TW201409745A - LED with high light extraction efficiency - Google Patents
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本發明是有關於一種LED,特別是指一種具有高光取出率的LED。 The present invention relates to an LED, and more particularly to an LED having a high light extraction rate.
LED由於具有省電、輕薄、環保並兼具節約能源與減低溫室氣體排放之效,因此被認為是次世代最省電的照明技術,而被廣泛的使用在日常生活中。一般而言,LED的光電效率是以內部量子效率與光取出率的乘積表示;而光取出率則為該LED所產生的光子與成功離開LED內部的光子量的比值。而以目前常用於LED的氮化鎵(GaN)系半導體發光材料為例,由於氮化鎵與空氣之間的折射率差異較大(空氣的折射率(n)為1,GaN的折射率(n)約為2.5),因此由該氮化鎵產生的光在接觸該氮化鎵與空氣的介面時,大部分會因為全反射而無法向外發出,使得該LED實際的光取出率只有4%,而嚴重影響該LED的光電效率。 LED is considered to be the most energy-efficient lighting technology of the next generation because it is energy-saving, light and environmentally friendly, and has the effect of saving energy and reducing greenhouse gas emissions. It is widely used in daily life. In general, the photoelectric efficiency of an LED is expressed as the product of the internal quantum efficiency and the light extraction rate; and the light extraction rate is the ratio of the photons produced by the LED to the amount of photons that have successfully left the LED. Taking a gallium nitride (GaN)-based semiconductor luminescent material currently used for LEDs as an example, since the refractive index difference between gallium nitride and air is large (the refractive index (n) of air is 1, the refractive index of GaN ( n) is about 2.5), so when the light generated by the gallium nitride is in contact with the interface between the gallium nitride and the air, most of the light cannot be emitted due to total reflection, so that the actual light extraction rate of the LED is only 4 %, which seriously affects the photoelectric efficiency of the LED.
參閱圖1,目前常用來提升LED光取出率的方法,大都是以蝕刻方式在該LED的磊晶基材表面形成規則或不規則形狀的粗化結構,圖1中是顯示具有規則柱狀的粗化結構12的磊晶基材11,但是因為該些柱狀粗化結構12為規則排列且其頂面為平坦的表面,因此對光取出效率的提升有限,且會令光形成規則的反射路徑而造成出射光的出光強度有不均勻的問題產生。 Referring to FIG. 1 , the current methods for improving the LED light extraction rate are mostly formed by etching a rough or regular shape on the surface of the epitaxial substrate of the LED. FIG. 1 shows a regular columnar shape. The epitaxial substrate 11 of the structure 12 is roughened, but since the columnar roughened structures 12 are regularly arranged and the top surface thereof is a flat surface, the improvement in light extraction efficiency is limited, and the light is formed into a regular reflection. The path causes a problem that the intensity of the emitted light is uneven.
參閱圖2,為了更進一步提升光取出率,美國第 US8013354號專利揭示一種具有多層次微結構圖案14的磊晶基材13,藉由該多層次微結構圖案14讓接觸到該多層次微結構圖案14的光產生不同的反射角度,減少出射光在半導體材料與空氣的介面間的全反射作用,以提升光取出率。然而,利用該多層次微結構圖案14雖然可以增加光取出率,但卻由於其圖案複雜,因此所花費的製程時間及成本相對也會提升。 Referring to Figure 2, in order to further enhance the light extraction rate, the United States US Patent No. 8,013,354 discloses an epitaxial substrate 13 having a multi-level microstructure pattern 14 by which light that contacts the multi-level microstructure pattern 14 produces different angles of reflection, reducing the exiting light. Total reflection between the interface between the semiconductor material and the air to increase the light extraction rate. However, although the multi-level microstructure pattern 14 can be used to increase the light extraction rate, the processing time and cost are relatively increased due to the complicated pattern.
因此,本發明之目的,即在提供一種利用磊晶基材的微結構設計,以提升光取出效能的高光取出率LED。 Accordingly, it is an object of the present invention to provide a high light extraction rate LED that utilizes a microstructure design of an epitaxial substrate to enhance light extraction efficiency.
於是,本發明一種高光取出率LED,包含一個磊晶基材、一個半導體單元,及一個電極單元。 Thus, the present invention has a high light extraction rate LED comprising an epitaxial substrate, a semiconductor unit, and an electrode unit.
該磊晶基材具有一個基板,及多個自該基板表面向上形成的錐狀微結構,該每一個錐狀微結構具有一個底面,及一個與該底面垂直並朝向該錐狀微結構的頂點延伸的高度,分別定義該底面的寬度為D,該高度為H,任相鄰兩個錐狀微結構的中心距離為P,該D、H及P分別滿足P≧400nm,0.4≦D/P≦1.0,且0.4≦H/D≦1.4。 The epitaxial substrate has a substrate and a plurality of tapered microstructures formed upward from the surface of the substrate, each tapered microstructure having a bottom surface and a vertex perpendicular to the bottom surface and facing the tapered microstructure The height of the extension defines the width of the bottom surface as D, and the height is H. The center distance of any two adjacent pyramidal microstructures is P, and the D, H, and P respectively satisfy P≧400 nm, 0.4≦D/P≦1.0. And 0.4≦H/D≦1.4.
該半導體單元設置在該磊晶基材具有該些錐狀微結構的表面,可在接收電能時以光電效應發光。 The semiconductor unit is disposed on a surface of the epitaxial substrate having the tapered microstructures to emit light by photoelectric effect when receiving electrical energy.
該電極單元可用以提供電能至該半導體單元。 The electrode unit can be used to provide electrical energy to the semiconductor unit.
有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一個較佳實施例的詳細說明中,將可 清楚的呈現。 The foregoing and other technical contents, features, and advantages of the present invention will be described in the following detailed description of a preferred embodiment with reference to the drawings. Clear presentation.
參閱圖3、4,本發明一種高光取出率LED包含一個磊晶基材2、一個半導體單元3,及一個電極單元4。 Referring to Figures 3 and 4, a high light extraction rate LED of the present invention comprises an epitaxial substrate 2, a semiconductor unit 3, and an electrode unit 4.
該磊晶基材2具有一個基材21,及多個由該基材21表面22向上凸起的錐狀微結構23。 The epitaxial substrate 2 has a substrate 21 and a plurality of tapered microstructures 23 projecting upward from the surface 22 of the substrate 21.
該基材21可選自氧化鋁、碳化矽、矽,或氮化鋁等材料構成。 The substrate 21 may be selected from materials such as alumina, tantalum carbide, niobium, or aluminum nitride.
該每一個錐狀微結構23具有一底面,及一與該底面垂直並朝向該錐狀微結構23的頂點延伸的高度,分別定義該底面231的寬度為D,該高度為H,任相鄰兩微結構的中心點的距離為P,且該D、H及P分別滿足P≧400nm、0.4≦D/P≦1.0,且0.4≦H/D≦1.4。 Each of the tapered microstructures 23 has a bottom surface and a height perpendicular to the bottom surface and extending toward an apex of the tapered microstructures 23, respectively defining a width D of the bottom surface 231, the height being H, and adjacent two micros The distance from the center point of the structure is P, and the D, H, and P satisfy P≧400 nm, 0.4≦D/P≦1.0, and 0.4≦H/D≦1.4, respectively.
要說明的是,本發明藉由該些錐狀微結構23提升光的反射效果,但是當該些錐狀微結構23的高/寬比不在預定範圍或是密度(D/P)太高時,該些錐狀微結構23的反射效果不佳且自該些錐狀微結構23其中一邊反射後的光也容易被緊鄰的錐狀微結構23阻擋而進入基材21中,反而會降低光的反射效果;因此,較佳地,0.4≦D/P≦0.8、0.4≦H/D≦1.0;更佳地,0.4≦D/P≦0.6、0.6≦H/D≦1.0。 It is to be noted that the present invention enhances the reflection effect of light by the tapered microstructures 23, but when the height/width ratio of the tapered microstructures 23 is not within a predetermined range or the density (D/P) is too high The reflective effects of the tapered microstructures 23 are poor, and the light reflected from one side of the tapered microstructures 23 is also easily blocked by the immediately adjacent tapered microstructures 23 and enters the substrate 21, which in turn reduces the light. The reflection effect; therefore, preferably, 0.4 ≦ D / P ≦ 0.8, 0.4 ≦ H / D ≦ 1.0; more preferably, 0.4 ≦ D / P ≦ 0.6, 0.6 ≦ H / D ≦ 1.0.
本發明該些錐狀微結構23為具有奈米尺寸的微結構,茲將其製作方法說明如下。 The tapered microstructures 23 of the present invention are microstructures having a nanometer size, and the fabrication method thereof will be described below.
首先在一矽基板上形成多個具有間距及預定高/寬比的奈米孔隙,接著在該些奈米孔隙中填入聚矽烷氧樹脂(PDMS),待該聚矽烷氧樹脂硬化後將其自該矽基板拔除, 即可得到由該聚矽烷氧樹脂製得的母模,接著於該母模的孔隙中填入壓克力樹脂,再將該具有壓克力樹脂的母模反向轉印於一表面具有蝕刻阻擋層的藍寶石基板,而於該蝕刻阻擋層的表面形成一由該些壓克力樹脂所構成的微結構圖案,接著以該微結構圖案為蝕刻遮罩,對該蝕刻阻擋層進行蝕刻,令該蝕刻阻擋層形成具有與該微結構圖案相對應之圖案後,再將該殘留的微結構圖案移除,最後再以該圖案化後的蝕刻阻擋層為蝕刻遮罩對該藍寶石基板進行蝕刻,即可得到該具有錐狀微結構23的磊晶基材2。 First, a plurality of nanopores having a pitch and a predetermined height/width ratio are formed on a substrate, and then the nanopores are filled with polydecane oxyresin (PDMS), and after the polyalkylene oxide resin is hardened, Removed from the substrate, A master mold made of the polydecane oxide resin is obtained, and then an acrylic resin is filled in the pores of the master mold, and the master mold having the acrylic resin is reversely transferred to a surface to be etched. a sapphire substrate of the barrier layer, and a microstructure pattern formed by the acryl resin on the surface of the etch barrier layer, and then etching the etch barrier layer by using the microstructure pattern as an etch mask After the etch barrier layer has a pattern corresponding to the microstructure pattern, the residual microstructure pattern is removed, and finally the etched barrier layer is etched by using the patterned etch barrier layer as an etch mask. The epitaxial substrate 2 having the tapered microstructures 23 is obtained.
要說明的是,由於該些錐狀微結構23是對應該母模的圖案形成,因此當該些錐狀微結構23的H/D值大於1.0時,表示在該矽基板上形成的該些奈米孔隙的高/寬比需較大,而高/寬比愈大該PDMS就愈不容易完整的自該些奈米孔隙中拔除,因此會增加製程的難度並降低良率。因此,較佳地,該些錐狀微結構23的H/D值不大於1.0。 It is to be noted that, since the tapered microstructures 23 are patterned corresponding to the master mold, when the H/D values of the tapered microstructures 23 are greater than 1.0, the numbers formed on the substrate are indicated. The height/width ratio of the nanopores needs to be large, and the higher the height/width ratio, the less likely the PDMS is to be completely removed from the nanopores, thereby increasing the difficulty of the process and reducing the yield. Therefore, preferably, the tapered microstructures 23 have an H/D value of not more than 1.0.
該半導體單元3設置在該基材21的表面22,可在接收電能時以光電效應發光。具有一層形成於該些錐狀微結構23的表面及該表面22的第一型半導體層31、一層形成於該第一型半導體層31的部分表面的半導體發光層32,及一層形成於該半導體發光層32表面,且電性與該第一型半導體層31相反的第二型半導體層33,由於該半導體單元3的材料選擇為本技術領域所周知,且非為本發明之重點,因此不再多加說明。 The semiconductor unit 3 is disposed on the surface 22 of the substrate 21 to emit light with a photoelectric effect upon receiving electrical energy. a semiconductor layer 31 having a surface formed on the surface of the tapered microstructures 23 and the surface 22, a semiconductor light-emitting layer 32 formed on a portion of the surface of the first semiconductor layer 31, and a layer formed on the semiconductor The second type semiconductor layer 33 having the surface of the light emitting layer 32 and electrically opposite to the first type semiconductor layer 31 is not known to the present invention because the material selection of the semiconductor unit 3 is well known in the art, and therefore is not More explanations.
該電極單元4可配合提供電能至該半導體單元3,由於 該電極單元4的設置位置可視該LED的結構加以變化,而該變化為本技術領域人員所周知,因此不再多加贅述,本實施例中該電極單元4是以具有一形成於該第一型半導體層31表面的底電極41,及一形成於該第二型半導體層33表面的頂電極42為例作說明。 The electrode unit 4 can cooperate to provide electrical energy to the semiconductor unit 3 due to The position of the electrode unit 4 can be changed according to the structure of the LED, and the change is well known to those skilled in the art, so the description will not be repeated. In this embodiment, the electrode unit 4 has one formed in the first type. A bottom electrode 41 on the surface of the semiconductor layer 31 and a top electrode 42 formed on the surface of the second type semiconductor layer 33 are exemplified.
當外界經由該底、頂電極41、42提供電能至該半導體單元3,該半導體單元3便會以光電效應向外發光,而從該半導體單元3發出的光在接觸該第二型半導體層33與外界(空氣)的界面時,部分的光會經由折射向外發出;而另一部分的光則會經由全反射而朝向該磊晶基材2的方向行進。當朝向該磊晶基材2方向行進的光在接觸到該些錐狀微結構23時,會因為該些錐狀微結構23造成入射角的變化,令光在接觸該些錐狀微結構23後產生不同行進方向的反射光,而降低光於接觸該第二型半導體層33與空氣的界面時全反射的機會,達到提升LED光取出率的目的;此外,再搭配該些錐狀微結構23的間距設計則可令反射後的光線進行多次的反射及折射而得到更多不同行進方向的反射光,不僅可進一步提升LED光取出率,且可提升出光均勻性。 When external power is supplied to the semiconductor unit 3 via the bottom and top electrodes 41, 42, the semiconductor unit 3 emits light outward by a photoelectric effect, and light emitted from the semiconductor unit 3 contacts the second type semiconductor layer 33. When it is at the interface with the outside (air), part of the light is emitted outward through the refraction; and the other part of the light travels toward the epitaxial substrate 2 via total reflection. When the light traveling toward the epitaxial substrate 2 is in contact with the tapered microstructures 23, the incident angles are changed due to the tapered microstructures 23, so that the light contacts the tapered microstructures. After the reflected light of different traveling directions is generated, the chance of total reflection when contacting the interface between the second type semiconductor layer 33 and the air is reduced, thereby achieving the purpose of improving the light extraction rate of the LED; in addition, the tapered microstructures are matched The spacing design of 23 allows the reflected light to be reflected and refracted multiple times to obtain more reflected light in different directions of travel, which not only further improves the LED light extraction rate, but also improves the light uniformity.
參閱圖5,圖5是將該些錐狀微結構的D/P值固定在0.6,量測不同的錐狀微結構的距離P,在不同的高/寬比(H/D)的條件下的光取出率提升值(γ),其中,該光取出率提升值是將該較佳實施例的光取出率值除以習知平面型基板的光取出率值。 Referring to FIG. 5, FIG. 5 is that the D/P values of the tapered microstructures are fixed at 0.6, and the distance P of different tapered microstructures is measured under different height/width ratio (H/D) conditions. The light extraction rate increase value (γ), wherein the light extraction rate increase value is the light extraction rate value of the preferred embodiment divided by the light extraction rate value of the conventional planar substrate.
由圖5可知,當該些錐狀微結構23的P值≦400nm時 ,由於該些錐狀微結構23的尺寸太小,因此對提升該LED光取出率的貢獻較小;而當P值>400nm時,顯示該些錐狀微結構23的尺寸已足以對光的反射造成影響,且其影響與該些錐狀微結構23的傾角α有關,當傾角α增加(表示H/D值亦隨之增加)時,該些錐狀微結構23可以增加光線逃脫該LED的光而可提升光取出率;然而,當傾角α續增,光線在接觸至該些錐狀微結構23時經由反射進入該基材21的量反而比向外發出的光還多,因此,光取出效果反而會變差;較佳地,0.4≦H/D≦1.4;更佳地,0.4≦H/D≦1.0,又更佳地,0.6≦H/D≦1.0。而由圖5中可看出在P>400nm,H/D值為0.4時即具有光取出率提升效果,而在P=1120nm,H/D=1時可得到最佳的光取出率提升效果。 As can be seen from FIG. 5, when the P value of the tapered microstructures 23 is ≦400 nm, since the sizes of the tapered microstructures 23 are too small, the contribution to the light extraction rate of the LED is small; and when the P value is When the thickness is >400 nm, the size of the tapered microstructures 23 is sufficient to affect the reflection of light, and the influence thereof is related to the inclination angle α of the tapered microstructures 23, when the inclination angle α is increased (indicating that the H/D value is also When added, the tapered microstructures 23 can increase the light to escape the light of the LED and increase the light extraction rate; however, when the tilt angle α continues to increase, the light passes through the reflection when contacting the tapered microstructures 23. The amount of entering the substrate 21 is more than that of the outwardly emitted light, and therefore, the light extraction effect is rather deteriorated; preferably, 0.4 ≦H/D ≦ 1.4; more preferably, 0.4 ≦ H/D ≦ 1.0 And, more preferably, 0.6≦H/D≦1.0. It can be seen from Fig. 5 that when P>400nm, the H/D value is 0.4, the light extraction rate is improved, and at P=1120nm, the best light extraction rate is improved when H/D=1. .
參閱圖6,接著將H/D值固定為1.0,量測不同錐狀微結構23的距離P,在不同D/P條件下的光取出率提升結果,其中該光取出率提升值(γ)同前述所定義。 Referring to FIG. 6, the H/D value is fixed to 1.0, and the distance P of the different tapered microstructures 23 is measured, and the light extraction rate is improved under different D/P conditions, wherein the light extraction rate is increased (γ). As defined above.
由圖6可知,當P<640nm時,須要有較大的D/P值,才有較佳的光取出提升效果;而當P≧640nm時在較小的D/P值(約0.4),即可達到光取出提升效果;因此,較佳地,P≧640nm,0.4≦D/P≦0.8;更佳地,640nm≦P≦1120nm 0.4≦D/P≦0.6。 It can be seen from Fig. 6 that when P < 640 nm, a larger D/P value is required to have a better light extraction lifting effect; and when P ≧ 640 nm, a smaller D/P value (about 0.4), The light extraction lifting effect can be attained; therefore, preferably, P ≧ 640 nm, 0.4 ≦ D / P ≦ 0.8; more preferably, 640 nm ≦ P ≦ 1120 nm 0.4 ≦ D / P ≦ 0.6.
由前述結果顯示,LED光取出率的提升不只是跟該些錐狀微結構23的尺寸比例(H/D)有關,而是要同時讓該些錐狀微結構23的間距P及密度(D/P)相互配合方可得到最佳的效果。 From the foregoing results, it is shown that the increase in the LED light extraction rate is not only related to the size ratio (H/D) of the tapered microstructures 23, but the pitch P and the density of the tapered microstructures 23 at the same time (D). /P) Work together to get the best results.
參閱圖7~圖9,圖7及圖8分別是習知具有平面型基板製得的LED及具有如圖1所示之粗化結構12的磊晶基材11所製得的LED的出光強度模擬結果,圖9則是本發明該較佳實施例的高光取出率LED。 Referring to FIG. 7 to FIG. 9 , FIG. 7 and FIG. 8 respectively show the light-emitting intensity of an LED obtained by using a planar substrate and an epitaxial substrate 11 having a roughened structure 12 as shown in FIG. 1 . As a result of the simulation, Fig. 9 is a high light extraction rate LED of the preferred embodiment of the present invention.
由圖7~圖9的結果可知,具有平面型磊晶基材的LED由於光的全反射嚴重,出光效率不佳,所以光強度最弱;而具有規則柱狀的粗化結構12的LED雖然可降低光的全反射問題,但是對光取出效率的提升有限,且會有出光強度不均勻的問題;反觀本發明之錐狀微結構23則因為可令反射後的光線進行多次的反射及折射得到更多不同行進方向的反射光,因此可同時兼具提升LED光取出率及出光均勻性的優點。 As can be seen from the results of FIGS. 7 to 9, the LED having the planar epitaxial substrate has a light-intensity due to severe total light reflection, and the light intensity is the weakest; and the LED having the regular columnar roughened structure 12 is The problem of total reflection of light can be reduced, but the improvement of light extraction efficiency is limited, and there is a problem of uneven light intensity; in contrast, the tapered microstructure 23 of the present invention can reflect the reflected light multiple times and Refraction gives more reflected light in different directions of travel, so it can simultaneously improve the LED light extraction rate and uniformity of light output.
綜上所述,本發明藉由該磊晶基材的該些錐狀微結構23的尺寸、間距的調控,令任相鄰兩微結構的中心點的距離為P,及該每一個錐狀微結構23的D、H,分別滿足P≧400nm、0.4≦D/P≦1.0且0.4≦H/D≦1.4的條件下,令接觸到該些錐狀微結構23的光因為該些錐狀微結構23造成入射角的變化,而產生不同行進方向的反射光;而該些錐狀微結構23的間距控制則可令反射後的光線進行多次的反射及折射而得到更多不同行進方向的反射光,如此,即可降低光於接觸該第二型半導體層33與空氣的界面時全反射的機會,而達到提升LED光取出率的目,故確實能達成本發明之目的。 In summary, the present invention adjusts the size and spacing of the tapered microstructures 23 of the epitaxial substrate so that the distance between the center points of any two adjacent microstructures is P, and each of the tapered microstructures The D and H of 23 satisfy the conditions of P≧400nm, 0.4≦D/P≦1.0, and 0.4≦H/D≦1.4, respectively, so that the light contacting the tapered microstructures 23 is caused by the tapered microstructures. 23 causes a change in the incident angle to generate reflected light in different directions of travel; and the pitch control of the tapered microstructures 23 allows the reflected light to be reflected and refracted multiple times to obtain more reflections in different directions of travel. Light, in this way, can reduce the chance of total reflection when contacting the interface between the second type semiconductor layer 33 and the air, and achieve the purpose of improving the light extraction rate of the LED, so that the object of the present invention can be achieved.
惟以上所述者,僅為本發明之較佳實施例而已,當不 能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above is only the preferred embodiment of the present invention, when not The scope of the invention is to be construed as being limited by the scope of the invention and the scope of the invention.
2‧‧‧磊晶基材 2‧‧‧ epitaxial substrate
21‧‧‧基板 21‧‧‧Substrate
22‧‧‧表面 22‧‧‧ Surface
23‧‧‧錐狀微結構 23‧‧‧Cone microstructure
3‧‧‧半導體單元 3‧‧‧Semiconductor unit
31‧‧‧第一型半導體層 31‧‧‧First type semiconductor layer
32‧‧‧半導體發光層 32‧‧‧Semiconductor light-emitting layer
33‧‧‧第一型半導體層 33‧‧‧First type semiconductor layer
4‧‧‧電極單元 4‧‧‧Electrode unit
41‧‧‧底電極 41‧‧‧ bottom electrode
42‧‧‧頂電極 42‧‧‧ top electrode
H‧‧‧高度 H‧‧‧ Height
D‧‧‧寬度 D‧‧‧Width
P‧‧‧距離 P‧‧‧ distance
α‧‧‧傾角 ‧‧‧‧ inclination
圖1是一示意圖,說明習知具有具有規則柱狀的粗化結構的磊晶基材;圖2是一示意圖,說明習知具有多層次微結構圖案的磊晶基材;圖3是一示意圖,說明本發明高光取出率LED的該較佳實施例;圖4是一示意圖,輔助說明該較佳實施例的磊晶基材;圖5是該些錐狀微結構的D/P值固定在0.6,在不同的高/寬比(H/D)的條件下的LEE結果;圖6是該些錐狀微結構的H/D值固定在1.0,在不同的D/P條件下的LEE結果;圖7是習知具有平面型磊晶基材的LED的出光強度模擬結果;圖8是習知具有粗化結構的磊晶基材所製得的LED的出光強度模擬結果;及圖9是本發明該較佳實施例的LED的出光強度模擬結果。 1 is a schematic view showing an epitaxial substrate having a regular columnar roughened structure; FIG. 2 is a schematic view showing a conventional epitaxial substrate having a multi-layer microstructure pattern; FIG. 3 is a schematic view The preferred embodiment of the high light extraction rate LED of the present invention is illustrated; FIG. 4 is a schematic view for explaining the epitaxial substrate of the preferred embodiment; FIG. 5 is that the D/P values of the tapered microstructures are fixed at 0.6, LEE results at different height/width ratios (H/D); Figure 6 shows the LEE results for the tapered microstructures with H/D values fixed at 1.0 and under different D/P conditions FIG. 7 is a simulation result of light-emitting intensity of an LED having a planar epitaxial substrate; FIG. 8 is a simulation result of light-emitting intensity of an LED obtained by using an epitaxial substrate having a roughened structure; and FIG. The simulation results of the light output intensity of the LED of the preferred embodiment of the present invention.
21‧‧‧基板 21‧‧‧Substrate
22‧‧‧表面 22‧‧‧ Surface
23‧‧‧錐狀微結構 23‧‧‧Cone microstructure
H‧‧‧高度 H‧‧‧ Height
D‧‧‧寬度 D‧‧‧Width
P‧‧‧距離 P‧‧‧ distance
α‧‧‧傾角 ‧‧‧‧ inclination
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