TW202231409A - Inspection device, resin molding device, cutting device, method for manufacturing resin molded article, and method for manufacturing cut article - Google Patents

Abstract

This inspection device comprises a camera and coaxial illumination. The coaxial illumination comprises a half mirror, a light source unit, a plate-shaped member, and an adjustment unit. The half mirror is disposed so as to be inclined in relation to an observation axis joining an object under inspection and the camera upon the observation axis. The light source unit emits light toward the half mirror from a different direction than the observation axis. The light emitted by the light source unit is reflected by the half mirror and emitted onto the object under inspection. The plate-shaped member is disposed between the light source unit and half mirror. A plurality of roughly parallel slits are formed in the plate-shaped member. The adjustment unit is for adjusting the placement of the plate-shaped member.

Description

Inspection device, resin molding device, cutting device, manufacturing method of resin molded product, and manufacturing method of cut product

The present invention relates to an inspection device, a resin molding device, a cutting device, a method for manufacturing a resin molded product, and a method for manufacturing a cut product.

Japanese Patent Laid-Open No. 2017-187296 (Patent Document 1) discloses a coaxial lighting device. This coaxial lighting device includes a half mirror and a light source portion that irradiates light to the half mirror. The half mirror is arranged on an observation axis that connects the observation object, that is, the workpiece, and an observation unit such as a camera, and is inclined with respect to the observation axis. The light emitted from the light source unit is reflected by the half mirror and irradiated to the workpiece (refer to Patent Document 1).

[Prior Art Literature] (patent literature) Patent Document 1: Japanese Patent Laid-Open No. 2017-187296

[Problems to be Solved by Invention] In the coaxial illuminating device disclosed in the above-mentioned Patent Document 1, in order to make the light irradiated on the observation object as uniform as possible, the angle of the light incident on the half mirror is desirably a predetermined angle. In order to adjust the incident angle of light to the half mirror, a method of arranging a plate-like member in which a plurality of slits are formed between the light source unit and the half mirror, and the slits are parallel to each other, is considered. However, even if this method is adopted, depending on the precision of the slit formed in the plate-like member, there is a possibility that the incident angle of most of the light on the half mirror cannot be a predetermined angle. As a result, the deviation of the light irradiated to the observation object (inspection object) becomes large.

The present invention has been made in order to solve such a problem, and an object of the present invention is to provide an inspection apparatus, a resin molding apparatus, a cutting apparatus, a method for manufacturing a resin molded article, and a method for manufacturing a cut article, which can suppress the occurrence of light irradiated to an inspection object. offset.

[Technical means to solve the problem] An inspection apparatus according to an aspect of the present invention includes a camera and a coaxial illumination. The camera is configured to capture an image of the inspection object. The coaxial illumination is configured to irradiate the inspection object with light. The coaxial illumination includes a half mirror, a light source part, a plate-shaped member, and an adjustment part. The half mirror is arranged on the observation axis connecting the inspection object and the camera, and is inclined with respect to the observation axis. The light source unit is configured to emit light toward the half mirror from a direction different from the observation axis. The light emitted by the light source unit is reflected by the half mirror and irradiated to the inspection object. The plate-shaped member is arranged between the light source unit and the half mirror. A plurality of slits are formed in the plate-like member, and the slits are substantially parallel to each other. The adjustment portion is configured to adjust the arrangement of the plate-like members.

A resin molding apparatus according to another aspect of the present invention includes: a resin molding mechanism configured to manufacture a resin molded product; and the above-mentioned inspection apparatus.

A cutting device according to another aspect of the present invention includes: a cutting mechanism configured to produce a cut product by cutting an object to be cut; and an inspection device.

A method for producing a resin molded product according to another aspect of the present invention includes the steps of: producing a resin molded product; and inspecting an inspection object using the above-described inspection apparatus. Objects to be inspected include resin molded products.

A method for manufacturing a cut product according to another aspect of the present invention includes the steps of: manufacturing a cut product by cutting an object to be cut; and inspecting the object to be inspected using the above-mentioned inspection apparatus. The object to be inspected includes the object to be cut or the aforementioned cut product.

[Effect of invention] According to the present invention, it is possible to provide an inspection apparatus, a resin molding apparatus, a cutting apparatus, a method for manufacturing a resin molded product, and a method for manufacturing a cut product, which can suppress deviation of light irradiated to an inspection object.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code|symbol is attached|subjected to the same or corresponding part in a figure, and the description is not repeated.

[1. Outline] FIG. 1 is a diagram schematically showing an inspection apparatus 10 according to the present embodiment. The cross section of the coaxial illumination 100 included in the inspection apparatus 10 is shown in FIG. 1 . The directions indicated by the arrows UDFBLR are common to the respective figures.

As shown in FIG. 1 , the inspection apparatus 10 includes a coaxial illumination 100 and a camera 200 . The coaxial illumination 100 is arranged between the camera 200 and the inspection object 300 . The coaxial illumination 100 is configured to irradiate the inspection object 300 with light from above the inspection object 300 . The camera 200 is configured to image the inspection object 300 in a state of being irradiated with light from above the inspection object 300 . In the inspection apparatus 10 , the state of the surface of the inspection object 300 is inspected based on the image captured by the camera 200 .

The inspection object 300 is, for example, a substrate before resin molding to which electronic components are connected, or a package substrate after resin molding of the substrate to which electronic components are connected. Examples of package substrates include BGA (Ball Grid Array, Ball Grid Array) package substrates, LGA (Land Grid Array, Contact Grid Array) package substrates, CSP (Chip Size Package, chip size package) package substrates, LEDs (Light Emitting Diode, light-emitting diode) package substrate, QFN (Quad Flat No-leaded, square flat no lead) package substrate.

The coaxial illumination 100 includes a light source unit 125 , a plate-shaped member 140 , a half mirror 150 , and a housing 110 . The light source unit 125 includes the substrate 121 , the LEDs 120 , and the diffusion plate 130 . The shape of the substrate 121 is substantially rectangular, and a plurality of LEDs 120 are mounted on the substrate 121 . The substrate 121 is arranged substantially parallel to the observation axis C1 of the camera 200 . The plurality of LEDs 120 are each configured to emit light toward the half mirror 150 .

The diffuser plate 130 is a ground glass-like thin plate, and is disposed between the LEDs 120 and the plate-like member 140 . The shape of the diffuser plate 130 is substantially rectangular. The diffuser plate 130 is arranged substantially parallel to the observation axis C1 of the camera 200 . The light emitted by the LEDs 120 is diffused by the diffusion plate 130 . That is, the light source part 125 diffuses the light emitted from the LEDs 120 in the diffusion plate 130, thereby performing surface light emission.

The plate-shaped member 140 is disposed between the light source unit 125 and the half mirror 150 . The shape of the plate-like member 140 is substantially rectangular. The plate-shaped member 140 is arranged substantially parallel to the observation axis C1 of the camera 200 . A plurality of slits (louver, light-shielding grilles) 142 are formed in the plate-shaped member 140, and the slits 142 are substantially parallel to each other. The plate-shaped member 140 is configured to suppress the diffusion of the light emitted from the light source unit 125 and to improve the parallelism of the light. As the plate-shaped member 140, for example, a light control film (Light Control Film) can be applied.

The half mirror 150 is arranged on the observation axis C1 of the camera 200 . The reflection surface of the half mirror 150 is inclined with respect to the observation axis C1 inside the housing 110 . The reflection surface of the half mirror 150 is inclined at approximately 45 degrees with respect to the observation axis C1, for example. The half mirror 150 is formed of, for example, a glass plate whose surface is coated with a dielectric multilayer film, a metal thin film, or the like. The half mirror 150 is configured to have a reflectance of approximately 50% and a transmittance of approximately 50% for light having an incident angle of 45 degrees, for example.

The housing 110 accommodates the light source unit 125 , the plate-shaped member 140 , the half mirror 150 , and the like inside. The frame body 110 is made of, for example, an aluminum alloy or the like. The shape of the frame body 110 is, for example, a rectangular parallelepiped shape. Among the inner wall surfaces of the housing 110 , for example, a region between the half mirror 150 and the plate-like member 140 is configured as a mirror surface. In the housing 110, in order to observe the inspection object 300 with the camera 200, for example, a window (not shown) made of glass is formed on one surface on the camera 200 side. Moreover, in the housing|casing 110, the light emitting port (not shown) for emitting light is formed in the surface of the inspection object 300 side.

The light that has passed through the plate-shaped member 140 is often directed in a direction substantially perpendicular to the plate-shaped member 140 , whereby the light reflected by the half mirror 150 is irradiated substantially uniformly over the entire inspection object 300 . That is, when the light that has passed through the plate-shaped member 140 is often substantially perpendicular to the plate-shaped member 140 , a situation in which the intensity of the light irradiated to each region of the inspection object 300 varies greatly is less likely to occur.

[2. Possible problems caused by plate-like members] In the direction of arrow FB, when each slit 142 extends in a direction substantially perpendicular to one surface of the plate-shaped member 140 , and the surface is the surface of the plate-shaped member 140 facing the diffuser plate 130 , The light that has passed through the plate-shaped member 140 is often directed in a direction substantially perpendicular to the plate-shaped member 140 . However, it is difficult to control the extending direction of each slit 142 in the plate-shaped member 140 during the production of the plate-shaped member 140 .

FIG. 2 is a diagram for explaining a problem caused by each slit 142 in the plate-like member 140 being inclined more than expected. In FIG. 2 , the inclination of the slit 142 is exaggerated for easy understanding. As shown in FIG. 2 , in this plate-shaped member 140 , each slit 142 does not extend in a substantially vertical direction with respect to one surface of the plate-shaped member 140 , and the surface is the same as the diffuser among the surfaces of the plate-shaped member 140 . The opposite side of the plate 130 . Therefore, the light that has passed through the plate-shaped member 140 does not become substantially perpendicular to the plate-shaped member 140 in many cases. As a result, the light reflected by the half mirror 150 is not irradiated substantially uniformly on the entire inspection object 300 . In this example, among the upper surfaces of the inspection object 300 , stronger light is irradiated to the area closer to the arrow F direction than to the area closer to the arrow B direction. As a result, the light irradiated to the inspection object 300 is shifted, and the inspection apparatus 10 causes a decrease in the inspection accuracy of the surface state of the inspection object 300 .

In order to suppress such a problem, the structure in the inspection apparatus 10 is designed ingeniously. Hereinafter, the configuration of the inspection apparatus 10 will be described in detail.

[3. Configuration of inspection device] FIG. 3 is a diagram schematically showing the upper surface of the coaxial illumination 100 . FIG. 4 is a diagram schematically showing the front surface of the coaxial illumination 100 . FIG. 5 is a schematic cross-sectional view taken along the line V-V in FIG. 3 . In addition, for ease of explanation, in each drawing, a part of the coaxial illumination 100 is shown in a state in which the inside is penetrated.

Referring to FIGS. 3 , 4 and 5 , in the coaxial illumination 100 , an adjustment portion 160 is provided at each end portion in the direction of the arrow LR. The adjustment portion 160 is configured to adjust the arrangement of the plate-like members 140 . Specifically, the adjustment unit 160 can adjust the position of the plate-shaped member 140 in the direction of the arrow FB, and can adjust the position of the plate-shaped member 140 with a shaft extending in the direction of the arrow LR (a shaft member 166 to be described later) as the center of rotation. Rotation angle. That is, the adjustment part 160 includes a "position adjustment part" for adjusting the position of the plate-shaped member 140 and an "angle adjustment mechanism" for adjusting the rotation angle of the plate-shaped member 140 .

The adjustment part 160 includes a holder 163 , a support member 170 ( FIG. 5 ), a moving member 161 , an operation member 162 , a shaft member 166 , a stopper 169 ( FIG. 5 ), and a light shielding cover 167 . Each member included in the adjustment part 160 is made of metal or resin. In addition, the color of each member included in the adjustment unit 160 is preferably black. This is to reduce the possibility that the light entering the adjustment unit 160 is diffused and adversely affects the light irradiated on the inspection object 300 .

The above-described position adjusting portion includes a moving member 161 configured to linearly move the plate-like member 140 between the light source portion 125 and the half mirror 150 . The above-mentioned angle adjustment mechanism mainly includes a holder 163 configured to hold the plate-like member 140, a shaft member 166, and a stopper 169, the shaft member 166 being a rotation shaft of the holder 163, and the stopper 169. The stopper 169 is configured to stop the rotation of the shaft member 166 . Further, the angle adjustment mechanism includes a support member 170 that supports the shaft member 166 and is attached to the moving member 161 together. The support member 170 includes a support member body portion 165 and a connecting portion 164, the support member body portion 165 is mounted on the moving member 161, and the connecting portion 164 connects the vicinity of the moving member 161 in the support member body portion 165 with the holder 163. The support member main body portion 165 and the connection portion 164 are respectively formed with through holes through which the shaft member 166 is inserted.

The clamper 163 is configured to hold the plate-shaped member 140 by sandwiching the plate-shaped member 140 . The holder 163 is connected to the support member 170 . The support member 170 includes a substantially S-shaped connecting portion 164 , a block-shaped support member main body portion 165 , and a shaft member holding portion 168 . The connection portion 164, the support member main body portion 165, and the shaft member holding portion 168 may be integrally formed, or may be formed separately. When the connection portion 164 , the support member main body portion 165 , and the shaft member holding portion 168 are formed as different individuals, the connection portion 164 and the support member main body portion 165 are fixed, and the support member main body portion 165 and the shaft are fixed. The member holding parts 168 are fixed.

A hole is formed at a position close to the upper end of the support member main body portion 165, and thread cutting, for example, is performed on the hole. The moving member 161 penetrates through the hole. The moving member 161 is constituted by, for example, a ball screw extending in the direction of the arrow FB. The position where the hole is formed in the support member main body portion 165 is shifted upward from the position of the shaft member 166 in the arrow UD direction (height direction). In other words, the moving member 161 is offset in the height direction from the aforementioned shaft member. Therefore, even if the color of the moving member 161 is a color other than black, the light entering the adjusting portion 160 from the vicinity of the connecting portion between the shaft member 166 and the holder 163 is unlikely to be diffused in the moving member 161 . The connecting portion 164 connects the vicinity of the moving member 161 in the supporting member main body portion 165 and the end surface of the gripper 163 .

An operation member 162 is attached to the moving member 161 . The moving member 161 is rotated by rotating the operation member 162 . With the rotation of the moving member 161, the supporting member 170 is moved in the direction of the arrow FB. As a result, the plate-shaped member 140 is moved in the direction of the arrow FB. That is, along with the rotation of the moving member 161 , the plate-shaped member 140 is linearly moved between the diffusion plate 130 and the half mirror 150 . In this way, in the inspection apparatus 10 , the position adjustment section of the adjustment section 160 can adjust the position of the plate-like member 140 between the diffuser plate 130 and the half mirror 150 by the rotational operation of the operation member 162 .

A hole portion H1 is formed in the end surface of the holder 163 to accommodate a part of the shaft member 166 . Thread cutting is performed on the hole portion H1. A screw portion S1 is formed at one end portion of the shaft member 166 . The screw portion S1 is accommodated in the hole portion H1. Thereby, the shaft member 166 and the holder 163 are fixed.

In the support member 170 , holes are formed in the connecting portion 164 , the support member main body portion 165 , and the shaft member holding portion 168 , respectively, through which the shaft member 166 is inserted. The shaft member 166 is supported by the support member 170 by passing the shaft member 166 through these holes. The holes formed in the connecting portion 164, the supporting member main body portion 165, and the shaft member holding portion 168, respectively, are not subjected to thread cutting, so that the shaft member 166 can be held with respect to the connecting portion 164, the supporting member main body portion 165, and the shaft member, respectively. Section 168 rotates.

By rotating the shaft member 166 , the holder 163 is rotated around the shaft member 166 . Along with the rotation of the holder 163, the plate-like member 140 held by the holder 163 is also rotated. In this way, in the inspection apparatus 10 , the angle adjustment mechanism of the adjustment unit 160 can adjust the angle of the plate-shaped member 140 with respect to the half mirror 150 by the rotational operation of the shaft member 166 .

A hole is formed in the shaft member holding portion 168 to accommodate the stopper 169 . This hole extends in a direction substantially perpendicular to the hole through which the shaft member 166 penetrates. For example, thread cutting is performed on this hole, and the stopper 169 is constituted by a screw. At this time, the stopper 169 is screwed into the hole of the shaft member holding portion 168 , whereby friction is generated between the stopper 169 and the shaft member 166 . The rotation of the shaft member 166 is restricted by this friction. That is, the stopper 169 stops the rotation of the shaft member 166 . The rotation angle of the shaft member 166 can be fixed by the stopper 169 , and the angle of the plate-shaped member 140 with respect to the half mirror 150 can be fixed.

The light shielding cover 167 is configured to cover the shaft member holding portion 168 and the stopper 169 . In this way, it is possible to suppress the entry of light into the adjustment portion 160 from the vicinity of the connection portion between the shaft member 166 and the shaft member holding portion 168 .

In this way, in the inspection apparatus 10, the position of the plate-like member 140 between the diffuser plate 130 and the half mirror 150 can be adjusted.

FIG. 6 is a diagram schematically showing the inspection apparatus 10 in a state in which the distance between the diffuser plate 130 and the plate-like member 140 is shortened. As shown in FIG. 6 , in this inspection apparatus 10 , the distance between the diffuser plate 130 and the plate-like member 140 is shortened, for example, as compared with the example shown in FIG. 2 .

Even if each slit 142 does not extend in a substantially vertical direction with respect to one surface of the plate-shaped member 140 , and the surface is the surface of the plate-shaped member 140 facing the diffuser plate 130 , if the diffuser plate 130 When the distance from the plate-shaped member 140 is shortened, the light substantially perpendicular to the plate-shaped member 140 can easily pass through the slit 142 compared to the case where the distance between the diffusion plate 130 and the plate-shaped member 140 is long. As a result, a situation in which the intensity of light irradiated to each region of the inspection object 300 varies greatly is less likely to occur.

FIG. 7 is a diagram schematically showing the inspection apparatus 10 in a state where the plate-shaped member 140 is inclined at an angle with respect to the half mirror 150 . In addition, in FIG. 7, the inclination of the slit 142 is exaggeratedly shown for easy understanding.

As shown in FIG. 7 , in this inspection apparatus 10 , the plate-like member 140 is inclined so that the extending direction of each slit 142 with respect to one surface of the plate-like member 140 is approximately perpendicular to the plate-like member 140 . The side facing the diffuser plate 130 among the various sides of the . Since the extending direction of each slit 142 with respect to one surface of the plate-shaped member 140 is nearly perpendicular, and this surface is the surface of the plate-shaped member 140 that faces the diffuser plate 130 , the plate-shaped member 140 passes through the surface. The light from 140 is often substantially perpendicular to the plate-shaped member 140 . As a result, the light reflected by the half mirror 150 is irradiated substantially uniformly over the entire inspection object 300 .

[4. Features] As described above, in the inspection apparatus 10 according to the present embodiment, the arrangement of the plate-like members 140 can be adjusted. Therefore, according to the inspection apparatus 10, the traveling direction of the light passing through the plate-shaped member 140 can be adjusted by adjusting the arrangement of the plate-shaped member 140, so that the light reflected by the half mirror 150 and irradiated to the inspection object 300 can be suppressed. offset.

[5. Other Embodiments] The idea of the above-described embodiment is not limited to the above-described embodiment. Hereinafter, an example of another embodiment to which the idea of the above-described embodiment can be applied will be described.

In the above-described embodiment, an example in which the present invention is applied to an inspection apparatus has been described, but the present invention can be applied to, for example, a resin molding apparatus or a cutting apparatus, in addition to an inspection apparatus.

FIG. 8 is a block diagram schematically showing the configuration of the resin molding apparatus 400 . As shown in FIG. 8 , the resin molding apparatus 400 includes a resin molding mechanism 410 and the inspection apparatus 10 . The resin molding mechanism 410 mainly includes a mold clamping mechanism (not shown) for clamping a molding die (not shown) and a molding die. The resin molding mechanism 410 is configured to close a molding die and perform resin molding of an object to be molded to manufacture a resin molded product. The inspection apparatus 10 inspects, for example, a substrate before resin molding, or a package substrate after resin molding, that is, a resin molded product. At this time, the substrate before resin molding or the package substrate after resin molding becomes the inspection object 300 . Examples of the inspection include positional displacement inspection and count inspection of electronic components connected to the substrate before resin molding, and visual inspection of package substrates.

FIG. 9 is a block diagram schematically showing the configuration of the cutting device 500 . As shown in FIG. 9 , the cutting device 500 includes a cutting mechanism 510 and the inspection device 10 . The cutting mechanism 510 mainly includes a rotating shaft portion (not shown) having a blade, and is configured to cut the object to be cut by the blade rotating at a high speed to produce a cut product. The inspection apparatus 10 inspects, for example, an object to be cut or a cut product. At this time, the object to be cut or the cut product becomes the object to be inspected 300 . Examples of the inspection include the appearance inspection of the resin-molded side of the package substrate, which is the object to be cut, and the inspection of the resin-molded side of the package substrate, which is the object to be cut.

In addition, in the above-described embodiment, the inspection apparatus 10 is configured such that the position of the plate-like member 140 in the arrow direction FB can be adjusted and the rotation angle of the plate-like member 140 with the shaft member 166 as the center of rotation can be adjusted. However, it is not necessary that two-sided adjustment be possible. That is, only the adjustment of the position of the plate-shaped member 140 in the arrow direction FB and the adjustment of the rotation angle of the plate-shaped member 140 with the shaft member 166 as the center of rotation may be performed.

In the above, the embodiment of the present invention has been described as an example. That is, the detailed description and the drawings are disclosed for the purpose of illustrating the description. Therefore, among the components described in the detailed description and the drawings, components that are not necessary to solve the problem may be included. Therefore, even if these unnecessary components are described in the detailed description and drawings, these unnecessary components should not be considered as essential immediately.

In addition, the above-mentioned embodiment can be variously improved and changed within the scope of the present invention. That is, for the implementation of the present invention, an appropriate specific configuration can be adopted in accordance with the embodiment.

10: Check the device 100: Coaxial lighting 110: Frame 120: LED 121: Substrate 125: Light source part 130: Diffuser plate 140: Plate member 142: Slit 150: Half mirror 160: Adjustment Department 161: Moving widgets 162: Operating Components 163: Gripper 164: Links 165: Support component body part 166: Shaft member 167: Blackout cover 168: Shaft member holding part 169: Stopper 170: Support Components 200: Camera 300: Check the object 400: Resin molding device 410: Resin molding mechanism 500: Cut off device 510: Cut off mechanism C1: Observation axis H1: Hole S1: Screw part

Fig. 1 is a diagram schematically showing an inspection apparatus. FIG. 2 is a diagram for explaining a problem caused by each slit in the plate-shaped member being inclined more than expected. Fig. 3 is a diagram schematically showing the upper surface of the coaxial illumination. FIG. 4 is a diagram schematically showing the front side of the coaxial illumination. FIG. 5 is a schematic cross-sectional view taken along the line V-V in FIG. 3 . FIG. 6 is a diagram schematically showing an inspection apparatus in a state where the distance between the diffuser plate and the plate-shaped member is shortened. FIG. 7 is a diagram schematically showing an inspection apparatus in a state in which the plate-shaped member is inclined at an angle with respect to the half mirror. Fig. 8 is a block diagram schematically showing the configuration of a resin molding apparatus. Fig. 9 is a block diagram schematically showing the configuration of the cutting device.

Domestic storage information (please note in the order of storage institution, date and number) none

Foreign deposit information (please mark in the order of deposit country, institution, date and number) none

10: Check the device

100: Coaxial lighting

110: Frame

120: LED

121: Substrate

125: Light source part

130: Diffuser plate

140: Plate member

142: Slit

150: Half mirror

200: Camera

300: Check the object

C1: Observation axis

Claims (13)

An inspection device comprising: a camera configured to capture an image of the inspection object; and, a coaxial illumination configured to irradiate the inspection object with light; The aforementioned coaxial illumination, including: a half mirror arranged on an observation axis connecting the inspection object and the camera, and inclined with respect to the observation axis; a light source unit configured to emit light toward the half mirror from a direction different from the observation axis, and the light emitted by the light source unit is reflected by the half mirror to irradiate the inspection object; a plate-shaped member disposed between the light source portion and the half mirror, a plurality of slits are formed in the plate-shaped member, and the slits are substantially parallel to each other; The adjustment portion is configured to adjust the arrangement of the plate-shaped member. The inspection apparatus according to claim 1, wherein the adjustment unit includes an angle adjustment mechanism configured to adjust an angle of the adjustment plate-like member with respect to the half mirror. The inspection device according to claim 2, wherein the angle adjustment mechanism includes: a holder configured to hold the aforementioned plate-like member; a shaft member, which becomes the axis of rotation of the aforementioned holder; and, The stopper is configured to stop the rotation of the shaft member. The inspection apparatus according to claim 3, wherein the holder includes a hole for accommodating a part of the shaft member. The inspection apparatus according to any one of claims 1 to 4, wherein the adjustment unit includes a position adjustment unit configured to adjust the distance between the plate-shaped member and the light source unit. The inspection apparatus according to claim 5, wherein the position adjustment portion includes a moving member configured to linearly move the plate-like member between the light source portion and the half mirror. The inspection device according to claim 1, wherein the adjustment unit includes: a position adjustment portion configured to adjust the distance between the plate-like member and the light source portion; and, an angle adjustment mechanism configured to adjust the angle of the adjustment plate-shaped member relative to the half mirror; the position adjusting portion includes a moving member configured to linearly move the plate-like member between the light source portion and the half mirror; The angle adjustment mechanism includes: a gripper configured to hold the plate-like member; and a shaft member serving as a rotation shaft of the gripper; The moving member and the shaft member are offset in the height direction. The inspection device according to claim 7, wherein the angle adjustment mechanism includes a support member that supports the shaft member and is mounted on the moving member together; The aforementioned support components, including: a support member body portion mounted on the aforementioned moving member; and, a connecting portion connecting the vicinity of the moving member and the gripper in the main body portion of the supporting member; The support member main body portion and the connection portion are respectively formed with through holes through which the shaft member is inserted. The inspection apparatus according to any one of claims 1 to 8, wherein the coaxial illumination includes a light-shielding cover configured to cover the adjustment portion. A resin molding device, comprising: A resin molding mechanism configured to manufacture a resin molded article; and, Inspection device as claimed in any one of claims 1 to 9. A cutting device comprising: A cutting mechanism configured to produce a cut product by cutting an object to be cut; and, Inspection device as claimed in any one of claims 1 to 9. A method for manufacturing a resin molded product, comprising: manufacture of resin moldings; and, Using the inspection device according to any one of Claims 1 to 9 to inspect the aforementioned inspection object; The inspection object includes the resin molded product. A manufacturing method of a cut product, comprising the following steps: manufacturing a cut product by cutting an object to be cut; and, Using the inspection device according to any one of Claims 1 to 9 to inspect the aforementioned inspection object; The inspection object includes the cutting object or the cutting product.

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