TW202415729A - Resin composition, resin sheet, multilayer printed wiring board, and semiconductor device - Google Patents
Resin composition, resin sheet, multilayer printed wiring board, and semiconductor device Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
- C08F290/06—Polymers provided for in subclass C08G
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F299/00—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
- C08F299/02—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
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Abstract
Description
本發明是有關於一種樹脂組成物、樹脂片材、多層印刷配線板、及半導體裝置。The present invention relates to a resin composition, a resin sheet, a multilayer printed wiring board, and a semiconductor device.
近年來,特別是隨著尖端材料領域的進步,要求開發更高性能的材料。例如,就適合於大容量通訊設備、智慧型手機的天線模組、及筆記型電腦的纜線系統的材料;適合於毫米波雷達(millimeter wave radar)的材料;以及車的自動制動裝置相關設備等的用途而言,對電子電路基板的更優異的介電特性、耐熱性、低應力、耐水性、接著性等的要求變高。In recent years, especially with the progress in the field of cutting-edge materials, there is a demand for the development of higher performance materials. For example, for materials suitable for large-capacity communication equipment, antenna modules for smartphones, and cable systems for laptops; materials suitable for millimeter wave radar; and equipment related to automatic braking devices in cars, there is a growing demand for electronic circuit substrates with better dielectric properties, heat resistance, low stress, water resistance, and adhesion.
先前,氰酸酯樹脂作為耐熱性優異、並且介電常數低、介電損耗低的熱硬化性樹脂而廣為人知。例如,於專利文獻1中,作為耐熱性及保存穩定性優異的樹脂而揭示了一種苯酚酚醛清漆型氰酸酯樹脂。然而,使用專利文獻1中記載的苯酚酚醛清漆型氰酸酯樹脂而得的硬化物雖然於耐熱膨脹性方面優異,但吸水率大,有介電特性劣化的情況。Previously, cyanate resins are widely known as thermosetting resins that have excellent heat resistance, low dielectric constant, and low dielectric loss. For example, Patent Document 1 discloses a phenol novolac-type cyanate resin as a resin that has excellent heat resistance and storage stability. However, although the cured product obtained by using the phenol novolac-type cyanate resin described in Patent Document 1 has excellent thermal expansion resistance, it has a large water absorption rate and sometimes has deteriorated dielectric properties.
另外,由於多層印刷配線板的小型化及高密度化,將多層印刷配線板中使用的積層板薄型化的研究盛行。隨著薄型化,關於絕緣層亦要求薄型化,從而要求不包含玻璃布的樹脂片材。作為絕緣層的材料的樹脂組成物以熱硬化性樹脂為主流,且用於在絕緣層間獲得導通的開孔一般是藉由雷射加工來進行。In addition, due to the miniaturization and high density of multi-layer printed wiring boards, research on thinning the laminates used in multi-layer printed wiring boards is prevalent. With the thinning, the insulating layer is also required to be thinner, and resin sheets that do not contain glass cloth are required. The resin composition used as the material of the insulating layer is mainly thermosetting resin, and the opening for achieving conduction between the insulating layers is generally performed by laser processing.
另一方面,藉由雷射加工進行的開孔有於孔數越多的高密度基板中加工時間越長的問題。因此,近年來,尋求一種藉由使用曝光部因光線等的照射而硬化(曝光步驟)、未曝光部能夠被去除(顯影步驟)的樹脂組成物,能夠於曝光及顯影步驟中進行批次開孔加工的樹脂片材。On the other hand, the problem of drilling holes by laser processing is that the more holes there are in a high-density substrate, the longer the processing time. Therefore, in recent years, a resin sheet that can perform batch drilling processing in the exposure and development steps has been sought by using a resin composition in which the exposed part is hardened by irradiation with light or the like (exposure step) and the unexposed part can be removed (development step).
作為曝光的方法,使用的是將水銀燈作為光源並介隔光罩進行曝光的方法,從而尋求一種可於該水銀燈的光源中適宜地曝光的材料。將該水銀燈作為光源的曝光方法使用的是ghi混合線(g射線的波長436 nm、h射線的波長405 nm、i射線的波長365 nm)等,從而可選擇通用的光硬化起始劑。另外,近年來,作為曝光方法,亦正在推進直接描繪曝光法的導入,所述直接描繪曝光法基於圖案的數位資料且不介隔光罩而直接於感光性樹脂組成物層上進行描繪。該直接描繪曝光法與介隔有光罩的曝光法相比,對位精度良好,且可獲得高精細的圖案,因此,特別推進在需要形成高密度的配線的基板中導入。其光源使用雷射等單色光,其中,於能夠形成高精細的抗蝕劑圖案的數位微鏡元件(Digital Micro mirror Device,DMD)方式的裝置中,使用的是波長405 nm(h射線)的光源。As an exposure method, a method of using a mercury lamp as a light source and exposing through a photomask is used, and a material that can be properly exposed in the light source of the mercury lamp is sought. The exposure method using the mercury lamp as a light source uses GHI mixed rays (G-ray wavelength 436 nm, H-ray wavelength 405 nm, I-ray wavelength 365 nm), etc., so that a universal photocuring initiator can be selected. In addition, in recent years, as an exposure method, the introduction of a direct drawing exposure method is also being promoted. The direct drawing exposure method is based on the digital data of the pattern and is directly drawn on the photosensitive resin composition layer without a photomask. Compared with the exposure method with a photomask, the direct drawing exposure method has good positioning accuracy and can obtain a high-precision pattern. Therefore, it is particularly promoted in substrates that need to form high-density wiring. The light source used is monochromatic light such as laser. In the digital micro mirror device (DMD) type device that can form a high-precision resist pattern, a light source with a wavelength of 405 nm (h-ray) is used.
作為顯影方法,就可獲得高精細的圖案而言,可使用鹼顯影。As a developing method, alkaline development can be used in order to obtain a high-definition pattern.
於用於此種積層板或樹脂片材的感光性的樹脂組成物中,為了能夠於曝光步驟中迅速硬化,使用了(甲基)丙烯酸酯等具有乙烯性不飽和基的化合物。 例如,於專利文獻2中記載了一種感光性熱硬化型樹脂組成物,包含羧基改質環氧(甲基)丙烯酸酯樹脂、聯苯型環氧樹脂、光硬化起始劑以及稀釋劑,所述羧基改質環氧(甲基)丙烯酸酯樹脂是使雙酚型環氧樹脂與(甲基)丙烯酸反應後使酸酐反應而得。 In the photosensitive resin composition used for such a laminate or resin sheet, a compound having an ethylenically unsaturated group such as (meth)acrylate is used in order to enable rapid hardening in the exposure step. For example, Patent Document 2 describes a photosensitive thermosetting resin composition comprising a carboxyl-modified epoxy (meth)acrylate resin, a biphenyl-type epoxy resin, a photohardening initiator, and a diluent. The carboxyl-modified epoxy (meth)acrylate resin is obtained by reacting a bisphenol-type epoxy resin with (meth)acrylic acid and then reacting an acid anhydride.
另外,於專利文獻3中記載了一種樹脂組成物,包含:能夠光硬化的黏合劑聚合物、具有乙烯性不飽和鍵的光聚合化合物、光聚合(硬化)起始劑、增感劑、以及作為熱硬化劑的雙烯丙基納迪克醯亞胺化合物及雙馬來醯亞胺化合物。In addition, Patent Document 3 describes a resin composition comprising: a photocurable binder polymer, a photopolymerizable compound having an ethylenic unsaturated bond, a photopolymerization (curing) initiator, a sensitizer, and a diallylnadic imide compound and a dimaleimide compound as a thermal curing agent.
於專利文獻4中,作為用於積層板或樹脂片材的感光性的樹脂組成物,記載了一種包含雙馬來醯亞胺化合物(硬化性樹脂)、以及光自由基聚合起始劑(硬化劑)的樹脂組成物。Patent Document 4 describes a resin composition containing a bismaleimide compound (curable resin) and a photoradical polymerization initiator (curing agent) as a photosensitive resin composition for use in laminates or resin sheets.
於專利文獻5中,有關於包含含多元羧基的化合物以及環氧樹脂等硬化性樹脂的樹脂組成物的記載,所述含多元羧基的化合物是使雙馬來醯亞胺與單胺反應後使酸酐反應而得。而且,於專利文獻5中,有關於可獲得具有鹼顯影性的硬化物的含多元羧基的化合物的記載。 [現有技術文獻] [專利文獻] Patent document 5 describes a resin composition including a compound containing a polycarboxyl group and a curable resin such as an epoxy resin, wherein the polycarboxyl group-containing compound is obtained by reacting dimaleimide with a monoamine and then reacting with an acid anhydride. Patent document 5 also describes a polycarboxyl group-containing compound that can produce a cured product having alkaline developability. [Prior art document] [Patent document]
[專利文獻1]日本專利特開平11-124433號公報 [專利文獻2]日本專利特開2005-62450號公報 [專利文獻3]日本專利特開2010-204298號公報 [專利文獻4]WO2018/56466A1 [專利文獻5]日本專利特開2015-229734號公報 [Patent Document 1] Japanese Patent Publication No. 11-124433 [Patent Document 2] Japanese Patent Publication No. 2005-62450 [Patent Document 3] Japanese Patent Publication No. 2010-204298 [Patent Document 4] WO2018/56466A1 [Patent Document 5] Japanese Patent Publication No. 2015-229734
[發明所欲解決之課題] 然而,使用了先前的(甲基)丙烯酸酯系樹脂的硬化物無法獲得充分的物性,於形成優異的保護膜及層間絕緣層的方面存在極限。另外,該硬化物的鹼顯影性不充分,無法獲得高精細的抗蝕劑圖案,當用於高密度印刷配線板時存在問題。 [Problems to be solved by the invention] However, the cured products using the conventional (meth)acrylate resins cannot obtain sufficient physical properties and have limitations in forming excellent protective films and interlayer insulation layers. In addition, the alkaline developability of the cured products is insufficient, and high-precision anti-etching patterns cannot be obtained, which poses a problem when used in high-density printed wiring boards.
於由專利文獻1所記載的樹脂組成物獲得的硬化物中,鹼顯影性亦不充分,無法獲得高精細的抗蝕劑圖案,當用於高密度印刷配線板時存在問題。The hardened material obtained from the resin composition described in Patent Document 1 also has insufficient alkali developability and cannot obtain a high-precision resist pattern, which causes problems when used in high-density printed wiring boards.
於專利文獻2中記載了使用雙馬來醯亞胺化合物,然而是作為熱硬化劑被記載,作為光聚合性化合物使用的是(甲基)丙烯酸酯。因此,於由該樹脂組成物獲得的硬化物中,鹼顯影性亦不充分,無法獲得高精細的抗蝕劑圖案,當用於高密度印刷配線板時存在問題。Patent Document 2 describes the use of a bismaleimide compound, but it is described as a thermosetting agent, and (meth)acrylate is used as a photopolymerizable compound. Therefore, the hardened material obtained from the resin composition has insufficient alkali developability, and a high-precision anti-corrosion pattern cannot be obtained, which is problematic when used in high-density printed wiring boards.
專利文獻3的樹脂組成物由於鹼顯影性不充分,因此於顯影後亦殘存未曝光的樹脂組成物。因此,於專利文獻3中亦無法獲得高精細的抗蝕劑圖案,該樹脂組成物無法用於高密度印刷配線板的製造。Since the resin composition of Patent Document 3 has insufficient alkaline developability, unexposed resin composition remains even after development. Therefore, in Patent Document 3, a high-precision resist pattern cannot be obtained, and the resin composition cannot be used in the manufacture of high-density printed wiring boards.
專利文獻4所記載的含多元羧基的化合物需要於使雙馬來醯亞胺與單胺反應後使酸酐反應而獲得,因此步驟繁雜。另外,由於使用芳香族胺化合物作為單胺,因此所述含多元羧基的化合物於其結構中包含具有芳香環的醯胺基。因此,所述含多元羧基的化合物的光透過性差,會阻礙光硬化反應,因此於實際中難以用於感光性樹脂組成物。The polycarboxyl group-containing compound described in Patent Document 4 needs to be obtained by reacting bismaleimide with a monoamine and then reacting an acid anhydride, so the steps are complicated. In addition, since an aromatic amine compound is used as the monoamine, the polycarboxyl group-containing compound contains an amide group having an aromatic ring in its structure. Therefore, the polycarboxyl group-containing compound has poor light transmittance and hinders the photocuring reaction, so it is difficult to use it in a photosensitive resin composition in practice.
因此,本發明是鑒於所述問題點而成者,其提供一種樹脂組成物、使用了該樹脂組成物的樹脂片材、多層印刷配線板、以及半導體裝置,所述樹脂組成物當用於製造印刷配線板時,於曝光步驟中不會阻礙光硬化反應而具有優異的光硬化性,且於顯影步驟中可賦予優異的鹼顯影性。 [解決課題之手段] Therefore, the present invention is made in view of the above-mentioned problems, and provides a resin composition, a resin sheet using the resin composition, a multilayer printed wiring board, and a semiconductor device. When the resin composition is used to manufacture a printed wiring board, it does not hinder the photocuring reaction in the exposure step and has excellent photocurability, and can provide excellent alkali development in the development step. [Means for solving the problem]
本發明者等人發現,藉由使用包含特定的雙馬來醯亞胺化合物(A)、包含一個以上的羧基的化合物(B)、以及光硬化起始劑(C)的樹脂組成物,可解決所述課題,從而完成了本發明。The inventors of the present invention have found that the above-mentioned problems can be solved by using a resin composition comprising a specific bismaleimide compound (A), a compound having one or more carboxyl groups (B), and a photocuring initiator (C), thereby completing the present invention.
即,本發明包含以下內容。 [1]一種樹脂組成物,包含:下述通式(1)所表示的雙馬來醯亞胺化合物(A)、包含一個以上的羧基的化合物(B)、以及光硬化起始劑(C)。 That is, the present invention includes the following contents. [1] A resin composition comprising: a dimaleimide compound (A) represented by the following general formula (1), a compound (B) containing one or more carboxyl groups, and a photocuring initiator (C).
[化1] [Chemistry 1]
(式(1)中,R 3獨立地表示包含環狀結構的四價有機基;R 2獨立地為碳數6~200的二價烴基;R 1獨立地由下述式(2) (In formula (1), R 3 independently represents a tetravalent organic group containing a cyclic structure; R 2 independently represents a divalent alkyl group having 6 to 200 carbon atoms; R 1 independently represents a tetravalent alkyl group having 6 to 200 carbon atoms;
[化2] [Chemistry 2]
(R 5各自獨立地表示氫原子、碳數1~6的直鏈狀或分支狀的烷基、鹵素原子、羥基、或碳數1~6的直鏈狀或分支狀的烷氧基;l各自獨立地表示1~4的整數)表示;R 4為R 1或R 2;m為1~100,n為0~100;另外,由m及n括起來的各重複單元的順序並無限定,鍵結樣式可為交替,亦可為嵌段,亦可為無規) [2]如[1]所述的樹脂組成物,其中,所述包含一個以上的羧基的化合物(B)是選自由下述式(3)所表示的化合物、下述式(4)所表示的化合物、下述式(5)所表示的化合物、及下述式(6)所表示的化合物所組成的群組中的至少一種以上的化合物。 ( R5 each independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group, or a linear or branched alkoxy group having 1 to 6 carbon atoms; l each independently represents an integer of 1 to 4); R4 is R1 or R2 ; m is 1 to 100, and n is 0 to 100; in addition, the order of each repeating unit enclosed by m and n is not limited, and the bonding pattern may be alternating, block, or random) [2] The resin composition as described in [1], wherein the compound (B) containing one or more carboxyl groups is at least one compound selected from the group consisting of a compound represented by the following formula (3), a compound represented by the following formula (4), a compound represented by the following formula (5), and a compound represented by the following formula (6).
[化3] [Chemistry 3]
(式(3)中,R 6各自獨立地表示氫原子、羥基、羧基、胺基或胺基甲基;o各自獨立地表示1~5的整數;式(3)中,於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐) (In formula (3), R 6 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, an amino group or an aminomethyl group; o each independently represents an integer from 1 to 5; in formula (3), when there are two or more carboxyl groups, these groups may be linked to form an acid anhydride)
[化4] [Chemistry 4]
(式(4)中,R 7各自獨立地表示氫原子、羥基、羧基、羧基甲基、胺基或胺基甲基;p各自獨立地表示1~9的整數;式(4)中,於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐;式(4)中,於具有羧基甲基的情況下,亦可為羧基甲基與羧基相互連結而形成的酸酐) (In formula (4), R7 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, a carboxymethyl group, an amino group or an aminomethyl group; p each independently represents an integer of 1 to 9; in formula (4), when there are two or more carboxyl groups, these groups may be linked to form an acid anhydride; in formula (4), when there is a carboxymethyl group, a carboxymethyl group and a carboxyl group may be linked to form an acid anhydride)
[化5] [Chemistry 5]
(式(5)中,R 8各自獨立地表示氫原子、羥基、羧基、羧基甲基、胺基或胺基甲基;q各自獨立地表示1~9的整數;式(5)中,於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐;式(5)中,於具有羧基甲基的情況下,亦可為羧基甲基與羧基相互連結而形成的酸酐) (In formula (5), R8 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, a carboxymethyl group, an amino group or an aminomethyl group; q each independently represents an integer of 1 to 9; in formula (5), when there are two or more carboxyl groups, these groups may be linked to form an acid anhydride; in formula (5), when there is a carboxymethyl group, a carboxymethyl group and a carboxyl group may be linked to form an acid anhydride)
[化6] [Chemistry 6]
(式(6)中,R 9各自獨立地表示氫原子、羥基、羧基、羧基甲基、胺基或胺基甲基;r各自獨立地表示1~5的整數;式(6)中,於具有一個以上的羧基的情況下,亦可為羧基甲基與羧基相互連結而形成的酸酐;式(6)中,於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐;式(6)中,於具有兩個以上的羧基甲基的情況下,亦可為該些相互連結而形成的酸酐)。 [3]如[1]或[2]所述的樹脂組成物,含有下述式(1)所表示的雙馬來醯亞胺化合物(A)中,R 3所表示的有機基為下述結構式(7)~結構式(15)所表示的四價有機基中的任一者的雙馬來醯亞胺化合物。 (In formula (6), R9 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, a carboxymethyl group, an amino group or an aminomethyl group; r each independently represents an integer of 1 to 5; in formula (6), when there are one or more carboxyl groups, the acid anhydride formed by a carboxymethyl group and a carboxyl group bonded to each other may be used; in formula (6), when there are two or more carboxyl groups, the acid anhydride formed by a bonded group thereof may be used; in formula (6), when there are two or more carboxylmethyl groups, the acid anhydride formed by a bonded group thereof may be used). [3] The resin composition according to [1] or [2], comprising a bismaleimide compound (A) represented by the following formula (1), wherein the organic group represented by R3 is any one of the tetravalent organic groups represented by the following structural formulas (7) to (15).
[化7] [Chemistry 7]
(式(1)中,R 3獨立地表示包含環狀結構的四價有機基;R 2獨立地為碳數6~200的二價烴基;R 1獨立地由下述式(2) (In formula (1), R 3 independently represents a tetravalent organic group containing a cyclic structure; R 2 independently represents a divalent alkyl group having 6 to 200 carbon atoms; R 1 independently represents a tetravalent alkyl group having 6 to 200 carbon atoms;
[化8] [Chemistry 8]
(R 5各自獨立地表示氫原子、碳數1~6的直鏈狀或分支狀的烷基、鹵素原子、羥基、或碳數1~6的直鏈狀或分支狀的烷氧基;l各自獨立地表示1~4的整數)表示;R 4為R 1或R 2;m為1~100,n為0~100;另外,由m及n括起來的各重複單元的順序並無限定,鍵結樣式可為交替,亦可為嵌段,亦可為無規) (R 5 each independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group, or a linear or branched alkoxy group having 1 to 6 carbon atoms; l each independently represents an integer of 1 to 4); R 4 is R 1 or R 2 ; m is 1 to 100, and n is 0 to 100; in addition, the order of each repeating unit enclosed by m and n is not limited, and the bonding pattern may be alternating, block, or random)
[化9] [Chemistry 9]
(式(11)中,Y表示C(CF 3) 2、SO 2、CO、氧原子、直接鍵結或下述式(16) [化10] (In formula (11), Y represents C(CF 3 ) 2 , SO 2 , CO, an oxygen atom, a direct bond or the following formula (16) [Chemical 10]
所表示的二價連結基)The divalent linking group represented by
所述結構式中的-*表示鍵結鍵,於式(1)中與形成環狀醯亞胺結構的羰基碳鍵結。 [4]如[1]至[3]中任一項所述的樹脂組成物,其中,所述光硬化起始劑(C)包含下述式(17)所表示的化合物。 -* in the structural formula represents a bond, and in formula (1), it is bonded to the carbonyl carbon forming the cyclic imide structure. [4] The resin composition as described in any one of [1] to [3], wherein the photocuring initiator (C) comprises a compound represented by the following formula (17).
[化11] (式(17)中,R 10各自獨立地表示下述式(18)所表示的取代基或苯基) [Chemistry 11] (In formula (17), R10 each independently represents a substituent represented by the following formula (18) or a phenyl group)
[化12] [Chemistry 12]
(式(18)中,-*表示鍵結鍵,R 11各自獨立地表示氫原子或甲基)。 [5]一種樹脂片材,具有: 支撐體;以及 樹脂層,配置於所述支撐體的單面或兩面, 所述樹脂層包含如[1]至[4]中任一項所述的樹脂組成物。 [6]如[5]所述的樹脂片材,其中,所述樹脂層的厚度為1 μm~50 μm。 [7]一種多層印刷配線板,具有: 絕緣層;以及 導體層,形成於所述絕緣層的單面或兩面, 所述絕緣層包含如[1]至[4]中任一項所述的樹脂組成物。 [8]一種半導體裝置,包含如[1]至[4]中任一項所述的樹脂組成物。 [發明的效果] (In formula (18), -* represents a bond, and R 11 each independently represents a hydrogen atom or a methyl group). [5] A resin sheet comprising: a support; and a resin layer disposed on one or both surfaces of the support, wherein the resin layer comprises a resin composition as described in any one of [1] to [4]. [6] A resin sheet as described in [5], wherein the thickness of the resin layer is 1 μm to 50 μm. [7] A multilayer printed wiring board comprising: an insulating layer; and a conductive layer formed on one or both surfaces of the insulating layer, wherein the insulating layer comprises a resin composition as described in any one of [1] to [4]. [8] A semiconductor device comprising the resin composition described in any one of [1] to [4]. [Effects of the Invention]
藉由本發明,可提供一種樹脂組成物、使用了該樹脂組成物的樹脂片材、多層印刷配線板、以及半導體裝置,所述樹脂組成物當用於製造多層印刷配線板時,於曝光步驟中不會阻礙光硬化反應而具有優異的光硬化性,且於顯影步驟中可賦予優異的鹼顯影性。The present invention can provide a resin composition, a resin sheet using the resin composition, a multilayer printed wiring board, and a semiconductor device. When the resin composition is used to manufacture a multilayer printed wiring board, it does not hinder the photocuring reaction in the exposure step and has excellent photocurability, and can provide excellent alkali developability in the development step.
以下,對用於實施本發明的方式(以下,稱為「本實施方式」)進行詳細說明。以下的本實施方式是用於說明本發明的例示,主旨並不在於將本發明限定於以下內容。本發明可於其要旨的範圍內適當進行變形來實施。The following is a detailed description of a method for implementing the present invention (hereinafter referred to as "this embodiment"). The following this embodiment is an example for explaining the present invention, and the present invention is not limited to the following content. The present invention can be appropriately modified and implemented within the scope of its gist.
再者,本說明書中的所謂「(甲基)丙烯醯氧基」是指「丙烯醯氧基」及與其對應的「甲基丙烯醯氧基」兩者,所謂「(甲基)丙烯酸酯」是指「丙烯酸酯」及與其對應的「甲基丙烯酸酯」兩者,所謂「(甲基)丙烯酸~」是指「丙烯酸~」及與其對應的「甲基丙烯酸~」兩者。In addition, the term "(meth)acryloxy" in this specification refers to both "acryloxy" and its corresponding "methacryloxy", the term "(meth)acrylate" refers to both "acrylate" and its corresponding "methacrylate", and the term "(meth)acrylic acid-" refers to both "acrylic acid-" and its corresponding "methacrylic acid-".
[樹脂組成物] 本實施方式的樹脂組成物包含特定的雙馬來醯亞胺化合物(A)、包含一個以上的羧基的化合物(B)以及光硬化起始劑(C)。以下,對各成分進行說明。 [Resin composition] The resin composition of this embodiment includes a specific dimaleimide compound (A), a compound containing one or more carboxyl groups (B), and a photocuring initiator (C). Each component is described below.
<雙馬來醯亞胺化合物(A)> 本發明的雙馬來醯亞胺化合物(A)是具有兩個馬來醯亞胺基的化合物,由下述通式(1) <Bismaleimide compound (A)> The bismaleimide compound (A) of the present invention is a compound having two maleimide groups, and is represented by the following general formula (1)
[化13] [Chemistry 13]
(式(1)中,R 3獨立地表示包含環狀結構的四價有機基;R 2獨立地為碳數6~200的二價烴基;R 1獨立地由下述式(2) (In formula (1), R 3 independently represents a tetravalent organic group containing a cyclic structure; R 2 independently represents a divalent alkyl group having 6 to 200 carbon atoms; R 1 independently represents a tetravalent alkyl group having 6 to 200 carbon atoms;
[化14] [Chemistry 14]
(R 5各自獨立地表示氫原子、碳數1~6的直鏈狀或分支狀的烷基、鹵素原子、羥基或碳數1~6的直鏈狀或分支狀的烷氧基;l各自獨立地表示1~4的整數)表示;R 4為R 1或R 2;m為1~100,n為0~100;另外,由m及n括起來的各重複單元的順序並無限定,鍵結樣式可為交替,亦可為嵌段,亦可為無規)表示。 (R 5 each independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group, or a linear or branched alkoxy group having 1 to 6 carbon atoms; l each independently represents an integer of 1 to 4); R 4 is R 1 or R 2 ; m is 1 to 100, and n is 0 to 100; in addition, the order of each repeating unit enclosed by m and n is not limited, and the bonding pattern may be alternating, block, or random).
所述式(2)中,R 5各自獨立地表示氫原子、碳數1~6的直鏈狀或分支狀的烷基、鹵素原子、羥基或碳數1~6的直鏈狀或分支狀的烷氧基。 In the above formula (2), R 5 each independently represents a hydrogen atom, a linear or branched alkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group, or a linear or branched alkoxy group having 1 to 6 carbon atoms.
作為碳數1~6的直鏈狀或分支狀的烷基,並無特別限定,例如可列舉:甲基、乙基、正丙基、異丙基、丁基、異丁基、第二丁基及第三丁基。該些中,就除了表現出與晶片及基板等的優異的接著性以外,亦表現出對溶劑的良好的溶解性、低熔點、低吸水性、及與其他樹脂的良好的相容性而言,較佳為碳數1~4的烷基,更佳為甲基、乙基、正丙基、及異丙基。 作為鹵素原子,例如可列舉:氟原子、氯原子、溴原子、及碘原子。 作為碳數1~6的直鏈狀或分支狀的烷氧基,並無特別限定,例如可列舉:甲氧基、乙氧基、正丙氧基、異丙氧基、正丁氧基、2-甲基丙氧基、1-甲基丙氧基、第三丁氧基。該些中,就除了表現出與晶片及基板等的優異的接著性以外,亦表現出對溶劑的良好的溶解性、低熔點、低吸水性、及與其他樹脂的良好的相容性而言,較佳為碳數1~4的烷氧基,更佳為甲氧基、乙氧基、正丙氧基、及異丙氧基。 作為R 5,就除了表現出與晶片及基板等的優異的接著性以外,亦表現出對溶劑的良好的溶解性、低熔點、低吸水性、及與其他樹脂的良好的相容性而言,較佳為氫原子、甲基、乙基、羥基、甲氧基、及乙氧基,更佳為氫原子、甲基、及羥基,進而佳為氫原子。 The linear or branched alkyl group having 1 to 6 carbon atoms is not particularly limited, and examples thereof include methyl, ethyl, n-propyl, isopropyl, butyl, isobutyl, sec-butyl, and tert-butyl. Among these, alkyl groups having 1 to 4 carbon atoms are preferred, and methyl, ethyl, n-propyl, and isopropyl are more preferred, in terms of excellent adhesion to wafers and substrates, good solubility in solvents, low melting points, low water absorption, and good compatibility with other resins. Halogen atoms include fluorine, chlorine, bromine, and iodine atoms. The linear or branched alkoxy group having 1 to 6 carbon atoms is not particularly limited, and examples thereof include methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, 2-methylpropoxy, 1-methylpropoxy, and tert-butoxy. Among these, alkoxy groups having 1 to 4 carbon atoms are preferred, and methoxy, ethoxy, n-propoxy, and isopropoxy are more preferred, in terms of excellent adhesion to chips and substrates, good solubility in solvents, low melting points, low water absorption, and good compatibility with other resins. As R 5 , in addition to exhibiting excellent adhesion to chips and substrates, etc., it also exhibits good solubility in solvents, low melting point, low water absorption, and good compatibility with other resins. Preferably, it is a hydrogen atom, a methyl group, an ethyl group, a hydroxyl group, a methoxy group, and an ethoxy group. More preferably, it is a hydrogen atom, a methyl group, and a hydroxyl group. Still more preferably, it is a hydrogen atom.
所述式(2)中,l各自獨立地表示1~4的整數。作為l,就除了表現出與晶片及基板等的優異的接著性以外,亦表現出對溶劑的良好的溶解性、低熔點、低吸水性、及與其他樹脂的良好的相容性而言,較佳為R 5全部為氫原子,因此較佳為4。 In the formula (2), l each independently represents an integer of 1 to 4. As l, in order to exhibit excellent adhesion to a wafer, a substrate, etc., as well as good solubility in a solvent, a low melting point, low water absorption, and good compatibility with other resins, it is preferred that all R 5 are hydrogen atoms, and thus 4 is preferred.
作為所述式(1)的R 1的具體例,可列舉下述式(19)~下述式(21)。較佳為源自作為市售品而容易地獲取的間二甲苯二胺(m-Xylylenediamine)(MXDA:三菱氣體化學公司製造)的下述式(19)。 Specific examples of R 1 in the formula (1) include the following formulas (19) to (21). Preferred is the following formula (19) derived from m-xylylenediamine (MXDA: manufactured by Mitsubishi Gas Chemical Co., Ltd.) which is easily available as a commercial product.
[化15] [Chemistry 15]
[化16] [Chemistry 16]
[化17] [Chemistry 17]
本實施方式的馬來醯亞胺化合物只要發揮本發明的效果並無特別限定,但就對溶劑的良好的溶解性、低熔點、低吸水性及與其他樹脂的良好的相容性的方面而言,重量平均分子量較佳為100~100,000,更佳為500~30,000。再者,於本實施方式中,所謂「重量平均分子量」,是指藉由凝膠滲透層析(gel permeation chromatography,GPC)法而得的、聚苯乙烯標準換算的重量平均分子量。The maleimide compound of the present embodiment is not particularly limited as long as it can exert the effects of the present invention, but in terms of good solubility in solvents, low melting point, low water absorption and good compatibility with other resins, the weight average molecular weight is preferably 100 to 100,000, more preferably 500 to 30,000. In addition, in the present embodiment, the so-called "weight average molecular weight" refers to the weight average molecular weight obtained by gel permeation chromatography (GPC) and converted to polystyrene standards.
通常,馬來醯亞胺化合物的光透過性差,因此若後述的樹脂組成物包含馬來醯亞胺化合物,則光不會充分到達於樹脂組成物中分散的光硬化起始劑,光硬化起始劑難以產生自由基。因此,一般而言,馬來醯亞胺化合物的光自由基反應難以進行,即便進行馬來醯亞胺單體的自由基聚合或二聚化反應,其反應性亦非常低。但是,所述雙馬來醯亞胺化合物(A)由於馬來醯亞胺基經由亞甲基而與芳香環鍵結,共軛長度短的理由,光透過性非常優異,因此光充分到達光硬化起始劑,從而有效率地引起馬來醯亞胺的光自由基反應。再者,馬來醯亞胺化合物於製備以1質量%包含所述馬來醯亞胺化合物的氯仿溶液、並使用波長405 nm(h射線)的光線對該氯仿溶液的光線透過率進行測定的情況下,透過率為3%以上而示出非常優異的光透過性。因此,例如,於使用直接描繪曝光法製造具有高密度且高精細的配線形成(圖案)的印刷配線板時,即便於使用包含波長405 nm(h射線)的活性能量線的情況下,亦有效率地引起馬來醯亞胺的光自由基反應。Generally, maleimide compounds have poor light transmittance. Therefore, if the resin composition described later contains the maleimide compound, light does not sufficiently reach the photocuring initiator dispersed in the resin composition, and the photocuring initiator is difficult to generate free radicals. Therefore, generally speaking, the photoradical reaction of the maleimide compound is difficult to proceed, and even if the free radical polymerization or dimerization reaction of the maleimide monomer proceeds, its reactivity is very low. However, the dimaleimide compound (A) has very excellent light transmittance because the maleimide group is bonded to the aromatic ring via the methylene group and the conjugation length is short. Therefore, light sufficiently reaches the photocuring initiator, thereby efficiently inducing the photoradical reaction of the maleimide. Furthermore, when a chloroform solution containing the maleimide compound at 1 mass% is prepared and the light transmittance of the chloroform solution is measured using light having a wavelength of 405 nm (h-ray), the transmittance is 3% or more, showing very excellent light transmittance. Therefore, for example, when a printed wiring board having a high-density and high-precision wiring formation (pattern) is manufactured using a direct writing exposure method, the photo-radical reaction of the maleimide is efficiently induced even when an active energy ray containing a wavelength of 405 nm (h-ray) is used.
於使用包含波長405 nm(h射線)的活性能量線的情況下,若光硬化起始劑不吸收波長405 nm(h射線)的光而產生自由基,則聚合不會進行。因此,該情況下,作為後述的光硬化起始劑,較佳為使用如下的光硬化起始劑:波長405 nm(h射線)的吸光度為0.1以上而示出對波長405 nm(h射線)的光非常優異的吸收性。When active energy rays including a wavelength of 405 nm (h-rays) are used, if the photocuring initiator does not absorb the light of the wavelength of 405 nm (h-rays) and generate free radicals, polymerization does not proceed. Therefore, in this case, as the photocuring initiator described later, it is preferable to use a photocuring initiator having an absorbance of 0.1 or more at a wavelength of 405 nm (h-rays) and showing very excellent absorption of light at a wavelength of 405 nm (h-rays).
由於所述雙馬來醯亞胺化合物(A)如上所述般光透過性優異,因此,例如,於使用了波長405 nm的光的情況下,光亦充分到達光硬化起始劑,使用了由光硬化起始劑產生的自由基進行自由基反應,於大量調配了馬來醯亞胺化合物的樹脂組成物中,亦能夠進行光硬化。 而且,包含所述樹脂組成物而得的硬化物的光硬化性、耐熱性及熱穩定性優異,因此可適宜地形成保護膜及絕緣層。 Since the bismaleimide compound (A) has excellent light transmittance as described above, for example, when light with a wavelength of 405 nm is used, the light also fully reaches the photocuring initiator, and the free radicals generated by the photocuring initiator are used to perform a free radical reaction, and photocuring can also be performed in a resin composition containing a large amount of maleimide compounds. In addition, the cured product containing the resin composition has excellent light curing properties, heat resistance and thermal stability, so a protective film and an insulating layer can be appropriately formed.
所述式(1)中的R 2所表示的獨立的碳數6~200的二價烴基表示自二聚酸中含有的二羧酸中去除兩個羧基後的二價殘基。 The independent divalent hydrocarbon group having 6 to 200 carbon atoms represented by R 2 in the formula (1) is a divalent residue obtained by removing two carboxyl groups from a dicarboxylic acid contained in the dimer acid.
於本說明書中,二聚酸是指使亞麻油酸、油酸、次亞麻油酸等不飽和羧酸的不飽和鍵二聚化,其後進行蒸餾精製而得,主要含有碳數36個的二羧酸,通常以約5質量%為限度包含碳數54個的三羧酸,以約5質量%為限度包含單羧酸。由本發明的二聚酸衍生的二胺(以下,視情況稱為源自二聚酸的二胺)是藉由將所述二聚酸中含有的各二羧酸所具有的兩個羧基取代為胺基而得的二胺,通常為混合物,於本發明中,作為此種源自二聚酸的二胺,例如可列舉[3,4-雙(1-胺基庚基)6-己基-5-(1-辛烯基)]環己烷等二胺,或含有藉由對該些二胺進一步氫化而使不飽和鍵飽和的二胺的二胺。In the present specification, dimer acid refers to an acid obtained by dimerizing the unsaturated bonds of unsaturated carboxylic acids such as linoleic acid, oleic acid, and linolenic acid, followed by distillation purification, and mainly contains dicarboxylic acids having 36 carbon atoms, usually contains tricarboxylic acids having 54 carbon atoms up to about 5% by mass, and contains monocarboxylic acids up to about 5% by mass. The diamine derived from the dimer acid of the present invention (hereinafter referred to as a dimer acid-derived diamine as the case may be) is a diamine obtained by replacing two carboxyl groups possessed by each dicarboxylic acid contained in the dimer acid with amino groups, and is usually a mixture. In the present invention, examples of such a dimer acid-derived diamine include diamines such as [3,4-bis(1-aminoheptyl)6-hexyl-5-(1-octenyl)]cyclohexane, or diamines containing diamines in which unsaturated bonds are saturated by further hydrogenating these diamines.
作為使用此種源自二聚酸的二胺導入至雙馬來醯亞胺化合物中的、源自本發明的二聚酸的二價烴,較佳為自所述源自二聚酸的二胺中去除兩個胺基後的殘基。另外,於使用所述源自二聚酸的二胺獲得本發明的雙馬來醯亞胺化合物時,作為所述源自二聚酸的二胺,可單獨使用一種,亦可組合使用組成不同的兩種以上。進而,作為此種源自二聚酸的二胺,例如亦可使用具有C36的骨架的二胺為主成分的「普瑞阿明(PRIAMINE)1074」、「普瑞阿明(PRIAMINE)1075」(日本禾大(Croda Japan)股份有限公司製造)等市售品。As the divalent hydrocarbon derived from the dimer acid of the present invention to be introduced into the bismaleimide compound using the diamine derived from the dimer acid, it is preferred to be a residue after removing two amine groups from the diamine derived from the dimer acid. In addition, when the bismaleimide compound of the present invention is obtained using the diamine derived from the dimer acid, the diamine derived from the dimer acid may be used alone or in combination of two or more diamines having different compositions. Furthermore, as such a diamine derived from the dimer acid, for example, commercial products such as "PRIAMINE 1074" and "PRIAMINE 1075" (manufactured by Croda Japan Co., Ltd.) having a diamine having a C36 skeleton as a main component may be used.
所述式(1)中的R 3所表示的有機基為分別獨立地包含環狀結構的四價有機基,源自用於本發明的雙馬來醯亞胺樹脂的合成的四元酸二酐。該四元酸二酐只要是於一分子中具有兩個酸酐基,則並無特別限定。作為四元酸二酐的具體例,可列舉:均苯四甲酸酐、乙二醇-雙(偏苯三酸酐)、甘油-雙(偏苯三酸酐)單乙酸酯、1,2,3,4-丁烷四羧酸二酐、3,3',4,4'-二苯基磺酸四羧酸二酐、3,3',4,4'-二苯甲酮四羧酸二酐、3,3',4,4'-聯苯四羧酸二酐、3,3',4,4'-二苯基醚四羧酸二酐、5-(2,5-二氧代四氫-3-呋喃基)-3-甲基環己烯-1,2-二羧酸酐、3a,4,5,9b-四氫-5-(四氫-2,5-二氧代-3-呋喃基)-萘並[1,2-c]呋喃-1,3-二酮、1,2,4,5-環己烷四羧酸二酐、雙環(2,2,2)-辛-7-烯-2,3,5,6-四羧酸二酐及雙環[2.2.2]辛烷-2,3,5,6-四羧酸二酐、5,5'-((丙烷-2,2-二基雙(4,1-伸苯基))雙(氧基))雙(異苯並呋喃-1,3-二酮)、4,4'-氧基二鄰苯二甲酸酐、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐、4,4'-雙酚A酸二酐等。其中,就溶劑溶解性、對基材的密接性的方面而言,較佳為4,4'-氧基二鄰苯二甲酸酐、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐、4,4'-雙酚A酸二酐。該些可使用一種,亦可混合使用兩種以上。 The organic groups represented by R3 in the formula (1) are tetravalent organic groups each independently containing a cyclic structure and are derived from a tetrabasic acid dianhydride used in the synthesis of the bismaleimide resin of the present invention. The tetrabasic acid dianhydride is not particularly limited as long as it has two anhydride groups in one molecule. Specific examples of the tetrabasic acid dianhydride include pyromellitic anhydride, ethylene glycol-bis(trimellitic anhydride), glycerol-bis(trimellitic anhydride) monoacetate, 1,2,3,4-butanetetracarboxylic anhydride, 3,3',4,4'-diphenylsulfonic acid tetracarboxylic anhydride, 3,3',4,4'-benzophenonetetracarboxylic anhydride, 3,3',4,4'-biphenyltetracarboxylic anhydride, 3,3',4,4'-diphenylethertetracarboxylic anhydride, 5-(2,5-dioxotetrahydro-3-furyl)-3-methylcyclohexene-1,2-dicarboxylic anhydride, 3a,4,5,9b-tetrahydro-5-(tetrahydro-2 ,5-dioxo-3-furanyl)-naphtho[1,2-c]furan-1,3-dione, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, biscyclo(2,2,2)-oct-7-ene-2,3,5,6-tetracarboxylic dianhydride and biscyclo[2.2.2]octane-2,3,5,6-tetracarboxylic dianhydride, 5,5'-((propane-2,2-diylbis(4,1-phenylene))bis(oxy))bis(isobenzofuran-1,3-dione), 4,4'-oxydiphthalic anhydride, 4,4'-(hexafluoroisopropylidene)diphthalic anhydride, 4,4'-bisphenol A dianhydride, etc. Among them, 4,4'-oxydiphthalic anhydride, 4,4'-(hexafluoroisopropylidene)diphthalic anhydride, and 4,4'-bisphenol A dianhydride are preferred in terms of solvent solubility and adhesion to the substrate. These may be used alone or in combination of two or more.
就最終獲得的雙馬來醯亞胺樹脂的溶劑溶解性的觀點而言,所述式(1)中的R 3所表示的有機基特佳為下述式(7)~式(15)所表示的四價有機基中的任一者。 From the viewpoint of the solvent solubility of the finally obtained bismaleimide resin, the organic group represented by R3 in the above formula (1) is particularly preferably any one of the tetravalent organic groups represented by the following formulas (7) to (15).
[化18] [Chemistry 18]
式(11)中,Y表示C(CF 3) 2、SO 2、CO、氧原子、直接鍵結或所述式(16)所表示的二價連結基。 In formula (11), Y represents C(CF 3 ) 2 , SO 2 , CO, an oxygen atom, a direct bond, or a divalent linking group represented by formula (16).
[化19] [Chemistry 19]
所述結構式中的-*表示鍵結鍵,於式(1)中與形成環狀醯亞胺結構的羰基碳鍵結。The -* in the structural formula represents a bond, and in formula (1) it is bonded to the carbonyl carbon forming the cyclic imide structure.
於本發明中,所述式(1)的R 3所表示的四價有機基較佳為下述式(22)~式(26)。 In the present invention, the tetravalent organic group represented by R 3 in the formula (1) is preferably the following formula (22) to formula (26).
[化20] [Chemistry 20]
[化21] [Chemistry 21]
[化22] [Chemistry 22]
[化23] [Chemistry 23]
[化24] [Chemistry 24]
於所述樹脂組成物中,關於光硬化起始劑(A)的含量,就使馬來醯亞胺化合物的光硬化充分進行、從而於鹼顯影性方面使曝光部充分不溶化的觀點而言,相對於雙馬來醯亞胺化合物(A)、包含一個以上的羧基的化合物(B)及光硬化起始劑(C)的合計100質量份,較佳為25質量份~99質量份,更佳為30質量份~97質量份,進而佳為50質量份~95質量份。In the resin composition, the content of the photocuring initiator (A) is preferably 25 to 99 parts by mass, more preferably 30 to 97 parts by mass, and even more preferably 50 to 95 parts by mass, based on 100 parts by mass of the total of the bismaleimide compound (A), the compound containing one or more carboxyl groups (B), and the photocuring initiator (C), from the viewpoint of sufficiently proceeding the photocuring of the maleimide compound and sufficiently insolubilizing the exposed portion in terms of alkali developability.
<雙馬來醯亞胺化合物(A)的製造方法> 關於所述雙馬來醯亞胺化合物(A)的製造方法,並無特別限制,例如可藉由以下所示的方法有效率地製造。 作為基本流程,經過利用四元酸二酐與二胺合成醯胺酸、進行閉環脫水的步驟A,接著經過使馬來酸酐反應、合成馬來醯胺酸、最後進行閉環脫水從而利用馬來醯亞胺基將分子鏈末端封端的步驟B,藉此可獲得雙馬來醯亞胺化合物。 <Method for producing bismaleimide compound (A)> The method for producing the bismaleimide compound (A) is not particularly limited, and it can be produced efficiently by, for example, the method shown below. As a basic process, through step A of synthesizing acylamine using tetrabasic acid dianhydride and diamine, and performing ring-closure dehydration, then reacting maleic anhydride to synthesize maleic acid, and finally performing ring-closure dehydration to cap the molecular chain end with maleimide group, step B, thereby obtaining a bismaleimide compound.
於所述製造方法中,各步驟可大致分為醯胺酸或馬來醯胺酸的合成反應與閉環脫水反應的兩種,以下進行詳述。In the production method, each step can be roughly divided into two types: the synthesis reaction of acylamine or maleic acid and the ring-closing dehydration reaction, which are described in detail below.
於步驟A中,首先,藉由使特定的四元酸二酐與特定的二胺反應而合成醯胺酸。關於該反應,一般而言於有機溶媒(例如,非極性溶媒或高沸點非質子性極性溶媒)中於室溫(25℃)~100℃下反應進行。 繼而,醯胺酸的閉環脫水反應是於90℃~120℃的條件下反應後,於將藉由縮合反應而副產生的水自體系中去除的同時進行。為了促進閉環脫水反應,亦可添加有機溶媒(例如,非極性溶媒、高沸點非質子性極性溶媒等)或酸觸媒。 In step A, first, acylamine is synthesized by reacting a specific tetrabasic acid dianhydride with a specific diamine. The reaction is generally carried out in an organic solvent (e.g., a nonpolar solvent or a high-boiling-point aprotic polar solvent) at room temperature (25°C) to 100°C. Then, the ring-closing dehydration reaction of acylamine is carried out at 90°C to 120°C while removing the water produced as a by-product of the condensation reaction from the system. In order to promote the ring-closing dehydration reaction, an organic solvent (e.g., a nonpolar solvent, a high-boiling-point aprotic polar solvent, etc.) or an acid catalyst may be added.
作為有機溶媒,可列舉:甲苯、二甲苯、苯甲醚、聯苯、萘、N,N-二甲基甲醯胺(N,N-Dimethylformamide,DMF)、二甲基亞碸(Dimethyl sulfoxide,DMSO)等。該些可單獨使用一種,亦可併用兩種以上。另外,作為酸觸媒,可列舉:硫酸、甲磺酸、三氟甲磺酸等。該些可單獨使用一種,亦可併用兩種以上。 二胺與四元酸二酐的莫耳比較佳為設為二胺/四元酸二水合物=2.5~1.02/1.0,更佳為設為二胺/四元酸二酐=2.0~1.15/1.0。藉由以該比進行調配,結果可合成兩末端含胺基的共聚物。 As organic solvents, toluene, xylene, anisole, biphenyl, naphthalene, N,N-dimethylformamide (DMF), dimethyl sulfoxide (DMSO), etc. can be listed. These can be used alone or in combination of two or more. In addition, as acid catalysts, sulfuric acid, methanesulfonic acid, trifluoromethanesulfonic acid, etc. can be listed. These can be used alone or in combination of two or more. The molar ratio of diamine to tetrabasic acid dianhydride is preferably set to diamine/tetrabasic acid dihydrate = 2.5 to 1.02/1.0, and more preferably set to diamine/tetrabasic acid dianhydride = 2.0 to 1.15/1.0. By mixing at this ratio, a copolymer containing amino groups at both ends can be synthesized.
於步驟B中,藉由使步驟B中獲得的兩末端具有胺基的二胺與馬來酸酐於室溫(25℃)~100℃下反應而合成馬來醯胺酸,最後將於95℃~120℃的條件下副產生的體系中的水去除的同時進行閉環脫水,藉此利用馬來醯亞胺基將分子鏈末端封端,可獲得作為目標的雙馬來醯亞胺化合物。若於120℃以下進行所述分子鏈末端的利用馬來醯亞胺基的封端反應,則難以產生副反應或高分子量體,因此較佳。 若為此種製造方法,則所獲得的雙馬來醯亞胺化合物具有嵌段共聚物結構,因此可均勻且提高所合成的樹脂的相容性。 In step B, maleic acid is synthesized by reacting the diamine having amino groups at both ends obtained in step B with maleic anhydride at room temperature (25°C) to 100°C, and finally, the water in the system generated as a by-product under the condition of 95°C to 120°C is removed and closed-loop dehydration is performed, thereby using maleimide groups to cap the ends of the molecular chain, and the target bismaleimide compound can be obtained. If the capping reaction of the ends of the molecular chain using maleimide groups is performed below 120°C, it is difficult to produce side reactions or high molecular weight bodies, so it is better. If this manufacturing method is used, the obtained bismaleimide compound has a block copolymer structure, so it can be uniform and improve the compatibility of the synthesized resin.
本發明的化合物的精製方法可為常規方法,可使用再沈降等。The compound of the present invention may be purified by a conventional method, and reprecipitation or the like may be used.
作為所述反應中的原料的混合比,較佳為使得(有助於R 1的結構的芳香族二胺及有助於R 2的結構的芳香族以外的包含碳數6~200的二價烴的有機二胺的合計莫耳數):(四元酸二酐(R 3)的合計莫耳數+馬來酸酐的莫耳數的1/2)為1:1。另外,於使用所述有機二胺(R 2)的情況下,就處於獲得光硬化性更良好的組成物的傾向的觀點而言,較佳為(有機二胺(R 2)的莫耳數):(芳香族二胺(R 1)的莫耳數)成為0.1以上。再者,於使用所述有機二胺(R 2)的情況下,包含芳香族二胺(R 1)及四羧酸二酐(R 3)的醯胺酸單元與包含有機二胺(R 2)及四羧酸二酐(R 3)的醯胺酸單元的聚合形態可為無規聚合,亦可為嵌段聚合。 The mixing ratio of the raw materials in the reaction is preferably such that (the total molar number of the aromatic diamine contributing to the structure of R1 and the non-aromatic organic diamine containing a divalent hydrocarbon having 6 to 200 carbon atoms contributing to the structure of R2 ): (the total molar number of the tetrabasic acid dianhydride ( R3 ) + 1/2 of the molar number of maleic anhydride) is 1:1. In addition, when the organic diamine ( R2 ) is used, from the viewpoint of the tendency to obtain a composition with better photocurability, the ratio of (the molar number of the organic diamine ( R2 )): (the molar number of the aromatic diamine ( R1 )) is preferably 0.1 or more. Furthermore, when the organic diamine (R 2 ) is used, the polymerization form of the amide unit comprising the aromatic diamine (R 1 ) and tetracarboxylic dianhydride (R 3 ) and the amide unit comprising the organic diamine (R 2 ) and tetracarboxylic dianhydride (R 3 ) may be random polymerization or block polymerization.
〔包含一個以上的羧基的化合物(B)〕 本實施方式的樹脂組成物含有包含一個以上的羧基的化合物(B)(亦稱為成分(B)或化合物(B))。化合物(B)只要於化合物中包含一個以上的羧基,則並無特別限定。羧基可為鈉鹽及鉀鹽等鹽,於分子內包含兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。化合物(B)亦能夠單獨使用一種或適當混合使用兩種以上。 [Compound (B) containing one or more carboxyl groups] The resin composition of the present embodiment contains a compound (B) containing one or more carboxyl groups (also referred to as component (B) or compound (B)). The compound (B) is not particularly limited as long as it contains one or more carboxyl groups in the compound. The carboxyl group may be a salt such as a sodium salt or a potassium salt. When the molecule contains two or more carboxyl groups, it may be an acid anhydride formed by the mutual linkage of these groups. The compound (B) may be used alone or in combination of two or more.
可使用各種活性能量線使所述化合物(B)與本實施方式的雙馬來醯亞胺化合物(A)及後述的光硬化起始劑(C)一起進行光硬化而獲得硬化物。另外,根據本實施方式,於未曝光部中,可獲得包含化合物(B)的樹脂組成物。 所述化合物(B)於製備以1質量%包含所述化合物(B)的N-甲基吡咯啶酮溶液、並使用包含波長365 nm(i射線)的活性能量線對以1質量%包含化合物(B)的N-甲基吡咯啶酮溶液測定透過率的情況下,其透過率較佳為5%以上。此種化合物(B)示出非常優異的光透過性。另外,於使用包含波長405 nm(h射線)的活性能量線對以1質量%包含化合物(B)的N-甲基吡咯啶酮溶液測定透過率的情況下,其透過率較佳為5%以上,該情況下亦示出非常優異的光透過性。若使用此種化合物(B),則例如於使用直接描繪曝光法製造具有高密度且高精細的配線形成(圖案)的印刷配線板時,即便於使用了包含波長405 nm(h射線)的活性能量線的情況下,亦有效率地引起馬來醯亞胺的光自由基反應。就可獲得光硬化性更優異的樹脂組成物而言,波長365 nm(i射線)下的透過率的較佳範圍依序為8%以上、10%以上、20%以上、30%以上、及40%以上。就可獲得光硬化性更優異的樹脂組成物而言,波長405 nm(h射線)下的透過率的較佳範圍依序為8%以上、10%以上、20%以上、30%以上、及40%以上。再者,於波長365 nm(i射線)下的透過率、及波長405 nm(h射線)下的透過率中,各自的上限例如為99.9%以下,亦可為100%以下。 The compound (B) can be photocured together with the dimaleimide compound (A) of the present embodiment and the photocuring initiator (C) described later using various active energy rays to obtain a cured product. In addition, according to the present embodiment, a resin composition containing the compound (B) can be obtained in the unexposed portion. When a 1% by mass N-methylpyrrolidone solution containing the compound (B) is prepared and the transmittance of the 1% by mass N-methylpyrrolidone solution containing the compound (B) is measured using active energy rays having a wavelength of 365 nm (i-rays), the transmittance is preferably 5% or more. Such a compound (B) shows very excellent light transmittance. In addition, when the transmittance of a 1 mass % N-methylpyrrolidone solution containing the compound (B) is measured using active energy rays containing a wavelength of 405 nm (h-rays), the transmittance is preferably 5% or more, which also shows very excellent light transmittance. If such a compound (B) is used, for example, when a printed wiring board having a high-density and high-precision wiring formation (pattern) is manufactured using a direct writing exposure method, a photoradical reaction of maleimide is efficiently induced even when active energy rays containing a wavelength of 405 nm (h-rays) are used. For obtaining a resin composition with better photocurability, the preferred range of transmittance at a wavelength of 365 nm (i-rays) is 8% or more, 10% or more, 20% or more, 30% or more, and 40% or more, respectively. For a resin composition that can obtain better photocurability, the preferred range of transmittance at a wavelength of 405 nm (h-ray) is 8% or more, 10% or more, 20% or more, 30% or more, and 40% or more. Furthermore, the upper limits of the transmittance at a wavelength of 365 nm (i-ray) and the transmittance at a wavelength of 405 nm (h-ray) are, for example, 99.9% or less, and may be 100% or less.
於本實施方式中,就獲得更優異的鹼顯影性的方面而言,較佳為於化合物(B)的分子中以1~4的整數包含羧基。In the present embodiment, from the viewpoint of obtaining more excellent alkali developing property, it is preferred that the compound (B) contains 1 to 4 carboxyl groups in the molecule.
就進一步提高顯影性的方面而言,所述化合物(B)的分子量較佳為50~1000,更佳為100~800。In order to further improve the developing property, the molecular weight of the compound (B) is preferably 50 to 1,000, more preferably 100 to 800.
作為所述化合物(B),例如可列舉:甲酸、包含一個以上的羧基的脂肪族化合物、包含一個以上的羧基的芳香族化合物、及包含一個以上的羧基的雜化合物。該些化合物(B)亦能夠單獨使用一種或適當混合使用兩種以上。Examples of the compound (B) include formic acid, aliphatic compounds containing one or more carboxyl groups, aromatic compounds containing one or more carboxyl groups, and hetero compounds containing one or more carboxyl groups. These compounds (B) may be used alone or in combination of two or more.
(包含一個以上的羧基的脂肪族化合物) 作為包含一個以上的羧基的脂肪族化合物,例如可列舉:鏈狀脂肪族單羧酸、脂環式單羧酸、鏈狀脂肪族多元羧酸、及脂環式多元羧酸。該些化合物亦可於分子內具有氫原子、以及烷基、烷氧基、芳基氧基、芳基、胺基烷基、羥基、胺基、及羧基烷基等取代基。另外,該些化合物於分子內具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。該些化合物於分子內具有羧基烷基的情況下,亦可為羧基烷基與羧基相互連結而形成的酸酐。該些化合物於分子內具有兩個以上的羧基烷基的情況下,亦可為該些相互連結而形成的酸酐。 (Aliphatic compounds containing one or more carboxyl groups) Examples of aliphatic compounds containing one or more carboxyl groups include chain aliphatic monocarboxylic acids, alicyclic monocarboxylic acids, chain aliphatic polycarboxylic acids, and alicyclic polycarboxylic acids. These compounds may also have hydrogen atoms, and substituents such as alkyl, alkoxy, aryloxy, aryl, aminoalkyl, hydroxyl, amino, and carboxylalkyl groups in the molecule. In addition, when these compounds have two or more carboxyl groups in the molecule, they may be acid anhydrides formed by these groups being linked to each other. When these compounds have carboxylalkyl groups in the molecule, they may be acid anhydrides formed by carboxylalkyl groups and carboxyl groups being linked to each other. When these compounds have two or more carboxylalkyl groups in the molecule, they may be acid anhydrides formed by these groups being linked to each other.
作為烷基,例如可列舉:甲基、乙基、正丙基、異丙基、丁基、異丁基、第二丁基、第三丁基、正戊基、正己基、正庚基、及正辛基。 作為烷氧基,例如可列舉:甲氧基、乙氧基、丙氧基、異丙氧基、正丁氧基、異丁氧基、第三丁氧基、正己氧基、及2-甲基丙氧基等。 作為芳基氧基,例如可列舉苯氧基及對甲苯基氧基。 作為芳基,例如可列舉:苯基、甲苯甲醯基、苄基、甲基苄基、二甲苯基、均三甲苯基、萘基、及蒽基。 作為胺基烷基,例如可列舉:胺基甲基、胺基乙基、胺基丙基、胺基二甲基、胺基二乙基、胺基二丙基、胺基丁基、胺基己基、及胺基壬基等。 作為羧基烷基,例如可列舉:羧基甲基、羧基乙基、羧基丙基、羧基丁基、羧基己基、及羧基壬基等。 Examples of the alkyl group include methyl, ethyl, n-propyl, isopropyl, butyl, isobutyl, sec-butyl, t-butyl, n-pentyl, n-hexyl, n-heptyl, and n-octyl. Examples of the alkoxy group include methoxy, ethoxy, propoxy, isopropoxy, n-butoxy, isobutoxy, t-butoxy, n-hexyl, and 2-methylpropoxy. Examples of the aryloxy group include phenoxy and p-tolyloxy. Examples of the aryl group include phenyl, toluyl, benzyl, methylbenzyl, xylyl, mesityl, naphthyl, and anthracenyl. Examples of the aminoalkyl group include aminomethyl, aminoethyl, aminopropyl, aminodimethyl, aminodiethyl, aminodipropyl, aminobutyl, aminohexyl, and aminononyl. Examples of carboxyalkyl groups include carboxymethyl, carboxyethyl, carboxypropyl, carboxybutyl, carboxyhexyl, and carboxynonyl.
作為鏈狀脂肪族單羧酸,例如可列舉:乙酸、丙酸、異丁酸、丁酸、異戊酸、戊酸、己酸、乳酸、琥珀酸、辛酸、壬酸、癸酸、十二烷酸、十四烷酸、十六烷酸、十七烷酸、及十八烷酸等飽和脂肪酸;油酸、反油酸、芥子酸(erucic acid)、二十四碳烯酸(nervonic acid)、次亞麻油酸(linolenic acid)、硬脂四烯酸(stearidonic acid)、二十碳五烯酸(eicosapentaenoic acid)、亞麻油酸(linoleic acid)、及次亞麻油酸(linolenic acid)等不飽和脂肪酸。Examples of the chain aliphatic monocarboxylic acid include saturated fatty acids such as acetic acid, propionic acid, isobutyric acid, butyric acid, isovaleric acid, valeric acid, caproic acid, lactic acid, succinic acid, octanoic acid, nonanoic acid, decanoic acid, dodecanoic acid, tetradecanoic acid, hexadecanoic acid, heptadecanoic acid, and octadecanoic acid; and unsaturated fatty acids such as oleic acid, elaidic acid, erucic acid, nervonic acid, linolenic acid, stearidonic acid, eicosapentaenoic acid, linoleic acid, and linolenic acid.
作為脂環式單羧酸,例如可列舉:環丙烷羧酸、環丙烯羧酸、環丁烷羧酸、環丁烯羧酸、環戊烷羧酸、環戊烯羧酸、環己烷羧酸、環己烯羧酸、環庚烷羧酸、環庚烯羧酸、環辛烷羧酸、及環辛烯羧酸等單環式羧酸;降冰片烷羧酸、三環癸烷羧酸、四環十二烷羧酸、金剛烷羧酸、甲基金剛烷羧酸、乙基金剛烷羧酸、及丁基金剛烷羧酸等多環式或橋聯脂環式羧酸等。Examples of the alicyclic monocarboxylic acid include monocyclic carboxylic acids such as cyclopropanecarboxylic acid, cyclopropenecarboxylic acid, cyclobutanecarboxylic acid, cyclobutenecarboxylic acid, cyclopentanecarboxylic acid, cyclopentenecarboxylic acid, cyclohexanecarboxylic acid, cyclohexenecarboxylic acid, cycloheptanecarboxylic acid, cycloheptenecarboxylic acid, cyclooctanecarboxylic acid, and cyclooctenecarboxylic acid; and polycyclic or bridged alicyclic carboxylic acids such as norbornanecarboxylic acid, tricyclodecanecarboxylic acid, tetracyclododecanecarboxylic acid, adamantanecarboxylic acid, methyladamantanecarboxylic acid, ethyladamantanecarboxylic acid, and butyladamantanecarboxylic acid.
作為鏈狀脂肪族多元羧酸,可列舉於鏈狀脂肪族單羧酸上進一步附加一個以上的羧基而成的羧酸。例如可列舉:丙烷二酸、辛烷二酸、壬烷二酸、癸烷二酸、十二烷二酸、十四烷二酸、十六烷二酸、十七烷二酸、及十八烷二酸等。Examples of the chain aliphatic polycarboxylic acid include carboxylic acids obtained by adding one or more carboxyl groups to a chain aliphatic monocarboxylic acid, such as propane diacid, octanedioic acid, nonane diacid, decanedioic acid, dodecanedioic acid, tetradecanedioic acid, hexadecanedioic acid, heptadecanedioic acid, and octadecanedioic acid.
作為脂環式多元羧酸,可列舉於脂環式單羧酸上進一步附加一個以上的羧基而成的羧酸。例如可列舉:環丙烷二羧酸、環丙烯二羧酸、環丙烷三羧酸、環丙烯三羧酸、環丁烷二羧酸、環丁烯二羧酸、環丁烷三羧酸、環丁烯三羧酸、環丁烷四羧酸、環丁烯四羧酸、環戊烷二羧酸、環戊烯二羧酸、環戊烷三羧酸、環戊烯三羧酸、環戊烷四羧酸、環戊烯四羧酸、環戊烷五羧酸、環戊烯五羧酸、環己烷二羧酸、環己烯二羧酸、環己烷三羧酸、環己烯三羧酸、環己烷四羧酸、環己烯四羧酸、環己烷五羧酸、環己烯五羧酸、環己烷六羧酸、環己烯六羧酸、環庚烷二羧酸、環庚烯二羧酸、環辛烷二羧酸、及環辛烯二羧酸等單環式羧酸;降冰片烷二羧酸、及金剛烷二羧酸等多環式或橋聯脂環式二羧酸等。Examples of the alicyclic polycarboxylic acid include carboxylic acids obtained by further adding one or more carboxyl groups to an alicyclic monocarboxylic acid. Examples include cyclopropane dicarboxylic acid, cyclopropylene dicarboxylic acid, cyclopropane tricarboxylic acid, cyclopropylene tricarboxylic acid, cyclobutane dicarboxylic acid, cyclobutene dicarboxylic acid, cyclobutane tricarboxylic acid, cyclobutene tricarboxylic acid, cyclobutane tetracarboxylic acid, cyclobutene tetracarboxylic acid, cyclopentane dicarboxylic acid, cyclopentene dicarboxylic acid, cyclopentane tricarboxylic acid, cyclopentene tricarboxylic acid, cyclopentane tetracarboxylic acid, cyclopentene tetracarboxylic acid, cyclopentane pentacarboxylic acid, cyclopentene pentacarboxylic acid, cyclobutane tetracarboxylic acid, cyclopentane pentacarboxylic acid, cyclopentene pentacarboxylic acid, cyclobutane tetracarboxylic acid, cyclopentane pentacarboxylic acid, cyclopentene pentacarboxylic acid, cyclopent ... Monocyclic carboxylic acids such as hexanedicarboxylic acid, cyclohexenedicarboxylic acid, cyclohexanetricarboxylic acid, cyclohexenetricarboxylic acid, cyclohexanetetracarboxylic acid, cyclohexenetetracarboxylic acid, cyclohexanepentacarboxylic acid, cyclohexenepentacarboxylic acid, cyclohexanehexacarboxylic acid, cyclohexenehexacarboxylic acid, cycloheptanedicarboxylic acid, cycloheptenedicarboxylic acid, cyclooctanedicarboxylic acid, and cyclooctenedicarboxylic acid; polycyclic or bridged aliphatic ring dicarboxylic acids such as norbornanedicarboxylic acid and adamantanedicarboxylic acid, etc.
(包含一個以上的羧基的芳香族化合物) 作為包含一個以上的羧基的芳香族化合物的母體骨架,例如可列舉:苯甲酸、伸苯基乙酸、水楊酸、鄰苯二甲酸、偏苯三甲酸、均苯四甲酸、五羧基苯、六羧基苯、萘羧酸、萘二羧酸、萘三羧酸、萘四羧酸、蒽羧酸、蒽二羧酸、蒽三羧酸、蒽四羧酸、蒽五羧酸等。芳香族化合物亦可於該些母體骨架的芳香環上具有例如氫原子、以及烷基、烷氧基、芳基氧基、芳基、胺基烷基、羥基、胺基、及羧基烷基等取代基。另外,該些化合物於分子內具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。該些化合物於分子內具有羧基烷基的情況下,亦可為羧基烷基與羧基相互連結而形成的酸酐。該些化合物於分子內具有兩個以上的羧基烷基的情況下,亦可為該些相互連結而形成的酸酐。關於該些取代基,可參照上文所述。 (Aromatic compounds containing one or more carboxyl groups) Examples of the parent skeleton of aromatic compounds containing one or more carboxyl groups include benzoic acid, phenylacetic acid, salicylic acid, phthalic acid, trimellitic acid, pyromellitic acid, pentacarboxybenzene, hexacarboxybenzene, naphthalenecarboxylic acid, naphthalene dicarboxylic acid, naphthalene tricarboxylic acid, naphthalene tetracarboxylic acid, anthracene carboxylic acid, anthracene dicarboxylic acid, anthracene tricarboxylic acid, anthracene tetracarboxylic acid, anthracene pentacarboxylic acid, etc. Aromatic compounds may also have substituents such as hydrogen atoms, and alkyl, alkoxy, aryloxy, aryl, aminoalkyl, hydroxyl, amino, and carboxyalkyl groups on the aromatic rings of these parent skeletons. In addition, when these compounds have two or more carboxyl groups in the molecule, they may be acid anhydrides formed by the mutual linkage of these groups. When these compounds have carboxyalkyl groups in the molecule, they may be acid anhydrides formed by the mutual linkage of carboxyalkyl and carboxyl groups. When these compounds have two or more carboxyalkyl groups in the molecule, they may also be acid anhydrides formed by the mutual linkage of these groups. For these substituents, please refer to the above description.
(包含一個以上的羧基的雜化合物) 作為包含一個以上的羧基的雜化合物的母體骨架,例如可列舉於呋喃、噻吩、吡咯、咪唑、吡喃、吡啶、嘧啶、吡嗪、吡咯啶、哌啶、哌嗪、嗎啉、吲哚、嘌呤、喹啉、異喹啉、奎寧環(quinuclidine)、苯並哌喃(chromene)、噻嗯、啡噻嗪、啡噁噻、呫噸、吖啶、啡嗪、及咔唑等雜環中包含一個以上的羧基的化合物。雜化合物亦可於該些母體骨架上具有例如氫原子、以及烷基、烷氧基、芳基氧基、芳基、胺基烷基、羥基、胺基、及羧基烷基等取代基。另外,該些化合物於分子內具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。該些化合物於分子內具有羧基烷基的情況下,亦可為羧基烷基與羧基相互連結而形成的酸酐。該些化合物於分子內具有兩個以上的羧基烷基的情況下,亦可為該些相互連結而形成的酸酐。關於該些取代基,可參照上文所述。 (Hetero compounds containing one or more carboxyl groups) As the parent skeleton of the hetero compound containing one or more carboxyl groups, for example, there can be listed compounds containing one or more carboxyl groups in hetero rings such as furan, thiophene, pyrrole, imidazole, pyran, pyridine, pyrimidine, pyrazine, pyrrolidine, piperidine, piperazine, morpholine, indole, purine, quinoline, isoquinoline, quinuclidine, chromene, thione, phenothiazine, phenothiazine, xanthine, acridine, phenazine, and carbazole. The hetero compound may also have substituents such as hydrogen atoms, and alkyl, alkoxy, aryloxy, aryl, aminoalkyl, hydroxyl, amino, and carboxylalkyl groups on these parent skeletons. In addition, when these compounds have two or more carboxyl groups in the molecule, they may also be acid anhydrides formed by the mutual linkage of these groups. When these compounds have a carboxyalkyl group in the molecule, they may also be an acid anhydride formed by the carboxyalkyl group and the carboxyl group being linked to each other. When these compounds have two or more carboxyalkyl groups in the molecule, they may also be an acid anhydride formed by the carboxyalkyl group and the carboxyl group being linked to each other. For these substituents, please refer to the above description.
作為所述化合物(B),就可對樹脂組成物賦予更優異的鹼顯影性的方面而言,較佳為式(3)所表示的化合物、式(4)所表示的化合物、式(5)所表示的化合物、及式(6)所表示的化合物。就鹼顯影性的觀點而言,更佳為式(4)所表示的化合物、式(5)所表示的化合物、及式(6)所表示的化合物。As the compound (B), from the viewpoint of imparting better alkali development property to the resin composition, the compound represented by formula (3), the compound represented by formula (4), the compound represented by formula (5), and the compound represented by formula (6) are preferred. From the viewpoint of alkali development property, the compound represented by formula (4), the compound represented by formula (5), and the compound represented by formula (6) are more preferred.
式(3)所表示的化合物如下所述。The compound represented by formula (3) is as follows.
[化25] [Chemistry 25]
式(3)中,R 6各自獨立地表示氫原子、羥基、羧基、胺基或胺基甲基。另外,式(3)所表示的化合物於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。式(3)中,羧基數量的上限為6。 就鹼顯影性的方面而言,R 6較佳為各自獨立地為氫原子、羥基、羧基、或胺基,就獲得更優異的鹼顯影性的方面而言,更佳為包含羧基。 另外,o各自獨立地表示1~5的整數。 In formula (3), R 6 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, an amino group or an aminomethyl group. In addition, when the compound represented by formula (3) has two or more carboxyl groups, they may also be an acid anhydride formed by linking these groups to each other. In formula (3), the upper limit of the number of carboxyl groups is 6. In terms of alkali development, R 6 is preferably each independently a hydrogen atom, a hydroxyl group, a carboxyl group or an amino group, and in terms of obtaining better alkali development, it is more preferably to include a carboxyl group. In addition, o each independently represents an integer of 1 to 5.
作為式(3)所表示的化合物,就獲得更優異的鹼顯影性的方面而言,較佳為式(27)所表示的化合物。As the compound represented by the formula (3), a compound represented by the formula (27) is preferred in terms of obtaining better alkali developing properties.
[化26] [Chemistry 26]
式(27)中,R 6各自獨立地表示氫原子、羥基、胺基或胺基甲基。就示出更優異的鹼顯影性的方面而言,R 6較佳為氫原子或羥基,更佳為氫原子。 另外,o'各自獨立地表示0~4的整數。 羧基數量s表示5-o的整數。就示出更優異的鹼顯影性的方面而言,羧基數量s較佳為1~3的整數。該情況下,R 6的數量o為5-s的整數且為2~4的整數。 式(27)所表示的化合物包含兩個以上的羧基,亦可為該些相互連結而形成的酸酐。 In formula (27), R 6 each independently represents a hydrogen atom, a hydroxyl group, an amino group or an aminomethyl group. In terms of showing better alkali development, R 6 is preferably a hydrogen atom or a hydroxyl group, and more preferably a hydrogen atom. In addition, o' each independently represents an integer from 0 to 4. The number of carboxyl groups s represents an integer from 5 to o. In terms of showing better alkali development, the number of carboxyl groups s is preferably an integer from 1 to 3. In this case, the number o of R 6 is an integer from 5 to s and is an integer from 2 to 4. The compound represented by formula (27) contains two or more carboxyl groups, and may also be an acid anhydride formed by these groups being linked to each other.
作為式(27)所表示的化合物,例如可列舉:4-胺基苯甲酸、水楊酸、鄰苯二甲酸、偏苯三甲酸、均苯四甲酸、4-胺基甲基苯甲酸、及該些的酸酐。作為該些酸酐,例如可列舉:鄰苯二甲酸酐、偏苯三甲酸酐、均苯四甲酸酐。作為式(27)所表示的化合物,就獲得更優異的鹼顯影性的方面而言,較佳為鄰苯二甲酸、偏苯三甲酸、均苯四甲酸、及該些的酸酐。Examples of the compound represented by formula (27) include 4-aminobenzoic acid, salicylic acid, phthalic acid, trimellitic acid, pyromellitic acid, 4-aminomethylbenzoic acid, and anhydrides thereof. Examples of the anhydrides include phthalic anhydride, trimellitic anhydride, and pyromellitic anhydride. As the compound represented by formula (27), phthalic acid, trimellitic acid, pyromellitic acid, and anhydrides thereof are preferred in terms of obtaining better alkali developing properties.
式(4)所表示的化合物如下所述。The compound represented by formula (4) is as follows.
[化27] [Chemistry 27]
式(4)中,R 7各自獨立地表示氫原子、羥基、羧基、羧基甲基、胺基或胺基甲基。另外,式(4)所表示的化合物於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。式(4)中,羧基數量的上限為10。式(4)所表示的化合物於具有羧基甲基的情況下,亦可為羧基甲基與羧基相互連結而形成的酸酐。 就鹼顯影性的方面而言,R 7較佳為各自獨立地為氫原子、羥基、羧基、或胺基,就獲得更優異的鹼顯影性的方面而言,更佳為包含羧基。 另外,p各自獨立地表示1~9的整數。 再者,哌啶羧酸與其他包含一個以上的羧基的化合物(B)相比,處於鹼顯影性差的傾向。 In formula (4), R7 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, a carboxylmethyl group, an amino group or an aminomethyl group. In addition, when the compound represented by formula (4) has two or more carboxyl groups, these groups may be linked to form an acid anhydride. In formula (4), the upper limit of the number of carboxyl groups is 10. When the compound represented by formula (4) has a carboxylmethyl group, it may be a carboxylmethyl group and a carboxyl group are linked to form an acid anhydride. In terms of alkali development, R7 is preferably each independently a hydrogen atom, a hydroxyl group, a carboxyl group, or an amino group, and in terms of obtaining better alkali development, it is more preferably to contain a carboxyl group. In addition, p each independently represents an integer of 1 to 9. Furthermore, piperidinecarboxylic acid tends to have poor alkali development compared to other compounds (B) containing one or more carboxyl groups.
作為R 7,於包含羧基的情況下,就鹼顯影性的方面而言,羧基數量p較佳為1~3。作為羧基以外的R 7,較佳為各自獨立地為氫原子或羥基,更佳為氫原子。於式(4)所表示的化合物包含1~3的羧基的情況下,羧基以外的R 7的數量為7~9。 When R 7 contains a carboxyl group, the number of carboxyl groups p is preferably 1 to 3 from the viewpoint of alkali developability. R 7 other than a carboxyl group is preferably independently a hydrogen atom or a hydroxyl group, more preferably a hydrogen atom. When the compound represented by formula (4) contains 1 to 3 carboxyl groups, the number of R 7 other than a carboxyl group is 7 to 9.
作為式(4)所表示的化合物,例如可列舉:哌啶羧酸、1,2-哌啶二羧酸、及哌啶二羧酸酐。Examples of the compound represented by formula (4) include piperidinecarboxylic acid, 1,2-piperidinedicarboxylic acid, and piperidinedicarboxylic anhydride.
式(5)所表示的化合物如下所述。The compound represented by formula (5) is as follows.
[化28] [Chemistry 28]
式(5)中,R 8各自獨立地表示氫原子、羥基、羧基、羧基甲基、胺基或胺基甲基。另外,式(5)所表示的化合物於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。式(5)中,羧基數量的上限為10。式(5)所表示的化合物於具有羧基甲基的情況下,亦可為羧基甲基與羧基相互連結而形成的酸酐。 就鹼顯影性的方面而言,R 8較佳為各自獨立地為氫原子、羥基、羧基、或胺基,就獲得更優異的鹼顯影性的方面而言,更佳為包含羧基。 另外,q各自獨立地表示1~9的整數。 In formula (5), R8 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, a carboxymethyl group, an amino group, or an aminomethyl group. In addition, when the compound represented by formula (5) has two or more carboxyl groups, these groups may be linked to each other to form an acid anhydride. In formula (5), the upper limit of the number of carboxyl groups is 10. When the compound represented by formula (5) has a carboxymethyl group, it may be an acid anhydride formed by a carboxymethyl group and a carboxyl group linked to each other. In terms of alkali development, R8 is preferably each independently a hydrogen atom, a hydroxyl group, a carboxyl group, or an amino group, and in terms of obtaining better alkali development, it is more preferably to contain a carboxyl group. In addition, q each independently represents an integer of 1 to 9.
作為式(5)所表示的化合物,就獲得更優異的鹼顯影性的方面而言,較佳為式(28)所表示的化合物。As the compound represented by the formula (5), a compound represented by the formula (28) is preferred in terms of obtaining better alkali developing properties.
[化29] [Chemistry 29]
式(28)中,R 8各自獨立地表示氫原子、羥基、羧基甲基、胺基或胺基甲基。就示出更優異的鹼顯影性的方面而言,R 8較佳為氫原子或羥基,更佳為氫原子。 另外,q'各自獨立地表示0~8的整數。 羧基數量t表示9-q的整數。就示出更優異的鹼顯影性的方面而言,羧基數量t較佳為1~3的整數。該情況下,R 8的數量q為9-t的整數且為6~8的整數。 式(28)所表示的化合物包含兩個以上的羧基,亦可為該些相互連結而形成的酸酐。另外,式(28)所表示的化合物於具有羧基甲基的情況下,亦可為羧基甲基與羧基兩者相互連結而形成的酸酐。 In formula (28), R8 each independently represents a hydrogen atom, a hydroxyl group, a carboxymethyl group, an amino group or an aminomethyl group. In terms of showing better alkali development, R8 is preferably a hydrogen atom or a hydroxyl group, and more preferably a hydrogen atom. In addition, q' each independently represents an integer of 0 to 8. The number of carboxyl groups t represents an integer of 9-q. In terms of showing better alkali development, the number of carboxyl groups t is preferably an integer of 1 to 3. In this case, the number q of R8 is an integer of 9-t and an integer of 6 to 8. The compound represented by formula (28) contains two or more carboxyl groups, and may also be an acid anhydride formed by these groups being linked to each other. In addition, when the compound represented by formula (28) has a carboxymethyl group, it may also be an acid anhydride formed by the carboxymethyl group and the carboxyl group being linked to each other.
作為式(28)所表示的化合物,例如可列舉:3-環己烯-1-羧酸、順-4-環己烯-1,2-二羧酸、及順-4-環己烯-1,2-二羧酸酐。作為式(28)所表示的化合物,就獲得更優異的鹼顯影性的方面而言,較佳為順-4-環己烯-1,2-二羧酸、及順-4-環己烯-1,2-二羧酸酐。Examples of the compound represented by formula (28) include 3-cyclohexene-1-carboxylic acid, cis-4-cyclohexene-1,2-dicarboxylic acid, and cis-4-cyclohexene-1,2-dicarboxylic anhydride. In terms of obtaining better alkali developing properties, the compound represented by formula (28) is preferably cis-4-cyclohexene-1,2-dicarboxylic acid and cis-4-cyclohexene-1,2-dicarboxylic anhydride.
式(6)所表示的化合物如下所述。The compound represented by formula (6) is as follows.
[化30] [Chemistry 30]
式(6)中,R 9各自獨立地表示氫原子、羥基、羧基、羧基甲基、胺基或胺基甲基。另外,式(6)所表示的化合物於具有一個以上的羧基的情況下,亦可為羧基甲基與羧基相互連結而形成的酸酐。另外,式(6)中,於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。式(6)中,羧基數量的上限為5。式(6)中,於具有兩個以上的羧基甲基的情況下,亦可為該些相互連結而形成的酸酐。式(6)中,羧基甲基數量的上限為6。 就鹼顯影性的方面而言,R 9較佳為各自獨立地為氫原子、羥基、羧基、或胺基,就獲得更優異的鹼顯影性的方面而言,更佳為包含羧基。 另外,r各自獨立地表示1~5的整數。 In formula (6), R 9 each independently represents a hydrogen atom, a hydroxyl group, a carboxyl group, a carboxylmethyl group, an amino group, or an aminomethyl group. In addition, when the compound represented by formula (6) has one or more carboxyl groups, it may be an acid anhydride formed by a carboxylmethyl group and a carboxyl group linked to each other. In addition, in formula (6), when there are two or more carboxyl groups, it may be an acid anhydride formed by these groups linked to each other. In formula (6), the upper limit of the number of carboxyl groups is 5. In formula (6), when there are two or more carboxylmethyl groups, it may be an acid anhydride formed by these groups linked to each other. In formula (6), the upper limit of the number of carboxylmethyl groups is 6. In terms of alkali development, R 9 is preferably each independently a hydrogen atom, a hydroxyl group, a carboxyl group, or an amino group, and in terms of obtaining better alkali development, it is more preferable to contain a carboxyl group. In addition, r each independently represents an integer from 1 to 5.
作為式(6)所表示的化合物,就獲得更優異的鹼顯影性的方面而言,較佳為式(29)所表示的化合物。As the compound represented by the formula (6), a compound represented by the formula (29) is preferred in terms of obtaining better alkali developing properties.
[化31] [Chemistry 31]
式(29)中,R 9各自獨立地表示氫原子、羥基、羧基甲基、胺基或胺基甲基。就示出更優異的鹼顯影性的方面而言,R 9較佳為氫原子或羥基,更佳為氫原子。 另外,r'各自獨立地表示0~4的整數。 羧基數量u表示5-r'的整數。就示出更優異的鹼顯影性的方面而言,羧基數量u較佳為1~3的整數。該情況下,R 9的數量r'為5-u的整數且為2~4的整數。 式(29)中,亦可為羧基甲基與羧基兩者相互連結而形成的酸酐。式(29)所表示的化合物於具有兩個以上的羧基的情況下,亦可為該些相互連結而形成的酸酐。式(29)中,羧基數量的上限為5。式(29)所表示的化合物於具有兩個以上的羧基甲基的情況下,亦可為該些相互連結而形成的酸酐。式(29)中,羧基甲基數量的上限為6。 In formula (29), R 9 each independently represents a hydrogen atom, a hydroxyl group, a carboxymethyl group, an amino group or an aminomethyl group. In terms of showing better alkali development, R 9 is preferably a hydrogen atom or a hydroxyl group, and more preferably a hydrogen atom. In addition, r' each independently represents an integer of 0 to 4. The number of carboxyl groups u represents an integer of 5-r'. In terms of showing better alkali development, the number of carboxyl groups u is preferably an integer of 1 to 3. In this case, the number of R 9 r' is an integer of 5-u and an integer of 2 to 4. In formula (29), it may be an acid anhydride formed by the carboxymethyl group and the carboxyl group being linked to each other. When the compound represented by formula (29) has two or more carboxyl groups, it may also be an acid anhydride formed by the two groups being linked to each other. In formula (29), the upper limit of the number of carboxyl groups is 5. When the compound represented by formula (29) has two or more carboxymethyl groups, these groups may be linked to each other to form an acid anhydride. In formula (29), the upper limit of the number of carboxymethyl groups is 6.
作為式(29)所表示的化合物,例如可列舉:伸苯基乙酸、1,2-伸苯基二乙酸、1,3-伸苯基二乙酸、1,4-伸苯基二乙酸、及該些的酸酐。作為該些的酸酐,例如可列舉1,2-伸苯基二乙酸酐。作為式(29)所表示的化合物,就獲得更優異的鹼顯影性的方面而言,較佳為1,2-伸苯基二乙酸。 該些包含一個以上的羧基的化合物(B)亦能夠單獨使用一種或適當混合使用兩種以上。 As the compound represented by formula (29), for example, phenylacetic acid, 1,2-phenyldiacetic acid, 1,3-phenyldiacetic acid, 1,4-phenyldiacetic acid, and their anhydrides can be listed. As their anhydrides, for example, 1,2-phenyldiacetic acid anhydride can be listed. As the compound represented by formula (29), 1,2-phenyldiacetic acid is preferred in terms of obtaining better alkali development properties. These compounds (B) containing one or more carboxyl groups can also be used alone or in combination of two or more.
於所述樹脂組成物中,關於包含一個以上的羧基的化合物(B)的含量,就可對樹脂組成物賦予更優異的鹼顯影性而言,相對於雙馬來醯亞胺化合物(A)、包含一個以上的羧基的化合物(B)及後述的光硬化起始劑(C)的合計100質量份,較佳為0.01質量份~50質量份,更佳為1質量份~50質量份。進而佳為1質量份~35質量份。若包含一個以上的羧基的化合物(B)少,則交聯密度變高,因此成為耐熱性、低介電特性等硬化物性優異的組成物。In the resin composition, the content of the compound (B) containing one or more carboxyl groups is preferably 0.01 to 50 parts by mass, more preferably 1 to 50 parts by mass, based on 100 parts by mass of the total of the bismaleimide compound (A), the compound (B) containing one or more carboxyl groups, and the photocuring initiator (C) described later, in order to impart better alkali developability to the resin composition. Further preferably, it is 1 to 35 parts by mass. If the amount of the compound (B) containing one or more carboxyl groups is small, the crosslinking density becomes high, thereby becoming a composition with excellent curing properties such as heat resistance and low dielectric properties.
〔光硬化起始劑(C)〕 所述樹脂組成物包含光硬化起始劑(C)(亦稱為成分(C))。光硬化起始劑(C)並無特別限定,可使用一般於光硬化性樹脂組成物中使用的領域中公知者。光硬化起始劑(C)可用於使用各種活性能量線而與雙馬來醯亞胺化合物(A)及包含一個以上的羧基的化合物(B)一起進行光硬化。 [Photocuring initiator (C)] The resin composition includes a photocuring initiator (C) (also referred to as component (C)). The photocuring initiator (C) is not particularly limited, and a known one generally used in a photocurable resin composition can be used. The photocuring initiator (C) can be used to perform photocuring together with a dimaleimide compound (A) and a compound (B) containing one or more carboxyl groups using various active energy rays.
作為光硬化起始劑(C),例如可列舉:安息香、安息香甲醚、安息香乙醚、安息香丙醚、及安息香異丁醚等安息香類、由過氧化苯甲醯、月桂醯基過氧化物、乙醯基過氧化物、對氯苯甲醯基過氧化物、及二過氧化鄰苯二甲酸二-第三丁酯等例示的有機過氧化物;2,4,6-三甲基苯甲醯基-二苯基-氧化膦、雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦、苯甲醯基-二苯基-氧化膦、及雙苯甲醯基-苯基氧化膦等氧化膦類;苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、2-羥基-2-甲基-苯基丙烷-1-酮、二乙氧基苯乙酮、1-羥基環己基苯基酮、2-甲基-1-[4-(甲基硫基)苯基]-2-嗎啉基-丙烷-1-酮、及2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1等苯乙酮類;2-乙基蒽醌、2-第三丁基蒽醌、2-氯蒽醌、及2-戊基蒽醌等蒽醌類;2,4-二乙基噻噸酮、2-異丙基噻噸酮、及2-氯噻噸酮等噻噸酮類;苯乙酮二甲基縮酮、及苯偶醯二甲基縮酮等縮酮類;二苯甲酮、4-苯甲醯基-4'-甲基二苯基硫醚、及4,4'-雙甲基胺基二苯甲酮等二苯甲酮類;1,2-辛烷二酮,1-[4-(苯硫基)-,2-(O-苯甲醯基肟)]、及乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)等肟酯類等自由基型光硬化起始劑,或者氟膦酸對甲氧基苯基重氮鹽、及六氟膦酸N,N-二乙基胺基苯基重氮鹽等路易士酸的重氮鹽;六氟膦酸二苯基錪鹽、及六氟銻酸二苯基錪鹽等路易士酸的錪鹽;六氟膦酸三苯基鋶鹽、及六氟銻酸三苯基鋶鹽等路易士酸的鋶鹽;六氟銻酸三苯基鏻鹽等路易士酸的鏻鹽;其他的鹵化物;三嗪系起始劑;硼酸鹽系起始劑;其他的光酸產生劑等陽離子系光硬化起始劑。Examples of the photocuring initiator (C) include benzoins such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, and benzoin isobutyl ether; organic peroxides such as benzoyl peroxide, lauryl peroxide, acetyl peroxide, p-chlorobenzoyl peroxide, and di-tert-butyl diperoxyphthalate; 2,4,6-trimethylbenzyl-diphenyl-phosphine oxide, bis(2,4,6-trimethylbenzyl)-phenylphosphine oxide, benzoyl-diphenyl-phosphine oxide, and bis(2,4,6-trimethylbenzyl)-phenylphosphine oxide; Phosphine and other phosphine oxides; acetophenone, 2,2-diethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 2-hydroxy-2-methyl-phenylpropane-1-one, diethoxyacetophenone, 1-hydroxycyclohexylphenylketone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinyl-propane-1-one, and 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butanone-1 and other acetophenones; 2-ethylanthraquinone, 2-tert-butylanthraquinone, 2-chloroanthraquinone, and anthraquinones such as 2-amylanthraquinone; thiocones such as 2,4-diethylthiocone, 2-isopropylthiocone, and 2-chlorothiocone; ketones such as acetophenone dimethyl ketal and benzyl dimethyl ketal; benzophenones such as benzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, and 4,4'-bismethylaminobenzophenone; 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzoyloxime)], and ethyl ketone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl]-, 1- Free radical photocuring initiators such as oxime esters such as (O-acetyl oxime), or diazonium salts of Lewis acids such as p-methoxyphenyldiazonium fluorophosphonate and N,N-diethylaminophenyldiazonium hexafluorophosphonate; iodine salts of Lewis acids such as diphenyliodonium hexafluorophosphonate and diphenyliodonium hexafluoroantiphonate; coronium salts of Lewis acids such as triphenylzirconium hexafluorophosphonate and triphenylzirconium hexafluoroantiphonate; phosphonium salts of Lewis acids such as triphenylphosphonium hexafluoroantiphonate; other halides; triazine initiators; borate initiators; other cationic photocuring initiators such as photoacid generators.
作為光硬化起始劑(C),亦可利用市售品。作為市售品,例如可列舉:IGM樹脂荷蘭私人有限責任公司(IGM Resins B.V.)製造的歐米拉得(Omnirad)(註冊商標)369(商品名)、IGM樹脂荷蘭私人有限責任公司(IGM Resins B.V.)製造的歐米拉得(Omnirad)(註冊商標)819(商品名)、IGM樹脂荷蘭私人有限責任公司(IGM Resins B.V.)製造的歐米拉得(Omnirad)(註冊商標)819DW(商品名)、IGM樹脂荷蘭私人有限責任公司(IGM Resins B.V.)製造的歐米拉得(Omnirad)(註冊商標)907(商品名)、IGM樹脂荷蘭私人有限責任公司(IGM Resins B.V.)製造的歐米拉得(Omnirad)(註冊商標)TPO(商品名)、IGM樹脂荷蘭私人有限責任公司(IGM Resins B.V.)製造的歐米拉得(Omnirad)(註冊商標)TPO-G(商品名)、IGM樹脂荷蘭私人有限責任公司(IGM Resins B.V.)製造的歐米拉得(Omnirad)(註冊商標)784(商品名)、日本巴斯夫(BASF Japan)股份有限公司製造的豔佳固(Irgacure)(註冊商標)OXE01(商品名)、日本巴斯夫(BASF Japan)股份有限公司製造的豔佳固(Irgacure)(註冊商標)OXE02(商品名)、日本巴斯夫(BASF Japan)股份有限公司製造的豔佳固(Irgacure)(註冊商標)OXE03(商品名)、及日本巴斯夫(BASF Japan)股份有限公司製造的豔佳固(Irgacure)(註冊商標)OXE04(商品名)等。 光硬化起始劑(C)亦能夠單獨使用一種或適當混合使用兩種以上。 As the light curing initiator (C), a commercial product may be used. Examples of commercial products include: Omnirad (registered trademark) 369 (trade name) manufactured by IGM Resins B.V., Omnirad (registered trademark) 819 (trade name) manufactured by IGM Resins B.V., Omnirad (registered trademark) 819DW (trade name) manufactured by IGM Resins B.V., and Omnirad (registered trademark) 819DW (trade name) manufactured by IGM Resins B.V. Omnirad (registered trademark) 907 (trade name) manufactured by IGM Resins B.V., Omnirad (registered trademark) TPO (trade name) manufactured by IGM Resins B.V., Omnirad (registered trademark) TPO-G (trade name) manufactured by IGM Resins B.V., Omnirad (registered trademark) 784 (trade name) manufactured by IGM Resins B.V., BASF Japan Irgacure (registered trademark) OXE01 (trade name) manufactured by BASF Japan Co., Ltd., Irgacure (registered trademark) OXE02 (trade name) manufactured by BASF Japan Co., Ltd., Irgacure (registered trademark) OXE03 (trade name) manufactured by BASF Japan Co., Ltd., and Irgacure (registered trademark) OXE04 (trade name) manufactured by BASF Japan Co., Ltd., etc. The light curing initiator (C) can also be used alone or in combination of two or more.
所述光硬化起始劑(C)於製備以0.01質量%包含所述光硬化起始劑(C)的氯仿溶液、並使用包含波長365 nm(i射線)的活性能量線對以0.01質量%包含光硬化起始劑(C)的氯仿溶液測定吸光度的情況下,其吸光度較佳為0.1以上,該光硬化起始劑(C)示出非常優異的吸光性。另外,於使用包含波長405 nm(h射線)的活性能量線對以0.01質量%包含光硬化起始劑(C)的氯仿溶液測定吸光度的情況下,較佳為其吸光度為0.1以上,該情況下,亦示出非常優異的吸光性。若使用此種光硬化起始劑(C),則例如於使用直接描繪曝光法製造具有高密度且高精細的配線形成(圖案)的印刷配線板時,即便於使用了包含波長405 nm(h射線)的活性能量線的情況下,亦有效率地引起馬來醯亞胺的光自由基反應。再者,就可獲得光硬化性更優異的樹脂組成物而言,波長365 nm(i射線)下的吸光度更佳為0.15以上。就可獲得光硬化性更優異的樹脂組成物而言,波長405 nm(h射線)下的吸光度更佳為0.15以上。再者,於波長365(i射線)下的吸光度、及波長405 nm(h射線)下的吸光度中,各自的上限例如為99.9以下。When the photocuring initiator (C) is prepared to contain 0.01 mass % of the photocuring initiator (C) in chloroform solution, and the absorbance of the chloroform solution containing 0.01 mass % of the photocuring initiator (C) is measured using active energy rays having a wavelength of 365 nm (i-ray), the absorbance is preferably 0.1 or more, and the photocuring initiator (C) shows very excellent light absorption. In addition, when the absorbance of the chloroform solution containing 0.01 mass % of the photocuring initiator (C) is measured using active energy rays having a wavelength of 405 nm (h-ray), the absorbance is preferably 0.1 or more, and in this case, the photocuring initiator (C) also shows very excellent light absorption. If such a photocuring initiator (C) is used, for example, when a printed wiring board having a high-density and high-precision wiring formation (pattern) is manufactured by a direct writing exposure method, even when an active energy ray including a wavelength of 405 nm (h-ray) is used, a photoradical reaction of maleimide is efficiently induced. Furthermore, in order to obtain a resin composition with better photocurability, the absorbance at a wavelength of 365 nm (i-ray) is preferably 0.15 or more. In order to obtain a resin composition with better photocurability, the absorbance at a wavelength of 405 nm (h-ray) is preferably 0.15 or more. Furthermore, the upper limit of each of the absorbance at a wavelength of 365 (i-ray) and the absorbance at a wavelength of 405 nm (h-ray) is, for example, 99.9 or less.
作為此種光硬化起始劑(C),較佳為式(17)所表示的化合物。As such a photocuring initiator (C), a compound represented by formula (17) is preferred.
[化32] [Chemistry 32]
式(17)中,R 10各自獨立地表示式(18)所表示的取代基或苯基。 In formula (17), R 10 each independently represents a substituent represented by formula (18) or a phenyl group.
[化33] [Chemistry 33]
式(18)中,R 11各自獨立地表示氫原子或甲基。式(7)中,-*表示與式(17)中的磷原子(P)的鍵結鍵。 In formula (18), R 11 each independently represents a hydrogen atom or a methyl group. In formula (7), -* represents a bond with the phosphorus atom (P) in formula (17).
式(17)所表示的化合物於製備以0.01質量%包含該化合物的氯仿溶液、並使用包含波長365 nm(i射線)的活性能量線對該氯仿溶液測定吸光度的情況下,吸光度為0.1以上而相對於波長365 nm(i射線)的光示出非常優異的吸收性。因此,該化合物相對於波長365 nm(i射線)的光適宜地產生自由基。吸光度較佳為0.15以上。上限值例如為10.0以下,可為5.0以下,亦可為2.0以下。When a chloroform solution containing the compound represented by formula (17) is prepared at 0.01 mass % and the absorbance of the chloroform solution is measured using active energy rays containing a wavelength of 365 nm (i-ray), the absorbance is 0.1 or more and shows very excellent absorptivity with respect to light of a wavelength of 365 nm (i-ray). Therefore, the compound appropriately generates free radicals with respect to light of a wavelength of 365 nm (i-ray). The absorbance is preferably 0.15 or more. The upper limit value is, for example, 10.0 or less, 5.0 or less, or 2.0 or less.
另外,式(17)所表示的化合物於製備以0.01質量%包含該化合物的氯仿溶液、並使用包含波長405 nm(h射線)的活性能量線對該氯仿溶液測定吸光度的情況下,吸光度為0.1以上而相對於波長405 nm(h射線)的光示出非常優異的吸收性。因此,該化合物相對於波長405 nm(h射線)的光適宜地產生自由基。吸光度較佳為0.15以上。上限值例如為10.0以下,可為5.0以下,亦可為2.0以下。In addition, when a chloroform solution containing the compound at 0.01 mass % is prepared and the absorbance of the chloroform solution is measured using active energy rays containing a wavelength of 405 nm (h-ray), the absorbance is 0.1 or more and shows very excellent absorptivity with respect to light of a wavelength of 405 nm (h-ray). Therefore, the compound appropriately generates free radicals with respect to light of a wavelength of 405 nm (h-ray). The absorbance is preferably 0.15 or more. The upper limit value is, for example, 10.0 or less, 5.0 or less, or 2.0 or less.
式(17)中,R 10各自獨立地表示式(18)所表示的取代基或苯基。R 10中,較佳為一個以上為式(18)所表示的取代基。 式(18)中,R 11各自獨立地表示氫原子或甲基。R 11中,較佳為一個以上為甲基,更佳為全部為甲基。 In formula (17), R 10 each independently represents a substituent represented by formula (18) or a phenyl group. Among R 10 , preferably one or more are substituents represented by formula (18). In formula (18), R 11 each independently represents a hydrogen atom or a methyl group. Among R 11 , preferably one or more are methyl groups, and more preferably all are methyl groups.
作為式(17)所表示的化合物,例如可列舉2,4,6-三甲基苯甲醯基-二苯基-氧化膦、及雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦等醯基氧化膦類。該些中,就具有優異的光透過性而言,較佳為雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦。該些化合物亦能夠單獨使用一種或適當混合使用兩種以上。Examples of the compound represented by formula (17) include acyl phosphine oxides such as 2,4,6-trimethylbenzyl-diphenyl-phosphine oxide and bis(2,4,6-trimethylbenzyl)-phenylphosphine oxide. Among these, bis(2,4,6-trimethylbenzyl)-phenylphosphine oxide is preferred in terms of excellent light transmittance. These compounds may be used alone or in combination of two or more.
醯基氧化膦類相對於包含波長405 nm(h射線)的活性能量線示出非常優異的吸收性,例如,可使波長405 nm(h射線)的透過率為5%以上的雙馬來醯亞胺化合物(A)適宜地進行自由基聚合。因此,能夠適宜地製造特別是當用於製造多層印刷配線板時於曝光步驟中不會阻礙光硬化反應而具有優異的光硬化性、且於顯影步驟中可賦予優異的鹼顯影性的樹脂組成物、使用了該樹脂組成物的樹脂片材、多層印刷配線板、及半導體裝置。Acylphosphine oxides show very excellent absorption properties for active energy rays including a wavelength of 405 nm (h-rays), and for example, can suitably perform radical polymerization of a bismaleimide compound (A) having a transmittance of 5% or more at a wavelength of 405 nm (h-rays). Therefore, a resin composition having excellent photocurability without inhibiting a photocuring reaction in an exposure step, and having excellent alkali developability in a developing step, can be suitably produced, particularly when used for producing a multilayer printed wiring board, and a resin sheet, a multilayer printed wiring board, and a semiconductor device using the resin composition.
於所述樹脂組成物中,關於光硬化起始劑(C)的含量,就使馬來醯亞胺化合物的光硬化充分進行、從而於鹼顯影性方面使曝光部充分不溶化的觀點而言,相對於雙馬來醯亞胺化合物(A)、包含一個以上的羧基的化合物(B)及光硬化起始劑(C)的合計100質量份,較佳為0.5質量份~25質量份,更佳為0.5質量份~15質量份,進而佳為0.5質量份~10質量份。In the resin composition, the content of the photocuring initiator (C) is preferably 0.5 to 25 parts by mass, more preferably 0.5 to 15 parts by mass, and even more preferably 0.5 to 10 parts by mass, based on 100 parts by mass of the total of the bismaleimide compound (A), the compound (B) containing one or more carboxyl groups, and the photocuring initiator (C), from the viewpoint of sufficiently proceeding the photocuring of the maleimide compound and sufficiently insolubilizing the exposed portion in terms of alkali developability.
較佳為當雙馬來醯亞胺化合物(A)為40質量份~99質量份時,包含一個以上的羧基的化合物(B)為0.01質量份~50質量份,光硬化起始劑(C)為0.50質量份~25質量份,更佳為當雙馬來醯亞胺化合物(A)為50質量份~97質量份時,包含一個以上的羧基的化合物(B)為1質量份~35質量份,光硬化起始劑(C)為0.5質量份~15質量份,進而佳為當雙馬來醯亞胺化合物(A)為60質量份~96質量份時,包含一個以上的羧基的化合物(B)為2質量份~35質量份,光硬化起始劑(C)為0.5質量份~10質量份。Preferably, when the bismaleimide compound (A) is 40 to 99 parts by mass, the compound (B) containing one or more carboxyl groups is 0.01 to 50 parts by mass, and the photocuring initiator (C) is 0.50 to 25 parts by mass. More preferably, when the bismaleimide compound (A) is 50 to 97 parts by mass, the compound (B) containing one or more carboxyl groups is 1 to 35 parts by mass, and the photocuring initiator (C) is 0.5 to 15 parts by mass. Further preferably, when the bismaleimide compound (A) is 60 to 96 parts by mass, the compound (B) containing one or more carboxyl groups is 2 to 35 parts by mass, and the photocuring initiator (C) is 0.5 to 10 parts by mass.
〔雙馬來醯亞胺化合物(A)以外的馬來醯亞胺化合物(D)〕 於本實施方式的樹脂組成物中,只要發揮本發明的效果,則可包含本實施方式的雙馬來醯亞胺化合物(A)以外的馬來醯亞胺化合物(D)(亦稱為成分(D))。雙馬來醯亞胺化合物(A)的光透過性非常優異,因此即便使用馬來醯亞胺化合物(D),光亦充分到達光硬化起始劑,從而有效率地引起馬來醯亞胺的光自由基反應,可使用各種活性能量線進行光硬化。因此,例如,即便使用包含波長365 nm的活性能量線、或包含波長405 nm的活性能量線,光亦充分到達光硬化起始劑,使用了由光硬化起始劑產生的自由基進行自由基反應,於調配了馬來醯亞胺化合物(D)的組成物中,亦能夠進行光硬化。以下對馬來醯亞胺化合物(D)進行敘述。 [Maleimide compound (D) other than bismaleimide compound (A)] In the resin composition of the present embodiment, a maleimide compound (D) other than the bismaleimide compound (A) of the present embodiment (also referred to as component (D)) may be included as long as the effect of the present invention is exerted. The bismaleimide compound (A) has very excellent light transmittance, so even if the maleimide compound (D) is used, light can fully reach the photocuring initiator, thereby efficiently inducing the photoradical reaction of the maleimide, and photocuring can be performed using various active energy rays. Therefore, for example, even when using active energy rays with a wavelength of 365 nm or 405 nm, the light can fully reach the photocuring initiator, and the free radicals generated by the photocuring initiator can be used to perform a free radical reaction, and photocuring can be performed in the composition containing the maleimide compound (D). The maleimide compound (D) is described below.
馬來醯亞胺化合物(D)只要是馬來醯亞胺化合物(A)以外的、於分子中具有一個以上的馬來醯亞胺基的化合物,則並無特別限定。作為其具體例,可列舉:N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-羥基苯基馬來醯亞胺、N-苯胺基苯基馬來醯亞胺、N-羧基苯基馬來醯亞胺、N-(4-羧基-3-羥基苯基)馬來醯亞胺、6-馬來醯亞胺己酸、4-馬來醯亞胺丁酸、雙(4-馬來醯亞胺苯基)甲烷、2,2-雙{4-(4-馬來醯亞胺苯氧基)-苯基}丙烷、4,4-二苯基甲烷雙馬來醯亞胺、雙(3,5-二甲基-4-馬來醯亞胺苯基)甲烷、雙(3-乙基-5-甲基-4-馬來醯亞胺苯基)甲烷、雙(3,5-二乙基-4-馬來醯亞胺苯基)甲烷、苯基甲烷馬來醯亞胺、鄰伸苯基雙馬來醯亞胺、間伸苯基雙馬來醯亞胺、對伸苯基雙馬來醯亞胺、鄰伸苯基雙檸康醯亞胺、間伸苯基雙檸康醯亞胺、對伸苯基雙檸康醯亞胺、2,2-雙(4-(4-馬來醯亞胺苯氧基)-苯基)丙烷、3,3-二甲基-5,5-二乙基-4,4-二苯基甲烷雙馬來醯亞胺、4-甲基-1,3-伸苯基雙馬來醯亞胺、1,2-雙馬來醯亞胺乙烷、1,4-雙馬來醯亞胺丁烷、1,5-雙馬來醯亞胺戊烷、1,5-雙馬來醯亞胺-2-甲基戊烷、1,6-雙馬來醯亞胺己烷、1,6-雙馬來醯亞胺-(2,2,4-三甲基)己烷、1,8-雙馬來醯亞胺-3,6-二氧雜辛烷、1,11-雙馬來醯亞胺-3,6,9-三氧雜十一烷、1,3-雙(馬來醯亞胺甲基)環己烷、1,4-雙(馬來醯亞胺甲基)環己烷、4,4-二苯基醚雙馬來醯亞胺、4,4-二苯基碸雙馬來醯亞胺、1,3-雙(3-馬來醯亞胺苯氧基)苯、1,3-雙(4-馬來醯亞胺苯氧基)苯、4,4-二苯基甲烷雙檸康醯亞胺、2,2-雙[4-(4-檸康醯亞胺苯氧基)苯基]丙烷、雙(3,5-二甲基-4-檸康醯亞胺苯基)甲烷、雙(3-乙基-5-甲基-4-檸康醯亞胺苯基)甲烷、雙(3,5-二乙基-4-檸康醯亞胺苯基)甲烷、聚苯基甲烷馬來醯亞胺、聚苯基甲烷馬來醯亞胺等式(13)所表示的馬來醯亞胺化合物、式(14)所表示的馬來醯亞胺化合物、螢光素-5-馬來醯亞胺、及該些馬來醯亞胺化合物的預聚物、或馬來醯亞胺化合物與胺化合物的預聚物等。該些馬來醯亞胺化合物(D)亦能夠單獨使用一種或適當混合使用兩種以上。The maleimide compound (D) is not particularly limited as long as it is a compound other than the maleimide compound (A) and has one or more maleimide groups in the molecule. Specific examples thereof include N-phenylmaleimide, N-cyclohexylmaleimide, N-hydroxyphenylmaleimide, N-anilinophenylmaleimide, N-carboxyphenylmaleimide, N-(4-carboxy-3-hydroxyphenyl)maleimide, 6-maleimidocaproic acid, 4-maleimidobutyric acid, bis(4-maleimidophenyl)methane, 2,2-bis{4-(4-maleimidophenoxy)-phenyl}propane, 4,4-diphenylmethanebismaleimide, bis(3,5-dimethyl-4-maleimidophenyl)methane, bis(3-ethyl-5-methyl-4-maleimidophenyl)methane, alkane, bis(3,5-diethyl-4-maleimidophenyl)methane, phenylmethane maleimide, o-phenylene bismaleimide, m-phenylene bismaleimide, p-phenylene bismaleimide, o-phenylene bis(hexaconimide), m-phenylene bis(hexaconimide), p-phenylene bis(hexaconimide), 2,2-bis( 4-(4-maleimidephenoxy)-phenyl)propane, 3,3-dimethyl-5,5-diethyl-4,4-diphenylmethane dimaleimide, 4-methyl-1,3-phenylene dimaleimide, 1,2-dimaleimideethane, 1,4-dimaleimidebutane, 1,5-dimaleimide Amine pentane, 1,5-bismaleimide-2-methylpentane, 1,6-bismaleimide hexane, 1,6-bismaleimide-(2,2,4-trimethyl)hexane, 1,8-bismaleimide-3,6-dioxahedane, 1,11-bismaleimide-3,6,9-trioxahedane, 1 ,3-bis(maleimidemethyl)cyclohexane, 1,4-bis(maleimidemethyl)cyclohexane, 4,4-diphenylether bismaleimide, 4,4-diphenylsulfone bismaleimide, 1,3-bis(3-maleimidephenoxy)benzene, 1,3-bis(4-maleimidephenoxy)benzene, 4,4- Diphenylmethane bis(octaconimide), 2,2-bis[4-(4-octaconimidephenoxy)phenyl]propane, bis(3,5-dimethyl-4-octaconimidephenyl)methane, bis(3-ethyl-5-methyl-4-octaconimidephenyl)methane, bis(3,5-diethyl-4-octaconimidephenyl)methane, polyphenylmethane maleimide, maleimide compounds represented by polyphenylmethane maleimide formula (13), maleimide compounds represented by formula (14), fluorescein-5-maleimide, prepolymers of these maleimide compounds, or prepolymers of maleimide compounds and amine compounds, etc. These maleimide compounds (D) may be used alone or in combination of two or more.
作為式(30)所表示的馬來醯亞胺化合物,亦可利用市售品,例如可列舉大和化成工業(股)公司製造的BMI-2300(商品名)。作為式(31)所表示的馬來醯亞胺化合物,亦可利用市售品,例如可列舉日本化藥(股)公司製造的MIR-3000(商品名)。作為式(32)所表示的馬來醯亞胺化合物,亦可利用市售品,例如可列舉日本化藥(股)公司製造的MIR-5000(商品名)。As the maleimide compound represented by formula (30), a commercial product may be used, for example, BMI-2300 (trade name) manufactured by Yamato Chemical Industries, Ltd. As the maleimide compound represented by formula (31), a commercial product may be used, for example, MIR-3000 (trade name) manufactured by Nippon Kayaku Co., Ltd. As the maleimide compound represented by formula (32), a commercial product may be used, for example, MIR-5000 (trade name) manufactured by Nippon Kayaku Co., Ltd.
[化34] [Chemistry 34]
式(30)中,R 12各自獨立地表示氫原子或甲基。n表示1以上的整數,較佳為表示1~10的整數,更佳為表示1~5的整數。 In formula (30), R 12 each independently represents a hydrogen atom or a methyl group. n represents an integer of 1 or greater, preferably an integer of 1 to 10, and more preferably an integer of 1 to 5.
[化35] [Chemistry 35]
式(31)中,R 13各自獨立地表示氫原子、碳數1~5的烷基或苯基,l各自獨立地表示1~3的整數,n表示1~10的整數。 作為碳數1~5的烷基,例如可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、及新戊基。 In formula (31), R13 each independently represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a phenyl group, l each independently represents an integer of 1 to 3, and n represents an integer of 1 to 10. Examples of the alkyl group having 1 to 5 carbon atoms include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, t-butyl, n-pentyl, and neopentyl.
[化36] [Chemistry 36]
式(32)中,R 14各自獨立地表示氫原子、碳數1~5的烷基或苯基,l2各自獨立地表示1~3的整數,n表示1~10的整數。 作為碳數1~5的烷基,例如可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、第二丁基、第三丁基、正戊基、及新戊基。 In formula (32), R14 each independently represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a phenyl group, l2 each independently represents an integer of 1 to 3, and n represents an integer of 1 to 10. Examples of the alkyl group having 1 to 5 carbon atoms include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, t-butyl, n-pentyl, and neopentyl.
於本實施方式中,為了有效率地引起雙馬來醯亞胺化合物(A)的光自由基反應,於製備以1質量%包含馬來醯亞胺化合物(D)的氯仿溶液、並使用包含波長365 nm(i射線)的活性能量線對該氯仿溶液測定透過率的情況下,較佳為示出透過率為5%以上的光透過性。該情況下的透過率更佳為8%以上,進而佳為10%以上。 另外,於本實施方式中,為了有效率地引起雙馬來醯亞胺化合物(A)的光自由基反應,於製備以1質量%包含馬來醯亞胺化合物(D)的氯仿溶液、並使用包含波長405 nm(h射線)的活性能量線對該氯仿溶液測定透過率的情況下,較佳為示出透過率為5%以上的光透過性。藉由使用此種馬來醯亞胺化合物(D),例如於使用直接描繪曝光法製造具有高密度且高精細的配線形成(圖案)的印刷配線板時,即便於使用了包含波長405 nm(h射線)的活性能量線的情況下,亦有效率地引起馬來醯亞胺的光自由基反應。就可獲得光硬化性更優異的樹脂組成物而言,透光率更佳為8%以上,進而佳為10%以上。 In this embodiment, in order to efficiently induce the photoradical reaction of the bismaleimide compound (A), when a chloroform solution containing the maleimide compound (D) at 1 mass% is prepared and the transmittance of the chloroform solution is measured using active energy rays containing a wavelength of 365 nm (i-rays), it is preferred to show a light transmittance of 5% or more. The transmittance in this case is more preferably 8% or more, and further preferably 10% or more. In addition, in the present embodiment, in order to efficiently cause the photoradical reaction of the bismaleimide compound (A), when a chloroform solution containing the maleimide compound (D) at 1 mass% is prepared and the transmittance of the chloroform solution is measured using active energy rays having a wavelength of 405 nm (h-rays), it is preferred that the transmittance is 5% or more. By using such a maleimide compound (D), for example, when a printed wiring board having a high-density and high-precision wiring formation (pattern) is manufactured using a direct writing exposure method, the photoradical reaction of the maleimide is efficiently caused even when active energy rays having a wavelength of 405 nm (h-rays) are used. In order to obtain a resin composition with better photocurability, the light transmittance is preferably 8% or more, and further preferably 10% or more.
作為此種馬來醯亞胺化合物(D),例如可列舉式(33)所表示的馬來醯亞胺化合物、式(34)所表示的馬來醯亞胺化合物、式(35)所表示的馬來醯亞胺化合物等式(36)所表示的馬來醯亞胺化合物、式(37)所表示的馬來醯亞胺化合物、式(38)所表示的馬來醯亞胺化合物、式(39)所表示的馬來醯亞胺化合物、1,6-雙馬來醯亞胺-(2,2,4-三甲基)己烷(式(40)所表示的馬來醯亞胺化合物)、式(41)所表示的馬來醯亞胺化合物、及螢光素-5-馬來醯亞胺。Examples of such maleimide compounds (D) include maleimide compounds represented by formula (33), maleimide compounds represented by formula (34), maleimide compounds represented by formula (35), maleimide compounds represented by formula (36), maleimide compounds represented by formula (37), maleimide compounds represented by formula (38), maleimide compounds represented by formula (39), 1,6-bismaleimide-(2,2,4-trimethyl)hexane (maleimide compound represented by formula (40)), maleimide compounds represented by formula (41), and luciferin-5-maleimide.
[化37] [Chemistry 37]
式(33)中,n(平均)為1以上,較佳為1~21,就示出優異的光硬化性的觀點而言,更佳為1~16。In the formula (33), n (average) is 1 or more, preferably 1 to 21, and more preferably 1 to 16 from the viewpoint of exhibiting excellent photocurability.
[化38] [Chemistry 38]
式(34)中,x的數量為10~35。 式(34)中,y的數量為10~35。 In formula (34), the number of x is 10 to 35. In formula (34), the number of y is 10 to 35.
[化39] [Chemistry 39]
式(35)中,R a表示碳數1~16的直鏈狀或分支狀的烷基、或者碳數2~16的直鏈狀或分支狀的烯基。作為R a,較佳為直鏈狀或分支狀的烷基,就示出優異的光硬化性而言,更佳為直鏈狀的烷基。 作為烷基的碳數,就示出優異的光硬化性而言,較佳為4~12。 作為烯基的碳數,就示出優異的光硬化性而言,較佳為4~12。 In formula (35), Ra represents a linear or branched alkyl group having 1 to 16 carbon atoms, or a linear or branched alkenyl group having 2 to 16 carbon atoms. Ra is preferably a linear or branched alkyl group, and more preferably a linear alkyl group in terms of excellent photocurability. The number of carbon atoms in the alkyl group is preferably 4 to 12 in terms of excellent photocurability. The number of carbon atoms in the alkenyl group is preferably 4 to 12 in terms of excellent photocurability.
作為直鏈狀或分支狀的烷基,可參照雙馬來醯亞胺化合物(A)中的R 3。該些中,就示出優異的光硬化性而言,較佳為正庚基、正辛基、正壬基,更佳為正辛基。 作為直鏈狀或分支狀的烯基,可參照雙馬來醯亞胺化合物(A)中的R 3。該些中,就示出優異的光硬化性而言,較佳為2-庚烯基、2-辛烯基、2-壬烯基,更佳為2-辛烯基。 As the linear or branched alkyl group, reference may be made to R 3 in the bismaleimide compound (A). Among these, n-heptyl, n-octyl, and n-nonyl are preferred, and n-octyl is more preferred, in terms of showing excellent photocurability. As the linear or branched alkenyl group, reference may be made to R 3 in the bismaleimide compound (A). Among these, 2-heptenyl, 2-octenyl, and 2-nonenyl are preferred, and 2-octenyl is more preferred, in terms of showing excellent photocurability.
式(35)中,R b表示碳數1~16的直鏈狀或分支狀的烷基、或者碳數2~16的直鏈狀或分支狀的烯基。作為R b,較佳為直鏈狀或分支狀的烷基,就示出優異的光硬化性而言,更佳為直鏈狀的烷基。 作為烷基的碳數,就示出優異的光硬化性而言,較佳為4~12。 作為烯基的碳數,就示出優異的光硬化性而言,較佳為4~12。 In formula (35), R b represents a linear or branched alkyl group having 1 to 16 carbon atoms, or a linear or branched alkenyl group having 2 to 16 carbon atoms. As R b , a linear or branched alkyl group is preferred, and a linear alkyl group is more preferred in terms of excellent photocurability. As the carbon number of the alkyl group, 4 to 12 is preferred in terms of excellent photocurability. As the carbon number of the alkenyl group, 4 to 12 is preferred in terms of excellent photocurability.
作為烷基的具體例,可參照R a中的烷基。其中,就示出優異的光硬化性而言,較佳為正庚基、正辛基、正壬基,更佳為正辛基。 作為烯基的具體例,可參照R b中的烯基。其中,就示出優異的光硬化性而言,較佳為2-庚烯基、2-辛烯基、2-壬烯基,更佳為2-辛烯基。 As a specific example of the alkyl group, the alkyl group in Ra can be referred to. Among them, in terms of showing excellent photocurability, n-heptyl, n-octyl, and n-nonyl are preferred, and n-octyl is more preferred. As a specific example of the alkenyl group, the alkenyl group in Rb can be referred to. Among them, in terms of showing excellent photocurability, 2-heptenyl, 2-octenyl, and 2-nonenyl are preferred, and 2-octenyl is more preferred.
式(35)中,n a的數量為1以上,較佳為2~16,就示出優異的光硬化性的觀點而言,更佳為3~14。 In the formula (35), the number of na is 1 or more, preferably 2 to 16, and more preferably 3 to 14 from the viewpoint of exhibiting excellent photocurability.
式(35)中,n b的數量為1以上,較佳為2~16,就示出優異的光硬化性的觀點而言,更佳為3~14。 In the formula (35), the number of n b is 1 or more, preferably 2 to 16, and more preferably 3 to 14 from the viewpoint of exhibiting excellent photocurability.
n a與n b的數量可相同,亦可不同。 The numbers of n a and n b can be the same or different.
[化40] [Chemistry 40]
式(36)中,n(平均)為0.5以上,較佳為0.8~10,就示出優異的光硬化性的觀點而言,更佳為1~8。In the formula (36), n (average) is 0.5 or more, preferably 0.8 to 10, and more preferably 1 to 8 from the viewpoint of exhibiting excellent photocurability.
[化41] [Chemistry 41]
在式(37)中,n表示1以上的整數,較佳為表示1~10的整數。In formula (37), n represents an integer greater than or equal to 1, and preferably represents an integer from 1 to 10.
[化42] [Chemistry 42]
式(38)中,n表示1以上的整數,較佳為表示1~10的整數。In formula (38), n represents an integer greater than or equal to 1, and preferably represents an integer from 1 to 10.
[化43] [Chemistry 43]
[化44] [Chemistry 44]
(所述式(40)中,R 15各自獨立地表示氫原子、甲基或乙基,R 16各自獨立地表示氫原子或甲基) (In the formula (40), R 15 each independently represents a hydrogen atom, a methyl group or an ethyl group, and R 16 each independently represents a hydrogen atom or a methyl group)
馬來醯亞胺化合物(D)亦可利用市售品。 作為式(33)所表示的馬來醯亞胺化合物,例如可列舉K.I化成(K.I Chemical)(股)製造的BMI-1000P(商品名,式(33)中的n=13.6(平均))、K.I化成(K.I Chemical)(股)公司製造的BMI-650P(商品名,式(33)中的n=8.8(平均))、K.I化成(K.I Chemical)(股)公司製造的BMI-250P(商品名,式(33)中的n=3~8(平均))、K.I化成(K.I Chemical)(股)公司製造的CUA-4(商品名,式(33)中的n=1)等。 作為式(34)所表示的馬來醯亞胺化合物,例如可列舉人工分子公司(Designer Molecules Inc.)製造的BMI-6100(商品名,式(34)中的x=18、y=18)等。 作為式(35)所表示的馬來醯亞胺化合物,例如可列舉人工分子公司(Designer Molecules Inc.)製造的BMI-689(商品名,式(41),官能基當量:346 g/eq.)等。 The maleimide compound (D) may also be a commercially available product. Examples of the maleimide compound represented by formula (33) include BMI-1000P (trade name, n=13.6 (average) in formula (33)) manufactured by K.I Chemical Co., Ltd., BMI-650P (trade name, n=8.8 (average) in formula (33)) manufactured by K.I Chemical Co., Ltd., BMI-250P (trade name, n=3 to 8 (average) in formula (33)) manufactured by K.I Chemical Co., Ltd., and CUA-4 (trade name, n=1 in formula (33)) manufactured by K.I Chemical Co., Ltd., etc. Examples of maleimide compounds represented by formula (34) include BMI-6100 (trade name, x=18, y=18 in formula (34)) manufactured by Designer Molecules Inc. Examples of maleimide compounds represented by formula (35) include BMI-689 (trade name, formula (41), functional group equivalent: 346 g/eq.) manufactured by Designer Molecules Inc.
[化45] [Chemistry 45]
作為式(36)所表示的馬來醯亞胺化合物,例如可列舉人工分子公司(Designer Molecules Inc.)製造的BMI-1500(商品名,式(36)中的n=1.3,官能基當量:754 g/eq.)等。 作為式(37)所表示的馬來醯亞胺化合物,亦可利用市售品,例如可列舉人工分子公司(Designer Molecules Inc.,DMI)製造的BMI-1700(商品名)。 作為式(38)所表示的馬來醯亞胺化合物,亦可利用市售品,例如,可列舉人工分子公司(DMI)製造的BMI-3000(商品名)、人工分子公司(DMI)製造的BMI-3000J(商品名)、人工分子公司(DMI)製造的BMI-5000(商品名)、人工分子公司(DMI)製造的BMI-9000(商品名)。 作為式(39)所表示的馬來醯亞胺化合物,亦可利用市售品,例如可列舉大和化成工業股份有限公司製造的BMI-TMH。 作為式(40)所表示的馬來醯亞胺化合物,亦可利用市售品,例如可列舉K.I化成(K.I Chemical)(股)製造的BMI-70(商品名)。 該些馬來醯亞胺化合物(D)亦能夠單獨使用一種或適當混合使用兩種以上。 As the maleimide compound represented by formula (36), for example, BMI-1500 (trade name, n=1.3 in formula (36), functional group equivalent: 754 g/eq.) manufactured by Designer Molecules Inc. can be cited. As the maleimide compound represented by formula (37), commercially available products can also be used, for example, BMI-1700 (trade name) manufactured by Designer Molecules Inc. (DMI) can be cited. As the maleimide compound represented by formula (38), commercial products can also be used, for example, BMI-3000 (trade name) manufactured by DMI, BMI-3000J (trade name) manufactured by DMI, BMI-5000 (trade name) manufactured by DMI, and BMI-9000 (trade name) manufactured by DMI. As the maleimide compound represented by formula (39), commercial products can also be used, for example, BMI-TMH manufactured by Yamato Chemical Industries, Ltd. can be used. As the maleimide compound represented by formula (40), commercial products can also be used, for example, BMI-70 (trade name) manufactured by K.I Chemical (K.I Chemical) can be used. These maleimide compounds (D) can be used alone or in combination of two or more.
於所述樹脂組成物中,關於馬來醯亞胺化合物(D)的含量,就能夠獲得以馬來醯亞胺化合物為主要成分的硬化物、進一步提高光硬化性的觀點而言,相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,較佳為1質量份~200質量份,更佳為10質量份~150質量份,進而佳為50質量份~125質量份。In the resin composition, the content of the maleimide compound (D) is preferably 1 to 200 parts by mass, more preferably 10 to 150 parts by mass, and even more preferably 50 to 125 parts by mass, based on 100 parts by mass of the total of the bismaleimide compound (A), the compound (B), and the photocuring initiator (C), from the viewpoint of obtaining a cured product having the maleimide compound as a main component and further improving the photocurability.
於所述樹脂組成物中,就能夠獲得以馬來醯亞胺化合物為主要成分的硬化物、進一步提高光硬化性的觀點而言,雙馬來醯亞胺化合物(A)與馬來醯亞胺化合物(D)的調配比((A):(D))以質量基準計較佳為1~99:99~1,更佳為5~95:95~5,進而佳為10~90:90~10。In the resin composition, from the viewpoint of obtaining a cured product having the maleimide compound as a main component and further improving the light curing property, the mixing ratio of the bismaleimide compound (A) to the maleimide compound (D) ((A):(D)) is preferably 1-99:99-1 on a mass basis, more preferably 5-95:95-5, and even more preferably 10-90:90-10.
於所述樹脂組成物中,關於雙馬來醯亞胺化合物(A)及馬來醯亞胺化合物(D)的合計含量,就能夠獲得以馬來醯亞胺化合物為主要成分的硬化物、進一步提高光硬化性的觀點而言,相對於雙馬來醯亞胺化合物(A)、化合物(B)、光硬化起始劑(C)及馬來醯亞胺化合物(D)的合計100質量份,較佳為40質量份~99質量份,更佳為50質量份~97質量份,進而佳為60質量份~96質量份。In the resin composition, the total content of the dimaleimide compound (A) and the maleimide compound (D) is preferably 40 to 99 parts by mass, more preferably 50 to 97 parts by mass, and even more preferably 60 to 96 parts by mass, based on 100 parts by mass of the total of the dimaleimide compound (A), the compound (B), the photocuring initiator (C), and the maleimide compound (D), from the viewpoint of obtaining a cured product having the maleimide compound as a main component and further improving the photocurability.
〔填充材(E)〕 於所述樹脂組成物中,為了提高塗膜性、耐熱性等諸特性,可包含填充材(E)(亦稱為成分(E))。作為填充材(E),較佳為具有絕緣性、且不會阻礙相對於光硬化中使用的各種活性能量線的透過性,更佳為不會阻礙相對於包含波長365 nm(i射線)及/或波長405 nm(h射線)的活性能量線的透過性。 [Filler (E)] In order to improve the coating properties, heat resistance and other properties, the resin composition may contain a filler (E) (also referred to as component (E)). As the filler (E), it is preferred that it has insulating properties and does not block the permeability of various active energy rays used in photocuring, and it is more preferred that it does not block the permeability of active energy rays including a wavelength of 365 nm (i-rays) and/or a wavelength of 405 nm (h-rays).
作為填充材(E),例如可列舉:二氧化矽(例如,天然二氧化矽、熔融二氧化矽、非晶二氧化矽、及中空二氧化矽)、鋁化合物(例如,水鋁石、氫氧化鋁、氧化鋁、及氮化鋁)、硼化合物(例如,氮化硼)、鎂化合物(例如,氧化鎂、及氫氧化鎂)、鈣化合物(例如,碳酸鈣)、鉬化合物(例如,氧化鉬、及鉬酸鋅)、鋇化合物(例如,硫酸鋇、及矽酸鋇)、滑石(例如,天然滑石、及煆燒滑石)、雲母、玻璃(例如,玻璃短纖維、球狀玻璃、玻璃微粉末、E玻璃、T玻璃、及D玻璃)、矽酮粉末、氟樹脂系填充材、胺基甲酸酯樹脂系填充材、(甲基)丙烯酸樹脂系填充材、聚乙烯系填充材、苯乙烯-丁二烯橡膠、以及矽酮橡膠等。該些填充材(E)亦能夠單獨使用一種或適當混合使用兩種以上。Examples of the filler (E) include silicon dioxide (e.g., natural silicon dioxide, fused silicon dioxide, amorphous silicon dioxide, and hollow silicon dioxide), aluminum compounds (e.g., alumina, aluminum hydroxide, aluminum oxide, and aluminum nitride), boron compounds (e.g., boron nitride), magnesium compounds (e.g., magnesium oxide, and magnesium hydroxide), calcium compounds (e.g., calcium carbonate), and molybdenum compounds (e.g., molybdenum oxide, and zinc molybdate). , barium compounds (e.g., barium sulfate and barium silicate), talc (e.g., natural talc and calcined talc), mica, glass (e.g., glass short fibers, spherical glass, glass fine powder, E glass, T glass, and D glass), silicone powder, fluororesin fillers, urethane resin fillers, (meth) acrylic resin fillers, polyethylene fillers, styrene-butadiene rubber, and silicone rubber, etc. These fillers (E) can be used alone or in combination of two or more.
該些中,較佳為二氧化矽、水鋁石、硫酸鋇、矽酮粉末、氟樹脂系填充材、胺基甲酸酯樹脂系填充材、(甲基)丙烯酸樹脂系填充材、聚乙烯系填充材、苯乙烯-丁二烯橡膠、及矽酮橡膠。 該些填充材(E)亦可利用後述的矽烷偶合劑等進行表面處理。 Among these, preferred are silica, alumina, barium sulfate, silicone powder, fluororesin fillers, urethane resin fillers, (meth)acrylic resin fillers, polyethylene fillers, styrene-butadiene rubber, and silicone rubber. These fillers (E) can also be surface treated using the silane coupling agent described below.
就提高硬化物的耐熱性、且獲得良好的塗膜性的觀點而言,較佳為二氧化矽,更佳為熔融二氧化矽。作為二氧化矽的具體例,可列舉:電化(Denka)(股)製造的SFP-130MC(商品名)、雅都瑪(Admatechs)(股)製造的SC2050-MB(商品名)、SC1050-MLE(商品名)、YA010C-MFN(商品名)、及YA050C-MJA(商品名)等。From the viewpoint of improving the heat resistance of the cured product and obtaining good coating properties, silicon dioxide is preferred, and fused silicon dioxide is more preferred. Specific examples of silicon dioxide include SFP-130MC (trade name) manufactured by Denka Co., Ltd., SC2050-MB (trade name), SC1050-MLE (trade name), YA010C-MFN (trade name), and YA050C-MJA (trade name) manufactured by Admatechs Co., Ltd.
就樹脂組成物的紫外光透過性的觀點而言,填充材(E)的粒徑通常為0.005 μm~10 μm,較佳為0.01 μm~1.0 μm。From the viewpoint of the ultraviolet light transmittance of the resin composition, the particle size of the filler (E) is generally 0.005 μm to 10 μm, preferably 0.01 μm to 1.0 μm.
於所述樹脂組成物中,關於填充材(E)的含量,就使樹脂組成物的光透過性、硬化物的耐熱性良好的觀點而言,相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,較佳為設為300質量份以下,更佳為設為200質量份以下,進而佳為設為100質量份以下。上限值可為30質量份以下,亦可為20質量份以下,亦可為10質量份以下。再者,於含有填充材(E)的情況下,就獲得提高塗膜性、耐熱性等諸特性的效果的觀點而言,相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,下限值通常為1質量份。In the resin composition, the content of the filler (E) is preferably 300 parts by mass or less, more preferably 200 parts by mass or less, and even more preferably 100 parts by mass or less, based on 100 parts by mass of the total of the bismaleimide compound (A), the compound (B), and the light curing initiator (C), from the viewpoint of improving the light transmittance of the resin composition and the heat resistance of the cured product. The upper limit may be 30 parts by mass or less, 20 parts by mass or less, or 10 parts by mass or less. When the filler (E) is contained, from the viewpoint of obtaining the effect of improving coating properties, heat resistance and other properties, the lower limit is usually 1 part by mass based on 100 parts by mass of the total of the bismaleimide compound (A), the compound (B) and the photocuring initiator (C).
〔矽烷偶合劑及濕潤分散劑〕 於本實施方式的樹脂組成物中,為了提高填充材的分散性、聚合物及/或樹脂與填充材的接著強度,可併用矽烷偶合劑及/或濕潤分散劑。 作為該些矽烷偶合劑,只要是一般用於無機物的表面處理的矽烷偶合劑,則並無特別限定。作為具體例,可列舉:3-胺基丙基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、3-胺基丙基二甲氧基甲基矽烷、3-胺基丙基二乙氧基甲基矽烷、N-β-(胺基乙基)-γ-胺基丙基三甲氧基矽烷、N-(2-胺基乙基)-3-胺基丙基三乙氧基矽烷、N-(2-胺基乙基)-3-胺基丙基二甲氧基甲基矽烷、N-(2-胺基乙基)-3-胺基丙基二乙氧基甲基矽烷、N-苯基-3-胺基丙基三甲氧基矽烷、N-苯基-3-胺基丙基三乙氧基矽烷、[3-(6-胺基己基胺基)丙基]三甲氧基矽烷、及[3-(N,N-二甲基胺基)-丙基]三甲氧基矽烷等胺基矽烷系;γ-縮水甘油醚氧基丙基三甲氧基矽烷、3-縮水甘油醚氧基丙基三乙氧基矽烷、3-縮水甘油醚氧基丙基二甲氧基甲基矽烷、3-縮水甘油醚氧基丙基二乙氧基甲基矽烷、2-(3,4-環氧基環己基)乙基三甲氧基矽烷、及[8-(縮水甘油基氧基)-正辛基]三甲氧基矽烷等環氧基矽烷系;乙烯基三(2-甲氧基乙氧基)矽烷、乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、二甲氧基甲基乙烯基矽烷、二乙氧基甲基乙烯基矽烷、三甲氧基(7-辛烯-1-基)矽烷、及三甲氧基(4-乙烯基苯基)矽烷等乙烯基矽烷系;3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三乙氧基矽烷、3-甲基丙烯醯氧基丙基二甲氧基甲基矽烷、3-甲基丙烯醯氧基丙基二乙氧基甲基矽烷等甲基丙烯醯基矽烷系;γ-丙烯醯氧基丙基三甲氧基矽烷、及3-丙烯醯氧基丙基三乙氧基矽烷等丙烯醯基矽烷系;3-異氰酸酯丙基三甲氧基矽烷、及3-異氰酸酯丙基三乙氧基矽烷等異氰酸酯矽烷系;三-(三甲氧基矽烷基丙基)異氰脲酸酯等異氰脲酸酯矽烷系;3-巰基丙基三甲氧基矽烷、及3-巰基丙基二甲氧基甲基矽烷等巰基矽烷系;3-脲基丙基三乙氧基矽烷等脲基矽烷系;對苯乙烯基三甲氧基矽烷等苯乙烯基矽烷系;N-β-(N-乙烯基苄基胺基乙基)-γ-胺基丙基三甲氧基矽烷鹽酸鹽等陽離子性矽烷系;[3-(三甲氧基矽烷基)丙基]丁二酸酐等酸酐系;苯基三甲氧基矽烷、苯基三乙氧基矽烷、二甲氧基甲基苯基矽烷、二乙氧基甲基苯基矽烷、及對甲苯基三甲氧基矽烷等苯基矽烷系;三甲氧基(1-萘基)矽烷等芳基矽烷系。該些矽烷偶合劑亦能夠單獨使用一種或適當混合使用兩種以上。 [Silane coupling agent and wetting dispersant] In the resin composition of the present embodiment, a silane coupling agent and/or a wetting dispersant may be used in combination to improve the dispersibility of the filler and the bonding strength between the polymer and/or resin and the filler. As these silane coupling agents, there is no particular limitation as long as they are silane coupling agents generally used for surface treatment of inorganic materials. Specific examples include 3-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, 3-aminopropyldimethoxymethylsilane, 3-aminopropyldiethoxymethylsilane, N-β-(aminoethyl)-γ-aminopropyltrimethoxysilane, N-(2-aminoethyl)-3-aminopropyltriethoxysilane, N-(2-aminoethyl)-3-aminopropyldimethoxymethylsilane, N-(2-aminoethyl)-3-aminopropyldiethoxymethylsilane, N-phenyl-3-aminopropyltrimethoxysilane, N-phenyl-3-aminopropyltriethoxysilane, [3-(6-aminohexylamino)propyl]trimethoxysilane, and aminosilanes such as [3-(N,N-dimethylamino)-propyl]trimethoxysilane; γ-glycidyloxypropyl trimethoxysilane, 3-glycidyloxypropyl triethoxysilane, 3-glycidyloxypropyl dimethoxymethylsilane, 3-glycidyloxypropyl diethoxymethylsilane, 2-(3,4-epoxycyclohexyl)ethyl trimethoxysilane, and [8-(glycidyloxy)-n-octyl]trimethoxysilane; epoxysilanes such as vinyl tri(2-methoxyethoxy)silane, vinyl trimethoxysilane, vinyl triethoxysilane, dimethoxymethylvinylsilane, diethoxymethylvinylsilane, trimethoxy Vinyl silanes such as methoxy(7-octen-1-yl)silane and trimethoxy(4-vinylphenyl)silane; methacryl silanes such as 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-methacryloxypropyldimethoxymethylsilane, 3-methacryloxypropyldiethoxymethylsilane; acryl silanes such as γ-acryloxypropyltrimethoxysilane and 3-acryloxypropyltriethoxysilane; isocyanate silanes such as 3-isocyanatepropyltrimethoxysilane and 3-isocyanatepropyltriethoxysilane; tris-(trimethoxysilylpropyl)isocyanurate, etc. Isocyanurate silane series; 3-butylenepropyltrimethoxysilane, 3-butylenepropyldimethoxymethylsilane and other butylene silane series; 3-ureidopropyltriethoxysilane and other ureido silane series; p-phenylenetrimethoxysilane and other phenylene silane series; N-β-(N-vinylbenzylaminoethyl)-γ-aminopropyltrimethoxysilane Cationic silane systems such as hydrochlorides; anhydride systems such as [3-(trimethoxysilyl)propyl]succinic anhydride; phenylsilane systems such as phenyltrimethoxysilane, phenyltriethoxysilane, dimethoxymethylphenylsilane, diethoxymethylphenylsilane, and p-tolyltrimethoxysilane; arylsilane systems such as trimethoxy(1-naphthyl)silane. These silane coupling agents can be used alone or in combination of two or more.
於本實施方式的樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,矽烷偶合劑的含量為0.1質量份~10質量份。 作為濕潤分散劑,只要是於塗料用途中使用的分散穩定劑,則並無特別限定。作為具體例,可列舉:日本畢克化學(BYK Chemie Japan)(股)製造的迪斯帕畢克(DISPERBYK)(註冊商標)-110(商品名)、111(商品名)、118(商品名)、180(商品名)、161(商品名)、畢克(BYK)(註冊商標)-W996(商品名)、W9010(商品名)、W903(商品名)等濕潤分散劑。該些濕潤分散劑亦能夠單獨使用一種或適當混合使用兩種以上。 於本實施方式的樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,濕潤分散劑的含量為0.1質量份~10質量份。 In the resin composition of the present embodiment, the content of the silane coupling agent is usually 0.1 to 10 parts by mass relative to 100 parts by mass of the total of the dimaleimide compound (A), the compound (B) and the photocuring initiator (C). As a wetting dispersant, there is no particular limitation as long as it is a dispersing stabilizer used for coating applications. As specific examples, we can cite DISPERBYK (registered trademark)-110 (trade name), 111 (trade name), 118 (trade name), 180 (trade name), 161 (trade name), BYK (registered trademark)-W996 (trade name), W9010 (trade name), W903 (trade name) and other wetting dispersants manufactured by BYK Chemie Japan (Co., Ltd.). These wetting dispersants can be used alone or in combination of two or more. In the resin composition of this embodiment, the content of the wetting dispersant is usually 0.1 to 10 parts by mass relative to 100 parts by mass of the total of the dimaleimide compound (A), the compound (B) and the photocuring initiator (C).
〔氰酸酯化合物、酚樹脂、氧雜環丁烷樹脂、苯並噁嗪化合物、環氧樹脂及其他化合物〕 於本實施方式中,只要發揮本發明的效果,則根據硬化後的硬化物的阻燃性、耐熱性及熱膨脹特性等特性,於本實施方式的樹脂組成物中,可包含除本實施方式的雙馬來醯亞胺化合物(A)、包含一個以上的羧基的化合物(B)、光硬化起始劑(C)、及馬來醯亞胺化合物(D)以外的氰酸酯化合物、酚樹脂、氧雜環丁烷樹脂、苯並噁嗪化合物、環氧樹脂、及其他化合物等各個種類的化合物及樹脂。另外,該些化合物及樹脂較佳為:於利用包含波長365 nm(i射線)的活性能量線及/或包含波長405 nm(h射線)的活性能量線進行曝光的情況下,本實施方式的樹脂組成物感光而進行光硬化。 該些化合物及樹脂亦能夠單獨使用一種或適當混合使用兩種以上。 [Cyanate compounds, phenol resins, cyclohexane resins, benzoxazine compounds, epoxy resins, and other compounds] In the present embodiment, as long as the effects of the present invention are exerted, the resin composition of the present embodiment may contain various types of compounds and resins such as cyanate compounds, phenol resins, cyclohexane resins, benzoxazine compounds, epoxy resins, and other compounds in addition to the dimaleimide compound (A), the compound containing one or more carboxyl groups (B), the photocuring initiator (C), and the maleimide compound (D) of the present embodiment, depending on the flame retardancy, heat resistance, and thermal expansion characteristics of the cured product after curing. In addition, the compounds and resins are preferably: when exposed to active energy rays including a wavelength of 365 nm (i-rays) and/or active energy rays including a wavelength of 405 nm (h-rays), the resin composition of the present embodiment is photosensitive and photocured. These compounds and resins can also be used alone or in combination of two or more.
(氰酸酯化合物) 作為氰酸酯化合物,只要是於分子內具有取代有至少一個氰氧基(氰酸酯基)的芳香族部分的樹脂,則並無特別限定。 (Cyanate compound) The cyanate compound is not particularly limited as long as it is a resin having an aromatic part substituted with at least one cyano group (cyanate group) in the molecule.
例如,可列舉式(42)所表示者。For example, we can cite what is represented by equation (42).
[化46] [Chemistry 46]
式(42)中,Ar 1表示苯環、萘環或兩個苯環進行單鍵鍵結而成者。Ar 1於存在多個的情況下相互可相同亦可不同。Ra各自獨立地表示氫原子、碳數1~6的烷基、碳數2~6的烯基、碳數6~12的芳基、碳數1~4的烷氧基、碳數1~6的烷基與碳數6~12的芳基鍵結而成的基。Ra中的芳香環可具有取代基,Ar 1及Ra中的取代基可選擇任意的位置。p表示鍵結於Ar 1的氰氧基的數量,且各自獨立地為1~3的整數。q表示鍵結於Ar 1的Ra的數量,且當Ar 1為苯環時為4-p,當Ar 1為萘環時為6-p,當Ar 1為兩個苯環進行單鍵鍵結而成者時為8-p。t表示平均重複數,且為0~50的整數。氰酸酯化合物可為t不同的化合物的混合物。X於存在多個的情況下各自獨立地為單鍵、碳數1~50的二價有機基(氫原子可被取代為雜原子)、氮數1~10的二價有機基(例如-N-R-N-(此處R表示有機基))、羰基(-CO-)、羧基(-C(=O)O-)、羰基二氧化物(-OC(=O)O-)、磺醯基(-SO 2-)、二價硫原子或二價氧原子中的任一者。 In formula (42), Ar 1 represents a benzene ring, a naphthalene ring, or two benzene rings bonded by a single bond. When there are multiple Ar 1s , they may be the same or different. Ra each independently represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an alkenyl group having 2 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or a group formed by an alkyl group having 1 to 6 carbon atoms and an aryl group having 6 to 12 carbon atoms. The aromatic ring in Ra may have a substituent, and the substituent in Ar 1 and Ra may be selected at any position. p represents the number of cyano groups bonded to Ar 1 , and each independently represents an integer of 1 to 3. q represents the number of Ra bonded to Ar 1 , and is 4-p when Ar 1 is a benzene ring, 6-p when Ar 1 is a naphthyl ring, and 8-p when Ar 1 is a single-bonded group of two benzene rings. t represents the average number of repetitions, and is an integer from 0 to 50. The cyanate compound may be a mixture of compounds having different t. When there are a plurality of X, each of them independently represents a single bond, a divalent organic group having 1 to 50 carbon atoms (the hydrogen atom may be substituted with a heteroatom), a divalent organic group having 1 to 10 nitrogen atoms (for example, -NRN- (where R represents an organic group)), a carbonyl group (-CO-), a carboxyl group (-C(=O)O-), a carbonyl dioxide (-OC(=O)O-), a sulfonyl group (-SO 2 -), a divalent sulfur atom, or a divalent oxygen atom.
式(25)的Ra中的烷基可具有直鏈或分支的鏈狀結構、及環狀結構(例如環烷基等)中的任一者。 另外,式(25)中的烷基及Ra中的芳基中的氫原子亦可經氟原子、氯原子等鹵素原子;甲氧基、苯氧基等烷氧基;或氰基等取代。 The alkyl group in Ra of formula (25) may have any of a linear or branched chain structure and a cyclic structure (e.g., a cycloalkyl group). In addition, the hydrogen atom in the alkyl group in formula (25) and the aryl group in Ra may be substituted by a halogen atom such as a fluorine atom or a chlorine atom; an alkoxy group such as a methoxy group or a phenoxy group; or a cyano group.
作為烷基的具體例,可列舉:甲基、乙基、丙基、異丙基、正丁基、異丁基、第三丁基、正戊基、1-乙基丙基、2,2-二甲基丙基、環戊基、己基、環己基、及三氟甲基等。 作為烯基的具體例,可列舉:乙烯基、(甲基)烯丙基、異丙烯基、1-丙烯基、2-丁烯基、3-丁烯基、1,3-丁二烯基、2-甲基-2-丙烯基、2-戊烯基、及2-己烯基等。 作為芳基的具體例,可列舉:苯基、二甲苯基、均三甲苯基、萘基、苯氧基苯基、乙基苯基、鄰氟苯基、間氟苯基或對氟苯基、二氯苯基、二氰基苯基、三氟苯基、甲氧基苯基、及鄰甲苯基、間甲苯基或對甲苯基等。進而,作為烷氧基,例如可列舉:甲氧基、乙氧基、丙氧基、異丙氧基、正丁氧基、異丁氧基、及第三丁氧基等。 Specific examples of alkyl groups include methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, tert-butyl, n-pentyl, 1-ethylpropyl, 2,2-dimethylpropyl, cyclopentyl, hexyl, cyclohexyl, and trifluoromethyl. Specific examples of alkenyl groups include vinyl, (meth)allyl, isopropenyl, 1-propenyl, 2-butenyl, 3-butenyl, 1,3-butadienyl, 2-methyl-2-propenyl, 2-pentenyl, and 2-hexenyl. Specific examples of aryl groups include phenyl, xylyl, mesityl, naphthyl, phenoxyphenyl, ethylphenyl, o-fluorophenyl, m-fluorophenyl or p-fluorophenyl, dichlorophenyl, dicyanophenyl, trifluorophenyl, methoxyphenyl, and o-tolyl, m-tolyl or p-tolyl. Furthermore, examples of alkoxy groups include methoxy, ethoxy, propoxy, isopropoxy, n-butoxy, isobutoxy, and tert-butoxy.
作為式(25)的X中的碳數1~50的二價有機基的具體例,可列舉:亞甲基、伸乙基、三亞甲基、伸環戊基、伸環己基、三甲基伸環己基、聯苯基亞甲基、二甲基亞甲基-伸苯基-二甲基亞甲基、芴二基、及酞內酯二基等。二價有機基中的氫原子可經氟原子、氯原子等鹵素原子;甲氧基、苯氧基等烷氧基;氰基等取代。 作為式(42)的X中的氮數1~10的二價有機基,可列舉亞胺基、聚醯亞胺基等。 Specific examples of the divalent organic group having 1 to 50 carbon atoms in X of formula (25) include methylene, ethyl, trimethylene, cyclopentyl, cyclohexyl, trimethylcyclohexyl, biphenylmethylene, dimethylmethylene-phenyl-dimethylmethylene, fluorene diyl, and phthalide diyl. The hydrogen atom in the divalent organic group may be substituted by a halogen atom such as a fluorine atom or a chlorine atom; an alkoxy group such as a methoxy group or a phenoxy group; or a cyano group. Specific examples of the divalent organic group having 1 to 10 nitrogen atoms in X of formula (42) include an imide group, a polyimide group, and the like.
另外,作為式(42)中的X的有機基,例如可列舉為式(43)或式(44)所表示的結構的有機基。In addition, examples of the organic group represented by X in formula (42) include organic groups having structures represented by formula (43) or formula (44).
[化47] [Chemistry 47]
式(43)中,Ar 2表示苯二基、萘二基或聯苯二基,於u為2以上的整數的情況下,Ar 2相互可相同亦可不同。Rb、Rc、Rf及Rg各自獨立地表示氫原子、碳數1~6的烷基、碳數6~12的芳基、三氟甲基、或具有至少一個酚性羥基的芳基。Rd及Re各自獨立地選自氫原子、碳數1~6的烷基、碳數6~12的芳基、碳數1~4的烷氧基、或羥基中的任一種。u表示0~5的整數。 In formula (43), Ar 2 represents a benzene diyl group, a naphthalene diyl group or a biphenyl diyl group, and when u is an integer greater than 2, Ar 2 may be the same as or different from each other. Rb, Rc, Rf and Rg each independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a trifluoromethyl group, or an aryl group having at least one phenolic hydroxyl group. Rd and Re each independently represent any one selected from a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or a hydroxyl group. u represents an integer from 0 to 5.
[化48] [Chemistry 48]
式(44)中,Ar 3表示苯二基、萘二基或聯苯二基,於v為2以上的整數的情況下,Ar 3相互可相同亦可不同。Ri及Rj各自獨立地表示氫原子、碳數1~6的烷基、碳數6~12的芳基、苄基、碳數1~4的烷氧基、羥基、三氟甲基、或氰氧基中的至少一個經取代的芳基。v表示0~5的整數,但亦可為v不同的化合物的混合物。 In formula (44), Ar 3 represents a benzene diyl group, a naphthalene diyl group or a biphenyl diyl group, and when v is an integer greater than 2, Ar 3 may be the same as or different from each other. Ri and Rj each independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, a benzyl group, an alkoxy group having 1 to 4 carbon atoms, a hydroxyl group, a trifluoromethyl group, or at least one substituted aryl group selected from the group consisting of a cyano group. v represents an integer from 0 to 5, but may be a mixture of compounds having different v.
進而,作為式(42)中的X,可列舉式所表示的二價基。Furthermore, as X in formula (42), a divalent group represented by the formula:
[化49] [Chemistry 49]
此處,式中,z表示4~7的整數。Rk各自獨立地表示氫原子或碳數1~6的烷基。 作為式(43)的Ar 2及式(44)的Ar 3的具體例,可列舉:式(43)中示出的兩個碳原子或式(44)中示出的兩個氧原子鍵結於1,4位或1,3位的苯二基;兩個碳原子或兩個氧原子鍵結於4,4'位、2,4'位、2,2'位、2,3'位、3,3'位、或3,4'位的聯苯二基;及兩個碳原子或兩個氧原子鍵結於2,6位、1,5位、1,6位、1,8位、1,3位、1,4位、或2,7位的萘二基。 式(43)的Rb、Rc、Rd、Re、Rf及Rg、以及式(44)的Ri、Rj中的烷基及芳基與式(42)中的烷基及芳基為相同含義。 Here, in the formula, z represents an integer of 4 to 7. Rk each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Specific examples of Ar 2 of formula (43) and Ar 3 of formula (44) include: a benzene diyl group in which two carbon atoms shown in formula (43) or two oxygen atoms shown in formula (44) are bonded to the 1,4 position or the 1,3 position; a biphenyl diyl group in which two carbon atoms or two oxygen atoms are bonded to the 4,4' position, 2,4' position, 2,2' position, 2,3' position, 3,3' position, or 3,4'position; and a naphthalene diyl group in which two carbon atoms or two oxygen atoms are bonded to the 2,6 position, 1,5 position, 1,6 position, 1,8 position, 1,3 position, 1,4 position, or 2,7 position. The alkyl group and aryl group in Rb, Rc, Rd, Re, Rf and Rg in formula (43) and Ri and Rj in formula (44) have the same meanings as the alkyl group and aryl group in formula (42).
作為式(42)所表示的氰氧基取代芳香族化合物的具體例,可列舉:氰氧基苯、1-氰氧基-2-甲基苯、1-氰氧基-3-甲基苯、或1-氰氧基-4-甲基苯、1-氰氧基-2-甲氧基苯、1-氰氧基-3-甲氧基苯、或1-氰氧基-4-甲氧基苯、1-氰氧基-2,3-二甲基苯、1-氰氧基-2,4-二甲基苯、1-氰氧基-2,5-二甲基苯、1-氰氧基-2,6-二甲基苯、1-氰氧基-3,4-二甲基苯或1-氰氧基-3,5-二甲基苯、氰氧基乙基苯、氰氧基丁基苯、氰氧基辛基苯、氰氧基壬基苯、2-(4-氰苯基)-2-苯基丙烷(4-α-枯基苯酚的氰酸酯)、1-氰氧基-4-環己基苯、1-氰氧基-4-乙烯基苯、1-氰氧基-2-氯苯或1-氰氧基-3-氯苯、1-氰氧基-2,6-二氯苯、1-氰氧基-2-甲基-3-氯苯、氰氧基硝基苯、1-氰氧基-4-硝基-2-乙基苯、1-氰氧基-2-甲氧基-4-烯丙基苯(丁香酚的氰酸酯)、甲基(4-氰氧基苯基)硫醚、1-氰氧基-3-三氟甲基苯、4-氰氧基聯苯、1-氰氧基-2-乙醯基苯或1-氰氧基-4-乙醯基苯、4-氰氧基苯甲醛、4-氰氧基苯甲酸甲酯、4-氰氧基苯甲酸苯酯、1-氰氧基-4-乙醯胺基苯、4-氰氧基二苯甲酮、1-氰氧基-2,6-二第三丁基苯、1,2-二氰氧基苯、1,3-二氰氧基苯、1,4-二氰氧基苯、1,4-二氰氧基-2-第三丁基苯、1,4-二氰氧基-2,4-二甲基苯、1,4-二氰氧基-2,3,4-二甲基苯、1,3-二氰氧基-2,4,6-三甲基苯、1,3-二氰氧基-5-甲基苯、1-氰氧基萘或2-氰氧基萘、1-氰氧基-4-甲氧基萘、2-氰氧基-6-甲氧基萘、2-氰氧基-7-甲氧基萘、2,2'-二氰氧基-1,1'-聯萘、1,3-、1,4-、1,5-、1,6-、1,7-、2,3-、2,6-或2,7-二氰氧基萘、2,2'-或4,4'-二氰氧基聯苯、4,4'-二氰氧基八氟聯苯、2,4'-或4,4'-二氰氧基二苯基甲烷、雙(4-氰氧基-3,5-二甲基苯基)甲烷、1,1-雙(4-氰氧基苯基)乙烷、1,1-雙(4-氰氧基苯基)丙烷、2,2-雙(4-氰氧基苯基)丙烷、2,2-雙(4-氰氧基-3-甲基苯基)丙烷、2,2-雙(2-氰氧基-5-聯苯基)丙烷、2,2-雙(4-氰氧基苯基)六氟丙烷、2,2-雙(4-氰氧基-3,5-二甲基苯基)丙烷、1,1-雙(4-氰氧基苯基)丁烷、1,1-雙(4-氰氧基苯基)異丁烷、1,1-雙(4-氰氧基苯基)戊烷、1,1-雙(4-氰氧基苯基)-3-甲基丁烷、1,1-雙(4-氰氧基苯基)-2-甲基丁烷、1,1-雙(4-氰氧基苯基)-2,2-二甲基丙烷、2,2-雙(4-氰氧基苯基)丁烷、2,2-雙(4-氰氧基苯基)戊烷、2,2-雙(4-氰氧基苯基)己烷、2,2-雙(4-氰氧基苯基)-3-甲基丁烷、2,2-雙(4-氰氧基苯基)-4-甲基戊烷、2,2-雙(4-氰氧基苯基)-3,3-二甲基丁烷、3,3-雙(4-氰氧基苯基)己烷、3,3-雙(4-氰氧基苯基)庚烷、3,3-雙(4-氰氧基苯基)辛烷、3,3-雙(4-氰氧基苯基)-2-甲基戊烷、3,3-雙(4-氰氧基苯基)-2-甲基己烷、3,3-雙(4-氰氧基苯基)-2,2-二甲基戊烷、4,4-雙(4-氰氧基苯基)-3-甲基庚烷、3,3-雙(4-氰氧基苯基)-2-甲基庚烷、3,3-雙(4-氰氧基苯基)-2,2-二甲基己烷、3,3-雙(4-氰氧基苯基)-2,4-二甲基己烷、3,3-雙(4-氰氧基苯基)-2,2,4-三甲基戊烷、2,2-雙(4-氰氧基苯基)-1,1,1,3,3,3-六氟丙烷、雙(4-氰氧基苯基)苯基甲烷、1,1-雙(4-氰氧基苯基)-1-苯基乙烷、雙(4-氰氧基苯基)聯苯甲烷、1,1-雙(4-氰氧基苯基)環戊烷、1,1-雙(4-氰氧基苯基)環己烷、2,2-雙(4-氰氧基-3-異丙基苯基)丙烷、1,1-雙(3-環己基-4-氰氧基苯基)環己烷、雙(4-氰氧基苯基)二苯基甲烷、雙(4-氰氧基苯基)-2,2-二氯乙烯、1,3-雙[2-(4-氰氧基苯基)-2-丙基]苯、1,4-雙[2-(4-氰氧基苯基)-2-丙基]苯、1,1-雙(4-氰氧基苯基)-3,3,5-三甲基環己烷、4-[雙(4-氰氧基苯基)甲基]聯苯、4,4-二氰氧基二苯甲酮、1,3-雙(4-氰氧基苯基)-2-丙烯-1-酮、雙(4-氰氧基苯基)醚、雙(4-氰氧基苯基)硫醚、雙(4-氰氧基苯基)碸、4-氰氧基苯甲酸-4-氰氧基苯酯(4-氰氧基苯基-4-氰氧基苯甲酸酯)、雙-(4-氰氧基苯基)碳酸酯、1,3-雙(4-氰氧基苯基)金剛烷、1,3-雙(4-氰氧基苯基)-5,7-二甲基金剛烷、3,3-雙(4-氰氧基苯基)異苯並呋喃-1(3H)-酮(苯酚酚酞的氰酸酯)、3,3-雙(4-氰氧基-3-甲基苯基)異苯並呋喃-1(3H)-酮(鄰甲酚酚酞的氰酸酯)、9,9'-雙(4-氰氧基苯基)芴、9,9-雙(4-氰氧基-3-甲基苯基)芴、9,9-雙(2-氰氧基-5-聯苯基)芴、三(4-氰氧基苯基)甲烷、1,1,1-三(4-氰氧基苯基)乙烷、1,1,3-三(4-氰氧基苯基)丙烷、α,α,α'-三(4-氰氧基苯基)-1-乙基-4-異丙基苯、1,1,2,2-四(4-氰氧基苯基)乙烷、四(4-氰氧基苯基)甲烷、2,4,6-三(N-甲基-4-氰氧基苯胺基)-1,3,5-三嗪、2,4-雙(N-甲基-4-氰氧基苯胺基)-6-(N-甲基苯胺基)-1,3,5-三嗪、雙(N-4-氰氧基-2-甲基苯基)-4,4'-氧二鄰苯二甲醯亞胺、雙(N-3-氰氧基-4-甲基苯基)-4,4'-氧二鄰苯二甲醯亞胺、雙(N-4-氰氧基苯基)-4,4'-氧二鄰苯二甲醯亞胺、雙(N-4-氰氧基-2-甲基苯基)-4,4'-(六氟亞異丙基)二鄰苯二甲醯亞胺、三(3,5-二甲基-4-氰氧基苄基)異氰脲酸酯、2-苯基-3,3-雙(4-氰氧基苯基)苄甲內醯胺、2-(4-甲基苯基)-3,3-雙(4-氰氧基苯基)苄甲內醯胺、2-苯基-3,3-雙(4-氰氧基-3-甲基苯基)苄甲內醯胺、1-甲基-3,3-雙(4-氰氧基苯基)吲哚啉-2-酮、及2-苯基-3,3-雙(4-氰氧基苯基)吲哚啉-2-酮。Specific examples of the cyano-substituted aromatic compound represented by formula (42) include cyanobenzene, 1-cyano-2-methylbenzene, 1-cyano-3-methylbenzene, 1-cyano-4-methylbenzene, 1-cyano-2-methoxybenzene, 1-cyano-3-methoxybenzene, 1-cyano-4-methoxybenzene, 1-cyano-2,3-dimethylbenzene, 1-cyano-2,4-dimethylbenzene, 1-cyano-2,5-dimethylbenzene, 1 -2,6-cyanodimethylbenzene, 1-cyano-3,4-dimethylbenzene or 1-cyano-3,5-dimethylbenzene, cyanoethylbenzene, cyanobutylbenzene, cyanooctylbenzene, cyanononylbenzene, 2-(4-cyanophenyl)-2-phenylpropane (cyanate of 4-α-cumylphenol), 1-cyano-4-cyclohexylbenzene, 1-cyano-4-vinylbenzene, 1-cyano-2-chlorobenzene or 1-cyano-3-chlorobenzene, 1-cyano-2,6 -dichlorobenzene, 1-cyano-2-methyl-3-chlorobenzene, cyanonitrobenzene, 1-cyano-4-nitro-2-ethylbenzene, 1-cyano-2-methoxy-4-allylbenzene (cyanate of eugenol), methyl (4-cyanophenyl) sulfide, 1-cyano-3-trifluoromethylbenzene, 4-cyanobiphenyl, 1-cyano-2-acetylbenzene or 1-cyano-4-acetylbenzene, 4-cyanobenzaldehyde, 4-cyanobenzoic acid methyl ester, 4-cyano benzoic acid phenyl ester, 1-cyano-4-acetamidobenzene, 4-cyanobenzophenone, 1-cyano-2,6-di-tert-butylbenzene, 1,2-dicyanobenzene, 1,3-dicyanobenzene, 1,4-dicyanobenzene, 1,4-dicyano-2-tert-butylbenzene, 1,4-dicyano-2,4-dimethylbenzene, 1,4-dicyano-2,3,4-dimethylbenzene, 1,3-dicyano-2,4,6-trimethylbenzene, 1,3-dicyano 1-cyano-naphthalene or 2-cyano-naphthalene, 1-cyano-4-methoxy-naphthalene, 2-cyano-6-methoxy-naphthalene, 2-cyano-7-methoxy-naphthalene, 2,2'-dicyano-1,1'-binaphthyl, 1,3-, 1,4-, 1,5-, 1,6-, 1,7-, 2,3-, 2,6- or 2,7-dicyano-naphthalene, 2,2'- or 4,4'-dicyanobiphenyl, 4,4'-dicyanooctafluorobiphenyl, 2,4 '- or 4,4'-dicyanodiphenylmethane, bis(4-cyano-3,5-dimethylphenyl)methane, 1,1-bis(4-cyanophenyl)ethane, 1,1-bis(4-cyanophenyl)propane, 2,2-bis(4-cyanophenyl)propane, 2,2-bis(4-cyanophenyl-3-methylphenyl)propane, 2,2-bis(2-cyano-5-biphenyl)propane, 2,2-bis(4-cyanophenyl)hexafluoropropane, 2,2-bis(4-cyanophenyl) 1,1-bis(4-cyanophenyl)-3,5-dimethylphenyl)propane, 1,1-bis(4-cyanophenyl)butane, 1,1-bis(4-cyanophenyl)isobutane, 1,1-bis(4-cyanophenyl)pentane, 1,1-bis(4-cyanophenyl)-3-methylbutane, 1,1-bis(4-cyanophenyl)-2-methylbutane, 1,1-bis(4-cyanophenyl)-2,2-dimethylpropane, 2,2-bis(4-cyanophenyl)butane, 2,2- Bis(4-cyanophenyl)pentane, 2,2-bis(4-cyanophenyl)hexane, 2,2-bis(4-cyanophenyl)-3-methylbutane, 2,2-bis(4-cyanophenyl)-4-methylpentane, 2,2-bis(4-cyanophenyl)-3,3-dimethylbutane, 3,3-bis(4-cyanophenyl)hexane, 3,3-bis(4-cyanophenyl)heptane, 3,3-bis(4-cyanophenyl)octane, 3,3-bis(4-cyanophenyl) 3,3-Bis(4-cyanophenyl)-2-methylpentane, 3,3-Bis(4-cyanophenyl)-2-methylhexane, 3,3-Bis(4-cyanophenyl)-2,2-dimethylpentane, 4,4-Bis(4-cyanophenyl)-3-methylheptane, 3,3-Bis(4-cyanophenyl)-2-methylheptane, 3,3-Bis(4-cyanophenyl)-2,2-dimethylhexane, 3,3-Bis(4-cyanophenyl)-2,4-dimethylhexane, 3,3-Bis( 4-cyanophenyl)-2,2,4-trimethylpentane, 2,2-bis(4-cyanophenyl)-1,1,1,3,3,3-hexafluoropropane, bis(4-cyanophenyl)phenylmethane, 1,1-bis(4-cyanophenyl)-1-phenylethane, bis(4-cyanophenyl)biphenylmethane, 1,1-bis(4-cyanophenyl)cyclopentane, 1,1-bis(4-cyanophenyl)cyclohexane, 2,2-bis(4-cyanophenyl)-3-isopropylphenyl )propane, 1,1-bis(3-cyclohexyl-4-cyanophenyl)cyclohexane, bis(4-cyanophenyl)diphenylmethane, bis(4-cyanophenyl)-2,2-dichloroethylene, 1,3-bis[2-(4-cyanophenyl)-2-propyl]benzene, 1,4-bis[2-(4-cyanophenyl)-2-propyl]benzene, 1,1-bis(4-cyanophenyl)-3,3,5-trimethylcyclohexane, 4-[bis(4-cyanophenyl)methyl] Benzene, 4,4-dicyanobenzophenone, 1,3-bis(4-cyanophenyl)-2-propene-1-one, bis(4-cyanophenyl) ether, bis(4-cyanophenyl) sulfide, bis(4-cyanophenyl) sulfide, 4-cyanophenyl-4-cyanobenzoate (4-cyanophenyl-4-cyanobenzoate), bis-(4-cyanophenyl) carbonate, 1,3-bis(4-cyanophenyl)adamantane, 1,3-bis(4-cyanophenyl)- 5,7-dimethyladamantane, 3,3-bis(4-cyanophenyl)isobenzofuran-1(3H)-one (cyanate of phenolphthalein), 3,3-bis(4-cyano-3-methylphenyl)isobenzofuran-1(3H)-one (cyanate of o-cresolphthalein), 9,9'-bis(4-cyanophenyl)fluorene, 9,9-bis(4-cyano-3-methylphenyl)fluorene, 9,9-bis(2-cyano-5-biphenyl)fluorene, tris(4-cyanophenyl) 1,1,1-tris(4-cyanophenyl)ethane, 1,1,3-tris(4-cyanophenyl)propane, α,α,α'-tris(4-cyanophenyl)-1-ethyl-4-isopropylbenzene, 1,1,2,2-tetrakis(4-cyanophenyl)ethane, tetrakis(4-cyanophenyl)methane, 2,4,6-tris(N-methyl-4-cyanophenylamino)-1,3,5-triazine, 2,4-bis(N-methyl-4-cyanophenylamino)- 6-(N-methylanilino)-1,3,5-triazine, bis(N-4-cyano-2-methylphenyl)-4,4'-oxydiphenylene dicarboxamide, bis(N-3-cyano-4-methylphenyl)-4,4'-oxydiphenylene dicarboxamide, bis(N-4-cyanophenyl)-4,4'-oxydiphenylene dicarboxamide, bis(N-4-cyanophenyl)-2-methylphenyl)-4,4'-(hexafluoroisopropylidene)diphenylene dicarboxamide, tris(3,5 -dimethyl-4-cyanobenzyl) isocyanurate, 2-phenyl-3,3-bis(4-cyanophenyl)benzylformamide, 2-(4-methylphenyl)-3,3-bis(4-cyanophenyl)benzylformamide, 2-phenyl-3,3-bis(4-cyanophenyl)benzylformamide, 1-methyl-3,3-bis(4-cyanophenyl)indolin-2-one, and 2-phenyl-3,3-bis(4-cyanophenyl)indolin-2-one.
該些氰酸酯化合物亦能夠單獨使用一種或適當混合使用兩種以上。These cyanate compounds may be used alone or in combination of two or more.
作為式(42)所表示的氰酸酯化合物的另一具體例,可列舉使如下的酚樹脂藉由與上述相同的方法進行氰酸酯化而成者等、以及該些的預聚物等:苯酚酚醛清漆樹脂及甲酚酚醛清漆樹脂(藉由公知的方法,使苯酚、烷基取代苯酚或鹵素取代苯酚、與福馬林、聚甲醛(paraformaldehyde)等甲醛化合物於酸性溶液中反應而成者)、三苯酚酚醛清漆樹脂(使羥基苯甲醛與苯酚於酸性觸媒的存在下反應而成者)、芴酚醛清漆樹脂(使芴酮化合物與9,9-雙(羥基芳基)芴類於酸性觸媒的存在下反應而成者)、苯酚芳烷基樹脂、甲酚芳烷基樹脂、萘酚芳烷基樹脂及聯苯芳烷基樹脂(藉由公知的方法,使如Ar 4-(CH 2Y) 2(Ar 4表示苯基,Y表示鹵素原子;以下,於該段落中相同)所表示的雙鹵代甲基化合物與酚化合物於酸性觸媒或無觸媒下反應而成者、使如Ar 4-(CH 2OR) 2(R表示烷基)所表示的雙(烷氧基甲基)化合物與酚化合物於酸性觸媒的存在下反應而成者、或使如Ar 4-(CH 2OH) 2所表示的雙(羥基甲基)化合物與酚化合物於酸性觸媒的存在下反應而成者、或者使芳香族醛化合物與芳烷基化合物以及酚化合物縮聚而成者)、苯酚改質二甲苯甲醛樹脂(藉由公知的方法,使二甲苯甲醛樹脂與酚化合物於酸性觸媒的存在下反應而成者)、改質萘甲醛樹脂(藉由公知的方法,使萘甲醛樹脂與羥基取代芳香族化合物於酸性觸媒的存在下反應而成者)、苯酚改質二環戊二烯樹脂、具有聚伸萘醚結構的酚樹脂(藉由公知的方法,使於一分子中具有兩個以上的酚性羥基的多元羥基萘化合物於鹼性觸媒的存在下脫水縮合而成者)等。該些氰酸酯化合物亦能夠單獨使用一種或適當混合使用兩種以上。 As another specific example of the cyanate compound represented by formula (42), there can be cited the following phenol resins which are cyanated by the same method as above, and prepolymers thereof, etc.: phenol novolac resins and cresol novolac resins (phenol, alkyl-substituted phenol or halogen-substituted phenol, and formaldehyde such as formalin or paraformaldehyde are reacted with each other by a known method); Compounds are reacted in an acidic solution), trisphenol novolac resins (formed by reacting hydroxybenzaldehyde and phenol in the presence of an acidic catalyst), fluorene novolac resins (formed by reacting a fluorenone compound with 9,9-bis(hydroxyaryl)fluorene in the presence of an acidic catalyst), phenol aralkyl resins, cresol aralkyl resins, naphthol aralkyl resins and biphenyl aralkyl resins (formed by reacting a hydroxybenzaldehyde and phenol in the presence of an acidic catalyst by a known method). A dihalogenated methyl compound represented by Ar 4 -(CH 2 Y) 2 (Ar 4 represents a phenyl group, Y represents a halogen atom; the same shall apply in the following paragraph) is reacted with a phenol compound in the presence of an acidic catalyst or in the absence of a catalyst; a bis(alkoxymethyl) compound represented by Ar 4 -(CH 2 OR) 2 (R represents an alkyl group) is reacted with a phenol compound in the presence of an acidic catalyst; or a di(alkoxymethyl) compound represented by Ar 4 -(CH 2 OH) 2 and a phenol compound in the presence of an acidic catalyst, or an aromatic aldehyde compound, an aralkyl compound and a phenol compound are condensed), a phenol-modified xylene formaldehyde resin (formed by a known method by reacting a xylene formaldehyde resin and a phenol compound in the presence of an acidic catalyst), a modified naphthalene formaldehyde resin (formed by a known method by reacting a naphthalene formaldehyde resin and a hydroxy-substituted aromatic compound in the presence of an acidic catalyst), a phenol-modified dicyclopentadiene resin, a phenol resin having a polynaphthalene ether structure (formed by dehydrating and condensing a polyhydroxynaphthalene compound having two or more phenolic hydroxyl groups in one molecule in the presence of an alkaline catalyst by a known method), and the like. These cyanate compounds may be used alone or in combination of two or more.
該些氰酸酯化合物的製造方法並無特別限定,可使用公知的方法。作為所述製法的例子,可列舉以下方法:獲取或合成具有所需骨架的含羥基的化合物,並藉由公知的手法對羥基進行修飾而予以氰酸酯化。作為將羥基予以氰酸酯化的手法,例如可列舉於伊安·哈默頓、「氰酸酯樹脂的化學及技術」、布萊基學術&專業(Ian Hamerton,Chemistry and Technology of Cyanate Ester Resins,Blackie Academic & Professional)中記載的手法。The production method of these cyanate ester compounds is not particularly limited, and a known method can be used. As an example of the production method, the following method can be cited: a hydroxyl group-containing compound having a desired skeleton is obtained or synthesized, and the hydroxyl group is modified by a known method to be cyanated. As a method for cyanating a hydroxyl group, for example, the method described in Ian Hamerton, "Chemistry and Technology of Cyanate Ester Resins", Blackie Academic & Professional can be cited.
使用了該些氰酸酯化合物的硬化物具有玻璃轉移溫度、低熱膨脹性及鍍敷密接性等優異的特性。The cured products using these cyanate compounds have excellent properties such as glass transition temperature, low thermal expansion and plating adhesion.
於本實施方式的樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,氰酸酯化合物的含量為0.01質量份~40質量份。In the resin composition of the present embodiment, the content of the cyanate compound is usually 0.01 to 40 parts by mass relative to 100 parts by mass of the total of the bismaleimide compound (A), the compound (B) and the photocuring initiator (C).
(酚樹脂) 作為酚樹脂,只要是於一分子中具有兩個以上的羥基的酚樹脂,則可使用一般公知者。例如可列舉:雙酚A型酚樹脂、雙酚E型酚樹脂、雙酚F型酚樹脂、雙酚S型酚樹脂、苯酚酚醛清漆樹脂、雙酚A酚醛清漆型酚樹脂、縮水甘油酯型酚樹脂、芳烷基酚醛清漆型酚樹脂、聯苯芳烷基型酚樹脂、甲酚酚醛清漆型酚樹脂、多官能苯酚樹脂、萘酚樹脂、萘酚酚醛清漆樹脂、多官能萘酚樹脂、蒽型酚樹脂、萘骨架改質酚醛清漆型酚樹脂、苯酚芳烷基型酚樹脂、萘酚芳烷基型酚樹脂、二環戊二烯型苯酚樹脂、聯苯型酚樹脂、脂環式酚樹脂、多元醇型酚樹脂、含磷的酚樹脂、含聚合性不飽和烴基的酚樹脂、及含羥基的矽酮樹脂類等。該些酚樹脂亦能夠單獨使用一種或適當混合使用兩種以上。 (Phenol resin) As the phenol resin, any generally known phenol resin can be used as long as it has two or more hydroxyl groups in one molecule. For example, bisphenol A type phenol resin, bisphenol E type phenol resin, bisphenol F type phenol resin, bisphenol S type phenol resin, phenol novolac resin, bisphenol A novolac type phenol resin, glycidyl ester type phenol resin, aralkyl novolac type phenol resin, biphenyl aralkyl type phenol resin, cresol novolac type phenol resin, polyfunctional phenol resin, naphthol resin, naphthol novolac type phenol resin, Varnish resin, multifunctional naphthol resin, anthracene phenol resin, naphthalene skeleton modified novolac phenol resin, phenol aralkyl phenol resin, naphthol aralkyl phenol resin, dicyclopentadiene phenol resin, biphenyl phenol resin, alicyclic phenol resin, polyol phenol resin, phosphorus-containing phenol resin, polymerizable unsaturated hydrocarbon-containing phenol resin, and hydroxyl-containing silicone resins. These phenol resins can be used alone or in combination of two or more.
於本實施方式的樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,酚樹脂的含量為0.01質量份~40質量份。In the resin composition of the present embodiment, the content of the phenol resin is usually 0.01 to 40 parts by mass relative to 100 parts by mass of the total of the bismaleimide compound (A), the compound (B) and the photocuring initiator (C).
(氧雜環丁烷樹脂) 作為氧雜環丁烷樹脂,可使用一般公知者。例如可列舉:氧雜環丁烷、2-甲基氧雜環丁烷、2,2-二甲基氧雜環丁烷、3-甲基氧雜環丁烷、3,3-二甲基氧雜環丁烷等烷基氧雜環丁烷、3-甲基-3-甲氧基甲基氧雜環丁烷、3,3-二(三氟甲基)全氟氧雜環丁烷、2-氯甲基氧雜環丁烷、3,3-雙(氯甲基)氧雜環丁烷、聯苯型氧雜環丁烷、OXT-101(東亞合成(股)製造,商品名)、OXT-121(東亞合成(股)製造,商品名)、及OXT-221(東亞合成(股)製造,商品名)等。該些氧雜環丁烷樹脂亦能夠單獨使用一種或適當混合使用兩種以上。 (Oxycyclobutane resin) As the oxycyclobutane resin, generally known ones can be used. For example, alkyl cyclooxybutanes such as cyclooxybutane, 2-methylcyclooxybutane, 2,2-dimethylcyclooxybutane, 3-methylcyclooxybutane, 3,3-dimethylcyclooxybutane, 3-methyl-3-methoxymethylcyclooxybutane, 3,3-bis(trifluoromethyl)perfluorocyclooxybutane, 2-chloromethylcyclooxybutane, 3,3-bis(chloromethyl)cyclooxybutane, biphenyl-type cyclooxybutane, OXT-101 (trade name, manufactured by Toagosei Co., Ltd.), OXT-121 (trade name, manufactured by Toagosei Co., Ltd.), and OXT-221 (trade name, manufactured by Toagosei Co., Ltd.). These cyclohexane oxybutane resins can be used alone or in combination of two or more.
於所述樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,氧雜環丁烷樹脂的含量為0.01質量份~40質量份。In the resin composition, the content of the cyclohexane oxybutane resin is usually 0.01 to 40 parts by mass relative to 100 parts by mass of the total of the bismaleimide compound (A), the compound (B) and the photocuring initiator (C).
(苯並噁嗪化合物) 作為苯並噁嗪化合物,只要是於一分子中具有兩個以上的二氫苯並噁嗪環的化合物,則可使用一般公知者。例如可列舉:雙酚A型苯並噁嗪BA-BXZ(小西化學工業(股)製造,商品名)、雙酚F型苯並噁嗪BF-BXZ(小西化學工業(股)製造,商品名)、雙酚S型苯並噁嗪BS-BXZ(小西化學工業(股)製造,商品名)、苯酚酚酞型苯並噁嗪等。該些苯並噁嗪化合物亦能夠單獨使用一種或適當混合使用兩種以上。 (Benzoxazine compound) As the benzoxazine compound, any generally known compound having two or more dihydrobenzoxazine rings in one molecule can be used. For example, bisphenol A type benzoxazine BA-BXZ (manufactured by Konishi Chemical Industry Co., Ltd., trade name), bisphenol F type benzoxazine BF-BXZ (manufactured by Konishi Chemical Industry Co., Ltd., trade name), bisphenol S type benzoxazine BS-BXZ (manufactured by Konishi Chemical Industry Co., Ltd., trade name), phenolphthalein type benzoxazine, etc. These benzoxazine compounds can be used alone or in combination of two or more.
於本實施方式的樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,苯並噁嗪化合物的含量為0.01質量份~40質量份。In the resin composition of the present embodiment, the content of the benzoxazine compound is usually 0.01 to 40 parts by mass relative to 100 parts by mass of the total of the bismaleimide compound (A), the compound (B) and the photocuring initiator (C).
(環氧樹脂) 作為環氧樹脂,並無特別限定,可使用一般公知者。例如可列舉:雙酚A型環氧樹脂、雙酚E型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚A酚醛清漆型環氧樹脂、聯苯型環氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、二甲苯酚醛清漆型環氧樹脂、多官能酚型環氧樹脂、萘型環氧樹脂、萘骨架改質酚醛清漆型環氧樹脂、伸萘醚型環氧樹脂、苯酚芳烷基型環氧樹脂、蒽型環氧樹脂、三官能酚型環氧樹脂、四官能酚型環氧樹脂、三縮水甘油基異氰脲酸酯、縮水甘油酯型環氧樹脂、脂環式環氧樹脂、二環戊二烯酚醛清漆型環氧樹脂、聯苯酚醛清漆型環氧樹脂、苯酚芳烷基酚醛清漆型環氧樹脂、萘酚芳烷基酚醛清漆型環氧樹脂、芳烷基酚醛清漆型環氧樹脂、萘酚芳烷基型環氧樹脂、二環戊二烯型環氧樹脂、多元醇型環氧樹脂、含磷的環氧樹脂、縮水甘油基胺、將丁二烯等的雙鍵予以環氧化而成的化合物、藉由含羥基的矽酮樹脂類與表氯醇的反應而得的化合物、及該些的鹵化物。該些環氧樹脂亦能夠單獨使用一種或適當混合使用兩種以上。 (Epoxy resin) The epoxy resin is not particularly limited, and generally known epoxy resins can be used. For example, bisphenol A type epoxy resin, bisphenol E type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol A novolac type epoxy resin, biphenyl type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, xylene novolac type epoxy resin, Epoxy resin, polyfunctional phenol epoxy resin, naphthalene epoxy resin, naphthalene skeleton modified novolac epoxy resin, naphthalene ether epoxy resin, phenol aralkyl epoxy resin, anthracene epoxy resin, trifunctional phenol epoxy resin, tetrafunctional phenol epoxy resin, triglycidyl isocyanuric acid esters, glycidyl ester type epoxy resins, alicyclic epoxy resins, dicyclopentadiene novolac type epoxy resins, biphenyl novolac type epoxy resins, phenol aralkyl novolac type epoxy resins, naphthol aralkyl novolac type epoxy resins, aralkyl novolac type epoxy resins, naphthol aralkyl type epoxy resins, dicyclopentadiene type epoxy resins, polyol type epoxy resins, phosphorus-containing epoxy resins, glycidyl amine, compounds obtained by epoxidizing double bonds of butadiene and the like, compounds obtained by reacting hydroxyl-containing silicone resins with epichlorohydrin, and halides thereof. These epoxy resins can be used alone or in combination of two or more.
作為環氧樹脂,亦可利用市售品。作為市售品,例如可列舉式(45)所表示的環氧樹脂(日本化藥(股)製造的NC-3000FH(商品名),式(45)中,n約為4)、及式(46)所表示的萘型環氧樹脂(迪愛生(DIC)(股)製造的HP-4710(商品名))。As the epoxy resin, a commercial product may be used. Examples of commercial products include an epoxy resin represented by formula (45) (NC-3000FH (trade name) manufactured by Nippon Kayaku Co., Ltd., where n is approximately 4 in formula (45)) and a naphthalene-based epoxy resin represented by formula (46) (HP-4710 (trade name) manufactured by DIC Corporation).
[化50] [Chemistry 50]
[化51] [Chemistry 51]
該些環氧樹脂亦能夠單獨使用一種或適當混合使用兩種以上。These epoxy resins may be used alone or in combination of two or more.
於本實施方式的樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,環氧樹脂的含量為0.01質量份~40質量份。In the resin composition of the present embodiment, the content of the epoxy resin is usually 0.01 to 40 parts by mass relative to 100 parts by mass of the total of the dimaleimide compound (A), the compound (B) and the photocuring initiator (C).
(其他化合物) 作為其他化合物,可列舉:乙基乙烯基醚、丙基乙烯基醚、羥基乙基乙烯基醚、乙二醇二乙烯基醚等乙烯基醚類;苯乙烯、甲基苯乙烯、乙基苯乙烯、二乙烯基苯等苯乙烯類;三烯丙基異氰脲酸酯、三甲基烯丙基異氰脲酸酯、及雙烯丙基納迪克醯亞胺等。該些化合物亦能夠單獨使用一種或適當混合使用兩種以上。 於本實施方式的樹脂組成物中,通常相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,其他化合物的含量為0.01質量份~40質量份。 (Other compounds) As other compounds, there can be listed: vinyl ethers such as ethyl vinyl ether, propyl vinyl ether, hydroxyethyl vinyl ether, and ethylene glycol divinyl ether; styrenes such as styrene, methyl styrene, ethyl styrene, and divinylbenzene; triallyl isocyanurate, trimethylallyl isocyanurate, and diallyl nadic acid imide, etc. These compounds can also be used alone or in combination of two or more. In the resin composition of the present embodiment, the content of other compounds is usually 0.01 to 40 parts by mass relative to 100 parts by mass of the total of the dimaleimide compound (A), the compound (B), and the photocuring initiator (C).
〔有機溶劑〕 於本實施方式的樹脂組成物中,視需要亦可包含有機溶劑。若使用有機溶劑,則可調整樹脂組成物的製備時的黏度。關於有機溶劑的種類,只要能夠溶解樹脂組成物中的樹脂的一部分或全部,則並無特別限定。作為有機溶劑,例如可列舉:丙酮、甲基乙基酮、及甲基異丁基酮等酮類;環戊酮及環己酮等脂環式酮類;丙二醇單甲醚、及丙二醇單甲醚乙酸酯等溶纖劑系溶媒;乳酸乙酯、乙酸甲酯、乙酸乙酯、乙酸丁酯、乙酸異戊酯、乳酸乙酯、甲氧基丙酸甲酯、羥基異丁酸甲酯、及γ-丁內酯等酯系溶媒;二甲基乙醯胺、及二甲基甲醯胺等醯胺類等極性溶劑類;甲苯、二甲苯、及苯甲醚等芳香族烴等無極性溶劑。 該些有機溶劑亦能夠單獨使用一種或適當混合使用兩種以上。 [Organic solvent] The resin composition of the present embodiment may contain an organic solvent as needed. If an organic solvent is used, the viscosity of the resin composition can be adjusted during preparation. There is no particular limitation on the type of organic solvent as long as it can dissolve a part or all of the resin in the resin composition. Examples of organic solvents include: ketones such as acetone, methyl ethyl ketone, and methyl isobutyl ketone; alicyclic ketones such as cyclopentanone and cyclohexanone; solvent-based solvents such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate; ester-based solvents such as ethyl lactate, methyl acetate, ethyl acetate, butyl acetate, isoamyl acetate, ethyl lactate, methyl methoxypropionate, methyl hydroxy isobutyrate, and γ-butyrolactone; polar solvents such as amides such as dimethylacetamide and dimethylformamide; non-polar solvents such as aromatic hydrocarbons such as toluene, xylene, and anisole. These organic solvents can be used alone or in combination of two or more.
〔其他成分〕 於本實施方式的樹脂組成物中,於無損本實施方式的特性的範圍內,亦能夠併用至今未列舉的熱硬化性樹脂、熱塑性樹脂、及其寡聚物、以及彈性體類等各種高分子化合物;至今未列舉的阻燃性的化合物;添加劑等。該些若為一般使用者,則並無特別限定。例如,阻燃性的化合物可列舉三聚氰胺、苯並胍胺等含氮的化合物、含噁嗪環的化合物、及磷系化合物的磷酸酯化合物、芳香族縮合磷酸酯、含鹵素縮合磷酸酯等。作為添加劑,可列舉:紫外線吸收劑、抗氧化劑、螢光增白劑、光增感劑、染料、顏料、增黏劑、潤滑劑、消泡劑、表面調整劑、光澤劑、聚合抑制劑、熱硬化促進劑等。該些成分亦能夠單獨使用一種或適當混合使用兩種以上。 於本實施方式的樹脂組成物中,相對於雙馬來醯亞胺化合物(A)、化合物(B)及光硬化起始劑(C)的合計100質量份,其他成分的含量通常分別為0.1質量份~10質量份。 [Other components] In the resin composition of the present embodiment, various polymer compounds such as thermosetting resins, thermoplastic resins, and oligomers thereof, and elastomers that have not been listed heretofore, flame retardant compounds that have not been listed heretofore, and additives, etc., can also be used in combination within the scope that does not impair the characteristics of the present embodiment. These are not particularly limited if they are general users. For example, flame retardant compounds can include nitrogen-containing compounds such as melamine and benzoguanamine, compounds containing oxazine rings, and phosphoric acid ester compounds of phosphorus compounds, aromatic condensed phosphates, halogen-containing condensed phosphates, etc. As additives, there can be listed: ultraviolet absorbers, antioxidants, fluorescent whitening agents, photosensitizers, dyes, pigments, thickeners, lubricants, defoamers, surface conditioners, gloss agents, polymerization inhibitors, thermosetting accelerators, etc. These components can also be used alone or in a suitable mixture of two or more. In the resin composition of the present embodiment, the content of other components is usually 0.1 to 10 parts by mass relative to the total of 100 parts by mass of the dimaleimide compound (A), the compound (B) and the photocuring initiator (C).
〔樹脂組成物的製造方法〕 本實施方式的樹脂組成物藉由將雙馬來醯亞胺化合物(A)、化合物(B)、光硬化起始劑(C)、與視需要的雙馬來醯亞胺化合物(A)以外的馬來醯亞胺化合物(D)、填充材(E)、及其他樹脂、其他化合物、添加劑等適當混合來製備。樹脂組成物可適宜地用作製作後述本實施方式的樹脂片材時的清漆。再者,清漆的製備中使用的有機溶媒並無特別限定,其具體例如上所述。 [Method for producing resin composition] The resin composition of the present embodiment is prepared by appropriately mixing a bismaleimide compound (A), a compound (B), a photocuring initiator (C), and, if necessary, a maleimide compound (D) other than the bismaleimide compound (A), a filler (E), and other resins, other compounds, additives, etc. The resin composition can be suitably used as a varnish when producing a resin sheet of the present embodiment described later. In addition, the organic solvent used in the preparation of the varnish is not particularly limited, and its specific example is as described above.
樹脂組成物的製造方法例如可列舉將上述各成分依次調配至溶劑中並充分攪拌的方法。樹脂組成物具有優異的光硬化性、相對於有機溶媒的良好的溶解性、以及優異的鹼顯影性。The method for producing the resin composition includes, for example, mixing the above-mentioned components into a solvent in sequence and stirring the mixture thoroughly. The resin composition has excellent photocurability, good solubility in organic solvents, and excellent alkali developability.
於製造樹脂組成物時,視需要可進行用於使各成分均勻地溶解或分散的公知的處理(攪拌、混合、混練處理等)。具體而言,藉由使用附設了具有恰當的攪拌能力的攪拌機的攪拌槽進行攪拌分散處理,可提高樹脂組成物中的各成分的分散性。攪拌、混合、混練處理例如可使用超音波均質機等以分散為目的的攪拌裝置、三輥、球磨機、珠磨機、砂磨機等以混合為目的的裝置、以及公轉或自轉型的混合裝置等公知的裝置適當進行。另外,於製備樹脂組成物時,視需要可使用有機溶劑。關於有機溶劑的種類,只要能夠溶解樹脂組成物中的樹脂,則並無特別限定,其具體例如上所述。When manufacturing the resin composition, known treatments (stirring, mixing, kneading treatments, etc.) for uniformly dissolving or dispersing the components may be performed as necessary. Specifically, by performing a stirring and dispersing treatment using a stirring tank equipped with a stirrer having an appropriate stirring capacity, the dispersibility of the components in the resin composition can be improved. Stirring, mixing, and kneading treatments may be appropriately performed using known devices such as stirring devices for the purpose of dispersion, such as ultrasonic homogenizers, devices for the purpose of mixing, such as three-rollers, ball mills, bead mills, sand mills, and mixing devices of a revolving or rotating type. In addition, an organic solvent may be used as necessary when preparing the resin composition. The type of the organic solvent is not particularly limited as long as it can dissolve the resin in the resin composition, and specific examples thereof are as described above.
樹脂組成物可適宜地用作製作後述本實施方式的樹脂片材時的清漆。清漆可藉由公知的方法獲得。例如,清漆可藉由以下方式獲得:相對於本實施方式的樹脂組成物中的除有機溶媒以外的成分100質量份,加入有機溶劑10質量份~900質量份,並進行所述公知的混合處理(攪拌、混練處理等)。The resin composition can be suitably used as a varnish when preparing the resin sheet of the present embodiment described later. The varnish can be obtained by a known method. For example, the varnish can be obtained by adding 10 to 900 parts by mass of an organic solvent to 100 parts by mass of the components other than the organic solvent in the resin composition of the present embodiment, and performing the known mixing treatment (stirring, kneading treatment, etc.).
[用途] 樹脂組成物可較佳地用於需要絕緣性的樹脂組成物的用途。作為用途,例如可用於感光性膜、帶支撐體的感光性膜、預浸體、樹脂片材、電路基板(積層板用途、多層印刷配線板用途等)、阻焊劑、底部填充(underfill)材、黏晶材、半導體密封材、孔填埋樹脂、及零件埋入樹脂等。該些中,樹脂組成物由於在曝光步驟中不會阻礙光硬化反應而具有優異的光硬化性、且於顯影步驟中可賦予優異的鹼顯影性,因此可適宜地用作多層印刷配線板的絕緣層用途、或阻焊劑用途。 [Applications] The resin composition can be preferably used for applications where insulation is required. For example, it can be used for photosensitive films, photosensitive films with supports, prepregs, resin sheets, circuit boards (for laminated boards, multilayer printed wiring boards, etc.), solder resists, underfill materials, die attach materials, semiconductor sealing materials, hole filling resins, and component embedding resins. Among these, the resin composition has excellent photocurability because it does not hinder the photocuring reaction in the exposure step, and can be given excellent alkali development in the development step, so it can be suitably used as an insulating layer for multilayer printed wiring boards or solder resists.
[硬化物] 硬化物是使本實施方式的樹脂組成物硬化而成。硬化物例如可藉由使樹脂組成物熔融或溶解於溶媒後流入模具內、並使用光於通常的條件下使其硬化而獲得。關於光的波長區域,較佳為於藉由光聚合起始劑等有效率地進行硬化的100 nm~500 nm的範圍內加以硬化。 [Cured material] The cured material is obtained by curing the resin composition of the present embodiment. The cured material can be obtained, for example, by melting or dissolving the resin composition in a solvent, pouring the mixture into a mold, and curing the mixture under normal conditions using light. Regarding the wavelength range of the light, it is preferred to cure the mixture within a range of 100 nm to 500 nm, which is a range where curing is efficiently performed using a photopolymerization initiator or the like.
[樹脂片材] 本實施方式的樹脂片材是具有支撐體、以及配置於支撐體的單面或兩面的樹脂層且樹脂層包含本實施方式的樹脂組成物的、帶支撐體的樹脂片材。可將樹脂組成物塗佈於支撐體上並進行乾燥來製造樹脂片材。樹脂片材中的樹脂層具有優異的光硬化性及鹼顯影性。 [Resin sheet] The resin sheet of the present embodiment is a resin sheet with a support, which has a support and a resin layer disposed on one or both sides of the support, and the resin layer contains the resin composition of the present embodiment. The resin sheet can be manufactured by applying the resin composition on the support and drying it. The resin layer in the resin sheet has excellent light curing property and alkali developing property.
支撐體可使用公知者,但較佳為樹脂膜。作為樹脂膜,例如可列舉:聚醯亞胺膜、聚醯胺膜、聚酯膜、聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)膜、聚對苯二甲酸丁二酯(polybutylene terephthalate,PBT)膜、聚丙烯(polypropylene,PP)膜、聚乙烯(polyethylene,PE)膜、聚萘二甲酸乙二酯膜、聚乙烯基醇膜、及三乙醯基乙酸酯膜等。該些中,較佳為PET膜。The support body may be a known one, but preferably a resin film. Examples of the resin film include polyimide film, polyamide film, polyester film, polyethylene terephthalate (PET) film, polybutylene terephthalate (PBT) film, polypropylene (PP) film, polyethylene (PE) film, polyethylene naphthalate film, polyvinyl alcohol film, and triacetate film. Among these, PET film is preferred.
為了容易自樹脂層剝離,樹脂膜較佳為於表面塗佈剝離劑。樹脂膜的厚度較佳為5 μm~100 μm的範圍,更佳為10 μm~50 μm的範圍。若該厚度小於5 μm,則有於鹼顯影前進行支撐體剝離時支撐體容易破裂的傾向,若厚度超過100 μm,則有自支撐體上曝光時的解析度降低的傾向。In order to facilitate peeling from the resin layer, the resin film is preferably coated with a peeling agent on the surface. The thickness of the resin film is preferably in the range of 5 μm to 100 μm, and more preferably in the range of 10 μm to 50 μm. If the thickness is less than 5 μm, the support tends to be easily broken when the support is peeled off before alkaline development, and if the thickness exceeds 100 μm, the resolution tends to decrease when exposing from the support.
另外,為了減少曝光時的光散射,樹脂膜較佳為透明性優異的膜。In order to reduce light scattering during exposure, the resin film is preferably a film with excellent transparency.
進而,於本實施方式的樹脂片材中,其樹脂層亦可由保護膜保護。 藉由利用保護膜保護樹脂層側,可防止於樹脂層表面附著灰塵等或產生損傷。作為保護膜,可使用由與樹脂膜同樣的材料構成的膜。保護膜的厚度較佳為1 μm~50 μm的範圍,更佳為5 μm~40 μm的範圍。於厚度小於1 μm時,處於保護膜的操作性降低的傾向,若超過50 μm,則處於廉價性變差的傾向。再者,保護膜較佳為相對於樹脂層與支撐體的接著力,樹脂層與保護膜的接著力較小。 Furthermore, in the resin sheet of the present embodiment, the resin layer can also be protected by a protective film. By protecting the side of the resin layer with a protective film, dust or the like can be prevented from being attached to the surface of the resin layer or from being damaged. As the protective film, a film made of the same material as the resin film can be used. The thickness of the protective film is preferably in the range of 1 μm to 50 μm, and more preferably in the range of 5 μm to 40 μm. When the thickness is less than 1 μm, the operability of the protective film tends to be reduced, and if it exceeds 50 μm, the cost performance tends to be poor. Furthermore, the protective film is preferably such that the adhesion between the resin layer and the protective film is smaller than the adhesion between the resin layer and the support.
本實施方式的樹脂片材的製造方法例如可列舉以下方法等:將本實施方式的樹脂組成物塗佈於PET膜等支撐體,藉由乾燥來去除有機溶劑,藉此製造樹脂片材。 關於塗佈方法,例如可藉由使用輥塗機、逗點塗佈機、凹版塗佈機、模塗機、棒塗機、唇塗佈機、刮刀塗佈機、及擠壓塗佈機等的公知的方法進行。乾燥例如可藉由於60℃~200℃的乾燥機中加熱1分鐘~60分鐘的方法等進行。 The method for producing the resin sheet of the present embodiment can be exemplified by the following method, for example: the resin composition of the present embodiment is applied to a support such as a PET film, and the organic solvent is removed by drying to produce the resin sheet. Regarding the coating method, for example, it can be carried out by a known method using a roller coater, a comma coater, a gravure coater, a die coater, a rod coater, a lip coater, a blade coater, and an extrusion coater. Drying can be carried out, for example, by heating in a dryer at 60°C to 200°C for 1 minute to 60 minutes.
關於樹脂層中殘存的有機溶劑量,就防止於後續的步驟中有機溶劑擴散的觀點而言,相對於樹脂層的總質量,較佳為設為5質量%以下。就提高操作性的觀點而言,樹脂層的厚度較佳為設為1 μm~50 μm。The amount of the organic solvent remaining in the resin layer is preferably 5% by mass or less relative to the total mass of the resin layer from the viewpoint of preventing the organic solvent from diffusing in the subsequent steps. From the viewpoint of improving the workability, the thickness of the resin layer is preferably 1 μm to 50 μm.
樹脂片材可較佳地用作多層印刷配線板的絕緣層的製造用途。The resin sheet can be preferably used for manufacturing the insulating layer of a multi-layer printed wiring board.
[多層印刷配線板] 本實施方式的多層印刷配線板具有絕緣層、以及形成於絕緣層的單面或兩面的導體層,且絕緣層包含本實施方式的樹脂組成物。例如亦可將一片以上的樹脂片材重疊並進行硬化而獲得絕緣層。絕緣層與導體層各自的積層數並無特別限定,可根據目標用途適當設定積層數。另外,絕緣層與導體層的順序亦無特別限定。作為導體層,可為用於各種印刷配線板材料的金屬箔,例如可列舉銅及鋁等的金屬箔。作為銅的金屬箔,可列舉軋製銅箔及電解銅箔等銅箔。導體層的厚度通常為1 μm~100 μm。具體而言,可藉由以下的方法製造。 [Multi-layer printed wiring board] The multi-layer printed wiring board of the present embodiment has an insulating layer and a conductive layer formed on one or both sides of the insulating layer, and the insulating layer contains the resin composition of the present embodiment. For example, the insulating layer can be obtained by stacking and curing more than one resin sheet. There is no particular limitation on the number of layers of the insulating layer and the conductive layer, and the number of layers can be appropriately set according to the target use. In addition, there is no particular limitation on the order of the insulating layer and the conductive layer. As the conductive layer, it can be a metal foil used for various printed wiring board materials, for example, metal foils such as copper and aluminum can be listed. Examples of copper metal foils include rolled copper foil and electrolytic copper foil. The thickness of the conductor layer is usually 1 μm to 100 μm. Specifically, it can be produced by the following method.
(層壓步驟) 於層壓步驟中,使用真空層壓機將樹脂片材的樹脂層側層壓於電路基板的單面或兩面。作為電路基板,例如可列舉:玻璃環氧基板、金屬基板、陶瓷基板、矽基板、半導體密封樹脂基板、聚酯基板、聚醯亞胺基板、雙馬來醯亞胺-三嗪(bismaleimide triazine,BT)樹脂基板、及熱硬化型聚苯醚基板等。再者,所謂電路基板是指於如上所述的基板的單面或兩面形成有進行了圖案加工的導體層(電路)的基板。另外,於將導體層與絕緣層交替積層而成的多層印刷配線板中,多層印刷配線板的最外層的單面或兩面成為進行了圖案加工的導體層(電路)的基板亦包含於電路基板中。再者,積層於該多層印刷配線板的絕緣層可為將本實施方式的樹脂片材重疊一片以上並進行硬化而獲得的絕緣層,亦可為將本實施方式的樹脂片材與不同於本實施方式的樹脂片材的公知的樹脂片材分別重疊一片以上而獲得的絕緣層。再者,本實施方式的樹脂片材與不同於本實施方式的樹脂片材的公知的樹脂片材的重疊方法並無特別限定。於導體層表面,亦可藉由黑化處理及/或銅蝕刻等預先實施粗糙化處理。於層壓步驟中,於樹脂片材具有保護膜的情況下,於將保護膜剝離去除後視需要對樹脂片材及電路基板進行預加熱,且將樹脂片材的樹脂層一邊加壓及加熱一邊壓接於電路基板。於本實施方式中,可適宜地使用藉由真空層壓法於減壓下將樹脂片材的樹脂層層壓於電路基板的方法。 (Lamination step) In the lamination step, a vacuum lamination press is used to press the resin layer side of the resin sheet onto one or both sides of the circuit substrate. Examples of the circuit substrate include glass epoxy substrates, metal substrates, ceramic substrates, silicon substrates, semiconductor sealing resin substrates, polyester substrates, polyimide substrates, bismaleimide triazine (BT) resin substrates, and thermosetting polyphenylene ether substrates. Furthermore, the so-called circuit substrate refers to a substrate having a patterned conductive layer (circuit) formed on one or both sides of the substrate as described above. In addition, in a multilayer printed wiring board formed by alternately laminating a conductor layer and an insulating layer, a substrate in which one or both sides of the outermost layer of the multilayer printed wiring board are patterned conductor layers (circuits) is also included in the circuit substrate. Furthermore, the insulating layer laminated on the multilayer printed wiring board may be an insulating layer obtained by laminating and curing one or more resin sheets of the present embodiment, or may be an insulating layer obtained by laminating one or more resin sheets of the present embodiment and a known resin sheet different from the resin sheet of the present embodiment. Furthermore, there is no particular limitation on the method of overlapping the resin sheet of the present embodiment with a known resin sheet different from the resin sheet of the present embodiment. The surface of the conductor layer may also be roughened in advance by blackening and/or copper etching. In the lamination step, if the resin sheet has a protective film, the resin sheet and the circuit substrate are preheated as needed after the protective film is peeled off and removed, and the resin layer of the resin sheet is pressed and connected to the circuit substrate while being pressurized and heated. In the present embodiment, a method of pressing the resin layers of the resin sheet to the circuit substrate under reduced pressure by vacuum lamination can be appropriately used.
關於層壓步驟的條件,例如較佳為將壓接溫度(層壓溫度)設為50℃~140℃、將壓接壓力設為1 kgf/cm 2~15 kgf/cm 2、將壓接時間設為5秒~300秒、將空氣壓設為20 mmHg以下的減壓下進行層壓。另外,層壓步驟可為批次式,亦可為使用輥的連續式。真空層壓法可使用市售的真空層壓器進行。作為市售的真空層壓機,例如可列舉日礦材料(Nikko Materials)(股)製造的兩階段增建層壓機(2 stage build-up laminator)(商品名)等。 Regarding the conditions of the lamination step, for example, it is preferred to set the pressing temperature (lamination temperature) to 50°C to 140°C, set the pressing pressure to 1 kgf/ cm2 to 15 kgf/ cm2 , set the pressing time to 5 seconds to 300 seconds, and perform the lamination under reduced pressure with the air pressure set to 20 mmHg or less. In addition, the lamination step may be a batch type or a continuous type using a roll. The vacuum lamination method can be performed using a commercially available vacuum lamination press. As a commercially available vacuum lamination press, for example, a 2-stage build-up laminator (trade name) manufactured by Nikko Materials (Co., Ltd.) can be listed.
(曝光步驟) 於曝光步驟中,於藉由層壓步驟而於電路基板上設置了樹脂層後,向樹脂層的規定部分照射作為光源的活性能量線,使照射部的樹脂層硬化。 照射可經由遮罩圖案,亦可使用直接照射的直接描繪法。作為活性能量線,例如可列舉:紫外線、可見光線、電子束、及X射線等。作為活性能量線的波長,例如為200 nm~600 nm的範圍。於使用紫外線的情況下,其照射量大致為10 mJ/cm 2~1000 mJ/cm 2。另外,於使用步進機曝光法製造具有高密度且高精細的配線形成(圖案)的印刷配線板時,作為活性能量線,例如較佳為使用包含波長365 nm(i射線)的活性能量線。於使用包含波長365 nm(i射線)的活性能量線的情況下,其照射量大致為10 mJ/cm 2~10,000 mJ/cm 2。於使用直接描繪曝光法製造具有高密度且高精細的配線形成(圖案)的印刷配線板時,作為活性能量線,例如較佳為使用包含波長405 nm(h射線)的活性能量線。於使用包含波長405 nm(h射線)的活性能量線的情況下,其照射量大致為10 mJ/cm 2~10,000 mJ/cm 2。 經由遮罩圖案的曝光方法有使遮罩圖案與多層印刷配線板密接而進行的接觸曝光法、以及不密接而使用平行光線進行曝光的非接觸曝光法,使用哪一方法均可。另外,於樹脂層上存在支撐體的情況下,可自支撐體上曝光,亦可於將支撐體剝離後曝光。 (Exposure step) In the exposure step, after the resin layer is provided on the circuit substrate by the lamination step, the resin layer is irradiated with active energy rays as a light source to harden the resin layer in the irradiated part. The irradiation may be performed via a mask pattern or by a direct drawing method of direct irradiation. Examples of active energy rays include ultraviolet rays, visible rays, electron beams, and X-rays. The wavelength of the active energy rays is, for example, in the range of 200 nm to 600 nm. When ultraviolet rays are used, the irradiation amount is approximately 10 mJ/cm 2 to 1000 mJ/cm 2 . In addition, when a printed wiring board having a high-density and high-precision wiring formation (pattern) is manufactured using a stepper exposure method, it is preferable to use an active energy ray including a wavelength of 365 nm (i-ray), for example. When using an active energy ray including a wavelength of 365 nm (i-ray), the irradiation amount is approximately 10 mJ/cm 2 to 10,000 mJ/cm 2 . When a printed wiring board having a high-density and high-precision wiring formation (pattern) is manufactured using a direct writing exposure method, it is preferable to use an active energy ray including a wavelength of 405 nm (h-ray), for example. When using an active energy ray including a wavelength of 405 nm (h-ray), the irradiation amount is approximately 10 mJ/cm 2 to 10,000 mJ/cm 2 . There are two methods of exposure through a mask pattern: a contact exposure method in which the mask pattern is brought into close contact with the multi-layer printed wiring board, and a non-contact exposure method in which exposure is carried out using parallel light without close contact. Either method may be used. In addition, when a support is present on the resin layer, exposure may be carried out from the support, or exposure may be carried out after the support is peeled off.
(鹼顯影步驟) 於樹脂層上不存在支撐體的情況下,曝光步驟後,直接藉由鹼顯影將未光硬化的部分(未曝光部)去除而進行顯影,藉此可形成絕緣層的圖案。 另外,於樹脂層上存在支撐體的情況下,於曝光步驟後,於將該支撐體去除後藉由鹼顯影將未光硬化的部分(未曝光部)去除而進行顯影,藉此可形成絕緣層的圖案。 包含本實施方式的樹脂組成物的未曝光的樹脂層由於具有優異的鹼顯影性,因此可獲得具有高精細的圖案的印刷配線板。 (Alkali development step) When there is no support on the resin layer, the uncured portion (unexposed portion) is directly removed by alkali development after the exposure step to form a pattern of the insulating layer. In addition, when there is a support on the resin layer, after the exposure step, the uncured portion (unexposed portion) is removed by alkali development after the support is removed to form a pattern of the insulating layer. The unexposed resin layer of the resin composition of the present embodiment has excellent alkali developability, so a printed wiring board with a high-precision pattern can be obtained.
於鹼顯影的情況下,作為顯影液,只要是將未曝光部分選擇性地溶出的顯影液,則並無特別限定,可使用四甲基氫氧化銨水溶液、碳酸鈉水溶液、碳酸鉀水溶液、氫氧化鈉水溶液、及氫氧化鉀水溶液等鹼顯影液。於本實施方式中,尤其較佳為使用四甲基氫氧化銨水溶液。該些鹼顯影液亦能夠單獨使用一種或適當混合使用兩種以上。In the case of alkaline development, the developer is not particularly limited as long as it is a developer that selectively dissolves the unexposed portion, and alkaline developers such as tetramethylammonium hydroxide aqueous solution, sodium carbonate aqueous solution, potassium carbonate aqueous solution, sodium hydroxide aqueous solution, and potassium hydroxide aqueous solution can be used. In this embodiment, it is particularly preferred to use tetramethylammonium hydroxide aqueous solution. These alkaline developers can also be used alone or in combination of two or more.
另外,作為鹼顯影方法,例如可藉由浸漬、覆液、噴霧、搖動浸漬、刷洗、刮擦(scraping)等公知的方法進行。於本實施方式的圖案形成中,視需要亦可併用該些顯影方法。另外,作為顯影方法,使用高壓噴霧時會進一步提高解析度,因此適宜。作為採用噴霧方式時的噴霧壓力,較佳為0.02 MPa~0.5 MPa。In addition, as an alkaline developing method, for example, it can be carried out by a known method such as immersion, coating, spraying, shaking immersion, brushing, scraping, etc. In the pattern formation of this embodiment, these developing methods can also be used in combination as needed. In addition, as a developing method, when a high-pressure spray is used, the resolution will be further improved, so it is suitable. When the spray method is adopted, the spray pressure is preferably 0.02 MPa to 0.5 MPa.
(後烘烤步驟) 於本實施方式中,於鹼顯影步驟結束後進行後烘烤步驟,形成絕緣層(硬化物)。作為後烘烤步驟,可列舉利用高壓水銀燈的紫外線照射步驟、利用潔淨烘箱的加熱步驟等,亦能夠併用該些步驟。於照射紫外線的情況下,可視需要調整其照射量,例如可以50 mJ/cm 2~10,000 mJ/cm 2左右的照射量進行照射。另外,加熱的條件可視需要適當選擇,但較佳為於150℃~220℃且20分鐘~180分鐘的範圍、更佳為於160℃~200℃且30分鐘~150分鐘的範圍內選擇。 (Post-baking step) In the present embodiment, a post-baking step is performed after the alkaline development step is completed to form an insulating layer (hardened material). As the post-baking step, there can be cited a step of ultraviolet irradiation using a high-pressure mercury lamp, a step of heating using a clean oven, etc., and these steps can also be used in combination. In the case of ultraviolet irradiation, the irradiation amount can be adjusted as needed, for example, the irradiation amount can be about 50 mJ/ cm2 to 10,000 mJ/ cm2 . The heating conditions can be appropriately selected as needed, but are preferably in the range of 150° C. to 220° C. and 20 minutes to 180 minutes, and more preferably in the range of 160° C. to 200° C. and 30 minutes to 150 minutes.
(導體層形成步驟) 於形成絕緣層(硬化物)後,藉由乾式鍍敷於絕緣層表面形成導體層。作為乾式鍍敷,可使用蒸鍍法、濺鍍法、及離子鍍敷法等公知的方法。蒸鍍法(真空蒸鍍法)例如是將多層印刷配線板放入真空容器內而將金屬加熱蒸發,藉此可於絕緣層上形成金屬膜。濺鍍法例如是亦將多層印刷配線板放入真空容器內,導入氬等惰性氣體並施加直流電壓,使離子化的惰性氣體與靶金屬碰撞,利用敲擊出的金屬而可於絕緣層上形成金屬膜。 (Conductor layer formation step) After forming the insulating layer (hardened material), a conductor layer is formed on the surface of the insulating layer by dry plating. As dry plating, known methods such as evaporation, sputtering, and ion plating can be used. Evaporation (vacuum evaporation) is, for example, a method of placing a multi-layer printed wiring board in a vacuum container and heating the metal to evaporate, thereby forming a metal film on the insulating layer. Sputtering is, for example, a method of placing a multi-layer printed wiring board in a vacuum container, introducing an inert gas such as argon, and applying a DC voltage to cause the ionized inert gas to collide with the target metal, and using the knocked-out metal to form a metal film on the insulating layer.
繼而,藉由無電解鍍敷或電解鍍敷等形成導體層。作為之後的圖案形成的方法,例如可使用減成(subtractive)法、半加成(semi-additive)法等。Then, a conductive layer is formed by electroless plating or electrolytic plating, etc. As a method for subsequent patterning, for example, a subtractive method, a semi-additive method, etc. can be used.
[半導體裝置] 本實施方式的半導體裝置包含本實施方式的樹脂組成物。具體而言,可藉由以下方法製造。可藉由將半導體晶片安裝於多層印刷配線板的導通部位來製造半導體裝置。此處,所謂導通部位是指多層印刷配線板中的傳遞電性訊號的部位,該場所可為表面,亦可為被埋入的部位。另外,半導體晶片只要是以半導體為材料的電性回路元件,則並無特別限定。 [Semiconductor device] The semiconductor device of the present embodiment includes the resin composition of the present embodiment. Specifically, it can be manufactured by the following method. The semiconductor device can be manufactured by mounting a semiconductor chip on a conductive part of a multilayer printed wiring board. Here, the conductive part refers to a part in the multilayer printed wiring board where an electrical signal is transmitted, and the place may be a surface or an embedded part. In addition, the semiconductor chip is not particularly limited as long as it is an electrical circuit element made of semiconductor.
只要半導體晶片有效地發揮功能,則製造半導體裝置時的半導體晶片的安裝方法並無特別限定。具體而言,可列舉打線接合(wire bonding)安裝方法、覆晶(flip chip)安裝方法、利用無凸塊增建層(bumpless build-up layer,BBUL)的安裝方法、利用異向性導電膜(anisotropic conductive film,ACF)的安裝方法、及利用非導電性膜(non-conductive film,NCF)的安裝方法等。As long as the semiconductor chip functions effectively, there is no particular limitation on the mounting method of the semiconductor chip when manufacturing the semiconductor device. Specifically, there are wire bonding mounting method, flip chip mounting method, mounting method using bumpless build-up layer (BBUL), mounting method using anisotropic conductive film (ACF), and mounting method using non-conductive film (NCF).
另外,亦可藉由於半導體晶片或搭載有半導體晶片的基板形成包含樹脂組成物的絕緣層來製造半導體裝置。搭載有半導體晶片的基板的形狀可為晶圓狀亦可為面板狀。形成所述絕緣層後可使用與多層印刷配線板同樣的方法進行製造。 [實施例] In addition, a semiconductor device can be manufactured by forming an insulating layer containing a resin composition on a semiconductor chip or a substrate carrying a semiconductor chip. The shape of the substrate carrying the semiconductor chip can be a wafer or a panel. After forming the insulating layer, the same method as a multi-layer printed wiring board can be used for manufacturing. [Example]
以下,基於實施例及比較例更具體地說明本發明,但本發明並不限定於以下實施例。Hereinafter, the present invention will be described in more detail based on embodiments and comparative examples, but the present invention is not limited to the following embodiments.
分子量的測定條件如下所述。 機型:GPC 東曹(TOSOH)HLC-8220GPC 管柱:Super HZM-N 溶離液:四氫呋喃(tetrahydrofuran,THF);0.35 ml/min、40℃ 檢測器:示差折射計(refractive index,RI) 分子量標準:聚苯乙烯 The molecular weight determination conditions are as follows. Model: GPC TOSOH HLC-8220GPC Column: Super HZM-N Solvent: tetrahydrofuran (THF); 0.35 ml/min, 40°C Detector: differential refractometer (refractive index, RI) Molecular weight standard: polystyrene
<雙馬來醯亞胺化合物(A)的合成> 作為雙馬來醯亞胺化合物(A),準備以下四種化合物。 [合成例1(A-1)] 於安裝有溫度計、回流冷卻器、迪安-斯塔克(Dean-Stark)裝置、粉體導入口、氮導入裝置及攪拌裝置的1 L的圓底燒瓶中,投入165 g的甲苯與165 g的N-甲基吡咯啶酮。接著,加入間二甲苯二胺(三菱氣體化學股份有限公司製造)26.6 g(0.20 mol)與普瑞阿明(PRIAMINE)1075(日本禾大(Croda Japan)股份有限公司製造)11.7 g(0.02 mol),繼而緩慢加入甲磺酸20.9 g(0.22 mol)而形成鹽。攪拌大致10分鐘而加以混合,繼而向攪拌而成的混合物中緩慢加入4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(48.2 g,0.11 mol)。將混合物加熱回流6小時,形成了胺末端的二醯亞胺。至此時,獲得了來自該縮合的生成水的理論量。反應混合物被冷卻至室溫以下,並向燒瓶中加入馬來酸酐25.5 g(0.26 mol)。將混合物進一步回流8小時,獲得期望量的生成水。冷卻至室溫後,利用水(100 ml×五次)清洗有機層,將鹽及未反應的原料去除,獲得雙馬來醯亞胺化合物的清漆。其後,將清漆滴加至1,000 g的甲醇中,藉此實施再沈澱步驟,將溶劑去除並使其乾燥,藉此獲得目標淡褐色固體的雙馬來醯亞胺化合物72 g(產率72%,Mw=4,000)。 <Synthesis of bismaleimide compound (A)> As bismaleimide compound (A), the following four compounds were prepared. [Synthesis Example 1 (A-1)] In a 1 L round bottom flask equipped with a thermometer, a reflux cooler, a Dean-Stark apparatus, a powder inlet, a nitrogen inlet, and a stirring apparatus, 165 g of toluene and 165 g of N-methylpyrrolidone were placed. Then, 26.6 g (0.20 mol) of m-xylenediamine (manufactured by Mitsubishi Gas Chemical Co., Ltd.) and 11.7 g (0.02 mol) of PRIAMINE 1075 (manufactured by Croda Japan Co., Ltd.) were added, and then 20.9 g (0.22 mol) of methanesulfonic acid was slowly added to form a salt. The mixture was stirred for about 10 minutes to mix, and then 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (48.2 g, 0.11 mol) was slowly added to the stirred mixture. The mixture was heated and refluxed for 6 hours to form an amine-terminated diimide. At this point, the theoretical amount of water generated from the condensation was obtained. The reaction mixture was cooled to below room temperature, and 25.5 g (0.26 mol) of maleic anhydride was added to the flask. The mixture was further refluxed for 8 hours to obtain the desired amount of water generated. After cooling to room temperature, the organic layer was washed with water (100 ml × five times) to remove the salt and unreacted raw materials, and a varnish of a bismaleimide compound was obtained. Thereafter, the varnish was added dropwise to 1,000 g of methanol to perform a reprecipitation step, remove the solvent and dry it, thereby obtaining 72 g (yield 72%, Mw=4,000) of the target light brown solid bismaleimide compound.
[合成例2(A-2)] 於安裝有溫度計、回流冷卻器、迪安-斯塔克(Dean-Stark)裝置、粉體導入口、氮導入裝置及攪拌裝置的1 L的圓底燒瓶中,投入162 g的甲苯與162 g的N-甲基吡咯啶酮。接著,加入間二甲苯二胺(三菱氣體化學股份有限公司製造)32.4 g(0.24 mol),繼而緩慢加入甲磺酸22.9 g(0.24 mol)而形成鹽。攪拌大致10分鐘而加以混合,繼而向攪拌而成的混合物中緩慢加入4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(52.8 g,0.12 mol)。將混合物加熱回流6小時,形成了胺末端的二醯亞胺。至此時,獲得了來自該縮合的生成水的理論量。反應混合物被冷卻至室溫以下,並向燒瓶中加入馬來酸酐28.0 g(0.29 mol)。將混合物進一步回流8小時,獲得期望量的生成水。冷卻至室溫後,利用水(100 ml×五次)清洗有機層,將鹽及未反應的原料去除,獲得雙馬來醯亞胺化合物的清漆。其後,將清漆滴加至1,000 g的甲醇中,藉此實施再沈澱步驟,將溶劑去除並使其乾燥,藉此獲得目標淡褐色固體的雙馬來醯亞胺化合物78 g(產率78%,Mw=3,600)。 [Synthesis Example 2 (A-2)] In a 1 L round-bottom flask equipped with a thermometer, reflux cooler, Dean-Stark apparatus, powder inlet, nitrogen inlet, and stirring apparatus, 162 g of toluene and 162 g of N-methylpyrrolidone were placed. Then, 32.4 g (0.24 mol) of m-xylenediamine (manufactured by Mitsubishi Gas Chemical Co., Ltd.) was added, and then 22.9 g (0.24 mol) of methanesulfonic acid was slowly added to form a salt. The mixture was stirred for about 10 minutes to mix, and then 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (52.8 g, 0.12 mol) was slowly added to the stirred mixture. The mixture was heated to reflux for 6 hours to form an amine-terminated diimide. At this point, the theoretical amount of water generated from the condensation was obtained. The reaction mixture was cooled to below room temperature, and 28.0 g (0.29 mol) of maleic anhydride was added to the flask. The mixture was further refluxed for 8 hours to obtain the desired amount of water. After cooling to room temperature, the organic layer was washed with water (100 ml × five times) to remove the salt and unreacted raw materials to obtain a varnish of the bismaleimide compound. Thereafter, the varnish was added dropwise to 1,000 g of methanol, and a reprecipitation step was performed to remove the solvent and dry it, thereby obtaining 78 g of the target light brown solid bismaleimide compound (yield 78%, Mw=3,600).
[合成例3(A-3)] 於安裝有溫度計、回流冷卻器、迪安-斯塔克(Dean-Stark)裝置、粉體導入口、氮導入裝置及攪拌裝置的1 L的圓底燒瓶中,投入170 g的甲苯與170 g的N-甲基吡咯啶酮。接著,加入間二甲苯二胺(三菱氣體化學股份有限公司製造)20.2 g(0.15 mol)與普瑞阿明(PRIAMINE)1075(日本禾大(Croda Japan)股份有限公司製造)20.0 g(0.04 mol),繼而緩慢加入甲磺酸17.8 g(0.19 mol)而形成鹽。攪拌大致10分鐘而加以混合,繼而向攪拌而成的混合物中緩慢加入4,4'-雙酚A酸二酐(48.3 g,0.09 mol)。將混合物加熱回流6小時,形成了胺末端的二醯亞胺。至此時,獲得了來自該縮合的生成水的理論量。反應混合物被冷卻至室溫以下,並向燒瓶中加入馬來酸酐21.8 g(0.22 mol)。將混合物進一步回流8小時,獲得期望量的生成水。冷卻至室溫後,利用水(100 ml×五次)清洗有機層,將鹽及未反應的原料去除,獲得雙馬來醯亞胺化合物的清漆。其後,將清漆滴加至1,000 g的甲醇中,藉此實施再沈澱步驟,將溶劑去除並使其乾燥,藉此獲得目標白色固體的雙馬來醯亞胺化合物68 g(產率68%,Mw=4,200)。 [Synthesis Example 3 (A-3)] In a 1 L round-bottom flask equipped with a thermometer, reflux cooler, Dean-Stark apparatus, powder inlet, nitrogen inlet, and stirring device, 170 g of toluene and 170 g of N-methylpyrrolidone were placed. Then, 20.2 g (0.15 mol) of m-xylenediamine (manufactured by Mitsubishi Gas Chemical Co., Ltd.) and 20.0 g (0.04 mol) of PRIAMINE 1075 (manufactured by Croda Japan Co., Ltd.) were added, and then 17.8 g (0.19 mol) of methanesulfonic acid was slowly added to form a salt. The mixture was stirred for about 10 minutes to mix, and then 4,4'-bisphenol A dianhydride (48.3 g, 0.09 mol) was slowly added to the stirred mixture. The mixture was heated and refluxed for 6 hours to form an amine-terminated diimide. At this point, the theoretical amount of water generated from the condensation was obtained. The reaction mixture was cooled to below room temperature, and 21.8 g (0.22 mol) of maleic anhydride was added to the flask. The mixture was further refluxed for 8 hours to obtain the desired amount of water generated. After cooling to room temperature, the organic layer was washed with water (100 ml × five times) to remove the salt and unreacted raw materials, and a varnish of a bismaleimide compound was obtained. Thereafter, the varnish was added dropwise to 1,000 g of methanol to perform a reprecipitation step, remove the solvent and dry it, thereby obtaining 68 g (yield 68%, Mw=4,200) of the target white solid bismaleimide compound.
<包含一個以上的羧基的化合物(B)的合成> 作為包含一個以上的羧基的化合物(B),準備以下四種化合物。 [合成例5(B-1)] 4-(N-馬來醯亞胺甲基)環己烷-1-羧酸(ACHA-MI) 東京化成工業股份有限公司製造 [合成例6(B-2)] 6-馬來醯亞胺己酸(MCA) 東京化成工業股份有限公司製造 [化合物(B-3)] 順-4-環己烯-1,2-二羧酸(TH-W) 新日本理化(股)製造,製品名「理家德(Rikacid)TH-W」 [化合物(B-4)] 4-胺基苯甲酸 東京化成工業股份有限公司製造 <Synthesis of a compound (B) containing one or more carboxyl groups> As a compound (B) containing one or more carboxyl groups, the following four compounds were prepared. [Synthesis Example 5 (B-1)] 4-(N-maleimidomethyl)cyclohexane-1-carboxylic acid (ACHA-MI) Manufactured by Tokyo Chemical Industry Co., Ltd. [Synthesis Example 6 (B-2)] 6-maleimidocaproic acid (MCA) Manufactured by Tokyo Chemical Industry Co., Ltd. [Compound (B-3)] cis-4-cyclohexene-1,2-dicarboxylic acid (TH-W) Manufactured by Shin Nippon Chemical Co., Ltd., product name "Rikacid TH-W" [Compound (B-4)] 4-aminobenzoic acid Manufactured by Tokyo Chemical Industry Co., Ltd.
<光聚合起始劑(C)> 作為光聚合起始劑(C),準備以下兩種化合物。 乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟)(日本巴斯夫(BASF Japan)製造,「豔佳固(IRGACURE)OXE-02」) 雙(2,4,6-三甲基苯甲醯基)苯基氧化膦(日本巴斯夫(BASF Japan)製造,「歐米拉得(Omnirad)819」) <Photopolymerization initiator (C)> As the photopolymerization initiator (C), the following two compounds were prepared. Ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazole-3-yl]-, 1-(O-acetyl oxime) (manufactured by BASF Japan, "IRGACURE OXE-02") Bis(2,4,6-trimethylbenzyl)phenylphosphine oxide (manufactured by BASF Japan, "Omnirad 819")
(實施例1~實施例6) 調配表1所示的調配量(質量份)的(A)成分~(C)成分、作為有機溶劑(G)的環戊酮103質量份,製備實施例1~實施例6的感光性樹脂組成物。 (Example 1 to Example 6) The components (A) to (C) in the amounts (parts by mass) shown in Table 1 and 103 parts by mass of cyclopentanone as an organic solvent (G) were mixed to prepare the photosensitive resin compositions of Examples 1 to 6.
<特性評價> 針對所製作的硬化性樹脂組成物及硬化膜,測定了下述諸特性。將結果示於表1。 <Evaluation of properties> The following properties were measured for the prepared curable resin composition and cured film. The results are shown in Table 1.
[相容性] 所謂目視的相容性,是指對於調配成分(A)~成分(G)並進行攪拌後的硬化性樹脂組成物以目視觀察而得的狀態。相容性良好的情況是指無析出物等而能夠於基材進行塗佈等,相容性差的情況是指有析出物等而難以於基材進行塗佈等。 (評價基準) ○:無析出物 ×:有析出物 [Compatibility] Visual compatibility refers to the state of the curable resin composition after mixing and stirring components (A) to (G). Good compatibility means that there is no precipitate and it can be applied to the base material, while poor compatibility means that there is precipitate and it is difficult to apply to the base material. (Evaluation criteria) ○: No precipitate ×: Precipitate
[光硬化性、鹼顯影性評價] 將實施例1~實施例6及比較例1~比較例3中獲得的感光性樹脂組成物旋轉塗佈於矽基板上,並於95℃下加熱2分鐘,形成膜厚10 μm~15 μm的塗膜。繼而,使用能夠照射包含波長405 nm的活性能量線的光源(牛尾(USHIO)(股)UX-1000SM-HJ01(商品名)),自支撐體上以照射量2000 mJ/cm 2進行照射,將塗膜的一半曝光,且使剩餘部分未曝光。曝光後,於150℃下加熱15分鐘,於2.38%四甲基氫氧化銨(tetramethyl ammonium hydroxide,TMAH)水溶液(顯影液,德山(Tokuyama)公司(股)製造)中振盪60秒~180秒。繼而,關於未曝光部未溶解的部分,使用丙二醇單甲醚二醇進行顯影,進行光硬化性的確認。 針對顯影後獲得的積層體,依照以下的基準,藉由目視對光硬化性、鹼顯影性進行評價。 (鹼顯影性判別基準) ○:曝光部不溶,但未曝光部於60秒~3分鐘的振盪中溶解。 ×:曝光部及未曝光部均不溶。 另外,針對硬化性,亦藉由顯影後是否殘留有圖案來判別。 (光硬化性判別基準) ○:顯影後,殘留有圖案 ×:顯影後,無任何殘留 將鹼顯影性及光硬化性的結果示於表1。 [Evaluation of photocurability and alkaline development properties] The photosensitive resin compositions obtained in Examples 1 to 6 and Comparative Examples 1 to 3 were spin-coated on a silicon substrate and heated at 95°C for 2 minutes to form a coating having a thickness of 10 μm to 15 μm. Subsequently, a light source capable of irradiating active energy rays having a wavelength of 405 nm (USHIO UX-1000SM-HJ01 (trade name)) was used to irradiate from the support at an irradiation dose of 2000 mJ/ cm2 , exposing half of the coating and leaving the remaining portion unexposed. After exposure, heat at 150°C for 15 minutes and oscillate in a 2.38% tetramethyl ammonium hydroxide (TMAH) aqueous solution (developer, manufactured by Tokuyama Co., Ltd.) for 60 to 180 seconds. Then, for the undissolved portion of the unexposed part, develop it with propylene glycol monomethyl ether glycol to confirm the photocurability. For the laminate obtained after development, the photocurability and alkali developability are evaluated by visual inspection according to the following criteria. (Alkali developability judgment criteria) ○: The exposed part is insoluble, but the unexposed part is dissolved during 60 seconds to 3 minutes of oscillation. ×: Both the exposed and unexposed parts are insoluble. In addition, the curability is also judged by whether there is a pattern remaining after development. (Criteria for determination of photocurability) ○: After development, a pattern remains ×: After development, no pattern remains The results of alkali developability and photocurability are shown in Table 1.
[表1]
如根據表1而明確般示出,根據本實施方式,於利用包含波長405 nm(h射線)的活性能量線及包含波長200 nm~600 nm的活性能量線的任一光線進行曝光的情況下,均能夠良好地感光而進行光硬化。另外,根據本實施方式,如表1所示,可獲得具有優異的鹼顯影性的硬化物。 [產業上之可利用性] As clearly shown in Table 1, according to this embodiment, when exposed to any of active energy rays including a wavelength of 405 nm (h-rays) and active energy rays including a wavelength of 200 nm to 600 nm, good photosensitivity and photocuring can be performed. In addition, according to this embodiment, as shown in Table 1, a cured product with excellent alkali developability can be obtained. [Industrial Applicability]
本實施方式的樹脂組成物由於光硬化性及鹼顯影性優異,因此可有效用於工業中,例如,可用於感光性膜、帶支撐體的感光性膜、預浸體、樹脂片材、電路基板(積層板用途、多層印刷配線板用途等)、阻焊劑、底部填充材、黏晶材、半導體密封材、孔填埋樹脂、零件埋入樹脂、纖維加強複合材料等用途。The resin composition of the present embodiment has excellent photocurability and alkali developability and can be effectively used in industry, for example, it can be used for photosensitive films, photosensitive films with supports, prepregs, resin sheets, circuit boards (for laminated boards, multilayer printed wiring boards, etc.), solder resists, underfill materials, die attach materials, semiconductor sealing materials, hole filling resins, parts embedding resins, fiber-reinforced composite materials, etc.
無without
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