[go: up one dir, main page]

TW201705311A - Package substrate, package structure and method for manufacturing same - Google Patents

Package substrate, package structure and method for manufacturing same Download PDF

Info

Publication number
TW201705311A
TW201705311A TW104107058A TW104107058A TW201705311A TW 201705311 A TW201705311 A TW 201705311A TW 104107058 A TW104107058 A TW 104107058A TW 104107058 A TW104107058 A TW 104107058A TW 201705311 A TW201705311 A TW 201705311A
Authority
TW
Taiwan
Prior art keywords
conductive
chip package
layer
package structure
barrier
Prior art date
Application number
TW104107058A
Other languages
Chinese (zh)
Other versions
TWI598964B (en
Inventor
蘇威碩
Original Assignee
碁鼎科技秦皇島有限公司
臻鼎科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 碁鼎科技秦皇島有限公司, 臻鼎科技股份有限公司 filed Critical 碁鼎科技秦皇島有限公司
Publication of TW201705311A publication Critical patent/TW201705311A/en
Application granted granted Critical
Publication of TWI598964B publication Critical patent/TWI598964B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/921Connecting a surface with connectors of different types
    • H01L2224/9212Sequential connecting processes
    • H01L2224/92122Sequential connecting processes the first connecting process involving a bump connector
    • H01L2224/92125Sequential connecting processes the first connecting process involving a bump connector the second connecting process involving a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Ceramic Engineering (AREA)

Abstract

The present disclosure relates to a package structure. The package structure includes a conductive pattern layer, a plurality of conductive poles, a sealing colloid, a plurality of blocks, a plurality of conductive lugs and at least a chip. The conductive pattern layer includes a few conductive lines. The blocks and the conductive poles are formed in the two opposite surfaces of the conductive pattern layer. The blocks and the conductive poles are one to one corresponding and electric connected with the conductive lines respectively. The conductive lines and the conductive poles are clad by the sealing colloid. The exposed surfaces of the conductive lines and the conductive poles are coplanar with the sealing colloid. The conductive lugs are formed on the surface of the blocks and the surface of the blocks is far away from the conductive lines. The chip is welded on the surface of the conductive lugs and the surface of the conductive lugs is far away from the blocks. The present disclosure also relates to a method for manufacturing the package structure.

Description

晶片封裝基板、晶片封裝結構及其製作方法Chip package substrate, chip package structure and manufacturing method thereof

本發明涉及電路板製作領域,尤其涉及一種利於線路密集化的晶片封裝結構、製作方法及晶片封裝基板。The present invention relates to the field of circuit board manufacturing, and in particular to a chip package structure, a fabrication method, and a chip package substrate which are advantageous for line densification.

晶片封裝基板可為晶片提供電連接、保護、支撐、散熱、組裝等功效,以實現多引腳化,縮小封裝產品體積、改善電性能及散熱性、超高密度或多晶片模組化的目的。晶片封裝基板的導電線路上形成有利於與晶片電連接的導電凸塊。目前,該導電凸塊常為蕈狀且具有外擴之頂部,不利於密集化線路設計,易發生焊料橋接現象。另外,該導電凸塊常以電鍍方式形成,難以管控均勻性,導電凸塊頂部共面性較差,影響覆晶可靠度與良率。The chip package substrate can provide electrical connection, protection, support, heat dissipation, assembly and the like for the wafer to achieve multi-pin, reduce package volume, improve electrical performance and heat dissipation, ultra-high density or multi-chip modularization. . Conductive bumps on the conductive traces of the chip package substrate that facilitate electrical connection to the wafer are formed. At present, the conductive bumps are often meandered and have an expanded top, which is not conducive to dense circuit design and is prone to solder bridging. In addition, the conductive bumps are often formed by electroplating, which is difficult to control uniformity, and the coplanarity of the top of the conductive bumps is poor, which affects the reliability and yield of the flip chip.

有鑑於此,本發明提供一種能夠解決上述問題的晶片封裝基板、晶片封裝結構及其製作方法。In view of the above, the present invention provides a chip package substrate, a chip package structure, and a method of fabricating the same that can solve the above problems.

一種晶片封裝結構的製作方法,其步驟包括:提供一基板,該基板包括一承載板及形成在該承載板上的至少一銅箔層,在該銅箔層遠離該承載板的表面上形成有一阻擋層;在該阻擋層的表面上形成多條導電線路及與該導電線路一一對應且電連接的導電柱;在該導電線路及該導電柱的間隙形成一封膠體,使得該封膠體的兩相對的表面分別與該導電線路及該導電柱的外露表面共平面;去除該承載板,從而得到至少一晶片封裝基板中間體;該晶片封裝基板中間體包括一銅箔層、一阻擋層、一封膠體、多條導電線路及多個導電柱;蝕刻掉部分該銅箔層及部分該阻擋層,形成與該導電線路一一對應且電連接的阻擋塊及與該阻擋塊一一對應且電連接的導電凸塊,從而得到晶片封裝基板;提供一晶片;將該晶片焊接到該晶片封裝基板的該導電凸塊上,從而得到晶片封裝結構。A method for fabricating a chip package structure, the method comprising: providing a substrate, the substrate comprising a carrier plate and at least one copper foil layer formed on the carrier plate, wherein a surface of the copper foil layer away from the carrier plate is formed a conductive layer formed on the surface of the barrier layer and having a conductive column electrically connected to the conductive line; forming a gel on the gap between the conductive line and the conductive column, so that the sealant is The opposite surfaces are coplanar with the exposed surfaces of the conductive lines and the conductive pillars respectively; the carrier plate is removed to obtain at least one chip package substrate intermediate; the chip package substrate intermediate body comprises a copper foil layer, a barrier layer, a colloid, a plurality of conductive lines and a plurality of conductive pillars; etching a portion of the copper foil layer and a portion of the barrier layer to form a barrier block in one-to-one correspondence with the conductive traces and electrically connecting the barrier blocks and the one-to-one correspondence with the barrier block Electrically connecting the conductive bumps to obtain a chip package substrate; providing a wafer; soldering the wafer to the conductive bump of the chip package substrate to obtain a crystal Package.

一種晶片封裝結構,其包括一導電線路層、多個導電柱、一封膠體、多個阻擋塊、多個導電凸塊及至少一晶片。該導電線路層包括多條導電線路,該阻擋塊及該導電柱形成在該導電線路的兩相背的表面上且均與該導電線路一一對應且電連接,該封膠體包覆多條該導電線路及多個該導電柱,該封膠體與該導電線路及該導電柱的外露表面共平面,該導電凸塊形成在該阻擋塊的遠離該導電線路的的表面上;該晶片焊接在該導電凸塊的遠離該阻擋塊的表面上。A chip package structure includes a conductive circuit layer, a plurality of conductive pillars, a gel, a plurality of barrier blocks, a plurality of conductive bumps, and at least one wafer. The conductive circuit layer includes a plurality of conductive lines, and the blocking block and the conductive pillar are formed on two opposite surfaces of the conductive line and are electrically connected to the conductive line, and the sealing body is coated with a plurality of strips. a conductive line and a plurality of the conductive pillars, the sealant being coplanar with the exposed surface of the conductive trace and the conductive pillar, the conductive bump being formed on a surface of the barrier block away from the conductive trace; the wafer is soldered The conductive bump is on a surface away from the blocking block.

一種晶片封裝基板,其包括一導電線路層、多個導電柱、一封膠體、多個阻擋塊及多個導電凸塊;該導電線路層包括多條導電線路,該阻擋塊及該導電柱形成在該導電線路的兩相背的表面上且均與該導電線路一一對應且電連接,該封膠體包覆多條該導電線路及多個該導電柱,該封膠體與該導電線路及該導電柱的外露表面共平面,該導電凸塊形成在該阻擋塊的遠離該導電線路的的表面上。A chip package substrate comprising a conductive circuit layer, a plurality of conductive pillars, a gel body, a plurality of barrier blocks and a plurality of conductive bumps; the conductive circuit layer comprises a plurality of conductive lines, the barrier block and the conductive pillars are formed And a plurality of electrically conductive lines and a plurality of the conductive columns are coated on the two opposite surfaces of the conductive circuit, and the sealing body covers the conductive lines and the conductive lines, and the conductive body and the conductive line The exposed surface of the conductive post is coplanar and the conductive bump is formed on a surface of the block away from the conductive trace.

本發明提供的晶片封裝結構、製作方法及晶片封裝基板形成了類梯形的導電凸塊,減少了焊料橋接現象,有利於導電線路密集化設計。另外,該導電凸塊是通過蝕刻方法形成,提高了導電凸塊的頂部共面性,進而提高了覆晶可靠度及良率。The chip package structure, the manufacturing method and the chip package substrate provided by the invention form a trapezoid-like conductive bump, which reduces the solder bridging phenomenon and is beneficial to the conductive line dense design. In addition, the conductive bumps are formed by an etching method, which improves the top coplanarity of the conductive bumps, thereby improving the flip chip reliability and yield.

圖1是本發明實施例提供的一基板的剖視圖。1 is a cross-sectional view of a substrate according to an embodiment of the present invention.

圖2是在圖1所示的基板的表面上形成阻擋層後的剖視圖。2 is a cross-sectional view showing a barrier layer formed on the surface of the substrate shown in FIG. 1.

圖3是在圖2所示的阻擋層的基礎上形成第一光致抗蝕劑層後的剖視圖。3 is a cross-sectional view showing a first photoresist layer formed on the basis of the barrier layer shown in FIG. 2.

圖4是在圖3所示的第一光致抗蝕劑層的基礎上形成第一導電線路層後的剖視圖。4 is a cross-sectional view showing the first conductive wiring layer formed on the basis of the first photoresist layer shown in FIG.

圖5是在圖4所示的第一線路層基礎上形成第二光致抗蝕劑層後的剖視圖。Figure 5 is a cross-sectional view showing a second photoresist layer formed on the basis of the first wiring layer shown in Figure 4 .

圖6是在圖5所示的第二光致抗蝕劑層的基礎上形成多個導電柱後的剖視圖。Figure 6 is a cross-sectional view showing a plurality of conductive pillars formed on the basis of the second photoresist layer shown in Figure 5 .

圖7是去除圖6中的第一光致抗蝕劑層及第二光致抗蝕劑層,形成第一晶片封裝基板中間體後的剖視圖。7 is a cross-sectional view showing the first photoresist package layer and the second photoresist layer removed to form a first wafer package substrate intermediate.

圖8是在圖7所示的第一導電線路層及導電柱的縫隙間形成封膠體後的剖視圖。Fig. 8 is a cross-sectional view showing the seal body formed between the gaps of the first conductive wiring layer and the conductive post shown in Fig. 7.

圖9是將圖8中的承載板及離型層分離去除得到兩個第二晶片封裝基板中間體後的剖視圖。FIG. 9 is a cross-sectional view showing the carrier plate and the release layer of FIG. 8 separated and obtained to obtain two second chip package substrate intermediate bodies.

圖10是在圖9中的晶片封裝基板中間體的基礎上形成導電凸塊後的剖視圖。Figure 10 is a cross-sectional view showing the formation of conductive bumps on the basis of the wafer package substrate intermediate of Figure 9.

圖11是在圖10所示的導電凸塊的基礎上形成阻擋塊,從而得到晶片封裝基板後的剖視圖。Figure 11 is a cross-sectional view showing the formation of a barrier block on the basis of the conductive bumps shown in Figure 10 to obtain a wafer package substrate.

圖12是本發明實施例提供的一晶片的剖視圖。Figure 12 is a cross-sectional view of a wafer according to an embodiment of the present invention.

圖13是將圖12中的晶片焊接在圖11所示的晶片封裝基板的導電凸塊表面後的剖視圖。Figure 13 is a cross-sectional view showing the wafer of Figure 12 soldered to the surface of the conductive bump of the wafer package substrate shown in Figure 11 .

圖14是在晶片及晶片封裝基板之間填充底膠後的剖視圖。Fig. 14 is a cross-sectional view showing a state in which a primer is filled between a wafer and a chip package substrate.

圖15是在圖14所示的導電柱的外露表面形成第二焊球後的剖視圖。Figure 15 is a cross-sectional view showing the second solder ball formed on the exposed surface of the conductive post shown in Figure 14.

下面結合圖1~圖15及實施例對本發明提供的一種晶片封裝結構、製作方法及晶片封裝基板作進一步的說明。A chip package structure, a manufacturing method, and a chip package substrate provided by the present invention are further described below with reference to FIGS. 1 to 15 and embodiments.

一種晶片封裝結構的製作方法,其包括如下步驟:A method of fabricating a chip package structure, comprising the steps of:

第一步,請參閱圖1,提供一基板10。In the first step, referring to FIG. 1, a substrate 10 is provided.

該基板10呈平板狀,該基板10包括一承載板11、兩離型層12及兩銅箔層13。兩個該離型層12形成在該承載板11的相背的兩表面上,兩個該銅箔層13分別形成在兩個該離型層12的遠離該承載板11的表面上。The substrate 10 has a flat shape. The substrate 10 includes a carrier plate 11, two release layers 12 and two copper foil layers 13. Two of the release layers 12 are formed on opposite surfaces of the carrier sheet 11, and two of the copper foil layers 13 are formed on the surfaces of the two release layers 12 away from the carrier sheet 11, respectively.

該承載板11可以是樹脂板、陶瓷板、金屬板等硬性支撐材料。該離型層12可以是離型膜、金屬箔/板等。The carrier plate 11 may be a rigid support material such as a resin plate, a ceramic plate, or a metal plate. The release layer 12 can be a release film, a metal foil/board, or the like.

在本實施例中,兩個該銅箔層13通過離型膜黏結在該承載板11上。In the present embodiment, two of the copper foil layers 13 are bonded to the carrier plate 11 by a release film.

在其他實施例中,也可以通過膠水將該兩個銅箔層13的邊緣黏結於該承載板11上,需要取出該承載板11時裁切去除該銅箔層13與該承載板11黏結的部分,從而將該銅箔層13與該承載板11分離。In other embodiments, the edges of the two copper foil layers 13 may be adhered to the carrier plate 11 by means of glue. When the carrier board 11 is removed, the copper foil layer 13 is bonded and bonded to the carrier board 11 . In part, the copper foil layer 13 is separated from the carrier plate 11.

第二步,請參閱圖2,在兩側的該銅箔層13的表面分別形成一厚度比較薄的阻擋層14。In the second step, referring to FIG. 2, a relatively thin barrier layer 14 is formed on the surface of the copper foil layer 13 on both sides.

優選地,該阻擋層14可以是直接貼合在該銅箔層13的表面上,也可以用其他如電鍍方式形成。Preferably, the barrier layer 14 may be directly attached to the surface of the copper foil layer 13, or may be formed by other methods such as electroplating.

該阻擋層14可以為除銅以外的鎳、錫等金屬,用於保護導電線路使之在後續制程中不受影響。The barrier layer 14 may be a metal such as nickel or tin other than copper for protecting the conductive lines from being affected in subsequent processes.

第三步,請參閱圖3~圖4,在兩側的該阻擋層14的遠離該銅箔層13的表面上形成導電線路層16。In the third step, referring to FIG. 3 to FIG. 4, a conductive circuit layer 16 is formed on the surfaces of the barrier layer 14 on the both sides away from the copper foil layer 13.

該導電線路層16包括多條導電線路161,每條該導電線路161包括一第一表面1611及一與該第一表面1611相背的第二表面1612,該第一表面1611與該阻擋層14的遠離該銅箔層13的面相貼合。具體地,首先,請參閱圖3,在兩側的該阻擋層14的遠離該銅箔層13的表面上形成圖案化的第一光致抗蝕劑層15,使部分該阻擋層14從圖案化的該第一光致抗蝕劑層15中暴露出來;之後,請參閱圖4,電鍍,從而在從圖案化的該第一光致抗蝕劑層15中暴露出來的該阻擋層14的表面,也即圖案化的該第一光致抗蝕劑層15的間隙,形成該導電線路層16,該第一光致抗蝕劑層15與該導電線路層16共平面。The conductive circuit layer 16 includes a plurality of conductive lines 161. Each of the conductive lines 161 includes a first surface 1611 and a second surface 1612 opposite the first surface 1611. The first surface 1611 and the barrier layer 14 The surface away from the copper foil layer 13 is bonded. Specifically, first, referring to FIG. 3, a patterned first photoresist layer 15 is formed on the surfaces of the barrier layer 14 away from the copper foil layer 13 on both sides, so that a part of the barrier layer 14 is patterned from the pattern. The first photoresist layer 15 is exposed; after that, referring to FIG. 4, electroplating, thereby exposing the barrier layer 14 from the patterned first photoresist layer 15 A surface, that is, a patterned gap of the first photoresist layer 15, forms the conductive wiring layer 16, and the first photoresist layer 15 is coplanar with the conductive wiring layer 16.

第四步,請參閱圖5~圖7,在兩側的該導電線路層16的每條該導電線路161的部分該第二表面1612上形成多個導電柱18,從而得到第一晶片封裝基板中間體110。In the fourth step, referring to FIG. 5 to FIG. 7 , a plurality of conductive pillars 18 are formed on a portion of the second surface 1612 of each of the conductive traces 161 on the two sides of the conductive circuit layer 16 to obtain a first chip package substrate. Intermediate 110.

每個該導電柱18包括一遠離每條該導電線路161的第三表面181。在本實施例中,該導電柱18大致呈圓柱狀,該導電柱18形成在該第二表面1612上,與多條該導電線路161一一對應且電連接。具體地,首先,請參閱圖5,在部分該第二表面1612及部分該第一光致抗蝕劑層15表面形成圖案化的第二光致抗蝕劑層17,使部分該導電線路161從該第二光致抗蝕劑層17中裸露出來;之後,請參閱圖6,電鍍,從而在從圖案化的該第二光致抗蝕劑層17中裸露出來的多條導電線路161的表面,也即圖案化的該第二光致抗蝕劑層17的間隙,形成導電柱18。最後,去除圖案化的該第一光致抗蝕劑層15及該第二光致抗蝕劑層17,形成第一晶片封裝基板中間體110。Each of the conductive posts 18 includes a third surface 181 remote from each of the conductive traces 161. In this embodiment, the conductive pillars 18 are substantially cylindrical, and the conductive pillars 18 are formed on the second surface 1612, and are in one-to-one correspondence with the plurality of conductive lines 161 and are electrically connected. Specifically, first, referring to FIG. 5, a patterned second photoresist layer 17 is formed on a portion of the second surface 1612 and a portion of the surface of the first photoresist layer 15 to partially expose the conductive line 161. Exposed from the second photoresist layer 17; thereafter, referring to FIG. 6, electroplating, thereby exposing a plurality of conductive lines 161 from the patterned second photoresist layer 17 The surface, that is, the patterned gap of the second photoresist layer 17, forms a conductive pillar 18. Finally, the patterned first photoresist layer 15 and the second photoresist layer 17 are removed to form a first chip package substrate intermediate body 110.

第五步,請參閱圖8,在該第一晶片封裝基板中間體110的兩側形成封膠體19,使得該封膠體19包覆該導電線路層16及多個該導電柱18。In the fifth step, referring to FIG. 8 , a seal body 19 is formed on both sides of the first chip package substrate intermediate body 110 such that the sealant body 19 covers the conductive circuit layer 16 and the plurality of conductive pillars 18 .

在本實施例中,通過注塑成型的方式形成封膠體19。該封膠體19包括兩相背的第四表面191及第五表面192,該第四表面191與該第一表面1611共平面,該第五表面與該第三表面181共平面。In the present embodiment, the encapsulant 19 is formed by injection molding. The encapsulant 19 includes a second surface 191 and a fifth surface 192 that are opposite to each other. The fourth surface 191 is coplanar with the first surface 1611, and the fifth surface is coplanar with the third surface 181.

具體地,首先提供一模具(圖未示),該磨具包括一模穴及一注膠通道,將該第一晶片封裝基板中間體110收容於該模穴內;然後,通過該注膠通道向該模穴內注入膠體,使膠體填充多條該導電線路161及多個該導電柱18之間的間隙,使得該封膠體19包覆多條該導電線路161及多個該導電柱18;接著,固化該膠體,從而形成該封膠體19;之後,將形成有該封膠體19的該第一晶片封裝基板中間體110從該模穴中取出來。Specifically, a mold (not shown) is first provided, the abrasive tool includes a cavity and a glue injection channel, and the first chip package substrate intermediate body 110 is received in the cavity; and then, the glue injection channel is passed through Injecting a colloid into the cavity, the colloid is filled with a plurality of the conductive lines 161 and a plurality of the gaps between the plurality of conductive posts 18, such that the sealant 19 is coated with a plurality of the conductive lines 161 and the plurality of conductive posts 18; Next, the colloid is cured to form the encapsulant 19; thereafter, the first chip package substrate intermediate body 110 on which the encapsulant 19 is formed is taken out from the cavity.

在本實施例中,控制注入的膠體的量使該第三表面181與該第五表面192相齊平。In the present embodiment, the amount of injected colloid is controlled such that the third surface 181 is flush with the fifth surface 192.

在其他實施例中,也可以注入過量的膠體以使膠體覆蓋住該導電柱18的該第三表面181,成型之後,再通過研磨的方式使該第三表面181與該第五表面192共平面。In other embodiments, an excess of colloid may also be injected to cause the colloid to cover the third surface 181 of the conductive post 18. After molding, the third surface 181 is coplanar with the fifth surface 192 by grinding. .

第六步,請參閱圖9,將該承載板11及該離型層12分離去除,從而得到兩個第二晶片封裝基板中間體120。In the sixth step, referring to FIG. 9, the carrier board 11 and the release layer 12 are separated and removed, thereby obtaining two second chip package substrate intermediate bodies 120.

在本實施例中,加熱使該離型層12失去黏性,從而將該承載板11及兩個該離型層12分離去除。In the present embodiment, the release layer 12 loses its viscosity, and the carrier plate 11 and the two release layers 12 are separated and removed.

第七步,請參閱圖10~圖11,去除部分該銅箔層13及部分的(從圖上看只是部分)該阻擋層14,形成多個導電凸塊20及多個阻擋塊30,從而得到晶片封裝基板130。In the seventh step, referring to FIG. 10 to FIG. 11 , a portion of the copper foil layer 13 and a portion of the barrier layer 14 (only partially shown in the drawing) are removed, and a plurality of conductive bumps 20 and a plurality of barrier blocks 30 are formed. A chip package substrate 130 is obtained.

具體地,首先,請參閱圖10,通過曝光、顯影、蝕刻制程去除部分該銅箔層13,得到多個該導電凸塊20。然後,請參閱圖11,配置合適的蝕刻液(圖未示),曝光、顯影、蝕刻制程去除多餘的阻擋層14,形成與該導電凸塊20相對應的阻擋塊30,從而得到晶片封裝基板130。Specifically, first, referring to FIG. 10, a portion of the copper foil layer 13 is removed by an exposure, development, and etching process to obtain a plurality of the conductive bumps 20. Then, referring to FIG. 11, a suitable etching solution (not shown) is disposed, and the excess barrier layer 14 is removed by an exposure, development, and etching process to form a blocking block 30 corresponding to the conductive bumps 20, thereby obtaining a chip package substrate. 130.

由於該阻擋層14的材質並非是銅,故,在蝕刻形成該導電凸塊20的過程中,該阻擋層14並未被去除,避免了形成該導電凸塊20的蝕刻制程對多條該導電線路161的破壞。Since the material of the barrier layer 14 is not copper, the barrier layer 14 is not removed during the etching to form the conductive bumps 20, and the etching process for forming the conductive bumps 20 is avoided. Destruction of line 161.

該晶片封裝基板130包括一導電線路層16、多個導電柱18、一封膠體19、多個阻擋塊30及多個導電凸塊20。該導電線路層16包括多條導電線路161,每條該導電線路161包括兩相背的第一表面1611及第二表面1612。每個該阻擋塊30形成在每條該導電線路161的該第一表面1611上,每個該導電柱18形成在每條該導電線路161的該第二表面1612上。該封膠體19包覆多條該導電線路161及多個該導電柱18,該封膠體19包括兩個相背的第四表面191及第五表面192,該第四表面191與該第一表面1611共平面,該第五表面192與該第三表面181共平面。該導電凸塊20形成在該阻擋塊30的遠離該第一表面1611的表面上,該導電凸塊20的垂直於該導電線路層16的截面大致呈梯形,且該導電凸塊的寬度小於該導電柱的寬度。該導電凸塊20包括一第六表面21,該第六表面21平行於該第一表面1611且遠離該第一表面1611。The chip package substrate 130 includes a conductive circuit layer 16, a plurality of conductive pillars 18, a glue body 19, a plurality of barrier blocks 30, and a plurality of conductive bumps 20. The conductive circuit layer 16 includes a plurality of conductive lines 161, each of the conductive lines 161 including two opposite first surfaces 1611 and a second surface 1612. Each of the blocking blocks 30 is formed on the first surface 1611 of each of the conductive lines 161, and each of the conductive posts 18 is formed on the second surface 1612 of each of the conductive lines 161. The sealant 19 covers a plurality of the conductive lines 161 and the plurality of conductive posts 18, the sealant 19 includes two opposite fourth surfaces 191 and a fifth surface 192, the fourth surface 191 and the first surface The 1611 is coplanar, and the fifth surface 192 is coplanar with the third surface 181. The conductive bumps 20 are formed on a surface of the blocking block 30 away from the first surface 1611. The conductive bumps 20 are substantially trapezoidal in cross section perpendicular to the conductive circuit layer 16, and the conductive bumps have a width smaller than the conductive bumps. The width of the conductive column. The conductive bump 20 includes a sixth surface 21 that is parallel to the first surface 1611 and away from the first surface 1611.

第八步,請參閱圖12,提供一晶片140。In the eighth step, referring to FIG. 12, a wafer 140 is provided.

該晶片140包括兩個相背的第七表面141、第八表面142及多個焊墊143。多個該焊墊143形成在該第八表面142上,多個該焊墊143與多個該導電凸塊20一一對應。The wafer 140 includes two opposite seventh surfaces 141, an eighth surface 142, and a plurality of pads 143. A plurality of the pads 143 are formed on the eighth surface 142, and the plurality of pads 143 are in one-to-one correspondence with the plurality of the conductive bumps 20.

第九步,請參閱圖13~圖15,將該晶片140焊接在該導電凸塊20上,並在該導電柱18上形成焊球,從而得到晶片封裝結構100。In the ninth step, referring to FIG. 13 to FIG. 15, the wafer 140 is soldered on the conductive bumps 20, and solder balls are formed on the conductive pillars 18, thereby obtaining the chip package structure 100.

在本實施例中,具體地,首先,請參閱圖13,將該晶片140的該焊墊143通過焊料40焊接在該導電凸塊20的該第六表面21上;然後,請參閱圖14,在該晶片140與該晶片封裝基板130的該第四表面191及該第一表面1611之間填充底膠,形成底膠層50,該底膠層50包覆部分該晶片140、該焊墊143、該焊料40、該阻擋塊30、該導電凸塊20及第一表面1611;之後,請參閱圖15,在該第三表面181上形成多個與該導電柱18一一對應且電連接的焊球60,用於電連接外部電子元件(圖未示),從而得到該晶片封裝結構100。In this embodiment, specifically, first, referring to FIG. 13, the pad 143 of the wafer 140 is soldered to the sixth surface 21 of the conductive bump 20 by solder 40; then, referring to FIG. A primer is filled between the wafer 140 and the fourth surface 191 of the chip package substrate 130 and the first surface 1611 to form a primer layer 50. The primer layer 50 covers a portion of the wafer 140 and the bonding pad 143. The solder 40, the blocking block 30, the conductive bumps 20 and the first surface 1611; afterwards, referring to FIG. 15, a plurality of ones and one corresponding to the conductive pillars 18 are electrically connected to the third surface 181. Solder balls 60 are used to electrically connect external electronic components (not shown) to obtain the chip package structure 100.

在本發明中,極少部分該導電線路161裸露在外,發生氧化的可能性很小,且底部填充膠的價格比較昂貴,故,在其他實施例中,還可以根據實際需要省略形成底膠層50的步驟。In the present invention, a very small portion of the conductive line 161 is exposed, the possibility of oxidation is small, and the price of the underfill is relatively expensive. Therefore, in other embodiments, the undercoat layer 50 may be omitted according to actual needs. A step of.

綜上所述,該晶片封裝結構100包括一導電線路層16、多個導電柱18、一封膠體19、多個阻擋塊30、多個導電凸塊20、晶片140及多個焊球60。In summary, the chip package structure 100 includes a conductive circuit layer 16, a plurality of conductive pillars 18, a gel 19, a plurality of barrier blocks 30, a plurality of conductive bumps 20, a wafer 140, and a plurality of solder balls 60.

該導電線路層16包括多條導電線路161,每條該導電線路161包括兩相背的第一表面1611及第二表面1612。每個該阻擋塊30形成在每條該導電線路161的該第一表面1611上,每個該導電柱18形成在每條該導電線路161的該第二表面1612上。The conductive circuit layer 16 includes a plurality of conductive lines 161, each of the conductive lines 161 including two opposite first surfaces 1611 and a second surface 1612. Each of the blocking blocks 30 is formed on the first surface 1611 of each of the conductive lines 161, and each of the conductive posts 18 is formed on the second surface 1612 of each of the conductive lines 161.

該封膠體19包覆多條該導電線路161及多個該導電柱18,該封膠體19包括兩個相背的第四表面191及第五表面192,該第四表面191與該第一表面1611共平面,該第五表面192與該第三表面181共平面。The sealant 19 covers a plurality of the conductive lines 161 and the plurality of conductive posts 18, the sealant 19 includes two opposite fourth surfaces 191 and a fifth surface 192, the fourth surface 191 and the first surface The 1611 is coplanar, and the fifth surface 192 is coplanar with the third surface 181.

該導電凸塊20形成在該阻擋塊30的遠離該第一表面1611的表面上,該導電凸塊20的垂直於該導電線路層16的截面大致呈梯形,且該導電凸塊的寬度小於該導電柱的寬度。該導電凸塊20包括一第六表面21,該第六表面21平行於該第一表面1611且遠離該第一表面1611。The conductive bumps 20 are formed on a surface of the blocking block 30 away from the first surface 1611. The conductive bumps 20 are substantially trapezoidal in cross section perpendicular to the conductive circuit layer 16, and the conductive bumps have a width smaller than the conductive bumps. The width of the conductive column. The conductive bump 20 includes a sixth surface 21 that is parallel to the first surface 1611 and away from the first surface 1611.

該晶片140包括兩個相背的第七表面141、第八表面142及多個焊墊143。多個該焊墊143形成在該第八表面142上,多個該焊墊143與多個該導電凸塊20一一對應,且通過該焊料40焊接在該導電凸塊20的該第六表面21上。The wafer 140 includes two opposite seventh surfaces 141, an eighth surface 142, and a plurality of pads 143. A plurality of the pads 143 are formed on the eighth surface 142. The plurality of pads 143 are in one-to-one correspondence with the plurality of the conductive bumps 20, and are soldered to the sixth surface of the conductive bumps 20 by the solder 40. 21 on.

多個該焊球60形成在多個該導電柱18的多個該第三表面181上,多個該焊球60與多個該導電柱18一一對應且電連接,用於電連接外部電子元件(圖未示)。A plurality of the solder balls 60 are formed on the plurality of the third surfaces 181 of the plurality of conductive pillars 18, and the plurality of solder balls 60 are electrically connected to the plurality of the conductive pillars 18 in one-to-one correspondence for electrically connecting external electrons. Component (not shown).

在本實施例中,該晶片封裝結構100還包括一底膠層50,該底膠層50包覆部分該晶片140、該焊墊143、該焊料40、該阻擋塊30、該導電凸塊20及第一表面1611。在其他實施例中,還可以不包括該底膠層50。In the present embodiment, the chip package structure 100 further includes a primer layer 50 covering a portion of the wafer 140, the pad 143, the solder 40, the barrier block 30, and the conductive bumps 20. And a first surface 1611. In other embodiments, the make layer 50 may not be included.

本發明提供的晶片封裝結構、製作方法及晶片封裝基板通過蝕刻方法形成了類梯形狀的導電凸塊,減少了焊料橋接現象,有利於導電線路密集化設計;利用蝕刻方式形成之凸塊共面性較高,不僅提高了覆晶可靠度及良率,還利於電性連接,且能減少焊料用量,易於控制晶片與基板之間距。此外,本發明提供的晶片封裝結構、製作方法及晶片封裝基板以封膠體作為基板主體,包覆導電線路與導電柱,且導電線路與導電柱之外露表面均與封膠體齊平,使得導電凸塊的位置具有更大的選擇空間,使得晶片可以與該導電線路直接電連接而不需要增加連接元件,工藝更加簡單。The chip package structure, the manufacturing method and the chip package substrate provided by the invention form the ladder-like conductive bumps by the etching method, thereby reducing the solder bridging phenomenon and facilitating the dense design of the conductive lines; the bumps formed by the etching method are coplanar Higher performance not only improves the reliability and yield of flip chip, but also facilitates electrical connection, and can reduce the amount of solder and easily control the distance between the wafer and the substrate. In addition, the chip package structure, the manufacturing method and the chip package substrate provided by the invention use the sealant as the substrate body, and the conductive line and the conductive column are covered, and the exposed surfaces of the conductive line and the conductive column are flush with the sealing body, so that the conductive convex The position of the block has a larger selection space so that the wafer can be electrically connected directly to the conductive line without the need to add connecting elements, and the process is simpler.

綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申請。惟,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士爰依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

100‧‧‧晶片封裝結構100‧‧‧ Chip package structure

110‧‧‧第一晶片封裝基板中間體110‧‧‧First chip package substrate intermediate

120‧‧‧第二晶片封裝基板中間體120‧‧‧Second chip package substrate intermediate

130‧‧‧晶片封裝基板130‧‧‧ Chip package substrate

10‧‧‧基板10‧‧‧Substrate

11‧‧‧承載板11‧‧‧Loading board

12‧‧‧離型層12‧‧‧ release layer

13‧‧‧銅箔層13‧‧‧copper layer

14‧‧‧阻擋層14‧‧‧Block

15‧‧‧第一光致抗蝕劑層15‧‧‧First photoresist layer

16‧‧‧導電線路層16‧‧‧ Conductive circuit layer

161‧‧‧導電線路161‧‧‧Electrical circuit

1611‧‧‧第一表面1611‧‧‧ first surface

1612‧‧‧第二表面1612‧‧‧ second surface

17‧‧‧第二光致抗蝕劑層17‧‧‧Second photoresist layer

18‧‧‧導電柱18‧‧‧conductive column

181‧‧‧第三表面181‧‧‧ third surface

19‧‧‧封膠體19‧‧‧ Sealant

191‧‧‧第四表面191‧‧‧ fourth surface

192‧‧‧第五表面192‧‧‧ fifth surface

20‧‧‧導電凸塊20‧‧‧Electrical bumps

21‧‧‧第六表面21‧‧‧ sixth surface

30‧‧‧阻擋塊30‧‧‧Block block

140‧‧‧晶片140‧‧‧ wafer

141‧‧‧第七表面141‧‧‧ seventh surface

142‧‧‧第八表面142‧‧‧ eighth surface

143‧‧‧焊墊143‧‧‧ solder pads

40‧‧‧焊料40‧‧‧ solder

50‧‧‧底膠層50‧‧‧Bottom

60‧‧‧焊球60‧‧‧ solder balls

no

100‧‧‧晶片封裝結構 100‧‧‧ Chip package structure

16‧‧‧導電線路層 16‧‧‧ Conductive circuit layer

161‧‧‧導電線路 161‧‧‧Electrical circuit

1611‧‧‧第一表面 1611‧‧‧ first surface

1612‧‧‧第二表面 1612‧‧‧ second surface

18‧‧‧導電柱 18‧‧‧conductive column

181‧‧‧第三表面 181‧‧‧ third surface

19‧‧‧封膠體 19‧‧‧ Sealant

191‧‧‧第四表面 191‧‧‧ fourth surface

192‧‧‧第五表面 192‧‧‧ fifth surface

20‧‧‧導電凸塊 20‧‧‧Electrical bumps

21‧‧‧第六表面 21‧‧‧ sixth surface

30‧‧‧阻擋塊 30‧‧‧Block block

140‧‧‧晶片 140‧‧‧ wafer

141‧‧‧第七表面 141‧‧‧ seventh surface

142‧‧‧第八表面 142‧‧‧ eighth surface

143‧‧‧焊墊 143‧‧‧ solder pads

40‧‧‧焊料 40‧‧‧ solder

50‧‧‧底膠層 50‧‧‧Bottom

60‧‧‧焊球 60‧‧‧ solder balls

Claims (19)

一種晶片封裝結構的製作方法步驟包括:
提供一基板,該基板包括一承載板及形成在該承載板上的至少一銅箔層,在該銅箔層遠離該承載板的表面上形成有一阻擋層;
在該阻擋層的表面上形成一導電線路層及導電柱,該導電線路層包括多條導電線路,該導電柱與該導電線路一一對應且電連接;
在該導電線路及該導電柱的間隙形成一封膠體,使得該封膠體的兩相對的表面分別與該導電線路及該導電柱的外露表面共平面;
去除該承載板;
蝕刻掉部分該銅箔層及部分該阻擋層,形成與該導電線路一一對應且電連接的阻擋塊及與該阻擋塊一一對應且電連接的導電凸塊,從而得到晶片封裝基板;
提供一晶片;
將該晶片焊接到該晶片封裝基板的該導電凸塊上,從而得到晶片封裝結構。
A method for fabricating a chip package structure includes:
Providing a substrate, the substrate includes a carrier plate and at least one copper foil layer formed on the carrier plate, and a barrier layer is formed on a surface of the copper foil layer away from the carrier plate;
Forming a conductive circuit layer and a conductive pillar on the surface of the barrier layer, the conductive circuit layer comprising a plurality of conductive lines, the conductive pillars are in one-to-one correspondence with the conductive lines and are electrically connected;
Forming a gel on the gap between the conductive line and the conductive post such that opposite surfaces of the sealant are coplanar with the exposed surface of the conductive line and the conductive post;
Removing the carrier plate;
Etching off a portion of the copper foil layer and a portion of the barrier layer, forming a blocking block electrically connected to the conductive line and electrically connecting the conductive bumps in one-to-one correspondence with the blocking block, thereby obtaining a chip package substrate;
Providing a wafer;
The wafer is soldered to the conductive bump of the chip package substrate to obtain a chip package structure.
如請求項第1項所示的晶片封裝結構的製作方法,其中,該基板還包括形成在該承載板與該銅箔層之間的離型層,該銅箔層通過離型層黏結在該承載板上,在去除該承載板時,一併去除該離型層。The method of fabricating a chip package structure as shown in claim 1, wherein the substrate further comprises a release layer formed between the carrier plate and the copper foil layer, the copper foil layer being bonded by the release layer On the carrier board, the release layer is removed together when the carrier board is removed. 如請求項第1項所示的晶片封裝結構的製作方法,其中,該阻擋層為除銅以外的導電金屬。The method of fabricating a chip package structure according to claim 1, wherein the barrier layer is a conductive metal other than copper. 如請求項第1項所示的晶片封裝結構的製作方法,其中,形成該導電線路層及該導電柱的步驟包括:
在兩側的該阻擋層的遠離該銅箔層的表面上形成圖案化的第一光致抗蝕劑層,使部分該銅箔層從圖案化的該第一光致抗蝕劑層中暴露出來;
電鍍,從而在圖案化的該第一光致抗蝕劑層的間隙形成多條該導電線路,該第一光致抗蝕劑層與多條該導電線路共平面;
在部分該導電線路及部分該第一光致抗蝕劑層的表面形成圖案化的第二光致抗蝕劑層,使部分該導電線路從該第二光致抗蝕劑層中裸露出來;
電鍍,從而在圖案化的該第二光致抗蝕劑層的間隙形成導電柱;
去除圖案化的該第一光致抗蝕劑層及該第二光致抗蝕劑層。
The method for fabricating a chip package structure as shown in claim 1, wherein the step of forming the conductive circuit layer and the conductive pillar comprises:
Forming a patterned first photoresist layer on a surface of the barrier layer away from the copper foil layer on both sides, such that a portion of the copper foil layer is exposed from the patterned first photoresist layer come out;
Electroplating to form a plurality of the conductive lines in the gap of the patterned first photoresist layer, the first photoresist layer being coplanar with the plurality of conductive lines;
Forming a patterned second photoresist layer on a portion of the conductive line and a portion of the surface of the first photoresist layer to expose a portion of the conductive line from the second photoresist layer;
Electroplating to form a conductive pillar in the gap of the patterned second photoresist layer;
The patterned first photoresist layer and the second photoresist layer are removed.
如請求項第1項所示的晶片封裝結構的製作方法,其中,該封膠體是通過注塑成型的方式形成的。The method of fabricating a chip package structure as shown in claim 1, wherein the sealant is formed by injection molding. 如請求項第1項所示的晶片封裝結構的製作方法,其中,通過曝光、顯影、蝕刻制程去除部分該銅箔層,得到多個該導電凸塊;通過曝光、顯影、蝕刻制程去除多餘的阻擋層,形成與該導電凸塊相對應的阻擋塊,從而得到晶片封裝基板。The method for fabricating a chip package structure according to claim 1, wherein a portion of the copper foil layer is removed by an exposure, development, and etching process to obtain a plurality of the conductive bumps; and excess is removed by an exposure, development, and etching process. The barrier layer forms a barrier block corresponding to the conductive bump, thereby obtaining a chip package substrate. 如請求項第1項所示的晶片封裝結構的製作方法,其中,其步驟還包括在該第三表面上形成多個與該導電柱一一對應且電連接的焊球。The method for fabricating a chip package structure according to claim 1, wherein the step further comprises forming a plurality of solder balls on the third surface that are in one-to-one correspondence with the conductive pillars and electrically connected. 如請求項第1項所示的晶片封裝結構的製作方法,其中,其步驟還包括在該晶片與該晶片封裝基板的相對的兩個面之間填充底膠,形成底膠層。The method of fabricating a chip package structure according to claim 1, wherein the step further comprises filling a primer between the opposite sides of the wafer and the chip package substrate to form a primer layer. 一種晶片封裝結構,其包括一導電線路層、多個導電柱、一封膠體、多個阻擋塊、多個導電凸塊及至少一晶片;該導電線路層包括多條導電線路,該阻擋塊及該導電柱形成在該導電線路的兩相背的表面上且均與該導電線路一一對應且電連接,該封膠體包覆多條該導電線路及多個該導電柱,該封膠體與該導電線路及該導電柱的外露表面共平面,該導電凸塊形成在該阻擋塊的遠離該導電線路的的表面上;該晶片焊接在該導電凸塊的遠離該阻擋塊的表面上。A chip package structure comprising a conductive circuit layer, a plurality of conductive pillars, a glue body, a plurality of barrier blocks, a plurality of conductive bumps and at least one wafer; the conductive circuit layer comprises a plurality of conductive lines, the barrier block and The conductive pillars are formed on the two opposite surfaces of the conductive line and are electrically connected to the conductive lines. The sealant covers a plurality of the conductive lines and the plurality of conductive columns, and the sealant and the sealant The conductive line and the exposed surface of the conductive post are coplanar, and the conductive bump is formed on a surface of the blocking block away from the conductive line; the wafer is soldered on a surface of the conductive bump away from the blocking block. 如請求項第9項所示的晶片封裝結構,其中,每條該導電線路包括兩相背的第一表面及第二表面,每個該阻擋塊形成在每條該導電線路的該第一表面上,每個該導電柱形成在每條該導電線路的該第二表面上。The chip package structure of claim 9, wherein each of the conductive lines comprises two opposite first surfaces and a second surface, each of the blocking blocks being formed on the first surface of each of the conductive lines Each of the conductive pillars is formed on the second surface of each of the conductive traces. 如請求項第9項所示的晶片封裝結構,其中,該導電凸塊大致呈梯形,其包括一平行於該第一表面且遠離該第一表面的第六表面,該導電凸塊的寬度小於該導電柱的寬度。The chip package structure of claim 9, wherein the conductive bump is substantially trapezoidal, and includes a sixth surface parallel to the first surface and away from the first surface, the conductive bump having a width smaller than The width of the conductive column. 如請求項第11項所示的晶片封裝結構,其中,該晶片包括兩個相背的第七表面、第八表面及多個焊墊,多個該焊墊形成在該第八表面上,多個該焊墊與多個該導電凸塊一一對應,且通過焊料焊接在該導電凸塊的該第六表面上。The chip package structure of claim 11, wherein the wafer comprises two opposite seventh surfaces, an eighth surface, and a plurality of pads, wherein the plurality of pads are formed on the eighth surface, The solder pads are in one-to-one correspondence with the plurality of conductive bumps, and are soldered on the sixth surface of the conductive bumps. 如請求項第9項所示的晶片封裝結構,其中,該晶片封裝結構還包括多個形成在多個該導電柱的遠離該導電線路的表面上的焊球,多個該焊球與多個該導電柱一一對應且電連接,用於電連接外部電子元件。The chip package structure of claim 9, wherein the chip package structure further comprises a plurality of solder balls formed on a surface of the plurality of conductive posts away from the conductive line, the plurality of solder balls and the plurality of solder balls The conductive posts are one-to-one and electrically connected for electrically connecting external electronic components. 如請求項第9項所示的晶片封裝結構,其特徵在於,該阻擋塊的材質優選為鎳和錫等不與形成該導電線路層時的蝕刻液反應的金屬。The chip package structure according to claim 9 is characterized in that the material of the barrier block is preferably a metal such as nickel or tin which does not react with an etching solution when the conductive wiring layer is formed. 如請求項第12項所示的晶片封裝結構,其中,該晶片封裝結構還包括一底膠層,該底膠層包覆部分該晶片、該焊料、該阻擋塊及該導電凸塊。The chip package structure of claim 12, wherein the chip package structure further comprises a primer layer covering the wafer, the solder, the barrier block and the conductive bump. 一種晶片封裝基板,其包括一導電線路層、多個導電柱、一封膠體、多個阻擋塊及多個導電凸塊;該導電線路層包括多條導電線路,該阻擋塊及該導電柱形成在該導電線路的兩相背的表面上且均與該導電線路一一對應且電連接,該封膠體包覆多條該導電線路及多個該導電柱,該封膠體與多條該導電線路及多個該導電柱的外露表面共平面,該導電凸塊形成在該阻擋塊的遠離該導電線路的之表面上。A chip package substrate comprising a conductive circuit layer, a plurality of conductive pillars, a gel body, a plurality of barrier blocks and a plurality of conductive bumps; the conductive circuit layer comprises a plurality of conductive lines, the barrier block and the conductive pillars are formed And a plurality of electrically conductive lines and a plurality of the conductive pillars, the sealant and the plurality of conductive lines are disposed on the two opposite surfaces of the conductive line and are electrically connected to the conductive lines. And the exposed surfaces of the plurality of conductive pillars are coplanar, and the conductive bumps are formed on a surface of the blocking block away from the conductive line. 如請求項第16項所示的晶片封裝結構,其中,每條該導電線路包括兩相背的第一表面及第二表面,每個該阻擋塊形成在每條該導電線路的該第一表面上,每個該導電柱形成在每條該導電線路的該第二表面上。The chip package structure of claim 16, wherein each of the conductive lines comprises two opposite first surfaces and a second surface, each of the blocking blocks being formed on the first surface of each of the conductive lines Each of the conductive pillars is formed on the second surface of each of the conductive traces. 如請求項第16項所示的晶片封裝結構,其中,該導電凸塊的垂直於該導電線路層的截面大致呈梯形,且該導電凸塊的寬度小於該導電柱的寬度。The chip package structure of claim 16, wherein the conductive bump has a substantially trapezoidal cross section perpendicular to the conductive circuit layer, and the conductive bump has a width smaller than a width of the conductive pillar. 如請求項第16項所示的晶片封裝基板,其特徵在於,該阻擋塊的材質為鎳和錫等不與形成該導電線路層時的蝕刻液反應的金屬。The chip package substrate according to claim 16, wherein the barrier block is made of a metal such as nickel or tin that does not react with an etching solution when the conductive wiring layer is formed.
TW104107058A 2015-02-12 2015-03-05 Package substrate, package structure and method for manufacturing same TWI598964B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510073221.6A CN105990155A (en) 2015-02-12 2015-02-12 Chip package substrate, chip package structure and manufacturing method thereof

Publications (2)

Publication Number Publication Date
TW201705311A true TW201705311A (en) 2017-02-01
TWI598964B TWI598964B (en) 2017-09-11

Family

ID=57041967

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104107058A TWI598964B (en) 2015-02-12 2015-03-05 Package substrate, package structure and method for manufacturing same

Country Status (2)

Country Link
CN (1) CN105990155A (en)
TW (1) TWI598964B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI810380B (en) * 2019-02-22 2023-08-01 南韓商愛思開海力士有限公司 System-in-packages including a bridge die
CN117457501A (en) * 2023-10-26 2024-01-26 深圳明阳电路科技股份有限公司 Preparation method of high-density interconnection carrier plate

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112490186B (en) * 2020-11-25 2024-06-14 通富微电子股份有限公司 Multi-chip packaging method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2565149Y (en) * 2002-08-13 2003-08-06 威盛电子股份有限公司 Flip Chip Bonding Structure
JP2012069704A (en) * 2010-09-22 2012-04-05 Toshiba Corp Semiconductor device and method of manufacturing the same
US9723717B2 (en) * 2011-12-19 2017-08-01 Advanpack Solutions Pte Ltd. Substrate structure, semiconductor package device, and manufacturing method of semiconductor package

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI810380B (en) * 2019-02-22 2023-08-01 南韓商愛思開海力士有限公司 System-in-packages including a bridge die
CN117457501A (en) * 2023-10-26 2024-01-26 深圳明阳电路科技股份有限公司 Preparation method of high-density interconnection carrier plate

Also Published As

Publication number Publication date
CN105990155A (en) 2016-10-05
TWI598964B (en) 2017-09-11

Similar Documents

Publication Publication Date Title
TWI512926B (en) Package on package structure and method for manufacturing same
TWI495026B (en) Package substrate, package structure and methods for manufacturing same
JP2015176906A (en) Semiconductor device and manufacturing method of semiconductor device
JP2010103244A (en) Semiconductor device, and method of manufacturing the same
JP2010251408A (en) Semiconductor device and method of manufacturing the same, and electronic device
TW201715682A (en) Chip package and method for manufacturing same
CN111244067B (en) Semiconductor package, semiconductor package with compartment-in-package shielding and method of making the same
CN105428341A (en) Semiconductor Device, And Method For Manufacturing Semiconductor Device
KR102066015B1 (en) Semiconductor package and method of manufacturing the same
TW201513297A (en) Semiconductor device and manufacturing method thereof
KR20120001626A (en) Semiconductor package and manufacturing method thereof
CN101853835B (en) Manufacturing method of flip chip package
TWI598964B (en) Package substrate, package structure and method for manufacturing same
US8179686B2 (en) Mounted structural body and method of manufacturing the same
TWI736859B (en) Electronic package and manufacturing method thereof
JP3972209B2 (en) Semiconductor device and manufacturing method thereof, circuit board, and electronic apparatus
KR102237783B1 (en) Semiconductor package and fabrication method thereof
JP4324773B2 (en) Manufacturing method of semiconductor device
TWI503941B (en) Chip package substrate and method for manufacturing same
TWI591788B (en) Method for manufacturing electronic package
TW201541588A (en) Package structure, method for manufacturing same, and package substrate
JP2014082302A (en) Semiconductor device
KR101332864B1 (en) Method for manufacturing semiconductor package
JP2010153521A (en) Resin sealing method for semiconductor element
TW201822331A (en) Electronic package