TW201617621A - Method and apparatus for detecting probe card - Google Patents

Abstract

Disclosed is a probe card detection method, which includes: using a measurement device to identify position of each pin of the probe card; comparing each position of above-described pins with a standard position to determine the deviation between these two parties; if the above-described two parties have the deviation, then the pins that have deviation appeared are marked as erraneous pins; sending the probe card to a correction device for being corrected; wherein, the correction device having a working position whereby the erraneous pins of the probe card are directly delivered to; after one erraneous pin of the probe card being corrected, the next erraneous pin is directly sending to the working position of the correction device. In addition, the present invention also provides a probe card detection apparatus.

Description

Probe card detection method and device

The invention relates to the detection of a probe card, in particular to a device and a method for quickly detecting and correcting a probe card.

According to the conventional probe card detecting device, there is a detecting platform, and a jig is provided to fix the probe card to be detected on the platform. An observer is provided on the platform to observe whether the position of the probe card is in compliance with the standard. If it is found that the position of some of the feet is deviated from the standard position, the probe card is further moved to a calibration device, and the defective device is corrected by the correcting device to return the offset position to the standard position.
However, the above-mentioned detection and correction process for the probe card must be performed separately by different devices, so that the probe card must be disassembled between different devices, and the disadvantage of being too time consuming is generated. Furthermore, in the detection phase, the position information of the problematic foot must be recorded. If there is a leak or an error in the recording, the correctness of the detection is affected, which in turn affects the product quality of the probe card.
In view of this, how to improve the above problems is the primary problem to be solved by the present invention.

The object of the present invention is to provide a probe card detecting method and device, which uses a measuring device to detect a probe card, thereby marking a position deviation foot, and then directly feeding the marked foot to a calibration device for correction. In order to shorten the time of detection and correction, and improve work efficiency.
To achieve the foregoing objective, the present invention provides a probe card detecting method, which includes:
Identifying the position of each pin of the probe card by a measuring device;
Comparing the position of each of the above-mentioned feet with a standard position, judging the deviation between the two; wherein the standard position is provided by a pre-established teaching file in the measuring device;
If the foregoing two have deviations, the deviation of the foot is marked as an incorrect foot;
Delivering the probe card to a calibration device for correction; wherein the calibration device has a working position, and the wrong foot of the probe card is directly delivered to the working position of the calibration device;
After an error pin correction of the probe card is completed, the next error pin is directly delivered to the working position of the calibration device.
Further defined therein, if the position of the pin of the probe card deviates from the standard position and the deviation exceeds the tolerance value, the pin is marked as an incorrect pin.
The above method further includes: after the error pin correction of the probe card is completed, the probe card is sent back to the measuring device for re-detection, and only the previously marked wrong pin is detected.
The present invention further provides a probe card detecting device using the above probe card detecting method, which comprises:
a work platform;
a measuring unit is disposed on the working platform; the measuring unit includes an image capturing unit and an image comparing unit, wherein the image capturing unit is configured to capture an image of the probe card, and the image ratio is The unit is configured to identify the position of the pin of the probe card; the measuring portion further includes a marking unit for marking the position of the pin of the probe card;
a calibration unit disposed on the working platform; the correction portion is provided with a working position for correcting the position of the probe card;
a conveying portion is disposed on the working platform; the conveying portion is provided with a loading platform for carrying the probe card, and the conveying portion can drive the loading table to be displaced in the two-dimensional direction along the working platform, thereby The probe card is directly transported to the working position of the correction unit by the position marked by the marking unit.
Wherein, the working platform is provided with an optical scale for generating a coordinate of the position marked by the marking unit, and the coordinate is used to cause the conveying portion to directly convey the position of the probe card by the marking to the working position of the correcting portion.
The above objects and advantages of the present invention will be readily understood from the following detailed description of the embodiments of the invention.

1‧‧‧Working Platform 11‧‧‧Optical Ruler 2‧‧‧Measurement Unit 21‧‧‧Image Capture Unit 22‧‧‧Image Matching Unit 23‧‧‧Marking Unit 24‧‧‧Support Column 3‧‧ ‧Transportation Department 31‧‧‧Moving Station 4‧‧‧Alignment Department 41‧‧‧Support column 5‧‧‧ needle card

Figure 1 is a flow chart of the method of the present invention;
Figure 2 is a perspective view of the apparatus of the present invention;
Figure 3 is a block diagram showing the architecture of the device of the present invention;
Figure 4 is a schematic illustration of a probe card with an incorrect foot.

The present invention provides a probe card detecting method. The method is implemented by a probe card detecting device. As shown in FIGS. 2 and 3, the device includes a working platform 1 and a measuring device is disposed on the working platform 1. a portion 2, a transport portion 3, and a correction portion 4. The measuring unit 2 includes an image capturing unit 21 and an image comparing unit 22, wherein the image capturing unit 21 is disposed on a support column 24 and is facing the working platform 1 for capturing a probe card. An image matching unit 22 is disposed in the measuring unit 2, and stores a teaching file about a standard position of the probe card position, which includes position and height information of each foot position, and the information The image matching unit 22 compares the image captured by the image capturing unit 21 with respect to the teaching file, and thereby discriminates whether the position of the pin of the probe card 5 is deviated. The position of each foot can be obtained by observing whether the feet in the image deviate from the position in the teaching file, and the height of each foot can be observed whether the feet in the image are at the focus of the image focus. Judging it. For example, as shown in FIG. 4, in the A block of the probe card 5, there is a pin offset from the standard position (hereinafter referred to as the error pin 51), and the pin 51 can be compared through the image matching unit 22. It is recognized in the teaching file, which is beneficial to the subsequent correction work.
The measuring unit 2 further includes a marking unit 23 for marking the position of the pin of the probe card 5. In the present invention, the labeling unit 23 marks the foot recognized as an error by the image matching unit 22. In the embodiment, the working platform 1 is provided with an optical scale 11 for generating coordinates of the position marked by the marking unit 23. The working platform 1 is provided with two optical scales 11 extending perpendicularly to each other and defined as an X-axis and a Y-axis, respectively generating coordinate information of the two axial directions. The coordinates of the wrong foot are recorded by the marking unit 23 to facilitate subsequent calibration operations.
The correction unit 4 is disposed on the work platform 1 at a position near the measurement unit 2. In the embodiment, the correcting portion 4 is fixed on the working platform 1 by a supporting column 41, and its position is defined as a working position for correcting the wrong position of the probe card 5 back to the standard position.
In addition, the working platform 1 is provided with a transporting portion 3, which is provided with a loading platform 31 for carrying the probe card 5, and the transporting portion 3 can drive the loading platform 31 along the working platform 1 The displacement of the X-axis and the Y-axis in the two-dimensional direction drives the probe card 5 on the stage 31 to move between the measuring unit 2 and the correction unit 4. In this embodiment, after the marking unit 23 marks the wrong foot on the probe card 5 and records the coordinates thereof, the conveying portion 3 uses the coordinates to directly convey the position where the probe card 5 is marked to the correcting portion 4 The working position allows the correcting section 4 to immediately correct the wrong foot.
The probe card detecting method of the present invention is applied to the above apparatus, and the steps thereof are as shown in FIG. 1, and include:
Place the probe card on the stage and move it to the measuring section;
The image capturing unit captures the image of the probe card, and the image matching unit identifies the position of the probe card;
Marking the foot position of each position deviating from the standard position by the marking unit;
Sending the probe card on the stage to the correction part by the conveying part; wherein the conveying part directly conveys the position of the probe card marked by the marking unit to the working position of the correction part;
Correcting the marked foot with a correction unit;
The other position where the probe card is marked by the marking unit is directly conveyed to the working position of the correction portion by the conveying portion, and the marked position is corrected by the correcting portion.
In this embodiment, before the start of the detecting method, the teaching file corresponding to the standard position of the probe card position is input before the measuring unit is used as a comparison basis of the image comparing unit, thereby After capturing the image of the probe card to be detected, the image comparison unit compares it with respect to the teaching file, thereby identifying whether the position of the probe card is deviated, and if there is an error foot as shown in FIG. In the case of bit 51, the labeling unit is marked. Further, it is further defined that the marking unit marks the foot position whose position is deviated from the standard position and exceeds the tolerance value, and then is sent to the correction unit through the conveying unit for correction. When the marking unit marks the wrong foot, the position is recorded. In this embodiment, the coordinate information of the position can be generated by the optical ruler, and the conveying unit uses the coordinate to mark the probe card. The position is directly sent to the working position of the correction unit, so that the correction unit can immediately correct the wrong foot.
Then, after the correction unit corrects the position of the probe card, the detection method further includes the step of transporting the probe card to the measurement unit for re-detection by the transport unit, wherein the step is only for the probe card previously Mark the foot of the unit mark for detection. Thereby, the detection range can be narrowed to shorten the time required for the detection, and at the same time, the correctness of the detection result is taken into consideration. The method will continue to be performed cyclically until the probe card has been marked with no error pin, and the probe card can be detected.
The disclosure of the above embodiments is intended to be illustrative of the invention and is not intended to limit the invention.
In summary, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objectives and is in accordance with the provisions of the Patent Law.

Claims (6)

[Item 1] A probe card detection method includes:
Identifying the position of each pin of the probe card by a measuring device;
Comparing the position of each of the above-mentioned feet with a standard position, judging the deviation between the two;
If the foregoing two have deviations, the deviation of the foot is marked as an incorrect foot;
Delivering the probe card to a calibration device for correction; wherein the calibration device has a working position, and the wrong foot of the probe card is directly delivered to the working position of the calibration device;
After an error pin correction of the probe card is completed, the next error pin is directly delivered to the working position of the calibration device. [Item 2] The probe card detecting method according to claim 1, wherein if the position of the pin of the probe card deviates from the standard position and the deviation exceeds the tolerance value, the pin is marked as an error pin. [Item 3] The probe card detecting method according to claim 1, wherein the standard position is provided by a pre-established teaching file in the measuring device, and includes position and height information of each pin. [Item 4] The probe card detecting method of claim 1, further comprising: after the error pin correction of the probe card is completed, returning the probe card to the measuring device for re-detection, and only for the previously marked error foot The bit is detected. [Item 5] A probe card detecting device using the probe card detecting method according to claim 1, which comprises:
a work platform;
a measuring unit is disposed on the working platform; the measuring unit includes an image capturing unit and an image comparing unit, wherein the image capturing unit is configured to capture an image of the probe card, and the image ratio is The unit is configured to identify the position of the pin of the probe card; the measuring portion further includes a marking unit for marking the position of the pin of the probe card;
a calibration unit disposed on the working platform; the correction portion is provided with a working position for correcting the position of the probe card;
a conveying portion is disposed on the working platform; the conveying portion is provided with a loading platform for carrying the probe card, and the conveying portion can drive the loading table to be displaced in the two-dimensional direction along the working platform, thereby The probe card is directly transported to the working position of the correction unit by the position marked by the marking unit. [Item 6] The probe card detecting device of claim 5, wherein the working platform is provided with an optical scale for generating a coordinate of the position marked by the marking unit, and using the coordinate to cause the conveying portion to clamp the probe The position of the mark is directly delivered to the working position of the correction unit.