201107640 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種真空閘門結構，特別是有關於 一種藉由磁性方式開啟或關閉閘門之真空閘門結構。 【先前技術】 在自動化的真空處理設備中，真空閘門之作用在於 藉由真空閘門之隔離，使真空閘門内部之真空室 (chamber)可維持較高之真空度，以便基板於高度真空度 之真空室内進行操作。此外，為維持真空室之真空度， 可連接一真空幫浦以對真空室進行抽真空。其應用範圍 很廣，如晶圓製造或液晶面板之玻璃基板進行濺鍍製程。 習知技藝之真空閘門主要係由一本體及一驅動閘門 作動之汽缸裝置或一電動驅動裝置所組成。以汽缸裝置 為例，本體於其容室内，分別設置相連接之真空閘門， 連桿及封板，真空閘門與汽缸裝置所設之活塞桿相固 設。當此閘門作動時，透過汽缸裝置所設之活塞桿向下 推動真空閘門，而使真空閘門所接設之連桿或曲柄呈水 平狀態下（即呈最大距離範圍下），即可向前推動封板頂 合於密封通孔處，藉以達到密封通孔處具密封效果。 然而，習知技藝真空閘門之缺點在於其因藉由連桿 或曲柄以機械方式所帶動移動，其所需構件較為繁多且 組裝成本高。此外，以機械方式帶動真空閘門移動之速 度亦較緩慢，導致真空室需經由較長時間之抽真空後， 201107640 才能回復原本之真空度。此外，連桿或曲柄作動時 帶動真空關斜向移動，導料置於真空射卜側 漏墊（O-Ring)摩擦受損。 【發明内容】 有鏗於上述習知技藝之問題，本發明之目的就 開門結構，以解決習知技藝利用曲柄帶動 ίΠ :，不但速度較慢’且容易因曲柄帶動防: 衣（ Rlng)斜向位移，會與框體產生摩擦損耗的問題。· -驅目的’提出一種真空閘門結構，係由 第一間門元件及-第二閘門元件。ί 單元及複數:第之一側，具有複數個第-磁性 性單元具有不心早單元及第二磁 閘Η元件設置於第一閘門元個第二 磁性單元及複數個第四磁性單元二磁:;复數:第- ::性單元具有相同磁極，第四磁性;元4 = 疋具有相同磁極。其中「早7°與第-磁性單 件帶動而於一第一葙 < 田一間門元件藉由一驅動元 第-磁性單元時，第：=位：，使第四磁性單元對應 附於第二閉門元件，並； l7C:係藉由磁性吸附力而吸 真空室。 ^苐一閘門70件位移，而分離於 其中 田第一閘門兀件吸附於第-閘門元件， 且驅 201107640 動元件驅動第二閉門元件於一第二 當第三磁性單元對應第-磁性單元時：第=移時，且 =磁性相斥力而分離於第二二第 其中’第一預設方向係相反於第二預設方向。 空室::側第1門元件具有-滑動單元，其滑動於真 • 其中，滑動單元係為一滾輪。 數個ί = 2門::具有複數個第，單元及複 交錯排列。 且第―磁性單元與第：磁性單元係 元具極1:磁性單元具有-北極磁極，第二磁性單 複數=磁具I，個^磁性單元及第 •錯排列。 且第二磁性早兀與第四磁性單元交 具有磁性單元具有北極磁極，第四磁性單元 -閘第依本發明之真空閘門結構，可藉由使第 斥力梯笛一„一閘門70件間產生磁性吸附力或磁性相 -門Η ί 元件吸附於第二閘門元件或分離於第 以磁力方式開關真空閑門，以達成快 迷開啟或關閉真空閘門之功效。 201107640 【實施方式】 凊參閱第1圖’其係為本發明 f圖。圖卜真空開門結構1設置於之示 未示)。其中，真空閉門結構】具有幫浦(圖 及一第二閘門元件12。第二 Θ門7L件11 (圖未示)所帶動位移，且驅動元驅動元件 油壓控制元件或氣壓控制元件 J達：：元件， 方式驅動控制第二開門元件12移=幫:= ^室進行抽真空之作動，使真空室21維持 f間門兀件11具有複數個第-磁性單s 1U、韻 數個第二磁性單元112及—防漏塾113。其中 =單元。m及第二磁性單元112可呈交錯排列，即以第 一磁性早兀in-第二磁性單元112_第一磁性單元 ，方式設置於第一閘門元件11之-端。此外，第-磁性 單το ill及第二磁性單元112則具有不同的磁極。在此 實施例中，第一磁性單元ln可為北極磁極⑼極），第二 磁I1 生單元112可為南極磁極（S極），但不以此為限。於其 他實施方式中，第一磁性單元ιη則可為南極（8極），第 二磁性單元112則可為北極⑴極卜防漏墊113則可為以 橡皮材質、矽膠（Silicon)、橡膠(Rubber)、氟橡膠(Vit0n)、 軟性金屬（銅或鋁）等軟性防漏材質所製成之〇型環 (〇_Ring) ’其可緊密封閉真空室2卜以防止環境氣體滲 201107640 漏至真空室21中，導致直办玄+古而— 使懸浮粒子干擾製# Λ Λ真下降’因而 繁-磁把™ 1良率。此外H性單元111及 一 早兀112可為永久磁鐵或電磁鐵。 側，ίΓ!門元件12則設置於第-閘門元件11之- :且第，數個第三磁性單元121 *第四磁性單元 第一預执門70件12可藉由驅動元件所帶動而於- 例中，或—第二預設方向4位移，且於本實施 第—預权方向4與第—預設方向3互為反向。盆 苐二磁性皁元121及第四磁性單元122可呈交錯式 ^元=第三磁性單元121_第四磁性單元122_第三磁 外，第-磁二方式設置於第二閘門元件12之-端。此 磁極早元121及第四磁性單幻22具有不同的 =;而:财，第三磁性單元可121為北極磁極 元一磁性單元111具有相同磁極。第四磁性單 極磁極(8極)而與第二磁性單元112具有相 ς 外，第三磁性單元121及第四磁性單元122 可為水久磁鐵或電磁鐵。 請續參閱第2圖、莖^ 創作真空閘門社構之第f 4圖’其分別係為本 及第：作動H 動示意圖、第二作動示意圖 UU目對應第三磁性單：121之第一，二第-磁性單元 — 21第一磁性早元112相對應 =四磁性…22。由於第一磁性單元⑴盘第三磁 性早兀121具有相同磁極，第二磁性單元Μ 性單元122具有相同磁極，因此第元件⑴受到 201107640 因而緊密封 磁性相斥力而緊密貼附於真空室21之一 閉真空室21。 如第3圖所不，欲打開閘門時，此 12受驅動元件所罄韌而、凡笙 时弟—間Η το件 又㈣兀件所π動而沿第一預設方向3位移 一 =元件⑴立移-特^距離，而使第—磁性單元 第二磁性單元112對應心 =121時，由於第一磁性單元⑴與第四磁性單元122 /、有不同的磁極，第二磁性單元112與第三磁性 具有不同的磁極，因此第—閘門元件u及第二開門 12之間則產生磁性吸附力，使第一閘門元件u吸附於 弟-閘門兀件12上，並隨第二閘門元 方向3位移。 /口弟預议 動第H圖：Γ，，欲關閉閘門時，則藉由驅動元件帶 =弟二閘門兀件12沿第二預設方向4位移，此時第一閑 門几件11係磁性吸附於第二閘門元件12 *隨第 二動。當第二閘門元件12帶動第-閘門元件11 d;’且當第一磁性單元111對應第三磁性 t 卜及第二磁性單元112對應第四磁性單元m ι時’此時因第-磁性單元lu磁性相斥於第三磁性單元 苐一磁性早元112磁性相斥於第四磁性單元IK， 株；閘門& 11件受到磁性斥力而分離於第二閘門元 件12，並緊密貼合於真空室21。 此外’第-閘門元件u亦可視需求設 ’其可為-滾輪，滑動單元114可滑動於真 201107640 :閘利帶動第-閘門元件11吸附或分離 於於本發明真㈣門結構之功效在於可藉由 之磁性單：第二閘門元件12設置磁性相異 啟真空二相斥的方式關閉或開 本發明真空閘門妹椹夕Η 丄， 式控制閘門作動，而二藉由磁性方 離本’=叫_。任何未脫 更，均應包含於後附之中請專利範ϋ之纽修改或變 【圖式簡單說明】 Ρ圖係為本發明之真空閉門結構之結構示音圖· 第2圖係為本發明之真空閑門結構之第 第3圖係為本發明 不心β 圖；及 異工間門結構之第二作動示逢 第4圖係為本發明之真 真工間門結構之第三作動示意圖< 201107640 【主要元件符號說明】 1 :真空閘門結構； 11 :第一閘門元件； 111 :第一磁性單元； 112 :第二磁性單元； 121 :第三磁性單元； 122 :第四磁性單元； 113 :防漏墊； 114 :滑動單元； 12 :第二閘門元件； 2 :真空設備； 21 :真空室； 3:第一預設方向；及 4 :第二預設方向。201107640 VI. Description of the Invention: [Technical Field] The present invention relates to a vacuum gate structure, and more particularly to a vacuum gate structure for opening or closing a gate by magnetic means. [Prior Art] In an automated vacuum processing apparatus, the vacuum gate functions to maintain a high vacuum in the vacuum chamber inside the vacuum gate by vacuum gate isolation, so that the substrate is vacuumed at a high degree of vacuum. Operate indoors. Further, in order to maintain the vacuum of the vacuum chamber, a vacuum pump may be connected to evacuate the vacuum chamber. It has a wide range of applications, such as wafer fabrication or glass substrates for liquid crystal panels for sputtering processes. The vacuum gate of the prior art is mainly composed of a body and a cylinder device actuated by a driving gate or an electric driving device. Taking the cylinder device as an example, the body is provided in the chamber, and the connected vacuum gates, connecting rods and sealing plates are respectively arranged, and the vacuum gates are fixed with the piston rods provided by the cylinder devices. When the gate is actuated, the piston rod provided by the cylinder device pushes the vacuum gate downward, so that the connecting rod or the crank connected to the vacuum gate is horizontal (ie, under the maximum distance range), and can be pushed forward. The sealing plate is topped at the sealing through hole, so as to achieve a sealing effect at the sealing through hole. However, the conventional art vacuum shutter has the disadvantage that it is mechanically moved by the connecting rod or the crank, and the required components are relatively large and the assembly cost is high. In addition, the speed at which the vacuum gate moves mechanically is also slow, which causes the vacuum chamber to be evacuated after a long period of time, and the original vacuum can be restored in 201107640. In addition, when the connecting rod or the crank is actuated, the vacuum is moved to the oblique direction, and the guide is placed on the vacuum jet to prevent the friction of the O-Ring. SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, the object of the present invention is to open the door structure to solve the conventional art by using a crank to drive the pressure: not only the speed is slower, but also easy to drive by the crank: Rlng oblique The displacement will cause frictional losses with the frame. - The purpose of the invention is to propose a vacuum gate structure consisting of a first door element and a second gate element.单元 unit and complex number: the first side, having a plurality of first magnetic units having a non-heart early unit and a second magnetic gate element disposed on the first gate element and the second magnetic unit and the plurality of fourth magnetic units :; complex: the -: sex unit has the same magnetic pole, the fourth magnetic; the element 4 = 疋 has the same magnetic pole. Wherein "the early 7° and the first - magnetic single piece are driven by a first 葙< the Tianyi door element by a driving element first-magnetic unit, the:==:, the fourth magnetic unit is correspondingly attached The second closing element, and; l7C: suctioning the vacuum chamber by magnetic attraction force. ^ 苐 a gate 70 displacement, and separated from the first gate element of the field is adsorbed to the first gate element, and drives the 201107640 moving element Driving the second closing element in a second when the third magnetic unit corresponds to the first magnetic unit: when the first shifting, and = magnetic repulsion and separating from the second two, wherein the first predetermined direction is opposite to the second Pre-set direction. Empty chamber:: The first door component has a sliding unit that slides in the true one. The sliding unit is a roller. Several ί = 2 doors:: Multiple numbers, units and complex staggered And the first - magnetic unit and the first: the magnetic unit has a pole 1: the magnetic unit has - north pole magnetic pole, the second magnetic single complex number = magnetic tool I, one magnetic unit and the first wrong arrangement. Intersecting with the fourth magnetic unit, the magnetic unit has a north pole magnetic pole, The four-magnetic unit-gate according to the vacuum gate structure of the present invention can be adsorbed to the second gate element or separated from the second gate element by causing a magnetic absorbing force or a magnetic phase between the repulsion of the repeller. The magnetic switch is used to switch the idle door to achieve the effect of opening or closing the vacuum gate. 201107640 [Embodiment] 第 Refer to Fig. 1 which is a f diagram of the present invention. The drawing vacuum opening structure 1 is shown in the illustration (not shown). Wherein, the vacuum closed door structure has a pump (the figure and a second gate element 12. The second door 7L member 11 (not shown) drives the displacement, and the driving element drives the component oil pressure control element or the air pressure control element J :: element, mode drive control, second opening element 12 shift = help: = ^ room to perform vacuuming operation, so that vacuum chamber 21 maintains f door member 11 has a plurality of first-magnetic single s 1U, rhyme number The second magnetic unit 112 and the anti-leakage 塾 113. wherein the unit m and the second magnetic unit 112 may be staggered, that is, in a first magnetic early in-second magnetic unit 112_first magnetic unit The first gate element 11 has an end. In addition, the first magnetic unit τ ill and the second magnetic unit 112 have different magnetic poles. In this embodiment, the first magnetic unit ln can be a north pole magnetic pole (9) pole, and the second The magnetic I1 generating unit 112 can be a south pole magnetic pole (S pole), but is not limited thereto. In other embodiments, the first magnetic unit i n may be a south pole (8 poles), and the second magnetic unit 112 may be a north pole (1) pole anti-leakage pad 113, and may be rubber material, silicone, rubber ( Rubber), fluororubber (Vit0n), soft metal (copper or aluminum) and other soft leak-proof materials made of 〇-ring (〇_Ring) 'It can tightly close the vacuum chamber 2 to prevent environmental gas seepage 201107640 leak to In the vacuum chamber 21, it leads to the direct operation of the mysterious + ancient - so that the suspended particles interfere with the system # Λ Λ really decline 'and thus the complex - magnetic handle TM 1 yield. Further, the H-shaped unit 111 and the early-twist 112 may be permanent magnets or electromagnets. Side, 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门 门- In the example, or - the second predetermined direction is shifted by 4, and in the present embodiment - the pre-weighting direction 4 and the -pre-predetermined direction 3 are mutually opposite. The pottery two magnetic soap element 121 and the fourth magnetic unit 122 may be in an interlaced manner = third magnetic unit 121_fourth magnetic unit 122_third magnetic outer, and the first magnetic second mode is disposed on the second shutter element 12 -end. The magnetic pole early element 121 and the fourth magnetic single magic 22 have different =; and the third magnetic unit 121 is the north pole magnetic pole - the magnetic unit 111 has the same magnetic pole. The fourth magnetic single pole (8 poles) is opposite to the second magnetic unit 112, and the third magnetic unit 121 and the fourth magnetic unit 122 may be water permanent magnets or electromagnets. Please refer to Figure 2, the stalk ^ creation of the vacuum gate structure of the f 4 figure 'these are the first and the first: the action H movement diagram, the second actuation diagram UU head corresponds to the third magnetic sheet: 121 first, The second magnetic-mechanism unit 21 corresponds to the first magnetic early element 112=four magnetic...22. Since the first magnetic unit (1) disk has the same magnetic pole and the second magnetic unit inertial unit 122 has the same magnetic pole, the first element (1) is tightly sealed to the vacuum chamber 21 by the 201107640 and thus tightly sealing the magnetic repulsive force. A vacuum chamber 21 is closed. As shown in Fig. 3, when the gate is to be opened, the 12 is driven by the driving element, and the 笙 笙 — Η τ τ 又 又 又 又 又 又 ( 四 四 四 四 而 而 而 而 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿 沿(1) When the first magnetic unit (1) and the fourth magnetic unit 122 have different magnetic poles, the second magnetic unit 112 and the second magnetic unit 112 have a different magnetic pole. The third magnet has different magnetic poles, so that a magnetic attraction force is generated between the first gate element u and the second opening door 12, so that the first gate element u is adsorbed on the gate-gate element 12 and follows the direction of the second gate element 3 displacement. / The younger brother pre-discussed the H picture: Γ,, when the gate is to be closed, the drive element belt = the second gate element 12 is displaced along the second predetermined direction 4, and the first idle door is 11 pieces. Magnetically adsorbed to the second gate element 12* with the second movement. When the second gate element 12 drives the first gate element 11 d; and when the first magnetic unit 111 corresponds to the third magnetic t and the second magnetic unit 112 corresponds to the fourth magnetic unit m ι 'this time due to the first magnetic unit Lu magnetically repels the third magnetic unit 苐-magnetic early element 112 magnetically repels the fourth magnetic unit IK, strain; gate & 11 pieces are magnetically repulsively separated from the second gate element 12, and closely adhere to the vacuum Room 21. In addition, the 'th gate element u can also be set as the 'roller', and the sliding unit 114 can be slid to the true 201107640: the effect of the gate-portion element 11 being adsorbed or separated from the true (four) door structure of the present invention is By means of the magnetic single: the second gate element 12 is arranged to open or open the vacuum gate of the invention, the control gate is actuated, and the magnetic gate is separated from the present by the magnetic gate call_. Anything that has not been removed should be included in the attachment. Please modify or change the patent of Fan Yizhi. [The diagram is a simple explanation] The diagram is the structural diagram of the vacuum closed door structure of the present invention. The third figure of the invention of the true idle door structure is the unscrupulous β diagram of the present invention; and the second operation of the heterogeneous door structure shows that the fourth figure is the third operation of the real door structure of the present invention. Schematic diagram < 201107640 [Description of main component symbols] 1 : vacuum gate structure; 11 : first gate element; 111 : first magnetic unit; 112 : second magnetic unit; 121 : third magnetic unit; 122 : fourth magnetic unit 113: leak-proof pad; 114: sliding unit; 12: second gate element; 2: vacuum device; 21: vacuum chamber; 3: first preset direction; and 4: second preset direction.