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TW201611380A - Electric storage system containing a discrete disc-shaped element, discrete disc-shaped element and method for producing and using the same - Google Patents

Electric storage system containing a discrete disc-shaped element, discrete disc-shaped element and method for producing and using the same Download PDF

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TW201611380A
TW201611380A TW104120254A TW104120254A TW201611380A TW 201611380 A TW201611380 A TW 201611380A TW 104120254 A TW104120254 A TW 104120254A TW 104120254 A TW104120254 A TW 104120254A TW 201611380 A TW201611380 A TW 201611380A
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storage system
dish
power storage
transmission
shaped discrete
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Ulrich Peuchert
Rainer Liebald
Miriam Kunze
Thorsten Damm
Clemens Ottermann
Nikolaus Schultz
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Schott Ag
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/058Construction or manufacture
    • H01M10/0585Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • H01M10/0525Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/131Electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00Primary cells; Manufacture thereof
    • H01M6/14Cells with non-aqueous electrolyte
    • H01M6/18Cells with non-aqueous electrolyte with solid electrolyte
    • H01M6/185Cells with non-aqueous electrolyte with solid electrolyte with oxides, hydroxides or oxysalts as solid electrolytes
    • H01M6/186Only oxysalts-containing solid electrolytes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00Primary cells; Manufacture thereof
    • H01M6/40Printed batteries, e.g. thin film batteries
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M2004/021Physical characteristics, e.g. porosity, surface area
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Secondary Cells (AREA)
  • Glass Compositions (AREA)

Abstract

The invention relates to an electric storage element comprising at least one discrete disk-shaped element with increased transparency to high-energy electric radiation, and to a discrete disk-shaped element having an increased transparency to high-energy electric radiation, as well as to the manufacture thereof.

Description

含有碟形離散元件之蓄電系統、碟形離散元件、以及其製造方法和用途 Power storage system including dish-shaped discrete components, dish-shaped discrete components, and manufacturing method and use thereof

本發明係有關於一種蓄電系統,其包括針對高能電輻射具有高透明度的至少一離散碟形元件;以及一種針對高能電輻射具有高透明度之離散碟形元件;以及其製造。 The present invention relates to an electrical storage system comprising at least one discrete dish-shaped element having high transparency for high-energy electrical radiation; and a discrete dish-shaped element having high transparency for high-energy electrical radiation; and its manufacture.

蓄電系統已久為人知,其包括電池,亦可包括所謂之「超級電容器」。蓄電系統能實現較高的能量密度,因此,在將所謂之「鋰離子電池」應用於電動交通等新興領域方面有過討論,近年來亦有將其應用於智慧型手機或膝上型電腦等便攜式設備的討論。此等傳統之可充電鋰離子電池之主要特徵在於應用有機之基於溶劑的液態電解質。但液態電解質易燃,會在使用此類鋰離子電池時造成安全隱患。可用固態電解質取代有機電解質。此種固態電解質之傳導性通常遠低於(即相差多個數量級)相應之液態電解質。為獲得可接受之傳導性並利用可充電鋰離子電池之優點,目前主要以所謂之「薄膜電池」(TFB)即薄膜蓄電元件之形式製造此類固體電池。其主要應用於行動場合,如應用於所謂之「智慧卡」、醫療技術及感測機構及智慧型手機,以及應用於需要智慧型、小型化乃至柔性之能源的其他場合。 Power storage systems have long been known, including batteries, and can also include so-called "supercapacitors." Power storage systems can achieve higher energy density. Therefore, there have been discussions on the application of so-called "lithium-ion batteries" in emerging fields such as electric mobility. In recent years, they have also been applied to smart phones or laptops. Discussion of portable devices. The main feature of such conventional rechargeable lithium ion batteries is the use of organic solvent based liquid electrolytes. However, the liquid electrolyte is flammable and poses a safety hazard when using such a lithium ion battery. The organic electrolyte can be replaced by a solid electrolyte. The conductivity of such solid electrolytes is generally much lower (i.e., different orders of magnitude) than the corresponding liquid electrolyte. In order to obtain acceptable conductivity and to take advantage of the rechargeable lithium ion battery, such solid batteries are currently mainly manufactured in the form of so-called "thin film cells" (TFB), that is, thin film electricity storage elements. It is mainly used in action applications such as so-called "smart cards", medical technology and sensing organizations and smart phones, as well as in other applications where smart, miniaturized or even flexible energy sources are required.

US 2008/0001577描述一種基於鋰之示例性薄膜蓄電元件,其通常由一基板構成,第一塗佈步驟係往該基板塗佈用於該 二電極的電子集流體。隨後之製程中,先將陰極材料沉積在用於陰極(通常為鋰鈷氧化物LCO)之集流體上。下一步驟係沉積一固體電解質,其通常指由鋰、氧、氮及磷等物質構成之無定形材料,該無定形材料稱作LiPON。下一步驟係以某種方式沉積一陽極材料,使其與基板、用於陽極之集流體以及固體電解質相結合。該陽極材料尤指金屬性鋰。將此二集流體導電相連時,鋰離子會在帶電狀態下因該固體離子導體而自陽極朝陰極遷移,在此情況下,因該二集流體之導電連接而產生一自陰極至陽極的電流。反之在不帶電狀態下,可透過施加一外部電壓來迫使離子自陰極朝陽極遷移,從而為電池充電。 US 2008/0001577 describes an exemplary thin film storage element based on lithium, which typically consists of a substrate to which a first coating step is applied for Two-electrode electronic current collector. In a subsequent process, the cathode material is first deposited on a current collector for the cathode (typically lithium cobalt oxide LCO). The next step is the deposition of a solid electrolyte, which generally refers to an amorphous material composed of materials such as lithium, oxygen, nitrogen, and phosphorus, and the amorphous material is referred to as LiPON. The next step is to deposit an anode material in a manner that combines with the substrate, the current collector for the anode, and the solid electrolyte. The anode material is especially metallic lithium. When the two current collectors are electrically connected, lithium ions migrate from the anode toward the cathode due to the solid ion conductor in a charged state. In this case, a current from the cathode to the anode is generated due to the conductive connection of the two current collectors. . Conversely, in the uncharged state, the battery can be charged by applying an external voltage to force ions to migrate from the cathode toward the anode.

US 2001/0032666 A1亦描述一種示例性薄膜蓄電元件,其同樣包括一基板,需要往該基板沉積多種功能層。 US 2001/0032666 A1 also describes an exemplary thin film electrical storage element that also includes a substrate onto which various functional layers need to be deposited.

一般而言,針對此種薄膜蓄電元件而沉積之層的層厚為20μm或更小,通常小於10μm,甚至小於5μm;該層結構之總厚度可為100μm或更小。 In general, the layer deposited for such a thin film storage element has a layer thickness of 20 μm or less, usually less than 10 μm, or even less than 5 μm; the total thickness of the layer structure may be 100 μm or less.

本申請案中之薄膜蓄電元件例如係指可充電之基於鋰之薄膜蓄電元件及超級電容器;但本發明並非僅限於該等系統,本發明亦可應用於更多薄膜蓄電元件,如可充電及/或印刷薄膜電池上。 The thin film storage element in the present application refers to, for example, a rechargeable lithium-based thin film storage element and a supercapacitor; however, the present invention is not limited to such systems, and the present invention can also be applied to more thin film storage elements such as rechargeable and / or printed on a thin film battery.

通常透過若干複雜之塗佈法來製造薄膜蓄電元件,此等塗佈法亦包括對各材料進行構造化沉積。其中可對各具體之薄膜蓄電元件進行非常複雜的構造化處理,參閱US 7494742 B2。此外在涉及基於鋰之薄膜蓄電元件時,在採用金屬性鋰為陽極材料後,其較強的反應性會造成較大的困難。舉例而言,必須在儘可能無水 之條件下搬運金屬性鋰,否則其便會反應成為氫氧化鋰並喪失作為陽極的功能。此外還必須對基於鋰之薄膜蓄電元件加以封裝以免其受水分之影響。 Thin film storage elements are typically fabricated by a number of complex coating methods, which also include structured deposition of the materials. A very complicated structuring treatment can be carried out for each specific thin film storage element, see US Pat. No. 7,494,742 B2. In addition, when lithium-based thin film storage elements are involved, strong reactivity is caused by the use of metallic lithium as an anode material. For example, it must be as anhydrous as possible Metallic lithium is transported under the conditions, otherwise it will react to lithium hydroxide and lose its function as an anode. In addition, lithium-based thin film storage elements must be packaged to protect them from moisture.

US 7494742 B2描述了用於對薄膜蓄電元件之非穩定成分(如鋰或某些鋰化合物)提供保護之此種封裝。該案中係藉由一塗層或者藉由不同塗層之系統來承擔封裝功能,此等塗層在電池之整個結構中還可承擔更多功能。 No. 7,494,742 B2 describes such a package for providing protection to non-stable components of thin film storage elements, such as lithium or certain lithium compounds. In this case, the packaging function is carried out by a coating or by a system of different coatings, which can perform more functions in the entire structure of the battery.

此外在基於鋰之薄膜蓄電元件的製造條件下,特別是在形成適用於鋰插入之晶體結構所需之所謂退火或回火步驟中,移動鋰離子會與基板發生有害的副反應,因為鋰具有較高之移動性且易於擴散至常見基板材料,參閱公開案US 2010/0104942。 Further, in the manufacturing conditions of lithium-based thin film storage elements, particularly in the so-called annealing or tempering step required to form a crystal structure suitable for lithium insertion, moving lithium ions may cause harmful side reactions with the substrate because lithium has Higher mobility and ease of diffusion to common substrate materials, see publication US 2010/0104942.

薄膜蓄電元件的另一難題在於使用的基板材料。先前技術描述大量不同之基板材料,如矽、雲母、多種金屬以及陶瓷材料。亦曾多次提及過玻璃之應用,但大體上未提及過其詳細組成或具體特性。 Another difficulty with thin film storage elements is the substrate material used. The prior art describes a number of different substrate materials such as germanium, mica, various metals, and ceramic materials. The application of glass has been mentioned many times, but its detailed composition or specific characteristics have not been mentioned in general.

US 2001/0032666 A1描述一種電容器狀儲能器,其亦可指鋰離子電池。該案中之基板材料主要指半導體。 US 2001/0032666 A1 describes a capacitor-like accumulator, which can also be referred to as a lithium ion battery. The substrate material in this case mainly refers to a semiconductor.

US 6906436 B2描述一種固體電池,其例如可將金屬薄膜、半導體材料或塑膠薄膜用作基板材料。 No. 6,906,436 B2 describes a solid battery which can, for example, use a metal foil, a semiconductor material or a plastic film as the substrate material.

US 6906436 B2將多種可能性列為可能之基板材料,如金屬或金屬塗層、半導體材料或者藍寶石、陶瓷或塑膠等絕緣體。此基板可採用不同的形狀。 US 6906436 B2 lists various possibilities as possible substrate materials, such as metal or metal coatings, semiconductor materials or insulators such as sapphire, ceramic or plastic. This substrate can take on different shapes.

US 7494742 B2主要將金屬、半導體、矽酸鹽及玻璃以及無機或有機之聚合物列為基板材料。 US 7494742 B2 mainly lists metals, semiconductors, silicates and glasses, and inorganic or organic polymers as substrate materials.

US 7211351 B2將金屬、半導體或絕緣材料以及上述之組合物列為基板。 US 7211351 B2 lists metal, semiconductor or insulating materials and combinations thereof as substrates.

US 2008/0001577 A1將半導體、金屬或塑膠薄膜列為基板。 US 2008/0001577 A1 lists semiconductor, metal or plastic films as substrates.

EP 2434567 A2中的基板為導電材料(如金屬)、絕緣材料(如陶瓷或塑膠)及半導電材料(如矽)以及半導體與導體之組合物,或者為用於對熱膨脹係數進行調整的複雜結構。上述材料及類似材料亦被公開案US 2008/0032236 A1、US 8228023 B2及US 2010/0104942 A1列出。 The substrate in EP 2 434 567 A2 is a conductive material (such as a metal), an insulating material (such as ceramic or plastic) and a semiconductive material (such as germanium) and a combination of a semiconductor and a conductor, or a complex structure for adjusting the coefficient of thermal expansion. . The above-mentioned materials and the like are also listed in the publications US 2008/0032236 A1, US Pat. No. 8228023 B2 and US 2010/0104942 A1.

而US 2010/0104942 A1僅將由以下材料構成之基板列為可用基板材料:熔點較高之金屬及金屬合金以及高溫石英、矽晶圓、氧化鋁等介電材料。其原因在於,用通常所使用之鋰鈷氧化物(LCO)來製造陰極時,需要在400℃以上,特別是在500℃以上及更高之溫度條件下進行熱處理,以便為蓄電Li+離子而在該材料中獲得極佳之晶體結構,故無法使用軟化溫度較低之聚合物或無機材料。但金屬及金屬合金以及介電材料亦具多種困難:舉例而言,介電材料通常易碎且無法應用於成本較低之捲對捲製程,而金屬及金屬合金會在陰極材料之高溫處理期間發生氧化。為克服上述困難,US 2010/0104942 A1提出一種由不同之金屬或矽構成的基板,其中相互結合之材料的氧化還原電位彼此匹配,從而引發可控氧化。 On the other hand, US 2010/0104942 A1 lists only substrates made of the following materials as usable substrate materials: metals and metal alloys having a high melting point, and dielectric materials such as high-temperature quartz, germanium wafers, and aluminum oxide. The reason for this is that when a cathode is produced by a lithium cobalt oxide (LCO) which is generally used, it is necessary to carry out heat treatment at a temperature of 400 ° C or higher, particularly at a temperature of 500 ° C or higher and higher, in order to store Li + ions. An excellent crystal structure is obtained in this material, so that a polymer or inorganic material having a lower softening temperature cannot be used. However, metals and metal alloys and dielectric materials also have various difficulties: for example, dielectric materials are often fragile and cannot be applied to lower cost roll-to-roll processes, while metals and metal alloys are used during high temperature processing of cathode materials. Oxidation occurs. In order to overcome the above difficulties, US 2010/0104942 A1 proposes a substrate composed of different metals or ruthenium in which the oxidation-reduction potentials of mutually bonded materials match each other, thereby causing controlled oxidation.

前述US 2010/0104942 A1所要求之較高的基板熱負荷強度亦在許多場合下有過討論。舉例而言,對處理條件進行調整後,亦能使用熱負荷強度為450℃或更低的基板。不過前提條件在於,使得基板被加熱以及/或者由O2與Ar構成之濺鍍氣體混合物 被最佳化以及/或者施加偏壓以及/或者在基板附近施加第二濺鍍電漿的沉積法。例如在US 2014/0030449 A1、Tintignac et al.,Journal of Power Sources 245(2014),76-82或者Ensling,D.,Photoelektronische Untersuchung der elektronischen Struktur dünner Lithiumkobaltoxidschichten,Dissertation,technische Universität Darmstadt 2006(Ensling,D.所著《鋰鈷氧化物薄膜之電子結構的光電子研究》,達木士塔工業大學2006年博士論文)中提出過相關資料。但一般而言,此類處理技術方面之調整措施較為昂貴,且視具體處理方式而言,特別是在對晶圓進行連續式塗佈的情況下,很難以合理之方式實現。 The higher substrate thermal load strengths required by the aforementioned US 2010/0104942 A1 are also discussed in many instances. For example, after adjusting the processing conditions, a substrate having a thermal load strength of 450 ° C or lower can also be used. Preconditions, however, are the deposition method in which the substrate is heated and/or the sputtering gas mixture consisting of O 2 and Ar is optimized and/or biased and/or a second sputtering plasma is applied in the vicinity of the substrate. For example, in US 2014/0030449 A1, Tintignac et al., Journal of Power Sources 245 (2014), 76-82 or Ensling, D., Photoelektronische Untersuchung der elektronischen Struktur dünner Lithiumkobaltoxidschichten, Dissertation, technische Universität Darmstadt 2006 (Ensling, D. He has published relevant materials in the "Photoelectron Research on the Electronic Structure of Lithium-Cobalt Oxide Thin Films", Da Shihta University of Technology, 2006 Ph.D. Thesis. However, in general, such processing technology adjustment measures are relatively expensive, and depending on the specific processing method, especially in the case of continuous coating of the wafer, it is difficult to achieve in a reasonable manner.

US 2012/0040211 A1描述一種用作基板之玻璃薄膜,其最大厚度為300μm,表面粗糙度不大於100Å。此種較小之粗糙度是必要的,因為薄膜蓄電元件之各層通常具有極小之層厚。即使較小的表面不平度亦可能使得薄膜蓄電元件之功能層發生嚴重故障從而造成電池整體失效。 US 2012/0040211 A1 describes a glass film used as a substrate having a maximum thickness of 300 μm and a surface roughness of not more than 100 Å. Such a small roughness is necessary because the layers of the thin film storage element usually have a very small layer thickness. Even small surface irregularities may cause severe failure of the functional layer of the thin film storage element, resulting in overall failure of the battery.

WO 2014062676 A1描述一種薄膜電池,其包括由玻璃或陶瓷構成之基板,在25至800℃時之熱膨脹係數為7至10ppm/K,採用該方案後,此種電池之陰極即使在陰極層之厚度增大時亦能實現特別是無裂紋之結構。但該案未指出基板粗糙度、基板透射特性及基板厚度變化。 WO 2014062676 A1 describes a thin film battery comprising a substrate made of glass or ceramic having a thermal expansion coefficient of 7 to 10 ppm/K at 25 to 800 ° C. With this solution, the cathode of such a battery is even at the thickness of the cathode layer. A particularly crack-free structure can also be achieved when increased. However, the case does not indicate substrate roughness, substrate transmission characteristics, and substrate thickness variation.

綜上所述,傳統薄膜蓄電元件之難題在於所用材料之易腐蝕性,特別是在使用金屬性鋰的情況下,會造成複雜之層結構從而增大成本,另一難題在於基板之類型,基板特別是應不導電、撓性、耐高溫以及針對蓄電元件之所用功能層而言具有極高惰性, 且能夠以良好之層間附著力將儘可能無缺陷之層沉積在基板上。然而實踐表明,即使用表面粗糙度極小之基板,如US 2012/0040211 A1所提出之玻璃薄膜,或者用WO 2014062676 A1之基板(其熱膨脹係數與陰極層相匹配),亦會因裂紋及/或層脫落而發生層失效現象,參閱US 2014/0030449 A1。但如前所述,前述之在製造鋰鈷氧化物層時透過施加偏壓來避免高退火溫度的做法,難以與常見之用於製造薄膜蓄電元件之線內處理相結合,因此,就處理技術而言較佳係使用耐高溫之基板。 In summary, the difficulty of the conventional thin film storage element is that the material used is corrosive, especially in the case of using metallic lithium, which causes a complicated layer structure to increase the cost, and another problem is the type of the substrate, the substrate. In particular, it should be non-conductive, flexible, resistant to high temperatures and extremely inert to the functional layers used for the storage elements. It is also possible to deposit as much defect-free layer as possible on the substrate with good interlayer adhesion. However, practice has shown that the use of substrates having a very low surface roughness, such as the glass film proposed in US 2012/0040211 A1, or the substrate of WO 2014062676 A1 (which has a coefficient of thermal expansion matching the cathode layer), may also be due to cracks and/or The layer is detached and layer failure occurs. See US 2014/0030449 A1. However, as described above, the above-mentioned method of avoiding a high annealing temperature by applying a bias voltage when manufacturing a lithium cobalt oxide layer is difficult to combine with the usual in-line processing for manufacturing a thin film electricity storage element, and therefore, the processing technique In general, it is preferred to use a substrate resistant to high temperatures.

就所有基板材料而言(無論其詳細組成如何)的另一難題在於,超薄玻璃之各種處理解決方案。所謂之「載體解決方案」在於,在塗佈製程或轉移工序前或者在塗佈製程或轉移工序期間將超薄玻璃暫時固定在一墊片上。可用靜電力或者使用某種可剝落之有機黏合材料來實現此點。特別是在採用此種有機黏合材料時,必須透過選擇基板或載體(二者通常由同一材料製成)來實現剝離,即基板與載體之分離。此種剝離通常會在基板中造成扭轉應力,其中此等應力亦可能傳遞至位於基板上的層,從而同樣會造成裂紋及/或層脫落,此種情況會加劇基板厚度波動所引發之層錯誤。 Another challenge with all substrate materials, regardless of their detailed composition, is the various processing solutions for ultra-thin glass. The so-called "carrier solution" consists in temporarily fixing the ultra-thin glass to a gasket before the coating process or the transfer process or during the coating process or the transfer process. This can be done with electrostatic force or with some peelable organic bonding material. In particular, when such an organic bonding material is employed, it is necessary to achieve peeling by selecting a substrate or a carrier (both of which are usually made of the same material), that is, separation of the substrate from the carrier. Such peeling typically causes torsional stresses in the substrate, where such stresses may also be transferred to the layers on the substrate, which may also cause cracks and/or delamination, which may exacerbate layer errors caused by substrate thickness fluctuations. .

本發明之目的在於提供一種在耐用及撓性方面有所改良之蓄電元件。本發明之另一態樣在於提供一種應用於蓄電系統中之碟形離散元件。 It is an object of the present invention to provide an electric storage device which is improved in durability and flexibility. Another aspect of the present invention is to provide a dish-shaped discrete component that is applied to a power storage system.

本發明用以達成上述目的之解決方案為一種具有申請專利範圍第21項之特徵的離散碟形元件。一種蓄電元件,特別是一種用以達成上述目的之薄膜蓄電元件,較佳包括申請專利範圍 第1項之特徵。 The solution of the present invention for achieving the above object is a discrete dish member having the features of claim 21 of the patent application. A storage element, in particular a thin film storage element for achieving the above object, preferably including a patent application scope The feature of item 1.

有鑒於此,本發明之目的在於提供一種蓄電元件,特別是薄膜蓄電元件,其克服當前之先前技術的缺陷並實現了薄膜蓄電元件之低成本製造。本發明之另一目的在於提供一種應用於蓄電元件中之碟形元件以及其製造和用途。 In view of the above, it is an object of the present invention to provide an electrical storage component, particularly a thin film electrical storage component, which overcomes the deficiencies of the prior art and achieves low cost manufacturing of the thin film electrical storage component. Another object of the present invention is to provide a dish-shaped member for use in an electric storage device and its manufacture and use.

本發明意外發現,透過如申請專利範圍第1項之蓄電系統以及如申請專利範圍第21項之碟形離散元件便能簡單地達成本發明之上述目的。 The present invention has surprisingly found that the above objects of the present invention can be easily achieved by the power storage system of claim 1 and the dish-shaped discrete elements of claim 21 of the patent application.

亦即,本發明意外發現,透過對該沉積之鋰鈷氧化物施加波長較佳為200至400nm之高能電磁輻射便能對鋰鈷氧化物(LCO)之相變產生積極影響。其原因在於,該鋰鈷氧化物在該範圍內進行大幅吸收並應用該能量來自立方最密堆積相變為六方最密堆積。眾所周知,LCO較佳具有較強之高溫改質,因其與立方LT相(80mAh/g)相比,將更大的比電容輸入電量平衡(130至140mAh/g),參閱Ensling,D.,Dissertation,Technische Universität Darmstadt 2006。其中在有效之處理技術方面,較佳以穿過基板的方式對鋰鈷氧化物進行施加,因此,必須採用某種基板,其針對較佳處於200至400nm之波長範圍內的高能電磁輻射具有高透明度。 That is, the present inventors have unexpectedly discovered that a high-energy electromagnetic radiation having a wavelength of preferably 200 to 400 nm can be applied to the deposited lithium cobalt oxide to positively affect the phase transition of lithium cobalt oxide (LCO). The reason for this is that the lithium cobalt oxide is greatly absorbed in this range and the energy is applied from the cubic closest packed phase to the hexagonal closest packing. As we all know, LCO preferably has a strong high temperature modification, because it will balance the specific capacitance input (130 to 140 mAh/g) compared with the cubic LT phase (80 mAh/g), see Ensling, D., Dissertation, Technische Universität Darmstadt 2006. Among them, in terms of effective processing technology, it is preferred to apply lithium cobalt oxide through the substrate. Therefore, it is necessary to use a substrate which has high high-energy electromagnetic radiation preferably in the wavelength range of 200 to 400 nm. transparency.

根據本發明,此種針對高能電輻射具有高透明度的基板由一碟形離散元件構成。 According to the invention, such a substrate having high transparency for high energy electrical radiation consists of a dish-shaped discrete element.

本申請案中之碟形係指某種模製體,該元件之沿一空間方向之延伸度小於沿另兩個空間方向之延伸度至少一個數量級。本申請案中之離散係指某種模製體,其可與該蓄電系統分離,亦即,其特定言之亦可單獨存在。 The dish shape in this application refers to a molded body having an extent that extends in a spatial direction less than at least one order of magnitude along the other two spatial directions. Discrete in this application refers to a molded body that can be separated from the power storage system, that is, it can also exist alone.

此種構建於蓄電系統中之碟形離散元件的更多優點在於- 有效地將基板接合在載體上,因為通常所用之有機黏合材料因施加紫外光而固化,- 特別是在使用暫時連接之黏合材料的情況下,對剝離操作進行輔助,此點可防止在分離操作或複雜處理工藝過程中之有害處理造成層缺陷,以及- 聚合物之固化,從而提供某種封裝,以免氧及/或氫與蓄電元件之高反應性之層發生接觸,參閱DE 10 2012 206 273 A1。 A further advantage of such a dish-shaped discrete component constructed in a power storage system is that it effectively bonds the substrate to the carrier because the organic bonding material typically used is cured by the application of ultraviolet light, especially in the case of bonding using temporary bonding. In the case of materials, the stripping operation is assisted, which prevents layer defects from being detrimental during the separation operation or complex processing, and - curing of the polymer, thereby providing a package to protect against oxygen and/or hydrogen Contact with a highly reactive layer of the storage element is described in DE 10 2012 206 273 A1.

其中,較佳使用高能光學能源,如準分子雷射器來進行光學處理即用高能電磁輻射對該蓄電元件進行處理。 Among them, it is preferable to use a high-energy optical energy source such as an excimer laser for optical processing, that is, to treat the storage element with high-energy electromagnetic radiation.

較佳地,該碟形離散元件之特徵在於在所謂之「準分子雷射器」之特有波長情況下具有高透明度。下面列出常見準分子雷射器及其特性波長: Preferably, the dish-shaped discrete element is characterized by high transparency in the case of a characteristic wavelength of a so-called "excimer laser". Listed below are common excimer lasers and their characteristic wavelengths:

不過亦可採用傳統紫外燈(如汞汽燈)為紫外源。 However, conventional ultraviolet lamps (such as mercury vapor lamps) can also be used as the ultraviolet source.

本發明之碟形元件之相對所用晶圓或基板大小而言的總厚度變化(total thickness variation,ttv)為<25μm,較佳<15μm,尤佳<10μm,最佳<5μm,相對特別是在100mm.100mm之橫向尺寸時之>100mm直徑之範圍的該晶圓或基板大小而言,較佳 相對特別是在200mm.200mm之橫向尺寸時之>200mm直徑之範圍的該晶圓或基板大小而言,尤佳相對特別是在400mm.400mm之橫向尺寸時之>400mm直徑之範圍的該晶圓或基板大小而言。亦即,該資料通常針對的是>100mm直徑及100mm.100mm尺寸,較佳>200mm直徑及200mm.200mm尺寸,尤佳>400mm直徑及400mm.400mm尺寸,的晶圓或基板大小。 The total thickness variation (ttv) of the dish-shaped component of the present invention relative to the wafer or substrate size used is <25 μm, preferably <15 μm, preferably <10 μm, optimally <5 μm, relatively especially in 100mm. Preferably, the wafer or substrate size in the range of >100 mm diameter at a lateral dimension of 100 mm is preferred Relatively at 200mm. The wafer or substrate size in the range of >200 mm diameter at a lateral dimension of 200 mm is particularly preferred at 400 mm. The wafer or substrate size in the range of >400 mm diameter at a lateral dimension of 400 mm. That is, the information is usually for >100mm diameter and 100mm. 100mm size, preferably >200mm diameter and 200mm. 200mm size, especially good > 400mm diameter and 400mm. 400mm size, wafer or substrate size.

本發明之碟形離散元件之厚度不大於2mm,較佳小於1mm,更佳小於500μm,尤佳小於等於200μm。基板厚度最佳為小於等於100μm。 The thickness of the dish-shaped discrete element of the present invention is not more than 2 mm, preferably less than 1 mm, more preferably less than 500 μm, and even more preferably less than or equal to 200 μm. The thickness of the substrate is preferably 100 μm or less.

例如可直接製造期望厚度之碟形離散元件。亦可透過以下方式實現目標厚度:在製造或進一步處理完畢後的一工序中,(例如)藉由研磨、蝕刻及拋光中的一或多個工藝將較厚之碟形離散元件薄化。 For example, disc-shaped discrete components of a desired thickness can be fabricated directly. The target thickness can also be achieved by thinning the thicker dish-shaped discrete components, for example, by one or more of grinding, etching, and polishing, in a process after fabrication or further processing.

根據本發明的一種實施方式,該碟形離散元件之水蒸氣穿透率(WVTR)為<10-3g/(m2.d),較佳<10-5g/(m2.d),尤佳<10-6g/(m2.d)。 According to an embodiment of the present invention, the dish-shaped discrete element has a water vapor transmission rate (WVTR) of <10 -3 g/(m 2 .d), preferably <10 -5 g/(m 2 .d). , especially better <10 -6 g / (m 2 .d).

根據本發明的另一實施方式,在350℃且頻率為50Hz之交流電的條件下,該比電阻大於1.0.106Ohmcm。 According to another embodiment of the present invention, the specific resistance is greater than 1.0.10 6 Ohmcm under the condition of an alternating current of 350 ° C and a frequency of 50 Hz.

該碟形離散元件之另一特徵在於至少300℃、較佳至少400℃,尤佳至少500℃的最大耐熱性,以及在於2.0.10-6/K至10.10-6/K,較佳2.5.10-6/K至9.5.10-6/K,尤佳3.0.10-6/K至9.5.10-6/K的線性熱膨脹係數α。實踐表明,可透過以下方式來在薄膜蓄電元件中獲得極佳之層品質:最大負荷溫度θMax(單位為℃)與線性熱膨脹係數α間存在以下關係式: 600.10-6 θMax.α8000.10-6,尤佳800.10-6 θMax.α5000.10-6Another feature of the dish-shaped discrete element is a maximum heat resistance of at least 300 ° C, preferably at least 400 ° C, particularly preferably at least 500 ° C, and is in the range of 2.0.10 -6 /K to 10.10 -6 /K, preferably 2.5.10 -6 /K to 9.5.10 -6 /K, especially 3.0.10 -6 /K to 9.5.10 -6 /K linear thermal expansion coefficient α. Practice has shown that excellent layer quality can be obtained in thin film storage elements by the following relationship: the maximum load temperature θ Max (in °C) and the linear thermal expansion coefficient α have the following relationship: 600.10 -6 θ Max . α 8000.10 -6 , especially good 800.10 -6 θ Max . α 5000.10 -6 .

若非特別說明,該線性熱膨脹係數α係在20至300℃之範圍內給出。本申請案中,α與α(20-300)該二名稱通用。所給出之值係指依據ISO 7991以靜態量測測得之額定平均線性熱膨脹係數。 Unless otherwise specified, the coefficient of linear thermal expansion α is given in the range of 20 to 300 °C. In the present application, α and α (20-300) are common to the two names. The values given refer to the nominal average linear thermal expansion coefficient measured by static measurement according to ISO 7991.

在該用途中,最大負荷溫度θMax係指某個溫度,在該溫度下,該材料尚能完全維持其形狀穩定性且尚未發生分解反應及/或降解反應。當然,該溫度亦可視所用材料而採用不同的定義。就氧化物晶體材料而言,該最大負荷溫度通常由熔化溫度給出;就玻璃而言,則通常為玻璃態化溫度Tg,其中有機玻璃之分解溫度亦可低於Tg,就金屬或金屬合金而言,該最大負荷溫度可近似地由熔化溫度給出,除非該金屬或金屬合金在該熔化溫度以下發生降解反應。 In this application, the maximum load temperature θ Max refers to a temperature at which the material can still maintain its shape stability completely and no decomposition reaction and/or degradation reaction has taken place. Of course, this temperature can also be defined differently depending on the materials used. In the case of oxide crystal materials, the maximum load temperature is usually given by the melting temperature; in the case of glass, it is usually the glass transition temperature T g , wherein the decomposition temperature of the plexiglass can also be lower than T g , in terms of metal or In the case of a metal alloy, the maximum load temperature can be approximated by the melting temperature unless the metal or metal alloy undergoes a degradation reaction below the melting temperature.

該轉變溫度Tg由以5K/分鐘之加熱速率所量測之延伸曲線的該二分枝上之切線的交點給出。此處係依據ISO 7884-8或DIN 52324進行量測。 The transition temperature T g is given by the intersection of the tangent on the two branches of the extension curve measured at a heating rate of 5 K/min. This is measured according to ISO 7884-8 or DIN 52324.

本發明之碟形元件由至少一氧化物或者由若干氧化物之混合物或化合物構成。 The dish-shaped element of the present invention is composed of at least one oxide or a mixture or compound of several oxides.

根據本發明的另一實施方式,該至少一氧化物係指SiO2According to another embodiment of the invention, the at least one oxide refers to SiO 2 .

根據本發明的另一實施方式,該碟形元件由玻璃構成。本申請案中之玻璃係指某種材料,其大體採用無機結構且主要由金屬及/或半金屬之化合物構成,其包含元素週期表之VA、VIA及VIIA族的元素,但較佳包含氧,該材料之特徵在於無定形,即 非週期性排列之三維狀態以及大於1.0.106Ohmcm之比電阻。因此,特別是用作固體離子導體之無定形材料LiPON不適合作為本申請案中之玻璃。 According to another embodiment of the invention, the dish-shaped element is composed of glass. The glass in the present application refers to a material which generally adopts an inorganic structure and is mainly composed of a metal and/or a semimetal compound, and contains elements of the group VA, VIA and VIIA of the periodic table, but preferably contains oxygen. The material is characterized by an amorphous shape, that is, a three-dimensional state of non-periodic alignment and a specific resistance greater than 1.0.10 6 Ohmcm. Therefore, LiPON, which is especially used as a solid ion conductor, is not suitable for the glass in the present application.

根據本發明的另一實施方式,藉由熔化工藝來獲取本發明之碟形元件。 According to another embodiment of the present invention, the dish-shaped member of the present invention is obtained by a melting process.

較佳藉由該熔化工藝完畢後之成形工藝來使得該碟形元件呈碟形。其中,該成形可緊隨熔化工藝進行(所謂之「熱成形」)。亦可首先獲得一大體無定形之窗口,再於下一步驟中藉由再次加熱及機械變形來將其轉變為碟形。 Preferably, the dish-shaped member has a dish shape by a forming process after the melting process is completed. Among them, the forming can be carried out immediately following the melting process (so-called "hot forming"). It is also possible to first obtain a substantially amorphous window, which is then converted into a dish by reheating and mechanical deformation in the next step.

根據本發明的一種實施方式,透過熱成形工藝來對該碟形元件進行成形時,係採用拉伸法,如下拉法、上拉法或溢流熔融法。亦可採用其他熱成形工藝,例如以浮法工藝進行成形。 According to an embodiment of the present invention, when the dish member is formed by a thermoforming process, a stretching method such as a pulling method, a pull-up method or an overflow melting method is employed. Other thermoforming processes can also be employed, such as forming in a float process.

實例 Instance

下表列出本發明之碟形元件的部分示例性組成。 The following table lists some exemplary compositions of the dish-shaped elements of the present invention.

實施例1 Example 1

該碟形離散元件之組成示例性地由以下組成給出(單位為wt%): The composition of the dish-shaped discrete elements is exemplarily given by the following composition (in wt%):

實施例2 Example 2

該碟形離散元件之組成示例性地亦由以下組成給出(單位為wt%): 其中,MgO、CaO與BaO含量之和為8至18wt%。 The composition of the dish-shaped discrete elements is also exemplarily given by the following composition (in wt%): Wherein, the sum of the contents of MgO, CaO and BaO is 8 to 18% by weight.

實施例3 Example 3

該碟形離散元件之組成示例性地亦由以下組成給出(單位為wt%): The composition of the dish-shaped discrete elements is also exemplarily given by the following composition (in wt%):

實施例4 Example 4

一種碟形離散元件,示例性地亦由以下組成給出(單位為wt%): A dish-shaped discrete element, exemplarily also given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例5 Example 5

另一碟形離散元件,示例性地由以下組成給出(單位為wt%): Another dish-shaped discrete element is exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例6 Example 6

另一碟形離散元件,示例性地由以下組成給出(單位為wt%): Another dish-shaped discrete element is exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例7 Example 7

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例8 Example 8

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例9 Example 9

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例10 Example 10

另一碟形離散元件,示例性地由以下組成給出(單位為wt%): Another dish-shaped discrete element is exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例11 Example 11

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例12 Example 12

另一碟形離散元件,示例性地由以下組成給出(單位為wt%): Another dish-shaped discrete element is exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例13 Example 13

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

該玻璃中亦可含有0至1wt%之:P2O5、SrO、BaO;以及0至1wt%之精製劑:SnO2、CeO2或As2O3或者其他精製劑。 The glass may also contain 0 to 1% by weight: P 2 O 5 , SrO, BaO; and 0 to 1% by weight of a refined preparation: SnO 2 , CeO 2 or As 2 O 3 or other refined preparations.

實施例14 Example 14

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

實施例15 Example 15

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例16 Example 16

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例17 Example 17

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例18 Example 18

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例19 Example 19

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

實施例20 Example 20

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例21 Example 21

又一碟形離散元件,示例性地由以下組成給出(單位為wt%): A further dish-shaped discrete element, exemplarily given by the following composition (in wt%):

採用上述組成後,該碟形離散元件獲得以下特性: With the above composition, the dish-shaped discrete component obtains the following characteristics:

實施例22 Example 22

除非另有說明,所有上述實施例中可選地可含有0至1wt%之精製劑,如SnO2、CeO2、As2O3、硫酸氯、硫酸氟。 All of the above examples may optionally contain from 0 to 1% by weight of a refining agent, such as SnO 2 , CeO 2 , As 2 O 3 , chlorine sulfate, sulfuric acid fluoride, unless otherwise stated.

1‧‧‧蓄電系統 1‧‧‧Power storage system

2‧‧‧應用為基板之碟形離散元件 2‧‧‧ Application as a dish-shaped discrete component of the substrate

3‧‧‧用於陰極之集流體層 3‧‧‧Case layer for the cathode

4‧‧‧用於陽極之集流體層 4‧‧‧ Current collector layer for anode

5‧‧‧陰極 5‧‧‧ cathode

6‧‧‧電解質 6‧‧‧ Electrolytes

7‧‧‧陽極 7‧‧‧Anode

8‧‧‧封裝層 8‧‧‧Encapsulation layer

10‧‧‧實施為碟形模製體之碟形離散元件 10‧‧‧ Implemented as a dish-shaped discrete component of a dish-shaped molded body

圖1示出本發明之蓄電系統1。其包括用作基板之碟形離散元件2。該基板上鍍覆有不同層之序列。示例性但並非僅限於本實例地,首先往該碟形離散元件2鍍覆該二用於陰極3及用於陽極4之集流體層。該等集流體層之厚度通常為數微米且係由金屬,如銅、鋁或鈦構成。集流體層3上沉積有陰極層5。在該蓄電系統1為基於鋰之薄膜電池的情況下,該陰極由鋰過渡金屬化合物,較佳由其氧化物構成,如由LiCoO2、LiMnO2或LiFePO4構成。此外在該基板上以與陰極層5至少部分重疊的方式鍍覆有電解質6,其中在設有基於鋰之薄膜電池之情形下,該電解質通常為LiPON,即鋰與氧、磷及氮的化合物。該蓄電系統1還包括陽極7,其例如可指鋰鈦氧化物或金屬性鋰。陽極層7至少部分地與電解質層6以及與集流體層4重疊。電池1還包括封裝層8。 Fig. 1 shows a power storage system 1 of the present invention. It comprises a dish-shaped discrete element 2 used as a substrate. The substrate is plated with sequences of different layers. By way of example and not limitation, the dish-shaped discrete element 2 is first plated with the two collector layers for the cathode 3 and for the anode 4. The current collector layers are typically several microns thick and are composed of a metal such as copper, aluminum or titanium. A cathode layer 5 is deposited on the current collector layer 3. In the case where the power storage system 1 is a lithium-based thin film battery, the cathode is composed of a lithium transition metal compound, preferably an oxide thereof, such as LiCoO 2 , LiMnO 2 or LiFePO 4 . Further, an electrolyte 6 is plated on the substrate at least partially overlapping the cathode layer 5, wherein in the case of a lithium-based thin film battery, the electrolyte is usually LiPON, that is, a compound of lithium and oxygen, phosphorus and nitrogen. . The power storage system 1 further includes an anode 7, which may be, for example, a lithium titanium oxide or a metallic lithium. The anode layer 7 at least partially overlaps the electrolyte layer 6 and the current collector layer 4. The battery 1 also includes an encapsulation layer 8.

在本發明中,蓄電系統1之封裝或密封係指某種材料,其阻止或大幅減輕流體或其他腐蝕材料對該蓄電系統1之腐蝕作用。 In the present invention, the encapsulation or sealing of the electrical storage system 1 refers to a material that prevents or substantially mitigates the corrosive effects of fluids or other corrosive materials on the electrical storage system 1.

圖2為本發明之碟形離散元件的視圖,其在此構建為碟形模製體10。根據本發明,呈碟形或圓盤之模製體表示以下情形:其沿一 空間方向之延伸度最大為沿另兩個空間方向之延伸度的一半。根據本發明,呈帶狀之模製體表示以下情形:其長度、寬度與厚度間存在以下關係式:長度至少十倍於寬度,寬度至少雙倍於厚度。 2 is a view of the dish-shaped discrete element of the present invention, which is constructed here as a dish-shaped molded body 10. According to the present invention, a molded body in the form of a dish or a disk represents the following case: The extent of the spatial direction is at most half the extent along the other two spatial directions. According to the present invention, the molded body in the form of a belt represents a case where the relationship between the length, the width and the thickness exists at least ten times the width and the width is at least twice the thickness.

圖3為本發明之碟形離散元件採用實施例4所述組成時的示例性透射曲線,係採用三個不同厚度。波長較大時,出現顯著的干擾作用,其係量測技術相關,因而未呈現該離散碟形元件之特性。 Figure 3 is an exemplary transmission curve of the disc-shaped discrete component of the present invention in the composition of Example 4, using three different thicknesses. When the wavelength is large, a significant interference effect occurs, which is related to the measurement technique, and thus the characteristics of the discrete dish-shaped element are not exhibited.

圖4為Schott股份公司之BOROFLOAT®33型玻璃的三個不同厚度之透射曲線。該玻璃之組成方式與實施例7相符。 Figure 4 shows the transmission curves for three different thicknesses of Schott AG's BOROFLOAT® 33 glass. The composition of the glass was in accordance with Example 7.

圖5為本發明之另一碟形離散元件採用實施例5所述組成時的透射資料,係採用三個不同厚度。波長較大時,出現顯著的干擾作用,其係量測技術相關,因而未呈現該離散碟形元件之特性。 Figure 5 is a transmission data of another disc-shaped discrete component of the present invention in the composition described in Example 5, using three different thicknesses. When the wavelength is large, a significant interference effect occurs, which is related to the measurement technique, and thus the characteristics of the discrete dish-shaped element are not exhibited.

圖6為本發明之另一碟形離散元件採用實施例6所述組成時的透射資料,係採用兩個不同厚度。波長較大時,出現顯著的干擾作用,其係量測技術相關,因而未呈現該離散碟形元件之特性。此外就厚度為30μm之該碟形離散元件而言,產生了製備相關之表面缺陷,其就量測技術而言提高了散射比例從而降低了該碟形離散元件之圖示的透射,該透射特別是在大於約250nm之波長時起作用。因此,此等製備相關之缺陷未呈現該離散碟形元件之特性。 Figure 6 is a transmission data of another disc-shaped discrete component of the present invention in the composition described in Example 6, using two different thicknesses. When the wavelength is large, a significant interference effect occurs, which is related to the measurement technique, and thus the characteristics of the discrete dish-shaped element are not exhibited. Furthermore, in the case of the dish-shaped discrete element having a thickness of 30 μm, a preparation-related surface defect is produced, which increases the scattering ratio in terms of measurement technology and reduces the transmission of the dish-shaped discrete element, which is particularly It works at wavelengths greater than about 250 nm. Therefore, such preparation-related defects do not exhibit the characteristics of the discrete dish-shaped element.

圖7為本發明之另一碟形離散元件採用實施例10所述組成時的透射資料,係採用兩個不同厚度。在低於400nm之波長範圍內,在該透射曲線中出現螢光效果,其原因或許在於該碟形離散元件之組成中所含的Ce。 Figure 7 is a transmission data of another disc-shaped discrete component of the present invention in the composition of the embodiment 10, using two different thicknesses. In the wavelength range below 400 nm, a fluorescent effect appears in the transmission curve, possibly due to the Ce contained in the composition of the dish-shaped discrete elements.

圖8為本發明之另一碟形離散元件採用實施例12所述組成時的透射資料,係採用兩個不同厚度。 Figure 8 is a transmission data of another disc-shaped discrete component of the present invention in the composition of the embodiment 12, using two different thicknesses.

本發明揭示一種具有至少一碟形離散元件之蓄電系統,該至少一碟形離散元件特別是在30μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射,以及特別是在100μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於0.1%之透射,尤佳在308nm時具有大於30%之透射,且尤佳在351nm時具有大於88%之透射。 The present invention discloses a power storage system having at least one dish-shaped discrete element, which has a transmission of 0.1% or more in the range of 200 nm to 270 nm, particularly at a thickness of 30 μm, and/or preferably More than 0.5% transmission at 222 nm, more preferably greater than 0.3% transmission at 248 nm, more preferably greater than 3% transmission at 282 nm, more preferably greater than 50% transmission at 308 nm, and particularly preferably at 351 nm Having a transmission of greater than 88%, and especially at a thickness of 100 μm, having a transmission of 0.1% or more in the range of 200 nm to 270 nm and/or preferably having a transmission of more than 0.5% at 222 nm, particularly preferably at 248 nm It has a transmission greater than 0.3%, more preferably greater than 0.1% at 282 nm, more preferably greater than 30% transmission at 308 nm, and more preferably greater than 88% transmission at 351 nm.

以及一種包括至少一碟形離散元件之蓄電系統,該至少一碟形離散元件特別是在30μm之厚度時,在200nm至270nm之範圍內具有15%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射。 And a power storage system comprising at least one dish-shaped discrete element, particularly at a thickness of 30 μm, having a transmission of 15% or more in the range of 200 nm to 270 nm and/or particularly preferably at 222 nm Having a transmission of greater than 0.5%, more preferably greater than 0.3% at 248 nm, more preferably greater than 3% at 282 nm, more preferably greater than 50% transmission at 308 nm, and particularly preferably at 351 nm Greater than 88% transmission.

以及一種包括至少一碟形離散元件之蓄電系統,其中,該至少一碟形離散元件的厚度變化不大於25μm,較佳不大於15μm,尤佳不大於10μm,最佳不大於5μm,相對特別是在100mm.100mm之橫向尺寸時之>100mm直徑之範圍的該晶圓或基板大小而言,較佳相對特別是在200mm.200mm之橫向尺寸時之>200mm直徑之範圍的該晶圓或基板大小而言,尤佳相對特別是在400 mm.400mm之橫向尺寸時之>400mm直徑之範圍的該晶圓或基板大小而言。 And a power storage system including at least one dish-shaped discrete component, wherein the at least one dish-shaped discrete component has a thickness variation of not more than 25 μm, preferably not more than 15 μm, particularly preferably not more than 10 μm, and most preferably not more than 5 μm, and particularly At 100mm. The wafer or substrate size in the range of >100 mm diameter at a lateral dimension of 100 mm is preferably relatively 200 mm. The wafer or substrate size in the range of >200 mm diameter at a lateral dimension of 200 mm is particularly preferred at 400 Mm. The wafer or substrate size in the range of >400 mm diameter at a lateral dimension of 400 mm.

以及一種蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之水蒸氣穿透率(WVTR)為<10-3g/(m2.d),較佳<10-5g/(m2.d),尤佳<10-6g/(m2.d)。 And a power storage system comprising at least one dish-shaped discrete component, wherein the at least one dish-shaped discrete component has a water vapor transmission rate (WVTR) of <10 -3 g/(m 2 .d), preferably <10 - 5 g / (m 2 .d), especially preferably <10 -6 g / (m 2 .d).

以及一種蓄電系統,其中,該碟形離散元件之厚度小於2mm,較佳小於1mm,更佳小於500μm,尤佳小於等於200μm,最佳為小於等於100μm。 And a power storage system, wherein the dish-shaped discrete element has a thickness of less than 2 mm, preferably less than 1 mm, more preferably less than 500 μm, particularly preferably less than or equal to 200 μm, and most preferably less than or equal to 100 μm.

以及一種蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之比電阻在350℃且頻率為50Hz之交流電的條件下,大於1.0.106Ohmcm。 And a power storage system comprising at least one dish-shaped discrete component, wherein the at least one dish-shaped discrete component has a specific resistance greater than 1.0.10 6 Ohmcm at 350 ° C and an alternating current of 50 Hz.

以及一種蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之最大負荷溫度θMax為至少300℃、較佳至少400℃,尤佳至少500℃。 And an electric storage system, comprising at least one disc discrete elements, wherein the at least a maximum load temperature θ of discrete elements Max disc is at least 300 ℃, preferably at least 400 ℃, plus at least 500 ℃.

以及一種蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之線性熱膨脹係數α為2.0.10-6/K至10.10-6/K,較佳為2.5.10-6/K至9.5.10-6/K,尤佳為3.0.10-6/K至9.5.10-6/K。 And a power storage system comprising at least one dish-shaped discrete component, wherein the at least one dish-shaped discrete component has a linear thermal expansion coefficient α of 2.0.10 -6 /K to 10.10 -6 /K, preferably 2.5.10 -6 /K to 9.5.10 -6 /K, especially preferably 3.0.10 -6 /K to 9.5.10 -6 /K.

以及一種蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之最大負荷溫度θMax(單位為℃)與線性熱膨脹係數α之乘積符合以下關係式:600.10-6 θMax.α8000.10-6,尤佳800.10-6 θMax.α5000.10-6And a power storage system comprising at least one dish-shaped discrete component, wherein a product of a maximum load temperature θ Max (in ° C) and a linear thermal expansion coefficient α of the at least one dish-shaped discrete component conforms to the following relationship: 600.10 -6 θ Max . α 8000.10 -6 , especially good 800.10 -6 θ Max . α 5000.10-6.

以及一種蓄電系統,其中,該至少一碟形離散元件包 括至少一氧化物或者多個氧化物之混合物或化合物。 And a power storage system, wherein the at least one dish-shaped discrete component package A mixture or compound of at least one oxide or a plurality of oxides is included.

以及一種蓄電系統,其中,該至少一碟形離散元件含有作為氧化物之SiO2And a power storage system, wherein the at least one dish-shaped discrete element contains SiO 2 as an oxide.

以及一種蓄電系統,其中,該至少一碟形離散元件以玻璃的形式存在。 And a power storage system, wherein the at least one dish-shaped discrete element is in the form of glass.

以及一種蓄電系統,其中,該至少一碟形離散元件藉由熔化工藝與隨後之成形工藝而呈碟形。 And a power storage system, wherein the at least one dish-shaped discrete component is dished by a melting process and a subsequent forming process.

以及一種蓄電系統,其中,該隨後之成形工藝係指拉伸法。 And a power storage system, wherein the subsequent forming process refers to a stretching method.

以及一種蓄電系統,其中,該蓄電系統的至少一區域被施加較佳於200nm至400nm之波長範圍內的高能電磁輻射。 And a power storage system, wherein at least one region of the power storage system is applied with high-energy electromagnetic radiation preferably in a wavelength range of 200 nm to 400 nm.

以及一種蓄電系統,其中,該蓄電系統之被施加較佳於200nm至400nm之波長範圍內的高能電磁輻射之該至少一區域,係以穿過該碟形離散元件的方式被輸入該高能電磁輻射。 And a power storage system, wherein the at least one region of the power storage system to which high-energy electromagnetic radiation preferably in a wavelength range of 200 nm to 400 nm is applied is input through the dish-shaped discrete element into the high-energy electromagnetic radiation .

以及一種蓄電系統,其中,該蓄電系統之被施加高能電磁輻射之該至少一區域包括鋰鈷氧化物(LCO)。 And a power storage system, wherein the at least one region of the power storage system to which high-energy electromagnetic radiation is applied includes lithium cobalt oxide (LCO).

以及一種蓄電系統,其中,在該蓄電系統之被施加高能電磁輻射之該至少一區域內,鋰鈷氧化物(LCO)就其結構特性而言受到影響。 And a power storage system in which lithium cobalt oxide (LCO) is affected in terms of its structural characteristics in at least one region of the power storage system to which high-energy electromagnetic radiation is applied.

以及一種蓄電系統,其中,在該蓄電系統之被施加高能電磁輻射之該至少一區域內,該鋰鈷氧化物(LCO)至少局部發生相變。 And a power storage system, wherein the lithium cobalt oxide (LCO) at least partially undergoes a phase change in the at least one region of the power storage system to which high-energy electromagnetic radiation is applied.

以及一種蓄電系統,其中,在該蓄電系統之被施加高能電磁輻射之該至少一區域內,該鋰鈷氧化物(LCO)之該至少局部 之相變包括自立方最密堆積朝六方最密堆積之相變。 And a power storage system, wherein the at least one portion of the lithium cobalt oxide (LCO) is in the at least one region of the power storage system to which high-energy electromagnetic radiation is applied The phase change includes a phase change from the closest packing of the cube to the closest packing of the six sides.

本發明亦揭示一種應用於蓄電系統中之碟形離散元件,其特別是在30μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射,以及特別是在100μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於0.1%之透射,尤佳在308nm時具有大於30%之透射,且尤佳在351nm時具有大於88%之透射。 The present invention also discloses a dish-shaped discrete component for use in a power storage system, which has a transmission of 0.1% or more in the range of 200 nm to 270 nm and/or more preferably 0.5 or more at 222 nm, particularly at a thickness of 30 μm. % transmission, particularly preferably greater than 0.3% transmission at 248 nm, more preferably greater than 3% transmission at 282 nm, more preferably greater than 50% transmission at 308 nm, and more preferably greater than 88% at 351 nm The transmission, and in particular at a thickness of 100 μm, has a transmission of 0.1% or more in the range of 200 nm to 270 nm and/or preferably has a transmission of more than 0.5% at 222 nm, more preferably more than 0.3% at 248 nm. The transmission preferably has a transmission of greater than 0.1% at 282 nm, more preferably greater than 30% transmission at 308 nm, and more preferably greater than 88% transmission at 351 nm.

以及一種應用於蓄電系統中之碟形離散元件,其特別是在30μm之厚度時,在200nm至270nm之範圍內具有15%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射。 And a dish-shaped discrete component for use in a power storage system, particularly having a transmission of 15% or more in the range of 200 nm to 270 nm at a thickness of 30 μm and/or a transmission of more than 0.5% particularly preferably at 222 nm More preferably, it has a transmission of greater than 0.3% at 248 nm, more preferably greater than 3% at 282 nm, more preferably greater than 50% transmission at 308 nm, and more preferably greater than 88% transmission at 351 nm.

以及一種應用於蓄電系統中之碟形離散元件,其厚度變化不大於25μm,較佳不大於15μm,尤佳不大於10μm,最佳不大於5μm,相對特別是在100mm.100mm之橫向尺寸時之>100mm直徑之範圍的該晶圓或基板大小而言,較佳相對特別是在200mm.200mm之橫向尺寸時之>200mm直徑之範圍的該晶圓或基板大小而言,尤佳相對特別是在400mm.400mm之橫向尺寸時之>400 mm直徑之範圍的該晶圓或基板大小而言。 And a dish-shaped discrete component applied to the power storage system, the thickness of which varies by no more than 25 μm, preferably no more than 15 μm, particularly preferably no more than 10 μm, and most preferably no more than 5 μm, relatively especially at 100 mm. The wafer or substrate size in the range of >100 mm diameter at a lateral dimension of 100 mm is preferably relatively 200 mm. The wafer or substrate size in the range of >200 mm diameter at a lateral dimension of 200 mm is particularly preferred at 400 mm. >400 in the horizontal dimension of 400mm The diameter of the mm is in the range of the wafer or substrate.

以及一種應用於蓄電系統中之碟形離散元件,其水蒸氣穿透率(WVTR)為<10-3g/(m2.d),較佳<10-5g/(m2.d),尤佳<10-6g/(m2.d)。 And a dish-shaped discrete component applied to a power storage system having a water vapor transmission rate (WVTR) of <10 -3 g/(m 2 .d), preferably <10 -5 g/(m 2 .d) , especially better <10 -6 g / (m 2 .d).

以及一種應用於蓄電系統中之碟形離散元件,其厚度小於2mm,較佳小於1mm,更佳小於500μm,尤佳小於等於200μm,最佳為小於等於100μm。 And a dish-shaped discrete component for use in a power storage system having a thickness of less than 2 mm, preferably less than 1 mm, more preferably less than 500 μm, particularly preferably less than or equal to 200 μm, and most preferably less than or equal to 100 μm.

以及一種應用於蓄電系統中之碟形離散元件,其比電阻在350℃且頻率為50Hz之交流電的條件下,大於1.0.106Ohmcm。 And a dish-shaped discrete component applied to the power storage system, which has a specific resistance of more than 1.0.10 6 Ohmcm under the condition of an alternating current of 350 ° C and a frequency of 50 Hz.

以及一種應用於蓄電系統中之碟形離散元件,其最大負荷溫度θMax為至少300℃、較佳至少400℃,尤佳至少500℃。 Applied to the power storage system and one disc of discrete elements, the maximum temperature θ Max load of at least 300 ℃, preferably at least 400 ℃, plus at least 500 ℃.

以及一種應用於蓄電系統中之碟形離散元件,其線性熱膨脹係數α為2.0.10-6/K至10.10-6/K,較佳為2.5.10-6/K至9.5.10-6/K,尤佳為3.0.10-6/K至9.5.10-6/K。 And a dish-shaped discrete component applied to the power storage system, wherein the linear thermal expansion coefficient α is 2.0.10 -6 /K to 10.10 -6 /K, preferably 2.5.10 -6 /K to 9.5.10 - 6 / K, particularly preferably 3.0.10 -6 / K to 9.5.10 -6 / K.

以及一種應用於蓄電系統中之碟形離散元件,其中,該至少一碟形離散元件之最大負荷溫度θMax(單位為℃)與線性熱膨脹係數α之乘積符合以下關係式:600.10-6 θMax.α8000.10-6,尤佳800.10-6 θMax.α5000.10-6And a dish-shaped discrete component applied to the power storage system, wherein a product of a maximum load temperature θ Max (in ° C) and a linear thermal expansion coefficient α of the at least one dish-shaped discrete component conforms to the following relationship: 600.10 -6 θ Max . α 8000.10 -6 , especially good 800.10 -6 θ Max . α 5000.10 -6 .

以及一種應用於蓄電系統中之碟形離散元件,其中,該碟形離散元件包括至少一氧化物或者多個氧化物之混合物或化合物。 And a dish-shaped discrete element for use in a power storage system, wherein the dish-shaped discrete element comprises at least one oxide or a mixture or compound of a plurality of oxides.

以及一種應用於蓄電系統中之碟形離散元件,其中,該至少一氧化物為SiO2And a dish-shaped discrete element applied to a power storage system, wherein the at least one oxide is SiO 2 .

以及一種應用於蓄電系統中之碟形離散元件,其中,該元件由玻璃構成。 And a dish-shaped discrete component applied to a power storage system, wherein the component is composed of glass.

以及一種碟形離散元件,其中,該元件藉由熔化工藝與隨後之成形工藝而呈碟形。 And a dish-shaped discrete component, wherein the component is dished by a melting process and a subsequent forming process.

以及一種碟形離散元件,其中,該隨後之成形工藝包括拉伸法。 And a dish-shaped discrete element, wherein the subsequent forming process comprises a stretching method.

在更厚或更薄之離散碟形元件換算為30μm之厚度後亦能實現獨立項之值的情況下,該等更厚或更薄之離散碟形元件亦落入本發明之範圍。為確定更厚之基板是否處於發明保護範圍內,可將其薄化至30μm之厚度。 Such thicker or thinner discrete dish-shaped elements are also within the scope of the invention in the case where a thicker or thinner discrete dish-shaped element can also achieve a value of an independent term after being converted to a thickness of 30 μm. To determine if a thicker substrate is within the scope of the invention, it can be thinned to a thickness of 30 μm.

可藉由疊層及必要之薄化工藝來使得更薄之離散元件亦具30μm之厚度,如此便能除換算外亦對透射進行物理學量測,以便確定此等更薄之基板是否處於發明保護範圍內。 The thinner discrete components can also be made to have a thickness of 30 μm by lamination and the necessary thinning process, so that the transmission can be physically measured in addition to the conversion to determine whether such thinner substrates are invented. Within the scope of protection.

1‧‧‧蓄電系統 1‧‧‧Power storage system

2‧‧‧應用為基板之碟形離散元件 2‧‧‧ Application as a dish-shaped discrete component of the substrate

3‧‧‧用於陰極之集流體層 3‧‧‧Case layer for the cathode

4‧‧‧用於陽極之集流體層 4‧‧‧ Current collector layer for anode

5‧‧‧陰極 5‧‧‧ cathode

6‧‧‧電解質 6‧‧‧ Electrolytes

7‧‧‧陽極 7‧‧‧Anode

8‧‧‧封裝層 8‧‧‧Encapsulation layer

Claims (34)

一種具有至少一碟形離散元件之蓄電系統,該至少一碟形離散元件特別是在30μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射,以及特別是在100μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於0.1%之透射,尤佳在308nm時具有大於30%之透射,且尤佳在351nm時具有大於88%之透射。 A power storage system having at least one dish-shaped discrete element, in particular having a thickness of 30 μm, having a transmission of 0.1% or more in the range of 200 nm to 270 nm and/or preferably having a thickness of 222 nm More than 0.5% transmission, particularly preferably greater than 0.3% transmission at 248 nm, more preferably greater than 3% transmission at 282 nm, more preferably greater than 50% transmission at 308 nm, and more preferably greater than 351 nm at 351 nm 88% transmission, and especially at a thickness of 100 μm, having a transmission of 0.1% or more in the range of 200 nm to 270 nm and/or preferably having a transmission of more than 0.5% at 222 nm, more preferably greater than 248 nm. A transmission of 0.3%, particularly preferably greater than 0.1% at 282 nm, particularly preferably greater than 30% at 308 nm, and more preferably greater than 88% at 351 nm. 如申請專利範圍第1項之具有至少一碟形離散元件之蓄電系統,該至少一碟形離散元件特別是在30μm之厚度時,在200nm至270nm之範圍內具有15%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射。 A power storage system having at least one dish-shaped discrete element according to claim 1, wherein the at least one dish-shaped discrete element has a transmission of 15% or more in the range of 200 nm to 270 nm, particularly at a thickness of 30 μm. Or preferably more than 0.5% transmission at 222 nm, more preferably greater than 0.3% transmission at 248 nm, more preferably greater than 3% transmission at 282 nm, and more preferably greater than 50% transmission at 308 nm, and It is especially preferred to have a transmission of greater than 88% at 351 nm. 如前述申請專利範圍中任一項之蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件的厚度變化不大於25μm,較佳不大於15μm,尤佳不大於10μm,最佳不大於5μm,相對特別是在100mm.100mm之橫向尺寸時之>100mm直徑之範圍的該晶圓或基板大小而言,較佳相對特別是在200mm.200mm之橫向尺寸時之>200mm直徑之範圍的該晶圓或基板大小而言,尤佳相對 特別是在400mm.400mm之橫向尺寸時之>400mm直徑之範圍的該晶圓或基板大小而言。 A power storage system according to any one of the preceding claims, comprising at least one dish-shaped discrete element, wherein the at least one dish-shaped discrete element has a thickness variation of not more than 25 μm, preferably not more than 15 μm, particularly preferably not more than 10 μm, most Good is not more than 5μm, relatively especially at 100mm. The wafer or substrate size in the range of >100 mm diameter at a lateral dimension of 100 mm is preferably relatively 200 mm. The relative size of the wafer or substrate in the range of >200 mm diameter in the transverse dimension of 200 mm, especially relative Especially at 400mm. The wafer or substrate size in the range of >400 mm diameter at a lateral dimension of 400 mm. 如前述申請專利範圍中任一項之蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之水蒸氣穿透率(WVTR)為<10-3g/(m2.d),較佳<10-5g/(m2.d),尤佳<10-6g/(m2.d)。 A power storage system according to any one of the preceding claims, comprising at least one dish-shaped discrete element, wherein the at least one dish-shaped discrete element has a water vapor transmission rate (WVTR) of <10 -3 g/(m 2 . d), preferably <10 -5 g/(m 2 .d), especially preferably <10 -6 g/(m 2 .d). 如前述申請專利範圍中任一項之蓄電系統,其中,該碟形離散元件之厚度小於2mm,較佳小於1mm,更佳小於500μm,尤佳小於等於200μm,最佳為小於等於100μm。 A power storage system according to any one of the preceding claims, wherein the dish-shaped discrete element has a thickness of less than 2 mm, preferably less than 1 mm, more preferably less than 500 μm, particularly preferably less than or equal to 200 μm, most preferably less than or equal to 100 μm. 如前述申請專利範圍中任一項之蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之比電阻在350℃且頻率為50Hz之交流電的條件下,大於1.0.106Ohmcm。 A power storage system according to any one of the preceding claims, comprising at least one dish-shaped discrete component, wherein the at least one dish-shaped discrete component has a specific resistance greater than 1.0.10 at 350 ° C and a frequency of 50 Hz alternating current. 6 Ohmcm. 如前述申請專利範圍中任一項之蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之最大負荷溫度θMax為至少300℃、較佳至少400℃,尤佳至少500℃。 A power storage system according to any one of the preceding claims, comprising at least one dish-shaped discrete element, wherein the at least one dish-shaped discrete element has a maximum load temperature θ Max of at least 300 ° C, preferably at least 400 ° C, and particularly preferably at least 500 ° C. 如前述申請專利範圍中任一項之蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之線性熱膨脹係數α為2.0.10-6/K至10.10-6/K,較佳為2.5.10-6/K至9.5.10-6/K,尤佳為3.0.10-6/K至9.5.10-6/K。 The aforementioned patent application in any range of a power storage system, comprising at least one disc discrete elements, wherein at least the linear thermal expansion coefficient α of the discrete elements of a disc 2.0.10 -6 / K to 10.10 -6 / K, preferably from 2.5.10 -6 /K to 9.5.10 -6 /K, particularly preferably from 3.0.10 -6 /K to 9.5.10 -6 /K. 如前述申請專利範圍中任一項之蓄電系統,包括至少一碟形離散元件,其中,該至少一碟形離散元件之最大負荷溫度θMax(單位為℃)與線性熱膨脹係數α之乘積符合以下關係式:600.10-6 θMax.α8000.10-6,尤佳800.10-6 θMax.α5000.10-6A power storage system according to any one of the preceding claims, comprising at least one dish-shaped discrete element, wherein a product of a maximum load temperature θ Max (in ° C) and a linear thermal expansion coefficient α of the at least one dish-shaped discrete element meets the following Relationship: 600.10 -6 θ Max . α 8000.10 -6 , especially good 800.10 -6 θ Max . α 5000.10 -6 . 如前述申請專利範圍中任一項之蓄電系統,其中,該至少一 碟形離散元件包括至少一氧化物或者多個氧化物之混合物或化合物。 A power storage system according to any one of the preceding claims, wherein the at least one The dish-shaped discrete elements comprise at least one oxide or a mixture or compound of a plurality of oxides. 如前述申請專利範圍中任一項之蓄電系統,其中,該至少一碟形離散元件含有作為氧化物之SiO2A power storage system according to any one of the preceding claims, wherein the at least one dish-shaped discrete element contains SiO 2 as an oxide. 如前述申請專利範圍中任一項之蓄電系統,其中,該至少一碟形離散元件以玻璃的形式存在。 A power storage system according to any one of the preceding claims, wherein the at least one dish-shaped discrete element is in the form of glass. 如申請專利範圍第12項之蓄電系統,其中,該至少一碟形離散元件藉由熔化工藝與隨後之成形工藝而呈碟形。 The power storage system of claim 12, wherein the at least one dish-shaped discrete component is dished by a melting process and a subsequent forming process. 如申請專利範圍第13項之蓄電系統,其中,該隨後之成形工藝係指拉伸法。 The power storage system of claim 13, wherein the subsequent forming process refers to a stretching method. 如前述申請專利範圍中任一項之蓄電系統,其中,該蓄電系統的至少一區域被施加較佳於200nm至400nm之波長範圍內的高能電磁輻射。 A power storage system according to any one of the preceding claims, wherein at least one region of the power storage system is applied with high-energy electromagnetic radiation preferably in a wavelength range of 200 nm to 400 nm. 如申請專利範圍第15項之蓄電系統,其中,該蓄電系統之被施加較佳於200nm至400nm之波長範圍內的高能電磁輻射之該至少一區域,係以穿過該碟形離散元件的方式被輸入該高能電磁輻射。 The power storage system of claim 15, wherein the at least one region of the power storage system to which high-energy electromagnetic radiation in a wavelength range of preferably 200 nm to 400 nm is applied is passed through the dish-shaped discrete component. The high energy electromagnetic radiation is input. 如申請專利範圍第15或16項之蓄電系統,其中,該蓄電系統之被施加高能電磁輻射之該至少一區域包括鋰鈷氧化物(LCO)。 The power storage system of claim 15 or 16, wherein the at least one region of the power storage system to which high-energy electromagnetic radiation is applied comprises lithium cobalt oxide (LCO). 如申請專利範圍第17項之蓄電系統,其中,在該蓄電系統之被施加高能電磁輻射之該至少一區域內,鋰鈷氧化物(LCO)就其結構特性而言受到影響。 The power storage system of claim 17, wherein the lithium cobalt oxide (LCO) is affected in terms of its structural characteristics in the at least one region of the power storage system to which high-energy electromagnetic radiation is applied. 如申請專利範圍第17或18項之蓄電系統,其中,在該蓄電系統之被施加高能電磁輻射之該至少一區域內,該鋰鈷氧化物 (LCO)至少局部發生相變。 The power storage system of claim 17 or 18, wherein the lithium cobalt oxide is in the at least one region of the power storage system to which high-energy electromagnetic radiation is applied (LCO) at least partial phase change occurs. 如申請專利範圍第19項之蓄電系統,其中,在該蓄電系統之被施加高能電磁輻射之該至少一區域內,該鋰鈷氧化物(LCO)之該至少局部之相變包括自立方最密堆積朝六方最密堆積之相變。 The power storage system of claim 19, wherein the at least partial phase change of the lithium cobalt oxide (LCO) comprises at least a sub-cube density in the at least one region of the power storage system to which high-energy electromagnetic radiation is applied. Stacking the phase change that is closest to the six sides. 一種應用於蓄電系統中之碟形離散元件,其特徵在於,特別是在30μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射,以及特別是在100μm之厚度時,在200nm至270nm之範圍內具有0.1%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於0.1%之透射,尤佳在308nm時具有大於30%之透射,且尤佳在351nm時具有大於88%之透射。 A dish-shaped discrete component for use in a power storage system, characterized in that it has a transmission of 0.1% or more in the range of 200 nm to 270 nm and/or more preferably 0.5% or more at 222 nm, particularly at a thickness of 30 μm. The transmission preferably has a transmission of greater than 0.3% at 248 nm, more preferably greater than 3% at 282 nm, more preferably greater than 50% transmission at 308 nm, and more preferably greater than 88% at 351 nm. Transmission, and in particular at a thickness of 100 μm, having a transmission of 0.1% or more in the range of 200 nm to 270 nm and/or more preferably a transmission of more than 0.5% at 222 nm, more preferably more than 0.3% at 248 nm. Transmission, particularly preferably greater than 0.1% transmission at 282 nm, more preferably greater than 30% transmission at 308 nm, and more preferably greater than 88% transmission at 351 nm. 如申請專利範圍第21項之應用於蓄電系統中之碟形離散元件,其中,特別是在30μm之厚度時,在200nm至270nm之範圍內具有15%或以上之透射以及/或者尤佳在222nm時具有大於0.5%之透射,尤佳在248nm時具有大於0.3%之透射,尤佳在282nm時具有大於3%之透射,尤佳在308nm時具有大於50%之透射,且尤佳在351nm時具有大於88%之透射。 A dish-shaped discrete component for use in a power storage system according to claim 21, wherein, in particular, at a thickness of 30 μm, a transmission of 15% or more in the range of 200 nm to 270 nm and/or particularly preferably at 222 nm The transmission has a transmittance of more than 0.5%, more preferably greater than 0.3% at 248 nm, more preferably greater than 3% at 282 nm, more preferably greater than 50% transmission at 308 nm, and particularly preferably at 351 nm. Has a transmission greater than 88%. 如申請專利範圍第21或22項之應用於蓄電系統中之碟形離散元件,其中,厚度變化不大於25μm,較佳不大於15μm,尤佳不大於10μm,最佳不大於5μm,相對特別是在100mm.100mm之橫向尺寸時之>100mm直徑之範圍的該晶圓或基板大小而言,較 佳相對特別是在200mm.200mm之橫向尺寸時之>200mm直徑之範圍的該晶圓或基板大小而言,尤佳相對特別是在400mm.400mm之橫向尺寸時之>400mm直徑之範圍的該晶圓或基板大小而言。 The disc-shaped discrete component applied to the electric storage system according to claim 21 or 22, wherein the thickness variation is not more than 25 μm, preferably not more than 15 μm, particularly preferably not more than 10 μm, and most preferably not more than 5 μm, and particularly At 100mm. The wafer or substrate size in the range of >100 mm diameter at a lateral dimension of 100 mm Good is especially at 200mm. The wafer or substrate size in the range of >200 mm diameter at a lateral dimension of 200 mm is particularly preferred at 400 mm. The wafer or substrate size in the range of >400 mm diameter at a lateral dimension of 400 mm. 如申請專利範圍第21至23項中任一項之應用於蓄電系統中之碟形離散元件,其中,水蒸氣穿透率(WVTR)為<10-3g/(m2.d),較佳<10-5g/(m2.d),尤佳<10-6g/(m2.d)。 A dish-shaped discrete component for use in a power storage system according to any one of claims 21 to 23, wherein the water vapor transmission rate (WVTR) is <10 -3 g/(m 2 .d), Preferably <10 -5 g/(m 2 .d), especially preferably <10 -6 g/(m 2 .d). 如申請專利範圍第21至24項中任一項之應用於蓄電系統中之碟形離散元件,其中,厚度小於2mm,較佳小於1mm,更佳小於500μm,尤佳小於等於200μm,最佳為小於等於100μm。 A disc-shaped discrete component for use in a power storage system according to any one of claims 21 to 24, wherein the thickness is less than 2 mm, preferably less than 1 mm, more preferably less than 500 μm, and particularly preferably less than or equal to 200 μm, preferably Less than or equal to 100 μm. 如申請專利範圍第21至25項中任一項之應用於蓄電系統中之碟形離散元件,其中,比電阻在350℃且頻率為50Hz之交流電的條件下,大於1.0.106Ohmcm。 A dish-shaped discrete component applied to a power storage system according to any one of claims 21 to 25, wherein the specific resistance is greater than 1.0.10 6 Ohmcm under the condition of an alternating current of 350 ° C and a frequency of 50 Hz. 如申請專利範圍第21至26項中任一項之應用於蓄電系統中之碟形離散元件,其中,最大負荷溫度θMax為至少300℃、較佳至少400℃,尤佳至少500℃。 A dish-shaped discrete component for use in a power storage system according to any one of claims 21 to 26, wherein the maximum load temperature θ Max is at least 300 ° C, preferably at least 400 ° C, and particularly preferably at least 500 ° C. 如申請專利範圍第21至27項中任一項之應用於蓄電系統中之碟形離散元件,其中,線性熱膨脹係數α為2.0.10-6/K至10.10-6/K,較佳為2.5.10-6/K至9.5.10-6/K,尤佳為3.0.10-6/K至9.5.10-6/K。 The disc-shaped discrete element applied to the electric storage system according to any one of claims 21 to 27, wherein the linear thermal expansion coefficient α is 2.0.10 -6 /K to 10.10 -6 /K, preferably. It is from 2.5.10 -6 /K to 9.5.10 -6 /K, and particularly preferably from 3.0.10 -6 /K to 9.5.10 -6 /K. 如申請專利範圍第21至28項中任一項之應用於蓄電系統中之碟形離散元件,其中,該至少一碟形離散元件之最大負荷溫度θMax(單位為℃)與線性熱膨脹係數α之乘積符合以下關係式:600.10-6 θMax.α8000.10-6,尤佳800.10-6 θMax.α5000.10-6The disc-shaped discrete element applied to the electric storage system according to any one of claims 21 to 28, wherein the maximum load temperature θ Max (in ° C) and the linear thermal expansion coefficient α of the at least one disc-shaped discrete element The product of the following is in accordance with the following relationship: 600.10 -6 θ Max. α 8000.10 -6 , especially good 800.10 -6 θ Max . α 5000.10 -6 . 如申請專利範圍第21至29項中任一項之應用於蓄電系統中之碟形離散元件,其中,該碟形離散元件包括至少一氧化物或者多個氧化物之混合物或化合物。 A dish-shaped discrete element for use in a power storage system according to any one of claims 21 to 29, wherein the dish-shaped discrete element comprises at least one oxide or a mixture or compound of a plurality of oxides. 如申請專利範圍第21至30項中任一項之應用於蓄電系統中之碟形離散元件,其中,該至少一氧化物為SiO2A dish-shaped discrete element applied to a power storage system according to any one of claims 21 to 30, wherein the at least one oxide is SiO 2 . 如申請專利範圍第21至31項中任一項之應用於蓄電系統中之碟形離散元件,其中,該元件由玻璃構成。 A dish-shaped discrete element applied to a power storage system according to any one of claims 21 to 31, wherein the element is composed of glass. 如申請專利範圍第21至32項中任一項之應用於蓄電系統中之碟形離散元件,其中,該元件藉由熔化工藝與隨後之成形工藝而呈碟形。 A dish-shaped discrete element applied to a power storage system according to any one of claims 21 to 32, wherein the element is dished by a melting process and a subsequent forming process. 如申請專利範圍第21至33項中任一項之應用於蓄電系統中之碟形離散元件,其中,該隨後之成形工藝包括拉伸法。 A dish-shaped discrete element applied to a power storage system according to any one of claims 21 to 33, wherein the subsequent forming process comprises a stretching method.
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