TW201930826A - Appearance inspection device, appearance inspection method, program and workpiece manufacturing method - Google Patents

Abstract

This appearance inspection device is provided with a first robot arm, a second robot arm, and a control unit. The first robot arm has a first arm, and a first scanning unit which includes a first line camera and is provided on the first arm. The second robot arm has a second arm and a second scanning unit which includes a second line camera and is provided on the second arm. The control unit, while causing the first arm to move the first scanning unit in the scanning direction on the first surface of a workpiece having a first surface and a second surface, causes the first line camera to image the first surface and the first scanning unit to scan the first surface, and, when the first surface is being scanned by the first scanning unit, while causing the second arm to move the second scanning unit in the scanning direction on the second surface, causes the second line camera to image the second surface and the second scanning unit to scan the second surface.

Description

Visual inspection device, visual inspection method, program, and manufacturing method of workpiece

This technology relates to a technique such as an appearance inspection device for inspecting the appearance of a workpiece.

A visual inspection device for inspecting the appearance of a workpiece has been known (for example, refer to Patent Documents 1 and 2 below). In the visual inspection device, in order to acquire an image of a workpiece, an area camera or a line camera is usually provided.
[Previous Technical Literature]
[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2011-038784
[Patent Document 2] Japanese Patent Laid-Open Publication No. 2010-237034

[The problem that the invention wants to solve]

It is considered important to perform the visual inspection of the workpiece quickly and efficiently.

In view of the above circumstances, an object of the present technology is to provide a technique such as an appearance inspection device that can efficiently perform visual inspection of a workpiece quickly and efficiently.
[Technical means to solve the problem]

The visual inspection device of the present technology includes a first robot arm portion, a second robot arm portion, and a control portion.
The first robot arm portion includes a first arm portion and a first scanning portion, and the first scanning portion includes a first linear camera and is provided in the first arm portion.
The second robot arm portion includes a second arm portion and a second scanning portion, and the second scanning portion includes a second linear camera and is provided in the second arm portion.
The control unit moves the first scanning unit in the scanning direction on the first surface of the workpiece having the first surface and the second surface by the first arm portion, and the first linear camera pairs the first linear camera The first scanning unit scans the first surface, and when the first scanning unit scans the first surface, the second scanning unit uses the second scanning unit to perform the second scanning unit. The surface moves in the scanning direction, and the second surface is imaged by the second linear camera, and the second scanning unit scans the second surface.

In the visual inspection device, when the first scanning unit scans the first surface of the workpiece, the second scanning unit scans the second surface of the workpiece. Thereby, the visual inspection of the workpiece can be performed quickly and efficiently.

In the above-described visual inspection device, the first scanning unit may further include a first light-emitting unit that moves in the scanning direction together with the first linear camera and that images the first linear camera. The part is illuminated by light.

In the above-described visual inspection device, the control unit may adjust an imaging angle at which the first linear camera captures the first surface, and adjust an irradiation angle of the first light-emitting portion to the first surface.

In the above-described visual inspection device, the control unit may scan the first surface a plurality of times by using the first scanning unit at different imaging angles and different irradiation angles.

In the above-described visual inspection device, the second scanning unit may further include a second light-emitting unit that moves in the scanning direction together with the second linear camera and images the second linear camera. The part is illuminated by light.

In the above-described visual inspection device, the control unit may adjust an imaging angle at which the second linear camera captures the second surface, and adjust an irradiation angle of the second light-emitting portion to the second surface.

In the above-described visual inspection device, the control unit may scan the second surface a plurality of times by using the second scanning unit at different imaging angles and different irradiation angles.

In the above-described visual inspection device, the control unit may scan the first surface in a plurality of scanning directions in the scanning direction by the first scanning unit.

In the above-described visual inspection device, the control unit may scan the second surface in a plurality of scanning directions in the scanning direction by the second scanning unit.

In the above-described visual inspection device, the workpiece may further include a third surface, and the control unit cooperatively scans the third surface by the first scanning unit and the second scanning unit.

In the above-described visual inspection device, the control unit may scan the third surface in a specific scanning direction by the first scanning unit, and may scan in a scanning direction different from the specific scanning direction by the second scanning unit. The third side above.

In the above-described visual inspection device, the control unit may interfere with light from the second linear camera without interference from light from the first light-emitting unit, and interfere with light from the second light-emitting unit to the first The light captured by the linear camera interferes, and the movement of the scanning by the first scanning unit and the second scanning unit is controlled.

In the above-described visual inspection device, the control unit may control the lighting and extinguishing timings of the first light-emitting portion and the second light-emitting portion so as not to cause the light interference.

In the above-described visual inspection device, the control unit may control the start of imaging and the end of imaging by the first linear camera and the second linear camera so as not to cause the light interference.

In the visual inspection device described above, the first surface and the second surface may be adjacent to each other.

In the visual inspection device described above, the first surface, the second surface, and the third surface may be adjacent to each other.

In the visual inspection method of the present invention, the first arm portion of the first robot arm portion is scanned by the first scanning portion of the first robot arm portion on the first surface of the workpiece having the first surface and the second surface. Moving in the direction, the first linear camera using the first scanning unit images the first surface, and the first scanning unit scans the first surface.
When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera is imaged by the second linear camera of the second scanning unit, and the second scanning unit scans the second surface.

In the program of the present technology, the computer functions as a control unit that uses the first arm portion of the first robot arm portion to have the first scanning portion of the first robot arm portion having the first surface and the second surface. The first surface of the workpiece is moved in the scanning direction, and the first surface of the workpiece is imaged by the first linear camera of the first scanning unit, and the first scanning unit scans the first surface.
When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera is imaged by the second linear camera of the second scanning unit, and the second scanning unit scans the second surface.

In the manufacturing method of the workpiece of the present technology, the first arm portion of the first robot arm portion is used, and the first scanning portion of the first robot arm portion is on the first surface of the workpiece having the first surface and the second surface. Moving in the scanning direction, the first linear camera of the first scanning unit images the first surface, and the first scanning unit scans the first surface.
When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera of the second scanning unit images the second surface, and the second scanning unit scans the second surface, and images the image captured by the first linear camera and the second linear camera. The image determines whether the above workpiece is good or bad.
[Effects of the Invention]

As described above, according to the present technology, it is possible to provide a technique such as an appearance inspection device that can efficiently perform visual inspection of a workpiece quickly.

Hereinafter, an embodiment of the present technology will be described with reference to the drawings.

≪First Embodiment≫
<The overall configuration of the inspection system 100 and the constitution of each part>
Fig. 1 is a plan view showing an inspection system 100 according to a first embodiment of the present technology. As shown in FIG. 1, the inspection system 100 of the present technology includes an abnormal sound inspection device 10, a seal attaching device 40, a first visual inspection device 50A, a first transport device 80, a second visual inspection device 50B, and a second transport device. 90. The inspection system 100 is disposed in the vicinity of the most downstream side of the production line of the workpiece 1, for example, and performs final inspection of the workpiece 1.

In the description of the present specification, the general name of the two visual inspection devices 50A and 50B is simply referred to as the visual inspection device 50, and when the two visual inspection devices 50A and 50B are distinguished, the first visual inspection device is referred to as the first visual inspection device. 50A and second visual inspection device 50B.

In Fig. 1, the conveying path of the workpiece 1 is indicated by a dotted arrow. In the present embodiment, a fixed type game machine is assumed as the workpiece 1 to be inspected. The workpiece 1 has a casing 2 which is thin in the thickness direction and has a substantially rectangular parallelepiped shape.

Figure 6 is a developed view of the housing 2 of the workpiece 1. The casing 2 has a total of six faces of the front face 3, the back face 4, and the four side faces 5. Inside the casing 2, various electronic components required for the gaming machine are built in.

Further, in the description in the present specification, in the case of the side surface 5, it is referred to as any one of the four side faces, and when the four side faces 5 are not particularly distinguished, they are respectively referred to as a first side face 5a, The second side face 5b, the third side face 5c, and the fourth side face 5d.

Here, in order to facilitate the understanding of the inspection system 100, the flow of how to inspect the entire workpiece 1 by the inspection system 100 will be briefly described (see the dotted arrow in FIG. 1).

First, the workpiece 1 is conveyed to the seal attaching device 40 by the abnormal sound inspection device 10 from another device (not shown) disposed on the upstream side, and the seal is attached by the seal attaching device 40. When the attachment of the seal is completed, the workpiece 1 is transported from the first seal attaching device 40 to the first visual inspection device 50A by the abnormal sound inspection device 10.

Further, as described above, the abnormal sound inspection device 10 has a function of checking the abnormal sound of the workpiece 1 during the conveyance of the workpiece 1, and the workpiece 1 is checked for the abnormal sound during the conveyance of the abnormal sound inspection device 10.

The workpiece 1 is inspected by the first visual inspection device 50A on three of the six faces of the workpiece 1. When the inspection is completed, the workpiece 1 is transported from the first visual inspection device 50A to the second visual inspection device 50B by the first conveyance device 80.

The workpiece 1 is inspected by the second visual inspection device 50B for the remaining three faces of the six faces of the workpiece 1. When the inspection is completed, the workpiece 1 is transported from the second visual inspection device 50B to another device (for example, a packaging device or a storage device) disposed on the downstream side.

When the workpiece is inspected by the second visual inspection device 50B, the visual inspection of the next workpiece 1 is performed by the first visual inspection device 50A. At this time, the abnormal sound inspection device 10 and the seal attaching device 40 further perform the abnormal sound inspection and the seal attaching process of the next workpiece 1.

[Abnormal sound inspection device 10]
FIG. 2 is a perspective view showing the abnormal sound inspection device 10 and the seal attaching device 40. As shown in FIG. 2, the abnormal sound inspection device 10 includes a base 11 and a robot arm portion 12 provided on the base 11. The robot arm portion 12 has an arm portion 21 having a multi-joint structure and a hand portion 31 (holding portion) provided at a front end of the arm portion 21.

The arm portion 21 has a base portion 22 that is rotatably mounted on the base 11 about the Z-axis, and an upper arm portion 23 that is bendably mounted to the base portion 22. Further, the arm portion 21 has a forearm portion 24 that is bendably attached to the upper arm portion 23, and a wrist portion 25 that is bendably attached to the forearm portion 24. The hand 31 is rotatably attached to the wrist portion 25 so as to be rotatable about the axis in the longitudinal direction of the wrist portion 25.

The arm portion 21 can be held by the hand 31 by the turning operation of the base portion 22, the bending operation of the upper arm portion 23, the bending operation of the forearm portion 24, the bending operation of the wrist portion 25, and the rotation of the hand portion 31. The workpiece 1 of 31 is free to move in three dimensions. Further, the arm portion 21 can change the posture of the hand 31 (and the workpiece 1 held by the hand 31) to an arbitrary posture by the above-described respective operations.

Further, the arm portion 21 may have any structure (for example, the upper arm portion 23 may be omitted) as long as it is at least freely controllable for the movement of the hand 31 (that is, the conveyance of the workpiece 1 held by the hand 31). .

FIG. 3 is an enlarged view showing the hand 31. 2 and 3, the hand 31 has a hand body 32 rotatably attached to the wrist portion 25, and a first chuck mechanism 33 and a second chuck mechanism 34, which are disposed on the hand body 32. . Further, the hand 31 is provided with a sound detecting unit 35 that detects the sound of the workpiece 1.

The first chuck mechanism 33 and the second chuck mechanism 34 are provided to the hand body 32 so as to be orthogonal to each other. The first chuck mechanism 33 can sandwich the two opposite side faces 5 of the four side faces 5 of the workpiece 1 from both sides. On the other hand, the second chuck mechanism 34 can sandwich the other two side faces 5 of the four side faces 5 of the workpiece 1 from both sides.

The hand 31 can hold and disengage the workpiece 1 by the first chuck mechanism 33 and the second chuck mechanism 34.

Further, the hand 31 is not limited to the chuck mechanisms 33 and 34 as long as it can hold and disengage the workpiece 1, and may have any configuration (for example, the workpiece 1 may be held by suction). .

Each of the arm portion 21 and the hand portion 31 has various drive systems such as a motor, and the drive system is controlled by the control unit 13 (see FIG. 4) to control the movement of the arm portion 21 and the hand portion 31.

The sound detecting unit 35 detects the sound generated from the workpiece 1 based on the movement (transport) of the workpiece 1 , the change in posture (including rotation), and the like. The sound detecting unit 35 can convert (detect) the sound generated in the workpiece 1 into an electric signal, and amplify the signal to output it to the control unit 13 (see FIG. 4).

Here, for example, when the workpiece 1 is moved (transported) or the posture of the workpiece 1 is changed in a state where foreign matter is mixed into the inside of the workpiece 1, there is a case where foreign matter moves inside the workpiece 1 and an abnormal sound is generated. In addition, the foreign matter is, for example, a screw that is detached from the internal electronic component in the workpiece 1 , a chip that is partially damaged by the electronic component, and a dirt that is mixed into the workpiece 1 from the outside.

Further, for example, when the workpiece 1 is moved (transferred) or the posture of the workpiece 1 is changed in a state where the connector at the front end of the cable is detached inside the workpiece 1, a cable or a connector moves in the workpiece 1 and A situation in which an abnormal sound is produced.

In the abnormal sound inspection apparatus 10 of the present embodiment, the abnormality sound generated in various situations as described above is detected by the sound detecting unit 35. In the present embodiment, the abnormal sound means that the normal workpiece 1 is moved (transported) by the robot arm portion 12 and the posture does not change, but the abnormal workpiece 1 (the foreign matter is mixed and the connector is detached). When the robot arm portion 12 is moved (transferred) and the posture is changed, the sound is generated.

In the present embodiment, the sound detecting unit 35 includes an AE (Acoustic Emission) sensor, and is disposed so as to be in contact with the workpiece 1 while the workpiece 1 is held by the hand 31. The AE sensor has a piezoelectric element (for example, a PZT (Piezoelectric Transducer)), and the AE sound wave propagating in the casing 2 of the workpiece 1 is converted into an electric signal by the piezoelectric element.

The sound detecting unit 35 is disposed at a position close to the center of the workpiece 1 held by the hand 31 in order to appropriately detect the abnormal sound regardless of which position is generated in the workpiece 1. On the other hand, when the area where the abnormal sound is likely to be generated in the workpiece 1 is known in advance (for example, depending on the size of the screw, the connector, etc.), the sound detecting unit 35 may be disposed at a position corresponding to the area.

4 is a block diagram showing the electrical configuration of the abnormal sound inspection device 10. As shown in FIG. 4, the abnormal sound inspection device 10 includes a control unit 13, a storage unit 14, and a communication unit 15, in addition to the mechanical arm unit 12 and the sound detection unit 35.

The control unit 13 includes a CPU (Central Processing Unit) or the like. The control unit 13 performs various calculations based on various programs stored in the storage unit 14, and collectively controls each unit of the abnormal sound inspection device 10.

Typically, the control unit 13 moves the hand 31 by moving the hand 31 in a state in which the workpiece 1 is held by the arm portion 21, and detects the sound of the workpiece 1 when the workpiece 1 is conveyed by the sound detecting unit 35. Then, the control unit 13 checks the abnormal sound generated from the workpiece 1 based on the detected sound signal. Further, details of the processing of the control unit 13 will be described below.

The memory unit 14 includes a non-volatile memory in which various programs or various data necessary for the processing of the control unit 13 are stored, and a volatile memory used as a work area of the control unit 13. The above program can be read from a portable recording medium such as a semiconductor memory or a compact disc, or can be downloaded from a server device on the network.

The communication unit 15 communicates with other devices in the production line by wire or wirelessly.

[seal attachment device 40]
Referring to Fig. 2, the seal attaching device 40 includes a base 41 and a robot arm portion 42 provided on the base 41. The robot arm portion 42 has an arm portion 43 having a multi-joint structure and a work hand portion 44 provided at a front end of the arm portion 43.

Further, in the robot arm portion 42 of the seal attaching device 40 and the robot arm portion 12 of the abnormal sound detecting device 10, the arm portions 43 and 21 have basically the same configuration and are provided on the arm portions 43, 21 The composition of the hands 44, 31 at the front end is different. In this regard, the robot arm portions of the first visual inspection device 50A, the first transport device 80, the second visual inspection device 50B, and the second transport device 90 are also the same.

The arm portion 43 has a base portion 45 that is rotatably mounted on the base 41 about the Z-axis, and an upper arm portion 46 that is bendably mounted to the base portion 45. Further, the arm portion 43 has a forearm portion 47 that is bendably attached to the upper arm portion 46, and a wrist portion 48 that is bendably attached to the forearm portion 47. The work hand portion 44 is rotatably attached to the wrist portion 25 so as to be rotatable about the shaft in the longitudinal direction of the wrist portion 25.

The work hand portion 44 can take out the seal member from the seal accommodating portion (not shown), and can attach the seal member to the workpiece from the upper side while the workpiece 1 is held by the hand portion 31 of the abnormal sound inspection device 10. Side 5 of 1.

Further, although not shown, the seal attaching device 40 has a control unit that integrally controls each part of the seal attaching device 40, and a memory unit that stores various types of processing required for the control unit. Program or data; and a communication department that communicates with other devices.

[Appearance inspection device 50]
FIG. 5 is a perspective view showing the visual inspection device 50 (the first visual inspection device 50A or the second visual inspection device 50B). The first visual inspection device 50A and the second visual inspection device 50B collectively inspect the appearance of the workpiece 1 in a coordinated manner. The first visual inspection device 50A and the second visual inspection device 50B have basically the same configuration.

The first visual inspection device 50A is responsible for visual inspection of the total surface 3 of the front surface 3, the first side surface 5a, and the second side surface 5b of the six faces of the casing 2 of the workpiece 1 (the three surfaces are adjacent to each other). On the other hand, the second visual inspection device 50B is responsible for the visual inspection of the total of three faces of the remaining three faces, that is, the back face 4, the third side face 5c, and the fourth side face 5d (the faces are adjacent to each other).

In the first visual inspection device 50A, the front surface 3 is set to the upper side for inspection, and in the second visual inspection device 50B, the rear surface 4 is set to the upper side for inspection. The first visual inspection device 50A and the second visual inspection device 50B are attached to the respective surfaces of the workpiece 1, for example, to check whether there is no abnormality in appearance such as damage (scratches, dents) or streaks.

Further, the appearance abnormality of the inspection by the visual inspection device 50 is not limited to damage or streaks. Typically, the abnormality in appearance may be any abnormality as long as it is an abnormality in the appearance of the normal workpiece 1 which does not exist.

The visual inspection device 50 includes a base 51 , a mounting table 52 of the workpiece 1 , a first robot arm portion 60 , and a second robot arm portion 70 .

The first robot arm portion 60 of the first visual inspection device 50A is responsible for scanning of the front surface 3 and scanning of the second side surface 5b. On the other hand, the second robot arm portion 70 of the first visual inspection device 50A is responsible for scanning of the first side face 5a and scanning of the second side face 5b.

Further, the first robot arm portion 60 of the second visual inspection device 50B is responsible for scanning of the back surface 4 and scanning of the fourth side surface 5d. On the other hand, the second robot arm portion 70 of the second visual inspection device 50B is responsible for scanning of the third side face 5c and scanning of the fourth side face 5d.

The first robot arm portion 60 and the second robot arm portion 70 are basically the same configuration.

The first robot arm portion 60 has a first arm portion 61 having a multi-joint structure and a first scanning portion 62 provided at a front end of the first arm portion 61. Similarly, the second robot arm portion 70 has a second arm portion 71 having a multi-joint structure and a second scanning portion 72 provided at a front end of the second arm portion 71.

The first arm portion 61 (second arm portion 71) has a base portion 63 (base portion 73) rotatably attached to the base 51 about the Z axis, and an upper arm portion 64 (upper arm portion 74) which is bendably mounted At the base 63 (base portion 73).

Further, the first arm portion 61 (second arm portion 71) has a forearm portion 65 (forearm portion 75) that is bendably attached to the upper arm portion 64 (upper arm portion 74) and a wrist portion 66 (wrist portion 76). It is bendably attached to the forearm portion 65 (the forearm portion 75). The first scanning unit (second scanning unit 72) is attached to the arm portion 66 (the wrist portion 76) by being rotatable (rotating about the axis in the longitudinal direction of the wrist portion).

The first arm portion 61 (the second arm portion 71) can be rotated by the base portion 63 (base portion 73), the bending operation of the upper arm portion 64 (the upper arm portion 74), the bending operation of the forearm portion 65 (the forearm portion 75), and the wrist. The bending operation of the portion 66 (the wrist portion 76) and the rotation operation of the first scanning portion 62 (the second scanning portion 72) cause the first scanning portion 62 (the second scanning portion 72) to freely move in a three-dimensional space. Further, the first arm portion 61 (second arm portion 71) can change the posture of the first scanning portion 62 (second scanning portion 72) to an arbitrary posture by the above-described respective operations.

In addition, the first arm portion 61 (second arm portion 71) may have any structure as long as it can freely control the movement of the first scanning portion 62 (second scanning portion 72) (for example, the upper arm may be omitted) unit).

The first scanning unit 62 has a support member 69 rotatably attached to the arm portion 66, a first linear camera 67 fixed to the support member 69, and a first light-emitting portion 68 fixed to the support member 69. Similarly, the second scanning unit 72 has a support member 79 rotatably attached to the wrist portion 76, a second linear camera 77 fixed to the support member 79, and a second light-emitting portion 78 fixed to the support member 79. .

The first linear camera 67 (second linear camera 77) includes a plurality of imaging elements arranged in one direction and various optical lenses such as an imaging lens. The first linear camera 67 (the second linear camera 77) is moved in the direction orthogonal to the one direction (the direction in which the imaging elements are arranged) by the first arm portion 61 (the second arm portion 71), and is The specific surface of the casing 2 of the workpiece 1 is imaged to acquire an image, and the image is output to the control unit 53 (see FIG. 9).

The first light-emitting portion 68 (second light-emitting portion 78) has a shape that is long in the above-described one direction (the direction in which the imaging elements are arranged in the linear camera). The first light-emitting portion 68 (second light-emitting portion 78) includes, for example, various light-emitting bodies such as an LED (Light Emitting Diode) and a white light bulb. The first light-emitting unit 68 (second light-emitting unit 78) is integrally moved together with the first linear camera 67 (second linear camera 77) by the first arm unit 61 (second arm unit 71), and is linear to the first linear unit The camera 67 (the second linear camera 77) irradiates light to the portion where the imaging is performed.

The first scanning unit 62 (second scanning unit 72) is in a state of being kept at a fixed distance from the specific surface when moving in the scanning direction on the specific surface of the workpiece 1, and is parallel to the specific surface. mobile.

The first scanning unit 62 (second scanning unit 72) adjusts the scanning direction by the first arm portion 61 (second arm portion 71). Further, the first scanning unit 62 (second scanning unit 72) adjusts the first linear camera 67 (second linear camera 77) with respect to the casing 2 of the workpiece 1 by the first arm portion 61 (second arm portion 71). The imaging angle of the specific surface and the light irradiation angle by the first light-emitting portion 68 (second light-emitting portion 78).

7 and 8 are views showing the imaging angle of the linear camera and the light irradiation angle of the light-emitting portion.

In the example shown in FIG. 7, the imaging angle of the first linear camera 67 (second linear camera 77) is set to 90°, and the light irradiation angle of the first light-emitting unit 68 (second light-emitting unit 78) is set. An example of a case of 30°. On the other hand, in the example shown in FIG. 8, the imaging angle of the first linear camera 67 (second linear camera 77) is set to 60°, and the first light-emitting unit 68 (second light-emitting unit 78) is used. An example when the light irradiation angle is set to 60°.

In the first embodiment, as shown in FIG. 7, the imaging angle of the first linear camera 67 (second linear camera 77) is set to 90°, and the first light-emitting unit 68 (second light-emitting unit 78) is used. When the irradiation angle is set to 30°, the specific surface is scanned by the first scanning unit 62 (second scanning unit 72). Then, the imaging angle of the first linear camera 67 (second linear camera 77) is set to 60°, and the irradiation angle of the first light-emitting unit 68 (second light-emitting unit 78) is set to 60°, and the first scanning is performed. The portion 62 (the second scanning portion 72) scans a specific surface. In other words, in the present embodiment, the imaging angle of the first linear camera 67 (second linear camera 77) and the irradiation angle of the first light-emitting portion 68 (second light-emitting portion 78) are changed to the same region of the workpiece 1. Scan.

Further, as shown in FIG. 7 and FIG. 8, in the present embodiment, the angle between the first linear camera 67 (second linear camera 77) and the first light-emitting portion 68 (second light-emitting portion 78) with respect to a specific plane is shown. Change in one. On the other hand, the angle between the first linear camera 67 (second linear camera 77) and the first light-emitting portion 68 (second light-emitting portion 78) with respect to a specific surface can be individually adjusted.

In the following description, the imaging angle of the first linear camera 67 (the second linear camera 77) at the time of the first scanning is referred to as a first imaging angle (90° in the present embodiment), and the second scanning is performed. The imaging angle of the first linear camera 67 (second linear camera 77) at this time is referred to as a second imaging angle (60° in the present embodiment).

In the same manner, the irradiation angle of the first light-emitting portion 68 (second light-emitting portion 78) at the time of the first scanning is referred to as a first irradiation angle (30° in the present embodiment), and the second scanning is performed. The irradiation angle of the first light-emitting portion 68 (second light-emitting portion 78) is referred to as a second irradiation angle (60° in the present embodiment).

In addition, the respective values of the first imaging angle, the second imaging angle, the first irradiation angle, and the second irradiation angle can be appropriately changed. Typically, these values are appropriately set depending on the material of the casing 2 of the workpiece 1 and the type of abnormality (for example, damage, tape marks, and the like) to be detected during the visual inspection.

FIG. 9 is a block diagram showing an electrical configuration of the visual inspection device 50 (the first visual inspection device 50A or the second visual inspection device 50B). As shown in FIG. 9 , the visual inspection device 50 includes a control unit 53 , a storage unit 54 , and a communication unit 55 in addition to the first robot arm portion 60 and the second robot arm portion 70 .

The control unit 53 includes a CPU (Central Processing Unit) or the like, and performs various calculations based on various programs stored in the storage unit 54, and collectively controls each unit of the visual inspection device 50.

The control unit 13 is configured by the visual inspection device 50, and the first arm unit 61 moves the first scanning unit 62 in the scanning direction on the specific surface of the workpiece 1, and the workpiece 1 is specified by the first linear camera 67. The surface is photographed, and the first scanning unit 62 scans the specific surface of the workpiece 1.

Further, when the control unit 13 scans the specific surface of the workpiece 1 by the first scanning unit 62, the second arm unit 71 moves the second scanning unit 72 on the other specific surface of the workpiece 1 in the scanning direction. The second linear camera 77 images the other specific surface of the workpiece 1, and the second scanning unit 72 scans the other specific surface. The details of the processing by the control unit 53 will be described below.

In the example shown in FIG. 9 , the first robot arm portion 60 and the second robot arm portion 70 are controlled by one control unit 53 . However, the first robot arm portion 60 and the second robot arm portion 70 may be used. They are controlled by different control units.

The memory unit 54 includes a non-volatile memory in which various programs or various data necessary for the processing of the control unit 53 are stored, and a volatile memory used as a work area of the control unit 53. The above program can be read from a portable recording medium such as a semiconductor memory or a compact disc, or can be downloaded from a server device on the network.

The communication unit 55 communicates with other devices in the production line by wire or wirelessly.

[First transport device 80]
As shown in FIG. 1, the first conveying device 80 includes a base 81 and a robot arm portion 82 provided on the base 81. The robot arm portion 82 has an arm portion 83 having a multi-joint structure and a hand portion 84 provided at a front end of the arm portion 83.

The configuration of the arm portion 83 is the same as that of the arm portions 21, 61, and 71 of the robot arm portion in the abnormal sound inspection device 10 and the visual inspection device 50. The hand 84 has a chuck mechanism that can sandwich the two side faces 5 of the four side faces 5 of the workpiece 1 from both sides.

The robot arm portion 82 of the first conveying device 80 holds the workpiece 1 placed on the mounting table 52 of the first visual inspection device 50A, and conveys the workpiece 1 while turning the workpiece 1 upside down, and places the workpiece 1 on the second. The mounting table 52 of the visual inspection device 50B.

In addition, although the illustration is omitted, the first transfer device 80 includes a control unit that collectively controls the first transfer device 80, and a memory unit that stores various programs, materials, and the like required for the processing of the control unit, and communication. Department, which communicates with other devices in the production line.

[Second transport device 90]
As shown in FIG. 1, the second conveying device 90 includes a base 91 and a robot arm portion 92 provided on the base 91. The robot arm portion 92 has an arm portion 93 having a multi-joint structure and a hand portion 94 provided at a front end of the arm portion 93.

The mechanical configuration and the electrical configuration of the second conveying device 90 are the same as those of the abnormal sound detecting device 10 except that the sound detecting unit 35 is not provided.

The robot arm portion 92 of the second transport device 90 holds the workpiece 1 placed on the mounting table 52 of the second visual inspection device 50B, and transports it to another device (packaging device, storage device) provided on the downstream side to advance the workpiece 1 Go to the next step.

In addition, the second conveyance device 90 notifies the abnormality sound inspection device 10, the first visual inspection device 50A, and the second appearance device that the workpiece 1 to be conveyed is good or defective.

The robot arm portion 92 of the second conveying device 90 advances the workpiece 1 determined to be good among all of the three devices 10, 50A, and 50B to the next step. On the other hand, the workpiece 1 that is determined to be defective in at least one of the three devices 10, 50A, and 50B does not advance the workpiece 1 to the next step, but transports the workpiece 1 to the defective product storage. Storage rack (not shown).

Further, the workpiece 1 determined to be defective may be disposed in a different area of the storage rack for each cause of the defect.

<Action Description>
Next, the processing of the inspection system 100 will be described.

[Treatment of abnormal sound inspection device 10]
In the description herein, first, the processing of the abnormal sound detecting device 10 will be described. FIG. 10 is a flowchart showing the processing of the control unit 13 of the abnormal sound inspection device 10.

First, the control unit 13 of the abnormal sound inspection device 10 controls the arm portion 21 of the robot arm portion 12 to move the hand portion 31 to the holding position of the workpiece 1 (step 101). Then, the control unit 13 holds the workpiece 1 by the hand 31 (step 102). When the workpiece 1 is held by the hand 31, as shown in FIG. 3, the sound detecting portion 35 comes into contact with the vicinity of the center of the workpiece 1.

Next, the control unit 13 starts the process of acquiring the sound signal from the sound detecting unit 35 (step 103). Then, the control unit 13 starts the abnormal sound check of the workpiece 1 based on the detected sound signal (step 104). Furthermore, the details of the abnormal sound check will be described below.

Next, the control unit 13 rotates the arm portion 21 in the clockwise direction, and rotates the hand 31 holding the workpiece 1 in the clockwise direction (moving in the first direction), and the workpiece 1 is attached to the seal attaching device 40. The processing position is transferred (step 105).

Further, when the arm portion 21 is rotated and the workpiece 1 is conveyed, the control portion 13 changes the posture of the workpiece 1 by the bending operation of each portion of the arm portion 21 and the rotation operation of the hand portion 31 with respect to the arm portion 21. It is any position for attaching a seal. In addition, the posture of the workpiece 1 at this time is a posture in which the workpiece 1 facing the specific side surface 5 of the workpiece 1 is erected (see FIG. 2).

When the workpiece 1 is transported to the processing position of the seal attaching device 40, the control unit 13 stops the movement of the robot arm unit 12 and waits while holding the workpiece 1 by the hand 31 (step 106). In this state, a seal member is attached to the side surface 5 on the upper side of the workpiece 1 by the seal attaching device 40.

Next, the control unit 13 determines whether or not the processing of the seal attaching device 40 is completed (step 107). Further, when the processing of the seal attaching device 40 is completed, a signal indicating the completion is transmitted from the seal attaching device 40, and the signal is received by the abnormal sound detecting device 10.

When the processing of the seal attaching device 40 is completed (YES in step 107), the control unit 13 proceeds to step 108. In step 108, the control unit 13 rotates the arm portion 21 in the counterclockwise direction, and rotates the hand 31 holding the workpiece 1 in the counterclockwise direction (moving in the second direction) to attach the workpiece 1 to the seal member. The device 40 is transported to the first visual inspection device 50A. Then, the control unit 13 detaches the workpiece 1 from the hand 31, and places the workpiece 1 on the mounting table 52 of the first visual inspection device 50A.

Further, when the arm portion 21 is rotated in the counterclockwise direction to convey the workpiece 1, the control portion 13 moves the workpiece by the bending operation of each portion of the arm portion 21 and the rotation operation of the hand portion 31 with respect to the arm portion 21. The posture of 1 is changed to any posture for placing the workpiece 1 on the mounting table 52. In addition, the posture of the workpiece 1 at this time is a posture in which the front surface 3 of the workpiece 1 faces upward.

When the workpiece 1 is placed on the mounting table 52 and the workpiece 1 is detached from the hand 31, the sound detecting unit 35 is separated from the workpiece 1. At this time, the control unit 13 ends the process of acquiring the sound signal from the sound detecting unit 35 (step 109). Then, the control unit 13 ends the abnormal sound check of the workpiece 1 based on the sound signal (step 110).

Next, the control unit 13 determines whether or not an abnormal sound is detected during the abnormal sound check (step 111). When the abnormal sound is not detected (NO in step 111), the control unit 13 transmits the information indicating that the workpiece 1 is a good product to the second transport device 90 together with the identification information of the workpiece 1 (step 112). . On the other hand, when the abnormal sound is detected (YES in step 111), the control unit 13 transmits the information indicating that the workpiece 1 is a defective product to the second transport device 90 together with the identification information of the workpiece 1 (step 113). ).

The workpiece 1 that has been determined to be defective in the abnormal sound inspection is stored in the storage rack for the defective product storage by the second transport device 90 after the visual inspection of the first visual inspection device 50A and the second visual inspection device 50B. Therefore, the defective product is distinguished from the good product.

Further, in the present embodiment, the workpiece 1 that has been judged to be good or bad in the abnormal sound inspection is distinguished by the second conveying device 90, but the division may be performed by the robot arm portion 12 itself of the abnormal sound inspection device 10. . In this case, a storage rack for storing defective products is provided in the operation region of the arm portion 12 of the abnormal sound inspection device 10.

(Abnormal sound check method)
Next, a method of checking the abnormal sound based on the sound signal will be specifically described. As described above, when the workpiece 1 is moved (transferred) or the posture of the workpiece 1 is changed in various states such as a state in which the foreign matter is mixed into the workpiece 1 and a state in which the connector inside the workpiece 1 is detached, an abnormal sound is generated. The situation.

On the other hand, in the case of the normal workpiece 1, even if the workpiece 1 is moved (transported) or the posture of the workpiece 1 is changed, such an abnormal sound does not occur. Therefore, typically, the abnormal sound is checked by comparing the waveform of the sound signal of the workpiece 1 to be inspected with the waveform of the sound signal of the normal workpiece 1.

Here, in the waveform of the sound signal of the abnormal workpiece 1, the size of the sound indicating the specific frequency band of the abnormal sound is larger than the waveform of the sound signal of the normal workpiece 1. For example, in the case where the workpiece 1 having the screw is mixed, an experimental result obtained by increasing the value represented by the sound signal at a frequency of 1.5 kHz, 3 kHz, 6 kHz, 12 kHz, and 24 kHz can be obtained.

That is, in the workpiece 1 in which the screw is mixed, the screw collides with the inner wall of the workpiece 1 or other members in response to the movement (transport) or posture change of the workpiece 1, and at this time, the frequency is 1.5 kHz, 3 kHz, 6 kHz, Abnormal sound at 12 kHz, 24 kHz. Further, the sound of the specific frequency band of the abnormal sound is based on the movement (transport) speed of the workpiece 1, the speed at which the posture of the workpiece 1 changes, the material of the casing 2 of the workpiece 1, the structure inside the workpiece 1, and the mixing into the workpiece 1 The type of foreign matter varies.

When the frequency band of the abnormal sound is known in advance, the sound signal of a specific frequency band corresponding to the abnormal sound (for example, FFT (Fast Fourier Transform)) may be extracted from all the sound signals detected by the sound detecting unit 35. . Further, it is also possible to determine whether or not an abnormal sound is generated based on the sound signal of the specific frequency band. Further, in this case, the sound signal of the specific frequency band may be integrated, and whether or not an abnormal sound is generated based on the integrated value may be determined.

For example, when an abnormal sound having a frequency of 1.5 kHz, 3 kHz, 6 kHz, 12 kHz, or 24 kHz is generated, an acoustic signal of a frequency band of 1 kHz to 30 kHz is extracted from the sound signal detected by the sound detecting unit 35. Further, it is also possible to determine whether or not an abnormal sound is generated based on the sound signal of the frequency band of 1 kHz to 30 kHz. Further, in this case, for example, an audio signal in a frequency band of 1 kHz to 30 kHz may be integrated, and whether or not an abnormal sound is generated based on whether or not the integral value exceeds a threshold value may be determined.

(handling of the workpiece 1 in the clockwise direction, counterclockwise direction, etc.)
As described above, when the workpiece 1 is conveyed to the seal attaching device 40, the workpiece 1 is rotated in the clockwise direction and transported. On the other hand, when the workpiece 1 is conveyed to the first visual inspection device 50A by the self-sealing attachment device 40, the workpiece 1 is rotated counterclockwise and conveyed.

Here, there is a case where an abnormal sound is not generated when the workpiece 1 is conveyed in the clockwise direction, but an abnormal sound is generated when the workpiece 1 is conveyed in the counterclockwise direction. On the other hand, there is a case where an abnormal sound is not generated when the workpiece 1 is conveyed in the counterclockwise direction, but an abnormal sound is generated when the workpiece 1 is conveyed in the clockwise direction.

For example, in the case of the workpiece 1 in which the foreign matter is mixed, in the clockwise direction and the counterclockwise direction, only one of the foreign objects moves in the workpiece 1 depending on the position of the foreign matter inside the workpiece 1, and There is a case where only one party generates an abnormal sound.

On the other hand, in the present embodiment, since the workpiece 1 is conveyed in both the clockwise direction and the counterclockwise direction, the abnormal sound can be appropriately detected.

In addition, when the workpiece 1 is conveyed to the seal attaching device 40 and the workpiece 1 is transferred to the first visual inspection device 50A from the seal attaching device 40, the posture of the workpiece 1 changes.

Here, there is a case where an abnormal sound is not generated even when the workpiece 1 is simply conveyed, but an abnormal sound is generated when the posture of the workpiece 1 changes. For example, in the case where the workpiece 1 having foreign matter is mixed, depending on the position of the foreign matter inside the workpiece 1, there is a case where the foreign matter first moves inside the casing 1 due to a change in the posture of the workpiece 1, and an abnormal sound is generated for the first time.

Therefore, as in the present embodiment, the posture of the workpiece 1 is changed during the conveyance of the workpiece 1, and the abnormal sound can be further appropriately detected.

[Processing of Appearance Inspection Device 50]
Next, the processing of the first visual inspection device 50A and the second visual inspection device 50B will be described. In addition, the processing of the first visual inspection device 50A and the processing of the second visual inspection device 50B are basically the same except for the difference in the inspection surface.

Therefore, the processing of the first visual inspection device 50A will be representatively described below unless otherwise specified. In the process of the second visual inspection device 50B, the front surface 3 is referred to as the rear surface 4, the first side surface 5a is referred to as the third side surface 5c, and the second side surface 5b is referred to as the fourth side surface 5d. can.

FIG. 11 is a flowchart showing the processing of the control unit 53 of the visual inspection device 50. First, the control unit 53 of the first visual inspection device 50A determines whether or not the workpiece 1 has been placed on the mounting table 52 (step 201).

The determination as to whether or not the workpiece 1 has been placed is based on a signal transmitted from the abnormal sound inspection device 10. For example, when the abnormal sound inspection device 10 has placed the workpiece 1 on the mounting table 52, a signal indicating that the workpiece 1 has been placed is transmitted from the abnormal sound inspection device 10 to the first visual inspection device 50A.

In the case of the second visual inspection device 50B, when the first transport device 80 has placed the workpiece 1 on the mounting table 52, the signal indicating that the workpiece 1 has been placed is transmitted from the first transport device 80 to The second visual inspection device 50B.

When the workpiece 1 is placed on the mounting table 52 (YES in step 201), the control unit 53 controls the first robot arm portion 60 and the second robot arm portion 70 to face the front surface 3 and the first side surface 5a of the casing 2. The total surface of the second side surface 5b is scanned (step 202). Further, the scanning of the three faces will be described below with reference to Figs. 12 to 19 .

Next, based on the images obtained by the first linear camera 67 and the second linear camera 77, the control unit 53 determines whether or not an abnormality in appearance (good or bad of the workpiece 1) is detected in the workpiece 1 (step 203).

For example, when a damage or a band having a size equal to or larger than one fixed (such as the size of the user at a glance) is detected in the three faces, the control unit 53 determines that an abnormality in appearance is detected (step 203). Yes)).

Further, when a damage of a specific number or more of a fixed number or less (such as a size that the user does not immediately recognize even if it is seen) is detected in the three faces, the control unit 53 also determines that the appearance is detected. The exception is (YES in step 203).

When the abnormality of the appearance is not detected (NO in step 203), the control unit 53 transmits the information indicating that the workpiece 1 is good to the second conveyance device 90 together with the identification information of the workpiece 1 (step 204).

On the other hand, when it is detected that the appearance is abnormal (YES in step 203), the control unit 53 transmits the information indicating that the workpiece 1 is a defective product to the second conveying device 90 together with the identification information of the workpiece 1. Step 205).

The workpiece 1 that is determined to be defective in the first visual inspection device 50A is stored in the storage rack for defective product storage by the second transport device 90 after the visual inspection of the second visual inspection device 50B. Good products are separated from good products.

Next, the visual inspection of the first visual inspection device 50A will be specifically described. FIG. 12 is a view showing a locus of scanning by the first scanning unit 62 and the second scanning unit 72 of the first visual inspection device 50A.

In FIG. 12, the solid arrows indicate the trajectories of the scanning by the first scanning unit 62, and the broken arrows indicate the trajectories of the scanning by the second scanning unit 72.

The number from the solid arrow indications 1. to 12. indicates the order in which the first scanning unit 62 scans. Further, the number from the "1" to the "8" in the dotted arrow indicates the order in which the second scanning unit 72 scans.

In addition, in the range of 1. to 12. "1" to "8", any one of notes (1), (2), (1'), (2'), (1"), (2") mark.

The number 1 in () means that the imaging angles of the linear cameras 67 and 77 are set to the first imaging angle (90°) with respect to the specific surface of the workpiece 1, and the illumination angles of the light-emitting portions 68 and 78 are set to 1 irradiation angle (30°) (refer to Fig. 7). Further, the number 2 in () means that the imaging angles of the linear cameras 67 and 77 are set to the second imaging angle (60°) with respect to the specific surface of the workpiece 1, and the illumination angles of the light-emitting portions 68 and 78 are set. It is the second irradiation angle (60°) (refer to Fig. 8).

No mark is placed on the right side of the number 1 or 2 in () or the note "'" or the note "". In the case where no mark is noted on the right side of the number 1 or 2 in (), the number 1 or 2 indicates the shooting angle and the irradiation angle with respect to the front side 3.

Further, in the case where "'" is attached to the upper right of the number 1 or 2 in (), the number 1 or 2 indicates the imaging angle and the irradiation angle with respect to the first side face 5a. Further, in the case where "" is attached to the upper right of the number 1 or 2 in the (), the number 1 or 2 indicates the imaging angle and the irradiation angle with respect to the second side surface 5b.

For example, a case where the symbol 11 (2") is attached to the solid arrow is described as an example. In this case, it is a solid arrow, and thus the trajectory of scanning by the first scanning unit 62 is shown. Reference numeral 11 denotes the eleventh scan of the trajectory scanned by the first scanning unit 62. Further, (2") means that the imaging angle of the first linear camera 67 of the first scanning unit 62 is opposite to the second side. 5b is set to the second imaging angle (60°), and the irradiation angle of the first light-emitting unit 68 of the first scanning unit 62 is set to the second irradiation angle (60°) with respect to the second side surface 5b.

In FIG. 12, the front surface 3, the first side surface 5a, and the second side surface 5b are described as "upper", "lower", "left", and "right", respectively. In the description of FIG. 12, the terms "upper", "lower", "left", and "right" are used to indicate the directions shown in FIG. 12 on the front surface 3, the first side surface 5a, and the second side surface 5b. (The same applies to the following Figs. 13 to 19).

Furthermore, the upper and lower directions of the front surface 3 and the left and right directions are orthogonal to each other in the horizontal plane in the earth coordinate system. On the other hand, the upper side of the first side face 5a and the second side face 5b are in the up-down direction of the earth coordinate system, and the left-right direction of the first side face 5a and the second side face 5b is a direction in the horizontal plane in the earth coordinate system.

As shown in Fig. 12, the scanning of the front surface 3 of the workpiece 1 is performed by the first scanning unit 62 (refer to the solid arrow in the front surface 3), and the scanning of the first side surface 5a of the workpiece 1 is performed by the second scanning unit 72 ( Refer to the dotted arrow in the first side 5a). On the other hand, the scanning of the second side face 5b is performed in a coordinated manner by the first scanning unit 62 and the second scanning unit 72 (refer to solid arrows and broken arrows in the second side face 5b).

In the present embodiment, the same region of the workpiece 1 is scanned a plurality of times at different imaging angles (first imaging angle, second imaging angle) and different irradiation angles (first irradiation angle, second irradiation angle). Further, in the present embodiment, two patterns (see FIGS. 7 and 8) are used as the imaging angle and the irradiation angle, but three or more patterns may be used as the imaging angle and the irradiation angle.

For example, as an example, in 1. (1) and 4. (2), the first scanning unit 62 scans the same area of the front surface 3 (the left side of the front surface 3) twice at different imaging angles and different irradiation angles. . Further, for example, in the case of "1" (1') and "4" (2'), the same area (the left side of the first side face 5a) of the first side face 5a is different by the second scanning unit 72. The angle of the shot and the different illumination angles are scanned twice.

Further, in the present embodiment, the same region of the workpiece 1 is scanned a plurality of times in different scanning directions (up and down directions, left and right directions). Further, in the present embodiment, two directions of the vertical direction and the left-right direction are used as the scanning direction, and three or more directions may be used as the scanning direction.

Further, in the description of the present embodiment, when the scanning direction is the vertical direction, both of the upper direction and the lower direction are regarded as the same scanning direction. Similarly, if the scanning direction is the left-right direction, both the right direction and the left direction are regarded as the same scanning direction.

For example, in 1. (1), 2. (1), 3. (2), and 4. (2), the front surface 3 of the workpiece 1 is scanned in the vertical direction by the first scanning unit 62. In 5. (1), 8. (1), 9. (2), and 12. (2), the front surface 3 of the workpiece 1 is scanned in the left-right direction by the first scanning unit 62. Further, for example, in the "1" (1'), the "2" (1'), the "3" (2'), and the "4" (2'), the second scanning unit 72 sets the first workpiece 1 The side surface 5a is scanned in the up-and-down direction. In the case of "5" (1') and "6" (2'), the first side surface 5a of the workpiece 1 is moved in the left-right direction by the second scanning unit 72. scanning.

In the second embodiment, the sharing of the first scanning unit 62 and the second scanning unit 72 is performed in accordance with the scanning direction. In other words, the first scanning unit 62 is responsible for scanning in the vertical direction of the second side surface 5b (see 6. (1"), 7. (1"), 10. (2"), and 11. (2")), and 2nd. The scanner unit 72 is responsible for scanning in the left-right direction of the second side face 5b (refer to "7" (1"), "8" (2")).

Here, the width in the left-right direction of the front surface 3, the width in the vertical direction, the width in the left-right direction of the first side surface 5a, and the width in the left-right direction of the second side surface 5b exceed the widths at which the scanning portions 62 and 72 can scan once. Therefore, the scanning of the front surface 3 in the up-down direction and the left-right direction, the scanning in the vertical direction of the first side surface 5a, and the scanning in the vertical direction of the second side surface 5b are performed twice in the same scanning direction (the imaging angle and the irradiation must be performed). Since the angles are different, the scanning is performed four times in the same scanning direction.

On the other hand, the width of the first side face 5a in the up-down direction and the width of the second side face 5b in the up-down direction are the widths at which the scanning portions 62 and 72 can scan one or less times. Therefore, the scanning in the left-right direction of the first side face 5a and the scanning in the left-right direction of the second side face 5b do not need to be performed twice in the same scanning direction (the imaging angle and the irradiation angle must be different, so the scanning is performed in the same scanning direction. Times).

FIG. 13 to FIG. 19 are views showing movements of the first scanning unit 62 and the second scanning unit 72 of the first visual inspection device 50A during scanning. In addition, in FIG. 13 to FIG. 19, only the first light-emitting portion 68 and the second light-emitting portion 78 of the first scanning unit 62 and the second scanning unit 72 are shown in the first view. The illustration of the linear camera 67 and the second linear camera 77 is omitted. Further, in Figs. 13 to 19, the symbols (1), (2), (1'), (2'), (1"), and (2") are used in the same meaning as in Fig. 12.

Referring to Fig. 13(A), first, the control unit 53 controls the first arm portion 61 to move the first scanning unit 62 to the upper left position of the front surface 3 (again, the words above, below, left, and right of the front surface 3) Refer to Figure 12). Then, the control unit 53 sets the imaging angle of the first linear camera 67 with respect to the front surface 3 to the first imaging angle (90°), and sets the irradiation angle of the first light-emitting portion 68 with respect to the front surface 3 to the first irradiation angle (30). °).

At the same time, the control unit 53 controls the second arm portion 71 to move the second scanning unit 72 to the upper left position of the first side face 5a (again, the language of the upper, lower, left, and right sides of the first side face 5a) Refer to Figure 12). Then, the control unit 53 sets the imaging angle of the second linear camera 77 with respect to the first side surface 5a to the first imaging angle (90°), and sets the irradiation angle of the second light-emitting portion 78 with respect to the first side surface 5a to be the first. Irradiation angle (30°).

Next, the control unit 53 turns on the first light-emitting unit 68 of the first scanning unit 62. Then, the control unit 53 moves the first scanning unit 62 in the downward direction (the direction in the horizontal plane in the earth coordinate system) on the front surface 3 of the workpiece 1 by the first arm portion 61, and the first scanning unit 62 is used. The first linear camera 67 captures the front side 3 of the workpiece 1. By the first scanning unit 62, the left side of the front surface 3 of the workpiece 1 is scanned downward in the first imaging angle and the first irradiation angle (see 1. (1) in FIG. 12).

The control unit 53 lights the second light-emitting unit 78 of the second scanning unit 72 simultaneously with the lighting of the first light-emitting unit 68. Then, the control unit 53 moves the second scanning unit 72 in the downward direction (the downward direction in the earth coordinate system) on the first side face 5a of the workpiece 1 by the second arm portion 71, and the second scanning portion 72 is moved by the second scanning portion 72. The second linear camera 77 captures the first side face 5a of the workpiece 1. By the second scanning unit 72, the left side of the first side face 5a of the workpiece 1 is scanned downward in the first imaging angle and the first irradiation angle (see "1" (1') in FIG. 12).

Referring to Fig. 13(B), when the second scanning unit 72 reaches the lower left position of the first side face 5a, the control unit 53 stops the movement of the second scanning unit 72 in the downward direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78. At this time, the first scanning unit 62 has not scanned the front surface 3 of the workpiece 1. Next, the control unit 53 controls the second arm unit 71 to move the second scanning unit 72 in the right direction.

Referring to Fig. 13(C), when the second scanning unit 72 reaches the lower right position of the first side face 5a, the control unit 53 stops the movement of the second scanning unit 72 in the right direction. Next, the control unit 53 turns on the second light-emitting unit 78 of the second scanning unit 72.

Then, the control unit 53 moves the second scanning unit 72 upward in the first side face 5a (upward in the earth coordinate system) by the second arm portion 71, and uses the second scanning unit 72 in the second direction. The linear camera 77 captures the first side face 5a of the workpiece 1. By the second scanning unit 72, the right side of the first side face 5a of the workpiece 1 is scanned upward in the first imaging angle and the first irradiation angle (see "2" (1') in FIG. 12).

When the second scanning unit 72 reaches the lower right position of the first side face 5a, the first scanning unit 62 reaches the lower left position of the front surface 3. When the first scanning unit 62 reaches the lower left position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the downward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the right direction.

Referring to Fig. 13(D), when the first scanning unit 62 reaches the lower right position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the right direction. Next, the control unit 53 turns on the first light-emitting unit 68 of the first scanning unit 62.

Then, the control unit 53 moves the first scanning unit 62 upward in the front surface 3 (the direction in the horizontal plane in the earth coordinate system) by the first arm portion 61, and the first linear camera using the first scanning unit 62 67 Shoot the front side 3 of the workpiece 1. By this, the first scanning unit 62 scans the right side of the front surface 3 of the workpiece 1 in the upward direction at the first imaging angle and the first irradiation angle (see 2. (1) in FIG. 12).

When the first scanning unit 62 reaches the lower right position of the front surface 3, the second scanning unit 72 reaches the upper right position of the first side surface 5a. When the second scanning unit 72 reaches the upper right position of the first side surface 5a, the control unit 53 stops the movement of the second scanning unit 72 in the upward direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78. Then, the control unit 53 causes the second scanning unit 72 to stand by at the upper right position of the first side face 5a.

Referring to Fig. 13(E), when the first scanning unit 62 reaches the upper right position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the upward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68. At this time, the second scanning unit 72 stands by at the upper right position of the first side face 5a.

Referring to Fig. 13 (F), the control unit 53 changes the imaging angle of the first linear camera 67 from the first imaging angle (90°) with respect to the front surface 3 to the second imaging angle (60°) with respect to the front surface 3. . Moreover, the control unit 53 changes the irradiation angle of the first light-emitting unit 68 from the first irradiation angle (30°) with respect to the front surface 3 to the second irradiation angle (60°) with respect to the front surface 3.

At the same time, the control unit 53 changes the imaging angle of the second linear camera 77 from the first imaging angle (90°) with respect to the first side surface 5a to the second imaging angle (60°) with respect to the first side surface 5a. Moreover, the control unit 53 changes the irradiation angle of the second light-emitting unit 78 from the first irradiation angle (30°) with respect to the first side surface 5a to the second irradiation angle (60°) with respect to the first side surface 5a.

Referring to Fig. 14 (G), second, the control unit 53 turns on the first light-emitting portion 68 of the first scanning unit 62. Then, the control unit 53 moves the first scanning unit 62 in the downward direction on the front surface 3 of the workpiece 1 (the direction in the horizontal plane in the earth coordinate system) by the first arm portion 61, and the first scanning unit 62 is used. A linear camera 67 photographs the front side 3 of the workpiece 1. By this, the first scanning unit 62 scans the right side of the front surface 3 of the workpiece 1 in the downward direction at the second imaging angle and the second irradiation angle (see 3. (2) in FIG. 12).

The control unit 53 lights the second light-emitting unit 78 of the second scanning unit 72 simultaneously with the lighting of the first light-emitting unit 68. Then, the control unit 53 moves the second scanning unit 72 in the downward direction (the downward direction in the earth coordinate system) on the first side face 5a of the workpiece 1 by the second arm portion 71, and the second scanning portion 72 is moved by the second scanning portion 72. The second linear camera 77 captures the first side face 5a of the workpiece 1. By the second scanning unit 72, the right side of the first side face 5a of the workpiece 1 is scanned downward in the second imaging angle and the second irradiation angle (see "3" (2') in FIG. 12).

Referring to Fig. 14 (H), when the second scanning unit 72 reaches the lower right position of the first side face 5a, the control unit 53 stops the movement of the second scanning unit 72 in the downward direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78. At this time, the first scanning unit 62 still scans the front surface 3 of the workpiece 1. Next, the control unit 53 controls the second arm unit 71 to move the second scanning unit 72 in the left direction.

Referring to Fig. 14 (I), when the second scanning unit 72 reaches the lower left position of the first side face 5a, the control unit 53 stops the movement of the second scanning unit 72 in the left direction. Next, the control unit 53 turns on the second light-emitting unit 78 of the second scanning unit 72.

Then, the control unit 53 moves the second scanning unit 72 upward in the first side face 5a (upward in the earth coordinate system) by the second arm portion 71, and uses the second scanning unit 72 in the second direction. The linear camera 77 captures the first side face 5a of the workpiece 1. By the second scanning unit 72, the left side of the first side face 5a of the workpiece 1 is scanned upward in the second imaging angle and the second irradiation angle (see "4" (2') in FIG. 12).

When the second scanning unit 72 reaches the lower left position of the first side face 5a, the first scanning unit 62 reaches the lower right position of the front surface 3. When the first scanning unit 62 reaches the lower right position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the downward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the left direction.

Referring to Fig. 14 (J), when the first scanning unit 62 reaches the lower left position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the left direction. Next, the control unit 53 turns on the first light-emitting unit 68 of the first scanning unit 62.

Then, the control unit 53 moves the first scanning unit 62 upward in the front surface 3 (the direction in the horizontal plane in the earth coordinate system) by the first arm portion 61, and the first linear camera using the first scanning unit 62 67 Shoot the front side 3 of the workpiece 1. By the first scanning unit 62, the left side of the front surface 3 of the workpiece 1 is scanned upward in the second imaging angle and the second irradiation angle (see 4. (2) in FIG. 12).

When the first scanning unit 62 reaches the lower left position of the front surface 3, the second scanning unit 72 reaches the upper left position of the first side surface 5a. When the second scanning unit 72 reaches the upper left position of the first side face 5a, the control unit 53 stops the movement of the second scanning unit 72 in the upward direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78.

Referring to Fig. 14 (K), second, the control unit 53 rotates the second scanning unit 72 by the second arm portion 71 so that the second scanning unit 72 is positioned on the left side of the first side face 5a. Thereby, the scanning direction of the second side surface 5b of the second scanning unit 72 is changed from the vertical direction to the left-right direction.

Moreover, at this time, the control unit 53 changes the imaging angle of the second linear camera 77 from the second imaging angle (60°) with respect to the first side surface 5a to the first imaging angle (90°) with respect to the first side surface 5a. . Moreover, the control unit 53 changes the irradiation angle of the second light-emitting unit 78 from the second irradiation angle (60°) with respect to the first side surface 5a to the first irradiation angle (30°) with respect to the first side surface 5a.

When the rotation of the second scanning unit 72 and the change of the imaging angle and the irradiation angle are completed, the first scanning unit 62 reaches the upper left position of the front surface 3. When the first scanning unit 62 reaches the upper left position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the upward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68.

Referring to Fig. 14 (L), when the rotation of the second scanning unit 72 and the change of the imaging angle and the irradiation angle are completed, the control unit 53 turns on the second light-emitting unit 78 of the second scanning unit 72. Then, the control unit 53 moves the second scanning unit 72 in the right direction on the first side face 5a of the workpiece 1 by the second arm portion 71, and captures the workpiece 1 by the second linear camera 77 of the second scanning unit 72. 1 side 5a. By the second scanning unit 72, the first side surface 5a of the workpiece 1 is scanned in the right direction at the first imaging angle and the first irradiation angle (see "5" (1') in FIG. 12).

Referring to FIG. 15(M), when the second scanning unit 72 scans the first side surface 5a in the right direction, the control unit 53 rotates the first scanning unit 62 by the first arm unit 61, and the first scanning unit 62 is positioned on the front surface 3. Top left. Thereby, the scanning direction of the front surface 3 of the 1st scanning part 62 is changed from the up-down direction to the left-right direction.

Moreover, at this time, the control unit 53 changes the imaging angle of the first linear camera 67 from the second imaging angle (60°) with respect to the front surface 3 to the first imaging angle (90°) with respect to the front surface 3. Moreover, the control unit 53 changes the irradiation angle of the first light-emitting unit 68 from the second irradiation angle (60°) with respect to the front surface 3 to the first irradiation angle (30°) with respect to the front surface 3.

When the rotation of the first scanning unit 62 and the change of the imaging angle and the irradiation angle are completed, the second scanning unit 72 scans the first side surface 5a in the right direction.

Referring to FIG. 15(N), when the rotation of the first scanning unit 62 and the change of the imaging angle and the irradiation angle are completed, the control unit 53 turns on the first light-emitting unit 68 of the first scanning unit 62. Then, the control unit 53 moves the first scanning unit 62 in the right direction on the front surface 3 of the workpiece 1 by the first arm unit 61, and the front surface 3 of the workpiece 1 is imaged by the first linear camera 67 of the first scanning unit 62. By the first scanning unit 62, the upper side of the front surface 3 of the workpiece 1 is scanned in the right direction at the first imaging angle and the first irradiation angle (see 5. (1) in FIG. 12).

Referring to Fig. 15(O), when the second scanning unit 72 reaches the right side position of the first side face 5a, the control unit 53 stops the movement of the second scanning unit 72 in the right direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78. At this time, the first scanning unit 62 scans the front surface 3 of the workpiece 1 in the right direction.

Referring to Fig. 15(P), the control unit 53 changes the imaging angle of the second linear camera 77 from the first imaging angle (90°) with respect to the first side surface 5a to the second imaging angle with respect to the first side surface 5a. (60°). Moreover, the control unit 53 changes the irradiation angle of the second light-emitting unit 78 from the first irradiation angle (30°) with respect to the first side surface 5a to the second irradiation angle (60°) with respect to the first side surface 5a.

When the change of the imaging angle and the irradiation angle of the second scanning unit 72 is completed, the first scanning unit 62 reaches the upper right position of the front surface 3.

Referring to Fig. 15 (Q), when the first scanning unit 62 reaches the upper right position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the right direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68.

At this time, the control unit 53 turns on the second light-emitting unit 78 of the second scanning unit 72. Then, the control unit 53 moves the second scanning unit 72 in the left direction on the first side face 5a of the workpiece 1 by the second arm portion 71, and photographs the workpiece 1 by the second linear camera 77 of the second scanning unit 72. 1 side 5a. By the second scanning unit 72, the first side surface 5a of the workpiece 1 is scanned in the left direction at the second imaging angle and the second irradiation angle (see "6" (2') in FIG. 12).

Referring to Fig. 15(R), when the second scanning unit 72 scans the first side face 5a in the left direction, the control unit 53 changes the imaging angle of the first linear camera 67 from the first imaging angle (90°) with respect to the front surface 3. It is the first imaging angle (90°) with respect to the second side surface 5b. Moreover, the control unit 53 changes the irradiation angle of the first light-emitting unit 68 from the first irradiation angle (30°) with respect to the front surface 3 to the first irradiation angle (30°) with respect to the second side surface 5b. At this time, the first scanning unit 62 is positioned at the upper right position with respect to the second side surface 5b (see FIG. 12 for the terms of the top, bottom, left, and right of the second side surface 5b).

When the change of the imaging angle and the irradiation angle of the first scanning unit 62 is completed, the second scanning unit 72 scans the first side surface 5a in the left direction.

Referring to Fig. 16 (S), when the change of the imaging angle and the irradiation angle of the first scanning unit 62 is completed, the control unit 53 causes the first light-emitting unit 68 of the first scanning unit 62 to light. Then, the control unit 53 moves the first scanning unit 62 in the downward direction (the downward direction in the earth coordinate system) on the second side face 5b of the workpiece 1 by the first arm portion 61, and the first scanning unit 62 is used. The first linear camera 67 captures the second side face 5b of the workpiece 1. By the first scanning unit 62, the right side of the second side face 5b of the workpiece 1 is scanned downward in the first imaging angle and the first irradiation angle (see 6. (1") in Fig. 12).

Referring to Fig. 16 (T), when the first scanning unit 62 reaches the lower right position of the second side face 5b, the control unit 53 stops the movement of the first scanning unit 62 in the downward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the left direction with respect to the second side surface 5b.

When the first scanning unit 62 reaches the lower right position of the second side face 5b, the second scanning unit 72 reaches the left side position of the first side face 5a of the workpiece 1. When the second scanning unit 72 reaches the left side position of the first side face 5a, the control unit 53 stops the movement of the second scanning unit 72 in the left direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78.

Referring to Fig. 16 (U), when the first scanning unit 62 reaches the lower left position of the second side face 5b, the control unit 53 stops the movement of the first scanning unit 62 in the left direction. Next, the control unit 53 turns on the first light-emitting unit 68 of the first scanning unit 62.

Then, the control unit 53 moves the first scanning unit 62 upward in the second side face 5b (upward in the earth coordinate system) by the first arm portion 61, and the first scanning unit 62 is used first. The linear camera 67 captures the second side face 5b of the workpiece 1. By the first scanning unit 62, the left side of the second side face 5b of the workpiece 1 is scanned upward in the first imaging angle and the first irradiation angle (see 7. (1") in Fig. 12).

In this case, the control unit 53 moves the second scanning unit 72 to the standby position by the second arm unit 71, and causes the second scanning unit 72 to be in the standby state.

Referring to Fig. 16 (V), when the first scanning unit 62 reaches the upper left position of the second side face 5b, the control unit 53 stops the movement of the first scanning unit 62 in the upward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68.

Referring to Fig. 16 (W), the control unit 53 changes the imaging angle of the first linear camera 67 from the first imaging angle (90°) with respect to the second side surface 5b to the first imaging angle with respect to the front surface 3 (90). °). Moreover, the control unit 53 changes the irradiation angle of the first light-emitting unit 68 from the first irradiation angle (60°) with respect to the second side surface 5b to the first irradiation angle (60°) with respect to the front surface 3. At this time, the first scanning unit 62 is located at the lower right position with respect to the front surface 3 (see FIG. 12 for the terms of the top, bottom, left, and right of the front surface 3).

Referring to Fig. 16 (X), when the change of the imaging angle and the irradiation angle of the first scanning unit 62 is completed, the control unit 53 turns on the first light-emitting unit 68 of the first scanning unit 62. Then, the control unit 53 moves the first scanning unit 62 in the left direction on the front surface 3 of the workpiece 1 by the first arm portion 61, and the front surface 3 of the workpiece 1 is imaged by the first linear camera 67 of the first scanning unit 62. By the first scanning unit 62, the lower side of the front surface 3 of the workpiece 1 is scanned in the left direction at the first imaging angle and the first irradiation angle (refer to 8. (1) in FIG. 12).

Referring to Fig. 17 (Y), when the first scanning unit 62 reaches the lower left position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the left direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68.

Referring to Fig. 17 (Z), the control unit 53 changes the imaging angle of the first linear camera 67 from the first imaging angle (90°) with respect to the front surface 3 to the second imaging angle (60°) with respect to the front surface 3. . Moreover, the control unit 53 changes the irradiation angle of the first light-emitting unit 68 from the first irradiation angle (30°) with respect to the front surface 3 to the second irradiation angle (60°) with respect to the front surface 3.

Referring to Fig. 17 (A'), the control unit 53 causes the first light-emitting portion 68 of the first scanning unit 62 to light. Then, the control unit 53 moves the first scanning unit 62 in the right direction on the front surface 3 of the workpiece 1 by the first arm unit 61, and the front surface 3 of the workpiece 1 is imaged by the first linear camera 67 of the first scanning unit 62. By the first scanning unit 62, the lower side of the front surface 3 of the workpiece 1 is scanned in the right direction at the second imaging angle and the second irradiation angle (see 9. (2) in FIG. 12).

Referring to Fig. 17 (B'), when the first scanning unit 62 reaches the lower right position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the right direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68.

Referring to Fig. 17 (C'), the control unit 53 changes the imaging angle of the first linear camera 67 from the second imaging angle (60°) with respect to the front surface 3 to the second imaging angle with respect to the second side surface 5b ( 60°). Moreover, the control unit 53 changes the irradiation angle of the first light-emitting unit 68 from the second irradiation angle (60°) with respect to the front surface 3 to the second irradiation angle (60°) with respect to the second side surface 5b. At this time, the first scanning unit 62 is located at the upper left position with respect to the second side surface 5b (see FIG. 12 for the terms of the upper, lower, left, and right sides of the second side surface 5b).

Referring to Fig. 17 (D'), the control unit 53 causes the first light-emitting portion 68 of the first scanning unit 62 to light. Then, the control unit 53 moves the first scanning unit 62 in the downward direction (the downward direction in the earth coordinate system) on the second side face 5b of the workpiece 1 by the first arm portion 61, and the first scanning unit 62 is used. The first linear camera 67 captures the second side face 5b of the workpiece 1. By the first scanning unit 62, the left side of the second side face 5b of the workpiece 1 is scanned downward in the second imaging angle and the second irradiation angle (see 10. (2") in Fig. 12).

Referring to Fig. 18 (E'), when the first scanning unit 62 reaches the lower left position of the second side face 5b, the control unit 53 stops the movement of the first scanning unit 62 in the downward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68. Next, the control unit 53 controls the first arm unit 61 to move the first scanning unit 62 in the right direction with respect to the second side surface 5b.

Referring to Fig. 18 (F'), when the first scanning unit 62 reaches the lower right position of the second side face 5b, the control unit 53 stops the movement of the first scanning unit 62 in the right direction. Next, the control unit 53 turns on the first light-emitting unit 68 of the first scanning unit 62.

Then, the control unit 53 moves the first scanning unit 62 upward in the second side face 5b (upward in the earth coordinate system) by the first arm portion 61, and the first scanning unit 62 is used first. The linear camera 67 captures the second side face 5b of the workpiece 1. By the first scanning unit 62, the right side of the first side face 5a of the workpiece 1 is scanned upward in the second imaging angle and the second irradiation angle (see 11. (2") in Fig. 12).

Referring to Fig. 18 (G'), when the first scanning unit 62 reaches the upper right position of the second side face 5b, the control unit 53 stops the movement of the first scanning unit 62 in the upward direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68.

Referring to Fig. 18 (H'), the control unit 53 changes the imaging angle of the first linear camera 67 from the second imaging angle (60°) with respect to the second side surface 5b to the second imaging angle with respect to the front surface 3 ( 60°). Moreover, the control unit 53 changes the irradiation angle of the first light-emitting unit 68 from the second irradiation angle (60°) with respect to the second side surface 5b to the second irradiation angle (60°) with respect to the front surface 3. At this time, the first scanning unit 62 is positioned at the upper right position with respect to the front surface 3 (see FIG. 12 for the terms of the top, bottom, left, and right of the front surface 3).

Referring to Fig. 18 (I'), the control unit 53 turns on the first light-emitting portion 68 of the first scanning unit 62. Then, the control unit 53 moves the first scanning unit 62 in the left direction on the front surface 3 of the workpiece 1 by the first arm portion 61, and the front surface 3 of the workpiece 1 is imaged by the first linear camera 67 of the first scanning unit 62. By the first scanning unit 62, the upper side of the front surface 3 of the workpiece 1 is scanned in the left direction at the second imaging angle and the second irradiation angle (see 12. (2) in FIG. 12).

Referring to Fig. 18 (J'), when the first scanning unit 62 reaches the upper left position of the front surface 3, the control unit 53 stops the movement of the first scanning unit 62 in the left direction. Then, the control unit 53 stops the imaging of the first linear camera 67 in the first scanning unit 62, and turns off the first light-emitting unit 68.

At this time, the control unit 53 controls the second arm portion 71 so that the second scanning unit 72 is positioned on the left side of the second side face 5b (see FIG. 12 for the terms of the top, bottom, left, and right sides of the second side face 5b). Then, the control unit 53 sets the imaging angle of the second linear camera 77 to the first imaging angle (90°) with respect to the second side surface 5b, and sets the irradiation angle of the second light-emitting portion 78 to be opposite to the second side surface 5b. The first irradiation angle (30°).

Next, the control unit 53 turns on the second light-emitting unit 78 of the second scanning unit 72. Then, the control unit 53 moves the second scanning unit 72 to the right side on the second side face 5b of the workpiece 1 by the second arm portion 71, and the second linear camera 77 of the second scanning unit 72 captures the workpiece 1 2 side 5b. By the second scanning unit 72, the second side surface 5b of the workpiece 1 is scanned in the right direction at the first imaging angle and the first irradiation angle (see "7" (1") in FIG. 12).

Referring to Fig. 19 (K'), when the second scanning unit 72 reaches the right side position of the second side face 5b, the control unit 53 stops the movement of the second scanning unit 72 in the right direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78.

In this case, the control unit 53 moves the first scanning unit 62 to the standby position by the first arm unit 61, and causes the first scanning unit 62 to be in the standby state.

Referring to Fig. 19 (L'), the control unit 53 changes the imaging angle of the second linear camera 77 from the first imaging angle (90°) with respect to the second side surface 5b to the second imaging with respect to the second side surface 5b. Angle (60°). Moreover, the control unit 53 changes the irradiation angle of the second light-emitting unit 78 from the first irradiation angle (30°) with respect to the second side surface 5b to the second irradiation angle (60°) with respect to the second side surface 5b.

Referring to Fig. 19 (M'), the control unit 53 causes the second light-emitting portion 78 of the second scanning unit 72 to light. Then, the control unit 53 moves the second scanning unit 72 in the left direction on the second side face 5b of the workpiece 1 by the second arm portion 71, and captures the workpiece 1 by the second linear camera 77 of the second scanning unit 72. 2 side 5b. By the second scanning unit 72, the second side surface 5b of the workpiece 1 is scanned in the left direction at the second imaging angle and the second irradiation angle (see "8" (2") in FIG. 12).

Referring to Fig. 19 (N'), when the second scanning unit 72 reaches the left side position of the second side face 5b, the control unit 53 stops the movement of the second scanning unit 72 in the left direction. Then, the control unit 53 stops the imaging of the second linear camera 77 in the second scanning unit 72, and turns off the second light-emitting unit 78.

Referring to Fig. 19 (O'), the control unit 53 moves the second scanning unit 72 to the standby position by the second arm unit 71, and causes the second scanning unit 72 to be in the standby state.

In addition, the workpiece 1 is placed upside down by the first conveying device 80, and the back surface 4 is placed on the mounting table 52 of the second visual inspection device 50B so as to face the upper side. Then, the back surface 4, the third side surface 5c, and the fourth side surface 5d of the workpiece 1 are inspected by the second visual inspection device 50B in the same flow as the above-described flow.

(When the workpiece 1 is inspected by the operations shown in Figs. 12 to 19)
Here, the reason why the workpiece 1 is inspected by the operations shown in FIGS. 12 to 19 will be described. In the case where the appearance of the three faces is inspected in the first scanning unit 62 and the second scanning unit 72, the aspects shown in the following 1) to 4) must be considered.

1) By the first scanning unit 62 and the second scanning unit 72, scanning of three faces (shortening inspection time) is completed as soon as possible in a short time.
2) The appearance of the workpiece 1 is inspected as accurately as possible by the first scanning unit 62 and the second scanning unit 72.
3) The first scanning unit 62 and the second scanning unit 72 do not collide with each other.
4) The light emitted from the first light-emitting unit 68 of the first scanning unit 62 does not interfere with light that adversely affects the imaging of the second linear camera 77 of the second scanning unit 72. Similarly, the light emitted from the second light-emitting unit 78 of the second scanning unit 72 does not interfere with light that adversely affects the imaging of the first linear camera 67 of the first scanning unit 62.

First, in order to shorten the inspection time, the control unit 53 scans the front surface 3 of the workpiece 1 by the first scanning unit 62, and simultaneously scans the first side surface 5a of the workpiece 1 by the second scanning unit 72. Moreover, in order to shorten the inspection time, the control unit 53 scans the second side face 5b in a coordinated manner by the first scanning unit 62 and the second scanning unit 72.

Further, when the scanning of the second side face 5b is simultaneously performed in the first scanning unit 62 and the second scanning unit 72, the two scanning units 62 and 67 collide with each other. Therefore, the timing at which the first scanning unit 62 scans the second side surface 5b (see FIGS. 16(S) to 16(V), FIGS. 17(D') to 18(G')) and the second scanning unit 72 are scanned. The timing of the second side face 5b (see FIGS. 18(J') to 19(N')) is shifted.

Moreover, in order to accurately inspect the appearance of the workpiece 1, the control unit 53 scans the front surface 3 of the workpiece 1 at different imaging angles and different irradiation angles by the first scanning unit 62. Similarly, the control unit 53 scans the first side face 5a of the workpiece 1 at different imaging angles and different irradiation angles by the second scanning unit 72.

Moreover, in order to accurately inspect the appearance of the workpiece 1, the control unit 53 scans the front surface 3 of the workpiece 1 in different scanning directions (up-and-down direction, left-right direction) by the first scanning unit 62. Similarly, the control unit 53 scans the first side face 5a of the workpiece 1 in different scanning directions a plurality of times by the second scanning unit 72.

Further, the second side surface 5b is divided by the first scanning unit 62 and the second scanning unit 72 in accordance with the scanning direction. Specifically, in the present embodiment, the control unit 53 scans the second side surface 5b in the vertical direction by the first scanning unit 62, and scans the second side surface 5d in the left-right direction by the second scanning unit 72.

Here, in FIG. 12, attention is paid to the movement of the first scanning portion 62 at 5. (1), 6. (1"), 7. (1"), and 8. (1) (corresponding to FIG. 15 ( N) to Fig. 17 (Y)). First, the first scanning unit 62 scans the upper side of the front surface 3 in the right direction and reaches the upper right position of the front surface 3 (Fig. 12, 5. (1)). The second side surface 5b is present in front of the upper right position of the front surface 3. The first scanning unit 62 scans the right side of the first side surface 5a in the downward direction by the original flow (6. (1") in Fig. 12).

Thereafter, the first scanning unit 62 scans the left side of the second side face 5b in the upward direction and reaches the upper left position of the second side face 5b (7. (1") in Fig. 12). The front end of the upper left position of the second side face 5b. The front surface 3 is present, and the first scanning unit 62 scans the lower side of the front surface 3 in the left direction by the original flow (8. (1) of Fig. 12).

Furthermore, in Fig. 12, at 9. (2), 10. (2"), 11. (2"), and 12. (2), the shooting angle and the irradiation angle are also different, except for this aspect, The scanning unit 62 performs substantially the same operations as 5. (1), 6. (1"), 7. (1", and 8. (1).

In other words, in the present embodiment, the control unit 53 scans the front surface 3 of the workpiece 1 in the left-right direction and the first side surface 5a of the workpiece 1 (the surface adjacent to the front surface 3 in the scanning direction) by the first scanning unit 62. The scan from top to bottom is used as a series of processes to shorten the inspection time.

Next, the light interference will be explained. In the present embodiment, the control unit 53 controls the movement of the scanning by the first scanning unit 62 and the second scanning unit 72 so as not to cause light interference.

Typically, the control unit 53 controls the movement of the first scanning unit 62 and the second scanning unit 72 so that the distance between the first scanning unit 62 and the second scanning unit 72 that are scanned is as close as possible.

This content is shown, for example, in FIG. 13(A), FIG. 14(G), FIG. 15(N), FIG. 16(S), and the like. In FIGS. 13(A) and 14(G), when the first scanning unit 62 moves downward in the front surface 3 of the workpiece 1, the second scanning unit 72 moves downward in the first side surface 5a of the workpiece 1. Thereby, the distance between the first scanning unit 62 and the second scanning unit 72 is ensured, and light interference is prevented.

In FIG. 15(N), when the second scanning unit 72 moves in the right direction on the first side face 5a of the workpiece 1 and advances to some extent, the first scanning unit 62 starts to the right direction on the front surface 3 of the workpiece 1. scanning. Thereby, the distance between the first scanning unit 62 and the second scanning unit 72 is ensured, and light interference is prevented.

In FIG. 16(S), when the second scanning unit 72 moves in the left direction on the first side face 5a of the workpiece 1, and advances to some extent, the first scanning unit 62 starts on the second side face 5b of the workpiece 1. Scan in the downward direction. Thereby, the distance between the first scanning unit 62 and the second scanning unit 72 becomes longer, and light interference can be prevented.

When the distance between the first scanning unit 62 and the second scanning unit 72 is equal to or less than the fixed distance, the control unit 53 controls the lighting and extinguishing timings of the first light-emitting unit 68 and the second light-emitting unit 78, and the first linearity. The imaging start of the camera 67 and the second linear camera 77 and the imaging end time (scan start and end time).

This content is shown, for example, in FIG. 13 (C), FIG. 13 (D), FIG. 14 (I), FIG. 14 (J), FIG. 15 (Q), and the like.

In FIGS. 13(C) and (I), the distance between the first scanning unit 62 and the second scanning unit 72 is equal to or less than a fixed distance. On the other hand, when the first scanning unit 62 reaches the lower side of the front surface 3 and the imaging of the first linear camera 67 is completed, and the first light-emitting unit 68 is turned off, the second light-emitting unit 78 emits light to start the second linearity. Shooting of camera 77. Thereby, it is possible to prevent light interference.

Similarly, in FIGS. 13(D) and 14(J), the distance between the first scanning unit 62 and the second scanning unit 72 is also equal to or less than the fixed distance. On the other hand, when the second scanning unit 72 reaches the upper side of the first side surface 5a and the imaging of the second linear camera 77 is completed, and the second light-emitting unit 78 is turned off, the first light-emitting unit 68 emits light and starts the first time. Shooting of the linear camera 67. Thereby, light interference is prevented.

Similarly, in FIG. 15 (Q), the distance between the first scanning unit 62 and the second scanning unit 72 is also equal to or less than the fixed distance. On the other hand, when the first scanning unit 62 reaches the right side of the front surface 3 and the imaging of the first linear camera 67 is completed, and the first light-emitting unit 68 is turned off, the second light-emitting unit 78 emits light to start the second linear camera. Shooting of 77. Thereby, it is possible to prevent light interference.

Here, referring to FIG. 14 (L) to FIG. 16 (T), the second scanning unit 72 is in a state in which the second light-emitting portion 78 is erected (the longitudinal direction of the first light-emitting portion 68 is in the upper and lower directions of the earth coordinate system). The first side surface 5a is scanned downward. Further, referring to FIGS. 18(J') to 19(N'), the second scanning unit 72 scans the second side face 5b in a state where the second light-emitting portion 78 is erected.

On the other hand, the width of the first side face 5a and the second side face 5b in the up-down direction is smaller than the length of the second light-emitting portion 78. Therefore, when the side surface 5 is irradiated with light when the second light-emitting portion 78 is erected, the second light-emitting portion 78 is placed in a horizontal state (the longitudinal direction of the second light-emitting portion 78 is in the horizontal direction of the earth coordinate system). The amount of light leaking to the front surface 3 is larger than that in the case where the side surface 5 is irradiated with light.

In other words, in the state where the second light-emitting portion 78 is erected, the second light-emitting portion 78 of the second scanning portion 72 is likely to be the first one to be used by the first scanning portion 62 as compared with the state in which the second light-emitting portion 78 is placed flat. The shooting of the linear camera 67 causes light interference that adversely affects.

Therefore, as shown in FIG. 18 (J') to FIG. 19 (N'), the first scanning unit is scanned when the side surface 5 is scanned by the second scanning unit 72 in a state where the second light-emitting portion 78 is erected. 62 does not scan the front 3. Alternatively, as shown in FIGS. 14(L) to 15(O), when the side surface 5 is scanned by the second scanning unit 72 while the second light-emitting unit 78 is erected, the first scanning unit 62 may scan the front surface 3 In this case, at least the distance between the first scanning unit 62 and the second scanning unit 72 is ensured to be a fixed distance or more.

Further, the second light-emitting portion 78 may be configured to be partially lit. In this case, the portion of the second light-emitting portion 78 corresponding to the width of the side surface 5 in the up-down direction in the state of being erected is partially lit, and the other portions are extinguished. Thereby, it is possible to prevent light interference.

Further, the first light-emitting portion 68 and the second light-emitting portion 78 may be configured to emit light of different wavelength regions. Light interference can also be prevented by this method.

<action, etc.>
[Abnormal sound inspection device 10]
As described above, in the abnormal sound inspection apparatus 10 of the present embodiment, the arm portion 21 moves the hand 31 in a state in which the workpiece 1 is held, and the workpiece 1 is transported, and the sound detecting unit 35 detects when the workpiece 1 is transported. The sound of the workpiece 1. Then, based on the detected sound signal, the abnormal sound generated from the workpiece 1 is checked.

In other words, the abnormal sound inspection device 10 of the present embodiment has two functions as a function of the transport device that transports the workpiece 1 and a function as an abnormal sound check device that checks the abnormal sound generated from the workpiece 1. Therefore, in the abnormal sound inspection apparatus 10, the abnormal sound of the workpiece 1 can be inspected during the conveyance of the workpiece 1, and the abnormal sound inspection of the workpiece 1 can be efficiently performed. Further, in the abnormal sound inspection device 10 of the present embodiment, the cost can be reduced as compared with the case where the transport device and the abnormal sound check device are separately prepared.

In the abnormal sound inspection apparatus 10 of the present embodiment, the hand 31 holding the workpiece 1 is moved in the clockwise direction, and the workpiece 1 is conveyed to the seal attaching device 40. On the other hand, the hand 31 in the state in which the workpiece 1 is held is moved in the counterclockwise direction, and the workpiece 1 is conveyed from the seal attaching device 40 to the first visual inspection device 50A.

Then, the sound detecting portion 35 detects the sound generated from the workpiece 1 in response to the movement of the workpiece 1 in the clockwise direction, and the sound generated from the workpiece 1 in response to the counterclockwise movement of the workpiece 1, based on the detected The sound signal is emitted to check the abnormal sound generated from the workpiece 1.

In this manner, the workpiece 1 is conveyed in the clockwise direction and the counterclockwise direction, and based on the sound generated from the workpiece 1 at this time, the abnormal sound generated from the workpiece 1 is inspected, whereby the abnormal sound can be appropriately checked. Furthermore, the direction in which the workpiece 1 is moved may be the upper direction and the lower direction of the earth coordinate system.

Further, in the abnormal sound inspection device 10 of the present embodiment, when the workpiece 1 is transported to the seal attaching device 40, the posture of the workpiece 1 (the posture of the hand 31) is changed so that the seal attaching device 40 can be made. The workpiece 1 is processed. Similarly, when the workpiece 1 is transported to the first visual inspection device 50A by the self-sealing attachment device 40, the posture of the workpiece 1 (the posture of the hand 31) is changed so that the workpiece 1 is placed on the first visual inspection device 50A. On the mounting table 52.

Then, the sound detecting unit 35 detects the sound generated from the workpiece 1 in response to the change in the posture of the workpiece 1, and checks the abnormal sound generated from the workpiece 1 based on the detected sound signal.

In this manner, the posture of the workpiece 1 is changed during the conveyance of the workpiece 1, and the abnormal sound generated from the workpiece 1 is inspected based on the sound generated from the workpiece 1 at this time, whereby the abnormal sound can be appropriately checked.

Further, in the abnormal sound inspection apparatus 10 of the present embodiment, the sound detecting unit 35 is provided in the hand unit 31. Thereby, the sound generated from the workpiece 1 can be appropriately detected during the conveyance of the workpiece 1. Further, the sound detecting unit 35 may be provided in another portion (the arm portion 21 or the like) of the robot arm portion 12.

Further, in the abnormal sound inspection apparatus 10 of the present embodiment, the sound detecting unit 35 is configured to be in contact with the workpiece 1 and to detect sound, and the sound detecting unit 35 includes an AE sensor. Thereby, the abnormal sound generated from the workpiece 1 can be further appropriately detected.

Further, the sound detecting unit 35 may be configured to detect sound in a non-contact manner with the workpiece 1. In this case, the sound detecting unit 35 may also include a microphone. Even if the sound detecting unit 35 is configured as described above, the abnormal sound generated from the workpiece 1 can be appropriately detected.

Furthermore, it is reasonable to detect that the frequency band of the abnormal sound is the same frequency band as the frequency band of the ambient sound. In this case, the sound detecting unit 35 that detects the type of sound that is not in contact with the workpiece 1 may not be able to appropriately detect the abnormal sound due to the surrounding environmental sound. Therefore, for example, in such a case, the sound detecting portion 35 that is in contact with the workpiece 1 and detects the type of sound can also be used.

Further, in the abnormal sound detecting device 10, the abnormal sound generated from the workpiece 1 is detected based on the signal of the specific frequency band (corresponding to the frequency band of the abnormal sound) of the sound signal detected by the sound detecting unit 35. Thereby, the abnormal sound can be appropriately checked.

Further, in the abnormal sound inspection apparatus 10 of the present embodiment, the signal of the specific frequency band (corresponding to the frequency band of the abnormal sound) in the abnormal sound inspection apparatus 10 is integrated, and the abnormal sound generated from the workpiece 1 is checked based on the integral value. Thereby, the average size of the abnormal sound can be determined in the frequency band corresponding to the abnormal sound, so that the abnormal sound can be further appropriately checked.

[Appearance inspection device 50]
In the visual inspection device 50 of the present embodiment, when the front surface 3 (back surface 4) of the workpiece is scanned by the first scanning unit 62, the first side surface 5a (the third side surface 5c) is simultaneously scanned by the second scanning unit 72. Thereby, in the visual inspection device of the present embodiment, the visual inspection of the workpiece 1 can be performed quickly and efficiently.

Here, in the visual inspection, there is a problem that it is easy to take time compared with other processes on the production line, and there is a problem that it is difficult to obtain a balance with the production time of other processes. In particular, such a problem is apt to occur when the workpiece 1 is an object having a relatively wide area to be inspected as in a fixed type game machine. On the other hand, in the present embodiment, since the inspection time of the visual inspection can be shortened, it is easy to obtain the balance of the production time with other processes.

Further, in the present embodiment, since one visual inspection device 50 includes two mechanical arm portions 60 and 70, the visual inspection device 50 can be reduced, for example, when one visual inspection device 50 has one mechanical arm portion. The number of units. This can cut costs. Moreover, the installation space of the inspection system 100 can be reduced, and the degree of freedom in space management of the production area is improved.

Further, in the visual inspection device 50 of the present embodiment, the first scanning unit 62 has the first light-emitting unit 68, and the second scanning unit 72 has the second light-emitting unit 78.

Thereby, the portion where the first linear camera 67 and the second linear camera 77 are imaged can be appropriately irradiated with light.

Further, in the visual inspection device 50 of the present embodiment, the first scanning unit 62 adjusts the imaging angle of the front surface 3 (back surface 4) of the workpiece 1 by the first linear camera 67, and adjusts the first light-emitting portion 68 to the workpiece. The front side 3 (back side 4) of 1 illuminates the angle of illumination of the light. Similarly, in the visual inspection device 50 of the present embodiment, the second scanning unit 72 adjusts the imaging angle at which the second linear camera 77 captures the first side surface 5a (the third side surface 5c) of the workpiece 1, and adjusts the second angle. The light-emitting portion 78 irradiates the first side surface 5a (the third side surface 5c) of the workpiece 1 with an irradiation angle of light.

Thereby, the appearance of the workpiece 1 can be accurately inspected.

Further, in the visual inspection device 50 of the present embodiment, the front surface 3 (back surface 4) of the workpiece 1 is scanned a plurality of times by the first scanning unit 62 at different imaging angles and different irradiation angles. Thereby, the appearance of the workpiece 1 can be inspected more accurately.

Similarly, in the visual inspection device 50 of the present embodiment, the first scanning unit 72 scans the first side surface 5a (the third side surface 5c) of the workpiece 1 at a plurality of different imaging angles and different irradiation angles. Thereby, the appearance of the workpiece 1 can be inspected more accurately.

Further, in the visual inspection device 50 of the present embodiment, the front surface 3 (back surface 4) of the workpiece 1 is scanned by the first scanning unit 62 in different scanning directions for a plurality of times. Thereby, the appearance of the workpiece 1 can be inspected more accurately.

Further, in the visual inspection device 50 of the present embodiment, the first side surface 5a (the third side surface 5c) of the workpiece 1 is scanned in the scanning direction by the second scanning unit 72 in a plurality of scanning directions. Thereby, the appearance of the workpiece 1 can be inspected more accurately.

Further, in the visual inspection device 50 of the present embodiment, the first scanning unit 62 and the second scanning unit 72 cooperatively scan the second side surface 5b (fourth side surface 5d). Thereby, the inspection time of the visual inspection can be further shortened.

In the visual inspection device 50 of the present embodiment, the first scanning unit 62 scans the second side surface 5b (fourth side surface 5d) in the vertical direction, and the second scanning unit 72 scans the second side surface 5b in the left-right direction. (4th side 5d). Thereby, the inspection time of the visual inspection can be further shortened. In addition, the second side surface 5b (fourth side surface 5d) can be shared by the first scanning unit 62 and the second scanning unit 72 in accordance with the imaging angle and the irradiation angle.

Further, in the visual inspection device 50 of the present embodiment, the light interference from the first linear camera 77 is not interfered with by the light from the first light-emitting unit 68, and the light from the second light-emitting unit 78 interferes with the first. The light captured by the linear camera 67 interferes to control the movement of the scanning by the first scanning unit 62 and the second scanning unit 72. Thereby, light interference can be appropriately prevented.

Further, in the visual inspection device 50 of the present embodiment, the lighting and extinguishing timings of the first light-emitting portion 68 and the second light-emitting portion 78 are controlled so as not to cause light interference. Thereby, light interference can be further appropriately prevented.

Further, in the visual inspection device 50 of the present embodiment, the imaging start and the imaging end time by the first linear camera 67 and the second linear camera 77 are controlled so as not to cause light interference. Thereby, light interference can be further appropriately prevented.

Further, in the visual inspection device 50 of the present embodiment, the first scanning unit 62 is responsible for scanning the front side 3 (back surface 4) and the second scanning unit 72 for scanning the first side surface 5a (the third side surface 5c) and the The second side surface 5b (fourth side surface 5d) in which the scanning unit 62 and the second scanning unit 72 are collectively responsible for scanning is a surface adjacent to each other. Thereby, the first scanning unit 62 and the second scanning unit 72 can efficiently inspect the plurality of faces of the workpiece 1.

In the present embodiment, the first visual inspection device 50A and the second visual inspection device 50B are each unitized. By unitizing the visual inspection device 50 in this manner, it is possible to appropriately cope with the fluctuation in the production amount of the workpiece 1 on the production line (the increase and decrease in the production amount). In particular, by unitizing the visual inspection device 50, it is possible to appropriately cope with a variation in the production amount such that the production amount of the workpiece 1 is set to 1.3 times or 1.5 times in a fractional multiple.

When the production amount is changed, for example, another visual inspection device 50 may be disposed in series after the first visual inspection device 50A and the second visual inspection device 50B. In this case, the three visual inspection devices 50 can also perform inspection of two of the six faces of the workpiece 1. Further, another visual inspection device 50 to be added may be disposed in parallel with the first visual inspection device 50A and the second visual inspection device 50B. Further, the number of the visual inspection devices 50 to be added is not limited to one. Further, one of the first visual inspection device 50A and the second visual inspection device 50B may be omitted. In this case, one visual inspection device 50 inspects all of the six faces of the workpiece 1.

≪ Various changes ≫
In the above description, the case where the workpiece 1 is a fixed type game machine has been described. On the other hand, the workpiece 1 may be various electronic devices other than the fixed type game machine, or various automobile parts. Typically, the workpiece 1 may be any object to be inspected (or a thin object such as a substrate) as long as it has a multi-faceted shape.

The present technology can also adopt the following constitution.
(1) An appearance inspection device comprising:
a first arm portion having a first arm portion and a first scanning portion, wherein the first scanning portion includes a first linear camera and is disposed on the first arm portion;
The second robot arm portion includes a second arm portion including a second linear camera and a second arm portion, and a control portion that uses the first arm portion to make the second arm portion and the second arm portion The first scanning unit moves in the scanning direction on the first surface of the workpiece having the first surface and the second surface, and the first linear camera images the first surface to scan the first scanning unit In the first surface, when the first scanning unit scans the first surface, the second scanning unit moves the second scanning unit in the scanning direction on the second surface by using the second arm. The linear camera captures the second surface and causes the second scanning unit to scan the second surface.
(2) The visual inspection device according to (1), wherein the first scanning unit further includes a first light-emitting unit that moves in the scanning direction together with the first linear camera, and 1 The part where the linear camera performs the shooting is irradiated with light.
(3) The visual inspection device according to (2), wherein the control unit adjusts an imaging angle at which the first linear camera captures the first surface, and adjusts an irradiation angle of the first light-emitting portion to the first surface. .
(4) The visual inspection device according to (4) above, wherein the control unit scans the first surface a plurality of times by using the first scanning unit at different imaging angles and different irradiation angles.
(5) The visual inspection device according to any one of (2) to (4), wherein the second scanning unit further includes a second light emitting unit, wherein the second light emitting unit and the second linear camera are combined with the scanning The light is moved in the direction, and the portion where the second linear camera is photographed is irradiated with light.
(6) The visual inspection device according to (5), wherein the control unit adjusts an imaging angle at which the second linear camera captures the second surface, and adjusts an irradiation angle of the second light-emitting portion to the second surface. .
(7) The visual inspection device according to (6) above, wherein the control unit scans the second surface a plurality of times by using the second scanning unit at different imaging angles and different irradiation angles.
(8) The visual inspection device according to any one of (1) to (7), wherein the control unit scans the first surface in a plurality of scanning directions in the scanning direction by the first scanning unit.
(9) The visual inspection device according to any one of (1) to (8), wherein the control unit scans the second surface in a plurality of scanning directions in the scanning direction by the second scanning unit.
(10) The visual inspection device according to any one of (1) to (9), wherein the workpiece further has a third surface,
The control unit cooperatively scans the third surface by the first scanning unit and the second scanning unit.
(11) The visual inspection device according to (10), wherein the control unit scans the third surface in a specific scanning direction by the first scanning unit, and uses the second scanning unit to perform the specific scanning direction The third surface is scanned in different scanning directions.
(12) The visual inspection device according to the above (5), wherein the control unit is configured to prevent light interference from the first light-emitting portion from interfering with light of the second linear camera and from the second light-emitting portion. The light interferes with the light interference of the imaging by the first linear camera, and controls the movement of the scanning by the first scanning unit and the second scanning unit.
(13) The visual inspection device according to the above (12), wherein the control unit controls the lighting and extinguishing timings of the first light-emitting portion and the second light-emitting portion so as not to cause the light interference.
(14) The visual inspection device according to (12) or (13), wherein the control unit controls the start of imaging and the end of imaging by the first linear camera and the second linear camera so as not to cause the light interference. .
(15) The visual inspection device according to any one of the above (1), wherein the first surface and the second surface are adjacent to each other.
(16) The visual inspection device according to (10) above, wherein the first surface, the second surface, and the third surface are adjacent to each other.
(17) A visual inspection method using the first arm portion of the first robot arm portion to cause the first scanning portion of the first robot arm portion to be on the first surface of the workpiece having the first surface and the second surface Moving upward in the scanning direction, the first linear camera using the first scanning unit images the first surface, and the first scanning unit scans the first surface.
When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera is imaged by the second linear camera of the second scanning unit, and the second scanning unit scans the second surface.
(18) A program for causing a computer to function as a control unit that uses the first arm portion of the first robot arm portion to have the first scanning portion of the first robot arm portion have the first surface and the first The first surface of the workpiece on the two sides is moved in the scanning direction, and the first surface of the first scanning unit is imaged by the first linear camera, and the first scanning unit scans the first surface.
When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera is imaged by the second linear camera of the second scanning unit, and the second scanning unit scans the second surface.
(19) A method of manufacturing a workpiece, wherein the first arm portion of the first robot arm portion is used to be the first portion of the workpiece having the first surface and the second surface by using the first arm portion of the first robot arm portion The surface moves in the scanning direction, and the first linear camera is imaged by the first linear camera of the first scanning unit, and the first scanning unit scans the first surface.
When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera of the second scanning unit images the second surface, and the second scanning unit scans the second surface, and images the image captured by the first linear camera and the second linear camera. The image determines whether the above workpiece is good or bad.

1‧‧‧Workpiece

2‧‧‧Shell

3‧‧‧ Positive

4‧‧‧Back

5‧‧‧ side

5a‧‧‧1st side

5b‧‧‧2nd side

5c‧‧‧3rd side

5d‧‧‧4th side

10‧‧‧ abnormal sound inspection device

11‧‧‧Abutment

12‧‧‧Machining arm

13‧‧‧Control Department

14‧‧‧Memory Department

15‧‧‧Communication Department

21‧‧‧ Arms

22‧‧‧ base

23‧‧‧ upper arm

24‧‧‧Forearm

25‧‧‧ wrist

31‧‧‧Hands

32‧‧‧Hand ontology

33‧‧‧1st collet mechanism

34‧‧‧2nd collet mechanism

35‧‧‧Sound Detection Department

40‧‧‧Sealing device

41‧‧‧Abutment

42‧‧‧Mechanical arm

43‧‧‧ Arms

44‧‧‧Working by hand

45‧‧‧ base

46‧‧‧ upper arm

47‧‧‧Forearm

48‧‧‧ wrist

50‧‧‧ appearance inspection device

50A‧‧‧1st visual inspection device

50B‧‧‧2nd visual inspection device

51‧‧‧Abutment

52‧‧‧ mounting table

53‧‧‧Control Department

54‧‧‧Memory Department

55‧‧‧Communication Department

60‧‧‧1st mechanical arm

61‧‧‧1st arm

62‧‧‧1st scanning department

63‧‧‧ base

64‧‧‧ upper arm

65‧‧‧Forearm

66‧‧‧ wrist

67‧‧‧1st linear camera

68‧‧‧1st light department

69‧‧‧Support components

70‧‧‧2nd mechanical arm

71‧‧‧2nd arm

72‧‧‧2nd Scanning Department

73‧‧‧ base

74‧‧‧ upper arm

75‧‧‧Forearm

76‧‧‧ wrist

77‧‧‧2nd linear camera

78‧‧‧2nd light department

79‧‧‧Support components

80‧‧‧1st conveying device

81‧‧‧Abutment

82‧‧‧Mechanical arm

83‧‧‧ Arms

84‧‧‧Hands

90‧‧‧2nd transfer device

91‧‧‧Abutment

92‧‧‧Mechanical arm

93‧‧‧arms

94‧‧‧Hands

100‧‧‧Check system

ST101‧‧‧Steps

ST102‧‧‧Steps

ST103‧‧‧Steps

ST104‧‧‧Steps

ST105‧‧‧Steps

ST106‧‧‧ steps

ST107‧‧‧Steps

ST108‧‧‧Steps

ST109‧‧‧Steps

ST110‧‧‧Steps

ST111‧‧‧ steps

ST112‧‧‧Steps

ST113‧‧‧ steps

ST201‧‧‧ steps

ST202‧‧‧Steps

ST203‧‧‧Steps

ST204‧‧‧Steps

ST205‧‧‧ steps

Fig. 1 is a plan view showing an inspection system according to a first embodiment of the present technology.

Fig. 2 is a perspective view showing an abnormal sound detecting device and a seal attaching device.

Fig. 3 is an enlarged view showing the hand of the abnormal sound detecting device.

Fig. 4 is a block diagram showing the electrical configuration of the abnormal sound detecting device.

Fig. 5 is a perspective view showing the visual inspection device.

Figure 6 is a developed view of the housing of the workpiece.

Fig. 7 is a view showing a photographing angle of a linear camera and a light irradiation angle of the light-emitting portion.

Fig. 8 is a view showing a photographing angle of the linear camera and a light irradiation angle of the light-emitting portion.

Fig. 9 is a block diagram showing the electrical configuration of the visual inspection device.

Fig. 10 is a flow chart showing the processing of the control unit of the abnormal sound detecting device.

Fig. 11 is a flow chart showing the processing of the control unit of the visual inspection device.

FIG. 12 is a view showing a locus of scanning by the first scanning unit and the second scanning unit of the first visual inspection device.

(A) to (F) of FIG. 13 are diagrams showing movements of the first scanning unit and the second scanning unit of the first visual inspection device during scanning.

(G) to (L) of FIG. 14 are diagrams showing movements of the first scanning unit and the second scanning unit of the first visual inspection device during scanning.

15(M) to (R) are diagrams showing movements of the first scanning unit and the second scanning unit of the first visual inspection device during scanning.

(S) to (X) of FIG. 16 are diagrams showing movements of the first scanning unit and the second scanning unit of the first visual inspection device during scanning.

17(Y), (Z), and (A') to (D') are diagrams showing movements of the first scanning unit and the second scanning unit of the first visual inspection device during scanning.

18(E') to (J') are diagrams showing movements of the first scanning unit and the second scanning unit of the first visual inspection device during scanning.

19(K') to (O') are diagrams showing movements of the first scanning unit and the second scanning unit of the first visual inspection device during scanning.

Claims (19)

An appearance inspection device having: a first arm portion having a first arm portion and a first scanning portion, wherein the first scanning portion includes a first linear camera and is disposed on the first arm portion; a second robot arm portion including a second arm portion and a second scanning portion, wherein the second scanning portion includes a second linear camera and is disposed in the second arm portion; The control unit moves the first scanning unit in the scanning direction on the first surface of the workpiece having the first surface and the second surface by the first arm portion, and the first linear camera pairs the first linear camera The first scanning unit scans the first surface, and when the first scanning unit scans the first surface, the second scanning unit uses the second scanning unit to perform the second scanning unit. The surface moves in the scanning direction, and the second surface is imaged by the second linear camera, and the second scanning unit scans the second surface. The visual inspection device of claim 1, wherein The first scanning unit further includes a first light-emitting unit that moves in the scanning direction together with the first linear camera, and irradiates light to a portion of the first linear camera that is imaged. The visual inspection device of claim 2, wherein The control unit adjusts an imaging angle at which the first linear camera captures the first surface, and adjusts an irradiation angle of the first light-emitting portion to the first surface. The visual inspection device of claim 3, wherein The control unit scans the first surface a plurality of times by using the first scanning unit at different imaging angles and different irradiation angles. The visual inspection device of claim 2, wherein The second scanning unit further includes a second light-emitting unit that moves in the scanning direction together with the second linear camera, and irradiates light to a portion of the second linear camera that is imaged. The visual inspection device of claim 5, wherein The control unit adjusts an imaging angle at which the second linear camera captures the second surface, and adjusts an irradiation angle of the second light-emitting portion to the second surface. The visual inspection device of claim 6, wherein The control unit scans the second surface a plurality of times by using the second scanning unit at different imaging angles and different irradiation angles. The visual inspection device of claim 1, wherein The control unit scans the first surface a plurality of times in different scanning directions by the first scanning unit. The visual inspection device of claim 1, wherein The control unit scans the second surface a plurality of times in different scanning directions by the second scanning unit. The visual inspection device of claim 1, wherein The workpiece further has a third surface, The control unit cooperatively scans the third surface by the first scanning unit and the second scanning unit. The visual inspection device of claim 10, wherein The control unit scans the third surface in a specific scanning direction by the first scanning unit, and scans the third surface in a scanning direction different from the specific scanning direction by the second scanning unit. The visual inspection device of claim 5, wherein The control unit is configured to prevent light interference from the first linear camera from interfering with light from the second linear camera and interference from light from the second light-emitting unit to the first linear camera. On the other hand, the movement of the scanning by the first scanning unit and the second scanning unit is controlled. The visual inspection device of claim 12, wherein The control unit controls the lighting and extinguishing timings of the first light-emitting portion and the second light-emitting portion so as not to cause the light interference. The visual inspection device of claim 12, wherein The control unit controls the start of imaging and the end of imaging by the first linear camera and the second linear camera so as not to cause the light interference. The visual inspection device of claim 1, wherein The first surface and the second surface are adjacent to each other. The visual inspection device of claim 10, wherein The first surface, the second surface, and the third surface are adjacent to each other. An appearance inspection method Using the first arm portion of the first robot arm portion, the first scanning portion of the first robot arm portion moves in the scanning direction on the first surface of the workpiece having the first surface and the second surface, and The first linear camera of the first scanning unit images the first surface, and causes the first scanning unit to scan the first surface. When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera is imaged by the second linear camera of the second scanning unit, and the second scanning unit scans the second surface. a program that causes a computer to function as a control unit Using the first arm portion of the first robot arm portion, the first scanning portion of the first robot arm portion moves in the scanning direction on the first surface of the workpiece having the first surface and the second surface, and The first linear camera of the first scanning unit images the first surface, and causes the first scanning unit to scan the first surface. When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera is imaged by the second linear camera of the second scanning unit, and the second scanning unit scans the second surface. Method for manufacturing workpiece Using the first arm portion of the first robot arm portion, the first scanning portion of the first robot arm portion moves in the scanning direction on the first surface of the workpiece having the first surface and the second surface, and The first linear camera of the first scanning unit images the first surface, and causes the first scanning unit to scan the first surface. When the first scanning unit scans the first surface, the second arm portion of the second robot arm moves the second scanning portion of the second robot arm in the scanning direction on the second surface by using the second arm portion of the second robot arm. The second linear camera of the second scanning unit images the second surface, and the second scanning unit scans the second surface, and The quality of the workpiece is determined based on the image captured by the first linear camera and the image captured by the second linear camera.