TW201741107A - Method of dividing brittle substrate - Google Patents

Abstract

In the present invention, prepared is a blade tip (51) that has first to third surfaces (SD1-SD3) and as a result has a ridge line (PS) and an apex (PP). A groove-shaped trench line (TL) is formed in a crackless state by sliding the blade tip (51) along one surface (SF1) of a brittle substrate (4) in a direction from the ridge line (PS) toward the first surface (SD1). A crack line (CL) is formed by cutting downward at an edge (ED) of the brittle substrate (4) using the ridge line (PS) of the blade tip (51) so as to cause a crack in the brittle substrate (4) in a thickness direction (DT) to extend along the trench line (TL) from the edge (ED). A continuous connection of the brittle substrate (4) in a direction that intersects the trench line (TL) is broken by the crack line (CL) below the trench line (TL).

Description

Fragmentation method of brittle substrate

The present invention relates to a method of breaking a brittle substrate.

In the manufacture of electrical equipment such as flat panel displays or solar panel panels, it is often necessary to break the brittle substrate. In a typical breaking method, first, a crack line is formed on a brittle substrate. In the present specification, the term "crack line" means a crack that partially advances in the thickness direction of the brittle substrate and linearly extends on the surface of the brittle substrate. Next, a so-called breaking step is performed. Specifically, by applying stress to the brittle substrate, the crack of the crack line is completely advanced in the thickness direction. Thereby, the brittle substrate is broken along the crack line.

According to Patent Document 1, the depression on the upper surface of the glass sheet is generated at the time of cutting. In Patent Document 1, the recess is referred to as "line". Further, at the same time as the scribe line, a crack extending from the scribe line in the downward direction is generated. As disclosed in the technique of Patent Document 1, in the conventional technique of the prior art, a crack line is formed simultaneously with the formation of the scribe line.

According to Patent Document 2, there is proposed a breaking technique which is significantly different from the above-described typical breaking technique. According to this technique, first, a plastic deformation is performed by sliding of the leading edge of the blade on the brittle substrate, and a groove shape called "scribe line" in Patent Document 2 is formed. In the present specification, the shape of the groove will be referred to as "groove line" later. At the point of time when the groove line is formed, not below it The square forms a crack. Then, the crack line is formed by stretching the crack along the groove line. That is, unlike the typical technique, once the groove line without the crack is formed, a crack line is formed along the groove line. The usual breaking step is then carried along the crack line.

The groove line which does not accompany a crack used in the technique of the above-mentioned Patent Document 2 can be formed by sliding of the leading edge of the blade with a lower load than the typical scribe line formed simultaneously with the crack. Since the load is small, the damage applied to the leading edge of the blade becomes small. Therefore, according to the breaking technique, the life of the leading edge of the blade can be extended.

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 9-188534

[Patent Document 2] International Publication No. 2015/151755

In the typical technique of the prior art, no crack is formed at the time of scribing, which means that the scribing fails. However, in the breaking technique of the above-mentioned Patent Document 2, the groove line which does not accompany the crack is intentionally formed by scribing. Moreover, a crack line along the groove line is then produced. In order to start the formation of the crack line, it is necessary to impart a possibility to release the internal stress generated in the brittle substrate by the formation of the groove line to the brittle substrate. Regarding the method of giving the opportunity, various methods are proposed in the above Patent Document 2. According to the study by the present inventors, these methods are also useful, but there is a problem that the probability of forming a crack line is slightly lower, or the work load is slightly larger due to the need for an additional fracture step.

The present invention has been made in order to solve the above problems, and an object thereof is to provide a brittle substrate which can more reliably and easily form a crack line along a groove line after forming a groove line having no crack below it. Breaking method.

The breaking method of the brittle substrate according to one aspect of the present invention has the following steps a) to e).

a) Preparing a brittle substrate having a face provided with an edge and a thickness direction perpendicular to one face.

b) preparing a leading edge of the blade, the leading edge of the blade having: a first surface; a second surface adjacent to the first surface; and a third surface formed by forming a ridge line adjacent to the second surface Adjacent to each of the first surface and the second surface, an apex is formed.

c) A groove line having a groove shape is formed on one surface of the brittle substrate by plastic deformation by sliding the leading edge of the blade toward the first surface on one surface of the brittle substrate. The groove lines are formed in a non-cracked state, that is, a state in which the brittle substrates are continuously connected in a direction intersecting the groove lines below the groove lines.

d) by cutting the edge of one face of the brittle substrate by the ridge line of the leading edge of the sliding edge of step c), the crack of the brittle substrate in the thickness direction is extended from the edge along the groove line, thereby forming a crack line. By the crack line, the connection of the brittle substrate in the direction intersecting the groove line is interrupted below the groove line.

e) Break the brittle substrate along the crack line.

The breaking method of the brittle substrate according to another aspect of the present invention has the following steps a) to e).

a) Prepare a brittle substrate having a face and a thickness direction perpendicular to one face. An auxiliary line is provided on one surface, the auxiliary line has an auxiliary groove line having a groove shape, and an auxiliary crack line formed by extending a crack of the brittle substrate in the thickness direction along the auxiliary groove line.

b) preparing a leading edge of the blade, the leading edge of the blade having: a first surface; a second surface adjacent to the first surface; and a third surface formed by forming a ridge line adjacent to the second surface Adjacent to each of the first surface and the second surface, an apex is formed.

c) A groove line having a groove shape is formed on one surface of the brittle substrate by plastic deformation by sliding the leading edge of the blade toward the first surface on one surface of the brittle substrate. The groove lines are formed in a non-cracked state, that is, a state in which the brittle substrates are continuously connected in a direction intersecting the groove lines below the groove lines.

d) by using the ridge line of the leading edge of the sliding edge of step c) to intersect the auxiliary line provided on one surface of the brittle substrate, the crack of the brittle substrate in the thickness direction is extended from the auxiliary line along the groove line, thereby A crack line is formed. By the crack line, the connection of the brittle substrate in the direction intersecting the groove line is interrupted below the groove line.

e) Break the brittle substrate along the crack line.

According to the breaking method of the brittle substrate according to an aspect of the present invention, first, the leading edge of the blade can be easily prepared. This is because the apex of the leading edge of the blade is provided as a portion where the three faces of the first surface, the second surface, and the third surface intersect. It is assumed that when the apex of the blade leading edge is provided by a portion where more than three faces intersect, it is necessary to make the positions of the remaining faces coincide by the point where the three faces intersect. Therefore, higher processing accuracy is required. On the other hand, when the apex of the leading edge of the blade is set by the intersection of the three faces, the processing precision is not required. degree. Second, the crack line along the groove line can be formed more surely. The reason for this is that the ridge line of the leading edge of the blade for sliding to form the groove line cuts the edge of one face of the brittle substrate. By this cutting, the start of the formation of the crack line is obtained with higher certainty.

According to the breaking method of the brittle substrate according to another aspect of the present invention, first, the leading edge of the blade can be easily prepared. This is because the apex of the leading edge of the blade is provided as a portion where the three faces of the first surface, the second surface, and the third surface intersect. It is assumed that when the apex of the blade leading edge is provided by a portion where more than three faces intersect, it is necessary to make the positions of the remaining faces coincide by the point where the three faces intersect. Therefore, higher processing accuracy is required. On the other hand, when the apex of the blade leading edge is provided by the portion where the three faces intersect, the processing precision is not required to be high. Second, the crack line along the groove line can be formed more surely. The reason for this is that the ridge line of the leading edge of the blade for sliding the groove line locally applies stress to the intersection of the auxiliary line provided on one surface of the brittle substrate and the groove line formed by the apex of the leading edge of the sliding edge. . By the application of this stress, the triggering of the formation of the crack line is obtained with a high degree of certainty.

Edge of ED‧‧

AL‧‧‧Auxiliary line

CL‧‧‧crack line

SD1‧‧‧ top surface (1st side)

SD2‧‧‧ side (2nd side)

SD3‧‧‧ side (3rd side)

SF, SF1‧‧‧ upper surface (one side)

PP‧‧‧ vertex

TL‧‧‧ trench line

PS‧‧‧ ridgeline

CLa‧‧‧Assisted Crack Line

TLa‧‧‧Auxiliary groove line

4‧‧‧Glass substrate (brittle substrate)

51‧‧‧blade front

51a‧‧‧Auxiliary edge

Fig. 1 is a side view schematically showing the configuration of a cutting instrument used in the breaking method of the brittle substrate according to the first embodiment of the present invention.

Figure 2 is a schematic plan view of the viewpoint of the arrow II of Figure 1.

Fig. 3 is a flow chart schematically showing the configuration of a breaking method of the brittle substrate according to the first to fifth embodiments of the present invention.

Fig. 4 is a view schematically showing the first method of breaking the brittle substrate according to the first embodiment of the present invention; Top view of the steps.

Fig. 5 is a schematic end view taken along line V-V of Fig. 4.

Fig. 6 is a plan view schematically showing a second step of the breaking method of the brittle substrate according to the first embodiment of the present invention.

Fig. 7 is a schematic end view taken along line VII-VII of Fig. 6.

Fig. 8 is a plan view schematically showing the configuration of a cutting instrument used in the breaking method of the brittle substrate of the comparative example.

Fig. 9 is a flow chart showing the configuration of a method of forming a groove line in the method of dividing a brittle substrate according to the second embodiment of the present invention.

Fig. 10 is a plan view schematically showing a first step of the breaking method of the brittle substrate according to the third embodiment of the present invention.

Figure 11 is a schematic end view taken along line XI-XI of Figure 10.

Fig. 12 is a plan view schematically showing a second step of the breaking method of the brittle substrate according to the third embodiment of the present invention.

Fig. 13 is a plan view schematically showing a third step of the breaking method of the brittle substrate according to the third embodiment of the present invention.

Fig. 14 is a plan view schematically showing a first step of the breaking method of the brittle substrate according to the fourth embodiment of the present invention.

Fig. 15 is a plan view schematically showing a second step of the breaking method of the brittle substrate according to the fourth embodiment of the present invention.

Fig. 16 is a cross-sectional view showing the configuration of a blade leading edge used in the breaking method of the brittle substrate according to the fifth embodiment of the present invention.

Fig. 17 is a cross-sectional view showing the configuration of the leading edge of the auxiliary blade used in the breaking method of the brittle substrate according to the fifth embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described based on the drawings. In the following drawings, the same or corresponding components are designated by the same reference numerals, and the description is not repeated.

<Embodiment 1>

(Composition of cutting instruments)

First, the configuration of the cutting tool 50 used in the step of forming the groove line of the method for dividing the glass substrate 4 (brittle substrate) of the present embodiment will be described with reference to FIG. 1 and FIG. The cutting instrument 50 has a blade leading edge 51 and a shank 52. The leading edge 51 of the blade is held by being fixed to the shank 52 as its holder.

A top surface SD1 (first surface) and a plurality of surfaces surrounding the top surface SD1 are provided on the blade leading edge 51. The plurality of faces include a side surface SD2 (second surface) and a side surface SD3 (third surface). The top surface SD1, the side surfaces SD2, and the SD3 (the first to third surfaces) are oriented in mutually different directions and adjacent to each other. The leading edge 51 has an apex where the top surface SD1, the side surfaces SD2, and SD3 intersect. The protrusion of the blade leading edge 51 is formed by the vertex PP. Further, the side faces SD2 and SD3 form a ridge line PS constituting a side portion of the blade leading edge 51. The ridge line PS extends linearly from the apex PP and has a convex shape extending linearly. According to the above configuration, the blade leading edge 51 has a top surface SD1, a side surface SD2 adjacent to the top surface SD1, and a side surface SD3 which is formed adjacent to the side surface SD2 to form the ridge line PS and by the top surface SD1 Each of the side faces SD2 is adjacent to each other to form a vertex PP.

Preferably, the leading edge 51 of the blade is a diamond dot. That is, it can reduce the hardness and surface roughness In terms of roughness, it is preferred that the leading edge 51 of the blade be made of diamond. More preferably, the leading edge 51 is made of single crystal diamond. More preferably, in terms of crystallography, the top surface SD1 is a {001} plane, and each of the side surfaces SD2 and SD3 is a {111} plane. In this case, the side faces SD2 and SD3 have different directions, but are crystallographically equivalent to each other.

Further, a diamond which is not a single crystal may be used. For example, a polycrystalline diamond synthesized by a CVD (Chemical Vapor Deposition) method may also be used. Alternatively, a sintered diamond in which polycrystalline diamond particles not containing a bonding material such as an iron group element are bonded by a binder such as an iron group element may be used from graphite or non-graphite carbon.

The shank 52 extends along the axial direction AX. Preferably, the blade leading edge 51 is attached to the shank 52 so as to be substantially along the axial direction AX in the normal direction of the top surface SD1.

(Method of breaking glass substrate)

Next, a description will be given of a method of dividing the glass substrate 4 with reference to a flow chart shown in FIG.

In step S10 (Fig. 3), the glass substrate 4 (Fig. 1) to be broken is prepared. The glass substrate 4 has an upper surface SF1 (one surface) and an opposite lower surface SF2 (the other surface). An edge ED is provided on the upper surface SF1. In the example shown in Fig. 4, the edge ED has a rectangular shape. The glass substrate 4 has a thickness direction DT perpendicular to the upper surface SF1. Further, in step S20 (Fig. 3), the cutting tool 50 (Figs. 1 and 2) having the blade leading edge 51 is prepared.

Referring to FIG. 4, a groove line TL is formed in step S30 (FIG. 3). Specifically, the following steps are performed.

First, the vertex PP of the blade leading edge 51 (Fig. 1) is pressed against the upper surface SF1 at the position N1. Thereby, the blade leading edge 51 is in contact with the glass substrate 4. Preferably, the position N1 is as shown in the figure. The edge ED of the upper surface SF1 of the glass substrate 4 is separated. In other words, at the sliding start timing of the blade leading edge 51, the blade leading edge 51 is prevented from colliding with the edge ED of the upper surface SF1 of the glass substrate 4.

Next, the blade leading edge 51 which is pressed as described above is slid on the upper surface SF1 of the glass substrate 4 (see an arrow in Fig. 4). The blade leading edge 51 (Fig. 1) slides on the upper surface SF1 in the direction from the ridge line PS toward the top surface SD1. Strictly speaking, the blade leading edge 51 slides in a direction DB formed by projecting the ridge line PS from the apex PP toward the top surface SD1 toward the upper surface SF1. The direction DB is projected substantially in the direction in which the ridge line PS in the vicinity of the vertex PP is projected to the upper surface SF1. In FIG. 1, the direction DB corresponds to a direction opposite to the direction in which the axial direction AX extending from the blade leading edge 51 is projected onto the upper surface SF1. Therefore, the blade leading edge 51 is pressed into the upper surface SF1 by the shank 52.

Each of the ridge line PS and the top surface SD1 of the blade leading edge 51 (FIG. 1) which slides on the upper surface SF1 of the glass substrate 4 forms an angle AG1 and an angle AG2 with the upper surface SF1 of the glass substrate 4. Preferably, the angle AG2 is smaller than the angle AG1.

Plastic deformation occurs on the upper surface SF1 by the above sliding. Thereby, a groove line TL having a groove shape is formed on the upper surface SF1 (FIG. 5). Preferably, the groove line TL is generated only by plastic deformation of the glass substrate 4, and in this case, no cutting occurs on the upper surface SF1 of the glass substrate 4. In order to avoid cutting, it is sufficient that the load on the leading edge 51 of the blade is not excessively high. Since there is no cutting, it is possible to avoid generation of fine and fine fragments on the upper surface SF1. However, a small amount of cutting is usually allowed.

The groove line TL is formed by sliding the blade leading edge 51 from the position N1 to the position N3e via the position N2 between the position N1 and the position N3e. The position N2 is separated from the edge ED of the upper surface SF1 of the glass substrate 4. The position N3e is located on the upper surface SF1 of the glass substrate 4. Edge ED.

The groove line TL is formed in a non-cracked state, that is, in the direction in which the glass substrate 4 intersects with the direction in which the groove line TL extends (the horizontal direction in FIG. 4) below the groove line TL (Fig. 5) The state of continuous connection. In the non-cracked state, although the groove line TL formed by plastic deformation is formed, cracks along it are not formed. In order to obtain a proper crack-free state, the load applied to the leading edge 51 of the blade is adjusted so as to be small as to the extent that the groove line TL is formed at a point in time without cracking, and is generated as if it can be produced in a subsequent step. The degree of plastic deformation of the state of the internal stress of the crack.

In order to form the groove line TL, the leading edge 51 of the sliding edge as described above finally reaches the position N3e. The blade front edge 51 is maintained at the position of the position N2 without cracking, and is maintained until the blade leading edge 51 reaches the position N3e. If the blade leading edge 51 reaches the position N3e, the ridge line PS (Fig. 1) of the blade leading edge 51 cuts off the edge ED of the upper surface SF1 of the glass substrate 4.

Referring to Fig. 6 and Fig. 7, by the above-described cutting, fine destruction occurs at the position N3e. Starting from this destruction, cracks are generated in such a manner that the internal stress near the groove line TL is released. Specifically, the crack of the glass substrate 4 in the thickness direction DT extends from the groove line TL at a position N3e located at the edge ED of the upper surface SF1 of the glass substrate 4 (refer to an arrow in FIG. 6). In other words, the formation of the crack line CL begins. Thereby, as step S50 (FIG. 3), the crack line CL is formed from the position N3e to the position N1.

Further, in order to make the formation of the crack line CL more certain, the speed at which the blade leading edge 51 slides from the position N2 to the position N3e may be made smaller than the speed from the position N1 to the position N2. Similarly, the load applied from the position N2 to the position N3e to the leading edge 51 of the blade can be made larger than the load from the position N1 to the position N2 in the range of maintaining the crack-free state.

By the crack line CL, the continuity of the glass substrate 4 in the direction DC (Fig. 7) intersecting with the extending direction of the groove line TL (the horizontal direction in Fig. 6) is interrupted below the groove line TL. Here, "continuous connection" means, in other words, a connection that is not obscured by cracks. Further, in the state in which the continuous connection is interrupted as described above, the portions of the glass substrate 4 may be brought into contact with each other via the crack of the crack line CL. Further, a slight continuous connection may be left immediately below the groove line TL.

The direction in which the crack line CL (Fig. 6) extends along the groove line TL (Fig. 4) (the arrow in Fig. 6) is opposite to the direction in which the groove line TL is formed (the arrow in Fig. 4). In order to generate the crack line CL by such a directional relationship, it is preferable to make the angle AG2 smaller than the angle AG1 when the blade leading edge 51 is slid in the direction DB (FIG. 1) in order to form the groove line TL. If the angle relationship is not satisfied, the crack line CL is less likely to occur. Moreover, if the angle AG1 and the angle AG2 are substantially the same, whether or not the crack line CL is generated tends to be unstable.

Next, in step S60 (Fig. 3), the glass substrate 4 is separated along the crack line CL. That is, a so-called breaking step is performed. The breaking step can be performed by applying an external force to the glass substrate 4. For example, a stress applying member (for example, a member called a "breaking bar") is pressed against the lower surface SF2 toward the crack line CL (FIG. 7) on the upper surface SF1 of the glass substrate 4, and the crack is opened, for example. The stress of the crack of the line CL is applied to the glass substrate 4. Further, in the case where the crack line CL is completely advanced in the thickness direction DT at the time of its formation, the formation of the crack line CL is simultaneously generated with the division of the glass substrate 4.

The division of the glass substrate 4 is performed based on the above. Furthermore, the step of forming the crack line CL described above is substantially different from the so-called breaking step. The rupture step is to completely separate the substrate by stretching the already formed cracks in the thickness direction. On the other hand, the crack line CL The forming step is a change from a crack-free state obtained by the formation of the groove line TL to a state having a crack. This change is thought to be produced by the release of internal stresses in the crack-free state.

(Comparative Example 1)

Referring to Fig. 8, the apex PP of the blade leading edge 59 of this comparative example is set at a portion where the four faces SE1 to SE4 intersect. The vertices PP are provided with four ridge lines PS1 to PS4. In this case, in the step of FIG. 4, the edge ED of the upper surface SF1 of the glass substrate 4 can be cut by any of the ridge lines PS1 to PS4. Therefore, similarly to the present embodiment, there is an advantage that the crack line CL can be easily formed reliably. On the other hand, the formation of the leading edge 59 requires a high degree of processing accuracy, and therefore has the disadvantage that it is not easy to form. The reason for this is that, in the case where the vertex PP of the blade leading edge is provided in the portion where the surfaces SE1 to SE4 intersect as in the present comparative example, the remaining one must be made by passing the points where the three faces intersect. The position of the face is the same.

(Comparative Example 2)

In the present comparative example, the sliding direction of the blade leading edge 51 is set to be opposite to the direction DB (FIG. 1). In this case, in the step of FIG. 4, the edge ED of the upper surface SF1 of the glass substrate 4 is cut by the top surface SD1 instead of the ridge line PS. That is, in the case of cutting, the sharp ridge line PS acts in the above-described embodiment, whereas in the comparative example, the flat top surface SD1 functions. Therefore, in the comparative example, it is less likely to cause a fine break of the start of the formation of the crack line CL. Therefore, it is indeed difficult to form the crack line CL.

(effect)

According to the present embodiment, in the first place, the blade leading edge 51 can be easily prepared. The reason for this is that, unlike the above-described Comparative Example 1, the apex of the blade leading edge 51 is the top surface SD1, the side surface SD2, and the side surface SD3. It is set up with the intersection of the three faces. It is assumed that when the apex of the blade leading edge is provided by a portion where more than three faces intersect, it is necessary to make the positions of the remaining faces coincide by the point where the three faces intersect. Therefore, higher processing accuracy is required. On the other hand, when the apex of the blade leading edge is provided by the portion where the three faces intersect, the processing precision is not required to be high. Second, the crack line CL along the groove line TL can be formed more surely. This is because, unlike the above-described Comparative Example 2, the ridge line PS of the blade leading edge 51 which is slid to form the groove line TL cuts the edge ED of the upper surface SF1 of the glass substrate 4. By this cutting, the start of the formation of the crack line CL is obtained with higher certainty.

<Embodiment 2>

Referring to Fig. 4, in the present embodiment, a lubricant is supplied to a position where the blade leading edge 51 slides on the upper surface SF1 of the glass substrate 4. In other words, the step of forming the groove line TL (Fig. 4) (Fig. 3: step S30), as shown in Fig. 9, includes the step S31 of supplying the lubricant, and the step of sliding the blade leading edge 51 at the position where the lubricant is supplied. S32. In order to carry out step S31, for example, a lubricant supply unit (not shown) may be provided in the shank 52 (Fig. 1). Incidentally, the configuration other than the above is substantially the same as the configuration of the above-described first embodiment, and thus the description thereof will not be repeated. Further, step S31 can also be applied to the following embodiments 3 to 5.

In the present embodiment, as in the first embodiment, the direction DB (Fig. 1) is selected as the forward direction of the blade leading edge 51. Under the condition that the load on the leading edge 51 of the blade is the same, the sliding in the direction DB is more likely to cause damage to the leading edge 51 of the blade than in the opposite direction. According to this embodiment, the damage can be effectively suppressed. Thereby, the life of the leading edge of the blade can be extended.

<Embodiment 3>

Referring to Fig. 10, in the step S10 (Fig. 3), the same glass as in the first embodiment described above is prepared. Substrate 4. However, in the present embodiment, the auxiliary line AL is provided on the upper surface SF1 of the glass substrate 4. Referring to Fig. 11, the auxiliary line AL has an auxiliary groove line TLa and an auxiliary crack line CLa. The auxiliary groove line TLa has a groove shape. The auxiliary crack line CLa is formed by extending a crack of the glass substrate 4 in the thickness direction DT along the auxiliary groove line TLa.

In the present embodiment, the auxiliary line AL is provided on the upper surface SF1 of the glass substrate 4 by the step of simultaneously forming the auxiliary groove line TLa and the auxiliary crack line CLa. Such an auxiliary line AL can be formed by a typical typical cutting method. For example, such an auxiliary line AL can be carried out by placing the leading edge of the blade on the edge ED of the upper surface SF1 of the glass substrate 4 and then moving it on the upper surface SF1 as indicated by the arrow of FIG. The fine crack is generated by the impact at the time of the rest, so that the auxiliary crack line CLa can be easily formed simultaneously when the auxiliary groove line TLa is formed. In order to suppress damage to the leading edge of the blade and the glass substrate 4 during the rest, the leading edge of the blade preferably has a shape suitable for rest depending on the shape of the leading edge 51 of the blade. Specifically, the leading edge of the blade is preferably a holder that can be rotated (wheel type). In other words, the leading edge of the blade is preferably rotated on the glass substrate 4 rather than being a slider. Furthermore, the starting point of the auxiliary line AL is the edge ED in FIG. 10, but may also be separated from the edge ED.

Next, in step S20 (Fig. 3), the blade leading edge 51 similar to that of the first embodiment is prepared. Further, in order to facilitate the preparation of the leading edge of the auxiliary line AL for the blade, the blade leading edge 51 may be used to form the above-described auxiliary line AL. Alternatively, the auxiliary line AL may be formed using a blade leading edge having the same shape as the shape of the blade leading edge 51.

Referring to Fig. 12, second, a groove line TL is formed in step S30 (Fig. 3). Specifically, the following steps are performed.

First, the same operation as in the first embodiment is performed. Specifically, at the location N1 presses the apex PP of the leading edge 51 (Fig. 1) against the upper surface SF1. Next, the pressed blade leading edge 51 is slid in the direction DB (FIG. 1) on the upper surface SF1 of the glass substrate 4 (see an arrow in FIG. 12). Thereby, the groove line TL is formed on the upper surface SF1 in a crack-free state.

In the present embodiment, the groove line TL is formed by sliding the blade leading edge 51 between the position N1 and the position N3a from the position N1 to the position N3a via the position N2. The position N3a is arranged on the auxiliary line AL. The position N2 is disposed between the position N1 and the position N3a. Preferably, the leading edge 51 of the blade exceeds the position N3a on the auxiliary line AL and then slides to the position N4. Preferably, position N4 exits from edge ED.

In order to form the groove line TL, the leading edge 51 of the sliding edge as described above intersects the auxiliary line AL at the position N3a. Therefore, the ridge line PS (Fig. 1) of the blade leading edge 51 also intersects the auxiliary line AL. By this intersection, fine destruction occurs at the position N3a. The break is used as a starting point, and a crack is generated in such a manner as to release the internal stress near the groove line TL. Specifically, the crack of the glass substrate 4 in the thickness direction DT extends from the groove line TL from the position N3a located on the auxiliary line AL (refer to the arrow of FIG. 13). In other words, the formation of the crack line CL is started (Fig. 13). Thereby, as step S50 (FIG. 3), the crack line CL is formed from the position N3a to the position N1. After the crack line CL is formed, in the same manner as in the first embodiment, the connection of the glass substrate 4 in the direction intersecting the groove line TL is interrupted by the crack line CL.

After the blade leading edge 51 reaches the position N3a, it leaves from the glass substrate 4. Preferably, the blade leading edge 51 is separated from the glass substrate 4 after the position N3a has slid to the position N4.

Next, in step S60 (Fig. 3), the glass substrate 4 is separated along the crack line CL in the same manner as in the first embodiment. Based on the above, the method of dividing the glass substrate 4 of the present embodiment is performed.

According to the present embodiment, in the first place, the blade leading edge 51 can be easily prepared for the same reason as in the first embodiment. Secondly, in the same manner as in the first embodiment, the crack line CL along the groove line TL can be formed more surely. The reason for this is that the ridge line PS of the blade leading edge 51 which slides to form the groove line TL is directed to the auxiliary line AL provided on the upper surface SF1 of the glass substrate 4 and the groove formed by the apex of the leading edge 51 of the sliding blade. The position N3a (Fig. 12) where the line TL intersects locally applies stress. By the application of the stress, the start of the formation of the crack line CL is obtained with higher certainty.

<Embodiment 4>

In the present embodiment, unlike the third embodiment, each of the auxiliary groove line TLa and the auxiliary crack line CLa included in the auxiliary line AL (FIGS. 11 and 12) is similar to that described in the first embodiment. It is formed by the method of forming the groove line TL and the crack line CL. Hereinafter, the method will be specifically described.

First, the leading edge of the blade for forming the auxiliary line AL is prepared. The leading edge of the blade may be the same as the leading edge 51 of the blade (Figs. 1 and 2). That is, the formation of the auxiliary line AL and the formation of the groove line TL which is then formed can also be performed by the common blade leading edge 51. Alternatively, as the leading edge of the blade for forming the auxiliary line AL, a blade leading edge (hereinafter referred to as "auxiliary blade leading edge") different from the blade leading edge 51 may be prepared. The leading edge of the cutting edge may also have the same shape as the leading edge 51 (Figs. 1 and 2). Alternatively, the leading edge of the cutting edge may have a different shape than the shape of the leading edge 51 of the blade. In the case where the leading edge of the auxiliary blade has a shape different from the shape of the leading edge 51 of the blade, it is preferable that the leading edge of the auxiliary blade has a top surface SD1, a side surface SD2, and a side surface SD3 which form the apex PP and the ridge line PS, The difference in shape is caused by the difference in the configuration between the components. Here, the "shape" of the leading edge of the blade is the portion near the vertex PP in the leading edge of the blade, that is, the shape of the portion that acts on the glass substrate 4, and the shape of the portion away from the active portion is usually not important. Below, in order not to As described above, there is a case where the leading edge of the blade to be used for forming the auxiliary line AL is simply referred to as a "blade leading edge" regardless of whether it is the leading edge 51 or the leading edge of the auxiliary blade.

Referring to Fig. 14, secondly, the auxiliary groove line TLa is formed in a crack-free state by a method similar to the formation of the groove line TL (Fig. 4). Referring to Fig. 15, secondly, the auxiliary groove line TLa along the auxiliary groove line TLa (Fig. 14) is formed by a method similar to the formation method of the crack line CL along the groove line TL (Fig. 6). According to the above, the auxiliary line AL (Fig. 11) is formed.

Then, in the same manner as in the third embodiment, the groove lines TL (Fig. 12) and the crack lines CL (Fig. 13) are formed in steps S30 and S50 (Fig. 3), and in step S60 (Fig. 3), along the cracks. The line CL separates the glass substrate 4. Based on the above, the method of dividing the glass substrate 4 of the present embodiment is performed.

In the present embodiment, the load applied to the blade leading edge 51 at the time of formation of the groove line TL (Fig. 12) is larger than the load applied to the leading edge of the blade when the auxiliary groove line TLa (Fig. 14) is formed. . According to the experimental study by the inventors, by setting the difference in the load as described above, the crack line CL can be more surely produced.

Preferably, the angle AG2 (Fig. 1) at the time of formation of the groove line TL (Fig. 12) is smaller than the angle AG2 (Fig. 1) at the time of formation of the auxiliary groove line TLa. By using such an angular relationship, in particular, even when the leading edge of the blade for forming the auxiliary groove line TLa is the blade leading edge 51 or the auxiliary blade leading edge having the same shape as the blade leading edge 51 It is also easy to set the difference in the above load. This reason is that, in the case where the shape of the leading edge of the blade is the same, the smaller the angle AG2 is, the larger the load of the groove line TL (or the auxiliary groove line TLA) can be formed without cracking. When the groove line TL is formed, if the angle AG2 is too large, it is difficult to simultaneously form a crack-free state. The trench line TL has a larger load than when the formation of the auxiliary trench line TLA is used. On the other hand, when the angle AG2 (FIG. 1) at the time of formation of the groove line TL (FIG. 12) is smaller than the angle AG2 (FIG. 1) at the time of formation of the auxiliary groove line TLa, the formation of the groove line TL At the time, it is easy to use a load with a larger load than when the auxiliary trench line TLA is formed. Therefore, there is no need to worry about applying a blade leading edge design for the high load to the leading edge 51 of the groove line TL, and applying a blade leading edge design for the low load on the leading edge of the auxiliary groove line TLa. Therefore, at the time of forming the auxiliary groove line TLA, the blade leading edge 51 used in the formation of the groove line TL or the auxiliary blade leading edge having the same shape as that of the groove line TL can be used.

When the difference is set to the angle AG2 (FIG. 1) as described above, it is preferable that the leading edge of the blade for forming the auxiliary groove line TLa is different from the leading edge 51 of the blade for forming the groove line TL. , prepare the auxiliary blade leading edge. Thereby, the posture of the blade leading edge 51 can be fixed in the state where the angle AG2 of the blade leading edge 51 is suitable for the formation of the groove line TL. In other words, between the step of forming the auxiliary groove line TLa and the step of forming the groove line TL, the posture adjustment of the blade leading edge 51 for optimizing the angle AG2 is not required.

<Embodiment 5>

Referring to Fig. 16 and Fig. 17, in the present embodiment, the blade leading edge 51 is used for forming the groove line TL, and the auxiliary blade leading edge 51a is used as the fourth embodiment for forming the auxiliary groove line TLA. The leading edge of the auxiliary blade. The shape of the blade leading edge 51 and the shape of the auxiliary blade leading edge 51a are different from each other. For example, in the vicinity of the apex PP (see FIG. 2), each of the blade leading edge 51 and the auxiliary blade leading edge 51a has an angle AP and an angle APa of the ridge line PS of the cross section perpendicular to the ridge line PS, and the angle AP is larger than the angle APa. Incidentally, the configuration other than the above is substantially the same as the configuration of the above-described fourth embodiment, and thus the description thereof will not be repeated.

According to the present embodiment, when the auxiliary groove line TLA is formed and the groove line TL is formed, a blade leading edge having a different shape is used. Therefore, as the shape of the leading edge of the blade, when each of the auxiliary groove line TLa and the groove line TL is formed, a suitable low load and a high load can be used. Therefore, the crack-free state can be more surely obtained when the auxiliary trench line TLA and the trench line TL are formed, and the auxiliary crack line CLa can be more reliably generated from each of the auxiliary trench line TLA and the trench line TL. Crack line CL.

Further, in the above embodiments, the case where the edge of the upper surface SF1 is formed in a rectangular shape is illustrated, but other shapes may be used. Further, the case where the upper surface SF1 is flat is described, but the upper surface may be curved. Further, the case where the groove line TL is linear is described, but the groove line TL may have a curved shape. Further, although the case where the glass substrate 4 is used as the brittle substrate has been described, the brittle substrate may be made of a brittle material other than glass, and may be made of, for example, ceramic, germanium, compound semiconductor, sapphire or quartz.

AG1‧‧‧ angle

AG2‧‧‧ angle

AX‧‧‧ axial

DB‧‧‧ direction

DT‧‧‧ thickness direction

Edge of ED‧‧

PP‧‧‧ vertex

PS‧‧‧ ridgeline

SD1‧‧‧ top surface (1st side)

SD3‧‧‧ side (3rd side)

SF1‧‧‧ upper surface (one side)

SF2‧‧‧ lower surface (the other side)

4‧‧‧Glass substrate (brittle substrate)

50‧‧‧ cutting instruments

51‧‧‧blade front

52‧‧‧ handle

Claims (8)

A method for breaking a brittle substrate, comprising the steps of: a) preparing a brittle substrate having a surface provided with an edge and a thickness direction perpendicular to the one surface; and further comprising the steps of: b) preparing a blade leading edge, the blade The leading edge has a first surface; the second surface is adjacent to the first surface; and the third surface is formed adjacent to the second surface to form a ridge line and is formed by the first surface and the first surface Each of the two faces forms an apex adjacent to each other, and further includes the step of: c) utilizing plastic deformation by sliding the leading edge of the blade toward the first surface from the ridge line on the one surface of the brittle substrate Forming a groove line having a groove shape on the one surface of the brittle substrate, wherein the groove line is formed in a non-cracked state, that is, the brittle substrate is below the groove line a state in which the groove lines are continuously connected in a direction; and further comprising: d) cutting the edge of the one surface of the brittle substrate by the ridge line of the blade leading edge slid by the step c) The crack of the brittle substrate in the thickness direction extends from the edge along the groove line, thereby forming a crack line, and the crack line is such that the brittle substrate is below the groove line and the groove line is The connection in the direction of continuity of the intersection is interrupted; and further comprising the steps of: e) breaking the brittle substrate along the crack line. A method for breaking a brittle substrate, comprising the steps of: a) preparing a brittle substrate having a surface and a thickness direction perpendicular to the one surface, and providing an auxiliary line on one surface, the auxiliary line having: an auxiliary groove line And having a groove shape; and an auxiliary crack line formed by extending the crack of the brittle substrate in the thickness direction along the auxiliary groove line; and further comprising the steps of: b) preparing a blade leading edge, the blade front The edge has a first surface; the second surface is adjacent to the first surface; and the third surface is formed adjacent to the second surface to form a ridge line and is formed by the first surface and the second surface Each of the faces forms an apex adjacent to each other, and further includes the step of: c) sliding the leading edge of the blade toward the first surface from the ridge line on the one surface of the brittle substrate a groove line having a groove shape is formed on the one surface of the brittle substrate, and the groove line is formed in a non-cracked state, that is, the brittle substrate is located below the groove line and the groove a state in which the lines intersecting continuously are connected; and further comprising: d) intersecting the ridge line provided on the one surface of the brittle substrate by the ridge line of the blade leading edge slid by the step c) And forming a crack of the brittle substrate in the thickness direction from the auxiliary line along the groove line, thereby forming a crack line, wherein the fragile substrate is below the groove line by the crack line The continuity of the intersection of the groove lines is interrupted; and the following steps are further performed: e) breaking the above-mentioned brittle substrate along the above-mentioned crack line. The method for breaking a brittle substrate according to claim 2, wherein the step a) comprises the following steps: a1) preparing any one of the blade leading edge and the auxiliary blade leading edge, wherein the auxiliary blade leading edge has: 1st a second surface adjacent to the first surface; and a third surface formed by a ridge line adjacent to the second surface and each of the first surface and the second surface And forming a vertex adjacent thereto; further comprising the step of: a2) causing one of the leading edge of the blade and the leading edge of the auxiliary blade to face the first surface from the ridge line on the one surface of the brittle substrate Sliding, wherein the auxiliary groove line is formed on the one surface of the brittle substrate by plastic deformation, and the auxiliary groove line is formed in a non-cracked state, that is, below the auxiliary groove line, a state in which the brittle substrate is continuously connected in a direction crossing the auxiliary groove line; and further comprising the steps of: a3) forming the auxiliary by causing a crack of the brittle substrate in the thickness direction to extend along the auxiliary groove line; crack a line, wherein the auxiliary crack line is below the auxiliary groove line, the brittle substrate is discontinuously connected in a direction intersecting the groove line, and is applied to the blade leading edge in the step c) The load is larger than the load applied to either the blade leading edge and the auxiliary blade leading edge in the above step a2). A method of breaking a brittle substrate according to claim 3, wherein in the step a2), the leading edge of the auxiliary blade having a shape different from the shape of the leading edge of the blade is slid. A method for breaking a brittle substrate according to item 3 of the patent application, wherein in the above step c) The angle between the first surface of the blade leading edge and the one surface of the brittle substrate is smaller than the first surface of the blade leading edge and the auxiliary blade leading edge in the step a2) and the brittle substrate The angle formed by the above one face. The method for breaking a brittle substrate according to claim 5, wherein in the step a2), the leading edge of the blade and the auxiliary blade leading edge having the same shape as the leading edge of the blade are used. slide. The method for breaking a brittle substrate according to claim 2, wherein the step a) comprises the step of simultaneously forming the auxiliary groove line and the auxiliary crack line. The method for breaking a brittle substrate according to any one of claims 1 to 7, wherein the step c) comprises supplying a lubricant to a position where the leading edge of the blade on the one surface of the brittle substrate slides. step.