TW201634908A - Polarized light measuring device and polarized light irradiation device - Google Patents

Abstract

The invention provides a polarized light measuring device and a polarized light irradiation device. The polarized light measuring device of an embodiment includes: a first polarizer into which a polarized light enters; a rotating unit which moves the first polarizer in a rotation direction; a photoelectric conversion unit which outputs an electric signal corresponding to the amount of light received; and a moving unit which moves the first polarizer between a first position and a second position, wherein the first position of the first polarizer is where the polarized light enters the photoelectric conversion unit via the first polarizer, and the second position of the first polarizer is where the polarized light directly enters the photoelectric conversion unit. The invention can accurately measure the polarization direction and the amount of light of the polarized light.

Description

Polarized light measuring device and polarized light irradiation device

The present invention relates to a polarized light measuring device and a polarized light irradiating device.

When an alignment process of an alignment film of a liquid crystal display element or an alignment film of a viewing angle compensation film or the like is performed, the object to be irradiated is irradiated with polarized light of a predetermined wavelength. This alignment treatment method is called an optical alignment method. A long polarizing element is required in order to perform a wide range of alignment processing, but it is difficult to manufacture a long polarizing element. Therefore, the alignment treatment is performed using a plurality of polarizing elements arranged in a line. However, if a plurality of polarizing elements are used, unevenness in the polarization direction of the polarized light that is irradiated onto the object to be irradiated may occur due to an installation error or the like. Therefore, there has been proposed a technique of measuring the unevenness of the polarization direction of the polarized light using a polarizer called an analyzer, and adjusting the polarization direction based on the measurement result.

Here, in the case of using the photo-alignment method, it is preferable to measure the amount of light of the polarized light that is irradiated onto the object to be irradiated. When the amount of the polarized light is measured, if the analyzer is mounted, the amount of the polarized light cannot be accurately measured. Therefore, when measuring the polarization direction of the polarized light, the operator attaches the analyzer to the detecting unit, and when measuring the amount of the polarized light, the operator removes the analyzer from the detecting unit. However, if the operator attaches and removes the analyzer, the measurement error caused by the mounting error may occur when the polarization direction of the polarized light is measured.

Further, in order to measure the polarization direction, a technique of using a plurality of types of analyzers in which the direction in which the linear bodies extend (the angle of the transmission axis) is different has been proposed. However, if a plurality of types of analyzers are used, the size and cost of the polarized light measuring device can be increased. Further, since the measurement accuracy of the polarization direction depends on the number of types of the analyzer, there is a concern that measurement with high accuracy cannot be performed. Therefore, it is desired to develop a technique capable of accurately measuring the polarization direction of polarized light and the amount of polarized light. [Prior Art Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei.

[Problems to be solved by the invention]

An object of the present invention is to provide a polarized light measuring device and a polarized light irradiating device which can accurately measure the polarizing direction of polarized light and the amount of polarized light. [Means for solving the problem]

The polarized light measuring apparatus according to the present invention includes: a first polarizing element that supplies incident polarized light; a rotating unit that moves the first polarizing element in a rotational direction; and a photoelectric conversion unit that outputs electric power corresponding to the amount of received light. And a moving portion that moves the first polarizing element between a first position and a second position, the first position being such that the polarized light is incident on the photoelectric conversion unit via the first polarizing element The second position is such that the polarized light is directly incident on the photoelectric conversion portion. [Effects of the Invention]

According to the embodiment of the present invention, it is possible to provide a polarized light measuring device and a polarized light irradiating device which can accurately measure the polarizing direction of the polarized light and the amount of the polarized light.

The invention of the embodiment is a polarized light measuring device including: a first polarizing element for incident polarized light; a rotating portion for moving the first polarizing element in a rotational direction; and a photoelectric conversion unit for outputting An electric signal corresponding to the amount of received light; and a moving portion moving the first polarizing element between the first position and the second position, wherein the first position is to cause the polarized light to pass through the first The polarizing element is incident on the photoelectric conversion portion, and the second position is such that the polarized light is directly incident on the photoelectric conversion portion. According to the polarized light measuring device, the polarization direction of the polarized light and the amount of the polarized light can be accurately measured.

The moving portion may move the first polarizing element to the first position when measuring a polarization direction of the polarized light. The moving portion may move the first polarizing element to the second position when measuring the amount of the polarized light. As a result, the reproducibility can be remarkably improved as compared with the case where the operator attaches and detaches the first polarizing element.

Further, the plurality of linear bodies provided in the first polarizing element may be made to contain silicon. In this way, the extinction ratio can be increased, and therefore, the polarization direction of the polarized light can be measured with higher accuracy.

The invention of the embodiment is a polarized light irradiation device including: a light source having a shape extending in a predetermined direction; and a plurality of second polarizing elements arranged in a direction in which the light source extends, and from the The light emitted from the light source is polarized light; and the polarized light measuring device is disposed on a side opposite to the light source side of the plurality of second polarizing elements. According to the polarized light irradiation device, the polarization direction of the polarized light and the amount of the polarized light can be accurately measured. Therefore, productivity can be improved.

Further, the plurality of linear bodies provided in the second polarizing element may be made to contain germanium. In this way, the extinction ratio can be increased, and therefore, the polarization direction of the polarized light can be measured with higher accuracy.

Hereinafter, embodiments will be exemplified with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and the detailed description is omitted as appropriate. In addition, the arrow X and the arrow Y in each figure show the two directions orthogonal to each other, for example, the arrow X is the conveyance direction of the to-be-illuminated body 200. Further, the object to be irradiated 200 can be, for example, an alignment film having a liquid crystal display element or a viewing angle compensation film. However, the object to be irradiated 200 is not limited to those exemplified, and may be an object to be irradiated which is subjected to alignment treatment using a photo-alignment method.

FIG. 1 is a schematic perspective view illustrating a polarization light measuring device 1 and a polarized light irradiation device 100 according to the present embodiment. FIG. 2 is a schematic cross-sectional view illustrating the polarized light measuring apparatus 1 of the present embodiment. 2 is a cross-sectional view taken along line A-A of FIG. 1. FIG. 3 is a schematic plan view illustrating the polarizing section 102.

As shown in FIG. 1, the polarized light irradiation device 100 of the present embodiment is provided with an illuminating unit 101, a polarizing unit 102, a transport unit 103, a polarized light measuring device 1, and a control unit 104.

First, the polarized light measuring device 1 of the present embodiment will be exemplified. As shown in FIGS. 1 and 2, the polarized light measuring device 1 is provided with a polarizing unit 2, a detecting unit 3, a moving unit 4, and a control unit 5.

The polarizing unit 2 includes a polarizing element 20 (corresponding to an example of the first polarizing element), a holding unit 21, and a moving unit 22. The polarized light Lp described hereinafter is incident on the polarizing element 20. The polarizing element 20 is used when measuring the polarization direction of the polarized light Lp. The polarizing element 20 is sometimes also referred to as a detecting element. The polarizing element 20 transmits only the component vibrating in the predetermined direction of the polarized light Lp to become the polarized light Lpp. The polarizing element 20 can be set as a wire grid type polarizing element. The polarizing element 20 can be, for example, a substrate made of quartz or the like, and a plurality of linear linear bodies placed on the substrate in parallel with each other. In this case, a plurality of linear bodies are provided at equal intervals. The pitch size of the linear body can be set to be equal to or less than the wavelength of incident light. The pitch size of the linear body is preferably set to be 1/3 or less of the wavelength of the incident light.

The material of the linear body can be, for example, a metal such as chrome or aluminum alloy. Further, in general, the linear body is formed of a conductive material, but the linear body may also be formed of an insulating material or a semiconductor material. For example, the linear body may be formed of a material containing titanium such as titanium oxide or a material containing ruthenium or the like. As will be described later, light having a wavelength in a wavelength region of ultraviolet rays (for example, a wavelength region of 200 nm or more and 400 nm or less) is irradiated from the light source 101a. Therefore, if a linear body is formed from a material containing ruthenium, the extinction ratio can be improved. That is, if the linear body is formed of a material containing ruthenium, the detection accuracy can be improved.

The holding portion 21 has a main body portion 21a and a holding claw 21b. The main body portion 21a has a plate shape. A hole 21a1 penetrating in the thickness direction is provided in the main body portion 21a. The holding claw 21b is provided on the circumference of the hole 21a. The holding claw 21b holds the periphery of the polarizing element 20. The polarizing element 20 is provided on the main body portion 21a so as to block the hole 21a, and is held by the holding claw 21b. Therefore, light transmitted through the polarizing element 20 can be incident on the detecting portion 3 through the hole 21a1.

The moving unit 22 holds the holding unit 21 and moves the holding unit 21 in a predetermined direction. Since the polarizing element 20 is provided in the holding portion 21, the polarizing element 20 can be moved by moving the holding portion 21. The moving unit 22 can be, for example, a driving device such as a guide, a servo motor or an air cylinder for moving the holding portion 21 in a predetermined direction, and a position of the detecting and holding unit 21 . Position detector, etc.

When the amount of the polarized light is measured, the moving unit 22 moves the holding unit 21 (the polarizing element 20) so that the photoelectric conversion unit 30 does not interfere with the incident of the light. When the moving unit 22 measures the polarization direction of the polarized light, the moving unit 22 moves the holding unit 21 (the polarizing element 20) so that the polarizing element 20 is positioned on the photoelectric conversion unit 30. At this time, the center of the polarizing element 20 is overlapped with the position from the light source 101a toward the axis R of the photoelectric conversion unit 30. In other words, the moving unit 22 causes the polarizing element 20 to enter the polarized light Lp at the first position of the polarizing element 20 of the photoelectric conversion unit 30 via the polarizing element 20, and the second position of the polarizing element 20 directly incident on the photoelectric conversion unit 30 with the polarized light Lp. Move between positions. In this case, the moving unit 22 moves the polarizing element 20 to the first position when measuring the polarization direction of the polarized light Lp. The moving unit 22 moves the polarizing element 20 to the second position when measuring the amount of light of the polarized light Lp.

The detecting unit 3 includes a photoelectric conversion unit 30 and a rotating unit 31. The photoelectric conversion unit 30 is provided below the holding portion 21 (polarizing element 20) (opposite to the light source 101a side). The photoelectric conversion unit 30 outputs an electric signal corresponding to the amount of light of the received light. The photoelectric conversion unit 30 can be, for example, a photoelectric conversion element such as a photodiode.

The rotating unit 31 moves the polarizing element 20 in the rotational direction about the axis R from the light source 101a toward the photoelectric conversion unit 30. When the polarization direction of the polarized light Lp is measured, the center of the polarizing element 20 overlaps with the position of the axis R. Therefore, the rotating portion 31 can rotationally move the polarizing element 20 around the central axis of the polarizing element 20. Therefore, the direction in which the linear body provided on the polarizing element 20 extends can be changed.

The rotating portion 31 has a mounting portion 31a and a base portion 31b. A photoelectric conversion unit 30 is provided inside the mounting portion 31a. The light receiving surface of the photoelectric conversion unit 30 is exposed at one end surface of the mounting portion 31a. Further, the polarizing unit 2 is provided in the mounting portion 31a. For example, the photoelectric conversion unit 30 may be provided at the center of the mounting portion 31a, and the moving portion 22 may be provided at the peripheral portion of the mounting portion 31a.

A mounting portion 31a is provided at one end of the base portion 31b. The other end of the base portion 31b is attached to the moving portion 40. The base portion 31b moves the mounting portion 31a in the rotational direction about the axis R. The base portion 31b can be, for example, a drive device such as a table or a servo motor, or a position detector such as an encoder.

The moving unit 4 moves the polarizing unit 2 and the detecting unit 3. The moving unit 4 has a first moving unit 40 and a second moving unit 41. The mounting portion 31a is attached to the first moving portion 40. Therefore, the first moving unit 40 can move the polarizing unit 2 and the detecting unit 3 in the Y direction. The first moving portion 40 is attached to the second moving portion 41. Therefore, the second moving unit 41 can move the polarizing unit 2 and the detecting unit 3 in the X direction. The first moving unit 40 and the second moving unit 41 can be, for example, a single-axis robot or the like including a position detector. However, the configuration of the moving unit 4 is not limited to the illustrated ones. The moving unit 4 may move the polarizing unit 2 and the detecting unit 3 in a predetermined plane (for example, in a horizontal plane), and may obtain the positions of the moved polarizing unit 2 and the detecting unit 3.

The control unit 5 controls the operation of each element provided in the polarized light measuring device 1. For example, the control unit 5 controls the moving unit 4 (the first moving unit 40 and the second moving unit 41), and moves the polarizing unit 2 and the detecting unit 3 to a desired position. The control unit 5 controls the base portion 31b to rotate the polarizing element 20 by only a predetermined angle around the central axis of the polarizing element 20. The control unit 5 controls the moving unit 22 to move the holding unit 21 (polarizing element 20). Moreover, the control unit 5 performs measurement of the polarized light Lp based on an instruction from the control unit 104. For example, the control unit 5 calculates the polarization direction of the polarized light Lp based on the output from the photoelectric conversion unit 30 and the rotational position information from the base portion 31b. Moreover, the control unit 5 calculates the amount of light of the polarized light Lp based on the output from the photoelectric conversion unit 30. The polarization direction of the calculated polarization light Lp and the amount of polarization light Lp may be output to a display device (not shown) or the like, or may be output to the control unit 104. Further, details of the measurement of the polarized light Lp will be described below. Further, the control unit 5 may be provided integrally with the control unit 104 described below, and the control unit 104 may also function as the control unit 5.

Next, returning to FIG. 1 , the polarized light irradiation device 100 of the present embodiment will be exemplified. The illuminating unit 101 has a light source 101a and a reflector 101b. The light source 101a illuminates light having a wavelength in a wavelength region of ultraviolet rays. The light irradiated from the light source 101a is so-called non-polarized light having various vibration direction components. The light source 101a can be, for example, a long arc type high pressure mercury lamp that irradiates ultraviolet rays having a wavelength of about 256 nm. The light source 101a may be, for example, a linear light source such as a long-circular metal halide lamp or a fluorescent lamp. For example, the light source 101a may have a plurality of light-emitting elements (for example, a light emitting diode, a laser diode, an organic light emitting diode, or the like) that emit ultraviolet rays in a straight line, or a short arc (short arc) ) A point light source like a mercury lamp. The light source 101a can be configured to have a linear shape extending in a predetermined direction. The light source 101a may be provided to extend in a direction (Y direction) orthogonal to a direction (X direction) in which the object 200 to be irradiated is transported.

The reflector 101b has a flow channel shape that is open on one side. The cross-sectional shape of the reflector 101b can be set as a part of an ellipse. The inner surface of the reflector 101b is a mirror. A light source 101a is provided inside the reflector 101b. The light source 101a is disposed along the longitudinal direction of the reflector 101b. The reflector 101b reflects the light that is emitted from the light source 101a toward the inner surface of the reflector 101b and enters the polarizing portion 102.

As shown in FIG. 3, the polarizing unit 102 has a polarizing element 102a (corresponding to an example of a second polarizing element), a holding member 102b, and a holding member 102c. The polarizing element 102a causes the light irradiated from the light source 101a to be the polarized light Lp having a specific polarization direction.

The polarizing element 102a can have, for example, the same configuration as the polarizing element 20.

The holding member 102b has a frame shape and holds the periphery of the polarizing element 102a. Since the substrate of the polarizing element 102a is formed of quartz or the like, the end portion of the polarizing element 102a or the like is easily broken. Therefore, the holding member 102b is provided to protect the polarizing element 102a. Further, in the case where it is difficult to cause a defect or the like of the polarizing element 102a, it is not necessary to provide the holding member 102b.

A semicircular recess 102b1 is provided at a central portion of one end surface of the holding member 102b. A rectangular recessed portion 102b2 is provided on an end surface of the holding member 102b that faces the end surface on which the recessed portion 102b1 is provided. The recess 102b2 is provided at a position deviated from the central portion (for example, in the vicinity of the corner of the holding member 102b). It is difficult to manufacture the polarizing element 102a having a long length. Therefore, the polarizing element 102a and the holding member 102b are arranged in a plurality of groups in the direction in which the light source 101a extends (Y direction). Further, a predetermined gap is provided between the plurality of holding members 102b, so that the slope adjustment (the unevenness of the polarization direction) described later can be performed.

The holding member 102c holds a plurality of holding members 102b inside the frame portion 102c1. The holding member 102c has a frame portion 102c1, a support portion 102c2, an elastic portion 102c3, and an adjustment portion 102c4. The support portion 102c2, the elastic portion 102c3, and the adjustment portion 102c4 are provided in a group with respect to each of the plurality of holding members 102b. The frame portion 102c1 has a frame shape. The frame portion 102c1 extends in a direction (Y direction) in which the light source 101a extends.

The support portion 102c2 has a cylindrical shape and is in contact with the concave portion 102b1. The elastic portion 102c3 presses the holding member 102b against the support portion 102c2 by an elastic force. The elastic portion 102c3 has a base portion 102c3a and a coil spring 102c3b. The base portion 102c3a is provided to the holding member 102c. The base portion 102c3a is provided at a position opposed to the recess portion 102b2. The coil spring 102c3b is provided between the base portion 102c3a and the recess portion 102b1.

The adjustment portion 102c4 is provided separately from the elastic portion 102c3. The adjustment portion 102c4 can be provided, for example, at a position that is line symmetrical with the elastic portion 102c3 with respect to the center line 102b3 of the holding member 102b. The adjustment unit 102c4 has a base portion 102c4a and a protruding portion 102c4b. The base portion 102c4a is provided to the holding member 102c.

The protruding portion 102c4b is provided at the base portion 102c4a. The protruding portion 102c4b protrudes from the base portion 102c4a. The front end of the protruding portion 102c4b is in contact with the holding member 102b. The protruding portion 102c4b can change the protruding length D from the base portion 102c4a. The protruding portion 102 c 4 b can be, for example, a mechanism or a screw mechanism that protrudes stepwise, and changes the protruding length D based on the measurement result of the polarized light measuring device 1 . In this case, if the protruding portion 102c4b having the screw mechanism is used, the continuity can be adjusted. Therefore, it is easier to finely adjust than the protruding portion that protrudes stepwise. Further, the protrusion length 102 may be changed by the operator operating the protrusion portion 102c4b, or the protrusion portion 102c4b may be driven by the drive mechanism provided in the protrusion portion 102c4b to change the protrusion length D.

One holding member 102b is supported at three points by a set of the support portion 102c2, the elastic portion 102c3, and the adjustment portion 102c4. As shown in FIG. 3, when the protruding length D of the protruding portion 102c4b is changed, the holding member 102b and the polarizing element 102a can be moved in the rotational direction with the support portion 102c2 as a fulcrum. When the polarizing element 102a is moved in the rotational direction, the direction in which the linear body provided on the polarizing element 102a extends can be changed. Therefore, by changing the projection length D based on the measurement result of the polarized light measuring device 1, the unevenness in the polarization direction can be adjusted for each of the plurality of polarizing elements 102a.

The conveyance unit 103 conveys the object to be irradiated 200 in a direction (X direction) orthogonal to the direction in which the light source 101a extends. The conveyance unit 103 conveys the object to be irradiated 200 so that the object to be irradiated 200 passes below the side of the light source 101a on which the polarizing unit 102 is provided. The transport unit 103 can be, for example, a holding device that holds the object to be irradiated 200, a transport device such as a single-axis robot, or the like.

The control unit 104 controls the operations of the irradiation unit 101 and the transport unit 103. For example, the control unit 104 controls the light source 101a to emit light L having a wavelength in the ultraviolet light wavelength region from the light source 101a. The control unit 104 controls the transport unit 103 to transport the object to be irradiated 200 so that the object to be irradiated 200 passes under the side of the light source 101a on which the polarizing unit 102 is provided. Moreover, the control unit 104 can control the driving mechanism provided in the protruding portion 102c4b based on the measurement result of the polarized light measuring device 1, and can adjust the unevenness in the polarization direction for each of the plurality of polarizing elements 102a.

Next, the action of the polarized light measuring device 1 and the action of the polarized light irradiation device 100 will be exemplified. FIG. 4 is a schematic perspective view illustrating that the polarized light Lp is generated by the polarized light irradiation device 100 and the polarized light Lp is measured by the polarized light measuring device 1 . The control unit 104 controls the light source 101a to emit light L having a wavelength in the wavelength region of the ultraviolet light from the light source 101a. The light L emitted from the light source 101a is directly emitted from the opening of the reflector 101b, or is reflected on the inner surface of the reflector 101b and is emitted from the opening of the reflector 101b. The light L emitted from the opening of the reflector 101b includes a component that vibrates in various directions, for example, in the B direction or the C direction.

The light L becomes the polarized light Lp by being incident on the polarizing element 102a and transmitted through the polarizing element 102a. As described above, the polarizing element 102a is provided with a plurality of linear bodies extending in a predetermined direction. Therefore, the polarizing element 102a transmits only the component vibrating in the direction orthogonal to the direction in which the linear body extends in the component of the light L. Therefore, when the light L passes through the polarizing element 102a, the light L becomes the polarized light Lp having only a component vibrating in a predetermined direction (for example, the C direction). The polarized light irradiation device 100 generates the polarized light Lp in the above manner. When the alignment process of the object to be irradiated 200 is performed, the polarized light Lp is irradiated onto the object 200 to be irradiated. However, when the object to be irradiated 200 is disposed, the polarization direction of the polarized light Lp cannot be measured. Therefore, when the polarization direction of the polarized light Lp is measured, the object to be irradiated 200 is not disposed, and the polarized light Lp is incident on the polarized light. The polarizing element 20 of the light measuring device 1.

The control unit 5 controls the moving unit 22 to move the holding unit 21 (polarizing element 20) such that the polarizing element 20 is positioned on the photoelectric conversion unit 30. The polarized light Lp becomes the polarized light Lpp by passing through the polarizing element 20. The polarized light Lpp is incident on the photoelectric conversion portion 30, so that the photoelectric conversion portion 30 outputs an electric signal corresponding to the amount of light of the received light. Moreover, the control unit 5 controls the rotating unit 31 (base portion 31b) to move the polarizing element 20 in the rotational direction, and changes the direction in which the linear body provided on the polarizing element 20 extends.

When the direction in which the linear body extends changes, the illuminance of the polarized light Lpp changes according to the polarization direction of the polarized light Lp. For example, when the rotation angle θ is 0°, -20°, or 90°, the illuminance of the polarized light Lpp is different, and the values of the electric signals output from the photoelectric conversion unit 30 are different values. Therefore, when the rotation angle θ when the value of the electric signal output from the photoelectric conversion unit 30 becomes maximum or minimum is known, the polarization light Lp can be obtained from the relationship between the rotation angle θ obtained in advance and the polarization direction of the polarization light Lp. The direction of polarization.

For example, the case where the rotation angle θ is 90° is the X direction, the case where the rotation angle θ is 0° is the Y direction, and the electric signal output from the photoelectric conversion unit 30 when the rotation angle θ is 0°. When the value is the largest, the polarization direction of the polarized light Lp is in the Y direction. In addition, when the value of the electric signal output from the photoelectric conversion unit 30 is the minimum when the rotation angle θ is 0°, the polarization direction of the polarized light Lp is the X direction.

In the measurement of the polarization direction of the polarized light Lp, it is sufficient to perform measurement only before and after the maximum value or the minimum value of the electric signal output from the photoelectric conversion unit 30. In the above manner, the control unit 5 calculates the polarization direction of the polarized light Lp based on the output from the photoelectric conversion unit 30 and the rotational position information from the rotating unit 31 (base portion 31b).

The measurement of the polarization direction of the polarized light Lp is performed at any of a plurality of positions along the direction (Y direction) in which the plurality of polarizing elements 102a are arranged. The control unit 5 controls the moving unit 4 to move the polarizing unit 2 and the detecting unit 3 to an arbitrary position in the direction in which the plurality of polarizing elements 102a are arranged, and to measure the polarization direction of the polarized light Lp. Further, it is preferable that the movement range is at least the effective irradiation range of the irradiation unit 101. When the polarization direction of the polarized light Lp is measured at a plurality of positions, the polarization direction of the polarized light Lp at a plurality of positions, that is, the unevenness of the polarization direction of the polarized light Lp can be obtained.

When the amount of light of the polarized light Lp generated by the polarized light irradiation device 100 is measured, the control unit 5 controls the moving unit 22 to move the holding unit 21 (polarizing element 20) to directly inject the polarized light Lp to the photoelectric conversion unit 30. . The photoelectric conversion unit 30 outputs an electric signal corresponding to the amount of light of the received light, and therefore, the amount of the polarized light Lp can be obtained based on the value of the output electric signal. In other words, the control unit 5 calculates the amount of light of the polarized light based on the output from the photoelectric conversion unit 30.

The unevenness of the polarization direction of the polarized light Lp obtained or the amount of the polarized light Lp is transmitted from the control unit 5 to the control unit 104 as a result of measurement of the polarized light Lp.

When the unevenness of the polarization direction of the polarized light Lp exceeds a predetermined range, the inclination of the polarizing element 102a located immediately above or in the vicinity of the position where the polarization direction is not large is adjusted. In this case, the operator can operate the protruding portion 102c4b to adjust the inclination of the polarizing element 102a based on the information output from the control unit 5 or the control unit 104 to the display device or the like. Further, the inclination of the polarizing element 102a may be adjusted by the control unit 104 controlling the driving mechanism that drives the protruding portion 102c4b.

After the slope adjustment of the polarizing element 102a, the polarization direction of the polarized light Lpp is measured again at a plurality of positions. Further, the above procedure is repeated until the unevenness of the polarization direction of the polarized light Lp is within a predetermined range.

When the unevenness of the polarization direction of the polarized light Lp is within a predetermined range, the alignment process of the irradiated body 200 is performed. When the alignment process of the object to be irradiated 200 is performed, the control unit 5 controls the moving unit 4 to evacuate the polarizing unit 2 and the detecting unit 3 to the outside of the transport area of the object 200 to be irradiated. In this way, interference between the irradiated body 200 and the polarizing unit 2 and the detecting unit 3 can be avoided.

Next, the control unit 104 controls the light source 101a to emit light L having a wavelength in the ultraviolet light wavelength region from the light source 101a. Moreover, the control unit 104 controls the conveyance unit 103 to pass the object to be irradiated 200 below the side of the light source 101a on which the polarizing unit 102 is provided. The light L emitted from the light source 101a is incident on the polarizing element 102a and transmitted through the polarizing element 102a to become the polarized light Lp. The polarized light Lp is incident on the object to be irradiated 200, and the alignment treatment is performed by the polarized light Lp. Further, by arranging the object to be irradiated 200 below the side of the light source 101a on which the polarizing unit 102 is provided, the object to be irradiated 200 is subjected to alignment processing.

According to the present embodiment, when the measurement of the polarization direction of the polarization light Lp and the measurement of the amount of the polarization light Lp are performed, the moving unit 22 is used to move the polarizing element 20, so that the operator can attach and detach the polarizing element 20. The reproducibility can be significantly improved compared to the case. Therefore, the polarization direction of the polarized light Lp and the amount of the polarized light Lp can be accurately measured. Further, since the polarized light measuring device 1 can be incorporated in the polarized light irradiation device 100, the polarized light measuring device 1 can be attached to the existing polarized light detecting device.

The embodiments of the present invention are exemplified above, but are not intended to limit the scope of the invention. The present invention can be implemented in various other forms, and various omissions, substitutions, changes and the like can be made without departing from the spirit of the invention. The invention and its modifications are intended to be included within the scope of the invention and the scope of the invention. Further, each of the above embodiments may be implemented in combination with each other.

1‧‧‧Polarized light measuring device
2, 102‧‧‧ polarizing department
3‧‧‧Detection Department
4. 22‧‧‧moving department
5, 104‧‧‧Control Department
20, 102a‧‧‧ polarizing elements
21‧‧‧ Keeping Department
21a‧‧‧ Main body
21a1‧‧ hole
21b‧‧‧Keep the claw
30‧‧‧Photoelectric Conversion Department
31‧‧‧Rotating Department
31a‧‧‧Installation Department
31b, 102c3a, 102c4a‧‧‧ base
40‧‧‧First Moving Department
41‧‧‧Second Moving Department
100‧‧‧Polarized light irradiation device
101‧‧‧ Department of Irradiation
101a‧‧‧Light source
101b‧‧‧ reflector
102b, 102c‧‧‧ Keeping parts
102b1, 102b2‧‧‧ recess
102b3‧‧‧ center line
102c1‧‧‧ Frame Department
102c2‧‧‧Support
102c3‧‧‧Flexible Department
102c3b‧‧‧ coil spring
102c4‧‧‧Adjustment Department
102c4b‧‧‧Protruding
103‧‧‧Transportation Department
200‧‧‧ irradiated body
B, C‧‧‧ directions
D‧‧‧Outstanding length
L‧‧‧Light
Lp, Lpp‧‧‧ polarized light
R‧‧‧ axis

FIG. 1 is a schematic perspective view illustrating a polarization light measuring device 1 and a polarized light irradiation device 100 according to the present embodiment. FIG. 2 is a schematic cross-sectional view illustrating the polarized light measuring apparatus 1 of the present embodiment. FIG. 3 is a schematic plan view illustrating the polarizing section 102. FIG. 4 is a schematic perspective view illustrating that the polarized light Lp is generated by the polarized light irradiation device 100 and the polarized light Lp is measured by the polarized light measuring device 1 .

no

1‧‧‧Polarized light measuring device

2‧‧‧Polarized section

3‧‧‧Detection Department

4. 22‧‧‧moving department

20‧‧‧Polarized elements

21‧‧‧ Keeping Department

21a‧‧‧ Main body

21a1‧‧ hole

21b‧‧‧Keep the claw

30‧‧‧Photoelectric Conversion Department

31‧‧‧Rotating Department

31a‧‧‧Installation Department

31b‧‧‧ base

40‧‧‧First Moving Department

41‧‧‧Second Moving Department

R‧‧‧ axis

Claims (5)

A polarized light measuring apparatus comprising: a first polarizing element for incident polarized light; a rotating portion for moving the first polarizing element in a rotation direction; and a photoelectric conversion unit for outputting a light amount corresponding to the received light And a moving portion that moves the first polarizing element between a first position and a second position, the first position being such that the polarized light is incident on the photoelectric via the first polarizing element In the conversion portion, the second position is such that the polarized light is directly incident on the photoelectric conversion portion. The polarized light measuring apparatus according to claim 1, wherein the moving unit moves the first polarizing element to the first position when measuring a polarization direction of the polarized light, and at the measuring station When the amount of the polarized light is described, the first polarizing element is moved to the second position. The polarized light measuring apparatus according to claim 1 or 2, wherein the first polarizing element is provided with a plurality of linear bodies, and the plurality of linear bodies contain germanium. A polarized light irradiation device comprising: a light source having a shape extending in a predetermined direction; a plurality of second polarizing elements arranged in a direction in which the light source extends, and causing light emitted from the light source to be polarized light The polarized light measuring apparatus according to any one of claims 1 to 3, wherein the polarized light measuring device is provided on a side opposite to the light source side of the plurality of second polarizing elements. The polarized light irradiation device according to claim 4, wherein the second polarizing element is provided with a plurality of linear bodies, and the plurality of linear bodies contain germanium.