201010508 六、發明說明 【發明所屬之技術領域】 本發明是關於監視被使用於微影術用曝光裝置的超高 壓短弧水銀燈，或是被使用於電影投影機的短弧氙燈等的 放電燈的發光管的積蓄畸變量的放電燈的畸變量監視系統 及被適用於該系統的放電燈。 Φ 【先前技術】 在超高壓水銀燈、鹵素燈、雷射管等的燈中，在其作 動時，藉由發光管內壓上昇，或是電極與發光管玻璃的密 封部會熱脹，而有增大發光管的畸變量的情形。所以，在 燈的動作中當發光管的畸變量超過畸變量，則有發光管破 裂之虞。 例如短弧型水銀燈是在半導體元件或液晶顯示元件等 的製造製程的各種曝光工程中，被使用在電路圖案曬印曝 〇 光至半導體基板等。 又，近年來，藉由曝光面積的大型化或是工程的高生 產能力化，作爲短弧型水銀燈使用著大型者，在此種燈中 ，點燈時的發光管內壓力達到20氣壓至40氣壓。隨著此 ，施加於發光管的應力變大，而發光管破裂的危險性變高 ，而且破裂時的破壞力也變大。萬一，在發光管破裂時， 給予周圍的影響大，而成爲對光學機器或燈具等給予重大 的損傷。 尤其是’在各種製造製程中，當發光管在曝光工程中 -5- 201010508 破裂，則製造線會停止，對生產給予重大影響之故，因而 爲重要的問題。 爲了解決此種問題，提案在燈的動作中，在該燈的發 光管照射雷射光而檢測出該透射光，藉此進行測定透光性 構件的畸變量，當該畸變量成爲所定値以上時，則停止電 力供應或是作動警報機的光源裝置（參照專利文獻1)。 然而，光源裝置內組裝使用雷射的複雜的檢測功能在 現實上並不容易，又，有如何地設定測定發光管的畸變量 _ 的部位與雷射的對位等的問題之故，因而廣泛適用上有困 難性。 由此種理由，作爲防止燈的發光管破裂的手段，實際 上進行以下的情形。 超高壓短弧放電燈是在其點燈中使得發光管內部被維 持在高壓力，而且藉由來自電弧的熱使得構成發光管的玻 璃（主要爲石英玻璃）被加熱成高溫而帶有黏性，藉此， 畸變（內部應力）被積蓄在該發光管。又，在發光管成爲 @ 施加有被積蓄的畸變與在點燈中所施加的外部壓力的合計 應力，當該應力達到構成發光管的玻璃的界限應力，則會 提高發光管破裂的可能性。 如此，在被積蓄於發光管的畸變量成爲所定値之前就 停止該燈的使用之故，因而放電燈別地設定著點燈保證時 間。該點燈保證時間是例如以點燈電力點燈放電燈時所積 蓄的畸變量作爲基礎，而到達至成爲界限的畸變量（界限 畸變量）爲止的時間。又，該界限畸變量是考慮構成發光 -6- 201010508 管的玻璃的界限應力或是在點燈中施加於發光管的壓力等 還經驗性地被引導者。 專利文獻1:日本特公平6-5639號公報 【發明內容】 然而’僅藉由放電燈的點燈保證時間，來規定該放電 燈的使用壽命，有如以下的問題。 φ 被積蓄在發光管的畸變量是藉由被供應於放電燈的電 力値有所不相同。亦即，即使點燈時間相同，而被供應於 放電燈的電力値愈高，則被積蓄在發光管的畸變量也變大 。又，使用實際的放電燈的時候，變更所供應的電力値的 情形也不少。例舉具體性例子，有（1 )爲了間歇時間的 穩定化，採用從開始點燈放電燈就把該放電燈所致的照度 成爲一定而徐徐地上昇所供應的電力値的所謂定照度點燈 方式的情形，或是（2)在同一製線上，使用共通的放電 φ 燈來進行複數光阻處理工程之際，對照被使用於各光阻處 理工程的光阻的感度，藉由變更供應於放電燈的電力値， 來調整對於光阻的照度的情形。 如此地，未以一定電力値使用放電燈，亦即變更所供 應的電力値使用放電燈時，則以被供應於放電燈的電力値 成爲最大的使用條件，亦即以畸變的積蓄爲最大的使用條 件作爲基準而設定點燈保證時間。 於是，達到點燈保證時間爲止使用放電燈時，則成爲 更換、廢棄該放電燈的情形，然而，被廢棄的放電燈是在 201010508 被廢棄的放電燈是在其發光管的積蓄畸變量的觀點上，爲 仍可使用的狀態之故，因而有產生經濟性、環境性上白費 的問題。 又，爲了迴避此種白費，利用使用者的獨自判斷，有 提過點燈保證時間而被使用的情形，這時候，增加發光管 破裂的危除性，萬一燈破裂時，不但成爲需要維修昂貴的 光學系，而且生產會暫時停止之故，因而有大幅度降低生 產效率的問題。 @ 本發明是依據如以上的情況而作出發明者，其目的是 在於提供即使被供應於放電燈的電力値被變更時，也可以 以因應於本來的使用壽命的時間使用該放電燈，而且可迴 避在放電燈的點燈中發光管破裂的情形，安全地可使用該 放電燈的放電燈的畸變量監視系統及被適用於該系統的放 電燈。 本發明的放電燈的畸變量監視系統，具備：放電燈； 及 參 將電力供應於該放電燈的饋電裝置；及 算出該放電燈的發光管的積蓄畸變量的演算裝置，所 構成的放電燈的畸變量監視系統，其特徵爲： 藉由上述演算裝置，從上述饋電裝置供應於上述放電 燈的電力値別地，設定有算出點燈時間的函數的積蓄畸變 量的演算式， 藉由該演算式，將被供應於上述放電燈的電力値的開 始電力供應時的發光管的積蓄畸變量作爲初期値’因應於 -8- 201010508 該電力値的點燈時間特定著該放電燈的發光管的總積蓄畸 變量。 在本發明的放電燈的畸變量監視系統中，具備比較事 先所設定的發光管的界限畸變量與藉由演算式所特定的總 積蓄畸變量，該總積蓄畸變量達到該界限畸變量時發生警 報的警報裝置較佳。 又，具備顯示包含放電燈的總積蓄畸變量、點燈時間 Φ 及達到界限畸變量爲止的時間的資訊的顯示裝置較佳。 又，本發明的放電燈的畸變量監視系統中，在放電燈 設有記錄著包含用於設定演算式的參數、總積蓄畸變量及 累積點燈時間的資訊的燈資訊記錄媒體較佳。 在此種燈資訊記錄媒體，藉由演算裝置，寫入有放電 燈的總積蓄畸變量及累積點燈時間。 又，作爲燈資訊記錄媒體可使用1C標籤。 本發明的放電燈，是被適用於上述的放電燈的畸變量 Φ 監視系統的放電燈，其特徵爲： 具備記錄著包含用於設定演算式的參數，總積蓄畸變 量及累積點燈時間的資訊的燈資訊記錄媒體。 依照本發明的放電燈的畸變量監視系統，藉由被供應 於放電燈的電力値別地所設定的演算式，將開始電力供應 時的發光管的積蓄畸變量作爲初期値，而特定著該放電燈 的發光管的總積蓄畸變量之故，因而即使變更被供應於此 的電力値而使用放電燈時，也以因應於本來的使用壽命的 時間可使用該放電燈。而且，在發光管的總積蓄畸變量達 -9- 201010508 到界限畸變量時，作業人員可認識該畸變量之故，因而利 用中止放電燈的値，可迴避在放電燈的點燈中有發光管破 裂的情形，因此，安全地可使用該放電燈。 又，利用設置警報裝置，在發光管的總積蓄畸變量達 到界限畸變量時，確實地可告知使用者。 又，利用設置顯示裝置，在放電燈的點燈中，可經常 地監視發光管的積蓄畸變量。 又，藉由在放電燈本身設置燈資訊記錄媒體，因改良 _ 設計等的理由，即使使用與該放電燈規格不相同的其他放 電燈的情形，也藉由演算裝置可讀取被記錄於該其他的放 電燈的燈資訊記錄媒體的設定演算式所用的參數或總積蓄 畸變量等的資訊，藉此，演算裝置的設定自動地被變更， 而在該演算裝置被設定有關於該其他的放電燈的演算式之 故，因而每當更換放電燈，作業人員將設定演算裝置與放 電燈的規格進行對照而加以變更的煩雜作業成爲不需要， 而且可迴避作業人員忘記演算裝置的設定變更，或進行錯 @ 誤的設定的情形，由此，可防止藉由錯誤的演算式算出積 蓄畸變量之故，因而依據有關於須點燈的放電燈的固有演 算式，經常地可特定發光管的總積蓄畸變量。 又，熄燈放電燈時，藉由熄燈時的發光管的總積蓄畸 變量的資訊被寫入在燈資訊記錄媒體，而在再點燈放電燈 時，藉由演算裝置讀取上一次的熄燈時的總積蓄畸變量的 資訊，使得該熄燈時的總積蓄畸變量被利用作爲初期値之 故，因而在再點燈放電燈時確實地依據最新資訊而可特定 -10- 201010508 發光管的總積蓄畸變量。 【實施方式】 以下，針對於本發明的實施形態加以詳細地說明。 第1圖是表示本發明的放電燈的畸變量監視系統（以 下，稱爲「畸變量監視系統」）的一例的槪略構成的說明 圖。 φ 該畸變量監視系統是由：放電燈10，及將電力供應於 該放電燈10的饋電裝置20，及控制該饋電裝置20的電力 控制裝置21，及算出放電燈10的發光管11的積蓄畸變量 的演算裝置30，及顯示放電燈10的發光管11的總積蓄畸 變量等的資訊的顯示裝置40，及放電燈1〇的發光管11的 總積蓄畸變量達到界限畸變量時發生警報的餐報裝置50 所構成。 放電燈10是具有例如石英玻璃所成的發光管11，而 φ 在該發光管11的內部封入有水銀，構成作爲短弧型高壓 水銀燈。在第2圖也擴大所示地，發光管11是直管狀密 封部13形成於橢圓球管狀的發光部12兩端所成，而在該 發光管11內，陽極14及陰極15沿著管軸方向配置成互 相地相對的狀態。又，在發光管11的密封部13分別配置 有燈頭1 6，而在該燈頭1 6分別設有引入線W。 又，在放電燈10的一方的引入線W，安裝有1C標籤 C1。在該1C標籤C1，記錄有用於設定有關於放電燈10 的發光管11的畸變量的演算式的參數，發光管π的界限 -11 - 201010508 畸變量及積蓄畸變量，放電燈1〇的累積點燈時間，放電 燈1 〇的序號等的燈資訊。 在饋電裝置20設有將從該饋電裝置20供應於放電燈 1 〇的電力値及供應時間（點燈時間）等的資訊，傳送至演 算裝置30的輸出部（省略圖示）。 又，在電力控制裝置21連接有檢測出來自放電燈1〇 的放射光所致的照度的光檢測手段S，而依據藉由光檢測 手段S所檢測出的照度，藉由電力控制裝置21，反饋控 φ 制著從饋電裝置20供應於放電燈10的電力値。 演算裝置30是由：讀取被記錄在放電燈1〇的1C標 籤C1的資訊的資訊讀取部31，及藉由來自1C標籤C1的 資訊來設定演算式，而利用該演算式來特定發光管11的 總積蓄畸變量的演算部32，及暫時地記憶來自演算部32 的資訊的記憶部33，及將被記憶在記憶部33的資訊寫入 在1C標籤C1的資訊寫入部34，及控制電力控制裝置21 與警報裝置5 0的控制部3 5所構成。 ❹ 針對於此種畸變量監視系統的動作，參照第1圖及第 3圖加以說明。 首先，放電燈1〇被設定在所定的安裝部（省略圖示 )(步驟1)，而被記錄在該放電燈10的1C標籤ci的 燈資訊，藉由演算裝置3 0的資訊讀取部3 1所讀取（步驟 2)。該燈資訊是從資訊讀取部31被傳送至演算部32，又 被記憶在記憶部33。又’電力從饋電裝置20被供應於放 電燈10，藉此’若放電燈1 0被點燈（步驟3 )，則從饋 -12- 201010508 電裝置20有電力値或點燈時間的資訊，例如每經過1秒 鐘至數分鐘傳送至演算裝置3 0的演算部32 (步驟4)。 在演算裝置30的演算部32中，依據被供應於來自饋 電裝置20的放電燈10的電力値，來決定用於設定演算式 的參數値，藉此，設定著算出點燈時間的函數的積蓄畸變 量ε的演算式e =f ( t)。 在決定該演算式中，針對於與所使用的放電燈相同規 φ 格的放電燈中，藉由一定電力値進行點燈而實測發光管的 積蓄畸變量的時間性變化，依據該實測値的資料所導引的 近似式，使用作爲同一規格的放電燈別地被定義的固有基 礎演算式。 作爲該基礎演算式，在構成發光管的玻璃（黏彈性體 )的物理式特性，亦而在黏彈性體中，由外部施加於應力 與藉由該應力被積蓄於內部的畸變量的時間性變化之關係 ’適合地可使用在下述式（1)所表示的指數函數，或是 〇 在下述式（2)所表示的函數。此些基礎演算式是依據放 電燈1 0的發光管1 1的積蓄畸變量的時間性變化的實測値 而被適當地選擇。又’針對於黏彈性體的外部應力與積蓄 畸變量的時間性變化的關係’例如被記載於「非牛頓流體 力學」（中村喜代次著，可羅納公司發行）等。 〔數1〕 式（1) :f(0=anx〔l-exp(-ant)〕 式（2 ) : f ( t) =bntpn 在上述式（1 )及式（2 )中，an、an、bn及βη，是所 -13- 201010508 使用的放電燈ι〇的規格及藉由被供應的電力値所決定的 參數。此些參數所設定的電力値的範圍及電力値的間隔’ 是藉由放電燈10的規格有所不同’惟例如在額定耗電爲 12kW的放電燈10中，例如在10〜12kW (額定耗電的 80-100%)的範圍，以0.1〜lkw的間隔設定著參數。 又，參數是依據發光管11的積蓄畸變量的時間性變 化的實測値所設定，惟由利用3個以上電力値所作的發光 管11的積蓄畸變量的時間性變化的實測値，求出各個電 @ 力値別的參數，又從此些參數値，針對於參數〔an、αη或 是bn、βη )與電力値〔Ρ〕之關係’利用引導近似式〔 an = fi(P) ，an = f2(P)、或是 bn = fi(P) ’pn = f2(P)〕 ，而由該近似式，可求出所設定的電力値範圍的所有參數 値。 如以上地，利用依據被供應於放電燈1 〇的電力値來 決定參數値，設定著利用該電力値所作的演算式。 在如此地所設定的演算式中，被特定著被記憶在記憶 © 部33的發光管11的總積蓄畸變量，亦即將被供應於放電 燈10的電力値的開始電力供應的發光管11的積蓄畸變量 作爲初期値，而因應於該電力値的點燈時間來特定該放電 燈10的點燈中的發光管11的總積蓄畸變量。該被特定的 總積蓄畸變量，累積點燈時間及下述的積蓄畸變量的增加 曲線等的資訊，是暫時地被記憶在演算裝置3 0的記憶部 33，而被顯示在顯示裝置40的顯示部41。 又，若被供應於放電燈1〇的電力値被變更，則依據 -14 - 201010508 該電力値重新設定著演算式，而在該演算式中，將該電力 値的開始電力供應時的發光管11的積蓄畸變量作爲初期 値，特定著該放電燈10的點燈中的發光管11的積蓄畸變 量（步驟5 )。 一方面，暫時地被記憶在演算裝置30的記憶部33的 總積蓄畸變量，累積點燈時間及積蓄畸變量的增加曲線等 的資訊，是以適當的時機，藉由資訊寫入部34被寫入至 φ 放電燈10的1C標籤C1 (步驟6)。在此，對於1C標籤 C1的資訊寫入，是每當被記憶在記憶部33的資訊被更新 時被實行，或是僅在放電燈1〇的熄燈時被實行都可以。 以下，針對於總積蓄畸變量的特定，例如發光管11 的初期積蓄畸變量爲〇，作爲用以算出積蓄畸變量的基礎 演算式，將給予上述式（1)的放電燈10，以1 OkW的電 力點燈400小時及以llkW的電力點燈400小時（合計 8 00小時）的情形列舉作爲例子，更具體地加以說明。 φ 若供應l〇kW的電力來點燈放電燈10，則依據該電力 値（10kW)，使得上述式（1)的參數3„及αη，分別被決 定成「a^a!」及「0^ = 0^」，而被設定成爲演算式e=f(t )=a】x〔 l-exp(-ai t)。然後，如第4圖所示地，給予利 用10kW的電力所作的積蓄畸變量的增加曲線A(以下， 稱爲「曲線A」。而在10kW的電力供應於放電燈10的時 間，在第4圖中如粗線（a)所示地，沿著曲線A使得發 光管11的總積蓄畸變量增加。在此，在第4圖中，橫縱 是表示放電燈的點燈時間，而縱軸是表示發光管的積蓄畸 -15- 201010508 變量’將初期畸變量作爲〇，而將界限畸變量作爲100時 的相對値。 然後’在自開始供應1 OkW電力經過400小時之後， 若將供應的電力變更成llkW，則依據該電力値（llkW) 上述式（1)的參數Αη& αη’分別被決定成r An = A2」及 「αη = α2」，而重新設定著演算式s =f( t) =a2x〔 1-exp (-α2 t )。如此，利用該演算式’給予利用1 1 kW電力所作 的積蓄畸變量的增加曲線B (以下，稱爲「曲線B」）， 在UkW的電力供應於放電燈1〇的時間中，變更被供應 於放電燈的電力値時’亦即將開始11 kW的電力供應 時的發光管Π的積蓄畸變量（在圖示例爲約30)作爲初 期値，而在第4圖中如粗線（a)所示地，沿著曲線B使 得發光管的總積蓄畸變量增加。 如此地，藉由電力値別地所設定的演算式，特定著放 電燈1 0點燈中的發光管1 1的總積蓄畸變量，如第5圖所 示地，實際的總積蓄畸變量，是沿著曲線A的粗線（a) 及曲線B'的粗線（a)1而增加。在此，在第5圖中，橫軸 是表示放電燈的累積點燈時間，縱軸是表示發光管的積蓄 畸變量，將初期畸變量作爲〇，並將界限畸變量作爲1〇〇 時的相對値。如此’從開始供應1 1 kW的電力經過400小 時（累積點燈時間爲800小時）之後’發光管1 1的總積 蓄畸變量（圖示例子爲66) ’是表示比供應10kW的電力 8 00小時進行點燈時的總積蓄畸變量還要高，而比供應 11 kW的電力800小時進行點燈時的總積蓄畸變量還要低 201010508 値。 在以上，在演算裝置30的控制部35中，經常地比 利用演算式所特定的總積蓄畸變量與從放電燈10的1C 籤C1所讀取的發光管11的界限畸變量（步驟7)。之 ，在總積蓄畸變量未達到界限畸變量時，則該資訊被傳 至電力控制裝置21，而繼續進行對於放電燈10的電力 應（至步驟4)。另一方面，在總演算裝置達到界限畸 φ 量時，該資訊號被傳送至警報裝置50，自警報部51發 警報（步驟8)。 又，在放電燈10的發光管11的總積蓄畸變量達到 限畸變量之前，欲熄燈該放電燈1 0時，熄燈時的積蓄 變量資訊被寫入在1C標籤C1，在再點燈放電燈10時 則將該積蓄畸變量作爲初期値，而特定著放電燈10的 燈中的發光管11的總積蓄畸變量。 依照此種畸變量監視系統，利用被供應於放電燈 Φ 的電力値別地所設定的演算式，將開始電力供應時的發 管11的積蓄畸變量作爲初期値，被特定著放電燈10的 燈中的發光管11的總積蓄畸變量之故，因而即使變更 供應於此的電力値而使用放電燈10時，也可將放電燈 使用至該發光管11的積蓄畸變量成爲界限畸變量爲止 時間，亦即也可將放電燈1 〇使用至因應於放電燈1 〇的 來的使用壽命的時間。而且，在發光管11的總積蓄畸 量達到至界限畸變量時，使用者可認識該界限畸變量之 ，因此利用中止使用放電燈1 〇，在點燈放電燈10中可 較 標 後 送 供 變 出 界 畸 5 點 10 光 點 被 10 的 本 織 愛 故 迴 -17- 201010508 避發光管11破裂的情形，因此，安全地可使用放電燈ίο 〇 又，因設有警報裝置50，因此發光管11的總積蓄畸 變量達到至界限畸變量時，可將該情形確實地可告知使用 者。 又，因設有顯示裝置40，因而在放電燈10的點燈中 ，經常地可監視發光管11的積蓄畸變量。 又，因在放電燈10設有1C標籤C1，因改良設計等 的理由，即使使用與該放電燈10規格不相同的其他放電 燈10的情形，也藉由演算裝置30可讀取被記錄於該其他 的10的1C標籤C1的設定演算式所用的參數或總積蓄畸 變量等的資訊，藉由演算裝置30被讀取，藉此，演算裝 置30的設定自動地被變更，而在該演算裝置30被設定有 關於該其他的放電燈1〇的演算式之故，因而每當更換放 電燈10，作業人員將設定演算裝置30與放電燈10的規格 進行對照而加以變更的煩雜作業成爲不需要，而且可迴避 作業人員忘記演算裝置30的設定變更，或進行錯誤的設 定的情形，由此，可防止藉由錯誤的演算式算出積蓄畸變 量之故，因而依據有關於須點燈的放電燈10的固有演算 式，經常地可特定發光管11的總積蓄畸變量。 又，熄燈放電燈1 〇時，因熄燈時的發光管11的總積 蓄畸變量的資訊被寫入在1C標籤C1之故，因而.在再點燈 放電燈10時，藉由演算裝置30讀取被記錄在1C標籤C1 之上一次熄燈時之總積蓄畸變量的資訊，使得該熄燈時的 -18- 201010508 總積蓄畸變量被利用作爲初期値之故，因而在再點燈放電 燈10時確實地依據最新資訊而可特定發光管11的總積蓄 崎變量。 在本發明的畸變量監視系統中，並不被限定於上述實 施形態，可施加各種變更。 例如設於放電燈的燈資訊記錄媒體是並不被限定於1C 標籤，而可利用各種的電子資訊記錄媒體。 φ 又，在從警報裝置發生警報經過適當時間（例如24 小時）之後，停止對於放電燈的電力供應而可控制能熄燈 該放電燈。 又，作爲放電燈，並不被限定於短弧型高壓水銀燈， 而可適用於各種的放電燈。 〔實施例〕 (實驗例1 ) 參 依照表示於第2圖的構成，製作下述規格的放電燈（ 10) ° 發光管（11):石英玻璃製，全長185mm，發光部（ 12):長度1 60mm，最大內徑1 1 〇mm，最大外徑120mm ，發光部（12)內的容積1000cm3，密封部（13);外徑 3 4mm 陽極（14 ):鎢製，陰極（15 ) ··鍍钍鎢製，電極間 距離：13mm 封入物（量）：水銀（30mg/cm3) -19- 201010508201010508 6. Technical Field of the Invention The present invention relates to an ultrahigh-voltage short-arc mercury lamp for monitoring an exposure device for lithography, or a discharge lamp for a short-arc xenon lamp or the like used in a movie projector. A distortion monitoring system for a discharge lamp in which an arc tube accumulates a distortion variable and a discharge lamp applied to the system. Φ [Prior Art] In the lamps of ultra-high pressure mercury lamps, halogen lamps, laser tubes, etc., when the actuator is actuated, the internal pressure of the arc tube rises, or the sealing portion of the electrode and the glass of the arc tube is inflated, and Increasing the distortion of the arc tube. Therefore, when the distortion of the arc tube exceeds the distortion variable in the operation of the lamp, there is a flaw in the arc tube. For example, a short-arc type mercury lamp is used in various exposure processes such as a semiconductor element or a liquid crystal display element, and is used in a circuit pattern to expose a light to a semiconductor substrate. In addition, in recent years, large-sized people use short-arc mercury lamps by increasing the size of the exposure area or increasing the productivity of the project. In such lamps, the pressure inside the arc tube at the time of lighting reaches 20 to 40. Air pressure. With this, the stress applied to the arc tube becomes large, and the risk of the arc tube being broken becomes high, and the destructive force at the time of cracking also becomes large. In the event that the arc tube is broken, the influence on the surroundings is large, and it becomes a major damage to the optical machine or the lamp. In particular, in various manufacturing processes, when the arc tube is broken in the exposure process -5 - 201010508, the manufacturing line is stopped, which has a major impact on production, and is therefore an important issue. In order to solve such a problem, it is proposed that when the lamp is operated, the light-emitting tube of the lamp is irradiated with the laser beam to detect the transmitted light, thereby measuring the distortion of the translucent member, and when the distortion is equal to or greater than the predetermined value. Then, the power supply is stopped or the light source device of the alarm device is activated (see Patent Document 1). However, the complicated detection function of assembling a laser in a light source device is not easy in reality, and how to set a problem of measuring the position of the distortion _ of the arc tube and the alignment of the laser, etc. It is difficult to apply. For this reason, as a means for preventing the arc of the lamp from being broken, the following cases are actually carried out. The ultra-high pressure short arc discharge lamp is such that the inside of the arc tube is maintained at a high pressure in its lighting, and the glass (mainly quartz glass) constituting the arc tube is heated to a high temperature by the heat from the arc. Thereby, distortion (internal stress) is accumulated in the arc tube. Further, in the arc tube, @ is the total stress applied to the accumulated distortion and the external pressure applied to the lighting, and when the stress reaches the boundary stress of the glass constituting the arc tube, the possibility that the arc tube is broken is increased. In this manner, the use of the lamp is stopped before the distortion stored in the arc tube becomes a predetermined value, and thus the lighting lamp is set to the lighting guarantee time. The lighting guarantee time is, for example, the time until the distortion (boundary distortion) that becomes the limit is reached based on the distortion stored when the lighting lamp is turned on. Further, the limit distortion is an empirically guided person considering the boundary stress of the glass constituting the illuminating -6-201010508 tube or the pressure applied to the arc tube in the lighting. Patent Document 1: Japanese Patent Publication No. Hei 6-5639. SUMMARY OF THE INVENTION However, the service life of the discharge lamp is limited only by the lighting time of the discharge lamp, which has the following problems. The distortion of φ accumulated in the arc tube is different by the power supplied to the discharge lamp. That is, even if the lighting time is the same and the electric power supplied to the discharge lamp is higher, the distortion accumulated in the arc tube becomes larger. Moreover, when an actual discharge lamp is used, there are many cases where the supplied electric power is changed. As a specific example, there is (1) a so-called illuminance lighting in which the electric power supplied by the discharge lamp is gradually increased and the illuminance due to the discharge lamp is gradually increased in order to stabilize the intermittent time. In the case of the mode, or (2) using the common discharge φ lamp for the complex photoresist processing on the same line, the sensitivity of the photoresist used in each photoresist processing project is compared with the change The power of the discharge lamp is adjusted to adjust the illumination of the photoresist. In this way, when the discharge lamp is not used for a certain amount of power, that is, when the supplied electric power is changed and the discharge lamp is used, the electric power supplied to the discharge lamp becomes the maximum use condition, that is, the distortion accumulation is maximized. The lighting guarantee time is set using the condition as a reference. Therefore, when the discharge lamp is used until the lighting guarantee time is reached, the discharge lamp is replaced and discarded. However, the discharge lamp that was discarded in 201010508 is a distorted variable in the luminous tube. In the above, it is a state that can still be used, and thus there is a problem that economical and environmental costs are in vain. In addition, in order to avoid such inconvenience, the user's own judgment is used, and the lighting is guaranteed to be used. In this case, the risk of rupture of the arc tube is increased, and in the event of a lamp rupture, it is not only required to be repaired. The expensive optical system, and the production will temporarily stop, thus greatly reducing the production efficiency. The present invention has been made in accordance with the above circumstances, and an object thereof is to provide that the discharge lamp can be used at a time corresponding to the original service life even when the electric power supplied to the discharge lamp is changed. In the case where the arc tube is broken in the lighting of the discharge lamp, the distortion monitoring system of the discharge lamp of the discharge lamp and the discharge lamp applied to the system can be safely used. An abnormality monitoring system for a discharge lamp according to the present invention includes: a discharge lamp; and a power feeding device that supplies electric power to the discharge lamp; and a calculation device that calculates an accumulated distortion of the arc tube of the discharge lamp The distortion monitoring system of the lamp is characterized in that: by the above-described calculation device, the calculation formula of the accumulated distortion variable that calculates the lighting time is set from the power supply of the discharge lamp supplied from the power feeding device, and According to the calculation formula, the accumulated distortion of the arc tube when the power supply of the electric discharge lamp is supplied to the discharge lamp is used as the initial 値' in response to the lighting time of the electric power -8 -8 - 201010508 The total accumulated distortion of the arc tube. In the distortion monitoring system of the discharge lamp of the present invention, there is provided a boundary distortion amount of the luminous tube set in advance and a total accumulated distortion variable specified by a calculation formula, and the total accumulated distortion variable occurs when the boundary distortion variable is reached. The alarm device for the alarm is preferred. Further, it is preferable to provide a display device that displays information including the total accumulated distortion amount of the discharge lamp, the lighting time Φ, and the time until the limit distortion is reached. Further, in the distortion monitoring system for a discharge lamp of the present invention, it is preferable that the discharge lamp is provided with a lamp information recording medium on which information for setting a parameter of the calculation formula, total accumulated distortion, and accumulated lighting time is recorded. In such a lamp information recording medium, the total accumulated distortion amount and the accumulated lighting time of the discharge lamp are written by the arithmetic means. Further, a 1C tag can be used as the lamp information recording medium. The discharge lamp of the present invention is a discharge lamp applied to the distortion Φ monitoring system of the discharge lamp described above, and is characterized in that: the recording includes parameters for setting the calculation formula, and the total accumulated distortion and accumulated lighting time are accumulated. Information light information recording media. According to the distortion monitoring system of the discharge lamp of the present invention, the accumulated distortion of the arc tube at the time of starting the power supply is determined by the calculation formula set by the electric power supplied to the discharge lamp. Since the total amount of the arc tube of the discharge lamp is accumulated by the distortion amount, even when the electric discharge lamp is supplied and the discharge lamp is used, the discharge lamp can be used in response to the original service life. Moreover, when the total accumulated distortion of the luminous tube reaches -9-201010508 to the limit distortion variable, the operator can recognize the distortion variable, and thus the sputum of the discharge lamp can be avoided to illuminate the lighting of the discharge lamp. The tube is broken and, therefore, the discharge lamp can be used safely. Further, by providing the alarm device, the user can be surely informed when the total accumulated distortion of the arc tube reaches the limit distortion. Further, by providing the display device, the accumulated distortion of the arc tube can be constantly monitored in the lighting of the discharge lamp. Further, by providing the lamp information recording medium in the discharge lamp itself, even if another discharge lamp having a different discharge lamp size is used for the reason of improvement, design, etc., it can be read and recorded by the calculation device. The information on the setting calculation formula of the lamp information recording medium of the other discharge lamp or the information on the total accumulated distortion is automatically changed, and the setting of the calculation device is automatically changed, and the other discharge is set in the calculation device. Since the calculation of the lamp is performed, the operator does not need to change the setting of the calculation device and the discharge lamp, and the operator can forget the setting change of the calculation device, or When the setting of the error @ erroneous is performed, it is possible to prevent the accumulated distortion from being calculated by the erroneous calculation formula. Therefore, depending on the inherent calculation formula of the discharge lamp to be lit, the total of the luminous tubes can often be specified. Accumulate distortion variables. Further, when the discharge lamp is turned off, information on the total accumulated distortion of the arc tube when the light is turned off is written in the lamp information recording medium, and when the discharge lamp is turned on again, the last time the light is turned off is read by the calculation device. The information on the total accumulated distortion variable makes the total accumulated distortion at the time of the light-off being used as the initial flaw, so that the total savings of the light-emitting tube can be specified according to the latest information when the light is discharged again. Distortion variable. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail. Fig. 1 is an explanatory view showing a schematic configuration of an example of a distortion monitoring system (hereinafter referred to as "distortion monitoring system") of a discharge lamp of the present invention. φ The distortion monitoring system is composed of a discharge lamp 10, a power feeding device 20 that supplies electric power to the discharge lamp 10, a power control device 21 that controls the power feeding device 20, and an arc tube 11 that calculates the discharge lamp 10. The calculation device 30 for accumulating the distortion variable, and the display device 40 for displaying information such as the total distortion of the arc tube 11 of the discharge lamp 10, and the total accumulated distortion of the arc tube 11 of the discharge lamp 1 when the limit distortion is reached The meal report device 50 in which an alarm occurs is formed. The discharge lamp 10 is an arc tube 11 made of, for example, quartz glass, and φ is sealed with mercury inside the arc tube 11, and is configured as a short-arc type high-pressure mercury lamp. Also shown in Fig. 2, the arc tube 11 has a straight tubular sealing portion 13 formed at both ends of the elliptical bulb-shaped light-emitting portion 12, and in the arc tube 11, the anode 14 and the cathode 15 are along the tube axis. The directions are arranged in a state of being opposed to each other. Further, a lamp cap 16 is disposed in each of the sealing portions 13 of the arc tube 11, and a lead wire W is provided in each of the caps 16. Further, a 1C label C1 is attached to one of the lead wires W of the discharge lamp 10. In the 1C label C1, a parameter for calculating the distortion of the arc tube 11 of the discharge lamp 10 is recorded, and the limit of the arc π is -11 - 201010508. The distortion and the accumulated distortion, and the accumulation of the discharge lamp 1〇 Lamp information such as the lighting time, the serial number of the discharge lamp 1 。. The power feeding device 20 is provided with information such as power supply and supply time (lighting time) supplied from the power feeding device 20 to the discharge lamp 1 and transmitted to an output unit (not shown) of the arithmetic unit 30. Further, the power control device 21 is connected to the light detecting means S for detecting the illuminance caused by the emitted light from the discharge lamp 1 , and the illuminance detected by the light detecting means S is controlled by the power control device 21 The feedback control φ produces the power 供应 supplied from the power feeding unit 20 to the discharge lamp 10. The calculation device 30 is configured to read the information recorded by the 1C tag C1 of the discharge lamp 1 and set the calculation formula by the information from the 1C tag C1, and use the calculation formula to specify the illumination. The calculation unit 32 for accumulating the distortion variable of the tube 11 and the memory unit 33 for temporarily storing the information from the calculation unit 32 and the information to be stored in the storage unit 33 are written in the information writing unit 34 of the 1C label C1. And a control unit 35 that controls the power control device 21 and the alarm device 50. ❹ The operation of such a distortion monitoring system will be described with reference to Figs. 1 and 3 . First, the discharge lamp 1A is set in a predetermined mounting portion (not shown) (step 1), and the lamp information recorded in the 1C tag ci of the discharge lamp 10 is read by the information reading unit of the calculation device 30. 3 1 read (step 2). The lamp information is transmitted from the information reading unit 31 to the calculation unit 32, and is also stored in the storage unit 33. Further, 'electric power is supplied from the power feeding device 20 to the discharge lamp 10, whereby 'if the discharge lamp 10 is turned on (step 3), the electric device 20 has power 値 or lighting time information from the feed-12-201010508 For example, the calculation unit 32 transmits to the calculation device 30 every one second to several minutes (step 4). The calculation unit 32 of the calculation device 30 determines the parameter 用于 for setting the calculation formula based on the power 供应 supplied to the discharge lamp 10 from the power feeding device 20, thereby setting the function for calculating the lighting time. The formula for accumulating the distortion ε is e = f ( t). In the calculation of the calculation formula, for the discharge lamp having the same φ grid as the discharge lamp to be used, the time variation of the accumulated distortion of the luminous tube is actually measured by lighting with a certain power ,, according to the actual measurement The approximate expression guided by the data is an intrinsic basic calculation formula defined as a discharge lamp of the same specification. As the basic calculation formula, the physical properties of the glass (viscoelastic body) constituting the arc tube, and the temporality of the external stress applied to the stress and the distortion stored in the viscoelastic body by the external force. The relationship of the change 'suitably can be an exponential function represented by the following formula (1), or a function represented by the following formula (2). These basic calculation formulas are appropriately selected in accordance with the actual measurement of the temporal variation of the accumulated distortion of the arc tube 11 of the discharge lamp 10. Further, the relationship between the external stress of the viscoelastic body and the temporal change of the accumulated distortion variable is described, for example, in "non-Newtonian fluid mechanics" (issued by Nakamura, and issued by Rhone Corporation). [Equation 1] Formula (1): f(0=anx[l-exp(-ant)] Formula (2) : f ( t) =bntpn In the above formulas (1) and (2), an, an , bn and βη, are the specifications of the discharge lamp 〇 used by the-13-201010508 and the parameters determined by the supplied power 。. The range of the power 设定 set by these parameters and the interval of the power ' are borrowed. The specifications of the discharge lamp 10 are different. For example, in the discharge lamp 10 having a rated power consumption of 12 kW, for example, in the range of 10 to 12 kW (80-100% of rated power consumption), the interval is set at intervals of 0.1 to lkw. Further, the parameter is set based on the actual measurement of the temporal variation of the accumulated distortion of the arc tube 11, but the actual measurement of the temporal variation of the accumulated distortion of the arc tube 11 by using three or more electric powers is performed. From the parameters of each electric power force, and from these parameters, for the relationship between the parameters [an, αη or bn, βη) and electric power [Ρ], use the guide approximation [ an = fi(P) , An = f2(P), or bn = fi(P) 'pn = f2(P)], and from this approximation, all the parameters 所 of the set power range can be obtained. As described above, the parameter 値 is determined based on the power 値 supplied to the discharge lamp 1 値, and the calculation formula by the power 値 is set. In the calculation formula set as described above, the total accumulated distortion amount of the arc tube 11 that is stored in the memory © the memory unit 33 is also supplied to the arc tube 11 of the power supply of the discharge lamp 10 The accumulated distortion is used as the initial enthalpy, and the total accumulated distortion of the arc tube 11 in the lighting of the discharge lamp 10 is specified in response to the lighting time of the power raft. Information such as the specific total accumulated distortion amount, the accumulated lighting time, and the following increase curve of the accumulated distortion amount are temporarily stored in the memory unit 33 of the calculation device 30, and displayed on the display device 40. Display unit 41. In addition, if the electric power 供应 supplied to the discharge lamp 1〇 is changed, the electric power 値 is reset according to the power consumption -14 - 201010508, and in the calculation formula, the electric heating tube when the electric power is started to be supplied The accumulated distortion amount of 11 is the initial enthalpy, and the accumulated distortion of the arc tube 11 in the lighting of the discharge lamp 10 is specified (step 5). On the other hand, information such as the total accumulated distortion amount temporarily accumulated in the memory unit 33 of the arithmetic unit 30, the accumulated lighting time, and the increase curve of the accumulated distortion amount are, at an appropriate timing, the information writing unit 34 is used. It is written to the 1C tag C1 of the φ discharge lamp 10 (step 6). Here, the information writing to the 1C tag C1 is performed every time the information memorized in the memory unit 33 is updated, or only when the discharge lamp 1 is turned off. Hereinafter, for the specificity of the total accumulated distortion variable, for example, the initial accumulated distortion amount of the arc tube 11 is 〇, and as the basic calculation formula for calculating the accumulated distortion amount, the discharge lamp 10 of the above formula (1) is given to 1 OkW. The case where the electric power is turned on for 400 hours and the electric power is turned on by llkW for 400 hours (total of 800 hours) is taken as an example, and is more specifically described. φ If the power of 10 kW is supplied to the discharge lamp 10, the parameters 3 „ and α η of the above formula (1) are determined to be “a^a!” and “0, respectively, based on the power 値 (10 kW). ^ = 0^", and is set to the equation e=f(t)=a]x[ l-exp(-ai t). Then, as shown in Fig. 4, the increase curve A of the accumulated distortion amount by the electric power of 10 kW (hereinafter referred to as "curve A" is given. The time when the electric power of 10 kW is supplied to the discharge lamp 10 is at the fourth time. In the figure, as shown by the thick line (a), the total accumulated distortion amount of the arc tube 11 is increased along the curve A. Here, in Fig. 4, the horizontal and vertical directions indicate the lighting time of the discharge lamp, and the vertical axis It means that the accumulated distortion of the luminous tube is -15- 201010508. The variable 'has the initial distortion variable as the 〇, and the boundary distortion amount is taken as the relative 値 of 100. Then 'after the supply of 1 OkW power for 400 hours, if it will be supplied When the electric power is changed to llkW, the parameter Αη & αη' of the above formula (1) is determined to be r An = A2" and "αη = α2", respectively, based on the electric power ll (llkW), and the calculation formula s = f ( t) = a2x [ 1-exp (-α2 t ). In this way, the increase curve B (hereinafter referred to as "curve B") of the accumulated distortion variable using 11 kW of electric power is given by this calculation formula, at UkW When the electric power is supplied to the discharge lamp for 1 ,, the electric power supplied to the discharge lamp is changed. At the same time, the accumulated distortion of the luminous tube ( when the power supply of 11 kW is about to start (about 30 in the example of the figure) is taken as the initial 値, and in the fourth figure, as shown by the thick line (a), The curve B causes the total accumulated distortion of the arc tube to increase. Thus, by the calculation formula set by the power discrimination, the total accumulated distortion of the arc tube 1 in the discharge lamp 10 is specified, as in the first In the figure 5, the actual total accumulated distortion variable increases along the thick line (a) of curve A and the thick line (a) 1 of curve B'. Here, in Fig. 5, the horizontal axis is It is the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, and the initial distortion is used as the 〇, and the boundary distortion is used as the relative 値 of 1〇〇. Thus '1 1 kW is supplied from the beginning. After 400 hours of power (accumulated lighting time is 800 hours), the total accumulated distortion of the luminous tube 1 (illustrated as 66) is the total accumulated distortion when lighting is performed for 800 hours of power supply of 10 kW. The amount is even higher, and the total accumulated distortion is more than 800 hours of power supply of 11 kW. In the above, the control unit 35 of the calculation device 30 is often more distorted than the total accumulated distortion amount specified by the calculation formula and the arc tube 11 read from the 1C sign C1 of the discharge lamp 10. The amount (step 7). When the total accumulated distortion variable does not reach the limit distortion, the information is transmitted to the power control device 21, and the power supply to the discharge lamp 10 is continued (to step 4). When the total calculation device reaches the limit distortion amount, the information number is transmitted to the alarm device 50, and an alarm is issued from the alarm portion 51 (step 8). Further, before the total accumulated distortion of the arc tube 11 of the discharge lamp 10 reaches the limit distortion variable, when the discharge lamp 10 is turned off, the accumulated variable information at the time of the light-off is written in the 1C label C1, and the discharge lamp is turned on again. At 10 o'clock, the accumulated distortion is used as the initial enthalpy, and the total accumulated distortion of the arc tube 11 in the lamp of the discharge lamp 10 is specified. In the above-described distortion monitoring system, the accumulated distortion amount of the hair tube 11 at the time of starting the power supply is used as the initial parameter, and the discharge lamp 10 is specified by the calculation formula set by the power supply to the discharge lamp Φ. Since the total amount of the arc tube 11 in the lamp is accumulated, the discharge lamp 10 can be used until the electric power supplied thereto is used. The time, that is, the discharge lamp 1 也 can also be used to the time required for the service life of the discharge lamp 1 。. Moreover, when the total accumulated distortion of the arc tube 11 reaches the limit distortion amount, the user can recognize the boundary distortion variable, so that the discharge lamp 1 中 can be used for suspension, and the discharge lamp 10 can be sent later than the standard. Changed out of bounds 5 points 10 spots are 10 times of the woven love back to -17- 201010508 to avoid the rupture of the light-emitting tube 11, therefore, the discharge lamp ίο 安全, safely, because the alarm device 50 is provided, so the light-emitting tube When the total accumulated distortion variable of 11 reaches the limit distortion variable, the situation can be surely informed to the user. Further, since the display device 40 is provided, the accumulated distortion of the arc tube 11 can be constantly monitored in the lighting of the discharge lamp 10. Further, since the 1C label C1 is provided in the discharge lamp 10, even if another discharge lamp 10 having a different size from the discharge lamp 10 is used, the calculation device 30 can be read and recorded in the case of improving the design or the like. The information such as the parameters used in the setting calculation formula of the other 10 1C tags C1 or the total accumulated distortion is read by the calculation device 30, whereby the setting of the calculation device 30 is automatically changed, and the calculation is performed. Since the device 30 is set with the calculation formula of the other discharge lamp 1〇, the troublesome work for the operator to change the specification of the discharge calculation device 30 and the discharge lamp 10 is changed every time the discharge lamp 10 is replaced. If necessary, the worker can be prevented from forgetting the setting change of the calculation device 30 or setting the error, thereby preventing the accumulated distortion from being calculated by the erroneous calculation formula, and thus depending on the discharge to be lit. The inherent computational formula of the lamp 10 can often specify the total accumulated distortion of the arc tube 11. When the discharge lamp 1 is turned off, the information on the total accumulated distortion of the arc tube 11 at the time of turning off the light is written in the 1C label C1. Therefore, when the discharge lamp 10 is turned on again, it is read by the calculation device 30. Taking the information of the total accumulated distortion when recorded on the 1C label C1 once turned off, the -18-201010508 total accumulated distortion at the time of the light-off is used as the initial flaw, so when the discharge lamp 10 is turned on again It is possible to specify the total accumulated slug of the arc tube 11 based on the latest information. The distortion monitoring system of the present invention is not limited to the above embodiment, and various modifications can be applied. For example, the lamp information recording medium provided in the discharge lamp is not limited to the 1C tag, and various electronic information recording media can be utilized. φ Further, after an appropriate time (for example, 24 hours) has elapsed from the alarm device, the power supply to the discharge lamp is stopped, and the discharge lamp can be controlled to be turned off. Further, the discharge lamp is not limited to a short-arc type high-pressure mercury lamp, and can be applied to various discharge lamps. [Examples] (Experimental Example 1) A discharge lamp (10) having the following specifications was produced in accordance with the configuration shown in Fig. 2. An arc tube (11): made of quartz glass, having a total length of 185 mm, and a light-emitting portion (12): length 1 60mm, maximum inner diameter 1 1 〇mm, maximum outer diameter 120mm, volume 1000cm3 in the light-emitting part (12), sealing part (13); outer diameter 3 4mm anode (14): tungsten, cathode (15) ·· Tungsten plated with tungsten, distance between electrodes: 13mm Enclosure (amount): Mercury (30mg/cm3) -19- 201010508
額定耗電：12k W，額定電壓：115V，額定電流： 104A 將上述的規格的放電燈作爲「放電燈A」。 又，以10kW，1 lkW及12kW的電力値進行點燈放電 燈A，針對於各電力値，每當點燈時間經過1 00小時，進 行測定發光管（11)的積蓄畸變量。 作爲基礎演算式使用上述式（1)，從上述的積蓄畸 變量的實測値，求出各電力値的參數〔an，αη〕的値，來 設定各電力値的演算式。將參數〔an，αη〕的値表示於下 述表1。又，在第6圖表示所測定的積蓄畸變量及由演算 式所給予的積蓄畸變量的增加曲線。在第6圖中，橫軸是 表示放電燈的累積點燈時間，而縱軸是表示發光管的積蓄 畸變量，表示以初期畸變量作爲〇，以界限畸變量作爲 1〇〇時的相對値。 由第6圖可明瞭，發光管的積蓄畸變量是可瞭解沿著 從以上述式（1)作爲基礎演算式的演算式所給予的積蓄 畸變量的增加曲線會增加。 〔表1〕 電力値(w) ~ 10 11 12 an 74.76 127.99 234.49 αη 0.00132 0.0011 ------ 0.00067 (實驗例2) 依照表示於第2圖的構成，製作\、+±0祕〜&哉败/ # 1F下述規格的放電燈（ -20- 201010508 10 )。 發光管（11):石英玻璃製，全長170mm，發光部（ 12);長度145mm，最大內徑92mm，最大外徑100mm， 發光部（12 )內的容積 60〇cm3，密封部（13 );外徑 3 0mm 陽極（14):鎢製，陰極（15):鍍钍鎢製，電極間 距離：1 1 m m ❶ 封入物（量）：水銀（25mg/cm3)Rated power consumption: 12k W, rated voltage: 115V, rated current: 104A The discharge lamp of the above specifications is used as "discharge lamp A". Further, the lighting discharge lamp A was turned on with a power of 10 kW, 1 lkW and 12 kW, and the accumulated distortion of the arc tube (11) was measured for each power 经过 every 100 hours of lighting time. Using the above equation (1) as the basic calculation formula, the enthalpy of the parameter [an, αη] of each power 値 is obtained from the above-described actual measurement 积 of the accumulated distortion, and the calculation formula of each power 値 is set. The 値 of the parameter [an, αη] is shown in Table 1 below. Further, Fig. 6 shows an increase curve of the measured distortion distortion and the accumulated distortion amount given by the calculation formula. In Fig. 6, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, and indicates the relative distortion when the initial distortion is used as the 〇 and the boundary distortion is used as the 〇〇. . As can be seen from Fig. 6, the accumulated distortion of the arc tube is such that the increase curve along the accumulated distortion variable given from the equation of the above formula (1) is increased. [Table 1] Electric power 値 (w) ~ 10 11 12 an 74.76 127.99 234.49 αη 0.00132 0.0011 ------ 0.00067 (Experimental example 2) According to the configuration shown in Fig. 2, \, +±0 secret ~ &; 哉 / / # 1F discharge lamp of the following specifications ( -20- 201010508 10 ). Light-emitting tube (11): made of quartz glass, full length 170mm, light-emitting part (12); length 145mm, maximum inner diameter 92mm, maximum outer diameter 100mm, volume 60发光cm3 in the light-emitting part (12), sealing part (13); Outer diameter 3 0mm Anode (14): Tungsten, cathode (15): Rhodium-plated tungsten, distance between electrodes: 1 1 mm ❶ Enclosure (amount): Mercury (25mg/cm3)
額定耗電：10kW，額定電壓：95V，額定電流：105A 將上述的規格的放電燈作爲「放電燈B」。 又，以8kW，9kW及10kW的電力値進行點燈放電燈 B，針對於各電力値，每當點燈時間經過1 00小時，進行 測定發光管（11)的積蓄畸變量。 作爲基礎演算式使用上述式（2)，從上述的積蓄畸 變量的實測値，求出各電力値的參數〔bn，βη〕的値，來 φ 設定各電力値的演算式。將參數〔bn，bn〕的値表示於下 述表2。又，在第7圖表示所測定的積蓄畸變量及由演算 式所給予的積蓄畸變量的增加曲線。在第7圖中’橫軸是 表示放電燈的累積點燈時間，而縱軸是表示發光管的積蓄 畸變量，表示以初期畸變量作爲〇，以界限畸變量作爲 100時的相對値。 由第7圖可明瞭，發光管的積蓄畸變量是可瞭解沿著 從以上述式（2)作爲基礎演算式的演算式所給予的積蓄 畸變量的增加曲線會增加》 -21 - 201010508 〔表2〕 電力値(w) 10 11 12 bn 0.373 0.436 0.484 βη 0.713 0.760 0.809 (實驗例3 ) 有關於放電燈A，從在實驗例1所求出的參數〔an， αη〕的値針對於參數〔an，αη〕與電力値〔P〕之關係，導 出近似式〔( Ρ ) ，an = f2 (P)〕，而由該近似式， 在10〜12kW的電力範圍以〇.1 kW刻度，求出各電力値的 參數〔bn，βη〕的値。 又，利用表示於第1圖的構成的畸變量監視系統，在 以10kW 290小時，以12kW 160小時，以llkW 130小時 ，以 10.5kW 290 小時，以 1 1 .5kW 250 小時以 1 lkW 3 10 小時的條件，點燈放電燈A，然後，熄燈放電燈A。在第 8圖表示利用畸變量監視系統所測定的積蓄畸變量的增加 曲線。在第8圖中，橫軸是表示放電燈的累積點燈時間， 而縱軸是表示發光管的積蓄畸變量，表示以初期畸變量作 爲〇，以界限畸變量作爲1 00時的相對値。又，以粗線所 表示的曲線，係藉由畸變量監視系統所測定的積蓄畸變量 的增加曲線，其他以虛線表示之曲線是表示藉由演算式所 給予的利用 l〇kW、10_5kW、llkW、11.5kW 及 12kW 的各 電極値所作的積蓄畸變量的增加曲線。 由第8圖可明瞭，在以上述條件進行點燈放電燈A時 -22- 201010508 ’發光管（11)的積蓄畸變量達到至界限畸變量爲止的時 間’可瞭解爲以額定耗電1 2kW進行點燈時的時間（點燈 保證時間）的大約1·7倍。 又’熄燈放電燈Α之後，測定發光管（11)的積蓄畸 變量’被確認與藉由畸變量監視系統所測定的積蓄畸變量 大約一致。 φ 【圖式簡單說明】 第1圖是表示本發明的畸變量監視系統的一例子的槪 略構成的說明圖。 第2圖是表示切剖放電燈的一例的局部構成的說明圖 〇 第3圖是表示本發明的畸變量監視系統的動作的方塊 圖。 第4圖是表示利用演算式所給予的積蓄畸變量的增加 φ 曲線的圖式。 第5圖是表示利用本發明的畸變量監視系統所測定的 積蓄畸變量的增加曲線的圖式。 第6圖是表示在實驗例1中，所測定的積蓄畸變量及 從演算式所給予的積蓄畸變量的增加曲線的圖式。 第7圖是表示在實驗例2中，所測定的積蓄畸變量及 從演算式所給予的積蓄畸變量的增加曲線的圖式。 第8圖是表示在實驗例3中，利用畸變量監視系統所 測定的積蓄畸變量的增加曲線的圖式。 -23- 201010508 【主要元件符號說明】 1 〇 :放電燈 1 1 :發光管 12 :發光部 1 3 :密封部 1 4 :陽極 15 :陰極 · 1 6 :燈頭 20 :饋電裝置 2 1 :電力控制裝置 3 0 :演算裝置 31 :資訊讀取部 3 2 :演算部 33 :記憶部 3 4 :資訊寫入部 _ 3 5 :控制部 40 :顯示裝置 4 1 :顯不部 5 0 :警報裝置 51 :警報部 C1 : 1C標籤 S :光檢測手段 W :引入線 -24-Rated power consumption: 10kW, rated voltage: 95V, rated current: 105A The discharge lamp of the above specifications is referred to as "discharge lamp B". In addition, the lighting discharge lamp B is operated with an electric power of 8 kW, 9 kW, and 10 kW, and the accumulated distortion of the arc tube (11) is measured for each power 经过 every 100 hours of lighting time. Using the above equation (2) as the basic calculation formula, the parameters of the electric power 値 parameters [bn, βη] are obtained from the actual measured enthalpy of the accumulated distortion, and φ is used to set the calculation formula of each electric power 値. The 値 of the parameter [bn, bn] is shown in Table 2 below. Further, Fig. 7 shows an increase curve of the measured distortion distortion and the accumulated distortion amount given by the calculation formula. In Fig. 7, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, indicating the relative distortion when the initial distortion is used as the 〇 and the boundary distortion is taken as 100. It can be understood from Fig. 7 that the accumulated distortion of the luminous tube is such that the increase curve along the accumulated distortion variable given from the formula of the above formula (2) is increased. -21 - 201010508 [Table 2) Electric power 値 (w) 10 11 12 bn 0.373 0.436 0.484 βη 0.713 0.760 0.809 (Experimental Example 3) Regarding the discharge lamp A, the parameter [an, αη] obtained in Experimental Example 1 is directed to the parameter [ The relationship between an, αη] and electric power [P] is derived from the approximate expression [( Ρ ) , an = f2 (P)], and the approximate expression is obtained in the range of 〜.1 kW in the power range of 10 to 12 kW. The parameter of the parameter [bn, βη] of each power 値. Further, the distortion monitoring system of the configuration shown in Fig. 1 is used for 10 kW 290 hours, 12 kW for 160 hours, ll kW for 130 hours, 10.5 kW for 290 hours, and 1 1.5 kW for 250 hours for 1 lkW 3 10 Under the condition of hour, light discharge lamp A, then, discharge lamp A. Fig. 8 shows an increase curve of the accumulated distortion measured by the distortion monitoring system. In Fig. 8, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, and indicates the relative enthalpy when the initial distortion is used as the 畸 and the boundary distortion is taken as 100 00. Further, the curve indicated by the thick line is an increase curve of the accumulated distortion measured by the distortion monitoring system, and the other curve indicated by the broken line indicates the use of l〇kW, 10_5 kW, and llkW given by the calculation formula. The increase curve of accumulated distortions made by each electrode of 11.5 kW and 12 kW. It can be understood from Fig. 8 that when the lighting discharge lamp A is operated under the above conditions, -22-201010508 'the time until the accumulated distortion of the luminous tube (11) reaches the limit distortion amount can be understood as the rated power consumption of 1 2 kW. The time (lighting guarantee time) when lighting is performed is about 1.7 times. Further, after the discharge lamp is turned off, the accumulated distortion amount of the arc tube (11) is confirmed to be approximately the same as the accumulated distortion measured by the distortion monitoring system. [Fig. 1] Fig. 1 is an explanatory view showing a schematic configuration of an example of the distortion monitoring system of the present invention. Fig. 2 is an explanatory view showing a partial configuration of an example of a slit discharge lamp. Fig. 3 is a block diagram showing the operation of the distortion monitoring system of the present invention. Fig. 4 is a diagram showing an increase φ curve of the accumulated distortion variable given by the calculation formula. Fig. 5 is a view showing an increase curve of the accumulated distortion measured by the distortion monitoring system of the present invention. Fig. 6 is a view showing an increase curve of the stored distortion amount and the accumulated distortion amount given from the calculation formula in Experimental Example 1. Fig. 7 is a graph showing an increase curve of the stored distortion amount and the accumulated distortion amount given from the calculation formula in Experimental Example 2. Fig. 8 is a view showing an increase curve of the accumulated distortion measured by the distortion monitoring system in Experimental Example 3. -23- 201010508 [Explanation of main component symbols] 1 〇: Discharge lamp 1 1 : Illumination tube 12 : Light-emitting part 1 3 : Sealing part 1 4 : Anode 15 : Cathode · 1 6 : Lamp cap 20 : Feeder 2 1 : Electricity Control device 30: Calculation device 31: Information reading unit 3 2: Calculation unit 33: Memory unit 3 4: Information writing unit _ 3 5 : Control unit 40: Display device 4 1 : Display unit 5 0 : Alarm device 51 : Alarm unit C1 : 1C label S : Light detecting means W : Leading line - 24 -