201213931 六、發明說明： 【發明所屬之技術領域】 本發明係有關進行修理液晶面板等之修理裝置。 【先前技術】 一般而言，液晶面板，係在透過配線而被各個接續於 電極之複數個薄膜電晶體側之基板、與彩色濾光片之類的 濾光片側之基板之間，配置液晶層而構成。此類之顯示用 面板，係於製造過程進行點燈檢査。點燈檢查之結果，對 於不良品面板之中，可以修正者會施以修理處理。進行此 類修正之裝置方面，有例如專利文獻1之顯示用面板之處 理裝置。 該顯示用面板之處理裝置，係由包含：將顯示用面板 在此之薄膜電晶體及配線成爲比濾光片下側之狀態下共同 接受之複數面板接受部、具備各個對應至少2個面板接受 部之至少2個探測台（probe block)之可以在顯示用面板 電極之上方側按壓接觸子之探測台（probe block )、在顯 示用面板之被處理處從上方照射照明用光線之背光、與被 配置於顯示用面板下方側之處理單元所構成。處理單元， 係由包含對被處理處將處理用雷射光線從下方側照射之雷 射發生器、與從下方側拍攝被處理處之攝影機（video camera)。藉此，不會錯置顯示用面板之上下，而可以進 行修正。 -5- 201213931 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2005 - 22765 2號公報 【發明內容】 [發明所欲解決之課題] 上述之處理裝置中，係以面板接受部接受從外部被搬 入之顯示用面板而施以處理，將處理已結束之顯示用面板 搬出至外部，搬入新的顯示用面板並反覆以上之處理，執 行複數之顯示用面板之修正。 利用該處理裝置，能夠將顯示用面板從其下側有效率 地修正，但是，當顯示用面板之數量變多時，顯示用面板 之搬入、定位、修正處理、搬出等一連串動作上會比較費 時，不適於連續地處理數量多的顯示用面板。 本發明之目的在於提供一種能夠連續地並且有效率地 修理面板之修理裝置。 [用以解決課題之手段] 爲了解決上述課題之本發明係一種對處理對象面板進 行修理處理之修理裝置，其特徵係具備搬送處理對象面板 進行修理處理之處理傳輸裝置（conveyor);該處理傳輸 裝置具備：可以滑動地支撐前述處理對象面板之滾柱式傳 輸部（roller conveyor)、被設在該滾柱式傳輸部上流側 將處理對象面板從外部搬入之搬入部、被設在前述滾柱式 -6- 201213931 傳輸部中央部對從前述搬入部收到之前述面板施以修理處 理之修理部、被設在前述滾柱式傳輸部下流側將在前述修 理部被施以修理處理之前述面板朝外部搬出之搬出部、將 前述面板搬入前述搬入部使之朝與搬送方向正交之方向定 位並將該面板朝搬送方向之前述修理部以及前述搬出部搬 送同時定位搬送方向之面板搬送台；前述滾柱式傳輸部被 構成具備可以滑動地支撐不具有驅動源之前述面板之活動 滾柱並輔助利用前述面板搬送台之前述面板之搬送；前述 修理部具備：從前述滾柱式傳輸部下側朝前述面板之缺陷 部照射雷射光以實施修理之雷射裝置、使該雷射裝置朝搬 送方向與正交於此之方向移動並使雷射光之照射位置對準 前述面板之缺陷位置之XY軸台；該XY軸台具備：進行位 置調整使方向與前述雷射裝置之搬送方向正交之Y軸移動 機構、於前述面板搬送台完成前述面板定位之後使前述雷 射裝置朝搬送方向移動進行輔助地微調整雷射光之照射位 置與缺陷位置之X軸移動機構。 [發明之效果] 能夠對處理對象面板從其下側照射雷射光並有效率地 進行修理處理。 【實施方式】 以下，針對有關本發明實施型態之修理裝置，參照添 附圖面加以說明。 3 201213931 本實施型態之修理裝置，係於滾柱式傳輸裝置下側， 在各滾柱之間設置雷射照射口，在滾柱式傳輸裝置上之面 板從其下側照射雷射修理缺陷等之裝置。用該修理裝置處 理之對象物，係能夠藉雷射光除去缺陷之液晶面板之電池 基板等。 圖1所示之修理裝置1，係將滾柱式傳輸裝置二段重疊 而構成。具體而言，修理裝置1，係由下段之處理傳輸裝 置2、與上段之搬送傳輸裝置3所構成。下段之處理傳輸裝 置2，係進行修理處理對象之面板4(參照圖6)之處理裝 置；上段之搬送傳輸裝置3，則是用以收到修理處理後之 面板4並往外部搬送之裝置。 處理傳輸裝置2，如圖1、2所示，係由筐體6、滾柱式 傳輸部7、搬入部8、修理部9、搬出部10、與面板搬送台 1 1所構成。 筐體6係由框架13、與外側板（未圖示）所構成。框 架13，係用以收納並支撐滾柱式傳輸部7等之骨架。框架 1 3係利用製管溶接構造而構成的。外側板，係覆蓋框架13 之板材。外側板，係由不銹鋼板等所構成。在筐體6上流 側端部（圖1中之左側端部），面朝搬入部8設置用以搬入 面板4之面板搬入口（未圖示）。在面板搬入口設置遮罩 (未圖示）。雷射照射中，遮罩會關閉，以防止雷射光洩 漏至外部。在遮罩之開閉扉（未圖示）設置連鎖開關（ interlock switch )。 滾柱式傳輸部7，係用以可滑動地支撐面板4，同時， -8 - 201213931 輔助用面板搬送台11之搬送面板4之傳輸裝置。滾柱式傳 輸部7，係如圖2、3所示，係具備不具有驅動源之活動滾 柱7 A而構成，將面板4在保持水平之狀態下可以滑動地支 撐。藉此，滾柱式傳輸部7，在面板搬送台11支撐面板4使 之移動時，在將面板4保持水平防止落下之狀態下，形成 利用面板搬送台11輔助面板4正確的移動。亦即，藉由滾 柱式傳輸部7輔助面板搬送台11，形成面板搬送台11能夠 不撓曲面板4且以輕力正確地使面板4移動。 搬入部8，係將面板4從外部搬入之部分。搬入部8, 被設在滾柱式傳輸部7之上流側部分（圖1中之左側，佔全 長三分之一左右的部分）。搬入部8，係由搬入滾柱部15 、起重機部16、X軸對準機構17、與ID讀取裝置18所構成201213931 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a repairing apparatus for repairing a liquid crystal panel or the like. [Prior Art] In general, a liquid crystal panel is disposed between a substrate on a plurality of thin film transistors side connected to an electrode through a wiring, and a substrate on a filter side such as a color filter. Made up of layers. This type of display panel is used for lighting inspection during the manufacturing process. As a result of the lighting inspection, the repairer can be repaired in the defective panel. For the device for performing such correction, there is, for example, a panel device for display of Patent Document 1. The processing device for the display panel includes a plurality of panel receiving portions that are received by the display panel in a state in which the thin film transistor and the wiring are lower than the filter, and each of the at least two panels is received. At least two probe blocks of the portion may press a probe block on the upper side of the display panel electrode, and a backlight for illuminating the illumination light from above at the processed portion of the display panel, and The processing unit is disposed on the lower side of the display panel. The processing unit includes a laser generator that irradiates the processing laser beam from the lower side to the processing site, and a video camera that photographs the processed portion from the lower side. In this way, the display panel is not misplaced and can be corrected. [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-22765 No. 2005-A. [Problems to be Solved by the Invention] The above-described processing apparatus is accepted by a panel. The part receives the display panel that has been loaded from the outside, and performs the process of transporting the display panel that has been processed to the outside, carries in the new display panel, and repeats the above processing, and executes correction of the plurality of display panels. With this processing device, the display panel can be efficiently corrected from the lower side. However, when the number of display panels is increased, the series of operations such as loading, positioning, correction processing, and loading of the display panel are time consuming. It is not suitable for continuously processing a large number of display panels. SUMMARY OF THE INVENTION An object of the present invention is to provide a repairing apparatus capable of repairing a panel continuously and efficiently. [Means for Solving the Problem] The present invention is a repair device for repairing a panel to be processed, and is characterized in that it includes a processing and transport device for performing a repair process on a transport processing panel; The device includes a roller conveyor that slidably supports the processing target panel, and a loading unit that is disposed on the upstream side of the roller transmission unit and that carries the processing target panel from the outside, and is disposed on the roller. In the center of the transmission unit, the repair unit that performs the repair process on the panel received from the loading unit, and the downstream side of the roller type transport unit are subjected to the repair process in the repair unit. a panel transporting unit that transports the panel to the outside, and transports the panel into the loading unit so as to be positioned in a direction orthogonal to the transport direction, and transports the panel to the repairing unit and the transporting unit in the transporting direction while positioning the transporting direction The roller type transmission portion is configured to slidably support the aforementioned panel without a driving source The movable roller assists in transporting the panel by the panel transporting table; the repairing unit includes: a laser device that irradiates laser light from a lower portion of the roller-type transporting portion toward a defective portion of the panel to perform repair And an XY-axis stage in which the radiation device moves in a direction orthogonal to the direction of the transfer and the irradiation position of the laser light is aligned with the defect position of the panel; the XY-axis stage includes: performing position adjustment to transfer the direction to the laser device The Y-axis moving mechanism in which the directions are orthogonal to each other, and the X-axis moving mechanism that adjusts the irradiation position and the defect position of the laser light by the movement of the laser device in the transport direction after the panel positioning is completed. [Effects of the Invention] The processing target panel can irradiate the laser light from the lower side thereof and perform the repair process efficiently. [Embodiment] Hereinafter, a repairing apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. 3 201213931 The repair device of this embodiment is on the lower side of the roller type transmission device, and a laser irradiation port is arranged between each roller, and the panel on the roller type transmission device irradiates the laser repair defect from the lower side thereof. Wait for the device. The object to be treated by the repairing device is a battery substrate or the like which can remove a defective liquid crystal panel by laser light. The repairing apparatus 1 shown in Fig. 1 is constructed by superposing two stages of a roller type transporting apparatus. Specifically, the repairing device 1 is composed of the lower processing transfer device 2 and the upper transfer transport device 3. The processing device 2 of the lower stage is a processing device for the panel 4 (see Fig. 6) to be repaired, and the transport device 3 for the upper stage is a device for receiving the panel 4 after the repair process and transporting it to the outside. As shown in Figs. 1 and 2, the processing transfer device 2 is composed of a casing 6, a roller type transport unit 7, a carry-in unit 8, a repair unit 9, a carry-out unit 10, and a panel transport table 11. The casing 6 is composed of a frame 13 and an outer plate (not shown). The frame 13 is for accommodating and supporting the skeleton of the roller type transport portion 7 or the like. The frame 1 3 is constructed by using a pipe-melting structure. The outer side panel is a sheet covering the frame 13. The outer side plate is made of a stainless steel plate or the like. At the flow end portion (the left end portion in Fig. 1) of the casing 6, the panel loading port (not shown) for carrying in the panel 4 is provided facing the loading portion 8. A mask (not shown) is provided at the panel entrance. During laser exposure, the mask is turned off to prevent laser light from leaking to the outside. An interlock switch is provided in the opening and closing of the mask (not shown). The roller type transport unit 7 is a transport device for slidably supporting the panel 4, and at the same time, the transport panel 4 of the auxiliary panel transport table 11 of -8 - 201213931. As shown in Figs. 2 and 3, the roller type transmission unit 7 is configured to include a movable roller 7A having no drive source, and is slidably supported while the panel 4 is held horizontally. As a result, when the panel transporting table 11 supports the panel 4 to move it, the roller-type transporting portion 7 is configured to prevent the panel 4 from being correctly moved by the panel transporting table 11 while keeping the panel 4 horizontally prevented from falling. In other words, the panel transporting table 11 is assisted by the roller transport unit 7, and the panel transporting table 11 can be formed so that the panel 4 can be accurately moved without being flexed. The loading unit 8 is a portion into which the panel 4 is carried from the outside. The carry-in unit 8 is provided on the flow side portion (the left side in Fig. 1 and the portion which is about one third of the total length) on the upper side of the roller type transport unit 7. The loading unit 8 is composed of a loading roller unit 15, a crane unit 16, an X-axis alignment mechanism 17, and an ID reading device 18.
Q 搬入滾柱部15，係收到從外部被搬入之面板4後予以 定位調整之部分。搬入滾柱部15，係在滾柱式傳輸部7之 上流側部分，構成滾柱式傳輸部7之一部份。搬入滾柱部 15，具體而言，係利用大致C字型之支柱19將活動滾柱7A 分割爲二而構成。藉此，在中央形成調整用狹縫20。該調 整用狹縫20，係裝上X軸對準機構17之狹縫。 起重機部1 6，係用以將收到從外部被搬入之面板4載 置於搬入滾柱部15之裝置。起重機部16，如圖3〜7所示， 係由支撐銷部22、升降板23、與升降機24所構成。 支撐銷部22，係由支撐銷25、連結板26、與滑動件27 所構成。支撐銷25，係被垂直地3支並列配設。連結板26 -9 - 201213931 ，係用以一體地支撐3支支撐銷25之板材》連結板26，係 用以一體地支撐3支支撐銷25而升降。滑動件27，係用以 使3支支撐銷25朝Y軸方向（與滾柱式傳輸部7之長邊方向 正交之方向、與面板4之搬送方向正交之方向）移動之構 件。滑動件27，係被設在連結板26之下側面，在配設於Y 軸方向之後述之導軌29可以滑動地被支撐著。支撐銷部22 ，係於Y軸方向設置2支，形成藉6支支撐銷25以支撐面板4 之型態。在支撐銷25之上端部，設置收到面板4並予以支 撐之面板接受部28。面板接受部28，係由彈性構件所構成 ，形成不使面板4受傷地予以支撐之型態》滑動件27，形 成能夠在任意位置固定之型態。 藉此，各滑動件27，係配合面板4之大小而被滑動或 被固定。 升降板23，係用以升降並支撐支撐銷部22之板材。在 升降板23之上側面設置導軌29。該導軌29，係於Y軸方向 被配設4支。在各導軌29可以滑動地嵌合支撐銷部22之滑 動件27，而在Y軸方向可以滑動地支撐著支撐銷部22。升 降板23，係於Y軸方向被形成長長的長方形板狀。 升降機24，係用以支撐升降板23，並介由該升降板23 使支撐銷部22升降之裝置。具體而言，升降機24,係用以 在面板4從外部被搬入時，使支撐銷部22從滾柱式傳輸部7 之活動滾柱7A之間上升而收到面板4，使之下降讓面板4載 置於搬入滾柱部15之裝置。 升降機24，係由支撐板31、導桿32、升降錫林滾筒33 -10- 201213931 、升降支撐板34、與支柱35所構成。 支撐板31，係用以直接支撐升降板23之板材。支撐板 3 1係被一體地固定於升降板23。導桿32，係用以導引升降 支撐板31之棒材。導桿32,係被一體地設置於支撐板31下 側，配設於垂直方向。導桿32，被設在支撐板31下側之至 少四個地方，導引支撐板31使之安定並升降。升降錫林滾 筒33，係用以介由以導桿32所支撐之支撐板31及升降板23 使支撐銷部22升降之裝置。升降錫林滾筒33之升降軸33A 被固定於支撐板31。升降錫林滾筒33，係由附防止落下制 動器之空氣缸（air cylinder)所構成，且由後述之控制部 1 1 1所控制。升降支撐板34 ’係用以固定並支撐升降錫林 滾筒33，同時，可以升降地支撐導桿32之板材。升降支撐 板34，係以支柱35支撐’被固定於框架13» X軸對準機構17，係用以調整被搬入搬入滾柱部15之 面板4於X軸方向（搬送方向）之位置之機構。X軸對準機 構17，係由支撐板37、第1面板夾件38、與第2面板夾件39 所構成。支撐板37’係用以支撐第1面板夾件38以及第2面 板夾件39之板材。支撐板37，係於X軸方向（滾柱式傳輸 部7之長邊方向）被形成長長的長方形板狀。支撐板37之 上側面，於X軸方向串聯地設置二個導軌4 1。 第1面板夾件38，係用以抵接並支撐於面板4之X軸方 向一方（圖4中之左方）之緣部之構件。第1面板夾件38, 係由抵接部42'支柱43、與滑動件44所構成。抵接部42’ 係直接抵接於面板4緣部之構件。抵接部4 2 ’係用彈性構 -11 - 201213931 件所構成的。支柱43，係用以一體地支撐抵接部42使之抵 接於面板4緣部之構件。滑動件44，係用以介由支柱43使 抵接部42滑動於X軸方向之構件。滑動件44 ’係被一體地 連結在支柱43，可以滑動地嵌合在導軌41» 第2面板夾件39，係用以抵接並支撐於面板4之X軸方 向另一方之緣部之構件。第2面板夾件39’係由抵接部46 、支柱47、與滑動件48所構成。抵接部46，係直接抵接於 面板4緣部之構件。抵接部46，係用彈性構件所構成的， 且設置2個。支柱47，係用以一體地支撐抵接部46使之抵 接於面板4緣部之構件。滑動件48，係用以介由支柱47使 抵接部46滑動於X軸方向之構件。滑動件48，係被一體地 連結在支柱47，可以滑動地嵌合在導軌41。 在導軌41與滑動件44、48之間組入直動式（direct-acting ) 機 構等之 驅動源 （ 未圖示 ）， 由 控制部 1 1 1所控制 。藉此，使滑動件44、48於X軸方向連動相互接近或離開 ，或者個別地挪動，而進行面板4於X軸方向之定位。 ID讀取裝置18，係用以讀取面板4之ID之裝置。該ID 讀取裝置18係具有攝影裝置18A，形成基於用該攝影裝置 18A所讀取之ID，用控制部1 1 1從CIM取得面板4之缺陷資 訊。形成基於該缺陷資訊以控制面板搬送台1 1等。 ID讀取裝置18，係被支撐於XYZ軸台50。XYZ軸台50 ’係在XYZ軸方向可以移動地支撐著id讀取裝置18。具體 而言’ XYZ軸台50，係利用能夠覆蓋於面板4之γ軸方向全 域與X軸方向之一半左右之衝程（stroke )，可以移動地支 -12- 201213931 撐著ID讀取裝置18。此外，z軸方向，於微調整ID讀取裝 置18高度之範圍，可以移動地支撐著ID讀取裝置18 » XYZ軸台50，如圖2、3所示，係由Y軸移動機構51、X 軸移動機構52、與Z軸移動機構（未圖示）所構成。Y軸移 動機構51，係於Y軸方向可以移動地支撐ID讀取裝置18之 裝置。Y軸移動機構51，係由軌條53與滑動件54所構成。 軌條53，係一體地具備導軌53 A之構件。滑動件54，係用 以支撐ID讀取裝置18，使之於Y軸方向移動之構件。滑動 件54，係將ID讀取裝置18在已固定支撐之狀態下，可以滑 動地支撐在軌條53之導軌53A。 在導軌53 A與滑動件54之間組入直動式機構等之驅動 源（未圖示），由控制部1 1 1所控制。藉此，進行ID讀取 裝置18於Y軸方向之定位。 X軸移動機構52，係介由Y軸移動機構51將ID讀取裝 置18可以移動地支撐於X軸方向之裝置。X軸移動機構52 ，係由導軌55與滑動件56所構成。導軌55係被配設於X軸 方向。具體而言，導軌55，係藉由一體地被安裝在配設於 X軸方向之支撐棒57，而被配設於X軸方向。支撐棒57， 係在朝向X軸方向之狀態下，被固定於筐體6之框架1 3。 滑動件56，係用以一體地支撐Y軸移動機構5 1之軌條 53使之於X軸方向移動之構件。滑動件56，係將軌條53在 已固定支撐之狀態下’可以滑動地支撐在導軌55。 在導軌55與滑動件56之間組入直動式機構等之驅動源 (未圖示），由控制部1 1 1所控制。藉此，進行ID讀取裝 -13- 201213931 置18於X軸方向之定位。 Z軸移動機構，係由與上述之Y軸移動機構51以及X軸 移動機構52同樣的導軌（未圖示）跟滑動件（未圖示）所 構成的。這些被設在Z軸方向，且由控制部1 1 1所控制，以 調整ID讀取裝置18於Z軸方向之位置。 修理部9，係用以對搬入部8所收到之面板4施以修理 處理之裝置。 亦即，修理部9，係位於滾柱式傳輸部7下側而對被載 置於該滾柱式傳輸裝置上側之面板4之缺陷部照射雷射光 實施修理之裝置。修理部9，係被設在滾柱式傳輸部7之中 央部。修理部9，係由雷射裝置60、XY軸台61、與照明灰 麈去除裝置62所構成。 雷射裝置60，係用以對面板4之缺陷部，從滾柱式傳 輸部7下側照射雷射光之裝置。將該雷射裝置60之原理的 構成顯示於圖8、9。雷射裝置60，係由照射修理用雷射光 之雷射單元65、與利用畫像處理特定雷射光照射位置之光 學系66所構成。雷射單元65，係由雷射發振器67、成像透 鏡68、全反射鏡69、半透明反射鏡（half mirror) 70、對 物透鏡71、與導向光源72所構成。 雷射發振器67，係用以使去除面板4缺陷之修理用雷 射光發生之裝置。成像透鏡68，係用以與對物透鏡71協力 運作，使從雷射發振器67發生之雷射光成像於面板4之缺 陷之透鏡。全反射鏡69，係用以將來自雷射發振器67之雷 射光朝向面板4側之反射鏡。半透明反射鏡70，係用以讓 -14 - 201213931 來自全反射鏡69之雷射光透過，同時，使來自面板4側之 光反射之反射鏡。對物透鏡7 1，係用以與成像透鏡68協力 運作，使從雷射發振器67發生之雷射光成像於面板4之缺 陷之透鏡。對物透鏡7 1，係讓雷射光配合缺陷之大小等並 設置複數個。在此，並列且一體地設置著五個對物透鏡71 。對物透鏡71，係藉透鏡切換台73 A以切換成最適的對物 透鏡71，藉對焦用台73 B以對焦。透鏡切換台73 A以及對焦 用台73B，係具備步進馬達（stepping motor )等之驅動源 (未圖示），該驅動源由控制部1 1 1所控制，基於缺陷資 訊而切換成最適之對物透鏡71，並對焦。又，在對物透鏡 71，因應必要而設置防止灰塵附著之遮罩》 導向光源72，係正確地特定雷射光照射位置用之使導 向光發生之裝置。來自導向光源72之導向光，係跟隨雷射 光相同路徑而被照射到面板4之缺陷，利用該導向光以特 定照射位置後，照射雷射光。 光學系66，係由CCD攝影機74、成像透鏡75、半透明 反射鏡76、同軸照明光源77、與全反射鏡78等所構成。 CCD攝影機74，係用以拍攝面板4之缺陷之攝影機。 CCD攝影機74，係被接續於控制部1 1 1，利用控制部1 1 1處 理來自CCD攝影機74之畫像資訊。成像透鏡75，係用以與 對物透鏡71協力運作，使對焦於面板4之缺陷之透鏡。半 透明反射鏡76，係用以讓來自面板4之光透過，使來自同 軸照明光源77之光反射之反射鏡。同軸照明光源77，係用 以照明面板4之缺陷部份之光源。全反射鏡78，係用以讓 -15- 201213931 來自同軸照明光源77之光反射至半透明反射鏡76之反射鏡 〇 XY軸台61，如圖3所示，係用以使雷射裝置60移動於 X軸方向與Y軸方向，使雷射光之照射位置對準面板4之缺 陷位置之裝置。XY軸台61，係由Y軸移動機構80、與X軸 移動機構81所構成。Y軸移動機構80，係進行雷射裝置60 於Y軸方向位置調整之裝置。Y軸移動機構80，係由導軌 83與滑動件84所構成。導軌83係被配設於Y軸方向。導軌 83，係被固定於筐體6之框架13，並將滑動件84可以滑動 地支撐於Y軸方向。在導軌83與滑動件84之間，組入直動 式機構等之驅動源（未圖示）。該驅動源，係由控制部 1 1 1所控制，使滑動件84於Y軸方向正確地移動並定位。Y 軸移動機構80，係利用能夠覆蓋面板4於Y軸方向之幅面全 區域之衝程使滑動件84移動。 X軸移動機構81，係進行雷射裝置60於X軸方向位置 調整之裝置》X軸移動機構81，係由導軌85與滑動件（未 圖示）等所構成。導軌85，係於被支撐在Y軸移動機構80 之滑動件84之狀態下’於X軸方向配設2支。各導軌85，係 將滑動件可以滑動地支撐於X軸方向。在導軌85與滑動件 之間，組入直動式機構等之驅動源（未圖示）。該驅動源 ，係由控制部1 Π所控制，使滑動件於X軸方向正確地移動 並定位。X軸移動機構81，係使滑動件，於1像素（pixel )內稍微移動而已。亦即’ X軸移動機構81 ’係被用於微 調整之裝置，在利用面板搬送台11作成面板4之定位之後 -16- 201213931 ’使雷射裝置60移動，進行輔助地微調整雷射光之照射位 置與缺陷位置。 照明灰塵去除裝置62，係用以照明面板4之缺陷部， 同時’去除雷射裝置60透鏡上的灰塵之裝置。照明灰塵去 除裝置62’係由照明部88、灰塵去除部89、與支撐板90等 所構成。照明部88，係CCD攝影機74之透過照明，從上側 照明面板4之缺陷部。照明部88，係由具備LED(未圖示 )或聚光透鏡（未圖不）等而構成。灰塵去除部89，係用 以針對雷射裝置60之對物透鏡71之灰塵予以去除之裝置， 並利用空氣將灰塵吹飛。壓縮空氣，係利用未圖示之空氣 壓縮機（compressor )所供給的》支撐板90，係用以支撐 照明部88與灰塵去除部89之板材。 照明灰塵去除裝置62，係被支撐於XYZ軸台92。XYZ 軸台92，係將照明灰塵去除裝置62可以移動地支撐於XYZ 軸方向。XYZ軸台92，係由Y軸移動機構93、X軸移動機構 94、與Z軸移動機構（未圖示）等所構成。Y軸移動機構93 ，係將照明灰塵去除裝置62可以移動地支撐於Y軸方向之 裝置。Y軸移動機構93，係由軌條96與滑動件97等所構成 。軌條96，係一體地具備導軌96A之構件。滑動件97，係 用以支撐照明灰塵去除裝置62，使之於Y軸方向移動之構 件。滑動件97，係於已固定支撐照明灰塵去除裝置62之狀 態下，可以滑動地被支撐於軌條96之導軌96A。在導軌 96 A與滑動件97之間，設置直動式機構等之驅動源（未圖 示），能夠使照明灰塵去除裝置62於Y軸方向正確地移動 -17- 201213931 。藉此，利用XYZ軸台92，讓照明部88，以使其透過照明 之光軸與來自雷射裝置60之雷射光之光軸對準在同—軸上 之方式，同步於雷射裝置60之移動並追隨、移動，確保常 時照明狀態。 X軸移動機構94，係介由Υ軸移動機構93將照明灰塵 去除裝置62可以移動地支撐於X軸方向之裝置。X軸移動 機構94，係由導軌98與滑動件9 9所構成。導軌98係被配設 於X軸方向。具體而言，導軌98，係藉由一體地被安裝在 配設於X軸方向之支撐棒57，而被配設於X軸方向。 滑動件99，係用以一體地支撐Υ軸移動機構93之軌條 96使之於X軸方向移動之構件。滑動件99，係在已固定支 撐軌條96之狀態下，可以滑動地被支撐在導軌98。 在導軌98與滑動件99之間，組入直動式機構等之驅動 源（未圖示），由控制部1 1 1所控制。藉此，進行照明灰 塵去除裝置62於X軸方向之定位。 Ζ軸移動機構，係由跟上述之Υ軸移動機構93以及X軸 移動機構94同樣的導軌（未圖示）與滑動件（未圖示）所 構成的。這些是被設在Ζ軸方向，由控制部1 1 1所控制，以 調整照明灰塵去除裝置62於Ζ軸方向之位置。 搬出部10，係將已利用修理部9施以修理處理之面板4 搬出至外部之部分。搬出部10，係被設在滾柱式傳輸部7 之下流側部份。具體而言，搬出部10,係於滾柱式傳輸部 7下流測部分之下側具備上述之起重機部16而構成的。亦 即，在滾柱式傳輸部7之下流側部份下側僅具備除了 X軸對 -18- 201213931 準機構17以外的起重機部16而構成的。該起重機部16，舉 起面板4，並送交至後述之搬送機器手113。 面板搬送台1 1，係用以進行面板4於Y軸方向之定位， 並將面板4朝X軸方向搬送同時於X軸方向定位之裝置。面 板搬送台11，如圖2、3、6、7所示’係由Y軸面板夾件機 構1〇〇、與X軸搬送機構101所構成。 Y軸面板夾件機構1〇〇，係用以夾緊面板4並且讓面板4 於Y軸方向定位之裝置。γ軸面板夾件機構100，係由連結 板103、導軌104、滑動件105、與支撐臂10 6等所構成。 連結板1 03，係被設置搭架在滾柱式傳輸部7兩側所配 設之後述之X軸搬送機構101之二個導軌109之間之平板狀 板材。在連結板103之上側面設置導軌104。滑動件105, 係可以滑動地被嵌合在導軌1 04。該滑動件1 05，係支撐支 撐臂106使之在Y軸方向移動。滑動件1〇5，係在導軌104設 置二個》在導軌104與二個滑動件105之間，設置直動式機 構等之驅動源（未圖示），能夠以控制部111控制並使二 個滑動件105分別於Y軸方向正確地移動》支撐臂106，係 用以夾緊面板4之構件。支撐臂106，被固定於滑動件105 ，朝向被載置於滾柱式傳輸部7之面板4而延伸出去。支撐 臂106的先端，設置三個夾件部107。 X軸搬送機構101，係將利用γ軸面板夾件機構100而 被夾緊之面板4，搬送過沒有驅動源之滾柱式傳輸部7的活 動滾柱7A上之裝置。X軸搬送機構101，係由導軌109、與 滑動件110所構成。導軌109，係於滾柱式傳輸部7之兩側 -19- 201213931 設置二個。各導軌109,係被配設於滾柱式傳輸部7之長邊 方向之X軸方向。藉此，將滑動件110可以滑動地支撐於X 軸方向。滑動件110，係分別被支撐於各導軌109，於X軸 方向移動之構件。各滑動件110,係被安裝在Y軸面板夾件 機構100之連結板103兩端部，使Y軸面板夾件機構100於X 軸方向移動。在導軌109與二個滑動件110之間，設置直動 式機構等之驅動源（未圖示）。該驅動源係由控制部111 所控制，能使二個滑動件1 1 〇相互同步並於X軸方向正確地 移動。 控制部1 11，係用以控制修理裝置1全體之裝置。控制 部111，係內藏雷射之設定、或設定處方（recipe )等之電 腦而構成，被設置在處理傳輸裝置2以及搬送傳輸裝置3之 附近。控制部1 1 1具體的控制係敘述於後。 搬送機械手113，係用以將處理傳輸裝置2之面板4往 搬送傳輸裝置3移載之裝置。搬送機械手113，如圖12所示 ，係被設置於面朝處理傳輸裝置2之搬出部10及後述之搬 送傳輸裝置3之搬入部118之位置，連接著下段的處理傳輸 裝置2與上段的搬送傳輸裝置3。藉此，搬送機械手113之 支撐臂（未圖示），會在處理傳輸裝置2之搬出部10與搬 送傳輸裝置3之搬入部118之間移動，將下段的處理傳輸裝 置2之面板4往上段的搬送傳輸裝置3搬送。作爲搬送機械 手113,係能夠採用能支撐並搬送面板4之既存裝置。搬送 機械手1 1 3，係由控制部1 1 1所控制。 取出放入用機械手114，係用以將來自外部之面板4往 -20- 201213931 下段的處理傳輸裝置2之面板搬入口遞送，而且，收到來 自上段的搬送傳輸裝置3之面板搬出口之面板4並往外部搬 送之裝置。取出放入用機械手114，如圖11所示，係被設 置於面朝處理傳輸裝置2之搬入部8的面板搬入口與搬送傳 輸裝置3之面板搬出口之位置。作爲取出放入用機械手114 ，係能夠採用能支撐並取出放入面板4之既存裝置。取出 放入用機械手1 1 4，係由控制部1 1 1所控制。 搬送傳輸裝置3，係用以將從處理傳輸裝置2收到之處 理完成的面板4往外部搬送之裝置。搬送傳輸裝置3，如圖 1、10所示，係由筐體Π6、滾柱式傳輸部117、搬入部118 、與搬出部119所構成。 筐體116，與處理傳輸裝置2之筐體6同樣地，係由框 架12 1、與外側板（未圖示）所構成。框架1 21，係用以收 納並支撐滾柱式傳輸部Π7等之骨架。框架121係利用製管 溶接構造而被構成的。 外側板，係覆蓋框架121之板材。外側板，係由不銹 鋼板等所構成。 在筐體1 1 6上流側端部（圖1中之右側端部）之側面， 面朝搬入部118設置用以搬入面板4之面板搬入口（未圖示 )0 滾柱式傳輸部117，係用以搬送面板4之傳輸裝置。滾 柱式傳輸部1 1 7，係由電磁驅動式（magnet driver )搬送 傳輸裝置所構成，以電動定量運送方式搬送面板4。滾柱 式傳輸部117，具體而言，係由複數個並列配設之旋轉滾 -21 - 201213931 柱123、分別被安裝在各旋轉滾柱123之一端部之電磁從動 滾柱124、使該電磁從動滾柱124旋轉之電磁驅動滾柱125 、與旋轉驅動該電磁驅動滾柱125之驅動馬達126等所構成 。電磁驅動滾柱125，係一對一地對向於各電磁從動滾柱 124而分別設置。各電磁驅動滾柱125，係分別被安裝在配 設於朝各電磁從動滾柱124 —直前進之方向之驅動馬達126 之旋轉軸127，利用驅動馬達126所形成之旋轉，通過電磁 從動滾柱124而使旋轉滾柱123旋轉。驅動馬達126，係由 控制部111所控制。藉此，被搬入搬送傳輸裝置3之面板4 ，便利用以驅動馬達126而旋轉驅動之旋轉滾柱123而被搬 送直到搬出部11 9之面板搬出口。 搬入部118，係將面板4從外部搬入之部分。搬入部 1 1 8 ’係被設在滾柱式傳輸部11 7之上流側部份（圖1中之 右側部份）。搬入部118，與處理傳輸裝置2之搬入部8或 搬出部10具備之起重機部16相同，將起重機部16設置在旋 轉滾柱123之下側。該起重機部16，係用升降機24讓支撐 銷部22上升，支撐銷25則從各旋轉滾柱123之間往上方延 伸出去，收到來自搬送機械手113之面板4，支撐銷25則往 各旋轉滾柱123下側下降，使面板4載置於旋轉滾柱123。 搬出部119，係將從搬入部118藉滾柱式傳輸部117被 搬送之面板4搬出至外部之部分。搬出部119，係被設在滾 柱式傳輸部1 1 7之下流側部份。具體而言，搬出部1 1 9，係 於滾柱式傳輸部1 1 7下流測部分之下側具備與上述搬入部 118之起重機部16同樣之起重機部16而構成的。在搬出部 -22- 201213931 119之下流側端部，面朝取出放入用機械手n4設置面板搬 出口（未圖示）。起重機部16，係將由搬入部ι18搬送之 面板4舉起，通過面板搬出口而送交至取出放入用機械手 114。在面板搬出口設置遮罩（未圖示）。雷射照射中， 遮罩會關閉，以防止雷射光洩漏至外部。在遮罩之開閉扉 (未圖示）設置連鎖開關。 如以上方式構成之修理裝置1，係利用控制部1 1 1以以 下方式進行面板4之修理處理。根據圖13之流程圖加以說 明。 首先，用取出放入用機械手114，將來自外部之面板4 ，從處理傳輸裝置2之面板搬入口搬入搬入部8 (步驟S1) 搬入部8中，起重機部16之升降機24之升降錫林滾筒 33使升降軸33A上升，並使支撐銷部22之支撐銷25從搬入 滾柱部15之各活動滾柱7A之間上升。取出放入用機械手 114，係將面板4載置於支撐銷25之面板接受部28上，成爲 待機狀態。 接著，起重機部16中，升降錫林滾筒33使升降軸33A 下降，並使支撐銷部22之支撐銷25下降至搬入滾柱部15之 各活動滾柱7A之間。藉此，面板4則被載置於搬入滾柱部 15之活動滾柱7A。 此時，支撐銷25，讓其面板接受部28稍微離開面板4 之裡面左右就停止下降，將X軸對準機構17之第1面板夾件 38之抵接部42以及第2面板夾件39之抵接部46之位置’調 -23- 201213931 整到抵接於面板4周緣部之位置。 然後，第1面板夾件38之滑動件44與第2面板夾件39之 滑動件48，以相互接近之方式挪動至設定位置，於抵接部 42、46按壓面板4，執行面板4於X軸方向之定位（步驟S2 )。 再者，面板搬送台11之二個滑動件105以相互接近之 方式挪動至設定位置，於支撐臂106之夾件部107按壓面板 4，執行面板4於Y軸方向之定位，而且，以夾件部107支撐 面板4 (步驟S3)。 X軸對準機構17與面板搬送台11之定位動作，可以同 時進行，或者也可以讓任何一方先進行。藉此，面板4便 於XY軸方向執行定位。接著，X軸對準機構17，係被解除 夾緊，並往滾柱式傳輸部7之下方降下。 然後，ID讀取裝置18用XYZ軸台50，而被移動於面板 4之ID的上方，讀取其ID，並演算移動距離（步驟S4)。 亦即，控制部1 1 1，根據用該ID讀取裝置18所讀取之ID， 從CIM取得面板4之缺陷資訊，且根據該缺陷資訊加以控制 。讀取面板4之對準標記（alignment mark )，將從該對準 標記到缺陷部位之移動距離予以特定。 基於該缺陷資訊，利用面板搬送台1 1讓面板4移動至 設定位置（步驟S5)。具體而言，在用滾柱式傳輸部7之 活動滾柱7 A輔助地支撐之狀態下，面板搬送台1 1之支撐臂 106支撐面板4，滑動件1 10於導軌109被引導，將面板4於X 軸方向以輕輕的力量被移動直到修理部9之設定位置。亦 -24- 201213931 即，面板4之缺陷之X軸方向的位置，會被移動至與雷射裝 置60之對物透鏡71光軸之X軸方向之位置一致之位置。 接著，用XY軸台61之Y軸移動機構80讓雷射裝置60於 Y軸方向移動並定位（步驟S6 )。亦即，雷射裝置60會被 移動至雷射裝置60之對物透鏡71光軸之Y軸方向的位置、 與面板4的缺陷之Y軸方向之位置一致之位置，正確地定位 〇 再者，爲了補充面板搬送台11於X軸方向之精確度， 而利用X軸移動機構81讓雷射裝置60於X軸方向僅僅在1像 素內被移動予以微調整，精密地捕捉缺陷部（步驟S7)。 亦即，使雷射裝置60與缺陷部精密地整合。此時，也可以 作成使攝影裝置所映照之缺陷部位之映像用監視器（未圖 示）顯示，並讓操作員（operator)確認。 再者，基於上述缺陷資訊，XYZ軸台92會使照明灰塵 去除裝置62之照明部88移動至面板4之缺陷部之上方位置 (步驟S8)。藉此，調整成照明部88所形成之透過照明之 光軸、與CCD攝影裝置74之光軸兩者一致。再者，在同軸 照明光源77之光軸與CCD攝影裝置74之光軸一致之狀態下 ，以CCD攝影裝置74映照面板4之缺陷，使雷射發振器67 之雷射光光軸、與面板4之缺陷位置整合。 接著，從導向光源72射出可見光，最終地確認整合雷 射發振器67之雷射光光軸與面板4之缺陷位置，從滾柱式 傳輸部7之活動滾柱7A之間照射雷射光，修理缺陷部份（ 步驟S9 )。 -25- 201213931 當修理結束時，使面板搬送台11將面板4移動至搬出 部10，送交至搬送機械手113並往搬送傳輸裝置3移送（步 驟S10)。亦即，在使面板搬送台11將面板4移動至搬出部 10之後，面板搬送台1 1係回到搬入部8，起重機部16則舉 起面板4，送交至搬送機械手113之支撐臂。搬送機械手 113之支撐臂，係支撐面板4，往搬送傳輸裝置3搬送。支 撐臂，係將面板4搬入搬送傳輸裝置3之搬入部118，送交 至搬入部18之起重機部16。 起重機部16，係收到面板4後將其載置於搬送傳輸裝 置3之滾柱式傳輸部117，滾柱式傳輸部117係使面板4移動 至搬出部119(步驟S11)。滾柱式傳輸部117中，驅動馬 達126，透過電磁驅動滾柱125與電磁從動滾柱124旋轉驅 動旋轉滾柱123’使面板4移動至搬出部119。當設在搬出 部1 19之感測裝置（未圖示）檢知面板4時，驅動馬達126 會被停止。 接著，起重機部16會舉起面板4，送交至取出放入用 機械手114後’搬出至外部（步驟S12)。取出放入用機械 手11 4之支撐臂，從面板搬出口被插入搬出部119，收到由 起重機部16所支撐之面板4並搬出至外部。 在該一連串的處理，因爲在修理部9修理處理費時， 所以配合在該修理部9之處理，而將下一個面板4提前搬入 搬入部8’ 一旦修理處理結束，就使修理處理結束後之面 板4迅速地移動至搬出部10，立刻於搬入部8收到下一個面 板4並使之移動至修理部9。藉此，將面板4連續地搬入修 -26- 201213931 理部9執行修理處理。 如以上方式，因爲將面板4載置於滾柱式傳輸部7之各 活動滾柱7A上，並從各活動滾柱7A間將雷射裝置60之雷 射光照射至缺陷部份，所以，能夠不會將面板4上下錯置 ，而進行缺陷之修理。 因爲將面板4用滾柱式傳輸部7之活動滾柱7 A輔助地支 撐，並作成用面板搬送台11之支撐臂106支撐之方式，所 以能夠防止面板4落下或撓曲，而確實地予以支撐。亦即 ，能讓面板搬送台11與滾柱式傳輸部7協力運作，確實地 支撐面板4。藉此，即使對於大型的面板4，也能夠用面板 搬送台11谷易地支提並搬送。 再者，因爲作成將面板搬送台11之X軸搬送機構101之 精確度，以XY軸台61之X軸移動機構81補充，所以，能夠 讓X軸搬送機構101與X軸移動機構81協力運作，而將雷射 裝置60於X軸方向之定位，以短時間且高精確度地進行。 結果，協力運作之X軸搬送機構101及X軸移動機構81、加 上Y軸移動機構80就能夠快速地且高精確度地，將雷射裝 置60定位於缺陷部位。藉此，即使是大型面板4，也能夠 有效率地進行修理處理。再者，能夠將複數個面板4連續 地進行修理處理。亦即，藉由作成本實施型態之構成，能 夠最有效率地進行修理處理。 [變形例】 前述實施型態中，係將處理傳輸裝置2與搬送傳輸裝 -27- 201213931 置3構成爲不同的構件，但是，如圖14所示，也可以一體 地構成。圖14之修理裝置130全體的構成，係與前述實施 型態之修理裝置1大致相同，因而，在此，在同一構件附 以同一圖號，省略其說明。 圖Μ之修理裝置130中，在一筐體131內，組入處理傳 輸裝置2與搬送傳輸裝置3。 筐體131，係由主框架132、浮動框架133、除振機134 、與外側板1 3 5等所構成。主框架1 3 2，係被構成將處理傳 輸裝置2與搬送傳輸裝置3重疊成上下二段並同時地支撐該 等裝置之大小。搬送傳輸裝置3，係以被設在主框架132之 支柱部136所支撐。 浮動框架133，係支撐處理傳輸裝置2之框架。浮動框 架133，爲防止處理傳輸裝置2給修理處理帶來障礙之振動 ，而在主框架132內通過並裝上除振機134。 除振機134，係採用利用空氣壓之氣墊機構（air spring)等而構成的。再者，在除振機134設置水平調整機 構（level adjustment) »利用該除振機134，處理傳輸裝 置2可被安全地支撐著。藉此，能夠不因地震等而使處理 傳輸裝置2搖晃，安全地施以修理處理。 在筐體131之面板搬入口（面朝圖14之處理傳輸裝置2 之筐體131之左側面）設置著遮罩137。在面板搬出口（面 朝圖14之搬送傳輸裝置3之筐體131之左側面）設置著遮罩 138。在該等遮罩137、138設置著連鎖開關。該等遮罩137 、1 3 8，雷射照射中會被關閉，以防止雷射光洩漏至外部 -28- 201213931 置 裝 mil 理。 修果 該效 用、 利用 作 的 6k 榡 同 gml 揮 發 態 型 施 實 述 前 與 匕匕 厶目 也 再者，因爲利用除振機134所支撐之浮動框架133來支 撐處理傳輸裝置2，所以，即使修理裝置1 30因爲任何的原 因而振動，也能在修理部9安全地進行修理處理。 此外，前述實施型態中，係將處理傳輸裝置2與搬送 傳輸裝置3縱向地重疊構成，但是，也可以橫向並排構成 。在沒有必要讓面板4回到處理傳輸裝置2之面板搬入口之 場合’也可以不設置搬送傳輸裝置3，而僅以處理傳輸裝 置2構成修理裝置1。 關於前述實施型態以及變形例之修理裝置，能夠通用 於具備能以雷射光修理缺陷部之電路等之面板。 【圖式簡單說明】 圖1係顯示關於本發明實施型態之修理裝置之斜視圖 〇 圖2係顯示關於本發明實施型態之修理裝置之處理傳 輸裝置（conveyor )之斜視圖。 圖3係顯示關於本發明實施型態之修理裝置之處理傳 輸裝置之分解斜視圖。 圖4係顯示關於本發明實施型態之修理裝置之起重機 部（lifter)以及X軸對準機構（alignment)之平面圖》 圖5係顯示關於本發明實施型態之修理裝置之起重機 -29- 201213931 部以及x軸對準機構之側面圖。 圖6係顯示關於本發明實施型態之修理裝置之搬入部 之平面圖》 圖7係顯示關於本發明實施型態之修理裝置之搬入部 之側面圖。 圖8係顯示關於本發明實施型態之修理裝置之雷射裝 置之正面圖。 圖9係顯示關於本發明實施型態之修理裝置之雷射裝 置之正面圖。 圖1〇係顯示關於本發明實施型態之修理裝置之搬送傳 輸裝置之滾柱式傳輸部（roller conveyor)之斜視圖。 圖11係顯示關於本發明實施型態之修理裝置之側面圖 〇 圖12係顯示關於本發明實施型態之修理裝置之平面圖 〇 圖13係顯示關於本發明實施型態之修理裝置之用控制 部處理之流程圖。 圖1 4係顯示本發明變形例之側面圖。 【主要元件符號說明】 1 :修理裝置 2:處理傳輸裝置（conveyor) 3 :搬送傳輸裝置 4 :面板 -30- 201213931 6 :筐體 7:滾柱式傳輸部（roller conveyor) 7A:活動滾柱（free roller) 8 :搬入部 9 :修理部 10 :搬出部 1 1 :面板搬送台（stage ) 1 3 :框架（frame ) 1 5 :搬入滾柱部 16:起重機部（lifter) 17: X軸對準機構（alignment) 18 : ID 讀取裝置（ID reader) 18A:攝影裝置（camera) 19 :支柱（stay) 20 :調整用狹縫（slit) 22 :支撐銷部 24 :升降機 25 :支撐銷（pin) 27 :滑動件（slider ) 28 :面板接受部 29 :導軌（guide rail ) 3 1 :支撐板 32 :導桿（guide bar) 33:升降機錫林滾筒（cylinder) -31 - 201213931 34 :升降支撐板 3 5 :支柱 37 :支撐板 38:第1面板夾件（clamp) 39:第2面板夾件 4 2 ·抵接部 4 3 :支柱 44 :滑動件 46 :抵接部 4 7 :支柱 48 :滑動件 50 : XYZ 軸台（stage ) 51 : Y軸移動機構 52 : X軸移動機構 53:軌條（rail bar) 54 :滑動件 5 5 :導軌（guide rail ) 56 :滑動件 5 7 :支撐棒 60 :雷射裝置 61 : XY軸台 62 :照明灰塵去除裝置 65 :雷射單元 66 :光學系 -32- 201213931 67 :雷射發振器（laser oscillator) 6 8 :成像透鏡 6 9 :全反射鏡 7〇:半透明反射鏡（half mirror) 7 1 :對物透鏡 72 :導向光源 74 : CCD攝影裝置 7 5 :成像透鏡 76 :半透明反射鏡 7 7 :同軸照明光源 7 8 :全反射鏡 80 : Y軸移動機構 81 : X軸移動機構 8 3 :導軌 8 4 :滑動件 8 5 :導軌 8 8 :照明部 89 :灰塵去除部 90 :支撐板 92 : XYZ軸台 93 : Y軸移動機構 94 : X軸移動機構 96 :軌條 97 :滑動件 -33- 201213931 98 :導軌 9 9 :滑動件 100 : Y軸面板夾件機構 101 : X軸搬送機構 103 :連結板 104 :導軌 1 〇 5 :滑動件 106 :支撐臂 1 〇 7 :夾件部 109 :導軌 1 1 〇 :滑動件 1 1 1 :控制部 1 13 :搬送機械手 114:取出放入用機械手 1 1 6 :筐體 1 1 7 :滾柱式傳輸部 1 1 8 :搬入部 1 19 :搬出部 1 2 1 :框架 1 2 3 :旋轉滾柱 124 :從動磁體（driven magnet) 125 :驅動磁體（drive magnet) 1 2 6 .驅動馬達 1 30 :修理裝置 -34- 201213931 1 3 1 :筐體 132 :主框架（mainframe) 133 :浮動框架（floating frame) 134 :除振機 1 3 5 :外側板 1 3 6 :支柱部 137:遮罩（shutter) 138 :遮罩Q moved into the roller portion 15, It is the part that is positioned and adjusted after receiving the panel 4 that has been moved from the outside. Moved into the roller portion 15, It is on the upstream side of the roller type transfer unit 7, A part of the roller type transmission portion 7 is formed. Move into the roller section 15, in particular, The movable roller 7A is divided into two by a substantially C-shaped pillar 19 . With this, The adjustment slit 20 is formed in the center. The adjustment slit 20, The slit of the X-axis alignment mechanism 17 is attached. Crane section 1 6, It is a device for carrying the panel 4 that has been carried in from the outside into the loading roller unit 15. Crane section 16, As shown in Figures 3 to 7, By the support pin portion 22, Lifting plate 23, It is composed of an elevator 24. Support pin portion 22, Supported by the support pin 25, Link plate 26, It is composed of a slider 27. Support pin 25, It is arranged vertically in three rows. Link plate 26 -9 - 201213931 , a splicing plate 26 for integrally supporting the three support pins 25, It is used to integrally support the three support pins 25 to be raised and lowered. Slide 27, The three support pins 25 are oriented in the Y-axis direction (the direction orthogonal to the longitudinal direction of the roller-type transmission portion 7, A member that moves in a direction orthogonal to the direction in which the panel 4 is transported. Slide 27, The system is disposed on the lower side of the connecting plate 26, The guide rail 29, which is described later, disposed in the Y-axis direction, is slidably supported. Support pin portion 22, Set 2 in the Y-axis direction, A shape in which six support pins 25 are supported to support the panel 4 is formed. At the upper end of the support pin 25, A panel receiving portion 28 that receives the panel 4 and supports it is provided. Panel receiving portion 28, Made of elastic members, Forming a type of slide 27 that does not cause the panel 4 to be injured, Forms that can be fixed at any position. With this, Each slider 27, It is slid or fixed in accordance with the size of the panel 4. Lifting plate 23, A plate for lifting and supporting the support pin portion 22. A guide rail 29 is provided on the upper side of the lift plate 23. The guide rail 29, It is equipped with 4 branches in the Y-axis direction. The slider 27 supporting the pin portion 22 is slidably fitted to each of the guide rails 29, The support pin portion 22 is slidably supported in the Y-axis direction. Ascending plate 23, It is formed into a long rectangular plate shape in the Y-axis direction. Lift 24, Used to support the lifting plate 23, And a device for lifting and lowering the support pin portion 22 via the lift plate 23. in particular, Lift 24, Used when the panel 4 is moved in from the outside, The support pin portion 22 is raised from between the movable rollers 7A of the roller type transport portion 7 to receive the panel 4, Lowering the panel 4 is placed on the apparatus that is carried into the roller unit 15. Lift 24, By the support plate 31, Guide rod 32, Lifting cylinder drum 33 -10- 201213931 , Lifting support plate 34, It is composed of a pillar 35. Support plate 31, It is used to directly support the plate of the lifting plate 23. The support plate 31 is integrally fixed to the lift plate 23. Guide rod 32, It is used to guide the bar of the lifting support plate 31. Guide rod 32, The system is integrally disposed on the lower side of the support plate 31, It is equipped in the vertical direction. Guide rod 32, At least four places are provided on the lower side of the support plate 31, The support plate 31 is guided to stabilize and lift. Lifting the cylinder roller 33, It is a device for lifting and lowering the support pin portion 22 via the support plate 31 and the lift plate 23 supported by the guide bar 32. The lifting shaft 33A of the lifting cylinder drum 33 is fixed to the support plate 31. Lifting the cylinder drum 33, It consists of an air cylinder with a drop prevention brake. This is controlled by a control unit 1 1 1 which will be described later. The lifting support plate 34' is for fixing and supporting the lifting cylinder drum 33, Simultaneously, The plate of the guide bar 32 can be supported up and down. Lifting support plate 34, Supported by the support 35 is fixed to the frame 13» X-axis alignment mechanism 17, It is a mechanism for adjusting the position of the panel 4 carried in and loaded into the roller unit 15 in the X-axis direction (transport direction). The X-axis is aligned with the mechanism 17, Supported by the support plate 37, The first panel clip 38, It is composed of the second panel clip 39. The support plate 37' is for supporting the plates of the first panel clip 38 and the second panel clip 39. Support plate 37, The long axis direction is formed in the X-axis direction (longitudinal direction of the roller type transport portion 7). The upper side of the support plate 37, Two guide rails 4 1 are arranged in series in the X-axis direction. The first panel clip 38, A member for abutting and supporting the edge of one of the X-axis directions (left side in Fig. 4) of the panel 4. The first panel clip 38, By the abutment portion 42' pillar 43, It is composed of a slider 44. The abutting portion 42' directly abuts against the member of the edge portion of the panel 4. The abutting portion 4 2 ' is composed of elastic members -11 - 201213931 pieces. Pillar 43, A member for integrally supporting the abutting portion 42 against the edge of the panel 4. Slide 44, A member for sliding the abutting portion 42 in the X-axis direction via the stay 43. The slider 44' is integrally coupled to the post 43, Slidably fitted to the guide rail 41» the second panel clip 39, A member for abutting and supporting the edge of the panel 4 in the X-axis direction of the other side. The second panel clip 39' is composed of the abutting portion 46, Pillar 47, It is composed of a slider 48. Abutment 46, It is a member that directly abuts the edge of the panel 4. Abutment 46, Made of elastic members, And set 2. Pillar 47, A member for integrally supporting the abutting portion 46 against the edge portion of the panel 4. Slide 48, A member for sliding the abutting portion 46 in the X-axis direction via the stay 47. Slide 48, The system is integrally connected to the pillar 47, It is slidably fitted to the guide rail 41. In the guide rail 41 and the slider 44, 48 is a driving source (not shown) that is incorporated into a direct-acting mechanism, etc. Controlled by the control unit 1 1 1 . With this, Sliding member 44, 48 in the X-axis direction, close to each other or leave, Or move it individually, The positioning of the panel 4 in the X-axis direction is performed. ID reading device 18, A device for reading the ID of the panel 4. The ID reading device 18 has a photographing device 18A, Forming an ID based on reading with the photographing device 18A, The defect information of the panel 4 is obtained from the CIM by the control unit 1 1 1 . The information based on the defect is formed to control the panel transfer table 1 and the like. ID reading device 18, It is supported on the XYZ pillow block 50. The XYZ spindle stage 50' movably supports the id reading device 18 in the XYZ axis direction. Specifically, 'XYZ Axis 50, By using a stroke that can cover the entire gamma axis direction of the panel 4 and about one-half of the X-axis direction, It is possible to move the ground support -12-201213931 to support the ID reading device 18. In addition, Z-axis direction, In the range of slightly adjusting the height of the ID reading device 18, The ID reading device 18 » XYZ spindle table 50 can be movably supported, Figure 2 3, By the Y-axis moving mechanism 51, X-axis moving mechanism 52, It is composed of a Z-axis moving mechanism (not shown). Y-axis moving mechanism 51, The device for movably supporting the ID reading device 18 in the Y-axis direction. Y-axis moving mechanism 51, It is composed of a rail 53 and a slider 54. Rail 53, The member of the guide rail 53 A is integrally provided. Slider 54, Used to support the ID reading device 18, A member that moves in the Y-axis direction. Slide 54, The ID reading device 18 is in a state of being fixedly supported, The guide rail 53A of the rail 53 can be slidably supported. A drive source (not shown) of a direct-acting mechanism or the like is incorporated between the guide rail 53 A and the slider 54, Controlled by the control unit 1 1 1 . With this, The positioning of the ID reading device 18 in the Y-axis direction is performed. X-axis moving mechanism 52, The device in which the ID reading device 18 is movably supported in the X-axis direction by the Y-axis moving mechanism 51. X-axis moving mechanism 52, It is composed of a guide rail 55 and a slider 56. The guide rail 55 is disposed in the X-axis direction. in particular, Guide rail 55, By being integrally mounted on the support rod 57 disposed in the X-axis direction, It is arranged in the X-axis direction. Support rod 57, In the state of being oriented toward the X axis, It is fixed to the frame 13 of the casing 6. Slide 56, A member for integrally supporting the rail 53 of the Y-axis moving mechanism 51 to move in the X-axis direction. Slide 56, The rail 53 is slidably supported on the guide rail 55 in a state of being fixedly supported. A drive source (not shown) of a direct-acting mechanism or the like is incorporated between the guide rail 55 and the slider 56, Controlled by the control unit 1 1 1 . With this, ID reading device -13- 201213931 Position 18 in the X-axis direction. Z-axis moving mechanism, A guide rail (not shown) similar to the above-described Y-axis moving mechanism 51 and X-axis moving mechanism 52 is formed of a slider (not shown). These are set in the Z-axis direction, And controlled by the control unit 1 1 1 , The position of the ID reading device 18 in the Z-axis direction is adjusted. Repair department 9, It is a device for applying repair processing to the panel 4 received by the loading unit 8. that is, Repair department 9, The apparatus is disposed on the lower side of the roller type transmission unit 7 and irradiates the defective portion of the panel 4 placed on the upper side of the roller type transmission device with laser light for repair. Repair department 9, It is provided in the middle of the roller type transmission unit 7. Repair department 9, By the laser device 60, XY axis table 61, It is composed of an ash removing device 62. Laser device 60, Used to the defective part of the panel 4, A device for irradiating laser light from the lower side of the roller type transmission portion 7. The configuration of the principle of the laser device 60 is shown in Fig. 8. 9. Laser device 60, a laser unit 65 for irradiating laser light for repair, It is composed of an optical system 66 that processes a specific laser light irradiation position by using an image. Laser unit 65, By the laser oscillator 67, Imaging lens 68, Total reflection mirror 69, Half mirror 70, Object lens 71, It is composed of a guiding light source 72. Laser oscillator 67, A device for generating laser light for repairing the defect of the panel 4. Imaging lens 68, Used in conjunction with the objective lens 71, The laser light generated from the laser oscillator 67 is imaged on the defective lens of the panel 4. Total reflection mirror 69, A mirror for directing the laser light from the laser oscillator 67 toward the side of the panel 4. Semi-transparent mirror 70, Used to let the laser light from the total reflection mirror 69 pass through -14 - 201213931, Simultaneously, A mirror that reflects light from the side of the panel 4. Object lens 7 1, Used in conjunction with the imaging lens 68 to operate, The laser light generated from the laser oscillator 67 is imaged on the defective lens of the panel 4. Object lens 7 1, Let the laser light match the size of the defect and set a plurality of them. here, Five objective lenses 71 are juxtaposed and integrally provided. Object lens 71, By the lens switching table 73 A to switch to the optimum objective lens 71, Focus is performed by the focusing table 73B. The lens switching table 73 A and the focusing stage 73B, A drive source (not shown) such as a stepping motor is provided. The driving source is controlled by the control unit 1 1 1 . Switching to the optimal objective lens 71 based on the defect information, And focus. also, In the objective lens 71, a mask to prevent dust from adhering as necessary. Guide light source 72, A device for accurately illuminating a position where a laser beam is irradiated to cause a guided light to be generated. Guide light from the guiding light source 72, The defect that is irradiated to the panel 4 following the same path of the laser light, After using the guiding light to a specific irradiation position, Irradiate the laser light. Optical system 66, By CCD camera 74, Imaging lens 75, Translucent mirror 76, Coaxial illumination source 77, It is composed of a total reflection mirror 78 and the like. CCD camera 74, A camera that is used to photograph the defects of the panel 4. CCD camera 74, Is connected to the control unit 1 1 1, The portrait information from the CCD camera 74 is processed by the control unit 1 1 1 . Imaging lens 75, Used in conjunction with the objective lens 71, A lens that focuses on the defects of the panel 4. Semi-transparent mirror 76, Used to allow light from panel 4 to pass through, A mirror that reflects light from the coaxial illumination source 77. Coaxial illumination source 77, A light source for illuminating a defective portion of the panel 4. Total reflection mirror 78, Used to reflect -15-201213931 light from the coaxial illumination source 77 to the mirror 半 XY spindle 61 of the semi-transparent mirror 76, As shown in Figure 3, Used to move the laser device 60 in the X-axis direction and the Y-axis direction, A means for aligning the illumination position of the laser light with the defect position of the panel 4. XY axis table 61, By the Y-axis moving mechanism 80, It is constituted by an X-axis moving mechanism 81. Y-axis moving mechanism 80, A device for adjusting the position of the laser device 60 in the Y-axis direction. Y-axis moving mechanism 80, It is composed of a guide rail 83 and a slider 84. The guide rail 83 is disposed in the Y-axis direction. Guide rail 83, It is fixed to the frame 13 of the casing 6, The slider 84 is slidably supported in the Y-axis direction. Between the guide rail 83 and the slider 84, A drive source (not shown) such as a direct-acting mechanism is incorporated. The drive source, Controlled by the control unit 1 1 1 The slider 84 is correctly moved and positioned in the Y-axis direction. Y-axis moving mechanism 80, The slider 84 is moved by a stroke that covers the entire area of the panel 4 in the Y-axis direction. X-axis moving mechanism 81, A device for adjusting the position of the laser device 60 in the X-axis direction, the X-axis moving mechanism 81, It is composed of a guide rail 85, a slider (not shown), and the like. Guide rail 85, Two of the X-axis directions are disposed in a state of being supported by the slider 84 of the Y-axis moving mechanism 80. Each guide rail 85, The slider is slidably supported in the X-axis direction. Between the guide rail 85 and the slider, A drive source (not shown) that incorporates a direct-acting mechanism or the like. The drive source, Controlled by the control unit 1 Move the slider correctly in the X-axis direction and position it. X-axis moving mechanism 81, Fasten the slider, Move slightly within 1 pixel (pixel). That is, the 'X-axis moving mechanism 81' is used for the fine adjustment device, After the panel transfer table 11 is used to position the panel 4, the laser device 60 is moved by -16-201213931 Auxiliaryly fine adjustment of the illumination position and defect position of the laser light. Illuminating dust removing device 62, Used to illuminate the defective portion of the panel 4, At the same time, the device for removing dust from the lens of the laser device 60 is removed. The illumination dust removing device 62' is composed of the illumination portion 88, Dust removal part 89, It is composed of a support plate 90 and the like. Lighting unit 88, Through the illumination of the CCD camera 74, The defective portion of the panel 4 is illuminated from the upper side. Lighting unit 88, It is constituted by an LED (not shown) or a condensing lens (not shown). Dust removal portion 89, A device for removing dust from the objective lens 71 of the laser device 60, And use air to blow the dust. Compressed air, The support plate 90 supplied by an air compressor (not shown) is used. A plate for supporting the illumination portion 88 and the dust removing portion 89. Illuminating dust removing device 62, It is supported on the XYZ pillow table 92. XYZ Axis 92, The illuminating dust removing device 62 is movably supported in the XYZ-axis direction. XYZ pillow table 92, By the Y-axis moving mechanism 93, X-axis moving mechanism 94, It is constituted by a Z-axis moving mechanism (not shown) or the like. Y-axis moving mechanism 93, The device for illuminating the dust removing device 62 in the Y-axis direction is movably supported. Y-axis moving mechanism 93, It is composed of a rail 96, a slider 97, and the like. Rail 96, The member of the guide rail 96A is integrally provided. Slider 97, Used to support the illumination dust removing device 62, A member that moves in the Y-axis direction. Slider 97, Attached to the state in which the illumination dust removing device 62 is fixedly supported, It is slidably supported by the guide rail 96A of the rail 96. Between the guide rail 96 A and the slider 97, Set the drive source of the direct-acting mechanism, etc. (not shown), The illumination dust removing device 62 can be correctly moved in the Y-axis direction -17-201213931. With this, Using the XYZ pillow table 92, Let the lighting part 88, Aligning the optical axis through the illumination with the optical axis of the laser light from the laser device 60 on the same axis, Synchronized with the movement of the laser device 60 and followed, mobile, Ensure constant lighting status. X-axis moving mechanism 94, The device in which the illumination dust removing device 62 is movably supported in the X-axis direction by the x-axis moving mechanism 93. X-axis moving mechanism 94, It is composed of a guide rail 98 and a slider 9 9 . The guide rails 98 are disposed in the X-axis direction. in particular, Guide rail 98, By being integrally mounted on the support rod 57 disposed in the X-axis direction, It is arranged in the X-axis direction. Slide 99, A member for integrally supporting the rails 96 of the spindle moving mechanism 93 to move in the X-axis direction. Slide 99, Attached to the state in which the support rails 96 are fixed, It is slidably supported on the guide rail 98. Between the guide rail 98 and the slider 99, a drive source (not shown) that incorporates a direct-acting mechanism, etc. Controlled by the control unit 1 1 1 . With this, The illumination dust removing device 62 is positioned in the X-axis direction. Ζ axis moving mechanism, It is composed of a guide rail (not shown) similar to the above-described x-axis moving mechanism 93 and X-axis moving mechanism 94, and a slider (not shown). These are placed in the direction of the x-axis, Controlled by the control unit 1 1 1 The position of the illumination dust removing device 62 in the x-axis direction is adjusted. Moving out of the department 10, The panel 4 that has been repaired by the repairing unit 9 is carried out to the outside. Moving out of the department 10, It is provided on the flow side portion below the roller type transmission portion 7. in particular, Moving out of the department 10, The crane unit 16 is provided on the lower side of the flow measuring portion under the roller type transmission portion 7. That is, The lower side of the flow side portion below the roller type transmission portion 7 is provided only with the crane portion 16 other than the X-axis pair -18 - 201213931. The crane part 16, Lift panel 4, It is sent to the transport robot 113 described later. Panel transfer table 1 1, Used to position the panel 4 in the Y-axis direction. The panel 4 is transported in the X-axis direction while being positioned in the X-axis direction. Panel transfer table 11, Figure 2 3, 6, 7 is shown by the Y-axis panel clamp mechanism, It is constituted by the X-axis conveying mechanism 101. Y-axis panel clamp mechanism 1〇〇, A device for clamping the panel 4 and positioning the panel 4 in the Y-axis direction. Γ-axis panel clip mechanism 100, By the link board 103, Guide rail 104, Slide 105, It is composed of a support arm 106 and the like. Link plate 1 03, A flat plate material is disposed between the two guide rails 109 of the X-axis conveying mechanism 101, which will be described later, on both sides of the roller-type conveying portion 7. A guide rail 104 is provided on the upper side of the web 103. Slide 105, It is slidably fitted to the guide rail 104. The slider 105, The support arm 106 is supported to move in the Y-axis direction. Slide 1〇5, The two are disposed on the guide rail 104 between the guide rail 104 and the two sliding members 105. Set a drive source (not shown) for a direct-acting mechanism, etc. The support arm 111 can be controlled by the control unit 111 and the two sliders 105 can be correctly moved in the Y-axis direction. It is used to clamp the components of the panel 4. Support arm 106, Is fixed to the slider 105, It extends toward the panel 4 placed on the roller type transport portion 7. The apex of the support arm 106, Three clip portions 107 are provided. X-axis conveying mechanism 101, The panel 4 to be clamped by the γ-axis panel clip mechanism 100, The apparatus on the movable roller 7A of the roller type transport unit 7 having no drive source is transported. X-axis conveying mechanism 101, By the guide rail 109, It is composed of a slider 110. Guide rail 109, It is attached to both sides of the roller type transmission unit -19- 201213931 Two are set. Each guide rail 109, It is disposed in the X-axis direction of the long side direction of the roller type transport portion 7. With this, The slider 110 is slidably supported in the X-axis direction. Slider 110, They are respectively supported on the guide rails 109, A member that moves in the X-axis direction. Each slider 110, It is attached to both ends of the connecting plate 103 of the Y-axis panel clip mechanism 100. The Y-axis panel clip mechanism 100 is moved in the X-axis direction. Between the guide rail 109 and the two sliders 110, A drive source (not shown) such as a direct-acting mechanism is provided. The drive source is controlled by the control unit 111. The two sliders 1 1 〇 can be synchronized with each other and correctly moved in the X-axis direction. Control unit 11 It is a device for controlling the entire repair device 1. Control unit 111, The setting of the built-in laser, Or set up a computer such as a recipe, etc. It is provided in the vicinity of the processing transmission device 2 and the transport transmission device 3. The specific control system of the control unit 1 1 1 is described later. Transfer robot 113, It is a device for transferring the panel 4 of the processing transport device 2 to the transport device 3. Transfer robot 113, As shown in Figure 12, It is provided at a position facing the carry-out unit 10 of the processing transport device 2 and the transport unit 118 of the transport transport device 3 to be described later. The processing conveyor 2 of the lower stage and the transport transmission apparatus 3 of the upper stage are connected. With this, Transfer the support arm (not shown) of the robot 113, The movement between the carry-out unit 10 of the processing transport device 2 and the carry-in unit 118 of the transport transport unit 3 is performed. The panel 4 of the processing device 2 of the lower stage is transported to the transport device 3 of the upper stage. As the transport robot 113, It is possible to use an existing device capable of supporting and transporting the panel 4. Transfer robot 1 1 3, It is controlled by the control unit 1 1 1 . Take out the insertion robot 114, It is used to deliver the panel 4 from the external panel 4 to the lower part of the processing transmission device 2 in the lower section of -20-201213931. and, A device that receives the panel 4 of the panel transport port of the transport conveyor 3 of the upper stage and transports it to the outside. Take out the insertion robot 114, As shown in Figure 11, It is placed at a position facing the panel loading port of the loading unit 8 of the processing transport device 2 and the panel carrying port of the transporting and transporting device 3. As the take-out robot 114, It is possible to use an existing device that can support and take out the panel 4. Take out the robot 1 1 4, It is controlled by the control unit 1 1 1 . Transporting the transport device 3, It is a device for transporting the panel 4 which has been processed from the processing transfer device 2 to the outside. Transporting the transport device 3, Figure 1, 10, It is made up of a basket Π6. Roller type transmission unit 117, Moving into section 118, It is constituted by the carry-out unit 119. The housing 116, Similarly to the casing 6 that processes the transport device 2, By frame 12 1 It is composed of an outer side plate (not shown). Frame 1 21, It is used to receive and support the skeleton of the roller type transfer unit Π7 and the like. The frame 121 is constructed using a tube-and-melt structure. Outside board, It is a sheet covering the frame 121. Outside board, It is made of stainless steel or the like. On the side of the upstream side end portion (the right end portion in Fig. 1) of the casing 1 16 The face loading unit 118 is provided with a panel transfer port (not shown) for loading the panel 4, and a roller type transfer unit 117. It is used to transport the transmission device of the panel 4. Roller transfer unit 1 177 It is composed of an electromagnetic drive transport device. The panel 4 is transported by electric quantitative transfer. Roller type transfer unit 117, in particular, Rotating roller consisting of a plurality of parallel arrangements -21 - 201213931 Column 123, Electromagnetic driven rollers 124 respectively mounted at one end of each of the rotating rollers 123, An electromagnetically driven roller 125 that rotates the electromagnetic driven roller 124, It is constituted by a drive motor 126 or the like that rotationally drives the electromagnetic drive roller 125. Electromagnetically driven roller 125, They are disposed to face each of the electromagnetic driven rollers 124 one-to-one. Each electromagnetic drive roller 125, Rotating shafts 127 are respectively mounted on the drive motor 126 disposed in the direction in which the electromagnetic driven rollers 124 are straight forward. Using the rotation formed by the drive motor 126, The rotating roller 123 is rotated by the electromagnetic driven roller 124. Drive motor 126, It is controlled by the control unit 111. With this, Moved into the panel 4 of the transport conveyor 3, The rotating roller 123 that is rotationally driven by driving the motor 126 is facilitated and transported to the panel carrying-out port of the carrying-out unit 119. Moving into section 118, It is a part that carries the panel 4 from the outside. The loading unit 1 1 8 ' is provided on the flow side portion (the right side portion in Fig. 1) of the roller type transmission portion 117. Moving into section 118, It is the same as the crane unit 16 of the processing transport device 2 or the crane unit 16 provided in the carry-out unit 10, The crane portion 16 is disposed on the lower side of the rotating roller 123. The crane part 16, The support pin 22 is raised by the elevator 24, The support pin 25 extends upward from between the rotating rollers 123. Received the panel 4 from the transport robot 113, The support pin 25 is lowered toward the lower side of each of the rotating rollers 123. The panel 4 is placed on the rotating roller 123. Moving out of section 119, The panel 4 that has been transported by the loading unit 118 by the roller type transport unit 117 is carried out to the outside. Moving out of section 119, It is disposed on the flow side portion below the roller type transmission portion 1 1 7 . in particular, Moving out part 1 1 9, The crane unit 16 similar to the crane unit 16 of the loading unit 118 is provided on the lower side of the flow measuring portion of the roller type transmission unit 1 17 . At the end of the flow side under the moving out section -22- 201213931 119, The panel loading and unloading (not shown) is provided by the robot n4. Crane section 16, The panel 4 transported by the loading unit ι18 is lifted up. It is delivered to the take-out robot 114 by the panel transfer port. A mask (not shown) is provided at the panel outlet. In laser irradiation, The mask will close, To prevent laser light from leaking to the outside. Set the interlock switch on the opening and closing of the mask (not shown). The repair device 1 constructed as above, The repair process of the panel 4 is performed by the control unit 1 1 1 in the following manner. This will be explained based on the flow chart of Fig. 13. First of all, Using the robot 114 for removal, Will come from the external panel 4, The loading and unloading unit 8 is moved from the panel loading port of the processing transfer device 2 (step S1). The lifting cylinder 33 of the elevator 24 of the crane unit 16 raises the lifting shaft 33A. The support pin 25 of the support pin portion 22 is raised from between the movable rollers 7A carried into the roller portion 15. Take out the loading robot 114, The panel 4 is placed on the panel receiving portion 28 of the support pin 25, Becomes standby. then, In the crane section 16, The lifting cylinder 33 lowers the lifting shaft 33A, The support pin 25 of the support pin portion 22 is lowered to be moved between the movable rollers 7A of the roller portion 15. With this, The panel 4 is placed on the movable roller 7A that is carried into the roller portion 15. at this time, Support pin 25, Let the panel receiving portion 28 slightly leave the inside of the panel 4 and stop descending. Positioning of the abutting portion 42 of the first panel clip 38 of the X-axis alignment mechanism 17 and the abutting portion 46 of the second panel clip 39 is adjusted to the position of the peripheral portion of the panel 4 . then, The slider 44 of the first panel clip 38 and the slider 48 of the second panel clip 39, Move to the set position in close proximity to each other, At the abutment section 42, 46 press panel 4, The positioning of the panel 4 in the X-axis direction is performed (step S2). Furthermore, The two sliders 105 of the panel transfer table 11 are moved to the set position in proximity to each other. Pressing the panel 4 on the clip portion 107 of the support arm 106, Performing the positioning of the panel 4 in the Y-axis direction, and, The panel 4 is supported by the clip portion 107 (step S3). The positioning operation of the X-axis alignment mechanism 17 and the panel transfer table 11 Can be done at the same time, Or you can let either party do it first. With this, The panel 4 performs positioning in the XY axis direction. then, X-axis alignment mechanism 17, The system is released, clamping It is lowered below the roller type transmission portion 7. then, The ID reading device 18 uses an XYZ spindle stage 50, And being moved above the ID of panel 4, Read its ID, The moving distance is calculated (step S4). that is, Control unit 1 1 1, According to the ID read by the ID reading device 18, Obtaining defect information of panel 4 from CIM, And based on the defect information to control. Reading the alignment mark of the panel 4, The moving distance from the alignment mark to the defect portion is specified. Based on the defect information, The panel 4 is moved to the set position by the panel transfer table 1 1 (step S5). in particular, In a state in which the movable roller 7 A of the roller type transport portion 7 is auxiliaryly supported, The support arm 106 of the panel transfer table 1 supports the panel 4, The slider 1 10 is guided on the guide rail 109, The panel 4 is moved with a slight force in the X-axis direction up to the set position of the repair portion 9. Also -24- 201213931 ie, The position of the defect of the panel 4 in the X-axis direction, It is moved to a position coincident with the position of the optical axis of the objective lens 71 of the laser device 60 in the X-axis direction. then, The laser device 60 is moved and positioned in the Y-axis direction by the Y-axis moving mechanism 80 of the XY spindle 61 (step S6). that is, The laser device 60 is moved to a position in the Y-axis direction of the optical axis of the objective lens 71 of the laser device 60, a position that coincides with the position of the defect of the panel 4 in the Y-axis direction, Correct positioning 〇 Again, In order to supplement the accuracy of the panel transfer table 11 in the X-axis direction, On the other hand, the X-axis moving mechanism 81 causes the laser device 60 to be finely adjusted by moving only in one pixel in the X-axis direction. The defective portion is precisely captured (step S7). that is, The laser device 60 is precisely integrated with the defective portion. at this time, It is also possible to display an image of a defective portion reflected by the photographing device with a monitor (not shown). Let the operator confirm. Furthermore, Based on the above defect information, The XYZ pillow stage 92 moves the illumination portion 88 of the illumination dust removing device 62 to a position above the defective portion of the panel 4 (step S8). With this, Adjusted to the optical axis formed by the illumination unit 88 through the illumination, It coincides with both the optical axes of the CCD imaging device 74. Furthermore, In a state where the optical axis of the coaxial illumination source 77 coincides with the optical axis of the CCD camera 74, CCD camera 74 reflects the defects of panel 4, a laser light shaft of the laser oscillator 67, Integration with the defect location of panel 4. then, The visible light is emitted from the guiding light source 72, Finally, it is confirmed that the laser optical axis of the integrated laser oscillator 67 and the defect position of the panel 4 are The laser light is irradiated from between the movable rollers 7A of the roller type transfer portion 7, Repair the defective part (step S9). -25- 201213931 When the repair is over, The panel transfer table 11 moves the panel 4 to the carry-out unit 10, It is sent to the transport robot 113 and transferred to the transport conveyor 3 (step S10). that is, After the panel transport table 11 is moved to move the panel 4 to the carry-out portion 10, The panel transfer table 1 1 is returned to the loading unit 8 . The crane section 16 lifts the panel 4, It is delivered to the support arm of the transport robot 113. Transfer the support arm of the robot 113, Supporting panel 4, It is transported to the transport conveyor 3. Support arm, The panel 4 is carried into the loading unit 118 of the transport conveyor 3, It is sent to the crane unit 16 of the loading unit 18. Crane section 16, After receiving the panel 4, it is placed on the roller type transport portion 117 of the transport transport device 3, The roller type transport unit 117 moves the panel 4 to the carry-out unit 119 (step S11). In the roller type transfer unit 117, Drive motor 126, The rotating roller 123' is rotated by the electromagnetic driving roller 125 and the electromagnetic driven roller 124 to move the panel 4 to the carry-out portion 119. When the sensing device (not shown) provided in the carry-out unit 19 detects the panel 4, The drive motor 126 will be stopped. then, The crane section 16 lifts the panel 4, After being delivered to the take-out robot 114, it is carried out to the outside (step S12). Take out the support arm of the robot 11 4, The carry-out unit 119 is inserted into the panel outlet. The panel 4 supported by the crane unit 16 is received and carried out to the outside. In the series of processing, Because it is time to repair the repair at the repair department 9, Therefore, in cooperation with the repairing unit 9, And the next panel 4 is moved into the loading portion 8' in advance, once the repair process is finished, The panel 4 after the completion of the repair process is quickly moved to the carry-out portion 10, Immediately after the loading unit 8, the next panel 4 is received and moved to the repairing portion 9. With this, The panel 4 is continuously carried into the repairing process. As above, Since the panel 4 is placed on each of the movable rollers 7A of the roller type transport portion 7, And irradiating the laser beam of the laser device 60 to the defective portion from between the movable rollers 7A. and so, Can not dispose the panel 4 up and down, Repair the defect. Since the panel 4 is supported by the movable roller 7 A of the roller type transport portion 7, And the support arm 106 of the panel transfer table 11 is supported. Therefore, it is possible to prevent the panel 4 from falling or deflecting. And indeed support it. That is, The panel transfer table 11 and the roller type transfer unit 7 can be operated in cooperation. The panel 4 is reliably supported. With this, Even for large panels 4, It can also be lifted and transported by the panel transfer table. Furthermore, Since the accuracy of the X-axis conveying mechanism 101 of the panel transfer table 11 is made, Supplemented by the X-axis moving mechanism 81 of the XY spindle stage 61, and so, The X-axis transfer mechanism 101 can be operated in cooperation with the X-axis moving mechanism 81. Positioning the laser device 60 in the X-axis direction, It is carried out in a short time and with high precision. result, X-axis transport mechanism 101 and X-axis moving mechanism 81 that cooperate with each other, With the addition of the Y-axis moving mechanism 80, it is possible to quickly and accurately. The laser device 60 is positioned at the defect site. With this, Even for large panels 4, Repair processing can also be performed efficiently. Furthermore, A plurality of panels 4 can be continuously repaired. that is, By making up the cost of the implementation type, The repair process can be performed most efficiently. [Modification] In the foregoing embodiment, The processing transmission device 2 and the transport transport device -27-201213931 are configured as different components. but, As shown in Figure 14, It can also be constructed in one piece. The configuration of the entire repair device 130 of Fig. 14 It is substantially the same as the repair device 1 of the foregoing embodiment. thus, here, The same drawing number is attached to the same component. The description is omitted. In the repair device 130 of the figure, In a housing 131, The processing transmission device 2 and the transport transmission device 3 are incorporated. The housing 131, Main frame 132, Floating frame 133, Vibration reducer 134, It is composed of the outer side plate 1 3 5 and the like. Main frame 1 3 2, It is configured to superimpose the processing transmission device 2 and the transport transmission device 3 in two upper and lower stages and simultaneously support the size of the devices. Transporting the transport device 3, It is supported by a pillar portion 136 provided in the main frame 132. Floating frame 133, The frame supporting the processing transport device 2 is supported. Floating frame 133, In order to prevent the vibration of the processing transmission device 2 from causing obstacles to the repair process, The vibration damper 134 is passed through and mounted in the main frame 132. Vibration removing machine 134, It is constructed using an air spring or the like using air pressure. Furthermore, In the vibration eliminator 134, a level adjustment is set » by using the vibration damper 134, The processing transfer device 2 can be safely supported. With this, It is possible to prevent the processing transmission device 2 from shaking due to an earthquake or the like. Safely apply repairs. A mask 137 is provided at the panel loading port of the casing 131 (facing the left side surface of the casing 131 of the processing transfer device 2 of Fig. 14). A mask 138 is provided at the panel discharge port (to the left side of the casing 131 of the transport conveyor 3 of Fig. 14). In the masks 137, 138 is equipped with a chain switch. The masks 137, 1 3 8, It will be turned off during laser exposure. To prevent laser light from leaking to the outside -28- 201213931 Install mil. Repair the effect, Use the 6k 榡 and gml sway type to implement the predecessor and the 厶 厶 也 Since the floating frame 133 supported by the vibration damper 134 is used to support the processing transfer device 2, and so, Even if the repairing device 1 30 vibrates for any reason, It is also possible to perform the repair process safely in the repair unit 9. In addition, In the foregoing embodiment, The processing transmission device 2 and the transport transmission device 3 are vertically overlapped, but, It can also be formed side by side. In the case where it is not necessary to return the panel 4 to the panel entrance of the processing transport device 2, the transport transport device 3 may not be provided. Only the processing transfer device 2 constitutes the repair device 1. With regard to the above-described embodiment and the repair device of the modification, It is common to a panel having a circuit capable of repairing a defective portion with laser light. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a repairing apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view showing a handling conveyor of a repairing apparatus according to an embodiment of the present invention. Fig. 3 is an exploded perspective view showing the processing transfer device of the repairing apparatus according to the embodiment of the present invention. 4 is a plan view showing a lifter and an X-axis alignment mechanism of a repair apparatus according to an embodiment of the present invention. FIG. 5 is a view showing a crane for a repair apparatus according to an embodiment of the present invention -29-201213931 Side view of the part and the x-axis alignment mechanism. Fig. 6 is a plan view showing a loading portion of a repairing apparatus according to an embodiment of the present invention. Fig. 7 is a side view showing a loading portion of a repairing apparatus according to an embodiment of the present invention. Fig. 8 is a front elevational view showing a laser device relating to a repairing apparatus of an embodiment of the present invention. Fig. 9 is a front elevational view showing a laser device relating to a repairing apparatus of an embodiment of the present invention. Fig. 1 is a perspective view showing a roller conveyor of a conveying apparatus of a repairing apparatus according to an embodiment of the present invention. Figure 11 is a side view showing a repairing apparatus according to an embodiment of the present invention. Figure 12 is a plan view showing a repairing apparatus according to an embodiment of the present invention. Figure 13 is a view showing a control unit for a repairing apparatus according to an embodiment of the present invention. Processing flow chart. Fig. 14 is a side view showing a modification of the present invention. [Main component symbol description] 1 : Repair device 2: Processing conveyor 3 (conveyor): Transport conveyor 4 : Panel -30- 201213931 6 : Housing 7: Roller conveyor 7A: Free roller 8 : Moving in part 9 : Repair Department 10 : Moving out part 1 1 : Panel transfer table (stage) 1 3 : Frame (frame) 1 5 : Move into the roller section 16: Lifter 17: X-axis alignment mechanism 18 : ID reader 18A: Camera 19 : Stay 20 : Adjustment slit (22): Support pin 24 : Lift 25 : Support pin (pin) 27 : Slider 28 : Panel Acceptance 29 : Guide rail 3 1 : Support plate 32: Guide bar 33: Lift cylinder cylinder (cylinder) -31 - 201213931 34 : Lifting support plate 3 5 : Pillar 37: Support plate 38: 1st panel clamp 39: 2nd panel clip 4 2 · Abutment 4 3 : Pillar 44: Slide 46: Abutment 4 7 : Pillar 48: Slide 50: XYZ stage stage 51 : Y-axis moving mechanism 52: X-axis moving mechanism 53: Rail bar 54 : Slide 5 5 : Guide rail 56 : Slide 5 7 : Support rod 60 : Laser device 61 : XY axis table 62 : Lighting dust removal device 65 : Laser unit 66 : Optical Department -32- 201213931 67 : Laser oscillator 6 8 : Imaging lens 6 9 : Total reflection mirror 7〇: Half mirror 7 1 : Object lens 72: Guide light source 74 : CCD camera 7 5 : Imaging lens 76: Semi-transparent mirror 7 7 : Coaxial illumination source 7 8 : Total reflection mirror 80 : Y-axis moving mechanism 81 : X-axis moving mechanism 8 3 : Guide rail 8 4 : Slide 8 5 : Guide rail 8 8 : Lighting Department 89: Dust removal part 90 : Support plate 92 : XYZ axis table 93 : Y-axis moving mechanism 94 : X-axis moving mechanism 96 : Rail 97: Slide -33- 201213931 98 : Guide rail 9 9 : Slide 100: Y-axis panel clamp mechanism 101 : X-axis conveying mechanism 103 : Link plate 104: Rail 1 〇 5 : Slide 106: Support arm 1 〇 7 : Clip part 109 : Guide rail 1 1 〇 : Slide 1 1 1 : Control unit 1 13 : Transport robot 114: Take out the robot 1 1 6 : Housing 1 1 7 : Roller conveyor 1 1 8 : Moving in 1 19 : Moving out part 1 2 1 : Frame 1 2 3 : Rotating roller 124 : Drive magnet 125 : Drive magnet 1 2 6 . Drive motor 1 30 : Repair device - 34 - 201213931 1 3 1 : Housing 132 : Main frame 133 : Floating frame 134 : Vibration eliminator 1 3 5 : Outside plate 1 3 6 : Pole portion 137 : Shutter 138 : Mask