201020512 六、發明說明： 【發明所屬之技術領域】 本發明疋有關於 種表面輪廊儀，且特別是有關於*— 種條紋投影輪廓儀(Projected Fringe Profilometry，PFP)。 【先前技術】 條紋投影輪廓儀是一種可量測物體表面之立體形貌的 儀器，其工作原理是利用光學投影的方式來量測物體表面 之立體形貌。 詳細而言，條紋投影輪廓儀會先投射一結構光 (structured light)至待測表面，以在待測表面上形成一條紋 影像，其中此條紋影像係由多條條狀亮紋與多條條狀暗紋 交錯排列而成。 這些條狀亮紋會受到表面起伏的影響而扭曲，而條紋 投影輪廓儀能根據這些條狀亮紋的扭曲程度，並透過傅利 葉轉換（Fourier transform)，例如快逮傅利葉轉換（_ © F_erTransform’FFT)，來測出待測表面的立體形貌。由 此可知，條紋投影輪廓儀無需接觸待測表面，便可以量測 待測表面的形貌。 然而’習知條紋投影輪廓儀需配備多個透鏡組才能在 待測表面上形成條紋影像。這些透鏡纪的體積魔大，且結 構也相田複_以至於習知條紋投影輪靡儀難以在狹小的 空間内進行表面的形貌之量測。因此，習知條紋投影輪康 儀很難在人體内量測器官的立體形貌，進而難以應用在醫 3 201020512 學與生物技術上。 其次，當條紋投影輪廓儀在待測表面上形成條紋影像 時，條紋影像會受到這些透鏡組的影響而產生像差，以至 於降低條紋投影輪廓儀所取得的表面之形貌的正確性。 【發明内容】 為了解決上述問題，本發明之目的係提供一種條紋投 影輪廓儀，其能在狹小的空間内進行立體形貌之量測。 本發明提出一種條紋投影輪廓儀，其用以量測一待測 ❿表面的形貌。條紋投影輪廓儀包括至少一光源、至少一全 像片、一影像擷取裝置以及一影像處理裝置。光源適於發 出一光線，而全像片配置於待測表面與光源之間’以及光 線的一第一傳遞路徑上。全像片適於將光線繞射成一繞射 光線’而繞射光線沿著一第二傳遞路徑投射在待測表面 上’以形成一條紋影像，其中第一傳遞路徑與第二傳遞路 徑之間呈一夾角’而夾角小於180度’大於90度。影像擷 ❿取裝置適於拍攝條紋影像，而影像處理裝置適於根據條紋 影像’以取得待測表面的形貌。 本發明之條紋投影輪廓儀因採用全像片而能在待測表 面上投射出條故影像，並根據此條纹影像的扭曲程度來取 #待測表面的形貌。相較於習知技術*言本發明之條紋 投影輪#儀具有結構簡單及髏積小等優點 ，進而能在狹小 的工間内進行立體形貌的量測。 為讓本發明之上述特徵能更明顯易懂，下文特舉實施 201020512 例，並配合所附圖式，作詳細說明如下。 【實施方式】 圖1是本發明一實施例之條紋投影輪廓儀的立鱧示意 圖。請參閱圖1 ’本實施例之條紋投影輪廓儀1〇〇係用以 量測一待測表面S的形貌，並包括多個光源11〇、多個全 像片120、一影像擷取裝置130以及一影像處理裝置140。 這些全像片120配置於待測表面S與這些光源110之間， I 而影像擷取裝置130則配置於這些光源no之間。 在本實施例中’這些光源110可以是雷射光源或鹵素 燈’而影像擷取裝置130可以是一種電荷耦合元件（Charge Couple Device，CCD )或是一種互補式金氧半導體 (Complementary Metal-〇xide_Semiconductor，CMOS )晶 片° 此外，根據不同種類的光源110 ’這些全像片丨20可 以採用不同種類的全像片。舉例而言，當光源11〇為雷射 ❹光源時，這些全像片120可以採用薄膜全像片。當光源11〇 為鹵素燈時，這些全像片120可以採用體積全像片。 圖2是圖1中的條紋投影輪廓儀在其光源發光時的俯 視示意圖。請參閱圖1與圖2,這些光源no能發出多條 光線，且這些光線分別沿著多條第一傳遞路徑pl而傳遞， 其中這些全像片12〇配置這些光線的第一傳遞路徑？1上， 如圖2所示。 承上述，這些全像片丨2〇能根據這些光源11()所發出 5 201020512 的光線，在待測表面S上產生多個條紋影像j(如圖2中粗 黑線表示者）’其中這些條紋影像j可以是彼此重疊，如圖 1所示。 詳細而言，這些全像片120乃是利用全像術 (holography)拍攝光柵圖案而形成，其中光柵圖案可以是 透過微影蝕刻（lithography)的方式在金屬板上形成，且 此光柵圖案的形狀與條紋影像I實質上相同。 @ 因此，這些全像片120能將這些光源11()所發出的光 線分別繞射成多條繞射光線’而這些繞射光線分別沿著多 條第二傳遞路徑P2投射在待測表面s上，以形成這些條紋 景^像I。換句話說，這些光源110所發出的光線能重建這些 ’ 全像片12〇原先所拍攝的光栅圖案之影像，進而形成這些 條紋影像I。 另外’这些全像片120可以是一種離轴式（〇ff-axis ) 全像片。詳細而言，從單一個全像片120來看，第一傳遞 ❿ 路徑P1與第二傳遞路徑P2之間會呈現一夾角a，其中夾 角A小於180度’大於90度，如圖2所示。因此’條紋 影像I並不會在光源110所發出的光線之轴心上。 圖3是圖1中的條紋影像的示意圖。請參閱圖3 ,在 本實施例中，全像片120可以是利用全像術拍攝特製光拇 圖案而形成’以使條紋影像I可以包括多條條狀亮紋u以 及多條條狀暗紋12，其中條紋影像I與上述特製光拇圖案 實質上相同。這些條狀暗紋12與這些條狀亮紋n皆平行 6 201020512 排列，且其中一條條狀亮紋II位於其中二條相鄰的條狀暗 紋12之間。此外，這些條狀暗紋12之間的間距可以大於 500微米。 其次，條紋影像I可以選擇性地包括多條條狀灰紋13， 而這些條狀灰紋13的亮度大於該些條狀暗紋12的亮度， 並小於這些條狀亮紋II的亮度。這些條狀灰紋13亦皆平 行排列，且其中一條條狀灰紋13位於其中二條相鄰的條狀 暗紋12之間。 ® 承上述，這些條狀亮紋II與這些條狀灰紋13可以依 照特定順序來排列，如圖3所示。為了使以下内容能明顯 . 易懂，在此先將這些條狀亮紋II編號為1，而這些條狀灰 , 紋13編號為0，其中條狀亮紋II與條狀灰紋13之間的排 列方式可以是10001011，如圖3所示。也就是說，本實施 例的條紋影像I可設計成以不同的穿透率來編碼的排列方 式。 © 另外，這些條狀亮紋II與這些條狀灰紋13可以排列 成一個循環。詳細而言，條紋影像I可以包括更多條條狀 亮紋II、條狀暗紋12以及條狀灰紋13，而這些條狀亮紋II 與這些條狀灰紋13的排列方式可以是10001011 10001011…重複排列，即以10001011為一個循環而重複排 列。 承上述，在同一個循環中，每一條條狀亮紋II或每一 條條狀灰紋13與左右相鄰的條狀亮紋II或條狀灰紋13之 7 201020512 間的排列組合具有唯—性。舉例而言，_這樣的排列组 合在同-個循環中只會找到一個，而不會找到二個或二個 以上的_排列組合。因此，在上述的排列組合中，同一 個猶環中的每-條條狀纽η與每—條條狀灰紋13皆可 以被定義及區別。 請參閱圖1至圖3,受到待測表面s高低起伏的影響， 條狀亮紋η、條狀暗紋12與條狀歧ΐ3會㈣，而影像 操取裝置13G能拍攝在待測表面s上的這些條紋影像！，以 2條狀絲n、鎌蚊12與條狀灰紋ι3三者扭曲時 為了讓影像擷取裝置⑽可以清晰地拍攝到條紋 條紋投影輪賴刚可更包括—透鏡！5〇。透鏡15〇 配置於影像擷取裝置13〇與 紋影像b 、相表面S之間，並能放大條 承上述，影像處理裝置丨 Ο 取得待測表面S的开u/ 這些條紋影像^以 連接影像擷取獎番”η 、中影像處理裝置I40可以電性 钱焉像操取裝置130,且影傻盘 影像處理裝置♦詳細Λ像H置则如是電猫。 條狀亮紋η舆條狀灰故13二者理裝置140能根據 表面s沾如处 耆的杈曲程度，以計算待測 理襄置UG [ ^取得_表面S的形貌，其中影像處 行上述的計算〜利料賴鄉轉換等傅㈣轉換來進 方法有其14G叫相表*s _貌之 其舆習知條紋投影輪廊儀相同，即影像處理裝置140 201020512 取得形貌之方法已為公開的先前技術。本發 域中具有通常知識者知曉影像處理裝置14〇取 ^領 s的形貌之方法，也知曉影像處理裝置14G如_ = 傅利葉轉換或其他傅利葉轉換來計算待測表面s伏速 故有關影像處理裝置M0取得待測表面s的形貌之方法，’ 在此不作介紹。 值得-提的是，在其他未綠示的實施例中，條紋投影 輪廓儀100所包括的光源110與全像片12〇之數量皆可以 ❹僅為-個，或是三個或三個以上。因此，圖i與圖2所示 的光源1H)與全像片12〇二者的數量僅為舉例說明，並非 限定本發明。 其次，這些光源110所發出的光線之波長可以是彼此 相同，例如這些光源110所發出的光線皆為紅光、綠光或 藍光，其中這裡所述的彼此相同意指上述光線之波長實質 上彼此相同。 Ο 此外，其中一個光源110所發出的光線之波長也可以 與另一個光源110所發出的光線之波長不同。舉例而言， 其中一個光源no所發出的光線為紅光，而另一個光源110 所發出的光線則為綠光。當然，若條紋投影輪廓儀100包 括三個或三個以上的光源丨10時，所有光源11〇所發出的 光線之波長可以彼此互不相同。 綜上所述’透過全像片，本發明之條紋投影輪廓儀得 以在待測表面上投射出條紋影像，並根據條紋影像的扭曲 9 201020512 程度來取得待測表面的形貌。相較於習知技術而言，本發 明之條紋投影輪廓儀無需配備多個透鏡組，即可投射出條 紋影像。201020512 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a surface wheel finder, and more particularly to a Projected Fringe Profilometry (PFP). [Prior Art] The stripe projection profiler is an instrument that can measure the three-dimensional shape of an object surface. Its working principle is to measure the three-dimensional shape of the surface of the object by means of optical projection. In detail, the stripe projection profiler first projects a structured light to the surface to be tested to form a stripe image on the surface to be tested, wherein the stripe image is composed of a plurality of strips of bright lines and strips. The dark lines are staggered. These strips of bright lines are distorted by surface undulations, and the stripe projection profiler can be based on the degree of distortion of these strips and through Fourier transforms, such as fast-forward Fourier transforms (_ © F_erTransform'FFT ) to measure the three-dimensional shape of the surface to be tested. It can be seen that the stripe projection profiler can measure the shape of the surface to be tested without touching the surface to be tested. However, the conventional fringe projection profiler needs to be equipped with a plurality of lens groups to form a fringe image on the surface to be tested. These lens segments are extremely large in volume and have a structure such that the conventional fringe projection rim is difficult to measure the surface topography in a small space. Therefore, it is difficult for the conventional stripe projection wheel to measure the three-dimensional shape of the organ in the human body, and thus it is difficult to apply it to the medical and biological technologies. Secondly, when the fringe projection profiler forms a stripe image on the surface to be tested, the stripe image is affected by these lens groups to cause aberrations, so as to reduce the correctness of the surface morphology obtained by the stripe projection profiler. SUMMARY OF THE INVENTION In order to solve the above problems, an object of the present invention is to provide a stripe projection profiler capable of measuring a stereoscopic appearance in a small space. The present invention provides a fringe projection profilometer for measuring the topography of a surface to be tested. The stripe projection profiler includes at least one light source, at least one full image, an image capture device, and an image processing device. The light source is adapted to emit a light, and the full image is disposed between the surface to be tested and the light source' and a first transmission path of the light. The full image is adapted to circulate light into a diffracted ray 'and the diffracted ray is projected onto the surface to be tested along a second transmission path' to form a fringe image, wherein between the first transfer path and the second transfer path It is at an angle 'with an angle less than 180 degrees' greater than 90 degrees. The image capture device is adapted to capture a fringe image, and the image processing device is adapted to obtain a topography of the surface to be tested based on the fringe image. The stripe projection profiler of the present invention can project an image on the surface to be tested by using a full image, and take the appearance of the surface to be tested according to the degree of distortion of the image of the stripe. Compared with the prior art, the stripe projection wheel of the present invention has the advantages of simple structure and small hoarding, and the measurement of the three-dimensional shape can be performed in a small work space. In order to make the above features of the present invention more comprehensible, the following is a specific example of 201020512, which is described in detail below with reference to the accompanying drawings. [Embodiment] Fig. 1 is a perspective view showing a stripe projection profiler according to an embodiment of the present invention. Referring to FIG. 1 , the stripe projection profiler 1 of the present embodiment is used to measure the topography of a surface to be tested S, and includes a plurality of light sources 11 , a plurality of full images 120 , and an image capturing device. 130 and an image processing device 140. The hologram 120 is disposed between the surface S to be tested and the light sources 110, and the image capturing device 130 is disposed between the light sources no. In the present embodiment, 'the light sources 110 may be laser light sources or halogen lamps' and the image capturing device 130 may be a charge coupled device (CCD) or a complementary metal oxide semiconductor (Complementary Metal-〇). xide_Semiconductor, CMOS) Wafers In addition, depending on the type of light source 110', these full-image 丨20s can use different types of full-images. For example, when the light source 11 is a laser light source, the full image film 120 may be a film full image. When the light source 11 turns into a halogen lamp, these full-image sheets 120 can take a volume full-image. Fig. 2 is a top plan view showing the stripe projection profiler of Fig. 1 when its light source is illuminated. Referring to FIG. 1 and FIG. 2, these light sources no can emit a plurality of light rays, and the light rays are respectively transmitted along a plurality of first transmission paths pl, wherein the whole images 12 〇 configure the first transmission paths of the light rays? 1, on, as shown in Figure 2. According to the above, these holograms 2 can generate a plurality of fringe images j on the surface S to be tested according to the light of 5 201020512 emitted by these light sources 11 () (as shown by the thick black line in FIG. 2) The fringe images j may overlap each other as shown in FIG. In detail, the hologram 120 is formed by photographing a grating pattern by holography, wherein the grating pattern may be formed on a metal plate by lithography, and the shape of the grating pattern It is substantially the same as the stripe image I. @ Thus, these holograms 120 can respectively illuminate the light rays emitted by the light sources 11() into a plurality of diffracted rays', and the diffracted rays are respectively projected along the plurality of second transmission paths P2 on the surface to be tested. On, to form these stripe scenes I. In other words, the light emitted by these light sources 110 can reconstruct the images of the raster images originally captured by the 'full image 12' to form the fringe image I. In addition, these holograms 120 can be an off-axis (〇ff-axis) hologram. In detail, from a single hologram 120, an angle a between the first transfer path P1 and the second transfer path P2 is present, wherein the angle A is less than 180 degrees and greater than 90 degrees, as shown in FIG. . Therefore, the 'striped image I is not on the axis of the light emitted by the light source 110. 3 is a schematic view of the fringe image of FIG. 1. Referring to FIG. 3 , in the embodiment, the hologram 120 may be formed by photographing a special light thumb pattern by holography so that the stripe image I may include a plurality of strips of bright ray u and a plurality of strips of dark lines. 12, wherein the fringe image I is substantially the same as the above-mentioned special light thumb pattern. These strips of dark lines 12 are parallel to the strips of bright lines n 6 201020512, and one of the strips of bright lines II is located between two adjacent strips 12 . In addition, the spacing between the strips 12 may be greater than 500 microns. Secondly, the stripe image I can optionally include a plurality of strip-shaped gray lines 13 whose brightness is greater than the brightness of the strip-shaped dark lines 12 and smaller than the brightness of the strip-shaped bright lines II. These strip-shaped gray lines 13 are also arranged in parallel, and one of the strip-shaped gray lines 13 is located between two adjacent strip-shaped dark lines 12. ® In the above, these strips of bright stripes II and these strips of gray 13 can be arranged in a specific order, as shown in FIG. In order to make the following content obvious, it is easy to understand that these strips are first numbered as 1, and these strips are gray, and the number 13 is numbered 0, wherein between the strips of bright stripes II and the strips of gray 13 The arrangement can be 10001011, as shown in Figure 3. That is to say, the fringe image I of the present embodiment can be designed in an arrangement manner of encoding with different transmittances. © In addition, these strips of bright stripes II and these strips of gray 13 can be arranged in a loop. In detail, the stripe image I may include more strips of bright lines II, strips of dark lines 12, and strips of gray lines 13 , and the arrangement of the strips of bright lines II and the strips of gray lines 13 may be 10001011 10001011... Repeated arrangement, that is, repeating the sequence with 10001011 as a cycle. According to the above, in the same cycle, each strip-like bright grain II or each strip-shaped gray pattern 13 and the left and right adjacent strip-shaped bright lines II or strip-like gray lines 13 of 7 201020512 have a combination of only Sex. For example, such an arrangement of _ would only find one in the same cycle, and would not find two or more _ permutations. Therefore, in the above-described arrangement and combination, each of the strips of the same hexagram and each of the strips of gray 13 can be defined and distinguished. Please refer to FIG. 1 to FIG. 3, which is affected by the fluctuation of the surface s to be tested, strips of bright stripes η, strips of dark lines 12 and strips of ridges 3 (4), and the image manipulation device 13G can be photographed on the surface to be tested s These fringe images on! When the two strips of silk n, the mosquito 12 and the strip gray ι3 are distorted, the image capturing device (10) can clearly capture the stripes. The striped projection wheel Lai Gang can also include the lens! 5〇. The lens 15 is disposed between the image capturing device 13 and the image b and the surface S, and can enlarge the strip. The image processing device 取得 obtains the opening u of the surface S to be tested and the strip image to connect the image.撷 奖 奖 η 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Therefore, the two devices 140 can calculate the shape of the surface to be measured according to the degree of distortion of the surface s. [[Get _ surface S morphology, where the image is calculated above. The conversion method, such as conversion (F) conversion method, has its 14G called phase table *s _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ A person having normal knowledge in the domain knows the method of the image processing device 14 to capture the shape of the collar s, and also knows that the image processing device 14G such as _ = Fourier transform or other Fourier transform to calculate the surface s volts of the surface to be tested M0 takes the appearance of the surface to be tested s The method, 'will not be introduced here. It is worth mentioning that in other embodiments not shown in green, the number of the light source 110 and the full picture 12 包括 included in the stripe projection profiler 100 can be only one. Or three or more. Therefore, the number of both the light source 1H) and the full image 12 所示 shown in FIG. 1 and FIG. 2 is merely illustrative and not limiting. Second, the light source 110 emits The wavelengths of the light rays may be the same as each other, for example, the light rays emitted by the light sources 110 are all red, green or blue light, wherein the same as described herein means that the wavelengths of the light rays are substantially identical to each other. Ο In addition, one of the light sources The wavelength of the light emitted by 110 may also be different from the wavelength of the light emitted by the other light source 110. For example, one of the light sources no emits red light, and the other light source 110 emits green light. Light. Of course, if the stripe projection profiler 100 includes three or more light sources 丨10, the wavelengths of the light emitted by all the light sources 11〇 may be different from each other. The image stripe projection profiler of the present invention can project a stripe image on the surface to be tested, and obtain the topography of the surface to be tested according to the distortion of the stripe image 9 201020512. Compared with the prior art, the present invention The stripe projection profiler can project a stripe image without having multiple lens sets.
由此可知’本發明之條紋投影輪廓儀具有結構簡單及 體積小等優點’進而能在狹小的空間内進行立體形貌的量 測。舉例而言’本發明之條紋投影輪廓儀可以在人體内或 在其他生物體内量測器官、血管、骨骼以及肌肉的立體形 貌’所以本發明之條紋投影輪廓儀可以做成一種内視鏡， 進而能應用在醫學與生物技術上。 其次’由於本發明的條紋影像是利用全像片來產生， 而非透過多個透鏡組來產生，因此本發明的條紋影像不易 產生像差。相較於習知技術而言，本發明能提高條紋投影 輪靡儀所取得的表面之形貌的正確性。 再者’本發明的條紋影像可設計成以不同的穿透率來 編碼的排列方式，以至於在同一個循環中，每一條條狀亮 紋與每一條條狀灰紋可以被定義及區別。藉此，影像處理 裝置可以得知條紋影像中的每一條條狀亮紋與每一條條狀 ' 者的位置，更能提商條紋投影輪廓儀所取得的表面 之形貌的正確性。 雖然本發明以實施例揭露如上，然其並非用以限定本 發明，任何熟習相像技藝者，在不脫離本發明之精神和範 内，所作更動與潤飾之等效替換，仍為本發明 護範圍内。 哥’ 201020512 【圖式簡單說明】 圖1是本發明一實施例之條紋投影輪廓儀的立體示意圖。 圖2是圖1中的條紋投影輪廓儀在其光源發光時的俯視示 意圖。 圖3是圖1中的條紋影像的示意圖。 【主要元件符號說明】From this, it can be seen that the stripe projection profiler of the present invention has the advantages of simple structure and small volume, and thus enables measurement of a stereoscopic appearance in a small space. For example, the stripe projection profiler of the present invention can measure the stereoscopic appearance of organs, blood vessels, bones and muscles in the human body or in other organisms. Therefore, the stripe projection profiler of the present invention can be made into an endoscope. , and can be applied to medicine and biotechnology. Secondly, since the fringe image of the present invention is produced by using a full image film instead of being transmitted through a plurality of lens groups, the fringe image of the present invention is less likely to cause aberration. Compared with the prior art, the present invention can improve the correctness of the topography of the surface obtained by the stripe projection rim. Furthermore, the fringe image of the present invention can be designed to be coded at different transmittances, so that in the same cycle, each strip of light and each strip of gray can be defined and distinguished. Thereby, the image processing device can know the position of each stripe of the stripe image and the position of each stripe, and can better correct the shape of the surface obtained by the stripe projection profiler. While the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and it is still within the scope of the present invention to make equivalent substitutions of the modifications and retouchings without departing from the spirit and scope of the present invention. .哥' 201020512 [Simplified illustration of the drawings] Fig. 1 is a perspective view of a stripe projection profiler according to an embodiment of the present invention. Figure 2 is a top plan view of the fringe projection profilometer of Figure 1 with its light source illuminated. 3 is a schematic view of the fringe image of FIG. 1. [Main component symbol description]
100 條紋投影輪廓儀 110 光源 120 全像片 130 影像擷取裝置 140 影像處理裝置 150 透鏡 A 夾角 I 條紋影像 11 條狀亮紋 12 條狀暗紋 13 條狀灰紋 P1 第一傳遞路徑 P2 第二傳遞路徑 S 待測表面 11100 Stripe Projection Profiler 110 Light Source 120 Full Image 130 Image Capture Device 140 Image Processing Device 150 Lens A Angle I Stripe Image 11 Strip Bright 12 Strips 13 Strips Gray P1 First Passing Path P2 Second Transfer path S surface to be tested 11