TW201716589A - An electron-beam vacuum refining furnace which can reduce the problem of crucible splash resulted from feeding actions of the material or scattering of the material out of the crucible, in order to obtain the electron-beam vacuum refining furnace capable of reducing the cost - Google Patents
An electron-beam vacuum refining furnace which can reduce the problem of crucible splash resulted from feeding actions of the material or scattering of the material out of the crucible, in order to obtain the electron-beam vacuum refining furnace capable of reducing the cost Download PDFInfo
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Description
本發明係關於一種真空精煉爐,特別是關於一種電子束真空精煉爐。 This invention relates to a vacuum refining furnace, and more particularly to an electron beam vacuum refining furnace.
高純度金屬材料是許多應用領域的重要關鍵原物料,尤其是高純度且高熔點的難熔金屬材料,是國防工業、航太工業,半導體產業及光電產業等重要的基礎,高熔點的難熔金屬材料是非常耐熱和耐磨性,其特質包含超過2000℃以上,在室溫下具有很高的硬度。 High-purity metal materials are important key materials in many application fields, especially high-purity and high-melting refractory metal materials. They are important foundations for defense industry, aerospace industry, semiconductor industry and optoelectronic industry, and high melting point refractory. The metal material is very heat-resistant and wear-resistant, and its characteristics include more than 2000 ° C and high hardness at room temperature.
一般業界用於冶煉礦物和熔煉金屬的工業爐,常用的有高爐、電爐、轉爐、鐵合金電爐,有色金屬工業中常用的有鼓風爐、反射爐、臥式轉爐、閃速爐等,其他如感應電爐、電子束真空精煉爐等,也都稱做熔煉爐;而在眾多的冶金熔煉方法中,對於高熔點的難熔金屬材料的精煉與純化,電子束熔煉法為一種低汙染、高效率的製作方法,電子束熔煉過程在電子束真空精煉爐中的高真空下進行,主要優點有熔煉速度可在大工作範圍內調整,功率密度高,熔池表面溫度高,液態的維持時間長,使材料的精煉與純化作用得以有效進行,同時在熔煉過程中時,材料發生脫氣、分解、 雜質的揮發和不熔雜質的上浮或沉澱等以利排除,來達到難熔金屬材料的精煉與純化。 The industrial furnaces used in the industry for smelting minerals and smelting metals are commonly used in blast furnaces, electric furnaces, converters, and ferroalloy electric furnaces. In the non-ferrous metal industry, there are blast furnaces, reverberatory furnaces, horizontal converters, flash furnaces, etc., others such as induction furnaces. , electron beam vacuum refining furnace, etc., are also called smelting furnaces; and in many metallurgical smelting methods, for the refining and purification of high melting point refractory metal materials, electron beam melting method is a low pollution, high efficiency production The electron beam melting process is carried out under high vacuum in an electron beam vacuum refining furnace. The main advantages are that the melting speed can be adjusted within a large working range, the power density is high, the surface temperature of the molten pool is high, and the liquid holding time is long, so that the material The refining and purification functions are effectively carried out, and at the same time, during the smelting process, the material degassing, decomposing, The volatilization of impurities and the floating or precipitation of infusible impurities are excluded to achieve refining and purification of refractory metal materials.
電子束真空熔煉爐可利用重力法來提供電子束 真空熔煉爐的進料,此種進料系統雖然在裝置設計及製作程序上較為簡易與操作容易,但在進料上針對不同物料產生若干缺失如下:1.物料進料口必須遠離熔煉坩鍋上方,因為對於難熔金屬而言,熔煉坩鍋的溫度非常高,因此進料口必須具有一定高度,方能避免進料口的裝置購件因過熱而變形;2.物料為塊狀物料來進行投料時,由於高溫使進料口離熔煉坩鍋具有一段距離,因此對於投擲塊狀物料時極易造成坩鍋內熔湯產生飛濺情形;3.物料為顆粒狀或粉體物料來進行投料時,則容易因進料口與熔煉坩鍋具有一段距離,因而造成顆粒狀或粉體物料容易飛散於坩鍋外;因此不論是投擲塊狀物料產生的熔湯飛濺,或是投擲顆粒狀或粉體物料產生的物料飛散於坩鍋外,皆會造成物料浪費,並增加裝置維護頻率,造成額外龐大的生產成本。 Electron beam vacuum melting furnace can use gravity method to provide electron beam The feeding of the vacuum melting furnace, although the feeding system is simple and easy to operate in the design and production process, some defects in the feeding materials for different materials are as follows: 1. The material feeding port must be far away from the melting crucible Above, because for the refractory metal, the temperature of the melting crucible is very high, so the inlet must have a certain height to prevent the device purchase of the inlet from being deformed due to overheating; 2. The material is a block material. When feeding, because the high temperature makes the feed port a distance from the melting crucible, it is easy to cause splashing of the molten soup in the crucible when throwing the block material; 3. The material is granular or powder material for feeding. At this time, it is easy to have a distance between the feed port and the melting crucible, so that the granular or powder material is easy to fly outside the crucible; therefore, whether it is throwing a molten material from a block material, or throwing a granule or The material produced by the powder material is scattered outside the crucible, which will cause material waste and increase the frequency of maintenance of the device, resulting in extra large production costs.
因此目前業界極需發展出一種具有有效進料的 電子束真空精煉爐,可同時用於解決投擲塊狀物料產生的熔湯飛濺問題,或是投擲顆粒狀或粉體物料產生的物料飛散於坩鍋外的問題,如此一來,方能同時兼具成本與效率,製備出可降低因物料投料動作導致坩堝噴濺或物料飛散於坩鍋外的問題產生,以得到可降低成本的電子束真空精煉爐。 Therefore, the industry is now in great need to develop an effective feed. The electron beam vacuum refining furnace can simultaneously solve the problem of melting spatter generated by throwing block materials, or throwing particles or powder materials to fly outside the crucible, so that it can simultaneously With cost and efficiency, it is possible to reduce the problem of splattering or material scattering outside the crucible due to the material feeding action, so as to obtain an electron beam vacuum refining furnace which can reduce the cost.
鑒於上述習知技術之缺點,本發明之主要目的在於提供一種電子束真空精煉爐,整合一爐體、一電子束單元、一坩堝、及一進料系統,以製備出可降低成本的電子束真空精煉爐。 In view of the above disadvantages of the prior art, the main object of the present invention is to provide an electron beam vacuum refining furnace, which integrates a furnace body, an electron beam unit, a crucible, and a feeding system to prepare an electron beam capable of reducing cost. Vacuum refining furnace.
為了達到上述目的,根據本發明所提出之一方案,提供一種電子束真空精煉爐,包括:一精煉爐本體;一電子束單元,設置於該精煉爐本體內上方區域,係用以提供電子束;一坩堝,設置於該電子束單元下方;一進料系統,用以提供物料至該坩堝,係包含一進料倉單元、一斜向導管單元、一運輸單元,該進料倉單元連接該斜向導管單元;其中該運輸單元一側設置於該斜向導管單元下方,該運輸單元另一側包含有一冷卻系統,並設置於該坩堝上方。 In order to achieve the above object, according to one aspect of the present invention, an electron beam vacuum refining furnace includes: a refining furnace body; an electron beam unit disposed in an upper region of the refining furnace body for providing an electron beam a feed system disposed below the electron beam unit; a feed system for providing material to the crucible, comprising a feed bin unit, a diagonal conduit unit, and a transport unit, the feed bin unit connecting the An oblique conduit unit; wherein one side of the transport unit is disposed below the diagonal duct unit, and the other side of the transport unit includes a cooling system disposed above the weir.
上述的進料倉單元可包含一進料倉、一上止漏閥門、一真空傳送腔、一下止漏閥門、一上真空閥門、一下真空閥門,其中,真空傳送腔設置於上止漏閥門與下止漏閥門間。 The feed bin unit may include a feed bin, an upper leak stop valve, a vacuum transfer chamber, a lower leak stop valve, an upper vacuum valve, and a lower vacuum valve, wherein the vacuum transfer chamber is disposed on the upper leak stop valve and Lower the leak between the valves.
本案發明中,設置於進料倉單元下方與該進料倉單元連接的斜向導管單元,其內部可利用重力或一導管運輸機構來運輸物料,或利用一震動機構協助運輸,以避免物料停留在斜向導管單元內。 In the invention of the present invention, the oblique conduit unit disposed under the feed bin unit and connected to the feed bin unit can be internally transported by gravity or a conduit transport mechanism, or can be transported by a vibration mechanism to avoid material retention. In the diagonal conduit unit.
運輸單元可包含一金屬製成之金屬運輸帶、一主 動輪軸、一被動輪軸,該金屬運輸帶用來運送物料至坩堝,另該金屬運輸帶上可包含一物料容置空間,例如一凹槽結構或一承接器,以分批方式運送物料;運輸單元一側(主動輪軸側)設置於斜向導管單元下方,其另一側(被動輪軸側)則包含有一冷卻系統,位置設置於該坩堝上方,該冷卻系統可設置於被動輪軸上,其可設計由一封閉水路循環機構組成,用來冷卻運輸單元位於坩堝那一側的構件,避免因高溫而受影響,該冷卻系統的封閉水路循環機構可利用銅做為管壁(不以此為限),以降低輻射熱影響;被動輪軸上更包含一投料機構,可讓物料以更接近坩堝的方式,平緩滑落至坩鍋內。 The transport unit can comprise a metal conveyor belt made of metal, a main a moving axle, a passive axle, the metal conveyor belt is used for conveying materials to the crucible, and the metal conveyor belt can include a material receiving space, such as a groove structure or a socket, to transport the materials in batches; The unit side (the drive axle side) is disposed under the diagonal duct unit, and the other side (passive axle side) includes a cooling system disposed above the weir, the cooling system can be disposed on the passive axle, which can be The design consists of a closed water circulation mechanism for cooling the components of the transport unit on the side of the raft to avoid being affected by high temperatures. The closed water circulation mechanism of the cooling system can use copper as the pipe wall (not limited to this. ) to reduce the effects of radiant heat; the passive axle also includes a feeding mechanism that allows the material to slip smoothly into the crucible in a manner closer to the crucible.
以上之概述與接下來的詳細說明及附圖,皆是為 了能進一步說明本創作達到預定目的所採取的方式、手段及功效。而有關本創作的其他目的及優點,將在後續的說明及圖式中加以闡述。 The above summary and the following detailed description and drawings are It can further explain the ways, means and effects of this creation to achieve the intended purpose. Other purposes and advantages of this creation will be explained in the following description and drawings.
101‧‧‧精煉爐本體 101‧‧‧Refiner body
102‧‧‧電子束單元 102‧‧‧Electron unit
103‧‧‧電子束 103‧‧‧Electron beam
104‧‧‧坩堝 104‧‧‧坩埚
11‧‧‧進料倉單元 11‧‧‧ Feed bin unit
12‧‧‧進料倉 12‧‧‧ Feed bin
13‧‧‧上止漏閥門 13‧‧‧Upper stop valve
14‧‧‧上真空閥門 14‧‧‧Upper vacuum valve
15‧‧‧真空傳送腔 15‧‧‧Vacuum transfer chamber
16‧‧‧下止漏閥門 16‧‧‧Lower leak valve
17‧‧‧下真空閥門 17‧‧‧Under vacuum valve
18‧‧‧斜向導管單元 18‧‧‧ diagonal conduit unit
19‧‧‧運輸單元 19‧‧‧Transportation unit
21、31‧‧‧主動輪軸 21, 31‧‧‧ drive axle
22、32‧‧‧金屬運輸帶 22, 32‧‧‧Metal conveyor belt
23、33‧‧‧被動輪軸 23, 33‧‧‧ Passive axle
24、34‧‧‧冷卻系統 24, 34‧‧‧ cooling system
25、35‧‧‧物料容置空間 25, 35‧‧‧ material accommodation space
36‧‧‧投料機構 36‧‧‧Feeding agency
第一圖係為本發明一種電子束真空精煉爐示意圖;第一圖係為本發明一種實施例之運輸單元結構示意圖;第一圖係為本發明另一種實施例之運輸單元結構示意圖。 The first figure is a schematic diagram of an electron beam vacuum refining furnace according to the present invention; the first drawing is a schematic structural view of a transport unit according to an embodiment of the present invention; the first figure is a schematic structural view of a transport unit according to another embodiment of the present invention.
以下係藉由特定的具體實例說明本創作之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地了解本創作之優點及功效。 The embodiments of the present invention are described by way of specific examples, and those skilled in the art can readily understand the advantages and effects of the present invention from the disclosure of the present disclosure.
本案發明主要目的之一乃在於提供一種應用在電子束真空精煉爐的進料系統之作法,藉以改善過去習知技術中的投料方法,以縮短投料裝置與熔爐坩鍋的操作距離,大大地減少物料因投料過程所造成的損失,避免物料的浪費尤其是對於精煉高純度材料的電子束熔爐而言,物料精煉之前的價格即以不斐,因此減少物料在精煉過程中的損失,是一項具經濟意義之重要的生產製程技術改良,同時,本案發明還可以改善損失的物料所造成熔爐真空腔體的汙染,降低熔爐系統的維修頻率,避免物料汙染電子槍源、真空抽氣馬達、控制閥門及達到延長機電系統的壽命;另本案發明還可以有效處理塊狀、顆粒狀及粉體狀等三種型態的物料所產生的問題,是一種可以處理不同物料形態的電子束真空精煉爐,可提高電子束真空精煉爐的工作效率。 One of the main purposes of the present invention is to provide a feeding system for use in an electron beam vacuum refining furnace, thereby improving the feeding method in the prior art, so as to shorten the operating distance between the feeding device and the crucible crucible, and greatly reduce The loss of materials due to the feeding process, avoiding the waste of materials, especially for the electron beam melting furnace for refining high-purity materials, the price before the material refining is not high, thus reducing the loss of materials in the refining process, is a The economic process is important to improve the production process technology. At the same time, the invention can also improve the pollution of the furnace vacuum chamber caused by the lost materials, reduce the maintenance frequency of the furnace system, and avoid material contamination of the electron gun source, vacuum pumping motor, and control valve. And to achieve the extension of the life of the electromechanical system; the invention of the present invention can also effectively deal with the problems caused by the three types of materials such as block, granule and powder, and is an electron beam vacuum refining furnace capable of processing different material forms. Improve the efficiency of the electron beam vacuum refining furnace.
請參閱第一圖所示,為本發明一種電子束真空精煉爐示意圖。如圖一所示,本發明所提供一種電子束真空精煉爐,包括有下列組成:一精煉爐本體101、一電子束單元102(可發出電子束103)、一坩堝104及一進料系統,其中該進 料系統包含有一進料倉單元11、一斜向導管單元18及一運輸單元19,而該進料倉單元11更包含一進料倉12、一上止漏閥門13、一上真空閥門14、一真空傳送腔15、一下止漏閥門16、一下真空閥門17等元件;本發明所提供的電子束真空精煉爐,根據物料的種類需求,可能為單一種高純度金屬材料,或是兩種、兩種以上的高純度合金材料,因而進料倉單元11可以包含至少一個或一個以上之進料倉12。 Please refer to the first figure for a schematic diagram of an electron beam vacuum refining furnace of the present invention. As shown in FIG. 1, the present invention provides an electron beam vacuum refining furnace comprising the following components: a refining furnace body 101, an electron beam unit 102 (which can emit an electron beam 103), a crucible 104, and a feeding system. Which should be The material system includes a feed bin unit 11, a diagonal conduit unit 18 and a transport unit 19, and the feed bin unit 11 further includes a feed bin 12, an upper leak stop valve 13, an upper vacuum valve 14, a vacuum transfer chamber 15, a lower leak stop valve 16, a lower vacuum valve 17 and the like; the electron beam vacuum refining furnace provided by the present invention may be a single high-purity metal material or two depending on the type of material required. Two or more high purity alloy materials, and thus the feed bin unit 11 may contain at least one or more feed bins 12.
本發明所提供的電子束真空精煉爐由於其爐體 內工作時需為高真空環境,當物料進入到進料倉12後,依據生產製程需求,可將上真空閥門14及上止漏閥門13開啟(上真空閥門14及上止漏閥門13可管控物料進入真空傳輸腔體15),讓物料由進料倉12依靠重力自由落進連接於進料倉12下方的真空傳輸腔體15(此一腔體15也可做為不同比例合金材料(物料)的混料腔),接續可將上止漏閥門13及上真空閥門14關閉,讓真空傳輸腔內氣體排出,排出到與精煉爐本體101內的壓力一致時,將下真空閥門17與下止漏閥門開啟16,讓物料進入斜向導管單元18,本實施例中的斜向導管單元18是為減緩物料因重力作用所產生的衝力,該斜向導管單元18具有一水平傾斜角度(水平傾斜角度係為和地表垂直線傾斜的夾角,故水平傾斜角度0即為垂直(自由落體),通常此角度會大於0),該水平傾斜角度範圍可設計為1度到40度,可將物料以減低重力衝擊的狀態,以較平緩的方式讓物料落在運輸單 元19上,再將物料運輸至精煉爐的坩鍋104。 The electron beam vacuum refining furnace provided by the invention has a furnace body The inner working needs to be a high vacuum environment. When the material enters the feeding bin 12, according to the production process demand, the upper vacuum valve 14 and the upper leakage preventing valve 13 can be opened (the upper vacuum valve 14 and the upper leakage preventing valve 13 can be controlled). The material enters the vacuum transfer chamber 15), and the material is freely dropped by gravity from the feed bin 12 into the vacuum transfer chamber 15 connected to the lower portion of the feed bin 12 (this cavity 15 can also be used as a different proportion of alloy material (material) The mixing chamber) can be closed to close the upper leakage valve 13 and the upper vacuum valve 14 to allow the gas in the vacuum transmission chamber to be discharged, and discharged to the pressure in the refining furnace body 101, the lower vacuum valve 17 and the lower The leak-proof valve is opened 16 to allow the material to enter the inclined conduit unit 18. The diagonal conduit unit 18 in this embodiment is for relieving the momentum generated by the gravity of the material, and the diagonal conduit unit 18 has a horizontal inclination angle (horizontal The angle of inclination is the angle of inclination with the vertical line of the ground surface, so the horizontal inclination angle 0 is vertical (free fall), usually the angle will be greater than 0), the horizontal inclination angle range can be designed from 1 degree to 40 degrees, and the material can be To reduce gravity The state of the impact, allowing the material to fall on the transport order in a more gradual manner On element 19, the material is then transported to the crucible 104 of the refining furnace.
物料如果藉由重力法讓其自由落入坩鍋,雖然進 料裝置的製作與操作較為單純及簡易,但是對於粉體或顆粒狀物料,可能會發生飛散情形,而如果是塊狀原料,則可然會發生熔湯飛濺情形,因此本發明導入斜向導管單元28的傾斜設計,減緩重力加速作用,有助於改善前述兩種情形,然而當斜向導管單元傾斜後,則可能發生部分物料積聚於斜向導管單元中,因此本發明除了對斜向導管的置放方式予以改進外,同時在導管內可增加震動或導管傳輸機構,可藉由震動方式有效地改善部分粉體或顆粒狀物料積聚情事,或直接藉由導管傳輸機構,以自動化方式將粉體或顆粒狀物料運送至運輸單元上。 If the material is free to fall into the shabu-shabu by gravity, although The production and operation of the material device are relatively simple and simple, but for the powder or granular materials, scattering may occur, and if it is a bulk material, the melting and splashing may occur, so the present invention introduces the oblique catheter The inclined design of the unit 28, which slows the acceleration of gravity, helps to improve the foregoing two situations. However, when the inclined conduit unit is tilted, part of the material may accumulate in the oblique conduit unit, so the present invention except the diagonal conduit In addition to the improvement of the placement method, vibration or catheter transmission mechanism can be added in the catheter, and the accumulation of some powder or granular materials can be effectively improved by vibration, or directly by the catheter transmission mechanism. The powder or granulated material is transported to the transport unit.
請參閱第二圖所示,為本發明一種實施例之運輸 單元結構示意圖。如圖二所示,運輸單元可由兩個轉動軸輪(21、23)與具有物料容置空間25的金屬運輸帶22所構成,本實施例中。轉動軸輪分別為主動軸輪21,來帶動具有承接器(物料容置空間25)的金屬運輸帶22移動,讓金屬運輸帶22上的承接器移動至被動輪軸23處,藉由旋轉方式,讓承接器中的物料倒入至坩鍋內,承接器可設計為上方及前方具開口的金屬容器,控制承接器在被動輪軸23處的旋轉位置時,讓承接器的開口在旋轉點時位於坩鍋上方,然後將物料平緩地倒入坩鍋內,其中,冷卻系統36可由一封閉水路循環機構組 成,用來冷卻位於被動輪軸23處那一側附近的構件,避免因高溫而受影響,該冷卻系統的封閉水路循環機構可利用銅做為管壁(不以此為限)以硬銲的方式(不以此為限)完成封閉系統,以降低輻射熱影響。 Please refer to the second figure for the transportation of an embodiment of the present invention. Schematic diagram of the unit structure. As shown in Fig. 2, the transport unit can be constituted by two rotating shaft wheels (21, 23) and a metal conveyor belt 22 having a material accommodating space 25, in this embodiment. The rotating shaft wheels are respectively the driving shaft wheels 21 to drive the metal conveyor belt 22 having the adapter (material receiving space 25) to move, and the bearing on the metal conveyor belt 22 is moved to the passive axle 23 by rotating, The material in the adapter is poured into the crucible, and the adapter can be designed as a metal container with an opening at the top and the front. When the position of the adapter is rotated at the passive axle 23, the opening of the adapter is located at the rotation point. Above the crucible, the material is gently poured into the crucible, wherein the cooling system 36 can be a closed water circulation mechanism In order to cool the component located near the side of the passive axle 23, to avoid being affected by high temperature, the closed water circulation mechanism of the cooling system can use copper as the pipe wall (not limited thereto) to be brazed. The method (not limited to this) completes the closed system to reduce the effects of radiant heat.
請參閱第三圖所示,為本發明另一種實施例之運 輸單元結構示意圖。如圖三所示,當物料經由斜向導管單元落進金屬運輸帶32上的物料容置空間35,可簡化為金屬運輸帶32上具有承接功能的金屬帶的結構與製作,可使用旋轉插銷及凹型金屬片頭尾疊加成為一種具有一凹槽結構(物料容置空間35)的金屬運輸帶32上,此外,在被動軸輪33處可設計另有一投料機構36,利用軸輪將落在金屬運輸帶32上的物料移動至被動輪軸33處,藉由旋轉方式,讓物料自凹槽結構倒入金屬的投料機構36,該投料機構36(具有類似刮刀的功能,可把金屬運輸帶32上的物料由下往上將大部分的物料刮下),可再以更接近坩堝的方式,讓物料更平緩滑落至坩鍋內,由於被動軸輪33具有冷卻系統,而金屬的投料機構36附裝置於被動軸輪33上,可以避免熔湯高溫對其性能的影響。 Please refer to the third figure, which is another embodiment of the present invention. Schematic diagram of the structure of the transmission unit. As shown in FIG. 3, when the material falls into the material accommodating space 35 on the metal conveyor belt 32 via the diagonal conduit unit, the structure and manufacture of the metal belt having the receiving function on the metal conveyor belt 32 can be simplified, and the rotating bolt can be used. And the concave metal sheet is superimposed on the metal conveyor belt 32 having a groove structure (material accommodation space 35). In addition, a feeding mechanism 36 can be designed at the passive shaft wheel 33, and the shaft wheel is used to fall on the metal. The material on the conveyor belt 32 is moved to the driven axle 33, and the material is poured from the groove structure into the metal feeding mechanism 36 by means of rotation. The feeding mechanism 36 (having a similar blade function can be used on the metal conveyor belt 32). The material is scraped off from the bottom up, and the material can be more smoothly slid into the crucible in a manner closer to the crucible. Since the passive shaft 33 has a cooling system, the metal feeding mechanism 36 is attached. The device is mounted on the passive shaft wheel 33 to avoid the influence of the high temperature of the melt on its performance.
上述之實施例僅為例示性說明本創作之特點及功效,非用以限制本創作之實質技術內容的範圍。任何熟悉此技藝之人士均可在不違背創作之精神及範疇下,對上述實施例進行修飾與變化。因此,本創作之權利保護範圍,應如後述之申請專利範圍所列。 The above-described embodiments are merely illustrative of the features and functions of the present invention and are not intended to limit the scope of the technical content of the present invention. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the creation. Therefore, the scope of protection of this creation should be as listed in the scope of the patent application described later.
101‧‧‧精煉爐本體 101‧‧‧Refiner body
102‧‧‧電子束單元 102‧‧‧Electron unit
103‧‧‧電子束 103‧‧‧Electron beam
104‧‧‧坩堝 104‧‧‧坩埚
11‧‧‧進料倉單元 11‧‧‧ Feed bin unit
12‧‧‧進料倉 12‧‧‧ Feed bin
13‧‧‧上止漏閥門 13‧‧‧Upper stop valve
14‧‧‧上真空閥門 14‧‧‧Upper vacuum valve
15‧‧‧真空傳送腔 15‧‧‧Vacuum transfer chamber
16‧‧‧下止漏閥門 16‧‧‧Lower leak valve
17‧‧‧下真空閥門 17‧‧‧Under vacuum valve
18‧‧‧斜向導管單元 18‧‧‧ Oblique conduit unit
19‧‧‧運輸單元 19‧‧‧Transportation unit
Claims (9)
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TW104137463A TWI553127B (en) | 2015-11-13 | 2015-11-13 | An electron beam vacuum refining furnace |
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TW104137463A TWI553127B (en) | 2015-11-13 | 2015-11-13 | An electron beam vacuum refining furnace |
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TW201716589A true TW201716589A (en) | 2017-05-16 |
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FR84908E (en) * | 1963-04-04 | 1965-05-07 | Commissaria A L En Atomique | Improvements in casting processes, in particular ingots, and in particular uranium carbide |
US5263044A (en) * | 1989-09-05 | 1993-11-16 | Bremer Siegfried M K | Remelting method for recognition and recovery of noble metals and rare metals |
CN104651929B (en) * | 2013-11-22 | 2018-08-21 | 青岛昌盛日电太阳能科技股份有限公司 | A kind of method and apparatus that the deoxygenation of electron-beam smelting polysilicon is coupled with ingot casting |
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