201109176 六、發明說明： c發明所屬之技術領城；j 發明領域 本發明係有關於壓印或輥印平版印刷用壓印器製造裝 置及製造方法’更詳而言之，其係有關於用以製作於平版 印刷方法之形成圖案時之壓印器的製造裝置及製造方法， 係可藉用於印刷製程之壓印器製造方法及製造裝置之改 善’製造優異之性能之壓印器，藉此，可於印刷製程之形 細微圖案形成時，形成更優異之細微圖案’並且可因製程 簡化’使製造單價及生產性提高之印刷用壓印器製造方法 及製造裝置。 【先前技術;j 發明背景 一般，適用於資訊保存、小型感測器、光結晶及光學 元件、細微電子機械元件、顯示元件、顯示器及半導體之 細微圖案形成製程係利用光，形成細微圖案之光刻（photoli thography)製程。然而，因[CD基板之大型化、圖案尺寸之 細微化、各領域之價格競爭力激烈，非既有之光刻製程之 革新勒新概的之製程必要性興起。即，既有之光刻製程由 於每次形成圖案時，必須進行曝光、曝光後烘烤、顯像、 顯像後烘烤、蝕刻製程、洗淨製程等，而製程時間長，必 須反覆進行數次之光製程，故生產性降低之問題點明顯地 浮現。又’因圖案之超細微化發展，而必須改換如曝光裝 備之高價裝備，故投資費用增加，高解析度之光罩價格亦 201109176 驟漲，而有效率性低落之缺點，必須使用高價裝備之問題 點最終成為導致原價上升之其他主要因素。 因而’可解決此種問題之方法揭示了壓印及親印平版 印刷方法。首先，壓印平版印刷係為刻印奈米尺度，而由 美國普林斯頓大學之史蒂芬周（Stephen ch〇u)等最先發明之 方法，係預先於強度相對強之無機物或高分子表面製作必 要之形狀，將此壓印於其他物質上，而形成細微圖案。具 體吕之，此係使用預先形成有所期細微圖案之無機物或高 分子壓印器，而貼合於塗敷於金屬膜或有機膜上之硬化性 組成物，使其熱硬化或光硬化，形成圖案之技法，相較於 既有之光财法，具有對製程單純化及細微圖案形成有利 之優點。在此種壓印平版印刷，發揮習知光罩作用者為壓 印器。在壓印製程，壓印器之作用為可稱為壓印製程技術 之核心之部份，為形成所期形態之圖案，基本上唯有製造 所期形態之壓印器，方可以施行壓印製程，形成圖案。 又，輥印係使既有之印刷技術更進步之技術，有刻印 有圖案之輥之印刷法及利用刻印有圖案之基板，於無圖案 之輥形成細微圖案之方法。此種觀印方法亦使用用以將各 材料轉印至下個步驟之壓印器。輥印方法亦如壓印步驟般 唯有以優異之壓印器之製造為前#，方可形錢異之性^ 之圖案。 此種壓印及輥印平版印刷製程相較於光刻，因製裎單 純’而不用高價製程之曝光製程，故可因裝備簡單，製矛 數減少’而達成無塵至空間之劃時代、革新之減少，相車* 201109176 於既有之製程，可以低價之裝備實現細微圖案，而可具優 異之價格競爭力，作為未來圖案化技術之替代方案方法揭 示為重要之核心技術。 此種壓印及輥印平版技術技法今後亦可適用於F E D (F i eld Emission Display)、OLED(ElectroLuminescent)、PDP(P lasma Display Panel)、太陽電池(Solar cell)裝置，藉此， 在各應用領域，製程亦單純，預期之後在反覆印刷後，亦 可確保圖案之精密度。 在此，前述壓印及輥印平版印刷技法可於製作壓印器 後，以印刷製程形成細微圖案，而取代以既有之光刻形成 圖案時使用之高解析度光罩。用於此種印刷技法之壓印器 可以多種方法製造。然而’既有之壓印器製造方法製程複 雜，生產性差，壓印器之平坦度、總間距等壓印器之物性 實現不順，而於印刷製程時，在優異之圖案形成上有許多 限制。 因此’實際情況係迫切開發可解決此種習知問題點之 新形態壓印及輥印用壓印器製造方法及製造裝置。 I：發明内容3 發明概要 發明欲解決之課題 為解決此種習知技術之問題點，本發明目的係提供製 作於壓印或輥印平版印刷用壓印器用圖案形成使用之壓印 器之製造方法及製造裝置’根據本發明，提供在進行半導 體、LCD、PDP、OLED、太陽電池(Solar cell)產業之平版 201109176 印刷之圖案形成的製程使用之壓印器，藉此，達成壓印器 性能提高、製程改善、製造單價改善。又，藉執行利用本 發明壓印器之印刷製程，可達成更優異之圖案形成。 用以欲解決課題之手段 為達成前述目的，本發明提供一種壓印或輥印平版印 刷用壓印器製造裝置，其包含有：真空腔體，係由連結於 真空產生裝置且可開關之空間構成者；主模，係位於前述 真空腔體之下部，並於上面具有模圖案者；後面支撐體附 著用吸盤，係可上下移動地位於前述真空腔體之上部，以 卸除/附著後面支撐體者；及控制部，係進行以下動作者， 即，a)以前述真空產生裝置於前述真空腔體形成真空，b) 在將前述後面支撐體附著於前述後面支撐體附著用吸盤之 狀態下，將前述附著用吸盤移動至下方，以將前述後面支 撐體附著於形成在前述主模上面之壓印器，c)在前述真空 狀態或已去除前述真空之狀態下，從前述後面支撐體附著 用吸盤卸除後面支撐體之狀態下，將前述附著用吸盤移動 至上方者。 又，本發明提供一種壓印或輥印平版印刷用壓印器製 造方法，其具有以下步驟，即：a)在位於真空腔體之下部 且上面具有模圖案之主模上面塗布壓印器材料，將後面支 撐體附著於後面支撐體附著用吸盤，前述後面支撐體附著 用吸盤係位於前述真空腔體上部，用以將後面支撐體卸除/ 附著者；b)以真空產生裝置於真空腔體形成真空；c)在將後 面支撐體附著於前述後面支撐體附著用吸盤之狀態下，將 201109176 前述附著用吸盤移動至下方，以將前述後面支撐體附著於 形成在前述吏模上面之壓印器；及d)在前述真空狀態或已 去除前述真空之狀態，將後面支撐體從前述後面支樓體附 著用吸盤卸除之狀態下，將前述附著用吸盤移動炱上方。 發明效果 根據本發明壓印或輥印平版印刷用壓印器製造裝置及 製造方法，玎提供可製造相較於既有之印刷用壓印器’具 平坦度、圖案形狀之優秀性、總間距等優異之物性的壓印 器’並且，於進行印刷製程時，使圖案不良之產生最少化’ 使成品率改善、製程之效率性提高之壓印及輥印壓印器製 造方法及製造裝置，藉此，可獲得可藉對多種印刷製程之 穩定之壓印器供給’進行優異之印刷製程。 圖式簡單說明 第1圖係分別模式地顯示關於本發明壓印或輥印平版 印刷用壓印器製造裝置之實施例的圖式。 第2圖係模式地顯示關於本發明壓印或輥印平版印刷 用壓印器製造装置之一實施例之作動例的圖式。 第3圖係模式地顯示關於本發明壓印或輥印平版印刷 用壓印器製造骏置之另—實施例之作動例的圖式。 第4圖係模式地顯示關於本發明壓印或輥印平版印刷 用壓印器裝4裝置之另—實施例之作動例的圖式。 C實施冷式3 用以實施發明之形態 以下’以圖式為參考，就本發明詳細說明。 7 201109176 本發明係關於壓印或輥印平版印刷用壓印器製造裝 置，包含有由連結於真空產生裝置2,且可開關之空間構成 之真空腔體10、位於前述真空腔體10之下部，並於上面具 有模圖案之主模20、可上下移動地位於前述真空腔體10之 上部，以卸除/附著後面支撐體(B)之後面支撐體附著用吸盤 30、及控制部而構成，該控制部係具有以下控制過程，即， a)以前述真空產生裝置2於前述真空腔體10形成真空，b)在 將前述後面支撐體（B)附著於前述後面支撐體附著用吸盤 30之狀態下，將前述附著用吸盤30移動至下方，而將前述 後述面支撐體（B)附著於形成在前述主模20上面之壓印器 (S)，c)在前述真空狀態或已去除前述真空之狀態下，將後 面支撐體(B)卸除之狀態下，將前述附著用吸盤30移動至上 方。 即，如於第1圖顯示關於此之具體例，具有真空腔體 (chamber)，該真空腔體係與由旋轉泵、擴散泵、或該等組 合等構成之普通真空產生裝置連結，且如於第1(a)圖顯示具 體之例（此時，圖中未顯示用以關閉開放口之門），具有可使 用以形成後面支撐體及壓印器之材料出入的開閉口，或如 於第1(b)圖顯示具體例，腔體自身具有可上下分離/結合而 開閉之空間，於封閉前述空間時，藉前述真空產生裝置之 運轉，於密閉空間形成真空。 又，如於第1圖顯示其具體例，於前述真空腔體之下部 結合上面具有模圖案之主模，如於第1圖顯示其具體例，於 前述真空腔體上部結合將結合於壓印器後面之後面支撐體 8 201109176 卸除/附著之後面支撐體附著用吸盤。在此，前述後面支撐 體附著用吸盤對真空腔體可上下移動地結合，並藉後述控 制部之控制上下移動。 前述主模20亦可為上面具模圖案之一體型模，如圖所 示，於主工模(jig)上形成有預定圖案，或亦可於設置有形 成所期形態之形狀之母模（master)的組裝體形態構成此主 模。 前述後面支撐體附著用吸盤（chuck)30係結合於壓印 器，以將發揮支撐體作用之後面支撐體卸除及附著之吸 盤，根據卸除附著方法，多種吸盤符合此，較佳為利用靜 電施行卸除附著之靜電吸盤、或利用真空吸附方式施行卸 除附著之接著吸盤，因為其對後面支撐體之附加應力少故 適用於此，更佳為可使用對後面支撐體之附加應力產生最 少之靜電吸盤（electrostatic chuck)。 此種真空腔體、主模、附著用吸盤藉控制部進行以下 之動作，即，a)以前述真空產生裝置於前述真空腔體形成 真空，b)在將後面支撐體附著於前述後面支撐體附著用吸 盤之狀態下，將前述附著用吸盤移動至下方，以將前述後 面支撐體附著於形成在前述主模上面之壓印器，c)在前述 真空狀態或已去除前述真空之狀態，將後面支撐體從前述 後面支撐體附著用吸盤卸除之狀態下，將前述附著用吸盤 移動至上方。關於此之具體例如第2圖至第3圖所示。 即，在具有真空腔體、主模、附著用吸盤之製造裝置， 於主模及附著用吸盤分別形成壓印器及後面支撐體，將真 201109176 空腔體關閉’形成密閉空間後，使真空產生裝置運轉，而 於前述真空腔體形成真空，在將後面支撐體附著於前述後 面支撐體附著用吸盤之狀態下，將前述附著用吸盤移動至 下方，而將前述後面支撐體附著於形成在前述主模上面之 壓印器。其次，i)在依舊維持前述真空狀態之狀態下，從前 述後面支撐體附著用吸盤卸除後面支撐體，僅將前述附著 用吸盤移動至上方，或者u)除前述真空，使腔體呈常壓狀 態後，從前述後面支撐體附著用吸盤卸除後面支撐體，僅 將前述附著用吸盤移動至上方。 藉此，由於可使在真空狀態施加於後面支標體之應力 最少化，而將後面支撐體與壓印器結合，故該等間之結合 係均等地，且在附加之應力產生少，也不產生殘留應力下 進行’而可維持成平坦度、圖案形狀之保存性、總間距等 之物性優異。 又，除此之外，如於第2圖至第3圖顯示其具體例，本 發明之壓印器製造裝置更包含有由用以將前述主模2〇加熱 之加熱裝置40a或位於前述主模2〇上部，將包含紫外線之多 種波帶之光照射至刖述主模20的光照射裝置4%構成之硬 化裝置40a或40b(如圖所示，當然亦可2者皆構成），而在前 述壓印器及後面支撲體之附著以後，於該等間進行結合。 因此，前述控制部於前述c)過程後，更具有d)在前述真空狀 態或已去除前述真空之狀態下，使前述硬化裝置伽或獅 作動，而使壓印器⑶及後面支撐師)之間之結合體硬化的 控制過程。即，前述硬化過程亦可在維持前述真空腔體之 10 201109176 真空之狀態下進行，亦可在解除真空狀態後進行。關於此 之具體例分別如第2圖至第3圖所示。 又，如前述，前述真空腔體較佳為如於第1(b)圖及第3 圖顯示其具體例，真空腔體1〇之上部4及下部6分別可上下 分離而開關。藉此，如第3圖所示，具有可在對後面支撐體 之附著用吸盤之裝載、壓印器之形成、硬化過程之光照射 側面易施行各過程之優點。又，如前述，前述後面支撐體 附著用吸盤以靜電吸盤構成者因可於吸附（chucking)及釋 放(dechucking)時，使應力產生最少化，真空腔體之驅動與 吸盤之驅動間驅動方式不同，而可減少相互間之干擾，故 較佳。 又，如前述，真空腔體10具有上部4及下部6可分別上 下分離而開關之構造時，如於第4圖顯示其具體例，可構成 前述真空腔體10之上部4或下部6結合於直線運動導件8,而 於上部4及下部6分離時，對對方直線移動之形態。藉此， 具有可構成全體裝置之自動化之優點。又，在此，當狹 將前述真空腔體10之上部4及下部6皆分別結合於直線運動 導件8，而使該等移動。 此外，本發明提供壓印（imprint:特別是後面支撐體為 玻璃等柔軟性差之物質時）或輥印(r〇11_print:特別是後面支 撐體為樹脂薄膜等柔軟性高之物質時）平版印刷用壓印器 製造方法，其具有包含以下步驟之結構，該等步驟即，幻 於位於真空腔體10之下部，並於上面具有模圖案之主模2〇 上面塗布壓印器材料，將後面支撐體(B)附著於位於前述真 201109176 空腔體10上部，用以將後面支撐體(B)卸除/附著之後面支撐 體附著用吸盤30，b)以真空產生裝置20於真空腔體10形成 真空，c)在將後面支樓體(B)附著於前述後面支樓體附著用 吸盤30之狀態下，將前述附著用吸盤3〇移動至下方，以將 刚述後面支樓體(B)附著於形成在前述主模2〇上面之壓印 器（S) ’ d)在前述真空狀態或已去除前述真空之狀態，將後 面支撐體（B)從前述後面支撐體附著用吸盤3 〇卸除之狀態 下’將前述附著用吸盤30移動至上方。 即，本發明之壓印器製造方法可由以下之過程構成， 該過程係以靜電吸盤或接著吸盤等附著用吸盤裝載後面支 撐體，使用工模，將形成有所期形狀之光罩設置於真空腔 體後，準備主模，將壓印器材料塗布於前述主模後，在真 空腔體内執行真空貼合製程，且於此方法追加，附加地執 行熱硬化或光硬化或者料組合之硬化過程，將前述所製 造之壓印器（結合了後面支稽體)從由光罩及工模構成之主 模分離。 較佳為’如前述，於前述①步驟以後，可更具有e)在前 ，使附著有前述後201109176 VI. Description of the invention: c technology belongs to the city; j FIELD OF THE INVENTION The present invention relates to an embossing or roll lithographic embossing device manufacturing apparatus and a manufacturing method. More specifically, it relates to The embossing device manufacturing method and manufacturing method for forming a pattern in a lithographic printing method can be improved by the embossing method for manufacturing a printing process and the manufacturing device. Therefore, it is possible to form a printing stamper manufacturing method and manufacturing apparatus which can form a more excellent fine pattern when the fine pattern of the printing process is formed, and which can simplify the manufacturing cost and productivity by simplifying the process. [Prior Art; J BACKGROUND OF THE INVENTION Generally, a fine pattern forming process suitable for information storage, small sensors, optical crystallization and optical components, fine electromechanical components, display components, displays, and semiconductors utilizes light to form a fine pattern of light. Photoli thography process. However, due to the increase in the size of the CD substrate, the miniaturization of the pattern size, and the fierce price competitiveness in various fields, the necessity of the process of the innovation of the non-existing lithography process has arisen. That is, the existing lithography process must perform exposure, post-exposure baking, development, post-image baking, etching process, cleaning process, etc., each time the pattern is formed, and the process time is long, and the number must be repeated. The second light process, so the problem of reduced productivity has clearly emerged. In addition, due to the ultra-fine development of the pattern, it is necessary to change the high-priced equipment such as exposure equipment, so the investment cost increases, and the price of the high-resolution mask is also rising sharply in 201109176, and the disadvantage of low efficiency must use high-priced equipment. The problem point eventually became the other major factor that led to the rise in the original price. Thus, the method of solving such problems reveals an embossing and photolithographic printing method. First, the imprint lithography system is engraved on the nanometer scale, and the first method invented by Stephen Ch〇u of Princeton University in the United States is to make the necessary shape in advance on the inorganic or polymer surface with relatively strong strength. This is imprinted on other substances to form a fine pattern. Specifically, it is an inorganic material or a polymer stamper which is formed into a fine pattern in advance, and is bonded to a hardening composition coated on a metal film or an organic film to be thermally hardened or photohardened. The technique of forming a pattern has the advantage of being advantageous for process simplification and fine pattern formation as compared with the existing light method. In such imprint lithography, the reticle is used as an embossing device. In the imprint process, the role of the stamper is called the core part of the imprint process technology. In order to form the pattern of the desired form, basically only the stamp of the form can be manufactured to perform the imprint. Process, forming a pattern. Further, roll printing is a technique for making the existing printing technology more advanced, a printing method in which a patterned roll is printed, and a method of forming a fine pattern on a non-patterned roll by using a substrate on which a pattern is imprinted. This method of printing also uses an imprinter for transferring the materials to the next step. The roll printing method is also like the embossing step. Only the manufacture of the excellent stamper is the first #, and the pattern of the money can be shaped. Compared with lithography, this type of embossing and roll-printing lithography process can achieve the era-free and innovative dust-free space because of the simple 'no exposure process with high-priced process, so it can be reduced due to simple equipment and reduced number of spears. The reduction, phase car * 201109176 In the existing process, low-cost equipment can be used to achieve fine patterns, but with excellent price competitiveness, as an alternative method of future patterning technology revealed as an important core technology. Such embossing and roll lithography techniques can also be applied to FED (Electro-Emission Display), OLED (ElectroLuminescent), PDP (Plasma Display Panel), and Solar Cell devices in the future. In the field of application, the process is also simple, and it is expected that the precision of the pattern can be ensured after repeated printing. Here, the embossing and roll lithography techniques described above can be used to form a fine pattern in a printing process after the embossing is made, instead of the high-resolution reticle used in the conventional lithographic patterning. The stamp used in this printing technique can be manufactured in a variety of ways. However, the manufacturing process of the existing stamper is complicated, the productivity is poor, the flatness of the stamper, the total pitch, and the like are not satisfactory, and there are many restrictions on the excellent pattern formation in the printing process. Therefore, the actual situation is to develop a new method and apparatus for manufacturing a stamping and stamping press that can solve such conventional problems. I. SUMMARY OF THE INVENTION Summary of the Invention The object of the present invention is to solve the problems of the prior art. The object of the present invention is to provide a stamper for forming a pattern for stamping or stamping lithography. METHOD AND MANUFACTURING DEVICE 'According to the present invention, an imprinter for performing a pattern forming process for printing a semiconductor, LCD, PDP, OLED, solar cell industry lithographic 201109176 is provided, thereby achieving impression performance Improvement, process improvement, and manufacturing unit price improvement. Further, by performing the printing process using the stamp of the present invention, more excellent pattern formation can be achieved. Means for Solving the Problems In order to achieve the above object, the present invention provides an apparatus for manufacturing an imprint or roll lithographic stamp, comprising: a vacuum chamber, which is connected to a vacuum generating device and is switchable a main mold, which is located below the vacuum chamber and has a mold pattern thereon; a rear suction body attachment suction cup is vertically movable above the vacuum chamber to remove/attach the rear support And the control unit is configured to: a) form a vacuum in the vacuum chamber by the vacuum generating device, and b) attach the back support to the back support attachment suction cup; And moving the attachment suction cup to the lower side to attach the rear support body to the stamper formed on the main mold, c) attaching from the rear support body in the vacuum state or the vacuum is removed. When the rear support is removed by the suction cup, the attachment suction cup is moved to the upper side. Further, the present invention provides a method of manufacturing an imprinter for embossing or roll lithography, which has the following steps: a) coating a stamper material on a master mold having a mold pattern on a lower portion of the vacuum chamber Attaching the rear support body to the rear support attachment suction cup, the rear support attachment attachment suction cup is located on the upper portion of the vacuum chamber for removing the rear support body/attach; b) vacuum generating device in the vacuum chamber a vacuum is formed in the body; c) the backing support is attached to the back support attachment chuck, and the adhesion chuck of 201109176 is moved downward to adhere the back support to the pressure formed on the die. And the d) in the state of the vacuum state or the state in which the vacuum is removed, the rear suction body is moved from the suction tray of the rear branch body attachment, and the attachment suction cup is moved upward. Advantageous Effects of Invention According to the present invention, an apparatus and a manufacturing method for an imprinter for embossing or roll lithography are provided, and the embossing can be manufactured to have a flatness, a pattern shape, and a total pitch as compared with an existing printing embossing device. The embossing and roll stamping embossing method and manufacturing apparatus which minimizes the occurrence of pattern defects during the printing process, and the embossing and roll stamping embossing method and manufacturing apparatus which improve the yield and the efficiency of the process. Thereby, it is possible to obtain an excellent printing process that can be performed by a stable imprinter supply for a plurality of printing processes. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view schematically showing an embodiment of an apparatus for manufacturing an imprint or roll lithographic printing press of the present invention. Fig. 2 is a view schematically showing an operation example of an embodiment of an apparatus for manufacturing an imprinter for embossing or roll lithography of the present invention. Fig. 3 is a view schematically showing an operation example of another embodiment of the embossing or roll lithographic printing of the present invention. Fig. 4 is a view schematically showing an operation example of another embodiment of the apparatus for embossing or roll lithographic printing of the present invention. C. Cold type 3 is used to carry out the invention. Hereinafter, the present invention will be described in detail with reference to the drawings. 7 201109176 The present invention relates to a stamper manufacturing apparatus for embossing or roll lithography, comprising a vacuum chamber 10 which is connected to a vacuum generating device 2 and has a switchable space, and is located at a lower portion of the vacuum chamber 10 And a main mold 20 having a mold pattern thereon, and a top portion of the vacuum chamber 10 that can be moved up and down to remove and attach the rear support body (B), the surface support body attachment suction cup 30, and the control portion The control unit has a control process of a) forming a vacuum in the vacuum chamber 10 by the vacuum generating device 2, and b) attaching the rear support (B) to the rear support adhering suction cup 30. In this state, the adhesion chuck 30 is moved downward, and the surface support (B) described later is attached to the stamper (S) formed on the main mold 20, c) in the vacuum state or has been removed. In the state of the vacuum described above, the attachment suction cup 30 is moved upward while the rear support (B) is removed. That is, as shown in Fig. 1, there is a vacuum chamber having a vacuum chamber system connected to a common vacuum generating device constituted by a rotary pump, a diffusion pump, or the like, as in the specific example. Fig. 1(a) shows a specific example (in this case, the door for closing the opening is not shown), and has an opening and closing opening which can be used to form a material for forming the rear support and the stamper, or as in the first 1(b) shows a specific example in which the cavity itself has a space that can be opened and closed by being vertically separated/bonded, and when the space is closed, a vacuum is formed in the sealed space by the operation of the vacuum generating device. Moreover, as shown in FIG. 1 , a main mold having a mold pattern is bonded to the lower portion of the vacuum chamber, and a specific example is shown in FIG. 1 , and the upper portion of the vacuum chamber is bonded to the stamp. Rear support body behind the machine 8 201109176 Suction/attachment suction cup for the support surface. Here, the rear support adhering suction cup is coupled to the vacuum chamber so as to be movable up and down, and is moved up and down by the control of a control unit to be described later. The main mold 20 may also be a body mold of the upper mask mold pattern, as shown in the figure, a predetermined pattern is formed on the main mold (jig), or may be provided with a female mold forming a shape of the desired shape ( The master form of the master constitutes this master. The chuck 30 for attaching the back support is coupled to the stamper to remove the suction and adhesion of the surface support after the support is applied. According to the attachment and attachment method, a plurality of suction cups are used, preferably Electrostatic discharge is performed to remove the attached electrostatic chuck, or vacuum suction is applied to remove the attached suction cup, because it has less stress on the rear support, so it is more suitable to use additional stress on the rear support. The least electrostatic chuck. The vacuum chamber, the main mold, and the attachment suction cup are operated by the control unit, that is, a) forming a vacuum in the vacuum chamber by the vacuum generating device, and b) attaching the rear support to the rear support. In the state in which the suction cup is attached, the adhesion chuck is moved downward to adhere the back support to the stamper formed on the main mold, c) in the vacuum state or the vacuum is removed, The rear support body is moved upward from the state in which the rear support body is removed by the suction cup. The details about this are shown in Figs. 2 to 3, for example. In other words, in the manufacturing apparatus including the vacuum chamber, the main mold, and the attachment suction cup, the stamper and the rear support body are respectively formed on the main mold and the attachment suction cup, and the true 201109176 cavity is closed to form a sealed space, and then the vacuum is applied. When the apparatus is operated, a vacuum is formed in the vacuum chamber, and the rear support is attached to the rear support attachment suction cup, and the attachment suction cup is moved downward, and the rear support is attached to the rear surface. The stamper on the above main mold. Next, i) in the state in which the vacuum state is maintained, the rear support body is removed from the rear support adhering suction cup, and only the attachment suction cup is moved upward, or u) the vacuum is added to make the cavity constant After the pressed state, the rear support body is removed from the rear support adhering suction cup, and only the attachment suction cup is moved upward. Thereby, since the stress applied to the rear support body in a vacuum state can be minimized, and the rear support body and the imprinter are combined, the combination of the equal parts is uniform, and the additional stress is generated less. It is excellent in physical properties such as maintaining flatness, preservability of pattern shape, and total pitch without performing residual stress. Further, in addition to the specific examples shown in FIGS. 2 to 3, the stamp manufacturing apparatus of the present invention further includes a heating device 40a for heating the main mold 2〇 or located in the foregoing main body. The upper portion of the mold 2 is irradiated with light of a plurality of bands including ultraviolet rays to the curing device 40a or 40b of the light irradiation device 4% of the main mold 20 (as shown in the figure, of course, both of them are formed). After the attachment of the stamper and the rear baffle body, the bonding is performed between the two. Therefore, after the process of the above c), the control unit further has d) in the vacuum state or the state in which the vacuum is removed, the hardening device or the lion is activated, so that the stamper (3) and the rear supporter) The process of combining the hardening of the body. That is, the hardening process may be performed while maintaining the vacuum of 10201109176 of the vacuum chamber, or may be performed after the vacuum state is released. Specific examples of this are shown in Figs. 2 to 3, respectively. Further, as described above, the vacuum chamber preferably has a specific example as shown in Figs. 1(b) and 3, and the upper portion 4 and the lower portion 6 of the vacuum chamber 1 are vertically separable and switchable. As a result, as shown in Fig. 3, there is an advantage that the processes can be easily performed on the side of the irradiation of the suction cup for the attachment of the rear support, the formation of the stamper, and the hardening process. Further, as described above, when the chuck for attaching the back support adheres to the electrostatic chuck, the stress can be minimized when chucking and dechucking, and the driving between the vacuum chamber and the driving of the chuck is different. It is better to reduce the interference between each other. Further, as described above, when the vacuum chamber 10 has a structure in which the upper portion 4 and the lower portion 6 can be vertically separated and opened and closed, as shown in FIG. 4, the upper portion 4 or the lower portion 6 of the vacuum chamber 10 can be combined with The linear motion guide 8 is in the form of a linear movement to the other side when the upper portion 4 and the lower portion 6 are separated. Thereby, there is an advantage that automation of the entire apparatus can be constructed. Further, here, the upper portion 4 and the lower portion 6 of the vacuum chamber 10 are respectively coupled to the linear motion guide 8 to move the same. Further, the present invention provides lithography (imprint: particularly when the back support is a material having poor flexibility such as glass) or a roll print (r〇11_print: particularly when the back support is a highly flexible material such as a resin film) A stamper manufacturing method having a structure comprising the steps of embossing a stamper material on a main mold 2 having a mold pattern on a lower portion of the vacuum chamber 10, and a rear surface The support body (B) is attached to the upper portion of the cavity body 10 located in the above-mentioned true 201109176 for unloading/attaching the rear support body (B) after the surface support body attachment suction cup 30, b) to the vacuum generating device 20 in the vacuum chamber (10) forming a vacuum, c) moving the rear support body (B) to the rear support body attachment suction cup 30, and moving the attachment suction cup 3〇 downward to directly describe the rear support body ( B) attaching the stamper (S) 'd) formed on the above-mentioned main mold 2〇 to the vacuum state or removing the vacuum, and the rear support body (B) is sucked from the rear support body suction cup 3 In the state of dismantling Said attachment chuck 30 to move upward with. That is, the stamper manufacturing method of the present invention can be constituted by a process of loading a rear support body with an electrostatic chuck or a suction chuck such as a suction cup, and using a mold to set a mask having a predetermined shape to a vacuum. After the cavity, the master mold is prepared, and after the stamper material is applied to the master mold, a vacuum bonding process is performed in the vacuum chamber, and the method is additionally applied, and additionally, hard hardening or photohardening or hardening of the material combination is performed. In the process, the stamper (incorporating the rear bearing body) manufactured as described above is separated from the main mold composed of the photomask and the mold. Preferably, as described above, after the first step, the e) may be further preceded, and the
防止壓印器之收縮及變形， 述真空狀態或已去除前述真空之狀態下 面支掉體之壓印H結切硬化之步驟， 化或熱硬化或者將該等組合在—起之形 支撐體附著用吸盤如前诚可L7越恭w & 丨制用麼印器之功能，而將可 並且支撐壓印器，而可作為壓 12 201109176 印器之功能之後面支樓體（B)使用靜電吸盤或接著吸盤30 等，形成於上部真空腔體4。此時之靜電吸盤 '接著吸盤30 為支撐後面支撐體(B)，可藉對吸盤3〇施以靜電或真空，而 進行更佳之後面支撐體(B)形成製程。 接著’於主工模(jig)上形成預定圖案，或設置形成有 所期形態之形狀之母模(master)，而準備主模。此時，藉對 主工模施以真空’母模可穩定地設置於主工模’穩定而設 之主工模亦對壓印器形成及壓印器物性造成影響。然後， 將壓印器材料形成於母模上後，設置於下部真空腔體6上。 或者，亦可將由主工模及母模構成之主模設置於下部真空 腔體後’形成壓印材料。於進行上述製程後，在關閉上部 真空腔體4及下部真空腔體6之狀態下，使用真空泵，施以 真空。此時之真空度在常壓可至lxl0-4T〇rr，更佳為 lxlOTorr〜lxi〇-2Torr。當在施以真空之狀態下，到達所期之 真空度時’使吸盤30下降，執行與形成於下部真空腔體6上 之壓印器材料(S)之貼合步驟。於執行吸盤3〇之貼合後，如 第3圖所示’亦可在維持真空之狀態下，進行吸盤之上开過 程’或者’亦可關掉真空泵，使真空腔體内之真空度形成 常壓狀態後’當真空腔體内之真空度返回常壓狀態時，使 吸盤30上升。此時，吸盤3〇必須於完去去除附著後面支撐 體(B)之靜電或接著力等完全去除後，僅使吸盤3〇上升’藉 執行空氣或氮吹送，亦可執行更佳之分離。 最後’在上部真空腔體4去除或移動後，使用由曝光器 及UV燈構成之光照射裝置40b、由加熱器構成之加熱装f 13 201109176 40a等’執行硬化製程。於執行硬化製程後，藉從由主工模 及母模構成之主模執行分離，可製造壓印及輥印平版印刷 用壓印器。 由於於執行前述製程後所製造之壓印及輥印平版印刷 用壓印器因壓印器材料之平坦度、總間距(total pitch)、優 異之圖案形狀之形成等，在施行平版印刷時，可在無圖案 之扭曲變形下，形成圖案，並且使圖案缺陷減少，故可使 印刷製程施行能力提高。 在本發明所製造之壓印器可藉執行平版印刷製程之 圖案形成’執行壓印器評價，可藉掃瞄電子顯微鏡(SEM :Preventing the shrinkage and deformation of the stamper, the vacuum state or the state in which the vacuum is removed, the step of embossing the undercut of the embossed H, or the hardening or the combination of the support in the shape of the embossing With the suction cup, the former L7 Kung Wong w & can use the function of the printer, and will be able to support the stamper, and can be used as the function of the press 12 201109176 A suction cup or a suction cup 30 or the like is formed in the upper vacuum chamber 4. At this time, the electrostatic chuck 'following the suction cup 30 to support the rear support body (B), can perform a process of forming a better rear support body (B) by applying static electricity or vacuum to the suction cup 3 . Then, a predetermined pattern is formed on the jig or a master is formed to form the shape of the desired form, and the master is prepared. At this time, by applying a vacuum to the main mold, the master mold can be stably disposed in the main mold, and the main mold is stably formed, which also affects the formation of the stamper and the physical properties of the stamp. Then, after the stamp material is formed on the master mold, it is placed on the lower vacuum chamber 6. Alternatively, the master mold composed of the main mold and the master mold may be disposed after the lower vacuum chamber to form an imprint material. After the above process, the vacuum pump was used to apply a vacuum while the upper vacuum chamber 4 and the lower vacuum chamber 6 were closed. The degree of vacuum at this time may be from lxl0 to 4T rr at normal pressure, more preferably from 1 to 10 Torr to 1 Torr to 2 Torr. When the vacuum degree is reached and the desired degree of vacuum is reached, the suction cup 30 is lowered, and a bonding step with the stamp material (S) formed on the lower vacuum chamber 6 is performed. After performing the bonding of the suction cups 3, as shown in Fig. 3, 'the vacuum can also be opened under the condition of maintaining the vacuum, or the vacuum pump can be turned off to form the vacuum in the vacuum chamber. After the normal pressure state, when the vacuum in the vacuum chamber returns to the normal pressure state, the suction cup 30 is raised. At this time, the suction cup 3 must be removed after the static electricity or the adhesion force attached to the rear support (B) is completely removed, and only the suction cup 3 is raised. By performing air or nitrogen blowing, a better separation can be performed. Finally, after the upper vacuum chamber 4 is removed or moved, a curing process is performed using a light irradiation device 40b composed of an exposer and a UV lamp, and a heating device f 13 201109176 40a composed of a heater. After performing the hardening process, the stamper for embossing and roll lithography can be manufactured by performing separation from the main mold composed of the main mold and the master mold. Since the stamper for the embossing and roll lithography which is manufactured after the execution of the foregoing process is formed by the flatness of the embossing material, the total pitch, the formation of an excellent pattern shape, etc., when performing lithography, The pattern can be formed without distortion of the pattern, and the pattern defects are reduced, so that the printing process performance can be improved. The stamper manufactured by the present invention can perform the imprinter evaluation by performing the pattern forming process of the lithography process, and can be scanned by a scanning electron microscope (SEM:
Scanning Electron Microscope)、光學顯微鏡（Optical Microscope)、原子力顯微鏡(AFM: Atomic Force Microscope) 等，確認圖案。 實施例 以下’為理解本發明’而揭示較佳之實施例，下述實 施例僅為例示本發明者，本發明之範圍不限於下述實施例。 第1實施例 以下述實驗過程，執行了本發明。 首先，準備LCD用玻璃(B)。使用靜電吸盤30，將所準 備之玻璃裝載於上部真空腔體4。於裝載後面支撐體後，準 備刻有5m~20m之多種圖案之母模。將所準備之母模設置於 設在下部真空腔體6之主工模，而準備主模20後，準備道康 寧公司之為石夕彈性聚合體之sylgard 184A及為硬化劑之 sylgard 184B後，以10 : 1之比率充分混合後，於準備5〇m 14 201109176 之厚度之賴上執行塗布。如前述，執行錄後，於關閉 真空腔體1G後’使用真空栗，施以真空。當真空腔體内之 真空度達l.GToir時’使靜電吸盤3G下降，執行貼合製程。 使用靜電吸盤30，執行貼合後，關掉真空栗，將真空腔體 内之真空度形成常壓狀態。當達常壓狀態時，解除靜電吸 盤30之吸附，使靜電吸盤30上升後，使上部真空腔體4上 升，而使腔體開放。之後，以8〇。〇將加熱器術加熱，執行 1小時熱硬化。或者，可在保持關閉上部真空腔體4之狀態 下，以80°C將加熱器4〇a加熱，執行丨小時熱硬化。最後， 藉將所形成之壓印器從主模2〇分離，而製造壓印用壓印器。 第2實施例 除了壓印材料使用光硬化型材料，執行UV光硬化，藉 此，製造壓印用壓印器外，其餘執行與第丨實施例相同之製 程’製造壓印用壓印器。 第3實施例 除了後面支撐體(B)使用PET薄膜，執行製程，藉此， 製造輥印用壓印器外，其餘執行與第！實施例相同之製程， 製造親印用壓印器。 第4實施例 除了後面支撐體(B)使用PET薄膜，壓印器材料使用光 硬化型材料外，藉此，製造輥印用壓印器外，其餘執行與 第1實施例相同之製程，製造輥印用壓印器。 如前述所製造之壓印器可藉執行圖案化製程，執行評 價。於使用印刷用材料’執行印刷製程後，可藉掃瞄電子 15 201109176 顯微鏡(SEM : Scanning Electron Microscope)、光學顯微鏡 (Optical Microscope)等，確認所形成之壓印器及圖案形狀 等，而可確認具較既有優異之圖案形狀及物性。 在以上所說明之本發明非以前述實施例及附加圖式限 定者’在不脫離下述申請專利範圍所記載之本發明思想及 領域之範圍内該技術領域之該業者多樣地修正及變更者當 然亦包含在本發明之範圍内。 【圖式簡單説明】 第1圖係分別模式地顯示關於本發明壓印或輥印平版 印刷用壓印器製造裝置之實施例的圖式。 第2圖係模式地顯示關於本發明壓印或親印平版印刷 用壓印器製造裝置之一實施例之作動例的圖式。 第3圖係模式地顯示關於本發明壓印或輥印平版印刷 用壓印器製造裝置之另一實施例之作動例的圖式。 第4圖係模式地顯示關於本發明壓印或輥印平版印刷 用壓印器製造裝置之另一實施例之作動例的圖式。 30…後面支撐體附著用吸盤 40a…加熱裝置(硬化裝置） 40b…光照射裝置(硬化裝置) B…後面支撐體 S...壓印器 【主要元件符號說明】 2.··真空產生裝置 4.. .上部真空腔體 6.. .下部真空腔體 8.. _直線運動導件 10…真空腔體 20…主模 16Scanning Electron Microscope, Optical Microscope, Atomic Force Microscope, etc., to confirm the pattern. The following examples are merely illustrative of the present invention, and the following examples are merely illustrative of the present invention, and the scope of the present invention is not limited to the following examples. [First Embodiment] The present invention was carried out in the following experimental procedure. First, prepare glass for LCD (B). The prepared glass is loaded on the upper vacuum chamber 4 using the electrostatic chuck 30. After loading the rear support, a master mold engraved with a variety of patterns from 5m to 20m is prepared. The prepared master mold is placed in the main mold set in the lower vacuum chamber 6, and after the main mold 20 is prepared, the sylgard 184A of the Dow Corning elastic polymer and the sylgard 184B which is the hardener are prepared. After the ratio of 10:1 is sufficiently mixed, coating is performed on the thickness of 5〇m 14 201109176. As described above, after the recording is performed, the vacuum pump is used after the vacuum chamber 1G is closed, and a vacuum is applied. When the degree of vacuum in the vacuum chamber reaches l.GToir, the electrostatic chuck 3G is lowered, and the bonding process is performed. After the electrostatic chuck 30 is used, after the bonding is performed, the vacuum pump is turned off, and the degree of vacuum in the vacuum chamber is formed into a normal pressure state. When the normal pressure state is reached, the adsorption of the electrostatic chuck 30 is released, and after the electrostatic chuck 30 is raised, the upper vacuum chamber 4 is raised to open the chamber. After that, take 8 〇.加热 Heat the heater and perform 1 hour heat hardening. Alternatively, the heater 4A may be heated at 80 ° C while the upper vacuum chamber 4 is kept closed, and heat-hardening is performed for one hour. Finally, an imprint stamper is manufactured by separating the formed stamper from the master mold 2〇. (Second Embodiment) Except that the embossing material was made of a photocurable material, UV photocuring was performed, and therefore, the embossing embossing device was manufactured, and the same process as in the ninth embodiment was carried out to manufacture an imprint embossing device. (THIRD EMBODIMENT) Except for the use of the PET film in the rear support (B), the process is performed, whereby the roll stamping stamper is manufactured, and the rest is executed! In the same process as the embodiment, a stamper for printing was produced. In the fourth embodiment, except that the PET film is used for the rear support (B), and the photocurable material is used as the stamp material, thereby manufacturing the roll stamper, the same process as in the first embodiment is performed, and the manufacturing process is performed. The stamp is stamped. The stamper manufactured as described above can perform evaluation by performing a patterning process. After the printing process is performed using the printing material, it is possible to confirm the formed stamper and pattern shape by using a scanning electron 15 201109176 microscope (SEM: Scanning Electron Microscope) or an optical microscope (Optical Microscope). It has more excellent pattern shape and physical properties. The invention described above is not limited by the foregoing embodiments and the appended drawings. The skilled person in the technical field is variously modified and changed without departing from the scope of the invention and the scope of the invention as described in the following claims. Of course, it is also included in the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view schematically showing an embodiment of an apparatus for manufacturing an imprint or roll lithographic printing press of the present invention. Fig. 2 is a view schematically showing an operation example of an embodiment of an apparatus for manufacturing an imprinter for imprint or lithographic printing of the present invention. Fig. 3 is a view schematically showing an operation example of another embodiment of the stamper manufacturing apparatus for embossing or roll lithography of the present invention. Fig. 4 is a view schematically showing an operation example of another embodiment of the stamper manufacturing apparatus for embossing or roll lithography of the present invention. 30... rear suction body attachment suction cup 40a... heating device (curing device) 40b... light irradiation device (curing device) B... rear support body S... stamper [main component symbol description] 2.··vacuum generating device 4.. Upper vacuum chamber 6. Lower vacuum chamber 8. _ Linear motion guide 10... Vacuum chamber 20... Main mold 16