201102273 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種對準台（alignment stage)，尤其關 於具有Χ、Υ、Θ三個自由度，用來進行承受移動負荷之工 件的對準之對準台。 本申請案係根據2009年5月26日於日本提出申請之 特願2009-126034號申請案主張優先權，在此援用其内容。 【先前技術】 近年來，提案有一種取代金屬蒸鍍膜的蝕刻等之微細 加工’而採用將導電膏（conductive paste)用作為印刷油 墨之印刷技術’例如凹版膠版印刷（intag 1 io of fset printing)技術，在基板上印刷而形成電極圖案（pattern) 之方法（參照例如專利文獻1、專利文獻2)，以作為將液晶 顯示器等的電極圖案（導電圖案）形成於所要的基板上之方 法0 將上述電極圖案之類的精細印刷圖案膠版印刷 (offset printing，本文中稱為膠版印刷）在上述基板之類 的平板狀印刷對象時，要求很高的印刷精度。因此，就進 行面印刷精度的膠版印刷之膠版印刷裝置而言，以使用與 印刷對象同樣之平板狀的版之形式的平版印刷裝置較有 利。 一般而言，使用平板狀的版與印刷對象而實施膠版印 刷時’係一邊以需要的接觸壓力使旋轉的膠皮滾輪 (blanket rol 1)抵壓於預先沾有墨的版一邊使膠皮滾輪相 322071 4 201102273 對於該版而移動。藉此，使墨從上述版轉印到上述膠皮滚 輪的表面（將所要印刷的圖案從版承接過來）。接著，在使 該膠皮滾輪旋轉的狀態下，一邊以需要的接觸壓力使膠皮 滾輪抵壓於上述印刷對象一邊使膠皮滾輪相對於印刷對象 而移動。藉此，使墨從上述膠皮滾輪再轉印（印刷）到印刷 對象的表面，而使上述版的印刷圖案再現於上述印刷對象 的表面。 然而，依序將印刷對象更換為新的而進行印刷作業之 際，當在每一個印刷對象的設置位置發生位置偏移時，就 會產生印刷位置的再現性降低之問題。 此外，版會因為印刷過程中之使用而慢慢磨耗（消 耗）。因此，每到一定的印刷次數或印刷時間就必須更換。 另外，進行套印（overprinting)之際也必須進行版的更 換。伴隨著如此之版的更換，當更換後的版的設置位置相 對於更換前的版的設置位置發生位置偏移時，印刷位置的 再現性就會降低。 如上所述發生因印刷對象或版的設置位置偏移而使得 印刷位置的再現性降低時，就有無法滿足進行電極圖案之 類的精細印刷圖案的膠版印刷時所需的高印刷精度之可能 性。 要避免上述問題點，可考慮使膠版印刷中所用的上述 版及印刷對象保持在對準台上，並就每個版及每個印刷對 象在印刷作業開始前進行對準作業。藉由該對準作業，修 正版及印刷對象的設置位置的位置偏移，使版及印刷對象 5 322071 201102273 與膠皮滾輪的接觸位置每一次都相同而提高位置的再現 性。如此，就可提高從版經由膠皮滾輪而印刷於印刷對象 之印刷圖案的位置的再現性。 為了避免上述問題點，還可考慮使用對準台來進行上 述版及印刷對象的位置修正。使用對準台時，就可在起因 於設計誤差等之現象發生之情況，例如：在旋轉的膠皮滾 輪的外周面的移動方向（與膠皮滚輪的軸心垂直之方向）、 與一邊使膠皮滾輪抵壓於版或印刷對象一邊使之相對移動 時之相對移動方向之間發生傾斜或偏移之情況；膠皮滚輪 存在有偏心、或以一定的轉速旋轉之膠皮滾輪的周速會發 生變動之情況，一邊使膠皮滾輪與保持於對準台之版或印 刷對象接觸，一邊使版或印刷對象隨著膠皮滾輪的外周面 之與版或印刷對象接觸的部份的動作而移動。 不過，在液晶顯示器及半導體的製作程序中，必須確 保層疊的構件或層的疊合精度。因此，使用例如第8及第 9圖所示的對準台，來作為進行工件在XY正交座標平面上 的配置、及旋轉角度Θ的對準所需之對準台。 第8及第9圖所示的對準台，係將一個支持單元2及 三個驅動單元3A，3B，3C分別設置在固定側之底座（base) 1的四個角部。另外，將作為移動側之頂台（top table)4 的四個角部載置安裝於支持單元2及各驅動單元3A，3B, 3C的上側。 支持單元2中，有由直線狀的導軌6a，6b、及可滑動 地安裝於導執6a, 6b之導塊7a，7b所構成的兩個直線運 6 322071 201102273 動導件5a，5b，以相互正交的姿勢重疊成上下兩段而配 置。上段的直線運動導件5b的導軌6b安裝於下段的直線 運動導件5a的導塊7a的上侧。此外，在上段的直線運動 導件5b的導塊7 b的上側，安裝有可在水平面内旋轉之旋 轉軸承8。藉由此構成，就能夠以作為支持單元2的下端 部之下段直線運動導件5a的導轨6a為基準，而在作為支 持單元2的上端部之旋轉軸承8的頂部得到X、Y、0之三 個自由度。 在支持單元2中，將下段直線運動導件5a的導軌6a 設置在底座1的對應部位。並且，將上述頂台4的對應部 位安裝在上述旋轉軸承8的上側。 各驅動單元3A，3B, 3C係在與支持單元2同樣的構成 中，配置有與下段直線運動導件5a的導軌6a平行之滾珠 螺桿直線運動機構9，此滾珠螺桿直線運動機構9係由伺 服馬達10、連結於伺服馬達10的輸出軸之螺桿軸11、以 及螺接於螺桿軸11之螺帽構件12所構成。滾珠螺桿直線 運動機構9的螺帽構件12係連結至下段直線運動導件5a 的導塊7a。藉由如此構成，就可藉由滾珠螺桿直線運動機 構9的伺服馬達10對於上述螺桿轴11所做之正反轉驅 動，而使上述螺帽構件12沿著上述螺桿轴11的軸心方向 移動，使得與該螺帽構件12成一體之上述下段直線運動導 件5a的導塊7a沿著導執6a的長度方向移動。 各驅動單元3A，3B，3C係將其下段直線運動導件5a 的導軌6a、以及滾珠螺桿直線運動機構9設在底座1的各 7 322071 201102273 個對應的部位。並且，讓上述頂台4的對應部位安裝在旋 轉軸承8的上侧。此時，係配置成：使各驅動單元3A，3B， 3C中的兩個驅動單元3A，3B的滚珠螺桿直線運動機構9 的方向（驅動方向）在X軸方向，使剩下的一個驅動單元3C 的滾珠螺桿直線運動機構9的方向（驅動方向）在Y軸方 向，而使前者與後者的驅動方向相互正交。 根據以上的對準台，適當調整利用各驅動單元3A，3B， 3C所具備的滾珠螺桿直線運動機構9而進行之下段直線運 動導件5a的導塊7a之位置的保持與移動、以及該導塊7a 的移動方向與移動量，就可進行上述頂台4在X-Y平面内 的水平位移、與旋轉角度0的旋轉位移之組合。因此，可 針對保持於上述頂台4上之作為對準對象之未圖示的工 件，進行X、Y、0之三軸方向的對準（參照例如非專利文 獻1)。 [先前技術文獻] [專利文獻] (專利文獻1)曰本專利第2797567號公報 (專利文獻2)日本專利第3904433號公報 [非專利文獻] (非專利文獻1)ΤΗΚ株式會社，型錄「對準台 (A1 ignment Stage) CMX」’ 2007 年 8 月 3 日，型錄編號 238-4 【發明内容】 (發明所欲解決之課題） 第8及第9圖所示之以往的對準台，係設定用來在液 8 322071 201102273 晶顯示器或半導體的製作程序的光製程中進行工件的對準 者。因此，並不太考慮負荷之承受。 換言之，在使用平板狀的版及印刷對象之膠版印刷 中，係使版或印刷對象保持在第8及第9圖所示的對準台201102273 VI. Description of the Invention: [Technical Field] The present invention relates to an alignment stage, and more particularly to having three degrees of freedom of Χ, Υ, Θ for alignment of a workpiece subjected to a moving load The alignment table. The present application claims priority on Japanese Patent Application No. 2009-126034, filed on Jan. 26, 2009, the entire disclosure of which is incorporated herein. [Prior Art] In recent years, there has been proposed a printing technique in which a conductive paste is used as a printing ink in place of microfabrication such as etching of a metal deposition film, for example, intag 1 io of fset printing. A method of forming an electrode pattern by printing on a substrate (see, for example, Patent Document 1 and Patent Document 2), as a method of forming an electrode pattern (conductive pattern) such as a liquid crystal display on a desired substrate The offset printing (offset printing, referred to herein as offset printing) such as the above electrode pattern requires high printing accuracy in the case of a flat printing object such as the above substrate. Therefore, in an offset printing apparatus for offset printing which performs surface printing accuracy, it is advantageous to use a lithographic printing apparatus in the form of a flat plate similar to the printing target. In general, when the offset printing is performed using a flat plate and a printing target, the rotating rubber roller (blanket rol 1) is pressed against the plate with the ink in advance with the required contact pressure to make the rubber roller phase 322071. 4 201102273 Move for this version. Thereby, the ink is transferred from the above-mentioned plate to the surface of the above-mentioned rubber roller (the pattern to be printed is received from the plate). Then, while the rubber roller is rotated, the rubber roller is moved against the printing target while the rubber roller is pressed against the printing target with a required contact pressure. Thereby, the ink is re-transferred (printed) from the rubber roller to the surface of the printing object, and the printing pattern of the plate is reproduced on the surface of the printing target. However, when the printing object is replaced with a new one and the print job is sequentially performed, when the positional shift occurs at the installation position of each of the printing objects, there is a problem that the reproducibility of the printing position is lowered. In addition, the plate is slowly worn (consumed) due to its use during the printing process. Therefore, it must be replaced every time a certain number of printing or printing time is reached. In addition, when overprinting is performed, the version must be replaced. With the replacement of such a plate, when the position of the replaced plate is shifted from the position of the plate before the replacement, the reproducibility of the printing position is lowered. When the reproducibility of the printing position is lowered due to the offset of the installation position of the printing target or the plate as described above, there is a possibility that the high printing precision required for the offset printing of the fine printing pattern such as the electrode pattern cannot be satisfied. . To avoid the above problems, it is conceivable to keep the above-mentioned plates and printing objects used in offset printing on the alignment table, and to perform alignment work for each plate and each printing object before the start of the printing operation. By the alignment operation, the positional deviation of the position of the original and the printing object is adjusted, so that the contact position of the plate and the printing object 5 322071 201102273 with the rubber roller is the same every time, and the position reproducibility is improved. Thus, the reproducibility of printing from the plate to the position of the printing pattern of the printing target via the rubber roller can be improved. In order to avoid the above problems, it is also conceivable to use an alignment table for position correction of the above-mentioned printing plate and the printing object. When the alignment table is used, it may occur in a phenomenon caused by a design error or the like, for example, a moving direction of the outer peripheral surface of the rotating rubber roller (a direction perpendicular to the axis of the rubber roller), and a rubber roller on one side. The inclination or offset between the relative movement direction when the plate or the printing object is relatively moved; the rubber roller has an eccentricity, or the peripheral speed of the rubber roller rotating at a certain rotation speed may change. When the rubber roller is brought into contact with the plate or the printing target held by the alignment table, the plate or the printing object is moved in accordance with the action of the portion of the outer peripheral surface of the rubber roller that is in contact with the plate or the printing target. However, in the production process of liquid crystal displays and semiconductors, it is necessary to ensure the lamination accuracy of the laminated members or layers. Therefore, for example, the alignment stages shown in Figs. 8 and 9 are used as the alignment stage required for the arrangement of the workpiece on the XY orthogonal coordinate plane and the alignment of the rotation angle Θ. In the alignment table shown in Figs. 8 and 9, one support unit 2 and three drive units 3A, 3B, and 3C are respectively disposed at the four corners of the base 1 on the fixed side. Further, the four corner portions of the top table 4 as the moving side are mounted on the upper side of the support unit 2 and the respective drive units 3A, 3B, 3C. The support unit 2 has two linear guides 6a, 5b formed by linear guide rails 6a, 6b and guide blocks 7a, 7b slidably mounted on the guides 6a, 6b, to The mutually orthogonal postures are arranged in two upper and lower sections. The guide rail 6b of the linear motion guide 5b of the upper stage is attached to the upper side of the guide block 7a of the linear motion guide 5a of the lower stage. Further, on the upper side of the guide block 7b of the linear motion guide 5b of the upper stage, a rotary bearing 8 which is rotatable in a horizontal plane is attached. With this configuration, it is possible to obtain X, Y, and 0 on the top of the rotary bearing 8 which is the upper end portion of the support unit 2 with reference to the guide rail 6a which is the lower linear motion guide 5a of the lower end portion of the support unit 2. The three degrees of freedom. In the support unit 2, the guide rails 6a of the lower linear motion guides 5a are disposed at corresponding portions of the base 1. Further, the corresponding portion of the top table 4 is attached to the upper side of the rotary bearing 8. Each of the drive units 3A, 3B, and 3C has a ball screw linear motion mechanism 9 that is parallel to the guide rail 6a of the lower linear motion guide 5a in the same configuration as the support unit 2. The ball screw linear motion mechanism 9 is servo-driven. The motor 10 is composed of a screw shaft 11 coupled to an output shaft of the servo motor 10 and a nut member 12 screwed to the screw shaft 11. The nut member 12 of the ball screw linear motion mechanism 9 is coupled to the guide block 7a of the lower linear motion guide 5a. With this configuration, the nut member 10 can be moved in the axial direction of the screw shaft 11 by the forward and reverse driving of the screw shaft 11 by the servo motor 10 of the ball screw linear motion mechanism 9. The guide block 7a of the lower linear motion guide 5a integrated with the nut member 12 is moved along the longitudinal direction of the guide 6a. Each of the drive units 3A, 3B, and 3C is provided with a guide rail 6a of the lower linear motion guide 5a and a ball screw linear motion mechanism 9 at respective positions of 7 322071 201102273 of the base 1. Further, the corresponding portion of the top table 4 is attached to the upper side of the rotary bearing 8. In this case, the direction (drive direction) of the ball screw linear motion mechanism 9 of the two drive units 3A, 3B of each of the drive units 3A, 3B, 3C is set in the X-axis direction so that the remaining one drive unit is The direction (driving direction) of the 3C ball screw linear motion mechanism 9 is in the Y-axis direction, and the driving directions of the former and the latter are orthogonal to each other. According to the above alignment stage, the ball screw linear motion mechanism 9 provided in each of the drive units 3A, 3B, and 3C is appropriately adjusted to maintain and move the position of the guide block 7a of the lower linear motion guide 5a, and the guide The moving direction and the amount of movement of the block 7a can be combined with the horizontal displacement of the top table 4 in the XY plane and the rotational displacement of the rotation angle 0. Therefore, the three-axis directions of X, Y, and 0 can be aligned with respect to the workpiece (not shown) to be aligned on the top table 4 (see, for example, Non-Patent Document 1). [Patent Document 1] (Patent Document 1) Japanese Patent No. 2,797, 567 (Patent Document 2) Japanese Patent No. 3904433 [Non-Patent Document] (Non-Patent Document 1), Ltd., Catalogue " A1 ignment stage CMX"' August 3, 2007, catalog number 238-4 [Summary of the invention] (Problems to be solved by the invention) Conventional alignment table shown in Figs. 8 and 9 , is set to align the workpiece in the light process of the liquid 8 322071 201102273 crystal display or semiconductor fabrication process. Therefore, the load is not taken into account. In other words, in the offset printing using the flat plate and the printing target, the plate or the printing object is held in the alignment table shown in Figs. 8 and 9.
上而進行對準，將版或印刷對象的位置修正到希望的S 置。接著，一邊以需要的接觸壓力使旋轉的膠皮滾輪抵壓 於保持在對準台上之版或印㈣象，—邊㈣皮滾輪相對 於該版或印刷對象而移動。如此一來，就會在保持著版或 印刷對象之對準台上，有貞荷作用於與版或印刷對象和膠 皮滾輪的外周面接觸的部份對應之在該膠皮滾輪的轴心方 向延伸的細長帶狀的區域。此負荷作用下的細長帶狀的區 域會隨著時間的經過m膠皮滾輪相對於版或印刷對象 之相對移動方向移動。因為這個緣故，會有移動負荷作用 於對準台。 在第8及第9圖所示之對準台中，頂台4的四個角係 由支持單it 2及驅動單元3A，3B，3C加以支持。因此，合 例如作用於沿著γ軸方向延伸的細長區域之貞荷成為在田χ 軸方向移動之移動負荷而作用之情況時，若該移動負荷作 用於頂台4的X軸方向的中間部，亦即不論是支持單元2 及驅動單元3Α，3B，3C的哪—個都未加以支持之頂台4的 X軸方向的中_，就會#頂台4因其錯直方向的支持剛 性降低而撓曲變形之可能性。由於此變形，而會有保持於 頂台4之上之版或印刷對象等之未圖示的工件發生位置偏 移之可能性。 322071 9 201102273 第8及第9圖所示之對準台係藉由具備有滾珠螺桿直 線運動機構9之三個驅動單元3A，3B, 3C，對頂台4進行 組合了在X-Y平面内之水平位移、與旋轉角度0的旋轉位 移之X、Y、Θ三軸的對準。此處，用來進行X軸方向的驅 動之驅動單元3A，3B的滚珠螺桿直線運動機構9的數目、 與用來進行Y軸方向的驅動之驅動單元3C的滚珠螺桿直線 運動機構9的數目不同。因此，會在X軸方向與Y軸方向 的水平方向剛性上產生差異。所以，例如在版或印刷對象 於膠版印刷中與膠皮滚輪接觸而有移動負荷作用於該版或 印刷對象之狀態下，利用對準台進行該版或印刷對象的位 置修正，就會因為該對準台之X軸方向與Y軸方向的水平 方向剛性的差，而在X軸方向的移動與在Y軸方向的移動 的容易度上產生差異。因此，會有無法對上述版或印刷對 象進行所希望的位置修正之可能性。 第8及第9圖所示之對準台係藉由各驅動單元3A，3B， 3C的各滚珠螺桿直線運動機構9的各伺服馬達10所内建 的編碼器（encoder )，來控制各滾珠螺桿直線運動機構9的 驅動量，而進行頂台4的位置控制。此處，在以下的各情 況，例如移動負荷作用於頂台4之情況，或者欲在有移動 負荷作用的狀態下使頂台4水平位移或旋轉位移之情況， 在上述負荷成為外力而作用之各滾珠螺桿直線運動機構9 的螺桿軸11、螺帽構件12等之推力傳遞部發生撓曲變形 或出現喀噠聲等之情形時，就無法排除上述情況的誤差要 素。而且，也無法檢知誤差要素的存在本身。因此，會有 10 322071 201102273 無法進行頂台4之高精確度的位置控制之可能性。 再者，第8及第9圖所示之對準台，係將作為各驅動 單元3A，3B，3C的各滾珠螺桿直線運動機構9的驅動源之 各伺服馬達10配置在底座1上之由頂台4所覆蓋之位置。 因此，由於各伺服馬達10的發熱的影響使得頂台4或底座 1發生熱變形，就會有伴隨著該頂台4或底座1的熱變形 而使得保持於頂台4之未圖示的工件發生位置偏移之可能 性。 如此，就第8及第9圖所示之以往的對準台而言，直 接以進行過X、Y、0三軸方向的高精確度定位後的狀態來 保持將會有移動負荷作用於其上之工件，或是在有移動負 荷作用中的狀態下進行工件之在X、Y、0三軸方向的高確 精度位置修正，會發生困難。 本發明的目的在提供一種可直接以進行過Χ、Υ、Θ三 軸方向的高精確度定位後的狀態保持將會有移動負荷作用 於其上之工件，而且即使在移動負荷作用中的狀態下也可 高精確度地使工件在X、Υ、0三軸方向位移之對準台。 (解決課題之手段） 根據本發明之第一態樣，本發明之對準底座係具備 有：底座；配置在前述底座的上方位置之用來保持會有移 動負荷作用於其上的工件之頂台；由可在正交的兩方向滑 動之導件（gu i de)、及設在前述導件上之旋轉轴承所構成之 具有Χ、Υ、Θ三個自由度之所需數目的支持單元；以及在 該支持單元配備一軸方向的直線運動機構而構成之至少三 11 322071 201102273 個驅動單元；而前述域單元與前述驅動單元係以沿著前 述移動負荷的移動方向之交差錯開狀（zigzagshape)的配 置配備在前述底座與前述頂台之間，冑前述各驅動單元之 中的兩個驅動單元的直線運動機構所驅動的驅動方向、與 剩下的驅動單元的直線運動機構所驅動的驅動方向在χ_γ 平面内正交。 、根據本發明之第二態樣，係使前述交差錯開狀的配置 成為在與則述頂台的四個角部及中央對應之部位的配置。 、、根據j發明之第三態樣，係使前述交差錯開狀的配置 成為在與前述頂台的四個角部及中央對應之部位的配置， 且在與前述頂台的四個角部對應之部位設置各個驅動單 元在與則述頂台的中央對應之部位設置前述支持單元。 .根據本發明之第四態樣，本發明之對準底座係具備 • f座’配置在前述底座的上方位置之絲保持會有移 負何作用於其上的工件之頂台；以及由可在正交的兩方 3動之導件、及設在前述導件上之旋轉軸承所構成之具 驅動„Y_、0二個自由度並具有一軸方向的直線運動機構之 方早而前述驅動#元係以沿著前述移動負荷的移動 間!1之^差錯開狀的配置配備在前述底座與前述頂台之 構斯使别述各驅動單元之中的兩個驅動單元的直線運動機 驅動的_方向、與剩下的兩個驅動單元的直線 機構所驅_㈣方向在χ_γ平面紅交。 動 成為=據本發明之第五態樣’係使前述交差錯開狀的配置 與連結前述頂台的各邊的中間位置和該頂台的中央 322071 12 201102273 而成的線上對應之部位的配置。 根據本發明之第六態樣，前述直線運動機構係由具備 有馬達、連結於該馬達的輸出軸之螺桿軸、及與該螺桿軸 螺合的螺帽構件之滾珠螺桿直線運動機構所構成，且使前 述馬達向底座的外側突出而配置。 根據本發明之第七態樣，係在前述各驅動單元附近的 底座上，設置用來檢測該各驅動單元的一轴方向的直線運 動機構所驅動的驅動量之光學尺（linear scale)。 (發明之效果） 本發明之對準台係發揮如以下所述之優良的效果。 (1)在底座的上方位置，配置用來保持會有移動負荷作 用於其上的工件之頂台。在上述底座與頂台之間，配備有： 由可在正交的兩方向滑動之導件、及設在前述導件之上之 旋轉軸承所構成之具有X、Y、0三個自由度之所需數目的 支持單元；以及在該支持單元配備一轴方向的直線運動機 構而構成之三個以上的驅動單元。使前述支持單元與前述 驅動單元配置成沿著前述移動負荷的移動方向之交差錯開 狀。使上述各驅動單元之中的兩個驅動單元的直線運動機 構所驅動的驅動方向、與剩下的驅動單元的直線運動機構 所驅動的驅動方向在X-Y平面内正交。如此構成之本發明 的對準台係藉由組合上述設有三個以上的驅動單元的驅 動，而進行組合了頂台之在X-Y平面内的水平移動、與旋 轉角度Θ的旋轉之移動。因此，可針對保持於該頂台上之 工件，在X、Y、Θ之三軸方向進行位置修正。 13 322071 201102273 (2) 根據本發明之對準台，即使移動負荷作用於保持在 頂台上的工件，也可藉由沿著該移動負荷的移動方向呈交 差錯開狀配置之各驅動單元及支持單元連續地承受透過該 工件而作用於上述頂台之上述移動負荷。因此，可提高頂 台之鉛直方向的剛性，可預防頂台因上述移動負荷而變形 之疑虞。因而，可預防起因於該頂台的變形所造成之上述 工件的位置偏移。 (3) 本發明之對準台係使沿著移動負荷的移動方向之 交差錯開狀的配置成為在與頂台的四個角部及中央對應之 部位的配置。因此，可容易地進行各驅動單元及支持單元 之沿著移動負荷的移動方向之交差錯開狀的配置。而且， 可藉由上述各驅動單元及支持單元而在前後左右方向平衡 性良好地支持上述頂台。 (4) 本發明之對準台係使沿著移動負荷的移動方向之 交差錯開狀的配置成為在與前述頂台的四個角部及中央對 應之部位的配置。而且，在與上述頂台的四個角部對應之 部位設置各個驅動單元。並且，在與上述頂台的中央對應 之部位設置支持單元。如此構成之本發明之對準台係可得 到與上述（3) —樣的效果。除此之外，還可使具備直線運動 機構之驅動單元在正交的兩個方向各配置兩個，而可讓頂 台之沿著X軸方向的水平方向剛性與沿著Y軸方向的水平 方向剛性相等。因此，在移動負荷作用於保持在上述頂台 上的工件之狀態下，使上述頂台移動而進行上述工件的位 置修正時，就可減低在往X軸方向的移動與往Y軸方向的 14 322071 201102273 移動上發生偏斜的可能性，而可對工件進行所希望的位置 修正。 (5) 本發明之對準台係在底座的上方位置配置用來保 持會有移動負荷作用於其上的工件之頂台。在上述底座與 頂台之間配備有：由可在正交的兩方向滑動之導件、及設 在導件之上的旋轉軸承所構成之具有Χ、Υ、Θ三個自由度 並具有一軸方向的直線運動機構這樣的構成之驅動單元。 而前述驅動單元係配置成沿著上述移動負荷的移動方向之 交差錯開狀。使上述各驅動單元之中的兩個驅動單元的直 線運動機構所驅動的驅動方向、與剩下的兩個驅動單元的 直線運動機構所驅動的驅動方向在Χ-Υ平面内正交。如此 構成之本發明之對準台係可得到與上述（1)(2)(3)(4)—樣 的效果。 (6) 本發明之對準台係使沿著移動負荷的移動方向之 交差錯開狀的配置，成為在與連結頂台的各邊的中間位置 和該頂台的中央而成的線上對應之部位的配置。藉此，可 使各單元更接近配置。因此，在要應用於平面形狀更小尺 寸的對準台之情況很有利。 (7) 本發明之對準台所具備之各驅動單元的一軸方向 的直線運動機構，係由具備有馬達、連結於該馬達的輸出 軸之螺桿軸、及與該螺桿軸螺合的螺帽構件之滾珠螺桿直 線運動機構所構成。而各滾珠螺桿直線運動機構的上述馬 達係向底座的外側突出而配置。如此構成之本發明之對準 台係可使作為各驅動單元的驅動源之各滾珠螺桿直線運動 15 322071 201102273 機構的各伺服馬達所發出的熱有效率地發散到周圍的空氣 中。因而，可抑制起因於上述各伺服馬達的發熱所造成之 底座或頂台的熱變形。因此，可減低因上述底座或頂台的 熱變形的影響而使得上述頂台所保持的工件發生位置偏移 之可能性。 (8) 本發明之對準台係在各驅動單元附近的底座上，設 置用來檢測該各驅動單元的一軸方向的直線運動機構所驅 動的驅動量之光學尺。藉此，而可利用設於各驅動單元的 外部之光學尺來對於各驅動單元的一軸方向的直線運動機 構進行光學尺回授控制（linear scale feedback control)。因而，即使作用於保持在上述頂台上的工件之 移動負荷，成為外力而作用於上述各驅動單元的一軸方向 的直線運動機構而在該直線運動機構發生機械性的歪曲變 形等，也不會受其所影響。因此，可進行各驅動單元之高 精確度的位置控制。藉此，而可進行保持於頂台上的工件 之高精確度的位置控制。 (9) 根據以上之本發明之對準台，就可直接以進行過 X、Y、Θ三軸方向的高精確度定位後的狀態保持會有移動 負荷作用於其上之工件。而且，即使在移動負荷作用中的 狀態下也可使上述工件在X、Y、0三軸方向進行高精確度 的位置修正。 【實施方式】 以下，參照圖式說明實施本發明之形態。 第1至第5圖顯示本發明之對準台之實施的一個形態。 16 322071 在作為固定側 頂台4a係用來保持移二：：需尺寸上方配置頂台4a。 件，例如―邊推壓㈣f負何會作用於其上之未圖示的工 對移動因而使移動〖荷=刷時旋轉的膠皮滾輪—邊使之相 上述底座1與頂台铭7用於其上之版或印刷對象等。在 移動負荷的移動方&之間’在作用於上述未圖示的工件之 箭號L加以表示，乂下’簡稱為負荷移動方向，圖中以 配置的所需數量部位，第7圖中亦同）形成交差錯開狀 始依序為兩部位（例如攸負荷移動方向L的上游側開 有兩部位’以下亦曰—與負荷移動方向L垂直的方向上 分別與上述頂台4&沾;;部位-兩部位之交差錯開狀配置之 配置支持單元i 、*及四個角部對應之五部位，分別 支持單元13係由可二個驅動單元14A，14B，14C，14D。 導件的上側之旋 兩個方向滑動之導件及在該 fJX、Y、θ三個自由二所構成，其上端部相對於下端部 係除了與該支持。。_八。四個驅動單元14Α，14Β，14C， 輛方向的直線運動13 —樣的構成之外，還具備有一 ^袞珠螺桿直線1，例如與第8及第9圖所示者同樣 4C，UD之中的 冓9。上述四個驅動單元14Α，14β， ^機構9的方向^動單元HA，UB之滾珠螺桿直線 正，桿直線運動機構^剩下的兩個驅動單元14C，14D之滚 、人。在此狀態下，的方向，係配置成在水平面内相互 的Γ端部分別安裝在卜上述支持單元13及各驅動單元14 持早凡13 &各驅動單|底座1的對應之部位，將上述支 疋14的上端部分別安裝在上述頂台 322071 17 201102273 4a的對應之部位而構成本發明之對準台。Align and adjust the position of the plate or print object to the desired S position. Then, while rotating the rubber roller with the required contact pressure against the plate or print (4) image held on the alignment table, the side (four) skin roller moves relative to the plate or the printing object. In this way, on the alignment table holding the plate or the printing object, the load acting on the outer surface of the plate or the printing object and the rubber roller corresponds to the axial direction of the rubber roller. Slim banded area. The elongate strip-like area under this load will move over time relative to the direction of relative movement of the plate or print object. For this reason, a moving load acts on the alignment stage. In the alignment table shown in Figs. 8 and 9, the four corners of the top table 4 are supported by the support unit it 2 and the drive units 3A, 3B, 3C. Therefore, for example, when the load acting on the elongated region extending in the γ-axis direction acts as a moving load moving in the direction of the field axis, the moving load acts on the intermediate portion of the table 4 in the X-axis direction. That is, regardless of which of the support unit 2 and the drive unit 3Α, 3B, 3C, which is not supported, the middle stage of the X-axis direction of the top table 4 is the support rigidity of the top table 4 due to its misalignment direction. Reduce the possibility of deflection and deformation. Due to this deformation, there is a possibility that the workpiece (not shown) which is held on the top table 4 or the printing object or the like is displaced. 322071 9 201102273 The alignment table shown in Figures 8 and 9 combines the top table 4 in the XY plane by three drive units 3A, 3B, 3C having a ball screw linear motion mechanism 9 The displacement, the alignment of the X, Y, and Θ axes with the rotational displacement of the rotation angle of 0. Here, the number of the ball screw linear motion mechanisms 9 of the drive units 3A, 3B for driving in the X-axis direction is different from the number of the ball screw linear motion mechanisms 9 of the drive unit 3C for driving in the Y-axis direction. . Therefore, a difference occurs in the horizontal rigidity in the X-axis direction and the Y-axis direction. Therefore, for example, in the state where the plate or the printing object is in contact with the rubber roller in the offset printing and the moving load acts on the plate or the printing object, the position correction of the plate or the printing object is performed by the alignment table, because the pair The difference between the X-axis direction of the alignment table and the horizontal direction rigidity in the Y-axis direction differs between the movement in the X-axis direction and the ease of movement in the Y-axis direction. Therefore, there is a possibility that the desired position correction of the above-mentioned plate or printed object cannot be performed. The alignment stages shown in Figs. 8 and 9 control the respective balls by an encoder built in each servo motor 10 of each ball screw linear motion mechanism 9 of each of the drive units 3A, 3B, 3C. The driving amount of the screw linear motion mechanism 9 is controlled by the position of the top table 4. Here, in the following cases, for example, when the moving load acts on the top table 4 or when the top table 4 is horizontally displaced or rotationally displaced in a state in which the moving load acts, the load acts as an external force. When the thrust transmitting portions of the screw shaft 11 and the nut member 12 of each of the ball screw linear motion mechanisms 9 are flexibly deformed or clicked, the error elements of the above-described cases cannot be excluded. Moreover, it is impossible to detect the existence of the error element itself. Therefore, there will be 10 322071 201102273 the possibility of high-precision position control of the top 4 cannot be performed. Further, in the alignment table shown in Figs. 8 and 9, the servo motors 10 as the drive sources of the respective ball screw linear motion mechanisms 9 of the drive units 3A, 3B, and 3C are disposed on the base 1. The position covered by the top table 4. Therefore, due to the influence of the heat generated by the servo motor 10, the top table 4 or the base 1 is thermally deformed, and the workpiece (not shown) held by the top table 4 is thermally deformed by the top table 4 or the base 1. The possibility of a positional offset. As described above, in the conventional alignment table shown in FIGS. 8 and 9, the state in which the X, Y, and 0 triaxial directions are highly accurately positioned is maintained, and a moving load is applied thereto. Difficulties may occur in the workpiece on the workpiece or in the state in which the moving load is applied, and the position of the workpiece in the X, Y, and 0 directions is corrected. SUMMARY OF THE INVENTION An object of the present invention is to provide a state in which a workpiece to which a moving load is applied can be held in a state in which high-precision positioning in a three-axis direction of a cymbal, a cymbal, or a cymbal is directly performed, and even in a state in which a moving load is applied The alignment table for shifting the workpiece in the three-axis directions of X, Υ, and 0 can also be performed with high precision. Means for Solving the Problem According to a first aspect of the present invention, an alignment base of the present invention is provided with: a base; and a top portion of the workpiece disposed at a position above the base for maintaining a moving load thereon a support unit having three degrees of freedom of Χ, Υ, Θ formed by a guide member slidable in two orthogonal directions and a rotary bearing provided on the guide member And at least three 11 322071 201102273 drive units formed by the support unit being provided with a linear motion mechanism in one axial direction; and the aforementioned domain unit and the aforementioned drive unit are staggered along the moving direction of the moving load (zigzagshape) The arrangement is provided between the base and the aforementioned table, the driving direction driven by the linear motion mechanism of the two driving units among the foregoing driving units, and the driving direction driven by the linear motion mechanism of the remaining driving unit Orthogonal in the χ_γ plane. According to the second aspect of the present invention, the arrangement in which the intersection is shifted is arranged at a position corresponding to the four corners and the center of the table. According to a third aspect of the invention, the arrangement of the intersections is arranged at a position corresponding to the four corners and the center of the top table, and corresponds to the four corners of the top table. Each of the drive units is provided with a support unit at a portion corresponding to the center of the top table. According to a fourth aspect of the present invention, an alignment base of the present invention is provided with a top surface of a workpiece disposed at a position above the base to maintain a top of a workpiece on which a load is applied; The guide member formed by the orthogonal two-way three-moving guide member and the rotary bearing provided on the guide member has a linear motion mechanism that drives two degrees of freedom of „Y_, 0 and has one axial direction. The element system is equipped with a linear motion machine driven by two driving units among the driving units, which are arranged in the above-described base and the above-mentioned top table, along the movement of the moving load. The direction of the _ direction and the linear mechanism of the remaining two driving units are red-crossed in the χ_γ plane. The motion becomes the fifth aspect of the present invention, and the arrangement of the intersections is shifted and the abutment is connected. According to a sixth aspect of the present invention, the linear motion mechanism is provided with a motor and an output coupled to the motor. Axis screw a shaft and a ball screw linear motion mechanism of a nut member screwed to the screw shaft, wherein the motor is disposed to protrude outward of the base. According to a seventh aspect of the present invention, in the vicinity of each of the driving units On the base, a linear scale for detecting the amount of driving of the linear motion mechanism in one axial direction of each drive unit is provided. (Effect of the Invention) The alignment stage of the present invention functions as described below. Excellent effect. (1) At the upper position of the base, a top table for holding a workpiece to which a moving load acts is disposed. Between the above base and the top table, there are: a guide member that slides in two directions, and a required number of support units having three degrees of freedom of X, Y, and 0 formed by a rotary bearing provided on the guide member; and a straight line in the support unit that is provided with an axial direction Three or more drive units configured by the moving mechanism, wherein the support unit and the drive unit are arranged to be shifted in a direction along a moving direction of the moving load. The drive direction driven by the linear motion mechanism of the two drive units is orthogonal to the drive direction driven by the linear motion mechanism of the remaining drive unit in the XY plane. The alignment platform of the present invention thus constructed is By combining the above-described driving provided with three or more driving units, the horizontal movement of the top table in the XY plane and the rotation of the rotation angle Θ are combined. Therefore, for the workpiece held on the top table, Position correction in the three-axis directions of X, Y, and 。. 13 322071 201102273 (2) According to the alignment table of the present invention, even if a moving load acts on the workpiece held on the top table, the moving load can be moved along Each of the driving units and the supporting unit in which the moving direction is disposed in an intersecting manner continuously receives the above-described moving load acting on the top table through the workpiece. Therefore, the rigidity of the top in the vertical direction can be improved, and the problem that the top table is deformed by the above-described moving load can be prevented. Therefore, the positional deviation of the above-described workpiece caused by the deformation of the table can be prevented. (3) The alignment stage of the present invention is such that the arrangement of the intersections in the moving direction of the moving load is shifted to the positions corresponding to the four corners and the center of the top. Therefore, it is possible to easily arrange the displacement of the respective drive units and the support units in the moving direction of the moving load. Further, the top stage can be supported in a balanced manner in the front, rear, left, and right directions by the respective drive units and the support unit. (4) The alignment stage of the present invention is such that the arrangement of the intersections along the moving direction of the moving load is shifted to the four corners and the center of the top table. Further, respective drive units are provided at portions corresponding to the four corner portions of the above-described top table. Further, a support unit is provided at a portion corresponding to the center of the above-mentioned stage. The alignment stage of the present invention thus constituted can obtain the same effect as (3) above. In addition, the driving unit with the linear motion mechanism can be arranged in two directions orthogonal to each other, and the horizontal rigidity along the X-axis direction and the horizontal direction along the Y-axis direction can be made. The directions are of equal rigidity. Therefore, when the moving load is applied to the workpiece held on the top table, when the top table is moved to correct the position of the workpiece, the movement in the X-axis direction and the Y-axis direction can be reduced. 322071 201102273 The possibility of deflection on the movement, and the desired position correction of the workpiece. (5) The alignment stage of the present invention is disposed at a position above the base to hold a top table of a workpiece to which a moving load acts. Between the base and the top table, there are three degrees of freedom of Χ, Υ, Θ, and one axis, which are composed of a guide which can slide in two orthogonal directions and a rotary bearing which is arranged on the guide. A drive unit of such a configuration as a linear motion mechanism in the direction. Further, the drive unit is disposed so as to be staggered along the moving direction of the moving load. The driving direction driven by the linear motion mechanism of the two driving units among the above-described driving units is orthogonal to the driving direction driven by the linear motion mechanisms of the remaining two driving units in the Χ-Υ plane. The alignment stage of the present invention thus constituted can obtain the same effects as the above (1), (2), (3) and (4). (6) The alignment stage of the present invention has an arrangement in which the intersection of the moving directions of the moving load is shifted, and is a portion corresponding to a line formed at an intermediate position between each side of the connecting top and the center of the top. Configuration. This allows each unit to be closer to the configuration. Therefore, it is advantageous in the case where it is applied to an alignment table having a smaller planar shape. (7) The linear motion mechanism in one axial direction of each drive unit included in the alignment table of the present invention is a screw shaft including a motor, an output shaft coupled to the motor, and a nut member screwed to the screw shaft The ball screw linear motion mechanism is formed. On the other hand, the motor of each of the ball screw linear motion mechanisms protrudes toward the outside of the base. The alignment stage of the present invention thus constructed can linearly move the respective ball screws as the drive source of each drive unit. 15 322071 201102273 The heat generated by each servo motor of the mechanism is efficiently dissipated into the surrounding air. Therefore, thermal deformation of the base or the top caused by the heat generation of each of the servo motors described above can be suppressed. Therefore, it is possible to reduce the possibility that the workpiece held by the above-mentioned stage is displaced due to the influence of the thermal deformation of the above-mentioned base or the top. (8) The alignment stage of the present invention is provided with an optical scale for detecting a driving amount driven by a linear motion mechanism in one axial direction of each drive unit on a base near each drive unit. Thereby, optical scale feedback control for one linear motion mechanism of each drive unit can be performed by using an optical scale provided outside each drive unit. Therefore, even if the moving load acting on the workpiece held on the top table acts as an external force and acts on the linear motion mechanism in one axial direction of each of the driving units, mechanical distortion or the like occurs in the linear motion mechanism, and Affected by it. Therefore, high-precision position control of each drive unit can be performed. Thereby, high-precision position control of the workpiece held on the top table can be performed. (9) According to the above-described alignment table of the present invention, it is possible to directly hold the workpiece to which the moving load acts on the state in which the high-precision positioning in the three-axis directions of X, Y, and 进行 is performed. Further, the workpiece can be highly accurately corrected in the three-axis directions of X, Y, and 0 even in a state in which the moving load is applied. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figures 1 to 5 show an embodiment of the implementation of the alignment stage of the present invention. 16 322071 In the fixed side, the top table 4a is used to maintain the shift 2: the top table 4a is arranged above the required size. Pieces, for example, "pushing" (four) f, which will act on the unillustrated pair of movements on it, thereby moving the rubber roller that is rotated when the brush is rotated, and the phase is used for the base 1 and the top table 7 The version on which it is printed or the object to be printed. Between the moving side of the moving load & 'in the arrow L acting on the workpiece (not shown), the armpit ' is simply referred to as the direction of load movement, the required number of parts in the figure, in Figure 7 Similarly, the formation of the intersection opening is sequentially performed in two parts (for example, two parts on the upstream side of the load-moving movement direction L are opened below), and are respectively perpendicular to the load moving direction L, and are respectively adhered to the above-mentioned top table 4& The position-to-part arrangement of the two parts is supported by the support unit i, * and the five parts corresponding to the four corners, respectively. The support unit 13 is provided by two drive units 14A, 14B, 14C, 14D. The upper side of the guide The guide member that slides in both directions is composed of three free twos of fJX, Y, and θ, and the upper end portion is separated from the lower end portion by the support. _8. Four drive units 14Α, 14Β, 14C In addition to the configuration of the linear motion 13 in the direction of the vehicle, there is also a bead screw line 1 which is, for example, the same as the one shown in Figs. 8 and 9 and the 冓9 among the UD. The above four drive units 14Α, 14β, ^ Direction of the mechanism 9 moving unit HA, UB The ball screw is straight and straight, and the rod linear motion mechanism is the remaining two driving units 14C, 14D, which are arranged in the same direction, and are arranged in the horizontal plane to be mutually connected to each other in the horizontal plane. The supporting unit 13 and each of the driving units 14 hold the corresponding portions of the 13 & each driving single|base 1 and mount the upper end of the support 14 on the corresponding portion of the top table 322071 17 201102273 4a to constitute the present The alignment table of the invention.
支持單元13中，如第3A、3B、3C 軌⑸於水平方向延伸所需尺寸之導軌）上，以可2段導 式安裝有由下段導塊16a及上段導塊⑽以相^動之方 的狀態背面貼合而構成為一體之導塊 乂配置 塊此。在導塊16的上述上段導塊⑽上 二下段導軌15正交之水平方向延伸所需尺寸之=上 成可在長度方向滑動。如此，將上下兩又2 =背面貼合的方式連結而形成可在正交的兩= 導件。另外，在上述上段導軌17的上側，安 = Ί如此’就可藉由沿著上述下段導軌15之導 、下段導塊16a的滑動、相對於該導塊16的上段導 US上段:轨17在長度方向的滑動、及上述旋轉軸承: 轉’以屬於支持單元13的下端部之上述下段導軌 土準，而在屬於支持單元13的上端部之上述 的頂部得到χ、γ、θ三個自由度。 轉轴承8 各驅動單元14Α，14Β，14C，14D係如第4Α、仙,In the support unit 13, for example, the 3A, 3B, and 3C rails (5) extend on the guide rail of the required size in the horizontal direction, and the lower guide block 16a and the upper guide block (10) are connected in a two-stage guide manner. The state of the back of the state is laminated to form an integrated guide block. On the above-mentioned upper stage guide block (10) of the guide block 16, the upper and lower rails 15 are orthogonal to each other in the horizontal direction, and the required size is slidable in the longitudinal direction. In this way, the upper and lower sides and the 2 = back surface are joined together to form two orthogonal guides. In addition, on the upper side of the upper rail 17, the slid can be guided along the upper and lower guides 16 of the lower rail 15, and the upper section of the guide 16 is guided by the upper rail: The sliding in the longitudinal direction and the above-mentioned rotary bearing: the rotation of the lower rail portion belonging to the lower end portion of the support unit 13 is the same, and the three top degrees of freedom of χ, γ, θ are obtained at the top portion of the upper end portion belonging to the support unit 13 . Rotary bearing 8 Each drive unit 14Α, 14Β, 14C, 14D is like the 4th, 仙,
圖路- 如、4C 不’除了與第3Α、3Β、3C圖所示之支持單元13同樣 之包括下段導軌15、導塊16、上段導軌17及旋轉軸承’8 之構成之外，還配置有與上述下段導軌15平行之上述浪珠 螺才干直線運動機構9。而且，使該滾珠螺桿直線運動機構9 的螺帽構件12 ’透過連結構件18而連結至上述導塊16的 下段導塊16a。藉此，可藉由上述滾珠螺桿直線運動機構9 使與螺帽構件12成一體之上述導塊16沿著下段導軌15的 322071 18 201102273 長度方向移動。 如第1圖所示，在底座i上之與頂台4a的中央對應之 部位，上述支持單元13係以令其下段導軌15沿著χ軸方 向或γ軸方向的任一方向之姿勢配置（圖中顯示的是沿著χ 軸方向之姿勢）。然後，將下段導軌15安裝在底座i的對 應之部位。 如第1及第2圖所示，在上述底座i上之與頂台4a的 四個角部對應之四個部位之中、與頂纟4&之一方的對角位 置對應之兩個部位，上述驅動單元14A及14B係以令其滾 珠螺桿直線運動機構9沿著γ轴方向之姿勢配置。而在與 頂台4a之另一方的對角位置對應之兩個部位，上述驅動單 疋14C及14D係以令其滚珠螺桿直線運動機構9沿著χ車由 方向之姿勢配置。各驅動單元14A，14B，14C，14D係以令 ^設在各滾珠螺桿i線運動機構9之舰馬達1G都會成為 從底座1的外周緣向外側突一狀態之方式，將其下段導 軌15與滾珠螺桿直線運動機構9安裝在底座1的對應部 置5圖^ ’沿著前述的負荷移動方向L而依序配 單元=== 移動方Μ上游側的兩個媒動 ， 支持早兀13、及負荷移動方向L下游你丨的 14D，係配置成各旋轉轴承8之在上述 、多動方向L所佔的區域“皮此略為重疊之 雖未圖示，但沿著上述負荷移動方向 ：卜’ 置依序配置之驅動單元14A， 父差錯開狀配 叉持苹元13、及驅動單 322071 201102273 元14B，14D各自的旋轉軸承8之在上述負荷移動方向L所 佔的區域Μ彼此之間’亦可形成有尺寸在比作用於頂台乜 所保持的未圖示的工件之移動負荷的寬度窄的範圍内之間 隙。藉此’就可在移動負荷沿著負荷移動方向L作用於安 裝在上述支持單元13及各驅動單元i4A，14B，14C，14D 的旋轉轴承8的上側之上述頂台4a所保持的未圖示的工件 時’從沿著上述負荷移動方向L而以交差錯開狀配置依序 配置之負荷移動方向L上游側的兩個驅動單元14a，14C， 經過支持單元13 ’再到驅動單元14B，14D連續地承受該 移動負荷。藉此，就可在上述移動負荷作用於上述頂台4a 的期間，減低鉛直方向的支持剛性降低之可能性。 在底座1上之透過下段導塊16a而沿著各驅動單元14 的下段導執15移動之導塊16的附近部位，設有沿著該導 塊16之順著下段導執15的移動軌跡而配置之光學尺19。 藉此，就可檢測出以上述下段導軌15的長度方向的所需部 位、例如長度方向的中央為原點之上述導塊16的位移量。 藉由未圖示的控制器，以光學尺19的檢測訊號為基礎而下 指令給對應_動單元14的滾珠螺桿直線運動機構9。藉 此，就可對於沿著下段導執15的長度方向移動之上述導塊 16的位置進行光學尺回授控制。 除了以上所述的元件之外，對於與第8及第9圖所示 者相同的構成要素都標註相同的符號。 使用具備有以上構成之本發明的對準台時，係在使具 備有沿著X軸方向的滾珠螺桿直線運動機構9之各驅動單 322071 20 201102273 元14C’ 14D的各導塊16之沿著χ軸方向的移動停止的狀 態下，在具備有沿著γ軸方向的滚珠螺桿直線運動機構9 之各驅動單元14Α，14Β，藉由滾珠螺桿直線運動機構9的 驅動使各導塊16沿著Υ軸方向朝相同方向同步移動。藉 此，頂台4a就會以與各導塊16的移動方向及移動量對應 之移動方向及移動量在γ軸方向移動。 並且，在使各驅動單元14A，的各導塊16之沿著In addition to the configuration of the lower rail 15, the guide block 16, the upper rail 17, and the rotary bearing '8, the same as the support unit 13 shown in the third, third, and third embodiments, the same is also provided. The above-mentioned wave bead screw linear motion mechanism 9 parallel to the lower rail 15 described above. Then, the nut member 12' of the ball screw linear motion mechanism 9 is coupled to the lower guide block 16a of the guide block 16 through the connecting member 18. Thereby, the above-described guide block 16 integrated with the nut member 12 can be moved in the longitudinal direction of the lower rail 15 by 322071 18 201102273 by the above-described ball screw linear motion mechanism 9. As shown in Fig. 1, in the portion of the base i corresponding to the center of the top table 4a, the support unit 13 is disposed such that the lower rail 15 is oriented in either the z-axis direction or the γ-axis direction ( The figure shows the posture along the χ axis direction). Then, the lower rail 15 is mounted at a corresponding portion of the base i. As shown in the first and second figures, among the four portions of the base i corresponding to the four corner portions of the top table 4a, two portions corresponding to the diagonal positions of one of the top cymbals 4 & The drive units 14A and 14B are disposed such that the ball screw linear motion mechanism 9 is along the γ-axis direction. On the other hand, at the two positions corresponding to the diagonal position of the other of the top tables 4a, the drive units 14C and 14D are arranged such that the ball screw linear motion mechanism 9 is disposed along the direction of the brake. Each of the drive units 14A, 14B, 14C, and 14D is such that the ship motor 1G provided in each of the ball screw i-line moving mechanisms 9 protrudes outward from the outer periphery of the base 1, and the lower guide rail 15 is The ball screw linear motion mechanism 9 is mounted on the corresponding portion of the base 1 and has the following two elements: [1] along the load moving direction L, and the two media on the upstream side of the moving square, supporting the early stage 13, And the 14D downstream of the load moving direction L is arranged so that the area occupied by the above-mentioned multi-directional direction L of each of the rotary bearings 8 is slightly overlapped, but is not shown, but is moved along the load direction: The drive unit 14A, the parent error-distributed fork unit 13, and the drive unit 322071 201102273, 14B, 14D of the respective rotating bearing 8 occupy the area occupied by the load moving direction L 'It is also possible to form a gap having a size narrower than the width of the moving load of the workpiece (not shown) held by the top cymbal. Thus, the moving load can be applied to the mounting along the load moving direction L. In the above support unit 13 And the workpieces (not shown) held by the top table 4a on the upper side of the rotary bearing 8 of each of the drive units i4A, 14B, 14C, and 14D are arranged in order from the load moving direction L in a staggered arrangement. The two drive units 14a, 14C on the upstream side of the load moving direction L are continuously subjected to the moving load via the support unit 13' to the drive units 14B, 14D. Thereby, the above-described moving load acts on the top table 4a. During this period, the possibility of reducing the support rigidity in the vertical direction is reduced. The vicinity of the guide block 16 that moves along the lower guide 15 of each drive unit 14 through the lower guide block 16a on the base 1 is provided along the guide. The optical scale 19 disposed along the movement locus of the lower stage guide 15 of the block 16 can detect the above-mentioned guide which is the origin of the desired portion in the longitudinal direction of the lower guide rail 15, for example, the center in the longitudinal direction. The displacement amount of the block 16 is commanded by the controller (not shown) to the ball screw linear motion mechanism 9 corresponding to the movable unit 14 based on the detection signal of the optical scale 19. Thereby, it is possible to follow the lower stage. The optical element feedback control is performed at the position of the above-described guide block 16 that moves in the longitudinal direction of the switch 15. The same components as those shown in the eighth and ninth figures are denoted by the same reference numerals except for the above-described elements. When the alignment table of the present invention having the above configuration is used, each of the guide blocks 16 including the respective driving sheets 322071 20 201102273, 14C' 14D including the ball screw linear motion mechanism 9 along the X-axis direction is along In the state in which the movement in the x-axis direction is stopped, each of the drive units 14A, 14A having the ball screw linear motion mechanism 9 along the γ-axis direction is driven by the ball screw linear motion mechanism 9 to cause the respective guide blocks 16 to follow. The x-axis direction moves synchronously in the same direction. As a result, the top stage 4a moves in the γ-axis direction by the moving direction and the amount of movement corresponding to the moving direction and the amount of movement of each of the guide blocks 16. And, along each of the guide blocks 16 of each drive unit 14A
γ軸方向的移動停止的狀態下，在上述各驅動單元14C，14D 藉由滾珠螺桿直線運動機構9的驅動使各導塊16沿著χ軸 方向朝相同方向同步移動。如此一來，頂台4a就會以與各 導塊16的移動方向及移動量對應之移動方向及移動量在χ 轴方向移動。 因而，在使上述各驅動單元14八，14Β的各導塊16沿 著γ軸方向朝相同方向同步移動的同時，使上述各驅動單 元14C，14D的各導塊16沿著χ軸方向朝相同方向同步移 動時，上述頂台4a就會以上述各驅動單元14Α，14Β的各 導，16之沿著γ軸方向的移動方向及移動量、與上述各驅 動單元14C，14D的各導塊16之沿著χ軸方向的移動方向 及移動1所合成的向量’在X-Y平面内斜向移動。 曰再者，藉由各驅動單元14A，14B，14C，14D的滾珠螺 才干直線運動機構9使上述各驅動單元14A，14B，14C，14D 的各導塊16朝向接近伺服馬達10的方向、或離開伺服馬 達1〇的方向同步移動時’上述頂台4a就會以該頂台4a的 中央為旋轉巾^而朝俯視逆時針方向、或俯視順時針方向 322071 201102273 旋轉。 另外，藉由將：使上述頂台4a^ v , 在X〜Y平面内移動之情 況（亦即使上述頂台4a在X軸方向敕么 二故也]移動之情況、在Y軸方 向移動之情況、在X-Y平面内斜向栽t .00 _ 動之情況）時之上述各 驅動早T0 14A，14B，14C，14D的夂道仏 ,...TS > , 合導塊16的移動、與使 上述頂〇 4a彡疋轉之情況時之上述久In the state in which the movement in the γ-axis direction is stopped, each of the drive units 14C, 14D is driven by the ball screw linear motion mechanism 9 to synchronously move the respective guide blocks 16 in the same direction along the z-axis direction. As a result, the top stage 4a moves in the direction of the x-axis in the moving direction and the amount of movement corresponding to the moving direction and the amount of movement of each of the guide blocks 16. Therefore, while the respective guide blocks 16 of the respective drive units 14 and 14 are synchronously moved in the same direction along the γ-axis direction, the respective guide blocks 16 of the respective drive units 14C and 14D are oriented in the same direction along the x-axis. When the direction is synchronously moved, the top stage 4a is moved in the γ-axis direction by the guides 16 of the respective drive units 14A, 14Β, and the amount of movement and the guide blocks 16 of the respective drive units 14C and 14D. The moving direction along the x-axis direction and the vector 'composed by the movement 1' move obliquely in the XY plane. Further, by the ball screw linear motion mechanism 9 of each of the drive units 14A, 14B, 14C, and 14D, each of the guide blocks 16 of the respective drive units 14A, 14B, 14C, and 14D is directed toward the servo motor 10, or When the direction away from the servo motor 1 is synchronously moved, the top table 4a rotates in a counterclockwise direction in a plan view or a clockwise direction 322071 201102273 in a plan view by rotating the center of the top table 4a. Further, when the top table 4a^v is moved in the X to Y plane (the case where the top table 4a is moved in the X-axis direction) is moved, the Y-axis direction is moved. In the case of the case where the t.00 _ moving condition is obliquely implanted in the XY plane, the above-mentioned respective driving of the T0 14A, 14B, 14C, 14D, ... TS >, the movement of the guiding block 16 and The above-mentioned time when the top cymbal 4a is turned
义谷驅動|元14A HR Γ頂二D的tit16之移動予以組合(合成)，就可使上 述頂口 4a-邊在χ-γ平面内水平移動—邊旋轉。 如上所述，根據本發明之對準么， .Y v ^ _ σ 藉由組合頂台4a之 在X-Y千面内的水平移動、盥旋 ^ A , /、疋轉角度Θ之旋轉而使保持 於頂〇 4a上之版、印刷對象蓉 ....... v 專之未圖不的工件移動，就可 針對上述工件在χ、γ、Θ 之一軸方向進行位置修正。 上移^荷沿料動負荷方向l而作用於 著移動n未®示的工件之情況時，也可利用沿 者移動負何方向L依庠toae - ,.ρ 1>m 吁配置而形成交差錯開狀配置之各驅 動卓兀14C，14D、支拉留_ 付早70 13、各驅動單元14A，14B連 續地承艾作用於該頂a 夂 nl.. 〇 a之上述移動負荷。因此，可提高 船直方向的剛性，可、读〆 二植品傲r 他上述頂台4a受上述移動負荷作用 而撓曲邊形之變形量。 .u而’可減低由於該頂台4a的變形 而使付上述未圖示的 件發生位置偏移之可能性。 g μ古本發明< _準台係藉由具備有沿著 Υ軸方向的 滾珠螺柃直線運動機檨 # 稱9之兩個驅動單元14Α，14Β、及具 I ι:Χ軸方向的滾珠螺桿直線運動機構 9之兩個驅動 卓元141，14D而使頂& / 只α 4a移動。因此，可使沿著X軸方 22 322071 201102273 向之水平方向剛性與沿著γ轴方向之水平方向剛性相等。 因此，可在移動負荷作用於上述頂台4a所保持之未圖 示的工件之狀態下使上述頂台4a移動而進行上述未圖示 的工件之位置修正時，防止在X軸方向的移動及在Y軸方 向的移動上發生偏斜之可能性。因而，可對於上述未圖示 的工件進行所希望的位置修正。 另外，本發明之對準台係利用設於上述各驅動單元14 A， 14B，14C，14D的外部之光學尺19而對上述各驅動單元14A， 14B，14C，14D進行光學尺回授控制。因此，即使作用於 上述頂台所保持之未圖示的工件之移動負荷成為外力而作 用於上述各驅動單元14A，14B，14C，14D的各滾珠螺桿直 線運動機構9，使得該各滾珠螺桿機構9的螺桿軸11、螺 帽構件12等推力傳遞部發生撓曲變形或出現喀噠聲等，也 可不受其影響而使各驅動單元14A，14B，14C，14D的導塊 16移動到利用上述光學尺19而檢測出之所希望的位置。 因此，可進行上述頂台4a之高精確度的位置控制。 另外，本發明之對準台係使作為各驅動單元14A，14B， 14C，14D的各滾珠螺桿直線運動機構9的驅動源之各伺服 馬達10，全部向底座1的外周側突出而配置。因此，可使 該各伺服馬達10所發出的熱有效率地發散到周圍的空氣 中。因而，可抑制起因於上述各伺服馬達10的發熱所致之 上述底座1或頂台4a的熱變形。因此，可減低因上述底座 1或頂台4a的熱變形的影響而使得上述頂台4a所保持的 工件發生位置偏移之可能性。 23 322071 201102273 如以上所述，根據本發明之對準台，就可直接以進行 過X γ、6»二軸方向的尚精確度定位後的狀態保持會有移 動負荷作用於其上之工件。而且，即使在移動負荷作用中 的狀態下也可高精確度地使上述未圖示的工件在χ、γ、0 三軸方向進行高精確度的位置修正。 接著，第6圖顯示本發明之實施的另一形態。該實施 形態係變更第1至第5圖所示的實施形態中之底座丄與頂 台4a之間的單元的配置者。亦即，在第1至第5圖所示的 $施形態中’係於底座i與頂台4a之間，以形成為在與負 荷移動方向L垂直的方向排列的單元的數目從負荷移動方 向L的上游側開始依序為兩個_一個-兩個之交差錯閘狀配 置之方式，在與上述頂台4a的四個角部及中央對應之位置 配置各驅動單元14A，14B，14C，14D及支持單元13。第6 圖所示的實施形態則是改變該配置，以形成為在與負荷移 動方向L垂直的方向排列的單元的數目從負荷移動方向l 的上游側開始依序為—個_兩個_ —個之交差錯開狀配置之 ^式’，將四個驅動單幻4A，⑽，14C：，14D分別配置在連 結上述頂台4a的各邊的中間位置與該頂台知的中央之四 條線的各線上^ 、 以Λ著負荷移動方向L形成為交差錯開狀配置之方 依f配置之負荷移動方向L上游側的-個驅動單元i4A、 2何移動方向L t間部的兩個驅動單元14C，14J)、負荷移 旋S承ΥΓΓ上的十一低驅動單元14β’係以各驅動單元的 在上述負荷移動方向L所佔的區域Μ彼此略 32207] 24 201102273 ‘為重疊之形態配置。此外’雖未圖示，但沿著上述的負荷 移動方向L而以交差錯開狀配置依序配置之驅動單元 14A'驅動單元14C，14D、及驅動單元UB各自的旋轉軸 承8之在負荷移動方向L所佔的區域M彼此之間，亦可形 成有尺寸在比作用於頂台4a所保持的未圖示的工件之移 動負荷的寬度窄的範圍内之間隙。 除了以上所述的元件之外，對於與第丨至第5圖所示 者相同的構成要素都標註相同的符號。Yigu Drive|Yuan 14A HR The movement of the tit16 of the dome 2D is combined (synthesized), so that the top 4a-side can be horizontally moved in the χ-γ plane. As described above, according to the alignment of the present invention, .Y v ^ _ σ is maintained by combining the horizontal movement of the top table 4a within the XY plane, the rotation of the ^ , , /, and the rotation angle Θ The plate on the top cymbal 4a, the printing object 蓉....... v The workpiece is moved without any figure, and the position correction can be performed on one of the χ, γ, Θ axes of the workpiece. When the upper load is moved along the direction of the dynamic load of the material and acts on the workpiece that is moved by n, the direction of the movement of the edge can also be used to form a cross by relying on the toae - , . ρ 1 > m Each drive unit 14C, 14D, pull stay _ pay early 70 13 in the staggered configuration, and each drive unit 14A, 14B continuously acts on the above-mentioned moving load of the top a 夂nl.. 〇a. Therefore, the rigidity in the straight direction of the ship can be improved, and the amount of deformation of the above-mentioned top table 4a by the above-mentioned moving load can be flexed. The 'u' can reduce the possibility of shifting the position of the above-mentioned unillustrated member due to the deformation of the top table 4a. g μ ancient invention < _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The two of the linear motion mechanisms 9 drive the elements 141, 14D to move the top & / α 4a only. Therefore, the horizontal direction rigidity along the X-axis side 22 322071 201102273 can be made equal to the horizontal direction along the γ-axis direction. Therefore, when the top table 4a is moved while the moving load acts on the workpiece (not shown) held by the top table 4a, the position correction of the workpiece (not shown) can be prevented, and the movement in the X-axis direction can be prevented. The possibility of skewing in the movement in the Y-axis direction. Therefore, the desired position correction can be performed on the workpiece (not shown). Further, in the alignment stage of the present invention, optical scale feedback control is performed on each of the drive units 14A, 14B, 14C, and 14D by optical scales 19 provided outside the respective drive units 14 A, 14B, 14C, and 14D. Therefore, even if the moving load of the workpiece (not shown) held by the above-described top table acts as an external force, the respective ball screw linear motion mechanisms 9 of the respective drive units 14A, 14B, 14C, and 14D are caused to make the respective ball screw mechanisms 9 The thrust transmitting portion such as the screw shaft 11 and the nut member 12 is flexibly deformed or clicked, and the guide block 16 of each of the driving units 14A, 14B, 14C, and 14D can be moved to the above-mentioned optical without being affected by the above. The ruler 19 detects the desired position. Therefore, the position control of the above-described table 4a with high precision can be performed. Further, in the alignment stage of the present invention, all of the servo motors 10, which are driving sources of the respective ball screw linear motion mechanisms 9 of the respective drive units 14A, 14B, 14C, and 14D, are arranged to protrude toward the outer peripheral side of the chassis 1. Therefore, the heat generated by each of the servomotors 10 can be efficiently dissipated into the surrounding air. Therefore, thermal deformation of the base 1 or the top table 4a due to heat generation of each of the servo motors 10 described above can be suppressed. Therefore, the possibility that the workpiece held by the above-mentioned table 4a is displaced by the influence of the thermal deformation of the above-described base 1 or the top table 4a can be reduced. 23 322071 201102273 As described above, according to the alignment table of the present invention, it is possible to directly maintain the workpiece to which the moving load acts on the state in which the X γ and 6» directions are accurately positioned. Further, even in a state in which the moving load is applied, the workpiece (not shown) can be highly accurately corrected in the three axes of χ, γ, and 0 with high accuracy. Next, Fig. 6 shows another embodiment of the practice of the present invention. This embodiment is a configuration in which the unit between the base cymbal and the abutment 4a in the embodiment shown in the first to fifth embodiments is changed. That is, in the embodiment shown in the first to fifth figures, the relationship between the base i and the top table 4a is such that the number of cells arranged in the direction perpendicular to the load moving direction L is from the load moving direction. The upstream side of L is sequentially arranged in a manner of two _ one-two cross-disconnections, and each of the driving units 14A, 14B, 14C is disposed at a position corresponding to the four corners and the center of the top table 4a. 14D and support unit 13. The embodiment shown in Fig. 6 is to change the configuration so that the number of cells arranged in the direction perpendicular to the load moving direction L is sequentially from the upstream side of the load moving direction l to one_two__ In the case of an error-disconnected configuration, four driving single phantoms 4A, (10), 14C:, and 14D are respectively disposed at an intermediate position connecting the sides of the top table 4a and the center of the top table. Each of the wires ^, the two driving units 14C between the one driving unit i4A, 2 on the upstream side of the load moving direction L and the moving direction L t in the load moving direction L, which is arranged in the direction of the load moving direction L 14J), the eleventh low drive unit 14β' on the load transfer S is configured such that the regions occupied by the drive units in the load movement direction L are slightly overlapping with each other 32207] 24 201102273 '. Further, although not shown, the drive unit 14A' drive units 14C, 14D and the rotary unit 8 of the drive unit UB are arranged in the load moving direction in the load shift direction L as described above. The region M occupied by L may be formed with a gap having a size narrower than the width of the moving load of the workpiece (not shown) held by the top table 4a. The same components as those shown in the fifth to fifth embodiments are denoted by the same reference numerals except for the above-described elements.
&根據本實施形態，也可得到與W至第5圖的實施形 態同樣的效果。而且’可使上述四個驅動單元14A 14B，14C 14D彼此之間更接近而配置’所以可形成為在要應用於平 面形狀更小尺寸的對準台之情況很有利之構成。 本發明並不只限定於上述實施形態，可在本發明的要 旨的範圍内做適當的變更。例如’第！至第5圖的實施形 態係將頂台4a作成為方形，並將—個支持單元13及四個 驅動單元14A，14B，14C，14D配置在以上述頂台乜的中 央為中心之四重旋轉對稱（4-fold r〇tati〇nai symmetry) 之位置。然而，亦可對應於作為支持對象之未圖示的工件 的平面形狀，而放大上述頂台4a的平面形狀，或形成為長 方形。在此情況，可增加配置在上述頂台4a的四個角部的 各驅動單元14A，14B，14C，14D之間之支持單元13的個 數。亦即，在例如上述頂台4a的尺寸很大之情況時，可形 成為各驅動單元14A，14B，14C，14D及支持單元13之在 與負荷移動方向L垂直的方向排列的單元數，從負荷移動 322071 25 201102273 方向L的上游側開始依序 之交差錯開狀配置。此二為在—上個;… , τ „ E 在上魂頂台4a為沿著負荷移動 ⑽㈣況時’可形成為各驅動單元14A， 14B，14C，14D及支持單开μ * 0〇 - ^早兀13之在與負荷移動方向L·垂直 ’從負荷移動方向L的上游側開始依 = 個-兩個―個-兩個等之交差錯開狀配置。另 述頂台如為沿著與負荷移動方向 L垂直的方向較 ^方㈣if況時’可形成為各驅動單元他風Κ 。及支持單^ 13之在與負荷移動方向L垂直的方向排列 的單7C數從負相動方向L的上游側開始依序為三個一 兩個-三個、或四個〜三個一四個等之交差錯開狀配置。 另外亦可如第7圖所示，將介設在底座i與頂台乜 之間=四個驅動單元14A，14B，uc，⑽配置成：將該各 驅動單7L14A，14B’ 14C，14D的旋轉軸承8連結起來而形 成的四\形相對於負荷移動方向L傾斜低於45度的所需角 度。亦可藉由這樣的配置，形成為上述各驅動單元l4A，⑽， HC，14D相對於負荷移動方向L為左右不均等的交差錯開 =配置。而且，形成為如上述第7圖所示的配置之情況時， ，、要配置成上述各驅動單元14A 14B 14C 中 著負荷移動方向個位置之㈣單元14^ 14D的各旋轉軸承8之在上述負荷移動方向[所佔的區域m 彼此略為重疊之形態即可。或者，只要形成為驅動單元Μ 及14D的各旋轉軸承8之在上述負荷移動方向L所佔的區 域Μ彼此之間，形成有尺寸比作用於頂台4a所保持的未圖 322071 26 201102273 示的工件之移動負荷的 亦可與第8及第q固又 間隙這樣的配置即可。 、 不y圆所示的 ' 3B，3C同樣地，將支持單/、、足持單元2與驅動單元3A， 14D中之可在正交的&元13與驅動單元14A，14B，14C， 乂的兩方向滑 段直線運動導件5a的導塊 勒之導件’分別形成為在下 的導軌6b之構成。 7a上安I上段直線運動導件5b 二 =:::;高，作用於頂… ® ^ - Α °Λ頂台4a的鉛直方向的剛性，且 址 乍用的狀態下對頂台4a所保持的 上述未圖不的工件進行位 τ A Υ 置t正，因此，即使在上述頂台 4a中於X軸方向與γ轴太 釉方向之水平方向剛性有差異也不會 * σ 、可將上述各實施形態中之各驅動單元"A， 14B，14C，14D中的任_個更換為支持單元13。 雖然以形成為在各驅動單元14A，14B，ue，⑽安裝 外部的鮮尺19，*可對於沿著下段導軌15之導塊Μ的 移，進行光學尺回授控制之構成為佳。但是，若上述各驅 動單元14A，14B，14C，14D的各滾珠螺桿直線運動機構9 的螺桿軸11的剛性等該各滾珠螺桿直線運動機構9的機械 性的剛性夠高，即使作用於上述頂台4a所保持的未圖示的 工件之移動負荷成為外力而作用於上述各滾珠螺桿直線運 動機構9，也不易在該各滾珠螺桿直線運動機構9的推力 傳遞部發生撓曲變形或出現喀噠聲等的話，則可形成為根 據各滾珠螺桿直線運動機構9的伺服馬達1〇所内建的編碼& According to the present embodiment, the same effects as those of the embodiment of W to Fig. 5 can be obtained. Further, the above-described four drive units 14A 14B, 14C 14D can be arranged closer to each other, so that it can be formed to be advantageous in the case where it is applied to an alignment table having a smaller planar shape. The present invention is not limited to the above embodiments, and can be appropriately modified within the scope of the gist of the invention. For example, 'No! In the embodiment of Fig. 5, the top table 4a is formed in a square shape, and the support unit 13 and the four drive units 14A, 14B, 14C, and 14D are disposed in a quadruple rotation centering on the center of the top table The position of the symmetry (4-fold r〇tati〇nai symmetry). However, the planar shape of the top table 4a may be enlarged or formed in a rectangular shape in accordance with the planar shape of the workpiece (not shown) as a support object. In this case, the number of the support units 13 disposed between the respective drive units 14A, 14B, 14C, and 14D at the four corners of the above-described stage 4a can be increased. In other words, for example, when the size of the top table 4a is large, the number of cells of each of the driving units 14A, 14B, 14C, 14D and the supporting unit 13 arranged in the direction perpendicular to the load moving direction L can be formed. Load movement 322071 25 201102273 The upstream side of the direction L starts to be arranged in an orderly manner. The second is in - the last; ..., τ „ E when the upper soul table 4a is moved along the load (10) (four), 'can be formed as each drive unit 14A, 14B, 14C, 14D and support single open μ * 0〇- ^ The early stage 13 is arranged in the direction of the load moving direction L·vertical 'from the upstream side of the load moving direction L according to the intersection of = two - two - two, etc. The direction in which the load moving direction L is perpendicular is smaller than the square (four) if the condition can be formed as the driving unit, and the single 7C number of the supporting unit 13 arranged in the direction perpendicular to the load moving direction L is from the negative phase moving direction L. The upstream side begins to be arranged in an order of three to two - three, or four to three, four, etc. Alternatively, as shown in Fig. 7, it will be placed on the base i and the top. Between the cymbals = four drive units 14A, 14B, uc, (10) are arranged such that the four-shaped shape formed by connecting the rotary bearings 8 of the respective drive sheets 7L14A, 14B' 14C, 14D is inclined with respect to the load moving direction L The required angle at 45 degrees can also be formed into the above-mentioned respective driving units 14A, (10), HC, 1 by such a configuration. 4D is an offset/displacement of the left-right unevenness with respect to the load movement direction L. Further, when the arrangement is as shown in the above-described seventh embodiment, the load is moved in the respective drive units 14A, 14B, 14C. The respective rotary bearings 8 of the (4) unit 14^14D in the direction of the direction may be in the above-described load moving direction [the occupied regions m may slightly overlap each other. Alternatively, as long as the respective rotary bearings 8 of the driving units Μ and 14D are formed The area Μ occupied by the load moving direction L is formed with a size smaller than the moving load of the workpiece, which is not shown in the figure 322071 26 201102273, which is held by the top table 4a, and the eighth and the second solid and the gap. Such a configuration can be, and the '3B, 3C, which is not shown by the y circle, will support the single/, the holding unit 2 and the driving units 3A, 14D in the orthogonal & 14A, 14B, 14C, the guides of the two-direction sliding section linear motion guide 5a are formed as the lower guide rail 6b. 7a upper I upper linear motion guide 5b II:::: High, acting on the top... ® ^ - Α °Λ 4a is rigid in the vertical direction, and the position of the above-mentioned unillustrated workpiece held by the top table 4a is positively set in the state of being used, so that even in the above-mentioned top table 4a in the X-axis direction In the horizontal direction rigidity of the γ-axis glaze direction, there is no difference in σ, and any of the drive units "A, 14B, 14C, and 14D in each of the above embodiments may be replaced with the support unit 13. It is preferable to form a fresh ruler 19 to be mounted on each of the drive units 14A, 14B, ue, and (10), and it is preferable to perform optical scale feedback control for the movement of the guide block 沿着 along the lower guide rail 15. However, the mechanical rigidity of each of the ball screw linear motion mechanisms 9 of the respective ball screw linear motion mechanisms 9 of the respective drive units 14A, 14B, 14C, and 14D is sufficiently high, even if it acts on the top. The moving load of the workpiece (not shown) held by the table 4a acts as an external force and acts on each of the ball screw linear motion mechanisms 9, and it is also difficult to cause deflection or deformation of the thrust transmitting portion of each of the ball screw linear motion mechanisms 9. If the sound is equal, it can be formed as a code built in according to the servo motor 1 of each ball screw linear motion mechanism 9.
器的訊號，來控制導塊16沿著該各驅動單元ί4Α，MC 322071 27 201102273 140之下段導軌^㈣之構成。 從散熱的觀點來看作為各 14D的各滾珠螺標古站 干凡ΜΛ，i415，14C， 10係最好配置運動機構9的之各伺服馬達 夏战向底座1的外侧突出。麸 馬達10的發熱量遠 …、而右該各伺服 熱容量小，或者若各 頂台化等構成部件的 對準台的外部之馬達另外具備有用來將熱散出到 疋散熱機構等，因而不會有由 螺桿直線運動機構ιηΑ^有由於上边各滚珠 述底座卜頂台^等熱㈣響而使得上 =r:構，移之虞時，可將= 螺杯直線運動機構9的伺服馬達1〇配置在底 4a之間。 』貝口 用來使各驅動單元14A，14B，14C，UD的各 =T16a_著下段導執15的長度方向移動之直 線運動機構，只要是滿足以下的 ㈣之直 螺桿直線運動機構g以外之任^ 、j亦可採用滾珠 即，即使作用於頂台4a之移動式的直線運動機構。亦 線運動機構，也可保持對應的導、纟荷成為外力而作用於該直 需要而在作用於頂台4a之移動6的位置。並且，可依 狀態下驅動對應的導塊16。負何成為外力而作用中的 只要是必須保持會有移動負 行工件的對準者皆適合採用本發日。了乍用於其上之工件而進 來保持膠版印刷裝置中的版或£明，本發明亦可用作為用 何機械、裝置的對準台。2 P刷對象之對準台以外之任 322071 201102273 除了以上所述者之外，無庸說，本發明還可在未脫離 本發明的要旨之範圍内進行種種變更。 [產業上的可利用性] 根據本發明之對準台，即可直接以進行過X、γ、0三 軸方向㈣精確度定位後的狀態保持會有移動負荷作用於 其上之工件。而且，即使在移動負荷作用中的狀態下也可 使上述工件在χ、γ、Θ三軸方向進行高精確度的位置修正。 因此，可利用於用來進行承受移動負荷之工件的對準之對 準台。 【圖式簡單說明】 第1圖係顯示本發明的對準台的實施的一個形態之局 部切斷概略平面圖。 ° 第2圖係第1圖之對準台的概略侧面圖。 第3Α圖係第1圖之對準台之中的支持單元的切斷平 圖。 第3Β圖係第3Α圖之Α-Α箭號方向視圖。 第3C圖係第3Α圖之Β-Β箭號方向視圖。 第 圖。 4Α圖係第1圖之對準台之中的驅動單元的切斷平面 第4Β圖係第4Α圖之C-C箭號方向視圖。 第4C圖係第4Α圖之D-D箭號方向視圖。 第5圖係顯示第1圖之對準台之中與負荷移動方向相 關之支持單元及各驅動單元的配置之概要圖。 第6圖係顯示本發明之實施的另一形態之概略平面 32207] 29 201102273 圖。 第7圖係顯示第6圖的實施形態的應用例之概略平面 圖。 第8圖係顯示以往提出的對準台之一例的概要之局部 切斷斜視圖。 第9圖係放大顯示第8圖之對準台之中的驅動單元之 斜視圖。 【主要元件符號說明】 1 底座 2 支持單元 3A、3B 、3C驅動單元 4 ' 4a 頂台 5a、5b 直線運動導件 6a、6b 導軌 7a、7b 導塊 8 旋轉轴承 9 滾珠螺桿直線運動機構（直線運動機構） 10 伺服馬達（馬達） 11 螺桿軸 12 螺帽構件 13 支持單元 14A、14B、14C、14D 驅動單元 15 下段導軌（導件） 16 導塊（導件） 16a 下段導塊 16b 上段導塊 17 上段導轨（導件） 18 連結構件 19 光學尺 L 負何移動方向 Μ 區域 30 322071The signal of the device is used to control the guide block 16 along the drive unit ί4Α, MC 322071 27 201102273 140 lower section rail ^ (four). From the viewpoint of heat dissipation, each of the 14D ball screw ancient stations, the I415, 14C, and 10 series, is preferably equipped with the servo motor 9 for each servo motor. The heat output of the bran motor 10 is far away, and the servo heat capacity of the right side is small, or the motor outside the alignment stage of the components such as the topping is additionally provided to dissipate heat to the heat dissipation mechanism, and thus There will be a linear motion mechanism of the screw ιηΑ^ There is a thermal motor (four) ringing due to the upper side of the ball, and the upper = r: structure, when moving, the servo motor 1 of the linear motion mechanism 9 of the screw cup can be 〇 is arranged between the bottom 4a. The linear motion mechanism for moving the respective drive units 14A, 14B, 14C, and UD to the length direction of the lower stage guide 15 is as long as it satisfies the following (4) straight screw linear motion mechanism g. Any of them, j, or a ball, that is, a movable linear motion mechanism acting on the top table 4a. The linear motion mechanism can also maintain the corresponding guide and load as external forces and act on the position of the movement 6 acting on the top table 4a. Also, the corresponding guide block 16 can be driven in a state. What is the role of the external force? As long as it is necessary to keep the workpiece with the moving negative workpiece, it is suitable to use this date. The present invention can also be used as an alignment table for a machine or device in order to maintain the plate or the like in the offset printing apparatus. In addition to the above, it is to be understood that the present invention may be variously modified without departing from the spirit and scope of the invention. [Industrial Applicability] According to the alignment table of the present invention, it is possible to directly hold the workpiece to which the moving load acts on the state in which the X, γ, and 0 triaxial directions (4) are accurately positioned. Further, the workpiece can be highly accurately corrected in the three axes of χ, γ, and Θ even in a state in which the moving load is applied. Therefore, it can be utilized for the alignment of the workpiece for carrying the load. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view showing a partial cut of an embodiment of an alignment stage according to the present invention. ° Fig. 2 is a schematic side view of the alignment table of Fig. 1. Fig. 3 is a cut-off plan view of the support unit in the alignment stage of Fig. 1. The third figure is the view of the arrowhead in the third figure. The 3C figure is the view of the arrowhead of the 3rd figure. Figure. 4Α图图 The cutting plane of the drive unit in the alignment table of Fig. 1 is the C-C arrow direction view of Fig. 4 . Figure 4C is a view of the D-D arrow direction of Figure 4. Fig. 5 is a schematic view showing the arrangement of the support unit and each of the drive units in the alignment stage of Fig. 1 in relation to the direction in which the load is moved. Fig. 6 is a view showing a schematic plane 32207] 29 201102273 of another embodiment of the practice of the present invention. Fig. 7 is a schematic plan view showing an application example of the embodiment of Fig. 6. Fig. 8 is a partially cutaway perspective view showing an outline of an example of an alignment table which has been proposed in the past. Fig. 9 is an enlarged perspective view showing the drive unit in the alignment stage of Fig. 8. [Main component symbol description] 1 Base 2 Support unit 3A, 3B, 3C Drive unit 4 ' 4a Top table 5a, 5b Linear motion guides 6a, 6b Guide rails 7a, 7b Guide block 8 Swivel bearing 9 Ball screw linear motion mechanism (straight line Motion mechanism) 10 Servo motor (motor) 11 Screw shaft 12 Nut member 13 Support unit 14A, 14B, 14C, 14D Drive unit 15 Lower rail (guide) 16 Guide block (guide) 16a Lower guide block 16b Upper guide block 17 Upper guide rail (guide) 18 Connecting member 19 Optical rule L Negative movement direction 区域 Area 30 322071