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TW201614192A - Shape measuring device - Google Patents

Shape measuring device

Info

Publication number
TW201614192A
TW201614192A TW104131827A TW104131827A TW201614192A TW 201614192 A TW201614192 A TW 201614192A TW 104131827 A TW104131827 A TW 104131827A TW 104131827 A TW104131827 A TW 104131827A TW 201614192 A TW201614192 A TW 201614192A
Authority
TW
Taiwan
Prior art keywords
board
measuring device
fluid
shape measuring
surface shape
Prior art date
Application number
TW104131827A
Other languages
Chinese (zh)
Inventor
Tadashi Takahashi
Original Assignee
Nippon Electric Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co filed Critical Nippon Electric Glass Co
Publication of TW201614192A publication Critical patent/TW201614192A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A shape measuring device (1) that measures the surface shape of a board-like body (G) is provided with: a plurality of fluid-floating sections (2), which jet a fluid to the board-like body (G), and support the board-like body (G) in a state wherein the board-like body is floated in horizontal attitude; and a measuring section (3) that measures surface shape data that indicates the surface shape of the board-like body (G) in the floating state. The fluid-floating sections (2) are disposed by being separated from each other.
TW104131827A 2014-10-01 2015-09-25 Shape measuring device TW201614192A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014203087A JP6410208B2 (en) 2014-10-01 2014-10-01 Shape measuring device

Publications (1)

Publication Number Publication Date
TW201614192A true TW201614192A (en) 2016-04-16

Family

ID=55630288

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104131827A TW201614192A (en) 2014-10-01 2015-09-25 Shape measuring device

Country Status (4)

Country Link
JP (1) JP6410208B2 (en)
CN (1) CN206504714U (en)
TW (1) TW201614192A (en)
WO (1) WO2016052248A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107702675A (en) * 2017-09-27 2018-02-16 西安理工大学 Self-adaptive supporting device and measuring system applying same
FR3090088B1 (en) * 2018-12-12 2021-06-18 Saint Gobain Method of measuring geometric deviations between the curved surfaces of a plurality of materials to be evaluated and a curved surface of a reference material
WO2022189327A1 (en) * 2021-03-12 2022-09-15 Saint-Gobain Glass France Iterative method for determining the surface shape of a sheet- or layer-like object with high measurement accuracy

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9203448D0 (en) * 1992-02-18 1992-04-01 British Steel Plc Shape detection
JPH1068620A (en) * 1996-08-28 1998-03-10 Kobe Steel Ltd Method and equipment for measuring flatness of thin plate
JP5884267B2 (en) * 2010-04-01 2016-03-15 株式会社ニコン Object transport apparatus, exposure apparatus, device manufacturing method, flat panel display manufacturing method, and object transport method
US20120064461A1 (en) * 2010-09-13 2012-03-15 Nikon Corporation Movable body apparatus, exposure apparatus, device manufacturing method, flat-panel display manufacturing method, and object exchange method
JP5907429B2 (en) * 2012-07-24 2016-04-26 日本電気硝子株式会社 Plate-like warpage inspection apparatus and warpage inspection method thereof
JP2014089111A (en) * 2012-10-30 2014-05-15 Avanstrate Inc Display glass substrate shape measurement device and glass substrate manufacturing method

Also Published As

Publication number Publication date
WO2016052248A1 (en) 2016-04-07
CN206504714U (en) 2017-09-19
JP6410208B2 (en) 2018-10-24
JP2016070866A (en) 2016-05-09

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