TW201607666A - Table device, conveyance device, semiconductor-manufacturing device, and inspection device - Google Patents

Abstract

A table device (TS) is provided with: a base member (1); a table (2) arranged on the base member; a drive system (3) capable of moving the table in directions parallel to a first axis, a second axis, and a third axis; a piston member (4) connected to the table; a cylinder member (5) arranged around the piston member, the cylinder member supporting the piston member so that the piston member can move in a direction parallel to the first axis, and being supported by the base member so as to be capable of moving in directions parallel to the second axis and the third axis; a first bearing member (6) arranged in the cylinder member, the first bearing member forming a gas bearing between a side surface of the piston member and the first bearing member; a second bearing member (7) arranged in the cylinder member, the second bearing member forming a gas bearing between a guide surface of the base member and the second bearing member; and a gravity compensation device (8) having a supply port for supplying gas to a lower portion space in an inside space of the cylinder member with which a lower surface of the piston member is in contact.

Description

Workbench device, transport device, semiconductor manufacturing device, and inspection device

The present invention relates to a table device, a conveying device, a semiconductor manufacturing device, and an inspection device.

In a technical field related to semiconductor manufacturing equipment, inspection equipment, and measurement equipment, a table device (stage device) including a movable table is used. A technique relating to a stage device including a moving means for moving a Z-axis table on which a measuring probe is mounted in a three-dimensional direction has been disclosed in Patent Document 1. A technique related to a stage device that uses a wedge-shaped member to elevate and lower a stage has been disclosed in Patent Document 2.

[Previous Technical Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 10-318728

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-195620

In the table device, regardless of whether or not the table is moved by the target track, when the table is deviated from the target track, the positioning accuracy of the table may be lowered. For example, when the table is not moved straight in the vertical direction regardless of whether the table is moved straight or straight, the positioning accuracy of the table is lowered.

Further, in the table device, for example, depending on the weight of the table, there is a possibility that a load acts on the actuator for moving the table. When the load acts on the actuator and the actuator is heated, the surrounding members are thermally deformed, which may reduce the positioning accuracy of the table.

When the positioning accuracy of the table is lowered, the performance of the conveying device including the table device may be lowered.

The aspect of the present invention is to provide a table device capable of suppressing a decrease in positioning accuracy. Further, the aspect of the present invention is for the purpose of providing a conveying device capable of suppressing performance degradation.

According to a first aspect of the present invention, there is provided a table apparatus comprising: a bottom member having a guide surface parallel to a predetermined surface; a table disposed on the bottom member; and a first shaft orthogonal to the predetermined surface An actuator that generates power between the bottom member and the table in a parallel direction, and the table can be parallel to the second axis in the direction parallel to the first axis in a direction parallel to the first axis a drive system that moves in a direction parallel to the third axis orthogonal to the second axis in the predetermined plane; and has an upper surface, a lower surface, and a side surface connecting the upper surface and the lower surface At least a portion of the upper surface side is connected to a piston member of the table; and is disposed around the piston member to support movement of the piston member in a direction parallel to the first axis, and is respectively associated with the second shaft a parallel direction and a cylinder member movably supported by the bottom member in a direction parallel to the third axis; a first bearing member disposed in the cylinder member to form an air bearing between the side surface of the piston member; The cylinder member has a second bearing member that forms an air bearing between the guide surface of the bottom member, and a lower space that faces the internal space of the cylinder member that faces the lower surface of the piston member, and has the above-mentioned A gravity compensation device for supplying a supply port of gas in the lower space.

According to the first aspect of the present invention, the table can be moved in the direction parallel to the first axis, the direction parallel to the second axis, and the three directions parallel to the third axis by the drive system. The piston member connected to the table is non-contactly supported by the cylinder member by an air bearing formed by the first bearing member. Thereby, the table can be moved in a direction parallel to the first axis with high positioning accuracy. The cylinder member is supported by the air bearing formed by the second bearing member in a non-contact manner to the bottom member. Thereby, the cylinder member and the table supported by the cylinder member through the piston member can move in a direction parallel to the second axis and a direction parallel to the third axis with high positioning accuracy. Further, by supplying gas from the supply port to the lower space opposed to the lower surface of the piston member, the effect of the table on the weight of the actuator can be reduced. Thereby, the load acting on the actuator can be reduced. Therefore, heat generation of the actuator can be suppressed, and thermal deformation of the surrounding members of the actuator can be suppressed. Moreover, since the thermal deformation of the member of the table device can be suppressed, the reduction in the positioning accuracy of the table can be suppressed.

In the first aspect of the invention, the piston members are respectively connected to a plurality of positions of the peripheral portion of the table, and the plurality of cylinder members may be disposed around the drive system. Thereby, the worktable can move the target track with high precision.

In a first aspect of the invention, the drive system includes: a second shaft drive device including a second shaft stage movably supported by the bottom member in a direction parallel to the second axis; and the second stage a second axis actuator that moves the shaft stage; the third axis drive device includes a third axis stage that is movably supported in the second axis in a direction parallel to the third axis, and the third axis a third axis actuator that moves the shaft stage; and a first shaft driving device that is disposed on the third axis stage and that moves the table in a direction parallel to the first axis, and the cylinder member may be connected to the The third axis stage. Thereby, the table, the piston member, and the cylinder member can be stably moved together in a direction parallel to the second axis and a direction parallel to the third axis. Further, the cylinder member is stably moved in a direction parallel to the second axis and a direction parallel to the third axis, together with the table and the piston member. Therefore, the piston member can be supported in a non-contact continuous movement in a direction parallel to the first shaft.

According to a first aspect of the invention, the first shaft driving device includes: a first wedge member movably supported by the third shaft stage in a direction parallel to the second shaft or the third shaft; a first wedge-shaped member that relatively moves the first wedge-shaped member, a first-axis actuator that moves the first wedge-shaped member, and at least a portion of the first wedge-shaped member are disposed on the first wedge-shaped member By the above first wedge structure The movement of the member guides the second wedge member in a direction parallel to the first axis, and the second wedge member is supported by the second wedge member. Thereby, the first wedge member is moved in a direction parallel to the second axis or the third axis, and the second wedge member and the table can be moved in a direction parallel to the first axis. Further, by adjusting the inclination angle of the inclined surface of the first wedge member that supports the second wedge member, the amount of movement of the first wedge member in the direction parallel to the second axis or the third axis and the direction parallel to the first axis can be adjusted. The ratio of the amount of movement of the second wedge member (reduction ratio, decomposition energy).

In a first aspect of the invention, the guiding device may include a direct-acting rolling bearing having a rail disposed on one of the first wedge-shaped member and the second wedge-shaped member, and disposed on the other side The wedge member is a slider that is movable relative to the track. Thereby, the guiding device can guide the second wedge member and the table with high precision.

According to a second aspect of the present invention, a conveying apparatus including a table apparatus of a first aspect is provided.

According to the second aspect of the present invention, it is possible to suppress the deterioration of the performance of the transport device and to transport the object supported on the table to the target position.

According to the aspect of the invention, a table device capable of suppressing a decrease in positioning accuracy is provided. According to the aspect of the invention, there is provided a handling device which can suppress a decrease in performance.

1‧‧‧ bottom member

1A‧‧‧Top (guide surface)

2‧‧‧Workbench

2A‧‧‧above

2B‧‧‧ below

3‧‧‧Drive system

4‧‧‧ piston components

4A‧‧‧above

4B‧‧‧ below

4C‧‧‧ side

5‧‧‧Cylinder components

5A‧‧‧above

5B‧‧‧ below

5H‧‧‧Internal space

5S‧‧‧ inside

6‧‧‧ bearing components

6G‧‧‧Air bearing

6S‧‧‧ inside

7‧‧‧ bearing components

8‧‧‧Gravity compensation device

9‧‧‧Support device

10‧‧‧Z-axis drive unit (1st shaft drive unit)

11‧‧‧1st wedge member

11B‧‧‧ below

11G‧‧‧ Bevel

11S‧‧‧ side

12‧‧‧2nd wedge member

13‧‧‧Z-Axis Actuator (1st Axis Actuator)

14‧‧‧Z-axis guiding device

14A‧‧‧Slider

14B‧‧‧ Track

15‧‧‧Power transmission agency

16‧‧‧Y-axis guiding device

16A‧‧‧Slider

16B‧‧‧ Track

20‧‧‧X-axis drive unit (2nd axis drive unit)

21‧‧‧X-axis stage (2nd axis stage)

22‧‧‧X-Axis Actuator (2nd Axis Actuator)

22A‧‧‧ movable element (slider)

22B‧‧‧Fixed components (stator)

23‧‧‧X-axis guiding device

23A‧‧‧Slider

23B‧‧ Track

30‧‧‧Y-axis drive (3rd axis drive)

31‧‧‧Y-axis stage (3rd axis stage)

32‧‧‧Y-axis actuator (3rd axis actuator)

32A‧‧‧ movable element (slider)

32B‧‧‧Fixed components (stator)

33‧‧‧Y-axis guiding device

33A‧‧‧Slider

33B‧‧ Track

40‧‧‧Connecting members

61‧‧‧Supply

62‧‧‧ Cavity

63‧‧‧ gas supply unit

64‧‧‧Exhaust port

71‧‧‧Supply

72‧‧‧ cavity

73‧‧‧ gas supply unit

74‧‧‧Exhaust port

81‧‧‧Supply

82‧‧‧ gas supply device

83‧‧‧ Pressure adjustment device

200‧‧‧Semiconductor manufacturing equipment

300‧‧‧Transportation device

400‧‧‧Checking device

S‧‧ objects

TS‧‧‧Workbench unit

Fig. 1 is a side view showing an example of a table device according to the first embodiment.

Fig. 2 is a side view showing an example of a table device according to the first embodiment.

Fig. 3 is a top view showing an example of a table device according to the first embodiment.

Fig. 4 is a side elevational cross-sectional view showing a part of the table device according to the first embodiment.

Fig. 5 is a view showing the arrow direction of the A-A line in Fig. 4.

Fig. 6 is an enlarged view of a part of the table device according to the first embodiment.

Fig. 7 is a view showing an example of a guiding device according to the first embodiment.

Fig. 8 is a view showing an example of a transport device and a semiconductor manufacturing device according to the second embodiment.

Fig. 9 is a view showing an example of a conveying device and an inspection device according to the second embodiment.

Hereinafter, the embodiments related to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The implementations described below The constituent elements of the form can be combined as appropriate. In the case where a part of the constituent elements are not used, the following description sets the XYZ orthogonal coordinate system, and the positional relationship of each unit will be described with reference to the XYZ orthogonal coordinate system. It is assumed that the direction parallel to the first axis orthogonal to the predetermined surface is the Z-axis direction. The direction parallel to the second axis in the predetermined plane is the X-axis direction. It is assumed that the direction parallel to the third axis orthogonal to the second axis in the predetermined plane is the Y-axis direction. The directions of rotation (tilt) around the Z axis, the X axis, and the Y axis are θZ, θX, and θY directions, respectively. The Z axis (first axis) is orthogonal to the X axis (second axis) and the Y axis (third axis). The X axis is orthogonal to the YZ plane. The Y axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane. The XY plane is parallel to the predetermined plane. In the present embodiment, it is assumed that the XY plane is parallel to the horizontal plane. The Z axis direction is the vertical direction. Furthermore, the XY plane (predetermined surface) may also be inclined with respect to the horizontal plane.

<First embodiment>

The first embodiment will be described.

Fig. 1 is a side view showing the table device TS according to the present embodiment from the -Y side. Fig. 2 is a side view showing the table device TS according to the embodiment from the +X side. Fig. 3 is a top view showing the table device TS according to the embodiment from the +Z side. Furthermore, the first and second figures show a part of the table device TS in a cross section.

As shown in FIG. 1 , FIG. 2 and FIG. 3 , the table device TS includes a bottom member 1 and a table 2 disposed on the bottom member 1 ; a drive system 3 that moves the table 2; a piston member 4 that is coupled to the table 2; a cylinder member 5 disposed around the piston member 4; and a bearing member 6 that forms an air bearing 6G between the piston member 4 and the cylinder member 5. A bearing member 7 that forms an air bearing 7G between the bottom member 1 and the cylinder member 5; and a gravity compensation device 8.

The bottom member 1 has an upper surface (guide surface) 1A parallel to the XY plane. The guide surface 1A is flat. The bottom member 1 is a stone platform such as an ivory black or a cast iron platform. The bottom member 1 is, for example, a floor surface disposed at a facility (for example, a factory) provided with the table device TS.

The table 2 is disposed above the bottom member 1 (+Z direction). The table 2 can support the movement of the object S. The table 2 has an upper surface 2A in the +Z direction and a lower surface 2B in the opposite direction (-Z direction) toward the upper surface 2A. The upper 2A can support the object S. The table 2 is in a state in which the object S is placed on the upper surface 2A, and is movable in three directions of the X-axis direction, the Y-axis direction, and the Z-axis direction. In the present embodiment, the table 2 is a three-degree-of-freedom table (three-axis table, three-dimensional table) that can be moved in three directions.

The drive system 3 includes an actuator that generates power to move the table 2. The drive system 3 includes at least an actuator that generates power for moving the table 2 in the Z-axis direction. In the present embodiment, the drive system 3 is disposed between the bottom member 1 and the table 2 in the Z-axis direction.

In the present embodiment, the drive system 3 includes an X-axis actuator (second axis actuator) 22 for generating power for moving the table 2 in the X-axis direction, and a Y-axis actuator (third axis actuation). 32) generated to make work The power for moving the table 2 in the Y-axis direction and the Z-axis actuator (first axis actuator) 13 generate power for moving the table 2 in the Z-axis direction. The drive system 3 can move the table 2 in three directions of the X-axis direction, the Y-axis direction, and the Z-axis direction.

The drive system 3 includes a Z-axis drive device (first-axis drive device) 10 that moves the table 2 in the Z-axis direction, and an X-axis drive device (second-axis drive device) that moves the table 2 in the X-axis direction. And a Y-axis driving device (third-axis driving device) 30 that moves the table 2 in the Y-axis direction.

The X-axis driving device 20 moves the table 2 in the X-axis direction. The X-axis driving device 20 is disposed on the bottom member 1. The X-axis driving device 20 has an X-axis stage (second axis stage) 21 that supports the bottom member 1 and is movable in the X-axis direction, and an X-axis that generates power for moving the X-axis stage 21 in the X-axis direction. An actuator (second axis actuator) 22; and an X-axis guide device 23 that guides the X-axis stage 21 in the X-axis direction.

In the present embodiment, the X-axis actuator 22 includes a linear motor. The X-axis actuator 22 has a fixing member 22B fixed to the guide surface 1A of the bottom member 1, and a movable member 22A disposed on the lower surface of the X-axis stage 21. The fixing member 22B is long in the X-axis direction. The movable element 22A is movable in the X-axis direction with respect to the fixed element 22B. The X-axis actuator 22 may be a fixed element 22B including a magnet, and the movable element 22A may be a movable coil type including a coil. The X-axis actuator 22 may be a fixed element 22B including a coil, and the movable element 22A may be a movable magnet type including a magnet.

The X-axis guiding device 23 has a guide fixed to the bottom member 1 The rail 23B of the guide surface 1A and the slider 23A which is disposed on the lower surface of the X-axis stage 21 and movable on the rail 23B. The track 23B is long in the X axis. In the present embodiment, the X-axis guiding device 23 includes a direct-acting rolling bearing.

By the operation of the X-axis actuator 22 including the linear motor, the X-axis stage 21 is guided by the X-axis guide 23 and is movable in the X-axis direction with respect to the bottom member 1.

The Y-axis driving device 30 moves the table 2 in the Y-axis direction. The Y-axis driving device 30 is disposed on the X-axis stage 21. The Y-axis driving device 30 has a Y-axis stage (third-axis stage) 31 that is movable in the Y-axis direction on the X-axis stage 21, and generates power for moving the Y-axis stage 31 in the Y-axis direction. A Y-axis actuator (third axis actuator) 32; and a Y-axis guide device 33 that guides the Y-axis stage 31 in the Y-axis direction.

In the present embodiment, the Y-axis actuator 32 includes a linear motor. The Y-axis actuator 32 has a fixed element 32B fixed to the upper surface of the X-axis stage 21, and a movable element 32A disposed on the lower surface of the Y-axis stage 31. The fixing member 32B is long in the Y axis. The movable member 32A is movable in the Y-axis direction with respect to the fixed member 32B. The Y-axis actuator 32 may be a fixed element 32B including a magnet, and the movable element 32A may be a movable coil type including a coil. The Y-axis actuator 32 may be a fixed element 32B including a coil, and the movable element 32A may be a movable magnet type including a magnet.

The Y-axis guiding device 33 has a rail 33B fixed to the upper surface of the X-axis stage 21, and a slider 33A disposed on the lower surface of the Y-axis stage 31 so as to be movable on the rail 33B. The track 33B is long in the Y axis. This embodiment In the state, the Y-axis guiding device 33 includes a direct-acting rolling bearing.

The Y-axis stage 31 is guided by the Y-axis guiding device 33 by the operation of the Y-axis actuator 32 including the linear motor, and is movable in the Y-axis direction with respect to the X-axis stage 21.

When the X-axis stage 21 is moved in the X-axis direction, the Y-axis stage 31 moves in the X-axis direction together with the X-axis stage 21. In the present embodiment, the Y-axis stage 31 can be moved in the X-axis direction and the Y-axis direction by the operation of the X-axis actuator 22 and the operation of the Y-axis actuator 32.

The Z-axis driving device 10 moves the table 2 in the Z-axis direction. The Z-axis driving device 10 is disposed on the Y-axis stage 31. The Z-axis driving device 10 includes a first wedge-shaped member 11 that is movable in the Y-axis direction on the Y-axis stage 31, and a second wedge-shaped member that is disposed on the first wedge-shaped member 11 and that is relatively movable with respect to the first wedge-shaped member 11. a member 12; a Z-axis actuator 13 for generating a power for moving the first wedge member 11 in the Y-axis direction and moving the second wedge member 12 in the Z-axis direction; and at least a portion disposed on the first wedge member 11 The Z-axis guiding device 14 of the second wedge member 12 is guided by the movement of the first wedge member 11 in the Y-axis direction so that the second wedge member 12 moves in the Z-axis direction.

The Z-axis actuator 13 can move the first wedge member 11 in the Y-axis direction. In the present embodiment, when the first wedge member 11 is moved in the Y-axis direction by the operation of the Z-axis actuator 13, the second wedge member 12 is moved in the Z-axis direction in synchronization with the first wedge member 11.

In the present embodiment, the Z-axis actuator 13 includes a rotary motor. The Z-axis actuator 13 and the first wedge member 11 are via a power transmission machine Structure 15 connection. The power of the Z-axis actuator 13 is transmitted to the first wedge member 11 through the power transmission mechanism 15.

The power transmission mechanism 15 converts the rotational motion of the Z-axis actuator 13 into a linear motion. In the present embodiment, the shaft (output shaft) of the Z-axis actuator 13 is rotated in the θY direction. The power transmission mechanism 15 converts the rotational motion in the θY direction into a linear motion in the Y-axis direction, and transmits the motion to the first wedge member 11 . The first wedge member 11 is moved in the Y-axis direction by the power of the Z-axis actuator 13 transmitted through the power transmission mechanism 15.

In the present embodiment, the power transmission mechanism 15 includes a ball screw. The ball screw includes a screw shaft that rotates by actuation of the Z-axis actuator 13 , a nut that is coupled to the first wedge member 11 and disposed around the screw shaft, and a ball that is disposed between the screw shaft and the nut. The screw shaft of the ball screw is rotatably supported by the support bearing. In the present embodiment, the ball screw is rotated in the θY direction. By the rotation of the ball screw in the θY direction, the nut and the first wedge member 11 that connects the nut thereof are moved in the Y-axis direction (linear movement).

When the Z-axis actuator 13 rotates the screw shaft of the ball screw in one direction, the first wedge member 11 moves in the +Y direction by the rotation of the screw shaft. When the Z-axis actuator 13 rotates the screw shaft of the ball screw in the opposite direction, the first wedge member 11 is moved in the -Y direction by the rotation of the screw shaft. In other words, the moving direction of the first wedge member 11 (the +Y direction and the -Y direction) in the Y-axis direction is determined according to the rotation direction of the Z-axis actuator 13 (the rotation direction of the screw shaft of the ball screw). Direction). According to the movement of the first wedge member 11 The moving direction (the direction of either the -Z direction and the +Z direction) of the second wedge member 12 (the table 2) in the Z-axis direction is determined.

The Z-axis guiding device 14 includes a rail 14B that is fixed to the inclined surface of the first wedge member 11, and a slider 14A that is disposed on the inclined surface of the second wedge member 12 and that is movable on the rail 14B. In the present embodiment, the Z-axis guiding device 14 includes a direct-acting rolling bearing.

Further, in the present embodiment, the Z-axis driving device 10 has the Y-axis guiding device 16 that guides the first wedge member 11 in the Y-axis direction. The Y-axis guiding device 16 has a rail 16B fixed to the upper surface of the Y-axis stage 31, and a slider 16A disposed on the lower surface of the first wedge-shaped member 11 and movable on the rail 16B. In the present embodiment, the Y-axis guiding device 16 includes a direct-acting rolling bearing.

The first wedge member 11 is guided by the Y-axis guide device 16 by the operation of the Z-axis actuator 13 including the rotary motor, and is movable in the Y-axis direction with respect to the Y-axis stage 31. The second wedge member 12 is guided by the Z-axis guiding device 14 by the movement of the first wedge member 11 in the Y-axis direction, and is movable in the Z-axis direction with respect to the first wedge member 11.

When the Y-axis stage 31 moves in the X-axis direction and the Y-axis direction, the first wedge member 11 and the second wedge member 12 move together with the Y-axis stage 31 in the X-axis direction and the Y-axis direction. In the present embodiment, the first wedge member 11 and the second wedge member 12 can be moved in the X-axis direction and the Y-axis direction by the operation of the X-axis actuator 22 and the operation of the Y-axis actuator 32.

The table 2 is supported by the second wedge member 12. In the present embodiment, the table device TS has a support device 9 that is disposed between the second wedge member 12 and the table 2 to soften the support table 2. The second wedge member 12 supports the table 2 through the support device 9. In the present embodiment, the support device 9 includes a spherical bearing that receives a load in the Z-axis direction. The support device 9 includes an inner ring member 9A having a spherical outer surface, and an outer ring member 9B having a support surface that is in spherical contact with the outer surface of the inner ring member 9A. In the present embodiment, the outer ring member 9B is disposed on the upper surface of the second wedge member 12. The inner ring member 9A is a central portion that is connected to the lower surface 2B of the table 2. The table 2 is supported by the second wedge member 12 via the support device 9, whereby the table 2 and the second wedge member 12 are relatively movable. In the present embodiment, the support device 9 suppresses (limits) the relative movement of the table 2 and the second wedge member 12 in the Z-axis direction, and allows directions other than the Z-axis direction (X-axis, Y-axis, θX, θY, and The relative movement of the table 2 and the second wedge member 12 in the θZ direction.

When the second wedge member 12 is moved in the X-axis direction and the Y-axis direction by the operation of the X-axis actuator 22 and the operation of the Y-axis actuator 32, the table 2 and the second wedge member 12 are together in the X. The axis direction and the Y axis direction move. When the second wedge member 12 moves in the Z-axis direction by the relative movement of the first wedge member 11 and the second wedge member 12, the table 2 moves together with the second wedge member 12 in the Z-axis direction. Thereby, the table 2 can be moved in three directions of the X-axis direction, the Y-axis direction, and the Z-axis direction.

The piston member 4 is connected to the lower surface 2B of the table 2. live The plug member 4 is a rod-shaped member that grows in the Z-axis direction. The piston member 4 has an upper surface 4A facing the +Z direction, a lower surface 4B facing the -Z direction, and a side surface (outer surface) 4C connecting the upper surface 4A and the lower surface 4B. At least a portion of the upper surface 4A side of the piston member 4 is connected to the table 2. In the present embodiment, the upper surface 4A of the piston member 4 and the lower surface 2B of the table 2 are fixed by the transmission connecting member 40.

As shown in Fig. 3, in the present embodiment, the outer shape of the table 2 in the XY plane is a quadrangle. In the present embodiment, the cross-sectional outer shape of the piston member 4 parallel to the XY plane is circular. That is, the piston member 4 is a member that forms an elongated cylindrical shape in the Z-axis direction. The axis of the piston member 4 is parallel to the Z axis. Also, the inside of the piston member 4 may be hollow. For example, the piston member 4 may form a long cylindrical member in the Z-axis direction.

The support member 9 is connected to the central portion of the lower surface 2B of the table 2. A plurality of piston members 4 are disposed around the support device 9. The piston member 4 is connected to a plurality of positions of the peripheral portion of the lower surface 2B of the table 2, respectively. In the present embodiment, the piston member 4 is connected to each of the four corner portions of the table 2. A plurality of piston members 4 are configured to surround the drive system 3.

The cylinder member 5 is a tubular member and is disposed around the piston member 4. The cylinder member 5 has an upper surface 5A facing the +Z direction, a lower surface 5B facing the -Z direction, and an inner surface 5S facing the internal space 5H of the cylinder member 5. The upper surface 5A of the cylinder member 5 is opposed to the lower surface of the connecting member 40. The lower surface 5B of the cylinder member 5 is opposed to the guide surface 1A of the bottom member 1. The inner face 5S of the cylinder member 5 is opposite to the outer face 4C of the piston member 4. Correct. The cylinder member 5 is provided with a plurality of (four) surrounding drive systems 3. The cylinder member 5 supports the piston member 4 to be movable in the Z-axis direction. Further, the cylinder member 5 supports the bottom member 1 to be movable in the X-axis direction and the Y-axis direction, respectively.

A plurality of cylinder members 5 are disposed around the Y-axis stage 31. In the present embodiment, the cylinder member 5 is connected to the Y-axis stage 31. The plurality of cylinder members 5 move in the X-axis direction and the Y-axis direction together with the Y-axis stage 31.

The bearing member 6 is an air bearing (static bearing) 6G formed between the piston member 4 and the cylinder member 5. In the present embodiment, the bearing member 6 is disposed in the cylinder member 5. The bearing member 6 is disposed inside the cylinder member 5 and faces the internal space 5H of the cylinder member 5. The bearing member 6 is disposed on the inner surface 5S of the cylinder member 5. The bearing member 6 has an inner face 6S that faces the inner space 5H. The inner surface 5S of the cylinder member 5 includes an inner surface 6S of the bearing member 6. That is, in the present embodiment, the inner surface 6S may be regarded as the inner surface 5S. The bearing member 6 has a gas supply port 61 between the side surface 4C of the piston member 4. The supply port 61 is disposed on the inner surface 6S of the bearing member 6. The bearing member 6 is a gas supplied through the supply port 61, and an air bearing 6G is formed between the side surface 4C of the piston member 4. The piston member 4 is supported in a non-contact manner on the inner surface 5S of the cylinder member 5 by the formation of the air bearing 6G. The cylinder member 5 is an air bearing 6G formed by the bearing member 6, and supports the piston member 4 in a non-contacting movement in the Z-axis direction.

The bearing member 7 is an air bearing (static bearing) 7G formed between the bottom member 1 and the cylinder member 5. In this embodiment, the bearing member 7 is disposed in the cylinder member 5. The bearing member 7 is disposed on the cylinder member 5 so as to face the guide surface 1A of the bottom member 1. The bearing member 7 is disposed on the lower surface 5B of the cylinder member 5. The bearing member 7 has a lower surface 7B opposed to the guide surface 1A of the bottom member 1. The lower surface 5B of the cylinder member 5 includes a lower surface 7B of the bearing member 7. That is, in the present embodiment, the following 7B may be regarded as the following 5B. The bearing member 7 has a gas supply port 71 between the guide face 1A of the bottom member 1. The supply port 71 is disposed on the lower surface 7B of the bearing member 7. The bearing device 7 is a gas supplied through the supply port 71, and an air bearing 7G is formed between the guide surface 1A of the bottom member 1. By the formation of the air bearing 7G, the cylinder member 5 is supported in a non-contact manner on the guide surface 1A of the bottom member 1. The bottom member 1 is an air bearing 7G formed by the bearing member 7, and supports the cylinder member 5 in a non-contacting movement in the X-axis direction and the Y-axis direction.

The inner surface 5S of the cylinder member 5 and the outer surface 4C of the piston member 4 are opposed to each other through the air gap by the air bearing 6G formed by the bearing member 6. By the air bearing 7G formed by the bearing member 7, the lower surface 5B of the cylinder member 5 and the guide surface 1A of the bottom member 1 are opposed to each other through the gap. Further, in the present embodiment, the upper surface 5A of the cylinder member 5 and the lower surface of the connecting member 40 are opposed to each other through the transmission gap. That is, in the present embodiment, the cylinder member 5 is disposed to be connected to the Y-axis stage 31, but is not in contact with members other than the Y-axis stage 31.

The gravity compensation device 8 serves to reduce the weight of the table 2 to the Z-axis actuator 13. The gravity compensation device 8 faces the lower space 5H of the internal space 5H of the cylinder member 5 at the lower surface 4B of the piston member 4 There is a supply port 81 to which a gas can be supplied. The lower space 5Hu is a space which is lower than the lower surface 4B of the piston member 4 (-Z side) in the internal space 5H. The gravity compensating device 8 supplies gas from the supply port 81, and reduces the effect of the table 2 on the weight of the Z-axis actuator 13.

The supply port 81 of the gravity compensating device 8 is disposed to face the lower space 5Hu of the internal space 5H of the cylinder member 5. In the present embodiment, the supply port 81 is disposed in the cylinder member 5. The pressure of the lower space 5Hu is increased by the gas supplied from the supply port 81 to the lower space 5Hu, thereby reducing the effect of the table 2 on the weight of the Z-axis actuator 13. In the present embodiment, the gravity compensating device 8 supplies the gas from the supply port 81 such that the pressure of the lower space 5Hu facing the lower surface 4B of the piston member 4 is higher than the pressure of the outer space of the cylinder member 5.

As described above, in the present embodiment, a plurality of piston members 4 and cylinder members 5 are disposed. The supply port 81 of the gravity compensation device 8 is disposed in plural numbers facing the plurality of lower spaces 5Hu.

Fig. 4 is a side cross-sectional view showing an enlarged portion of the table device TS according to the embodiment. Fig. 5 is a view showing the arrow direction of the A-A line in Fig. 4. The piston member 4 is a rod-shaped member that grows in the Z-axis direction. The piston member 4 has an upper surface 4A facing the +Z direction, a lower surface 4B facing the -Z direction, and a side surface (outer surface) 4C connecting the upper surface 4A and the lower surface 4B. As shown in Fig. 5, the cross-sectional outer shape of the piston member 4 parallel to the XY plane is circular. The piston member 4 is a member that forms an elongated cylindrical shape in the Z-axis direction. The axis of the piston member 4 is parallel to the Z axis. At least a portion of the interior of the piston member 4 can also be hollow. The piston member 4 can also be formed in the Z-axis direction Long cylindrical member.

The bearing member 6 is disposed around the side surface 4C of the piston member 4. The bearing member 6 is a tubular (cylindrical) member. The axis of the bearing member 6 is parallel to the Z axis. In the present embodiment, the shaft of the piston member 4 coincides with the axis of the bearing member 6. In other words, the shaft of the piston member 4 and the shaft of the bearing member 6 are the same axis. The bearing member 6 has an inner face 6S that is opposite to the side face 4C of the piston member 4. The inner surface 6S may also be referred to as a bearing surface 6S. In the present embodiment, the bearing member 6 is disposed in two in the Z-axis direction parallel to the axis of the bearing member 6.

The cylinder member 5 supports the bearing member 6. The bearing member 6 is fixed to the cylinder member 5. The cylinder member 5 is a transmission bearing member 6 that movably supports the piston member 4. In the present embodiment, the cylinder member 5 is a tubular member that is disposed at least partially around the piston member 4 and the bearing member 6. The axis of the cylinder member 5 is parallel to the Z axis. In the present embodiment, the shaft of the piston member 4 coincides with the shaft of the bearing member 6 and the axis of the cylinder member 5. In other words, the shaft of the piston member 4 is the same axis as the shaft of the bearing member 6 and the shaft of the cylinder member 5.

As shown in FIGS. 4 and 5, the inner surface 6S of the bearing member 6 is disposed on the inner surface 5S of the cylinder member 5. The inner surface 6S of the bearing member 6 is opposed to the side surface (outer surface) 4C of the piston member 4. The inner surface 6S of the bearing member 6 is a transmission gap opposed to the side surface 4C of the piston member 4.

The bearing member 6 supports the piston member 4 in a non-contact manner. The bearing member 6 has a gas supply port 61 between the side surface 4C of the piston member 4. In the present embodiment, the supply port 61 is the same as the piston member 4. The side faces 4C are oppositely arranged. The supply port 61 is disposed on the inner surface 6S of the bearing member 6. An air bearing 6G is formed between the side surface 4C of the piston member 4 and the inner surface 6S of the bearing member 6 by the gas supplied from the supply port 61. A gap is formed between the side surface 4C of the piston member 4 and the inner surface 6S of the bearing member 6 by the air bearing 6G. In the present embodiment, the supply port 61 is supplied with air (compressed air).

The movement of the piston member 4 in the X-axis direction and the Y-axis direction is restricted by the air bearing 6G formed around the side surface 4C of the piston member 4. The movement of the piston member 4 in the X-axis direction and the Y-axis direction is restricted by the air bearing 6G, but the movement of the piston member 4 in the Z-axis direction is allowed.

In the present embodiment, the bearing member 6 includes a porous body (porous member). The porous body can also be made of graphite (graphite carbon) disclosed in, for example, Japanese Patent No. 5,093, 056, and JP-A-2007-120527. Further, the porous body may be made of ceramic. The supply port 61 contains a hole of a porous body. In the present embodiment, gas is supplied from a hole (supply port) 61 of the porous body. As shown in Fig. 4, in the present embodiment, a cavity 62 is formed between the bearing member 6 and the cylinder member 5. Gas is supplied from the gas supply device 63 toward the cavity 62. The gas supplied to the cavity 62 is passed through the inside of the bearing member 6 (the hole of the porous body) to the inner face 6S of the bearing member 6, and is supplied from the supply port 61 disposed at the inner face 6S thereof between the inner face 6S and the outer face 4C. Space. Thereby, an air bearing 6G is formed between the inner surface 6S and the outer surface 4C. The inner surface 6S and the outer surface 4C are brought into a non-contact state.

In the present embodiment, an exhaust port 64 is provided to discharge at least a portion of the gas supplied between the bearing member 6 and the piston member 4. exhaust vent 64 is disposed in the cylinder member 5 around the piston member 4. The exhaust ports 64 are disposed between the two bearing members 6 disposed in the Z-axis direction, and are disposed below the bearing members 6 on the lower side (-Z side) of the two bearing members 6 in the Z-axis direction.

The piston member 4 is connected to the table 2. In the present embodiment, the upper surface 4A of the piston member 4 is transmitted through the connecting member 40 and connected to the lower surface 2B of the table 2. The piston member 4 is fixed to the table 2. The piston member 4 is fixed to the table 2 by a fixing member such as a bolt.

The table 2 is moved in the Z-axis direction by the operation of the Z-axis driving device 10. In the present embodiment, the piston member 4 connected to the table 2 is moved in the Z-axis direction together with the table 2 by the movement of the table 2 in the Z-axis direction. The piston member 4 is guided by the bearing member 6 (air bearing 6G) to move in the Z-axis direction. In the present embodiment, the bearing member 6 has a function of moving the piston member 4 in the Z-axis direction as a guiding means for guiding the piston member 4. The inner surface 6S of the bearing member 6 facing the side surface 4C of the piston member 4 may also be referred to as a guide surface 6S. In the present embodiment, the side surface 4C and the inner surface 6S are parallel to the Z axis, respectively.

Regarding the Z-axis direction, the size of the piston member 4 is larger (longer) than the size of the bearing member 6. In the present embodiment, the distance between the upper surface 4A of the piston member 4 and the lower surface 4B in the Z-axis direction is the +Z side of the bearing member 6 on the upper side (+Z side) of the two bearing members 6 disposed in the Z-axis direction. The distance between the end (upper end) and the end (lower end) on the -Z side of the bearing member 6 on the lower side (-Z side) is large.

The bearing member 7 is disposed on the lower surface 5B of the cylinder member 5 Cylindrical (annular) member. The axis of the bearing member 7 is parallel to the Z axis. In the present embodiment, the axis of the piston member 4 coincides with the axis of the cylinder member 5. In other words, the shaft of the bearing member 7 and the shaft of the cylinder member 5 are the same axis.

The lower surface 7B of the bearing member 7 is disposed on the lower surface 5B of the cylinder member 5. The lower surface 7B of the bearing member 7 is opposed to the guide surface 1A of the bottom member 1. The lower surface 7B of the bearing member 7 is a transmission gap opposed to the guide surface 1A of the bottom member 1.

The bearing member 7 has a gas supply port 71 between the guide face 1A of the bottom member 1. In the present embodiment, the supply port 71 is disposed to face the guide surface 1A of the bottom member 1. The supply port 71 is disposed on the lower surface 7B of the bearing member 7. An air bearing 7G is formed between the guide surface 1A of the bottom member 1 and the lower surface 7B of the bearing member 7 by the gas supplied from the supply port 71. A gap is formed between the guide surface 1A of the bottom member 1 and the lower surface 7B of the bearing member 7 by the air bearing 7G. In the present embodiment, the supply port 71 is supplied with air (compressed air).

The position of the cylinder member 5 is maintained (fixed) in the Z-axis direction by the air bearing 7G formed on the lower surface 5B side of the cylinder member 5. In other words, the movement of the cylinder member 5 in the Z-axis direction is restricted by the air bearing 7G. By the air bearing 7G, the cylinder member 5 is supported in the non-contact state of the bottom member 1, and the relative position of the bottom member 1 and the cylinder member 5 is fixed in the Z-axis direction. The position of the cylinder member 5 in the Z-axis direction is fixed by the air bearing 7G, but the movement of the cylinder member 5 in the X-axis direction and the Y-axis direction is allowed.

In the present embodiment, the bearing member 7 includes a porous body (multiple Porous member). The porous body can also be made of graphite (graphite carbon) disclosed in, for example, Japanese Patent No. 5,093, 056, and JP-A-2007-120527. Further, the porous body may be made of ceramic. The supply port 71 contains a hole of a porous body. In the present embodiment, gas is supplied from a hole (supply port) 71 of the porous body. As shown in Fig. 4, in the present embodiment, a cavity 72 is formed between the bearing member 7 and the cylinder member 5. Gas is supplied from the gas supply device 73 toward the cavity 72. The gas supplying the cavity 72 is passed through the inside of the bearing member 7 (the hole of the porous body) to the lower surface 7B of the bearing member 7, and is supplied from the supply port 71 disposed at the lower surface 7B thereof to the space between the lower surface 7B and the guide surface 1A. . Thereby, the air bearing 7G is formed between the lower surface 7B and the guide surface 1A. The lower surface 7B and the guide surface 1A are brought into a non-contact state.

In the present embodiment, an exhaust port 74 is provided to discharge at least a portion of the gas supplied between the bearing member 7 and the bottom member 1. In the XY plane, the exhaust port 74 is annular. The exhaust port 74 is disposed in the cylinder member 5 .

The table 2 is moved in the X-axis direction and the Y-axis direction by the operation of the X-axis driving device 20 and the Y-axis driving device 30. In the present embodiment, the piston member 4 connected to the table 2 is moved in the X-axis direction and the Y-axis direction together with the table 2 by the movement of the table 2 in the X-axis direction and the Y-axis direction. Then, the cylinder member 5 and the piston member 4 move together in the X-axis direction and the Y-axis direction by the movement of the piston member 4 in the X-axis direction and the Y-axis direction. The cylinder member 5 is guided by the bearing member 7 (air bearing 7G) and moves in the X-axis direction and the Y-axis direction. In the present embodiment, the guide surface 1A and the lower surface 7B are parallel to the XY plane, respectively. this In the embodiment, the bottom member 1 has a function of guiding the cylinder member 5 that supports the table 2 through the piston member 4 to move the table 2 in the X-axis direction and the Y-axis direction.

The cylinder member 5 is disposed not in contact with the bottom member 1. The configuration is such that the cylinder member 5 is not in contact with the piston member 4. It is arranged such that the cylinder member 5 does not come into contact with the table 2 (contact member 40). The inner surface 5S of the cylinder member 5 (the inner surface 6S of the bearing member 6) and the outer surface 4C of the piston member 4 are opposed to each other by the air bearing 6G formed by the bearing member 6. The lower surface 5B of the cylinder member 5 (the lower surface 7B of the bearing member 7) is opposed to the guide surface 1A of the bottom member 1 through the air gap by the air bearing 7G formed by the bearing member 7.

As shown in FIG. 1, FIG. 2, and FIG. 4, the lower surface 4B of the piston member 4 is separated from the bottom member 1. The piston member 4 is connected to the table 2 and is not connected to members other than the table 2. In the present embodiment, the table 2 is connected to the upper surface 4A of the piston member 4, and the bearing member 6 and the cylinder member 5 are disposed in a non-contact state around the side surface 4C, and the lower surface 4B of the piston member 4 is not connected to the table.

The lower space 5Hu is defined by the lower surface 4B of the piston member 4 and the inner surface 5S of the cylinder member 5. The lower surface 4B of the piston member 4 faces the lower space 5Hu. In the present embodiment, the lower space 5Hu includes a space surrounded by the lower surface 4B of the piston member 4, the inner surface 5S of the cylinder member 5, and the guide surface 1A of the bottom member 1.

The gravity compensating device 8 has a supply port 81 that supplies gas to the lower space 5Hu that the lower surface 4B of the piston member 4 faces. Gravity compensation The compensation device 8 supplies gas from the supply port 81 to reduce the effect of the table 2 on the weight of the Z-axis actuator 13. The gravity compensation device 8 can also be referred to as a self-weight compensation device 8, or can be referred to as a self-repeating device 8. The gravity compensating device 8 includes a cylinder device that supplies gas (air) to the lower space 5Hu specified by the lower surface 4B of the piston member 4 and the inner surface 5S of the cylinder member 5, thereby offsetting the weight of the table 2.

The gravity compensation device 8 has a gas supply device 82 that can supply a gas, and a pressure adjustment device 83 that adjusts the gas pressure from the gas supply device 82. The gas supply device 82 is, for example, supplying compressed air. The pressure adjusting device 83 includes, for example, a regulator that adjusts the pressure of the gas to the lower space 5Hu through the supply port 81.

In the present embodiment, at least a portion of the flow path connecting the gas supply device 82 and the supply port 81 is formed inside the cylinder member 5. A supply port 81 is disposed at one end of the flow path. In the present embodiment, the supply port 81 includes an opening of a portion of the flow path. The other end of the flow path is connected to the gas supply device 82. The gas supplied from the gas supply device 82 is sent to the supply port 81 through the flow path. The supply port 81 is supplied from the gas supply device 82, and the pressure-adjusting device 83 supplies the gas after the pressure adjustment to the lower space 5Hu.

The supply port 81 is disposed to face the lower space 5Hu. In the present embodiment, the supply port 81 is disposed on the inner surface 5S of the cylinder member 5.

The pressure adjusting device 83 has a function of a fluid adjusting device that can adjust the gas supply amount per unit time. The pressure adjusting device 83 can adjust the gas supply per unit time of the lower space 5Hu supplied from the supply port 81. Should be measured. The pressure of the lower space 5Hu is adjusted by adjusting the gas supply amount from the supply port 81. When the supply amount of gas from the supply port 81 is large, the pressure of the lower space 5Hu becomes high. When the supply amount of gas from the supply port 81 is small, the pressure of the lower space 5Hu becomes low. The pressure adjusting device 83 can adjust the pressure of the lower space 5Hu by adjusting the supply amount of the gas supplied from the supply port 81 to the lower space 5Hu. In the present embodiment, air (compressed air) is supplied from the supply port 81.

The gravity compensating device 8 is a function of supplying gas from the supply port 81 to lower the weight of the table 2 to the Z-axis actuator 13. By the action of gravity, the table 2 generates a force in the -Z direction. The force of the table 2 is transmitted to the Z-axis actuator 13 through the second wedge member 12, the first wedge member 11, and the power transmission device 15. The gravity compensating device 8 supplies gas from the supply port 81 to reduce the force transmitted from the table 2 to the Z-axis actuator 13. The gravity compensating device 8 supplies gas from the supply port 81 to suppress the force generated by the table 2 and the piston member 4 due to gravity from being transmitted to the Z-axis actuator 13.

In the present embodiment, the gravity compensating device 8 supplies gas from the supply port 81 to reduce the weight of the table 2 and the piston member 4 to the weight of the Z-axis actuator 13. The gravity compensating device 8 supplies gas from the supply port 81 to reduce the force transmitted from the table 2 and the piston member 4 to the Z-axis actuator 13 by gravity. The gravity compensating device 8 applies a force in the +Z direction to the piston member 4 and the table 2 to offset the force generated in the -Z direction by the table 2 and the piston member 4 due to its own weight. In other words, the gravity compensating device 8 applies a force in the +Z direction to the piston member 4 and the table 2 to offset the force in the -Z direction due to the action of gravity. That is, the gravity compensation device 8 is oriented The table 2 and the lower space 5Hu below the piston member 4 supply gas to push up the table 2 and the piston member 4. In the present embodiment, the gravity compensating device 8 supplies the gas from the supply port 81 so that the pressure of the lower space 5Hu becomes higher than the pressure of the outer space of the cylinder member 5. The outer space of the cylinder member 5 is a space surrounding the table 2. The outer space of the cylinder member 5 is a surrounding space including the upper surface 4A of the piston member 4. The outer space of the cylinder member 5 is an outer space with respect to the lower space 5Hu. In the present embodiment, the space pressure outside the cylinder member 5 is atmospheric pressure. The gravity compensating device 8 supplies gas from the supply port 81 toward the lower space 5Hu so that the pressure of the lower space 5Hu becomes higher than the atmospheric pressure.

The gravity compensating device 8 can also supply the gas to the lower space 5Hu in consideration of the weight of the object S placed on the table 2. That is, the gravity compensating device 8 can also supply gas from the supply port 81 to reduce the effect of the table 2, the piston member 4, and the object S on the weight of the Z-axis actuator 13. In other words, the gravity compensation device 8 can also supply gas from the supply port 81 to reduce the force transmitted from the table 2, the piston member 4, and the object S to the Z-axis actuator 13 due to gravity.

Fig. 6 is a view showing an example of the Z-axis driving device 10 according to the embodiment. In the present embodiment, the Z-axis driving device 10 includes a so-called wedge-shaped lifting device. The first wedge member 11, the second wedge member 12, the Z-axis guiding device 14, and the Y-axis guiding device 16 are disposed on the lower surface 2B side (-Z side) of the table 2. The second wedge member 12 supports the table 2 on the lower surface 2B side of the table 2.

The first wedge member 11 and the second wedge member 12 are movable member. Each of the first wedge member 11 and the second wedge member 12 moves in a space below the table 2 (a space on the -Z side). Each of the first wedge member 11 and the second wedge member 12 moves in a space (a space on the +Z side) above the Y-axis stage 31.

The first wedge member 11 is movable in the XY plane. In the present embodiment, the first wedge member 11 is movable in the Y-axis direction. The outer shape of the first wedge member 11 in the YZ plane is substantially triangular (wedge). As shown in FIGS. 2 and 6, the first wedge member 11 has a lower surface 11B parallel to the XY plane, a slope 11G inclined with respect to the XY plane, and a side surface 11S parallel to the Z axis. The inclined surface 11G and the side surface 11S are disposed on the upper side (+Z side) than the lower surface 11B. The inclined surface 11G is inclined in the +Y direction upward (+Z direction). The lower end portion of the inclined surface 11G and the end portion on the -Y side of the lower surface 11B are connected. The upper end portion of the inclined surface 11G and the upper end portion of the side surface 11S are connected. The lower end portion of the side surface 11S and the end portion of the lower surface 11B on the +Y side are joined.

The second wedge member 12 is movably supported by the first wedge member 11. The first wedge member 11 and the second wedge member 12 are relatively movable. The second wedge member 12 is relatively moved with respect to the first wedge member 11 above the first wedge member 11 (+Z side).

The second wedge member 12 is movable at least in the Z-axis direction. In the present embodiment, the second wedge member 12 is moved in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. The outer shape of the second wedge member 12 in the YZ plane is substantially triangular (wedge). As shown in FIGS. 2 and 6, the second wedge member 12 has an upper surface parallel to the XY plane. 12A; a slope 12G inclined with respect to the XY plane; and a side surface 12S parallel to the Z axis. The upper surface 12A is disposed on the upper side (+Z side) than the side surface 12S and the slope surface 12G. The inclined surface 12G is inclined in the +Y direction and upward (+Z direction). In the present embodiment, the inclined surface 11G and the inclined surface 12G are parallel. The upper end portion of the inclined surface 12G and the end portion on the +Y side of the upper surface 12A are connected. The lower end portion of the inclined surface 12G and the lower end portion of the side surface 12S are connected. The upper end portion of the side surface 12S and the end portion on the -Y side of the upper surface 12A are joined.

The Z-axis guiding device 14 guides the second wedge member 12 to move the second wedge member 12 in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. At least a portion of the Z-axis guiding device 14 is disposed on the first wedge member 11. In the present embodiment, the Z-axis guiding device 14 includes a linear motion guiding mechanism. The Z-axis guiding device 14 includes a rail 14B disposed on the first wedge member 11 and a slider (block) 14A disposed on the second wedge member 12 and movable on the rail 14B. The rail 14B is a slope 11G that is disposed on the first wedge member 11. The slider 14A is a slope 12G that is disposed on the second wedge member 12.

The Z-axis guiding device 14 includes a direct-acting bearing. In the present embodiment, the Z-axis guiding device 14 includes a direct-acting rolling bearing. The rolling bearing has a rolling body. The rolling elements are one or both of the balls or rollers. That is, the rolling bearing is one or both of the ball bearing and the roller bearing. In the present embodiment, the Z-axis guiding device 14 includes a linear ball bearing.

Fig. 7 is a view showing an example of the Z-axis guiding device 14 according to the embodiment. The Z-axis guiding device 14 includes: a track 14B, and A slider (block, direct-acting bearing) 14A that is movable relative to the rail 14B. The rail 14B has a surface 41A facing upward, a side surface 41B disposed on both sides of the surface 41A, and a groove 41C formed on the side surface 41B, respectively. The slider 14A has a first opposing surface 42A that can face the surface 41A of the rail 14B, a second opposing surface 42B that can face the side surface 41B of the rail 14B, and at least a portion of the groove 41C that is disposed on the rail 14B of the rail 14B. Body (ball) 42T. The ball 42T is in contact with one side of the inner surface of the groove 41C and rolls. The ball 42T rolls along the groove 41C, whereby the slider 14A can be smoothly moved on the rail 14B.

In the present embodiment, the rail 14B is disposed on the first wedge member 11 (slope surface 11G) obliquely with respect to the XY plane. The rail 14B is disposed such that the surface 41A of the rail 14B is inclined with respect to the XY plane. As shown in Fig. 6, in the present embodiment, the inclination angle of the rail 14B (surface 41A) with respect to the XY plane is θ. The angle θ is larger than 0 degrees but smaller than 90 degrees. The slider 14A is disposed on the second wedge member 12 (the inclined surface 12G) such that the first opposing surface 42A and the surface 41A of the rail 14B are parallel. In the present embodiment, the slider 14A is disposed on the inclined surface 12G of the second wedge member 12. Further, the slider 14A may be disposed in the second wedge member 12. Three or more plural sliders 14A may be disposed in the second wedge member 12.

The second wedge member 12 is guided by the Z-axis guiding device 14 and moved in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. When the first wedge member 11 moves in the -Y direction, the second wedge member 12 moves (rises) in the +Z direction. The first wedge member 11 is facing +Y When the direction moves, the second wedge member 12 moves (drops) in the -Z direction. The table 2 is supported by the second wedge member 12. Therefore, the table 2 also moves together with the second wedge member 12 by the movement (lifting and lowering) of the second wedge member 12 in the Z-axis direction. That is, the second wedge member 12 is moved (raised) in the +Z direction, and the table 2 is moved in the +Z direction together with the second wedge member 12. The second wedge member 12 is moved (dropped) in the -Z direction, and the table 2 is moved in the -Z direction together with the second wedge member 12.

Further, in the Z-axis guiding device 14, the slider 14A is disposed on the inclined surface 11G of the first wedge member 11, and the rail 14B may be disposed on the inclined surface 12G of the second wedge member 12.

As shown in Fig. 6, the Y-axis guiding device 16 for guiding the first wedge member 11 is provided in the Y-axis direction. As described above, the Z-axis driving device 10 has the Z-axis actuator 13 that moves the first wedge member 11 in the Y-axis direction and moves the second wedge member 12 and the table 2 in the Z-axis direction.

The Y-axis guiding device 16 is guided by the Z-axis actuator 13, and guides the first wedge member 11 so that the first wedge member 11 moves in the Y-axis direction. At least a portion of the Y-axis guiding device 16 is disposed on the Y-axis stage 31. In the present embodiment, the Y-axis guiding device 16 includes a linear motion guiding mechanism. The Y-axis guiding device 16 includes a rail 16B disposed on the Y-axis stage 31, and a slider (block) 16A disposed on the first wedge-shaped member 11 and movable relative to the rail 16B. The rail 16B is fixed to the upper surface of the Y-axis stage 31. The slider 16A is fixed to the lower surface 11B of the first wedge member 11. The slider 16A moves together with the first wedge member 11. Track 16B is not in phase The Y-axis stage 31 is moved. The relative position of the track 16B with respect to the Y-axis stage 31 is fixed.

The Y-axis guiding device 16 includes a direct-acting rolling bearing. In the present embodiment, the Y-axis guiding device 16 includes a linear ball bearing. The first wedge member 11 is guided by the Y-axis guide device 16 and moved in the Y-axis direction by the operation of the Z-axis actuator 13. The Y-axis guiding device 16 has the same configuration as the Z-axis guiding device 14 described with reference to FIG. A detailed description of the configuration of the Y-axis guiding device 16 is omitted.

Further, in the Y-axis guiding device 16, the slider 16A may be disposed on the upper surface of the Y-axis stage 31, and the rail 16B may be disposed on the lower surface 11B of the first wedge-shaped member 11.

The X-axis guiding device 23 includes a linear motion guiding mechanism. The X-axis guiding device 23 has a rail 23B and a slider (block) 23A that is movable relative to the rail 23B. The X-axis guiding device 23 includes a direct-acting rolling bearing. In the present embodiment, the X-axis guiding device 23 includes a linear ball bearing. The X-axis stage 21 is guided by the X-axis guide device 23 and moves in the X-axis direction. The X-axis guiding device 23 has the same configuration as the Z-axis guiding device 14 described with reference to FIG. A detailed description of the configuration of the X-axis guiding device 23 is omitted.

The Y-axis guiding device 33 includes a linear motion guiding mechanism. The Y-axis guiding device 33 has a rail 33B and a slider (block) 33A that is movable relative to the rail 33B. The Y-axis guiding device 33 includes a direct-acting rolling bearing. In the present embodiment, the Y-axis guiding device 33 includes a direct-acting ball bearing shaft Linear ball bearing. The Y-axis stage 31 is guided by the Y-axis guide device 33 and moves in the Y-axis direction. The Y-axis guiding device 33 has the same configuration as the Z-axis guiding device 14 described with reference to FIG. A detailed description of the configuration of the Y-axis guiding device 33 is omitted.

Next, an example of the operation of the above-described table device TS will be described.

When the table 2 moves in the X-axis direction, the X-axis actuator 22 is actuated. The X-axis stage 21 is moved in the X-axis direction by the operation of the X-axis actuator 22. The X-axis stage 21 is guided by the X-axis guide device 23 to smoothly move in the X-axis direction. The Y-axis stage 31 is supported by the X-axis stage 21, and the Y-axis stage 31 supported by the X-axis stage 21 and the Y-axis stage 31 are supported by the first wedge-shaped member 11 and the second wedge-shaped member 12. The table 2 is moved in the X-axis direction together with the X-axis stage 21.

When the table 2 moves in the Y-axis direction, the Y-axis actuator 32 is actuated. The Y-axis stage 31 is moved in the Y-axis direction by the operation of the Y-axis actuator 32. The Y-axis stage 31 is guided by the Y-axis guide device 33 and smoothly moves in the Y-axis direction. By the movement of the Y-axis stage 31 in the Y-axis direction, the table 2 supported by the Y-axis stage 31 through the first wedge-shaped member 11 and the second wedge-shaped member 12 is in the Y-axis direction together with the Y-axis stage 31. mobile.

In the present embodiment, the Y-axis stage 31 is connected to the cylinder member 5, and the cylinder member 5 is supported by the bottom member 1 in a non-contact manner by the air bearing 7G. That is, in the present embodiment, the Y-axis stage 31 is transmitted through the cylinder member 5 and is supported by the bottom member 1 in a non-contact manner. By air bearing 7G, one side The fluctuation of the position of the cylinder member 5 (the Y-axis stage 31) in the Z-axis direction is suppressed, and movement in the X-axis direction and the Y-axis direction is allowed. The table 2 is moved on the target track (expected track) in the X-axis direction and the Y-axis direction. By the operation of the X-axis actuator 22, the table 2 can be moved straight in the X-axis direction by the X-axis guiding device 23. By the action of the Y-axis actuator 32, the table 2 can be moved straight in the Y-axis direction by the Y-axis guiding device 33.

When the table 2 moves in the Z-axis direction, the Z-axis actuator 13 is actuated. By the operation of the Z-axis actuator 13, the power of the Z-axis actuator 13 is transmitted to the first wedge member 11 through the power transmission mechanism 15. The first wedge member 11 is moved in the Y-axis direction by the operation of the Z-axis actuator 13. The first wedge member 11 is guided by the Y-axis guiding device 16 and smoothly moves in the Y-axis direction. The first wedge member 11 moves on the target rail (expected orbit) in the Y-axis direction by the Y-axis guide device 16. In the present embodiment, the first wedge member 11 is vertically movable in the Y-axis direction by the Y-axis guiding device 16.

The second wedge member 12 is moved in the Z-axis direction by the movement of the first wedge member 11 in the Y-axis direction. The second wedge member 12 is guided by the Z-axis guiding device 14 and smoothly moves in the Z-axis direction. The movement of the second wedge member 12 in the Z-axis direction causes the table 2 supported by the second wedge member 12 to move in the Z-axis direction together with the second wedge member 12.

In the present embodiment, the piston member 4 movably supported by the cylinder member 5 in the Z-axis direction is connected to the table 2. By cylinder member 5 The air bearing 6G formed by the bearing member 6 suppresses the movement of the piston member 4 (the table 2) in the X-axis direction and the Y-axis direction with respect to the cylinder member 5, and allows movement in the Z-axis direction. Thereby, the table 2 moves in the Z-axis direction on the target track (the expected track). In the present embodiment, the piston member 4 that is non-contactly supported by the cylinder member 5 by the air bearing 6G allows the table 2 to move straight in the Z-axis direction.

In the present embodiment, the Z-axis driving device 10 includes a wedge-shaped lifting device, and the second wedge member 12 is connected to the table 2. By the cylinder member 5 and the piston member 4, the relative position of the second wedge member 12 and the Y-axis stage 31 in the XY plane does not substantially change. On the other hand, the table 2 is supported by the cylinder member 5 through the piston member 4 so as to be movable in the Z-axis direction. Therefore, the distance between the second wedge member 12 and the Y-axis stage 31 (the distance in the Z-axis direction) is changed between the second wedge member 12 and the Y-axis stage 31 in the Z-axis direction, so that the first wedge member 11 is opposed to each other. The second wedge member 12 and the Y-axis stage 31 are relatively movable in the Y-axis direction, whereby the second wedge-shaped member 12 is movable in the Z-axis direction with respect to the first wedge member 11 and the Y-axis stage 31.

Further, the air bearing 6G maintains a gap (non-contact state) between the inner surface 5S of the cylinder member 5 and the outer surface 4C of the piston member 4, and the lower surface 5B of the cylinder member 5 and the guide surface of the bottom member 1 are maintained by the air bearing 7G. 1A gap (non-contact state). Therefore, when the table 2 and the piston member 4 move in the X-axis direction and the Y-axis direction, the movement of the table 2 and the piston member 4 in the X-axis direction and the Y-axis direction is synchronized, so that the cylinder member 5 can be in the X-axis direction. And move in the Y-axis direction. Therefore, workbench 2 Even when moving in the X-axis direction and the Y-axis direction, the cylinder member 5 can continuously guide the piston member 4 in the non-contact state in the Z-axis direction.

Further, in the present embodiment, the Y-axis stage 31 is connected to the cylinder member 5, and moves together with the table 2 in the X-axis direction and the Y-axis direction. That is, when the table 2 moves in the X-axis direction and the Y-axis direction, the Y-axis stage 31 and the cylinder member 5 move together with the table 2. Thereby, even if the table 2 moves in the X-axis direction and the Y-axis direction, the cylinder member 5 can continuously guide the piston member 4 in the non-contact state in the Z-axis direction.

By the operation of the Z-axis actuator 13, the object S supported on the table 2 is placed at the target position in the Z-axis direction. For example, when the power of the Z-axis actuator 13 is used to move the table 2 in the +Z direction, or when the power of the Z-axis actuator 13 is used to maintain the position of the table 2 in the Z-axis direction, there is a load. The possibility of its Z-axis actuator 13. That is, in order to raise the table 2 or maintain the position of the table 2 in the Z-axis direction, the Z-axis actuator 13 must continuously generate a predetermined power (torque). At this time, the Z-axis actuator 13 is continuously supplied with predetermined electric power (current), and as a result, there is a possibility that the Z-axis actuator 13 generates heat. When the Z-axis actuator 13 generates heat, the surrounding members may be thermally deformed. As a result, there is a possibility that the positioning accuracy of the table 2 is lowered, or the table 2 is displaced from the target track, and the performance of the table device TS is lowered. Further, there is a possibility that the object S supported on the table 2 is thermally deformed by the heat generated by the Z-axis actuator 13.

In the present embodiment, the gravity compensation device 8 is provided. Therefore, when the table 2 moves in the +Z direction, or in the Z-axis direction In the case of the position of the table 2, the power (torque) generated by the small Z-axis actuator 13 may be used. That is, it is sufficient to supply a small amount of electric power (current) to the Z-axis actuator 13. Therefore, heat generation of the Z-axis actuator 13 is suppressed. As a result, thermal deformation of the surrounding member and thermal deformation of the object S can be suppressed.

Further, since the gravity compensation device 8 is provided, even if the mass (weight) of the object S mounted on the table 2 is increased, the load acting on the Z-axis actuator 13 can be reduced. Further, since the gravity compensation device 8 is provided, a small power can be generated by the Z-axis actuator 13. Therefore, the miniaturization of the Z-axis actuator 13 can be obtained.

Further, since the gravity compensation device 8 increases the pressure of the lower space 5Hu, even if an abnormality such as a power failure occurs (emergency stop), the Z-axis actuator 13 can suppress the rapid drop (fall) of the table 2 when no power is generated. For example, the electromagnetic brake for preventing the fall of the table 2 can be omitted, and heat generation (thermal deformation) due to the electromagnetic brake can be eliminated.

As described above, according to the present embodiment, the table 2 can be moved in three directions of the Z-axis direction, the X-axis direction, and the Y-axis direction by the drive system 3. According to the present embodiment, the piston member 4 connected to the table 2 is supported by the cylinder member 5 in a non-contact manner by the air bearing 6G formed by the bearing member 6. The bearing member 6 forms an air bearing 6G with the piston member 4, and movably supports (guides) the piston member 4 in the Z-axis direction. Thereby, the table 2 to which the piston member 4 is connected can be accurately moved in the Z-axis direction to the target track (expected track).

In the present embodiment, the bearing member 6 movably supports (guides) the piston member 4 such that the piston member 4 is pen-shaped in the Z-axis direction. Move straight. Thereby, the table 2 to which the piston member 4 is attached can be moved straight in the Z-axis direction. That is, the linearity of the movement of the piston member 4 and the table 2 is suppressed by the bearing member 6 which can form the air bearing 6G. Thereby, the object S supported on the table 2 is placed at the target position.

In the present embodiment, an air bearing 6G is formed between the piston member 4 and the bearing member 6, and the bearing member 6 supports the piston member 4 in a non-contact manner. Thereby, the piston member 4 can smoothly move in the Z-axis direction. When the bearing member 6 comes into contact with the piston member 4, there is a possibility that resistance is generated with respect to the movement of the piston member 4. As a result, regardless of whether or not the table 2 and the piston member 4 are moved straight, there is a possibility that the table 2 and the piston member 4 cannot move straight. Further, when the bearing member 6 and the piston member 4 come into contact with each other, there is a possibility that vibration occurs due to the movement of the piston member 4. When the piston member 4 generates vibration, the table 2 also vibrates, and as a result, there is a possibility that the positioning accuracy of the table 2 is lowered. In the present embodiment, since the bearing member 6 is movably supported by the piston member 4 in a non-contact manner, the table 2 and the piston member 4 can be moved straight. And suppress the generation of vibration. As a result, the reduction in the positioning accuracy of the table 2 is suppressed, and the table 2 and the object S supported on the table 2 can be placed at the target position.

Further, in the present embodiment, the cylinder member 5 is supported by the bottom member 1 in a non-contact manner by the air bearing 7G formed by the bearing member 7. Thereby, the table 2 supported by the cylinder member 5 through the piston member 4 can smoothly move in the XY plane, and can be accurately moved by the target track in the X-axis direction and the Y-axis direction, respectively.

Further, according to the present embodiment, the gap between the inner surface 5S of the cylinder member 5 and the outer surface 4C of the piston member 4 is maintained by the air bearing 6G (non-contact state), and the lower surface 5B and the bottom member of the cylinder member 5 are maintained by the air bearing 7G. The gap of the guide surface 1A of 1 (non-contact state). Therefore, when the table 2 and the piston member 4 move in the X-axis direction and the Y-axis direction, the gap between the cylinder member 5 and the piston member 4 and the gap between the cylinder member 5 and the bottom member 1 are maintained, and X is The movement of the table 2 and the piston member 4 in the axial direction and the Y-axis direction is synchronized, and the cylinder member 5 is movable in the X-axis direction and the Y-axis direction. Therefore, even if the table 2 and the piston member 4 move in the X-axis direction and the Y-axis direction, the cylinder member 5 can continuously support the piston member 4 to move in the Z-axis direction without contact.

As described above, according to the present embodiment, the table 2 can be aimed at the Z-axis direction, the X-axis direction, and the Y-axis direction by the air bearing 6G formed of the bearing member 6 and the air bearing 7G formed of the bearing member 7, respectively. Move with precision. Therefore, the reduction in the positioning accuracy of the table 2 can be suppressed.

Further, in the present embodiment, the drive system 3 includes an X-axis driving device 20 including an X-axis stage 21 that is movable to be supported by the bottom member 1, and an X-axis actuator 22 that moves the X-axis stage 21; The Y-axis driving device 30 includes a Y-axis stage 31 that is movable to be supported by the X-axis stage 21, and a Y-axis actuator 32 that moves the Y-axis stage 31. The Z-axis driving device 10 is disposed in the Y-axis. On the axle stage 31, the table 2 is moved in the Z-axis direction. The cylinder member 5 is connected to the Y-axis stage 31. Thereby, the table 2 and the Y-axis stage 31 and the cylinder member 5 can be made in the XY plane. Move together. Therefore, the gap between the outer surface 4C of the piston member 4 and the inner surface 5S of the cylinder member 5 can be stably maintained, and the movement of the cylinder member 5, the table 2, and the piston member 4 in the XY plane can be stabilized. Based on this stable movement, the table 2 can be moved on the target track.

Further, in the present embodiment, the table device TS is a wedge-shaped lifting device that moves the table 2 by the relative movement of the first wedge member 11 and the second wedge member 12. Therefore, by adjusting the angle θ, the ratio of the amount of movement of the first wedge member 11 in the Y-axis direction to the amount of movement of the second wedge member 12 in the Z-axis direction (reduction ratio, decomposition energy) can be adjusted.

Further, in the present embodiment, since the gravity compensation device 8 is provided, the load acting on the Z-axis actuator 13 can be reduced. For this reason, heat generation of the Z-axis actuator 13 is suppressed, and in the table device TS, thermal deformation of the surrounding members of the Z-axis actuator 13 can be suppressed. The member around the Z-axis actuator 13 includes a member of the Z-axis guiding device 14, a member of the Y-axis guiding device 16, a Y-axis stage 31, a first wedge member 11, a second wedge member 12, a piston member 4, At least one of the cylinder member 5 and the table 2. Therefore, it is possible to suppress a decrease in the positioning accuracy of the table 2 or to move the table 2 from the target track. As a result, it is possible to suppress a decrease in the performance of the stage device TS.

Further, in the present embodiment, the outer shape of the cross section of the piston member 4 is circular, and the bearing member 6 is a cylindrical member disposed around the side surface 4C of the piston member 4. The processing of the circular piston member 4 in the shape of the cross section and the processing of the piston member such as the angular shape are highly likely to be highly accurate. In other words, in the manufacture of a circular piston structure In the case of the member 4, it is more likely that the target shape can be easily obtained when the piston member having an angular shape is manufactured. Further, in the case of manufacturing the bearing member 6 having the inner surface 6S having a circular cross section, it is more likely to obtain a high machining accuracy (target shape) than to manufacture a bearing member having an inner surface having an angular cross section. For example, in the case of manufacturing an angular piston member and a bearing member, the size of the gap formed between the corner portion of the piston member and the bearing member and the size of the gap formed between the flat portion of the piston member and the bearing member When they are equal, there is a possibility that the manufacture of the piston member and the bearing member is difficult. According to the present embodiment, the use of the circular piston member 4 and the bearing member 6 can suppress the unevenness of the gap size formed between the side surface 4C of the piston member 4 and the inner surface 6S of the bearing member 6. For this reason, in the gap formed between the side surface 4C of the piston member 4 and the inner surface 6S of the bearing member 6, the unevenness of the pressure is suppressed. Therefore, the reduction in the performance of the air bearing 6G is suppressed, and the movement of the piston member 4 from the target rail can be suppressed.

Further, in the present embodiment, at least two piston members 4 are disposed, and are respectively connected to different portions of the table 2. Therefore, by the plurality of piston members 4 connected to the table 2, for example, the rotation of the table 2 can be suppressed. Thereby, the positioning accuracy of the table 2 is improved. That is, in the present embodiment, the outer shape of the cross section of the piston member 4 is circular, and the bearing member 6 is a cylindrical member disposed around the side surface 4C of the piston member 4. Therefore, there is a possibility that the piston member 4 is moved (rotated) in the θZ direction inside the bearing member 6. When there is one piston member 4 connected to the table 2, there is a possibility that the table 2 is rotated by the rotation of the piston member 4 with respect to the bearing member 6. This embodiment is to configure a plurality of activities. Plug member 4. Therefore, the plurality of piston members 4 are supported by the bearing member 6 and the cylinder member 5, thereby suppressing the movement (rotation) of the table 2 in the θZ direction.

Further, in the present embodiment, each of the Z-axis guiding device 14, the Y-axis guiding device 16, the Y-axis guiding device 33, and the X-axis guiding device 23 is constituted by a linear motion guiding mechanism having a rolling bearing. The Z-axis guiding device 14, the Y-axis guiding device 16, the Y-axis guiding device 33, and the X-axis guiding device 23 are rolling bearings each having substantially the same structure. Therefore, the table 2 is guided by the Z-axis guiding device 14, the Y-axis guiding device 16, the Y-axis guiding device 33, and the X-axis guiding device 23, and targets in the Z-axis direction, the X-axis direction, and the Y-axis direction, respectively. The track moves with high precision.

Moreover, in this embodiment, the table 2 is supported by the second wedge member 12 through the support device 9. Therefore, even if the second wedge member 12 performs undesired movement (vibration), the support device 9 can be used to suppress the undesired movement (vibration) from being transmitted to the table 2.

Furthermore, in the present embodiment, the first wedge member 11 is moved in the Y-axis direction. The first wedge member 11 can also be moved in the X-axis direction.

Further, in the present embodiment, the cylinder member 5 and the Y-axis stage 31 may not be connected.

Further, in the present embodiment, the support member 9 may be omitted. The second wedge member 12 may be fixed to the table 2. The second wedge member 12 can also be fixed to the table 2 through the connecting member.

Further, in the present embodiment, the bearing member 6 is included The porous body is exemplified by a so-called porous throttling method in which the air bearing 6G is formed by the gas supplied from the pores of the porous body. The throttling manner of the bearing member 6 for forming the air bearing 6G is not limited to the porous throttling. For example, the surface throttling method in which the gas is supplied through the groove provided on the bearing surface (guide surface) may be used without using the self-forming throttling method of the porous body or the orifice throttling method. For example, in the case of the bearing member 6 of the orifice throttle type, the supply port 61 for supplying gas includes an opening of the orifice. The same applies to the bearing member 7. The bearing member 7 is a self-forming throttling method capable of a porous throttling mode, or a porous body, or an orifice throttling mode, and can also supply a surface throttling of a gas through a groove provided on a bearing surface (guide surface). the way.

Further, in the present embodiment, the outer shape of the piston member 4 having a cross section parallel to the XY plane is circular. The outer shape of the piston member 4 having a cross section parallel to the XY plane may also be polygonal. The outer shape of the cross section of the piston member 4 may also be a quadrangular shape. The outer shape of the cross section of the piston member 4 is not limited to a quadrangular shape, and may be other polygonal shapes.

Further, in the present embodiment, four piston members 4 and cylinder members 5 are disposed around the drive system 3. The piston member 4 and the cylinder member 5 may be disposed at least two around the drive system 3. The piston member 4 may be connected to two or three at the table 2, or five or more arbitrary plurality of piston members 4 may be connected to the table 2. The cylinder members 5 may be disposed corresponding to the plurality of piston members 4, respectively.

The plurality of piston members 4 may be connected to different portions of the table 2 in the XY plane. A plurality of piston members 4 are connected to the table 2, and the plurality of piston members 4 are supported by the cylinder members 5, This suppresses the movement of the table 2 in the XY plane with respect to the cylinder member 5. That is, the plurality of piston members 4 are respectively connected to different plural portions of the table 2 in the XY plane, and the plurality of piston members 4 are supported by the bearing member 6 and the cylinder member 5, thereby suppressing the table 2 in the θZ direction. Movement (rotation) with respect to the cylinder member 5.

For example, when two (two) piston members 4 are connected to the table 2, the piston members 4 are respectively separated from the first portion of the table 2 and the second portion of the table 2 different from the first portion. Just connect. When three (three) piston members 4 are connected to the table 2, the piston members 4 are only the first portion of the table 2; the second portion of the table 2 different from the first portion; and The third portion of the table 2 having the first portion and the second portion may be connected to each other.

When four (four) piston members 4 are connected to the table 2, the piston members 4 are only the first portion of the lower surface 2B of the table 2, and the lower portion of the table 2 different from the first portion. The second portion; the third portion of the lower surface 2B of the table 2 different from the first portion and the second portion; and the fourth portion of the lower surface 2B of the table 2 different from the first portion, the second portion, and the third portion, respectively Just connect. The first portion, the second portion, the third portion, and the fourth portion may be disposed around the center of the lower surface 2B.

Further, in the present embodiment, the table 2 is formed in a rectangular shape. The table 2 can also be circular in the XY plane, or a polygon such as a hexagon or an octagon.

Further, in the present embodiment, the Z-axis guiding device 14 is provided. Contains rolling bearings with rolling elements. The Z-axis guiding device 14 may also include a direct-acting sliding bearing that does not have a rolling element, and may also include a direct-acting air bearing. Furthermore, the Z-axis guiding device 14 may not have a slider. For example, the second wedge member 12 is moved in the Z-axis direction, and the inclined surface 12G of the second wedge member 12 is moved along the rail provided on the first wedge member 11. At this time, the rail provided on the first wedge member 11 has a function as a guiding device for guiding the second wedge member 12.

Similarly, the Y-axis guiding device 16 may also include a direct-acting sliding bearing or a direct-acting air bearing. Further, the Y-axis guiding device 16 may not have a slider.

Similarly, at least one of the Y-axis guiding device 33 and the X-axis guiding device 23 may include a direct-acting sliding bearing or a direct-acting air bearing. Further, at least one of the Y-axis guiding device 33 and the X-axis guiding device 23 may not have a slider.

<Second embodiment>

The second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof will be simplified or omitted.

Fig. 8 is a view showing an example of a semiconductor manufacturing apparatus 200 including a stage device TS according to the embodiment. The semiconductor manufacturing apparatus 200 includes a semiconductor device manufacturing apparatus that can manufacture a semiconductor device. The semiconductor manufacturing apparatus 200 includes a transport device 300 that can transport an object S for manufacturing a semiconductor device. The conveying device 300 includes the work related to the embodiment. The station device TS. Further, Fig. 8 is a diagram showing the simplified table device TS.

In the present embodiment, the object S is a substrate for manufacturing a semiconductor device. A semiconductor device is fabricated from the object S. The object S may also comprise a semiconductor wafer or a glass plate. A device pattern (wiring pattern) is formed on the object S, thereby manufacturing a semiconductor device.

The semiconductor manufacturing apparatus 200 is a process for forming a device pattern on the object S disposed at the processing position PJ1. The table device TS arranges the object S supported on the table 2 at the processing position PJ1. The conveyance device 300 includes a loading device 301 that can transport (load) the object S toward the table 2 of the table device TS, and a carry-out device 302 that can transport (lift out) the object S from the table 2. The loading device 301 transfers (loads) the object S before the processing to the table 2. The object S supported by the table 2 is transported to the processing position PJ1 by the table device TS. The processed object S is transported (lifted out) from the table 2 by the unloading device 302.

The table device TS is a moving table 2 that moves the object S supported on the table 2 to the processing position PJ1. As described in the above embodiment, the table 2 is movable in the three directions of the X-axis direction, the Y-axis direction, and the Z-axis direction, and can move the table 2 on the target track, and can be moved with high positional accuracy. Therefore, the table device TS can arrange the object S supported on the table 2 at the processing position (target position) PJ1.

For example, when the semiconductor manufacturing apparatus 200 includes a measuring device that measures a device pattern of the object S through the optical system 201, the processing position PJ1 is a position (measurement position) including the focus of the optical system 201. By arranging the object S at the processing position PJ1, the semiconductor manufacturing apparatus 200 can transmit the image of the device pattern formed on the object S through the optical system 201. The semiconductor manufacturing apparatus 200 includes a film forming apparatus that forms a film on the object S, and the processing position PJ1 is a position at which a material for film formation can be supplied. The object S is disposed at the processing position PJ1, whereby a film for forming a device pattern is formed on the object S.

After the object S is processed at the processing position PJ1, the processed object S can be transported from the table 2 by the carry-out device 302. The object S conveyed (lifted out) by the carry-out device 302 is transported to the processing device that performs the next step.

In the present embodiment, the table device TS is configured to arrange the object S at the processing position (target position) PJ1. Therefore, it is possible to suppress the production of a defective product. In other words, the table device TS suppresses the decrease in the positioning accuracy of the object S of the semiconductor manufacturing apparatus 200, and suppresses the occurrence of defective products.

Fig. 9 is a view showing an example of an inspection apparatus 400 including a table device TS according to the present embodiment. The inspection device 400 checks an object (semiconductor device) S2 manufactured by the semiconductor manufacturing device 200. The inspection device 400 includes a conveyance device 300B that can transport an object S2. The conveying device 300B includes the table device TS of the present embodiment. Further, Fig. 9 is a diagram showing the simplified workbench apparatus TS.

The inspection device 400 is an inspection of the object S2 disposed at the inspection position PJ2. The table device TS is a thing to be supported on the table 2 The body S2 is disposed at the inspection position PJ2. The conveyance device 300B includes a loading device 301B that can transport (load) the object S2 toward the table 2 of the table device TS, and a carry-out device 302B that can transport (lift out) the object S2 from the table 2. By the loading device 301B, the object S2 before inspection is carried (loaded) to the table 2. The object S2 supported by the table 2 is transported to the inspection position PJ2 by the table device TS. The unloading device 302B transports (lifts out) the inspected object S2 from the table 2.

The table device TS moves the table 2 to move the object S2 supported on the table 2 to the inspection position PJ2. As described in the above embodiment, the table 2 can move the table 2 on the target track in three directions of the X-axis direction, the Y-axis direction, and the Z-axis direction, and can move with high positional accuracy. Therefore, the table device TS can arrange the object S2 supported on the table 2 at the inspection position (target position) PJ2.

In the present embodiment, the inspection apparatus 400 performs optical inspection of the object S2 using the detection light. The inspection apparatus 400 includes an irradiation device 401 that can emit detection light, and a light receiving device 402 that emits light from the irradiation device 401 and that can receive at least a portion of the detection light reflected by the object S2. In the present embodiment, the inspection position PJ2 includes the irradiation position of the detection light. The object S2 is placed at the inspection position PJ2, whereby the optical inspection of the state of the object S2 is performed.

After the inspection device PJ2 performs the inspection of the object S2, the inspected object S2 is carried out from the table 2 by the unloading device 302B.

In the present embodiment, the table device TS is capable of The body S2 is disposed at the inspection position (target position) PJ2, and the occurrence of inspection failure can be suppressed. That is, the inspection apparatus 400 can judge whether the object S2 is defective or not. Thereby, for example, the defective object S2 is suppressed from being transported to the next step, or shipped.

1‧‧‧ bottom member

1A‧‧‧Top (guide surface)

2‧‧‧Workbench

2A‧‧‧above

2B‧‧‧ below

3‧‧‧Drive system

4‧‧‧ piston components

4A‧‧‧above

4B‧‧‧ below

4C‧‧‧ side

5‧‧‧Cylinder components

5A‧‧‧above

5B‧‧‧ below

5H‧‧‧Internal space

5Hu lower space

5S‧‧‧ inside

6‧‧‧ bearing components

6G‧‧‧Air bearing

6S‧‧‧ inside

7‧‧‧ bearing components

7B‧‧‧ below

7G‧‧‧Air bearing

8‧‧‧Gravity compensation device

9‧‧‧Support device

9A‧‧‧ Inner ring components

9B‧‧‧Outer ring members

10‧‧‧Z-axis drive unit (1st shaft drive unit)

11‧‧‧1st wedge member

12‧‧‧2nd wedge member

13‧‧‧Z-Axis Actuator (1st Axis Actuator)

14‧‧‧Z-axis guiding device

14A‧‧‧Slider

14B‧‧‧ Track

15‧‧‧Power transmission agency

16‧‧‧Y-axis guiding device

16A‧‧‧Slider

16B‧‧‧ Track

20‧‧‧X-axis drive unit (2nd axis drive unit)

21‧‧‧X-axis stage (2nd axis stage)

22‧‧‧X-Axis Actuator (2nd Axis Actuator)

22A‧‧‧ movable element (slider)

22B‧‧‧Fixed components (stator)

23‧‧‧X-axis guiding device

23A‧‧‧Slider

23B‧‧ Track

30‧‧‧Y-axis drive (3rd axis drive)

31‧‧‧Y-axis stage (3rd axis stage)

32‧‧‧Y-axis actuator (3rd axis actuator)

33‧‧‧Y-axis guiding device

33A‧‧‧Slider

33B‧‧ Track

40‧‧‧Connecting members

61‧‧‧Supply

71‧‧‧Supply

81‧‧‧Supply

TS‧‧‧Workbench unit

Claims (8)

A table device comprising: a bottom member having a guide surface parallel to a predetermined surface; a table disposed on the bottom member; and a drive system including a direction parallel to the first axis orthogonal to the predetermined surface An actuator for generating power between the bottom member and the table, wherein the table is rotatable in a direction parallel to the first axis, parallel to a second axis in the predetermined surface, and in the predetermined plane Moving in a direction parallel to the third axis orthogonal to the second axis; the piston member has an upper surface, a lower surface, and a side surface connecting the upper surface and the lower surface, and at least a portion of the upper surface side is connected to the table; the cylinder member Arranged around the piston member, supported to move the piston member in a direction parallel to the first axis, and movably supported in a direction parallel to the second axis and a direction parallel to the third axis The bottom member; the first bearing member is disposed in the cylinder member, and an air bearing is formed between a side surface of the piston member; and the second bearing member is disposed in the steam a cylinder member forming an air bearing between the guiding surface of the bottom member; and a gravity compensating device disposed to face the lower space of the inner space of the cylinder member facing the lower surface of the piston member, having the lower space Supply gas supply port. The table device according to claim 1, wherein the piston member is a plurality of positions respectively on a peripheral portion of the table To be connected, the above-described cylinder member is disposed in plurality around the above-described drive system. The table device according to claim 1, wherein the drive system includes: a second shaft drive device including a second shaft stage movably supported by the bottom member in a direction parallel to the second axis And a second axis actuator that moves the second axis stage; the third axis drive device includes a third axis stage that is movably supported by the second axis stage in a direction parallel to the third axis And a third axis actuator that moves the third axis stage; and the first axis drive device is disposed on the third axis stage, and moves the table in a direction parallel to the first axis, the cylinder The member is connected to the third axis stage. The table device according to claim 3, wherein the first shaft driving device includes a first wedge member movably supported by the third member in a direction parallel to the second axis or the third axis. a second stage wedge; the second wedge member is disposed on the first wedge member to relatively move the first wedge member; the first shaft actuator moves the first wedge member; and the guiding device is at least one And the first wedge member is disposed on the first wedge member, and the second wedge member is movably guided in a direction parallel to the first axis by the movement of the first wedge member, and the table is supported by the first 2 wedge members. The table device according to claim 4, wherein the guide device includes a direct-acting rolling bearing having a rail disposed on one of the first wedge-shaped member and the second wedge-shaped member, and A slider disposed on the other side of the wedge member to be movable relative to the above-mentioned rail. A conveying device comprising the table device described in claim 1 of the patent application. A semiconductor manufacturing apparatus comprising the stage device described in claim 1 of the patent application. An inspection apparatus comprising the table apparatus described in claim 1 of the patent application.