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TW201918221A - Adhesively attachable biological sensor - Google Patents

Adhesively attachable biological sensor Download PDF

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Publication number
TW201918221A
TW201918221A TW107124605A TW107124605A TW201918221A TW 201918221 A TW201918221 A TW 201918221A TW 107124605 A TW107124605 A TW 107124605A TW 107124605 A TW107124605 A TW 107124605A TW 201918221 A TW201918221 A TW 201918221A
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Taiwan
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substrate
interposer
terminal
wiring
electronic component
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TW107124605A
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Chinese (zh)
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森重恭
吉岡良真
豊田英志
竹村敬史
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日商日東電工股份有限公司
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Publication of TW201918221A publication Critical patent/TW201918221A/en

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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/24Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25Bioelectric electrodes therefor
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/24Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25Bioelectric electrodes therefor
    • A61B5/279Bioelectric electrodes therefor specially adapted for particular uses
    • A61B5/291Bioelectric electrodes therefor specially adapted for particular uses for electroencephalography [EEG]
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/24Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/316Modalities, i.e. specific diagnostic methods
    • A61B5/318Heart-related electrical modalities, e.g. electrocardiography [ECG]
    • A61B5/332Portable devices specially adapted therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Public Health (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cardiology (AREA)
  • Structure Of Printed Boards (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

This adhesively attachable biological sensor is provided with: a stretchable backing for adhering to the surface of a living body; an interposer disposed on one side of the backing in the thickness direction; and an electronic component disposed on the one side of the backing in the thickness direction. The backing is provided with a pressure-sensitive adhesive layer, an underlayer, and a wiring layer. The electronic component is electrically connected to the wiring layer of the backing via the interposer.

Description

貼附型生物體感測器Attached biosensor

本發明係關於一種貼附型生物體感測器。The present invention relates to a patch type biosensor.

先前以來,已知有隨附於生物體表面並感測生物體之貼附型之生物體感測器。作為如此之生物體感測器,提出有例如具有資料取得用模組、具有黏性之聚合物層、配置於聚合物層上之電極、及將資料取得用模組及電極連接之配線的生物體相容性聚合物基板(例如,參照專利文獻1)。Previously, biosensors attached to the surface of a living body and sensing the attachment type of the living body have been known. As such a biosensor, for example, a biometric sensor module, a viscous polymer layer, an electrode disposed on the polymer layer, and a wiring for connecting the data acquisition module and the electrode are proposed. A body-compatible polymer substrate (for example, refer to Patent Document 1).

而且,如此之生物體相容性聚合物基板係聚合物層貼附於生物體表面,電極檢測生物體信號例如心肌源性之電壓信號,資料取得用模組接收心肌源性電壓信號並進行記錄。 [先前技術文獻] [專利文獻]Moreover, the biocompatible polymer substrate-based polymer layer is attached to the surface of the living body, the electrode detects a biological signal such as a myocardial-derived voltage signal, and the data acquisition module receives the myocardial-derived voltage signal and records . [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本專利特開2012-10978號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-10978

[發明所欲解決之問題][The problem that the invention wants to solve]

然而,生物體相容性聚合物基板中,除了安裝資料取得用模組(類比前端元件)以外,亦搭載(安裝)有複數個用以將資料發送至外部機器之無線發送元件等較小之電子零件。However, in the biocompatible polymer substrate, in addition to the mounting data acquisition module (analogous front end element), a plurality of smaller wireless transmission elements for transmitting data to an external device are mounted (mounted). Electronic parts.

但,用於生物體相容性聚合物基板之聚合物層因具有伸縮性或柔軟性,而與普通基板相比,不易安裝電子零件,且安裝容易變得不充分。如此一來,生物體相容性聚合物基板係於其使用中,於生物體表面在3維方向上不規則地變形,故產生電子零件從聚合物層脫落之異常情況。However, since the polymer layer used for the biocompatible polymer substrate has stretchability or flexibility, it is difficult to mount an electronic component as compared with a normal substrate, and mounting is likely to be insufficient. As a result, the biocompatible polymer substrate is irregularly deformed in the three-dimensional direction on the surface of the living body, so that an abnormality in which the electronic component is detached from the polymer layer occurs.

本發明係提供一種能夠抑制電子零件脫落之生物體感測器。 [解決問題之技術手段]The present invention provides a living body sensor capable of suppressing the falling of an electronic component. [Technical means to solve the problem]

本發明[1]係包含貼附型生物體感測器,上述貼附型生物體感測器具備:基材,其具有伸縮性,用以貼附於生物體表面;中介層,其配置於上述基材之厚度方向一側;及電子零件,其配置於上述基材之厚度方向一側;上述基材具有感壓接著層、基材層及配線層,上述電子零件經由上述中介層而與上述基材之上述配線層電性連接。The present invention [1] includes an attached biosensor, the attached biosensor having a substrate that is stretchable for attachment to a surface of a living body, and an interposer disposed on the substrate a side of the substrate in a thickness direction; and an electronic component disposed on a side in a thickness direction of the substrate; the substrate has a pressure-sensitive adhesive layer, a substrate layer, and a wiring layer, and the electronic component is connected to the electronic component via the interposer The wiring layer of the substrate is electrically connected.

根據該生物體感測器,電子零件經由中介層而與基材電性連接。即,電子零件可安裝於中介層之後,將該中介層安裝於基材。因而,不必將複數個較小之電子零件直接安裝於具有柔軟性之基材,而可將電子零件介隔中介層確實地安裝於基材。其結果,當將生物體感測器貼附於生物體表面使用時,能夠抑制電子零件之脫落。According to the biosensor, the electronic component is electrically connected to the substrate via the interposer. That is, the electronic component can be mounted on the substrate after being mounted on the interposer. Therefore, it is not necessary to directly mount a plurality of smaller electronic components on the flexible substrate, and the electronic component can be surely attached to the substrate via the interposer. As a result, when the biosensor is attached to the surface of the living body, the falling of the electronic component can be suppressed.

本發明[2]包含[1]中記載之貼附型生物體感測器,其中,上述基材與上述中介層之電性連接點處之面積大於上述電子零件與上述中介層之電性連接點處之面積。The invention of claim 2, wherein the area of the electrical connection point between the substrate and the interposer is greater than the electrical connection between the electronic component and the interposer. The area at the point.

根據該生物體感測器,因基材與中介層之接觸面積相對較大,故可抑制基材與中介層之剝離,進而,可抑制安裝於中介層之電子零件之脫落。According to the biosensor, since the contact area between the substrate and the interposer is relatively large, peeling of the substrate and the interposer can be suppressed, and further, the fall of the electronic component mounted on the interposer can be suppressed.

本發明[3]包含[1]或[2]中記載之貼附型生物體感測器,其中,上述基材與上述中介層之電性連接點之數量和上述電子零件與上述中介層之電性連接點之數量相同或少於該數量。[3] The attached biosensor according to [1] or [2] wherein the number of electrical connection points between the substrate and the interposer and the electronic component and the interposer are The number of electrical connection points is the same or less than the number.

根據該生物體感測器,因基材與中介層之電性連接點之數量相對較少,故可抑制基材與中介層之連接不良。According to the biosensor, since the number of electrical connection points between the substrate and the interposer is relatively small, the connection failure between the substrate and the interposer can be suppressed.

本發明[4]包含[1]~[3]中任一項中記載之貼附型生物體感測器,其中,上述中介層具有柔軟性。[4] The attached biosensor according to any one of [1] to [3] wherein the interposer has flexibility.

根據該生物體感測器,中介層可根據基材之動作,柔軟地使形狀變化。由此,可抑制中介層從基材脫落。又,於使用時,因可抑制生物體表面與較硬之構件接觸,故佩戴感優異。According to the biosensor, the interposer can softly change the shape depending on the operation of the substrate. Thereby, the interposer can be prevented from falling off from the substrate. Moreover, in use, since the surface of the living body can be prevented from coming into contact with the hard member, the wearing feeling is excellent.

本發明[5]包含[4]中記載之生物體感測器,其中,上述中介層之彎曲剛性為3.0×1012 GPa·μm4 以下。[5] The biological sensor according to [4], wherein the interposer has a bending rigidity of 3.0 × 10 12 GPa·μm 4 or less.

根據該生物體感測器,能夠更確實地發揮柔軟性,從而可抑制中介層從基材脫落。又,佩戴感進而更優異。 [發明之效果]According to the biosensor, the flexibility can be more reliably exhibited, and the interposer can be prevented from falling off from the substrate. Moreover, the wearing feeling is further improved. [Effects of the Invention]

根據該生物體感測器,當將生物體感測器貼附於生物體表面進行使用時,能夠抑制電子零件之脫落。According to the biosensor, when the biosensor is attached to the surface of the living body for use, it is possible to suppress the falling off of the electronic component.

<一實施形態> 參照圖1~圖11說明本發明之貼附型生物體感測器之一實施形態。<Embodiment> An embodiment of the attached biosensor of the present invention will be described with reference to Figs. 1 to 11 .

於圖1中,紙面左右方向係貼附型生物體感測器1之長邊方向(第1方向)。紙面右側係長邊方向一側(第1方向一側),紙面左側係長邊方向另一側(第1方向另一側)。於圖1中,紙面上下方向係貼附型生物體感測器1之短邊方向(與長邊方向正交之方向、寬度方向、與第1方向正交之第2方向)。紙面上側係短邊方向一側(寬度方向一側、第2方向一側),紙面下側係短邊方向另一側(寬度方向另一側、第2方向另一側)。於圖1中,紙面紙厚方向係貼附型生物體感測器1之上下方向(厚度方向、與第1方向及第2方向正交之第3方向)。紙面近前側係上側(厚度方向一側、第3方向一側),紙面裏側係下側(厚度方向另一側、第3方向另一側)。In Fig. 1, the longitudinal direction (first direction) of the attached biosensor 1 is attached to the left and right sides of the paper. The right side of the paper is on one side in the longitudinal direction (one side in the first direction), and the left side of the paper is on the other side in the longitudinal direction (the other side in the first direction). In FIG. 1, the short side direction (the direction orthogonal to the longitudinal direction, the width direction, and the second direction orthogonal to the first direction) of the attached biosensor 1 is attached to the upper and lower sides of the paper. The side of the paper is one side in the short side direction (one side in the width direction and one side in the second direction), and the lower side of the paper surface is the other side in the short side direction (the other side in the width direction and the other side in the second direction). In FIG. 1, the thickness direction of the paper surface is attached to the upper and lower directions of the biosensor 1 (thickness direction, third direction orthogonal to the first direction and the second direction). The front side of the paper surface is on the upper side (the side in the thickness direction and the side in the third direction), and the back side of the paper surface is the lower side (the other side in the thickness direction and the other side in the third direction).

1.貼附型生物體感測器 如圖1及圖3中所示,貼附型生物體感測器1具有沿長邊方向延伸之大致平板形狀。貼附型生物體感測器1具備基材2、配置於基材2之上側之中介層3、及配置於中介層3之上側之複數個電子零件4。1. Attached Biosensor Detector As shown in Figs. 1 and 3, the attached biosensor 1 has a substantially flat plate shape extending in the longitudinal direction. The attached biosensor 1 includes a substrate 2, an interposer 3 disposed on the upper side of the substrate 2, and a plurality of electronic components 4 disposed on the upper side of the interposer 3.

(基材) 基材2係如圖2中所示之附帶電路部之貼附用基材,且例如具有基材電路部26(下述)同時具有伸縮性及感壓接著性之基材。基材2係沿長邊方向延伸之平板形狀且具有優異之伸縮性之片材。具體而言,基材2具有沿長邊方向延伸之帶狀,且具有長邊方向中央部朝向短邊方向(與長邊方向及上下方向正交之方向)(寬度方向)兩外側膨出之形狀。(Substrate) The base material 2 is a base material for attaching a circuit portion as shown in FIG. 2, and has, for example, a base material circuit portion 26 (described below) having a stretchable property and a pressure-sensitive adhesive property. The substrate 2 is a sheet having a flat plate shape extending in the longitudinal direction and having excellent stretchability. Specifically, the base material 2 has a strip shape extending in the longitudinal direction, and has a central portion in the longitudinal direction which bulges toward both sides in the short-side direction (direction orthogonal to the longitudinal direction and the vertical direction) (width direction). shape.

於基材2中,劃分有電子零件區域14及電池區域15。In the substrate 2, an electronic component region 14 and a battery region 15 are divided.

電子零件區域14係安裝有電子零件4及中介層3之區域。即,電子零件區域14係於上下方向(厚度方向)上投影貼附型生物體感測器1時,與中介層3重複之區域。具體而言,電子零件區域14劃分至長邊方向中央部之短邊方向一側。The electronic component area 14 is a region in which the electronic component 4 and the interposer 3 are mounted. In other words, the electronic component region 14 is a region overlapping the interposer 3 when the attached biosensor 1 is projected in the vertical direction (thickness direction). Specifically, the electronic component region 14 is divided into one side in the short side direction of the central portion in the longitudinal direction.

電池區域15係搭載有電池70之區域。即,電池區域15係於上下方向上投影搭載有電池70之貼附型生物體感測器1時,與電池70重複之區域。具體而言,電池區域15係劃分至長邊方向中央部之短邊方向另一側,且與電子零件區域14隔開間隔位於短邊方向另一側。The battery area 15 is an area in which the battery 70 is mounted. In other words, the battery region 15 is a region overlapping the battery 70 when the attached biosensor 1 in which the battery 70 is mounted is projected in the vertical direction. Specifically, the battery region 15 is divided into the other side in the short side direction of the central portion in the longitudinal direction, and is spaced apart from the electronic component region 14 on the other side in the short side direction.

基材2具有感壓接著層5、配置於感壓接著層5之上表面(厚度方向其中一面)之基材層6、配置於基材層6之上表面之配線層7、配置於感壓接著層5之下表面(厚度方向另一面)之探針8、及將配線層7及探針8連接之連接部9。The base material 2 has a pressure-sensitive adhesive layer 5, a base material layer 6 disposed on the upper surface (one surface in the thickness direction) of the pressure-sensitive adhesive layer 5, and a wiring layer 7 disposed on the upper surface of the base material layer 6, and disposed on the pressure-sensitive layer Next, the probe 8 on the lower surface of the layer 5 (the other surface in the thickness direction) and the connecting portion 9 connecting the wiring layer 7 and the probe 8 are provided.

感壓接著層5形成基材2之下表面(感壓接著面)。即,感壓接著層5係為了將基材2貼附於生物體表面(圖7中之皮膚80等)而對貼附型生物體感測器1之下表面賦予感壓接著性之層。感壓接著層5形成基材2之外形形狀。感壓接著層5具有沿長邊方向延伸之平板形狀。The pressure-sensitive adhesive layer 5 forms the lower surface of the substrate 2 (pressure-sensitive adhesive surface). In other words, the pressure-sensitive adhesive layer 5 is a layer that imparts pressure-sensitive adhesive to the lower surface of the attached biosensor 1 in order to attach the substrate 2 to the surface of the living body (the skin 80 in FIG. 7 or the like). The pressure-sensitive adhesive layer 5 forms an outer shape of the substrate 2. The pressure-sensitive adhesive layer 5 has a flat plate shape extending in the longitudinal direction.

感壓接著層5係於其長邊方向兩端部具有第1開口部11之各者。2個第1開口部11分別具有俯視下大致環形狀。第1開口部11將感壓接著層5之上下方向貫通。又,第1開口部11之內側之下表面朝向下側開放,且具有與探針8對應之第1槽10。The pressure-sensitive adhesive layer 5 has its first opening portion 11 at both end portions in the longitudinal direction. Each of the two first openings 11 has a substantially ring shape in plan view. The first opening portion 11 penetrates the pressure-sensitive adhesive layer 5 in the vertical direction. Further, the inner lower surface of the first opening portion 11 is open toward the lower side, and has a first groove 10 corresponding to the probe 8.

作為感壓接著層5之材料,例如若為具有感壓接著性之材料則並無特別限定。又,感壓接著層5亦為具有伸縮性之伸縮性材料。作為感壓接著層5之材料,具體而言列舉具有生物體相容性之材料,作為如此之材料,列舉丙烯酸系感壓接著劑、及矽酮系感壓接著劑等。較佳為,列舉丙烯酸系感壓接著劑。作為丙烯酸系感壓接著劑,例如列舉日本專利特開2003-342541號公報中記載之丙烯酸聚合物等。The material of the pressure-sensitive adhesive layer 5 is not particularly limited as long as it is a material having pressure-sensitive adhesive properties. Further, the pressure-sensitive adhesive layer 5 is also a stretchable stretchable material. The material of the pressure-sensitive adhesive layer 5 is specifically a material having biocompatibility, and examples of such a material include an acrylic pressure-sensitive adhesive and an anthrone-based pressure-sensitive adhesive. Preferably, an acrylic pressure-sensitive adhesive is used. An acrylic polymer or the like described in JP-A-2003-342541 is exemplified as the acrylic pressure-sensitive adhesive.

感壓接著層5之厚度為例如10 μm以上,較佳為20 μm以上,又,例如為95 μm以下,較佳為70 μm以下,更佳為50 μm以下。The thickness of the pressure-sensitive adhesive layer 5 is, for example, 10 μm or more, preferably 20 μm or more, and is, for example, 95 μm or less, preferably 70 μm or less, and more preferably 50 μm or less.

感壓接著層5之俯視下之尺寸係根據貼附有貼附型生物體感測器1之皮膚80(下述)適當地設定。感壓接著層5之長邊方向長度例如為30 mm以上,較佳為50 mm以上,又,例如為1000 mm以下,較佳為200 mm以下。感壓接著層5之短邊方向長度例如為5 mm以上,較佳為10 mm以上,又,例如為300 mm以下,較佳為100 mm以下。The size of the pressure-sensitive adhesive layer 5 in plan view is appropriately set in accordance with the skin 80 (described below) to which the attached biological sensor 1 is attached. The length of the pressure-sensitive adhesive layer 5 in the longitudinal direction is, for example, 30 mm or more, preferably 50 mm or more, and further, for example, 1000 mm or less, preferably 200 mm or less. The length of the pressure-sensitive adhesive layer 5 in the short-side direction is, for example, 5 mm or more, preferably 10 mm or more, and further, for example, 300 mm or less, preferably 100 mm or less.

基材層6形成基材2之上表面。基材層6係與感壓接著層5一同地形成基材2之外形形狀。基材層6之俯視形狀係與感壓接著層5之俯視形狀相同。基材層6配置於感壓接著層5之上表面整面。基材層6係支持感壓接著層5之支持層。基材層6具有沿長邊方向延伸之平板形狀。The substrate layer 6 forms the upper surface of the substrate 2. The base material layer 6 is formed in the outer shape of the base material 2 together with the pressure-sensitive adhesive layer 5. The top view shape of the base material layer 6 is the same as the top view shape of the pressure sensitive adhesive layer 5. The base material layer 6 is disposed on the entire surface of the upper surface of the pressure-sensitive adhesive layer 5. The substrate layer 6 supports the support layer of the pressure-sensitive adhesive layer 5. The base material layer 6 has a flat plate shape extending in the longitudinal direction.

又,基材層6於其上表面,具有與配線層7(下述)對應之基材槽12。基材槽12於俯視下,具有與配線層7相同之圖案形狀。基材槽12係朝向上側開放。Further, the base material layer 6 has a base material groove 12 corresponding to the wiring layer 7 (described later) on the upper surface thereof. The substrate groove 12 has the same pattern shape as the wiring layer 7 in plan view. The substrate groove 12 is open toward the upper side.

又,基材層6具有與第1開口部11對應之第2開口部13。第2開口部13係上下方向地連通至第1開口部11。第2開口部13具有與第1開口部11相同形狀及相同尺寸之俯視大致環形狀。Further, the base material layer 6 has the second opening portion 13 corresponding to the first opening portion 11. The second opening 13 communicates with the first opening 11 in the vertical direction. The second opening 13 has a substantially rectangular shape in plan view and the same size as the first opening 11 .

基材層6之材料例如列舉具有伸縮性之絕緣體等。作為如此之材料,例如列舉聚胺基甲酸酯系樹脂、矽酮系樹脂、丙烯酸系樹脂、聚苯乙烯系樹脂、氯乙烯系樹脂、聚酯系樹脂等熱塑性樹脂,較佳為,列舉聚胺基甲酸酯系樹脂。The material of the base material layer 6 is, for example, an expandable insulator or the like. Examples of such a material include thermoplastic resins such as a polyurethane resin, an anthrone resin, an acrylic resin, a polystyrene resin, a vinyl chloride resin, and a polyester resin. A urethane resin.

基材層6之斷裂伸長率例如為100%以上,較佳為200%以上,更佳為300%以上,又,例如為2000%以下。若斷裂伸長率為上述下限以上,則基材層6之材料具有優異之伸縮性。再者,斷裂伸長率係按照JIS K 7127(1999年),以拉伸速度5 mm/分鐘、試驗片類型2進行測定。The elongation at break of the base material layer 6 is, for example, 100% or more, preferably 200% or more, more preferably 300% or more, and further, for example, 2000% or less. When the elongation at break is at least the above lower limit, the material of the base material layer 6 has excellent stretchability. Further, the elongation at break was measured in accordance with JIS K 7127 (1999) at a tensile speed of 5 mm/min and a test piece type 2.

又,基材層6之20℃下之拉伸強度(夾盤間100 mm、拉伸速度300 mm/min,斷裂時之強度)例如為0.1 N/20 mm以上,較佳為1 N/20 mm以上,又,例如為20 N/20 mm以下。拉伸強度係按照JIS K 7127(1999年)進行測定。Further, the tensile strength at 20 ° C of the base material layer 6 (100 mm between the chucks, the tensile speed of 300 mm/min, and the strength at the time of breaking) is, for example, 0.1 N/20 mm or more, preferably 1 N/20. Above mm, again, for example, 20 N/20 mm or less. The tensile strength was measured in accordance with JIS K 7127 (1999).

進而,基材層6之20℃下之拉伸儲存彈性模量E'例如為2,000 MPa以下,較佳為1,000 MPa以下,更佳為100 MPa以下,進而較佳為50 MPa以下,尤佳為20 MPa以下,又,例如為0.1 MPa以上。若基材層6之拉伸儲存彈性模量E'為上述上限以下,則基材層6之材料具有優異之伸縮性。基材層6之20℃下之拉伸儲存彈性模量E'係藉由以頻率1 Hz及升溫速度10℃/分鐘之條件對基材層6進行動態黏彈性測定而求出。Further, the tensile storage elastic modulus E' at 20 ° C of the base material layer 6 is, for example, 2,000 MPa or less, preferably 1,000 MPa or less, more preferably 100 MPa or less, still more preferably 50 MPa or less, and particularly preferably 20 MPa or less, and, for example, 0.1 MPa or more. When the tensile storage elastic modulus E' of the base material layer 6 is at most the above upper limit, the material of the base material layer 6 has excellent stretchability. The tensile storage elastic modulus E' of the base material layer 6 at 20 ° C was determined by dynamic viscoelasticity measurement of the base material layer 6 at a frequency of 1 Hz and a temperature increase rate of 10 ° C / minute.

若滿足(1)斷裂伸長率為100%以上、(2)拉伸強度為20 N/20 mm以下、及(3)拉伸儲存彈性模量E'為2,000 MPa以下中之至少任1個要件,較佳為2個以上之要件,更佳為3個全部要件,則基材層6具備優異之柔軟性,同時具有優異之伸縮性。At least one of the requirements of (1) elongation at break of 100% or more, (2) tensile strength of 20 N/20 mm or less, and (3) tensile storage elastic modulus E' of 2,000 MPa or less are satisfied. Preferably, it is preferably two or more elements, more preferably three elements, and the base material layer 6 has excellent flexibility and excellent stretchability.

基材層6之厚度例如為1 μm以上,較佳為5 μm以上,又,例如為95 μm以下,較佳為50 μm以下,更佳為10 μm以下。The thickness of the base material layer 6 is, for example, 1 μm or more, preferably 5 μm or more, and is, for example, 95 μm or less, preferably 50 μm or less, and more preferably 10 μm or less.

配線層7係嵌入於基材槽12。詳細而言,配線層7係其上表面自基材層6露出之方式,嵌入於基材層6之上部。配線層7之上表面係與基材層6之上表面一同地形成基材2之上表面。The wiring layer 7 is embedded in the substrate groove 12. Specifically, the wiring layer 7 is embedded in the upper portion of the base material layer 6 such that its upper surface is exposed from the base material layer 6. The upper surface of the wiring layer 7 forms the upper surface of the substrate 2 together with the upper surface of the substrate layer 6.

配線層7具有將中介層3與連接部9或電池70(下述)電性連接之配線圖案。具體而言,配線層7具有:第1信號配線圖案21、第2信號配線圖案22、第1電源配線圖案23、第2電源配線圖案24。The wiring layer 7 has a wiring pattern electrically connecting the interposer 3 to the connection portion 9 or the battery 70 (described below). Specifically, the wiring layer 7 includes the first signal wiring pattern 21 , the second signal wiring pattern 22 , the first power source wiring pattern 23 , and the second power source wiring pattern 24 .

第1信號配線圖案21係將中介層3及連接部9電性連接。第1信號配線圖案21配置於基材層6中之長邊方向一側。第1信號配線圖案21具有第1基材信號端子21A、及與該第1基材信號端子21A相連之第1信號配線21B。The first signal wiring pattern 21 electrically connects the interposer 3 and the connection portion 9. The first signal wiring pattern 21 is disposed on one side in the longitudinal direction of the base material layer 6 . The first signal wiring pattern 21 includes a first substrate signal terminal 21A and a first signal wiring 21B connected to the first substrate signal terminal 21A.

第1基材信號端子21A係配置於電子零件區域14。具體而言,第1基材信號端子21A配置於電子零件區域14之短邊方向中央部之長邊方向一端部。The first substrate signal terminal 21A is disposed in the electronic component region 14 . Specifically, the first base material signal terminal 21A is disposed at one end portion in the longitudinal direction of the central portion of the electronic component region 14 in the short-side direction.

第1信號配線21B係自基材層6之長邊方向一端部朝向長邊方向另一側延伸,於基材層6之長邊方向中央部轉向,朝向短邊方向一側延伸。第1信號配線21B之一端部係與第1基材信號端子21A相連,另一端部與位於基材層6之長邊方向一端部之連接部9相連。The first signal line 21B extends from the one end portion in the longitudinal direction of the base material layer 6 toward the other side in the longitudinal direction, and is turned toward the center portion in the longitudinal direction of the base material layer 6 and extends toward the side in the short side direction. One end of the first signal wiring 21B is connected to the first base material signal terminal 21A, and the other end is connected to the connection portion 9 located at one end portion of the base material layer 6 in the longitudinal direction.

第2信號配線圖案22係將中介層3及連接部9電性連接。第2信號配線圖案22隔開間隔地配置於第1信號配線圖案21之長邊方向另一側。第2信號配線圖案22具有第2基材信號端子22A、及與該第2基材信號端子22A相連之第2信號配線22B。The second signal wiring pattern 22 electrically connects the interposer 3 and the connection portion 9. The second signal wiring patterns 22 are arranged on the other side in the longitudinal direction of the first signal wiring pattern 21 with a space therebetween. The second signal wiring pattern 22 includes a second substrate signal terminal 22A and a second signal wiring 22B connected to the second substrate signal terminal 22A.

第2基材信號端子22A配置於電子零件區域14。具體而言,第2基材信號端子22A配置於電子零件區域14之短邊方向中央部之長邊方向另一端部。The second substrate signal terminal 22A is disposed in the electronic component region 14 . Specifically, the second base material signal terminal 22A is disposed at the other end portion in the longitudinal direction of the central portion of the electronic component region 14 in the short-side direction.

第2信號配線22B係自基材層6之長邊方向另一端部朝向長邊方向一側延伸,於基材層6之長邊方向中央部轉向,朝向短邊方向一側延伸。第2信號配線22B之一端部與第2基材信號端子22A相連,其另一端部與位於基材層6之長邊方向另一端部之連接部9相連。The second signal wiring 22B extends from the other end portion of the base material layer 6 in the longitudinal direction toward the longitudinal direction, and is turned toward the central portion in the longitudinal direction of the base material layer 6 and extends toward the short side direction. One end of the second signal wiring 22B is connected to the second substrate signal terminal 22A, and the other end thereof is connected to the connection portion 9 located at the other end portion of the base material layer 6 in the longitudinal direction.

第1電源配線圖案23係將中介層3及電池70電性連接。第1電源配線圖案23配置於基材層6中之長邊方向中央。第1電源配線圖案23具有:第1基材電源端子23A、第1電池用電源端子23C、及將該等第1基材電源端子23A及第1電池用電源端子23C連接之第1電源配線23B。The first power supply wiring pattern 23 electrically connects the interposer 3 and the battery 70. The first power supply wiring pattern 23 is disposed at the center in the longitudinal direction of the base material layer 6 . The first power supply wiring pattern 23 includes a first base material power supply terminal 23A, a first battery power supply terminal 23C, and a first power supply wiring 23B that connects the first base material power supply terminal 23A and the first battery power supply terminal 23C. .

第1基材電源端子23A配置於電子零件區域14。具體而言,第1基材電源端子23A配置於電子零件區域14之長邊方向中央部之短邊方向另一端部。The first substrate power supply terminal 23A is disposed in the electronic component region 14 . Specifically, the first base material power supply terminal 23A is disposed at the other end portion in the short-side direction of the central portion in the longitudinal direction of the electronic component region 14 .

第1電池用電源端子23C配置於電池區域15。具體而言,第1電池用電源端子23C配置於基材層6之長邊方向中央部之短邊方向另一側。The first battery power terminal 23C is disposed in the battery region 15 . Specifically, the first battery power supply terminal 23C is disposed on the other side in the short-side direction of the central portion of the base material layer 6 in the longitudinal direction.

第1電源配線23B係自基材層6之短邊方向一側朝向短邊方向另一側直線狀延伸。第1電源配線23B之一端部係與第1基材電源端子23A相連,其另一端部與第1電池用電源端子23C相連。The first power supply wiring 23B linearly extends from one side in the short side direction of the base material layer 6 toward the other side in the short side direction. One end of the first power supply wiring 23B is connected to the first base material power supply terminal 23A, and the other end thereof is connected to the first battery power supply terminal 23C.

第2電源配線圖案24將中介層3及電池70電性連接。第2電源配線圖案24係於基材層6中之長邊方向中央處,隔開間隔地配置於第1電源配線圖案23之長邊方向另一側。第2電源配線圖案24具有:第2基材電源端子24A、第2電池用電源端子24C、及將該等第2基材電源端子24A及第2電池用電源端子24C連接之第2電源配線24B。The second power supply wiring pattern 24 electrically connects the interposer 3 and the battery 70. The second power supply wiring pattern 24 is disposed at the center in the longitudinal direction of the base material layer 6 and is disposed at the other side in the longitudinal direction of the first power supply wiring pattern 23 with a space therebetween. The second power supply wiring pattern 24 includes a second base material power supply terminal 24A, a second battery power supply terminal 24C, and a second power supply wiring 24B that connects the second base material power supply terminal 24A and the second battery power supply terminal 24C. .

第2基材電源端子24A配置於電子零件區域14。具體而言,第2基材電源端子24A係於電子零件區域14之長邊方向中央部之短邊方向另一端部,與第1基材電源端子23A隔開間隔地配置於長邊方向另一側。The second substrate power supply terminal 24A is disposed in the electronic component region 14 . Specifically, the second base material power supply terminal 24A is disposed at the other end portion in the short-side direction of the central portion of the electronic component region 14 in the longitudinal direction, and is disposed at the distance from the first base material power supply terminal 23A in the longitudinal direction. side.

第2電池用電源端子24C配置於電池區域15。具體而言,第2電池用電源端子24C係於基材層6之長邊方向中央部之短邊方向另一側,與第1電池用電源端子23C隔開間隔地配置於長邊方向另一側。The second battery power terminal 24C is disposed in the battery region 15. Specifically, the second battery power supply terminal 24C is disposed on the other side in the short-side direction of the center portion of the base material layer 6 in the longitudinal direction, and is disposed at the distance from the first battery power supply terminal 23C in the longitudinal direction. side.

第2電源配線24B自基材層6之短邊方向一側朝向短邊方向另一側直線狀延伸。第2電源配線24B之一端部係與第2基材電源端子24A相連,其另一端部係與第2電池用電源端子24C相連。The second power supply wiring 24B linearly extends from one side in the short side direction of the base material layer 6 toward the other side in the short side direction. One end of the second power supply wiring 24B is connected to the second base material power supply terminal 24A, and the other end thereof is connected to the second battery power supply terminal 24C.

配線層7之各端子(第1基材信號端子21A、第2基材信號端子22A、第1基材電源端子23A、第2基材電源端子24A、第1電池用電源端子23C、第2電池用電源端子24C)分別具有俯視大致矩形狀(焊盤形狀)。Each terminal of the wiring layer 7 (the first base material signal terminal 21A, the second base material signal terminal 22A, the first base material power supply terminal 23A, the second base material power supply terminal 24A, the first battery power supply terminal 23C, and the second battery Each of the power supply terminals 24C) has a substantially rectangular shape (pad shape) in plan view.

再者,配置於電子零件區域14之端子、即第1基材信號端子21A、第2基材信號端子22A、第1基材電源端子23A及第2基材電源端子24A構成與中介層3安裝之中介層側基材端子25。Further, the first substrate signal terminal 21A, the second substrate signal terminal 22A, the first substrate power terminal 23A, and the second substrate power source terminal 24A, which are disposed at the terminals of the electronic component region 14, are configured to be mounted on the interposer 3 The interposer side substrate terminal 25.

作為配線層7之材料例如列舉銅、鎳、金、及其等之合金等導體。作為配線層7之材料,較佳可列舉的是銅。Examples of the material of the wiring layer 7 include conductors such as copper, nickel, gold, and the like. As a material of the wiring layer 7, copper is preferable.

配線層7之厚度例如較基材層6之厚度薄。具體而言,配線層7之厚度例如為0.1 μm以上,較佳為1 μm以上,又,例如為100 μm以下,較佳為50 μm以下。The thickness of the wiring layer 7 is, for example, thinner than the thickness of the base material layer 6. Specifically, the thickness of the wiring layer 7 is, for example, 0.1 μm or more, preferably 1 μm or more, and is, for example, 100 μm or less, or preferably 50 μm or less.

探針8係如圖7中所示,於感壓接著層5貼附於皮膚80時,與皮膚80接觸,感測來自生物體之電氣信號或溫度、振動、汗、代謝物等之電極(生物體電極)。探針8以自感壓接著層5之下表面露出之方式,嵌入於感壓接著層5。即,探針8於第1開口部11之內側,嵌入於感壓接著層5中之第1槽10。再者,探針8配置於形成第1槽10之感壓接著層5之下表面。探針8係與感壓接著層5一同地形成基材2之下表面。探針8具有網形狀,較佳為具有俯視大致柵格形狀(或大致網眼形狀)。再者,如圖10A中所示,探針8之側面中位於最外側之外側面形成俯視下通過該等之假想圓。As shown in FIG. 7, the probe 8 is in contact with the skin 80 when the pressure-sensitive adhesive layer 5 is attached to the skin 80, and senses an electrical signal from the living body or an electrode of temperature, vibration, sweat, metabolite, or the like ( Biological electrode). The probe 8 is embedded in the pressure-sensitive adhesive layer 5 so as to be exposed to the lower surface of the layer 5 by the self-inductance. That is, the probe 8 is fitted inside the first opening 11 and is fitted into the first groove 10 in the pressure-sensitive adhesive layer 5. Further, the probe 8 is disposed on the lower surface of the pressure-sensitive adhesive layer 5 on which the first groove 10 is formed. The probe 8 forms the lower surface of the substrate 2 together with the pressure-sensitive adhesive layer 5. The probe 8 has a mesh shape, and preferably has a substantially grid shape (or a substantially mesh shape) in plan view. Further, as shown in FIG. 10A, the outer side of the side surface of the probe 8 is formed to pass through the imaginary circles in a plan view.

作為探針8之材料,可列舉配線層7中例示之材料(具體而言為導體)。探針8之外形尺寸係與以劃分第1開口部11之內周面於俯視下重複之方式,設定通過外側面16之假想圓。The material of the probe 8 is exemplified as a material (specifically, a conductor) exemplified in the wiring layer 7. The outer dimension of the probe 8 is set to an imaginary circle passing through the outer side surface 16 so as to overlap the inner peripheral surface of the first opening portion 11 in plan view.

如圖1~圖3中所示,連接部9係與第2開口部13及第1開口部11對應地設置,且具有與該等相同之形狀。連接部9係上下方向地貫通(通過)基材層6及感壓接著層5,且填充於第2開口部13及第1開口部11中。連接部9如圖10B中所示,具有沿著探針8之外側面16之俯視下環形形狀。具體而言,連接部9具有軸線沿著上下方向延伸(沿著通過外側面16之假想圓)之大致圓筒形狀。As shown in FIGS. 1 to 3, the connecting portion 9 is provided corresponding to the second opening portion 13 and the first opening portion 11, and has the same shape as the above. The connection portion 9 penetrates (passes) the base material layer 6 and the pressure-sensitive adhesive layer 5 in the vertical direction, and is filled in the second opening portion 13 and the first opening portion 11. The connecting portion 9 has a circular shape in plan view along the outer side 16 of the probe 8 as shown in FIG. 10B. Specifically, the connecting portion 9 has a substantially cylindrical shape in which the axis extends in the up and down direction (along the imaginary circle passing through the outer side surface 16).

連接部9之內側面接觸於探針8之外側面16。連接部9感壓接著於第1開口部11之外側之感壓接著層5、及第1開口部11之內側之感壓接著層5。又,連接部9接觸於第2開口部13之外側之基材層6、及第2開口部13之內側之基材層6。The inner side of the connecting portion 9 is in contact with the outer side 16 of the probe 8. The connection portion 9 is pressure-sensitive to the pressure-sensitive adhesive layer 5 on the outer side of the first opening portion 11 and the pressure-sensitive adhesive layer 5 and the inner side of the first opening portion 11. Moreover, the connection portion 9 is in contact with the base material layer 6 on the outer side of the second opening portion 13 and the base material layer 6 on the inner side of the second opening portion 13.

連接部9之上表面係與基材層6之上表面為同一面。連接部9之下表面係與感壓接著層5之下表面為同一面。The upper surface of the connecting portion 9 is flush with the upper surface of the base material layer 6. The lower surface of the connecting portion 9 is flush with the lower surface of the pressure-sensitive adhesive layer 5.

如圖1~圖3中所示,2個連接部9中之位於長邊方向一側之連接部9於其上端部,與第1信號配線21B之長邊方向一端緣相連。位於長邊方向另一側之連接部9於其上端部,與第2信號配線22B之長邊方向另一端緣相連。即,連接部9係與配線層7電性連接。As shown in FIG. 1 to FIG. 3, the connection portion 9 of the two connection portions 9 on the side in the longitudinal direction is connected to one end edge of the first signal wiring 21B in the longitudinal direction at the upper end portion thereof. The connection portion 9 located on the other side in the longitudinal direction is connected to the other end edge of the second signal wiring 22B in the longitudinal direction at the upper end portion thereof. That is, the connection portion 9 is electrically connected to the wiring layer 7.

藉此,連接部9將配線層7與探針8電性連接。Thereby, the connection portion 9 electrically connects the wiring layer 7 and the probe 8.

作為連接部9之材料,例如列舉金屬、導電性樹脂(含導電性高分子)等,較佳為列舉導電性樹脂等。The material of the connection portion 9 is, for example, a metal or a conductive resin (including a conductive polymer), and a conductive resin or the like is preferably used.

再者,連接部9及配線層7構成將探針8電性連接於中介層3之基材電路部26。即,基材電路部26具有配置於基材2之上表面之配線層7、及上下方向上通過基材2之連接部9。Further, the connection portion 9 and the wiring layer 7 constitute a base circuit portion 26 that electrically connects the probe 8 to the interposer 3 . In other words, the base material circuit portion 26 has the wiring layer 7 disposed on the upper surface of the base material 2 and the connecting portion 9 passing through the base material 2 in the vertical direction.

(中介層) 中介層3係將複數個電子零件4與配線層7電性連接者,且介置於複數個電子零件4及配線層7之間,與該等電性連接。(Intermediate Layer) The interposer 3 electrically connects a plurality of electronic components 4 and the wiring layer 7, and is interposed between the plurality of electronic components 4 and the wiring layer 7, and is electrically connected thereto.

中介層3如圖1、圖4A~圖5B中所示,配置於電子零件區域14。中介層3形成為俯視下大致矩形狀。中介層3具有柔軟性(可撓性)。中介層3係如圖6A~圖6B中所示,具有支持基板31、配置於支持基板31之下表面之下側配線層32、配置於支持基板31之上表面之上側配線層33、及將該等電性連接之通孔部34。The interposer 3 is disposed in the electronic component region 14 as shown in FIGS. 1 and 4A to 5B. The interposer 3 is formed in a substantially rectangular shape in plan view. The interposer 3 has flexibility (flexibility). As shown in FIGS. 6A to 6B, the interposer 3 has a support substrate 31, a lower wiring layer 32 disposed on the lower surface of the support substrate 31, a wiring layer 33 disposed on the upper surface of the support substrate 31, and a wiring layer 33. The via portions 34 are electrically connected.

支持基板31具有俯視下大致矩形狀之平板形狀,形成中介層3之外形形狀。支持基板31形成有與複數個通孔部34對應之複數個貫通孔。The support substrate 31 has a flat plate shape having a substantially rectangular shape in plan view, and forms an outer shape of the interposer 3. The support substrate 31 is formed with a plurality of through holes corresponding to the plurality of through hole portions 34.

作為支持基板31之材料,例如列舉具備柔軟性之絕緣體。作為如此之材料,例如列舉聚醯亞胺系樹脂、聚醯胺醯亞胺系樹脂、丙烯酸系樹脂、聚醚腈系樹脂、聚醚碸系樹脂、聚對苯二甲酸乙二酯系樹脂、聚萘二甲酸乙二酯系樹脂、聚氯乙烯系樹脂等合成樹脂等,較佳為列舉聚醯亞胺系樹脂。As a material of the support substrate 31, for example, a flexible insulator is exemplified. Examples of such a material include a polyimide-based resin, a polyamidoximine-based resin, an acrylic resin, a polyether nitrile resin, a polyether oxime resin, and a polyethylene terephthalate resin. A synthetic resin such as a polyethylene naphthalate resin or a polyvinyl chloride resin is preferably a polyimide resin.

又,支持基板31除了上述合成樹脂以外,亦列舉表面上積層有絕緣層之金屬薄膜(例如,不鏽鋼箔)。Further, in addition to the above synthetic resin, the support substrate 31 also includes a metal thin film (for example, a stainless steel foil) having an insulating layer laminated on its surface.

較佳為,支持基板31係由聚醯亞胺系樹脂形成之聚醯亞胺基板。Preferably, the support substrate 31 is a polyimide substrate formed of a polyimide resin.

支持基板31之厚度例如為5 μm以上,較佳為10 μm以上,又,例如為2 mm以下,較佳為1 mm以下。The thickness of the support substrate 31 is, for example, 5 μm or more, preferably 10 μm or more, and is, for example, 2 mm or less, preferably 1 mm or less.

下側配線層32係如圖5B之虛線所示,具有下側端子(基材側中繼端子)35、及下側配線36。The lower wiring layer 32 has a lower terminal (substrate side relay terminal) 35 and a lower wiring 36 as indicated by a broken line in FIG. 5B.

下側端子35具有複數個(2個)中繼信號端子37、及複數個(2個)中繼電源端子38。The lower terminal 35 has a plurality of (two) relay signal terminals 37 and a plurality of (two) relay power supply terminals 38.

複數個中繼信號端子37具有第1中繼信號端子37A、及第2中繼信號端子37B。The plurality of relay signal terminals 37 have a first relay signal terminal 37A and a second relay signal terminal 37B.

第1中繼信號端子37A配置於中介層3之短邊方向中央部之長邊方向一端部。第1中繼信號端子37A係與第1下側配線36A(下述)之一端部相連。第1中繼信號端子37A經由導電性接合材(下述)而與第1基材信號端子21A電性連接。The first relay signal terminal 37A is disposed at one end portion in the longitudinal direction of the central portion of the interposer 3 in the short-side direction. The first relay signal terminal 37A is connected to one end of the first lower wiring 36A (described later). The first relay signal terminal 37A is electrically connected to the first base material signal terminal 21A via a conductive bonding material (described later).

第2中繼信號端子37B配置於中介層3之短邊方向中央部之長邊方向另一端部。第2中繼信號端子37B係與第2下側配線36B(下述)之一端部相連。第2中繼信號端子37B經由導電性接合材而與第2基材信號端子22A電性連接。The second relay signal terminal 37B is disposed at the other end portion in the longitudinal direction of the central portion of the interposer 3 in the short-side direction. The second relay signal terminal 37B is connected to one end of the second lower wiring 36B (described later). The second relay signal terminal 37B is electrically connected to the second base material signal terminal 22A via a conductive bonding material.

複數個中繼電源端子38具有第1中繼電源端子38A、第2中繼電源端子38B。The plurality of relay power supply terminals 38 have a first relay power supply terminal 38A and a second relay power supply terminal 38B.

第1中繼電源端子38A配置於中介層3之短邊方向另一端部。第1中繼電源端子38A係與第3下側配線36C之一端部相連。第1中繼電源端子38A經由導電性接合材而與第1基材電源端子23A電性連接。The first relay power supply terminal 38A is disposed at the other end portion of the interposer 3 in the short side direction. The first relay power supply terminal 38A is connected to one end of the third lower wiring 36C. The first relay power supply terminal 38A is electrically connected to the first base material power supply terminal 23A via a conductive bonding material.

第2中繼電源端子38B於中介層3之短邊方向另一端部,配置於第1中繼電源端子38A之長邊方向另一側。第2中繼電源端子38B係與第4下側配線36D之一端部相連。第2中繼電源端子38B經由導電性接合材而與第2基材電源端子24A電性連接。The second relay power supply terminal 38B is disposed at the other end in the short-side direction of the interposer 3, and is disposed on the other side in the longitudinal direction of the first relay power supply terminal 38A. The second relay power terminal 38B is connected to one end of the fourth lower wiring 36D. The second relay power supply terminal 38B is electrically connected to the second base material power supply terminal 24A via a conductive bonding material.

形成下側端子35之端子(中繼信號端子37、中繼電源端子38)分別具有俯視下大致矩形狀(焊盤形狀)。The terminals (the relay signal terminal 37 and the relay power supply terminal 38) forming the lower terminal 35 have a substantially rectangular shape (pad shape) in plan view.

下側配線36具有第1下側配線36A、第2下側配線36B、第3下側配線36C、第4下側配線36D。The lower wiring 36 has a first lower wiring 36A, a second lower wiring 36B, a third lower wiring 36C, and a fourth lower wiring 36D.

第1下側配線36A將第1中繼信號端子37A與第1通孔34A(下述)電性連接。具體而言,第1下側配線36A之一端部係與第1中繼信號端子37A相連,其另一端部與第1通孔34A連接。The first lower wiring 36A electrically connects the first relay signal terminal 37A and the first through hole 34A (described later). Specifically, one end of the first lower wiring 36A is connected to the first relay signal terminal 37A, and the other end thereof is connected to the first through hole 34A.

第2下側配線36B將第2中繼信號端子37B與第2通孔34B(下述)電性連接。具體而言,第2下側配線36B之一端部係與第2中繼信號端子37B相連,其另一端部與第2通孔34B連接。The second lower wiring 36B electrically connects the second relay signal terminal 37B and the second through hole 34B (described later). Specifically, one end of the second lower wiring 36B is connected to the second relay signal terminal 37B, and the other end thereof is connected to the second through hole 34B.

第3下側配線36C將第1中繼電源端子38A與第3通孔34C(下述)及第4通孔34D(下述)電性連接。具體而言,第3下側配線36C之一端部係與第1中繼電地端子38A相連,其另一端部與第3通孔34C連接,又,該等之中間部與第4通孔34D連接。The third lower wiring 36C electrically connects the first relay power supply terminal 38A to the third through hole 34C (described later) and the fourth through hole 34D (described later). Specifically, one end of the third lower wiring 36C is connected to the first relay electric ground terminal 38A, and the other end thereof is connected to the third through hole 34C. Further, the intermediate portion and the fourth through hole 34D are connected. connection.

第4下側配線36D將第2中繼電源端子38B與第5通孔34E(下述)及第6通孔34F(下述)電性連接。具體而言,第4下側配線36D之一端部係與第2中繼電源端子38B相連,其另一端部與第5通孔34E連接,且於該等之中間部,與第6通孔34F連接。The fourth lower wiring 36D electrically connects the second relay power supply terminal 38B to the fifth through hole 34E (described later) and the sixth through hole 34F (described later). Specifically, one end of the fourth lower wiring 36D is connected to the second relay power terminal 38B, and the other end thereof is connected to the fifth through hole 34E, and the intermediate portion and the sixth through hole 34F are provided at the intermediate portion. connection.

上側配線層33如圖5B之實線所示,具有上側端子(電子零件側中繼端子)39、及上側配線40。As shown by the solid line in FIG. 5B, the upper wiring layer 33 has an upper terminal (electronic component side relay terminal) 39 and an upper wiring 40.

上側端子39具有複數個(8個)第1上側端子41、複數個(4個)第2上側端子42、及複數個(4個)第3上側端子43。The upper terminal 39 has a plurality of (eight) first upper terminals 41, a plurality of (four) second upper terminals 42, and a plurality of (four) third upper terminals 43.

複數個第1上側端子41以與第1電子零件51之複數個(8個)第1零件端子54(下述)對應之方式,設置於中介層3之上表面。具體而言,複數個第1上側端子41具有第1上側端子A(41A)、第1上側端子B(41B)、第1上側端子C(41C)、第1上側端子D(41D)、第1上側端子E(41E)、第1上側端子F(41F)、第1上側端子G(41G)、第1上側端子H(41H)。The plurality of first upper terminals 41 are provided on the upper surface of the interposer 3 so as to correspond to a plurality of (eight) first component terminals 54 (described below) of the first electronic component 51. Specifically, the plurality of first upper terminals 41 have the first upper terminal A (41A), the first upper terminal B (41B), the first upper terminal C (41C), the first upper terminal D (41D), and the first The upper terminal E (41E), the first upper terminal F (41F), the first upper terminal G (41G), and the first upper terminal H (41H).

複數個第2上側端子42以與第2電子零件52之複數個(4個)第2零件端子55(下述)對應之方式,設置於中介層3之上表面。具體而言,複數個第2上側端子42具有第2上側端子A(42A)、第2上側端子B(42B)、第2上側端子C(42C)、第2上側端子D(42D)。The plurality of second upper terminals 42 are provided on the upper surface of the interposer 3 so as to correspond to a plurality of (four) second component terminals 55 (described below) of the second electronic component 52. Specifically, the plurality of second upper terminals 42 include a second upper terminal A (42A), a second upper terminal B (42B), a second upper terminal C (42C), and a second upper terminal D (42D).

複數個第3上側端子43以與第3電子零件53之複數個(4個)第3零件端子56(下述)對應之方式,設置於中介層3之上表面。具體而言,複數個第3上側端子43具有第3上側端子A(43A)、第3上側端子B(43B)、第3上側端子C(43C)、第3上側端子D(43D)。The plurality of third upper terminals 43 are provided on the upper surface of the interposer 3 so as to correspond to a plurality of (four) third component terminals 56 (described below) of the third electronic component 53. Specifically, the plurality of third upper terminals 43 include a third upper terminal A (43A), a third upper terminal B (43B), a third upper terminal C (43C), and a third upper terminal D (43D).

第1上側端子41、第2上側端子42及第3上側端子43分別具有俯視大致矩形狀(焊盤形狀)。Each of the first upper terminal 41, the second upper terminal 42, and the third upper terminal 43 has a substantially rectangular shape (pad shape) in plan view.

上側配線40具有第1上側配線40A、第2上側配線40B、第3上側配線40C、第4上側配線40D、第5上側配線40E、第6上側配線40F、第7上側配線40G、第8上側配線40H、第9上側配線40I。The upper wiring 40 has the first upper wiring 40A, the second upper wiring 40B, the third upper wiring 40C, the fourth upper wiring 40D, the fifth upper wiring 40E, the sixth upper wiring 40F, the seventh upper wiring 40G, and the eighth upper wiring. 40H, ninth upper side wiring 40I.

第1上側配線40A將第1上側端子A(41A)與第1通孔34A(下述)電性連接。具體而言,第1上側配線40A之一端部係與第1上側端子A(41A)相連,其另一端部與第1通孔34A連接。The first upper wiring 40A electrically connects the first upper terminal A (41A) and the first through hole 34A (described later). Specifically, one end of the first upper wiring 40A is connected to the first upper terminal A (41A), and the other end thereof is connected to the first through hole 34A.

第2上側配線40B將第1上側端子B(41B)與第2通孔34B(下述)電性連接。具體而言,第2上側配線40B之一端部係與第1上側端子B(41B)相連,其另一端部與第2通孔34B連接。The second upper wiring 40B electrically connects the first upper terminal B (41B) and the second through hole 34B (described later). Specifically, one end of the second upper wiring 40B is connected to the first upper terminal B (41B), and the other end thereof is connected to the second through hole 34B.

第3上側配線40C將第1上側端子C(41C)與第2上側端子D(42D)電性連接。具體而言,第3上側配線40C之一端部係與第1上側端子C(41C)相連,其另一端部與第2上側端子D(42D)相連。The third upper wiring 40C electrically connects the first upper terminal C (41C) and the second upper terminal D (42D). Specifically, one end of the third upper wiring 40C is connected to the first upper terminal C (41C), and the other end thereof is connected to the second upper terminal D (42D).

第4上側配線40D將第1上側端子D(41D)與第3上側端子A(43A)電性連接。具體而言,第4上側配線40D之一端部係與第1上側端子D(41D)相連,其另一端部與第3上側端子A(43A)相連。The fourth upper wiring 40D electrically connects the first upper terminal D (41D) and the third upper terminal A (43A). Specifically, one end of the fourth upper wiring 40D is connected to the first upper terminal D (41D), and the other end thereof is connected to the third upper terminal A (43A).

第5上側配線40E將第1上側端子E(41E)與第2上側端子A(42A)電性連接。具體而言,第5上側配線40E之一端部係與第1上側端子E(41E)相連,其另一端部與第2上側端子A(42A)相連。The fifth upper wiring 40E electrically connects the first upper terminal E (41E) and the second upper terminal A (42A). Specifically, one end of the fifth upper wiring 40E is connected to the first upper terminal E (41E), and the other end thereof is connected to the second upper terminal A (42A).

第6上側配線40F將第1上側端子F(41F)與第3上側端子B(43B)電性連接。具體而言,第6上側配線40F之一端部係與第1上側端子F(41F)相連,其另一端部與第3上側端子B(43B)相連。The sixth upper wiring 40F electrically connects the first upper terminal F (41F) and the third upper terminal B (43B). Specifically, one end of the sixth upper wiring 40F is connected to the first upper terminal F (41F), and the other end thereof is connected to the third upper terminal B (43B).

第7上側配線40G將第1上側端子G(41G)與第2上側端子B(42B)或第3通孔34C電性連接。具體而言,第7上側配線40G之一端部係與第1上側端子G(41G)相連,其另一端部與第2上側端子B(42B)相連,又,該等之中間部與第3通孔34C(下述)連接。The seventh upper wiring 40G electrically connects the first upper terminal G (41G) to the second upper terminal B (42B) or the third through hole 34C. Specifically, one end of the seventh upper wiring 40G is connected to the first upper terminal G (41G), the other end thereof is connected to the second upper terminal B (42B), and the intermediate portion and the third communication are connected. The holes 34C (described below) are connected.

第8上側配線40H將第1上側端子H(41H)與第5通孔34E電性連接。具體而言,第8上側配線40H之一端部係與第1上側端子H(41H)相連,其另一端部與第5通孔34E連接。The eighth upper wiring 40H electrically connects the first upper terminal H (41H) and the fifth through hole 34E. Specifically, one end of the eighth upper wiring 40H is connected to the first upper terminal H (41H), and the other end thereof is connected to the fifth through hole 34E.

第9上側配線40I係與第2上側端子C(42C)電性連接。第9上側配線40I具有俯視大致T字形狀。具體而言,第9上側配線40I之一端部從第2上側端子C(42C)朝向短邊方向另一側延伸,於中介層3之短邊方向另一端部分支,朝向長邊方向兩外側延伸。第9上側配線40I具備作為天線配線之功能。The ninth upper wiring 40I is electrically connected to the second upper terminal C (42C). The ninth upper wiring 40I has a substantially T-shape in plan view. Specifically, one end portion of the ninth upper wiring 40I extends from the second upper terminal C (42C) toward the other side in the short side direction, and is branched at the other end portion of the interposer 3 in the short side direction, and extends toward both sides in the longitudinal direction. . The ninth upper wiring 40I has a function as an antenna wiring.

通孔部34以將下側配線層32與上側配線層33電性連接之方式,將支持基板31上下方向地貫通。通孔部34具有第1通孔34A、第2通孔34B、第3通孔34C、第4通孔34D、第5通孔34E、第6通孔34F。The through hole portion 34 penetrates the support substrate 31 in the vertical direction so as to electrically connect the lower wiring layer 32 and the upper wiring layer 33. The through hole portion 34 has a first through hole 34A, a second through hole 34B, a third through hole 34C, a fourth through hole 34D, a fifth through hole 34E, and a sixth through hole 34F.

第1通孔34A將第1下側配線36A與第1上側配線40A電性連接。具體而言,第1通孔34A之下端係與第1下側配線36A之另一端部連接,其上端與第1上側配線40A之另一端部連接。The first through hole 34A electrically connects the first lower wiring 36A and the first upper wiring 40A. Specifically, the lower end of the first through hole 34A is connected to the other end of the first lower wiring 36A, and the upper end thereof is connected to the other end of the first upper wiring 40A.

第2通孔34B將第2下側配線36B與第2上側配線40B電性連接。具體而言,第2通孔34B之下端係與第2下側配線36B之另一端部連接,其上端與第2上側配線40B之另一端部連接。The second through hole 34B electrically connects the second lower wiring 36B and the second upper wiring 40B. Specifically, the lower end of the second through hole 34B is connected to the other end of the second lower wiring 36B, and the upper end thereof is connected to the other end of the second upper wiring 40B.

第3通孔34C將第3下側配線36C與第7上側配線40G電性連接。具體而言,第3通孔34C之下端係與第3下側配線36C之另一端部連接,其上端與第7上側配線40G之中間部連接。The third through hole 34C electrically connects the third lower wiring 36C and the seventh upper wiring 40G. Specifically, the lower end of the third through hole 34C is connected to the other end of the third lower wiring 36C, and the upper end thereof is connected to the intermediate portion of the seventh upper wiring 40G.

第4通孔34D將第3下側配線36C與第3上側端子C(43C)電性連接。具體而言,第4通孔34D之下端係與第3下側配線36C之中間部連接,其上端與第3上側端子C(41C)連接。The fourth through hole 34D electrically connects the third lower wiring 36C and the third upper terminal C (43C). Specifically, the lower end of the fourth through hole 34D is connected to the intermediate portion of the third lower wiring 36C, and the upper end thereof is connected to the third upper terminal C (41C).

第5通孔34E將第4下側配線36D與第8上側配線40H電性連接。具體而言,第5通孔34E之下端係與第4下側配線36D之另一端部連接,其上端與第8上側配線40H之另一端部連接。The fifth through hole 34E electrically connects the fourth lower wiring 36D and the eighth upper wiring 40H. Specifically, the lower end of the fifth through hole 34E is connected to the other end of the fourth lower wiring 36D, and the upper end thereof is connected to the other end of the eighth upper wiring 40H.

第6通孔34F將第4下側配線36D與第3上側端子D(43D)電性連接。具體而言,第6通孔34F之下端係與第4下側配線36D之中間部連接,其上端與第3上側端子D(43D)連接。The sixth through hole 34F electrically connects the fourth lower wiring 36D and the third upper terminal D (43D). Specifically, the lower end of the sixth through hole 34F is connected to the intermediate portion of the fourth lower wiring 36D, and the upper end thereof is connected to the third upper terminal D (43D).

第1通孔34A~第6通孔34F分別具有俯視大致圓形狀。Each of the first through hole 34A to the third through hole 34F has a substantially circular shape in plan view.

作為下側配線層32、上側配線層33及通孔部34之材料,分別列舉例如銅、鎳、金、該等之合金等導體,較佳為列舉銅。Examples of the material of the lower wiring layer 32, the upper wiring layer 33, and the via hole portion 34 include conductors such as copper, nickel, gold, and the like, and copper is preferable.

下側配線層32及上側配線層33之厚度分別為例如0.1 μm以上,較佳為1 μm以上,又,例如為100 μm以下,較佳為50 μm以下。The thickness of the lower wiring layer 32 and the upper wiring layer 33 is, for example, 0.1 μm or more, preferably 1 μm or more, and is, for example, 100 μm or less, or preferably 50 μm or less.

再者,下側配線層32、上側配線層33及通孔部34構成將配線層7電性連接於電子零件4之中繼電路部44。即,中繼電路部44具有配置於支持基板31之下表面之下側配線層32、配置於支持基板31之上表面之上側配線層33、及上下方向上通過支持基板31之通孔部34。Further, the lower wiring layer 32, the upper wiring layer 33, and the via portion 34 constitute a relay circuit portion 44 that electrically connects the wiring layer 7 to the electronic component 4. In other words, the relay circuit unit 44 includes the lower wiring layer 32 disposed on the lower surface of the support substrate 31, the upper wiring layer 33 disposed on the upper surface of the support substrate 31, and the through hole portion passing through the support substrate 31 in the vertical direction. 34.

中介層3之彎曲剛性例如為3.0×1012 GPa·μm4 以下,較佳為1.0×1012 GPa·μm4 以下,更佳為5.4×1010 GPa·μm4 以下,進而較佳為6.0×106 GPa·μm4 以下,又,例如為7.5×102 GPa·μm4 以上,較佳為1.0×103 GPa·μm4 以上,更佳為9.4×104 GPa·μm4 以上。若中介層3之彎曲剛性為上述上限以下,則中介層3發揮柔軟性,於貼附型生物體感測器1之伸縮時,抑制中介層3自基材2脫落。The bending rigidity of the interposer 3 is, for example, 3.0 × 10 12 GPa·μm 4 or less, preferably 1.0 × 10 12 GPa·μm 4 or less, more preferably 5.4 × 10 10 GPa·μm 4 or less, further preferably 6.0 × Further, 10 6 GPa·μm 4 or less is, for example, 7.5 × 10 2 GPa·μm 4 or more, preferably 1.0 × 10 3 GPa·μm 4 or more, and more preferably 9.4 × 10 4 GPa·μm 4 or more. When the bending rigidity of the interposer 3 is not more than the above-described upper limit, the interposer 3 exhibits flexibility, and when the attached biosensor 1 expands and contracts, the interposer 3 is prevented from falling off from the substrate 2.

中介層3之彎曲剛性(Z)能夠藉由公知之方法運算,例如按照下述式進行運算。The bending rigidity (Z) of the interposer 3 can be calculated by a known method, for example, according to the following formula.

【數1】 [Number 1]

Ei表示彈性模數,Ai表示剖面面積(由寬度bi與厚度hi之乘積得到之剖面面積),Gi表示重心座標,bi表示寬度,hi表示厚度。彈性模數藉由使用例如拉伸壓縮試驗機(TAInstruments公司製造、「型號RSA-G2」),以拉伸速度300 mm/min進行測定而求出。再者,中介層3之彎曲剛性亦可近似於支持基板31之彎曲剛性。Ei represents the elastic modulus, Ai represents the cross-sectional area (the cross-sectional area obtained by the product of the width bi and the thickness hi), Gi represents the center of gravity coordinate, bi represents the width, and hi represents the thickness. The elastic modulus is determined by measuring at a tensile speed of 300 mm/min using, for example, a tensile compression tester (manufactured by TA Instruments, "Model RSA-G2"). Furthermore, the bending rigidity of the interposer 3 can also approximate the bending rigidity of the support substrate 31.

中介層3之俯視下之尺寸係根據電子零件4之大小而適當地設定。即,中介層3係設定為具有能夠將複數個電子零件4全部安裝之大小(俯視)。具體而言,中介層3之長邊方向長度例如為5 mm以上,較佳為10 mm以上,又,例如為60 mm以下,較佳為40 mm以下。中介層3之短邊方向長度例如為4 mm以上,較佳為8 mm以上,又,例如為50 mm以下,較佳為30 mm以下。中介層3之厚度例如為0.1 mm以上,較佳為0.2 mm以上,又,例如為3 mm以下,較佳為2 mm以下。The size of the interposer 3 in plan view is appropriately set in accordance with the size of the electronic component 4. That is, the interposer 3 is set to have a size (plan view) in which all of the plurality of electronic components 4 can be mounted. Specifically, the length of the interposer 3 in the longitudinal direction is, for example, 5 mm or more, preferably 10 mm or more, and is, for example, 60 mm or less, preferably 40 mm or less. The length of the interposer 3 in the short-side direction is, for example, 4 mm or more, preferably 8 mm or more, and is, for example, 50 mm or less, preferably 30 mm or less. The thickness of the interposer 3 is, for example, 0.1 mm or more, preferably 0.2 mm or more, and is, for example, 3 mm or less, preferably 2 mm or less.

(電子零件) 複數個(3個)電子零件4如圖1及圖4A~圖4B所示,具有第1電子零件51、第2電子零件52、第3電子零件53。(Electronic Component) A plurality of (three) electronic components 4 include a first electronic component 51, a second electronic component 52, and a third electronic component 53 as shown in FIGS. 1 and 4A to 4B.

第1電子零件51係例如類比前端元件,具有俯視下大致矩形狀之箱型形狀。第1電子零件51如圖4A之虛線所示,於其下表面具有複數個(8個)第1零件端子54(54A~54H)。The first electronic component 51 is, for example, an analog front end element, and has a box shape having a substantially rectangular shape in plan view. The first electronic component 51 has a plurality of (eight) first component terminals 54 (54A to 54H) on its lower surface as indicated by a broken line in FIG. 4A.

第2電子零件52係例如記憶元件,具有俯視下大致矩形狀之箱型形狀。第2電子零件52於其下表面具有複數個(4個)第2零件端子55(55A~55D)。The second electronic component 52 is, for example, a memory element, and has a box shape having a substantially rectangular shape in plan view. The second electronic component 52 has a plurality of (four) second component terminals 55 (55A to 55D) on its lower surface.

第3電子零件53係例如無線通信元件,具有俯視下大致矩形狀之箱型形狀。第3電子零件53於其下表面具有複數個(4個)第3零件端子56(56A~56D)。The third electronic component 53 is, for example, a wireless communication element, and has a box shape having a substantially rectangular shape in plan view. The third electronic component 53 has a plurality of (four) third component terminals 56 (56A to 56D) on its lower surface.

第1零件端子54、第2零件端子55及第3零件端子56分別具有俯視大致矩形狀(焊盤形狀)。Each of the first component terminal 54, the second component terminal 55, and the third component terminal 56 has a substantially rectangular shape (pad shape) in plan view.

各電子零件(51~53)之俯視下之尺寸係只要該等之俯視下之總面積小於中介層3之俯視之面積則不受限定。具體而言,各電子零件(51~53)之長邊方向長度例如為0.2 mm以上,較佳為0.3 mm以上,又,例如為10 mm以下,較佳為8 mm以下。各電子零件之短邊方向長度例如為0.1 mm以上,較佳為0.2 mm以上,又,例如為8 mm以下,較佳為6 mm以下。各電子零件之厚度例如為0.02 mm以上,較佳為0.03 mm以上,又,例如為2 mm以下,較佳為1 mm以下。The dimensions of each of the electronic components (51 to 53) in plan view are not limited as long as the total area in the plan view is smaller than the area of the intermediate layer 3 in plan view. Specifically, the length of each electronic component (51 to 53) in the longitudinal direction is, for example, 0.2 mm or more, preferably 0.3 mm or more, and is, for example, 10 mm or less, preferably 8 mm or less. The length of each electronic component in the short-side direction is, for example, 0.1 mm or more, preferably 0.2 mm or more, and is, for example, 8 mm or less, preferably 6 mm or less. The thickness of each electronic component is, for example, 0.02 mm or more, preferably 0.03 mm or more, and is, for example, 2 mm or less, preferably 1 mm or less.

2.貼附型生物體感測器之製造方法 參照圖8A~圖9G,說明貼附型生物體感測器1之製造方法。2. Method of Manufacturing Attached Biosensor The method of manufacturing the attached biosensor 1 will be described with reference to Figs. 8A to 9G.

生物體感測器1例如藉由準備基材2、中介層3及複數個電子零件4之準備步驟、將複數個電子零件4安裝於中介層3之第1安裝步驟、及將附帶電子零件之中介層60安裝於基材2之第2安裝步驟而製造。The biosensor 1 includes, for example, a preparation step of preparing the substrate 2, the interposer 3, and the plurality of electronic components 4, a first mounting step of mounting the plurality of electronic components 4 on the interposer 3, and an electronic component attached thereto. The interposer 60 is attached to the second mounting step of the substrate 2 to be manufactured.

(準備步驟) 首先,按照圖8A~圖8D準備基材2。(Preparation Step) First, the substrate 2 was prepared in accordance with Figs. 8A to 8D.

為準備基材2,首先,如圖8A中所示,準備基材層6及配線層7。例如,利用日本專利特開2017-22236號公報、日本專利特開2017-22237號公報中記載之方法,以將配線層7嵌入至基材槽12之方式,準備基材層6及配線層7。To prepare the substrate 2, first, as shown in FIG. 8A, the substrate layer 6 and the wiring layer 7 are prepared. For example, the substrate layer 6 and the wiring layer 7 are prepared by embedding the wiring layer 7 in the substrate groove 12 by the method described in Japanese Laid-Open Patent Publication No. Hei. No. Hei. .

繼而,如圖8B中所示,將感壓接著層5配置於基材層6之下表面。為配置感壓接著層5,例如首先,製備含有感壓接著層5之材料之塗佈液,繼而,將塗佈液塗佈於剝離片19之上表面,此後,藉由加熱而使之乾燥。藉此,將感壓接著層5配置於剝離片19之上表面。Then, as shown in FIG. 8B, the pressure-sensitive adhesive layer 5 is disposed on the lower surface of the substrate layer 6. In order to arrange the pressure-sensitive adhesive layer 5, for example, first, a coating liquid containing a material of the pressure-sensitive adhesive layer 5 is prepared, and then a coating liquid is applied onto the upper surface of the release sheet 19, after which it is dried by heating. . Thereby, the pressure-sensitive adhesive layer 5 is placed on the upper surface of the release sheet 19.

繼而,藉由例如貼合機等使感壓接著層5及基材層6貼合。具體而言,使感壓接著層5之上表面與基材層6之下表面接觸。Then, the pressure-sensitive adhesive layer 5 and the base material layer 6 are bonded together by, for example, a bonding machine. Specifically, the upper surface of the pressure-sensitive adhesive layer 5 is brought into contact with the lower surface of the substrate layer 6.

再者,於該時點,基材層6及感壓接著層5之各者不含有第2開口部13及第1開口部11(開口部17)之各者(參照圖8C)。In this case, each of the base material layer 6 and the pressure-sensitive adhesive layer 5 does not include each of the second opening portion 13 and the first opening portion 11 (opening portion 17) (see FIG. 8C).

如圖8C中所示,繼而,將開口部17形成於基材層6及感壓接著層5。As shown in FIG. 8C, the opening portion 17 is then formed on the base material layer 6 and the pressure-sensitive adhesive layer 5.

開口部17將基材層6及感壓接著層5貫通。開口部17係藉由劃分第2開口部13之外周面與劃分第1開口部11之外周面劃分而成之俯視大致圓形狀之孔(貫通孔)。開口部17係朝向上側開口。另一方面,開口部17之下端被剝離片19封閉。The opening portion 17 penetrates the base material layer 6 and the pressure-sensitive adhesive layer 5 . The opening 17 is a hole (through hole) having a substantially circular shape in plan view which is defined by dividing the outer circumferential surface of the second opening 13 and the outer circumferential surface of the first opening 11 . The opening 17 is opened toward the upper side. On the other hand, the lower end of the opening portion 17 is closed by the peeling piece 19.

為形成開口部17,而將感壓接著層5及基材層6進行例如沖孔、半蝕刻。In order to form the opening 17, the pressure-sensitive adhesive layer 5 and the base material layer 6 are subjected to, for example, punching and half etching.

繼而,如圖10A中所示,準備探針構件18,並將該探針構件18嵌入至開口部17內。Then, as shown in FIG. 10A, the probe member 18 is prepared, and the probe member 18 is fitted into the opening portion 17.

為準備探針構件18,而準備含探針片材,並將含探針片材利用沖孔等進行外形加工。In order to prepare the probe member 18, a probe sheet is prepared, and the probe-containing sheet is subjected to outer shape processing by punching or the like.

探針構件18具有俯視大致圓形狀。探針構件18具備探針8、嵌入探針8之感壓接著層5、及配置於感壓接著層5之上表面之基材層6。The probe member 18 has a substantially circular shape in plan view. The probe member 18 includes a probe 8, a pressure-sensitive adhesive layer 5 in which the probe 8 is embedded, and a base material layer 6 disposed on the upper surface of the pressure-sensitive adhesive layer 5.

含探針片材藉由例如日本專利特開2017-22236號公報、日本專利特開2017-22237號公報中記載之方法進行準備。The probe-containing sheet is prepared by the method described in, for example, Japanese Patent Laid-Open Publication No. Hei. No. Hei.

此後,如圖8C之箭頭所示,將探針構件18嵌入至開口部17內。Thereafter, as shown by the arrow in Fig. 8C, the probe member 18 is fitted into the opening portion 17.

此時,於探針構件18之感壓接著層5、基材層6及探針8、開口部17之周圍之感壓接著層5及基材層6之間,隔開間隔。即,將探針構件18嵌入至開口部17內,以形成第2開口部13及第1開口部11。At this time, the pressure-sensitive adhesive layer 5 and the base material layer 6 around the pressure-sensitive adhesive layer 5 of the probe member 18, the base material layer 6, the probe 8, and the opening portion 17 are spaced apart from each other. That is, the probe member 18 is fitted into the opening 17 to form the second opening 13 and the first opening 11.

此後,如圖8D中所示,將連接部9設置於第2開口部13及第1開口部11內。Thereafter, as shown in FIG. 8D, the connecting portion 9 is provided in the second opening portion 13 and the first opening portion 11.

具體而言,若連接部9之材料為導電性樹脂組合物,則將導電性樹脂組合物(導電性組合物液)注入(或塗佈)至第2開口部13及第1開口部11。此後,將導電性樹脂組合物(導電性組合物液)加熱,將溶劑去除,並且藉由交聯劑將黏合劑樹脂交聯。Specifically, when the material of the connection portion 9 is a conductive resin composition, the conductive resin composition (conductive composition liquid) is injected (or applied) to the second opening portion 13 and the first opening portion 11 . Thereafter, the conductive resin composition (conductive composition liquid) is heated, the solvent is removed, and the binder resin is crosslinked by a crosslinking agent.

藉此,製作具備基材2與剝離片19之生物體感測器用積層體28。再者,生物體感測器用積層體28係不具備電子零件4(甚至電池70),即並非貼附型生物體感測器1,而是用以製造貼附型生物體感測器1之中間零件。Thereby, the laminated body 28 for biological sensors provided with the base material 2 and the peeling sheet 19 is manufactured. Furthermore, the laminated body 28 for a living body sensor does not have the electronic component 4 (or even the battery 70), that is, it is not the attached biological sensor 1, but is used to manufacture the attached biological sensor 1 Intermediate part.

另一方面,中介層3及複數個電子零件4可使用公知者。On the other hand, a known one can be used for the interposer 3 and the plurality of electronic components 4.

(第1安裝步驟) 於第1安裝步驟中,如圖9E所示,將複數個電子零件4安裝於中介層3。(First Mounting Step) In the first mounting step, as shown in FIG. 9E, a plurality of electronic components 4 are mounted on the interposer 3.

即,以中介層3之上側端子39與複數個電子零件4之端子對應之方式,將複數個電子零件4覆晶安裝於中介層3之上表面。具體而言,如參照圖4B般,以第1上側端子41(41A~41H)、第2上側端子42(42A~42D)及第3上側端子43(43A~43D)之各者對應於第1零件端子54(54A~54H)、第2零件端子55(55A~55D)及第3零件端子56(56A~56D)之各者之方式,將第1電子零件51、第2電子零件52及第3電子零件53配置於中介層3之上表面。That is, a plurality of electronic components 4 are flip-chip mounted on the upper surface of the interposer 3 such that the upper terminal 39 of the interposer 3 corresponds to the terminals of the plurality of electronic components 4. Specifically, as shown in FIG. 4B, each of the first upper terminals 41 (41A to 41H), the second upper terminals 42 (42A to 42D), and the third upper terminals 43 (43A to 43D) corresponds to the first one. The first electronic component 51, the second electronic component 52, and the first of the component terminals 54 (54A to 54H), the second component terminals 55 (55A to 55D), and the third component terminals 56 (56A to 56D) The electronic component 53 is disposed on the upper surface of the interposer 3 .

此時,將導電性接合材61配置於中介層3之上側端子39與複數個電子零件4之端子(54、55、56)之間。At this time, the conductive bonding material 61 is disposed between the upper terminal 39 of the interposer 3 and the terminals (54, 55, 56) of the plurality of electronic components 4.

作為導電性接合材61之材料,列舉焊料、導電膏等。Examples of the material of the conductive bonding material 61 include solder, a conductive paste, and the like.

藉此,將第1上側端子41(41A~41H)、第2上側端子42(42A~42D)及第3上側端子43(43A~43D)之各者經由導電性接合材61,電性連接於第1零件端子54(54A~54H)、第2零件端子55(55A~55D)及第3零件端子56(56A~56D)之各者。即,於中介層3與複數個電子零件4之間,存在複數個(16個)包含導電性接合材61之電子零件側電性連接點(零件連接點)62。Thereby, each of the first upper terminal 41 (41A to 41H), the second upper terminal 42 (42A to 42D), and the third upper terminal 43 (43A to 43D) is electrically connected to each other via the conductive bonding material 61. Each of the first component terminals 54 (54A to 54H), the second component terminals 55 (55A to 55D), and the third component terminals 56 (56A to 56D). That is, between the interposer 3 and the plurality of electronic components 4, a plurality of (16) electronic component-side electrical connection points (part connection points) 62 including the conductive bonding material 61 are present.

複數個零件連接點62彼此為大致相同形狀,各自之面積SA 例如為100 μm2 以上,較佳為400 μm2 以上,又,例如為0.25 mm2 以下,較佳為0.16 mm2 以下。The plurality of component connection points 62 have substantially the same shape, and each of the areas S A is, for example, 100 μm 2 or more, preferably 400 μm 2 or more, and further, for example, 0.25 mm 2 or less, preferably 0.16 mm 2 or less.

再者,零件連接點62之面積SA 如參照圖6A放大所得之俯視圖及仰視圖般,表示導電性接合材61與上側端子39之接觸界面中之俯視面積、或導電性接合材61與電子零件4之端子(54、55、56)之接觸界面中之仰視面積。該等俯視面積及仰視面積彼此大致相同,可任一個的面積,但於該等不同之情形時,表示較小者之面積。Further, the area S A of the component connection point 62 is a plan view and a bottom view as enlarged with reference to FIG. 6A, and shows a plan view area of the contact interface between the conductive bonding material 61 and the upper terminal 39, or the conductive bonding material 61 and the electron. The look-up area in the contact interface of the terminals (54, 55, 56) of the part 4. The top view area and the bottom view area are substantially the same as each other, and may be any one area, but in the case of the difference, the smaller area is indicated.

藉此,如圖9F中所示,獲得具有中介層3、及安裝該中介層3之上之複數個電子零件4之附帶電子零件之中介層60。Thereby, as shown in FIG. 9F, the interposer 60 having the interposer 3 and the accompanying electronic components of the plurality of electronic components 4 mounted on the interposer 3 is obtained.

再者,於附帶電子零件之中介層60中,第1中繼信號端子37A及第2中繼信號端子37B分別經由下側配線36、下側端子35、通孔部34、上側配線40、上側端子39、及零件連接點62,而與全部之電子零件4(51、52、53)電性連接。另一方面,第1中繼電源端子38A及第2中繼電源端子38B分別經由下側配線36、下側端子35、通孔部34、上側配線40、上側端子39、及零件連接點62,而與全部之電子零件4(51、52、53)電性連接。Further, in the interposer 60 with electronic components, the first relay signal terminal 37A and the second relay signal terminal 37B pass through the lower wiring 36, the lower terminal 35, the through hole portion 34, the upper wiring 40, and the upper side, respectively. The terminal 39 and the component connection point 62 are electrically connected to all of the electronic components 4 (51, 52, 53). On the other hand, the first relay power supply terminal 38A and the second relay power supply terminal 38B pass through the lower wiring 36, the lower terminal 35, the through hole portion 34, the upper wiring 40, the upper terminal 39, and the component connection point 62, respectively. It is electrically connected to all electronic components 4 (51, 52, 53).

又,第1電子零件51、第2電子零件52及第3電子零件53各自之端子之一個接地。具體而言,第1零件端子G(54G)、第2零件端子B(55B)及第3零件端子C(56C)接地。Further, one of the terminals of each of the first electronic component 51, the second electronic component 52, and the third electronic component 53 is grounded. Specifically, the first component terminal G (54G), the second component terminal B (55B), and the third component terminal C (56C) are grounded.

(第2安裝步驟) 於第2安裝步驟中,如圖9G中所示,將附帶電子零件之中介層60安裝於生物體感測器用積層體28之基材2。(Second Mounting Step) In the second mounting step, as shown in FIG. 9G, the interposer 60 with the electronic component is attached to the substrate 2 of the laminated body 28 for a biosensor.

即,以中介層3之下側端子35與基材2之中介層側基材端子25對應之方式,將附帶電子零件之中介層60覆晶安裝於基材2之上表面。具體而言,以第1中繼信號端子37A、第2中繼信號端子37B、第1中繼電源端子38A及第2中繼電源端子38B對應於第1基材信號端子21A、第2基材信號端子22A、第1基材電源端子23A及第2基材電源端子24A之方式,將附帶電子零件之中介層60配置於基材2之電子零件區域14。In other words, the interposer 60 with an electronic component is flip-chip mounted on the upper surface of the substrate 2 so that the lower terminal 35 of the interposer 3 corresponds to the interposer-side substrate terminal 25 of the substrate 2. Specifically, the first relay signal terminal 37A, the second relay signal terminal 37B, the first relay power source terminal 38A, and the second relay power source terminal 38B correspond to the first base material signal terminal 21A and the second base material. In the form of the signal terminal 22A, the first substrate power supply terminal 23A, and the second substrate power supply terminal 24A, the interposer 60 with the electronic component is placed in the electronic component region 14 of the substrate 2.

此時,將導電性接合材61配置於中介層3之下側端子35與基材2之中介層側基材端子25之間。At this time, the conductive bonding material 61 is disposed between the lower terminal 35 of the interposer 3 and the interposer side substrate terminal 25 of the substrate 2.

作為導電性接合材61之材料,與第1安裝步驟中上述導電性接合材61之材料相同。The material of the conductive bonding material 61 is the same as that of the above-described conductive bonding material 61 in the first mounting step.

藉此,將第1中繼信號端子37A、第2中繼信號端子37B、第1中繼電源端子38A及第2中繼電源端子38B經由導電性接合材61,電性連接於第1基材信號端子21A、第2基材信號端子22A、第1基材電源端子23A及第2基材電源端子24A。即,於中介層3與基材2之間,存在複數個(4個)包含導電性接合材61之基材側電性連接點(基材連接點)64。Thereby, the first relay signal terminal 37A, the second relay signal terminal 37B, the first relay power source terminal 38A, and the second relay power source terminal 38B are electrically connected to the first substrate via the conductive bonding material 61. The signal terminal 21A, the second substrate signal terminal 22A, the first substrate power source terminal 23A, and the second substrate power source terminal 24A. That is, between the interposer 3 and the substrate 2, a plurality of (four) substrate-side electrical connection points (substrate connection points) 64 including the conductive bonding material 61 are present.

複數個基材連接點64相互為大致相同形狀,且各自之面積SB 大於複數個零件連接點62。具體而言,基材連接點64之面積SB 分別為例如2500 μm2 以上,較佳為10000 μm2 以上,又,例如為1.00 mm2 以下,較佳為0.25 mm2 以下。The plurality of substrate connection points 64 are substantially identical in shape to one another, and each of the areas S B is greater than a plurality of part connection points 62. Specifically, the area S B of the substrate connection point 64 is, for example, 2500 μm 2 or more, preferably 10000 μm 2 or more, and is, for example, 1.00 mm 2 or less, preferably 0.25 mm 2 or less.

再者,基材連接點64之面積SB 係如參照圖6A之放大之俯視圖及仰視圖般,表示導電性接合材61與中介層側基材端子25之接觸界面中之俯視面積、或導電性接合材61與下側端子35之接觸界面中之仰視面積。該等俯視面積及仰視面積彼此大致相同,可採用任一個面積,但於該等不同之情形時,表示較小者之面積。Further, the area S B of the substrate connection point 64 is a plan view and a bottom view of the contact interface between the conductive bonding material 61 and the interposer-side substrate terminal 25, as shown in the enlarged plan view and the bottom view of FIG. 6A. The look-up area in the contact interface between the bonding material 61 and the lower terminal 35. The top view area and the bottom view area are substantially the same as each other, and any area may be used, but in the case of the different cases, the area of the smaller one is indicated.

藉此,獲得具備基材2、中介層3、複數個電子零件4、剝離片19之貼附型生物體感測器1。即,貼附型生物體感測器1具有:剝離片19、配置於剝離片19之上表面之基材2、安裝於基材2之上表面之中介層3、及安裝於中介層3之上表面之複數個電子零件4。Thereby, the attached biosensor 1 including the base material 2, the interposer 3, the plurality of electronic components 4, and the release sheet 19 is obtained. In other words, the attached biosensor 1 includes a release sheet 19, a substrate 2 disposed on the upper surface of the release sheet 19, an interposer 3 attached to the upper surface of the substrate 2, and an interposer 3 attached thereto. a plurality of electronic parts 4 on the upper surface.

貼附型生物體感測器1中,基材2與中介層3之基材連接點64之數量係和複數個電子零件4與中介層3之零件連接點62之數量相同,或者少於該數量。較佳為,基材連接點64之數量(圖4B中為4個)少於零件連接點62之數量(圖4B中為16個)。In the attached biological sensor 1, the number of substrate connection points 64 of the substrate 2 and the interposer 3 is the same as or less than the number of the part connection points 62 of the plurality of electronic parts 4 and the interposer 3. Quantity. Preferably, the number of substrate attachment points 64 (four in Figure 4B) is less than the number of part connection points 62 (16 in Figure 4B).

又,基材連接點64中之各面積SB 大於零件連接點62中之各面積SA 。即,複數個基材連接點64中之每1個面積SB 大於複數個零件連接點64中之每1個面積SAFurther, each area S B in the substrate connection point 64 is larger than each area S A in the part connection point 62. That is, a plurality of substrates 64 for each connection point of a plurality of area S B is greater than the point of connection 64 parts per one area S A.

3.貼附型生物體感測器之使用方法 參照圖1、圖3及圖7,說明貼附型生物體感測器1之使用方法。3. Method of Using the Attached Biosensor The method of using the attached biosensor 1 will be described with reference to Figs. 1, 3 and 7.

為了使用貼附型生物體感測器1,首先,如圖1之假想線所示,將電池70搭載於貼附型生物體感測器1。In order to use the attached biosensor 1 , first, the battery 70 is mounted on the attached biosensor 1 as shown by the imaginary line in FIG. 1 .

電池70具有圓盤形狀。電池70具有設置於其下表面之2個端子(正極端子、負極端子:未圖示)。電池70之厚度例如為1 μm以上,較佳為10 μm以上,又,例如為1000 μm以下,較佳為100 μm以下。The battery 70 has a disk shape. The battery 70 has two terminals (a positive electrode terminal and a negative electrode terminal: not shown) provided on the lower surface thereof. The thickness of the battery 70 is, for example, 1 μm or more, preferably 10 μm or more, and is, for example, 1000 μm or less, preferably 100 μm or less.

為將電池70搭載於貼附型生物體感測器1,而將電池70配置於電池區域15,將電池70之2個端子與基材2之第1電池用電源端子23C及第2電池用電源端子24C電性連接。此時,使電池70之下表面接觸於基材層6之上表面。In order to mount the battery 70 on the attached biosensor 1 , the battery 70 is placed in the battery region 15 , and the two terminals of the battery 70 and the first battery power terminal 23C and the second battery of the substrate 2 are used. The power terminal 24C is electrically connected. At this time, the lower surface of the battery 70 is brought into contact with the upper surface of the substrate layer 6.

繼而,自基材2將剝離片19(參照圖3之箭頭及假想線)剝離。Then, the release sheet 19 (see the arrow and the imaginary line of FIG. 3) is peeled off from the base material 2.

繼而,使基材2之下表面如圖7中所示,接觸於作為生物體表面之一例之皮膚80。具體而言,使感壓接著層5感壓接著於皮膚80之表面。藉此,探針8接觸於皮膚80之表面。Then, the lower surface of the substrate 2 is brought into contact with the skin 80 as an example of the surface of the living body as shown in FIG. Specifically, the pressure-sensitive adhesive layer 5 is pressure-sensitive to the surface of the skin 80. Thereby, the probe 8 is in contact with the surface of the skin 80.

此後,藉由探針8、基材電路部26(連接部9及配線層7)、中繼電路部44(下側配線層32、上側配線層33及通孔部34)、及電子零件4,感測生物體。Thereafter, the probe 8, the substrate circuit portion 26 (the connection portion 9 and the wiring layer 7), the relay circuit portion 44 (the lower wiring layer 32, the upper wiring layer 33, and the via portion 34), and the electronic components are used. 4. Sensing the organism.

具體而言,探針8感測來自生物體之電氣信號,將由探針8感測所得之電氣信號經由基材電路部26(連接部9、配線層7)、基材連接點64、中繼電路部44(下側配線層32、上側配線層33、通孔部34)、及零件連接點62,輸入至複數個電子零件4。電子零件4基於自電池70供給之電力,處理電氣信號,並作為資訊記憶。進而,視需要,將電氣信號轉換為電波,將該電波無線發送至外部之接收機。Specifically, the probe 8 senses an electrical signal from the living body, and the electrical signal sensed by the probe 8 passes through the substrate circuit portion 26 (the connection portion 9, the wiring layer 7), the substrate connection point 64, and the relay. The circuit portion 44 (the lower wiring layer 32, the upper wiring layer 33, the via portion 34), and the component connection point 62 are input to a plurality of electronic components 4. The electronic component 4 processes the electrical signal based on the power supplied from the battery 70 and serves as an information memory. Further, if necessary, the electrical signal is converted into a radio wave, and the radio wave is wirelessly transmitted to an external receiver.

更具體而言,電子零件4中之第1電子零件51、第2電子零件52及第3電子零件53之作動如下所述。若貼附型生物體感測器1為貼附型心電儀(下述),則將由探針8取得之心臟之電位變化利用作為類比前端元件之第1電子零件51轉換為數位資料,將心臟之電位變化記錄於作為記憶元件之第3電子零件53中。作為一例,將心臟之電位變化以16位元、1 kHz之資料速率記錄於第3電子零件53中。另一方面,作為無線通信元件之第2電子零件52將該記錄之資料自作為天線配線之第9上側配線40I無線發送至外部。More specifically, the operation of the first electronic component 51, the second electronic component 52, and the third electronic component 53 in the electronic component 4 is as follows. When the attached biosensor 1 is an attached electrocardiograph (described below), the change in the potential of the heart obtained by the probe 8 is converted into digital data by using the first electronic component 51 as an analog front end component. The change in the potential of the heart is recorded in the third electronic component 53 as a memory element. As an example, the potential change of the heart is recorded in the third electronic component 53 at a data rate of 16 bits and 1 kHz. On the other hand, the second electronic component 52, which is a wireless communication device, wirelessly transmits the recorded data from the ninth upper wiring 40I serving as the antenna wiring to the outside.

4.貼附型生物體感測器之作用效果 該貼附型生物體感測器1具有:基材2、配置於基材2之上側之中介層3、及配置於基材2及中介層3之上側之複數個電子零件4。又,基材2具備感壓接著層5、基材層6及配線層7。又,複數個電子零件4經由中介層3,而與基材2之配線層7電性連接。4. Effect of the attached biological sensor 1 The attached biological sensor 1 has a substrate 2, an interposer 3 disposed on the upper side of the substrate 2, and a substrate 2 and an interposer. A plurality of electronic parts 4 on the upper side of 3. Moreover, the base material 2 is provided with the pressure sensitive adhesive layer 5, the base material layer 6, and the wiring layer 7. Further, a plurality of electronic components 4 are electrically connected to the wiring layer 7 of the substrate 2 via the interposer 3 .

根據該貼附型生物體感測器1,將複數個電子零件4安裝於中介層3,製作附帶電子零件之中介層60,繼而,藉由將附帶電子零件之中介層60安裝於基材2,而將複數個電子零件4介隔中介層3安裝於基材2。因而,無需將複數個較小之電子零件4直接安裝於具有伸縮性之基材2(不易安裝之素材),而可將複數個電子零件4介隔中介層3確實地安裝於基材2。又,因將俯視面積大於電子零件4之中介層3安裝於基材2,故可更確實地進行安裝。其結果,於將貼附型生物體感測器1貼附於皮膚80使用時,可抑制複數個電子零件4之脫落。According to the attached biosensor 1 , a plurality of electronic components 4 are mounted on the interposer 3 to form an interposer 60 with electronic components, and then the interposer 60 with electronic components is mounted on the substrate 2 . A plurality of electronic components 4 are attached to the substrate 2 via the interposer 3 . Therefore, it is not necessary to directly mount a plurality of smaller electronic components 4 on the stretchable substrate 2 (material that is difficult to mount), and a plurality of electronic components 4 can be reliably attached to the substrate 2 via the interposer 3 . Moreover, since the interposer 3 having a plan view larger than the electronic component 4 is attached to the substrate 2, it can be mounted more reliably. As a result, when the attached biosensor 1 is attached to the skin 80, the fall of the plurality of electronic components 4 can be suppressed.

又,該貼附型生物體感測器1係基材連接點64中之面積之各者大於零件連接點62中之面積之各者。Further, each of the areas of the attachment type biosensor 1 in the substrate connection point 64 is larger than the area in the part connection point 62.

因而,相對於容易因伸縮產生負載之基材2之基材連接點64與零件連接點62相比,強度變得更高。因而,可抑制基材2與中介層3之剝離,進而,即便貼附型生物體感測器1伸縮之情形時,亦可抑制安裝於中介層3之電子零件4之脫落。Therefore, the strength of the base material connection point 64 of the base material 2 which is likely to cause a load due to expansion and contraction is higher than that of the component connection point 62. Therefore, peeling of the base material 2 and the interposer 3 can be suppressed, and even if the attached biosensor 1 expands and contracts, the fall of the electronic component 4 attached to the interposer 3 can be suppressed.

又,該貼附型生物體感測器1中,基材連接點64之數量少於零件連接點62之數量。Further, in the attached type biosensor 1, the number of substrate connection points 64 is smaller than the number of part connection points 62.

因而,因相對於容易因伸縮產生負載之基材2之基材連接點64相對較少,故可抑制基材2與中介層3之連接不良,進而抑制基材2與電子零件4之連接不良。Therefore, since the substrate connection point 64 of the substrate 2 which is likely to cause a load due to expansion and contraction is relatively small, connection failure between the substrate 2 and the interposer 3 can be suppressed, and connection failure between the substrate 2 and the electronic component 4 can be suppressed. .

又,該貼附型生物體感測器1中,中介層3具備柔軟性。Further, in the attached biosensor 1 , the interposer 3 has flexibility.

因而,中介層3可根據基材2之動作或變化,柔軟地變形形狀。例如圖11中所示,於相應於皮膚80之動作,基材2向上側凸狀地變形之情形時,中介層3亦能夠追隨基材2向上側凸狀地變形,從而能夠防止基材2之上表面將中介層3之下表面向上側按壓。由此,便可抑制中介層3自基材2脫落。Therefore, the interposer 3 can be softly deformed in shape according to the action or change of the substrate 2. For example, as shown in FIG. 11, when the substrate 2 is convexly deformed toward the upper side in response to the action of the skin 80, the interposer 3 can also be deformed convexly following the substrate 2 to the upper side, thereby preventing the substrate 2 from being deformed. The upper surface presses the lower surface of the interposer 3 to the upper side. Thereby, the interposer 3 can be prevented from falling off from the substrate 2.

又,於使用時,因可抑制皮膚80介隔基材2接觸於中介層3或硬質構件(電子零件等),故而佩戴感優異。Further, in use, since the skin 80 can be prevented from interfering with the interposer 3 or the hard member (electronic component or the like) via the substrate 2, the wearing feeling is excellent.

該貼附型生物體感測器1若為例如能夠感測來自生物體電氣信號監視生物體之狀態之裝置,則並無特別限定,具體而言,列舉貼附型心電儀、貼附型腦電儀、貼附型血壓計、貼附型脈率計、貼附型肌電儀、貼附型溫度計、貼附型加速度計等。又,該等裝置既可為各自單獨之裝置,亦可複數者組裝於一個裝置中。The attached biosensor 1 is not particularly limited as long as it can sense the state of the bioelectrical signal monitoring organism, and specifically, a patch-type electrocardiograph or a patch type is used. EEG, attached sphygmomanometer, attached pulse rate meter, attached type electromyography, attached thermometer, attached accelerometer, etc. Moreover, the devices may be separate devices or assembled in a single device.

貼附型生物體感測器1較佳為用作貼附型心電儀。貼附型心電儀中,探針8將心臟之活動電位作為電氣信號進行感測。The attached biosensor 1 is preferably used as an attached electrocardiograph. In the attached electrocardiograph, the probe 8 senses the active potential of the heart as an electrical signal.

再者,生物體包含人體及人體以外之生物,但較佳為人體。Further, the living body includes a living body and a living body other than the human body, but is preferably a human body.

<變化例> 於以下之各變化例中,對於與上述一實施形態相同之構件及步驟,標註相同之參照符號,省略其詳細之說明。又,可將各變化例適當地組合。進而,各變化例除了特別明示以外,發揮與一實施形態相同之作用效果。<Modifications> In the following various modifications, the same components and steps as those in the above-described embodiment are denoted by the same reference numerals, and the detailed description thereof will be omitted. Moreover, each variation can be combined as appropriate. Further, each modification has the same operational effects as those of the embodiment except that it is specifically indicated.

(1)圖1所示之貼附型生物體感測器1中,中介層3具有柔軟性,例如雖未圖示,中介層3亦可不具有柔軟性。即,中介層3具有剛性。(1) In the patch type biosensor 1 shown in Fig. 1, the interposer 3 has flexibility. For example, although not shown, the interposer 3 may not have flexibility. That is, the interposer 3 has rigidity.

作為具有剛性之中介層3之支持基板31之材料,例如列舉矽、玻璃、玻璃環氧樹脂等硬質性材料。較佳為,根據使用時之中介層3之脫落抑制之觀點、及佩戴性之觀點,中介層3具有柔軟性。Examples of the material of the support substrate 31 having the rigid interposer 3 include hard materials such as enamel, glass, and glass epoxy. It is preferable that the interposer 3 has flexibility depending on the viewpoint of the suppression of the release of the interposer 3 at the time of use and the wearability.

(2)圖1所示之貼附型生物體感測器1中,複數個電子零件4具備3個電子零件(51、52、53),但例如雖未圖示,電子零件之數量亦並無限定,既可為1個,亦可為複數個(2個或4個以上)。又,電子零件之種類亦未限定,可為具備類比前端元件、記憶元件及無線通信元件中之至少2個功能之元件、或該等以外之電子元件(微電腦等)。(2) In the attached biosensor 1 shown in Fig. 1, a plurality of electronic components 4 are provided with three electronic components (51, 52, 53). However, for example, although not shown, the number of electronic components is also There is no limitation, and it may be one or plural (two or four or more). Further, the type of the electronic component is not limited, and may be an element having at least two functions of an analog front end element, a memory element, and a wireless communication element, or an electronic component other than the above (such as a microcomputer).

又,關於基材連接點64及零件連接點62之數量,只要基材連接點64之數量與零件連接點62之數量相同或少於該數量則並無限定。基材連接點64之數量例如為1以上,較佳為2以上,又,例如為10以下,較佳為5以下,更佳為3以下。零件連接點62之數量例如為2以上,較佳為6以上,又,例如為20以下,較佳為10以下。Further, the number of the substrate connection points 64 and the component connection points 62 is not limited as long as the number of the substrate connection points 64 is equal to or less than the number of the component connection points 62. The number of the substrate connection points 64 is, for example, 1 or more, preferably 2 or more, and is, for example, 10 or less, preferably 5 or less, and more preferably 3 or less. The number of the component connection points 62 is, for example, 2 or more, preferably 6 or more, and is, for example, 20 or less, preferably 10 or less.

(3)圖1及圖6A之實線中所示之貼附型生物體感測器1係電子零件4介隔導電性接合材61而與中介層3接合(固定),但例如亦可如圖6A之假想線中所示,電子零件4之一部分或全部進而除了導電性接合材61以外,亦利用底部填充膠90而與中介層3固定。(3) The attached biosensor 1 shown in the solid line of FIG. 1 and FIG. 6A is electrically bonded to the interposer 3 via the conductive bonding material 61, but may be, for example, As shown in the imaginary line of FIG. 6A, part or all of the electronic component 4 is further fixed to the interposer 3 by the underfill rubber 90 in addition to the conductive bonding material 61.

作為底部填充膠,例如列舉以環氧樹脂為主成分之硬化性樹脂。As the underfill, for example, a curable resin containing an epoxy resin as a main component is exemplified.

(4)圖1及圖6A中所示之貼附型生物體感測器1係電子零件4與中介層3覆晶安裝,但例如亦可如圖12中所示,電子零件4藉由打線接合而與中介層3安裝。(4) The attached biosensor 1 shown in FIG. 1 and FIG. 6A is mounted on the electronic component 4 and the interposer 3, but for example, as shown in FIG. 12, the electronic component 4 is wired. Engaged and mounted with the interposer 3.

具體而言,附帶電子零件之中介層60具有:中介層3、複數個電子零件4(51、52、53)、及將該等電性連接之複數個接合線91。Specifically, the interposer 60 with electronic components includes an interposer 3, a plurality of electronic components 4 (51, 52, 53), and a plurality of bonding wires 91 electrically connected thereto.

接合線91之一端係與中介層3之上側端子39相連,其另一端與複數個電子零件端子(54、55、56)相連。接合線91之一端及另一端藉由例如熱壓接等而與端子連接。One end of the bonding wire 91 is connected to the upper terminal 39 of the interposer 3, and the other end thereof is connected to a plurality of electronic component terminals (54, 55, 56). One end and the other end of the bonding wire 91 are connected to the terminal by, for example, thermocompression bonding or the like.

圖12所示之實施形態中,電子零件側電性連接點62係焊接接合線91之一端(與上側端子39接觸之部分)。In the embodiment shown in Fig. 12, the electronic component side electrical connection point 62 is one end of the bonding bonding wire 91 (portion in contact with the upper terminal 39).

又,如圖12之假想線中所示,亦可利用密封材92,將複數個電子零件4及接合線91密封。Further, as shown in the imaginary line of FIG. 12, the plurality of electronic components 4 and the bonding wires 91 may be sealed by the sealing member 92.

(5)圖1中所示之實施形態中,電子零件區域14與電池區域15不重複,但亦可例如圖13中所示,電子零件區域14與電池區域15重複。即,如圖14中所示,亦可將電池70與複數個電子零件4隔開間隔地配置於上側。(5) In the embodiment shown in FIG. 1, the electronic component region 14 and the battery region 15 are not overlapped, but the electronic component region 14 may be overlapped with the battery region 15, for example, as shown in FIG. That is, as shown in FIG. 14, the battery 70 may be disposed on the upper side with a plurality of electronic components 4 spaced apart from each other.

圖13所示之實施形態中,貼附型生物體感測器1如參照圖13(及圖14之假想線)般,具有將配線層7與電池70電性連接之引線部95。In the embodiment shown in FIG. 13, the attached biosensor 1 has a lead portion 95 that electrically connects the wiring layer 7 and the battery 70 as shown in FIG. 13 (and the imaginary line of FIG. 14).

引線部95具有第1引線95A及第2引線95B。The lead portion 95 has a first lead 95A and a second lead 95B.

第1引線95A將第1基材電源端子23A與電池70電性連接。第1引線95A以上下方向地延伸之方式設置,且其下端與第1電源配線23B相連,其上端與電池70之一端子相連。The first lead 95A electrically connects the first base material power supply terminal 23A and the battery 70. The first lead 95A is provided to extend in the downward direction, and has a lower end connected to the first power supply wiring 23B and an upper end connected to one terminal of the battery 70.

第2引線95B將第2基材電源端子24A與電池70電性連接。第2引線95B以上下方向地延伸之方式設置,且其下端與第2電源配線24B相連,其上端與電池70之另一端子相連。The second lead 95B electrically connects the second substrate power supply terminal 24A and the battery 70. The second lead 95B is provided to extend in the lower direction, and has a lower end connected to the second power supply wiring 24B and an upper end connected to the other terminal of the battery 70.

再者,圖13中所示之實施形態具有用以將電池70配置於複數個電子零件4之上側之固定構件(密封樹脂等:未圖示)。Further, the embodiment shown in FIG. 13 has a fixing member (sealing resin or the like: not shown) for arranging the battery 70 on the upper side of the plurality of electronic components 4.

(6)圖1及圖6A所示之實施形態中,複數個電子零件4配置於中介層3之上側,但亦可例如圖15所示,將複數個電子零件4配置於中介層3之下側。(6) In the embodiment shown in FIGS. 1 and 6A, a plurality of electronic components 4 are disposed on the upper side of the interposer 3. However, as shown in FIG. 15, for example, a plurality of electronic components 4 may be disposed under the interposer 3. side.

圖15所示之貼附型生物體感測器1係複數個電子零件4安裝於中介層3之下側。即,複數個電子零件4配置於基材2之上側及中介層3之下側。The attached biosensor 1 shown in FIG. 15 is provided with a plurality of electronic components 4 mounted on the lower side of the interposer 3. That is, a plurality of electronic components 4 are disposed on the upper side of the substrate 2 and on the lower side of the interposer 3.

圖15所示之貼附型生物體感測器1中,該中介層3如圖16中所示,具有支持基板31、下側配線層32、上側配線層33、及通孔部34。In the attached biosensor 1 shown in FIG. 15, the interposer 3 has a support substrate 31, a lower wiring layer 32, an upper wiring layer 33, and a via portion 34, as shown in FIG.

下側配線層32具有:基材側中繼端子35(相當於圖1之實施形態中參照圖6B之下側端子)、電子零件側中繼端子39(相當於參照圖6B之上側端子)、及下側配線36。即,安裝於電子零件4及配線層7之所有端子均設置於支持基板31之下表面。The lower wiring layer 32 includes a substrate-side relay terminal 35 (corresponding to the lower terminal of FIG. 6B in the embodiment of FIG. 1) and an electronic component-side relay terminal 39 (corresponding to the upper terminal of FIG. 6B). And the lower wiring 36. That is, all the terminals mounted on the electronic component 4 and the wiring layer 7 are provided on the lower surface of the support substrate 31.

下側配線層32具有自基材側中繼端子35及電子零件側中繼端子39之端部相連之複數個(10個)下側配線36A~36J。The lower wiring layer 32 has a plurality of (10) lower wirings 36A to 36J connected from the end portions of the substrate side relay terminal 35 and the electronic component side relay terminal 39.

上側配線層33具有與通孔部34相連之複數個(2個)上側配線40A、40B。The upper wiring layer 33 has a plurality of (two) upper wirings 40A, 40B connected to the via portion 34.

通孔部34具有使下側配線層32及上側配線層33於上下方向相連之複數個(3個)通孔34A~34C。The through hole portion 34 has a plurality of (three) through holes 34A to 34C that connect the lower wiring layer 32 and the upper wiring layer 33 in the vertical direction.

再者,上述發明係以本發明之例示之實施形態提供,但上述本發明僅為例示,不得限定性解釋。被該技術領域之業者所明悉之本發明之變化例包含於下述之申請專利範圍中。 [產業上之可利用性]Furthermore, the invention is provided by the exemplified embodiments of the invention, but the invention described above is merely illustrative and not to be construed as limiting. Variations of the invention that are apparent to those skilled in the art are included in the scope of the following claims. [Industrial availability]

本發明之貼附型生物體感測器能夠適用於各種工業製品,例如用於貼附型心電儀、貼附型腦電儀、貼附型血壓計、貼附型脈率計、貼附型肌電儀、貼附型溫度計、貼附型加速度計等。The attached biosensor of the present invention can be applied to various industrial products, for example, for attaching electrocardiograph, attached electroencephalograph, attached sphygmomanometer, attached pulse rate meter, and attaching Type electromyography, attached thermometer, attached accelerometer, etc.

1‧‧‧貼附型生物體感測器1‧‧‧ Attached Biosensors

2‧‧‧基材2‧‧‧Substrate

3‧‧‧中介層3‧‧‧Intermediary

4‧‧‧電子零件4‧‧‧Electronic parts

5‧‧‧感壓接著層5‧‧‧pressure layer

6‧‧‧基材層6‧‧‧Substrate layer

7‧‧‧配線層7‧‧‧Wiring layer

8‧‧‧探針8‧‧‧ probe

9‧‧‧連接部9‧‧‧Connecting Department

10‧‧‧第1槽10‧‧‧1st slot

11‧‧‧第1開口部11‧‧‧1st opening

12‧‧‧基材槽12‧‧‧Substrate trough

13‧‧‧第2開口部13‧‧‧2nd opening

14‧‧‧電子零件區域14‧‧‧Electronic parts area

15‧‧‧電池區域15‧‧‧Battery area

16‧‧‧外側面16‧‧‧Outside

17‧‧‧開口部17‧‧‧ openings

18‧‧‧探針構件18‧‧‧ probe components

19‧‧‧剝離片19‧‧‧ peeling film

21‧‧‧第1信號配線圖案21‧‧‧1st signal wiring pattern

21A‧‧‧第1基材信號端子21A‧‧‧1st substrate signal terminal

21B‧‧‧第1信號配線21B‧‧‧1st signal wiring

22‧‧‧第2信號配線圖案22‧‧‧2nd signal wiring pattern

22A‧‧‧第2基材信號端子22A‧‧‧2nd substrate signal terminal

22B‧‧‧第2信號配線22B‧‧‧2nd signal wiring

23‧‧‧第1電源配線圖案23‧‧‧1st power wiring pattern

23A‧‧‧第1基材電源端子23A‧‧‧1st substrate power terminal

23B‧‧‧第1電源配線23B‧‧‧1st power wiring

23C‧‧‧第1電池用電源端子23C‧‧‧1st battery power terminal

24‧‧‧第2電源配線圖案24‧‧‧2nd power wiring pattern

24A‧‧‧第2基材電源端子24A‧‧‧2nd substrate power terminal

24B‧‧‧第2電源配線24B‧‧‧2nd power wiring

24C‧‧‧第2電池用電源端子24C‧‧‧2nd battery power terminal

25‧‧‧中介層側基材端子25‧‧‧Interposer side substrate terminal

26‧‧‧基材電路部26‧‧‧Substrate Circuit Department

28‧‧‧生物體感測器用積層體28‧‧‧Layer for biosensors

31‧‧‧支持基板31‧‧‧Support substrate

32‧‧‧下側配線層32‧‧‧Under wiring layer

33‧‧‧上側配線層33‧‧‧Upper wiring layer

34‧‧‧通孔部34‧‧‧Through Hole Department

34A‧‧‧第1通孔34A‧‧‧1st through hole

34B‧‧‧第2通孔34B‧‧‧2nd through hole

34C‧‧‧第3通孔34C‧‧‧3rd through hole

34D‧‧‧第4通孔34D‧‧‧4th through hole

34E‧‧‧第5通孔34E‧‧‧5th through hole

34F‧‧‧第6通孔34F‧‧‧6th through hole

35‧‧‧基材側中繼端子35‧‧‧Substrate side relay terminal

36(36A~36J)‧‧‧下側配線36 (36A~36J)‧‧‧Lower wiring

36A‧‧‧第1下側配線36A‧‧‧1st lower wiring

36B‧‧‧第2下側配線36B‧‧‧2nd lower wiring

36C‧‧‧第3下側配線36C‧‧‧3rd lower wiring

36D‧‧‧第4下側配線36D‧‧‧4th lower wiring

37‧‧‧中繼信號端子37‧‧‧Relay signal terminal

37A‧‧‧第1中繼信號端子37A‧‧‧1st relay signal terminal

37B‧‧‧第2中繼信號端子37B‧‧‧2nd relay signal terminal

38‧‧‧中繼電源端子38‧‧‧Relay power terminal

38A‧‧‧第1中繼電源端子38A‧‧‧1st relay power terminal

38B‧‧‧第2中繼電源端子38B‧‧‧2nd relay power terminal

39‧‧‧上側端子(電子零件側中繼端子)39‧‧‧Upper terminal (electronic component side relay terminal)

40‧‧‧上側配線40‧‧‧Upper wiring

40A‧‧‧第1上側配線40A‧‧‧1st upper wiring

40B‧‧‧第2上側配線40B‧‧‧2nd upper wiring

40C‧‧‧第3上側配線40C‧‧‧3rd upper wiring

40D‧‧‧第4上側配線40D‧‧‧4th upper wiring

40E‧‧‧第5上側配線40E‧‧‧5th upper wiring

40F‧‧‧第6上側配線40F‧‧‧6th upper wiring

40G‧‧‧第7上側配線40G‧‧‧7th upper wiring

40H‧‧‧第8上側配線40H‧‧‧8th upper wiring

40I‧‧‧第9上側配線40I‧‧‧9th upper wiring

41(41A~41H)‧‧‧第1上側端子41 (41A to 41H) ‧‧1 first upper terminal

42(42A~42D)‧‧‧第2上側端子42 (42A ~ 42D) ‧ ‧ second upper terminal

43(43A~43D)‧‧‧第3上側端子43 (43A ~ 43D) ‧ ‧ third upper terminal

44‧‧‧中繼電路部44‧‧‧Relay Circuits Department

51‧‧‧第1電子零件51‧‧‧1st electronic part

52‧‧‧第2電子零件52‧‧‧2nd electronic parts

53‧‧‧第3電子零件53‧‧‧3rd electronic part

54(54A~54H)‧‧‧第1零件端子54 (54A~54H)‧‧‧1st part terminal

55(55A~55D)‧‧‧第2零件端子55 (55A~55D)‧‧‧2nd part terminal

56(56A~56D)‧‧‧第3零件端子56 (56A~56D)‧‧‧3rd part terminal

60‧‧‧中介層60‧‧‧Intermediary

61‧‧‧導電性接合材61‧‧‧Electrical bonding materials

62‧‧‧電子零件側電性連接點62‧‧‧Electrical parts side electrical connection points

64‧‧‧基材側電性連接點64‧‧‧Substrate side electrical connection points

70‧‧‧電池70‧‧‧Battery

80‧‧‧皮膚80‧‧‧ skin

91‧‧‧接合線91‧‧‧bonding line

92‧‧‧密封材92‧‧‧ Sealing material

95‧‧‧引線部95‧‧‧ lead parts

95A‧‧‧第1引線95A‧‧‧1st lead

95B‧‧‧第2引線95B‧‧‧2nd lead

圖1表示本發明之貼附型生物體感測器之一實施形態之俯視圖。 圖2表示圖1中所示之貼附型生物體感測器之基材之俯視圖。 圖3表示圖1中所示之貼附型生物體感測器之沿A-A線之側剖視圖。 圖4A~圖4B係圖1中所示之貼附型生物體感測器之電子零件區域中之放大圖,圖4A表示將中介層之下表面省略所得之俯視圖,圖4B表示呈現中介層之下表面之俯視圖。 圖5A~圖5B係圖1中所示之貼附型生物體感測器之電子零件區域中之放大圖,圖5A表示僅基材之俯視圖,圖5B表示僅中介層之俯視圖。 圖6A~圖6B係圖4A中所示之貼附型生物體感測器之側剖視圖,圖6A表示沿A-A線之剖視圖,圖6B表示沿B-B線之側剖視圖。 圖7表示圖1中所示之貼附型生物體感測器貼附於皮膚時之側剖視圖。 圖8A~圖8D係圖1中所示之貼附型生物體感測器之製造步驟圖,圖8A表示準備基材層及配線層之步驟,圖8B表示使感壓接著層及基材層貼合之步驟,圖8C表示形成開口部且準備探針構件之步驟,圖8D表示將探針構件嵌入至開口部之步驟、及形成連接部之步驟。 圖9E~圖9G係繼圖8D後之圖1中所示之貼附型生物體感測器之製造步驟圖,圖9E表示將電子零件安裝於中介層之步驟(第1步驟),圖9F表示將中介層安裝於基材之步驟(第2步驟),圖9G表示獲得貼附型生物體感測器之步驟。 圖10A~圖10C係探針構件之分解立體圖,圖10A表示探針構件,圖10B表示連接部,圖10C表示基材之長邊方向一端部之開口部。 圖11表示將圖1中所示之貼附型生物體感測器貼附於皮膚進行彎折所得之側剖視圖。 圖12表示圖1中所示之貼附型生物體感測器之變化例(打線接合安裝後之形態)。 圖13表示圖1中所示之貼附型生物體感測器之變化例(電池區域與電子零件區域重複之形態)之俯視圖。 圖14表示電池搭載於圖13中所示之貼附型生物體感測器時之電子零件區域中之側剖視圖。 圖15表示圖1中所示之貼附型生物體感測器之變化例(電子零件安裝於中介層之下側之形態)。 圖16表示圖15中所示之貼附型生物體感測器之中介層之俯視圖。Fig. 1 is a plan view showing an embodiment of an attached biosensor of the present invention. Fig. 2 is a plan view showing the substrate of the attached type biosensor shown in Fig. 1. Fig. 3 is a side cross-sectional view taken along line A-A of the attached biosensor shown in Fig. 1. 4A to 4B are enlarged views of the electronic component region of the attached biosensor shown in Fig. 1, and Fig. 4A shows a plan view in which the lower surface of the interposer is omitted, and Fig. 4B shows the interposer. Top view of the lower surface. 5A to 5B are enlarged views of the electronic component region of the attached biosensor shown in Fig. 1, Fig. 5A shows a plan view of only the substrate, and Fig. 5B shows a plan view of only the interposer. 6A to 6B are side cross-sectional views of the attached biosensor shown in Fig. 4A, Fig. 6A is a cross-sectional view taken along line A-A, and Fig. 6B is a cross-sectional view taken along line B-B. Fig. 7 is a side cross-sectional view showing the attached biosensor shown in Fig. 1 attached to the skin. 8A to 8D are manufacturing steps of the attached biosensor shown in Fig. 1. Fig. 8A shows a step of preparing a substrate layer and a wiring layer, and Fig. 8B shows a pressure-sensitive adhesive layer and a substrate layer. In the step of bonding, FIG. 8C shows a step of forming an opening portion and preparing a probe member, and FIG. 8D shows a step of embedding the probe member in the opening portion and a step of forming the connecting portion. 9E to 9G are manufacturing steps of the attached biosensor shown in Fig. 1 after Fig. 8D, and Fig. 9E shows the step of mounting the electronic component on the interposer (step 1), Fig. 9F The step of attaching the interposer to the substrate (second step) is shown, and FIG. 9G shows the step of obtaining the attached biosensor. 10A to 10C are exploded perspective views of the probe member, Fig. 10A shows the probe member, Fig. 10B shows the connecting portion, and Fig. 10C shows the opening of one end portion of the base material in the longitudinal direction. Fig. 11 is a side cross-sectional view showing the attachment of the attached biosensor shown in Fig. 1 to the skin and bending. Fig. 12 shows a modification of the attached biosensor shown in Fig. 1 (a form after wire bonding installation). Fig. 13 is a plan view showing a modification (a form in which a battery region and an electronic component region are repeated) of the attached biological sensor shown in Fig. 1. Fig. 14 is a side cross-sectional view showing the electronic component region when the battery is mounted on the attached biosensor shown in Fig. 13. Fig. 15 shows a modification of the attached type biosensor shown in Fig. 1 (a form in which an electronic component is mounted on the lower side of the interposer). Figure 16 is a plan view showing the interposer of the attached biosensor shown in Figure 15.

Claims (5)

一種貼附型生物體感測器,其特徵在於具有: 基材,其具有伸縮性,用以貼附於生物體表面; 中介層,其配置於上述基材之厚度方向一側;及 電子零件,其配置於上述基材之厚度方向一側; 上述基材具有感壓接著層、基材層、及配線層, 上述電子零件經由上述中介層而與上述基材之上述配線層電性連接。An attached biosensor characterized by: a substrate having a stretchability for attaching to a surface of a living body; an interposer disposed on a side of a thickness direction of the substrate; and an electronic component The substrate is disposed on a side in the thickness direction of the substrate. The substrate has a pressure-sensitive adhesive layer, a substrate layer, and a wiring layer, and the electronic component is electrically connected to the wiring layer of the substrate via the interposer. 如請求項1之貼附型生物體感測器,其中上述基材與上述中介層之電性連接點處之面積大於上述電子零件與上述中介層之電性連接點處之面積。The attached biosensor of claim 1, wherein an area of the electrical connection point between the substrate and the interposer is larger than an area of the electrical connection point between the electronic component and the interposer. 如請求項1之貼附型生物體感測器,其中上述基材與上述中介層之電性連接點之數量和上述電子零件與上述中介層之電性連接點之數量相同、或少於該數量。The attached biosensor of claim 1, wherein the number of electrical connection points of the substrate and the interposer is the same as or less than the number of electrical connection points of the electronic component and the interposer Quantity. 如請求項1之貼附型生物體感測器,其中上述中介層具有柔軟性。The attached biosensor of claim 1, wherein the interposer has flexibility. 如請求項4之貼附型生物體感測器,其中上述中介層之彎曲剛性為3.0×1012 GPa·μm4 以下。The attached biosensor of claim 4, wherein the interposer has a bending rigidity of 3.0 × 10 12 GPa·μm 4 or less.
TW107124605A 2017-11-10 2018-07-17 Adhesively attachable biological sensor TW201918221A (en)

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