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TW201437277A - Curable resin composition - Google Patents

Curable resin composition Download PDF

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Publication number
TW201437277A
TW201437277A TW103101278A TW103101278A TW201437277A TW 201437277 A TW201437277 A TW 201437277A TW 103101278 A TW103101278 A TW 103101278A TW 103101278 A TW103101278 A TW 103101278A TW 201437277 A TW201437277 A TW 201437277A
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epoxy resin
resin composition
resin
curable resin
mass
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TW103101278A
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Chinese (zh)
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TWI613251B (en
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Shigeo Nakamura
Kenji Kawai
Miki Matsuyama
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Ajinomoto Kk
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/38Layered products comprising a layer of synthetic resin comprising epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K9/00Use of pretreated ingredients
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/002Physical properties
    • C08K2201/005Additives being defined by their particle size in general

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Epoxy Resins (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

The purpose of this invention is to provide a curable resin composition having the excellent film-like resin fluidity (fillability), having the lower arithmetic mean roughness for insulation layers in wet type roughening steps as well as the lower square mean square root roughness, allowing formation thereon with an electroplated conductor layer with the sufficient peel strength and having the lower linear thermal expansion coefficient. The solution comprises providing a curable resin composition characterized by containing: (1) an epoxy resin mixture containing (1-A) epoxy resin A having at least two structures selected from biphenyl structure, bixylenol structure, bisphenol acetophenone structure, and bisphenol fluorene structure, and (1-B) epoxy resin B other than the said epoxy resin A, wherein the epoxy equivalent of the epoxy resin A is 1500 to 4800 and the content of the epoxy resin A is 3 to 30 mass% relative to 100 mass% of the epoxy resin mixture; (2) a curing agent; and (3) an inorganic filler material.

Description

硬化性樹脂組成物 Curable resin composition

本發明係有關硬化性之樹脂組成物。又本發明係有關含有該硬化性樹脂組成物之絕緣層用硬化性樹脂組成物、薄片狀層合材料、多層印刷配線板、半導體裝置。 The present invention relates to a curable resin composition. Further, the present invention relates to a curable resin composition for an insulating layer containing the curable resin composition, a sheet-like laminate, a multilayer printed wiring board, and a semiconductor device.

近年來隨著電子機器之小型化、高性能性,而要求多層印刷配線板中增層複層化、配線微細化及高密度化。 In recent years, with the miniaturization and high performance of electronic equipment, it is required to increase the number of layers in the multilayer printed wiring board, to make the wiring finer and higher in density.

對此曾出現各種組合提案。例如專利文獻1所揭示,以特定構造之高分子環氧樹脂作為印刷配線板用之樹脂組成物用,改善耐熱性、低吸水性、電氣特性、成型性、可動性、耐衝擊性及接著性(請求項及段落編號0003等)。但專利文獻1之樹脂組成物係有關環氧當量為5000g/當量以上之高分子環氧樹脂,但5000g/當量以下之耐熱性不足而不宜(段落0016)。 Various combinations of proposals have emerged. For example, as disclosed in Patent Document 1, a polymer epoxy resin having a specific structure is used as a resin composition for a printed wiring board, and heat resistance, low water absorbability, electrical properties, moldability, movability, impact resistance, and adhesion are improved. (Request and paragraph number 0003, etc.). However, the resin composition of Patent Document 1 is a polymer epoxy resin having an epoxy equivalent of 5000 g/eq or more, but heat resistance of 5000 g/eq or less is insufficient (paragraph 0016).

先前技術文獻 Prior technical literature 專利文獻 Patent literature

專利文獻1:特開2003-252951號公報 Patent Document 1: JP-A-2003-252951

本發明所欲解決之課題為,提供薄膜狀之樹脂流動性(填埋性)優良,於濕式粗化步驟中不僅絕緣層表面之算術平均粗糙度較低,自乘平均平方根粗糙度也較低(低粗糙度),可於其上方形成具有充分撕剝強度之電鍍導體層,且線熱膨脹係數也較低之硬化性樹脂組成物。 The problem to be solved by the present invention is to provide a film-like resin excellent in fluidity (filling property). In the wet roughening step, not only the arithmetic mean roughness of the surface of the insulating layer is low, but also the self-average square root roughness is also higher. Low (low roughness), a curable resin composition having a plated conductor layer having sufficient tear strength and having a low coefficient of thermal expansion of the wire can be formed thereon.

針對上述課題經本發明者們專心檢討後發現,特徵為含有(1)含有具有特定構造之環氧樹脂A,與其他之環氧樹脂B的環氧樹脂組成物中,以前述環氧樹脂混合物為100質量%時之前述環氧樹脂A的含量為3~30質量%,前述環氧樹脂A之環氧當量為1500~4800的環氧樹脂混合物,(2)硬化劑,及(3)無機填充材料之硬化性樹脂組成物,可達成上述優良填埋性、低粗糙度、較高撕剝強度及較低線熱膨脹係數,而完成本發明。 In view of the above-mentioned problems, the present inventors have intensively reviewed and found that the epoxy resin composition containing (1) epoxy resin A having a specific structure and other epoxy resin B is composed of the above epoxy resin mixture. 100% by mass of the epoxy resin A is 3 to 30% by mass, the epoxy resin A has an epoxy equivalent of 1500 to 4800, an epoxy resin mixture, (2) a hardener, and (3) an inorganic filler. The curable resin composition of the material can achieve the above-mentioned excellent landfillability, low roughness, high tear strength and low linear thermal expansion coefficient, and the present invention has been completed.

即,本發明係包含下述態樣。 That is, the present invention encompasses the following aspects.

[1]一種硬化性樹脂組成物,其特徵為含有(1)含有(1-A)具有由聯苯構造、聯二甲苯酚構造、聯苯乙醯苯構造,及雙酚芴構造中所選出的2種以上之構造的環氧樹脂A,與(1-B)前述環氧樹脂A以外之 環氧樹脂B的環氧樹脂混合物中,以前述環氧樹脂樹脂混合物為100質量時之前述環氧樹脂A的含量為3~30質量%,前述環氧樹脂A之環氧當量為1500~4800的環氧樹脂混合物,(2)硬化劑,及(3)無機填充材料。 [1] A curable resin composition comprising (1) containing (1-A) having a biphenyl structure, a bixylenol structure, a biphenyl benzene structure, and a bisphenol quinone structure selected Two or more types of epoxy resin A, and (1-B) other than the above epoxy resin A In the epoxy resin mixture of the epoxy resin B, when the epoxy resin resin mixture is 100 mass, the content of the epoxy resin A is 3 to 30% by mass, and the epoxy resin A has an epoxy equivalent of 1500 to 4800. Epoxy resin mixture, (2) hardener, and (3) inorganic filler.

[2]如[1]記載之硬化性樹脂組成物,其中以前述硬化性樹脂組成物中之不揮發成分為100質量%時之環氧樹脂A的含量為0.5~10質量%。 [2] The curable resin composition according to [1], wherein the content of the epoxy resin A in the case where the nonvolatile content in the curable resin composition is 100% by mass is 0.5 to 10% by mass.

[3]如[1]或[2]記載之硬化性樹脂組成物,其中前述(1-B)環氧樹脂B為,由雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂及該等環氧樹脂之混合物所成群中所選出。 [3] The curable resin composition according to [1] or [2] wherein the (1-B) epoxy resin B is a bisphenol type epoxy resin, a crystalline bifunctional epoxy resin, and a bicyclic ring. A mixture of a pentadiene type epoxy resin, a naphthalene type epoxy resin, and a mixture of such epoxy resins is selected.

[4]如[1]~[3]中任一項記載之硬化性樹脂組成物,其中前述(1)環氧樹脂混合物之環氧當量為50~3000。 [4] The curable resin composition according to any one of [1] to [3] wherein the epoxy resin mixture of the (1) epoxy resin mixture has an epoxy equivalent of 50 to 3,000.

[5]如[1]~[4]中任一項記載之硬化性樹脂組成物,其中前述(2)硬化劑為,由苯酚樹脂、氰酸酯樹脂及活性酯樹脂中所選出的1種以上。 [5] The curable resin composition according to any one of [1], wherein the (2) hardener is one selected from the group consisting of a phenol resin, a cyanate resin, and an active ester resin. the above.

[6]如[1]~[5]中任一項記載之硬化性樹脂組成物,其中前述(3)無機填充材料之平均粒徑為0.01~5μm。 [6] The curable resin composition according to any one of [1], wherein the (3) inorganic filler has an average particle diameter of 0.01 to 5 μm.

[7]如[1]~[6]中任一項記載之硬化性樹脂組成物,其中前述(3)無機填充材料為經表面處理劑表面處理。 [7] The curable resin composition according to any one of [1] to [6] wherein the (3) inorganic filler is surface-treated with a surface treatment agent.

[8]如[1]~[7]中任一項記載之硬化性樹脂組成物,其中前述(3)無機填充材料為二氧化矽。 [8] The curable resin composition according to any one of [1], wherein the (3) inorganic filler is cerium oxide.

[9]如[1]~[8]中任一項記載之硬化性樹脂組成物,其中以前述硬化性樹脂組成物中之不揮發成分為100質量%時,前述(2)硬化劑之含量為1~30質量%,且前述(3)無機填充材料之含量為30~90質量%。 [9] The curable resin composition according to any one of [1], wherein the content of the (2) hardener is when the nonvolatile component in the curable resin composition is 100% by mass. It is 1 to 30% by mass, and the content of the above (3) inorganic filler is 30 to 90% by mass.

[10]一種多層印刷配線板之絕緣層用硬化性樹脂組成物,其特徵為含有如[1]~[9]中任一項記載之硬化性樹脂組成物。 [10] A curable resin composition for an insulating layer of a multilayer printed wiring board, which comprises the curable resin composition according to any one of [1] to [9].

[11]一種多層印刷配線板之增層(buildup layer)用硬化性樹脂組成物,其特徵為含有如[1]~[9]中任一項記載之硬化性樹脂組成物。 [11] A curable resin composition for a buildup layer of a multilayer printed wiring board, which comprises the curable resin composition according to any one of [1] to [9].

[12]一種薄片狀層合材料,其特徵為含有如[1]~[9]中任一項記載之硬化性樹脂組成物。 [12] A flaky laminate comprising the curable resin composition according to any one of [1] to [9].

[13]如[12]記載之薄片狀層合材料,其中厚度為5~30μm。 [13] The flaky laminate according to [12], wherein the thickness is 5 to 30 μm.

[14]一種多層印刷配線板,其特徵為含有將如[1]~[11]中任一項記載之硬化物樹脂組成物或如[12]或[13]記載之薄片狀層合材料熱硬化所得的絕緣層。 [14] A multilayer printed wiring board comprising the cured resin composition according to any one of [1] to [11] or the flaky laminate according to [12] or [13]. The resulting insulating layer is hardened.

[15]一種多層印刷配線板,其特徵為含有將如[12]記載之薄片狀層合材料熱硬化所得的絕緣層。 [15] A multilayer printed wiring board comprising an insulating layer obtained by thermally curing a sheet-like laminate according to [12].

[16]一種半導體裝置,其特徵為含有如[14]或[15]記載之多層印刷配線板。 [16] A semiconductor device comprising the multilayer printed wiring board according to [14] or [15].

又,本發明較佳為包含下述態樣。 Further, the present invention preferably includes the following aspects.

[A]一種多層印刷配線板之絕緣層用硬化性樹脂組成物,其特徵為含有 (1)含有(1-A)含有聯二甲苯酚構造、雙酚乙醯苯構造,及雙酚芴構造之環氧樹脂A1,與(1-B)由雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂及該等環氧樹脂之混合物所成群中所選出的環氧樹脂B1之環氧樹脂混合物中,以前述環氧樹脂混合物為100質量%時之前述環氧樹脂A1的含量為5~20質量%,前述環氧樹脂A1之環氧當量為2000~4200,具有50~3000之環氧當量的環氧樹脂混合物,(2)由苯酚樹脂、氰酸酯樹脂及活性酯樹脂中所選出的1種以上之硬化劑,及(3)作為無機填充材料用之二氧化矽。 [A] A curable resin composition for an insulating layer of a multilayer printed wiring board, comprising (1) a (1-A)-containing bixylenol-containing structure, a bisphenol acetonitrile structure, and a bisphenol fluorene structure. Epoxy resin A 1 and (1-B) from bisphenol type epoxy resin, crystalline bifunctional epoxy resin, dicyclopentadiene type epoxy resin, naphthalene type epoxy resin and the like the epoxy resin composition of the mixture in the selected groups of B 1 in the epoxy resin to the epoxy resin mixture is 100% by mass of the epoxy resin a is a content of 5 to 20% by mass, the ring The epoxy resin A 1 has an epoxy equivalent of 2000 to 4200, an epoxy resin mixture having an epoxy equivalent of 50 to 3000, and (2) one or more selected from the group consisting of a phenol resin, a cyanate resin, and an active ester resin. a hardener, and (3) cerium oxide used as an inorganic filler.

將本發明之硬化性樹脂組成物熱硬化所製作的多層印刷配線板之絕緣層為,薄膜狀之樹脂流動性(填埋性)優良,濕式粗化步驟中不僅絕緣層表面之算術平均粗糙度較低,自乘平均平方根粗糙度也較低,其上方可形成具有充分撕剝強度之電鍍導體層,且線熱膨脹係數也較低。 The insulating layer of the multilayer printed wiring board produced by thermally curing the curable resin composition of the present invention is excellent in fluidity (filling property) of a film-like resin, and not only the arithmetic mean roughness of the surface of the insulating layer in the wet roughening step. The degree is lower, the average square root roughness is also lower, and an electroplated conductor layer having sufficient tear strength can be formed thereon, and the coefficient of linear thermal expansion is also low.

特別是本發明中使用成分(1)可達成上述低粗糙度及高撕剝強度。又,一般含有較多無機填充材料之環氧樹脂組成物為,薄膜狀之樹脂流動差,層合之導體間會發生空隙,且易降低撕剝強度,但藉由本發明般使用成分(1)可提升填埋性及撕剝強度。 In particular, the use of the component (1) in the present invention achieves the above-described low roughness and high tear strength. Further, an epoxy resin composition which generally contains a large amount of inorganic filler is a film-like resin having a poor flow, a void is formed between the laminated conductors, and tearing strength is easily lowered, but the component (1) is used by the present invention. It can improve landfill and tear strength.

實施發明之形態 Form of implementing the invention [硬化性樹脂組成物] [Curable resin composition]

本發明態樣之一的硬化性樹脂組成物為,特徵係含有(1)含有(1-A)具有由聯苯構造、聯二甲苯酚構造、雙酚乙醯苯構造、及雙酚芴構造中所選出的2種以上之構造的環氧樹脂A,與(1-B)前述環氧樹脂A以外之環氧樹脂B的環氧樹脂混合物中,以前述環氧樹脂混合物為100質量%時之前述環氧樹脂A的含量為3~30質量%,前述環氧樹脂A之環氧當量為1500~4800的環氧樹脂混合物,(2)硬化劑,及(3)無機填充材料之硬化性樹脂組成物。下面將詳細說明本發明之環氧樹脂組成物。 The curable resin composition according to one aspect of the present invention is characterized in that (1) contains (1-A) has a biphenyl structure, a bixylenol structure, a bisphenol acetophenone structure, and a bisphenol quinone structure. In the epoxy resin mixture of the two or more types of the selected epoxy resin A and the epoxy resin B other than the epoxy resin A (1-B), when the epoxy resin mixture is 100% by mass The content of the epoxy resin A is 3 to 30% by mass, the epoxy resin equivalent of the epoxy resin A is 1500 to 4800, (2) the hardener, and (3) the hardenability of the inorganic filler. Resin composition. The epoxy resin composition of the present invention will be described in detail below.

[成分(1)] [ingredient (1)] (1-A)環氧樹脂A (1-A) Epoxy Resin A

本發明所使用之環氧樹脂A為,具有由聯苯構造、聯二甲苯酚構造、雙酚乙醯苯構造,及雙酚芴構造中所選出的2種以上之構造。各構造可以下述式(1)~(4)表示。 The epoxy resin A used in the present invention has two or more structures selected from a biphenyl structure, a bixylenol structure, a bisphenol acetonitrile structure, and a bisphenol fluorene structure. Each structure can be represented by the following formulas (1) to (4).

聯苯構造 Biphenyl structure

聯二甲苯酚構造 Dimethyl phenol structure

雙酚乙醯苯構造(參考特開2003-252951) Bisphenol acetophenone structure (Ref. 2003-252951)

(式(3)中,R1為相同或相異之由氫原子、C1-10之烴基及鹵元素所成群中所選出之基,R2為由氫原子、C1-10之烴基及鹵元素所成群中所選出之基,R3為氫原子或C1-10之烴基,m為0~5之整數)。 (In the formula (3), R 1 is the same or a different one selected from the group consisting of a hydrogen atom, a hydrocarbon group of C 1-10 and a halogen element, and R 2 is a hydrogen atom, a hydrocarbon group of C 1-10 And a group selected from the group consisting of halogen elements, R 3 is a hydrogen atom or a C 1-10 hydrocarbon group, and m is an integer of 0 to 5).

雙酚芴構造(參考特開2003-252951) Bisphenolphthalein structure (Ref. 2003-252951)

(式(4)中,R4為相同或相異之由氫原子、C1-10之烴基及鹵元素所成群中所選出之基,R5為相同或相異之由氫原子、C1-10之烴基及鹵元素中所選出之基,n為相同或相異之0~4之整數)。 (In the formula (4), R 4 is the same or different selected from the group consisting of a hydrogen atom, a hydrocarbon group of C 1-10 and a halogen element, and R 5 is the same or different from a hydrogen atom, C a hydrocarbon group selected from 1 to 10 and a selected one of the halogen elements, and n is the same or a different integer of 0 to 4).

較佳之態樣為,式(3)中R1為相同或相異之氫原子或C1-8之烴基,又以氫原子或C1-6之烷基為佳,更佳為氫原子或甲基,特佳為氫原子,R2為氫原子或C1-8之烴基,又以氫原子或C1-6之烷基為佳,更佳為氫原子或甲基,特佳為氫原子,R3為氫原子或C1-8之烴基,又以氫原子或C1-6之烷基為佳,更佳為氫原子或甲基,特佳為甲基,m為0~3,又以1~2之整數為佳。 In a preferred embodiment, R 1 in the formula (3) is the same or a different hydrogen atom or a hydrocarbon group of C 1-8 , preferably a hydrogen atom or a C 1-6 alkyl group, more preferably a hydrogen atom or a methyl group, particularly preferably a hydrogen atom, and R 2 is a hydrogen atom or a C 1-8 hydrocarbon group, preferably a hydrogen atom or a C 1-6 alkyl group, more preferably a hydrogen atom or a methyl group, particularly preferably hydrogen. The atom, R 3 is a hydrogen atom or a hydrocarbon group of C 1-8 , preferably a hydrogen atom or a C 1-6 alkyl group, more preferably a hydrogen atom or a methyl group, particularly preferably a methyl group, and m is 0 to 3 It is better to use an integer of 1~2.

又,式(4)中,R4為相同或相異之氫原子或C1-8之烴基,又以氫原子或C1-6之烷基為佳,更佳為氫原子或甲基,R5為相同或相異之氫原子或C1-8之烴基,又以氫原子或C1-6之烷基為佳,更佳為氫原子或甲基,特佳為氫原子,n為相同或相異之0~3,又以1~2之整數為佳。 Further, in the formula (4), R 4 is the same or a different hydrogen atom or a hydrocarbon group of C 1-8 , preferably a hydrogen atom or a C 1-6 alkyl group, more preferably a hydrogen atom or a methyl group. R 5 is the same or a different hydrogen atom or a C 1-8 hydrocarbon group, preferably a hydrogen atom or a C 1-6 alkyl group, more preferably a hydrogen atom or a methyl group, particularly preferably a hydrogen atom, n is The same or different 0~3, and the integer of 1~2 is preferred.

具體上環氧樹脂A較佳為,具有由聯苯構造、聯二甲苯酚構造、雙酚乙醯苯構造及雙酚芴構造中所 選出的3種以上之構造的環氧樹脂,又以具有聯二甲苯酚構造、雙酚乙醯苯構造及雙酚芴構造之環氧樹脂,與具有聯苯構造、聯二甲苯酚構造、雙酚乙醯苯構造及雙酚芴構造之環氧樹脂為佳。更具體為,雙酚乙醯苯構造較佳為,式(3)中R1為氫原子,R2為氫原子,R3為甲基。雙酚芴構造較佳為,式(4)中R4具有氫原子及甲基,R5為氫原子。 Specifically, the epoxy resin A is preferably an epoxy resin having three or more structures selected from the group consisting of a biphenyl structure, a bixylenol structure, a bisphenol acetonide structure, and a bisphenol fluorene structure. An epoxy resin having a bixylenol structure, a bisphenol acetonitrile structure and a bisphenol fluorene structure, and an epoxy resin having a biphenyl structure, a bixylenol structure, a bisphenol acetonitrile structure, and a bisphenol hydrazine structure. good. More specifically, the bisphenol acetonitrile structure is preferably such that, in the formula (3), R 1 is a hydrogen atom, R 2 is a hydrogen atom, and R 3 is a methyl group. The bisphenol fluorene structure is preferably such that R 4 in the formula (4) has a hydrogen atom and a methyl group, and R 5 is a hydrogen atom.

環氧樹脂A之製造方法一例如,使聯苯型環氧樹脂及聯二甲苯酚型環氧樹脂之環氧基,與雙酚乙醯苯衍生物及雙酚芴衍生物之苯酚基反應而得。具體上聯苯型環氧樹脂及聯二甲苯酚型環氧樹脂之環氧基數,與來自雙酚乙醯苯衍生物及雙酚芴衍生物之苯酚基數的比例較佳為1:1~1.5:1,又以1.05:1~1.4:1為佳,更佳為1.1:1~1.3:1。由此易使環氧樹脂A之環氧當量為1500~4800。另外來自雙酚乙醯苯衍生物之苯酚基數,與來自雙酚芴衍生物之苯酚基數的比例較佳為1:5~1:15,更佳為1:7~1:10。由此可提升環氧樹脂A之耐熱性。 Method for Producing Epoxy Resin A For example, an epoxy group of a biphenyl type epoxy resin and a bixylenol type epoxy resin is reacted with a phenol group of a bisphenol acetonitrile derivative and a bisphenol hydrazine derivative. Got it. Specifically, the ratio of the epoxy group of the biphenyl type epoxy resin and the bixylenol type epoxy resin to the phenol group number derived from the bisphenol acetonitrile derivative and the bisphenol hydrazine derivative is preferably 1:1 to 1.5. :1, preferably 1.05:1~1.4:1, more preferably 1.1:1~1.3:1. Therefore, the epoxy equivalent of the epoxy resin A is easily 1,500 to 4,800. Further, the ratio of the phenol group number derived from the bisphenol acetonitrile derivative to the phenol group number derived from the bisphenol hydrazine derivative is preferably from 1:5 to 1:15, more preferably from 1:7 to 1:10. Thereby, the heat resistance of the epoxy resin A can be improved.

環氧樹脂A之含量為,以成分(1)之環氧樹脂混合物為100質量%時為3~30質量%,較佳為4~25質量%,更佳為5~20質量%。環氧樹脂A之含量為3質量%以上時,可得較低的算術平均粗糙度及較低之自乘平均平方根粗糙度,又,30質量%以下時可充分保有交聯部位故可得較低之算術平均粗糙度及較低之自乘平均平方根粗糙度,且可維持較低之線膨脹係數。 The content of the epoxy resin A is 3 to 30% by mass, preferably 4 to 25% by mass, and more preferably 5 to 20% by mass, based on 100% by mass of the epoxy resin mixture of the component (1). When the content of the epoxy resin A is 3% by mass or more, a lower arithmetic mean roughness and a lower self-average square root roughness can be obtained, and when the content is 30% by mass or less, the cross-linking portion can be sufficiently retained. Low arithmetic mean roughness and lower self-averaged average square root roughness, and can maintain a lower coefficient of linear expansion.

環氧樹脂A之環氧當量(含有1當量之環氧基的樹脂質量)為1500~4800(g/當量),較佳為1700~4600(g/當量),又以1900~4400(g/當量)為佳,更佳為2000~4300(g/當量),特佳為2000~4200(g/當量)。環氧樹脂A之環氧當量為1500以上時,可得較低之算術平均粗糙度及較低之自乘平均平方根粗糙度,又,4800以下時可充分保有交聯部位故可得較低之算術平均粗糙度及較低之自乘平均平方根粗糙度,且可維持較低之線膨脹係數。 The epoxy equivalent of the epoxy resin A (the mass of the resin containing 1 equivalent of the epoxy group) is 1500 to 4800 (g/eq), preferably 1700 to 4600 (g/equivalent), and 1900 to 4400 (g/). The equivalent weight is preferably from 2,000 to 4,300 (g/equivalent), and particularly preferably from 2,000 to 4,200 (g/equivalent). When the epoxy equivalent of epoxy resin A is 1500 or more, a lower arithmetic mean roughness and a lower self-centered average square root roughness can be obtained, and when the epoxy resin A is less than 4800, the crosslinked portion can be sufficiently retained, so that the lower portion can be obtained. The arithmetic mean roughness and the lower self-averaged average square root roughness, and can maintain a lower coefficient of linear expansion.

又,成分(1)之環氧樹脂混合物全體的環氧當量較佳為50~3000(g/當量),又以100~2000(g/當量)為佳,更佳為150~1000(g/當量),特佳為200~500(g/當量)。如此由硬化性樹脂組成物所得之絕緣層具有充分交聯密度,有利於低粗糙度化。此時環氧當量係依據JIS K7236(2001)測定。 Further, the epoxy equivalent of the entire epoxy resin mixture of the component (1) is preferably from 50 to 3,000 (g/eq), more preferably from 100 to 2,000 (g/eq), more preferably from 150 to 1,000 (g/). Equivalent), particularly preferably from 200 to 500 (g/equivalent). The insulating layer thus obtained from the curable resin composition has a sufficient crosslinking density, which contributes to low roughness. The epoxy equivalent is measured in accordance with JIS K7236 (2001).

以上述硬化性樹脂組成物中之不揮發成分為100質量%時,環氧樹脂A之含量較佳為0.5~10質量%,又以0.5~7質量%為佳,更佳為0.5~5質量%。 When the nonvolatile content in the curable resin composition is 100% by mass, the content of the epoxy resin A is preferably 0.5 to 10% by mass, more preferably 0.5 to 7% by mass, still more preferably 0.5 to 5% by mass. %.

(1-B)環氧樹脂B (1-B) Epoxy Resin B

環氧樹脂B為,環氧樹脂A以外之環氧樹脂。環氧樹脂B較佳為,1分子中具有2個以上之環氧基的環氧樹脂。 The epoxy resin B is an epoxy resin other than the epoxy resin A. The epoxy resin B is preferably an epoxy resin having two or more epoxy groups in one molecule.

具體之環氧樹脂B如,雙酚A型環氧樹脂、雙酚F 型環氧樹脂、雙酚S型環氧樹脂、雙酚AF型環氧樹脂般雙酚型環氧樹脂、二環戊二烯型環氧樹脂、苯酚酚醛清漆型環氧樹脂、tert-丁基-兒苯酚型環氧樹脂、萘酚型環氧樹脂、萘型環氧樹脂、萘醚型環氧樹脂、縮水甘油基胺型環氧樹脂、縮水甘油酸酯型環氧樹脂、甲酚酚醛清漆型環氧樹脂、聯苯型環氧樹脂、蒽型環氧樹脂、線狀脂肪族環氧樹脂、具有丁二烯構造之環氧樹脂、脂環式環氧樹脂、雜環式環氧樹脂、含有螺環之環氧樹脂、環己烷二甲醇型環氧樹脂、三羥甲基環氧樹脂、鹵化環氧樹脂、結晶性2官能環氧樹脂等。環氧樹脂B更佳為,雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂及該等環氧樹脂之混合物所成群中所選出。該等可1種或2種以上組合使用。 Specific epoxy resin B, such as bisphenol A epoxy resin, bisphenol F Type epoxy resin, bisphenol S type epoxy resin, bisphenol AF type epoxy resin like bisphenol type epoxy resin, dicyclopentadiene type epoxy resin, phenol novolak type epoxy resin, tert-butyl - phenol type epoxy resin, naphthol type epoxy resin, naphthalene type epoxy resin, naphthalene ether type epoxy resin, glycidyl amine type epoxy resin, glycidyl ester type epoxy resin, cresol novolac Epoxy resin, biphenyl type epoxy resin, bismuth type epoxy resin, linear aliphatic epoxy resin, epoxy resin with butadiene structure, alicyclic epoxy resin, heterocyclic epoxy resin, An epoxy resin containing a spiro ring, a cyclohexanedimethanol type epoxy resin, a trimethylol epoxy resin, a halogenated epoxy resin, a crystalline bifunctional epoxy resin, or the like. More preferably, the epoxy resin B is in the group of a bisphenol type epoxy resin, a crystalline bifunctional epoxy resin, a dicyclopentadiene type epoxy resin, a naphthalene type epoxy resin, and a mixture of the epoxy resins. Selected. These may be used alone or in combination of two or more.

該等環氧樹脂中就提升耐熱性之觀點,較佳為雙酚A型環氧樹脂、雙酚F型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂及該等2種以上之混合物。具體例如,雙酚A型與F型之混合環氧樹脂(新日鐵化學(股)「ZX1059)」、雙酚A型環氧樹脂(三菱化學(股)製「耶皮可828EL」、「YL980」、「jER1009」)、雙酚F型環氧樹脂(三菱化學(股)製「jER806H」、「YL983U」)、萘型2官能環氧樹脂(DIC(股)製「HP4032」、「HP4032D」、「HP4032SS」、「EXA4032SS」)、萘型4官能環氧樹脂(DIC(股)製「HP4700」、「HP4710」、萘酚型環氧樹 脂(新日鐵化學(股)製「ESN-475V」)、具有丁二烯構造之環氧樹脂(戴歇爾化學工業(股)製「PB-3600」)、聯苯型環氧樹脂(日本化藥(股)製「NC3000H」、「NC3000L」、「NC3100」)、聯二甲苯酚型環氧樹脂(三菱化學(股)製「YX4000」、「YX4000H」、「YX4000HK」、「YL6121」)、蒽型環氧樹脂(三菱化學(股)製「YX8800」)、萘醚型環氧樹脂(DIC(股)製「EXA-7310」、「EXA-7311」、「EXA-7311L」、「EXA7311-G3」)、縮水甘油酸酯型環氧樹脂(那加歇(股)製「EX711」、「EX721」、普林鐵(股)製「R540」)、二環戊二烯型環氧樹脂(DIC(股)製「HP-7200H」)等。 Among these epoxy resins, from the viewpoint of improving heat resistance, a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, a crystalline bifunctional epoxy resin, a dicyclopentadiene type epoxy resin, or the like is preferable. A naphthalene type epoxy resin and a mixture of two or more of these. Specifically, for example, a mixed epoxy resin of bisphenol A type and F type (Nippon Steel Chemical Co., Ltd. "ZX1059"", a bisphenol A type epoxy resin ("Jipi 828EL" manufactured by Mitsubishi Chemical Corporation), YL980", "jER1009"), bisphenol F type epoxy resin ("JER806H" and "YL983U" manufactured by Mitsubishi Chemical Corporation), and naphthalene type 2-functional epoxy resin (HP4032" and "HP4032D" manufactured by DIC Corporation , "HP4032SS", "EXA4032SS"), naphthalene type 4-functional epoxy resin ("HP4700", "HP4710" made by DIC), naphthol type epoxy tree Grease ("ESN-475V" manufactured by Nippon Steel Chemical Co., Ltd.), epoxy resin with butadiene structure ("PB-3600" manufactured by Daischer Chemical Co., Ltd.), and biphenyl type epoxy resin ( Nippon Chemical Co., Ltd. "NC3000H", "NC3000L", "NC3100"), Dimethyl phenol type epoxy resin ("XX4000", "YX4000H", "YX4000HK", "YL6121" manufactured by Mitsubishi Chemical Corporation ), bismuth epoxy resin ("YX8800" manufactured by Mitsubishi Chemical Corporation), naphthalene ether epoxy resin (EXA-7310, "EXA-7311", "EXA-7311L", "" EXA7311-G3"), glycidyl ester epoxy resin ("EX711", "EX721" manufactured by Nagase Co., Ltd., "R540" manufactured by Principal), dicyclopentadiene epoxy resin (DIC (share) system "HP-7200H") and so on.

又,HP4032SS之主成分的構造式如下所述。 Further, the structural formula of the main component of HP4032SS is as follows.

又,NC3000L之構造式如下所述。 Further, the structural formula of the NC3000L is as follows.

(n為1~20之整數)。 (n is an integer from 1 to 20).

又,YX4000HK之構造式如下所述。 Also, the structure of the YX4000HK is as follows.

(式中,Gr為縮水甘油基)。 (wherein Gr is a glycidyl group).

又,HP-7200H之構造式如下所述。 Further, the structural formula of the HP-7200H is as follows.

(式中,n為1~20之整數)。 (where n is an integer from 1 to 20).

又,jER1009之構造式如下所述。 Further, the structural formula of jER1009 is as follows.

環氧樹脂B之含量為,以(1)成分之環氧樹脂混合物為100質量%時為70~97質量%,較佳為75~96質量%,更佳為80~95質量%。 The content of the epoxy resin B is 70 to 97% by mass, preferably 75 to 96% by mass, and more preferably 80 to 95% by mass, based on 100% by mass of the epoxy resin mixture of the component (1).

(2)硬化劑 (2) Hardener

(2)硬化劑可為能使上述環氧樹脂混合物交聯而硬 化之物,可使用任一硬化劑,例如苯酚樹脂、氰酸酯樹脂、苯并噁嗪樹脂,及活性酯樹脂等。其中苯酚樹脂、氰酸酯樹脂及活性樹脂可明顯降低絕緣層之表面粗糙度。 (2) The hardener may be capable of crosslinking the above epoxy resin mixture and hardening As the substance, any hardener such as a phenol resin, a cyanate resin, a benzoxazine resin, an active ester resin or the like can be used. Among them, the phenol resin, the cyanate resin and the reactive resin can significantly reduce the surface roughness of the insulating layer.

本發明所使用之活性酯樹脂為,1分子中具有1個以上之活性酯基的樹脂化合物。該「活性酯基」係指,可與環氧樹脂反應之酯基。活性酯樹脂較佳為,可與環氧樹脂反應的1分子中具有2個以上之活性酯基的樹脂化合物。一般較佳以由苯酚酯、苯硫酚酯、N-羥基胺酯及雜環羥基化合物酯所成群中所選出,1分子中具2個以上反應活性較高之酯基的樹脂化合物,作為活性酯樹脂用。活性酯樹脂可1種或2種以上併用。 The active ester resin used in the present invention is a resin compound having one or more active ester groups in one molecule. The "active ester group" means an ester group reactive with an epoxy resin. The active ester resin is preferably a resin compound having two or more active ester groups in one molecule which can be reacted with an epoxy resin. It is generally preferred to use a resin compound having two or more reactive ester groups in one molecule selected from the group consisting of phenol esters, thiophenol esters, N-hydroxylamine esters, and heterocyclic hydroxy ester esters. For active ester resins. The active ester resin may be used singly or in combination of two or more kinds.

就提升耐熱性之觀點,又以由羧酸化合物及/或硫羧酸化合物,與羥基化合物及/或硫醇化合物縮合反應所得之物而得的活性酯樹脂為佳。更佳為由苯酚化合物、萘酚化合物及硫醇化合物中所選出之1種或2種以上,與羧酸化合物反應所得之物而得的活性酯樹脂。又以由羧酸化合物與具有苯酚性羥基之芳香族化合物反應所得的1分子中具有2個以上之活性酯基的芳香族樹脂化合物更為佳,特佳為由1分子中具有至少2個以上之羧酸的化合物,與具有苯酚性羥基之芳香族化合物反應所得的芳香族樹脂化合物,且該芳香族樹脂化合物之1分子中具有2個以上之活性酯基的芳香族樹脂化合物。活性酯樹脂可為直鏈狀或支鏈狀。又,該1分子中具有至少2個以上之羧酸的化合物為含有脂肪族鏈之化合物時可提高與樹脂組成 物之相溶性,其為含有芳香族環之化合物時可提高耐熱性。 From the viewpoint of improving heat resistance, an active ester resin obtained by condensation reaction of a carboxylic acid compound and/or a sulfuric acid compound with a hydroxy compound and/or a thiol compound is preferred. More preferably, it is an active ester resin obtained by reacting one or more selected from a phenol compound, a naphthol compound, and a thiol compound with a carboxylic acid compound. Further, an aromatic resin compound having two or more active ester groups in one molecule obtained by reacting a carboxylic acid compound with an aromatic compound having a phenolic hydroxyl group is more preferable, and it is particularly preferable to have at least two or more molecules per molecule. An aromatic resin compound obtained by reacting a compound of a carboxylic acid with an aromatic compound having a phenolic hydroxyl group and having two or more active ester groups in one molecule of the aromatic resin compound. The active ester resin may be linear or branched. Further, when the compound having at least two or more carboxylic acids in one molecule is a compound containing an aliphatic chain, the composition of the resin can be improved. The compatibility of the substance is such that when it is a compound containing an aromatic ring, heat resistance can be improved.

上述羧酸化合物之具體例如,苯甲酸、乙酸、琥珀酸、馬來酸、衣康酸、酞酸、間苯二甲酸、對苯二甲酸、均苯四甲酸等。其中就耐熱性之觀點較佳為琥珀酸、馬來酸、衣康酸、酞酸、間苯二甲酸、對苯二甲酸,更佳為間苯二甲酸、對苯二甲酸。硫羧酸化合物之具體例如,硫乙酸、硫苯甲酸等。 Specific examples of the carboxylic acid compound include benzoic acid, acetic acid, succinic acid, maleic acid, itaconic acid, citric acid, isophthalic acid, terephthalic acid, and pyromellitic acid. Among them, succinic acid, maleic acid, itaconic acid, citric acid, isophthalic acid, and terephthalic acid are preferred from the viewpoint of heat resistance, and more preferably isophthalic acid or terephthalic acid. Specific examples of the sulfuric acid compound are, for example, sulfuric acid, sulfuric acid, and the like.

上述苯酚化合物或萘酚化合物之具體例如,氫醌、間苯二酚、雙酚A、雙酚F、雙酚S、酚酞啉、甲基化雙酚A、甲基化雙酚F、甲基化雙酚S、苯酚、o-甲酚、m-甲酚、p-甲酚、兒茶酚、α-萘酚、β-萘酚、1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、均苯三酚、苯三酚、二環戊二烯基二苯酚、苯酚酚醛清漆等。其中就提升耐熱性、溶解性之觀點較佳為,雙酚A、雙酚F、雙酚S、甲基化雙酚A、甲基化雙酚F、甲基化雙酚S、兒茶酚、α-萘酚、β-萘酚、1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、均苯三酚、苯三酚、二環戊二烯基二苯酚、苯酚酚醛清漆等,又以兒茶酚、1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、均苯三酚、苯三酚、二環戊二烯基二苯酚、苯酚酚醛清漆為佳,更佳為1,5-二羥基萘、1,6- 二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、二環戊二烯基二苯酚、苯酚酚醛清漆,又以1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二環戊二烯基二苯酚、苯酚酚醛清漆更為佳,更以1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二環戊二烯基二苯酚特別佳,特佳為二環戊二烯基二苯酚。硫醇化合物之具體例如,苯二硫醇、三嗪二硫醇等。 Specific examples of the above phenol compound or naphthol compound include hydroquinone, resorcin, bisphenol A, bisphenol F, bisphenol S, phenol porphyrin, methylated bisphenol A, methylated bisphenol F, and methyl group. Bisphenol S, phenol, o-cresol, m-cresol, p-cresol, catechol, α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1,6-dihydroxy Naphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, pyrogallol, benzenetriol, dicyclopentadienyl diphenol, phenol Novolac and the like. Among them, the viewpoint of improving heat resistance and solubility is preferably bisphenol A, bisphenol F, bisphenol S, methylated bisphenol A, methylated bisphenol F, methylated bisphenol S, catechol , α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, four Hydroxybenzophenone, pyrogallol, benzenetriol, dicyclopentadienyl diphenol, phenol novolac, etc., and catechol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene , 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, pyrogallol, benzenetriol, dicyclopentadienyl diphenol, phenol novolac Varnish is preferred, more preferably 1,5-dihydroxynaphthalene, 1,6- Dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, dicyclopentadienyl diphenol, phenol novolac, and 1, 5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dicyclopentadienyl diphenol, phenol novolac, more preferably 1,5-dihydroxynaphthalene, 1, 6-Dihydroxynaphthalene, 2,6-dihydroxynaphthalene, and dicyclopentadienyldiphenol are particularly preferred, and particularly preferred is dicyclopentadienyl diphenol. Specific examples of the thiol compound include benzenedithiol, triazinedithiol and the like.

具體上活性酯樹脂較佳為,含有二環戊二烯基二苯酚構造之活性酯樹脂、含有萘構造之活性酯樹脂、含有苯酚酚醛清漆之乙醯化物的活性酯樹脂、含有苯酚酚醛清漆之苯醯化物的活性酯樹脂,其中更佳為含有萘構造之活性酯樹脂、含有二環戊二烯基二苯酚構造之活性酯樹脂。市售品之含有二環戊二烯基二苯酚構造的活性酯樹脂如,EXB9451、EXB9460、EXB9460S、HPC8000-65T(DIC(股)製)、含有萘構造之活性酯樹脂如,EXB9416-70BK(DIC(股)製)、含有苯酚酚醛清漆之乙醯化物的活性酯樹脂如,DC808(三菱化學(股)製)、含有苯酚酚醛清漆之苯醯化物的活性酯樹脂如,YLH1026(三菱化學(股)製)等。 Specifically, the active ester resin is preferably an active ester resin containing a dicyclopentadienyl diphenol structure, an active ester resin containing a naphthalene structure, an active ester resin containing an acetylated phenol novolak, and a phenol novolac. The active ester resin of benzoquinone is more preferably an active ester resin containing a naphthalene structure or an active ester resin containing a dicyclopentadienyl diphenol structure. Commercially available active ester resins containing a structure of a dicyclopentadienyl diphenol such as EXB9451, EXB9460, EXB9460S, HPC8000-65T (manufactured by DIC), an active ester resin containing a naphthalene structure such as EXB9416-70BK ( DIC (manufactured by the DIC), an active ester resin containing acetal phenol varnish, such as DC808 (manufactured by Mitsubishi Chemical Corporation), an active ester resin containing phenol phenolic novolac benzoate, such as YLH1026 (Mitsubishi Chemical ( Stock system) and so on.

特佳之活性酯樹脂為,含有下述一般式(I) The most preferred active ester resin contains the following general formula (I)

(式中,m為0或1,n為平均值0.25~1.5,較佳為0.4 ~1.2)所表示之二環戊二烯基二苯酚構造,末端具有X-基及XO-基(該X為可具有取代基之苯基或萘基)的樹脂化合物。該活性酯樹脂之重量平均分子量較佳為1500~4000,更佳為2000~3000。 (where m is 0 or 1, n is an average of 0.25 to 1.5, preferably 0.4 The structure of the dicyclopentadienyl diphenol represented by ~1.2), which has a resin compound having an X-group and an XO- group at the terminal (the X is a phenyl group or a naphthyl group which may have a substituent). The weight average molecular weight of the active ester resin is preferably from 1,500 to 4,000, more preferably from 2,000 to 3,000.

更特殊之活性酯樹脂為,具有下述式(5)所表示之二環戊二烯基二苯酚構造,末端具有X-基及XO-基(該X為可具有取代基之萘基),重量平均分子量約2700之活性酯樹脂的HPC8000-65T。 More specifically, the active ester resin has a dicyclopentadienyl diphenol structure represented by the following formula (5), and has an X-group and an XO- group at the terminal (the X is a naphthyl group which may have a substituent), HPC 8000-65T of an active ester resin having a weight average molecular weight of about 2,700.

(式中,m為0或1,n為平均值0.4~1.2)。 (where m is 0 or 1, and n is the average of 0.4 to 1.2).

苯酚樹脂無特別限制,較佳為聯苯型苯酚樹脂、萘型苯酚樹脂、苯酚酚醛清漆樹脂、萘醚型苯酚樹脂、含有三嗪骨架之苯酚樹脂。具體例如,聯苯型苯酚樹脂之MEH-7700、MEH-7810、MEH-7851(明和化成(股)製)、萘型苯酚樹脂之NHN、CBN、GPH(日本化藥(股)製)、SN-170、SN-180、SN-190、SN-475、SN-485、SN-495、SN-375、SN-395(新日鐵化學(股)製)、EXB9500(DIC(股)製)、苯酚酚醛清漆樹脂之TD2090(DIC(股)製)、萘醚型苯酚樹脂之EXB-6000(DIC(股)製)、含有三嗪骨架之苯酚樹脂之LA-3018、LA-7052、LA-7054、LA-1356(DIC(股)製)等。該等可1種或2種以上併用。 The phenol resin is not particularly limited, and is preferably a biphenyl type phenol resin, a naphthalene type phenol resin, a phenol novolac resin, a naphthene ether type phenol resin, or a phenol resin containing a triazine skeleton. Specifically, for example, biphenyl type phenol resin MEH-7700, MEH-7810, MEH-7851 (made by Megumi Kasei Co., Ltd.), naphthalene type phenol resin NHN, CBN, GPH (Nippon Chemical Co., Ltd.), SN -170, SN-180, SN-190, SN-475, SN-485, SN-495, SN-375, SN-395 (Nippon Steel Chemical Co., Ltd.), EXB9500 (DIC) TD2090 (made by DIC) of phenol novolak resin, EXB-6000 of naphthene ether type phenol resin (made by DIC), LA-3018, LA-7052, LA-7054 of phenol resin containing triazine skeleton , LA-1356 (DIC (share) system) and so on. These may be used alone or in combination of two or more.

又,SN-485之構造式如下所述。 Further, the structural formula of SN-485 is as follows.

(n為1~20之整數)。 (n is an integer from 1 to 20).

又,LA-7054之構造式如下所述。 Further, the structural formula of LA-7054 is as follows.

(n為1~20之整數)。 (n is an integer from 1 to 20).

氰酸酯樹脂無特別限制,例如酚醛清漆型氰酸酯樹脂、二環戊二烯型氰酸酯樹脂、雙酚型氰酸酯樹脂、及該等之一部分被三嗪化的預聚物等。具體例如,下述式(6)所表示之苯酚酚醛清漆型多官能氰酸酯樹脂(隆扎日本(股)製,PT30S:數平均分子量380,PT60:數平均分子量560)、下述式(7)所表示之雙酚A型氰酸酯樹脂之一部分或全部被三嗪化而三聚化之預聚物的雙酚A型氰酸酯樹脂(隆扎日本(股)製),BA230S75)、下述式(8)所表示之二環戊二烯型氰酸酯樹脂(隆扎日本(股)製,DT-4000、DT-7000)等。具體上數平均分子量係由,測定裝置使用島津製作所(股)製LC-9A/RID-6A,管柱使用昭和電工(股)製Shodex K-800P/K- 804L/K-804L,移動相使用氯仿等,以管柱溫度40℃測定後,使用標準聚苯乙烯之檢量線算出。該等可1種或2種以上組合使用。 The cyanate resin is not particularly limited, and examples thereof include a novolak type cyanate resin, a dicyclopentadiene type cyanate resin, a bisphenol type cyanate resin, and a prepolymer which is partially triazineized. . Specifically, a phenol novolac type polyfunctional cyanate resin represented by the following formula (6) (manufactured by Lonza Japan Co., Ltd., PT30S: number average molecular weight 380, PT60: number average molecular weight 560), and the following formula ( 7) A bisphenol A type cyanate resin which is a part or all of a bisphenol A type cyanate resin which is partially or completely triazineated and trimerized (made by Lonza Japan Co., Ltd.), BA230S75) A dicyclopentadiene type cyanate resin represented by the following formula (8) (manufactured by Lonza Japan Co., Ltd., DT-4000, DT-7000). Specifically, the number average molecular weight is determined by using the LC-9A/RID-6A manufactured by Shimadzu Corporation and the Shodex K-800P/K- by the Showa Denko Co., Ltd. 804L/K-804L, the mobile phase was measured using a chloroform or the like, and was measured at a column temperature of 40 ° C using a calibration curve of standard polystyrene. These may be used alone or in combination of two or more.

[式中,n表示平均值之任意數(較佳為0~20,更佳為1~10)]。 [wherein, n represents an arbitrary number of average values (preferably 0 to 20, more preferably 1 to 10)].

(式中,n表示平均值0~5之數)。 (where n represents the average value of 0 to 5).

本發明之硬化性樹脂組成物中硬化劑的含量無特別限制,就使絕緣層之低粗糙度化與高撕剝強度同時成立之觀點,以該硬化樹脂組成物中之不揮發成分為100質量%時較佳為1~30質量%,又以2~20質量為佳,更佳為5~15質量%。 The content of the curing agent in the curable resin composition of the present invention is not particularly limited, and the low roughness of the insulating layer and the high tearing strength are simultaneously established, and the nonvolatile content in the cured resin composition is 100 mass. The % is preferably from 1 to 30% by mass, more preferably from 2 to 20, more preferably from 5 to 15% by mass.

又,以環氧樹脂混合物全體之環氧基數為1時,硬化劑之反應基數較佳為0.2~2,又以0.3~1.5為佳,更佳為0.4~1。此時「環氧樹脂混合物全體之環氧基數」係指,全部的以環氧當量除以硬化性樹脂組成物中所存在的各環氧樹脂之固體成分質量所得的有關環氧樹脂之合計值。又,「反應基」係指可與環氧基反應之官能基,「反應基數」係指,全部的以反應基當量除以樹脂組成物中所存在的硬化劑之固體成分質量所得之值的合計值。 Further, when the epoxy group number of the entire epoxy resin mixture is 1, the reaction group of the curing agent is preferably 0.2 to 2, more preferably 0.3 to 1.5, still more preferably 0.4 to 1. In this case, the "epoxy group number of the entire epoxy resin mixture" means the total value of the relevant epoxy resin obtained by dividing the epoxy equivalent by the solid content of each epoxy resin present in the curable resin composition. . Further, the "reactive group" means a functional group reactive with an epoxy group, and the "number of reactive groups" means a value obtained by dividing the equivalent of the reactive group by the mass of the solid component of the hardener present in the resin composition. Total value.

(3)無機填充材料 (3) Inorganic filler

本發明所使用之無機填充材料如,二氧化矽、氧化鋁、雲母、Mica、矽酸鹽、硫酸鋇、氫氧化鎂、氧化鈦等,較佳為二氧化矽、氧化鋁,特佳為無定型二氧化矽、熔融二氧化矽、結晶二氧化矽、合成二氧化矽、中空二氧化矽、球狀二氧化矽等之二氧化矽,其中又以球狀二氧化矽、熔融二氧化矽為佳。就相對於含有硬化性樹脂組成物的本發明之薄片狀層合材料提升無機填充材料之填充性觀點,更佳為球狀熔融二氧化矽。可使用1種或2種以上之 無機填充材料。市售之球狀熔融二氧化矽如,艾得曼(股)製「SOC2」、「SOC1」。 The inorganic filler used in the present invention is, for example, ceria, alumina, mica, Mica, silicate, barium sulfate, magnesium hydroxide, titanium oxide, etc., preferably cerium oxide, aluminum oxide, particularly preferably Shaped cerium oxide, molten cerium oxide, crystalline cerium oxide, synthetic cerium oxide, hollow cerium oxide, spherical cerium oxide, etc., wherein spherical cerium oxide and molten cerium oxide are used. good. The viewpoint of improving the filling property of the inorganic filler with respect to the sheet-like laminate of the present invention containing the curable resin composition is more preferably spherical molten cerium oxide. One or two or more types can be used. Inorganic filler material. Commercially available spherical molten cerium oxide, for example, "SOC2" and "SOC1" manufactured by Aideman Co., Ltd.

無機填充材料之平均粒徑無特別限制,但就於絕緣層上形成微細配線之觀點,較佳為5μm以下,又以3μm以下為佳,更佳為1μm以下,又以0.8μm以下更為佳,特佳為0.6μm以下。另外以硬化性樹脂組成物作為塗漆用時,就防止塗料之黏度上升,造成處理性劣化等觀點,較佳為0.01μm以上,又以0.03μm以上為佳,更佳為0.07μm以上,又以0.1μm以上更為佳。上述無機填充材料之平均粒徑可藉由基於密(Mie)散射理論之雷射衍射散射法測定。具體上可藉由雷射衍射散射式粒度分布測定裝置,以體積基準製作無機填充材料之粒度分布,再以其等徑作為平均粒徑而得。測定樣品較佳為,使用藉由超音波將無機填充材料分散於水中所得之物。雷射衍射散射式粒度分布測定裝置可使用堀場製作所(股)製LA-950等。 The average particle diameter of the inorganic filler is not particularly limited, but is preferably 5 μm or less, more preferably 3 μm or less, more preferably 1 μm or less, and even more preferably 0.8 μm or less from the viewpoint of forming fine wiring on the insulating layer. It is particularly preferably 0.6 μm or less. When the curable resin composition is used for painting, it is preferably 0.01 μm or more, more preferably 0.03 μm or more, and more preferably 0.07 μm or more, from the viewpoint of preventing the viscosity of the coating from rising and causing deterioration in handleability. More preferably, it is 0.1 μm or more. The average particle diameter of the above inorganic filler can be measured by a laser diffraction scattering method based on the Mie scattering theory. Specifically, the particle size distribution of the inorganic filler can be prepared on a volume basis by a laser diffraction scattering type particle size distribution measuring apparatus, and the equal diameter can be obtained as an average particle diameter. The measurement sample is preferably obtained by dispersing an inorganic filler in water by ultrasonic waves. As the laser diffraction scattering type particle size distribution measuring apparatus, LA-950 or the like manufactured by Horiba, Ltd. can be used.

無機填充材料之含量無特別限制,但就防止薄片狀層合樹脂之薄片形態的可撓性降低之觀點,以硬化性樹脂組成物中之不揮發成分為100質量%時,無機填充材料之量較佳為30~90質量%,又以40~85質量%為佳,更佳為50~85質量%。特別是本發明既使含有50質量%以上之無機填充材料的硬化性樹脂組成物,也可提升填埋性及撕剝強度。 The content of the inorganic filler is not particularly limited, but the amount of the inorganic filler is 100% by mass in terms of the non-volatile content in the curable resin composition from the viewpoint of preventing the flexibility of the sheet form of the sheet-like laminated resin. It is preferably 30 to 90% by mass, more preferably 40 to 85% by mass, still more preferably 50 to 85% by mass. In particular, in the present invention, the hardenable resin composition containing 50% by mass or more of the inorganic filler can also improve the landfill property and the peeling strength.

無機填充材料為了提升耐濕性及分散性,較 佳為經偶合劑等表面處理(塗覆)後之物。表面處理劑(偶合劑)較佳為由環氧矽烷系偶合劑、胺基矽烷系偶合劑、巰基矽烷系偶合劑、矽烷系偶合劑、有機矽氮烷化合物、鈦酸鹽系偶合劑中所選出之1種以上。其中又以胺基矽烷系偶合劑具有優良耐濕性、分散性、硬化物之特性等而為佳,更佳為苯基胺基矽烷系偶合劑。市售品如,信越化學工業(股)製「KBM403」(3-環氧丙氧基丙基三甲氧基矽烷)、信越化學工業(股)製「KBM803」(3-巰基丙基三甲氧基矽烷)、信越化學工業(股)製「KBE903」(3-胺基丙基三乙氧基矽烷)、信越化學工業(股)製「KBM573」(N-苯基-3-胺基丙基三甲氧基矽烷)、信越化學工業(股)製「KBM103」(苯基三甲氧基矽烷)、信越化學工業(股)製「SZ-31」(六甲基二矽氮烷)等。 Inorganic filler materials are used to improve moisture resistance and dispersibility. It is preferably a surface treated (coated) by a coupling agent or the like. The surface treatment agent (coupling agent) is preferably an epoxy decane coupling agent, an amino decane coupling agent, a mercapto decane coupling agent, a decane coupling agent, an organic decazane compound, or a titanate coupling agent. One or more selected ones. Further, the amine decane coupling agent preferably has excellent moisture resistance, dispersibility, properties of a cured product, and the like, and more preferably a phenylamino decane coupling agent. Commercial products such as "KBM403" (3-glycidoxypropyltrimethoxydecane) manufactured by Shin-Etsu Chemical Co., Ltd., "KBM803" (3-mercaptopropyltrimethoxy) manufactured by Shin-Etsu Chemical Co., Ltd. "Keta" (3-aminopropyltriethoxydecane) manufactured by Shin-Etsu Chemical Co., Ltd., "KBM573" (N-phenyl-3-aminopropyltrimethyl) manufactured by Shin-Etsu Chemical Co., Ltd. "Oxyoxane", "KBM103" (phenyltrimethoxydecane) manufactured by Shin-Etsu Chemical Co., Ltd., and "SZ-31" (hexamethyldioxane) manufactured by Shin-Etsu Chemical Co., Ltd.

[其他成分] [Other ingredients]

本發明之硬化性樹脂組成物除了上述成分外,可適當添加其他成分如,硬化促進劑;熱塑性樹脂;乙烯基苄基化合物、丙烯酸基化合物、馬來醯亞胺化合物、嵌段異氰酸酯化合物般熱硬化性樹脂;磷系化合物、氫氧化金屬物等之難燃劑;矽粉、尼龍粉、氟粉、橡膠粒等之有機填充劑;有機溶劑;為本(Orben)、本頓(Benton)等之增黏劑;聚矽氧烷系、氟系、高分子系之消泡劑;咪唑系、噻唑系、三唑系、矽烷偶合劑等之密合性賦予劑;酞菁‧ 藍、酞菁‧綠、碘‧綠、二重氮黃、碳黑等之著色劑;添加劑等。 In addition to the above components, the curable resin composition of the present invention may be appropriately added with other components such as a curing accelerator; a thermoplastic resin; a vinyl benzyl compound, an acrylic compound, a maleimide compound, and a blocked isocyanate compound. Curable resin; flame retardant such as phosphorus compound or metal hydroxide; organic filler such as strontium powder, nylon powder, fluorine powder, rubber granule; organic solvent; Orben, Benton, etc. A tackifier; a polyoxyalkylene-based, fluorine-based or polymer-based antifoaming agent; an adhesion-promoting agent such as an imidazole-based, a thiazole-based, a triazole-based or a decane coupling agent; Blue, phthalocyanine, green, iodine, green, diazo yellow, carbon black and other coloring agents; additives.

硬化促進劑可為藉由上述硬化劑可促進上述環氧樹脂交聯及硬化之物,可使用任一硬化促進劑,例如胺化合物、脈化合物、咪唑化合物、鏻化合物及金屬系硬化促進劑等。該等可1種或2種以上組合使用。 The hardening accelerator may be one in which the above-mentioned epoxy resin is crosslinked and hardened by the above-mentioned curing agent, and any hardening accelerator such as an amine compound, a pulse compound, an imidazole compound, an anthraquinone compound, and a metal-based hardening accelerator may be used. . These may be used alone or in combination of two or more.

本發明可使用之胺化合物無特別限定,例如三乙基胺、三丁基胺等之三烷基胺、4-二甲基吡啶、苄基二甲基胺、2,4,6-三(二甲基胺基甲基)苯酚、1,8-二氮雜二環(5,4,0)-十一烯(以下簡稱DBU)等之胺化合物等。該等可1種或2種以上組合使用。 The amine compound which can be used in the present invention is not particularly limited, and for example, a trialkylamine such as triethylamine or tributylamine, 4-dimethylpyridine, benzyldimethylamine, 2,4,6-tri ( An amine compound such as dimethylaminomethyl)phenol or 1,8-diazabicyclo(5,4,0)-undecene (hereinafter abbreviated as DBU). These may be used alone or in combination of two or more.

本發明所使用之咪唑化合物可為下述一般式(9) The imidazole compound used in the present invention may be the following general formula (9)

(式中,R6~R9為各自相同或相異之氫原子、鹵原子、氰基、硝基、甲醯基、C1-20烷基、C2-20鏈烯基、C2-20炔基、C3-20烯丙基、C4-20烷二烯基、C4-20多烯基、C6-20芳基、C6-20烷芳基、C6-20芳烷基、、C4-20環烷基、C4-20環鏈烯基、(C5-10環烷基)C1-10烷基、可具有C1-10烴基之矽烷基、來自環氧樹脂之羥基乙基)所表示之化合物。 (wherein R 6 to R 9 are each the same or different hydrogen atom, a halogen atom, a cyano group, a nitro group, a decyl group, a C 1-20 alkyl group, a C 2-20 alkenyl group, a C 2 - 20 alkynyl, C 3-20 allyl, C 4-20 alkadienyl, C 4-20 polyalkenyl , C 6-20 aryl, C 6-20 alkaryl, C 6-20 aralkyl , C 4-20 cycloalkyl, C 4-20 cycloalkenyl, (C 5-10 cycloalkyl) C 1-10 alkyl, decyl group which may have a C 1-10 hydrocarbyl group, derived from epoxy A compound represented by a hydroxyethyl group of a resin.

更具體之咪唑化合物為,1-苄基-2-苯基咪 唑、2-乙基-4-甲基咪唑、1-氰基乙基-2-乙基-4-甲基咪唑、1-氰基乙基-2-十一烷基咪唑、1-氰基乙基-2-苯基咪唑、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-S-三嗪、2,4-二胺基-6-[2’-十一烷基咪唑基-(1’)]-乙基-S-三嗪、2,4-二胺基-6-[2’-乙基-4’-甲基咪唑基-(1’)]-乙基-S-三嗪、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-S-三嗪三聚異氰酸加成物、2-苯基咪唑三聚異氰酸加成物、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑、2-苯基-4-甲基咪唑、咪唑化合物與環氧樹脂之加成物及2,4-二胺基-6-乙烯基-S-三嗪所成群中所選出之化合物。該等可為1種或2種以上組合使用。 More specifically, the imidazole compound is 1-benzyl-2-phenylimene. Oxazole, 2-ethyl-4-methylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyano Ethyl-2-phenylimidazole, 2,4-diamino-6-[2'-methylimidazolyl-(1')]-ethyl-S-triazine, 2,4-diamino- 6-[2'-undecyl imidazolyl-(1')]-ethyl-S-triazine, 2,4-diamino-6-[2'-ethyl-4'-methylimidazole -(1')]-ethyl-S-triazine, 2,4-diamino-6-[2'-methylimidazolyl-(1')]-ethyl-S-triazine trimer Isocyanate adduct, 2-phenylimidazole trimer isocyanate adduct, 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxyl a compound selected from the group consisting of imidazole, 2-phenyl-4-methylimidazole, an imidazole compound and an epoxy resin, and a 2,4-diamino-6-vinyl-S-triazine . These may be used alone or in combination of two or more.

本發明所使用之金屬系硬化促進劑無特別限定,例如鈷、銅、鋅、鐵、鎳、錳、錫等之金屬的有機金屬錯合物或有機金屬鹽。有機金屬錯合物之具體例如,鈷(II)乙醯丙酮酸鹽、鈷(III)乙醯丙酮酸鹽等之有機鈷錯合物、銅(II)乙醯丙酮酸酯等之有機銅錯合物、鋅(II)乙醯丙酮酸鹽等之有機鋅錯合物、鐵(III)乙醯丙酮酸鹽等之有機鐵錯合物、鎳(II)乙醯丙酮酸鹽等之有機鎳錯合物、錳(II)乙醯丙酮酸鹽等之有機錳錯合物等。有機金屬鹽如,辛酸鋅、辛酸錫、環烷酸鋅、環烷酸鈷、硬脂酸錫、硬脂酸鋅等。該等可為1種或2種以上組合使用。 The metal-based hardening accelerator used in the present invention is not particularly limited, and is, for example, an organometallic complex or an organic metal salt of a metal such as cobalt, copper, zinc, iron, nickel, manganese or tin. Specific examples of the organometallic complex include, for example, an organic cobalt complex such as cobalt (II) acetoacetate, cobalt (III) acetoacetate, or copper (II) acetoacetate. Compound, an organic zinc complex such as zinc (II) acetoacetate, an organic iron complex such as iron (III) acetoacetate, or an organic nickel such as nickel (II) acetoacetate A complex compound, an organic manganese complex such as manganese (II) acetoacetate or the like. The organic metal salt is, for example, zinc octoate, tin octylate, zinc naphthenate, cobalt naphthenate, tin stearate, zinc stearate and the like. These may be used alone or in combination of two or more.

硬化促進劑之含量為,以硬化性樹脂組成物中之不揮發成分合計為100質量%時,較佳為使用0.005 ~3質量%之範圍,更佳為使用0.01~1質量%之範圍。 The content of the hardening accelerator is preferably 0.005 when the total amount of the nonvolatile components in the curable resin composition is 100% by mass. The range of ~3 mass% is more preferably in the range of 0.01 to 1 mass%.

熱塑性樹脂如,苯氧樹脂、聚乙烯縮醛樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、聚醚碸樹脂、環烯烴聚合物及聚碸樹脂等,較佳為苯氧樹脂、聚乙烯縮醛樹脂。該等可為1種或2種以上組合使用。 The thermoplastic resin is, for example, a phenoxy resin, a polyvinyl acetal resin, a polyimide resin, a polyamidoximine resin, a polyether oxime resin, a cycloolefin polymer, a polyfluorene resin, etc., preferably a phenoxy resin, Polyethylene acetal resin. These may be used alone or in combination of two or more.

熱塑性樹脂之聚苯乙烯換算的重量平均分子量較佳為8000~70000之範圍,又以10000~60000之範圍為佳,更佳為20000~60000之範圍。熱塑性樹脂之聚苯乙烯換算的重量平均分子量可以凝膠滲透色譜法(GPC)測定。具體上熱塑性樹脂之聚苯乙烯換算的重量平均分子量可藉由,測定裝置使用島津製作所(股)製LC-9A/RID-6A,管柱使用昭和電工(股)製Shodex K-800P/K-804L/K-804L,移動相使用氯仿等,以管柱溫度40℃測定後,使用標準聚苯乙烯之檢量線算出。又,熱塑性樹脂為苯氧樹脂時,該苯氧樹脂之環氧當量如10000~20000(g/當量)。 The polystyrene-equivalent weight average molecular weight of the thermoplastic resin is preferably in the range of 8,000 to 70,000, more preferably in the range of 10,000 to 60,000, still more preferably in the range of 20,000 to 60,000. The polystyrene-equivalent weight average molecular weight of the thermoplastic resin can be measured by gel permeation chromatography (GPC). Specifically, the polystyrene-equivalent weight average molecular weight of the thermoplastic resin can be obtained by using the LC-9A/RID-6A manufactured by Shimadzu Corporation and the column using Shodex K-800P/K-made by Showa Denko Co., Ltd. 804L/K-804L, the mobile phase was measured using a chloroform or the like, and was measured at a column temperature of 40 ° C using a calibration curve of standard polystyrene. Further, when the thermoplastic resin is a phenoxy resin, the epoxy equivalent of the phenoxy resin is from 10,000 to 20,000 (g/eq).

有機溶劑如,丙酮、甲基乙基酮、環己酮等之酮類、乙酸乙酯、乙酸丁酯、溶纖劑乙酸酯、丙二醇單甲基醚乙酸酯、卡必醇乙酸酯等之乙酸酯類、溶纖劑、丁基卡必醇等之卡必醇類、溶劑油、甲苯、二甲苯等之芳香族烴類、二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯烷酮等之醯胺系溶劑等。有機溶劑可為2種以上組合使用。 Organic solvents such as ketones such as acetone, methyl ethyl ketone, cyclohexanone, ethyl acetate, butyl acetate, cellosolve acetate, propylene glycol monomethyl ether acetate, carbitol acetate An aromatic hydrocarbon such as an acetate, a cellosolve or a butyl carbitol, a solvent oil, an aromatic hydrocarbon such as toluene or xylene, dimethylformamide or dimethylacetamide. A guanamine-based solvent such as N-methylpyrrolidone. The organic solvent may be used in combination of two or more kinds.

[調製硬化性樹脂組成物] [Preparation of hardenable resin composition]

本發明之硬化性樹脂組成物可藉由,適當混合上述成分,或必要時使用三座輥、球磨機、珠粒磨機、砂磨機等之混練方法,或高速回轉混合機、超混合機、行星混合機等之攪拌方法進行混練或混合調製而得。又,另外可添加上述有機溶劑調製作為樹脂塗漆用。 The curable resin composition of the present invention can be suitably mixed with the above components, or if necessary, a kneading method using a three-seat roll, a ball mill, a bead mill, a sand mill, or the like, or a high-speed rotary mixer or an ultra-mixer, A stirring method such as a planetary mixer is obtained by kneading or mixing and modulating. Further, the above organic solvent may be added and prepared as a resin paint.

本發明之硬化性樹脂組成物中,不僅絕緣層表面之算術平均粗糙度較低,自乘平均平方根粗糙度也較低,其上方可形成具有充分撕剝強度之電鍍導體層,故製造多層印刷配線板時適用為多層印刷配線板之絕緣層用硬化性樹脂組成物。又,適用為藉由電鍍而形成導體層用之硬化性樹脂組成物(藉由電鍍而形成導體層的多層印刷配線板之絕緣層用樹脂組成物),另外適用為多層印刷配線板之增層用硬化性樹脂組成物。 In the curable resin composition of the present invention, not only the arithmetic mean roughness of the surface of the insulating layer is low, but also the self-average square root roughness is low, and an electroplated conductor layer having sufficient tear strength can be formed thereon, thereby manufacturing multilayer printing. The wiring board is applied to a curable resin composition for an insulating layer of a multilayer printed wiring board. Further, it is preferably used as a curable resin composition for forming a conductor layer by electroplating (a resin composition for an insulating layer of a multilayer printed wiring board in which a conductor layer is formed by electroplating), and is also applied as a build-up layer of a multilayer printed wiring board. A curable resin composition is used.

本發明之硬化性樹脂組成物的形態無特別限定,適用於接著薄膜、預浸等之薄片狀層合材料、電路基板(層合板用途、多層印刷配線板用途等)。本發明之樹脂組成物可以塗漆狀態塗佈於電路基板而形成絕緣層,但工業上一般以接著薄膜、預浸等之薄片狀層合材料的形態使用為佳。樹脂組成物之軟化點就薄片狀層合材料之層壓性觀點較佳為40~150℃。 The form of the curable resin composition of the present invention is not particularly limited, and is suitable for use in a sheet-like laminate such as a film or a prepreg, and a circuit board (for laminate use, multilayer printed wiring board use, etc.). The resin composition of the present invention can be applied to a circuit board in a painted state to form an insulating layer. However, it is generally industrially used in the form of a sheet-like laminate which is followed by a film or a prepreg. The softening point of the resin composition is preferably from 40 to 150 ° C in view of lamination property of the sheet-like laminate.

[多層印刷配線板] [Multilayer printed wiring board]

本發明之硬化性樹脂組成物適用為多層印刷配線板之絕緣層用硬化性樹脂組成物。本發明所使用之多層印刷配 線板為,含有本發明將本發明之硬化性樹脂組成物或薄片狀層合材料熱硬化所得之絕緣層的多層印刷配線板。 The curable resin composition of the present invention is suitably used as a curable resin composition for an insulating layer of a multilayer printed wiring board. Multilayer printing with the invention The wiring board is a multilayer printed wiring board containing the insulating layer obtained by thermally curing the curable resin composition or the sheet-like laminate of the present invention.

此時熱硬化之條件可因應硬化性樹脂組成物中之環氧樹脂的種類、含量等適當選擇,例如以硬化溫度為90~220℃,較佳為160℃~210℃,硬化時間為10分鐘~180分鐘,較佳為20~120分鐘之條件進行加熱。又,可分2階段進行熱硬化。 The conditions of the heat hardening at this time may be appropriately selected depending on the kind and content of the epoxy resin in the curable resin composition, for example, the curing temperature is 90 to 220 ° C, preferably 160 ° C to 210 ° C, and the hardening time is 10 minutes. Heating is carried out for ~180 minutes, preferably for 20 to 120 minutes. Moreover, the heat hardening can be performed in two stages.

此時絕緣層之線熱膨脹係數(JIS K7197)係以25~150℃之平均線熱膨脹係數測定時較佳為20ppm/℃以下,更佳為19ppm/℃以下。下限值無特別限制,一般為4ppm/℃。如此可防止絕緣層(增層)與導體層(配線)變形,得信賴性較高之多層印刷配線板。 In this case, the linear thermal expansion coefficient (JIS K7197) of the insulating layer is preferably 20 ppm/° C. or less, more preferably 19 ppm/° C. or less, as measured by an average linear thermal expansion coefficient of 25 to 150° C. The lower limit is not particularly limited and is generally 4 ppm/°C. In this way, it is possible to prevent the insulating layer (addition layer) and the conductor layer (wiring) from being deformed, and it is possible to obtain a multilayer printed wiring board having high reliability.

絕緣層表面可實施粗糙化處理。乾式之粗化處理如等離子處理等。濕式之粗化處理如,適用各種處理液進行。例如依序以膨潤液進行膨潤處理,以氧化劑進行粗化處理及以中和液進行中和處理之方法。因此處理液可為該等膨潤液、氧化劑、中和液之組合。濕式之粗化處理因可大面積或數枚一起處理而具有較高生產性故為佳。 The surface of the insulating layer can be roughened. Dry roughening treatment such as plasma treatment. The wet roughening treatment is carried out, for example, with various treatment liquids. For example, it is subjected to a swelling treatment with a swelling liquid, a roughening treatment with an oxidizing agent, and a neutralization treatment with a neutralizing liquid. Therefore, the treatment liquid may be a combination of the swelling liquid, the oxidizing agent, and the neutralizing liquid. The wet roughening treatment is preferred because it can be processed in large areas or in several pieces and has high productivity.

使用膨潤液之膨潤處理為,將絕緣層浸漬於50~80℃下膨潤液中5~20分鐘(較佳為55~70℃下8~15分鐘)。膨潤液如,鹼溶液、表面活性劑溶液等,較佳為鹼溶液。該鹼溶液如,氫氧化鈉溶液、氫氧化鉀溶液等。市售之膨潤液如,艾特鐵(股)製之Swelling Dip Securiganth P、Swelling Dip Securiganth SBU等。 The swelling treatment using the swelling liquid is to immerse the insulating layer in the swelling liquid at 50 to 80 ° C for 5 to 20 minutes (preferably at 55 to 70 ° C for 8 to 15 minutes). The swelling solution such as an alkali solution, a surfactant solution or the like is preferably an alkali solution. The alkali solution is, for example, a sodium hydroxide solution, a potassium hydroxide solution or the like. Commercially available swelling liquids such as Swelling Dip Securiganth P, Swelling Dip Securiganth SBU, etc., manufactured by Aite Iron Co., Ltd.

使用氧化劑之粗化處理為,將絕緣層浸漬於60~80℃下氧化劑溶液中10~30分鐘(較佳為70~80℃下15~25分鐘)。氧化劑如,高錳酸鉀或高錳酸鈉溶解於氫氧化鈉之水溶液所得的鹼性高錳酸溶液、重鉻酸鹽、臭氣、過氧化氫/硫酸、硝酸等。又,鹼性高錳酸溶液中高錳酸鹽之濃度較佳為5~10質量%。市售之氧化劑如,艾特鐵(股)製之Concentrate Compact CP、Dosingsolution Securiganth P等之鹼性高錳酸溶液。 The roughening treatment using an oxidizing agent is performed by immersing the insulating layer in an oxidizing agent solution at 60 to 80 ° C for 10 to 30 minutes (preferably at 70 to 80 ° C for 15 to 25 minutes). An oxidizing agent such as potassium permanganate or sodium permanganate dissolved in an aqueous solution of sodium hydroxide, an alkaline permanganic acid solution, dichromate, odor, hydrogen peroxide/sulfuric acid, nitric acid, or the like. Further, the concentration of the permanganate in the alkaline permanganic acid solution is preferably from 5 to 10% by mass. Commercially available oxidizing agents such as a constant permanganic acid solution such as Concentrate Compact CP and Dosingsolution Securiganth P manufactured by Aite Iron Co., Ltd.

使用中和液之中和處理為,浸漬於30~50℃下中和液中3~10分鐘(較佳為35~45℃下3~8分鐘)。中和液較佳為酸性之水溶液,市售品如,艾特鐵(股)製之Reduction Solution Securiganth P。 The neutralization treatment using the neutralization solution is immersed in the neutralization solution at 30 to 50 ° C for 3 to 10 minutes (preferably 3 to 8 minutes at 35 to 45 ° C). The neutralizing liquid is preferably an acidic aqueous solution, and a commercial product such as Reduction Solution Securiganth P manufactured by Aite Iron Co., Ltd.

粗化處理後可於50~120℃下將絕緣層乾燥10~60分鐘(較佳為60~100℃下20~40分鐘)。 After the roughening treatment, the insulating layer may be dried at 50 to 120 ° C for 10 to 60 minutes (preferably 60 to 100 ° C for 20 to 40 minutes).

為了提升微細配線形成,粗化處理後之絕緣層表面的表面粗糙度中,算術平均粗糙度(Ra)較佳為350nm以下,又以300nm以下為佳,更佳為200nm以下,特佳為100nm以下。算術平均粗糙度(Ra)之下限值無限制,一般為10nm以上、40nm以上、70nm以上等。算乘平均平方根粗糙度(Rq)較佳為450nm以下,又以350nm以下為佳,更佳為250nm以下,特佳為150nm以下。自乘平均平方根粗糙度(Rq)之下限值無限制,一般為20nm以上、50nm以上、90nm以上等。又,自乘平均平方根粗糙度(Rq)係反映絕緣層表面之局部性狀態,因 此藉由把握Rq可確認細緻平滑之絕緣層表面,使撕剝強度安定化。其相當於將硬化性樹脂組成物熱硬化後,經粗化處理所得之絕緣層的表面粗糙度。 In order to enhance the formation of the fine wiring, the arithmetic mean roughness (Ra) of the surface roughness of the surface of the insulating layer after the roughening treatment is preferably 350 nm or less, more preferably 300 nm or less, still more preferably 200 nm or less, and particularly preferably 100 nm. the following. The lower limit of the arithmetic mean roughness (Ra) is not limited, and is generally 10 nm or more, 40 nm or more, 70 nm or more. The calculation average square root roughness (Rq) is preferably 450 nm or less, more preferably 350 nm or less, still more preferably 250 nm or less, and particularly preferably 150 nm or less. The lower limit of the self-average square root roughness (Rq) is not limited, and is generally 20 nm or more, 50 nm or more, 90 nm or more. Moreover, the self-equalized average square root roughness (Rq) reflects the local state of the surface of the insulating layer, By grasping Rq, the surface of the smooth and smooth insulating layer can be confirmed, and the tearing strength can be stabilized. This corresponds to the surface roughness of the insulating layer obtained by subjecting the curable resin composition to heat curing.

為了使絕緣層與其接鄰之層,例如導體層充分密合,撕剝強度較佳為0.45kgf/cm(4.41N/cm)以上,更佳為0.50kgf/cm(4.90N/cm)以上。撕剝強度之上限值愈高愈好,無特別限制,一般為1.5kgf/cm(14.7N/cm)以下、1.2kgf/cm(11.8N/cm)以下、1.0kgf/cm(9.81N/cm)以下、0.8kgf/cm(7.85N/cm)以下等。 The tearing strength is preferably 0.45 kgf/cm (4.41 N/cm) or more, more preferably 0.50 kgf/cm (4.90 N/cm) or more, in order to sufficiently close the insulating layer to the layer adjacent thereto, for example, the conductor layer. The upper limit of the tearing strength is preferably as high as possible, and is not particularly limited, and is generally 1.5 kgf/cm (14.7 N/cm) or less, 1.2 kgf/cm (11.8 N/cm) or less, and 1.0 kgf/cm (9.81 N/ Below cm), 0.8 kgf/cm (7.85 N/cm) or less.

[薄片狀層合材料] [Sheet laminate]

本發明所使用之薄片狀層合材料為,將上述硬化性樹脂組成物成型為層所得的硬化前之薄片狀材料。該薄片狀層合材料可藉由業者已知之方法,例如調製上述有機溶劑中溶解樹脂組成物所得之樹脂塗漆後,使用模具塗佈機等將該樹脂塗漆塗布於支撐物上,再加熱,或吹熱風等使有機溶劑乾燥而於支撐物上形成樹脂組成物層(薄片狀層合材料),得附支撐物之薄片狀層合材料。又,可藉由熱熔法或溶劑法使玻璃纖維織布等之薄片狀補強基材含浸樹脂塗漆後乾燥,得預浸之薄片狀層合材料。又,附支撐物之薄片狀層合材料也可稱為接著薄膜。 The sheet-like laminate used in the present invention is a sheet-like material before curing obtained by molding the above-mentioned curable resin composition into a layer. The sheet-like laminate may be applied to a support by a resin coating method, for example, by modulating a resin obtained by dissolving a resin composition in the organic solvent, and then applying the resin to a support using a die coater or the like. The organic solvent is dried by blowing hot air or the like to form a resin composition layer (sheet-like laminate) on the support, and a sheet-like laminate having a support is obtained. Further, a sheet-like reinforcing substrate such as a glass fiber woven fabric may be impregnated with a resin by a hot melt method or a solvent method, and then dried to obtain a prepreg sheet-like laminate. Further, the sheet-like laminate material with the support may also be referred to as an adhesive film.

乾燥條件無特別限制,可乾燥至樹脂組成物中有機溶劑之含量為10質量%以下,較佳為5質量%以下。其會因塗漆中之有機溶劑量、有機溶劑之沸點而異, 例如含有30~60質量%之有機溶劑的塗漆,可藉由50~150℃下乾燥3~10分鐘,而形成樹脂組成物層。 The drying conditions are not particularly limited, and the content of the organic solvent in the resin composition can be dried to 10% by mass or less, preferably 5% by mass or less. It varies depending on the amount of organic solvent in the paint and the boiling point of the organic solvent. For example, a paint containing 30 to 60% by mass of an organic solvent can be dried at 50 to 150 ° C for 3 to 10 minutes to form a resin composition layer.

所得的薄片狀層合材料之厚度無特別限定,例如以1~150μm之範圍為佳、較佳如2~100μm之範圍,更佳為3~50μm之範圍,特佳為5~30μm之範圍。 The thickness of the obtained sheet-like laminate is not particularly limited, and is, for example, preferably in the range of 1 to 150 μm, preferably in the range of 2 to 100 μm, more preferably in the range of 3 to 50 μm, and particularly preferably in the range of 5 to 30 μm.

該薄片狀層合材料可為,具有複數層樹脂組成物層,或樹脂組成物層之一方表面具有支撐物,或另一方表面具有保護薄膜。 The sheet-like laminate may have a plurality of layers of the resin composition, or one of the surface of the resin composition layer has a support, or the other surface may have a protective film.

[支撐物] [support]

本發明所使用之支撐物如,塑模或金屬箔。具體之塑模如,聚對苯二甲酸乙二醇酯(以下簡稱為「PET」)、聚萘二甲酸乙二醇酯等之聚酯、聚碳酸酯、聚乙烯、聚丙烯、丙烯酸酯、環狀聚烯烴、三乙醯纖維素、聚醚硫化物、聚醚酮、聚醯亞胺等。其中較佳為聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯,特佳為低價且易取得之聚對苯二甲酸乙二醇酯薄膜。 The support used in the present invention is, for example, a mold or a metal foil. Specific molds such as polyethylene terephthalate (hereinafter referred to as "PET"), polyethylene naphthalate, polyester, polycarbonate, polyethylene, polypropylene, acrylate, Cyclic polyolefin, triacetyl cellulose, polyether sulfide, polyether ketone, polyimine, and the like. Among them, polyethylene terephthalate or polyethylene naphthalate is preferred, and a polyethylene terephthalate film which is inexpensive and easily available is particularly preferred.

金屬箔如,銅箔、鋁箔等。 Metal foils such as copper foil, aluminum foil, and the like.

就汎用性觀點,較佳為塑膜,使用塑膜時為了提升剝離性,較佳為使用接觸含有硬化性樹脂組成物之層的表面經離模處理之支撐物。離模處理所使用之離模劑可為,能由支撐物剝離含有硬化性樹脂組成物之層之物無特別限定,例如矽系離模劑、醇酸樹脂系離模劑、聚烯烴樹脂、胺基甲酸酯樹脂、氟系樹脂等。又,經離模處理之 支撐物可使用市售的附離模層之塑膜,較佳如,具有主成分為醇酸樹脂系離模劑之離模層的PET薄膜SK-1、AL-5、AL-7(林鐵庫(股)製)等。又,塑膜可實施褪光處理或電暈處理,該處理面上可形成離模層。另外金屬箔可藉由蝕刻液去除,或不去除下可以該金屬箔作為導體層用。 From the viewpoint of general use, it is preferably a plastic film, and in order to improve the peeling property when a plastic film is used, it is preferred to use a support which is subjected to release treatment by contacting a surface of a layer containing a curable resin composition. The release agent used in the mold release treatment may be one in which the layer containing the curable resin composition can be peeled off from the support, and is not particularly limited, and examples thereof include an oxime release agent, an alkyd resin release agent, and a polyolefin resin. A urethane resin, a fluorine resin, or the like. Again, after being subjected to mold release treatment As the support, a commercially available plastic film with a release layer may be used, and preferably, a PET film SK-1, AL-5, AL-7 having a release layer whose main component is an alkyd resin release agent is used. Iron storage (stock) system, etc. Further, the plastic film may be subjected to a matte treatment or a corona treatment, and a release layer may be formed on the treated surface. Alternatively, the metal foil may be removed by an etching solution, or the metal foil may be used as a conductor layer without being removed.

支撐物之厚度無特別限定,較佳為10~150μm之範圍,又以20~50μm之範圍為佳,更佳為25~45μm之範圍。 The thickness of the support is not particularly limited, but is preferably in the range of 10 to 150 μm, more preferably in the range of 20 to 50 μm, still more preferably in the range of 25 to 45 μm.

本發明所使用之保護薄膜的設置目的為,防止含有硬化性樹脂組成物之層附著灰塵等。該保護薄膜可使用與支撐物相同之塑膜。又保護薄膜可實施褪光處理、電暈處理等之表面處理,也可實施與上述相同之離模處理。保護薄膜之厚度較佳為3~30μm,更佳為5~20μm。 The protective film used in the present invention is intended to prevent dust or the like from adhering to the layer containing the curable resin composition. The protective film can use the same plastic film as the support. Further, the protective film may be subjected to a surface treatment such as matte treatment or corona treatment, or the same release treatment as described above may be carried out. The thickness of the protective film is preferably from 3 to 30 μm, more preferably from 5 to 20 μm.

[使用薄片狀層合材料之多層印刷配線板] [Multilayer printed wiring board using sheet laminate]

其次將說明使用上述所製造之薄片狀層合材料製造多層印刷配線板之方法一例。 Next, an example of a method of producing a multilayer printed wiring board using the above-described sheet-like laminate material will be described.

首先使用真空層壓機將薄片狀層合材料層壓於電路基板之單面或雙面上(層合)。電路基板所使用之基板如,玻璃環氧基板、金屬基板、聚酯基板、聚醯亞胺基板、BT械脂基板、熱硬化型聚伸苯基醚基板等。又,此時電路基板係指,上述基板之單面或雙面形成經圖型加工之導體層(電路)之物。又交互層合導體層與絕緣層所得之多 層印刷配線板中,該多層印刷配線板之最外層的單面或雙面形成經圖型加工之導體層(電路)之物,也納入該電路基板。又導體層表面可實施黑化處理,或藉由銅蝕刻等預先粗化處理。 First, the sheet-like laminate material was laminated on one side or both sides (lamination) of the circuit substrate using a vacuum laminator. The substrate used for the circuit board is, for example, a glass epoxy substrate, a metal substrate, a polyester substrate, a polyimide substrate, a BT grease substrate, a thermosetting polyphenylene ether substrate, or the like. Moreover, the circuit board at this time means that the conductor layer (circuit) processed by the pattern is formed on one surface or both surfaces of the substrate. And the result of alternating laminated conductor layers and insulating layers In the layer printed wiring board, the conductor layer (circuit) of the pattern processing is formed on one side or both sides of the outermost layer of the multilayer printed wiring board, and is also incorporated in the circuit board. Further, the surface of the conductor layer may be subjected to a blackening treatment or a pre-roughening treatment by copper etching or the like.

上述層壓過程中,薄片狀層合材料具有保護薄膜時,去除該保護薄膜後,必要時可將薄片狀層合材料及電路基板預熱,再將薄片狀層合材料加壓及加熱同時層壓於電路基板上。本發明之薄片狀層合材料適用藉由真空層壓機於減壓下層合於電路基板上之方法。層壓條件無特別限定,較佳如,減壓10~120秒使空氣壓20mmHg(26.7hPa)以下,其後以壓合溫度(層壓溫度)較佳為70~140℃,壓合壓力(層壓壓力)較佳為0.1~1.5MPa,更佳為0.5~1.2MPa,壓合時間(層壓時間)較佳為5~180秒之條件進行層壓。又,層壓方法可為分批式或使用輥之連續式。真空層壓可使用市售之真空層壓機。市售之真空層壓機如,尼吉各(股)製真空塗佈機、名機製作所(股)製真空加壓式層壓機、日立因達斯製輥式乾塗機、日立AIC(股)製真空層壓機等。 In the laminating process, when the sheet-like laminate material has a protective film, after removing the protective film, the sheet-like laminate material and the circuit substrate may be preheated if necessary, and then the sheet-like laminate material is pressurized and heated while the layer is laminated. Pressed on the circuit board. The sheet-like laminate of the present invention is suitable for laminating on a circuit board under reduced pressure by a vacuum laminator. The laminating conditions are not particularly limited. Preferably, the pressure is 10 mm to 120 seconds, the air pressure is 20 mmHg (26.7 hPa) or less, and thereafter the pressing temperature (lamination temperature) is preferably 70 to 140 ° C, and the pressing pressure is ( The lamination pressure is preferably 0.1 to 1.5 MPa, more preferably 0.5 to 1.2 MPa, and the lamination time (lamination time) is preferably 5 to 180 seconds. Further, the lamination method may be a batch type or a continuous type using a roll. A vacuum laminator commercially available can be used for vacuum lamination. Commercially available vacuum laminating machines such as vacuum coating machines manufactured by Nikki Co., Ltd., vacuum pressure laminating machines manufactured by Nihon Seisakusho Co., Ltd., Hitachi Indas Roll Dry Coating Machines, Hitachi AIC ( Stock) vacuum laminator, etc.

其後冷卻至室溫附近,將支撐物剝離之情形,為剝離後將樹脂組成物熱硬化形成硬化物,可於電路基板上形成絕緣層。熱硬化之條件可因應樹脂組成物中之樹脂成分的種類、含量等適當選擇,例如以硬化溫度為100~220℃,較佳為160~210℃,硬化時間為20分鐘~180分鐘,較佳為30~120分鐘之條件進行加熱。又,可分2階 段進行熱硬化。形成絕緣層後硬化前未剝離支撐物時,必要時可剝離。 Thereafter, the mixture is cooled to near room temperature, and when the support is peeled off, the resin composition is thermally cured to form a cured product after peeling, and an insulating layer can be formed on the circuit board. The curing conditions can be appropriately selected depending on the kind and content of the resin component in the resin composition, for example, the curing temperature is 100 to 220 ° C, preferably 160 to 210 ° C, and the curing time is 20 minutes to 180 minutes. Heat for 30 to 120 minutes. Also, can be divided into 2 orders The section is thermally hardened. When the insulating layer is formed and the support is not peeled off before hardening, it may be peeled off if necessary.

又,可使用真空加壓機將薄片狀層合材料層合於電路基板之單面或雙面上。減壓下進行加熱及加壓之層合步驟為,可使用一般之真空耐壓機進行。例如,藉由將加熱後之SUS板等金屬板加壓於支撐物側之方法進行。加壓條件較佳為,以70~250℃,較佳為100~230℃之溫度,減壓度一般為0.01MPa以下,較佳為0.001MPa以下之減壓下,以加壓壓力為0.5~4MPa之範圍,加壓時間為30~150分鐘之條件進行。加熱及加壓可以1階段進行,但就控制樹脂暈染之觀點較佳為將條件分為2階段以上進行。例如較佳為,第1階段加壓條件係溫度70~150℃下,以加壓壓力0.1~1.5MPa,第2階段加壓條件係溫度150~200℃下,以加壓壓力0.5~4MPa進行。各階段之時間較佳為進行20~120分鐘。藉由該類將樹脂組成物層熱硬化可於電路基板上形成絕緣層。市售之真空熱壓機如,MNPC-V-750-5-200(名機製作所(股)製)、VH1-1603(北川精機(股)製)等。 Further, the sheet-like laminate may be laminated on one or both sides of the circuit board using a vacuum press. The laminating step of heating and pressurizing under reduced pressure can be carried out using a general vacuum pressure-resistant machine. For example, it is carried out by pressurizing a metal plate such as a heated SUS plate to the side of the support. The pressurization condition is preferably 70 to 250 ° C, preferably 100 to 230 ° C, and the degree of pressure reduction is generally 0.01 MPa or less, preferably 0.001 MPa or less under reduced pressure, and the pressure is 0.5 °. The range of 4 MPa is carried out under the conditions of a press time of 30 to 150 minutes. Heating and pressurization can be carried out in one stage, but it is preferable to carry out the conditions of two or more stages from the viewpoint of controlling the blooming of the resin. For example, it is preferable that the first-stage pressurization condition is a pressurization pressure of 0.1 to 1.5 MPa at a temperature of 70 to 150 ° C, and a second-stage pressurization condition of a temperature of 150 to 200 ° C at a pressurization pressure of 0.5 to 4 MPa. . The time of each stage is preferably carried out for 20 to 120 minutes. The insulating layer can be formed on the circuit substrate by thermally hardening the resin composition layer. Commercially available vacuum hot presses, such as MNPC-V-750-5-200 (made by Nihon Seiki Co., Ltd.) and VH1-1603 (made by Kitagawa Seiki Co., Ltd.).

其次對形成於電路基板上之絕緣層進行打洞加工可形成導通孔、通孔。打洞加工可藉由例如鈷頭、雷射、等離子等已知之方法,或必要時組合該等方法進行,最常用之方法為使用碳酸氣體雷射、YAG雷射等之雷射進行打洞加工。打洞加工前支撐物未剝離時,此時會剝離。 Next, the insulating layer formed on the circuit substrate is subjected to a hole punching process to form a via hole and a via hole. The hole punching process can be performed by a known method such as a cobalt head, a laser, a plasma, or the like if necessary, and the most common method is a hole punching process using a laser such as a carbon dioxide gas laser or a YAG laser. . When the support is not peeled off before the hole punching, it will peel off at this time.

其次對絕緣層表面進行上述粗化處理,再藉由乾式電鍍或濕式電鍍於絕緣層上形成導體層。乾式電鍍可使用蒸鍍、濺鍍、離子電鍍等已知之方法。濕式電鍍如,組合無電解電鍍與電解電鍍形成導體層之方法,或導體層係形成逆圖型之電鍍光阻時僅以無電解電鍍形成導體層之方法等。其後形成圖型之方法如,可使用業者已知之減色法、加成法等,重覆數次上述一連串步驟,可得多段層合增層之多層印刷配線板。本發明因具有低粗糙度、高撕剝度,故適用為多層印刷配線板之增層。 Next, the surface of the insulating layer is subjected to the above-mentioned roughening treatment, and then a conductor layer is formed on the insulating layer by dry plating or wet plating. Dry plating can be carried out by a known method such as vapor deposition, sputtering, or ion plating. Wet electroplating, for example, a method of forming a conductor layer by electroless plating and electrolytic plating, or a method of forming a conductor layer by electroless plating when a conductor layer forms an electroplated photoresist of an inverse pattern. Thereafter, a method of forming a pattern may be carried out by repeating the above-described series of steps several times by a subtractive method, an additive method, or the like known to those skilled in the art, and a multilayer printed wiring board of a multi-layer laminated layer may be laminated. The invention is suitable for the layering of a multilayer printed wiring board because of its low roughness and high tearing degree.

[半導體裝置] [semiconductor device]

可使用上述製作之多層印刷配線板製造半導體裝置。本發明所使用之多層印刷配線板的導通部可藉由實裝半導體晶片而製造半導體裝置。「導通部」係指,「多層印刷配線板中傳導電氣信號之處所」,該場所可於表面,或填埋處理。又,可導通下可為部分導體層或其他連接器等之導電部分。「半導體晶片」可為以半導體為材料之電氣電路元件無特別限定。 A semiconductor device can be manufactured using the multilayer printed wiring board produced above. The conductive portion of the multilayer printed wiring board used in the present invention can be manufactured by mounting a semiconductor wafer. “Conduit” means “where the electrical signal is transmitted in a multilayer printed wiring board”, which can be disposed on the surface or in landfill. Moreover, the conductive portion of the partial conductor layer or other connectors can be turned on. The "semiconductor wafer" may be an electrical circuit component made of a semiconductor material, and is not particularly limited.

製造本發明之半導體裝置時的半導體晶片之實裝方法為,可使半導體晶片具有效之機能下無特別限定,具體如,金屬絲接合實裝方法、觸發晶片實裝方法、使用未凸出之增層(BBUL)的實裝方法、使用各向異性導電薄膜(ACF)之實裝方法、使用非導電性薄膜(NCF)之實裝方法等。 The mounting method of the semiconductor wafer in the manufacture of the semiconductor device of the present invention is not particularly limited as long as the function of the semiconductor wafer is effective, for example, the wire bonding mounting method, the trigger wafer mounting method, and the use of the non-bumping. A method of mounting a build-up layer (BBUL), a method of mounting an anisotropic conductive film (ACF), a method of mounting using a non-conductive film (NCF), and the like.

實施例 Example

下面將舉實施例具體說明本發明,但本發明非限定於該等實施例。又,以下所記載之「份」無特別註明下係指「質量份」,「%」無特別註明下係指「質量%」。 The invention will be specifically described below by way of examples, but the invention is not limited to the examples. In addition, the "parts" described below are not specifically indicated as "mass parts", and "%" means "% by mass" unless otherwise specified.

<測定方法、評估方法> <Measurement method, evaluation method>

首先將說明各種測定方法及評估方法。 First, various measurement methods and evaluation methods will be described.

[調製撕剝強度、算術平均粗糙度(Ra值)、自乘平均平方根粗糙度(Rq值)測定用樣品] [Preparation of peeling strength, arithmetic mean roughness (Ra value), and self-centered average square root roughness (Rq value)] (1)層合板之底層處理 (1) Underlayer treatment of laminate

以美庫(股)製CZ8100將玻璃布基材環氧樹脂雙面貼銅層合板(銅箔之厚度18μm、基板厚度0.3mm,松下電工(股)製R5715ES)雙面蝕刻1μm實施銅表面之粗化處理。 A copper cloth substrate epoxy resin double-sided copper laminate (copper foil thickness 18 μm, substrate thickness 0.3 mm, Matsushita Electric Co., Ltd. R5715ES) was double-etched by 1 μm on a copper surface by CZ8100 manufactured by Meike Co., Ltd. Coarse processing.

(2)層壓接著薄膜 (2) lamination followed by film

使用分批式真空加壓層壓機MVLP-500(名機製作所製,將實施例及比較例所製作之接著薄膜層壓於上述粗化處理過之環氧樹脂雙面貼銅層合板之雙面上。層壓時係以30秒減壓至氣壓為13hPa以下,其後以30秒、100℃、壓力0.74MPa之條件進行壓合。 Using a batch type vacuum press laminating machine MVLP-500 (manufactured by Nago Seisakusho Co., Ltd., the adhesive film produced in the examples and the comparative examples was laminated on the above-mentioned double-treated epoxy double-sided copper-clad laminate) In the lamination, the pressure was reduced to 30 h after the pressure was 30 seconds, and then press-bonded under the conditions of 30 seconds, 100 ° C, and a pressure of 0.74 MPa.

(3)硬化樹脂組成物 (3) hardened resin composition

由層壓後之接著薄膜剝離支撐物之聚對苯二甲酸乙二醇酯(PET)薄膜後,以100℃持續30分鐘後以180℃持續30分鐘之硬化條件使樹脂組成物硬化形成絕緣層。 After peeling the support film of the polyethylene terephthalate (PET) film, the resin composition was cured at 100 ° C for 30 minutes and then hardened at 180 ° C for 30 minutes to form an insulating layer. .

(4)粗化處理 (4) roughening treatment

60℃下將形成絕緣層之層合板浸漬於作為膨潤液用艾特鐵日本(之含有二乙二醇單丁基醚的Swelling Dip Securiganth P(乙二醇醚類,氫氧化鈉之水溶液)中5分鐘(實施例1、比較例1、4、5)、10分鐘(實施例2、3、比較例2、3)。其次80℃下浸漬於作為粗化液用艾特鐵日本(股)之Concentrate Compact P(KMnO4:60g/L,NaOH:40g/L之水溶液)中15分鐘(實施例1、比較例1、4、5)、20分鐘(實施例2、3、比較例2、3)。最後40℃下浸漬於作為中和液用艾特鐵日本(股)之dosingsolution Securiganth P(硫酸之水溶液)中5分鐘。80℃下乾燥30分鐘後,以所得基板作為評估基板A用。 The laminate in which the insulating layer was formed was immersed in Swelling Dip Securiganth P (glycol ether, aqueous solution of sodium hydroxide) containing diethylene glycol monobutyl ether as a swelling liquid at 60 ° C. 5 minutes (Example 1, Comparative Example 1, 4, 5), 10 minutes (Examples 2, 3, Comparative Examples 2, 3). Secondly, immersed in Atte Iron Japan as a roughening solution at 80 ° C 15 minutes in Concentrate Compact P (KMnO 4 : 60 g/L, NaOH: 40 g/L aqueous solution) (Example 1, Comparative Examples 1, 4, 5), 20 minutes (Examples 2, 3, Comparative Example 2) 3), immersed in a dosing solution Securiganth P (aqueous solution of sulfuric acid) as a neutralizing solution for 4 minutes at 40 ° C. After drying at 80 ° C for 30 minutes, the obtained substrate was used as the evaluation substrate A. .

(5)使用加成工法電鍍 (5) Plating using the addition method

電鍍評估基板A以形成導體層。具體為,40℃下將評估基板A浸漬於含有PdCl2之無電解電鍍用溶液中5分鐘後,25℃下浸漬於無電解銅電鍍液中20分鐘。150℃下加熱30分鐘進行退火處理後,形成蝕刻光阻,藉由蝕刻形 成圖型後進行硫酸銅電解電鍍,形成厚30μm之導體層。其次以190℃進行60分鐘退火處理。以所得基板作為評估基板B用。 The substrate A is evaluated by electroplating to form a conductor layer. Specifically, the evaluation substrate A was immersed in a solution for electroless plating containing PdCl 2 at 40 ° C for 5 minutes, and then immersed in an electroless copper plating solution at 25 ° C for 20 minutes. After annealing at 150 ° C for 30 minutes and annealing treatment, an etching resist was formed, and a pattern was formed by etching, followed by electroplating of copper sulfate to form a conductor layer having a thickness of 30 μm. Next, annealing treatment was performed at 190 ° C for 60 minutes. The obtained substrate was used as the evaluation substrate B.

[測定粗化後之算術平均粗糙度(Ra值)、自乘平均平方根粗糙度(Rq值)] [Measurement of arithmetic mean roughness (Ra value) after roughening, self-sufficient average square root roughness (Rq value)]

使用非接觸型表面粗糙度計(彼可因公司製作WYKO NT3300),藉由以VSI接觸模式由50倍透鏡所得的測定範圍121μm×92μm下之數值求取Ra值、Rq值。又,藉由各自求取的10點之平均值進行測定。 Using a non-contact type surface roughness meter (WYKO NT3300 manufactured by Pico Co., Ltd.), the Ra value and the Rq value were obtained by a value in a measurement range of 121 μm × 92 μm obtained from a 50-fold lens in a VSI contact mode. Further, the measurement was performed by the average of 10 points obtained by each.

[測定電鍍導體層之拉取剝離強度(撕剝強度)] [Determination of the peeling strength (peeling strength) of the electroplated conductor layer]

由評估基板B之導體層切出寬10mm、長100mm之部分後,其一端以剝離固定具(TSEO股份公司,自動膠型試驗機AC-50C-SL)挾住,測定室溫(25℃)下以50mm/分鐘之速度朝垂直方向拉取剝離35mm時之荷重(kgf/cm(N/cm))。 After the conductor layer of the evaluation substrate B was cut out to a portion having a width of 10 mm and a length of 100 mm, one end thereof was smashed with a peeling fixture (TSEO AG, automatic glue type tester AC-50C-SL), and the room temperature (25 ° C) was measured. The load (kgf/cm (N/cm)) when peeling 35 mm was pulled in the vertical direction at a speed of 50 mm/min.

[測定線熱膨脹係數(CTE)] [Measurement Line Thermal Expansion Coefficient (CTE)]

200℃下將實施例及比較例所得之接著薄膜加熱90分鐘進行熱硬化,再由支撐物PET薄膜剝離,得薄片狀硬化物。由該硬化物切出寬5mm、長15mm、厚30mm之試驗片後,使用熱機械分析裝置Thermo Plus TMA8310(里加庫(股)製),以拉伸加重法進行熱機械分析。將試驗 片裝置於前述裝置後,以荷重1g、升溫速度5℃/分之測定條件連續測定2次。算出第2次測定時25℃至150℃之平均線熱膨脹係數(ppm)。 The film obtained in the examples and the comparative examples was heated at 200 ° C for 90 minutes to be thermally cured, and then peeled off from the support PET film to obtain a flaky cured product. A test piece having a width of 5 mm, a length of 15 mm, and a thickness of 30 mm was cut out from the cured product, and then subjected to thermomechanical analysis by a tensile weighting method using a thermomechanical analyzer Thermo Plus TMA8310 (manufactured by Riga Co., Ltd.). Will test After the sheet device was placed in the above apparatus, the sheet was continuously measured twice under the measurement conditions of a load of 1 g and a temperature increase rate of 5 ° C /min. The average linear thermal expansion coefficient (ppm) at 25 ° C to 150 ° C in the second measurement was calculated.

[評估樹脂填埋性] [Evaluation of resin landfill] (1)基板之底層處理 (1) Underlying processing of the substrate

於玻璃布基材環氧樹脂雙面貼銅層合板[銅箔之厚度35μm,基板厚度0.3mm,松下電工(股)製R5715ES]上形成IPC MULTI-PURPOSE TEST BOARD NO.IPC B-25之圖型(線/空間=175/175μm之梳齒圖型(殘銅率50%)),將雙面浸漬美庫(股)製CZ8100實施銅表面之粗化處理。 IPC MULTI-PURPOSE TEST BOARD NO.IPC B-25 is formed on the glass cloth substrate epoxy double-sided copper laminate [copper foil thickness 35μm, substrate thickness 0.3mm, Matsushita Electric Co., Ltd. R5715ES] Type (line/space = 175/175 μm comb pattern (50% residual copper)), and double-sided impregnation of the CZ8100 made by Meike Co., Ltd. to roughen the copper surface.

(2)層壓接著薄膜 (2) lamination followed by film

使用分批式真空加壓層壓機MVLP-500(名機(股)製商品名),以接觸樹脂組成物面之方式層壓實施例及比較例所製作之接著薄膜。層壓時係以30秒減壓至氣壓13hPa以下,其後以30秒、120℃、壓力0.74MPa進行壓合。其次以120℃、壓力0.5MPa之條件進行60秒預熱。 The batch film produced by the examples and the comparative examples was laminated in such a manner as to contact the resin composition surface using a batch type vacuum pressure laminator MVLP-500 (trade name, manufactured by a famous machine). At the time of lamination, the pressure was reduced to a pressure of 13 hPa or less in 30 seconds, and then press-bonded at 30 seconds, 120 ° C, and a pressure of 0.74 MPa. Next, preheating was carried out for 60 seconds under conditions of 120 ° C and a pressure of 0.5 MPa.

(3)硬化樹脂組成物 (3) hardened resin composition

層壓後剝離支撐物PET薄膜,再以100℃下30分鐘、其後180℃下30分鐘之硬化條件將樹脂組成物熱硬化形成絕緣層。 After lamination, the support PET film was peeled off, and the resin composition was thermally cured to form an insulating layer at a curing condition of 100 ° C for 30 minutes and thereafter at 180 ° C for 30 minutes.

(4)評估樹脂表面之填埋性 (4) Evaluation of the landfill of the resin surface

使用微型光學顯微鏡由表面觀察線/空間=175/ 175μm之梳齒圖型(殘銅率50%)上之絕緣層,以無孔充分填埋之物為「○」,以發生孔且樹脂暈染之物為「×」。 Use a micro optical microscope to observe the line/space = 175/ The insulating layer on the 175 μm comb-tooth pattern (50% residual copper ratio) was “○” in the case of a well-filled material, and the resin was smothered with a “x”.

<合成例1> <Synthesis Example 1>

合成具有聯二甲苯酚構造、雙酚乙醯苯構造及雙酚芴構造之環氧樹脂a1 Synthesis of epoxy resin a 1 with a bixylenol structure, a bisphenol acetonitrile structure and a bisphenol oxime structure

將聯二甲苯酚型環氧樹脂(三菱化學(股)製YX4000、環氧當量185)222g、雙酚乙醯苯(苯酚性羥基當量145)15g、雙甲酚芴(JFE化學(股)製,苯酚性羥基當量190)170g、環己酮150g放入反應容器內,攪拌溶解。其次滴入四甲基銨氯化物溶液0.5g,氮環境下以180℃反應5小時。結果反應後使用濾布過濾,再以溶劑稀釋得環氧樹脂a1222 g of a bixylenol type epoxy resin (YX4000 manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 185), 15 g of bisphenol acetonitrile (phenolic hydroxyl equivalent 145), and biscresol oxime (JFE Chemical Co., Ltd.) 170 g of phenolic hydroxyl equivalent 190) and 150 g of cyclohexanone were placed in a reaction vessel and stirred to dissolve. Next, 0.5 g of a tetramethylammonium chloride solution was added dropwise, and the mixture was reacted at 180 ° C for 5 hours under a nitrogen atmosphere. As a result, the reaction was filtered using a filter cloth, and then diluted with a solvent to obtain an epoxy resin a 1 .

‧環氧當量:2120 ‧Epoxy equivalent: 2120

‧固體成分40質量%之MEK與環己酮的1:1溶液 ‧Solid component 40% by mass of 1:1 solution of MEK and cyclohexanone

又,環氧樹脂a1係由具有下述3種構造之骨架所形成。 Further, the epoxy resin a 1 is formed of a skeleton having the following three structures.

<合成例2> <Synthesis Example 2>

合成具有聯二甲苯酚構造、雙酚乙醯苯構造及雙酚芴構造之環氧樹脂a2 Synthesis of epoxy resin a 2 having a bixylenol structure, a bisphenol acetonitrile structure and a bisphenol oxime structure

將聯二甲苯酚型環氧樹脂(三菱化學(股)製YX4000,環氧當量185)203g、雙酚乙醯苯(苯酚性羥基當量145)15g、雙甲酚芴(JFE芴(股)製,苯酚性羥基當量190)170g、環己酮150g放入反應容器中,攪拌溶解。其次滴入四甲基銨氯化物溶液0.5g,氮環境下以180℃反應5小時。結束反應後使用濾布過濾,再以溶劑稀釋得環氧樹脂a2203 g of a bixylenol type epoxy resin (YX4000 manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 185), 15 g of bisphenol acetonitrile (phenolic hydroxyl equivalent 145), and biscresol oxime (JFE 芴) 170 g of phenolic hydroxyl equivalent 190) and 150 g of cyclohexanone were placed in a reaction vessel and stirred to dissolve. Next, 0.5 g of a tetramethylammonium chloride solution was added dropwise, and the mixture was reacted at 180 ° C for 5 hours under a nitrogen atmosphere. After the reaction was completed, it was filtered using a filter cloth, and then diluted with a solvent to obtain an epoxy resin a 2 .

‧環氧當量:4120 ‧Epoxy equivalent: 4120

‧固體成分35質量%之MEK與環己酮的1:1溶液 ‧ Solid solution of 35% by mass of 1:1 solution of MEK and cyclohexanone

又,環氧樹脂a2係由具有下述3種構造之骨架所形成。 Further, the epoxy resin a 2 is formed of a skeleton having the following three structures.

<合成例3> <Synthesis Example 3>

合成具有聯苯構造、聯二甲苯酚構造、雙酚乙醯苯構造及雙酚芴構造之環氧樹脂a3 Synthesis of epoxy resin a 3 having a biphenyl structure, a bixylenol structure, a bisphenol acetonitrile structure and a bisphenol oxime structure

將聯苯型環氧樹脂與聯二甲苯酚型環氧樹脂之1:1混合物(三菱化學(股)製作YL6121H,環氧當量175)192g、雙酚乙醯苯(苯酚性羥基當量145)15g、雙酚芴(苯酚性羥基當量175)157g、環己酮150g放入反應容器內,攪拌溶解。其次滴入四甲基銨氯化物溶液0.5g,氮環境下以180℃反應5小時。結束反應後使用濾布過濾,再以溶劑稀釋得環氧樹脂a31:1 mixture of biphenyl type epoxy resin and dixylenol type epoxy resin (Mitsubishi Chemical Co., Ltd. YL6121H, epoxy equivalent 175) 192g, bisphenol acetophenone (phenolic hydroxyl equivalent 145) 15g 157 g of bisphenol hydrazine (phenolic hydroxyl equivalent 175) and 150 g of cyclohexanone were placed in a reaction vessel and stirred to dissolve. Next, 0.5 g of a tetramethylammonium chloride solution was added dropwise, and the mixture was reacted at 180 ° C for 5 hours under a nitrogen atmosphere. After the reaction was completed, it was filtered using a filter cloth, and then diluted with a solvent to obtain an epoxy resin a 3 .

‧環氧當量:3980 ‧Epoxy equivalent: 3980

‧固體成分35質量%之環己酮溶液 ‧ solid component 35 mass% cyclohexanone solution

又,環氧樹脂a3係由具有下述4種構造之骨架所形成。 Further, the epoxy resin a 3 is formed of a skeleton having the following four structures.

<實施例1> <Example 1>

攪拌下將雙酚型環氧樹脂(新日鐵化學(股)製「ZX1059」,雙酚A型與雙酚F型之1:1混合物,環氧當量169)10份、結晶性2官能環氧當量(三菱化學(股)製「YX4000HK」,環氧當量185)10份、二環戊二烯型環氧樹脂(DIC(股)製「HP-7200H」,環氧當量275)20份加熱溶解於溶劑油40份中。冷卻至室溫(25℃)後,混合環氧樹脂a1、12份、含有三嗪骨架之苯酚樹脂(硬化劑,DIC(股)製「LA-7054」羥基當量125之固體成分60%的MEK溶劑)12份、萘型硬化劑(新日鐵化學(股)製「SN-485」羥基當量215之固體成分60%的MEK溶液)15份、硬化促進劑(4-二甲基胺基吡啶(DMAP),固體成分2質量%之MEK溶液)3份、難燃劑(三光(股)製「HCA-HQ」,10-(2,5-二羥基苯基)-10-氫-9-噁-10-磷雜菲-10-氧化物,平均粒徑2μm)2份、 經苯基胺基矽烷系偶合劑(信越化學工業(股)製,「KBM573」)表面處理之球形二氧化矽(平均粒徑0.5μm,艾得曼製「SOC2」)225份後,以高速回轉混合機均勻分散,製作樹脂塗漆。其次將樹脂塗漆均勻塗佈於附離模處理之聚對苯二甲酸乙二醇酯薄膜(林提克(股)製「AL5」,厚38μm,及製作線熱膨脹係數(CTE)之測定用硬化物「PET501010」,厚50μm)的離模面上,使乾燥後之樹脂組成物層的厚度為30μm後,以80~120℃(平均100℃)乾燥4分鐘,製作接著薄膜。 Bisphenol type epoxy resin (ZX1059) made by Nippon Steel Chemical Co., Ltd., 1:1 mixture of bisphenol A type and bisphenol F type, epoxy equivalent 169) 10 parts, crystalline 2 functional ring Oxygen equivalent (Mitsubishi Chemical Co., Ltd. "YX4000HK", epoxy equivalent 185) 10 parts, dicyclopentadiene type epoxy resin ("HP-7200H" manufactured by DIC Co., Ltd., epoxy equivalent 275) 20 parts heating Dissolved in 40 parts of solvent oil. After cooling to room temperature (25 ° C), epoxy resin a 1 , 12 parts, and a phenol resin containing a triazine skeleton (hardening agent, DIC (manufactured by DIC), "LA-7054", hydroxyl equivalent of 125% solid content 60%) MEK solvent) 12 parts, naphthalene type hardener ("SK-485"SN-485" hydroxyl equivalent: 215 solid content 60% MEK solution) 15 parts, hardening accelerator (4-dimethylamino group) Pyridine (DMAP), 2% by mass of MEK solution of solid content) 3 parts, flame retardant (HCA-HQ, manufactured by Sanguang Co., Ltd., 10-(2,5-dihydroxyphenyl)-10-hydrogen-9 - Oxa-10-phosphaphenanthrene-10-oxide, average particle size 2 μm) 2 parts, phenylamino decane-based coupling agent ("SKM573" manufactured by Shin-Etsu Chemical Co., Ltd., "KBM573") 225 parts of 矽 (average particle diameter: 0.5 μm, "SOC 2" manufactured by Aideman) was uniformly dispersed in a high-speed rotary mixer to prepare a resin paint. Next, the resin paint was uniformly applied to a polyethylene terephthalate film (Lylon, manufactured by Lintik Co., Ltd.), which was 38 μm thick, and was used for the measurement of the coefficient of thermal expansion (CTE). On the release surface of the cured product "PET501010" (thickness: 50 μm), the thickness of the dried resin composition layer was 30 μm, and then dried at 80 to 120 ° C (average 100 ° C) for 4 minutes to prepare a film.

<實施例2> <Example 2>

攪拌下將液狀萘型環氧樹脂(環氧當量144,DIC(股)製「HP4032SS」)5份、結晶性2官能環氧樹脂(三菱化學(股)製「YX4000HK」,環氧當量185)5份、聯苯型環氧樹脂(日本化藥(股)製「NC3000L」,環氧當量269)12份加熱溶解於溶劑油30份中。冷卻至室溫(25℃)後,混合環氧樹脂a2 4份、雙酚A型氰酸酯樹脂(隆扎日本(股)製「BA230S75」,氰酸酯當量232,不揮發成分75質量%之MEK溶液)20份、苯酚酚醛清漆型多官能氰酸酯樹脂(隆扎日本(股)製「PT30S」,氰酸酯當量133,不揮發成分85質量%之MEK溶液)6份、硬化促進劑(4-二甲基胺基吡啶,固體成分2質量%之MEK溶液)1份、硬化促進劑(東京化成(股)製,鈷(III)乙醯丙酮酸鹽(Co(III)Ac),固體成分1質量%之 MEK溶液)3份、橡膠粒子(甘滋(股)製,斯塔非AC3816N)2份、難燃劑(三光(股)製「HCA-HQ」,10-(2,5-二羥基苯基)-10-氫-9-噁-10-磷雜菲-10-氧化物,平均粒徑2μm)2份、經苯基胺基矽烷系偶合劑(信越化學工業(股)製,「KBM573」)表面處理之球形二氧化矽(平均粒徑0.5μm,艾得曼製「SOC2」)100份後,以高速回轉混合機均勻分散,製作樹脂塗漆。其次與實施例1相同,製作接著薄膜。 5 parts of a liquid naphthalene type epoxy resin (epoxy equivalent 144, "HP4032SS" manufactured by DIC Co., Ltd.) and a crystalline bifunctional epoxy resin (YX4000HK, manufactured by Mitsubishi Chemical Corporation) with an epoxy equivalent of 185. 5 parts of biphenyl type epoxy resin ("NC3000L" manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 269) 12 parts were heated and dissolved in 30 parts of solvent oil. After cooling to room temperature (25 deg.] C), epoxy resin mixed with a 2 4 parts of bisphenol A type cyanate resin (Longzha Japan (shares) manufactured by "BA230S75" cyanate equivalent 232, non-volatile content 75 mass 20 parts of MEK solution) 20 parts, phenol novolac type polyfunctional cyanate resin ("3030" made by Lonza Japan Co., Ltd., glycerine ester equivalent 133, MEK solution of 85% by mass of nonvolatile matter) 6 parts, hardened Promoter (4-dimethylaminopyridine, MEK solution of solid content 2% by mass) 1 part, hardening accelerator (manufactured by Tokyo Chemical Industry Co., Ltd., cobalt (III) acetoacetate (Co(III)Ac) ), 3 parts by weight of MEK solution of solid content: 3 parts, 2 parts of rubber particles (manufactured by Ganzi Co., Ltd., Staf non-AC3816N), flame retardant (HCA-HQ, manufactured by Sanguang Co., Ltd., 10-( 2,5-Dihydroxyphenyl)-10-hydrogen-9-oxo-10-phosphaphenanthrene-10-oxide, average particle size 2 μm) 2 parts, phenylamino decane-based coupling agent (Shin-Etsu Chemical Industry) (KBM573), 100 parts of spherical cerium oxide (average particle diameter: 0.5 μm, "SOC 2" manufactured by Aideman), which was surface-treated, was uniformly dispersed by a high-speed rotary mixer to prepare a resin paint. Next, in the same manner as in Example 1, a film was formed.

<實施例3> <Example 3>

攪拌下將雙酚型環氧樹脂(新日鐵化學(股)製「ZX1059」,雙酚A型與雙酚F型之1:1混合物,環氧當量169)10份、二環戊二烯型環氧樹脂(DIC(股)製「HP-7200H」,環氧當量275)12份加熱溶解於溶劑油30份中。冷卻至室溫(25℃)後,混合環氧樹脂a3 15份、活性酯化合物(DIC(股)製「HPC8000-65T」,重量平均分子量約2700,活性基當量223之不揮發成分65質量%的甲苯溶液)35份、硬化促進劑(4-二甲基胺基吡啶,固體成分2質量%之MEK溶液)6份、難燃劑(三光(股)製「HCA-HQ」,10-(2,5-二羥基苯基)-10-氫-9-噁-10-磷雜菲-10-氧化物,平均粒徑2μm)2份、經苯基胺基矽烷系偶合劑(信越化學工業(股)製,「KBM573」)表面處理之球形二氧化矽(平均粒徑0.5μm,艾得曼(股)製「SOC2」)150份後,以高速回轉混合機均勻分散, 製作樹脂塗漆。其次與實施例1相同,製作接著薄膜。 Bisphenol type epoxy resin (ZX1059) made by Nippon Steel Chemical Co., Ltd., 1:1 mixture of bisphenol A type and bisphenol F type, epoxy equivalent 169) 10 parts, dicyclopentadiene A 12-part epoxy resin ("HP-7200H" manufactured by DIC Co., Ltd., epoxy equivalent 275) was dissolved in 30 parts of solvent oil by heating. After cooling to room temperature (25 ° C), an epoxy resin a 3 15 parts, an active ester compound ("HPC8000-65T" manufactured by DIC), a weight average molecular weight of about 2700, and a nonvolatile content of the active group equivalent of 223 were mixed. 35 parts of a toluene solution), a hardening accelerator (4-dimethylaminopyridine, a solid content of 2% by mass in a MEK solution), 6 parts, and a flame retardant ("Hica-HQ" manufactured by Sanko Co., Ltd., 10- (2,5-dihydroxyphenyl)-10-hydrogen-9-oxo-10-phosphaphenanthrene-10-oxide, average particle size 2 μm) 2 parts, phenylamino decane-based coupling agent (Shin-Etsu Chemical) Industrial Co., Ltd., "KBM573") 150 parts of spherical cerium oxide (average particle size: 0.5 μm, "SOC2" manufactured by Aideman Co., Ltd.)), and then uniformly dispersed in a high-speed rotary mixer to prepare a resin coating. paint. Next, in the same manner as in Example 1, a film was formed.

<比較例1> <Comparative Example 1>

除了將實施例1之環氧樹脂a1 12份變更為苯氧樹脂(三菱化學(股)製「YX6954BH30」,含有雙酚乙醯苯構造,固體成分30質量%之MEK與環己酮的1:1溶液,環氧當量13000)15份外,其他與實施例1完全相同製作接著薄膜。 In addition, the epoxy resin a 1 12 parts of the first embodiment was changed to a phenoxy resin (YX6954BH30 manufactured by Mitsubishi Chemical Corporation), and the bisphenol acetonitrile structure was contained, and the solid content of 30% by mass of MEK and cyclohexanone was 1 A film was prepared in the same manner as in Example 1 except that the solution was an epoxy equivalent of 13,000 (15 parts).

<比較例2> <Comparative Example 2>

除了將實施例2之環氧樹脂a2 4份變更為苯氧樹脂(三菱化學(股)製「YX6954BH30」,含有雙酚乙醯苯構造,固體成分30質量%之MEK與環己酮的1:1溶液,環氧當量13000)5份外,其他與實施例2完全相同製作接著薄膜。 In addition, the epoxy resin a 2 4 parts of the second embodiment was changed to a phenoxy resin (YX6954BH30 manufactured by Mitsubishi Chemical Corporation), and the bisphenol acetonitrile structure was contained, and the solid content of 30% by mass of MEK and cyclohexanone was 1 A film was prepared in the same manner as in Example 2 except that the solution was an epoxy equivalent of 13,000 (5 parts).

<比較例3> <Comparative Example 3>

除了將實施例3之環氧樹脂a3 15份變更為苯氧樹脂(三菱化學(股)製「YX6954BH30」,含有雙酚乙醯苯構造,固體成分30質量%之MEK與環己酮的1:1溶液,環氧當量13000)10份外,其他與實施例3完全相同製作接著薄膜。 In addition, 15 parts of the epoxy resin a 3 of Example 3 was changed to a phenoxy resin (YX6954BH30 manufactured by Mitsubishi Chemical Corporation), and a bisphenol acetonitrile structure was contained, and a solid component of 30% by mass of MEK and cyclohexanone was used. A film was prepared in the same manner as in Example 3 except that the solution was an epoxy equivalent of 13,000 (10 parts).

<比較例4> <Comparative Example 4>

除了將實施例1之環氧樹脂a1 12份變更為雙酚A型環氧樹脂(三菱化學(股)製「jER1009」,環氧當量2740,固體成分40質量%之MEK與環己酮的1:1溶液)12份外,其他與實施例1完全相同製作接著薄膜。 In addition, the epoxy resin a 1 12 parts of Example 1 was changed to a bisphenol A type epoxy resin ("JER1009" manufactured by Mitsubishi Chemical Corporation, an epoxy equivalent of 2740, a solid content of 40% by mass of MEK and cyclohexanone. The film was prepared in the same manner as in Example 1 except that the 1:1 solution was 12 parts.

<比較例5> <Comparative Example 5>

除了將實施例1之環氧樹脂a1的添加量由12份變更為50份外,其他與實施例1完全相同製作接著薄膜。 A film was formed in the same manner as in Example 1 except that the amount of the epoxy resin a 1 of Example 1 was changed from 12 parts to 50 parts.

結果如表1及表2所示。 The results are shown in Tables 1 and 2.

由表1及2之結果得知,使用本發明之硬化性樹脂組成物的實施例1~3為,具有良好的低粗糙度、充分之撕剝強度、較低之線熱膨脹係數及樹脂填埋性。另一方面比較例1~5因未使用本發明之硬化性樹脂組成物,故算術平均粗糙度、自乘平均平方根粗糙度較大,且撕剝強度較小、線熱膨脹係數較大。 From the results of Tables 1 and 2, Examples 1 to 3 using the curable resin composition of the present invention have good low roughness, sufficient tear strength, low coefficient of thermal expansion, and resin landfill. Sex. On the other hand, in Comparative Examples 1 to 5, since the curable resin composition of the present invention was not used, the arithmetic mean roughness and the self-centered average square root roughness were large, and the tear strength was small and the coefficient of linear thermal expansion was large.

Claims (16)

一種硬化性樹脂組成物,其特徵為含有(1)含有(1-A)具有由聯苯構造、聯二甲苯酚構造、雙酚乙醯苯(bisphenol acetophenone)構造及雙酚芴構造中所選出的2種以上之構造的環氧樹脂A,與(1-B)前述環氧樹脂A以外之環氧樹脂B的環氧樹脂混合物中,以前述環氧樹脂混合物為100質量%時之前述環氧樹脂A的含量為3~30質量%,前述環氧樹脂A之環氧當量為1500~4800的環氧樹脂混合物,(2)硬化劑,及(3)無機填充材料。 A curable resin composition characterized by containing (1) containing (1-A) having a structure selected from a biphenyl structure, a bixylenol structure, a bisphenol acetophenone structure, and a bisphenol fluorene structure. In the epoxy resin mixture of the two or more types of the epoxy resin A and the epoxy resin B other than the epoxy resin A (1-B), the ring is 100% by mass of the epoxy resin mixture. The content of the oxygen resin A is 3 to 30% by mass, the epoxy resin equivalent of the epoxy resin A is an epoxy resin mixture of 1,500 to 4,800, (2) a curing agent, and (3) an inorganic filler. 如請求項1之硬化性樹脂組成物,其中以前述硬化性樹脂組成物中之不揮發成分為100質量%時的前述環氧樹脂A之含量為0.5~10質量%。 The curable resin composition of claim 1, wherein the content of the epoxy resin A in the case where the nonvolatile content in the curable resin composition is 100% by mass is 0.5 to 10% by mass. 如請求項1或2之硬化性樹脂組成物,其中前述(1-B)環氧樹脂B為,由雙酚型環氧樹脂、結晶性2官能環氧樹脂、二環戊二烯型環氧樹脂、萘型環氧樹脂及該等環氧樹脂之混合物所成群中所選出。 The hardenable resin composition of claim 1 or 2, wherein the (1-B) epoxy resin B is a bisphenol type epoxy resin, a crystalline bifunctional epoxy resin, or a dicyclopentadiene type epoxy resin. A resin, a naphthalene type epoxy resin, and a mixture of such epoxy resins are selected in the group. 如請求項1或2之硬化性樹脂組成物,其中前述(1)環氧樹脂混合物之環氧當量為50~3000。 The curable resin composition according to claim 1 or 2, wherein the epoxy resin equivalent of the above (1) epoxy resin mixture is from 50 to 3,000. 如請求項1或2之硬化性樹脂組成物,其中前述(2)硬化劑為,由苯酚樹脂、氰酸酯樹脂及活性酯樹脂中所選出之1種以上。 The curable resin composition according to claim 1 or 2, wherein the curing agent (2) is one or more selected from the group consisting of a phenol resin, a cyanate resin, and an active ester resin. 如請求項1或2之硬化性樹脂組成物,其中前述 (3)無機填充材料之平均粒徑為0.01~5μm。 The curable resin composition of claim 1 or 2, wherein the aforementioned (3) The inorganic filler has an average particle diameter of 0.01 to 5 μm. 如請求項1或2之硬化性樹脂組成物,其中前述(3)無機填充材料係經表面處理劑表面處理。 The curable resin composition of claim 1 or 2, wherein the aforementioned (3) inorganic filler is surface-treated with a surface treatment agent. 如請求項1或2之硬化性樹脂組成物,其中前述(3)無機填充材料為二氧化矽。 The curable resin composition of claim 1 or 2, wherein the (3) inorganic filler is cerium oxide. 如請求項1或2之硬化性樹脂組成物,其中以前述硬化性樹脂組成物中之不揮發成分為100質量%時,前述(2)硬化劑之含量為1~30質量%,且前述(3)無機填充材料之含量為30~90質量%。 The curable resin composition of claim 1 or 2, wherein the content of the hardener (2) is from 1 to 30% by mass, and the amount of the hardening agent in the curable resin composition is 100% by mass. 3) The content of the inorganic filler is 30 to 90% by mass. 一種多層印刷配線板之絕緣層用硬化性樹脂組成物,其特徵為含有如請求項1或2之硬化性樹脂組成物。 A curable resin composition for an insulating layer of a multilayer printed wiring board, which comprises the curable resin composition according to claim 1 or 2. 一種多層印刷配線板之增層用硬化性樹脂組成物,其特徵為含有如請求項1或2之硬化性樹脂組成物。 A curable resin composition for a build-up layer of a multilayer printed wiring board, which comprises the curable resin composition according to claim 1 or 2. 一種薄片狀層合材料,其特徵為含有如請求項1或2之硬化性樹脂組成物。 A sheet-like laminate comprising a curable resin composition as claimed in claim 1 or 2. 如請求項12之薄片狀層合材料,其中厚度為5~30μm。 The lamella laminate of claim 12, wherein the thickness is 5 to 30 μm. 一種多層印刷配線板,其特徵為含有將如請求項1或2之硬化性樹脂組成物熱硬化所得的絕緣層。 A multilayer printed wiring board characterized by comprising an insulating layer obtained by thermally hardening a curable resin composition as claimed in claim 1 or 2. 一種多層印刷配線板,其特徵為含有將如請求項12之薄片狀層合材料熱硬化所得的絕緣層。 A multilayer printed wiring board characterized by comprising an insulating layer obtained by thermally hardening a sheet-like laminate of claim 12. 一種半導體裝置,其特徵為含有如請求項15之多層印刷配線板。 A semiconductor device characterized by comprising the multilayer printed wiring board of claim 15.
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