TW201214617A - Holding apparatus and substrate breaking apparatus - Google Patents

Abstract

The present invention provides a holding apparatus capable of excellently holding a tabular workpiece in a standing gesture and a substrate breaking apparatus having the holding apparatus. The substrate breaking apparatus (1) mainly comprises a conveying unit (50), a non-contact holding unit (80), and a breaking unit (85). The immobilizing mechanism (60) of the conveying unit (50) is in contact with and the outer edge of a workpiece. The non-contact holding unit (80) is not in contact with the main surface of the workpiece. Accordingly, even if the main surface of the held workpiece is unable to be in contact with, it can also hold the workpiece very well and break the workpiece along the ruled line on the substrate at a brittle material substrate.

Description

201214617 VI. TECHNOLOGICAL FIELD OF THE INVENTION The present invention relates to a holding device for holding a flat workpiece in an upright posture and a substrate breaking device having the same. [Before Prior Art 1, a substrate breaking device is known in which a mother board formed with a scribe line is fixed in a horizontal state, and a breaking unit respectively disposed above the mother board is used to make the mother The plate is broken along the score line (for example, the patent document 1). [Prior Art Document] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-289625 [Draft of the Invention] [Problems to be Solved by the Invention] As described above, only the horizontal state will be described in the patent document. The technique of fixing the workpiece of the flat Q, and there is no relevant description of fixing the workpiece in a standing posture. As a result, if only the fixing technique of the workpiece described in the patent document is employed, there is a problem that the workpiece in the standing posture cannot be satisfactorily fixed. - Therefore, it is an object of the present invention to provide a holding device capable of maintaining a flat workpiece in an upright posture and a substrate breaking device having the same. & [Technical means for solving the problem] In order to solve the above problem, the invention described in the technique of the syllabus is the 156416.doc 201214617 holding device for holding the flat-shaped guard member in an upright posture, a holding unit 'the outer portion of the workpiece that is held in an upright position; and a non-contacting (four) holding unit that is disposed in non-contact with the holding unit to hold the workpiece held by the holding unit a main surface; and the above-mentioned non-contact holding unit includes: a mounting table that faces the holding unit in a staggered manner. ^ ^ force type is further set, and a plurality of suction portions are respectively disposed on the mounting table Above ^ ^ σ 迅 铅 铅 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , ,抖 卢 ^ 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 赞 ^ 赞 赞 赞 赞 ^ ^ ^ ^ ^ ^ The outer edge portion of the workpiece including the brittle material 枓 substrate is fixed, and the flat workpiece is fixed in a state of standing up; the non-contact misplaced i i 兀 兀 设置 兀 兀 兀 兀 兀 兀 兀 , , , , , , , , , Keeping the main surface of the above-mentioned workpiece that is kept in contact with and kept by the early element; and, breaking the 罝; the above-mentioned scribe line will be kept at the same time as the above-mentioned non-contact holding unit The above-mentioned non-contact holding unit is in a state of being held, and the 'non-contact holding unit includes: a mounting table' which is disposed so as to face the accompanying person in a staggered surface, and a plurality of first attracting portions The two parts of the long hole formed by the different sounds are disposed on the wrong side of the mounting table, and are non-contacted by the wide-angle direction of the workpiece. The state maintains the above-mentioned workpieces... The plurality of second attracting portions are straight and white. The state in which the plurality of first attracting portions are sandwiched between the two sides is set on the wrong ground of the mounting table, and is pulled upward by the opposite direction 156416.doc 201214617 Description of the workpiece Holding the workpiece in a contact state; the plurality of second suction portions are densely arranged than the second suction portion, and the breaking unit includes: a summer break bar, which is along the long hole of the mounting table One direction extension #, and the above-mentioned first hole is placed on the above-mentioned holding unit side, and the above-mentioned first unit is placed on the holding unit. The opposite side of the broken rod extends in a direction parallel to the first breaking rod; and the first and second sides are in a state in which the extending direction of the first and second dividing rods is substantially parallel to the scribe line The breaking rod is adjacent to the brittle material substrate, and the brittle material substrate is sandwiched by the i-th and second breaking bars, whereby the brittle material substrate in the standing posture is divided along the scribe line. Further, in the substrate cutting device according to the second aspect of the present invention, the first aspect of the plurality of i-th attraction portions is smaller than the first interval of the plurality of second attraction portions. The second interval between each other. Further, the substrate cutting device according to claim 2 or 3, wherein the second and second suction portions are Bernoulli Chucks [effect of the invention] According to the inventions of the first aspect to the fourth aspect, not only the outer edge portion of the workpiece can be contact-held, but also the non-contact holding unit can be used for non-contact holding of the main surface of the member. Therefore, even if the part other than the outer edge of the workpiece cannot be contacted and held by the outer edge of the workpiece, the holding unit and the non-contact holding sheet can be used by using the holding unit and the non-contact holding sheet 156416.doc 201214617 According to the invention of the second aspect to the fourth aspect, the plurality of second suction portions provided in the vicinity of the first breaking bar are arranged to be denser than the plurality of second suction portions. The workpiece in the vicinity of the first breaking bar is more reliably held in a non-contact manner. Therefore, the breaking of the brittle material substrate can be performed satisfactorily. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. 1 is a front view and a rear view showing an example of the configuration of the substrate cutting device 1 according to the embodiment of the present invention. Fig. 3 is a front view showing an example of the configuration of the workpiece 3. The substrate cutting device 1 is a device for breaking (cutting) the brittle material substrate 7 (see FIG. 3) on which the score line 8 is formed along the line m 8 . t As shown in FIG. 2, the substrate breaking device 1 main It is necessary to include posture change 兀1: main body early element 40, transport unit 50, non-contact holding unit 80, disconnect unit 85, and control unit 90. In addition, in Fig. 1 and subsequent figures, in order to clarify the square of each unit The relationship 'As appropriate, the XYZ orthogonal coordinate system in which the two-axis direction is the vertical direction and the XY plane is the horizontal plane is appropriately labeled. The unit 10 changes the posture of the flat workpiece 3 between the horizontal postures and the The posture of the standing posture = single and 'posture changing unit _ for the main unit 40 156416.doc 201214617 85 to cut the cutting piece 5, and here, the workpiece fixed on the conveying unit 5〇 and separated by the breaking unit As shown in Fig. 3, the 3 series mainly includes a cutting ring 4 and a brittle material substrate 7. The cutting ring 4 (ring body) is a flat plate formed of a metal such as stainless steel. As shown in Fig. 1 and Fig. 2, the π 'i knife cut % 4 The outer edge portion 4 is sandwiched by the fixing mechanism, whereby the workpiece 3 is fixed to the fixing mechanism 60. Further, as shown in Fig. 3, an opening b4b ° is formed near the center of the cutting ring 4 and 'cutting The outer edge portion 4a of the ring 4 is provided with a missing σ 4e. 'The position of the notch 4c is taken out to detect the rotation angle of the workpiece 3. The cut piece 5 (sheet) is attached to the opening 4b of the cutting ring 4, and the cloth 4 is attached. Moreover, the brittle material The substrate 7 is placed on the dicing sheet 5 so as to be placed on the opening. Therefore, even when the workpiece 3 is in the standing position, the brittle material substrate 7 can be reliably fixed. Here, in the present embodiment, the blade is used. 5. An adhesive sheet made of, for example, a resin may be used. The inert material substrate 7 may be formed of a substrate made of a brittle material, for example, with a glass substrate or a (four) substrate, etc. As shown in Fig. 3, formed on the brittle material substrate 7. There are a plurality of score lines 8 and a plurality of electronic parts 9. . The JJ line 8 is a cut line formed on the surface of the brittle material substrate 7 (longitudinal, 'way). Here, the score line 8 is formed by, for example, the following: a scribing wheel (Omitted from the drawing) abuts on the brittleness and the 'surface of the soil plate 7' and turns thereon to form the score line 8. And applying stress to the brittle material substrate 7 on which the plurality of scribe lines 8 are formed, the brittleit material substrate 7 is divided along each of the scribe lines 8, whereby a plurality of electronic components 9 can be obtained (for example, a plurality of liquid crystal display devices) ). 156416.doc 201214617 In addition, in the present embodiment, the main faces 3a and 3b of the workpiece 3 (and the cutting ring 4, the dicing sheet 5, and the brittle material substrate 7) are not formed with the surface of the s1] line 8. The surface on which the score line 8 is formed is referred to as a second main surface 3b. As shown in FIGS. 1 and 2, the main body unit 4 is used as a unit for the posture changing unit 10, the non-contact holding unit 80, and the breaking unit 85, and a plurality of rotary actuators (rotary actuat〇r). 41 (41a to 41c) is a fixed fixing portion. Here, each of the rotary actuators 41 (41a to 41C) rotates a shaft (rotation shaft: omitted pattern) in accordance with the supply state of the compressed air. Thereby, the levers 42 (42a to 42c) mounted on the shaft are swung and pressed against the pressing portions 63 (see Fig. 8) of the corresponding clamp portions 61 (61a to 61c). Further, the hardware configuration of the clamp portions 61 (61a to 61c) will be described below. ° The transport unit 50 is arranged to travel along the guides 43, 44 fixed to the main unit 4A. The transport unit 5 保持 holds the flat workpiece 3 in an upright posture, and moves the workpiece 3 relative to the posture changing unit ι and the main unit 4 . Here, the material of the transport unit 5 is realized by contact holding of the outer edge portion 4a of the workpiece 3. Thereby, the conveyance unit 50 not only conveys the conveyance (transfer function) to the workpiece 3, but also contacts and holds the outer edge portion of the workpiece 3 including the brittle material substrate 7: thereby, the plate can be fixed in a standing posture. Workpiece 3 (hold function). In other words, the transport unit 5 can also be used. In the present embodiment, the workpiece == unit 5 is transported. Move 1564l6.doc 201214617, but the posture changing unit 10 and the main unit 4 are still. Therefore, in the present embodiment, the posture changing unit 10 and the main unit 4 are also collectively referred to as "fixed side units". As shown in FIG. 2, the non-contact holding unit 8 is disposed to face the conveying unit 5A located at the breaking position P20, and is non-contact with respect to the workpiece 3 which is held by the fixing mechanism 60 of the conveying unit 5 to hold the outer edge portion. maintain. In this way, the transport unit 5A (holding unit) that "contacts and holds" the Q-line "contact holding" of the outer edge portion of the flat workpiece 3 in the standing posture and the "non-contact" of the first main surface 3a of the workpiece 3 are performed. The non-contact holding unit 8 that holds is configured to constitute a holding device. The breaking unit 85 divides the brittle material substrate 7 of the workpiece 3 held by the transport unit 50 along the score line 8. Here, the breaking unit applies stress to the brittle material substrate 7, and grows a vertical crack from the main surface of the brittle material substrate 7 on which the score line 8 is formed up to the main surface on the opposite side thereof, thereby making the brittleness The material substrate 7 is broken. The control unit 90 controls the operation of each element included in the posture changing unit 10, the main unit 40, the transport unit 50, the non-contact holding unit 8A, and the breaking unit, and realizes data calculation. As shown in FIG. 2 and FIG. 2, the control unit 90 mainly includes r〇m91, RAM92, and CPU93. R〇M (Read Only Memory) 91 is a so-called non-volatile memory unit, for example, a program 91a. In addition, as R〇M91, it is also possible to use a non-volatile memory that can be read and written freely, that is, a flash memory (Flash).

Memory). The RAM (Random Access Memory) 92 is a volatile memory unit, for example, the 156416.doc 201214617 material used in the calculation of the cpu93 is stored. The CPU (Central Processing Unit) 93 is controlled in accordance with the program 91a of the ROM 91 at a predetermined timing (for example, a plurality of rotary actuators 41 (41 &amp; 41) and a plurality of cylinders 37 for extrusion ( 373 to 37 (1) drive control, etc.) The detailed hardware configuration of the posture changing unit 10, the transport unit 5A, the non-contact holding unit 80, and the breaking unit 85 will be described below. 2. Configuration of the posture changing unit Fig. 4 and Fig. 5 are a side view and a plan view showing an example of the configuration of the posture changing unit 1A. Here, the posture changing unit 1 performs the posture of changing the workpiece 3 as described above. The operation and the operation of transferring the workpiece 3 to the transport unit 5A. The posture changing unit 10 mainly includes a plurality of branch buildings 11 (11 a to lid) and a plurality of positioning hands 13 (13a) as shown in Figs. 4 and 5 . 13d), the delivery unit 20, the swinging portion 30, and the pressing portion 35. The plurality of (four in the present embodiment) supporting portions 11 (11a to 11d) support the workpiece 3 that is transferred by the posture changing unit 10. As shown in FIG. 4 and FIG. 5, each support portion 11 (11 a to lid) is fixed. The position of the outer edge of the cutting ring 4 of the workpiece 3 can be supported, and the position of the lifting table 21 of the interface 20 is not disturbed. Moreover, as shown in FIG. 4 and FIG. 5, each supporting part u (iia) The top end of the ~lid) has balls 12 (12a to 12d) which are arranged to be freely rotatable. Thereby, the balls 12 (12a to 12d) can point-support the workpiece 3 and can rotate. Therefore, each support portion 11 (1) The position of the workpiece 3 supported by la~lid) can be easily and flexibly changed 156416.doc •10- 201214617. Here, the workpiece 3 supported by the plurality of support portions 11 (11 a to l 1 d) can be, for example, A robot (not shown) is transferred to the posture changing unit 1A. The worker of the substrate cutting device 1 (hereinafter also referred to simply as "worker") can also mount the workpiece 3 on a plurality of support portions. 11. Above, as shown in Fig. 4 and Fig. 5, a plurality of (four in the present embodiment) positioning fingers 13 (1; 3a to 13d) are provided adjacent to the corresponding grip claws 23 (23a to 23d). Each of the hand 13 (13 a to 13d) is along the corresponding arm 26 (26a to 26d) by a moving mechanism (omitted from the drawing) provided on the base 2A. The longitudinal direction advances and retracts. Thereby, each of the positioning hands 13 (13a to 13d) places the workpiece 3 (more specifically, in such a manner that the position of the workpiece 3 of the building supported by each of the supporting portions ii (ila~lld) is within a desired range. It is the cutting piece 5) that the outer edge portion 4a is pressed toward the center 2a of the lifting table 21. The workpiece green detecting sensor 15 detects whether or not the workpiece 3 is supported on the plurality of supporting portions 11. As shown in Fig. 5, the workpiece confirmation sensor 15 is fixed at a position adjacent to the support Q portion 11b and does not interfere with the elevating table 21 of the delivery portion 20. As the workpiece confirmation sensor 15, it is also possible to use, for example, a proximity sensor that detects the presence or absence of the workpiece 3 in a non-contact manner. The delivery portion 20 is in a horizontal posture and holds the workpiece 3 supported by a plurality of support portions. Further, the delivery unit 20 is placed between the transfer unit 50 and the workpiece 3 that is in the upright position by the swing unit 30. As shown in FIG. 4 and FIG. $, the delivery unit 20 mainly includes a lifting platform 21, a plurality of holding claws 23 (23a to 23d), a plurality of adsorption portions 25 (25a to 25 sentences, and a cylinder for handover 28° 156416.doc 201214617 As shown in Fig. 5, the elevating table 21 has a plurality of (four in the present embodiment) arms 26 (26a to 26d) extending radially outward from the center 21a. The elevating table 21 prevents the gripping claws 2 from being held. The workpiece 3 held by the adsorption unit 25 is deformed. A plurality of (four in the present embodiment) gripping claws 23 (23a to 23d) (a plurality of gripping portions) are held between the horizontal posture and the standing posture. The outer edge portion 4a of the changed workpiece 3 (more specifically, the cutting ring 4). As shown in the circle 4 and FIG. 5, each of the grip claws 23 (23a to 23d) is provided to the corresponding arm 26 (26a to 26d). In the vicinity of the top end 27 (27a to 27d), here, as shown in Fig. 4, the vicinity of the upper end of each of the positioning fingers 13 (13a to 13d) is divided into two parts (in the drawing, only the vicinity of the upper end of the positioning hand 13b). Even if the positioning fingers 13 (13a to 13d) advance and retreat in order to position the workpiece 3, the positioning hands 13 (13 &amp; ~ 13 £1) will not be associated with the corresponding gripping claws 23 (23 &amp; 23(1) and the adsorption unit 25 (25a to 25d) form interference. Further, when each positioning hand 13 (13a to 13d) is used to position the workpiece 3 in a desired range, the workpiece 3 is Each of the grip claws 23 (23a to 23d) is surrounded. A plurality of (four in the present embodiment) adsorption portions 25 (25a to 25d) are provided corresponding to the respective grip claws 23 (23a to 23d), and the workpiece 3 is sucked (more) Specifically, the outer edge portion 4a of the cutting ring 4) is cut. Therefore, after a plurality of positioning + 13 (13a to 13d) are positioned, the workpiece 3 is sucked by the plurality of adsorption portions 25 (25a to 25d), whereby The workpieces 3 supported by the support portions 11 (lla to lid) are transferred to the delivery portion 2A. Thereby, the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to Md) are gripped and the cutting ring 4 is sucked. That is, the brittle material substrate 7 is not held by the respective holding claws 1564J6.doc 12 201214617 23 (23a to 23d) and the respective adsorption portions 25 (25a to 2sd) and is adsorbed. Therefore, the delivery portion 20 and the swing portion 3 can be The workpiece 3 is held and changed in posture without affecting the score line 8 formed on the brittle material substrate 7 (refer to FIG. 3). When the delivery unit 2〇 and the transport unit 5〇 are connected to each other, the parent uses the gas rainbow 28 to move the workpiece 3 between the delivery unit and the transport unit 50. As shown in Fig. 4, the delivery cylinder 28 has a main body portion. "a and rod 29". The rod 29 is movable forward and backward with respect to the main body portion 28a. As shown in FIG. 4, the top end of the rod body 29 is fixed to the bottom surface of the lifting platform 21. Therefore, the workpiece 3 in the upright position fixed to the elevating table 21 moves between the delivery unit 20 and the transport unit 50 in accordance with the advancement or retreat of the rod body 29. The swinging portion 30 swings the delivery portion 2 around the swing shaft 31, whereby the posture of the workpiece 3 held by the delivery portion 20 is changed between the horizontal posture and the standing posture. As shown in Figs. 4 and 5, the swing portion 30 mainly has a swing shaft 31, a swing frame 32, and a swing cylinder 33. The Q swing shaft 31 serves to swing the center portion of the joint portion 20 with respect to the base portion 2a. As shown in Fig. 5, it is rotatably supported by the bearings 30a, 3 Ob (pivoting support). Further, the 'bearings 30a, 30b are fixed to the respective brackets such as the buckles ^) 3 0 c, 30 d. - The swing frame 32 is a frame formed of a plurality of (three in the present embodiment) plate bodies 32a to 32c. As shown in Fig. 5, a swing shaft 31 is fixed between the plates 32a and 32c. On the other hand, the transfer cylinder 2 is fixed to the plate body 32b. The swing cylinder 33 is a drive unit that swings the delivery unit 20. As shown in Fig. 4, 156416.doc • 13-201214617 No, the swing cylinder 33 mainly has a main body portion 33a and a rod body 34. As shown in Figs. 4 and 5, the top end 34a of the rod body 34 can be opposite to the main body portion 33a. And advance and retreat. The main body portion 33a is fixed to the base portion 20a of the interface portion 20, and is fixed to the plate body 32a of the swing frame 32. Therefore, when the rod body 34 advances from the main body portion (9), the workpiece 3 held by the grip claw 23 and the suction portion 25 The posture changes from a horizontal posture to a standing posture. On the other hand, when the rod 34 retreats toward the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the standing posture to the horizontal posture. The pressing portion 35 adjusts the load applied to the workpiece 3 by the fixing mechanism 6 of the conveying unit 5A. II, the gj fixing mechanism 6 performs an operation of fixing the workpiece 3 to which the self-joining unit 20 is transferred to the transport unit 5, and an operation of releasing the fixed state of the workpiece 3. As shown in Figs. 4 and 5, the pressing portion 35 mainly includes a mounting frame 35&, a plurality of brackets 36 (36a to 36d), and a plurality of pressing cylinders 37 (37a to 37d). The t-frame 35a and the plurality of brackets 36 (36a to 36d) are used to fix a plurality of pressing cylinders 37 (37a to 37d) to the posture changing unit 1 as shown in Figs. 2 and 4, and the mounting frame 35a is frame-shaped and fixed to the base 2〇a. Further, as shown in FIG. 2, a plurality of (four in the present embodiment) brackets 36 (36 & 〜36 are from the transport direction of the transport unit 5 in the vertical direction of the mounting frame 35a (in the direction of the arrow AR1) The plurality of pressing cylinders 37 (37a to 37d) are respectively compressed for the corresponding urging members 73 (73a to 73d with reference to Fig. 7). As shown in Figs. 4 and 5, the respective squeezing cylinders are used. 37 (37a to 3 7d) mainly includes a plurality of rods 38 (38a to 38d) and a plurality of rollers 156416.doc -14-201214617, a plurality of rollers 39 (39a to 39d). A plurality of (four in the present embodiment) rods The bodies 38 (38a to 38d) are each movable forward and backward in the direction of the arrow AR2, and 'the corresponding rollers 39 (39a to 39d) are attached to the tips of the respective rods 38 (38a to 38d). 38a to 38d) When advancing, each of the biasing members 73 (73a to 73d' with reference to Fig. 7) is pressed against the corresponding roller 39 (39a to 39d), whereby each of the biasing members 73 (7: 3a to 73d) is On the other hand, when each of the rods 38 (38a to 38d) retreats, the respective urging members 73 (73a to 73d, see Fig. 7) are separated from the corresponding rollers 39 (39a to 39d). Force member 73 ( The compressed state of 73a to 73d) is released. A plurality of (four in the present embodiment) rollers 39 (39a to 39d) are each provided with a rotating body provided at the tip end of the corresponding rod 38 (38a to 38d). As shown in Fig. 5, each of the rollers 39 (39a to 39d) is rotatable about a rotation axis extending in the vertical direction (a direction substantially parallel to the z-axis: a direction substantially perpendicular to the direction of the arrow AR1). When the rollers 39 (39a to 39d) are pressed against the corresponding urging members 73 (73a to 73d), when the transport unit 5 moves in the transport direction (arrow AR1 direction), each roller 39 (3% to 39) (1) The following operations are performed: The respective rollers 39 compress the corresponding urging members 73 (73a to 73 sentences) and rotate them along the transport direction on the corresponding urging members 73 (73a to 73d). 50忐 maintains the compressed state by the respective rollers 39 (39a to 39d), and moves in the transport direction. As a result, even when the transport unit moves 701 (3 and the main unit 40 (fixed side unit) with respect to the posture change, The workpiece 3 is maintained in a fixed release state. 156416.doc •15·201214617 &lt;3·Transport unit Fig. 6 and Fig. 7 are a front view and a rear view showing an example of the configuration of the transport unit 5, and Fig. 8 is a front view showing an example of the configuration of the movable clamp unit 61 (61 a to 61 c). Figure. Figure 9 is a cross-sectional view of the guide pawl 69 (near the phantom) seen from the line V_V of Figure 8. Figure 10 is a cross-sectional view of the vicinity of the guide pawl 69 (69 &lt; 1) seen from the w_w line of Figure 7. The conveying unit 50 is in contact with the outer edge portion 4a of the holding workpiece 3, and between the transfer position ρι〇 at which the transfer and reception of the workpiece 3 is performed, and the breaking position P2〇 by the breaking unit to break the brittle material substrate 7 The workpiece 3 in the standing position is conveyed. Thereby, the installation area of the transport unit 5 including the transport path (that is, the size of the moving area of the transport unit 50) can be suppressed. Therefore, the substrate breaking device 1 can be reduced. As shown in Fig. 6 and Fig. 7, the transport unit 5A mainly includes a fixed base 51 and a rotary table 52. Here, the transport unit 5〇 in the present embodiment is provided, for example, by a linear motor not shown. The movement is performed with respect to the posture changing unit 1 , the main body unit 40 , and the non-contact holding unit 8 , etc. The rotating table 52 is a hard turning portion of the circle that rotates with respect to the fixed joint 51 - as shown in FIGS. 6 and 7 . The rotary table 52 is freely roll-fittingly embedded in the circular shape formed on the fixed table In the hole 51a, the rotating table "and the fixing mechanism 6" for fixing the workpiece 3. The configuration of the fixing mechanism 6' is described below. The fixing port 51 is used, for example, for rotating The rotating rotator and the mounting portion for mounting the fixed table 51 and the rotating table 52 with respect to the traveling elements of the main unit row 156416.doc -16 - 201214617. As shown in Figures 6 and 7, the fixed table 51 is mainly A guide block 55, a motor 56, and a belt 57 are included. As shown in Fig. 6, a plurality of (six in the present embodiment) guide blocks 55 are provided on the front surface 51b of the fixed table 51. The inside of the guide block 55 is provided with a plurality of rotatable balls (omitted from the drawing), and when the guide blocks 55 are mounted on the corresponding guides 43, 44, the balls in the respective guide blocks 55 (omitted from the drawing) Rotating with the corresponding guides 43, 44 in a rotatable state. Accordingly, if each of the guide blocks 55 moves along the corresponding guides 43, 44 (i.e., along the transport direction (arrow AR1 direction)), Then, the balls (omitted from the drawings) in the guide blocks 55 are on the corresponding guides 43, 44. Therefore, the fixing table 5j can smoothly travel along the guides 43, 44. The motor 56 is a driving portion that applies a rotational force to the rotating table 52. The belt 57 transmits the rotational force applied by the motor 56 to the rotating table 52. As shown in Fig. 6, the belt 57 is wound around the turntable 52 and the motor pulley 58 attached to the top end of the motor shaft 5a. Thus, when the motor 56 rotates, the workpiece 3 fixed to the fixing mechanism 60 rotates. The tension adjusting pulley 59 adjusts the tension applied to the belt 57. In the present embodiment, the position of the tension adjusting pulley 59 (for example, the position in the two-axis direction) is adjusted by a positioning mechanism (not shown). Thereby, it is easy to eliminate the looseness of the belt 57 and it is easy to adjust the tension of the belt 57. Therefore, the rotary table 52 can be maintained in a good rotation state. &lt;3.1. Configuration of Fixing Mechanism&gt; The fixing mechanism 60 fixes the flat workpiece 3 in the standing posture. As shown in Fig. 7, the fixing mechanism 6 〇 mainly includes a plurality of clamping portions called ～6(4), 156416.doc • 17. 201214617 62 and a plurality of pressing portions 71. The plurality of clamp portions 61 (61a to 61c) and 62 sandwich the outer edge portion 4a of the workpiece 3 disposed between the clamp portion and the pressing portion 71. As shown in Fig. 7, a plurality of clamp portions 6 1 (6 1 a to 61 c) and 62 are provided along the press frame 72. In the following description, the clamp portion denoted by reference numeral 61 (61a to 61c) is referred to as a "movable clamp portion", and the clamp portion denoted by reference numeral 62 is referred to as a "fixed clamp portion". That is, the plurality of clamp portions include a plurality of movable clamp portions 61 (61a to 61c) and a fixed clamp portion 62. In other words, one of the plurality of clamp portions is "a plurality of movable clamp portions 6 1 (6 1 a to 61 c), and the remaining portions are fixed clamp portions 62 ° plural (in this embodiment Each of the three movable gripping portions 6丨 (6 a to 6丨c) advances and retreats in a direction toward or away from the pressing frame 72. As shown in FIGS. 7 and 8, each of the movable clamp portions 6 1 (6 1 a to 61 c) mainly includes a pressing portion 63, a rolling plate 64, a biasing member 66, and a movable guide 67 (67a to 67c). And the guide claws 69 (69a to 69c), where the movable clamp portions 61a to 61c have the same hard body configuration. The following is a description of only the hardware configuration of the movable clamp portion 61a. The pressing portion 63 is, for example, a spherical body formed of metal, and is attached to the rolling plate 64. The rolling plate 64 is a plate body that is rolled around the rolling shaft 64a. For example, the rocker 42 (42a) of the suspected actuator 41 (41a) (see Figs. 1 and 2) swings the right rocker 42 (42a) against the corresponding clamp portion 61 (61a). In the pressing portion 63', the rolling plate 64 rolls in the direction of the arrow R1 around the rolling axis 64a. 156416.doc -18· 201214617 The link 65 is a plate body that connects the rolling plate 64 and the movable guide 67 (67a) to have a narrow width. One end of the link 65 is connected to the rolling plate 65a by the rolling shaft 65a, and the other end of the connecting cup 65 is coupled to the movable guide 67 (67a) by the rolling shaft 65b. The urging member 66 is formed of an elastic member such as a magazine. As shown in Fig. 8, one end 66a of the force applying member 66 is fixed to the above-mentioned rolling plate of the movable side, and the other end 66b of the urging member 66 is fixed to the reinforcing plate 64b of the fixed side. Thereby, when the 0 rolling plate 64 rolls in the direction of the arrow R1, the urging member 66 urges the rolling plate 64 in a direction opposite to the direction of the arrow R1. The movable guide 67 (67a) is a flat movable member. The movable guide 67 advances and retreats in a direction approaching or separating from the pressing frame 72, thereby adjusting the fixing state of the workpiece 3. That is, the rocker 42 (42a) is swung by the rotary actuator 41 (41a), and when the rolling plate 64 rolls in the direction of the arrow R1, the movable guide 67 (67a) moves in the direction away from the pressing frame 72. . Thereby, the movable guide 67 (67a) is in the state in which the Q position is released. On the other hand, the rocker 42 (42a) is returned to the position before the swing by the rotary actuator 41 (41a), and the rolling plate is rolled in the opposite direction to the arrow R1 by the urging force of the urging member 66. Then, the movable guide 67 (67a) moves in a direction approaching the pressing frame 72. Thereby, the movable guide 67 (6?a) is in a state in which the workpiece 3 can be clamped between the movable guide 67 and the pressing frame 72. In this way, the plurality of rotary actuators 41 (41a to 4lc) provided in the main body unit 40 function as a driving portion (the [drive portion]), and a part of the plurality of clamp portions 61 (61a to 61c), 62 (A plurality of movable clamp portions 61 &amp; 勹 61 勹 156416.doc -19 - 201214617 advancing and retreating in the direction of approaching or separating from the squeezing frame 72. The ♦ ♦ mouth 6 〇 a of the Figure 8 is formed in the movable guide π The recessed portion on the side of the pressing frame η. Here, when the workpiece 3 is pulled between the delivery portion 20 of the posture changing unit 1G and the conveying unit 50, the 4ro 4 glock and the gripping claw 23 (23a) can be disposed by The space formed by the notch 6〇a (for example, the gap 75 (75a)) (refer to _, and FIG. 9 to FIG. 13). Therefore, it can be effectively prevented when the stalker 1 is removed. The grip claw 23 (23a) interferes with the movable guide 67 (67a). A plurality of (two in the present embodiment) guide claws 69 (69a) are combined with the movable guide 67 (67a) and the squeezing frame 72. The workpiece 69 (69a) is mounted on the movable guide 67 (67a) in such a manner as to be separated in the direction of the contour line of the opposing extrusion (four) as shown in Fig. 8. Further, as shown in Fig. The guide claw 69 (69a) is attached to the movable guide 67 in such a manner that the step surface 6〇b of the guide claw 69 (69a) is located below the lower end surface 6〇c of the movable guide 67 (6 to). (67a). Therefore, as shown in Fig. 9, by the lower end face 6〇c of the movable guide 67 (67a), the step surface 60b of the guide claw 69 (69a), and the opposing direction of the press frame 72 The surface 60d is in contact with the workpiece 3, and the movable clamp portion 61 (61a) and the pressing portion η can be sandwiched between the workpieces 3. As shown in Fig. 7, the fixed clamp portion 62 is fixed to the vicinity of the crush frame 72. No, the fixed clamp portion 62 mainly includes a fixed guide 68 and a guide claw 69 (69d). The fixed guide 68 is a flat fixed member, that is, different from the movable guide 67 (67a to 67c), the fixed guide The member 68 is not fixed in the direction of approaching or separating from the pressing frame 72 but is fixed to the rotary table 52. I56416.doc -20-201214617 Thereby, the position of the fixed clamp portion 62 can be easily used as a reference. The workpiece 3 is positioned relative to the fixing mechanism 60. Therefore, by using the plurality of movable clamp portions 61 (61a to 61c) and the fixed clamp portion 62, the clamping and clamping of the workpiece 3 can be satisfactorily performed. As shown in Fig. 7, the notch 68a is formed in a recess on the side of the pressing frame 72 of the fixed guide 68. Here, when the workpiece 3 is transferred between the transfer portion 2A of the posture changing unit 1 and the transport unit 50, the grip claw is held. 23 (23d) can be disposed in a space formed by the notch 0 68a (for example, the gap 75 (75d)) (refer to FIG. 7 and FIG. 11 to FIG. 13). Therefore, when the workpiece 3 is delivered, it is possible to effectively prevent the grip claws 23 (23d) from interfering with the fixed guides 68. A plurality of (two in the present embodiment) guide claws 69 (69d) are combined with the fixed guide 68 and the pressing frame 72 to sandwich the workpiece 3. As shown in Fig. 7, the guide claws 69 (69d) are attached to the fixed guides 68 so as to be separated in the direction along the contour line of the opposing pressing frame 72. Further, as shown in FIG. 1A, the guide claw 69 (69d) is mounted such that the step surface 60b of the guiding claw 69 (69d) is closer to the side of the pressing frame 72 than the side end surface 68b of the fixed guide μ. On the fixed guide 68. Therefore, as shown in Fig. 9, by fixing the side end surface 68b of the fixed guide 68, the step surface 60b of the guiding claw 69 (69d), and the facing surface 60d of the pressing frame 72 to the workpiece 3, it can be fixed. The clamp portion 62 and the pressing portion 71 sandwich the workpiece 3. The pressing portion 71 sandwiches the workpiece 3 between the movable clamp portions 01 (61a to 61c) and the fixed clamp portion 62, thereby pressing the outer edge portion of the workpiece 3. As shown in Fig. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of urging members 73 (73a to 73d). As shown in Figs. 6 and 7, the pressing frame 72 is annular (more specifically, rectangular 156416.doc • 21 · 201214617 annular) and is mounted near the center of the rotary table 52. As shown in FIG. 9 and FIG. 1A, the pressing frame 72 presses the outer edge portion 4a of the workpiece 3 from the second main surface of the workpiece 3 to a plurality of (four in the present embodiment) biasing members 73 ( 73a to 73d) are formed of an elastic member such as a spring. As shown in Fig. 7, each of the urging members 73 (73a to 7) is connected to a corresponding corner of the four corners of the pressing frame 72. Here, if each of the urging members 73 (73a to 73d) is self-corresponding The pressing cylinders 37 (37a to 37d) owe the force in the direction from the surface of the paper surface of Fig. 7 toward the back surface (i.e., the direction opposite to the direction of the arrow AR2) (see Figs. 4 and 5). The force members 73 (73a to 73d) are compressed. That is, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 serve as driving portions for imparting a compressive force to the corresponding urging members 73 (73a to 73 sentences ( On the other hand, if the rod 38 (3仏 to 38(1) is retracted and the roller 39 (3 such as ～39d) is separated from the corresponding urging member 73 (73a to 73d), each application is performed. The force members 73 (73a to 73d) apply a biasing force in the direction of the arrow AR2 (the direction of the biasing force) to the pressing frame π. Thereby, the workpiece 3 receives the force from the respective biasing members 73 (73a to 73d). The movable clamp portion 61 (61a to 61c), the fixed clamp portion 62, and the crush frame 72 are sandwiched. As a result, the workpiece 3 is fixed to the fixing mechanism 6A. Thus, the workpiece 3 on the fixing mechanism 60 is fixed. State by posture Further, the cylinders 37 (37a to 37d) for extrusion (the second drive unit) of the unit 10 and the rotary actuators 41 (41 a to 41c) (the first drive unit) of the main unit 40 are adjusted. The fixing of the workpiece 3 to be transported is performed by the fixing mechanism 60 of the transport unit 5, the cylinders 37 (37a to 37d) for extrusion of the posture changing unit 10, the 156416.doc -22-201214617, and the rotary unit of the main unit 40. In the present embodiment, the posture changing unit j 〇40 and the transport unit 50 are collectively referred to as a "transport system". <3.2. Method of fixing a workpiece> Fig. 11 13 is a rear view for explaining a fixing step and a fixing releasing step of the workpiece 3 by the fixing mechanism 6. Here, a description will be given of a step of fixing the workpiece 3 in the standing position = to the fixing mechanism 60.

Further, the fixing step is realized by the control unit 9 controlling the operation of each element included in the posture changing unit 1A, the main body unit 40, and the transport unit 50. Further, before the start of the formal fixing step, the transport unit is enabled. The movement is moved to the release position P11 of the delivery position P10 (see FIG. 2), and the workpiece 3 is suction-held by each adsorption unit 25 (25a to 25d). In the formal fixing step, first, the transfer portion 2 is moved (oscillated) by the swing portion 3?. Thereby, the workpiece 3 held by the delivery unit 2 is in the standing posture Q and moved to the vicinity of the fixing mechanism 6A of the transport unit 50. Next, a plurality of rotary actuators 41 (41a to 41C) (see Fig. 2) provided in the main unit 40 are operated, and the respective rockers 42 (42a to 42c) are swung. Thereby, the movable guides 67 (67a to 67c) of the movable clamp portions 61 (61 a to 61c) are moved in the direction separating from the pressing frame 72. Then, a plurality of pressing cylinders 37 (37a to 37d) are operated to allow the respective rods 38 (38a to 38d) to enter from the cylinder main body. Thereby, each of the biasing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (39a to 39d), and the pressing frame 72 is biased toward the biasing members 73 (73a to 73d) ( Arrow AR2 direction) The opposite side 156416.doc -23- 201214617 Move to the side. Next, the transport unit 50 is moved from the release position P11 of the delivery position P10 to the fixed position P12 (see FIGS. 1 and 2). Thereby, the parental child 39 at the top is placed on the corresponding application 73 (73a to 73d). The compression is performed and rotated on the urging member 73 (73 &amp;~7). Therefore, the transport unit 50 moves in the transport direction in a state where the press frame 72 and the workpiece 3 are separated. Further, in a state where the pressing frame 72 and the workpiece 3 are separated, the outer edge portion 4a of the workpiece 3 is pressed against the side end surface 68b of the fixed guide Μ (Fig. 1 〇). Then, in a state where the outer edge portion of the workpiece 3 is pressed against the side end surface 68b (Fig. 10) of the fixed guide 68, the rotary actuator 41 (41a to 4i) is operated to make the corresponding rocker 42 ( 42a to 42c) return to the position before the swing. Thereby, the movable guides 67 (67a to 67c) of the movable clamp portions 61 (6la to 6lc) move in the direction toward the pressing frame 72. Therefore, the workpiece 3 The outer edge portion 乜 is pressed against each of the movable guides 67 (67a to 67c). Then, the movable clamp portions 61 (61a to 61c) and the fixed clamp portion 62 are pressed against the outer edge portion 4a of the workpiece 3. In the state, each of the pressing cylinders 37 (37a to 37d) is operated to retract each of the rods 38 (38a to 38d). Thereby, the respective cylinders 37 (37a to 3d) for pressing are not applied to the respective cylinders 37a to 38d. The compressing force of the urging members 73 (73a to 73d) causes the pressing frame 72 to move in the biasing direction of each of the urging members 73. Further, as shown in Figs. 9 and 1B, the movable guides 67 (67a to 67c) The distance between the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is short. Therefore, the workpiece 3 is sandwiched between the movable clamping portion 6 1 (61 a to 61 c) and the fixed clamping portion 156416. Doc -24- 201214617 62' and the pressing portion 71, The workpiece 3 in the upright position is fixed by the fixing mechanism 6. That is, according to the formal fixing step, the workpiece 3 in the upright posture can be well fixed to the fixing mechanism 6〇. Next, the workpiece 3 is fixed by the fixing mechanism. In the state where the crucible is fixed, the adsorption state of each of the adsorption portions 25 (25a to 25d) is released. Thereby, the holding state of the workpiece 3 by the delivery portion 2 is released, and the fixing step of the workpiece 3 is completed. &lt;3·3 _Removal of the workpiece fixing method&gt; Here, with reference to Fig. 11 to Fig. 13, the procedure of releasing the fixed state of the workpiece 3 by the fixing mechanism 6〇 fixed to the workpiece 3 will be described. The steps are the same as the fixing step of the workpiece 3, and the control unit 90 controls the operations of the elements included in the posture changing unit 1〇, the main unit 4〇, and the transport unit 5〇. Before the release step, the transport unit 50 moves to the fixed position ρ 丨 2 of the delivery position Ρ 10 (see FIG. 2 ), and the workpiece 3 is fixed by the fixing mechanism 60. In the formal release step, 'firstly, the fixed mechanism 6 〇 is fixed. The workpiece 3 is sucked by each of the adsorption portions 25 (25a to 25d), whereby the workpiece 3 is held by the delivery portion 2 in a state of being fixed to the fixing mechanism 60. Then, 'in the plurality of movable clamp portions 61 (61 a~) 61 c) and the fixed clamp portion 62 is pressed against the outer edge portion 4a of the workpiece 3, and a plurality of squeeze cylinders 37 (37a to 37d) (second drive portions) are operated, and each of the rods 38 (38a~) 38d) Advance from the cylinder body. Thereby, the respective urging members 73 (73a to 73d) are compressed by the corresponding rollers 39 (39a to 39d) 156416.doc -25 - 201214617, and the pressing frame 72 is applied to the respective urging members 73 (73a to 73d). The force direction (arrow AR2 direction) moves in the opposite direction. Further, as shown in Figs. 9 and 1B, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is large. Therefore, the fixing mechanism 60 releases the fixing of the workpiece 3 in the standing posture, and the workpiece 3 is sucked and held by the respective suction portions 25 (25a to 25d) of the delivery portion 20. Thereby, the respective pressing cylinders 37 (37a to 37d) of the pressing portion 35 compress the respective biasing members 73 (73a to 73d), whereby the fixed state of the workpiece 3 can be released. Then, in a state in which the plurality of movable clamp portions 61 (6 1 a to 6 1 c) and the fixed clamp portion 62 are pressed against the outer edge portion 4a of the workpiece 3, a plurality of rotary actuators 41 (41a) are caused. ～4lc) (i-th drive unit) operates to swing each of the rockers 42 (42a to 42c). Thereby, the movable guides 67 (67a to 67c) of the movable clamp portions 61 (6 la to 61c) move in a direction separating from the pressing frame 72. Next, the transport unit 50 is moved from the fixed position ρι 2 of the delivery position pi 至 to the release position pi (see Figs. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the top end of each of the pressing cylinders 37 (37a to 37d) compress the respective urging members 73 (73a to 73d), and at the urging members 73 (73 & Therefore, the conveying unit 50 moves in the conveying direction in a state where the pressing frame 72 is separated from the workpiece 3. Further, the outer edge of the workpiece 3 is separated from the center of the crushing frame 72 and the workpiece 3. The portion 4a and the side end surface 68b (Fig.) of the fixed guide 68 are separated from each other, and the fixed state of the workpiece 3 fixed to the fixing mechanism 60 can be satisfactorily released according to the formal release step. Then, the swing portion 30 is used. The interface 2 is moved (oscillated), whereby the workpiece 3 held by the 156416.doc -26-201214617 interface 20 is separated from the fixing mechanism 60 of the transport unit 50. Further, after the workpiece 3 is separated from the fixing mechanism 60, The rods 38 (38a to 38d) of the plurality of pressing cylinders 37 (37a to 37d) are retracted, whereby the pressing frame 72 is moved in the biasing direction (in the direction of the arrow AR2), and the fixing of the workpiece 3 is released. &lt;4. Configuration of Non-contact Holding Unit&gt; Fig. 14 shows the structure of the non-contact holding unit 8 A front view of one example. 0 Here, the non-contact holding unit 80 assists non-contact holding of the first main surface 3a of the workpiece 3 that is held and held by the transport unit 50 in the above-described manner. As shown in FIG. The non-contact holding unit mainly includes a mounting table μ, a plurality of first attracting portions 83, and a plurality of second attracting portions 84. Here, in the present embodiment, the "first attracting portion" indicated by reference numeral 83 is also The "second attraction portion 84" indicated by reference numeral 84 is collectively referred to as a "suction portion". That is, the plurality of suction portions include a plurality of first suction portions 83 and a plurality of second suction portions 84. The Q mounting table 81 is set to The transport unit 50 that has traveled to the breaking position P20 is opposed to each other. As shown in Fig. 2, the mounting base 81 is fixed to the main body unit 4, and as shown in Figs. 1 and 14, the vertical surface 81a of the mounting base 81 is used. The mounting surface of the plurality of first suction portions 83 and the plurality of second suction portions 84 is mounted. The insertion hole 81 b is formed in the mounting hole 81 in the vertical direction (the through hole extending in the direction parallel to the z-axis). Near the center, the first branch bar 86 passes through the insertion hole 81 b and reaches the first of the workpiece 3 As shown in Fig. 1 and Fig. 14, a plurality of suction portions (a plurality of second suction portions 83 and a plurality of second suction portions 84) are provided on the offset surface 8ia of the mounting table 81. 156416.doc - 27-201214617 A plurality of suction portions are brought closer to the i-th main surface 3& of the workpiece 3 which is in a standing posture, whereby the workpiece 3 is held in a non-contact state. Here, in the present embodiment, 'as a plurality of A Bernoulli chuck can also be used for the first suction portion 83 and the plurality of second suction portions 84. As shown in FIG. 14, a plurality of (12 in the present embodiment) i-th attraction portions 83 are provided on the mounting table in a state along both sides in the longitudinal direction of the insertion hole 8 1 b formed in the mounting table 81. The wrong side of 81 is 81 a. Each of the first suction portions 83 is constituted by, for example, a Bernoulli chuck. Thereby, each of the first suction portions 83 pulls the workpiece 3 toward each other, whereby the workpiece 3 can be held in a non-contact state. As shown in FIG. 14, a plurality of (12 in the present embodiment) second suction portions 84 are provided on the vertical surface 81a of the mounting table 81 in a state in which a plurality of first suction portions 83 are sandwiched from both sides. . Similarly to the first suction portion 83, each of the second suction portions 84 is constituted by, for example, a Bernoulli chuck. Thereby, similarly to the first suction portion 83, each of the second suction portions 84 draws the workpiece 3 facing each other, whereby the workpiece 3 can be held in a non-contact state. Here, as shown in Fig. 14, the diameter of each of the first suction portions 83 is smaller than the diameter of each of the second suction portions 84. Further, as shown in FIG. 14, the interval D1 (first interval) between the adjacent ones of the plurality of first suction portions 83 is smaller than the interval D2 between the adjacent members of the plurality of second suction portions 84 (second interval) ). Thereby, the plurality of first suction portions 83 are arranged more densely than the plurality of second suction portions 84. Thereby, the workpiece 3 in the vicinity of the insertion hole 8 1 b (in other words, the workpiece 3 in the vicinity of the first breaking bar 86) can be more reliably held. Therefore, the brittle material substrate 7 can be well separated. &lt;5. Configuration of the breaking unit&gt; 156416.doc -28·201214617 Fig. 5 is a plan view showing an example of the configuration of the breaking unit 85. Here, the breaking unit 85 divides the brittle material substrate 7 in a state of being held by the conveying unit 50 and the non-contact holding unit 8A along the score line 8. As shown in Fig. 15, the breaking unit 85 mainly includes a first breaking bar 86 and a plurality of second breaking bars 87. The first branching bar 86 advances and retreats in such a manner as to reach the side of the transport unit 5 through the insertion hole 8lb. As shown in FIG. 14 and FIG. 15, the first breaking bar 86 is in one direction (the longitudinal direction of the insertion hole 81b: the direction of the redundant axis ◎) along the insertion hole 81b of the mounting base 81 (hereinafter, also referred to as "extension direction" ")extend. A plurality of (two in the present embodiment) second workpieces 87 sandwich the workpiece 3 held by the transport unit 50, and are disposed on the opposite side of the first breaking bar 86. Each of the second breaking bars 87 extends in a direction (z-axis direction) parallel to the second breaking bars 86. Here, as shown in Fig. 15, the plurality of second breaking bars 87 in the conveying direction (arrow AR1 direction) are disposed only by the expected distance D3. Further, as shown in Fig. 15, the second breaking bar 87, the [breaking bar 86, and the second breaking bar 87 are oriented in the direction from the self-intersecting position P10 toward the breaking position P20 (the negative direction of the Y-axis). Configure in order. Further, the first breaking bar 86 is formed on the first main surface 3&amp; side opposite to the second main surface 3b on which the score line 8 is formed (in this case, the first breaking bar 86 is pressed against the cutting piece 5). ) 'A load is applied along the score line 8. That is, the load is applied to the score line 8 from the first main surface 3a on the opposite side to the second main surface 3b on which the score line 8 is formed. Therefore, the brittle material substrate 7 can be reliably and reliably separated along the score line 8. The first advancing and retracting drive unit 86a applies a driving force to the second breaking bar %, whereby 156416.doc -29-201214617 causes the first breaking bar 86 to advance and retreat (in the direction of the arrow AR6: see the figure forward and backward. For example, 'in the In a state where the extending direction of the first breaking bar 86 is substantially parallel to the scribe line 8, the first advance/reverse driving portion 86a moves the i-th breaking bar 86 in the negative direction of the y-axis, thereby causing the i-th breaking bar 86 The second principal movement surface 87a close to the brittle material substrate 7 applies a driving force to the plurality of second breaking bars 87, thereby causing the plurality of second breaking bars 87 to advance and retreat (arrow AR6). Direction: Refer to Fig. 15) to advance and retreat. For example, in a state where the extending direction of the plurality of second breaking bars 87 is substantially parallel to the scribe line 8, the second forward/backward driving portion 87 &amp; The X-axis is moved in the positive direction, whereby the plurality of second breaking bars 87 are brought close to the second main surface 3b of the brittle material substrate 7. As described above, the first and second advancing and retracting driving units 86a and gya are used right. When the first and second breaking bars 86 and 87 are advanced and retracted, the brittle material substrate 7 is sandwiched by the first and second breaking bars 86 and 87. As a result, The brittle material substrate 7 in the standing posture is broken along the score line 8. That is, in the breaking process performed by the substrate breaking device 1, the second breaking bars 86, 87 are close to the brittle material substrate 7 The direction (advance and retreat direction (arrow AR6 direction)) is substantially perpendicular to the direction of gravity (the negative direction of the Z axis). Thereby, the influence of gravity on the first and second break bars 86 and 87 is the same. The brittle material substrate 7 is divided, and there is no need to find a method for reducing the influence of gravity on the first and second breaking bars 86, 87. &lt;6. Advantages of the substrate breaking device of the present embodiment&gt; In the substrate cutting device 1 of the present embodiment, when the brittle material substrate 7 is held on the transport unit 50 (holding unit), the first and second breaks 156416.doc -30-201214617 bars 86 and 87 are arranged. The second main surface 3a, 31) side of the brittle material substrate 7 held in the upright position is placed on the brittle material substrate, and the second and second breaking bars are different from the present embodiment. i and the second break bar are close to each other from the upper side and the lower side of the brittle material substrate. The shape is discussed. At this time, the first! - and the angle between the direction in which the second breaking bar is close to the brittle material substrate and the direction of gravity is about 〇 (deg) and 180 (deg), respectively. That is, the gravitational effects of the j-th and the second-breaking sputum rods are different. As a result, when no adjustment is made to the influence of gravity, there arises a problem that the load applied to the brittle material substrate from the i-th and second breaking bars is different. In the following, the i-th and second-breaking bars % and 87 are respectively approached from the two main faces ", 3b side of the brittle material substrate held in the standing posture, as described in the present embodiment. When the i-th and second-breaking bars %, 87 are close to the brittle material substrate 7 and the angle of gravity is about 90 degrees (deg), 重力, gravity is used for the first and second breaks. The effects of the rods 86 and 87 are the same. Therefore, the brittle material substrate 7 can be well cut off' without the need to find a method for reducing the influence of gravity on the first and second breaking bars 86, 87. In the substrate breaking device of the embodiment and the fixing mechanism 60 thereof, the outer edge portion of the workpiece 3 can be sandwiched by the movable clamp portion 61 (6) u to 6i, the fixed clamp portion 62, and the pressing portion 71. Therefore, the workpiece 3 in the standing posture can be satisfactorily fixed. In the substrate cutting device 1 and the posture changing unit 10 of the present embodiment, the fixing mechanism 6 of the conveying unit 50 is controlled by the posture changing unit (7). Fixing the workpiece 3 by the load applied by the pressing portion 35 of 156416.doc -31·201214617 In addition, the transport unit 50 does not need to perform the fixing of the workpiece 3 and the fixing of the workpiece 3, and it is not necessary to provide the piping and wiring related to the element on the moving side (the transport unit 5) 〇) is between the fixed side (for example, the posture changing unit 10, etc.) Therefore, by using the posture changing unit 1〇, the safety of the traveling unit 50 during traveling and the work efficiency of the worker during maintenance can be improved. In the transport system realized by the substrate cutting device of the present embodiment, a plurality of rotary actuators 41 (4U~) are provided from the main body unit 4 and the posture changing unit ι (fixed side unit). The driving force of the plurality of crushing cylinders 37 (373 to 37 (1) (second driving portion) is used to perform the fixing of the workpiece 3 and the fixing of the workpiece 3, that is, The transport unit 5 does not need a drive unit (i-th and second drive unit) for performing the fixed release of the workpiece 3, and it is not necessary to provide the piping and wiring related to the element on the moving side (transport unit 50) and the fixed side. (posture. change Between the element 10 and the main unit 40), it is possible to improve the safety of transporting 7L5G early during transportation and the work efficiency of the operator during maintenance. Further, the substrate breaking device of the present embodiment and the The holding device of the substrate breaking device 1 can not only utilize the fixing mechanism 60 of the conveying unit 50: the outer edge portion of the workpiece 3 is contacted and held, but also the main surface of the workpiece 3 can be utilized by the non-contact holding unit 80 (more Specifically, the second surface is called 2 contact holding. Because of the &amp;, it is impossible to contact a portion other than the outer edge portion 43 of the workpiece 3 (for example, the main faces 3a, 3b of the workpiece) due to the characteristics of the workpiece 3. When the f-shape is used, the workpiece 3 can be well held by using the transport unit % (holding unit) and the non-contact 156416.doc • 32-201214617 touch holding unit 80. &lt;7. Modifications&gt; Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications are possible. (1) In the present embodiment, the movable guides 67 (67a to 67e) and the guide claws 69 (69a to 69c) are separately configured as shown in Figs. 8 and 9, but the present invention is not limited thereto. . For example, the movable guide 67 (67a) and the guiding claw 69 (69a) may be integrally formed. (2) In the present embodiment, the case where the transport unit 5A moves with respect to the posture changing unit 10 and the main body unit 40 has been described, but the present invention is not limited thereto. For example, the posture changing unit 10 and the main body unit 4A may not move relative to the transport unit 50. As described above, as the moving state of each of the units 10, 40, and 50, it is sufficient that the transport unit 50 can be moved relative to the posture changing unit 1A and the main unit 4 (fixed side unit). Q (3) and in the present embodiment, the workpiece confirmation sensor 15 (see FIGS. 4 and 5) of the posture changing unit 10 is provided only in the vicinity of the elevation table 21, but the workpiece confirmation sensor 15 The number is not limited to this. A plurality of (2 or more) workpiece confirmation sensors 15 may be provided in the vicinity of the elevator table _. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front elevational view showing an example of a configuration of a substrate cutting device according to an embodiment of the present invention. FIG. 2 is a view showing an example of a configuration of a substrate cutting device according to an embodiment of the present invention. Fig. 3 is a front view showing an example of a configuration of a guard; Fig. 4 is a side view showing an example of a posture changing unit; Fig. 5 is a configuration of a change unit of a table FIG. 6 is a front view showing an example of a configuration of a transport unit; FIG. 7 is a rear view showing an example of a configuration of a transport unit; and FIG. 8 is a front view showing an example of a configuration of a movable clamp unit. Figure 9 is a cross-sectional view of the vicinity of the guide claw seen from the line ν_ν of Figure 8; Figure 1 is a cross-sectional view of the vicinity of the guide claw seen from the WW line of Figure 7; Figure 11 is for explaining the pair of fixing mechanisms FIG. 12 is a rear view showing a fixing step and a fixing releasing step of the fixing mechanism to the workpiece; FIG. 13 is a view for explaining a fixing step of the fixing mechanism to the workpiece and a fixing releasing step. of View; FIG. 14 are diagrams illustrating an example of a non-contact holder constituting the front of the unit; and Fig. 15 are diagrams illustrating an example of a top view of the configuration of the breaking unit. [Main component symbol description] 1 Substrate breaking device 3 Workpiece 3a, 3b Main surface 4 Cutting ring 4a Outer edge part 4b Opening 4c Notch 156416.doc -34 201214617

5 dicing sheet 7 brittle material substrate 8 scribe line 9 electronic component 10 posture changing unit ll (lla to lid) support portion 12 (12a to 12d) ball 13 (13a to 13d) positioning hand 15 workpiece confirmation sensor 20 interface 20a base 21 lifting table 21a _ heart 23 (23a to 23d) grip claws 25 (25a to 25d) suction portions 26 (26a to 26d) arms 27 (27a to 27d), 34a top 28 delivery cylinders 28a, 33a main body 29, 34, 38 (38a~38d) Rod 30 Swing portion 30a ' 30b Bearing 30c, 30d, 36 (36a to 36d) Bracket 32 Swing frame 156416.doc 35-201214617 32a~32c Plate 33 Swing cylinder 35 71 Pressing portion 35a Mounting frame 37 (37a to 37d) Extrusion cylinder 39 (39a to 39d) Roller 40 Main unit 41 (41a to 41c) Rotary actuator 42 (42a to 42c) Rocker 43 ' 44 Guide 50 Transfer unit 51 Fixing table 51a Through hole 51b Front side 52 Rotary table 55 Guide block 56 Motor 5 6a Rotary shaft 57 Belt 58 Motor pulley 60 Fixing mechanism 60a '68a Notch 60b Step surface 60d Opposite surface 156416.doc -36 - 201214617 61 Clamping part 61 a~61 c Movable clamping part 62 Fixing clamp portion 63 pressing portion 64 rolling plate 64a' 65a, 65b rolling shaft 64b reinforcing plate 65 o _ t connecting rod 66, 73 (73a to 73d) urging member 66a one end 66b the other end 67 (67a to 67c) is movable Guide member 68 fixed guide member 68b side end surface 69 (69a to 69d) guide claw 72 pressing frame 73 (73a to 73d) urging member 75 (75a to 75d) gap 80 non-contact holding unit 81 mounting table 81a, 81b Insertion hole 83 First suction portion 84 Second suction portion 85 Breaking unit 156416.doc -37- 201214617 86 First break lever 86a First forward/reverse drive unit 87 Second break lever 87a Second forward/back drive unit 90 Control unit 91 ROM 91a Program 92 RAM 93 CPU AR1, AR2, AR6, R1 Arrow D1, D2 Interval (1st and 2nd intervals) P10 Handover position Pll Release position P12 Fixed position P20 Break position 156416.doc -38-

Claims (1)

201214617 VII. Patent application scope: A holding device, characterized in that a plate-shaped workpiece includes: a flat portion that maintains a standing posture, and a holding unit that contacts the outer edge portion of the workpiece in an upright posture. And a () non-contact holding unit disposed to maintain the monofilament direction and to maintain the main surface of the workpiece held by the holding unit (4) in a non-contact manner; and the non-contact holding unit comprises: (b 1) The female niece is set in such a manner that the vertical plane faces the holding unit; and the plurality of attracting portions 'the respective history of which is placed on the above-mentioned sloping surface of the above-mentioned mounting table' The workpiece is placed in the posture, and the workpiece is held in a non-contact state. The substrate cutting device is characterized in that the brittle material substrate on which the score line is formed is separated along the above-mentioned scribe line, and comprises: (4) a holding sheet 7' which holds the brittle material substrate by contact The outer edge portion of the workpiece is fixed to the flat workpiece in a state of standing up; (b) the non-contact holding unit is disposed to face the holding unit, and the non-contact holding is maintained by the holding unit. a main surface of the workpiece; and (c) a knife breaking unit that breaks the brittle material base 156416.doc 201214617 in a state of being held by the holding unit and the non-contact holding unit along the scribe line; And the non-contact holding unit includes: (bl) a female mounting table disposed opposite to the holding unit by a vertical plane; and a plurality of i-th attracting portions of the formula (b-2), each of which is disposed along the mounting table a state in which both sides in the longitudinal direction of the formed long hole are provided on the vertical surface of the mounting table, and the workpiece is held in a non-contact state by pulling the opposing workpiece toward the workpiece; and, (b -3) a plurality of second suction portions each provided on a vertical surface of the mounting table in a state in which a plurality of first suction portions are lost from both sides, and are brought into a non-contact state by pulling the opposing workpieces toward each other Holding the workpiece; the plurality of first suction portions are arranged more densely than the second suction portion; and the breaking unit includes: (C-1) a first breaking bar that is along the long hole of the mounting table And extending in a direction to advance and retreat so as to reach the holding unit side through the long hole; and (c-2) the second breaking rod is provided on the brittle material substrate held by the holding unit The first side of the first breaking bar extends in a direction parallel to the first breaking bar; and the first one is in a state in which the extending direction of the first and second breaking bars is substantially parallel to the scribe line And the second breaking bar is close to the brittle material substrate 'the brittle material substrate is lost by the first and second breaking bars', and the brittle material substrate in the standing posture is along the above-mentioned score line Broken. The substrate breaking device according to claim 2, wherein the first interval between the adjacent ones of the plurality of first suction portions is smaller than the second interval between the adjacent ones of the plurality of second suction portions. 4. The substrate breaking device of claim 2 or 3, wherein the first and second attracting portions are Bernoulli chucks. 〇 156416.doc