201233613 六、發明說明： 關聯申請案 本申請案是主張2010年10月26日申請之日本特願2010 -23 94 53的優先權者，藉由參照其全體來作爲本案的一部 分引用。 【發明所屬之技術領域】 本發明是有關適用於工作機械的裝載機（Loader)或 產業機械、物流機械的物品的搬運之搬運系統，特別是有 關在行走路徑包含曲線部的搬運系統。 【先前技術】 線性馬達（Linear Motor )是在成爲物流裝置的搬運 台車或工作機械的裝載機之搬運裝置等中，被廣泛使用於 其行走驅動等（例如專利文獻1 )。線性馬達是有：線性 感應馬達（LIΜ )、線性同步馬達（L S Μ )、及線性直流 馬達等’但主要作爲長距離的行走系統使用的是線性感應 馬達。線性同步馬達是在地上側配置磁石來移動線圈側的 方式佔了大部分。另外’在線性同步馬達中，有部分地在 • 地上側離散配置1次線圈的例子（例如專利文獻2 )，但線 •性同步馬達爲曲線部之輔助性的使用，主要使用於直線驅 動用系統。當行走路徑爲曲線部時’線性感應馬達會被使 用。 -5- 201233613 先行技術文獻 專利文獻 專利文獻1 :特開昭63 - 1 1 488 7號公報 專利文獻2:特開2007-82307號公報 【發明內容】 (發明所欲解決的課題） 線性感應馬達因爲推力低，所以難以取得充分的行走 性能。以往的線性同步馬達是在地上側配置磁石來移動線 圈側的方式佔了大部分。但，爲了使線圈側移動，需要對 轉子給電，由於配線至轉子的關係，在無端路徑的行走是 不可能的，所以行走路徑受限，或給電系統複雜化。 作爲解除如此的課題之同步型線性馬達，可考慮離散 配置的線性同步馬達，其係於轉子的移動方向取間隔配列 由可作爲分別獨立的1台線性馬達的一次側的電樞之機能 的電樞所構成的複數的個別馬達。但，就此離散配置的線 性同步馬達而言，轉子會轉乘移動於取間隔而配置的各個 別馬達。因此’會使對轉子產生頓轉力（cogging force ) 、拉入力’難以使轉子安定移動，或提高轉子的定位精度 。具體而言，會有以下那樣的問題》 •若將個別馬達予以固定起來，則轉子會在拉入力的 反作用下被拉入。 力 的 生 產 所 係 置 位 的 子 轉 與 達。 馬擾 別干 個爲 由成 藉樣 是同 力力ί頓 • 與 -6- 201233613 •若未完全對向於轉子的馬達有2台，則作用於轉子的 拉入力是成爲各拉入力的差。 上述頓轉力是意指作用於與和個別馬達完全對向的轉 子之間的磁氣吸引力的變化所產生的力。另外，所謂和上 述個別馬達完全對向的轉子是意指轉子完全對向於個別馬 達時或個別馬達完全對向於轉子時之轉子與個別馬達的相 對的配置關係。上述拉入力是意指轉子未完全對向於個別 馬達時，轉子增加對向面積而拉入個別馬達的力。此拉入 力比起頓轉力相當大（亦有形成數10倍的情況）。 本發明的目的是在於提供一種一面採用在線圈使用量 的削減或給電形式上成爲有利的個別馬達的離散配置形式 的線性馬達作爲驅動源，一面縮小作用於轉子的拉入力， 可抑制行走體的推力的偏差之搬運系統。 (用以解決課題的手段） 本發明的搬運系統，係沿著行走引導裝置來行走自如 地設置用以搬運物品的行走體之搬運系統，其特徵爲： 將上述行走體予以行走驅動的驅動源爲線性馬達，此 線性馬達係以分別獨立的複數的一次側的電樞及二次側的 轉子所構成，該複數的一次側的電樞係沿著行走引導裝置 而配列，該二次側的轉子係設置於上述行走體，且設置強 磁性體，其係於相鄰的電樞間連續被配置而成爲上述電樞 的磁通所通過的路徑。 若根據此構成，則由於使用所謂的同步型的線性馬達 201233613 ，因此相較於感應形的線性馬達’容易取得大的推力，行 走體的行走性能會提升。雖爲同步型的線性馬達’但由於 在固定側配置一次側的電樞，在行走體設置二次側的轉子 ，因此不需要對行走體供給行走驅動用的電流’在行走驅 動用的給電的情況上不會有行走路徑被限制的情形，可形 成複雜的行走路徑’例如環狀地配置行走路徑’或具有彎 曲部分的路徑等。因此，可形成泛用性高的搬運系統。 並且，設置強磁性體，其係於相鄰的電樞間連續被配 置而成爲上述個別馬達的磁通所通過的路徑，且以電樞與 轉子的對向面積能夠形成一定或對向面積的變化小的方式 配置，藉此轉子轉乘於電樞間時的拉入力會變小，可抑制 行走體的推力的偏差。因此，行走體的行走安定。 在本發明中，上述強磁性體爲上述行走引導裝置所構 成者。此情況，可謀求既存的行走引導裝置與強磁性體的 零件的共通化，使搬運系統的構成簡略化。藉此，可謀求 製造成本的降低。 在本發明中，上述行走引導裝置亦可爲具有行走體的 行走路徑成爲曲線的曲線部，沿著上述曲線部來取間隔而 配列複數的電樞，且當上述轉子橫跨上述曲線部的複數的 電樞之中相鄰的複數的電樞而對向狀地轉乘移動時，將在 上述轉子的移動方向前端，在各電樞與上述轉子之間增加 的對向面積的增加量、及在上述轉子的移動方向後端，在 各電樞與上述轉子之間減少的對向面積的減少量的差規定 於所被定的値以下者。上述所被定的値係上述行走體前進 -8- 201233613 10mm時的上述對向面積的增加量與減少量的差可爲 180mm2。 例如，當各電樞爲以3相交流電流所驅動者時，在曲 線部中等間隔配列複數的電樞，且以使各電樞的鐵芯（ armature core )的排列方向能夠形成與曲線部之各·電樞位 置的接線方向平行的方式配置電樞爲一般性的考量》此情 況，在行走體沿著曲線部行走時，當轉子對向狀地轉乘移 動至等間隔配置的各電樞時，會使對轉子產生頓轉力、拉 入力。 就此構成而言，當上述轉子橫跨上述曲線部的複數的 電樞之中相鄰的複數的電樞而對向狀地轉乘移動時，將在 上述轉子的移動方向前端，在各電樞與上述轉子之間增加 的對向面積的增加量、及在上述轉子的移動方向後端，在 各電樞與上述轉子之間減少的對向面積的減少量的差規定 於所被定的値以下。藉此，當轉子對向狀地轉乘移動至取 間隔而配置的各電樞時，可更縮小對轉子之磁阻的變化。 具體而言，因爲將上述對向面積的增加量與減少量的 差形成所被定的値以下，所以使複數的電樞的間隔、及各 電樞的鐵芯的排列方向的角度最適化。藉此，可更縮小對 轉子之磁阻的變化，可比上述的情況更縮小對轉子的拉入 力。換言之，可使拉入力對轉子的影響降低。因此，在曲 線部中’可抑制行走體的推力的偏差，所以可使轉子安定 移動，進而可提商轉子的定位精度。 在將上述對向面積的增加量與減少量的差規定於所被 -9- 201233613 定的値以下時，上述行走引導裝置更具有行走體的行走路 徑成爲直線的直線部，將沿著上述曲線部而配列的各電樞 的鐵芯的排列方向、及在上述直線部的曲線部附近的各電 樞的鐵芯的排列方向設爲相對於各直線部的行走方向、曲 線部之各電樞位置的接線方向，沿著各個的電樞的配列來 持有角度而使變化的位置爲佳。藉此，各電樞的鐵芯的排 列方向的角度會被最適化。 此情況，在上述曲線部之上游側的電樞的鐵芯的排列 方向的角度、及在上述曲線部之下游側的電樞的鐵芯的排 列方向的角度，係相對於各電樞位置的接線方向變化成互 相反轉爲佳。藉此，可使各電樞的鐵芯的排列方向的角度 更最適化。 而且，有關上述直線部之中上述曲線部附近的兩側2 個的電樞，亦可使鐵芯的排列方向相對於上述直線部的行 走方向持有角度而變化。藉此，各電樞的各鐵芯的排列方 向的角度會更被最適化。 此外，在上游側的上述直線部的電樞之鐵芯的排列方 向的角度、及在下游側的上述直線部的電樞之鐵芯的排列 方向的角度，亦可相對於上述直線部的行走方向變化成彼 此逆轉。藉此，可使各電樞的各鐵芯的排列方向的角度更 加最適化。 在本發明中’上述行走引導裝置亦可爲具有行走體的 行走路徑成爲直線的直線部，沿著上述直線部來取間隔而 配列複數的電樞，且將上述直線部的複數的電樞的設置間 -10- 201233613 隔SP與上述轉子的移動方向的長度B設爲B = SP.n的關係（ η爲整數）者。因爲形成如此B = SP. η的關係，所以在直線 部中，可使電樞與轉子的對向面積形成一定。藉此，可縮 小作用於轉子的拉入力，抑制行走體的推力的偏差。因此 ’可使轉子安定移動，提高轉子的定位精度。 申請專利範圍及/或說明書及/或圖面所揭示的至少2 個構成的怎樣的組合皆含於本發明。特別是申請專利範圍 的各請求項的2個以上的怎樣的組合皆含於本發明。 【實施方式】 圖1〜圖1 3 —同說明本發明的第1實施形態。圖1是以 成爲此搬運系統的主要的搬運裝置1、工作機械2及移載台 71，72所構成的加工設備的正面圖。就此例而言，工作機 械2是對於裝載機系統1設置2台。搬運裝置1是使搬運物品 的行走體3沿著行走引導裝置4來行走自如地設置者，行走 引導裝置4是具有直線部4Α及曲線部4Β。一個的移載台71 是位於曲線部4Β而配置。此移載台7 1是例如對於此搬運系 統的外部交接素材或成爲製品的工件W的台，藉由行走體 3來進行工件W的搬入、或搬出。 如圖2所示，去掉搬運裝置1的行走體3的部分之搬運 裝置本體是單元化分割成分別具備行走引導裝置4的直線 部4Α及曲線部4Β的直線部行走引導裝置單元1Α及曲線部 行走引導裝置單元1Β，依序連結任意的單元而構成。 如圖3所示，工作機械2在圖示的例子是由車床所構成 -11 - 201233613 ’在床51上設置有：由主軸所構成之支撐工件支撐手段52 的主軸台53、及作爲加工手段的角塔型（Turret)的刀具 台54。此工作機械2是在前後（Z方向）及左右（X方向） 移動自如地設置主軸台53的主軸移動型的車床。另外，亦 可爲將主軸台53固定於床51，使刀具台54移動於前後、左 右的刀具台移動型。 如同圖所示，搬運裝置1是將搬運工件W的行走體3予 以行走自如地設置於行走引導裝置4者，對於工作機械2的 工件支撐手段52進行工件W的交接。行走引導裝置4是在 藉由支柱11來架設的水平的框架12上沿著長度方向而設。 在行走體3是設有：把持所要搬運的物品（工件W) 之作爲把持手段的夾頭（chuck ) 19、及使此夾頭19移動 的移動機構20。移動機構20是具有：被搭載於行走體3而 進退於與行走方向（X方向）正交的前後方向（Z方向） 的前後移動台16、及昇降自如地設置於此前後移動台16的 棒狀的昇降體17、及設於此昇降體17的下端的工件保持頭 18»在此工件保持頭18設有2個上述夾頭19。2個的夾頭19 是在向下與向正面之間，可藉由工件保持頭18內的夾頭方 向變換機構（未圖示）來替換。 前後移動台16是藉由被設置於行走體3的馬達等的電 動式的驅動源16a來使前後移動，昇降體17是藉由設置於 前後移動台16的馬達等的電動式的驅動源17a來昇降驅動 。夾頭19是具有以螺線管（Solenoid)等的電動式的驅動 源.19a來開閉驅動而保持被搬運物W的夾頭爪（未圖示） -12- 201233613 。上述2個的夾頭19，19的替換動作是藉由馬達等的替換 用的驅動源（未圖示）來進行。 如圖4所示，行走體3是以行走體本體3A及移動機構 搭載台3B所構成，該行走體本體3 A是具有行走車輪21 ( 21i，21〇)，該移動機構搭載台3B是被安裝於此行走體本 體3A的下面而設置前後移動台16等的移動機構20。 如圖5的平面圖所示，行走引導裝置4是以彼此配置成 直角的2個直線部4A ’ 4A、及連接該等2個直線部4A間的 圓弧狀的曲線部4B所構成。橫跨該等直線部4A及圓弧狀 的曲線部4B來連續設有分別位於曲線部4B的外徑側及內 徑側之互相平行的向內及向外的外徑側引導面4 0及內徑側 引導面4i、及朝上下方向的一對的車輪引導面4u。車輪引 導面4u是沿著外徑側引導面4〇及內徑側引導面4i來分別設 置。 如圖6的剖面圖所示’就圖示的例子而言’外徑側引 導面4〇及內徑側引導面4i是位於比走在車輪引導面4u上的 行走車輪21更上方。在行走體3的行走體本體3 A除了行走 車輪2 1以外，被外徑側引導面4 0引導的外徑側滾子2 3、及 被內徑側引導面4i引導的內徑側滾子24會繞著垂直軸心旋 轉自如地設置。 如圖5所示，行走體3的外徑側滾子23及內徑側滾子24 是排列於行走方向的前後分別設置3個以上。複數個的外 徑側滾子2 3是沿著成爲外徑側引導面4 〇的上述曲線部4 B的 部分的圓弧形狀來圓弧狀地取適當的間隔配置。複數個的 -13- 201233613 內徑側滾子24是沿著成爲內徑側引導面4i的直線部4A的部 分來直線狀地取適當的間隔配置。 如圖6所示，行走體本體3A的行走車輪21i，21〇是以 能夠分別走在兩側2條的車輪引導面4u上的方式分別設於 寬度方向的兩側。外徑側的行走車輪2 1 〇是旋轉自如地設 置於可動車輪支撐體28，該可動車輪支撐體28是對於行走 體本體3A可繞者垂直軸心Ο來方向轉換自如地予以支撐。 在該等各可動車輪支撐體28設有突出至外徑側的桿狀的方 向操作子25，且在方向操作子25的前端設有凸輪從動件 25a，該凸輪從動件25a是由可繞著垂直軸心旋轉自如的滾 子所構成。引導該等方向操作子25的前端的凸輪從動件 25 a的凸輪面26是在行走引導裝置4沿著行走方向來橫跨於 全長設置。此凸輪面26是設成在行走體3進入曲線部4B ( 圖5)之處，使行走車輪21〇的方向強制轉換。 在圖3中，行走體3的行走驅動是以同步型的線性馬達 5來進行。線性馬達5是以設置於框架12的複數的個別馬達 6及1個的轉子7所構成的離散形線性馬達。各個別馬達6是 分別可作爲獨立的1台線性馬達的一次側的電樞之機能者 ，橫跨行走體3的行走領域的全域，沿著行走引導裝置4來 取間隔而配列。轉子7是由永久磁石所構成，被設置於行 走體3。在相鄰的個別馬達6間連續配置有成爲上述個別馬 達6的磁通所通過的路徑的強磁性體4K。此強磁性體4K是 由上述行走引導裝置4所構成。驅動線性馬達5的馬達驅動 裝置是以分別驅動各個別馬達6的複數的個別馬達驅動裝 -14- 201233613 置8及給予該等複數的個別馬達驅動裝置8位置指令等之圖 示外的總括控制手段所構成。 各個別馬達驅動裝置8是每2台匯集成爲一個的馬達驅 動電路部9’各馬達驅動電路部9是被配置於框架12上。上 述總括控制手段是回應由上位控制手段所給予的位置指令 ，將使各個別馬達6驅動的位置指令給予各個別馬達驅動 裝置8。亦即總括控制手段是將座標變換成各個的個別馬 達6的座標系的位置指令給予所應驅動的個別馬達6的個別 馬達驅動裝置8。上述統括控制手段是藉由微電腦或個人 電腦等的電腦及其程式、電路元件等所構成。 如圖9，圖1 0所示，各個SU馬達6是以3相交流電流所 驅動者，成爲按各相（U，V，W相）設置一個電極6U， 6V，6W的3極的電樞。該等電極6U，6V，6W的排列方向 是成爲轉子7的移動方向X。各電極6U，6V，6 W是分別以 鐵芯6Ua，6Va，6Wa、及線圈6Ub，6Vb，6Wb所構成。鐵 芯6Ua，6Va，6Wa是從共通的鐵芯基台部6d突出成梳齒狀 者。被複數配列的各個別馬達6是彼此同構成者，因此轉 子行走方向的長度A皆成爲同長度。另外，在此例是將個 別馬達6的極數設爲3，但並非限於3 ’亦可爲3的整數倍， 例如9極。轉子7是在轉子基體7a使複數個由永久磁石所構 成的N，S的磁極排列設於移動方向X者。N，S的磁極對的 數量是任意設計即可。轉子7的移動方向X的長度B是橫跨 複數的個別馬達6的長度。圖8是以平面圖來顯示個別馬達 6及轉子7 -15- 201233613 在圖9的直線部4A所被配列的複數的個別馬達6的設 置間隔SP與轉子7的移動方向的長度B是具有B = SP.n的關 係（η爲整數）。設置間隔SP是意指直線部4Α的任意的個 別馬達6之中轉子移動方向X的中央部與和個別馬達6相鄰 的個別馬達6的轉子移動方向X的中央部的間隔。在此實 施形態是成爲B = 2xSP ( η = 2 )。 在此，圖1 1〜圖13是表示各個別馬達6與行走體3的關 係的平面圖。本實施形態的搬運系統是將配列於行走引導 裝置4之中曲線部4Β及此曲線部4Β附近的直線部4Α的各個 別馬達6及轉子7的對向面積的增加量與減少量的差規定於 所被定的値以下。亦即，當轉子7橫跨曲線部4Β的複數（ 在此例是4個）的個別馬達6之中相鄰於圓周方向的複數的 個別馬達6而對向狀地轉乘移動時，將在上述轉子7的移動 方向前端，在各個別馬達6與轉子7之間增加的對向面積的 增加量、及在轉子7的移動方向後端，在各個別馬達6與轉 子7之間減少的對向面積的減少量的差規定於所被定的値 以下。 例如在圖11所示的轉子7的移動位置，轉子7的移動方 向前端的對向面積的增加量爲780mm2，轉子7的移動方向 後端的對向面積的減少量爲900mm2，該等的差亦即對向 面積的變化量爲120mm2。另外，轉子7的移動方向前端的 的 積 面 向 對 的 端 後 向 方 tnsn 移 的 7 子 轉 及 量 加 增 的 積 面 向 對 時 時 而 訪 πότη 移 的 7 子 轉 著 隨 是 量 少 減 el】TT^> ΠΟΙΠ 移 的 意 任 的 7 子 轉 示 顯 是 子 例 的 13變 圖各 ~ 的 11積 圖面 ， 向 化對 變的 刻置 刻位 -16- 201233613 化量者。亦即，在圖12，轉子7的移動方向前端的對向面 積的增加量爲420mm2，轉子7的移動方向後端的對向面積 的減少量爲469mm2，對向面積的變化量是成爲49mm2，在 圖13，轉子7的移動方向前端的對向面積的增加量爲 486mm2，轉子7的移動方向後端的對向面積的減少量爲 511mm2，對向面積的變化量是成爲25mm2。 具體而言，爲了使上述對向面積的增加量與減少量的 差形成所被定的値以下，如圖Π所示，在曲線部4B是將複 數（在此例是4個）的個別馬達6予以非等間隔配列成所被 定的間隔。亦即在曲線部4B中，使在圓周方向相鄰的個別 馬達6間的角度沿著行走體3的行走方向依序設爲αΐ、α2、 α3。例如 αΐ、α2、α3 是分別設爲 22.2。、21.4。、22.2。。 而且，將各個別馬達6的鐵芯6Ua，6Va，6Wa的排列 方向L6、及直線部4A之曲線部附近的各個別馬達6的各鐵 芯的排列方向L6設爲相相對於各直線部4A的行走方向、 曲線部4B之各個別馬達位置的接線方向L 1，沿著各個的 個別馬達6的配列來使變化角度βΐ，β2，β3，β4，β5，β6 的位置。該等的角度βΐ，β2，β3，β4，β5，β6之中，亦可 將所選擇的2個以上的角度形成同一角度，或將全部的角 度形成同一角度。該等的角度βΐ，β2，β3，β4，β5，β6亦 可爲彼此相異。 並且在圖1 1所示的例子是針對曲線部4Β的上游側的2 個的個別馬達6，使各個別馬達6的各鐵芯的排列方向L6的 角度β2，β3相對於各個別馬達位置的接線方向L 1同圖的平 -17- 201233613 面視順時針變化。相反的，有關曲線部4 B的下游側的2個 的個別馬達6是使各個別馬達6的各鐵芯的排列方向L 6的角 度β 4，β 5相對於各個別馬達位置的接線方向l 1同圖的平面 視逆時針變化。如此使各個別馬達6的各鐵芯的排列方向 L6的角度β2〜β5最適化。此例是將上述角度β2〜β5例如設 爲5°。另外，角度αΐ、α2、α3及角度β2〜β5並非限於上述 的角度。 有關直線部4Α之中曲線部4Β附近的兩側2個的個別馬 達6是設爲使各鐵芯的排列方向L6相對於直線部4Α的行走 方向變化角度Ρ1，β6的位置。在圖11所示的例子是針對上 游側的直線部4 Α的個別馬達6，使此個別馬達6的各鐵芯 的排列方向L6的角度βΐ相對於此直線部4A的行走方向同 圖的平面視順時針變化。相對的，有關下游側的直線部 4 Α的個別馬達6是使此個別馬達6的各鐵芯的排列方向L6 的角度β6相對於此直線部4A的行走方向同圖的平面視逆 時針變化。如此使各個別馬達6的各鐵芯的排列方向L6的 角度β〗，β6最適化。此例是藉由模擬及實驗來將行走體3 前進10mm時的對向面積的增加量與減少量的差定爲 1 8 0 m m2 以下。 圖14〜圖16是作爲參考提案例，表示各個別馬達6與 行走體3的關係的平面圖。此例是在曲線部4B中，等間隔 配列相鄰於圓周方向的個別馬達6，且以使各個別馬達6的 各鐵芯的排列方向L6能夠形成平行於曲線部4B之各個別 馬達位置的接線方向L 1的方式配置個別馬達6。此情況， -18- 201233613 在圖14是對向面積的變化量爲230mm2，在圖15是對向面 積的變化量爲249mm2，在圖16是對向面積的變化量爲 2 10mm2，各個別馬達6與轉子7的對向面積的增力卩量與減 少量的差超過200mm2。於是，在行走體3沿著曲線部4B行 走時，當轉子7對向狀地轉乘移動至等間隔配置的各個別 馬達6時，使對轉子7產生頓轉力、拉入力。 如圖4所示，在行走體3，如前述般’搭載：成爲工件 W的把持手段的夾頭19、及使該夾頭19移動於成爲與行走 體3的行走方向不同的方向之前後方向及上下方向的移動 機構20»此移動機構20及夾頭19的各驅動源16a’ 17a’ 19a (圖3)是電動式，對該等驅動源的給電是如擴大圖4 的一部分之圖7所示，藉由非接觸給電裝置41來進行。 如圖4所示，在行走體3搭載有無線通訊手段47，且根 據藉由此無線通訊手段47所通訊的訊號來進行上述夾頭19 或移動機構20的各電動式的驅動源16a，17a，19a的控制 之指令傳達手段48會被搭載於行走體3。指令傳達手段48 亦可爲只在無線通訊手段47與驅動源16a，17a，19a之間 進行訊號的傳達的配線。並且，指令傳達手段48包括：除 了驅動的指令外，將設於行走體3的各種感測器類（未圖 示）的訊號傳送至上述無線通訊手段47的配線。行走體3 上的無線通訊手段47是在與設於控制此搬運系統的全體的 控制裝置49的無線通訊手段49a之間通訊。另外，搭載於 行走體3的各驅動源全部設爲電動式，連接各驅動源與地 上側的配線，配管類全無。 -19- 201233613 若根據以上說明的搬運系統，則由於使用所謂的同步 型的線性馬達5，因此相較於感應形的線性馬達，容易取 得大的推力，行走體3的行走性能會提升。雖爲同步型的 線性馬達5，但因爲在固定側配置可作爲一次側的電樞之 機能的個別馬達6，且在行走體設置二次側的轉子7，所以 不需要對行走體3供給行走驅動用的電流。如上述般，只 要使用非接觸給電裝置41，即使移動體有馬達，還是可實 現搬運系統。但，在移動體設置馬達時，由於會有給電的 容量變大的問題，因此有在地上側配置個別馬達6的優點 〇 並且，設置強磁性體4K，其係於相鄰的個別馬達6間 連續被配置而成爲上述個別馬達6的磁通所通過的路徑， 且以個別馬達6與轉子7的對向面積的變化能夠變小的方式 配置，藉此轉子7轉乘於個別馬達6間時的拉入力會變小， 可抑制行走體3的推力的偏差。因此，行走體3的行走會安 定。由於強磁性體4K是由上述行走引導裝置4所構成，因 此不需要與其他的零件另外設置強磁性體4K，可謀求既 存的行走引導裝置4與強磁性體4K的零件的共通化，使搬 運系統的構成簡略化。藉此，可謀求製造成本的降低。 當轉子7橫跨曲線部4B的複數（在此例是4個）的個別 馬達6之中相鄰於圓周方向的複數的個別馬達6而對向狀地 轉乘移動時，將在上述轉子7的移動方向前端’在各個別 馬達6與轉子7之間增加的對向面積的增加量、及在轉子7 的移動方向後端’在各個別馬達6與轉子7之間減少的對向 -20- 201233613 面積的減少量的差規定於所被定的値以下。具體而言，在 曲線部4B中，將相鄰於圓周方向的個別馬達6間的角度設 爲所被定的角度，且將各個別馬達6的各鐵芯的排列方向 L6設爲使相對於曲線部4B之各個別馬達位置的接線方向 L1變化角度β的位置。 此情況，當轉子7對向狀地轉乘移動至取間隔配置的 各個別馬達6時，可更縮小磁阻對轉子7的變化。藉此，可 比圖14〜圖16的情況更縮小對轉子7的拉入力。換言之， 可使拉入力對轉子7的影響降低。因此，在曲線部4Β中， 可抑制行走體3的推力的偏差，所以可使轉子7安定移動， 進而可提高轉子7的定位精度。 如上述般，若在直線部4Α中形成B = SP _ η的關係，則 在直線部4Α中，可使個別馬達6與轉子7的對向面積形成 一定。藉此，縮小作用於轉子7的拉入力，可抑制行走體3 的推力的偏差。如此設置強磁性體4Κ，其係於相鄰的個 別馬達6間連續被配置而成爲上述個別馬達6的磁通所通過 的路徑’且使個別馬達6與轉子7的對向面積形成一定之下 ，可縮小作用於轉子7的拉入力，進而可使轉子7安定移動 ，提高轉子7的定位精度。 另外，一旦個別馬達6與轉子7的對向面積變化，則磁 阻會變化，磁氣能量會變動。因爲轉子7所欲停止磁氣能 量安定的位置，所以從該位置移動轉子7需要大的力量。 如上述般，若在使個別馬達6與轉子7的對向面積形成一定 之下’在個別馬達6間設置強磁性體4Κ的磁路，則磁通會 -21 - 201233613 橫跨個別馬達6、轉子7、旁邊的個別馬達6、強磁性體4 Κ 順利地流動。因此，作用於轉子7的拉入力會變小。在個 別馬達6間不設強磁性體4Κ的構成，因爲無流動於強磁性 體4Κ的磁路，所以磁通會被放出至空氣中。空氣中因爲 磁阻大，所以磁阻會變大，磁通的量會減少。 如以上般，一邊參照圖面，一邊說明本發明的較佳實 施形態，但可在不脫離本發明的主旨範圍內實施各種的追 加、變更或削除。因此，該等亦含於本發明的範圍內。 【圖式簡單說明】 本發明可由參考附圖之以下的較佳實施形態的說明來 明瞭地理解。但，實施形態及圖面只是爲了圖示及說明用 者，並非是爲了決定本發明的範圍而應被利用者。本發明 的範圍是依據附上的申請專利範圍而定。在附圖中，複數 的圖面之同一零件號碼是顯示同一部分。 [圖1是組合本發明的第1實施形態的搬運系統與工作 機械的加工設備的立體圖》 圖2是構成同搬運系統的行走引導裝置的各單元的立 體圖。 圖3是同加工設備的部分省略正面圖。 圖4是同加工設備的搬運系統的剖斷側面圖。 圖5是表示同搬運系統的行走引導裝置與行走體的關 係的平面圖。 圖6是表示同搬運系統的行走引導裝置與行走體本體 Β -22- 201233613 的橫面圖。 圖7是擴大圖4的一部分而顯示的剖面圖。 圖8是表示同搬運系統的行走引導裝置與線性馬達、 行走體的關係的平面圖。 圖9是同行走體的驅動源之線性馬達的部分剖面圖。 圖1 0是同線性馬達的個別馬達的平面圖》 圖11是槪略顯示各個別馬達與行走體的關係的平面圖 圖 由 體 走 行爲 使作 是是是 2 3 4 11 —1 1 圖 圖 圖 走 行 Ο 〇 與 圖圖達 面面馬 平平別 的的個 時時各 訪勖示 IjEll IIE3- > 移移顯 態態略 狀狀槪 ^、τ , 1 2 Mu 1 1 俣 案 提 考 參 圖 由mm flH 走 行 使 圖 由 。 體 圖走 面行 平使 的是 係15 關圖 的 澧 _a3 圖 由 澧 flH 走 行 使 是 6 11 圖 圖圖 面面 平平 時時 ππη non 移移 態態 狀狀 勺 勺 【主要元件符號說明】 3 :行走體 4 :行走引導裝置 4A :直線部 4 B :曲線部 4K :強磁性體 5 :線性馬達 6 :個別馬達 7 :轉子 -23-201233613 VI. INSTRUCTIONS: RELATED APPLICATIONS This application is the priority of Japanese Patent Application No. 2010-23 94 53 filed on October 26, 2010, and is hereby incorporated by reference in its entirety. [Technical Field of the Invention] The present invention relates to a transport system for transporting articles of a loader (loader) or an industrial machine or a logistic machine for a work machine, and more particularly to a transport system including a curved portion in a travel path. [Prior Art] A linear motor is widely used in a traveling device such as a transporting device that is a transporting device of a transport device or a loader for a work machine, and the like (for example, Patent Document 1). Linear motors are: linear induction motors (LIΜ), linear synchronous motors (L S Μ ), and linear DC motors, etc. However, linear induction motors are mainly used as long-distance travel systems. The linear synchronous motor is a method in which a magnet is disposed on the ground side to move the coil side. In addition, in the linear synchronous motor, there is an example in which the primary coil is partially disposed on the ground side (for example, Patent Document 2), but the linear synchronous motor is used as an auxiliary portion of the curved portion, and is mainly used for linear driving. system. A linear induction motor is used when the travel path is a curved portion. -5-201233613 PRIOR ART DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT PATENT DOCUMENT Since the thrust is low, it is difficult to obtain sufficient running performance. In the conventional linear synchronous motor, the magnet is disposed on the ground side to move the coil side. However, in order to move the coil side, it is necessary to supply power to the rotor, and it is impossible to travel on the endless path due to the wiring to the rotor, so the traveling path is limited, or the power feeding system is complicated. As a synchronous linear motor that solves such a problem, a linear synchronous motor that is discretely arranged can be considered, and the function of the armature of the primary side of each of the independent linear motors can be arranged in the moving direction of the rotor. A plurality of individual motors formed by the pivot. However, in the case of the discretely arranged linear synchronous motor, the rotor is transferred to each of the motors that are arranged to move in the interval. Therefore, it is difficult to cause the rotor to move stably with the cogging force and the pulling force of the rotor, or to improve the positioning accuracy of the rotor. Specifically, there are the following problems: • If an individual motor is fixed, the rotor is pulled in under the influence of the pulling force. The production of the force is the sub-transfer of the position. The horse is not allowed to do the same thing. It is the same force. 与··-6-201233613 • If there are two motors that are not completely opposite to the rotor, the pull-in force acting on the rotor is the difference between the pull-in forces. . The above-mentioned rotational force means a force acting on a change in the magnetic attraction force between the rotor and the rotor which is completely opposed to the individual motor. Further, the term "the rotor completely opposed to the above-mentioned individual motor" means the relative arrangement relationship between the rotor and the individual motor when the rotor is completely opposed to the individual motor or when the individual motor is completely opposed to the rotor. The above pulling force means the force that the rotor increases the opposing area and pulls into the individual motor when the rotor is not completely opposed to the individual motor. This pull-in force is quite large compared to the starting force (there are also cases where the number is 10 times). An object of the present invention is to provide a linear motor which is a discrete arrangement of individual motors which is advantageous in reducing the amount of use of a coil or a power supply type as a driving source, and which reduces the pulling force acting on the rotor, thereby suppressing the traveling body. Handling system for the deviation of thrust. (Means for Solving the Problem) The transport system of the present invention is a transport system in which a traveling body for transporting articles is transported along a travel guide, and is characterized in that a drive source for driving the travel body is driven In the case of a linear motor, the linear motor is composed of a plurality of independent primary armatures and a secondary side rotor, and the plurality of primary side armatures are arranged along the traveling guide, the secondary side The rotor system is provided on the traveling body, and is provided with a ferromagnetic body that is continuously disposed between adjacent armatures to be a path through which the magnetic flux of the armature passes. According to this configuration, since the so-called synchronous linear motor 201233613 is used, it is easy to obtain a large thrust compared to the inductive linear motor, and the traveling performance of the traveling body is improved. In the synchronous type linear motor, the primary side armature is disposed on the fixed side, and the secondary side rotor is provided on the traveling body. Therefore, it is not necessary to supply the traveler with a current for traveling drive. In the case where there is no limitation that the traveling path is restricted, a complicated traveling path 'for example, a traveling path configured in an annular shape or a path having a curved portion or the like can be formed. Therefore, a highly versatile handling system can be formed. Further, a ferromagnetic body is provided which is continuously disposed between adjacent armatures to be a path through which the magnetic flux of the individual motor passes, and a constant or a change in the area of the opposing area between the armature and the rotor can be formed. In a small manner, the pulling force when the rotor is transferred between the armatures is reduced, and the variation in the thrust of the traveling body can be suppressed. Therefore, the walking body is stable. In the invention, the ferromagnetic body is a member of the walking guide device. In this case, the existing traveling guide device and the components of the ferromagnetic body can be shared, and the configuration of the transport system can be simplified. Thereby, the manufacturing cost can be reduced. In the present invention, the traveling guide device may be a curved portion having a traveling path in which the traveling body is curved, and a plurality of armatures are arranged along the curved portion, and the plurality of armatures are spanned across the curved portion. When the plurality of armatures adjacent to each other in the armature are moved in the opposite direction, the amount of increase in the opposing area between the armatures and the rotor at the tip end in the moving direction of the rotor, and In the rear end of the rotor in the moving direction, the difference in the amount of reduction in the opposing area between the armatures and the rotor is defined to be less than or equal to the predetermined value. The difference between the amount of increase and the amount of decrease in the above-mentioned opposing area when the above-described traveling body is -8-201233613 10 mm can be 180 mm 2 . For example, when each armature is driven by a three-phase alternating current, a plurality of armatures are arranged at equal intervals in the curved portion, and the arrangement direction of the armature cores of the respective armatures can be formed and curved. The armature of each armature position is arranged in parallel so that the armature is a general consideration. In this case, when the traveling body travels along the curved portion, the rotor is transferred in the opposite direction and moved to the armatures arranged at equal intervals. At this time, it will cause a rotational force and a pulling force to the rotor. In this configuration, when the rotor crosses the plurality of armatures adjacent to the plurality of armatures of the curved portion and moves in opposite directions, the armature is at the front end of the rotor in each of the armatures. The amount of increase in the opposing area between the rotor and the amount of decrease in the opposing area between the armature and the rotor at the rear end of the rotor in the moving direction is defined by the predetermined enthalpy the following. Thereby, when the rotor is transferred in the opposite direction to each of the armatures arranged to take the interval, the change in the magnetic resistance of the rotor can be further reduced. Specifically, since the difference between the amount of increase in the opposing area and the amount of decrease is set to be less than or equal to the predetermined value, the interval between the plurality of armatures and the angle of the arrangement direction of the cores of the armatures are optimized. Thereby, the change in the magnetic resistance of the rotor can be further reduced, and the pulling force to the rotor can be made smaller than in the above case. In other words, the influence of the pulling force on the rotor can be reduced. Therefore, the deviation of the thrust of the traveling body can be suppressed in the curved portion, so that the rotor can be stably moved, and the positioning accuracy of the rotor can be improved. When the difference between the amount of increase in the opposing area and the amount of decrease is set to be less than or equal to -9 to 201233613, the travel guide further includes a straight line in which the traveling path of the traveling body becomes a straight line, and the curve is along the curve. The arrangement direction of the cores of the armatures arranged in the portion and the arrangement direction of the cores of the armatures in the vicinity of the curved portion of the straight portion are the armatures of the straight portions and the armatures of the curved portions. The wiring direction of the position is maintained at an angle along the arrangement of the respective armatures to make the changed position better. Thereby, the angle of the arrangement direction of the cores of the armatures is optimized. In this case, the angle of the arrangement direction of the cores of the armature on the upstream side of the curved portion and the angle of the arrangement direction of the cores of the armature on the downstream side of the curved portion are relative to the positions of the armatures. It is better to change the wiring direction to reverse each other. Thereby, the angle of the arrangement direction of the cores of the armatures can be optimized. Further, in the armature portion of the linear portion in the vicinity of the curved portion, the arrangement direction of the iron core may be changed by an angle with respect to the traveling direction of the straight portion. Thereby, the angle of the arrangement direction of the cores of the armatures is more optimized. Further, the angle of the arrangement direction of the armature cores of the straight portion on the upstream side and the angle of the arrangement direction of the armature cores of the straight portion on the downstream side may be traveled with respect to the straight portion. The directions change to reverse each other. Thereby, the angle of the arrangement direction of the iron cores of the respective armatures can be more optimized. In the present invention, the traveling guide device may be a straight portion having a traveling path in which the traveling body is a straight line, and a plurality of armatures are arranged along the straight portion, and the plurality of armatures of the straight portion are arranged. Setting room -10- 201233613 The length B of the partition SP and the moving direction of the rotor is set to the relationship of B = SP.n (η is an integer). Since such a relationship of B = SP. η is formed, in the straight portion, the opposing area of the armature and the rotor can be made constant. Thereby, the pulling force acting on the rotor can be reduced, and the deviation of the thrust of the traveling body can be suppressed. Therefore, the rotor can be moved in a stable manner to improve the positioning accuracy of the rotor. Combinations of at least two configurations disclosed in the scope of the claims and/or the description and/or drawings are included in the invention. In particular, any combination of two or more of the claims of the patent application scope is included in the present invention. [Embodiment] FIG. 1 to FIG. 13 - The first embodiment of the present invention will be described. Fig. 1 is a front elevational view showing a processing apparatus including the main conveyance device 1, the work machine 2, and the transfer stages 71, 72 which are the conveyance systems. In this case, the working machine 2 is set to two for the loader system 1. The transporting device 1 is a vehicle that allows the traveling body 3 to be transported to travel freely along the traveling guide device 4. The traveling guiding device 4 has a straight portion 4Α and a curved portion 4Β. One of the transfer stages 71 is disposed on the curved portion 4Β. The transfer table 71 is, for example, a table for externally transferring material of the transport system or a workpiece W to be a product, and the workpiece W is carried in or carried out by the traveling body 3. As shown in FIG. 2, the main body of the conveyance device in which the traveling body 3 of the conveyance device 1 is removed is unitized and divided into a linear portion traveling guide device unit 1 and a curved portion each including a straight portion 4A and a curved portion 4 of the traveling guide device 4. The walking guide unit 1 is configured by sequentially connecting arbitrary units. As shown in FIG. 3, the working machine 2 is constituted by a lathe -11 - 201233613 'the bed 51 is provided with a spindle table 53 which is composed of a main shaft and supports the workpiece supporting means 52, and as a processing means. A turret-type (turret) tool table 54. The work machine 2 is a spindle-moving type lathe in which the headstock 53 is movably provided in the front and rear (Z direction) and the left and right (X direction). Further, the spindle table 53 may be fixed to the bed 51, and the tool table 54 may be moved to the front and rear and the left and right tool table moving type. As shown in the figure, the transporting device 1 is configured such that the traveling body 3 that transports the workpiece W is movably disposed on the traveling guide device 4, and the workpiece W is transferred to the workpiece supporting means 52 of the working machine 2. The walking guide 4 is provided along the longitudinal direction on the horizontal frame 12 which is erected by the stays 11. The traveling body 3 is provided with a chuck 19 as a gripping means for holding an article (work W) to be conveyed, and a moving mechanism 20 for moving the chuck 19. The moving mechanism 20 is a front and rear moving table 16 that is mounted on the traveling body 3 and moves forward and backward in the front-rear direction (Z direction) orthogonal to the traveling direction (X direction), and a bar that is installed in the front and rear moving table 16 in a freely movable manner. The lifting body 17 and the workpiece holding head 18» disposed at the lower end of the lifting body 17 are provided with two chucks 19 at the workpiece holding head 18. The two chucks 19 are in the downward direction and the front side. The gap can be replaced by a chuck direction changing mechanism (not shown) in the workpiece holding head 18. The front and rear moving table 16 is moved forward and backward by an electric drive source 16a such as a motor provided in the traveling body 3, and the elevating body 17 is an electric drive source 17a provided by a motor or the like provided in the front and rear moving table 16. Come to the lift drive. The chuck 19 is a chuck jaw (not shown) having an electric drive source 1919 such as a solenoid (Solenoid) that is driven to open and close to hold the object W to be transported -12-201233613. The replacement operation of the above-described two chucks 19, 19 is performed by a drive source (not shown) for replacement of a motor or the like. As shown in Fig. 4, the traveling body 3 is constituted by a traveling body 3A and a moving mechanism mounting table 3B. The traveling body 3A has traveling wheels 21 (21i, 21A), and the moving mechanism mounting table 3B is A moving mechanism 20 such as the front and rear moving table 16 is attached to the lower surface of the traveling body 3A. As shown in the plan view of Fig. 5, the traveling guide device 4 is composed of two straight portions 4A' to 4A which are arranged at right angles to each other, and an arcuate curved portion 4B which connects the two straight portions 4A. The inward and outward outer diameter side guide surfaces 40 which are parallel to each other on the outer diameter side and the inner diameter side of the curved portion 4B are continuously provided across the straight portion 4A and the arcuate curved portion 4B. The inner diameter side guide surface 4i and a pair of wheel guide surfaces 4u in the vertical direction. The wheel guide surface 4u is provided along the outer diameter side guide surface 4A and the inner diameter side guide surface 4i, respectively. As shown in the cross-sectional view of Fig. 6, the outer diameter side guide surface 4A and the inner diameter side guide surface 4i are located above the traveling wheel 21 which is on the wheel guiding surface 4u. In addition to the traveling wheel 2 1 , the traveling body main body 3 A of the traveling body 3 is an outer diameter side roller 2 3 guided by the outer diameter side guiding surface 40 and an inner diameter side roller guided by the inner diameter side guiding surface 4i. 24 will rotate freely around the vertical axis. As shown in FIG. 5, the outer diameter side roller 23 and the inner diameter side roller 24 of the traveling body 3 are provided in three or more front and rear sides arranged in the traveling direction. The plurality of outer diameter side rollers 2 3 are arranged in an arc shape at an appropriate interval along the arc shape of the portion of the curved portion 4 B which becomes the outer diameter side guide surface 4 。. The plurality of the inner diameter side rollers 24 are arranged linearly at appropriate intervals along the portion of the straight portion 4A that becomes the inner diameter side guide surface 4i. As shown in Fig. 6, the traveling wheels 21i, 21' of the traveling body 3A are respectively provided on both sides in the width direction so as to be able to respectively travel on the wheel guiding surfaces 4u on both sides. The traveling wheel 2 1 外径 on the outer diameter side is rotatably provided on the movable wheel support body 28, and the movable wheel support body 28 is rotatably supported in a direction perpendicular to the vertical axis of the traveling body main body 3A. Each of the movable wheel support bodies 28 is provided with a rod-shaped directional operation unit 25 that protrudes to the outer diameter side, and a cam follower 25a is provided at the front end of the directional operation unit 25, and the cam follower 25a is It is composed of rollers that can rotate freely around the vertical axis. The cam surface 26 of the cam follower 25a that guides the front end of the directional operator 25 is disposed across the entire length of the walking guide 4 in the traveling direction. This cam surface 26 is provided to forcibly change the direction in which the traveling wheel 21 is turned when the traveling body 3 enters the curved portion 4B (Fig. 5). In Fig. 3, the traveling drive of the traveling body 3 is performed by a synchronous linear motor 5. The linear motor 5 is a discrete linear motor composed of a plurality of individual motors 6 and one rotor 7 provided in the frame 12. Each of the individual motors 6 is a function of the armature of the primary side of the independent one linear motor, and is arranged across the entire traveling area of the traveling body 3 along the traveling guide device 4. The rotor 7 is composed of a permanent magnet and is disposed on the traveling body 3. A ferromagnetic body 4K that is a path through which the magnetic flux of the individual motor 6 passes is continuously disposed between the adjacent individual motors 6. This ferromagnetic body 4K is constituted by the above-described walking guide device 4. The motor driving device for driving the linear motor 5 is a plurality of individual motor driving devices 14-201233613 for respectively driving the respective motors 6, and a collective control for giving the plurality of individual motor driving devices 8 position commands and the like. Means of the means. Each of the individual motor driving devices 8 is a motor drive circuit portion 9' that is integrated into one of the two motor drive circuits 8. The motor drive circuit portions 9 are disposed on the frame 12. The above-described collective control means responds to the position command given by the upper control means, and gives the position command for driving the respective motors 6 to the respective motor drive means 8. That is, the collective control means is a positional command for converting the coordinates into the coordinate system of each individual motor 6, and gives the individual motor driving means 8 of the individual motor 6 to be driven. The above-mentioned overall control means is constituted by a computer such as a microcomputer or a personal computer, a program thereof, a circuit component, and the like. As shown in Fig. 9 and Fig. 10, each of the SU motors 6 is driven by a three-phase alternating current, and is a three-pole armature in which one electrode 6U, 6V, 6W is provided for each phase (U, V, W phase). . The arrangement direction of the electrodes 6U, 6V, and 6W is the moving direction X of the rotor 7. Each of the electrodes 6U, 6V, and 6 W is composed of a core 6Ua, 6Va, 6Wa, and a coil 6Ub, 6Vb, and 6Wb, respectively. The cores 6Ua, 6Va, and 6Wa protrude from the common core base portion 6d into a comb shape. Since the individual motors 6 arranged in plural are configured to each other, the lengths A of the traveling directions of the rotors are all the same length. Further, in this example, the number of poles of the individual motor 6 is set to three, but it is not limited to 3' and may be an integral multiple of three, for example, nine poles. The rotor 7 is such that a plurality of N, S magnetic poles composed of permanent magnets are arranged in the moving direction X in the rotor base 7a. The number of magnetic pole pairs of N, S can be arbitrarily designed. The length B of the moving direction X of the rotor 7 is the length of the plurality of individual motors 6. Fig. 8 is a plan view showing the individual motor 6 and the rotor 7 -15 - 201233613. The arrangement interval SP of the plurality of individual motors 6 arranged in the straight portion 4A of Fig. 9 and the length B of the moving direction of the rotor 7 are B = The relationship of SP.n (η is an integer). The installation interval SP is an interval between a central portion of the rotor moving direction X and a central portion of the rotor moving direction X of the individual motor 6 adjacent to the individual motor 6 among the arbitrary individual motors 6 of the straight portion 4A. In this embodiment, it is B = 2xSP (η = 2). Here, Fig. 11 to Fig. 13 are plan views showing the relationship between the respective motors 6 and the traveling body 3. In the conveyance system of the present embodiment, the difference between the amount of increase and the amount of decrease in the opposing area of each of the motor 6 and the rotor 7 arranged in the curved portion 4A of the traveling guide device 4 and the straight portion 4Α in the vicinity of the curved portion 4A is defined. Below the stated 値. That is, when the rotor 7 crosses the plurality of individual motors 6 in the plurality of (in this example, four) individual motors 6 adjacent to the curved portion 4, the plurality of individual motors 6 in the circumferential direction are moved in the opposite direction, and will be The front end of the rotor 7 in the moving direction has an amount of increase in the opposing area between the respective motor 6 and the rotor 7, and a pair of reductions between the respective motors 6 and the rotor 7 at the rear end of the rotor 7 in the moving direction. The difference in the amount of reduction in area is specified below the predetermined enthalpy. For example, in the moving position of the rotor 7 shown in Fig. 11, the amount of increase in the opposing area of the tip end of the rotor 7 in the moving direction is 780 mm 2 , and the amount of reduction in the opposing area of the trailing end of the rotor 7 in the moving direction is 900 mm 2 , and the difference is also That is, the amount of change in the opposing area is 120 mm 2 . In addition, the product of the front end of the rotor 7 in the moving direction is opposite to the end of the opposite direction tnsn, and the product of the 7-turn and the amount of the product is increased in the direction of the πότη shift. TT^> The 7-subject of the shifting meaning is the 11-product map of the 13-variable graph of the sub-example, and the engraving of the change is -16-201233613. That is, in Fig. 12, the amount of increase in the opposing area of the tip end of the rotor 7 in the moving direction is 420 mm2, and the amount of reduction in the opposing area of the rear end of the rotor 7 in the moving direction is 469 mm2, and the amount of change in the opposing area is 49 mm2. In Fig. 13, the amount of increase in the opposing area of the tip end of the rotor 7 in the moving direction is 486 mm2, and the amount of decrease in the opposing area of the rear end of the rotor 7 in the moving direction is 511 mm2, and the amount of change in the opposing area is 25 mm2. Specifically, in order to make the difference between the amount of increase in the opposing area and the amount of decrease formed below the predetermined value, as shown in FIG. ,, in the curved portion 4B, a plurality of individual motors (four in this example) are used. 6 are arranged at non-equal intervals to the determined interval. That is, in the curved portion 4B, the angle between the individual motors 6 adjacent in the circumferential direction is sequentially set to α ΐ, α 2, and α 3 along the traveling direction of the traveling body 3 . For example, αΐ, α2, and α3 are set to 22.2, respectively. 21.4. 22.2. . Further, the arrangement direction L6 of the cores 6Ua, 6Va, and 6Wa of the respective motors 6 and the arrangement direction L6 of the respective cores of the respective motors 6 in the vicinity of the curved portion of the linear portion 4A are set to be opposite to each of the straight portions 4A. The traveling direction and the wiring direction L1 of the respective motor positions of the curved portion 4B are changed along the arrangement of the individual motors 6 to change the positions of the angles βΐ, β2, β3, β4, β5, β6. Among the angles βΐ, β2, β3, β4, β5, and β6, the selected two or more angles may be formed at the same angle, or all the angles may be formed at the same angle. The angles βΐ, β2, β3, β4, β5, β6 may also be different from each other. Further, the example shown in FIG. 11 is for the two individual motors 6 on the upstream side of the curved portion 4A, and the angles β2 and β3 of the arrangement direction L6 of the respective iron cores of the respective motors 6 are set with respect to the respective motor positions. The wiring direction L 1 is the same as the flat -17- 201233613. On the other hand, the two individual motors 6 on the downstream side of the curved portion 4 B are the wiring directions l of the angles β 4 and β 5 of the arrangement directions L 6 of the respective iron cores of the respective motors 6 with respect to the respective motor positions. 1 The plane of the same figure changes counterclockwise. Thus, the angles β2 to β5 of the arrangement direction L6 of the respective cores of the respective motors 6 are optimized. In this example, the above angles β2 to β5 are set to, for example, 5°. Further, the angles αΐ, α2, α3 and the angles β2 to β5 are not limited to the above angles. The individual motors 6 on the two sides in the vicinity of the curved portion 4A in the straight portion 4A are positions at which the direction L6 of the respective cores is changed by the angles Ρ1 and β6 with respect to the traveling direction of the straight portion 4Α. The example shown in FIG. 11 is an individual motor 6 for the upstream straight portion 4 ,, and the angle β ΐ of the arrangement direction L6 of each core of the individual motor 6 is the same as the traveling direction of the straight portion 4A. Change clockwise. On the other hand, the individual motors 6 on the downstream side linear portions 4 are such that the angle β6 of the arrangement direction L6 of the respective cores of the individual motors 6 changes counterclockwise with respect to the traveling direction of the straight portion 4A. Thus, the angles β and β6 of the arrangement directions L6 of the respective iron cores of the respective motors 6 are optimized. In this example, the difference between the amount of increase and the amount of decrease in the opposing area when the traveling body 3 is advanced by 10 mm by simulation and experiment is set to be 1 800 m 2 or less. Figs. 14 to 16 are plan views showing the relationship between the respective motors 6 and the traveling body 3 as a reference example. In this example, in the curved portion 4B, the individual motors 6 adjacent to the circumferential direction are arranged at equal intervals, so that the arrangement direction L6 of the respective cores of the respective motors 6 can be formed parallel to the respective motor positions of the curved portion 4B. The individual motors 6 are arranged in the manner of the wiring direction L1. In this case, -18-201233613 is shown in Fig. 14 as the amount of change in the opposing area of 230 mm2, in Fig. 15, the amount of change in the opposing area is 249 mm2, and in Fig. 16, the amount of change in the opposing area is 2 10 mm2, and the respective motors The difference between the amount of force increase and the amount of decrease in the opposing area of the rotor 7 is more than 200 mm 2 . Then, when the traveling body 3 travels along the curved portion 4B, when the rotor 7 is transferred in the opposite direction and moved to the respective motors 6 arranged at equal intervals, the rotor 7 is subjected to the urging force and the pulling force. As shown in FIG. 4, the traveling body 3 is mounted with a chuck 19 that serves as a gripping means for the workpiece W, and a direction in which the chuck 19 is moved in a direction different from the traveling direction of the traveling body 3. And the moving mechanism 20 of the up-and-down direction. The driving sources 16a' 17a' 19a (FIG. 3) of the moving mechanism 20 and the chuck 19 are electrically operated, and the power supply to the driving sources is as shown in FIG. This is shown by the non-contact powering device 41. As shown in FIG. 4, the traveling body 3 is equipped with a wireless communication means 47, and each of the electric drive sources 16a, 17a of the chuck 19 or the moving mechanism 20 is carried out based on the signal communicated by the wireless communication means 47. The command transmission means 48 for controlling the 19a is mounted on the traveling body 3. The command transmission means 48 may be a wiring for transmitting signals only between the wireless communication means 47 and the drive sources 16a, 17a, 19a. Further, the command transmission means 48 includes a signal for transmitting various types of sensors (not shown) provided in the traveling body 3 to the wiring of the wireless communication means 47 in addition to the command of the drive. The wireless communication means 47 on the traveling body 3 communicates with the wireless communication means 49a provided in the control unit 49 for controlling the entire transportation system. In addition, all of the driving sources mounted on the traveling body 3 are electrically connected, and the wirings of the respective driving sources and the ground side are connected, and the piping is completely absent. -19-201233613 According to the transport system described above, since the so-called synchronous linear motor 5 is used, it is easy to obtain a large thrust force compared to the inductive linear motor, and the traveling performance of the traveling body 3 is improved. In the synchronous type linear motor 5, since the individual motor 6 that functions as the armature of the primary side is disposed on the fixed side, and the rotor 7 on the secondary side is provided on the traveling body, it is not necessary to supply the traveling body 3 with walking. The current used for driving. As described above, as long as the non-contact power feeding device 41 is used, the handling system can be realized even if the moving body has a motor. However, when the motor is provided with the motor, there is a problem that the capacity of the power supply is increased. Therefore, there is an advantage that the individual motor 6 is disposed on the ground side, and the ferromagnetic body 4K is provided between the adjacent individual motors 6. The path through which the magnetic flux of the individual motor 6 passes is continuously arranged, and the change in the opposing area of the individual motor 6 and the rotor 7 can be reduced, whereby the rotor 7 is transferred between the individual motors 6 The pulling force is reduced, and the deviation of the thrust of the traveling body 3 can be suppressed. Therefore, the walking of the traveling body 3 is stabilized. Since the ferromagnetic body 4K is constituted by the above-described traveling guide device 4, it is not necessary to separately provide the ferromagnetic body 4K with other components, and the existing traveling guide device 4 and the components of the ferromagnetic body 4K can be shared and transported. The composition of the system is simplified. Thereby, the manufacturing cost can be reduced. When the rotor 7 is moved across the plurality of individual motors 6 of the plurality (in this example, four) of the curved portion 4B adjacent to the plurality of individual motors 6 in the circumferential direction, the rotor 7 will be in the above-described rotor 7 The moving direction front end 'the amount of increase in the opposing area between the individual motors 6 and the rotor 7 and the opposite direction between the individual motors 6 and the rotor 7 in the moving direction rear end of the rotor 7 -20 - 201233613 The difference in area reduction is specified below the specified 値. Specifically, in the curved portion 4B, the angle between the individual motors 6 adjacent to the circumferential direction is set to a predetermined angle, and the arrangement direction L6 of each of the iron cores of the respective motors 6 is set to be relative to The wiring direction L1 of each of the motor positions of the curved portion 4B changes the position of the angle β. In this case, when the rotor 7 is transferred in the opposite direction to each of the individual motors 6 arranged in the interval, the change in the magnetoresistance to the rotor 7 can be further reduced. Thereby, the pulling force to the rotor 7 can be made smaller than in the case of Figs. 14 to 16 . In other words, the influence of the pulling force on the rotor 7 can be lowered. Therefore, in the curved portion 4, the variation in the thrust of the traveling body 3 can be suppressed, so that the rotor 7 can be stably moved, and the positioning accuracy of the rotor 7 can be improved. As described above, when the relationship of B = SP η η is formed in the straight portion 4A, the opposing area of the individual motor 6 and the rotor 7 can be made constant in the straight portion 4A. Thereby, the pulling force acting on the rotor 7 is reduced, and the variation in the thrust of the traveling body 3 can be suppressed. The ferromagnetic body 4 is disposed in such a manner that the adjacent individual motors 6 are continuously disposed to form a path 'passed by the magnetic flux of the individual motor 6 and the opposing area of the individual motor 6 and the rotor 7 is constant. The pulling force acting on the rotor 7 can be reduced, and the rotor 7 can be stably moved to improve the positioning accuracy of the rotor 7. Further, when the opposing area of the individual motor 6 and the rotor 7 changes, the magnetic resistance changes and the magnetic energy changes. Since the rotor 7 is intended to stop the position where the magnetic energy is stabilized, it takes a large force to move the rotor 7 from this position. As described above, if the magnetic path of the ferromagnetic body 4Κ is provided between the individual motors 6 by making the opposing area of the individual motor 6 and the rotor 7 constant, the magnetic flux 21 - 201233613 spans the individual motor 6, The rotor 7, the adjacent individual motor 6, and the ferromagnetic body 4 顺利 smoothly flow. Therefore, the pulling force acting on the rotor 7 becomes small. Since the ferromagnetic body 4 is not provided between the individual motors 6, since there is no magnetic path flowing through the ferromagnetic body 4, the magnetic flux is released into the air. Since the magnetic resistance is large in the air, the magnetic resistance becomes large and the amount of magnetic flux is reduced. As described above, the preferred embodiments of the present invention are described with reference to the drawings, and various modifications, alterations, and deletions are possible without departing from the scope of the invention. Accordingly, these are also intended to be within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS The invention can be clearly understood from the following description of the preferred embodiments with reference to the drawings. However, the embodiments and the drawings are intended to be illustrative and illustrative, and are not intended to limit the scope of the invention. The scope of the invention is determined by the scope of the appended claims. In the drawings, the same part number of the plural drawing is the same part. Fig. 1 is a perspective view showing a processing apparatus for a conveyance system and a machine tool according to a first embodiment of the present invention. Fig. 2 is a perspective view of each unit constituting a travel guidance device of the same conveyance system. Fig. 3 is a partially omitted front view of the same processing apparatus. Figure 4 is a cutaway side view of the handling system of the same processing equipment. Fig. 5 is a plan view showing the relationship between the traveling guide device and the traveling body of the transport system. Fig. 6 is a transverse plan view showing the traveling guide device and the traveling body Β-22-201233613 of the transport system. Fig. 7 is a cross-sectional view showing a portion of Fig. 4 enlarged. Fig. 8 is a plan view showing the relationship between the traveling guide device of the transport system, the linear motor, and the traveling body. Fig. 9 is a partial cross-sectional view showing the linear motor of the driving source of the traveling body. Figure 10 is a plan view of an individual motor of the same linear motor. Figure 11 is a plan view showing the relationship between the individual motors and the traveling body. The body walking behavior is 2 3 4 11 - 1 1 Ο 〇 图 图 图 图 图 图 图 图 图 图 图 图 图 图 I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I 、 、 、 、 、 、 、 、 、 、 、 、 、 flH walks to exercise the graph by. The body image is flattened so that the line 15 is closed. 澧_a3 The picture is operated by 澧flH. The figure is 6 11. The picture is flat. ππη non-shift state spoon spoon [main symbol description] 3 : Traveling body 4 : Walking guide device 4A : Linear portion 4 B : Curved portion 4K : Ferromagnetic body 5 : Linear motor 6 : Individual motor 7 : Rotor -23-