201028549 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種渦輪分子泵’其包括一配置在一 泵殼體中且被一定子件所圍繞之轉子件。 【先前技術】 渦輪分子泵包括一連接至一轉子軸上之轉子件。通 常，轉子軸被支撐於其諸端部中之一者上，且此轉子件係 φ 以鐘狀構構形裝設於自由軸端。轉子件包括多個大致成徑 , 向定向之葉片盤，其配備有多個轉子葉片。在諸轉子葉片 間配置有定子件之多個定子盤。此諸定子盤藉由整個延伸 於轉子件周圍之定子環而固定於適當位置中。諸定子環保 持在一位於泵殼體內之固定不動位置上。渦輪分子泵在每 分鐘數萬轉數大小之運轉轉速下操作。因此，運轉時，轉 子的動能非常高。一旦轉子撞毀或轉子爆裂時，此動能將 導致相當大之破壞力。此諸發生在撞毀或爆裂情況時之力 ® 將經由諸定子件傳遞至泵殻體。此可能導致泵殼體之損 壞，結果使得此泵殻體之破片從泵殻體上拋出。此諸情形 將承擔一相當大之傷害風險。 爲了在泵殼體損毀時可承擔並各自消除至少一部分轉 子動能，習知方式爲此提供特別之凸緣連接。此類凸緣連 接包括多個特別設計之連接孔，以便使渦輪分子泵可在損 毀時變成扭彎狀。依此方式，在發生於凸緣與凸緣螺栓中 之變形的效應下，此動能之一部分將大致地轉變成變形能 201028549 量。此類形之各種凸緣連接被敘述於例如EP ： 中〇 然而，上述泵的突然扭彎變形將承擔以下 設置在殻體外部之個別組件（諸如閥或供應管 ' 下。由於大量之能量輸入，此諸組件可能從泵 導致一相當大之傷害風險。 另外，由EP 1 03 0 0 62案可知，將定子件 φ 配置成與泵殼體之內側相隔一距離處，因而在 殼體之間形成一間隙。定子件藉由滾柱軸承而 撐以便轉動於泵殼體內。因此，如果發生毀損 所產生之力與力矩將會被進一步地傳遞至定子 (或至少僅些微地）傳遞至泵殼體。此配置意 轉子件連同定子件之停止。能量吸收之另一選 子件可變形。然而，該轉子件連同定子件之停 發生毀損，諸滾珠軸承還不致毀損之情形下才 © 然而，特別是由於定子件之極突然且強力之加 在諸滾珠軸承中所導致之力，使得諸滾諸軸承 可靠地避免。一旦諸滾珠軸承已被毀損或破壞 度經由諸滾珠軸承傳遞至泵殼體內，以致再一 殻體可能毀損且因此造成上文中所提及之風險 本發明在渦輪分子泵（尤其是快速轉動類 之一目的在於能在泵一旦毀損時增加安全性， 可避免在那種情形下破壞該殼體。 1 413761 案 風險：多個 )可能被扯 處被拋出且 之諸定子環 定子件與泵 被進一步支 ，由轉子件 件，而不是 欲達成受損 擇在於使定 止僅在一旦 可能發生。 速度及因此 之毀損無法 ，能量將再 次使得此泵 〇 型者）方面 且尤其在於 201028549 【發明內容】 根據本發明，上述目第藉申請專利範圍第1項之特徵 達成。 本發明之渦輪分子泵包括一轉子件’其配置在一泵殻 體中且被一定子件所圍繞。在此定子件與此泵殻體之間設 置一間隙。一能量吸收件配置在該間隙內以便在一旦毀損 或破壞發生時可吸收能量。一旦發生毀損’例如當發生轉 Φ 子爆裂時，轉子件之動能將首先傳遞至定子件。因爲定子 件並非固定地連接至殻體，而是取代地僅經由該能量吸收 件而形成連接，故能量將至少不會被完全地傳遞至定子 件。此外，至少一部分動能將被吸收在被配置於定子件與 泵殻體間之能量吸收件中。因此，必須被泵殼體所承受之 力與力矩係至少相當小於在渦輪分子栗內者，其中定子件 被固定地連接至泵殼體。結果，對泵殻體所產生相當大破 壞之危險性，尤其因爲被拋出之轉子件或定子件殼體破片 © 所造成對泵殼體之毀損及因此對操作人員所造成的危險性 將會顯著地減小，且較佳地甚至消除。 較佳地，能量吸收件只部分地塡滿位於定子件與栗殼 體間的間隙。此具有之優點在於：在所獲致之自由空間內， 能量吸收件以及定子件之變形將被允許發生。 尤其較佳地，能量吸收件至少部分成一網體狀之構 形。在本文中，此網體較佳地係從定子件（尤其從定子件 之外側）延伸至泵殻體之內側。在此一情形下，網體尤其 201028549 較佳地成一螺旋構形，此特別有助於當殼體滑動於諸定子 環上時之裝配作業。 較佳地，介於定子件與泵殻體間之間隙沿著定子件之 全長而延伸。另外較佳地，當由軸向觀看時，螺旋形狀網 體沿著間隙之全長而延伸。本文中，在一包括複數個定子 環之定子件的範例中，各定子環係與螺旋件之所有螺旋配 合協作。螺旋狀網體之數量越大，置中效果將會越好。當 Φ 提供例如環狀網體件時，每個定子環提供一個或較佳兩個 網體件。 根據本發明之一較佳實施例，位於間隙中之能量吸收 件包括一摩擦面。較佳地，此摩擦面配置成緊靠抵住泵殼 體之內側，其中能量吸收件在此配置中較佳地被緊緊地連 接至定子件。另外，此摩擦面亦可被設置成緊靠抵住定子 件之外側，其中能量吸收件在此情形下較佳地被緊緊地連 接至泵殻體之內側。 ® 另外，能量吸收件與定子件或泵殻體之間並未被完全 固定地連接，以致存在兩個摩擦面，亦即介於吸收件與泵 殼體內側之間者以及介於能量吸收件與定子件外側之間 者。依此方式’特別是由於摩擦所發生之能量吸收可仍然 增加。另外之能量吸收將藉由能量吸收件之變形發生。 由於該間隙僅部分地被該能量吸收件所塡充，因此， 可獲得本發明渦輪分子泵之一特別優點部分。此使得諸定 子件，尤其是諸定子環可變形，而不致有高轉動力矩被引 201028549 入殼體，且不致會導致凸緣連接承受不允許之應力。 根據一較佳之實施例，定子件藉一保持件保持於泵殻 體中。此保持件較佳地係一彈性類型，因此可施加一彈壓 力定子件上。此較佳地設計成一〇形環之保持件之彈性變 形度具有下列之優點：保持件之變形亦將具有一減少能量 之功效。由此0形環所產生之彈壓（較佳地係低的）亦將 允許定子組可相對於殼體被扭彎。 0 【實施方式】 此渦輪分子栗包括一由電動馬達（未示於圖）所驅動 之轉子軸10。轉子軸1〇支撐在那個未顯示於圖中之端部 上，以便使一轉子件12可裝設至轉子軸1〇之自由懸臂端 上，且可經由一連接至轉子軸10之端面上的螺栓14而緊 固至轉子軸10。轉子件12係成鐘狀構形且配備有複數個 徑向延伸且包括個別轉子葉片之轉子盤16。轉子件12配 置在一泵殻體18中，操動此轉子件12以便沿著第1圖中 ® 之箭頭22所示且向下伸展之方向，經由泵殼體18之引入 口 20，輸送該待被啷送之氣體。 —封圍住轉子件12之定子件24配置在泵殻體18內。 定子件24包括複數個分別配置在諸轉子盤間之定子盤 26。在此所示之實施例中，各定子盤26連接至一定子環 28,其在圍繞這些成環狀之轉子盤16時，徑向地配置在此 諸盤體之外側。 此渦輪分子泵藉一連接至泵殼體18之凸緣30，固定 201028549 於適當位置。在由習知領域獲知之渦輪分子中，定子件24 被固定地連接至殻體18。此導致之後果是：如果轉子12 將爆裂，幾乎所有合力與力矩即須被導入殼體內，且經由 該凸緣消除。然而，在高轉速之情形下，此條件將無法被 滿足，以致於殻體將會毀損，且由於高動能而使得此泵之 破片可能被拋穿透至四周。 爲消除上述風險，本發明提供如下：定子件24並不固 0 定地連接至泵殻體1 8。取代地則是在定子件24 (特別是諸 個別定子環28之外側32)與殻體18 (特別是其內側34) 之間形成一間隙。在此配置中，殼體18之內側34界定一 大致成圓柱形之空間，其內安置有定子件24。在這所示之 實施例中，彼此沿軸向相連接之諸定子環28在此軸向上被 支撐在一突出殼體部38上。此外，一保持件40沿軸向設 置於最上方定子環28與殻體18間（第1圖）。該保持件 40係一塑膠製保持件；在這所示之實施例中，保持件40 ® 實施成一〇形環。在徑向上，殼體18上形成一可供位置固 定用之突部42。諸定子環28較佳地僅憑藉該殼體而置於 中心。 根據第一實施例（第1圖），能量吸收件設置在間隙 36中，並成每一定子環28分別有一圓形環狀網體之構形。 在這所示之實施例中，網體44係與定子環28 —體成型或 被緊緊地連接至其上。諸網體44被緊鄰地配置在泵殼體 18之內側34上，以致諸網體44具有一摩擦面46。在正常 201028549 操作期間，定子件24係固定不動的’且不會相對於殼體 1 8移動》如發生破損（例如轉子件12爆裂）之情形，定 子件24即會被殼體18 —起帶走。定子件24可轉動’此乃 因爲根據本發明，定子件24不固定地連接至殻體18。由 於諸能量吸收件44配置在間隙36內’因此’至少一大部 分能量會爲殻體本身所吸收。從而避免導致殼體18破裂或 其破片從殻體上脫出之損壞。上述原理亦可被反向運用成 φ 諸網體44爲殼體18之組件且用以徑向地固定諸定子環28。 除了能量吸收件以外，第二實施例（第2圖）與第一 實施例相同。因此，在兩實施例中彼此相對應之諸組件標 以相同元件符號。在此實施例中，配置在間隙3 6中之能量 吸收件構成爲一螺旋狀網體48。尤其，本文中建議一種沿 著定子件24全長（亦即沿著整個間隙）延伸之螺旋狀能量 吸收件48。此螺旋狀能量吸收件亦可固定地連接至殻體之 內面（如圖所示）。 ® 儘管本發明已參照其特定實施例敘述並呈現，但並不 意謂本發明受限於那些實施例。熟悉本藝之人士將承認， 在不脫離後申請專利範圍所界定之本發明範圍下，可針對 本發明進行各種變化與修改。因此，意欲涵蓋後附申請專 利範圍及對等物之範圍內所有變化與修改於本發明內。 【圖式簡單說明】 於以下說明中’包括參考附圖，詳細說明本發明之完 全且可實施的揭示內容，包括其最佳模式及使熟悉本藝之 201028549201028549 VI. Description of the Invention: [Technical Field] The present invention relates to a turbomolecular pump which includes a rotor member disposed in a pump housing and surrounded by a certain sub-assembly. [Prior Art] A turbomolecular pump includes a rotor member coupled to a rotor shaft. Typically, the rotor shaft is supported on one of its ends, and the rotor member φ is mounted in a bell-like configuration at the free shaft end. The rotor member includes a plurality of generally directional, directional blade disks that are equipped with a plurality of rotor blades. A plurality of stator discs of stator members are disposed between the rotor blades. The stator disks are held in position by a stator ring extending all around the rotor member. The stators are environmentally held in a fixed position within the pump housing. The turbomolecular pump operates at operating speeds of tens of thousands of revolutions per minute. Therefore, the kinetic energy of the rotor is very high during operation. This kinetic energy will cause considerable destructive force once the rotor crashes or the rotor bursts. This force, which occurs in the event of a crash or burst, will be transmitted to the pump housing via the stator members. This may result in damage to the pump casing, with the result that the fragments of the pump casing are thrown from the pump casing. These situations will bear a considerable risk of injury. In order to be able to bear and eliminate at least a portion of the rotor kinetic energy when the pump housing is damaged, conventional means provide a special flange connection for this purpose. Such flange connections include a plurality of specially designed attachment holes to allow the turbomolecular pump to become twisted when damaged. In this manner, a portion of this kinetic energy will be substantially converted to a deformation energy amount of 201028549 under the effect of deformation occurring in the flange and flange bolts. Various flange connections of this type are described, for example, in EP: However, the sudden twisting deformation of the above pump will assume the following individual components (such as valves or supply pipes) disposed outside the casing. Due to the large amount of energy input The components may cause a considerable risk of injury from the pump. In addition, it is known from EP 1 03 0 0 62 that the stator member φ is placed at a distance from the inside of the pump housing, thus between the housings Forming a gap. The stator member is supported by the roller bearing for rotation in the pump housing. Therefore, if the damage and force generated by the damage will be further transmitted to the stator (or at least slightly) to the pump casing This configuration means that the rotor member and the stator member are stopped. The other optional member of the energy absorption can be deformed. However, the rotor member and the stator member are damaged, and the ball bearings are not damaged. However, In particular, due to the extremely sudden and strong force exerted by the stator components in the ball bearings, the rolling bearings are reliably avoided. Once the ball bearings have been damaged or broken The badness is transmitted to the pump casing via the ball bearings, so that another casing may be damaged and thus cause the risks mentioned above. The invention is in the turbomolecular pump (especially one of the fast-rotating classes is capable of being damaged once in the pump) When safety is increased, the case can be avoided in that case. 1 413761 Risk: multiple) may be thrown and the stator ring stator and the pump are further supported by the rotor piece, Rather than trying to achieve a compromise, the decision is made only once it is possible. The speed and hence the damage cannot be, the energy will again make this pump type) and especially in 201028549. [Invention] According to the present invention, the above-mentioned This is achieved by applying the characteristics of item 1 of the patent scope. The turbomolecular pump of the present invention includes a rotor member ' disposed in a pump casing and surrounded by a certain sub-assembly. A gap is provided between the stator member and the pump housing. An energy absorbing member is disposed within the gap to absorb energy upon occurrence of damage or destruction. Once a damage occurs, for example, when a Φ burst occurs, the kinetic energy of the rotor member will first be transmitted to the stator member. Since the stator member is not fixedly coupled to the housing, but instead the connection is formed only via the energy absorbing member, energy will at least not be completely transferred to the stator member. Additionally, at least a portion of the kinetic energy will be absorbed in the energy absorbing member disposed between the stator member and the pump housing. Therefore, the force and torque that must be experienced by the pump housing are at least substantially less than those within the turbine core, wherein the stator member is fixedly coupled to the pump housing. As a result, there is a risk of considerable damage to the pump housing, especially due to the damage to the pump housing caused by the thrown rotor piece or the stator piece fragment © and thus the danger to the operator. Significantly reduced, and preferably even eliminated. Preferably, the energy absorbing member only partially fills the gap between the stator member and the chestnut shell. This has the advantage that deformation of the energy absorbing member and the stator member will be allowed to occur in the free space obtained. Particularly preferably, the energy absorbing member is at least partially formed into a mesh-like configuration. In this context, the mesh body preferably extends from the stator member (especially from the outside of the stator member) to the inside of the pump housing. In this case, the mesh body, particularly 201028549, preferably has a helical configuration which is particularly useful for assembly operations when the housing is slid over the stator rings. Preferably, the gap between the stator member and the pump housing extends along the entire length of the stator member. Further preferably, the spiral shaped mesh extends along the entire length of the gap when viewed in the axial direction. Herein, in an example of a stator member comprising a plurality of stator rings, each stator ring system cooperates with all of the spirals of the spiral member. The larger the number of spiral meshes, the better the centering effect will be. When Φ provides, for example, an annular mesh member, each stator ring provides one or preferably two mesh members. According to a preferred embodiment of the invention, the energy absorbing member located in the gap comprises a friction surface. Preferably, the friction surface is configured to abut against the inside of the pump casing, wherein the energy absorbing member is preferably tightly coupled to the stator member in this configuration. Alternatively, the friction surface may be arranged to abut against the outer side of the stator member, wherein the energy absorbing member is preferably tightly coupled to the inside of the pump housing in this case. In addition, the energy absorbing member is not completely fixedly connected to the stator member or the pump housing, so that there are two friction surfaces, that is, between the absorbing member and the inner side of the pump housing, and between the energy absorbing members. Between the outside of the stator piece. In this way, energy absorption, which occurs especially due to friction, can still increase. In addition, energy absorption will occur by deformation of the energy absorbing member. Since the gap is only partially filled by the energy absorbing member, a particularly advantageous portion of one of the turbomolecular pumps of the present invention can be obtained. This allows the stator members, and in particular the stator rings, to be deformed without the high rotational moment being introduced into the housing without causing the flange connections to be subjected to unacceptable stresses. According to a preferred embodiment, the stator member is retained in the pump casing by a retaining member. The retaining member is preferably of a resilient type so that a resilient force can be applied to the stator member. The elastic deformation of the holder which is preferably designed as a ring-shaped ring has the advantage that the deformation of the holder will also have an energy-reducing effect. The spring pressure (preferably low) produced by the O-ring will also allow the stator assembly to be twisted relative to the housing. [Embodiment] This turbo molecular pump includes a rotor shaft 10 driven by an electric motor (not shown). The rotor shaft 1 〇 is supported on the end portion not shown in the drawing so that a rotor member 12 can be attached to the free cantilever end of the rotor shaft 1 , and can be connected to the end surface of the rotor shaft 10 via a The bolt 14 is fastened to the rotor shaft 10. The rotor member 12 is in the form of a bell and is provided with a plurality of rotor disks 16 extending radially and including individual rotor blades. The rotor member 12 is disposed in a pump housing 18 that is operated to transport the rotor member 12 via the inlet 20 of the pump housing 18 in the direction of the arrow 22 shown in FIG. 1 and extending downwardly. The gas to be sent. The stator member 24 enclosing the rotor member 12 is disposed within the pump housing 18. The stator member 24 includes a plurality of stator disks 26 disposed between the rotor disks. In the embodiment shown here, each of the stator discs 26 is coupled to a stator ring 28 that is radially disposed on the outer side of the discs as it surrounds the annular rotor discs 16. The turbomolecular pump is attached to the flange 30 of the pump housing 18 to secure the 201028549 in place. In a turbomolecular known from the prior art, the stator member 24 is fixedly coupled to the housing 18. This leads to the consequence that if the rotor 12 will burst, almost all of the resultant force and moment must be introduced into the housing and eliminated via the flange. However, at high rotational speeds, this condition will not be met, so that the casing will be damaged and the fragment of the pump may be thrown through to the surroundings due to high kinetic energy. To eliminate the above risks, the present invention provides that the stator member 24 is not fixedly coupled to the pump housing 18. Instead, a gap is formed between the stator member 24 (particularly the outer side 32 of the individual stator rings 28) and the housing 18 (particularly its inner side 34). In this configuration, the inner side 34 of the housing 18 defines a generally cylindrical space in which the stator member 24 is disposed. In the embodiment shown here, the stator rings 28 which are axially connected to each other are supported in this axial direction on a projecting housing portion 38. Further, a holder 40 is axially disposed between the uppermost stator ring 28 and the casing 18 (Fig. 1). The retaining member 40 is a plastic retaining member; in the illustrated embodiment, the retaining member 40® is embodied as a cymbal ring. Radially, a projection 42 for position fixing is formed in the housing 18. The stator rings 28 are preferably centered solely by virtue of the housing. According to the first embodiment (Fig. 1), the energy absorbing members are disposed in the gap 36, and each of the stator rings 28 has a configuration of a circular annular mesh body. In the illustrated embodiment, the mesh body 44 is integrally formed with the stator ring 28 or is tightly coupled thereto. The mesh bodies 44 are disposed in close proximity on the inner side 34 of the pump housing 18 such that the mesh bodies 44 have a friction surface 46. During normal 201028549 operation, the stator member 24 is stationary and does not move relative to the housing 18. If the breakage occurs (e.g., the rotor member 12 bursts), the stator member 24 will be lifted by the housing 18. go. The stator member 24 is rotatable' because the stator member 24 is not fixedly coupled to the housing 18 in accordance with the present invention. Since the energy absorbing members 44 are disposed within the gap 36, ' therefore, at least a substantial portion of the energy is absorbed by the housing itself. This avoids damage that causes the housing 18 to rupture or its fragments to escape from the housing. The above principles can also be applied in reverse as φ mesh bodies 44 being components of the housing 18 and for radially securing the stator rings 28. The second embodiment (Fig. 2) is the same as the first embodiment except for the energy absorbing member. Therefore, components corresponding to each other in the two embodiments are denoted by the same reference numerals. In this embodiment, the energy absorbing member disposed in the gap 36 is constructed as a spiral mesh body 48. In particular, a helical energy absorbing member 48 extending along the entire length of the stator member 24 (i.e., along the entire gap) is suggested herein. The helical energy absorbing member can also be fixedly attached to the inner face of the housing (as shown). Although the present invention has been described and illustrated with reference to the specific embodiments thereof, it is not intended that the invention is limited to those embodiments. A person skilled in the art will recognize that various changes and modifications can be made to the invention without departing from the scope of the invention as defined by the appended claims. Therefore, it is intended to cover all modifications and variations within the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS In the following description, reference is made to the accompanying drawings in detail,
42 突部 44 網體/能量吸收件 46 摩擦面 44/48 螺旋狀能量吸收件/螺旋狀網體 -11 -42 Projection 44 Mesh/Energy Absorber 46 Friction Surface 44/48 Spiral Energy Absorber / Spiral Net Body -11 -