing nickel particles
WO2022209267A1 (en) Copper particles and method for manufacturing same
JP2008525640A (en) High tap density ultrafine spherical metallic nickel powder and wet manufacturing method thereof
JP6722495B2 (en) Silver-coated copper powder and method for producing the same
JP7482214B2 (en) Copper particles and method for producing same
WO2019117235A1 (en) Spherical silver powder and method for producing same
TW202415469A (en) Nickel particles and method for manufacturing nickel particles
JP2018131666A (en) Tin coat copper powder, manufacturing method thereof and conductive paste