TW202121031A - Vacuum pasting apparatus - Google Patents

Abstract

This vacuum pasting apparatus is provided with: a vacuum chamber that pastes together first and second members therein; a pressure reduction device that reduces atmospheric pressure in the vacuum chamber; a first stage to which the first member is fixed; a second stage to which the second member is fixed; a plurality of drive shafts connected to the second stage; a stage driving unit that changes the position of the second stage by moving the drive shafts; and a position measurement unit that is provided outside the vacuum chamber and that measures separation distances between the first and second stages at a plurality of places. The stage driving unit independently determines the distances by which the drive shafts are to be moved, by using information about separation distances between the stages measured by the position measurement unit before the pressure reduction device achieves vacuum inside the vacuum chamber and information about separation distances between the stages measured by the position measurement unit after vacuum is achieved.

Description

Vacuum bonding device

This disclosure relates to a vacuum laminating device.

Patent Document 1 discloses a liquid crystal substrate laminating device, which has: upper and lower pressing plates, which respectively adsorb the back surfaces of the upper and lower substrates arranged oppositely; a vacuum chamber, which can accommodate the upper and lower pressing plates and adjust the vacuum pressure; The upper platen lowering mechanism, which lowers the upper platen to the horizontal alignment position of the upper and lower substrates; the horizontal moving mechanism, which moves the lower platen horizontally for alignment; the gap measuring mechanism, which measures the gap between the upper and lower substrates; and A shaft, which directly or indirectly supports the 4 corners of the upper platen, and moves up and down independently. The liquid crystal substrate laminating device is equipped with: an upper platen tilt adjustment mechanism, which adjusts the height and tilt position of the upper platen by moving the moving shaft corresponding to the measured value of the gap measuring mechanism up and down; and a pressurizing mechanism, which Make the upper and lower pressure plates pressurize each other. [Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2003-43500

[The problem to be solved by the invention]

The present disclosure provides a vacuum bonding device that can achieve high-precision bonding position and parallelism, and high-quality direct bonding. [Technical means to solve the problem]

The present disclosure provides a vacuum bonding device, which includes: a vacuum chamber for bonding a first member and a second member inside; a pressure reducing device for reducing the pressure in the vacuum chamber; A stage that fixes the first member; a second stage that fixes the second member; a plurality of drive shafts connected to the second stage; a stage drive section that moves the plurality of Driving a shaft to change the position of the second stage; and a position measuring unit installed outside the vacuum chamber to measure the distance between the first stage and the second stage at a plurality of locations; the carrier Stage drive unit use: The pressure reducing device sets the vacuum chamber to the distance information of the stage measured by the position measuring unit before the vacuum, and the distance of the stage measured by the position measuring unit after the vacuum is set Distance information, and independently determine the distance to move the plural drive shafts. [Effects of Invention]

According to the present disclosure, in vacuum bonding, high-precision bonding position and parallelism can be achieved, and high-quality direct bonding can be achieved.

(Background of this disclosure) Previously, in the direct bonding technology for bonding the liquid crystal module and the touch panel, it has been established that the small size (for example, the largest panel size is Approximately 15 inches) laminating technology. However, there are still many problems with the bonding technology of medium and large size (for example, the panel size is 15 inches or more), and the technology that can achieve high-precision bonding has not been established. One of the problems in the establishment of late-to-large-scale bonding is the mixing of air bubbles. In particular, the larger the size (for example, the panel size is 32 inches, etc.), the higher the risk of air bubbles being mixed during the bonding unless the height direction position of the bonding target parts such as the substrate can be controlled with high accuracy.

In addition, as a method of reducing the mixing of air bubbles, it is desirable to perform bonding by setting the chamber in which the bonding target parts are arranged in a vacuum environment. However, the larger the chamber, the larger the size of the chamber in the longitudinal direction. When the chamber is decompressed to a vacuum state, the chamber itself will be deformed. In most cases, the laminating carrier is directly installed outside the chamber, and the position of the laminating carrier is changed due to the deformation of the chamber, which leads to errors in the laminating position, and at the same time, the parallelism of the laminating surface is destroyed.

Therefore, in the following embodiments, an example of a vacuum bonding device that can achieve high-precision bonding position and parallelism and high-quality direct bonding will be described.

(Embodiment 1) Hereinafter, with appropriate reference to the drawings, a detailed description will be given to specifically disclose the implementation of the vacuum laminating device of the present disclosure. However, there are cases where excessively detailed explanations are omitted. For example, there are cases where detailed explanations of widely known matters are omitted or repeated explanations of substantially the same composition. This is to prevent the following description from being unnecessarily lengthy and to make it easy for those skilled in the art to understand. In addition, the accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present disclosure, and are not intended to limit the subject matter described in the scope of patent application by these.

(The composition of the vacuum laminating device) FIG. 1 is a cross-sectional view viewed from the front of the vacuum bonding device 11 of the first embodiment. The vacuum bonding device 11 of the first embodiment has a vacuum chamber 13, a pressure reducing device 15, a first stage 17, a second stage 19, a drive shaft 21, a stage drive part 23, and a position measuring part 25 as main components .

In the vacuum chamber 13, the first member 29 and the second member 31 are bonded to each other in the interior 27. In the first embodiment, the first member 29 is, for example, a liquid crystal module constituting a large (for example, 32-inch) seat monitor installed in an aircraft. The second member 31 is, for example, a touch panel that constitutes a large (for example, 32-inch) seat monitor installed in an aircraft. In addition, the first member 29 and the second member 31 are not limited to those described above.

The vacuum chamber 13 is composed of a lower shell member 33 and an upper cover member 35 to constitute an outer shell. The lower shell member 33 is manufactured with high rigidity such that the wall portion is set to about 20-30 mm by cutting out metal. The lower shell member 33 has an opening 37 on the upper surface. The vacuum chamber 13 closes the opening 37 of the lower shell member 33 by the upper cover member 35, thereby sealing the interior 27 in an airtight state.

The decompression device 15 decompresses the inside of the vacuum chamber 13 so that the inside of the vacuum chamber 13 can be set to a vacuum state. The decompression device 15 includes, for example, a vacuum pump. The decompression device 15 connects the suction pipe 39 to the lower shell member 33, sucks the air in the vacuum chamber 13, and exhausts to the exhaust pipe 41. A vacuum chuck pipe 43 is branched from the suction pipe 39. The vacuum chuck piping 43 is connected to a vacuum chuck (not shown), and is provided on each of the first stage 17 and the second stage 19 arranged in the vacuum chamber 13. The vacuum chuck uses the negative pressure of the decompression device 15 to suck and fix the first member 29 to the first stage 17 and to fix the second member 31 to the second stage 19 respectively.

The first stage 17 is arranged inside the lower shell member 33. The first stage 17 is formed in a shape substantially similar to a liquid crystal module of a substantially square (including a square. The same applies hereinafter), and is larger than the substantially square of the liquid crystal module. The first stage 17 sucks and fixes the liquid crystal module on the upper surface of the suction hole opening of the vacuum chuck. On the lower surface of the first stage 17, the upper end of the lift shaft is fixed. The lift shafts are respectively arranged at the four corners of the first stage 17 in four positions in total. The lift shaft penetrates the bottom plate of the lower shell member 33 by the airtight structure, and can be moved in the vertical direction by the air cylinder 45. That is, the first member 29 fixed to the first stage 17, the first member 29 and the second member 31 after being laminated can be raised and lowered relative to the lower shell member 33 by driving the raising and lowering shaft by the air cylinder 45 . In addition, the chuck set on the first stage 17 is not necessarily a vacuum chuck. If it is to achieve the same effect, other mechanisms such as a mechanical chuck can also be used.

The second stage 19 has an outer shape of a substantially square shape that is substantially the same as that of the first stage 17. The second stage 19 is located in the vacuum chamber 13 and is arranged in parallel to the first stage 17 below. The second stage 19 is on the lower surface facing the first stage 17 and sucks and fixes the second member 31. The four corners of the upper surface of the second stage 19 are connected to the penetrating front ends (in other words, the lower end) of a plurality of (for example, four) drive shafts 21 penetrating the upper cover member 35. That is, each of the four drive shafts 21 is connected one by one corresponding to the four corners of the second stage 19 formed in a substantially square shape.

The stage drive unit 23 changes the position of the second stage 19 by moving each of the plurality of drive shafts 21. One stage drive unit 23 is provided for one drive shaft 21. Therefore, in the vacuum bonding device 11, the four stage driving parts 23 are fixed to the upper cover member 35. As the stage driving section 23, for example, a linear mechanism or a rack-and-pinion mechanism that moves the drive shaft 21 in the axial direction can be used. In either case, the stage drive unit 23 is configured to receive the position information of the drive shaft 21, and control the drive shaft 21 to advance and retreat based on the position information by a specific amount of movement. The control of the forward and backward drive of the drive shaft 21 is performed by, for example, well-known feedback correction.

The upper end of the drive shaft 21 penetrates the stage drive part 23. The upper end of the drive shaft 21 penetrating the stage drive portion 23 is fixed to the base end of the extension portion 47 extending substantially perpendicular to the axial direction. The front end of the protruding portion 47 extends above the side surface of the lower shell member 33. The front end of the extension is lifted and lowered integrally with the drive shaft 21. The amount of movement in the up-and-down direction of the tip of the extension is detected by the position measuring unit 25 described later.

2 is a side cross-sectional view of the upper cover member 35 of the vacuum bonding device 11 shown in FIG. 1 in an opened state. The vacuum chamber 13 is opened and closed by the upper cover member 35 and is formed, for example, as an opening 37 of the lower shell member 33 in the shape of a hexahedron. As described above, the stage driving unit 23 is fixed to the upper surface of the opening and closing upper cover member 35. The stage drive part 23 fixed to the upper surface of the upper cover member 35 allows the drive shaft 21 to penetrate the upper cover member 35. The penetrating tip of the drive shaft 21 is fixed to the second stage 19. Therefore, when the upper lid member 35 is swung and rotated to open the opening 37, the second member 31 fixed to the second stage 19 is arranged on the upper surface.

The upper cover member 35 of the vacuum bonding device 11 is rotatably supported around a swing axis along one side of the opening 37 of the lower shell member 33 to open and close the opening 37. Thereby, the vacuum bonding device 11 can retreat the stage driving section 23 by swinging the upper cover member 35 to the open position, and expose the second member 31 upward and is arranged on the upper cover member 35 inverted vertically. surface. At the same time, the opening 37 of the lower shell member 33 can be completely opened.

The upper cover member 35 is laminated with a positioning table 49. The positioning table 49 can move each of all the stage driving parts 23 and the drive shaft 21 in the plane direction (XY direction) parallel to the second stage 19. In addition, the XY direction is an in-plane direction orthogonal to the drive shaft 21. In this specification, the direction orthogonal to the XY direction is referred to as the Z direction. The Z direction is the advancing and retreating direction of the drive shaft 21 with respect to the vacuum chamber.

The vacuum bonding device 11 is provided with a linear movement mechanism 51 extending in the X direction or the Y direction above the vacuum chamber 13. The linear movement mechanism 51 is constituted by, for example, a ball screw mechanism. The linear movement mechanism 51 supports the arm unit 53 movably in the linear direction along the X direction or the Y direction. A camera 55, a thickness measurement sensor 57, a coater 59, and the like are mounted on the arm unit 53. The camera 55 photographs the first member 29 and the second member 31. Hereinafter, the first member 29 or the second member 31 may be referred to as "work". The imaging information including the image captured by the camera 55 is sent from the camera 55 to the positioning table 49 (refer to FIG. 2). The positioning table 49 moves the second stage 19 in the XY direction based on the imaging information sent from the camera 55, so that the second member 31 is aligned with the first member 29 (that is, the second member 31 is adjusted relative to the first member 29). position). The workpiece position determination and the XY movement of the positioning table 49 are performed by, for example, well-known feedback correction.

The thickness measurement sensor 57 measures the thickness of each of the first member 29 and the second member 31 for each of a plurality of locations. The thickness information of each workpiece detected by the thickness measurement sensor 57 is sent to the stage driving part 23 (refer to FIG. 1). The stage drive unit 23 feedbacks and corrects the movement amount of the drive shaft 21 based on the thickness information of each workpiece received from the thickness measurement sensor 57. That is, the stage drive unit 23 can appropriately correct the movement amount of each drive shaft 21 according to the thickness difference of each work.

The coater 59 is provided with an adhesive application nozzle (illustration omitted) that supplies the adhesive 61 to the bonding surface of the work (that is, the bonding surface of the first member 29 and the second member 31). The coater 59 coats the adhesive 61 on the upper surface of the first member 29 fixed to the upper surface of the first stage 17, for example. The second member 31 fixed to the second stage 19 is brought close to the first member 29 coated with the adhesive 61 from above in parallel, and is bonded together. That is, the first member 29 and the second member 31 are directly bonded together.

Here, when a liquid crystal module (an example of the first member 29) is laminated with a cover glass or a touch panel (an example of the second member 31), if there is an air layer in between, it will be caused by the air layer and the glass of the liquid crystal module. The difference in refractive index between the upper surface of the touch panel and the difference between the refractive index of the back surface of the touch panel and the air layer cause interface reflection, resulting in the deterioration of the appearance due to the decrease in the brightness of the liquid crystal module and the increase in reflectivity. Subsequent to removing the air layer between the liquid crystal module and the cover glass or the touch panel is called direct bonding. Direct bonding is by filling a transparent resin with a refractive index close to that of a liquid crystal module or touch panel, and it becomes a state where there is almost no interface in the optics. Therefore, direct bonding is also called optical bonding (optical bonding). For direct bonding, for example, an ultraviolet curable adhesive 61 is used.

The coater 59 first coats the adhesive 61 which is a substantially square dam (in other words, a wall) on the upper surface of the first member 29. The dam body is provided with discontinuous parts for discharging air bubbles at the four corners of the substantially square box. Next, the bonding adhesive 61 is applied to the inner side of the dam. Adhesive 61 is applied on the inner side of the dam in a so-called fishbone shape. By pressing the second member 31 against the first member 29, the adhesive 61 and the dam body gradually spread evenly and become uniform. Thereby, the bubbles generated by pressing the second member 31 against the first member 29 are finally discharged from the discontinuous part of the dam, and the bonding surface of the workpiece is bonded in a bubble-free state.

Fig. 3 is an enlarged view of the main part of the vacuum chamber shown in Fig. 1. In the first embodiment, the position measuring unit 25 is provided outside the vacuum chamber 13. The position measuring unit 25 uses, for example, a pressure sensor that can measure the amount of pressure (in other words, the amount of change). In the first embodiment, it is fixed to the lower part so as to be fixed directly below the tip of the extension of each drive shaft 21. The side of the shell member 33. The position measuring unit 25 measures the distance between the first stage 17 and the second stage 19 by the detection element 63 being in contact with the extension part 47. That is, the distance between the first stage 17 and the second stage 19 is measured at a plurality of locations by the drive shaft 21 and the position measuring unit 25.

The stage drive section 23 uses the decompression device 15 to set the vacuum chamber 13 to the distance information of the stage measured by the position measuring section 25 before setting the vacuum chamber 13 to vacuum, and the pressure reducing device 15 sets the vacuum chamber 13 to vacuum. The interval distance information of the stage measured by the position measuring unit 25 independently determines the distance of moving the plural drive shafts 21.

That is, the vacuum laminating device 11 of the first embodiment uses the separation distance information (ie, the amount of change) before and after the vacuum. After the vacuum chamber 13 is set to vacuum in the decompression device 15, the plurality of drive shafts 21 are independently moved to make The bonding surfaces of the first member 29 and the second member 31 are parallel.

In addition, the vacuum bonding apparatus 11 may use a mechanism other than the position measuring unit 25 to measure the distance between the stages. For example, the distance between the stages can also be measured by the method of directly measuring the distance by the reflection of laser light, or by the method of analyzing and processing the image obtained by shooting with a camera (not shown).

FIG. 4 is an enlarged view of the main part of the configuration of a modified example in which the connection position of the drive shaft 21 to the second stage 19 is changed. As shown in FIG. 4, in the vacuum bonding apparatus 11, the 2nd stage 19 has the bonding effective area|region 65 for fixing the 2nd member 31. As shown in FIG. The bonding effective area 65 has a substantially square size that is at least the same size as or greater than the size of the second member 31. In the modified example shown in FIG. 4, each of the four drive shafts 21 is connected to the second stage 19 outside the effective bonding area 65. The reason for connecting the four drive shafts 21 to the second stage 19 outside the bonding effective area 65 will be described below.

(Action of vacuum laminating device) Next, the operation sequence at the time of bonding the first member 29 and the second member 31 by the vacuum bonding apparatus 11 will be described with reference to FIG. 5.

Fig. 5 is a flowchart showing an example of the lamination operation sequence of the vacuum lamination device 11 of the first embodiment. The various processes shown in FIG. 5 are mainly executed by the vacuum laminating device 11 shown in FIG. 1 or FIG. 2.

In FIG. 5, in order to bond the first member 29 (for example, a liquid crystal module) and the second member 31 (for example, a touch panel), which are workpieces, first, the workpieces are set (St1). For example, in the setting of the workpiece, a liquid crystal module (LCD: Liquid Crystal Display) is fixed on the first stage 17 and a touch panel is fixed on the second stage 19.

For example, by the operation of the user (hereinafter referred to as "user") of the vacuum laminating device 11 (including the operation of the action program set by the user), the arm unit 53 moves to the top of each workpiece. Similarly, the thickness measurement sensor 57 mounted on the arm unit 53 measures the thickness of the touch panel and the thickness of the liquid crystal module (St2) by the operation of the user. By the operation of the user, the arm unit 53 moves above each workpiece. Similarly, by the user's operation, the camera 55 mounted on the arm unit 53 detects the positions of the touch panel and the liquid crystal module respectively (St3).

By the user’s operation, the positioning stage 49 moves the second stage 19 based on the position information of the workpiece detected in step St3 to align the XY position of the touch panel (that is, the touch panel is relative to the liquid crystal module XY correction of the relative position of the position) (St4).

By the operation of the user, the arm unit 53 moves above the liquid crystal module, and the adhesive application nozzle is used to supply the adhesive 61 to the bonding surface of the liquid crystal module, and a dam is formed on the bonding surface of the liquid crystal module (St5 ). Next, the arm unit 53 uses the adhesive application nozzle to apply the adhesive 61 (filler) on the inner side of the dam formed on the bonding surface of the liquid crystal module. Thereby, a fishbone-shaped adhesive 61 (St6) is formed on the bonding surface of the liquid crystal module.

By the operation of the user, the upper cover member 35 rotates around the swing shaft 67 to close the opening 37 of the lower case member 33 (St7). Thereafter, the pressure reducing device 15 is driven by the operation of the user. That is, the decompression device 15 exhausts air from the vacuum chamber 13 (evacuates). Simultaneously with this evacuation, the position measuring unit 25 measures the amount of position change of the drive shaft 21 (in other words, the amount of change of the position measuring unit 25) (St8).

By the operation of the user, the vacuum bonding device 11 drives the stage driving part 23 to move each driving shaft 21 in the Z direction, and the bonding of the workpiece is started (St9). At this time, the stage driving section 23 corrects the movement amount in the Z direction (Z correction) based on the thickness information of the workpiece detected in step St2 and the change amount information of the drive shaft 21 detected in step St8.

After the liquid crystal module is attached to the touch panel by the Z-corrected drive shafts 21 in step St9, the release valve or the like is opened by the user's operation, thereby opening the vacuum chamber 13 to the atmosphere (St10). That is, in step St10, the atmosphere is introduced into the vacuum chamber 13. After that, the vacuum chuck of each of the first stage 17 and the second stage 19 is opened, and the fixation of each workpiece and the stage is released (St11).

By the operation of the user, the upper cover member 35 rotates around the swing shaft 67, whereby the upper cover member 35 moves to the retracted position (St12). Thereby, the opening 37 of the lower case member 33 is opened (St13). By the operation of the user, the bonded workpiece (so-called bonding) placed on the first stage 17 of the opened lower shell member 33 is irradiated with UV light at a plurality of points from the touch panel side, and fixed The workpiece has been attached (St14). Finally, with the operation of the user, the thickness measurement sensor 57 measures the thickness of the above-mentioned bonding compound (St15), and the bonding step of the liquid crystal module and the touch panel using the vacuum bonding device 11 is completed.

Next, the function of the above-mentioned vacuum bonding apparatus 11 will be described in detail.

The vacuum bonding device 11 of the first embodiment includes: a vacuum chamber 13 for bonding the first member 29 and the second member 31 inside 27; and a pressure reducing device 15 for reducing the pressure in the vacuum chamber; The first stage 17, which fixes the first member 29; the second stage 19, which fixes the second member 31; a plurality of drive shafts 21, which are connected to the second stage 19; the stage driving part 23, which borrows The position of the second stage 19 is changed by moving the plurality of drive shafts 21; and the position measuring section 25 is installed outside the vacuum chamber 13 and measures the first stage 17 and the second stage at a plurality of locations The separation distance of 19. The stage drive section 23 uses the decompression device 15 to set the vacuum chamber 13 to the distance information of the stage measured by the position measuring section 25 before setting the vacuum chamber 13 to vacuum, and the pressure reducing device 15 sets the vacuum chamber 13 to vacuum. The interval distance information of the stage measured by the position measuring unit 25 independently determines the distance of moving the plural drive shafts 21.

In the vacuum bonding device 11, the vacuum chamber 13 has a first stage 17 and a second stage 19 inside 27. A first member 29 (for example, a liquid crystal module) is fixed to the first stage 17. A second member 31 (for example, a touch panel) is fixed to the second stage 19. The first member 29 and the second member 31 are arranged so that the first stage 17 and the second stage 19 face the bonding faces.

The vacuum chamber 13 decompresses the interior 27 to a substantially vacuum by the decompression device 15. A plurality of (for example, four) stage driving parts 23 are provided outside the vacuum chamber 13. Each stage driving part 23 has a driving shaft 21 penetrating the vacuum chamber 13. The drive shaft 21 is hermetically sealed and can move forward and backward freely with respect to the vacuum chamber. The penetration tip of each drive shaft 21 is fixed to the second stage 19. For example, each of the four corners of the substantially square second stage 19 of the substantially square touch panel for fixing the substantially square touch panel is fixed to the penetrating front end of the drive shaft 21.

Fig. 6 is an enlarged view of the main part of the vacuum chamber part showing the normal state during lamination. The stage driving unit 23 causes the second stage 19 to approach the distance between the first member 29 and the second member 31 toward the first stage 17, so that the first member 29 and the second member 29 that are pre-coated with the adhesive 61 The member 31 is attached. That is, the stage driving unit 23 drives the driving shaft 21 in a direction to enter the interior 27 of the vacuum chamber 13 by a distance between the first member 29 and the second member 31. Thereby, the first member 29 is aligned with the second member 31 at the correct position and the parallelism P in the intersection. After that, by moving the drive shaft 21 into the vacuum chamber 13, the adhesive 61 extends from the center to the outside, and the first member 29 and the second member 31 can be pasted by the adhesive layer without air bubbles. Together.

Fig. 7 is an enlarged view of the main part of the vacuum chamber part showing a state of parallel deviation between the stages. Here, in order to suppress mixing of air bubbles at the time of bonding, the vacuum chamber 13 is depressurized to a substantially vacuum. At this time, the vacuum chamber 13 is deformed (in other words, squashed) in the direction in which the inside 27 is compressed due to the atmospheric pressure. In particular, if the portion provided with the stage driving portion 23 (for example, refer to FIG. 1) is deformed inward, the second member 31 fixed to the second stage 19 together with the drive shaft 21 also moves in the direction approaching the first member 29 (Refer to Figure 7). Here, the reason why the deformation of the upper cover member 35 is illustrated in FIG. 7 will be described. As described above, since the lower shell member 33 is made by cutting metal, it is relatively easy to realize a structure with high rigidity and not easily deformed. On the other hand, as described above, since the upper cover member 35 includes the positioning table 49 that allows the stage driving portion 23 and the drive shaft 21 to move, it needs to be a flat plate, and it needs to be lighter to a certain extent in order to open and close the cover. Therefore, there are design constraints that are very difficult to ensure rigidity. That is, compared with the lower shell member 33, the upper cover member 35 has a feature of being relatively overwhelming and easier to deform.

Fig. 8 is an enlarged view of the main part of the vacuum chamber part for correcting the movement of the drive shaft. Therefore, outside the vacuum chamber 13 is provided a position measuring unit 25 that measures the distance between the first stage 17 and the second stage 19 at a plurality of locations. The position measuring unit 25 measures the separation distance information of the stage before the vacuum chamber 13 is set to the vacuum by the decompression device 15 and the separation distance information of the stage after the vacuum chamber 13 is set to the vacuum by the pressure reducing device 15 respectively. . Thereby, the change amount ΔG of the drive shaft 21 due to the deformation of the vacuum chamber 13 can be detected.

The stage driving unit 23 uses the distance information before and after the vacuum to independently determine the distance to move the plurality of driving shafts 21. That is, the position measuring unit 25 measures how much the positional relationship between the two stages has been deformed after the vacuum is set. The stage driving unit 23 uses the information to determine the movement mode of the stage. Thereby, the stage driving unit 23 can individually determine the distance to move each of the plurality of driving parts, and perform fine adjustment (in other words, position correction).

In addition, in the vacuum bonding device 11, the position change in the Z direction of the drive shaft 21 penetrating the vacuum chamber 13 is detected by the position measuring unit 25 provided outside the vacuum chamber 13. Thereby, the vacuum bonding device 11 can avoid the influence of vacuum on the position measuring part 25 compared with the case where the position measuring part 25 is installed in the vacuum chamber 13. Therefore, the position measuring unit 25 can increase the degree of freedom in selection of a contact sensor, a non-contact sensor, a passive sensor, an active sensor, and the like. As a result, the vacuum bonding apparatus 11 can use the highly accurate and low-cost position measuring part 25 with a simple structure.

Furthermore, by providing the position measuring unit 25 outside the vacuum chamber 13, the position measuring unit 25 can be easily calibrated (calibrated). For example, by setting simple components such as a scale, it is easy to realize the zero point correction of the movement amount (in other words, the origin detection). Thereby, the vacuum laminating device 11 can maintain the parallelism and position of the stage with high accuracy every time the position is measured. Furthermore, assuming that the sensors constituting the position measuring unit 25 are installed in the vacuum chamber 13, since the sensors are always exposed to an environment with pressure changes, they are susceptible to large external damage. Therefore, there are problems such as difficulty in ensuring the accuracy of the output value of the position measuring unit 25, but this problem can also be solved by placing the position measuring unit 25 outside the vacuum chamber 13.

In addition, since the mechanism of the vacuum bonding device 11 is simple, there are relatively few changes to the existing vacuum bonding device. Therefore, the subsequent installation of the existing vacuum laminating device can also be easily performed. Therefore, according to the vacuum bonding device 11 of the first embodiment, high-precision bonding position and parallelism can be realized, and high-quality direct bonding can be realized.

In addition, in the vacuum bonding device 11, the stage driving unit 23 uses: the pressure reducing device 15 sets the vacuum chamber 13 into vacuum before the stage distance information measured by the position measuring unit 25, and the pressure reducing device 15 After the vacuum chamber 13 is set to vacuum, the distance information of the stage measured by the position measuring unit 25 is set. After the vacuum chamber 13 is set to vacuum in the decompression device 15, the plurality of drive shafts 21 are moved to make the first The bonding surface of the first member 29 and the second member 31 is parallel.

In this vacuum bonding apparatus 11, the stage drive part 23 individually determines the distance which moves each of a plurality of drive shafts 21, and performs fine adjustment (position correction), and it makes two stages parallel. As a result, even if the vacuum chamber 13 is deformed due to vacuum pressure reduction, the vacuum bonding apparatus 11 can ensure the position and parallelism of the bonding surface.

Moreover, the drive shaft 21 of the vacuum bonding apparatus 11 is equipped with the extension part 47 extended in the direction substantially perpendicular|vertical to the axial direction. The position measuring part 25 measures the distance between the first stage 17 and the second stage 19 by contacting the extension part 47.

In the vacuum bonding device 11, the drive shaft 21 penetrating the vacuum chamber 13 is provided outside the vacuum chamber 13, and is provided with an extension 47 extending in a direction substantially perpendicular to the axial direction. The position measuring unit 25 described above is provided outside the vacuum chamber 13. For the position measuring unit 25, it is preferable to use, for example, a contact type sensor. The contact sensor detects the amount of movement of the drive shaft 21 in the axial direction by contacting the extension 47.

That is, the drive shaft 21 is fixed to the second stage 19 with a penetrating tip in the vacuum chamber. The second stage 19 fixes the second member 31. The driving shaft 21 is moved in the axial direction by the stage driving part 23 fixed to the vacuum chamber 13. The stage driving part 23 restricts the relative movement of the driving shaft 21 and the vacuum chamber 13 when it is not driven, and supports and fixes the vacuum chamber 13. Therefore, when the stage driving portion 23 is not driven, the deformation (position change) generated in the vacuum chamber 13 by the decompression of the decompression device 15 can be regarded as the position change (displacement) of each drive shaft 21, and It is detected by each position measuring unit 25.

In addition, the second stage 19 of the vacuum bonding apparatus 11 has a bonding effective area 65 for fixing the second member 31. The drive shaft 21 is connected to the second stage 19 that is outside of the bonding effective area 65.

In this vacuum bonding apparatus 11, the second stage 19 has a bonding effective area 65 in which the second member 31 is fixed. The drive shaft 21 is inside the vacuum chamber 13, and penetrates the front end to be connected to the second stage 19 outside the bonding effective area 65. That is, the drive shaft 21 is connected to the end of the second stage 19. The drive shaft 21 penetrates the end of the vacuum chamber 13 by being connected to the end of the second stage 19. The stage driving part 23 that supports the driving shaft 21 and allows it to move freely is also fixed at the end of the vacuum chamber 13.

Therefore, when the vacuum chamber 13 deforms due to decompression, the center of the vacuum chamber 13 with larger deformation, the drive shaft 21 is supported by the stage drive part 23 at the end of the vacuum chamber 13 with less deformation Therefore, compared with the case where the drive shaft 21 is connected to the second stage 19 inside the laminating effective area 65, the influence of deformation can be relatively reduced. Moreover, by arranging the drive shaft 21 at the end of the vacuum chamber 13, the distance from the position measuring part 25 provided outside the vacuum chamber 13 can be shortened. Thereby, the length of the connecting member (for example, the extension part 47 etc.) connecting the position measuring part 25 and the drive shaft 21 can also be shortened, and the detection accuracy of the drive shaft 21 accompanying the deformation of the vacuum chamber 13 can also be improved.

In addition, each of the four drive shafts 21 of the vacuum bonding device 11 is connected one by one to the four corners of the second stage 19 formed in a substantially square shape.

In the vacuum bonding apparatus 11, a drive shaft 21 is connected to each of the four corners of the second stage 19 formed in a substantially square shape. Therefore, the substantially square second member 31 can finely adjust its posture by taking a straight line passing through any set of drive shafts 21 as the swinging direction of the swinging shaft 67. Here, a straight line passing through a set of drive shafts 21 means a total of 6 straight lines as 4 straight lines connecting the sides of a substantially square of the four drive shafts 21 and 2 straight lines passing through two sets of diagonals. That is, the second stage 19 can finely adjust its posture around the six swing axes.

In the vacuum bonding device 11, only one of the four drive shafts 21 may be moved. In this case, the flatness of the second stage 19 is reduced. In this case, only the movement distance of the corresponding one drive shaft 21 can be fine-tuned (positioned correction) by the stage drive unit 23, and the flatness can be maintained with high accuracy.

In addition, the vacuum chamber 13 of the vacuum bonding device 11 has a hexahedral-shaped lower shell member 33 having an opening 37 on the upper surface, and an upper cover member 35 for opening and closing the opening 37, and the stage driving portion 23 is provided on the upper cover Component 35.

In the vacuum bonding device 11, the outer shell of the vacuum chamber 13 includes a lower shell member 33 and an upper cover member 35. The lower shell member 33 is formed in a hexahedron shape having an opening 37 on the upper surface. The upper cover member 35 is attached to the opening 37 of the lower case member 33 in an openable and closable manner. The lower shell member 33 can be manufactured by, for example, metal cutting, etc., with a wall portion of about 20 to 30 mm in high rigidity. Thereby, the lower shell member 33 can suppress the deformation due to the decompression to a degree that does not affect the bonding. The position measuring part 25 is fixed to the outside of the lower case member 33. The upper cover member 35 has an openable and closable structure, and is equipped with a positioning table 49 for positioning the second member 31 by moving the second member 31 in a plane direction, or a table driving unit 23 for supporting the drive shaft 21 and allowing it to advance and retreat freely. Therefore, compared with the lower shell member 33, the amount of deformation at the time of decompression tends to become larger. Therefore, in the vacuum bonding apparatus 11, the drive shaft 21 provided on the upper cover member 35 of the lower shell member 33 with a larger deformation amount can be finely adjusted. Thereby, the vacuum bonding device 11 is formed to be able to eliminate the positional deviation or the decrease in parallelism of the second member 31 due to the deformation accompanying the decompression generated in the vacuum chamber 13 by correction.

In addition, the upper cover member 35 of the vacuum bonding device 11 is rotatably supported around a swing axis along one side of the opening 37 of the lower housing member 33, and opens and closes the opening 37.

In the vacuum bonding device 11, the upper cover member 35 of the stage driving section 23 that is equipped with the positioning table 49 or the supporting drive shaft 21 is installed so as to be swingable via a swing shaft 67 along one side of the lower shell member 33. By rotating the vacuum chamber 13 around the swing axis, the positioning table 49 or the stage driving part 23 is moved together from the lower shell member 33 to the retracted position, and the opening 37 of the lower shell member 33 can be completely opened. The upper cover member 35 can be swung in the opening direction so that the second stage 19 can be arranged as an upper surface. That is, the second member 31 can be easily placed on the second stage 19 arranged on the upper surface from above.

In addition, since the vacuum bonding device 11 can swing the upper cover member 35 to open, the bonding surfaces of the first member 29 and the second member 31 can be exposed upward, and the image processing of each member can be easily performed. Position confirmation or thickness measurement, application of adhesive 61, etc.

Thereby, the vacuum bonding device 11 can easily and shortly perform the installation of the first member 29 and the second member 31 before bonding, or the removal of the first member 29 and the second member 31 after bonding, which can improve Productivity.

Above, various embodiments have been described with reference to the drawings, but the present disclosure is of course not limited to the above examples. It should be understood that those skilled in the art can think of various modifications, amendments, substitutions, additions, deletions, and equivalent examples within the scope of the scope of the patent application. When it is understood, these of course belong to Those within the technical scope of this disclosure. In addition, it is also possible to arbitrarily combine the constituent elements of the various embodiments described above without departing from the scope of the invention. [Industrial availability]

The present disclosure is useful as an identification code management method, a robot control device, and an integrated control device that support effective and simple management of the identification code of the workpiece in the production or correction of defective parts in various welding steps such as main welding or repair welding.

11: Vacuum bonding device 13: Vacuum chamber 15: Pressure reducing device 17: First stage 19: Second stage 21: drive shaft 23: Stage drive 25: Position Measurement Department 27: Internal 29: The first member 31: The second member 33: Lower shell component 35: Upper cover member 37: Opening 39: suction tube 41: Exhaust pipe 43: Piping for vacuum chuck 45: cylinder 47: Overhang 49: positioning table 51: Linear moving mechanism 53: Arm unit 55: Camera 57: thickness measurement sensor 59: Coating machine 61: Adhesive 63: Inspection parts 65: Fit the effective area 67: swing axis ∆G: amount of change P: parallelism St1～St15: steps

Fig. 1 is a cross-sectional view viewed from the front of the vacuum laminating device of the first embodiment. Fig. 2 is a side cross-sectional view of the vacuum laminating device shown in Fig. 1 with the upper cover member opened. Fig. 3 is an enlarged view of the main part of the vacuum chamber shown in Fig. 1. Fig. 4 is an enlarged view of the main part of the configuration of a modified example of changing the connection position of the drive shaft to the second stage. Fig. 5 is a flowchart showing an example of the lamination operation sequence of the vacuum lamination device of the first embodiment. Fig. 6 is an enlarged view of the main part of the vacuum chamber part showing the normal state during lamination. Fig. 7 is an enlarged view of the main part of the vacuum chamber part showing a state of parallel deviation between the stages. Fig. 8 is an enlarged view of the main part of the vacuum chamber portion illustrating the correction of the movement of the drive shaft.

11: Vacuum bonding device

13: Vacuum chamber

15: Pressure reducing device

17: First stage

19: Second stage

21: drive shaft

23: Stage drive

25: Position Measurement Department

27: Internal

29: The first member

31: The second member

33: Lower shell component

35: Upper cover member

37: Opening

39: suction tube

41: Exhaust pipe

43: Piping for vacuum chuck

45: cylinder

47: Overhang

49: positioning table

61: Adhesive

63: Inspection parts

Claims (7)

A vacuum laminating device, which is provided with: A vacuum chamber, which fits the first member and the second member inside; Decompression device, which is used to decompress the air pressure in the above-mentioned vacuum chamber; The first stage, which fixes the above-mentioned first member; The second stage, which fixes the above-mentioned second member; A plurality of drive shafts, which are connected to the above-mentioned second carrier; A stage drive unit that changes the position of the second stage by moving the plurality of drive shafts; and A position measuring unit, which is installed outside the vacuum chamber, and measures the distance between the first stage and the second stage at a plurality of locations; and Used by the above-mentioned stage drive unit The decompression device sets the vacuum chamber to the interval distance information of the stage measured by the position measuring unit before vacuum, and the interval distance information of the stage measured by the position measuring unit after setting the vacuum, respectively Independently determine the distance to move the plural drive shafts above. Such as the vacuum laminating device of claim 1, where Use of the above-mentioned stage drive unit The decompression device sets the interval distance information of the stage measured by the position measuring section before the vacuum chamber is set to vacuum, and the interval distance information of the stage measured by the position measuring section after setting the vacuum chamber, in the above After the pressure reducing device sets the vacuum chamber to a vacuum, the plurality of drive shafts are moved so that the bonding surfaces of the first member and the second member are parallel. Such as the vacuum laminating device of claim 1, where The above-mentioned drive shaft is provided with a protruding portion which extends in a direction substantially perpendicular to the axial direction; and The position measuring section measures the distance between the first stage and the second stage by contacting the extension section. Such as the vacuum laminating device of claim 1, where The second stage has a bonding effective area, which fixes the second member; and The drive shaft is connected to the second stage outside the effective area for bonding. Such as the vacuum laminating device of any one of claims 1 to 4, wherein Each of the four drive shafts is connected to each of the four corners of the second stage formed in a substantially square shape one by one. Such as the vacuum laminating device of claim 1, where The vacuum chamber has: a hexahedral-shaped lower shell member having an opening on the upper surface, and an upper cover member that opens and closes the opening; The stage drive unit is provided on the upper cover member. Such as the vacuum laminating device of claim 6, where The upper cover member is rotatably supported around a swing axis along one side of the opening of the lower case member, and opens and closes the opening.

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