201014977 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種熱氣動式蠕動幫浦，特別是有關於一種 可降低輸送流體受到加熱升溫影響之熱氣動式蠕動幫浦。 【先前技術】 一般來說’生醫微機電系統(Bi〇_MEMS)發展之主要目的是 要將分析儀器微小化，並在單一晶片上完成多項檢測及分析工 ©作，即所謂的實驗室晶片（lab-on-a-chip，LOC)或生物晶片 (Bio-chip)。透過微機電加工技術所製造出之微小化元件可具有 降低檢測儀器之製作成本、減少檢驗試劑消耗量、降低人為操作 誤差、增加檢測分析速度以及提高靈敏度與準確性等特色，因而 可有利於對相關生物資訊做更深入的探討。 實驗室晶片或生物晶片之流體控制通常是以蠕動幫浦 (peristaltic pump)來達成。蠕動幫浦乃是利用薄膜腔體往復運動 來改變流道腔體之體積，以推擠流道腔體中之流體朝一特定方向 流動。此外，蠕動幫浦依驅動方式可分為靜電式（Electrostatic)、 參 形狀記憶合金式、熱氣動式（Thermo-pneumatic)、壓電式 (Piezoelectric)、電磁式（Electromagnetic)及氣動式（pneumatic)等 形式。 就氣動式蠕動幫浦而言，其必須外接龐大的通氣裝置通氣 裝置通入高壓氣體來驅動薄膜腔體往復運動，以達成推擠流體流 動之目的❶雖然氣動式蠕動幫浦可具有強力推擠流體流動之特 點’但其整體構造過於龐大及複雜，因而會造成應用上的不便。 因此，針對上述氣動式蠕動幫浦所具有之缺點，熱氣動式螺動幫 浦可取代氣動式蠕動幫浦在微流體系統中扮演驅動流體流動之 5 0991-A51304-TW/97 工 700 201014977 關鍵角色。 請參閱第1A圖及第1B圖，一種習知之熱氣動式蠕動幫浦 1主要包括有一加熱底板10、一薄膜基板20及一流道基板30。 加熱底板10具有複數個加熱器11、複數個第一電極12a及 複數個第二電極12b。每一個加熱器11是連接於每一個第一電 極12a與每一個第二電極12b之間。此外，複數個第一電極12a 及複數個第二電極12b乃是電性連接於一控制器（未顯示）。 薄膜基板20是設置於加熱底板10之上，並且薄膜基板20 具有複數個薄膜腔體21。複數個薄膜腔體21是分別對應於及包 ® 覆著複數個加熱器11。 流道基板30是設置於薄膜基板20之上，並且流道基板30 具有複數個流道腔體31、一流道入口 32及一流道出口 33。複數 個流道腔體31是依序連通於彼此，並且複數個流道腔體31是連 接於流道入口 32與流道出口 33之間。此外，複數個流道腔體 31是分別位於薄膜基板20之複數個薄膜腔體21之上。 當熱氣動式蠕動幫浦1被應用來驅使一流體流動時，控制器 會對熱氣動式蠕動幫浦1進行推擠流體的循序控制。亦即，控制 φ 器會經由第一電極12a及第二電極12b依序對複數個加熱器11 進行通電，以使得加熱器11進行加熱運作。更詳的來說，如第 2A圖、第2B圖及第2C圖所示，控制器每次僅會對兩個加熱器 11進行通電，以使得該等加熱器11與兩對應薄膜腔體21之間 之密閉空間内的空氣被加熱。在此，該等加熱器11與兩對應薄 膜腔體21之間之密閉空間内的空氣會因受熱而膨脹，因而驅使 兩對應薄膜腔體21之體積增大，進而使得兩對應薄膜腔體21向 上頂起。在另一方面，當控制器不再對某一個加熱器11進行通 電時，該加熱器11與一對應薄膜腔體21之間之密閉空間内的空 6 0991-A51304-TW/97 工 700 201014977 氣便會冷卻下來，因而驅使該對應薄膜腔體21之體積回復原來 大小，而不再向上頂起。如上所述，藉由控制器反覆循環控制複 數個加熱器11之運作，即可達成使流體經由流道入口 32流入流 道腔體31之中以及使流體從流道腔體31經由流道出口 33流出 之功效，亦即，達成推擠流體流動之功效。 然而，熱氣動式蠕動幫浦1在實際應用上會具有一些缺點。 首先，由於流道腔體31是位於加熱器11之正上方，故流經流道 腔體31之流體會直接受到加熱器Π之加熱而升溫，因而會對流 體之結構或性質產生不利的影響。更具體而言，在温度升高之情 ® 形下，流體之結構被破壞、流體中產生氣泡或流體被蒸發等現象 可能會發生，因而不利於流體從熱氣動式蠕動幫浦1輸出後之應 用（例如，檢測及分析應用）。此外，由於薄膜腔體21之體積受 到限制，故熱氣動式蠕動幫浦1所能產生之流體推動力會很有 限。 【發明内容】 本發明基本上採用如下所詳述之特徵以為了要解決上述之 ©問題。也就是說，本發明適用於微流體系統之流體輸送，並且包 . 括一加熱底板，具有至少一加熱器；一薄膜基板，設置於該加熱 底板之上，並且具有至少一薄膜腔體，其中，該薄膜腔體具有一 第一腔室及一第二腔室，以及該第一腔室係連通於該第二腔室， 並且係包覆該加熱器；以及一流道基板，設置於該薄膜基板之 上，並且具有至少一流道腔體、一流道入口及一流道出口，其中， 該流道腔體係連接於該流道入口與該流道出口之間，並且係位於 該薄膜腔體之該第二腔室之上。 同時，根據本發明之熱氣動式蠕動幫浦，該薄膜腔體更具有 7 0991-A51304-TW/97 工 700 201014977 一連接腔室，以及該連接腔室係連接於該第一腔室與該第>膽多 之間。 又在本發明中，該加熱底板更具有至少一第一電極及奚少 第二電極，以及該加熱器係連接於該第一電極與該第二電濟之 間。 •ίτ特 為使本發明之上述目的、特徵和優點能更明顳易懂，卞又 舉較佳實施例並配合所附圖式做詳細說明。 【實施方式】 Φ 茲配合圖式說明本發明之較佳實施例。 _ 請參閱第3Α圖及第3Β圖，本實施例之熱氣動式蠕動寶_ 100主要包括有一加熱底板110、一薄膜基板120及一 流道基板 130。 加熱底板no具有複數個加熱器in、複數個第一電極ll2a 及一第二電極112 b。每一個加熱器111是連接於每一個第〆電 極112a與第二電極112b之間。此外，複數個第一電極112a及 第二電極112b乃是電性連接於一控制器（未顯示）。 φ 薄膜基板120是設置於加熱底板110之上，並且薄嫉基板 120具有複數個薄膜腔體121。每一個薄膜腔體121具有一第一 腔室121a、一第二腔室121b及一連接腔室121c。在本實施例之 中，每一個連接腔室121c是連接於每一個第一腔室121a與每一 個第二腔室121b之間，以及每一個第一腔室121a是包覆著每一 個加熱器111。另外，薄膜基板120可以是由聚二曱基矽氧烷 (Polydimethylsiloxane，PDMS)所製成。 流道基板130是設置於薄膜基板120之上，並且流道基板 130具有複數個流道腔體131、一流道入口 132a及一流道出口 8 0991-A51304_TW/97 工 700 201014977 132b。複數個流道腔體131是依序連通於彼此，並且複數個流道 腔體131是連接於流道入口 132a與流道出口 132b之間。特別的 是，在本實施例之中，每一個流道腔體131是位於每一個薄膜腔 體121之第二腔室121b之上，並且每一個流道腔體131是偏離 於包覆著加熱器111之第一腔室121a。 當熱氣動式蠕動幫浦100被應用來驅使一流體流動時，控制 器會對熱氣動式蠕動幫浦100進行推擠流體的循序控制。亦即， 控制器會經由第一電極112a及第二電極112b依序對複數個加熱 器111進行通電，以使得加熱器111進行加熱運作。更詳的來說， ® 控制器每次僅會對兩個加熱器111進行通電，以使得該等加熱器 111與兩對應薄膜腔體121之間之密閉空間内的空氣被加熱。在 此，該等加熱器111與兩對應薄膜腔體121之間之密閉空間内的 空氣會因受熱而膨脹，因而驅使兩對應薄膜腔體121之體積增 大，進而使得兩對應薄膜腔體121向上頂起。在另一方面，當控 制器不再對某一個加熱器111進行通電時，該加熱器111與一對 應薄膜腔體121之間之密閉空間内的空氣便會冷卻下來，因而驅 使該對應薄膜腔體121之體積回復原來大小，而不再向上頂起。 φ 如上所述，藉由控制器反覆循環控制複數個加熱器111之運作， 即可達成使流體經由流道入口 132a流入流道腔體131之中以及 使流體從流道腔體131經由流道出口 132b流出之功效，亦即， 達成推擠流體流動之功效。 此外，習知之薄膜腔體21中央處之上升高度（亦即，薄膜腔 體21在受熱膨脹後中央處之高度與其在受熱膨脹前之高度之差 值）可以下列方程式所表示： c 3ΓοΧΔΓ nR2 其中，s表示薄膜腔體21之上升高度，b表示加熱器11與 9 0991-A51304-TW/97 工 700 201014977 薄膜腔體21之間之密閉空間在受熱前之體積，r表示空氣膨脹 係數，ΖΙΓ表示薄膜腔體21受熱之溫度差，以及及表示流道腔 體31之半徑。 由以上之方程式可知，在γ、及皆為固定之情形下，^是與 及成正比之關係。亦即，當增大時，在相同的Ζ1Γ之 下，s之數值會隨之增大，或者，當增大時，欲達成相同1s•所 需之Λ Τ'會滅小。 如上所述，本實施例之熱氣動式蠕動幫浦100在實際應用上 會具有諸多優點。首先，由於流道腔體131並非位於加熱器111 ® 之正上方，故流經流道腔體131之流體可避免因加熱器111之加 熱而升溫。因此，流體之結構或性質仍可維持穩定，因而可利於 流體從熱氣動式蠕動幫浦100輸出後之應用（例如，檢測及分析 應用）。再者，由於每一個薄膜腔體121是由一第一腔室121a、 一第二腔室121b及一連接腔室121c所構成，故每一個薄膜腔體 121之整體體積已大幅增加（亦即，已大幅增加）。因此，薄膜 腔體121受熱後之膨脹效果會提升，因而可產生較大的流體推動 力，進而可增進推擠流體流動之功效。此外，由於每一個薄膜腔 φ 體121之整體體積已大幅增加，故薄膜腔體121受熱之溫度差可 以選擇性地被降低（亦即，」T可以被降低），因而可達成省電之 效果。 雖然本發明已以較佳實施例揭露於上，然其並非用以限定本 發明，任何熟習此項技藝者，在不脫離本發明之精神和範圍内， 當可作些許之更動與潤飾，因此本發明之保護範圍當視後附之申 請專利範圍所界定者為準。 10 0991-A51304-TW/97 工 700 201014977 【圖式簡單說明】 第1A圖係顯示一種習知之熱氣動式蠕動幫浦之立體組合示 意圖； 第1B圖係顯示根據第1A圖之習知之熱氣動式蠕動幫浦之立 體分解示意圖； 第2A圖係顯示習知之熱氣動式蠕動幫浦於一種運作狀態下 之剖面示意圖； 第2B圖係顯示習知之熱氣動式蠕動幫浦於另一種運作狀態 下之剖面示意圖； © 第2C圖係顯示習知之熱氣動式蠕動幫浦於再一種運作狀態 下之剖面示意圖； 第3A圖係顯示本發明之熱氣動式蠕動幫浦之立體組合示意 圖；以及 第3B圖係顯示本發明之熱氣動式蠕動幫浦之立體分解示意 圖。 【主要元件符號說明】 ▲ 1、100〜熱氣動式蠕動幫浦； 10、110〜加熱底板； 12a、112a〜第·一電極； 20、120〜薄膜基板； 30、130〜流道基板； 32、132a〜流道入口； 121a~第一腔室； 121c~連接腔室。 11、111〜加熱器； 12b、112b〜第二電極 21、121〜薄膜腔體； 31、131〜流道腔體； 33、132b〜流道出口； 121b〜第二腔室； 11 0991-A51304-TW/97 工 700201014977 IX. Description of the Invention: [Technical Field] The present invention relates to a thermo-pneumatic peristaltic pump, and more particularly to a thermopneumatic peristaltic pump which can reduce the influence of heating temperature on a conveying fluid. [Prior Art] In general, the main purpose of the development of biomedical micro-electromechanical systems (Bi〇_MEMS) is to miniaturize analytical instruments and perform multiple inspections and analysis on a single wafer, the so-called laboratory. Lab-on-a-chip (LOC) or bio-chip. Miniaturized components manufactured by MEMS processing technology can reduce the manufacturing cost of the inspection instrument, reduce the consumption of test reagents, reduce human error, increase the speed of detection and analysis, and improve sensitivity and accuracy. Related bioinformatics for a more in-depth discussion. Fluid control of laboratory wafers or biochips is typically achieved with a peristaltic pump. The peristaltic pump uses a reciprocating motion of the membrane chamber to change the volume of the flow channel cavity to push the fluid in the flow channel cavity to flow in a particular direction. In addition, the peristaltic pump can be divided into electrostatic (Electrostatic), parametric memory alloy, thermo-pneumatic, piezoelectric (piezoelectric), electromagnetic (electromagnetic) and pneumatic (pneumatic). Etc. In the case of a pneumatic peristaltic pump, it must be connected to a large ventilating device, and a high-pressure gas is introduced to drive the reciprocating motion of the film cavity to achieve the purpose of pushing the fluid flow. Although the pneumatic peristaltic pump can have a strong push. The characteristics of fluid flow 'but its overall structure is too large and complex, which may cause inconvenience in application. Therefore, in view of the shortcomings of the above-mentioned pneumatic peristaltic pump, the thermopneumatic screw pump can replace the pneumatic peristaltic pump as a driving fluid flow in the microfluidic system. 5 0991-A51304-TW/97 700 70014 Character. Referring to FIGS. 1A and 1B, a conventional thermo-pneumatic peristaltic pump 1 mainly includes a heating substrate 10, a film substrate 20, and a first-class substrate 30. The heating substrate 10 has a plurality of heaters 11, a plurality of first electrodes 12a, and a plurality of second electrodes 12b. Each of the heaters 11 is connected between each of the first electrodes 12a and each of the second electrodes 12b. In addition, the plurality of first electrodes 12a and the plurality of second electrodes 12b are electrically connected to a controller (not shown). The film substrate 20 is disposed on the heating substrate 10, and the film substrate 20 has a plurality of film cavities 21. The plurality of film cavities 21 are respectively corresponding to the package ® and the plurality of heaters 11 are covered. The flow path substrate 30 is disposed on the film substrate 20, and the flow path substrate 30 has a plurality of flow path cavities 31, a first-class channel inlet 32, and a first-class channel outlet 33. A plurality of flow path cavities 31 are sequentially connected to each other, and a plurality of flow path cavities 31 are connected between the flow path inlet 32 and the flow path outlet 33. Further, a plurality of flow channel cavities 31 are respectively located on a plurality of film cavities 21 of the film substrate 20. When the thermopneumatic peristaltic pump 1 is applied to drive a fluid flow, the controller performs a sequential control of the push fluid for the thermopneumatic peristaltic pump 1. That is, the control φ device sequentially energizes the plurality of heaters 11 via the first electrode 12a and the second electrode 12b to cause the heater 11 to perform the heating operation. More specifically, as shown in FIGS. 2A, 2B, and 2C, the controller energizes only two heaters 11 at a time such that the heaters 11 and the two corresponding film cavities 21 are provided. The air in the enclosed space is heated. Here, the air in the sealed space between the heaters 11 and the two corresponding film cavities 21 is expanded by heat, thereby driving the volume of the two corresponding film cavities 21 to increase, thereby causing the two corresponding film cavities 21 to Jack up. On the other hand, when the controller no longer energizes a certain heater 11, the air in the sealed space between the heater 11 and a corresponding film cavity 21 is 6 0991-A51304-TW/97 700 70014 The gas will cool down, thereby driving the volume of the corresponding film cavity 21 back to its original size without lifting up. As described above, by controlling the operation of the plurality of heaters 11 by the controller repeatedly, it is achieved that the fluid flows into the flow channel cavity 31 via the flow path inlet 32 and the fluid exits from the flow channel cavity 31 via the flow path. 33 The effect of outflow, that is, the effect of pushing the fluid flow. However, the thermopneumatic peristaltic pump 1 has some disadvantages in practical applications. First, since the flow path cavity 31 is located directly above the heater 11, the fluid flowing through the flow path cavity 31 is directly heated by the heating of the heater, and thus adversely affects the structure or properties of the fluid. . More specifically, in the case of an increase in temperature, the structure of the fluid is destroyed, bubbles are generated in the fluid, or the fluid is evaporated, which may occur, which is disadvantageous for the fluid to be output from the thermopneumatic peristaltic pump 1 Applications (for example, detection and analysis applications). In addition, since the volume of the membrane chamber 21 is limited, the hydropneumatic peristaltic pump 1 can generate a fluid driving force that is limited. SUMMARY OF THE INVENTION The present invention basically employs the features detailed below in order to solve the above-mentioned problems. That is, the present invention is applicable to fluid transport of a microfluidic system, and includes a heating substrate having at least one heater; a film substrate disposed on the heating substrate and having at least one film cavity, wherein The film cavity has a first chamber and a second chamber, and the first chamber is connected to the second chamber and covers the heater; and the first-class substrate is disposed on the film Above the substrate, and having at least a first channel cavity, a first channel inlet, and a first channel outlet, wherein the channel cavity system is connected between the channel inlet and the channel outlet, and is located in the film cavity Above the second chamber. Meanwhile, according to the thermopneumatic peristaltic pump of the present invention, the film cavity further has a connection chamber of 7 0991-A51304-TW/97 700, 201014977, and the connection chamber is connected to the first chamber and the The first > between the daring. In the present invention, the heating substrate further has at least one first electrode and a second electrode, and the heater is connected between the first electrode and the second electrode. The above described objects, features, and advantages of the invention will be apparent from the description and appended claims [Embodiment] Φ A preferred embodiment of the present invention will be described with reference to the drawings. _ Referring to FIG. 3 and FIG. 3, the thermopneumatic peristaltic _100 of the present embodiment mainly includes a heating substrate 110, a film substrate 120, and a flow channel substrate 130. The heating base plate no has a plurality of heaters in, a plurality of first electrodes 11a and a second electrode 112b. Each of the heaters 111 is connected between each of the second electrode 112a and the second electrode 112b. In addition, the plurality of first electrodes 112a and the second electrodes 112b are electrically connected to a controller (not shown). The φ film substrate 120 is disposed on the heating substrate 110, and the thin substrate 120 has a plurality of film cavities 121. Each of the film chambers 121 has a first chamber 121a, a second chamber 121b and a connecting chamber 121c. In the present embodiment, each of the connection chambers 121c is connected between each of the first chambers 121a and each of the second chambers 121b, and each of the first chambers 121a covers each of the heaters. 111. Further, the film substrate 120 may be made of polydimethylsiloxane (PDMS). The flow path substrate 130 is disposed on the film substrate 120, and the flow path substrate 130 has a plurality of flow path cavities 131, a first-class channel inlet 132a, and a first-class channel outlet 8 0991-A51304_TW/97 700 70014 14977 132b. A plurality of flow path cavities 131 are sequentially connected to each other, and a plurality of flow path cavities 131 are connected between the flow path inlet 132a and the flow path outlet 132b. In particular, in the present embodiment, each of the flow channel cavities 131 is located above the second chamber 121b of each of the film cavities 121, and each of the flow path cavities 131 is offset from the cladding heating. The first chamber 121a of the device 111. When the thermopneumatic peristaltic pump 100 is applied to drive a fluid flow, the controller performs a sequential control of the push fluid for the thermopneumatic peristaltic pump 100. That is, the controller sequentially energizes the plurality of heaters 111 via the first electrode 112a and the second electrode 112b to cause the heater 111 to perform a heating operation. More specifically, the ® controller energizes only two heaters 111 at a time such that the air in the enclosed space between the heaters 111 and the two corresponding film cavities 121 is heated. Here, the air in the sealed space between the heaters 111 and the two corresponding film cavities 121 is expanded by heat, thereby driving the volume of the two corresponding film cavities 121 to increase, thereby causing the two corresponding film cavities 121 Jack up. On the other hand, when the controller no longer energizes a certain heater 111, the air in the sealed space between the heater 111 and a corresponding film cavity 121 is cooled, thereby driving the corresponding film cavity. The volume of the body 121 returns to its original size and no longer rises upward. φ As described above, by controlling the operation of the plurality of heaters 111 by the controller, it is achieved that the fluid flows into the flow channel cavity 131 via the flow path inlet 132a and the fluid flows from the flow path cavity 131 through the flow path. The effect of the outlet 132b flowing out, that is, the effect of pushing the fluid flow. Further, the rising height at the center of the conventional film cavity 21 (i.e., the difference between the height of the film cavity 21 at the center after thermal expansion and its height before thermal expansion) can be expressed by the following equation: c 3ΓοΧΔΓ nR2 , s represents the rising height of the film cavity 21, b represents the volume of the sealed space between the heater 11 and the 9 0991-A51304-TW/97 700, the film cavity 21 is heated, and r represents the coefficient of air expansion, ΖΙΓ It represents the temperature difference between the heat of the film cavity 21 and the radius of the flow channel cavity 31. It can be seen from the above equation that in the case where γ and both are fixed, ^ is proportional to and . That is, when it is increased, the value of s will increase under the same Ζ1Γ, or, when it is increased, the Λ' required to achieve the same 1s will be extinguished. As described above, the thermopneumatic peristaltic pump 100 of the present embodiment has many advantages in practical applications. First, since the flow path cavity 131 is not located directly above the heater 111 ® , the fluid flowing through the flow path cavity 131 can be prevented from being heated by the heating of the heater 111. As a result, the structure or properties of the fluid remain stable, thereby facilitating the application of fluids from the thermopneumatic peristaltic pump 100 (e.g., detection and analysis applications). Moreover, since each of the film cavities 121 is composed of a first chamber 121a, a second chamber 121b and a connecting chamber 121c, the overall volume of each of the film cavities 121 has been greatly increased (ie, Has been greatly increased). Therefore, the expansion effect of the film cavity 121 after being heated is increased, so that a large fluid driving force can be generated, thereby enhancing the effect of pushing the fluid flow. In addition, since the overall volume of each of the film chambers φ body 121 has been greatly increased, the temperature difference of the temperature of the film chamber 121 can be selectively lowered (that is, "T can be lowered", thereby achieving a power saving effect. . Although the present invention has been disclosed in its preferred embodiments, it is not intended to limit the invention, and it is to be understood that those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. 10 0991-A51304-TW/97 700 700 201414977 [Simple description of the diagram] Figure 1A shows a stereoscopic combination diagram of a conventional thermopneumatic peristaltic pump; Figure 1B shows a thermopneumatic according to the conventional diagram of Figure 1A. Schematic diagram of the three-dimensional decomposition of the peristaltic pump; Figure 2A shows a schematic diagram of a conventional thermopneumatic peristaltic pump in a working state; Figure 2B shows a conventional thermopneumatic peristaltic pump in another operating state Schematic diagram of the cross section; © Figure 2C shows a schematic cross-sectional view of a conventional thermopneumatic peristaltic pump in a further operational state; Figure 3A shows a three-dimensional combination of the thermopneumatic peristaltic pump of the present invention; and 3B The figure shows a schematic exploded view of the thermopneumatic peristaltic pump of the present invention. [Main component symbol description] ▲ 1, 100 ~ thermopneumatic peristaltic pump; 10, 110 ~ heating plate; 12a, 112a ~ first electrode; 20, 120 ~ film substrate; 30, 130 ~ runner substrate; 132a~ runner inlet; 121a~first chamber; 121c~ connection chamber. 11, 111~ heater; 12b, 112b~ second electrode 21, 121~ film cavity; 31, 131~ runner cavity; 33, 132b~ runner exit; 121b~ second chamber; 11 0991-A51304 -TW/97 700