201036709 六、發明說明： 【發明所屬之技術領域】 本發明係有關於—種液幕形成裝置，尤指— 重液幕，可使液體均勻塗佈物件上之裝置。 也成雙 【先前技術】 〇 ❹ 按’習知基板製程包括有塗佈、清洗 基板置放於滾輪紐_輸送裝置上，藉 =^將 板移動，、並於基板移動路徑之上方設置液幕裝置裝動基 裝置形成液幕’當基板通過縣時，可進行、:液幕 塗佈而言，必須將塗佈液均勻塗佈於基板表面，就^^就 則必須能夠將水或清潔劑全面地喷·基板表面，3， 液幕裝置為單層液幕，必須精確控制液體輪送壓力Ί〜般 形成織液幕容易出現斷開或不均句之狀況，因而=所 佈不均或清洗不完全。 ^^反塗 【發明内容】 種液幕形成裝置 有鑑於習知技術之缺失，本發明提出 及液幕形成方法’可形成雙重均勻液幕。 為達到上述目的，本發明提出—種液幕形絲置及 形成方法，該液幕形成裴置包括一本體、—貫穿部、—上 室及複數下腔室，該上腔室設置於本體内部上方，該貫 貫穿該本體且連通上腔室，該複數下腔室包括並列之二第一 下腔室與一第二下腔室，該等下腔室設置於本體内部之該上 4 201036709 腔室下方’該第-下腔室與上腔室相 本體底部具有一長型第一透介邱，且弟卜股至 逐工邵該第二下腔室盥上腔室相 連通，且第二下腔室與本體底邻且 卜腔至/、上腔至相 也一〇 一一 、 展邛具有—長型第二透空部，該 丨概呈千订；將液體由貫穿部輸入 該上腔室且分別流入該等下肿言 a v 卞卜腔至’再分別由第一透空部及第 二透空部&出形成一第一液幕及—第二·、夜幕 Ο 為使Λ審查委員對於本發明^構目的和功效有更進 -步之了解與$同’兹配合圖示詳細說明如后。 【實施方式】 以下將__之圖絲描述本㈣為達成目的所使用 的技術手段^功效，而以下圖式所列舉之實施例僅為輔助說 月以利貝審查委員瞭解，但本案之技術手段並不限於所列 舉圖式。 〇月參閱第-圖至第五圖所示’本發明所提供之液幕形成 〇裝置100，其包括由一分隔元件10、一$-^0# 20 第二腔室元件30所構成之本體。 . 該分隔元件10具有相對之第-表面11及-第二表面 12，於該分隔元件10設有複數孔洞13貫穿該第一表面11及 一第二表面12。 該第一腔室元件20係設置於該分隔元件1〇之第一表面 11，於该第一腔室元件2〇之一面設有一第一上腔室21以及 一第一下腔室22(如第三圖所示），該第一上腔室21及第一下 腔室22係由該第一腔室元件2〇表面凹陷於該第一腔室元件 201036709 20内一定深度HI、H2(如第五圖所示），該第一腔室元件20 設有第一上腔室21及該第一下腔室22之一面係朝向該分隔 元件10之第一表面11且與該第一表面11具有一定間距D1(如 第五圖所示），該第一上腔室21係對應於該分隔元件10之孔 洞13之位置設置，且該第一腔室元件20具有一貫穿部23， 該貫穿部23係貫穿該第一腔室元件20且連通該第一上腔室 2卜 如第一圖所示，該第二腔室元件30係設置於該分隔元件 10之第二表面12，於該第二腔室元件30之一面設有一第二 上腔室31以及一第二下腔室32，該第二上腔室31及第二下 腔室32係由該第二腔室元件30表面凹陷於該第二腔室元件 30内一定深度H3、H4(如第五圖所示），該第二腔室元件30 設有第二上腔室31及該第二下腔室32之一面係朝向該分隔 元件10之第二表面12且與該第二表面12具有一定間距D2(如 第五圖所示），且該第二上腔室31係對應於該分隔元件10之 孔洞13之位置設置。 於該第一腔室元件20與該分隔元件10之間，以及該第 二腔室元件30與該分隔元件10之間分別設有一墊片40a、40b 提供密封作用，該墊片40a、40b係呈”门”型’使該第一腔 室元件2 0與該分隔元件10之間之兩侧及頂部呈封閉狀態（如 第二圖所示），且該第二腔室元件30與該分隔元件10之間之 兩側及頂部呈封閉狀態（如第三圖所示），該墊片40a、40b具 有一定厚度，用以提供該第一腔室元件20與該分隔元件10 之間具有一定間距D1，該第二腔室元件30與該分隔元件10 之間具有一定間距D2(如第五圖所示）。 6 201036709 該第一腔室元件2〇係連接一管路元件50，該管路元件 50具有一通道51，該通迢51之—端係連通該第一腔室元件 -20之貫穿部23，該通道51之另—端係提供液體輸入該通道 .51，該通道51提供液體輸入之一端設有内螺紋52，該内螺紋 52係提供與具有外螺紋之液體輪送管路（圖中未示出）相螺 合，使液體（如第五圖虛線箭頭所示）可經由該通道51及貫穿 部23流入該第一上腔室20、孔洞13及第二上腔室3〇，同樣 0地，於該管路元件50與第一腔室元件20之間可設置墊片53, 以防止液體渗漏，而該管路元件5〇之設置數目不限，依該第 一腔至元件20之尺寸長度而定，本實施例係對稱設置二個。 由。第五圖可知，藉由該孔洞13之設置，使該第一上腔室 20及第二上腔室30相互貫通形成一上腔室，該孔洞13所設 置之數量及位置係依該第一上腔室2〇及第二上腔室3〇之形 狀不同而設計，而該第一上腔室2〇及第二上腔室3〇之形狀 則依實際該液幕形成裝置刚之形狀或尺寸不同而設計，於 〇本實施例中，該第一上腔室2〇及第二上腔室30均呈長條狀， 因此该孔洞13係對應該第一上腔室2〇及第二上腔室3〇之位 • 置設置複數個且橫向排列成一行。 .„ :二藉由該塾片4〇a、40b之設置，使得該第一腔室元 告p弟一腔室元件30與該分隔元件10之間無法完全貼 第五圖所7^，該第—腔室元件20與該分隔元件1〇之 間具^一定間距Di，該第二腔室元件3〇與該分隔元件1〇之 間具fr定間距D2,使得該第一下腔室22與第-上腔室21， ，及β第—下腔室32與第二上腔室Μ係呈現相連通之狀 心< ν員強凋的疋，該間距Di、D2小於該第一上腔室21、第 7 201036709 一下腔室22、第二上腔室31及第二下腔室32之深度HI〜Μ， 換言之，該間距Dl、D2之大小係可取決於該塾片4〇a、40b 之厚度或墊片40a、40b設置之片數。 〇 〇 由於該分隔元件10、第一腔室元件2〇、第二腔室元件3〇 均呈長條狀，因此§亥第一下腔室2 2與該分隔元件1〇之底部 可形成一長型之第一透空部24 ’該第二下腔室32與該分隔元 件10之底部可形成一長型之第二透空部33,且該第二透空部 33與該第一透空部24概呈平行。 如第五圖所示，將所需液體（如清潔液或塗佈液等液體） 由該管路元件50之通道51輪入，液體可通過貫穿部23進入 並蓄積該第一上腔室21、孔洞13及第二上腔室31，藉由液 體持續輸送所產生之壓力推送，液體可由第一上腔室21及第 一上腔至31分別流入並蓄積於該第一下腔室22及第二下妒 室32内，而後該第一下腔室22内之液體由該第一透空部^ 流出形成一第一液幕W卜且該第二下腔室32内之液體由該 第二透空部23流出形成-第二液幕W2,如第四圖及第五圖所 不，於該液幕形成裝置1〇〇下方一定距離設有一基板6〇，嗜 基板60係置放於滾輪或滾轴等輸送裝置（圖中未示出）上，^ =輸送裝置鶴基板6G移動，並於基板⑼移動路徑之上^ 設置該液幕形絲置1GG ’縣板6G之轉方向係由驾二 腔室元件30朝向該第-腔室元件20之方向移動，由㈣= 由第-上腔室21及第-下腔室22祕式#積後形成液 ^卜以及經由第二上腔室31及第二下腔室％兩段 後形成液幕W2 ’亦即該液幕Π、W2係透過兩段式壓力推、、/ 因此可提供液幕I W2之完整性，不致產生液幕斷^ 8 201036709 之現象’同日’本發明之雙重液幕W1、W2設計，更可破保液 體全面地佈滿該基板60表面，不致產生塗佈不均之現象.此 - 外’必須说明的疋’请參閱第一、四、六圖，本發明所提件 ， 之液幕形成裝置100，該分隔元件10、第一腔室元件20、第 二腔室元件30、墊片40a、40b以及該管路元件50係以螺检 70、80(圖中僅以一螺栓70、80代表之）相互鎖固為一體，於 該分隔元件10、第一腔室元件20、第二腔室元件3〇、墊片 0 40a、4牝以及該管路元件50對應螺栓70、80鎖入處必需設 置螺孔，在此不予贅述，本發明之特點在於，且該螺栓7〇係 以朝向該第一腔室元件20之方向螺入，依序再螺合該墊片 40a、該分隔元件1〇、墊片4〇b以及該第二腔室元件3〇，且 »亥螺检70螺入s玄第二腔室元件3〇 —定深度但不貫穿該第一 腔室元件30，同樣地，該管路元件50與該第一腔室元件2〇 係以螺栓80(圖中僅以一螺栓80代表之）鎖合，且該螺栓8〇 係由該管路元件50朝向該第一腔室元件20之方向螺入，其 〇 目的在於，可使得該液幕形成裝置100之背面，亦即該第^ 腔室元件30之外表面維持一完整之平面，因此，當可確保= ，體不致由該液幕形成裝置1〇〇之背面滲漏，提高液體使用率， 無用之消耗’至於設置於第二腔室S件30兩側邊之長型 係提供藉由螺栓（圖中未示出）穿設將該液幕形成褒置 外^位於所需位置處’且該長型孔34位於紐流動之路徑 外’因此不致對液體造成任㈣漏。 開不連續之現Γ 叫供縣完整性，不致產生液幕斷 連-之現象，同時，本發明之雙重液幕設計，更可確保 201036709 ^ 液體全面地佈滿該物件表面，不致產生塗佈不均之現象。 惟以上所述者，僅為本發明之實施例而已，當不能以 之限定本發明所實施之範圍。即大凡依本發明申請專利範 ' 圍所作之均等變化與修飾，皆應仍屬於本發明專利涵蓋之 • 範圍内，謹請貴審查委員明鑑，並祈惠准，是所至禱。 ❹ 〇 10 201036709 【圖式簡單說明】 第一圖係本發明之分解結構圖。 第二圖係本發明之第二腔室元件結合墊片之組合結構示 意圖。 * 第三圖係本發明之各構件之配合關係結構示意圖。 第四圖係本發明之組合結構及配合基板之示意圖。 第五圖係第四圖之A-A剖面圖。 第六圖係本發明之背面組合結構圖。 〇 【主要元件符號說明】 100-液幕形成裝置 10- 分隔元件 11- 第一表面 12- 第二表面 13- 孔洞 20- 第一腔室元件 21- 第一上腔室 22- 第一下腔室 23- 貫穿部 24- 第一透空部 30- 第二腔室元件 31- 第二上腔室 32- 第二下腔室 33- 第二透空部 11 201036709 34-長型孔 40a、40b-墊片 50- 管路元件 51- 通道 5 2-内螺紋 53-墊片 60-基板 70、80-螺栓201036709 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a liquid curtain forming apparatus, and more particularly to a heavy liquid curtain, which can uniformly apply a liquid to a device. Also in pairs [Prior Art] 〇❹ Pressing 'the conventional substrate process includes coating and cleaning the substrate placed on the roller _ conveying device, moving the plate by ^^, and setting the liquid curtain above the substrate moving path The device is mounted on the base device to form a liquid curtain. When the substrate passes through the county, it can be carried out: in the case of liquid curtain coating, the coating liquid must be uniformly applied to the surface of the substrate, so that it is necessary to be able to apply water or detergent. Fully sprayed on the surface of the substrate, 3, the liquid curtain device is a single-layer liquid curtain, and the liquid transfer pressure must be precisely controlled. The formation of the weaving liquid curtain is prone to break or unevenness, so that the cloth is uneven or Cleaning is not complete. ^^ 反涂 [Summary] Liquid curtain forming apparatus In view of the lack of the prior art, the present invention and the liquid curtain forming method ' can form a double uniform liquid curtain. In order to achieve the above object, the present invention provides a liquid curtain forming and forming method, the liquid curtain forming device comprising a body, a through portion, an upper chamber and a plurality of lower chambers, the upper chamber being disposed inside the body Above, the penetrating through the body and communicating with the upper chamber, the plurality of lower chambers comprising two first lower chambers and a second lower chamber, the lower chambers being disposed on the upper portion of the body Below the chamber, the first lower chamber and the upper chamber phase have a long first transparent medium at the bottom of the main body, and the second and second chambers are connected to each other, and the second lower chamber is connected to the upper chamber. The lower chamber is adjacent to the bottom of the body, and the cavity to the /, the upper cavity to the phase is also one by one, and the display has a long second hollow portion, the crucible is in a thousand order; the liquid is input from the through portion The chambers are respectively flown into the lower swollen av 卞 腔 cavity to 'and then respectively formed by the first vacant portion and the second vacant portion & a first liquid curtain and - second, night Ο for the Λ The reviewing committee has a more in-depth understanding of the structure and efficacy of the present invention. . [Embodiment] The following is a description of the technical means used in this (4) to achieve the purpose, and the examples listed in the following figures are only for the assistance of the Lebe reviewers, but the technology of the case Means are not limited to the illustrated figures. Referring to the first to fifth figures, the liquid curtain forming crucible device 100 of the present invention includes a body composed of a partition member 10 and a $-^0#20 second chamber member 30. . The partitioning member 10 has opposing first and second surfaces 12 and 12, and the partitioning member 10 is provided with a plurality of holes 13 extending through the first surface 11 and the second surface 12. The first chamber element 20 is disposed on the first surface 11 of the partitioning element 1 , and a first upper chamber 21 and a first lower chamber 22 are disposed on one side of the first chamber element 2 As shown in the third figure, the first upper chamber 21 and the first lower chamber 22 are recessed from the first chamber element 2 by a certain depth HI, H2 in the first chamber element 201036709 20 (eg As shown in FIG. 5, the first chamber element 20 is provided with a first upper chamber 21 and one of the first lower chambers 22 facing the first surface 11 of the partition member 10 and with the first surface 11 Having a certain distance D1 (as shown in the fifth figure), the first upper chamber 21 is disposed corresponding to the position of the hole 13 of the partition member 10, and the first chamber member 20 has a through portion 23, which runs through a portion 23 extending through the first chamber element 20 and communicating with the first upper chamber 2 as shown in the first figure, the second chamber element 30 being disposed on the second surface 12 of the partition member 10, One of the second chamber elements 30 is provided with a second upper chamber 31 and a second lower chamber 32, and the second upper chamber 31 and the second lower chamber 32 are bound by the second The surface of the chamber element 30 is recessed in the second chamber element 30 by a certain depth H3, H4 (as shown in the fifth figure), and the second chamber element 30 is provided with a second upper chamber 31 and the second lower chamber One of the faces 32 faces the second surface 12 of the partition member 10 and has a distance D2 from the second surface 12 (as shown in FIG. 5), and the second upper chamber 31 corresponds to the partition member 10. The position of the hole 13 is set. A gasket 40a, 40b is provided between the first chamber member 20 and the partition member 10, and between the second chamber member 30 and the partition member 10, respectively. The gaskets 40a, 40b are provided. In a "door" type, the two sides and the top between the first chamber element 20 and the partitioning element 10 are closed (as shown in the second figure), and the second chamber element 30 is separated from the partition The two sides and the top of the element 10 are in a closed state (as shown in the third figure), and the spacers 40a, 40b have a certain thickness to provide a certain relationship between the first chamber element 20 and the partitioning element 10. The spacing D1, the second chamber element 30 and the separating element 10 have a certain distance D2 (as shown in the fifth figure). 6 201036709 The first chamber element 2 is connected to a pipe element 50 having a passage 51 , the end of which is connected to the through portion 23 of the first chamber element 20, The other end of the passage 51 provides a liquid input to the passage .51, and the passage 51 provides a liquid input. One end is provided with an internal thread 52, and the internal thread 52 is provided with a liquid transfer line having an external thread (not shown) The phase is screwed so that the liquid (as indicated by the dashed arrow in the fifth figure) can flow into the first upper chamber 20, the hole 13 and the second upper chamber 3 through the passage 51 and the through portion 23, also A gasket 53 may be disposed between the pipeline member 50 and the first chamber member 20 to prevent liquid leakage, and the number of the conduit members 5 is not limited, according to the first chamber to the member 20 Depending on the size of the dimension, this embodiment is symmetrically arranged two. by. The fifth figure shows that the first upper chamber 20 and the second upper chamber 30 are mutually penetrated to form an upper chamber, and the number and position of the holes 13 are determined according to the first The shapes of the upper chamber 2〇 and the second upper chamber 3〇 are different, and the shapes of the first upper chamber 2〇 and the second upper chamber 3〇 are actually shaped according to the actual liquid curtain forming device or The first upper chamber 2〇 and the second upper chamber 30 are elongated, so the hole 13 corresponds to the first upper chamber 2〇 and the second. The position of the upper chamber is set to a plurality of positions and arranged horizontally in a row. „ : 2, by the arrangement of the cymbals 4〇a, 40b, the first chamber element tells that the chamber element 30 and the partition element 10 cannot be completely attached to the fifth figure. There is a certain distance Di between the first chamber element 20 and the partitioning element 1 , and the second chamber element 3 〇 is spaced apart from the dividing element 1 D by a predetermined distance D2 such that the first lower chamber 22 And the first-upper chamber 21, , and the β-lower chamber 32 and the second upper chamber Μ are in communication with the center of the heart < ν strong 凋, the spacing Di, D2 is smaller than the first The depth of the chamber 21, the seventh 201036709 lower chamber 22, the second upper chamber 31 and the second lower chamber 32 is HI~Μ. In other words, the size of the spacing D1, D2 may depend on the cymbal 4〇a The thickness of 40b or the number of sheets provided by the spacers 40a, 40b. Since the partition member 10, the first chamber member 2, and the second chamber member 3 are all elongated, the first step is The chamber 22 and the bottom of the partition member 1b can form a long first transparent portion 24'. The second lower chamber 32 and the bottom portion of the partition member 10 can form a long second hollow portion. 33, and the first The second permeable portion 33 is substantially parallel to the first permeable portion 24. As shown in the fifth figure, the desired liquid (such as a liquid such as a cleaning liquid or a coating liquid) is rotated from the passage 51 of the piping member 50. The liquid can enter and accumulate through the through portion 23 to accumulate the first upper chamber 21, the hole 13 and the second upper chamber 31, and the liquid can be pushed by the pressure generated by the continuous delivery of the liquid, and the liquid can be the first upper chamber 21 and the first The upper chamber 31 flows into and accumulates in the first lower chamber 22 and the second lower chamber 32, and then the liquid in the first lower chamber 22 flows out from the first transparent portion to form a first liquid. The liquid in the second lower chamber 32 flows out of the second transparent portion 23 to form a second liquid curtain W2, as shown in the fourth and fifth figures, in the liquid curtain forming device 1 A substrate 6 is disposed at a certain distance below the substrate, and the substrate 60 is placed on a conveying device (not shown) such as a roller or a roller, and the conveyor device 6G moves and is above the moving path of the substrate (9). ^ The liquid curtain wire is set to 1GG'. The rotation direction of the county plate 6G is moved by the driving two-chamber element 30 toward the first-chamber element 20, by (4) = The liquid curtain W2 is formed by the first-up chamber 21 and the first-lower chamber 22, and the liquid curtain W2 is formed by the second upper chamber 31 and the second lower chamber. The liquid curtain Π and W2 are driven by two-stage pressure, and/or the integrity of the liquid curtain I W2 can be provided, and the liquid curtain is not broken. The phenomenon of the same liquid screen W1 and W2 of the present invention is the same day. Further, the liquid can be completely covered with the surface of the substrate 60 without causing uneven coating. This - external 'must be explained', please refer to the first, fourth and sixth figures, the present invention, The liquid curtain forming device 100, the partition member 10, the first chamber member 20, the second chamber member 30, the spacers 40a, 40b, and the pipeline member 50 are screwed 70, 80 (only one bolt is shown in the drawing) 70 and 80 are mutually interlocked, and the partition member 10, the first chamber member 20, the second chamber member 3〇, the spacers 0 40a, 4牝, and the conduit member 50 correspond to the bolt 70, The screw hole must be provided at the 80 lock, which is not described here. The invention is characterized in that the bolt 7 is oriented toward the first chamber element 20 The direction is screwed in, and the spacer 40a, the partitioning element 1〇, the spacer 4〇b, and the second chamber element 3〇 are sequentially screwed together, and the screw is inserted into the second chamber element. 3〇-depth but not through the first chamber element 30, likewise, the line element 50 and the first chamber element 2 are tied with a bolt 80 (only represented by a bolt 80 in the figure) And the bolt 8 is screwed by the pipe member 50 toward the first chamber member 20, and the purpose thereof is to make the back surface of the liquid curtain forming device 100, that is, the cavity member The outer surface of 30 maintains a complete plane, and therefore, when it is ensured that the body does not leak from the back surface of the liquid curtain forming device 1 , the liquid usage rate is increased, useless consumption is set as to the second chamber S The long side of the two sides of the piece 30 is provided by bolts (not shown) to form the liquid curtain to form the outer surface of the device at the desired position 'and the long hole 34 is located outside the path of the new flow' Therefore, no (four) leakage is caused to the liquid. The discontinuity of the present is called the integrity of the county, and it does not cause the phenomenon of liquid curtain disconnection. At the same time, the double liquid curtain design of the present invention ensures that the liquid of the object is fully covered by the 201036709^ liquid without causing coating. The phenomenon of unevenness. However, the above description is only for the embodiments of the present invention, and the scope of the invention is not limited thereto. That is to say, the equivalent changes and modifications made by the applicants in accordance with the invention patents should still fall within the scope of the patents covered by the invention. I would like to ask your review committee to give a clear understanding and pray for the best. ❹ 〇 10 201036709 [Simplified description of the drawings] The first figure is an exploded structural view of the present invention. The second drawing is a schematic view of the combined structure of the second chamber component in combination with the gasket of the present invention. * The third figure is a schematic diagram of the structure of the cooperation relationship of the components of the present invention. The fourth figure is a schematic view of the combined structure and the mating substrate of the present invention. The fifth figure is a cross-sectional view of A-A of the fourth figure. The sixth drawing is a rear combined structure diagram of the present invention. 〇【Main component symbol description】 100-Liquid curtain forming device 10 - Separating element 11 - First surface 12 - Second surface 13 - Hole 20 - First chamber element 21 - First upper chamber 22 - First lower chamber Chamber 23 - through portion 24 - first through portion 30 - second chamber member 31 - second upper chamber 32 - second lower chamber 33 - second through portion 11 201036709 34 - elongated hole 40a, 40b - spacer 50 - piping element 51 - passage 5 2- internal thread 53 - spacer 60 - base plate 70, 80 - bolt
Dl、D2-間距 HI、H2、H3、H4-深度 W1-第一液幕 W2-第二液幕 ❹ 12Dl, D2-pitch HI, H2, H3, H4-depth W1-first liquid curtain W2-second liquid curtain ❹ 12