TW201214033A - Photosensitive resin composition - Google Patents
Photosensitive resin composition Download PDFInfo
- Publication number
- TW201214033A TW201214033A TW100119006A TW100119006A TW201214033A TW 201214033 A TW201214033 A TW 201214033A TW 100119006 A TW100119006 A TW 100119006A TW 100119006 A TW100119006 A TW 100119006A TW 201214033 A TW201214033 A TW 201214033A
- Authority
- TW
- Taiwan
- Prior art keywords
- group
- resin composition
- compound
- mass
- photosensitive resin
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 76
- -1 cyclic ester Chemical class 0.000 claims abstract description 142
- 150000001875 compounds Chemical class 0.000 claims abstract description 93
- 229920005989 resin Polymers 0.000 claims abstract description 62
- 239000011347 resin Substances 0.000 claims abstract description 62
- 239000002904 solvent Substances 0.000 claims abstract description 51
- 239000000178 monomer Substances 0.000 claims abstract description 23
- 239000004094 surface-active agent Substances 0.000 claims abstract description 15
- 229920000642 polymer Polymers 0.000 claims abstract description 13
- 239000000126 substance Substances 0.000 claims abstract description 11
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims abstract description 6
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims abstract description 4
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 22
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 22
- 125000004432 carbon atom Chemical group C* 0.000 claims description 19
- 150000004292 cyclic ethers Chemical class 0.000 claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 239000003999 initiator Substances 0.000 claims description 5
- 229920002098 polyfluorene Polymers 0.000 claims description 5
- 229920006395 saturated elastomer Polymers 0.000 claims description 2
- 229930040373 Paraformaldehyde Natural products 0.000 claims 1
- 229920006324 polyoxymethylene Polymers 0.000 claims 1
- 239000003505 polymerization initiator Substances 0.000 abstract description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 abstract 1
- 239000002952 polymeric resin Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229920003002 synthetic resin Polymers 0.000 abstract 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 72
- 238000000576 coating method Methods 0.000 description 32
- 239000011248 coating agent Substances 0.000 description 31
- 239000000243 solution Substances 0.000 description 29
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 28
- 239000000758 substrate Substances 0.000 description 27
- 239000007787 solid Substances 0.000 description 20
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 description 19
- 125000003118 aryl group Chemical group 0.000 description 14
- 239000004973 liquid crystal related substance Substances 0.000 description 14
- 239000002253 acid Substances 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 13
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 13
- 238000006116 polymerization reaction Methods 0.000 description 12
- 238000002834 transmittance Methods 0.000 description 12
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 12
- PTJWCLYPVFJWMP-UHFFFAOYSA-N 2-[[3-hydroxy-2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)COCC(CO)(CO)CO PTJWCLYPVFJWMP-UHFFFAOYSA-N 0.000 description 11
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 11
- 238000011161 development Methods 0.000 description 11
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 11
- 125000005843 halogen group Chemical group 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 10
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 9
- IMSODMZESSGVBE-UHFFFAOYSA-N 2-Oxazoline Chemical compound C1CN=CO1 IMSODMZESSGVBE-UHFFFAOYSA-N 0.000 description 8
- 239000005977 Ethylene Substances 0.000 description 8
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- OTTZHAVKAVGASB-UHFFFAOYSA-N hept-2-ene Chemical compound CCCCC=CC OTTZHAVKAVGASB-UHFFFAOYSA-N 0.000 description 8
- 150000002430 hydrocarbons Chemical group 0.000 description 8
- 230000000977 initiatory effect Effects 0.000 description 8
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 8
- 229930195734 saturated hydrocarbon Natural products 0.000 description 8
- CBDKQYKMCICBOF-UHFFFAOYSA-N thiazoline Chemical compound C1CN=CS1 CBDKQYKMCICBOF-UHFFFAOYSA-N 0.000 description 8
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 7
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Natural products CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 7
- 241000208340 Araliaceae Species 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 7
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 7
- 235000003140 Panax quinquefolius Nutrition 0.000 description 7
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 7
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 7
- 239000007983 Tris buffer Substances 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 7
- 235000008434 ginseng Nutrition 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 7
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 7
- 229910052753 mercury Inorganic materials 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- 150000008065 acid anhydrides Chemical class 0.000 description 6
- 150000007514 bases Chemical class 0.000 description 6
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 6
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 6
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 6
- 238000004925 denaturation Methods 0.000 description 6
- 230000036425 denaturation Effects 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
- JBTWLSYIZRCDFO-UHFFFAOYSA-N ethyl methyl carbonate Chemical compound CCOC(=O)OC JBTWLSYIZRCDFO-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 5
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical group C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 235000014113 dietary fatty acids Nutrition 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000000194 fatty acid Substances 0.000 description 5
- 229930195729 fatty acid Natural products 0.000 description 5
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 5
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 5
- 239000012299 nitrogen atmosphere Substances 0.000 description 5
- 239000002736 nonionic surfactant Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 5
- 238000010992 reflux Methods 0.000 description 5
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 4
- PBNDUFBHPISRDY-UHFFFAOYSA-N 2-(3-phenylprop-2-enoxymethyl)oxirane Chemical compound C=1C=CC=CC=1C=CCOCC1CO1 PBNDUFBHPISRDY-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 4
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical group CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 4
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 229920006026 co-polymeric resin Polymers 0.000 description 4
- FWLDHHJLVGRRHD-UHFFFAOYSA-N decyl prop-2-enoate Chemical compound CCCCCCCCCCOC(=O)C=C FWLDHHJLVGRRHD-UHFFFAOYSA-N 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 150000002576 ketones Chemical class 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 239000000052 vinegar Substances 0.000 description 4
- 235000021419 vinegar Nutrition 0.000 description 4
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 description 3
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 3
- KTALPKYXQZGAEG-UHFFFAOYSA-N 2-propan-2-ylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC=C3SC2=C1 KTALPKYXQZGAEG-UHFFFAOYSA-N 0.000 description 3
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 description 3
- OXDOOCJDJVVGDT-UHFFFAOYSA-N 3-sulfonylpropanoic acid Chemical compound OC(=O)CC=S(=O)=O OXDOOCJDJVVGDT-UHFFFAOYSA-N 0.000 description 3
- IKVYHNPVKUNCJM-UHFFFAOYSA-N 4-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C(C(C)C)=CC=C2 IKVYHNPVKUNCJM-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- PCDHSSHKDZYLLI-UHFFFAOYSA-N butan-1-one Chemical compound CCC[C]=O PCDHSSHKDZYLLI-UHFFFAOYSA-N 0.000 description 3
- 150000001735 carboxylic acids Chemical class 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 210000002858 crystal cell Anatomy 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 239000003599 detergent Substances 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 3
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- QYZFTMMPKCOTAN-UHFFFAOYSA-N n-[2-(2-hydroxyethylamino)ethyl]-2-[[1-[2-(2-hydroxyethylamino)ethylamino]-2-methyl-1-oxopropan-2-yl]diazenyl]-2-methylpropanamide Chemical compound OCCNCCNC(=O)C(C)(C)N=NC(C)(C)C(=O)NCCNCCO QYZFTMMPKCOTAN-UHFFFAOYSA-N 0.000 description 3
- 125000001624 naphthyl group Chemical group 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 3
- OTLDLKLSNZMTTA-UHFFFAOYSA-N octahydro-1h-4,7-methanoindene-1,5-diyldimethanol Chemical compound C1C2C3C(CO)CCC3C1C(CO)C2 OTLDLKLSNZMTTA-UHFFFAOYSA-N 0.000 description 3
- 125000000466 oxiranyl group Chemical group 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 2
- 229940058015 1,3-butylene glycol Drugs 0.000 description 2
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- 125000004066 1-hydroxyethyl group Chemical group [H]OC([H])([*])C([H])([H])[H] 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- 125000001637 1-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C(*)=C([H])C([H])=C([H])C2=C1[H] 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- PUBNJSZGANKUGX-UHFFFAOYSA-N 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=C(C)C=C1 PUBNJSZGANKUGX-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- LAXBNTIAOJWAOP-UHFFFAOYSA-N 2-chlorobiphenyl Chemical group ClC1=CC=CC=C1C1=CC=CC=C1 LAXBNTIAOJWAOP-UHFFFAOYSA-N 0.000 description 2
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 2
- QHJIJNGGGLNBNJ-UHFFFAOYSA-N 5-ethylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CC)CC1C=C2 QHJIJNGGGLNBNJ-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
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- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 125000005448 ethoxyethyl group Chemical group [H]C([H])([H])C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 1
- HCRBXQFHJMCTLF-UHFFFAOYSA-N ethyl 2-methylbutyrate Chemical compound CCOC(=O)C(C)CC HCRBXQFHJMCTLF-UHFFFAOYSA-N 0.000 description 1
- YDMWUMUNUXUYKT-UHFFFAOYSA-N ethyl [(1-oxo-1-phenylpropan-2-ylidene)amino] carbonate Chemical compound CCOC(=O)ON=C(C)C(=O)C1=CC=CC=C1 YDMWUMUNUXUYKT-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- WHRIKZCFRVTHJH-UHFFFAOYSA-N ethylhydrazine Chemical compound CCNN WHRIKZCFRVTHJH-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- XLYMOEINVGRTEX-UHFFFAOYSA-N fumaric acid monoethyl ester Natural products CCOC(=O)C=CC(O)=O XLYMOEINVGRTEX-UHFFFAOYSA-N 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RNYJXPUAFDFIQJ-UHFFFAOYSA-N hydron;octadecan-1-amine;chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCCCC[NH3+] RNYJXPUAFDFIQJ-UHFFFAOYSA-N 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 1
- 125000004464 hydroxyphenyl group Chemical group 0.000 description 1
- JYGFTBXVXVMTGB-UHFFFAOYSA-N indolin-2-one Chemical compound C1=CC=C2NC(=O)CC2=C1 JYGFTBXVXVMTGB-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
- 229940117955 isoamyl acetate Drugs 0.000 description 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- 239000004611 light stabiliser Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- HLANOUYSOJLOPM-UHFFFAOYSA-N methoxy benzenesulfonate Chemical compound COOS(=O)(=O)C1=CC=CC=C1 HLANOUYSOJLOPM-UHFFFAOYSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000004184 methoxymethyl group Chemical group [H]C([H])([H])OC([H])([H])* 0.000 description 1
- PPFNAOBWGRMDLL-UHFFFAOYSA-N methyl 2-ethoxyacetate Chemical compound CCOCC(=O)OC PPFNAOBWGRMDLL-UHFFFAOYSA-N 0.000 description 1
- YVWPDYFVVMNWDT-UHFFFAOYSA-N methyl 2-ethoxypropanoate Chemical compound CCOC(C)C(=O)OC YVWPDYFVVMNWDT-UHFFFAOYSA-N 0.000 description 1
- AKWHOGIYEOZALP-UHFFFAOYSA-N methyl 2-methoxy-2-methylpropanoate Chemical compound COC(=O)C(C)(C)OC AKWHOGIYEOZALP-UHFFFAOYSA-N 0.000 description 1
- RIOOIQBUNJDFON-UHFFFAOYSA-N methyl 2-methylprop-2-enoate oxolane Chemical compound O1CCCC1.COC(C(=C)C)=O RIOOIQBUNJDFON-UHFFFAOYSA-N 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- 150000004702 methyl esters Chemical class 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- CWKLZLBVOJRSOM-UHFFFAOYSA-N methyl pyruvate Chemical compound COC(=O)C(C)=O CWKLZLBVOJRSOM-UHFFFAOYSA-N 0.000 description 1
- LUCXVPAZUDVVBT-UHFFFAOYSA-N methyl-[3-(2-methylphenoxy)-3-phenylpropyl]azanium;chloride Chemical compound Cl.C=1C=CC=CC=1C(CCNC)OC1=CC=CC=C1C LUCXVPAZUDVVBT-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 1
- 125000004170 methylsulfonyl group Chemical group [H]C([H])([H])S(*)(=O)=O 0.000 description 1
- 235000019837 monoammonium phosphate Nutrition 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- 235000019796 monopotassium phosphate Nutrition 0.000 description 1
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- 235000019799 monosodium phosphate Nutrition 0.000 description 1
- 229910000403 monosodium phosphate Inorganic materials 0.000 description 1
- 125000004312 morpholin-2-yl group Chemical group [H]N1C([H])([H])C([H])([H])OC([H])(*)C1([H])[H] 0.000 description 1
- GYVGXEWAOAAJEU-UHFFFAOYSA-N n,n,4-trimethylaniline Chemical compound CN(C)C1=CC=C(C)C=C1 GYVGXEWAOAAJEU-UHFFFAOYSA-N 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
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- AHHWIHXENZJRFG-UHFFFAOYSA-N oxetane Chemical compound C1COC1 AHHWIHXENZJRFG-UHFFFAOYSA-N 0.000 description 1
- 125000003544 oxime group Chemical group 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 239000013500 performance material Substances 0.000 description 1
- WLVPQQDEYVVXJF-UHFFFAOYSA-N phenyl bicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical compound C1C(C=C2)CC2C1C(=O)OC1=CC=CC=C1 WLVPQQDEYVVXJF-UHFFFAOYSA-N 0.000 description 1
- 229940049953 phenylacetate Drugs 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- 229960002635 potassium citrate Drugs 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 235000011082 potassium citrates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 229940086066 potassium hydrogencarbonate Drugs 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- CYIRLFJPTCUCJB-UHFFFAOYSA-N propyl 2-methoxypropanoate Chemical compound CCCOC(=O)C(C)OC CYIRLFJPTCUCJB-UHFFFAOYSA-N 0.000 description 1
- ILPVOWZUBFRIAX-UHFFFAOYSA-N propyl 2-oxopropanoate Chemical compound CCCOC(=O)C(C)=O ILPVOWZUBFRIAX-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- ODLMAHJVESYWTB-UHFFFAOYSA-N propylbenzene Chemical group CCCC1=CC=CC=C1 ODLMAHJVESYWTB-UHFFFAOYSA-N 0.000 description 1
- 125000004309 pyranyl group Chemical group O1C(C=CC=C1)* 0.000 description 1
- 125000003373 pyrazinyl group Chemical group 0.000 description 1
- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical group C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 description 1
- 125000000714 pyrimidinyl group Chemical group 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- RSVDRWTUCMTKBV-UHFFFAOYSA-N sbb057044 Chemical compound C12CC=CC2C2CC(OCCOC(=O)C=C)C1C2 RSVDRWTUCMTKBV-UHFFFAOYSA-N 0.000 description 1
- DCKVNWZUADLDEH-UHFFFAOYSA-N sec-butyl acetate Chemical compound CCC(C)OC(C)=O DCKVNWZUADLDEH-UHFFFAOYSA-N 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229960004599 sodium borate Drugs 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 235000011083 sodium citrates Nutrition 0.000 description 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- MWZFQMUXPSUDJQ-KVVVOXFISA-M sodium;[(z)-octadec-9-enyl] sulfate Chemical compound [Na+].CCCCCCCC\C=C/CCCCCCCCOS([O-])(=O)=O MWZFQMUXPSUDJQ-KVVVOXFISA-M 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- BZBMBZJUNPMEBD-UHFFFAOYSA-N tert-butyl bicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical compound C1C2C(C(=O)OC(C)(C)C)CC1C=C2 BZBMBZJUNPMEBD-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
- Polymerisation Methods In General (AREA)
- Graft Or Block Polymers (AREA)
Abstract
Description
201214033 六、發明說明: 【發明所屬之技術領域】 本發明關於一種感光性樹脂組成物。 【先前技術】 近年來在液晶顯示面板等領域,爲了形成感光間隙材 或保護膜,而採用感光性樹脂組成物。 像這樣的感光性樹脂組成物,例如有文獻具體記載了 一種感光性樹脂組成物,其係包含:含有來自於不飽和羧 酸及/或不飽和羧酸酐之構造單位與來自於具有環氧乙烷 基及碳-碳不飽和雙鍵的單體之構造單位之共聚物、二季 戊四醇六丙烯酸酯、光聚合起始劑及溶劑(專利文獻1) 〇 [專利文獻1]日本特開2006- 1 71 1 60號公報 【發明內容】 然而,以往文獻提出的感光性樹脂組成物中,所得到 的圖型未必具有充足的柔軟性及耐熱性。 本發明提供以下的[1]〜[5]項。 [1] 一種感光性樹脂組成物,其係含有樹脂、聚合性化合 物、光聚合起始劑、聚矽氧系界面活性劑及溶劑,且 樹脂爲加成聚合物,該加成聚合物係含有來自於選自 不飽和羧酸及不飽和羧酸酐所構成之群中至少1種之構造 單位、與來自於具有碳數2〜4之環狀醚及碳-碳不飽和雙 -5- 201214033 鍵的單體之構造單位, 聚合性化合物含有具有2個以上之以式(1)所表示 之基之化合物, 該化合物的含量爲相對於聚合性化合物合計量而言的 30質量%以上1〇〇質量%以下,201214033 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a photosensitive resin composition. [Prior Art] In recent years, in the field of liquid crystal display panels and the like, a photosensitive resin composition is used in order to form a photo-sensitive gap material or a protective film. In the photosensitive resin composition as described above, for example, a photosensitive resin composition containing a structural unit derived from an unsaturated carboxylic acid and/or an unsaturated carboxylic anhydride and having an epoxy resin is specifically described. A copolymer of a structural unit of a monomer having an alkyl group and a carbon-carbon unsaturated double bond, dipentaerythritol hexaacrylate, a photopolymerization initiator, and a solvent (Patent Document 1) 〇 [Patent Document 1] JP-A-2006- 1 In the photosensitive resin composition proposed in the prior art, the obtained pattern does not necessarily have sufficient flexibility and heat resistance. The present invention provides the following items [1] to [5]. [1] A photosensitive resin composition containing a resin, a polymerizable compound, a photopolymerization initiator, a polyoxynoxy surfactant, and a solvent, and the resin is an addition polymer, and the addition polymer contains a structural unit derived from at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides, and a cyclic ether derived from carbon atoms 2 to 4 and a carbon-carbon unsaturated double-5-201214033 bond The structural unit of the monomer, the polymerizable compound contains a compound having two or more groups represented by the formula (1), and the content of the compound is 30% by mass or more based on the total amount of the polymerizable compound. Below mass%,
[式(1)中,L1表示伸乙基或丙烷-1,2-二基,p表示 1〜20之整數]。 [2]如第[1 ]項所記載之感光性樹脂組成物,其中聚矽氧 系界面活性劑的含量爲感光性樹脂組成物中的0.0 0 0 1質 量%以上0 · 0 5質量%以下。 [3 ]如第[1 ]或[2]項所記載之感光性樹脂組成物,其中來 自於具有碳數2〜4之環狀醚及碳-碳不飽和雙鍵的單體之 構造單位的含量爲相對於樹脂中構造單位總量而言的30 莫耳%以上90莫耳%以下。 [4] —種圖型,其係使用如第[1]~[3]項中任一項所記載之 感光性樹脂組成物所形成。 [5] —種顯示裝置,其係含有如第[4]所記載之圖型。 【實施方式】 本發明之感光性樹脂組成物含有:樹脂(A )、聚合 性化合物(B )、光聚合起始劑(C )、聚矽氧系界面活 性劑(D )及溶劑(E )而構成,樹脂(A )係加成聚合物 -6 - 201214033 ,該加成聚合物含有來自於選自不飽和羧酸及不飽和羧酸 酐所構成之群中至少1種之構造單位、與來自於具有碳數 2〜4之環狀醚及碳-碳不飽和雙鍵的單體之構造單位’聚 合性化合物含有具有2個以上之以式(1)所表示之基之 化合物,該化合物的含量相對於聚合性化合物(B )的合 計量而言爲3 0質量%以上1 0 0質量%以下。此外在本說明 書之中,各成分所例示的化合物只要沒有特別註明’可單 獨使用或組合使用。[In the formula (1), L1 represents an ethyl or propane-1,2-diyl group, and p represents an integer of 1 to 20]. [2] The photosensitive resin composition according to [1], wherein the content of the polyfluorene-based surfactant is 0.000% by mass or more and 0.5% by mass or less of the photosensitive resin composition. . [3] The photosensitive resin composition according to [1] or [2], wherein the structural unit derived from a monomer having a cyclic ether having a carbon number of 2 to 4 and a carbon-carbon unsaturated double bond The content is 30 mol% or more and 90 mol% or less with respect to the total amount of the structural unit in the resin. [4] A pattern formed by using the photosensitive resin composition according to any one of [1] to [3]. [5] A display device comprising the pattern as described in [4]. [Embodiment] The photosensitive resin composition of the present invention contains a resin (A), a polymerizable compound (B), a photopolymerization initiator (C), a polyfluorene-based surfactant (D), and a solvent (E). Further, the resin (A) is an addition polymer -6 - 201214033, and the addition polymer contains at least one structural unit selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides, and The structural unit 'polymerizable compound having a cyclic ether having a carbon number of 2 to 4 and a carbon-carbon unsaturated double bond contains a compound having two or more groups represented by the formula (1), the compound The content is 30% by mass or more and 100% by mass or less based on the total amount of the polymerizable compound (B). Further, in the present specification, the compounds exemplified in the respective components may be used singly or in combination unless otherwise specified.
[式(1)中,L1表示伸乙基或丙烷-1,2-二基,p表示 1〜20之整數]。 樹脂(A)係加成聚合物,該加成聚合物係含有:來 自於選自不飽和羧酸及不飽和羧酸酐所構成之群中至少1 種(a)(以下有稱爲「( a )」的情形)之構造單位、與 來自於具有碳數2〜4之環狀醚及碳-碳不飽和雙鍵的單體 (b )(以下有稱爲「( b )」的情形)之構造單位。 本發明之感光性樹脂組成物所使用的樹脂(A)可列 舉: 樹脂(A2-1):使(〇與(b)聚合而成之共聚物、及 樹脂(A2-2):使(a) 、(b)、可與(a)及(b)共聚 合的單體(c)(但是與(a)及(b)相異,以下有稱爲 「( c )」的情形)聚合而成之共聚物》 (a)具體而言可列舉丙烯酸、甲基丙烯酸、巴豆酸 201214033 、鄰乙烯基安息香酸、間乙烯基安息香酸、對乙烯基安息 香酸等不飽和單羧酸類; 馬來酸、富馬酸、檸康酸、中康酸、伊康酸、3 -乙烯 基苯二甲酸、4-乙烯基苯二甲酸、3,4,5,6-四氫苯二甲酸 、1,2,3,6-四氫苯二甲酸、二甲基四氫苯二甲酸、1,4·環己 烯二羧酸等不飽和二羧酸類; 甲基-5-降莰烯-2,3-二羧酸、5-羧基雙環[2.2.1]庚-2-烯、5,6-二羧雙環[2.2.1]庚-2-烯、5-羧基-5-甲基雙環 [2.2.1]庚-2-烯、5-羧基-5-乙基雙環[2.2.1]庚-2-烯、5-羧 基-6_甲基雙環[2_2.1]庚-2-烯、5-羧基-6-乙基雙環[2.2.1] 庚-2-烯等含羧基的雙環不飽和化合物類; 馬來酸酐、檸康酸酐、伊康酸酐、3 -乙烯基苯二甲酸 酐、4·乙烯基苯二甲酸酐、3,4,5,6 -四氫苯二甲酸酐' 1,2,3,6-四氫苯二甲酸酐、二甲基四氫苯二甲酸酐、5,6-二 羧酸雙環[2.2.1]庚-2-烯之無水物(HIMIC Anhydride)等 不飽和二羧酸類之酐; 琥珀酸單[2-(甲基)丙烯醯氧基乙基]、苯二甲酸單 [2-(甲基)丙烯醯氧基乙基]等2價以上的多價羧酸之不 飽和單[(甲基)丙烯醯氧基烷基]酯類; 如α-(羥甲基)丙烯酸般,在相同分子中含羥基及 羧基的不飽和丙烯酸酯類等。 從共聚合反應性的觀點或鹼溶解性的觀點看來,該等 之中適合使用丙烯酸、甲基丙烯酸、馬來酸酐等。 在本說明書之中,「(甲基)丙烯酸」表示選自丙烯 -8- 201214033 酸及甲基丙烯酸所構成之群中至少1種。「(甲基)丙烯 醯基」及「(甲基)丙烯酸酯」等表記也有同樣的意思。 (b)係具有碳數2〜4之環狀醚(選自例如氧雜環丙 烷環、氧雜環丁烷環及四氫呋喃環(氧雜環戊烷環)所構 成之群中至少1種)與碳-碳不飽和雙鍵的單體,以具有 碳數2〜4之環狀醚與(甲基)丙烯醯氧基的單體爲佳。 (b)可列舉例如具有環氧乙烷基與碳-碳不飽和雙鍵 的單體(b 1 )(以下有稱爲「( b 1 )」的情形)、具有氧 雜環丁烷基與碳-碳不飽和雙鍵的單體(b2)(以下有稱 爲「(b2)」的情形)、具有四氫呋喃基與碳-碳不飽和 雙鍵的單‘體(b3 )(以下有稱爲「( b3 )」的情形)等。 (bl)可列舉具有使直鏈狀或支鏈狀不飽和脂肪族烴 環氧化之構造與碳-碳不飽和雙鍵的單體(bl-Ι)(以下 有稱爲「(bl-Ι)」的情形)、具有使環式不飽和脂肪族 烴環氧化之構造與碳-碳不飽和雙鍵的單體(bl-2 )(以 下有稱爲「( bl-2 )」的情形)。 (bl)係以具有環氧乙烷基與(甲基)丙烯醯氧基的 單體(b 1 )爲佳,以具有使環式不飽和脂肪族烴環氧化之 構造與(甲基)丙烯醯氧基的單體(bl-2)爲較佳。若爲 該等單體,則感光性樹脂組成物的保存安定性優異。 (bl-Ι)具體而言可列舉縮水甘油基(甲基)丙烯酸 酯、沒-甲基縮水甘油基(甲基)丙烯酸酯、沒-乙基縮水 甘油基(甲基)丙烯酸酯、縮水甘油基乙烯基醚、鄰乙烯 基苄基縮水甘油醚、間乙烯基乍基縮水甘油醚、對乙烯基 -9 - 201214033 苄基縮水甘油醚、〇:-甲基-鄰乙烯基苄基縮水甘油醚、 〇:-甲基-間乙烯基苄基縮水甘油醚、甲基-對乙烯基苄 基縮水甘油醚、2,3-雙(縮水甘油氧基甲基)苯乙烯、 2,4-雙(縮水甘油氧基甲基)苯乙烯、2,5-雙(縮水甘油 氧基甲基)苯乙烯、2,6-雙(縮水甘油氧基甲基)苯乙烯 、2,3,4-參(縮水甘油氧基甲基)苯乙烯、2,3,5-參(縮水 甘油氧基甲基)苯乙烯、2,3,6-參(縮水甘油氧基甲基) 苯乙烯、3,4,5-參(縮水甘油氧基甲基)苯乙烯、2,4,6-參 (縮水甘油氧基甲基)苯乙烯、日本特開平7-248625號 公報所記載之化合物等。 (bl-2)可列舉乙烯基環己烯單氧化物、ΐ,2-環氧-4-乙烯基環己烷(例如CELLOXIDE 2000; DAICEL化學工 業股份有限公司製)、甲基丙烯酸3,4-環氧環己酯(例如 CYCLMER A400 ; DAICEL化學工業股份有限公司製)、 甲基丙烯酸3,4-環氧環己基甲酯(例如€丫(:1^£11^1100 ’ DAICEL化學工業股份有限公司製)、式(I )所表示之 化合物、式(II )所表示之化合物等。[In the formula (1), L1 represents an ethyl or propane-1,2-diyl group, and p represents an integer of 1 to 20]. The resin (A) is an addition polymer containing at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic anhydrides (a) (hereinafter referred to as "(a) The structural unit of the case) and the monomer (b) derived from a cyclic ether having a carbon number of 2 to 4 and a carbon-carbon unsaturated double bond (hereinafter referred to as "(b)") Construction unit. The resin (A) used for the photosensitive resin composition of the present invention is exemplified by a resin (A2-1): a copolymer obtained by polymerizing (〇) and (A2-2): (a) ), (b), monomer (c) copolymerizable with (a) and (b) (but different from (a) and (b), and the following is called "(c)") Copolymers (a) specifically include acrylic acid, methacrylic acid, crotonic acid 201214033, o-vinyl benzoic acid, m-vinyl benzoic acid, p-vinyl benzoic acid and other unsaturated monocarboxylic acids; maleic acid , fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-vinyl phthalic acid, 4-vinyl phthalic acid, 3,4,5,6-tetrahydrophthalic acid, 1,2 , unsaturated dicarboxylic acids such as 3,6-tetrahydrophthalic acid, dimethyltetrahydrophthalic acid, 1,4·cyclohexene dicarboxylic acid; methyl-5-norbornene-2,3- Dicarboxylic acid, 5-carboxybicyclo[2.2.1]hept-2-ene, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene, 5-carboxy-5-methylbicyclo[2.2.1 Hept-2-ene, 5-carboxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-methylbicyclo[2_2.1]hept-2-ene, 5-carboxyl - a carboxyl group-containing bicyclic unsaturated compound such as 6-ethylbicyclo[2.2.1]hept-2-ene; maleic anhydride, citraconic anhydride, itaconic anhydride, 3-vinyl phthalic anhydride, 4·vinyl Phthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride' 1,2,3,6-tetrahydrophthalic anhydride, dimethyltetrahydrophthalic anhydride, 5,6-di An anhydride of an unsaturated dicarboxylic acid such as HIMIC Anhydride; succinic acid mono [2-(methyl) propylene oxiranyl], phthalic acid An unsaturated mono[(meth)acryloxyalkylalkyl] ester of a polyvalent carboxylic acid having a divalent or higher monovalent [2-(meth)acryloxyethyl] group; such as α-(hydroxymethyl) Acrylic acid, unsaturated acrylate containing a hydroxyl group and a carboxyl group in the same molecule, etc. From the viewpoint of copolymerization reactivity or alkali solubility, acrylic acid, methacrylic acid, and Malay are suitably used among these. In the present specification, "(meth)acrylic acid" means at least one selected from the group consisting of acryl-8-201214033 acid and methacrylic acid. "(Meth)acryloyl group" and "( methyl (b) is a cyclic ether having a carbon number of 2 to 4 (selected, for example, from an oxirane ring, an oxetane ring, and a tetrahydrofuran ring (oxolane ring). The monomer having at least one of the group consisting of carbon-carbon unsaturated double bonds is preferably a monomer having a cyclic ether having 2 to 4 carbon atoms and a (meth)acryloxy group. The monomer (b 1 ) having an oxirane group and a carbon-carbon unsaturated double bond (hereinafter referred to as "(b 1 )"), having an oxetane group and a carbon- a monomer having a carbon-unsaturated double bond (b2) (hereinafter referred to as "(b2)"), a single-body (b3) having a tetrahydrofuranyl group and a carbon-carbon unsaturated double bond (hereinafter referred to as "( B3)") and so on. (bl) may be a monomer (bl-Ι) having a structure in which a linear or branched unsaturated aliphatic hydrocarbon is epoxidized and a carbon-carbon unsaturated double bond (hereinafter referred to as "(bl-Ι)" In the case of a monomer (bl-2) having a structure in which a cyclic unsaturated aliphatic hydrocarbon is epoxidized and a carbon-carbon unsaturated double bond (hereinafter referred to as "(bl-2)"). (bl) is preferably a monomer (b 1 ) having an oxiranyl group and a (meth) propylene fluorenyloxy group, and having a structure for epoxidizing a cyclic unsaturated aliphatic hydrocarbon with (meth) propylene A methoxy group monomer (bl-2) is preferred. When it is such a monomer, the photosensitive resin composition is excellent in storage stability. Specific examples of (bl-Ι) include glycidyl (meth) acrylate, non-methyl glycidyl (meth) acrylate, non-ethyl glycidyl (meth) acrylate, and glycidol. Vinyl ether, o-vinylbenzyl glycidyl ether, m-vinyl decyl glycidyl ether, p-vinyl-9 - 201214033 benzyl glycidyl ether, hydrazine: -methyl-o-vinyl benzyl glycidyl ether , 〇: -methyl-m-vinylbenzyl glycidyl ether, methyl-p-vinylbenzyl glycidyl ether, 2,3-bis(glycidoxymethyl)styrene, 2,4-dual ( Glycidoxymethyl)styrene, 2,5-bis(glycidoxymethyl)styrene, 2,6-bis(glycidoxymethyl)styrene, 2,3,4-gin ( Glycidoxymethyl)styrene, 2,3,5-gin (glycidoxymethyl)styrene, 2,3,6-glucone (glycidoxymethyl)styrene, 3,4, 5- cis (glycidoxymethyl) styrene, 2,4,6-glycol (glycidoxymethyl)styrene, a compound described in JP-A-H07-248625, and the like. (bl-2), vinylcyclohexene monooxide, hydrazine, 2-epoxy-4-vinylcyclohexane (for example, CELLOXIDE 2000; manufactured by DAICEL Chemical Industry Co., Ltd.), methacrylic acid 3, 4 Epoxycyclohexyl ester (for example, CYCLMER A400; manufactured by DAICEL Chemical Industry Co., Ltd.), 3,4-epoxycyclohexylmethyl methacrylate (for example, 丫(:1^£11^1100 ' DAICEL Chemical Industry Shares A compound represented by the formula (I), a compound represented by the formula (II), and the like.
[式(I)及式(II)之中,R1及R2互相獨立表示氫原子 、或碳數1〜4之烷基,該烷基可經羥基取代, X1及X2互相獨立,表示單鍵、-r3-、*-r3-o-、irLs-、 -10- 201214033 R3表示碳數1~6之鏈烷二基, *表示與〇的鍵結鍵]。 碳數1〜4之烷基可列舉甲基、乙基、正丙基、異丙基 、正丁基、第二丁基、第三丁基等。 羥基烷基可列舉羥甲基、1-羥乙基、2-羥乙基、1-羥 丙基、2-羥丙基、3-羥丙基、1-羥基-1-甲基乙基、2-羥 基-1-甲基乙基、1-羥丁基、2-羥丁基、3-羥丁基、4-羥丁 基等。 R1及R2適合者可列舉氫原子 '甲基、羥甲基、1-羥 乙基、2-羥乙基,較佳者可列舉氫原子、甲基。 鏈烷二基可列舉亞甲基、伸乙基、丙烷-1,2-二基、丙 烷-1,3-二基、丁烷-1,4-二基、戊烷-1,5-二基、己烷-1,6- 二基等。 X1及X2適合者可列舉單鍵、亞甲基、伸乙基、*-CH2-0-(*表示與〇的鍵結鍵)基、*-CH2CH2-0-基,較 佳者可列舉單鍵、*-CH2CH2-0-基。 式(I )所表示之化合物可列舉式(1-1 )〜式(1-15 ) 所表示之化合物等。適合者可列舉式(1-1 )、式(1-3 ) 、式(1-5)、式(1-7)、式(1-9)、式(1-11)〜式(I-15 )。較佳者可列舉式(1-1 )、式(1-7 )、式(1-9 )、 式(1-15 )。 -11 - 201214033[In the formulae (I) and (II), R1 and R2 independently of each other represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and the alkyl group may be substituted by a hydroxyl group, and X1 and X2 are independent of each other, and represent a single bond, -r3-, *-r3-o-, irLs-, -10- 201214033 R3 represents an alkanediyl group having 1 to 6 carbon atoms, and * represents a bonding bond with hydrazine. Examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a n-propyl group, an isopropyl group, a n-butyl group, a second butyl group, and a third butyl group. Examples of the hydroxyalkyl group include a methylol group, a 1-hydroxyethyl group, a 2-hydroxyethyl group, a 1-hydroxypropyl group, a 2-hydroxypropyl group, a 3-hydroxypropyl group, and a 1-hydroxy-1-methylethyl group. 2-hydroxy-1-methylethyl, 1-hydroxybutyl, 2-hydroxybutyl, 3-hydroxybutyl, 4-hydroxybutyl, and the like. The R1 and R2 are preferably a hydrogen atom 'methyl group, a methylol group, a 1-hydroxyethyl group or a 2-hydroxyethyl group. Preferred examples thereof include a hydrogen atom and a methyl group. Examples of the alkanediyl group include a methylene group, an ethylidene group, a propane-1,2-diyl group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-di group. Base, hexane-1,6-diyl, and the like. Suitable examples of X1 and X2 include a single bond, a methylene group, an ethylidene group, a *-CH2-0- (* represents a bond to a fluorene bond) group, and a *-CH2CH2-0- group. Key, *-CH2CH2-0-based. The compound represented by the formula (I) may, for example, be a compound represented by the formula (1-1) to the formula (1-15). Suitable examples include formula (1-1), formula (1-3), formula (1-5), formula (1-7), formula (1-9), formula (1-11) to formula (I- 15). Preferred examples thereof are the formula (1-1), the formula (1-7), the formula (1-9), and the formula (1-15). -11 - 201214033
ο II i?ο II i?
ο II 9h3o H2C=CH-C—Ο Η2〇=ΟΗ—C一Ο—CH2 H2C=CH _C —O 一C2H4 H2C=CH-C—0-C2H4—ο ?h3o h2c=c—C-0 ch3 o I II h2c=c—c—o—ch2 H2C =C—C 一O —〇2 H4ο II 9h3o H2C=CH-C—Ο 〇2〇=ΟΗ—CΟ—CH2 H2C=CH _C —O A C2H4 H2C=CH-C—0-C2H4—ο h3o h2c=c—C-0 ch3 o I II h2c=c—c—o—ch2 H2C=C—C—O—〇2 H4
(1-13)(1-13)
o II η2ο=Π-οo II η2ο=Π-ο
H2C =CH —C —O 一C2H4—S 0 II H2〇=CH—C—O—C2H4—N H CH3o I II Η2〇=0—C一0—C2H4一S CH30 I II H2C =0 —C 一O 一C2H4—N HH2C =CH—C—O—C2H4—S 0 II H2〇=CH—C—O—C2H4—NH CH3o I II Η2〇=0—C—0—C2H4—S CH30 I II H2C =0—C—O a C2H4-NH
(1-10) ch2oh 0 I II h2c=c-c—o(1-10) ch2oh 0 I II h2c=c-c-o
CH3o I II H2〇=C—C*—O—C2H4—o c2h4oh o h2c=c-c—oCH3o I II H2〇=C—C*—O—C2H4—o c2h4oh o h2c=c-c—o
(1-15) 式(π )所表示之化合物可列舉式(II-1 )〜式(11-15 )所表示之化合物等。適合者可列舉式(II-1)、式(II-3)、式(II-5)、式(II-7)、式(II-9)、.式(11-11) 〜式(11-15)。較佳者可列舉式(II-1 )、式(II-7)、式 (II-9 )、式(II- 1 5 )。 -12- 201214033 ?H3〇 H2C:CH—C—Ο ο II H2C:CH—C—O—CH o II h2c:ch-c-o—c2h o II Η2〇:ΟΗ—C一O—CjH 广。 ch3 o I II h2c=c—c—o ch3 o H2C=C—C一O一CH ch3 o I II h2c=c—C一0—c2h4(1-15) The compound represented by the formula (π) may, for example, be a compound represented by the formula (II-1) to the formula (11-15). Suitable formulas include formula (II-1), formula (II-3), formula (II-5), formula (II-7), formula (II-9), and formula (11-11) to formula (11). -15). Preferred examples thereof are the formula (II-1), the formula (II-7), the formula (II-9), and the formula (II-15). -12- 201214033 ?H3〇 H2C:CH—C—Ο ο II H2C:CH—C—O—CH o II h2c:ch-c-o—c2h o II Η2〇:ΟΗ—C—O—CjH Wide. Ch3 o I II h2c=c—c—o ch3 o H2C=C—C—O—CH ch3 o I II h2c=c—C—0—c2h4
/ ?h30 I II H H2C=C—C—O—C2H4—N i? (II-2) H2C:CH—C—O—C2H4—s o II u H2C:CH—C—O—C2H4—N CH30 . I 11. h2c=c一c—o—c2h4—s/ ?h30 I II H H2C=C—C—O—C2H4—N i? (II-2) H2C:CH—C—O—C2H4—so II u H2C:CH—C—O—C2H4—N CH30 . I 11. h2c=c-c-o-c2h4-s
Η2〇=Π-〇 ch2oh 〇 I II H2〇=C-C一0Η2〇=Π-〇 ch2oh 〇 I II H2〇=C-C-0
h2c=c—c—o—c2h4—〇H2c=c—c—o—c2h4—〇
c2h4oh ο Η2〇=0-c 一oC2h4oh ο Η2〇=0-c one o
式(〇所表示之化合物及式(II)所表示之化合物 可各自單獨使用。另外’該等能夠以任意比率混合。在混 合的情況下’其混合比率以莫耳比計,宜爲式(1):式 (II) =5: 95〜95: 5,較佳爲1〇: 90〜90: 10,特別適合 爲 20 : 80〜80 : 20 ° (b2)係以具有氧雜環丁烷基與(甲基)丙烯醯氧基 的單體爲佳。(b2)可列舉例如3-甲基-3-甲基丙烯醯氧 基甲基氧雜環丁烷、3-甲基-3-丙烯醯氧基甲基氧雜環丁 烷、3-乙基-3-甲基丙烯醯氧基甲基氧雜環丁烷、3-乙基-3 -丙烯醯氧基甲基氧雜環丁院、3_甲基甲基丙稀醯氧基 -13- 201214033 乙基氧雜環丁烷、3-甲基-3-丙烯醯氧基乙基氧雜環丁烷 、3-乙基-3-甲基丙烯醯氧基乙基氧雜環丁烷、3-乙基- 3-丙烯醯氧基乙基氧雜環丁烷等。 (b3)係以具有四氫呋喃基與(甲基)丙烯醯氧基的 單體爲佳。 (b3 )具體而言可列舉甲基丙烯酸四氫呋喃酯(例如 Viscoat V#150,大阪有機化學工業股份有限公司製)、 甲基丙烯酸四氫呋喃甲酯等。 (c)可列舉(甲基)丙烯酸酯類、N-取代馬來醯亞 胺類、不飽和二羧酸二酯類、脂環式不飽和化合物類、苯 乙烯類、其他乙烯基化合物等。 (甲基)丙烯酸酯類可列舉(甲基)丙烯酸甲酯、( 甲基)丙烯酸乙酯、(甲基)丙烯酸正丁酯、(甲基)丙 烯酸第二丁酯、(甲基)丙烯酸第三丁酯等烷基酯類; (甲基)丙烯酸環己酯、(甲基)丙烯酸2 -甲基環 己酯、三環[5.2.1.02·6]癸烷-8-基(甲基)丙烯酸酯(在該 技術領域中,慣用名稱爲二環戊基(甲基)丙烯酸酯)、 (甲基)丙稀酸二環戊氧基乙酯、(甲基)丙烯酸異莰酯 等環烷基酯類; (甲基)丙烯酸2 -羥乙酯、(甲基)丙烯酸2 -羥丙 酯等羥烷基酯類; (甲基)丙烯酸苯酯、(甲基)丙烯酸苄酯等芳香基 及芳烷基酯類等。 不飽和二羧酸二酯類可列舉馬來酸二乙酯、富馬酸二 -14- 201214033 乙酯、伊康酸二乙基等。 N-取代馬來醯亞胺類可列舉N-苯基馬來醯亞胺、N· 環己基馬來醯亞胺、N-苄基馬來醯亞胺、N-琥珀醯亞胺 基-3-馬來醯亞胺苯甲酸酯、N-琥珀醯亞胺基-4·馬來醯亞 胺丁酸酯、N-琥珀醯亞胺基-6-馬來醯亞胺己酸酯、N-琥 珀醯亞胺基-3-馬來醯亞胺丙酸酯、N- ( 9-吖啶基)馬來 醯亞胺等。 脂環式不飽和化合物類可列舉雙環[2.2.1]庚-2-烯、5-甲基雙環[2.2.1]庚-2-烯、5-乙基雙環[2.2.1]庚-2-烯、5-羥基雙環[2.2.1]庚-2-烯、5-羥甲基雙環[2.2.1]庚-2-烯、 5- ( 2'-羥乙基)雙環[2.2.1]庚-2-烯、5-甲氧基雙環[2.2.1] 庚-2-烯、5-乙氧基雙環[2.2.1]庚-2-烯、5,6-二羥基雙環 [2.2.1]庚-2-烯、5,6-二(羥甲基)雙環[2.2.1]庚-2-烯、 5,6-二(2’-羥乙基)雙環[2.2.1]庚-2-烯、5,6-二甲氧基雙 環[2.2.1]庚-2-烯、5,6-二乙氧基雙環[2.2.1]庚-2-烯、5-羥 基-5-甲基雙環[2.2.1]庚-2-烯、5-羥基-5-乙基雙環[2.2.1] 庚-2-烯、5-羥甲基-5-甲基雙環[2.2.1]庚-2-烯、5-第三丁 氧基羰基雙環[2.2.1]庚-2-烯、5-環己氧基羰基雙環[2.2.1] 庚-2-烯、5_苯氧基羰基雙環[2.2.1]庚-2-烯、5,6-雙(第三 丁氧基羰基)雙環[2.2.1]庚-2-烯、5,6-雙(環己氧基羰基 )雙環[2.2.1]庚-2-烯等雙環不飽和化合物類等。 苯乙烯類可列舉苯乙烯、α -甲基苯乙烯、間甲基苯 乙烯、對甲基苯乙烯、乙烯基甲苯、對甲氧基苯乙烯等。 其他乙烯基化合物可列舉(甲基)丙烯腈、氯乙烯、 -15- 201214033 偏二氯乙烯、(甲基)丙烯醯胺、醋酸乙烯酯、1,3-丁二 烯、異戊二烯、2,3-二甲基-1,3-丁二烯等。 從共聚合反應性及鹼溶解性的觀點看來’ (c)係以 苯乙烯、N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苄 基馬來醯亞胺、雙環[2.2.1]庚-2-烯等爲佳。 樹脂(A2-1)之中,來自於各單體的構造單位的比率 ,係以相對於構成樹脂(A2-1 )之構造單位的合計莫耳數 而言在以下的範圍爲佳: 來自於(a)之構造單位:宜爲5〜60莫耳%,較佳爲 1 0 ~ 5 0莫耳% 來自於(b)之構造單位;宜爲40~95莫耳%,較佳 爲50〜90莫耳% , 樹脂(A2-1 )之構造單位的比率若在上述範圍,則感 光性樹脂組成物的保存安定性、顯像性以及所得到圖型的 耐溶劑性、耐熱性及機械強度有變好的傾向。 樹脂(A2-1 )可參考例如文獻「高分子合成之實驗法 」(大津隆行著,發行所:化學同人股份有限公司,第1 版第1刷1 9 72年3月1曰發行)所記載的方法及該文獻 所記載的引用文獻而製造。 具體而言可例示一種方法,係將既定量的(a)及(b )、聚合起始劑及溶劑等裝入反應容器中,並藉由以氮氣 置換氧氣而進行脫氧,並且攪拌、加熱、保溫。此外,此 處所使用的聚合起始劑及溶劑等並不受特別限定,在該領 域通常使用的物質任一者皆可使用。例如聚合起始劑可列 -16- 201214033 舉偶氮化合物(2,2·-偶氮雙異丁腈、2,2'-偶氮雙(2,4-二 甲基纈草腈)等)或有機過氧化物(過氧化苯甲醯等), 溶劑只要是能使各單體溶解的物質即可,感光性樹脂組成 物的溶劑可採用後述溶劑等。 此外,所得到的共聚物可直接使用反應後的溶液,亦 可使用濃縮或稀釋後的溶液,還可使用藉著再沉澱等方法 以固體(粉體)形式取出之物。特別是藉由在該聚合時, 溶劑採用與後述溶劑(E )相同的溶劑,能夠直接使用反 應後的溶液,而可使製造步驟簡化。 樹脂(A2-2 )之中,來自於各單體的構造單位的比率 ,係以相對於構成樹脂(A2-2 )全部構造單位的合計莫耳 數而言在以下的範圍爲佳: 來自於(a)之構造單位:宜爲2~40莫耳% ’較佳爲 5〜35莫耳% 來自於(c)之構造單位:宜爲1〜65莫耳% ’較佳爲 1〜60莫耳% 來自於(b)之構造單位:宜爲2〜95莫耳% ’較佳爲 5〜80莫耳% 樹脂(A2-2)之構造單位的比率若在上述的範圍’則 感光性樹脂組成物的保存安定性、顯像性以及所得到圖型 的耐溶劑性、耐熱性及機械強度有變好的傾向。 樹脂(A2-2 )係以(b )爲(bl )的樹脂爲佳’ (b ) 爲(b 1 -1 )的樹脂爲較佳。 樹脂(A2-2)可藉由與樹脂(A2-1)同樣的方法製造 -17- 201214033 樹脂(A )係以樹脂(A2-1 )爲佳,(b )爲(b 1 ) 的樹脂(A2-1)爲較佳,(b)爲(bl-2)的樹脂(A2-1 )爲更佳。若爲該等樹脂,則感光性樹脂組成物的保存安 定性、顯像性以及所得到圖型的耐溶劑性、耐熱性及機械 強度優異》 樹脂(A)之聚苯乙烯換算之重量平均分子量宜爲 3,000- 1 00,000 .較佳爲 5,000 〜50,000 ,更佳爲 5,000~25,000,甚至更佳爲 5,000〜15,000。樹脂(A)之 重量平均分子量若在前述範圍,則有塗佈性優異的傾向, 而且在顯像時,曝光部的膜減損不易發生,甚至容易以顯 像除去非曝光部。 樹脂(A)之分子量分布[重量平均分子量(Mw) /數 量平均分子量(Μη)]宜爲丨.1〜6.0,較佳爲1.2〜4.0,更 佳爲1.5〜3.0,甚至更佳爲1.7~2.7。分子量分布若在前述 範圍,則有顯像性優異的傾向。 樹脂(Α)之酸價通常爲 20~150mgKOH/g,宜爲 40〜1 35mgKOH/g,較佳爲 5 0~ 1 3 5 mgKOH/g。此處酸價爲 中和1 g的樹脂(A )所需要的氫氧化鉀量(mg )所測得 之値,可藉由使用氫氧化鉀水溶液進行滴定而求得。 樹脂(A )的含量相對於樹脂(A )及聚合性化合物 (B)的合計量而言,宜爲5〜95質量%,較佳爲20〜8 0質 量%,特佳爲40〜60質量%。進一步而言,在感光性樹脂 組成物的固體成分中,環狀醚當量係以成爲3 50〜1 500, -18- 201214033 宜爲55 0〜1200的方式調整樹脂(A)中來自於(b)的構 .造單位之量及感光性樹脂組成物中之樹脂(A)的含量爲 佳。環狀醚當量表示含有lg當量環狀醚之感光性樹脂組 成物的質量,可依照例如JIS K723 6所規定之測試方法而 求得。樹脂(A )的含量若在前述範圍,則感光性樹脂組 成物的顯像性,所得到圖型的密著性、耐溶劑性及機械特 性有變好的傾向。此處,固體成分是指由感光性樹脂組成 物扣除溶劑(E )之量。 聚合性化合物(B )爲可藉由聚合起始劑(C )所產 生的活性自由基而聚合之化合物。聚合性化合物(B)含 有具有2個以上之以式(1 )所表示之基之化合物(以下 有稱爲「聚合性化合物(B 1 )」的情形),該化合物的含 量相對於聚合性化合物(B )的合計量而言爲30質量%以 上100質量%以下。The compound represented by the formula (a) and the compound represented by the formula (II) may each be used singly. In addition, 'these can be mixed in any ratio. In the case of mixing, the mixing ratio is in a molar ratio, preferably a formula ( 1): Formula (II) = 5: 95 to 95: 5, preferably 1 〇: 90 to 90: 10, particularly suitable for 20: 80 to 80: 20 ° (b2) with oxetane The monomer having a (meth) propylene oxime group is preferred. (b2) may, for example, be 3-methyl-3-methylpropenyloxymethyloxetane or 3-methyl-3- Propylene methoxymethyloxetane, 3-ethyl-3-methylpropenyloxymethyloxetane, 3-ethyl-3-propenyloxymethyloxetane , 3-methylmethyl propyl decyloxy-13- 201214033 ethyl oxetane, 3-methyl-3-propenyloxyethyl oxetane, 3-ethyl-3 - methacryloxyethyl oxetane, 3-ethyl-3-propenyloxyethyl oxetane, etc. (b3) having tetrahydrofuranyl and (meth) acrylonitrile The monomer of the oxy group is preferred. (b3) Specifically, tetrahydrofuran methacrylate (for example, Vi) Scoat V#150, manufactured by Osaka Organic Chemical Industry Co., Ltd.), tetrahydrofuran methyl methacrylate, etc. (c) (meth) acrylates, N-substituted maleimides, unsaturated dicarboxylic acids Acid diesters, alicyclic unsaturated compounds, styrenes, other vinyl compounds, etc. (meth)acrylates include methyl (meth)acrylate and ethyl (meth)acrylate. An alkyl ester such as n-butyl acrylate, a second butyl (meth) acrylate or a third butyl (meth) acrylate; a cyclohexyl (meth) acrylate or a 2-methyl (meth) acrylate Cyclohexyl ester, tricyclo[5.2.1.02·6]decane-8-yl (meth) acrylate (known in the art as dicyclopentyl (meth) acrylate), (methyl) a cycloalkyl ester such as dicyclopentyloxyethyl acrylate or isodecyl (meth)acrylate; a hydroxyl group such as 2-hydroxyethyl (meth)acrylate or 2-hydroxypropyl (meth)acrylate Alkyl esters; aryl groups such as phenyl (meth)acrylate and benzyl (meth)acrylate; and arylalkyl esters. Examples of the saturated dicarboxylic acid diester include diethyl maleate, di-14-201214033 ethyl fumarate, diethyl itaconate, etc. N-substituted maleimines may be N-phenyl. Maleidin, N. cyclohexylmaleimide, N-benzyl maleimide, N-succinimide-3-maleimide benzoate, N-amber Imino-4-maleimide butyrate, N-succinimide-6-maleimide caproate, N-ammonium imino-3-maleimide An acid ester, N-(9-acridinyl) maleimide, etc. Examples of the alicyclic unsaturated compound include bicyclo [2.2.1] hept-2-ene and 5-methyl bicyclo [2.2.1]. Hept-2-ene, 5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxybicyclo[2.2.1]hept-2-ene, 5-hydroxymethylbicyclo[2.2.1]heptane- 2-ene, 5-( 2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5-methoxybicyclo[2.2.1]hept-2-ene, 5-ethoxybicyclo[ 2.2.1] hept-2-ene, 5,6-dihydroxybicyclo[2.2.1]hept-2-ene, 5,6-bis(hydroxymethyl)bicyclo[2.2.1]hept-2-ene, 5,6-bis(2'-hydroxyethyl)bicyclo[2.2.1]hept-2-ene, 5,6-dimethoxybicyclo[2.2.1]hept-2-ene, 5,6-di Ethoxy Bicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-ethylbicyclo[2.2.1]hept-2- Alkene, 5-hydroxymethyl-5-methylbicyclo[2.2.1]hept-2-ene, 5-t-butoxycarbonylbicyclo[2.2.1]hept-2-ene, 5-cyclohexyloxy Carbonylbicyclo[2.2.1]hept-2-ene, 5-phenoxycarbonylbicyclo[2.2.1]hept-2-ene, 5,6-bis(t-butoxycarbonyl)bicyclo[2.2.1] a bicyclic unsaturated compound such as hept-2-ene or 5,6-bis(cyclohexyloxycarbonyl)bicyclo[2.2.1]hept-2-ene. Examples of the styrenes include styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, vinyltoluene, and p-methoxystyrene. Examples of other vinyl compounds include (meth)acrylonitrile, vinyl chloride, -15-201214033 vinylidene chloride, (meth)acrylamide, vinyl acetate, 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, and the like. From the viewpoints of copolymerization reactivity and alkali solubility, '(c) is styrene, N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmalayiya An amine, a bicyclo[2.2.1]hept-2-ene or the like is preferred. Among the resins (A2-1), the ratio of the structural unit derived from each monomer is preferably in the following range with respect to the total number of moles of the structural unit constituting the resin (A2-1): The structural unit of (a): preferably 5 to 60 mol%, preferably 10 to 50 mol%, of the structural unit derived from (b); preferably 40 to 95 mol%, preferably 50 When the ratio of the structural unit of the resin (A2-1) is in the above range, the storage stability and development properties of the photosensitive resin composition and the solvent resistance, heat resistance and mechanical strength of the obtained pattern are 90%. There is a tendency to get better. Resin (A2-1) can be referred to, for example, the "Experimental Method for Polymer Synthesis" (produced by Otsuka, published by: Chemical Co., Ltd., 1st edition, 1st brush, issued March 1, 1927). The method is produced by the method described in the literature. Specifically, a method in which a predetermined amount of (a) and (b), a polymerization initiator, a solvent, and the like are charged into a reaction vessel, and deoxidation is performed by replacing oxygen with nitrogen, and stirring, heating, Keep warm. Further, the polymerization initiator, solvent and the like used herein are not particularly limited, and any of the substances generally used in the field can be used. For example, the polymerization initiator can be listed as a 16-201214033 azo compound (2,2·-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylhumulonitrile), etc.) In the case of the organic peroxide (such as benzamidine peroxide), the solvent may be one which dissolves each monomer, and the solvent of the photosensitive resin composition may be a solvent or the like described later. Further, the obtained copolymer may be used as it is, or a concentrated or diluted solution may be used, and a solid (powder) may be taken out by a method such as reprecipitation. In particular, by using the same solvent as the solvent (E) described later in the polymerization, the solution after the reaction can be used as it is, and the production step can be simplified. Among the resins (A2-2), the ratio of the structural unit derived from each monomer is preferably in the following range with respect to the total number of moles of all structural units constituting the resin (A2-2): (a) The structural unit: preferably 2 to 40 mol%, preferably 5 to 35 mol%. The structural unit derived from (c): preferably 1 to 65 mol%, preferably 1 to 60 mol. The ear % is derived from the structural unit of (b): preferably 2 to 95 mol %, preferably 5 to 80 mol %, and the ratio of the structural unit of the resin (A2-2) is in the above range, then the photosensitive resin The storage stability and development properties of the composition and the solvent resistance, heat resistance and mechanical strength of the obtained pattern tend to be improved. The resin (A2-2) is preferably a resin in which (b) is (b1), and (b) is (b1 -1). The resin (A2-2) can be produced by the same method as the resin (A2-1). -17-201214033 Resin (A) is preferably a resin (A2-1), and (b) is a resin of (b 1 ) ( A2-1) is preferable, and (b) is a resin (A2-1) of (bl-2). When it is such a resin, the storage stability and development properties of the photosensitive resin composition and the solvent resistance, heat resistance and mechanical strength of the obtained pattern are excellent. The weight average molecular weight of the resin (A) in terms of polystyrene It is preferably 3,000 to 10,000,000, preferably 5,000 to 50,000, more preferably 5,000 to 25,000, even more preferably 5,000 to 15,000. When the weight average molecular weight of the resin (A) is in the above range, the coating property tends to be excellent, and at the time of development, film loss in the exposed portion is less likely to occur, and it is easy to remove the non-exposed portion by image development. The molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (?η)] of the resin (A) is preferably from 0.1 to 6.0, preferably from 1.2 to 4.0, more preferably from 1.5 to 3.0, even more preferably from 1.7 to 1.7. 2.7. When the molecular weight distribution is in the above range, the development property tends to be excellent. The acid value of the resin (Α) is usually 20 to 150 mgKOH/g, preferably 40 to 1 35 mgKOH/g, preferably 50 to 135 mg KOH/g. Here, the acid value is determined by measuring the amount (mg) of potassium hydroxide required to neutralize 1 g of the resin (A), and it can be determined by titration with an aqueous potassium hydroxide solution. The content of the resin (A) is preferably from 5 to 95% by mass, preferably from 20 to 80% by mass, particularly preferably from 40 to 60% by mass based on the total amount of the resin (A) and the polymerizable compound (B). %. Further, in the solid content of the photosensitive resin composition, the cyclic ether equivalent is adjusted so that the resin (A) is from 3 50 to 1 500, and -18 to 201214033 is preferably from 55 to 1200. The amount of the structure and the content of the resin (A) in the photosensitive resin composition are preferably. The cyclic ether equivalent is a mass of a photosensitive resin composition containing lg equivalents of a cyclic ether, and can be obtained, for example, according to the test method specified in JIS K7236. When the content of the resin (A) is in the above range, the developability of the photosensitive resin composition tends to improve the adhesion, solvent resistance and mechanical properties of the obtained pattern. Here, the solid content means the amount by which the solvent (E) is subtracted from the photosensitive resin composition. The polymerizable compound (B) is a compound which can be polymerized by living radicals generated by the polymerization initiator (C). The polymerizable compound (B) contains a compound having two or more groups represented by the formula (1) (hereinafter referred to as "polymerizable compound (B 1 )"), and the content of the compound is relative to the polymerizable compound. The total amount of (B) is 30% by mass or more and 100% by mass or less.
[式(1)·中,L1表示伸乙基或丙烷-1,2-二基,p表示 1〜20之整數]。 本發明之感光性樹脂組成物藉著含有聚合性化合物( B1 ),而能夠得到柔軟性優異的圖型。圖型的柔軟性可藉 由微小硬度計所測得的總變位量而求得。若將液晶顯示裝 置放置於低溫環境,則由於隨著液晶層的體積收縮,液晶 槽的內壓降低,而會發生液晶槽內產生氣泡這樣的不良狀 況。若使用柔軟性優異的圖型作爲感光間隙材,則該圖型 -19- 201214033 會順著液晶層的體積收縮而變形,因此可抑制液晶槽的內 壓降低,而能夠抑制氣泡的產生》 在式(1)所表示之基團中,p爲1〜20,宜爲1〜18, 較佳爲1〜1 5。 聚合性化合物(B 1 )所具有的式(1 )所表示之基, 其數目爲2個以上,3以上爲佳。來自於式(1)所表示 之基而以-0-L1-所表示之構造的合計數,爲聚合性化合物 (B1)所具有各個式(1)所表示之基所含的p之和,在 聚合性化合物(B 1 )中,以2〜40爲佳,6~20爲較佳。 聚合性化合物(B 1 )可列舉實施環氧乙烷變性(以下 有稱爲「EO變性」的情形)或環氧丙烷變性(以下有稱 爲「PO變性」的情形)的多元醇化合物之(甲基)丙烯 酸酯類。環氧乙烷變性是指使-(CH2CH20)p-H加成於羥基 ,而賦予以-〇-(CH2CH20)p-H所表示之構造。環氧丙烷變 性與上述相同,是指賦予以-0-(CH2CH(CH3)0)p-H或-0-(CH(CH3)CH20)p-H所表示之構造。 前述多元醇化合物可列舉丁二醇、新戊二醇、三環癸 烷二甲醇、雙酚A、參(2 -羥乙基)異氰尿酸酯、三羥甲 基丙烷、季戊四醇、二季戊四醇、三季戊四醇等。 聚合性化合物(B 1 )可列舉聚乙二醇二(甲基)丙烯 酸酯、聚丙二醇二(甲基)丙烯酸酯、EO變性丁二醇之 二(甲基)丙烯酸酯、EO變性新戊二醇之二(甲基)丙 烯酸酯、EO變性三環癸烷二甲醇之二(甲基)丙烯酸酯 、EO變性雙酚A之二(甲基)丙烯酸酯、EO變性參(2- -20- 201214033 羥乙基)異氰尿酸酯之三(甲基)丙烯酸酯、EO變性三 羥甲基丙烷之三(甲基)丙烯酸酯、EO變性季戊四醇之 三(甲基)丙烯酸酯、EO變性季戊四醇之四(甲基)丙 烯酸酯' EO變性二季戊四醇之六(甲基)丙烯酸酯、EO 變性三季戊四醇之七(甲基)丙烯酸酯、PO變性丁二醇 之二(甲基)丙烯酸酯、PO變性新戊二醇之二(甲基) 丙烯酸酯、PO變性三環癸烷二甲醇之二(甲基)丙烯酸 酯、PO變性雙酚A之二(甲基)丙烯酸酯、PO變性參( 2-羥乙基)異氰尿酸酯之三(甲基)丙烯酸酯、PO變性 三羥甲基丙烷之三(甲基)丙烯酸酯、EO變性季戊四醇 之三(甲基)丙烯酸酯、PO變性季戊四醇之四(甲基) 丙烯酸酯、PO變性二季戊四醇之六(甲基)丙烯酸酯、 EO變性三季戊四醇之七(甲基)丙烯酸酯等。 還可使用KAYARAD DPEA-12C日本化藥股份有限公 司製);SR415、SR454、SR492、SR492、SR499、CD501 ' SR502 、 SR9020 、 CD9021 、 SR9035 、 SR480 、 CD540 、 SR9036 (以上爲 Sartomer 公司製)、EBECRYL11 ( DAICEL CYTEC 股份有限公司製);Light Acrylate 9EG-A以及相同產品型號的4E9-A、TMP-6EO-3 A (共榮社化 學股份有限公司製)等市售品。 聚合性化合物(B )亦可包含與聚合性化合物(B 1 ) 相異的聚合性化合物(以下有稱爲「聚合性化合物(B2 ) 」的情形)。聚合性化合物(B2 )可列舉例如具有聚合性 碳-碳不飽和鍵之化合物等,宜爲(甲基)丙烯酸酯化合 -21 - 201214033 物。 具有1個聚合性碳-碳不飽和鍵之聚合性化合物(B2 )可列舉前述(a ) 、( b )及(c )所列舉的化合物,其 中以(甲基)丙烯酸酯類爲佳。 具有2個聚合性碳-碳不飽和鍵之聚合性化合物(β2 )可列舉1,3-丁二醇二(甲基)丙烯酸酯、1,3-丁二醇( 甲基)丙烯酸酯、1,6-己烷二醇二(甲基)丙烯酸酯、雙 酚A之雙(丙烯醯氧基乙基)醚、乙氧基化雙酚A二( 甲基)丙烯酸酯、3-甲基戊二醇二(甲基)丙烯酸酯等。 具有3個以上聚合性碳-碳不飽和鍵之聚合性化合物 (B2)可列舉三經甲基丙院三(甲基)丙稀酸醋、季戊四 醇三(甲基)丙烯酸酯 '參(2 -羥乙基)異氰尿酸酯三( 甲基)丙烯酸酯、丙氧基化三羥甲基丙烷三(甲基)丙稀 酸酯 '季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲 基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、三季戊 四醇四(甲基)丙烯酸酯、三季戊四醇五(甲基)丙嫌酸 酯、三季戊四醇六(甲基)丙烯酸酯、三季戊四醇七(甲 基)丙烯酸酯、三季戊四醇八(甲基)丙烯酸酯、季戊四 醇二(甲基)丙稀酸醋與酸酐之反應產物、二季戊四醇五 (甲基)丙嫌酸醋與酸酐之反應產物 '三季戊四醇七(甲 基)丙烯酸酯與酸酐之反應產物、己內酯變性三經甲基丙 烷三(甲基)丙烯酸酯、己內酯變性季戊四醇三(甲基) 丙烯酸酯、己內酯變性參(2 -羥乙基)異氰尿酸酯三(甲 基)丙烯酸酯、己內酯變性季戊四醇四(甲基)丙條酸醋 -22- 201214033 、己內酯變性二季戊四醇五(甲基)丙烯酸酯、己內酯變 性二季戊四醇六(甲基)丙烯酸酯、己內酯變性三季戊四 醇四(甲基)丙烯酸酯、己內酯變性三季戊四醇五(甲基 )丙烯酸酯、己內酯變性三季戊四醇六(甲基)丙烯酸酯 、己內酯變性三季戊四醇七(甲基)丙烯酸酯、己內酯變 性三季戊四醇八(甲基)丙烯酸酯、己內酯變性季戊四醇 三(甲基)丙烯酸酯與酸酐之反應產物、己內酯變性二季 戊四醇五(甲基)丙烯酸酯與酸酐之反應產物、己內酯變 性三季戊四醇七(甲基)丙烯酸酯與酸酐等。其中以3官 能以上的單體爲佳,二季戊四醇六(甲基)丙烯酸酯爲較 佳。 聚合性化合物(B 1 )的含量相對於聚合性化合物(B )的合計量而言爲30質量%以上100質量%以下,宜爲 50質量%以上100質量%以下,較佳爲75質量%以上100 質量%以下。聚合性化合物(B1)的含量若在前述範圍, 則所得到圖型的柔軟性有變高的傾向。 聚合性化合物(B)的含量相對於樹脂(A)及聚合 性化合物(B )的合計量而言,宜爲5〜95質量%,較佳爲 2 0〜8 0質量%。進一步而言,感光性樹脂組成物的固體成 分中,聚合性碳-碳不飽和鍵當量係以成爲300〜1000的方 式調整聚合性化合物(B)的含量爲佳,較佳爲350〜7 50 。聚合性碳-碳不飽和鍵當量表示含有lg當量碳-碳不飽 和鍵的感光性樹脂組成物的固體成分的質量。聚合性碳-碳不飽和鍵當量可由使用例如紅外線吸收光譜,藉由測定 -23- 201214033 感光性樹脂組成物的固體成分所含的碳-碳不飽和鍵所產 生的吸收峰(例如丙烯酸基爲8 1 OcnT1)的強度所求得的 碳-碳不飽和鍵的數目、與感光性樹脂組成物的固體成分 的質量進行計算而求得。聚合性化合物(B)的含量若在 前述範圍,則感度或所得到圖型的強度、平滑性、信賴性 有變好的傾向。 本發明之感光性樹脂組成物,係以含有聚合起始劑( C)爲佳。聚合起始劑(C)只要是可藉由光或熱的作用 而使聚合反應開始的化合物,則不受特別限定,可使用周 知的聚合起始劑。 聚合起始劑(C )可列舉例如苯乙酮化合物、聯咪唑 化合物、三嗪化合物、醯基膦氧化物化合物、肟化合物。 另外還可使用日本特開2008-181087號公報所記載的光及 /或熱陽離子聚合起始劑(例如由鑰陽離子與來自於路易 士酸的陰離子所構成之物)。其中以選自聯咪唑化合物、 苯乙酮化合物及肟化合物所構成之群中至少1種爲佳,特 別以苯乙酮化合物爲佳。若爲該等聚合起始劑,則尤其有 成爲高感度的傾向,故爲適合。 前述苯乙酮化合物可列舉二乙氧基苯乙酮、2 -羥基-2_甲基-1_苯基丙烷-1-酮、苄基二甲基縮酮、2_羥基-^[心 (2-羥基乙氧基)苯基]-2-甲基丙烷-1-酮、2-羥基-[4- (2-羥基-2-甲基-丙醯基)-苄基]-苯基卜2-甲基-丙烷-1-酮、1-羥基環己基苯基酮' 2-嗎啉基-1-(4-甲基磺醯基 苯基)-2-甲基丙烷-1-酮、2·苄基-2-二甲基胺基-1- ( 4-嗎 -24- 201214033 啉基苯基)丁烷-1-酮、2-二甲基胺基-2- (2-甲基苄基)- 1- (4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2- (3-甲基 苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2- (4-甲基苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二甲 基胺基-2- (2-乙基苄基)-1-(4-嗎啉基苯基)丁烷-1-嗣 、2-二甲基胺基-2- (2-丙基苄基)-1-(4-嗎啉基苯基) 丁烷-1-酮、2-二甲基胺基-2- (2-丁基苄基)-1-(4-嗎啉 基苯基)丁烷-1-酮、2-二甲基胺基-2- (2,3-二甲基苄基 )-^(4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2-( 2,4-二甲基苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二甲 基胺基-2- (2 -氣下基)-1-( 4 -嗎琳基本基)丁院-1-嗣、 2- 二甲基胺基-2- ( 2-溴苄基)-1- ( 4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2-(3-氯芣基)-1-(4-嗎啉基苯基) 丁烷-卜酮、2-二甲基胺基-2- (4-氯苄基)-1-(4-嗎啉基 苯基)丁烷-1-酮、2-二甲基胺基-2-(3-溴苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2- ( 4-溴苄基)- 1- (4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2- (2-甲氧 基苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基- 2- (3-甲氧基苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二 甲基胺基-2-(4-甲氧基苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2- (2-甲基-4-甲氧基苄基)-1-(4-嗎啉基苯基)丁烷-1-酮、2-二甲基胺基-2- ( 2-甲基-4-溴 苄基)-1- ( 4-嗎啉基苯基)丁烷-卜酮、2-二甲基胺基-2- (2-溴-4-甲氧基苄基)-1- ( 4-嗎啉基苯基)丁烷-1-酮、 -25- 201214033 2-經基-2-甲基_丨-[4_ (丨_甲基乙烯基)苯基]丙烷-ΐ·酮之 寡聚物等。 前述聯咪唑化合物可列舉2,2'_雙(2_氯苯基)_ 4,4·,5,5·-四苯基聯咪唑、2,2,_雙(2 3·二氯苯基)_ 4,4,5,5-四苯基聯咪哩(參照例如日本特開平6_75372號 公報、日本特開平6_75373號公報等)、2,2,_雙(2-氯苯 基)-4’4’,5,5·-四苯基聯咪唑、2,2,-雙(2·氯苯基)_ 四(烷氧基苯基)聯咪唑、22,_雙(2氯苯基 )-4,4’,5,5|-四(二烷氧基苯基)聯咪唑、2,2,_雙(2_氯 苯基)_4,4',5,5,-四(三烷氧基苯基)聯咪唑(參照例如 曰本特公昭48-38403號公報、日本特開昭62-174204號 公報等)、在苯基的4,4,5,5·-位置經烷氧羰基取代之咪唑 化合物(參照例如日本特開平7-10913號公報等)等。適 合者可列舉2,2'-雙(2-氯苯基)-4,4,,5,5,-四苯基聯咪唑 、2,2’-雙(2,3-二氯苯基)-4,4,,5,5'-四苯基聯咪唑、2,2,-雙(2,4-二氯苯基)-4,4,,5,5,-四苯基聯咪唑。 前述三嗪化合物可列舉2,4·雙(三氯甲基)-6- (4 -甲 氧基苯基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4-甲氧 基萘基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-胡椒基-1,3,5-三嗪、2,4-雙(三氯甲基)-6_ (4-甲氧基苯乙烯基 )-1,3,5 -三嗪、2,4 -雙(三氯甲基)-6-[2-(5 -甲基呋喃_ 2-基)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-( 呋喃-2-基)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2- (4 -二乙基胺基-2 -甲基苯基)乙烯基]-nt三嗪、 -26- 201214033 2,4-雙(三氯甲基)-6-[2-(3,4-二甲氧基苯基)乙烯基]-1,3,5 -三嗪等。 前述醯基膦氧化物系化合物可列舉2,4,6-三甲基苯甲 醯基二苯膦氧化物等。 前述肟化合物可列舉N-苯甲醯氧基-1-( 4-苯磺醯基 苯基)丁烷-1-酮-2-亞胺、N-乙氧基羰氧基-1-苯基丙烷-1-酮-2-亞胺、N-苯甲醯氧基-1-( 4-苯磺醯基苯基)辛烷-1-酮-2-亞胺、N-乙醯氧基- l-[9-乙基-6- (2-甲基苯甲醯基 )-9H-咔唑-3-基]乙烷-1-亞胺、N-乙醯氧基-l-[9-乙基-6-{2-甲基-4-(3,3-二甲基-2,4-二氧雜環戊基甲氧基)苯甲 醯基}-9H-咔唑-3-基]乙烷-1-亞胺等。亦可使用 IRGACURE OXE-01、OXE-02 (以上爲 Chiba Japan 公司 製)、N-1919(ADEKA公司製)等市售品。 進一步而言聚合起始劑(C )可列舉安息香、安息香 甲醚、安息香乙酸、安息香異丙醚、安息香異丁醚等安息 香系化合物;二苯基酮、鄰苯甲醯基安息香酸甲酯、4-苯 基二苯基酮、4 -苯甲醯基- 4' -甲基二苯硫醚、3,3,,4,4’-四 (第三丁基過氧羰基)二苯基酮、2,4’,6-三甲基二苯基酮 等二苯基酮系化合物;9,10-菲醌、2-乙基蒽醌等醌系化合 物’ 10 -丁基-2-氯卩丫 D定酮、卞基、苯基乙酸酸甲醋、二茂 鈦化合物等。該等係以與後述聚合起始助劑(C丨)組合使 用爲佳。 另外,具有可引起鏈轉移之基的聚合起始劑,亦可採 用曰本特表2002-5 44205號公報所記載的光聚合起始劑。 -27- 201214033 前述具有可引起鏈轉移之基的聚合起始劑,可列舉例 如下述式(a)〜(f)之化合物: 【化7】 c〇〇^_S如女土 G〇 ⑻ C4H9—S—CH2 -C—Ο '—Lh.[In the formula (1), L1 represents an ethyl or propane-1,2-diyl group, and p represents an integer of 1 to 20]. In the photosensitive resin composition of the present invention, a polymerizable compound (B1) is contained, and a pattern excellent in flexibility can be obtained. The softness of the pattern can be determined by the total amount of displacement measured by a micro hardness tester. When the liquid crystal display device is placed in a low temperature environment, the internal pressure of the liquid crystal cell decreases as the volume of the liquid crystal layer shrinks, and a problem such as generation of bubbles in the liquid crystal cell occurs. When a pattern having excellent flexibility is used as the photosensitive gap material, the pattern -19-201214033 is deformed in accordance with the volume shrinkage of the liquid crystal layer, so that the decrease in the internal pressure of the liquid crystal cell can be suppressed, and the generation of bubbles can be suppressed. In the group represented by the formula (1), p is from 1 to 20, preferably from 1 to 18, preferably from 1 to 15. The number of the group represented by the formula (1) which the polymerizable compound (B 1 ) has is 2 or more, and more preferably 3 or more. The total of the structures represented by the formula (1) and represented by -0-L1 is the sum of p contained in the group represented by each formula (1) of the polymerizable compound (B1). In the polymerizable compound (B 1 ), 2 to 40 is preferred, and 6 to 20 is preferred. The polymerizable compound (B 1 ) may be a polyol compound which is subjected to ethylene oxide denaturation (hereinafter referred to as "EO denaturation") or propylene oxide denaturation (hereinafter referred to as "PO denaturation") ( Methyl) acrylates. Ethylene oxide denaturation means that -(CH2CH20)p-H is added to a hydroxyl group, and a structure represented by -〇-(CH2CH20)p-H is imparted. The propylene oxide variability is the same as described above, and means a structure represented by -0-(CH2CH(CH3)0)p-H or -0-(CH(CH3)CH20)p-H. Examples of the above polyol compound include butanediol, neopentyl glycol, tricyclodecane dimethanol, bisphenol A, bis(2-hydroxyethyl)isocyanurate, trimethylolpropane, pentaerythritol, and dipentaerythritol. , three pentaerythritol, and the like. Examples of the polymerizable compound (B 1 ) include polyethylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, EO-denatured butanediol di(meth)acrylate, and EO-denatured neopenta-2. Di(meth)acrylate of alcohol, bis(meth)acrylate of EO-denatured tricyclodecane dimethanol, bis(meth)acrylate of EO-denatured bisphenol A, EO denaturing ginseng (2- -20- 201214033 Tris(meth)acrylate of hydroxyethyl)isocyanurate, tri(meth)acrylate of EO-denatured trimethylolpropane, tri(meth)acrylate of EO-denatured pentaerythritol, EO-denatured pentaerythritol Tetra (meth) acrylate ' EO denatured dipentaerythritol hexa (meth) acrylate, EO denatured pentaerythritol seven (meth) acrylate, PO modified butane diol di (meth) acrylate, PO Di(meth) acrylate of denatured neopentyl glycol, di(meth) acrylate of PO modified tricyclodecane dimethanol, di(meth) acrylate of PO denatured bisphenol A, PO denatured ginseng ( 2 -hydroxyethyl)isocyanurate tris(meth)acrylate PO modified trimethylolpropane tris(meth)acrylate, EO modified pentaerythritol tri(meth)acrylate, PO modified pentaerythritol tetrakis(meth)acrylate, PO denatured dipentaerythritol hexa(methyl) Acrylate, EO modified heptaerythritol, hepta(meth)acrylate, and the like. KAYARAD DPEA-12C Nippon Kayaku Co., Ltd. can also be used; SR415, SR454, SR492, SR492, SR499, CD501 'SR502, SR9020, CD9021, SR9035, SR480, CD540, SR9036 (above is Sartomer), EBECRYL11 (manufactured by DAICEL CYTEC Co., Ltd.); Light Acrylate 9EG-A and commercially available products such as 4E9-A and TMP-6EO-3 A (manufactured by Kyoeisha Chemical Co., Ltd.) of the same product type. The polymerizable compound (B) may also contain a polymerizable compound different from the polymerizable compound (B 1 ) (hereinafter referred to as "polymerizable compound (B2)"). The polymerizable compound (B2) may, for example, be a compound having a polymerizable carbon-carbon unsaturated bond, and is preferably a (meth)acrylate compound-21 - 201214033. The polymerizable compound (B2) having one polymerizable carbon-carbon unsaturated bond may, for example, be a compound exemplified in the above (a), (b) and (c), and among them, a (meth) acrylate is preferred. Examples of the polymerizable compound (β2 ) having two polymerizable carbon-carbon unsaturated bonds include 1,3-butylene glycol di(meth)acrylate and 1,3-butylene glycol (meth)acrylate. , 6-hexanediol di(meth)acrylate, bisphenol A bis(acryloxyethyl)ether, ethoxylated bisphenol A di(meth)acrylate, 3-methylpentyl Glycol di(meth)acrylate or the like. The polymerizable compound (B2) having three or more polymerizable carbon-carbon unsaturated bonds may be exemplified by trimethyl methacrylate tris(meth) acrylate vinegar or pentaerythritol tris(meth) acrylate ginseng (2 - Hydroxyethyl)isocyanurate tris(meth)acrylate, propoxylated trimethylolpropane tris(meth)acrylate 'pentaerythritol tetra(meth)acrylate, dipentaerythritol five (a) Acrylate, dipentaerythritol hexa(meth) acrylate, tripentaerythritol tetra (meth) acrylate, tripentaerythritol penta (methyl) propionate, tripentaerythritol hexa (meth) acrylate, tripentaerythritol Reaction product of (meth) acrylate, tripentaerythritol octa (meth) acrylate, pentaerythritol di(meth) acrylate vinegar with an acid anhydride, dipentaerythritol penta (methyl) propylene vinegar and an acid anhydride Reaction product of tripentaerythritol hepta (meth) acrylate with an acid anhydride, caprolactone denatured trimethyl methacrylate tri(meth) acrylate, caprolactone denatured pentaerythritol tri (meth) acrylate, caprolactone denaturation (2-hydroxyethyl)isocyanurate tri(meth)acrylate, caprolactone denatured pentaerythritol tetrakis(methyl)propane vinegar-22- 201214033, caprolactone denatured dipentaerythritol penta (methyl) Acrylate, caprolactone denatured dipentaerythritol hexa(meth) acrylate, caprolactone denatured tripentaerythritol tetra (meth) acrylate, caprolactone denatured tripentaerythritol penta (meth) acrylate, caprolactone denature Pentaerythritol hexa(meth) acrylate, caprolactone denatured tripentaerythritol hepta (meth) acrylate, caprolactone denatured tripentaerythritol octa (meth) acrylate, caprolactone denatured pentaerythritol tri(meth) acrylate and The reaction product of an acid anhydride, a reaction product of caprolactone-denatured dipentaerythritol penta (meth) acrylate and an acid anhydride, caprolactone-denatured tripentaerythritol hepta (meth) acrylate, an acid anhydride, and the like. Among them, monomers having more than 3 functions are preferred, and dipentaerythritol hexa(meth)acrylate is preferred. The content of the polymerizable compound (B 1 ) is 30% by mass or more and 100% by mass or less based on the total amount of the polymerizable compound (B), and is preferably 50% by mass or more and 100% by mass or less, and preferably 75% by mass or more. 100% by mass or less. When the content of the polymerizable compound (B1) is within the above range, the flexibility of the obtained pattern tends to be high. The content of the polymerizable compound (B) is preferably from 5 to 95% by mass, preferably from 20 to 80% by mass, based on the total amount of the resin (A) and the polymerizable compound (B). Further, in the solid content of the photosensitive resin composition, the content of the polymerizable compound (B) is preferably adjusted so that the polymerizable carbon-carbon unsaturated bond equivalent is 300 to 1,000, and preferably 350 to 7 50. . The polymerizable carbon-carbon unsaturated bond equivalent represents the mass of the solid component of the photosensitive resin composition containing lg equivalent of a carbon-carbon unsaturated bond. The polymerizable carbon-carbon unsaturated bond equivalent can be obtained by measuring, for example, an infrared absorption spectrum, an absorption peak derived from a carbon-carbon unsaturated bond contained in the solid content of the photosensitive resin composition of -23 to 201214033 (for example, an acrylic group) The number of carbon-carbon unsaturated bonds obtained by the strength of 8 1 OcnT1) and the mass of the solid content of the photosensitive resin composition were calculated. When the content of the polymerizable compound (B) is in the above range, the sensitivity, the smoothness, and the reliability of the obtained pattern tend to be improved. The photosensitive resin composition of the present invention preferably contains a polymerization initiator (C). The polymerization initiator (C) is not particularly limited as long as it is a compound which can initiate polymerization by the action of light or heat, and a known polymerization initiator can be used. The polymerization initiator (C) may, for example, be an acetophenone compound, a biimidazole compound, a triazine compound, a mercaptophosphine oxide compound or an anthracene compound. Further, a photo-and/or thermal cationic polymerization initiator (for example, an anion derived from a key cation and an anion derived from Lewis acid) described in JP-A-2008-181087 can be used. Among them, at least one selected from the group consisting of a biimidazole compound, an acetophenone compound and an anthracene compound is preferred, and an acetophenone compound is particularly preferred. If these polymerization initiators are used, they tend to have high sensitivity, and are suitable. The acetophenone compound may, for example, be diethoxyacetophenone, 2-hydroxy-2-methyl-1_phenylpropan-1-one, benzyldimethylketal, 2-hydroxyl-[[ 2-hydroxyethoxy)phenyl]-2-methylpropan-1-one, 2-hydroxy-[4-(2-hydroxy-2-methyl-propenyl)-benzyl]-phenyl 2-methyl-propan-1-one, 1-hydroxycyclohexyl phenyl ketone '2-morpholinyl-1-(4-methylsulfonylphenyl)-2-methylpropan-1-one, 2·Benzyl-2-dimethylamino-1-(4-?-24- 201214033 phenylphenyl)butan-1-one, 2-dimethylamino-2-(2-methyl Benzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(3-methylbenzyl)-1-(4-morpholinylbenzene Butane-1-one, 2-dimethylamino-2-(4-methylbenzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-dimethyl Amino-2-(2-ethylbenzyl)-1-(4-morpholinylphenyl)butane-1-anthracene, 2-dimethylamino-2-(2-propylbenzyl) )-1-(4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(2-butylbenzyl)-1-(4-morpholinylphenyl) Butan-1-one, 2-dimethylamino-2-(2,3-dimethylbenzyl)-(4-morpholinylphenyl) 1-ketone, 2-dimethylamino-2-(2,4-dimethylbenzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-dimethyl Amino-2-(2-indolyl)-1-(4-mercapto-based) butyl-1-pyrene, 2-dimethylamino-2-(2-bromobenzyl)-1- (4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(3-chloroindolyl)-1-(4-morpholinylphenyl)butane-butanone 2-Dimethylamino-2-(4-chlorobenzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(3- Bromobenzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(4-bromobenzyl)-1-(4-morpholinylbenzene Butane-1-one, 2-dimethylamino-2-(2-methoxybenzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-di Methylamino-2-(3-methoxybenzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(4-methoxy Benzyl)-1-(4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(2-methyl-4-methoxybenzyl)-1- (4-morpholinylphenyl)butan-1-one, 2-dimethylamino-2-(2-methyl-4-bromobenzyl)-1-(4-morpholinylphenyl) Butane-buxoton, 2-dimethylamino-2- (2-bromo-4-methoxybenzyl)-1-(4-morpholinylphenyl)butan-1-one, -25- 201214033 2-yl-2-methyl-丨-[4_ (丨-methylvinyl) phenyl]propane-fluorenone ketone oligomer or the like. The biimidazole compound may, for example, be 2,2'-bis(2-chlorophenyl)-4,4,5,5-tetraphenylbiimidazole, 2,2,_bis(2 3 ·dichlorophenyl) _ 4,4,5,5-tetraphenyl bismuth (see, for example, JP-A-6-75372, JP-A-6-75373, etc.), 2,2, bis(2-chlorophenyl)-4 '4',5,5·-tetraphenylbiimidazole, 2,2,-bis(2·chlorophenyl)_tetrakis(alkoxyphenyl)biimidazole, 22,_bis(2chlorophenyl) -4,4',5,5|-tetrakis(dialkoxyphenyl)biimidazole, 2,2,_bis(2-chlorophenyl)-4,4',5,5,-tetrakis Oxyphenyl)biimidazole (see, for example, Japanese Patent Publication No. Sho 48-38403, JP-A-62-174204, etc.), alkoxycarbonyl group at the 4, 4, 5, 5-position of a phenyl group A substituted imidazole compound (see, for example, Japanese Patent Laid-Open Publication No. Hei 7-10913). Suitable examples are 2,2'-bis(2-chlorophenyl)-4,4,5,5,-tetraphenylbiimidazole, 2,2'-bis(2,3-dichlorophenyl). -4,4,5,5'-tetraphenylbiimidazole, 2,2,-bis(2,4-dichlorophenyl)-4,4,5,5,-tetraphenylbiimidazole. The above triazine compound may, for example, be 2,4·bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine or 2,4-bis(trichloromethyl). -6-(4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-piperidin-1,3,5-triazine, 2, 4-bis(trichloromethyl)-6_(4-methoxystyryl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(5 -methylfuran-2-yl)vinyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(furan-2-yl)vinyl]- 1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(4-diethylamino-2-methylphenyl)vinyl]-nt triazine, -26- 201214033 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxyphenyl)vinyl]-1,3,5-triazine, and the like. The above-mentioned mercaptophosphine oxide compound may, for example, be 2,4,6-trimethylbenzoguanidinium diphenylphosphine oxide. The above hydrazine compound may, for example, be N-benzylideneoxy-1-(4-phenylsulfonylphenyl)butan-1-one-2-imine, N-ethoxycarbonyloxy-1-phenyl Propane-1-one-2-imine, N-benzylideneoxy-1-(4-phenylsulfonylphenyl)octane-1-one-2-imine, N-ethoxycarbonyl- L-[9-Ethyl-6-(2-methylbenzhydryl)-9H-indazol-3-yl]ethane-1-imine, N-ethyloxyl-l-[9- Ethyl-6-{2-methyl-4-(3,3-dimethyl-2,4-dioxolanylmethoxy)benzylidenyl}-9H-indazol-3-yl ] Ethyl-1-imine and the like. Commercial products such as IRGACURE OXE-01, OXE-02 (above, Chiba Japan) and N-1919 (made by ADEKA) can also be used. Further, the polymerization initiator (C) may, for example, be a benzoin compound such as benzoin, benzoin methyl ether, benzoin acetic acid, benzoin isopropyl ether or benzoin isobutyl ether; diphenyl ketone, methyl phthalate benzoate, 4-phenyldiphenyl ketone, 4-benzylidene-4'-methyldiphenyl sulfide, 3,3,,4,4'-tetrakis(t-butylperoxycarbonyl)diphenyl ketone a diphenyl ketone compound such as 2,4',6-trimethyldiphenyl ketone; an oxime compound such as 9,10-phenanthrenequinone or 2-ethylhydrazine, '10-butyl-2-chloroindole丫D ketone, sulfhydryl, phenylacetate methyl vinegar, titanocene compound, and the like. These are preferably used in combination with a polymerization initiation aid (C丨) described later. Further, as the polymerization initiator having a group capable of causing chain transfer, a photopolymerization initiator described in JP-A-2002-44205 can also be used. -27- 201214033 The above-mentioned polymerization initiator having a group capable of causing chain transfer, for example, a compound of the following formulas (a) to (f): [Chemical 7] c〇〇^_S such as a female soil G〇(8) C4H9 —S—CH2 —C—Ο '—Lh.
—CH2—S—CH2—S
φ) C4H9—S—(ΙΉ2 (c)Φ) C4H9—S—(ΙΉ2 (c)
前述具有可引起鏈轉移之基的聚合起始劑,亦可作爲 構成樹脂(A)的成分(c)使用。 在本發明之感光性樹脂組成物之中,聚合起始助劑( C1)可與上述聚合起始劑(C) 一起使用。 聚合起始助劑(C 1 )係以使用式(III )所表示之化 201214033 合物爲佳 【化8】The above polymerization initiator having a group capable of causing chain transfer can also be used as the component (c) constituting the resin (A). Among the photosensitive resin compositions of the present invention, a polymerization initiation aid (C1) can be used together with the above polymerization initiator (C). The polymerization initiation aid (C 1 ) is preferably formed by using the compound represented by the formula (III) 201214033.
(m) R4 [式(III)中,W1所示的虛線表示可經鹵素原子取代之碳 數6〜12之芳香環; Y1表示-0-或-S-; R4表示碳數1〜6之1價飽和烴基; R5表示可經鹵素原子取代之碳數1〜1 2之1價飽和烴基或 可經鹵素原子取代之碳數6〜12之芳香基j。 鹵素原子可列舉氟原子、氯原子、溴原子等。 碳數6〜12之芳香環可列舉苯環、萘環等。 可經鹵素原子取代之碳數6〜1 2之芳香環可列舉例如 苯環、甲基苯環、二甲基苯環、乙基苯環、丙基苯環、丁 基苯環、戊基苯環、己基苯環、環己基苯環、氯苯環、二 氯苯環、溴苯環、二漠苯環、苯基苯環、氯苯基苯環、溴 苯基苯環、萘環、氯萘環、溴萘環等。 碳數1〜6之i價飽和煙基可列舉例如甲基、乙基、正 丙基、異丙基、正丁基、i-甲基丙基、2_甲基丙基、第三 丁基、正戊基、i•甲基丁基、2·甲基丁基、3•甲基丁基、 ^-二甲基丙基、二甲基丙基、2,2•二甲基丙基、正 己基、環己基等。 可經鹵素原子取代之碳數1~12 之1價飽和烴基,可 -29- 201214033 列舉例如上述碳數1〜6之1價飽和烴基,此外還有庚基、 辛基、壬基、癸基、十一烷基、十二烷基、1-氯丁基、2-氯丁基、3-氯丁基等。 可經鹵素原子取代之碳數6~ 12之芳香基可列舉苯基 、氯苯基、二氯苯基、溴苯基、二溴苯基、氯溴苯基、聯 苯基、氯聯苯基、二氯聯苯基、溴苯基、二溴苯基、萘基 、氯萘基、二氯萘基、溴萘基、二溴萘基等。 式(ΙΠ )所表示之化合物具體而言可列舉: 2-[2-氧代-2-(2-苯基)亞乙基]-3-甲基萘并[2,1-<1]噻唑啉 、2-[2-氧代-2-(2-苯基)亞乙基]-3-甲基萘并[1,2-(1]噻唑 啉、2-[2-氧代-2- (2-苯基)亞乙基]-3-甲基萘并[2,3-d]噻 唑啉、2-[2-氧代-2- (2-萘基)亞乙基]-3-甲基苯并噻唑啉 、2-[2-氧代-2- ( 1-萘基)亞乙基]-3-甲基苯并噻唑啉、2-[2-氧代-2- ( 2-萘基)亞乙基]-3-甲基-5-苯基苯并噻唑啉 、2-[2-氧代-2- ( 1-萘基)亞乙基]-3-甲基-5-苯基苯并噻 唑啉、2-[2-氧代-2- (2-萘基)亞乙基]-3-甲基-5-氟苯并 噻唑啉、2-[2-氧代-2- ( 1-萘基)亞乙基]-3 -甲基-5-氟苯 并噻哗啉、2-[2-氧代-2· (2-萘基)亞乙基]-3-甲基-5-氯 苯并噻唑啉、2-[2-氧代-2-( 1-萘基)亞乙基]-3-甲基- 5-氯苯并噻唑啉、2-[2-氧代-2- (2-萘基)亞乙基]-3 -甲基-5-溴苯并噻唑啉、2-[2-氧代-2- ( 1-萘基)亞乙基]-3-甲 基-5-溴苯并噻唑啉、2-[2-氧代-2- (4-苯基苯基)亞乙基 卜3-甲基苯并噻唑啉、2-[2-氧代-2- (4-苯基苯基)亞乙基 卜3-甲基-5-苯基苯并噻唑啉、2-[2-氧代-2- (2-萘基)亞 -30- 201214033 乙基]-3-甲基萘并[2, l-d]噻唑啉、2-[2-氧代-2- (2-萘基) 亞乙基]-3-甲基萘并[l,2-d]噻唑啉、2-[2-氧代-2- (4-苯基 苯基)亞乙基]-3-甲基萘并[2,1-d]噻唑啉、2-[2-氧代-2-( 4-苯基苯基)亞乙基]-3-甲基萘并[l,2-d]噻唑啉、2-[2-氧 代-2-(4-氟苯基)亞乙基]-3-甲基萘并[2,1-d]噻唑啉、2_ [2-氧代-2- (4-氟苯基)亞乙基]-3-甲基萘并[I,2-d]噻唑啉 、2-[2-氧代-2- (2-苯基)亞乙基]-3-甲基萘并[2,1-d]噁唑 啉、2-[2-氧代-2-(2-苯基)亞乙基]-3-甲基萘并[1,2-«1]噁 唑啉、2-[2-氧代-2- (2-苯基)亞乙基]-3 -甲基萘并[2,3-d] 螺唑啉、2-[2-氧代-2- (2-萘基)亞乙基]-3-甲基苯并噁唑 啉、2-[2-氧代-2-(1-萘基)亞乙基]-3-甲基苯并噁哇啉、 2-[2-氧代-2- (2-萘基)亞乙基]-3-甲基-5-苯基苯并噁唑 琳、2-[2-氧代-2- ( 1-萘基)亞乙基]-3-甲基-5-苯基苯幷 嚼唑啉、2-[2-氧代-2-(2-萘基)亞乙基]-3_甲基_5_氟苯 并噁唑啉、2-[2_氧代_2_ ( 1-萘基)亞乙基卜3 -甲基氟 苯并噁唑啉、2-[2·氧代-2_(2_萘基)亞乙基]-3_甲基_5-氣苯并噁哩啉、2_[2_氧代-2_(1_萘基)亞乙基]甲基-5_氯苯并噁唑啉、2-[2 -氧代-2- ( 2 -萘基)亞乙基]-3 -甲 基-5-溴苯并噁嗖啉、2_[2_氧代-2_(1-萘基)亞乙基卜3_ 甲基·5-溴苯并噁唑啉、2-[2-氧代-2- ( 4-苯基苯基)亞乙 基]_3_甲基苯并噁唑啉、2-[2-氧代-2- (4-苯基苯基)亞乙 基]-3-甲基_5·苯基苯并噁唑啉、2_[2_氧代_2_ ( 1_萘基) 亞乙基]-3-甲基萘并[2,1-d]噁唑啉、2-[2-氧代-2- ( 1-萘基 )亞乙基]-3-甲基萘并[l,2_d]噁唑啉、2-[2-氧代-2- (4-苯 -31 - 201214033 基苯基)亞乙基]-3-甲基萘并[2,l-d]噁唑啉、2-[2-氧代- 2-(4-苯基苯基)亞乙基]_3-甲基萘并[l,2-d]噁唑啉、2-[2-氧代-2- (4 -氟苯基)亞乙基]-3 -甲基萘并[2, Ι-d]噁唑啉、 2-[2-氧代-2-(4-氟苯基)亞乙基]-3-甲基萘并[1,2-(1]噁唑 啉等》 另外,聚合起始助劑(C1)亦可採用式(IV)或式 (V)所表示之化合物。 【化9】(m) R4 [In the formula (III), the dotted line indicated by W1 represents an aromatic ring having a carbon number of 6 to 12 which may be substituted by a halogen atom; Y1 represents -0- or -S-; and R4 represents a carbon number of 1 to 6 A monovalent saturated hydrocarbon group; R5 represents a monovalent saturated hydrocarbon group having 1 to 12 carbon atoms which may be substituted by a halogen atom or an aromatic group j having a carbon number of 6 to 12 which may be substituted by a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom. Examples of the aromatic ring having 6 to 12 carbon atoms include a benzene ring and a naphthalene ring. The aromatic ring having 6 to 12 carbon atoms which may be substituted by a halogen atom may, for example, be a benzene ring, a methylbenzene ring, a dimethylbenzene ring, an ethylbenzene ring, a propylbenzene ring, a butylbenzene ring or a pentylbenzene. Cyclo, hexylbenzene ring, cyclohexylbenzene ring, chlorobenzene ring, dichlorobenzene ring, bromobenzene ring, dioxin ring, phenylbenzene ring, chlorophenyl benzene ring, bromophenyl benzene ring, naphthalene ring, chlorine Naphthalene ring, bromine ring, and the like. Examples of the i-valent saturated nicotyl group having 1 to 6 carbon atoms include, for example, methyl, ethyl, n-propyl, isopropyl, n-butyl, i-methylpropyl, 2-methylpropyl, and t-butyl groups. , n-pentyl, i•methylbutyl, 2-methylbutyl, 3-methylbutyl, ^-dimethylpropyl, dimethylpropyl, 2,2•dimethylpropyl, Is n-hexyl, cyclohexyl and the like. a monovalent saturated hydrocarbon group having 1 to 12 carbon atoms which may be substituted by a halogen atom, and -29 to 201214033, for example, a monovalent saturated hydrocarbon group having 1 to 6 carbon atoms as described above, in addition to a heptyl group, an octyl group, a decyl group or a fluorenyl group. , undecyl, dodecyl, 1-chlorobutyl, 2-chlorobutyl, 3-chlorobutyl, and the like. The aryl group having 6 to 12 carbon atoms which may be substituted by a halogen atom may, for example, be phenyl, chlorophenyl, dichlorophenyl, bromophenyl, dibromophenyl, chlorobromophenyl, biphenyl or chlorobiphenyl. , dichlorobiphenyl, bromophenyl, dibromophenyl, naphthyl, chloronaphthyl, dichloronaphthyl, bromonaphthyl, dibromonaphthyl and the like. Specific examples of the compound represented by the formula (ΙΠ) include: 2-[2-oxo-2-(2-phenyl)ethylidene]-3-methylnaphtho[2,1-<1] Thiazoline, 2-[2-oxo-2-(2-phenyl)ethylidene]-3-methylnaphtho[1,2-(1]thiazoline, 2-[2-oxo-2 -(2-phenyl)ethylidene]-3-methylnaphtho[2,3-d]thiazoline, 2-[2-oxo-2-(2-naphthyl)ethylene]-3 -methylbenzothiazoline, 2-[2-oxo-2-(1-naphthyl)ethylidene]-3-methylbenzothiazoline, 2-[2-oxo-2-( 2 -naphthyl)ethylidene]-3-methyl-5-phenylbenzothiazoline, 2-[2-oxo-2-(1-naphthyl)ethylidene]-3-methyl-5 -Phenylbenzothiazoline, 2-[2-oxo-2-(2-naphthyl)ethylidene]-3-methyl-5-fluorobenzothiazoline, 2-[2-oxo- 2-(1-Naphthyl)ethylidene]-3-methyl-5-fluorobenzothiaporphyrin, 2-[2-oxo-2·(2-naphthyl)ethylene]-3- Methyl-5-chlorobenzothiazoline, 2-[2-oxo-2-(1-naphthyl)ethylidene]-3-methyl-5-chlorobenzothiazoline, 2-[2- Oxo-2-(2-naphthyl)ethylidene]-3-methyl-5-bromobenzothiazoline, 2-[2-oxo-2-(1-naphthyl)ethylene]- 3-methyl-5-bromobenzothiazoline, 2-[2-oxygen -2- (4-phenylphenyl)ethylidene 3-methylbenzothiazoline, 2-[2-oxo-2-(4-phenylphenyl)ethylidene 3-methyl -5-phenylbenzothiazoline, 2-[2-oxo-2-(2-naphthyl) -30-201214033 ethyl]-3-methylnaphtho[2, ld]thiazoline, 2 -[2-oxo-2-(2-naphthyl)ethylidene]-3-methylnaphtho[l,2-d]thiazoline, 2-[2-oxo-2-(4-benzene Phenyl)ethylidene]-3-methylnaphtho[2,1-d]thiazoline, 2-[2-oxo-2-(4-phenylphenyl)ethylidene-3- Methylnaphtho[l,2-d]thiazoline, 2-[2-oxo-2-(4-fluorophenyl)ethylidene]-3-methylnaphtho[2,1-d]thiazole Porphyrin, 2_[2-oxo-2-(4-fluorophenyl)ethylidene]-3-methylnaphtho[I,2-d]thiazoline, 2-[2-oxo-2-( 2-phenyl)ethylidene]-3-methylnaphtho[2,1-d]oxazoline, 2-[2-oxo-2-(2-phenyl)ethylidene-3- Methylnaphtho[1,2-«1]oxazoline, 2-[2-oxo-2-(2-phenyl)ethylidene]-3-methylnaphtho[2,3-d] Spirooxazoline, 2-[2-oxo-2-(2-naphthyl)ethylidene]-3-methylbenzoxazoline, 2-[2-oxo-2-(1-naphthyl) Ethylene]-3-methylbenzooxazolin, 2-[2-oxo-2-(2-naphthyl)ethylene ]-3-methyl-5-phenylbenzoxazole, 2-[2-oxo-2-(1-naphthyl)ethylidene]-3-methyl-5-phenylbenzoquinone Oxazoline, 2-[2-oxo-2-(2-naphthyl)ethylene]-3_methyl_5-fluorobenzoxazoline, 2-[2_oxo_2_ ( 1- Naphthyl)ethylidene 3-methylfluorobenzoxazoline, 2-[2.oxo-2-(2-naphthyl)ethylidene]-3-methyl-5-gas benzoxanthene Porphyrin, 2_[2_oxo-2_(1-naphthyl)ethylidene]methyl-5-chlorobenzoxazoline, 2-[2-oxo-2-(2-naphthyl)-ethylidene ]]-3-methyl-5-bromobenzooxorphyrin, 2_[2-oxo-2_(1-naphthyl)ethylene b 3_methyl·5-bromobenzoxazoline, 2- [2-oxo-2-(4-phenylphenyl)ethylidene]_3_methylbenzoxazoline, 2-[2-oxo-2-(4-phenylphenyl)-ethylene 3-methyl-5-phenylbenzoxazoline, 2_[2_oxo-2-(1-naphthyl)ethylidene]-3-methylnaphtho[2,1-d] Oxazoline, 2-[2-oxo-2-(1-naphthyl)ethylidene]-3-methylnaphtho[l,2_d]oxazoline, 2-[2-oxo-2- (4-Benzene-31 - 201214033 phenyl)ethylene]-3-methylnaphtho[2,ld]oxazoline, 2-[2-oxo-2-(4-phenylphenyl) Ethylene]_3-methylnaphtho[l,2-d] Oxazoline, 2-[2-oxo-2-(4-fluorophenyl)ethylidene]-3-methylnaphtho[2, Ι-d]oxazoline, 2-[2-oxo- 2-(4-fluorophenyl)ethylidene]-3-methylnaphtho[1,2-(1]oxazoline, etc. In addition, the polymerization initiation aid (C1) can also be of the formula (IV) Or a compound represented by the formula (V). 【化9】
[式(IV )及式(V )中,環W2、環W3及環W4互相獨立 ’表示可經鹵素原子取代之碳數6-12之芳香環或碳數 2〜10之雜環;Y2〜Y5互相獨立,表示-〇-或_3-; r6~r9表 示碳數1〜12之1價飽和烴基或碳數6-12之芳香基,該飽 和烴基及該芳香基所含的氫原子可經鹵素原子、羥基或碳 數1〜6之烷氧基取代]» 碳數6〜12之芳香環可列舉式(ΙΠ )所列舉同樣的芳 香環’該芳香環所含的氫原子,亦能夠經前述所列舉的鹵 素原子任意取代》 可經鹵素原子取代之碳數2〜1 0之雜環可列舉吡啶環 、嘧啶環、噠嗪環、吡嗪環、吡喃環等。 經1價羥基取代之飽和烴基可列舉羥甲基、羥乙基、 -32- 201214033 羥丙基、羥基丁基等。 經羥基取代之芳香基可列舉羥苯基、羥萘基等。 1價烷氧基取代之飽和烴基可列舉甲氧基甲基'甲氧 基乙基、甲氧基丙基、甲氧基丁基、丁氧基甲基、乙氧基 乙基、乙氧基丙基、丙氧基丁基等》 烷氧基取代之芳香基可列舉甲氧苯基、乙氧萘基等。 式(IV)及式(v)所表示之化合物具體而言可列舉 二甲氧基萘、二乙氧基萘、二丙氧基萘、二異丙氧基萘、 二丁氧基萘等二烷氧基萘類; 9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧 基蒽、2-乙基-9,10-二乙氧基蒽、二丙氧基蒽、二異丙氧 基蒽、二丁氧基蒽、二戊氧基蒽、二己氧基蒽、甲氧基乙 氧基蒽、甲氧基丙氧基蒽、甲氧基異丙氧基蒽、甲氧基丁 氧基蒽、乙氧基丙氧基蒽、乙氧基異丙氧基蒽、乙氧基丁 氧基蒽、丙氧基異丙氧基蒽、丙氧基丁氧基蒽、異丙氧基 丁氧基蒽等二烷氧基蒽類; 二甲氧基并四苯、二乙氧基并四苯、二丙氧基并四苯、二 異丙氧基并四苯、二丁氧基并四苯等二烷氧基并四苯類等 〇 另外,聚合起始助劑(C1)還可採用噻噸酮化合物。 噻噸酮化合物可列舉例如2 -異丙基噻噸酮、4 -異丙基噻噸 酮、2,4-二乙基噻噸酮、2,4-二氯噻噸酮、1-氯-4-丙氧基 噻噸酮等。 -33- 201214033 進一步而言,聚合起始助劑(c 1 )可列舉胺化合物及 羧酸化合物等。 胺化合物可列舉三乙醇胺、甲基二乙醇胺、三異丙醇 胺等脂肪族胺化合物、4-二甲基胺基安息香酸甲酯、4-二 甲基胺基安息香酸乙酯、4-二甲基胺基安息香酸異戊酯、 4-二甲基胺基安息香酸2-乙基己基、安息香酸2-二甲基 胺基乙基、N,N-二甲基對甲苯胺、4,4'-雙(二甲基胺基) 二苯基酮(通稱米其勒酮)、4,4'-雙(二乙基胺基)二苯 基酮般的芳香族胺化合物。 羧酸化合物可列舉苯磺醯基醋酸、甲基苯磺醯基醋酸 、乙苯磺醯基醋酸、甲基乙苯磺醯基醋酸、二甲基苯磺醯 基醋酸、甲氧基苯磺醯基醋酸、二甲氧基苯磺醯基醋酸、 氯苯磺醯基醋酸、二氯苯磺醯基醋酸、N-苯基甘胺酸、苯 氧基醋酸、萘硫基醋酸、N-萘甘胺酸、萘氧基醋酸等芳香 族雜原子醋酸類。 聚合起始劑(C )與聚合起始助劑(C 1 )適合的組合 可列舉苯乙酮化合物與噻噸酮化合物、苯乙酮化合物與芳 香族胺化合物,具體而言可列舉2-嗎啉基-1- ( 4-甲基磺 醯基苯基)-2-甲基丙烷-1-酮與2,4-二乙基噻噸酮、2-二 甲基胺基-2-苄基-1-(4-嗎啉基苯基)丁烷-1-酮與2,4-二 乙基噻噸酮、2 -二甲基胺基-2- (4 -甲基苄基)-1-(4 -嗎 啉基苯基)丁烷-1-酮與2,4-二乙基噻噸酮、2-嗎啉基-1-(4-甲基磺醯基苯基)-2-甲基丙烷-1·酮與2-異丙基噻噸 酮與4 -異丙基噻噸酮、2 -嗎啉基-1-( 4 -甲基磺醯基苯基 -34- 201214033 )-2-甲基丙烷-1-酮與4,4’-雙(二乙基胺基)二苯基酮、 2-二甲基胺基-2-苄基-1-( 4-嗎啉基苯基)丁烷-1-酮與 4,4’-雙(二乙基胺基)二苯基酮、2-二甲基胺基-2-(4-甲 基苄基)-1- ( 4-嗎啉基苯基)丁烷-1-酮與4,4'-雙(二乙 基胺基)二苯基酮等。 聚合起始劑(C )與聚合起始助劑(C 1 )之組合,係 以苯乙酮化合物與噻噸酮化合物的組合爲佳,2-嗎啉基· 1-4-甲基磺醯基苯基)-2-甲基丙烷-1-酮與2,4-二乙基噻 噸酮、2 -嗎啉基-1-( 4 -甲基磺醯基苯基)-2 -甲基丙烷-1-酮與2-異丙基噻噸酮與4-異丙基噻噸酮爲較佳。若爲該 等組合,則可得到高感度且可見光透過率高的圖型。 聚合起始劑(C )的含量相對於樹脂(A )及聚合性 化合物(B)的合計量而言,宜爲0.5〜30質量%,較佳爲 1〜20質量%,更佳爲1〜10質量%。聚合起始劑(C )的含 量若在前述範圍,則能夠以高感度得到圖型。 聚合起始助劑(C1)之使用量相對於樹脂(A)及聚 合性化合物(B )的合計量而言,宜爲0.1〜1 0質量%,較 佳爲0.3〜7質量%。聚合起始助劑(C1)之量若在前述範 圍,則能夠以高感度得到圖型,所得到的圖型形狀良好。 本發明之感光性樹脂組成物含有聚矽氧系界面活性劑 (D )。 聚矽氧系界面活性劑可列舉具有矽氧烷鍵結之界面活 性劑。 具體而言可列舉TORAY SILICONE DC3PA以及相同 -35- 201214033 產品型號的 SH7PA、DC11PA、SH21PA、SH28PA、 SH29PA、SH30PA ;聚醚變性矽油 SH8400 (商品名: Toray Dow Corning 股份有限公司製)、KP321、KP322、 KP323 ' KP324、KP326、KP340、KP341 (信越化學工業 股份有限公司製)、TSF400、TSF401、TSF410、TSF43 00 、TSF4440 、 TSF4445 、 TSF-4446 、 TSF4452 、 TSF4460 ( Momentive Performance Materials Japan 有限公司製)等 〇 聚矽氧系界面活性劑(D)相對於感光性樹脂組成物 而言爲0.0001質量%以上0.05質量%以下,宜爲0.0005 質量%以上0.04質量%以下,較佳爲0.001質量%以上 0.03質量%以下。藉由以此範圍含有界面活性劑,能夠抑 制塗佈時的不均勻及顯像時的不均勻,而使塗膜的平坦性 良好。若塗膜的平坦性良好,則在相同基板上製作複數個 圖型時,可減少圖型之間高度的變異。 本發明之感光性樹脂組成物含有溶劑(E)。 在本發明中可使用的溶劑,可由例如酯溶劑(含_ C Ο Ο -的溶劑)、酯溶劑以外之醚溶劑(含-〇 -的溶劑)、 醚酯溶劑(含-C Ο Ο -與-〇 -的溶劑)、酯溶劑以外之酮溶劑 (含-C 0 -的溶劑)、醇溶劑、芳香族烴溶劑、醯胺溶劑、 二甲亞颯等之中選擇使用。 酯溶劑可列舉乳酸甲酯、乳酸乙酯、乳酸丁酯、2 -羥 基異丁酸甲酯、醋酸乙酯、醋酸正丁酯、醋酸異丁酯、蟻 酸戊酯、醋酸異戊酯、丙酸丁酯、酪酸異丙酯、酪酸乙酯 -36- 201214033 、酪酸丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸丙酯 醯醋酸甲酯、乙醯醋酸乙酯、環己醇醋酸酯、7-丁 等。 醚溶劑可列舉乙二醇單甲醚、乙二醇單乙醚、乙 單丙醚、乙二醇單丁醚、二乙二醇單甲醚、二乙二醇 醚、二乙二醇單丁醚、丙二醇單甲醚、丙二醇單乙醚 二醇單丙醚、丙二醇單丁醚、3-甲氧基-1-丁醇、3-基-3-甲基丁醇、四氫呋喃、四氫吡喃、1,4-二噁烷、 二醇二甲醚、二乙二醇二乙醚、二乙二醇甲基乙基醚 乙二醇二丙醚、二乙二醇二丁醚、苯甲醚、苯乙醚、 苯甲醚等。 醚酯溶劑可列舉甲氧基醋酸甲酯、甲氧基醋酸乙 甲氧基醋酸丁酯、乙氧基醋酸甲酯、乙氧基醋酸乙酯 甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸 、3-乙氧基丙酸乙酯、2-甲氧基丙酸甲酯、2-甲氧基 乙酯、2-甲氧基丙酸丙酯、2-乙氧基丙酸甲酯、2-乙 丙酸乙酯、2-甲氧基-2-甲基丙酸甲酯、2-乙氧基-2-丙酸乙酯、3-甲氧基丁基醋酸酯、3-甲基-3-甲氧基丁 酸酯、丙二醇單甲醚醋酸酯、丙二醇單乙醚醋酸酯、 醇單丙醚醋酸酯、乙二醇單甲醚醋酸酯、乙二醇單乙 酸酯、二乙二醇單乙醚醋酸酯、二乙二醇單丁醚醋酸 〇 酮溶劑可列舉4-羥基-4-甲基-2-戊酮、丙酮、Ια 2-庚酮、 3-庚酮、 4-庚酮、 4-甲基 -2-戊酮、 環戊酮 '乙 內酯 二醇 單乙 '丙 甲氧 二乙 甲基 酯、 ' 3 - 甲酯 丙酸 氧基 甲基 基醋 丙二 醚醋 酯等 丁酮 、環 -37- 201214033 己酮、異佛酮等。 醇溶劑可列舉甲醇、乙醇、丙醇、 醇、乙二醇、丙二醇、甘油等。 芳香族烴溶劑可列舉苯、甲苯、二 醯胺溶劑可列舉N,N-二甲基甲醯 醯胺、N-甲基吡咯烷酮等。 該等溶劑可單獨使用或將兩種以上 從塗佈性、乾燥性的觀點看來,上 在latm的沸點爲120°C以上180°C以下 其中以丙二醇單甲醚、丙二醇單甲醚醋 酸乙酯、二乙二醇甲基乙基醚、3-甲氧 甲氧基-1-丁醇等爲佳。溶劑(E)若爲 制塗佈時的不均勻’而能夠使塗膜的平 感光性樹脂組成物中的溶劑(E ) 性樹脂組成物而言宜爲60〜95質量%, %。換言之,感光性樹脂組成物的固體 量%,較佳爲1 〇〜3 0質量%。溶劑(E ) 圍,則塗佈有感光性樹脂組成物的膜有 另外,本發明之感光性樹脂組成物 官能硫醇化合物(T )。多官能硫醇化 子內具有2個以上磺醯基的化合物。尤 以上來自於脂肪族烴基的碳原子鍵結的 則本發明之感光性樹脂組成物的感度有 多官能硫醇化合物(T )具體而言 丁醇、己醇、環己 甲苯、三甲苯等。 胺、Ν,Ν-二甲基乙 組合使用。 述溶劑之中,係以 的有機溶劑爲佳。 酸酯、3-乙氧基丙 基丁基醋酸酯、3-該等溶劑,則可抑 坦性良好。 的含量相對於感光 較佳爲70〜90質量 成分宜爲5〜40質 的含量若在前述範 平坦性高的傾向。 亦可進一步含有多 t合物(Τ )是指分 其若使用具有2個 磺醯基之化合物, 變高的傾向。 可列舉己烷二硫醇 -38- 201214033 、癸烷二硫醇、1,4-雙(甲基磺醯基)苯、丁二醇雙(3_ 磺醯基丙酸酯)、丁二醇雙(3-磺醯基醋酸酯)、乙二醇 雙(3-磺醯基醋酸酯)、三羥甲基丙烷參(3-擴酸基醋酸 酯)、丁二醇雙(3-磺醯基丙酸酯)、三羥甲基丙烷參( 3 -磺醯基丙酸酯)、三羥甲基丙烷參(3 -磺醯基醋酸酯) 、季戊四醇肆(3-磺醯基丙酸酯)、季戊四醇肆(3·磺醯 基醋酸酯)、參羥乙基參(3-磺醯基丙酸酯)、季戊四醇 肆(3-磺醯基丁酸酯)、1,4-雙(3-磺醯基丁氧基)丁烷 多官能硫醇化合物(T )的含量相對於聚合起始劑( C)而言,宜爲0·1〜10質量%,較佳爲0.5〜7質量%。多 官能硫醇化合物(Τ)的含量若在前述範圍,則感光性樹 脂組成物有感度變高以及顯像性變好的傾向,故爲適合》 在本發明之感光性樹脂組成物中,亦可因應必要倂用 塡充劑、其他高分子化合物、密著促進劑、抗氧化劑、紫 外線吸收劑、光安定劑、鏈轉移劑等各種添加劑。 本發明之感光性樹脂組成物實際上不含顏料及染料等 著色劑。亦即在本發明之感光性樹脂組成物之中,著色劑 相對於組成物全體的含量,宜爲未達1質量% ’較佳爲未 達0.5質量%。 本發明之感光性樹脂組成物’在塡充至光路長爲1cm 的石英槽,並使用分光光度計’在測定波長400〜700nm 的條件下測定透過率的情況下,平均透過率宜爲70%以上 ,較佳爲80%以上。 -39- 201214033 本發明之感光性樹脂組成物在製成塗膜時’塗膜的平 均透過率宜爲90%以上,進一步而言以95°/。以上爲較佳。 此平均透過率,在使用分光光度計對於加熱硬化(例如以 1 0 0〜2 5 0 °c、5分鐘〜3小時的條件進行硬化)後而厚度爲 3μιη的塗膜,在測定波長400〜700nm的條件下進行測定 的情況下得到的平均値。藉此可提供在可見光區域透明性 優異的塗膜。 本發明之感光性樹脂組成物如後述般,藉由塗佈於例 如玻璃、金屬、塑膠等基板 '彩色濾光片、形成有各種絕 緣或導電膜、驅動電路等的該等基板上,而能夠形成塗膜 。塗膜以乾燥及硬化者爲佳。另外,亦可使所得到的塗膜 圖型化成爲所希望的形狀,而作爲圖型使用。亦可進一步 使該等塗膜或圖型形成顯示裝置等構成零件的一部分而使 用。 首先將本發明之感光性樹脂組成物塗佈於基板上。 如以上所述般,可使用旋轉塗佈機、狹縫及旋轉式塗 佈機、狹縫塗佈機、噴墨、輥式塗佈機、浸漬塗佈機等各 種塗佈裝置進行塗佈。 接下來宜進行乾燥或預烘而除去溶劑等揮發成分。藉 此可得到平滑的未硬化塗膜。 此情況下,塗膜的膜厚並不受特別限定,可依照所使 用的材料、用途等而適當調整,可例示例如1〜6 μηι左右 〇 •進—步對於所得到的未硬化塗膜,隔著用於形成目標 -40- 201214033 圖型之光罩,照射由水銀燈、發光二極體所產生的紫外線 等光線。此時光罩的形狀並不受特別限定,形狀或大小只 要因應圖型的用途而選擇即可。 近來的曝光機採用了可截斷未達350nm的光線的濾 光片以將此波長區域截斷,而且採用了可取出43 6nm附 近、408nm附近、365nm附近光線的帶通濾光片以將該等 波長區域選擇性地取出,而能夠對曝光面全體均勻地照射 平行光線。此時,爲了正確地進行光罩與基材的定位,亦 可使用光罩對準機、步進器等裝置。 藉由使曝光後的塗膜與顯像液接觸,而使既定部分, 例如非曝光部溶解,顯像,可得到目標的圖型形狀。 顯像方法爲覆液法、浸漬法、噴霧法等的任一皆可。 甚至還可在顯像時將基材傾斜任意角度。 顯像所使用的顯像液,係以鹼性化合物的水溶液爲佳 〇 鹼性化合物爲無機及有機鹼性化合物任一皆可。 無機鹼性化合物的具體例可列舉氫氧化鈉、氫氧化鉀 、磷酸氫二鈉、磷酸二氫鈉、磷酸氫二銨、磷酸二氫銨、 磷酸二氫鉀、矽酸鈉、矽酸鉀、碳酸鈉、碳酸鉀、碳酸氫 鈉、碳酸氫鉀、硼酸鈉、硼酸鉀、氨等。 有機鹼性化合物可列舉例如四甲基氫氧化錢、2-羥乙 基三甲基氫氧化銨、單甲胺' 二甲胺、三甲基胺、單乙胺 、二乙胺、三乙胺、單異丙胺、二異丙胺、乙醇胺等。 該等無機及有機鹼性化合物在水溶液中的濃度宜爲 -41 - 201214033 0.01〜10質量%,較佳爲0.03~5質量%。 前述顯像液亦可含有界面活性劑。 界面活性劑爲非離子系界面活性劑、陰離子系界面活 性劑或陽離子系界面活性劑之任一皆可。 非離子系界面活性劑可列舉例如聚氧乙烯烷基醚、聚 氧乙烯芳香基醚、聚氧乙烯烷基芳香基醚、其他聚氧乙烯 衍生物、聚氧乙烯/聚氧丙烯塊狀共聚物、去水山梨醇脂 肪酸酯、聚氧乙烯去水山梨醇脂肪酸酯、聚氧乙烯山梨醇 脂肪酸酯、甘油脂肪酸酯、聚氧乙烯脂肪酸酯、聚氧乙烯 烷基胺等。 陰離子系界面活性劑可列舉例如月桂醇硫酸酯鈉或油 醇硫酸酯鈉般的高級醇硫酸酯鹽類;月桂基硫酸鈉或月桂 基硫酸銨般的烷基硫酸鹽類;十二烷基苯磺酸鈉或十二垸 基萘磺酸鈉般的烷基芳香基磺酸鹽類等》 陽離子系界面活性劑可列舉例如硬脂胺鹽酸鹽或月桂 基三甲基氯化銨般的胺鹽或四級銨鹽等。 鹼顯像液中的界面活性劑濃度宜爲0.0 1〜1 〇質量。/。, 較佳爲0.05〜8質量%,較佳爲0.1〜5質量%。 在顯像後進行水洗即可得到圖型。還可進一步因應必 要而進行後烘。後烘係以在150〜24(TC的溫度範圍進行 10〜180分鐘爲佳。 在使未硬化塗膜曝光時,不使用形成有圖型的光罩, 而省略了對全面進行照光及/或顯像,因此能夠得到不具 有圖型的塗膜。 -42- 201214033 依據本發明,可得到柔軟性及耐熱性皆優異的圖型。 以如此的方式由本發明之感光性樹脂組成物所得到之 圖型,能有‘效地使用作爲例如構成彩色濾光片基板及/或 陣列基板的一部分之感光間隙材、可圖型化的保護膜、層 間絕緣膜、用於控制液晶配向的突起、微透鏡、用於調整 膜厚的塗層等、觸控面板用的構件,如上述方式所得到不 具有圖型的塗膜,能有效地使用作爲構成彩色濾光片基板 及/或陣列基板一部分的保護膜。前述彩色濾光片基板及 陣列基板,適合使用於液晶顯示裝置、有機EL顯示裝置 等。 [實施例] 以下藉由實施例對本發明作詳細說明。例中的「%」 及「份」只要沒有特別記載,則爲質量%及質量份。 合成例1 在具備回流冷卻器、滴液漏斗及攪拌機的燒瓶內,以 0.0 2 L/分鐘流通氮氣使其成爲氮氣環境,加入3-甲氧基-1-丁醇2 00質量份及3-甲氧基丁基醋酸酯105質量份,攪 拌同時加熱至70 °C。接下來,使甲基丙烯酸55質量份、 3,4-環氧三環[5.2.1.02 6]癸基丙烯酸酯(式(1-1)所表示 之化合物及式(II-1 )所表示之化合物以莫耳比50 : 50 之混合物)175質量份以及N-環己基馬來醯亞胺70質量 份溶於3-甲氧基丁基醋酸酯140質量份,而調製出溶液 -43- 201214033 ,使用滴液泵花費4小時將該溶液滴入保溫在70°C的燒 瓶內。另一方面,使用另一個滴液泵,花費5小時將使聚 合起始劑2,2'-偶氮雙(2,4-二甲基纈草腈)3〇質量份溶 於3-甲氧基丁基醋酸酯22 5質量份之溶液滴入燒瓶內。 聚合起始劑溶液之滴入結束後,在70°C保持4小時,然 後冷卻至室溫,得到固體成分爲3 2.6質量%、溶液之酸價 爲34.3mg.KOH/g之共聚物(樹脂Aa)溶液。所得到的樹 脂Aa之重量平均分子量(Mw)爲13,600,數量平均分子 量(Μη)爲5,400、分子量分布爲2.5。[In the formulae (IV) and (V), the ring W2, the ring W3 and the ring W4 are independent of each other' represents an aromatic ring having 6 to 12 carbon atoms or a heterocyclic ring having 2 to 10 carbon atoms which may be substituted by a halogen atom; Y2~ Y5 is independent of each other, and represents -〇- or _3-; r6~r9 represents a monovalent saturated hydrocarbon group having 1 to 12 carbon atoms or an aromatic group having 6 to 12 carbon atoms, and the saturated hydrocarbon group and the hydrogen atom contained in the aromatic group may be The aromatic ring having a carbon atom of 6 to 12 may be substituted by a halogen atom, a hydroxyl group or an alkoxy group having 1 to 6 carbon atoms. The same aromatic ring of the formula (ΙΠ) may be used as the hydrogen atom contained in the aromatic ring. Examples of the heterocyclic ring having 2 to 10 carbon atoms which may be optionally substituted by a halogen atom as described above and which may be substituted by a halogen atom include a pyridine ring, a pyrimidine ring, a pyridazine ring, a pyrazine ring, a pyran ring and the like. The saturated hydrocarbon group substituted with a monovalent hydroxy group may, for example, be a hydroxymethyl group, a hydroxyethyl group, a -32-201214033 hydroxypropyl group or a hydroxybutyl group. Examples of the aryl group substituted with a hydroxy group include a hydroxyphenyl group, a hydroxynaphthyl group and the like. The monovalent alkoxy-substituted saturated hydrocarbon group may, for example, be a methoxymethyl 'methoxyethyl group, a methoxypropyl group, a methoxybutyl group, a butoxymethyl group, an ethoxyethyl group or an ethoxy group. Examples of the aryl group substituted by an alkoxy group such as a propyl group or a propoxy butyl group include a methoxyphenyl group and an ethoxynaphthyl group. Specific examples of the compound represented by the formula (IV) and the formula (v) include dimethoxynaphthalene, diethoxynaphthalene, dipropoxynaphthalene, diisopropoxynaphthalene, dibutoxynaphthalene, and the like. Alkoxynaphthalenes; 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10- Diethoxy ruthenium, dipropoxy ruthenium, diisopropoxy ruthenium, dibutoxy ruthenium, dipentyl oxime, dihexyloxy ruthenium, methoxy ethoxy ruthenium, methoxy propylene oxide Base, methoxyisopropoxy oxime, methoxybutoxy oxime, ethoxy propoxy oxime, ethoxyisopropoxy oxime, ethoxybutoxy oxime, propoxy isopropyl a dialkoxy oxime such as oxindole, propoxy oxybutoxy fluorene or isopropoxy butyl hydrazine; dimethoxytetracene, diethoxytetracene, dipropoxy and tetra Further, a dialkoxytetracene group such as benzene, diisopropoxytetracene or dibutoxytetracene may be used, and a thioxanthone compound may also be used as the polymerization initiator (C1). The thioxanthone compound may, for example, be 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1-chloro- 4-propoxythioxanthone and the like. Further, the polymerization initiation aid (c 1 ) may, for example, be an amine compound or a carboxylic acid compound. Examples of the amine compound include aliphatic amine compounds such as triethanolamine, methyldiethanolamine and triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, and 4-di Methylamino benzoic acid isoamyl ester, 4-dimethylamino benzoic acid 2-ethylhexyl, benzoic acid 2-dimethylaminoethyl, N,N-dimethyl-p-toluidine, 4, 4'-bis(dimethylamino)diphenyl ketone (commonly known as micbutone), 4,4'-bis(diethylamino)diphenyl ketone-like aromatic amine compound. The carboxylic acid compound may, for example, be benzosulfonyl acetic acid, methyl benzene sulfonyl acetic acid, ethyl benzene sulfonyl acetic acid, methyl ethyl benzene sulfonyl acetic acid, dimethyl benzene sulfonyl acetic acid or methoxy benzene sulfonate. Acetic acid, dimethoxybenzenesulfonyl acetic acid, chlorobenzenesulfonyl acetic acid, dichlorobenzenesulfonyl acetic acid, N-phenylglycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthyl An aromatic hetero atom such as aminic acid or naphthyloxyacetic acid. A suitable combination of the polymerization initiator (C) and the polymerization initiation aid (C 1 ) is exemplified by an acetophenone compound, a thioxanthone compound, an acetophenone compound, and an aromatic amine compound. Specifically, is it 2-? Lolinyl-1-(4-methylsulfonylphenyl)-2-methylpropan-1-one and 2,4-diethylthioxanthone, 2-dimethylamino-2-benzyl 1-(4-morpholinylphenyl)butan-1-one with 2,4-diethylthioxanthone, 2-dimethylamino-2-(4-methylbenzyl)-1 -(4-morpholinylphenyl)butan-1-one with 2,4-diethylthioxanthone, 2-morpholinyl-1-(4-methylsulfonylphenyl)-2- Methylpropane-1·one and 2-isopropylthioxanthone with 4-isopropylthioxanthone, 2-morpholinyl-1-(4-methylsulfonylphenyl-34-201214033)- 2-methylpropan-1-one with 4,4'-bis(diethylamino)diphenyl ketone, 2-dimethylamino-2-benzyl-1-(4-morpholinylbenzene Butane-1-one and 4,4'-bis(diethylamino)diphenyl ketone, 2-dimethylamino-2-(4-methylbenzyl)-1-(4) -morpholinylphenyl)butan-1-one and 4,4'-bis(diethylamino)diphenyl ketone. The combination of the polymerization initiator (C) and the polymerization initiation aid (C 1 ) is preferably a combination of an acetophenone compound and a thioxanthone compound, 2-morpholinyl·1-4-methylsulfonate. Phenyl)-2-methylpropan-1-one with 2,4-diethylthioxanthone, 2-morpholinyl-1-(4-methylsulfonylphenyl)-2-methyl Propane-1-one and 2-isopropylthioxanthone and 4-isopropylthioxanthone are preferred. According to these combinations, a pattern having high sensitivity and high visible light transmittance can be obtained. The content of the polymerization initiator (C) is preferably from 0.5 to 30% by mass, preferably from 1 to 20% by mass, more preferably from 1 to 20% by mass based on the total amount of the resin (A) and the polymerizable compound (B). 10% by mass. When the content of the polymerization initiator (C) is within the above range, the pattern can be obtained with high sensitivity. The amount of the polymerization initiator (C1) to be used is preferably 0.1 to 10% by mass, and more preferably 0.3 to 7% by mass based on the total amount of the resin (A) and the polymerizable compound (B). When the amount of the polymerization initiation aid (C1) is within the above range, the pattern can be obtained with high sensitivity, and the obtained pattern shape is good. The photosensitive resin composition of the present invention contains a polyfluorene-based surfactant (D). The polyoxo-based surfactant may be an interface active agent having a siloxane coupling. Specifically, TORAY SILICONE DC3PA and the same -35-201214033 product type SH7PA, DC11PA, SH21PA, SH28PA, SH29PA, SH30PA; polyether modified eucalyptus SH8400 (trade name: Toray Dow Corning Co., Ltd.), KP321, KP322 , KP323 'KP324, KP326, KP340, KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), TSF400, TSF401, TSF410, TSF43 00, TSF4440, TSF4445, TSF-4446, TSF4452, TSF4460 (manufactured by Momentive Performance Materials Japan Co., Ltd.) The fluorene-based surfactant (D) is 0.0001% by mass or more and 0.05% by mass or less based on the photosensitive resin composition, and is preferably 0.0005 mass% or more and 0.04 mass% or less, more preferably 0.001 mass% or more and 0.03 mass%. %the following. By containing the surfactant in this range, it is possible to suppress unevenness during coating and unevenness during development, and to improve the flatness of the coating film. When the flatness of the coating film is good, when a plurality of patterns are formed on the same substrate, the variation in height between the patterns can be reduced. The photosensitive resin composition of the present invention contains a solvent (E). The solvent which can be used in the present invention may be, for example, an ester solvent (a solvent containing _C Ο Ο -), an ether solvent other than an ester solvent (a solvent containing - 〇-), an ether ester solvent (including -C Ο Ο - and - a solvent of hydrazine - a ketone solvent (solvent containing -C 0 -) other than an ester solvent, an alcohol solvent, an aromatic hydrocarbon solvent, a guanamine solvent, dimethyl hydrazine, etc. are selected and used. Examples of the ester solvent include methyl lactate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutyrate, ethyl acetate, n-butyl acetate, isobutyl acetate, amyl acid ester, isoamyl acetate, and propionic acid. Butyl ester, isopropyl butyrate, ethyl butyrate-36- 201214033, butyl butyrate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetate, ethyl acetate, cyclohexanol acetate , 7-Ding, etc. Examples of the ether solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol ether, and diethylene glycol monobutyl ether. , propylene glycol monomethyl ether, propylene glycol monoethyl ether glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy-1-butanol, 3-yl-3-methylbutanol, tetrahydrofuran, tetrahydropyran, 1 , 4-dioxane, glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether ethylene glycol dipropyl ether, diethylene glycol dibutyl ether, anisole, phenyl ether , anisole, etc. Examples of the ether ester solvent include methyl methoxyacetate, butyl methoxyacetate acetate, methyl ethoxyacetate, methyl ethoxyacetate methoxypropionate, and 3-methoxy group. Ethyl propionate, 3-ethoxypropionic acid, ethyl 3-ethoxypropionate, methyl 2-methoxypropionate, 2-methoxyethyl ester, propyl 2-methoxypropionate , 2-ethoxypropionic acid methyl ester, 2-ethylpropionic acid ethyl ester, 2-methoxy-2-methylpropionic acid methyl ester, 2-ethoxy-2-propionic acid ethyl ester, 3-methyl Oxybutyl butyl acetate, 3-methyl-3-methoxybutyrate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, alcohol monopropyl ether acetate, ethylene glycol monomethyl ether acetate, Ethylene glycol monoacetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether ketone ketone solvent can be cited as 4-hydroxy-4-methyl-2-pentanone, acetone, Ια 2-g Ketone, 3-heptanone, 4-heptanone, 4-methyl-2-pentanone, cyclopentanone 'ethyl lactone diol monoethyl'-propylmethoxyethyl methyl ester, '3-methyl ester propionic acid Butanone such as oxymethyl acetoacetate, cyclo-37-201214033 hexanone, isophorone, and the like. Examples of the alcohol solvent include methanol, ethanol, propanol, alcohol, ethylene glycol, propylene glycol, and glycerin. Examples of the aromatic hydrocarbon solvent include benzene, toluene and a dimethylamine solvent, and examples thereof include N,N-dimethylformamide and N-methylpyrrolidone. These solvents may be used singly or in the form of coating properties and drying properties, and the boiling point of the above lamat is 120 ° C or more and 180 ° C or less, wherein propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate B An ester, diethylene glycol methyl ethyl ether, 3-methoxymethoxy-1-butanol or the like is preferred. In the solvent (E) resin composition, the solvent (E) resin composition in the flat photosensitive resin composition of the coating film is preferably 60 to 95% by mass, %. In other words, the solid content % of the photosensitive resin composition is preferably from 1 〇 to 30% by mass. The solvent (E) is a film coated with a photosensitive resin composition. Further, the photosensitive resin composition of the present invention is a functional thiol compound (T). A compound having two or more sulfonyl groups in a polyfunctional thiol group. In particular, the sensitivity of the photosensitive resin composition of the present invention derived from a carbon atom bonded to an aliphatic hydrocarbon group is a polyfunctional thiol compound (T), specifically, butanol, hexanol, cyclohexane toluene, trimethylbenzene or the like. Amine, hydrazine, hydrazine-dimethyl ethane are used in combination. Among the solvents mentioned above, an organic solvent is preferred. The acid ester, 3-ethoxypropyl butyl acetate, and the like are excellent in suppressing the solubility. The content is preferably from 70 to 90% by mass based on the photosensitive material. The content of the component is preferably from 5 to 40%, and the flatness is high in the above-mentioned range. Further, it is also possible to further contain a poly-t-compound (Τ), which means that if a compound having two sulfonyl groups is used, it tends to become high. Examples thereof include hexanedithiol-38-201214033, decanedithiol, 1,4-bis(methylsulfonyl)benzene, butanediol bis(3_sulfonylpropionate), butanediol (3-sulfonyl acetate), ethylene glycol bis(3-sulfonyl acetate), trimethylolpropane ginseng (3-propionic acid acetate), butanediol bis(3-sulfonyl) Propionate), trimethylolpropane ginseng (3-sulfonylpropionate), trimethylolpropane ginseng (3-sulfonylacetate), pentaerythritol bismuth (3-sulfonylpropionate) , pentaerythritol bismuth (3. sulfonyl acetate), hydroxyethyl ginseng (3-sulfonylpropionate), pentaerythritol bismuth (3-sulfonylbutyrate), 1,4-bis(3- The content of the sulfonylbutoxy)butane polyfunctional thiol compound (T) is preferably from 0.1 to 10% by mass, preferably from 0.5 to 7% by mass, based on the polymerization initiator (C). When the content of the polyfunctional thiol compound (Τ) is in the above range, the photosensitive resin composition tends to have high sensitivity and high developability, and therefore it is suitable for the photosensitive resin composition of the present invention. Various additives such as a chelating agent, other polymer compound, adhesion promoter, antioxidant, ultraviolet absorber, light stabilizer, and chain transfer agent may be used as necessary. The photosensitive resin composition of the present invention does not substantially contain a coloring agent such as a pigment or a dye. In the photosensitive resin composition of the present invention, the content of the colorant relative to the entire composition is preferably less than 1% by mass', preferably less than 0.5% by mass. In the case where the photosensitive resin composition of the present invention is charged to a quartz cell having an optical path length of 1 cm and a transmittance is measured using a spectrophotometer at a measurement wavelength of 400 to 700 nm, the average transmittance is preferably 70%. The above is preferably 80% or more. -39- 201214033 When the photosensitive resin composition of the present invention is formed into a coating film, the average transmittance of the coating film is preferably 90% or more, and further 95%. The above is preferred. The average transmittance is a coating film having a thickness of 3 μm after being subjected to heat curing (for example, curing at a temperature of 100 to 250 ° C for 5 minutes to 3 hours) using a spectrophotometer at a measurement wavelength of 400 〜 The average enthalpy obtained in the case of measurement under conditions of 700 nm. Thereby, a coating film excellent in transparency in the visible light region can be provided. The photosensitive resin composition of the present invention can be applied to, for example, a substrate, a color filter such as glass, metal, or plastic, or a substrate on which various insulating or conductive films, drive circuits, or the like are formed, as will be described later. A coating film is formed. The coating film is preferably dried and hardened. Further, the obtained coating film can be patterned into a desired shape and used as a pattern. Further, these coating films or patterns may be used to form a part of components such as a display device. First, the photosensitive resin composition of the present invention is applied onto a substrate. As described above, it can be applied by various coating apparatuses such as a spin coater, a slit and a rotary coater, a slit coater, an inkjet, a roll coater, and a dip coater. Next, drying or pre-baking is preferably carried out to remove volatile components such as a solvent. Thereby, a smooth unhardened coating film can be obtained. In this case, the film thickness of the coating film is not particularly limited, and may be appropriately adjusted depending on the material to be used, the use, and the like, and may be exemplified by, for example, 1 to 6 μηι 〇 • Step-by-Step For the obtained uncured coating film, Light rays such as ultraviolet rays generated by mercury lamps and light-emitting diodes are irradiated through a reticle for forming a target-40-201214033 pattern. The shape of the reticle is not particularly limited at this time, and the shape or size may be selected in accordance with the use of the pattern. Recently, the exposure machine uses a filter that cuts light of less than 350 nm to cut off this wavelength region, and a band pass filter that can take out light near 436 nm, near 408 nm, and around 365 nm to take the wavelengths. The area is selectively taken out, and the entire surface of the exposure surface can be uniformly irradiated with parallel rays. At this time, in order to accurately position the mask and the substrate, a mask aligner, a stepper, or the like can be used. By bringing the exposed coating film into contact with the developing solution, a predetermined portion, for example, a non-exposed portion, is dissolved and developed to obtain a target pattern shape. The development method may be any of a liquid coating method, a dipping method, a spray method, and the like. It is even possible to tilt the substrate at any angle during development. The developing solution used for development is preferably an aqueous solution of a basic compound. The basic compound is either an inorganic or an organic basic compound. Specific examples of the inorganic basic compound include sodium hydroxide, potassium hydroxide, disodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium citrate, potassium citrate, Sodium carbonate, potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium borate, potassium borate, ammonia, and the like. Examples of the organic basic compound include tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine 'dimethylamine, trimethylamine, monoethylamine, diethylamine, and triethylamine. , monoisopropylamine, diisopropylamine, ethanolamine, and the like. The concentration of the inorganic and organic basic compounds in the aqueous solution is preferably from -41 to 201214033 0.01 to 10% by mass, preferably from 0.03 to 5% by mass. The aforementioned developing solution may also contain a surfactant. The surfactant may be any of a nonionic surfactant, an anionic interface active agent or a cationic surfactant. Examples of the nonionic surfactant include polyoxyethylene alkyl ether, polyoxyethylene aromatic ether, polyoxyethylene alkyl aromatic ether, other polyoxyethylene derivatives, and polyoxyethylene/polyoxypropylene block copolymers. , sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester, glycerin fatty acid ester, polyoxyethylene fatty acid ester, polyoxyethylene alkylamine and the like. Examples of the anionic surfactant include higher alcohol sulfate salts such as sodium lauryl sulfate or sodium oleyl sulfate; alkyl sulfates such as sodium lauryl sulfate or ammonium lauryl sulfate; and dodecylbenzene; An alkyl aryl sulfonate such as sodium sulfonate or sodium dodecyl naphthalene sulfonate, etc. The cationic surfactant may, for example, be an amine such as stearylamine hydrochloride or lauryl trimethyl ammonium chloride. Salt or quaternary ammonium salt, etc. The concentration of the surfactant in the alkali developing solution is preferably 0.01 to 1 〇 by mass. /. It is preferably 0.05 to 8 mass%, preferably 0.1 to 5 mass%. The pattern is obtained by washing with water after development. It can be further post-baked as necessary. The post-baking is preferably carried out at a temperature ranging from 150 to 24 (TC: 10 to 180 minutes. When the uncured coating film is exposed, the mask formed with the pattern is not used, and the entire illumination and/or illumination is omitted. According to the present invention, it is possible to obtain a pattern which is excellent in both flexibility and heat resistance. In this manner, it is obtained from the photosensitive resin composition of the present invention. The pattern can be used effectively as, for example, a photosensitive spacer material constituting a part of the color filter substrate and/or the array substrate, a patternable protective film, an interlayer insulating film, a protrusion for controlling liquid crystal alignment, and a micro A lens, a coating for adjusting a film thickness, a member for a touch panel, and a coating film having no pattern obtained as described above can be effectively used as a part of a color filter substrate and/or an array substrate. The color filter substrate and the array substrate are preferably used in a liquid crystal display device, an organic EL display device, etc. [Embodiment] Hereinafter, the present invention will be described in detail by way of examples. %) and "parts" are mass% and parts by mass unless otherwise specified. Synthesis Example 1 In a flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen gas was passed at 0.0 2 L/min to make a nitrogen atmosphere. 200 parts by mass of 3-methoxy-1-butanol and 105 parts by mass of 3-methoxybutyl acetate were added, and the mixture was heated while stirring to 70 ° C. Next, 55 parts by mass of methacrylic acid was obtained, 3 4-epoxytricyclo[5.2.1.06 6]decyl acrylate (compound represented by formula (1-1) and compound represented by formula (II-1) in a molar ratio of 50:50) 175 The mass fraction and 70 parts by mass of N-cyclohexylmaleimide are dissolved in 140 parts by mass of 3-methoxybutyl acetate, and the solution is prepared -43-201214033, and the solution is dripped using a drip pump for 4 hours. Into the flask at 70 ° C. On the other hand, using another drip pump, it takes 5 hours to make the polymerization initiator 2,2'-azobis(2,4-dimethylhumulonitrile) 3 parts by mass of a solution of 22 parts by mass of 3-methoxybutyl acetate dissolved in the flask. After the completion of the dropwise addition of the polymerization initiator solution, it was kept at 70 ° C. After 4 hours, it was cooled to room temperature to obtain a copolymer (resin Aa) solution having a solid content of 3.6% by mass and an acid value of the solution of 34.3 mg.KOH/g. The weight average molecular weight (Mw) of the obtained resin Aa. It was 13,600, and the number average molecular weight (?n) was 5,400, and the molecular weight distribution was 2.5.
合成例2 在具備回流冷卻器、滴液漏斗及攪拌機的燒瓶內,以 0.02L/分鐘流通氮氣,使其成爲氮氣環境,加入3_甲氧 基-1-丁醇2 00質量份及3-甲氧基丁基醋酸酯1〇5質量份 ,攪拌同時加熱至70 °C。接下來,使甲基丙烯酸60質量 份、3,4-環氧三環[5.2.1 ·02 6]癸基丙烯酸酯(將式(^ ) 所表示之化合物及式(π -1 )所表示之化合物以莫耳比5 〇 :50混合)240質量份溶於3-甲氧基丁基醋酸酯14〇質 量份,而調製出溶液,使用滴液漏斗,花費4小時將該溶 液滴入保溫在7〇 °C的燒瓶內。另一方面,使用另—個滴 液漏斗,花費4小時將使聚合起始劑2,2'-偶氮雙(2,4-二 甲基纈草腈)30質量份溶於3-甲氧基丁基醋酸酯225質 量份之溶液滴入燒瓶內。聚合起始劑溶液之滴入結束後, -44 - 201214033 在70°C保持4小時,然後冷卻至室溫,得到固體成分爲 32.6質量%、酸價爲ll〇mg-KOH/g (固體成分換算)之共 聚物(樹脂Ab)溶液。所得到的樹脂Aa之重量平均分子 量Mw爲13,400,分子量分布爲2.50。 合成例3 在具備回流冷卻器、滴液漏斗及攪拌機的燒瓶內,以 0.0 2 L/分鐘流通氮氣使其成爲氮氣環境,加入二乙二醇乙 基甲基醚140質量份,攪拌同時加熱至7 0 °C。 接下來,使甲基丙烯酸40質量份、3,4-環氧三環 [5.2.1.02·6]癸基丙烯酸酯(式(1-1)所表示之化合物及式 (II-1 )所表示之化合物的混合物、莫耳比=5 0 : 5 0 ) 340 質量份、二環戊烯基丙烯酸酯(下述式(xl)所表示之化 合物)20質量份溶於二乙二醇乙基甲基醚190質量份, 調製出溶液。 (χΐ) 使用滴液泵,花費4小時將所得到的溶解液滴入保溫 在70°C的燒瓶內。 另一方面,另一個使用滴液泵,花費5小時將使聚合 起始劑2,2·-偶氮雙(2,4-二甲基纈草腈)30質量份溶於 二乙二醇乙基甲基醚24 0質量份之溶液滴入燒瓶內。 聚合起始劑溶液之滴入結束後,在7〇°C保持4小時 、然後冷卻至室溫,得到固體成分爲41.8%的共聚物(樹 -45- 201214033 脂Ac )溶液。所得到的樹脂Ac之重量平均分子量(Mw )爲9.6xl03、分子量分布(Mw/Mn)爲2.02,以固體成 分換算之酸價爲60mg-KOH/g。 合成例4 在具備回流冷卻器、滴液漏斗及攪拌機的燒瓶內,以 0· 02 L/分鐘流通氮氣使其成爲氮氣環境,加入二乙二醇乙 基甲基醚140質量份,攪拌同時加熱至7 0 °C。 接下來,使甲基丙烯酸40質量份、3,4-環氧三環 [5·2·1·02 + 6]癸基丙烯酸酯(式(1-1)所表示之化合物及式 (Π-l)所表示之化合物的混合物、莫耳比= 50: 50) 320 質量份、二環戊基丙烯酸酯(下述式(x2)所表示之化合 物)40質量份溶於二乙二醇乙基甲基醚190質量份,而 調製出溶液。 (X2) 使用滴液泵,花費4小時將所得到的溶解液滴入保溫 在7CTC的燒瓶內。 另一方面,使用另一個滴液泵,花費5小時將使聚合 起始劑2,2·-偶氮雙(2,4-二甲基纈草腈)30質量份溶於 二乙二醇乙基甲基醚24 0質量份之溶液滴入燒瓶內。 聚合起始劑溶液之滴入結束後,在70°C保持4小時 ,然後冷卻至室溫,得到固體成分爲4 1 . 8 1 %的共聚物( 樹脂Ad )溶液。所得到的樹脂Ad之重量平均分子量( -46- 201214033Synthesis Example 2 In a flask equipped with a reflux condenser, a dropping funnel, and a stirrer, nitrogen gas was passed through at 0.02 L/min to make a nitrogen atmosphere, and 3 to methoxy-1-butanol was added in an amount of 200 parts by mass and 3- 5 parts by mass of methoxybutyl acetate was heated and heated to 70 ° C while stirring. Next, 60 parts by mass of methacrylic acid and 3,4-epoxytricyclo[5.2.1 ·02 6]decyl acrylate (represented by the compound represented by the formula (^) and the formula (π -1 )) The compound was dissolved in a molar ratio of 5 〇:50 by 240 parts by mass of 14 parts by mass of 3-methoxybutyl acetate to prepare a solution, and the solution was dropped into the heat for 4 hours using a dropping funnel. In a flask at 7 ° C. On the other hand, using another dropping funnel, it takes 4 hours to dissolve 30 parts by mass of the polymerization initiator 2,2'-azobis(2,4-dimethylhumulonitrile) in 3-methoxy A solution of 225 parts by mass of butyl acetate was dropped into the flask. After the completion of the dropwise addition of the polymerization initiator solution, -44 - 201214033 was maintained at 70 ° C for 4 hours, and then cooled to room temperature to obtain a solid content of 32.6% by mass and an acid value of ll 〇 mg-KOH / g (solid content) Conversion) copolymer (resin Ab) solution. The obtained resin Aa had a weight average molecular weight Mw of 13,400 and a molecular weight distribution of 2.50. Synthesis Example 3 In a flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen gas was passed through at 0.0 2 L/min to make a nitrogen atmosphere, and 140 parts by mass of diethylene glycol ethyl methyl ether was added thereto, and the mixture was heated while stirring. 7 0 °C. Next, 40 parts by mass of methacrylic acid and 3,4-epoxytricyclo[5.2.1.02·6]decyl acrylate (the compound represented by the formula (1-1) and the formula (II-1) are represented. a mixture of the compounds, molar ratio = 50: 50) 340 parts by mass of dicyclopentenyl acrylate (compound represented by the following formula (xl)) 20 parts by mass dissolved in diethylene glycol ethyl group The solvent was prepared by preparing 190 parts by mass of a base ether. (χΐ) Using a drip pump, it took 4 hours to drop the obtained solution into a flask kept at 70 °C. On the other hand, another use of a drip pump takes 5 hours to dissolve 30 parts by mass of the polymerization initiator 2,2·-azobis(2,4-dimethylhumulonitrile) in diethylene glycol B. A solution of 240 parts by mass of methyl ether was dropped into the flask. After the completion of the dropwise addition of the polymerization initiator solution, the mixture was kept at 7 ° C for 4 hours, and then cooled to room temperature to obtain a copolymer (tree -45 - 201214033, fat Ac) having a solid content of 41.8%. The obtained resin Ac had a weight average molecular weight (Mw) of 9.6 x 10, a molecular weight distribution (Mw/Mn) of 2.02, and an acid value of 60 mg-KOH/g in terms of a solid component. Synthesis Example 4 In a flask equipped with a reflux condenser, a dropping funnel, and a stirrer, nitrogen gas was passed through at 0. 02 L/min to make a nitrogen atmosphere, and 140 parts by mass of diethylene glycol ethyl methyl ether was added thereto, followed by heating while stirring. Up to 70 °C. Next, 40 parts by mass of methacrylic acid and 3,4-epoxytricyclo[5·2·1·02 + 6]decyl acrylate (the compound represented by the formula (1-1) and the formula (Π- l) a mixture of the compounds represented by the molar ratio = 50: 50) 320 parts by mass of dicyclopentyl acrylate (compound represented by the following formula (x2)) 40 parts by mass dissolved in diethylene glycol ethyl The solution was prepared by preparing 190 parts by mass of methyl ether. (X2) Using a drip pump, it took 4 hours to drop the obtained solution into a flask kept at 7 CTC. On the other hand, using another drip pump, it takes 5 hours to dissolve the polymerization initiator 2,2·-azobis(2,4-dimethylhum), 30 parts by mass in diethylene glycol B. A solution of 240 parts by mass of methyl ether was dropped into the flask. After the completion of the dropwise addition of the polymerization initiator solution, the mixture was kept at 70 ° C for 4 hours, and then cooled to room temperature to obtain a copolymer (resin Ad) solution having a solid content of 41.81 %. The weight average molecular weight of the obtained resin Ad ( -46 - 201214033
Mw)爲7·9χ103,分子量分布(Mw/Mn)爲1.82,以固體 成分換算之酸價爲60mg-KOH/g" 合成例5 在具備回流冷卻器、滴液漏斗及攪拌機的燒瓶內,以 0.0 2 L/分鐘流通氮氣使其成爲氮氣環境,加入二乙二醇乙 基甲基醚60質量份,攪拌同時加熱至90t。接下來,花 費3小時連續滴入甲基丙烯酸甲酯13重量份、甲基丙烯 酸7重量份、甲基丙烯酸正丁酯14重量份、丙烯酸2-乙 基己酯6重量份、偶氮雙纈草腈0.4重量份、正十二烷基 硫醇0.8重量份。然後,在90°C保持30分鐘之後,使溫 度昇溫至1 〇 51,並保持3小時,然後冷卻至室溫,得到 固體成分爲40.1 %的共聚物(樹脂Ae )溶液。所得到的 樹脂Ae之重量平均分子量(Mw)爲1.6xl04、分子量分 布(Mw/Mn)爲 2.02。 關於所得到的樹脂Aa〜Ae之重量平均分子量(Mw) 及數量平均分子量(Μη)的測定係使用GPC法,並採用 以下的條件進行。 裝置:Κ2479 (島津製作所股份有限公司製)Mw) is 7·9χ103, the molecular weight distribution (Mw/Mn) is 1.82, and the acid value in terms of solid content is 60 mg-KOH/g" Synthesis Example 5 In a flask equipped with a reflux cooler, a dropping funnel, and a stirrer, 0.0 2 L/min of nitrogen gas was passed to make a nitrogen atmosphere, 60 parts by mass of diethylene glycol ethyl methyl ether was added, and the mixture was heated to 90 t while stirring. Next, 13 parts by weight of methyl methacrylate, 7 parts by weight of methacrylic acid, 14 parts by weight of n-butyl methacrylate, 6 parts by weight of 2-ethylhexyl acrylate, and azobisindole were continuously added dropwise over 3 hours. 0.4 parts by weight of oxalic acid and 0.8 parts by weight of n-dodecyl mercaptan. Then, after maintaining at 90 ° C for 30 minutes, the temperature was raised to 1 〇 51 and held for 3 hours, and then cooled to room temperature to obtain a copolymer (resin Ae ) solution having a solid content of 40.1%. The obtained resin Ae had a weight average molecular weight (Mw) of 1.6 x 10 4 and a molecular weight distribution (Mw / Mn) of 2.02. The measurement of the weight average molecular weight (Mw) and the number average molecular weight (?n) of the obtained resins Aa to Ae was carried out by the following conditions using the GPC method. Device: Κ2479 (made by Shimadzu Corporation)
管柱:SHIMADZU Shim-pack GPC-80M 管柱溫度:40°C 溶劑:THF (四氫呋喃)Column: SHIMADZU Shim-pack GPC-80M Column temperature: 40 ° C Solvent: THF (tetrahydrofuran)
流速:1.0mL/min 偵測器:RI -47- 201214033 將上述所得到的聚苯乙烯換算之重量平均分子量及數量 平均分子量之比定爲分子量分布(Mw/Mn )。 實施例及比較例 <感光性樹脂組成物的調製> 將表1之成分混合,而得到感光性樹脂組成物1〜8。 [表1] 感光性樹脂組成物 1 2 3 4 5 60 6 7 8 樹脂㈧(份) Aa 60 60 Ab 50 60 Ac 60 Ad 60 Ae 40 聚合性化合物(B1) (份) B1a 40 40 50 20 40 40 B1b 20 Blc 40 聚合性化合物(B2)(份) B2a 40 B2b 20 聚合起始劑(C)(份) Ca 6 3 3 3 6 3 3 Cb 6 聚合起始助劑(C1)(份) C1a 6 6 6 6 多官能硫醇(T1)(份) 1 1 1 熱交聯劑 Ha 3.2 聚矽氧系界面活性劑(D) 0.03 0.03 0.03 0.03 0.03 0.03 溶劑(E)(份) Ea 20 20 20 20 20 20 20 Eb 18 18 18 18 18 18 18 Ec 20 20 20 20 20 20 20 Ed 42 42 42 42 42 42 42 Ee 100 固體成分量(%) 33 33 33 33 33 33 33 33 組成物的平均透過率(%) 90% 90% 92% 92% 91% 91% 90% 89% 膜(3"m)之平均透過率(%) 98% 99% 98% 98% 98% 98% 99% 97% 丙烯酸當量(g/eq) 490 504 403 698 278 504 504 521 環氧當量(g/eq) 652 500 600 500 652 469 500 0 表1中各成分如以下所述。在表1中,樹脂(A)的 份數表示以固體成分換算之質量份。 樹脂(A ) ; Aa :合成例1所得到的樹脂Aa -48- 201214033 樹脂(A ) ; Ab :合成例2所得到的樹脂 樹脂(A ) ; A c :合成例3所得到的樹脂 樹脂(A ) ; A d :合成例4所得到的樹脂 樹脂(A ) ; A e :合成例5所得到的樹脂 聚合性化合物(B 1 ) ; B 1 a :環氧乙烷變 醇六丙烯酸酯(下述式所表示之化合物 DPEA12 ;日本化藥股份有限公司製) ch2o-a° ch2o-a° a0och2-c-ch2 ο ch2-c ch2o a0 ch2o-a° ch2o-a° , x 〇 〇 A°= —ch2ch2o 4— c - ch=ch2 or —c-ch:ch2 聚合性化合物(Bl) ; Bib:聚乙二醇二 EBECRYL1 1 ; DAICEL CYTEC 股份有限公司 物中含有2個丙烯醯氧基、1 1個- 〇CH2CH2-) 聚合性化合物(B 1 ) ; B 1 c :十四乙二醇 (Light Acrylate 14EG-A :共榮社化學製;在 有2個丙烯醯氧基、14個-OCH2CH2-) 聚合性化合物(B2) ; B2a:二季戊四醇 (KAYARADDPHA ;日本化藥股份有限公司製 聚合性化合物(B2 ) ; B2b :三羥甲基丙 酯(NK酯A-TMPT ;新中村化學工業製) 聚合起始劑(C ) ; Ca : 2-嗎啉基-1- ( 4- 苯基)-2-甲基丙烷-1-酮(IRGACURE 907; 製)Flow rate: 1.0 mL/min. Detector: RI - 47 - 201214033 The ratio of the weight average molecular weight and the number average molecular weight in terms of polystyrene obtained above was defined as a molecular weight distribution (Mw/Mn). EXAMPLES AND COMPARATIVE EXAMPLES <Preparation of photosensitive resin composition> The components of Table 1 were mixed to obtain photosensitive resin compositions 1 to 8. [Table 1] Photosensitive resin composition 1 2 3 4 5 60 6 7 8 Resin (VIII) (parts) Aa 60 60 Ab 50 60 Ac 60 Ad 60 Ae 40 Polymerizable compound (B1) (part) B1a 40 40 50 20 40 40 B1b 20 Blc 40 Polymerizable compound (B2) (part) B2a 40 B2b 20 Polymerization initiator (C) (part) Ca 6 3 3 3 6 3 3 Cb 6 Polymerization start aid (C1) (part) C1a 6 6 6 6 Polyfunctional thiol (T1) (parts) 1 1 1 Thermal crosslinker Ha 3.2 Polyoxo-based surfactant (D) 0.03 0.03 0.03 0.03 0.03 0.03 Solvent (E) (parts) Ea 20 20 20 20 20 20 20 Eb 18 18 18 18 18 18 18 Ec 20 20 20 20 20 20 20 Ed 42 42 42 42 42 42 42 Ee 100 Solid content (%) 33 33 33 33 33 33 33 33 Average transmittance of the composition (%) 90% 90% 92% 92% 91% 91% 90% 89% Membrane (3"m) Average Transmittance (%) 98% 99% 98% 98% 98% 98% 99% 97% Acrylic Equivalent (g/eq) 490 504 403 698 278 504 504 521 Epoxy equivalent (g/eq) 652 500 600 500 652 469 500 0 The ingredients in Table 1 are as follows. In Table 1, the parts of the resin (A) represent parts by mass in terms of solid content. Resin (A); Aa: Resin Aa-48-201214033 Resin (A) obtained in Synthesis Example 1; Ab: Resin resin (A) obtained in Synthesis Example 2; A c : Resin resin obtained in Synthesis Example 3 ( A); A d : resin resin (A) obtained in Synthesis Example 4; A e : resin polymerizable compound (B 1 ) obtained in Synthesis Example 5; B 1 a : ethylene oxide-alcohol hexaacrylate ( Compound DPEA12 represented by the following formula; manufactured by Nippon Kayaku Co., Ltd.) ch2o-a° ch2o-a° a0och2-c-ch2 ο ch2-c ch2o a0 ch2o-a° ch2o-a° , x 〇〇A° = —ch2ch2o 4— c — ch=ch2 or —c-ch:ch2 Polymerizable compound (Bl) ; Bib: polyethylene glycol II EBECRYL1 1 ; DAICEL CYTEC Co., Ltd. contains 2 propylene decyloxy groups, 1 1 - 〇CH2CH2-) polymerizable compound (B 1 ) ; B 1 c : tetradecyl glycol (Light Acrylate 14EG-A: manufactured by Kyoritsu Chemical Co., Ltd.; in the presence of 2 propylene decyloxy groups, 14 -OCH2CH2 -) Polymerizable compound (B2); B2a: dipentaerythritol (KAYARADDPHA; polymerizable compound (B2) manufactured by Nippon Kayaku Co., Ltd.; B2b: trimethylol propyl ester (NK ester A-TMPT; Shin-Nakamura Chemical Industries, Ltd.) polymerization initiator (C); Ca: 2- morpholin-1- (4-phenyl) -2-methyl-propan-1-one (IRGACURE 907; manufactured)
Ab Ac Ad Ae 性二季戊四 ,KAYARAD 丙烯酸酯( 製;在化合 二丙烯酸酯 化合物中含 六丙烯酸酯 ) 烷三丙烯酸 _甲基磺醯基 BASF Japan -49- 201214033 聚合起始劑(C) ; Cb: 2-苄基-2-二甲基胺基-1-(4- 嗎啉基苯基)丁烷-1-酮(IRGACURE 369; BASF Japan 製) 聚合起始助劑(Cl ) ; CU : 2,4-二乙基噻噸酮( DETX-S ;日本化藥股份有限公司製) 熱交聯劑;Ha :異氰酸酯化合物(Duranate E-402-B8 0T :旭化成化學製) 多官能硫醇(T1 ):季戊四醇肆(3-磺醯基丙酸酯) (PEMP ; SC有機化學股份有限公司製) 聚矽氧系界面活性劑(D ) ; SH8400 :東麗道康寧製 溶劑(E) ;Ea:丙二醇單甲醚醋酸酯 溶劑(E) ;Eb:3-乙氧基丙酸乙酯 溶劑(E ) ; Ec : 3-甲氧基1-丁醇 溶劑(E) ; Ed: 3-甲氧基丁基醋酸酯 溶劑(E ) ; Ee :二乙二醇二甲醚 溶劑(E )係以使感光性樹脂組成物的固體成分量成 爲表1的「固體成分量(%)」的方式混合’溶劑(E) 中的溶劑成分(Ea )〜(Ee )之値表示在溶劑(E )中的 質量比。 <組成物的平均透過率> 關於所得到的感光性樹脂組成物1 ~8 ’分別使用紫外 /可見光近紅外線分光光度計(V-650 ;日本分光股份有限 公司製,石英槽、光路長:1cm),測定在400〜700nm的 -50- 201214033 平均透過率 % 表 於 示 揭 果 結 將 <膜的平均透過率〉 使用所得到的感光性樹脂組成物1〜7,並採用以下的 條件,以使硬化後的膜厚分別成爲3μιη的方式製作膜。 依序以中性洗劑、水及醇洗淨邊長2英吋的方形玻璃 基板(# 1 73 7 ; Corning公司製),然後進行乾燥。以使後 烘後的膜厚成爲3·0μιη的方式’將感光性樹脂組成物旋轉 塗佈在此玻璃基板上,接下來在無塵烘箱中’以90 °C預 烘1 〇分鐘。冷卻後,將塗佈有此感光性樹脂組成物的基 板與石英玻璃製光罩的間隔定爲ΙΟΟμιη,使用曝光機( TME-150RSK; Topcon股份有限公司製,光源:超高壓水 銀燈),在大氣環境下,以曝光量l〇〇mJ/cm2 (以3 65nm 爲基準)照射光線。此外,此時對的感光性樹脂組成物的 照射,係使由超高壓水銀燈放射出的光線通過光學濾光片 (UV-3 5 ;朝日分光股份有限公司製)而進行。照光後, 在23 °C將前述塗膜浸漬於含有非離子系界面活性劑0.12% 與氫氧化鉀0.04%的水系顯像液,並且搖動60秒鐘使其 顯像,然後在1 50°C加熱180分鐘而得到膜。 使用顯微分光測光裝置(OSP-SP200; OLYMPUS公 司製),對於所得到的膜測定400〜700nm的平均透過率 (% )。透過率變高代表吸收變小的意思。將結果揭示於 表1 ° -51 - 201214033 <圖型形成> 依序以中性洗劑、水及酒精洗淨邊長2英吋的方形玻 璃基板(#1737; Corning公司製),然後進行乾燥。以使 後烘後的膜厚成爲4.5 μηι的方式,將感光性樹脂組成物旋 轉塗佈於此玻璃基板上。接下來在無塵烘箱中,以90 °C 預烘1 〇分鐘。冷卻後,將塗佈有此感光性樹脂組成物的 基板與石英玻璃製光罩的間隔定爲ΙΟΟμηι,使用曝光機( TME-150RSK ; Topcon股份有限公司製,光源:超高壓水 銀燈),在大氣環境下以曝光量100mJ/cm2 (以365nm爲 基準)照射光線。此外,此時對感光性樹脂組成物的照射 ,係使由超高壓水銀燈放射出的光線通過光學濾光片( UV-35 ;朝日分光股份有限公司製)而進行。另外,光罩 採用圖型(具有邊長10 μιη的正方形透光部,該正方形的 間隔爲1 ΟΟμιη )(亦即透光部)形成於相同平面上的光罩 〇 照光後,在23 °C將前述塗膜浸漬於含有非離子系界 面活性劑0.12%與氫氧化鉀0.04%的水系顯像液,並且搖 動6 0秒鐘使其顯像,水洗後,在烘箱中以1 5 0 °C進行1 8 0 分鐘後烘,得到圖型。 <圖型線寬之測定> 對於所得到圖型的線寬,以三維非接觸表面形狀測量 系統(Micromap MM527N-PS-M100 ;菱化 System 股份有 限公司製)進行測量。在距離基板面相對於圖型高度而言 -52- 201214033 5°/。的高度之處測量圖型線寬。將結果揭示於表4。 <機械特性(總變位量及回復率)> 使用動態超微小硬度計(DUH-W201 :島津製作所股 份有限公司製)’對於所得到的圖型測定總變位量(μηι )及彈性變位量(μιη ),計算出回復率(% )。可判斷出 總變位量愈大’則柔軟性愈高。將結果揭示於表4。 -測定條件- 測試模式:負荷-除荷測試 測試力:20mN 負荷速度:4.41mN/sec 保持時間:5sec 壓頭:圓錐體壓頭(直徑50μιη)Ab Ac Ad Ae dipentaquat, KAYARAD acrylate (containing hexaacrylate in the compound diacrylate compound) alkane triacrylate _methylsulfonyl BASF Japan -49- 201214033 polymerization initiator (C); Cb: 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)butan-1-one (IRGACURE 369; manufactured by BASF Japan) polymerization starting aid (Cl); CU : 2,4-Diethylthioxanthone (DETX-S; manufactured by Nippon Kayaku Co., Ltd.) Thermal crosslinking agent; Ha: Isocyanate compound (Duranate E-402-B8 0T: manufactured by Asahi Kasei Chemicals Co., Ltd.) (T1): pentaerythritol oxime (3-sulfonylpropionate) (PEMP; SC Organic Chemical Co., Ltd.) polyfluorene surfactant (D); SH8400: Toray Dow Corning solvent (E); Ea : propylene glycol monomethyl ether acetate solvent (E); Eb: 3-ethoxypropionate ethyl ester solvent (E); Ec: 3-methoxy 1-butanol solvent (E); Ed: 3-methoxy Ethyl butyl acetate solvent (E); Ee: Diethylene glycol dimethyl ether solvent (E) is a method in which the solid content of the photosensitive resin composition is mixed as "solid content (%)" in Table 1. The solvent component (Ea) to (Ee) in the solvent (E) represents the mass ratio in the solvent (E). <Average transmittance of the composition> The ultraviolet/visible near-infrared spectrophotometer (V-650; manufactured by JASCO Corporation, quartz channel, optical path length) was used for each of the obtained photosensitive resin compositions 1 to 8'. :1cm), measured at -400-201214033, average transmittance at 400 to 700 nm, % of the film, showing the average transmittance of the film, using the obtained photosensitive resin compositions 1 to 7, and using the following Under the conditions, a film was formed so that the film thickness after hardening became 3 μm. A square glass substrate (# 1 73 7 ; manufactured by Corning Co., Ltd.) having a side length of 2 inches was washed with a neutral detergent, water, and alcohol, followed by drying. The photosensitive resin composition was spin-coated on the glass substrate in such a manner that the film thickness after the post-baking was 3·0 μm, and then pre-baked at 90 ° C for 1 minute in a dust-free oven. After cooling, the distance between the substrate coated with the photosensitive resin composition and the mask made of quartz glass was set to ΙΟΟμηη, and an exposure machine (TME-150RSK; Topcon Corporation, light source: ultrahigh pressure mercury lamp) was used in the atmosphere. In the environment, the light is irradiated with an exposure amount of l〇〇mJ/cm2 (based on 3 65 nm). Further, the irradiation of the photosensitive resin composition at this time was carried out by passing the light emitted from the ultrahigh pressure mercury lamp through an optical filter (UV-3 5; manufactured by Asahi Co., Ltd.). After illuminating, the coating film was immersed in an aqueous developing solution containing 0.12% of a nonionic surfactant and 0.04% of potassium hydroxide at 23 ° C, and was visualized by shaking for 60 seconds, and then at 150 ° C. The film was heated by heating for 180 minutes. The average transmittance (%) of 400 to 700 nm was measured for the obtained film using a microscopic spectrophotometer (OSP-SP200; manufactured by OLYMPUS Co., Ltd.). A higher transmittance means that the absorption becomes smaller. The results are disclosed in Table 1 ° -51 - 201214033 <Form Formation> A square glass substrate (#1737; manufactured by Corning Co., Ltd.) having a side length of 2 inches was washed with a neutral detergent, water, and alcohol, and then Dry. The photosensitive resin composition was spin-coated on the glass substrate so that the film thickness after post-baking became 4.5 μm. Next, pre-bake at 90 °C for 1 在 minutes in a clean oven. After cooling, the distance between the substrate coated with the photosensitive resin composition and the quartz glass mask was set to ΙΟΟμηι, and an exposure machine (TME-150RSK; Topcon Corporation, light source: ultrahigh pressure mercury lamp) was used in the atmosphere. The light was irradiated with an exposure amount of 100 mJ/cm 2 (based on 365 nm). Further, at this time, the irradiation of the photosensitive resin composition was carried out by passing the light emitted from the ultrahigh pressure mercury lamp through an optical filter (UV-35; manufactured by Asahi Co., Ltd.). In addition, the reticle adopts a pattern (a square light-transmitting portion having a side length of 10 μm, and the interval of the square is 1 ΟΟμιη) (that is, a light-transmitting portion) is formed on the same plane as a reticle after illumination at 23 ° C. The coating film was immersed in an aqueous developing solution containing 0.12% of a nonionic surfactant and 0.04% of potassium hydroxide, and shaken for 60 seconds to develop a image, and after washing with water, at 150 ° C in an oven. After drying for 180 minutes, the pattern was obtained. <Measurement of the pattern line width> The line width of the obtained pattern was measured by a three-dimensional non-contact surface shape measuring system (Micromap MM527N-PS-M100; manufactured by Ryoden System Co., Ltd.). Between the surface of the substrate and the height of the pattern -52- 201214033 5 ° /. The height of the pattern is measured at the height of the line. The results are disclosed in Table 4. <Mechanical characteristics (total displacement amount and recovery rate)> Using a dynamic ultra-micro hardness tester (DUH-W201: manufactured by Shimadzu Corporation), the total amount of displacement (μηι) was measured for the obtained pattern and The elastic displacement amount (μιη ) was calculated and the recovery rate (%) was calculated. It can be judged that the larger the total amount of displacement, the higher the softness. The results are disclosed in Table 4. - Measurement conditions - Test mode: Load-de-load test Test force: 20mN Load speed: 4.41mN/sec Hold time: 5sec Indenter: Cone head (diameter 50μιη)
回復率(% ):(彈性變位量(μιη ) /總變位量(μιη ))xlOO <塗膜形成> 依序以中性洗劑、水及丙烷-2-醇洗淨邊長2英吋的 方形玻璃基板(# 1 73 7,Corning公司製),然後進行乾燥 。以使後烘後的膜厚成爲3 μιη的方式,將感光性樹脂組 成物旋轉塗佈於此玻璃基板上。接下來在無塵烘箱中,以 l〇〇°C預烘3分鐘。冷卻後,使用曝光機(TME-150RSK; Topcon股份有限公司製,光源:超高壓水銀燈),在大 -53- 201214033 氣環境下以曝光量lOOmJ/cm2 (以3 65nm爲基準)照射光 線。此外,此時使由超高壓水銀燈放射出的光線通過光學 過濾片(UV-3 5 ;朝日分光股份有限公司製)而進行對感 光性樹脂組成物的照射。另外,並未使用光罩。 照光後,在23 t將前述塗膜浸漬於含有非離子系界 面活性劑0.12%與氫氧化鉀0.04%的水系顯像液,並且搖 動60秒鐘使其顯像,水洗後,在烘箱中以220°C進行後 烘20分鐘而得到圖型。 <耐熱性評估> 在無塵烘箱中,以240°C將所得到的塗膜加熱1小時 ,並測定膜厚。由加熱前後的膜厚,依照下式分別求得變 化率。 膜厚變化率(% ):加熱後的膜厚(μ m ) /加熱前的 膜厚(μηι ) 如果塗膜的耐熱性良好,則使用相同的感光性樹脂組 成物所形成的圖型的耐熱性也良好。將結果揭示於表2。 [表2] m m 比較例 1 2 3 4 5 6 1 2 感光性樹脂組成物 1 2 3 4 6 7 5 8 圖型線寬⑽】 19.5 20.1 23.2 23.5 20.3 21.0 21.2 25.0 機械特性 總變位量[//m] 1.56 1.35 1.42 1.7 1.40 1.52 0.71 1.62 回復率ra 30« 32% 35% 28% 33% 35« 80% 29% 耐熱性 膜厚變化率[%] 92% 93% 93% 90% 92% 93% 96% 83% 確認了由本發明之感光性樹脂組成物所得到圖型的柔 軟性優異。進一步還確認了由本發明之感光性樹脂組成物 -54- 201214033 所得到的塗膜兼具優異的耐熱性。 藉由使用這樣的感光性樹脂組成物形成塗膜或圖型’ 並以該等作爲感光間隙材而適用於液晶顯示裝置’可抑制 在低溫環境所發生的液晶層發泡,而能夠提升液晶顯示裝 置的耐久性。 產業上之可利用性 本發明之感光性樹脂組成物可提供一種柔軟性及耐熱 性皆優異的圖型。 由本發明之感光性樹脂組成物所得到之圖型,能有效 地使用作爲例如構成彩色濾光片基板及/或陣列基板一部 分的感光間隙材、可圖型化的保護膜、層間絕緣膜 '用於 控制液晶配向的突起、微透鏡、用於調整膜厚的塗層等' 觸控面板用的構件,如上述方式所得到不具有圖型的塗膜 ’能有效地使用作爲構成彩色濾光片基板及/或陣列基板 一部分的保護膜。前述彩色濾光片基板及陣列基板適合使 用於液晶顯示裝置、有機EL顯示裝置等。 -55-Recovery rate (%): (elastic displacement amount (μιη) / total displacement amount (μιη)) xlOO <coat film formation> sequentially washed with neutral detergent, water and propan-2-ol A 2-inch square glass substrate (#1 73 7, manufactured by Corning) was then dried. The photosensitive resin composition was spin-coated on the glass substrate so that the film thickness after post-baking was 3 μm. Next, pre-bake at l〇〇°C for 3 minutes in a dust-free oven. After cooling, an exposure machine (TME-150RSK; Topcon Corporation, light source: ultrahigh pressure mercury lamp) was used, and the light was irradiated with an exposure amount of 100 mJ/cm2 (based on 3 65 nm) in a gas atmosphere of -53-201214033. Further, at this time, the light emitted from the ultrahigh pressure mercury lamp was irradiated onto the photosensitive resin composition through an optical filter (UV-3 5; manufactured by Asahi Co., Ltd.). In addition, no reticle is used. After illuminating, the coating film was immersed in a water-based developing solution containing 0.12% of a nonionic surfactant and 0.04% of potassium hydroxide at 23 t, and shaken for 60 seconds to visualize it, after washing with water, in an oven. The pattern was obtained by post-baking at 220 ° C for 20 minutes. <Heat resistance evaluation> The obtained coating film was heated at 240 ° C for 1 hour in a dust-free oven, and the film thickness was measured. The change rate was obtained from the film thickness before and after heating according to the following formula. Film thickness change rate (%): film thickness after heating (μm) / film thickness before heating (μηι) If the heat resistance of the coating film is good, heat resistance of the pattern formed using the same photosensitive resin composition Sex is also good. The results are disclosed in Table 2. [Table 2] mm Comparative Example 1 2 3 4 5 6 1 2 Photosensitive resin composition 1 2 3 4 6 7 5 8 Pattern line width (10)] 19.5 20.1 23.2 23.5 20.3 21.0 21.2 25.0 Mechanical property total displacement amount [/ /m] 1.56 1.35 1.42 1.7 1.40 1.52 0.71 1.62 Recovery rate ra 30« 32% 35% 28% 33% 35« 80% 29% Heat resistance film thickness change rate [%] 92% 93% 93% 90% 92% 93 % 96% 83% It was confirmed that the pattern obtained by the photosensitive resin composition of the present invention is excellent in flexibility. Further, it was confirmed that the coating film obtained by the photosensitive resin composition of the present invention -54 - 201214033 has excellent heat resistance. By using such a photosensitive resin composition to form a coating film or pattern ', and applying these as a photosensitive gap material to a liquid crystal display device', it is possible to suppress liquid crystal layer foaming which occurs in a low-temperature environment, and to improve liquid crystal display. The durability of the device. Industrial Applicability The photosensitive resin composition of the present invention can provide a pattern excellent in both flexibility and heat resistance. The pattern obtained by the photosensitive resin composition of the present invention can be effectively used as, for example, a photosensitive gap member constituting a color filter substrate and/or an array substrate, a pattern protective film, and an interlayer insulating film. For the control of the liquid crystal alignment, the microlens, the coating for adjusting the film thickness, etc., the member for the touch panel, the coating film having the pattern obtained as described above can be effectively used as the color filter. A protective film on a portion of the substrate and/or the array substrate. The color filter substrate and the array substrate are suitably used for a liquid crystal display device, an organic EL display device, or the like. -55-
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JP2013160825A (en) * | 2012-02-02 | 2013-08-19 | Sumitomo Chemical Co Ltd | Photosensitive resin composition |
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JP2016030764A (en) * | 2014-07-25 | 2016-03-07 | 東洋インキScホールディングス株式会社 | Reactive monomer, and polymerizable composition using the same |
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JP2011085697A (en) * | 2009-10-14 | 2011-04-28 | Sumitomo Chemical Co Ltd | Colored photosensitive resin composition |
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JP5765049B2 (en) * | 2010-05-27 | 2015-08-19 | Jsr株式会社 | Radiation-sensitive resin composition for forming cured film, method for producing radiation-sensitive resin composition for forming cured film, cured film, method for forming cured film, and display element |
JP5471851B2 (en) * | 2010-06-03 | 2014-04-16 | Jsr株式会社 | Radiation-sensitive resin composition, cured film, method for forming cured film, and display element |
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2011
- 2011-05-31 TW TW100119006A patent/TW201214033A/en unknown
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US9488912B2 (en) | 2011-12-05 | 2016-11-08 | Hitachi Chemical Company, Ltd. | Method of forming protective film for touch panel electrode, photosensitive resin composition and photosensitive element, and method of manufacturing touch panel |
US9964849B2 (en) | 2011-12-05 | 2018-05-08 | Hitachi Chemical Company, Ltd. | Method for forming resin cured film pattern, photosensitive resin composition, photosensitive element, method for producing touch panel, and resin cured film |
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US10663861B2 (en) | 2011-12-05 | 2020-05-26 | Hitachi Chemical Company, Ltd. | Method for forming resin cured film pattern, photosensitive resin composition, photosensitive element, method for producing touch panel, and resin cured film |
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CN102289150A (en) | 2011-12-21 |
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