201003721 六、發明說明： 【發明所屬之技術領域】 本發明係關於高壓放電燈，尤其關於放電燈所使用之 鶴電極之材料。 【先前技術】 現在於液晶製造工程中之硬化及乾燥或是接合劑之硬 化等多使用交流放電方式之高壓放電燈。該交流放電方式 β高s放電燈所使用之電極必須同時具備釋放電子之陰極 特性’和難以消耗、變形之陽極特性。就以同時滿足該些 特性之電極而言，所知的有含有氧化钍之鎢電極。（日本 專利特開2007-179849公報） 該電極爲自電極表面之深度爲5nm之位置中钍（Th)之 含有率爲 0.25〜4.98AC%之鎢電極。在此，AC%(Atomic Concentrate %)係以百分比表示钍（Th)之原子數對含有存 在於自電極表面深入5nm爲止之範圍中的鎢（W)、钍（Th) 之原子數’及钍（Th)氧化物之分子數等之所有原子數及分 子數之合計。 含有上述氧化钍之鎢電極因具有氧化钍爲低之功函數 ’故具有優良之陰極特性。即是，因具有低功函數，故可 以以藉由低電壓釋放出電子，並且於將燈予以放電之時能 夠長時間安定動作。如此一來，含有氧化钍之鎢電極因電 子釋放性佳，且能夠以比較低之溫度釋放出電子，故電極 之溫度不會上升，能夠壓制因氧化社之蒸發所導致之放電 -5- 201003721 管之黑化、白濁。 並且，氧化钍因在氧化物中持有最高融點，具有降低 電極溫度之效果，故也具有良好之陽極特性。即是，因具 有降低電極溫度之效果’故提高鎢之消耗、耐變形性。並 且，氧化钍因持有高融點’故蒸發量少’與屬於放電管材 料之石英玻璃難反應。因此’能夠抑制鎢之消耗、變形， 並且能夠抑制放電管之黑化、白濁。 如此一來，上述含有氧化钍之鎢電極能夠同時高度具 備陰極和陽極所要求之特性。因此，藉由使用高壓放電燈 含有氧化钍之鎢電極，能夠抑制電極之消耗、變形及放電 管之黑化、白濁等之現象等。 【發明內容】 但是，因對上述專利文獻1所涉及之電極所使用之氧 化钍爲放射性物質，則有對環境造成壞影響之問題。 於是，本發明之目的係提供不用使用環境汙染物質， 可以抑制電極之消耗、變形，可以抑制放電管之黑化、白 濁之高壓放電燈。 藉由本發明之高壓放電燈，其特徵爲具有由紫外線透 過性之材料所構成，在至少封入稀有氣體之放電管，和在 該放電管內之兩端，以各包含一端之方式而被設置之兩個 放電電極，上述兩個放電電極之至少一方係由以鎢爲基材 ’且在該基材含有將至少一種以上之稀土類元素之氧化物 換算成稀土類元素之金屬單體量爲0.5〜5.0體積百分比之 -6- 201003721 濃度的射極材料的放電電極所構成。再者，該含有量係藉 由燈種類而決定最佳範圍。 再者’藉由本發明之高壓放電燈，其特徵爲具有由紫 外線透過性之材料所構成，在至少封入水銀及稀有氣體之 放電管’和在該放電管內之兩端，以各包含一端之方式而 被設置之兩個放電電極，上述兩個放電電極之至少一方係 由以鎢爲基材，且在該基材含有將至少一種以上之稀土類 元素之氧化物換算成稀土類元素之金屬單體量爲0.5〜5.0 體積百分比之濃度的射極材料的放電電極所構成。 【實施方式】 以下針對本發明之高壓放電燈，參照圖面予以說明。 第1圖爲沿著本發明之高壓放電燈之軸的剖面圖。第 2圖爲放大第1圖之高壓放電燈之重要部位之剖面圖。 在第1圖所示之高壓放電燈1 1中，氣密性容器12爲 紫外線透過性之石英製之發光管。在該氣密性容器1 2之 兩端內部，如第1圖所示般，對向配置有線圈繞組電極1 3 。該些線圈繞組電極1 3係各被支撐於氣密性容器1 2之兩 端之外部的插槽1 4。 在氣密性容器12之內部封入有氬（Ar)氣體等之稀有 氣體、水銀還有鐵、錫、鹵化水銀。鹵化水銀可以使用碘 化水銀（H g 12)。於封入水銀、鐵、錫、碘化水銀之時，在 波長3 5 8nm、3 6 5nm、3 7 8nm附近具有發光峰値。 再者，在氣密性容器1 2之內部即使封入有氬（Ar)氣 201003721 體等之稀有氣體、水銀、鹵化鉈亦可。作爲鹵化鉈即使使 用碘化鉈（T1I)亦可。在該種高壓放電燈11中，在波長 352nm、365nm' 378nm 附近，尤其在 352nm、378nm 附近 具有較大發光峰値。並，亦可以採用溴化鉈來取代碘化鉈 〇 如第2圖所示般，線圈繞組電極1 3係由電極構件1 3 1 、螺旋狀捲繞於該電極構件131之一端的線圈132所構成 。該線圈1 32係被設置成用以藉由增加電極構件1 3 1之前 端之表面積，來抑制電極構件1 3 1之溫度上升。電極構件 131之另一端與電極箔133接合。電極構件131之另一端 被連接於一端之電極箔1 3 3之另一端係在插槽1 4之內部 ，如第1圖所示般，被連接於外部導線1 5。 電極構件13 1係在鎢（W)含有射極材料。射極材料具 有自電極構件131釋放出電子之能力，並且具有降低電極 構件1 3 1之溫度的能力。該射極材料係由例如鑭（La)、鉋 (Ce)、銪（Eu)、鐯（pr)中之任一種類之稀土類元素之氧化 物所構成，換算成稀土類之金屬單體量含有0.5〜5.0體積 百分比之濃度。該濃度範圍藉由下述所示之兩種燈的實驗 結果導出。於使高壓放電燈點燈之時，該高壓放電燈具備 有含有該濃度範圍以外之濃度之射極材料之電極1 3，氣密 性容器1 2則黑化或白濁。 並且，上述射極材料之濃度範圍於氣密性容器1 2之 外徑Φ爲低於40mm之時，則以〇.5〜2.5體積百分比爲 佳。再者，氣密性容器1 2之外徑Φ爲4 0 m m以上之時， -8- 201003721 則以Ο . 5〜5.0體積百分比爲佳。 體積百分比可以藉由下式求出。 B= { Vem/(vw + Vem)} X 1 〇〇 =[(m e m / p e m) / { (m w / p w) + (m e m / p e m)} ] X 1 0 0 在此，上述式的B表示體積百分比°vw表示鎢之體 積，vem表示鎢含有之稀土類元素之體積。即是，體積百 分比係指所含有之稀土類元素的體積對鎢的體積之比率。 該些體積 VW、vem可以自各個的質量（mw、meni)及密 度（P w ' P em)求出。在此，電極構件131藉由鎢含有稀土 類元素之氧化物，使鎢含有稀土類元素而形成。並且，上 述稀土類元素之質量mem爲由鎢含有之稀土類氧化物之質 量所算出之質量。 使用以上所示之高壓放電燈1 1，執行以下之兩種實驗 〇 實驗1所使用之高壓放電燈11之氣密性容器1 2爲外 管徑Φ爲 27.5mm，厚壁m爲1.5mm，發光長度 L爲 1 0 0 0 m m，燈電流値1 1 . Ο A之規格。以額定電壓1 1 5 Ο V、額 定電流10.5A、額定電力12kW使該高電壓放電燈11額定 點燈。然後，觀測5 00小時後之氣密性容器12之兩端之 黑化、白濁狀態。將其結果表示於第3圖。 第3圖爲按照每種射極材料，使用使鎢各含有不同濃 度及不同平均粒度之射極材料的電極構件1 3 1，以5階段 -9- 201003721 評估該些燈之黑化狀態、白濁狀態。在第3圖中 化、白濁之評估，數値越大表示特性越差。並且 狀態和白濁狀態之評估之和，表示黑化狀態和白 總合評估’在第3圖中評估之和爲4以下之時以 爲5之時以△表示，爲6以上之時以X表示。 接著，實驗2所使用之高壓放電燈1 1之氣 12爲外管徑φ爲84.0mm，厚壁m爲1.5mm，發 爲1，490mm，燈電流値23.4A之規格。以額定電 、額定電流23.4A、額定電力44kW使該高電壓j 額定點燈。然後，觀測5 00小時後之氣密性容器 端之黑化、白濁狀態。將其結果表示於第4圖。 第4圖係與第3圖相同，爲按照每種射極材 使鎢各含有不同濃度之射極材料的電極構件131 段評估該些燈之黑化狀態、白濁狀態。在第4圖 黑化、白濁之評估，數値越大表示特性越差。並 化狀態和白濁狀態之評估之和’表示黑化狀態和 之總合評估，在第3圖中評估之和爲4以下之時 ，爲5之時以△表示，爲6以上之時以X表示。 藉由第3圖、第4圖之結果，判明下述。 首先，總合評估爲〇之高壓放電燈1 1所使 構件131之射極材料之含有量於實驗1之時’可 稀土類元素單體之量爲〇.5〜2·5體積百分比，實 換算成稀土類元素單體之量爲〇.5〜5·0體積百分 ，針對黑 ，以黑化 濁狀態之 〇表示， 密性容器 光長度L M 1,925V 孜電燈11 :12之兩 料，使用 ，以5階 中，針對 且，以黑 白濁狀態 以〇表示 用之電極 知換算成 驗2之時 比之範圍 -10- 201003721 在實驗i中，射極材料之濃度高於2 · 5體積百分比之 時，或是在實驗2中，射極材料之濃度高於5.0體積百分 比之時，氣密性容器12白濁。該係因爲存在於電極構件 1 3 1表面之射極材料變多，於點燈中射極材料飛散之故。 依此，飛散之射極材料，附著於氣密性容器1 2之內面等 ，引起照度降低及因射極材料所導致之石英結晶化，有可 能牽連到氣密性容器1 2之破損。 另外，在兩實驗中，於射極材料之濃度低於0.5體積 百分比之時，氣密性容器1 2則黑化。該因電極構件1 3 1 成爲接近於純鎢之狀態，故來自電極構件1 23 1之電子釋 放性變差，點溫度變高之故。依此，促進電極構件1 3 1之 惡化，並且蒸發鎢，使氣密性容器1 2黑化。 再者，在兩實驗中，可知被添加於總合評估爲〇之高 壓放電燈1 1所使用之電極構件1 3 1之射極材料之平均粒 徑低於3 μιη。在此，平均粒徑係使用沿著軸方向切斷放電 電極1 3 1，將其剖面以雷射顯微鏡放大至1 〇〇〇倍之第5圖 所示之畫像而求出。即是，平均粒徑爲藉由測量第5圖所 示之畫像內之任意的5 0 μιη之圓中所含之射極材料粒子之 最大直徑（內圓角徑），並將射極材料粒子之最大直徑之和 除以射極材料粒子之個數而求出。 射極材料之平均粒徑爲3 μπι以上之時，氣密性容器則 黑化。該係因爲射極材料之粒徑大，故射極材料之粒子難 以在電極構件1 3 1之表面之結晶化的區域移動。其結果， 因射極材料難以供給至電極構件1 3 1表面，故難以取得藉 -11 - 201003721 由含有射極材料而得到之效果。 即是’由上述實驗之結果，可知能夠抑制因電極構件 1 3 1之放電所產生之消耗、變形，並且充分抑制氣密性容 器1 2之黑化、白濁之射極材料之平均粒徑低於3 μιη。該 平均粒徑越小越佳，更佳之範圍爲i . 5 μιη以下。 由上述可知’換算成稀土類元素單體之量爲〇·5〜5.0 體積百分比之濃度之稀土類氧化物，藉由使電極構件131 含有平均粒徑低於3 μιη之射極材料，抑制電極構件1 3 1之 放電所產生之消耗、變形，並且可以充分抑制氣密性容器 1 2之黑化、白濁。 接著，針對上述之本實施型態所涉及之電極構件1 3 1 之製造方法予以說明。製造方法雖然並不特別限定，但是 可以以例如下述之方法予以製造。 首先，以規定量在磁製皿中混合使稀土類金屬之硝酸 化物成爲水溶液狀，和平均粒徑爲2〜3 μπι純度爲9 9.9 5 % 以上之鎢粉末，予以乾燥。之後，在700〜9 00 °C之氫環境 中使稀土類金屬之硝酸化物分解，使氧化物微細分散之同 時，使鎢粉末還原。射極材料粉末即使爲氧化物之形式， 以球磨機與鎢粉混合亦可，但是於粗大射極材料粒子直接 殘存於燒結體之時’其結果因爲難以使本發明之射極材料 粒子徑低於3 μ m，故粉末之製造方法以上述方法爲佳。 接著，以模具壓製成縱15mmx橫15mmx長度65〇mm 左右之大小，製作成特定大小之成形體。之後’在氫環境 執行通電燒結’取得縱1 2 · 5 m m x橫1 2 · 5 m m x高度5 4 0 m m -12- 201003721 左右之燒結體。 接著’藉由一面敲被加熱至1400〜1700 °C之燒結體， 一面拉長，燒結體則被拉成細長。接著，將被拉成細長之 燒結體硏磨成直徑成爲一定之同心圓狀。最後，藉由電解 處理硏磨被硏磨成同心圓狀之燒結體之表面，形成電極構 件 1 3 1。 於形成電極構件13 1之後，對氣密性容器12，在 1200〜1400 °C之氫環境下執行洗淨之後，在2000 °C以下執 行真空處理。然後，藉由將在電極構件1 3 1之前端具備有 線圈1 3 2之線圈捲組電極1 3組裝至該氣密性容器1 2，則 可以取得上述高壓放電燈1 1。 藉由使用以上所示之線圈繞組電極1 3，可以抑制電極 構件1 3 1之消耗、變形，可以形成能夠抑制氣密性容器12 之黑化、白濁之高壓放電燈1 1。 在此，當將上述電極構件1 3 1之前端之鎢結晶之長邊 方向設爲長軸（L)，將該電極之剖面方向設爲短軸（W)之時 ，藉由將L/W設爲3 · 0以上，則可以抑制電極構件1 3 1之 消耗、變形，能夠抑制氣密性容器1 2之黑化、白濁。以 下，針對該點予以說明。 電極構件1 3 1之前端爲了成爲放電之起點予以溶融’ 形成溶融層。在此’將溶融層於從電極構件1 3 1之前端朝 向軸方向之長度設爲M ’將電極構件131之直徑設爲D之 時，M /D則爲〇 · 〇 1以上0 · 5以下之範圍。該溶融層有被形 成在放電之起點（點）之一部份之情形’或是被形成在涵蓋 -13- 201003721 電極構件1 3 1之前端部分全體之情形。 情形，當溶融層再結晶化時，鎢之結晶 結晶化之鎢結晶如第6圖A、第6圖B 所示般，以朝向軸方向長大爲佳。該係 第6圖A、第6圖B所示般長大，使電 射極材料容易在電極構件131表面移動 第7圖A、第7圖B所示之顯微鏡照片 鎢結晶成爲微細狀態之時，則難以使電; 極材料在電極構件131表面移動。 該係如使第6圖A、第6圖B模式 ，於長大之鎢結晶之時，因射極材料容 移動，故電極構件131內之射極材料容 表面移動。 相反地，如使第7圖A、第7圖B 示般，於鎢結晶微細之時，因射極材料 界移動 '故電極構件131內之射極材料 〇 因此，被形成在該溶融層正下方之 極構件131之長邊方向設爲長軸（L)，并 剖面方向設爲短軸（W)之時，L/W大爲 案發明者確認出以3.0以上爲佳，更佳 以上。 再者，藉由上述電極構件131又含 量百分比之鋁（A1)、矽（Si)、鉀（K)中的 但是，即使於任一 粒徑粗大化。該再 所示之顯微鏡照片 因爲藉由鎢結晶如 極構件1 3 1所含之 之故。相反地，於 般，於再結晶化之 極構件1 3 1內之射 化之弟8圖所不般 易在鎢結晶之粒界 易在電極構件1 3 1 模式化之第9圖所 難以在鎢結晶之粒 難以在其表面移動 結晶之大小以將電 f電極構件1 3 1之 佳。具體而言，本 爲L/W之値爲5.0 有0.001〜〇.〇1質 至少一種類以上， -14- 201003721 可以提高電極構件1 3 1之耐變形性。以下，針對該點予以 說明。201003721 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a high pressure discharge lamp, and more particularly to a material for a crane electrode used in a discharge lamp. [Prior Art] A high-pressure discharge lamp of an alternating current discharge type is often used for hardening and drying in a liquid crystal manufacturing process or hardening of a bonding agent. The electrode used in the AC discharge mode β high-s discharge lamp must have both the cathode characteristic of releasing electrons and the anode characteristics which are difficult to consume and deform. As the electrode which satisfies these characteristics at the same time, a tungsten electrode containing cerium oxide is known. (Japanese Patent Laid-Open Publication No. 2007-179849) This electrode is a tungsten electrode having a yttrium (Th) content of 0.25 to 4.98 AC% from a surface having a depth of 5 nm from the surface of the electrode. Here, AC% (Atomic Concentrate %) is a percentage of the atomic number of 钍(Th) expressed as a percentage of the number of atoms of tungsten (W) and yttrium (Th) which are present in a range of 5 nm deep from the surface of the electrode and 钍(Th) The total number of atoms and the number of molecules of the number of molecules of the oxide. The tungsten electrode containing the above ruthenium oxide has excellent cathode characteristics because it has a low work function of ruthenium oxide. That is, since it has a low work function, electrons can be released by a low voltage, and the operation can be stabilized for a long time when the lamp is discharged. In this way, the tungsten electrode containing cerium oxide is excellent in electron emission, and can emit electrons at a relatively low temperature, so that the temperature of the electrode does not rise, and the discharge due to evaporation of the oxidizing society can be suppressed -5 - 201003721 The tube is blackened and white turbid. Further, since cerium oxide has the highest melting point in the oxide and has an effect of lowering the electrode temperature, it also has good anode characteristics. That is, since it has the effect of lowering the electrode temperature, the consumption of tungsten and the deformation resistance are improved. Further, since cerium oxide has a high melting point, the amount of evaporation is small, and it is difficult to react with quartz glass belonging to the discharge tube material. Therefore, it is possible to suppress the consumption and deformation of tungsten, and it is possible to suppress blackening and white turbidity of the discharge tube. As a result, the above-mentioned tungsten electrode containing cerium oxide can simultaneously have high characteristics required for the cathode and the anode. Therefore, by using a tungsten electrode containing ruthenium oxide in a high pressure discharge lamp, it is possible to suppress the consumption and deformation of the electrode, the phenomenon of blackening of the discharge tube, white turbidity, and the like. However, the cerium oxide used in the electrode according to Patent Document 1 is a radioactive substance, which has a problem of adversely affecting the environment. Accordingly, an object of the present invention is to provide a high-pressure discharge lamp which can suppress blackening and whitening of a discharge tube by suppressing consumption and deformation of an electrode without using an environmental pollutant. The high-pressure discharge lamp of the present invention is characterized in that it has a material which is made of ultraviolet-ray transmissive material, is provided with a discharge tube containing at least a rare gas, and is provided at each end of the discharge tube so as to include one end thereof. In the two discharge electrodes, at least one of the two discharge electrodes is made of tungsten as a base material, and the amount of the metal monomer containing at least one or more rare earth element oxides in the base material is 0.5. ~5.0 volume percent of -6-201003721 Concentration of the discharge electrode of the emitter material. Furthermore, the content is determined by the type of lamp to determine the optimum range. Furthermore, the high-pressure discharge lamp of the present invention is characterized in that it has a material which is made of ultraviolet-ray permeable material, and a discharge tube of at least mercury and a rare gas is sealed, and both ends of the discharge tube are included in the discharge tube. In the two discharge electrodes provided in the aspect, at least one of the two discharge electrodes is made of tungsten as a base material, and the base material contains a metal in which at least one or more rare earth element oxides are converted into rare earth elements. The discharge electrode of the emitter material having a monomer amount of 0.5 to 5.0 volume percent is formed. [Embodiment] Hereinafter, a high pressure discharge lamp of the present invention will be described with reference to the drawings. Figure 1 is a cross-sectional view of the axis of the high pressure discharge lamp of the present invention. Fig. 2 is a cross-sectional view showing an enlarged portion of the high pressure discharge lamp of Fig. 1. In the high pressure discharge lamp 1 shown in Fig. 1, the airtight container 12 is an ultraviolet light-emitting quartz light-emitting tube. Inside the both ends of the airtight container 12, as shown in Fig. 1, the coil winding electrode 13 is disposed oppositely. The coil winding electrodes 13 are each supported by a socket 14 outside the both ends of the hermetic container 12. A rare gas such as argon (Ar) gas or mercury, iron, tin or halogenated mercury is sealed inside the hermetic container 12. As the halogenated mercury, silver iodide (H g 12) can be used. When mercury, iron, tin, or iodinated mercury is enclosed, it has a luminescence peak at a wavelength of 3,58 nm, 365 nm, and 377 nm. In addition, a rare gas such as argon (Ar) gas 201003721 or the like, mercury, or cesium halide may be enclosed in the inside of the airtight container 1 2 . As the antimony halide, even cesium iodide (T1I) can be used. In such a high pressure discharge lamp 11, a large luminescence peak is obtained at a wavelength of 352 nm, 365 nm '378 nm, particularly around 352 nm and 378 nm. Alternatively, cesium bromide may be used instead of cesium iodide. As shown in Fig. 2, the coil winding electrode 13 is composed of an electrode member 133 and a coil 132 spirally wound around one end of the electrode member 131. Composition. The coil 1 32 is provided to suppress the temperature rise of the electrode member 13 1 by increasing the surface area of the front end of the electrode member 131. The other end of the electrode member 131 is joined to the electrode foil 133. The other end of the electrode member 131, which is connected to one end, is attached to the inside of the slot 14 by the other end of the electrode foil 133, and is connected to the external lead 15 as shown in Fig. 1. The electrode member 13 1 is made of tungsten (W) containing an emitter material. The emitter material has the ability to release electrons from the electrode member 131 and has the ability to lower the temperature of the electrode member 131. The emitter material is composed of an oxide of a rare earth element such as lanthanum (La), planer (Ce), lanthanum (Eu), or cerium (pr), and is converted into a rare earth metal monomer. Contains a concentration of 0.5 to 5.0 volume percent. This concentration range is derived from the experimental results of the two lamps shown below. When the high pressure discharge lamp is turned on, the high pressure discharge lamp is provided with an electrode 13 containing an emitter material having a concentration outside the concentration range, and the airtight container 12 is blackened or clouded. Further, when the concentration of the above-mentioned emitter material is in the range of less than 40 mm of the outer diameter Φ of the hermetic container 12, it is preferably 0.5 to 2.5 volume percent. Further, when the outer diameter Φ of the hermetic container 12 is 40 m or more, the -8-201003721 is preferably 5% to 5.0% by volume. The volume percentage can be obtained by the following formula. B= { Vem/(vw + Vem)} X 1 〇〇=[(mem / pem) / { (mw / pw) + (mem / pem)} ] X 1 0 0 Here, B of the above formula represents the volume The percentage °vw represents the volume of tungsten, and vem represents the volume of the rare earth element contained in tungsten. That is, the volume percentage refers to the ratio of the volume of the rare earth element contained to the volume of tungsten. The volumes VW and vem can be obtained from the respective masses (mw, meni) and density (P w ' P em). Here, the electrode member 131 is formed by containing tungsten as an oxide of a rare earth element and containing tungsten as a rare earth element. Further, the mass mem of the above rare earth element is a mass calculated from the mass of the rare earth oxide contained in tungsten. The following two experiments were carried out using the high-pressure discharge lamp 1 1 shown above. The airtight container 12 of the high-pressure discharge lamp 11 used in the experiment 1 had an outer diameter Φ of 27.5 mm and a thick wall m of 1.5 mm. The luminous length L is 1 0 0 0 mm, and the lamp current is 11 1 . The high-voltage discharge lamp 11 is rated for lighting at a rated voltage of 1 1 5 Ο V, a rated current of 10.5 A, and a rated power of 12 kW. Then, the blackened and white turbid states of both ends of the airtight container 12 after 500 hours were observed. The result is shown in Fig. 3. Fig. 3 is a view showing the blackening state and white turbidity of the lamps according to each of the emitter materials using the electrode members 133 for the emitter materials having different concentrations and different average particle sizes of tungsten, in the five stages -9-201003721. status. In Figure 3, the evaluation of turbidity and white turbidity indicates that the larger the number, the worse the characteristics. Further, the sum of the evaluations of the state and the white turbid state indicates that the blackening state and the white total evaluation are indicated by Δ when the sum evaluated in Fig. 3 is 4 or less, and Δ when it is 6 or more, and X when it is 6 or more. Next, the gas 12 of the high pressure discharge lamp 1 used in Experiment 2 was an outer tube diameter φ of 84.0 mm, a thick wall m of 1.5 mm, a hair of 1,490 mm, and a lamp current of 23.4 A. The high voltage j is rated to be rated at rated power, rated current 23.4A, and rated power 44kW. Then, the blackened and turbid state of the airtight container end after 500 hours was observed. The result is shown in Fig. 4. Fig. 4 is a view similar to Fig. 3, in which the blackening state and the white turbid state of the lamps are evaluated for each of the electrode members 131 in which each of the emitters contains different concentrations of the emitter material. In Figure 4, the evaluation of blackening and white turbidity indicates that the larger the number, the worse the characteristics. The sum of the evaluations of the combined state and the white turbid state indicates the blackening state and the total evaluation. When the sum of the evaluations in Fig. 3 is 4 or less, it is represented by Δ when it is 5, and is represented by X when it is 6 or more. Said. From the results of Figs. 3 and 4, the following were found. First, the total amount of the emitter material of the member 131 of the high pressure discharge lamp 1 is evaluated as the amount of the rare earth element monomer is 〇.5~2·5 volume percent. The amount of the monomer converted into a rare earth element is 〇.5~5·0 volume percent, and for black, it is represented by the black turbid state, and the dense container light length LM 1,925V 孜 electric lamp 11:12 two materials, Use, in the 5th order, for the black and white turbidity state, the 用 indicates that the electrode is converted into the range of the test 2 ratio -10- 201003721 In the experiment i, the concentration of the emitter material is higher than 2 · 5 volume At the time of the percentage, or in Experiment 2, when the concentration of the emitter material is higher than 5.0% by volume, the hermetic container 12 is cloudy. This is because the amount of the emitter material present on the surface of the electrode member 133 is increased, and the emitter material is scattered in the lighting. As a result, the scattered emitter material adheres to the inner surface of the airtight container 12, etc., causing a decrease in illuminance and crystallization of quartz due to the emitter material, which may impair the damage of the airtight container 12. Further, in both experiments, when the concentration of the emitter material was less than 0.5 volume percent, the hermetic container 12 was blackened. Since the electrode member 1 3 1 is in a state close to pure tungsten, the electron emission property from the electrode member 1 23 1 is deteriorated, and the dot temperature is increased. Accordingly, deterioration of the electrode member 133 is promoted, and tungsten is evaporated to blacken the hermetic container 12. Further, in both experiments, it was found that the average particle diameter of the electrode material of the electrode member 133 used for the high-pressure discharge lamp 11 which was evaluated as a total of 〇 was less than 3 μηη. Here, the average particle diameter is obtained by cutting the discharge electrode 13 in the axial direction and enlarging the cross section thereof by a laser microscope to enlarge the image shown in Fig. 5 . That is, the average particle diameter is obtained by measuring the maximum diameter (the fillet diameter) of the emitter material particles contained in any circle of 50 μm in the image shown in Fig. 5, and the emitter material particles The sum of the largest diameters is obtained by dividing the number of particles of the emitter material. When the average particle diameter of the emitter material is 3 μπι or more, the hermetic container is blackened. Since the particle size of the emitter material is large, it is difficult for the particles of the emitter material to move in the region where the surface of the electrode member 133 is crystallized. As a result, since it is difficult to supply the emitter material to the surface of the electrode member 133, it is difficult to obtain the effect obtained by the inclusion of the emitter material by -11 - 201003721. In other words, it can be seen from the results of the above experiment that it is possible to suppress the consumption and deformation caused by the discharge of the electrode member 133, and to sufficiently suppress the blackening of the airtight container 12 and the low average particle diameter of the white turbid emitter material. At 3 μιη. The smaller the average particle diameter, the better, and the more preferable range is i. 5 μιη or less. From the above, it is known that the rare earth oxide having a concentration of the rare earth element monomer in an amount of 〇·5 to 5.0 vol. by the electrode member 131 contains the emitter material having an average particle diameter of less than 3 μm, and the electrode is suppressed. The consumption and deformation caused by the discharge of the member 133 can sufficiently suppress the blackening and white turbidity of the airtight container 12. Next, a method of manufacturing the electrode member 1 3 1 according to the above-described embodiment will be described. The production method is not particularly limited, but can be produced, for example, by the following method. First, a rare earth metal nitrate is mixed in a magnetic vessel in a predetermined amount to form an aqueous solution, and a tungsten powder having an average particle diameter of 2 to 3 μm and a purity of 99.9 % or more is dried. Thereafter, the nitrate of the rare earth metal is decomposed in a hydrogen atmosphere of 700 to 900 ° C to finely disperse the oxide, and the tungsten powder is reduced. Even if the emitter material powder is in the form of an oxide, it may be mixed with the tungsten powder by a ball mill, but when the coarse emitter material particles directly remain in the sintered body, the result is that it is difficult to make the particle diameter of the emitter material of the present invention lower than 3 μm, so the method of producing the powder is preferably the above method. Subsequently, the mold was pressed into a size of 15 mm in length and 15 mm in length and 65 mm in length to prepare a molded body having a specific size. Thereafter, "electrical sintering was performed in a hydrogen atmosphere" to obtain a sintered body having a length of 1 2 · 5 m m x 1 2 · 5 m m and a height of 5 4 0 m m -12 - 201003721. Then, the sintered body heated to 1400 to 1700 °C by one side is stretched, and the sintered body is drawn into a slender shape. Next, the sintered body which is drawn into a slender body is honed to have a concentric shape with a constant diameter. Finally, the electrode member 133 is formed by honing the surface of the sintered body which is honed into concentric shapes by electrolytic treatment. After the electrode member 13 1 is formed, the airtight container 12 is subjected to a vacuum treatment in a hydrogen atmosphere of 1200 to 1400 ° C, and then vacuum treatment is performed at 2000 ° C or lower. Then, the high-pressure discharge lamp 11 can be obtained by assembling the coil-volume electrode 13 having the coil 133 at the front end of the electrode member 133 to the hermetic container 12. By using the coil winding electrode 13 shown above, it is possible to suppress the consumption and deformation of the electrode member 131, and it is possible to form the high pressure discharge lamp 11 which can suppress blackening and white turbidity of the airtight container 12. Here, when the longitudinal direction of the tungsten crystal at the front end of the electrode member 133 is the long axis (L) and the cross-sectional direction of the electrode is the short axis (W), L/W is used. When it is 3 or more, it is possible to suppress the consumption and deformation of the electrode member 133, and it is possible to suppress blackening and white turbidity of the airtight container 12. The following is explained for this point. The front end of the electrode member 133 is melted to become a starting point of discharge to form a molten layer. Here, when the length of the molten layer from the front end of the electrode member 133 to the axial direction is M' and the diameter of the electrode member 131 is D, M / D is 〇·〇1 or more and 0.5 or less. The scope. The molten layer may be formed at a portion of the starting point (dot) of the discharge or may be formed to cover the entire front end portion of the electrode member 133 of -13-201003721. In the case where the molten layer is recrystallized, the tungsten crystal crystallized by tungsten crystal is preferably grown in the axial direction as shown in Fig. 6 and Fig. 6B. When the electrode material is easily moved on the surface of the electrode member 131, the microscope photo of the tungsten crystal shown in Fig. 7 and Fig. 7B is in a fine state, as shown in Fig. 6 and Fig. 6B. It is difficult to make electricity; the pole material moves on the surface of the electrode member 131. In the case of the pattern of Fig. 6 and Fig. B, when the tungsten crystal is grown, the emitter material is moved by the emitter material, so that the surface of the emitter material in the electrode member 131 moves. On the other hand, as shown in Fig. 7 and Fig. 7B, when the tungsten crystal is fine, since the emitter material boundary moves, the emitter material in the electrode member 131 is formed in the molten layer. When the longitudinal direction of the lower pole member 131 is the long axis (L) and the cross-sectional direction is the short axis (W), the inventors have confirmed that the L/W is preferably 3.0 or more, more preferably more. Further, the above-mentioned electrode member 131 is further contained in a percentage of aluminum (A1), bismuth (Si), and potassium (K), but even if any of the particle diameters is coarsened. The re-micrograph shown is due to the crystallization of tungsten such as the pole member 133. On the contrary, in the case of the re-crystallization of the polar member 1 3 1 , the image of the emitter is not easy to be in the grain boundary of the tungsten crystal, and the pattern of the electrode member 1 3 1 is difficult to be It is difficult for the tungsten crystal grains to move crystallize on the surface thereof to favor the electric f electrode member 131. Specifically, the enthalpy of L/W is 5.0 0.001 to 〇. 〇1 at least one type or more, -14-201003721 The deformation resistance of the electrode member 133 can be improved. This point will be described below.
Al、Si、K爲當作摻雜材料使用者，藉由上述電極構 件1 3 1含有該些，可以提高電極構件1 3丨之耐變形性。本 案發明者確認出該摻雜材料之含有量以含有O.OOiKO.Oi 質量百分比之A1、Si、K中之任一種爲佳，低於0.001質 量百分比則無法充分取得藉由含有而所產生之效果，再者 當高超過0.0 1質量百分比之時則在燒結性或加工性產生 問題。 並且’藉由使電極構件131含上述各種摻雜材料，可 以使鎢之結晶變爲更大。因此，推斷促進電極構件1 3 1之 內部之射極材料移動。 並且’含有如此摻雜材料之電極構件1 3 1之製造方法 ，除以規定量在磁製皿中混合將稀土類金屬之硝酸化物變 爲水溶液者’和以規定量摻雜A1、S i、K之鎢的粉末，和 純水’並予以乾燥之外，其他與上述製造方法相同。 再者，藉由使用加工率爲8 0 %以上之電極構件1 3 1， 可以更抑制電極構件1 3 1之消耗、變形，可抑制氣密性容 器12之黑化、白濁。以下，針對該點予以說明。 上述加工率表示從燒結體加工成電極形狀之時之加工 比率’當將燒結體之剖面積設爲S 1，將電極構件1 3 1之 剖面積設爲S2之時，則爲[(82-81)/81]乂100(%)所示之量 。該加工率爲對射極材料之電極構件131中之分散，及生 長在電極構件1 3 1之前端之結晶大小L/W造成影響。即是 -15- 201003721 ，當加工率越高，隨著從燒結體之狀態前進至電極形狀之 加工，因在鎢矩陣中碎成細片’而微細分散’故射極材料 容易供給至電極構件131表面。並且’加工率越高，藉由 從燒結體之狀態朝電極形狀之加工等’電極構件1 3 1所負 荷之熱能量增加，且該能量成爲溶解之鎢之再結晶的驅動 能量，故容易產生L / W之大結晶，射極材料容易供給至電 極構件1 3 1之表面。因此，以使用加工率高之電極構件 131爲佳，具體而言以使用80%以上之電極構件131爲佳 〇 如上述所示般，若藉由本發明之高壓放電燈11時， 則可以抑制電極構件1 3 1之消耗、變形，可以抑制氣密性 容器12之黑化、白濁。 以下，表示上述高壓放電燈1 1之具體實施例。 (實施例1) 實施例1所涉及之高壓放電燈1 1爲在氣密性容器i 2 之兩端具備有體積百分比爲0.6%’平均粒徑爲3μηι之 C e2 〇3之鎢製之電極構件1 3 1之鹵化物燈1 1。在容器1 2 之內部封入Hg、Fe、Sn、Hgl2。並且，封入作爲封入氣 體之Ar。在該燈中’氣密性容器〗2由紫外線透過性高之 石英管所構成’外徑Φ爲27_5mm，發光長度爲1 000mm 之規格。 以額疋電壓l，3l〇V、額定電流12.2A、額定電力 1 6kW使該鹵化物燈U額定點燈。然後，觀測5 〇〇小時後 -16- 201003721 之氣密性容器12之兩端之黑化、白濁狀態。其結果，抑 制電極構件13 1之消耗、變形，也抑制氣密性容器1 2之 黑化、白濁。 (實施例2) 實施例2所涉及之高壓放電燈1 1爲在氣密性容器12 之兩端具備有體積百分比爲3.0%，平均粒徑爲3μιη之 La203之鎢製之電極構件131之鹵化物燈1 1。在容器12 之內部封入 Hg、Til、Nal。並且，封入作爲封入氣體之 Ne-Ar混合氣體。在該燈中，氣密性容器12由光透過性高 之石英管所構成，外徑Φ爲84mm，發光長度爲1,430mm 之規格。並且，氣密性容器1 2爲被由大於該容器1 2之外 徑的Φ 120mm所構成之外觀封裝之雙重構造。 以額定電壓1，92 5V、額定電流 23.4A、額定電力 44k W使該鹵化物燈1 1額定點燈。然後，觀測5 〇 〇小時後 之氣密性容器1 2之兩端之黑化、白濁狀態。其結果，抑 制電極構件1 3 1之消耗、變形，也抑制氣密性容器1 2之 黑化、白濁。 以上，針對本發明之高壓放電燈1 1予以說明。惟本 發明並不限定於上述各實施例。 例如’添加於電極構件1 3 1之射極材料即使含有2種 類以上之稀土類之氧化物亦可。即使於此時，若含有稀土 類元素單體之量之合計被包含在上述範圍時，則能夠取得 相同效果。 -17- 201003721 再者，即使使用2種或3種摻雜材料之時’若其合§十 量在0 · 0 0 1〜0.0 1質量百分比之範圍內時’則可以取得相 同之效果。 再者，在上述氣密性容器12之內部’也包含稀有氣 體、水銀、鹵化物中之任一者當作放電媒體。但是’本發 明即使爲在氣密性容器1 2之內含有當作放電媒體之稀有 氣體及水銀或是稀有氣體及鹵化物之高壓放電燈1 1 ’亦可 以適用。 再者，可知在上述交流放電方式之各高壓放電燈11 中，藉由將射極材料之濃度及射極材料之平均粒徑限定成 上述般，亦可以抑制黑化、白濁。該係因爲藉由使用上述 般之物質當作射極材料，可以抑制電極構件1 3 1之溫度上 升之故。因此，在上述各高壓放電燈11中所表示之電極 構件1 3 1亦能夠應用於直流放電方式之高壓放電燈之陰極 【圖式簡單說明】 第1圖爲沿著本發明之實施例所涉及之高壓放電燈之 軸的剖面圖。 第2圖爲放大第1圖所示之高壓放電燈之重要部位之 剖面圖。 第3圖爲表不藉由實驗1使第1圖所示之高壓放電燈 點燈之時之射極材料之濃度及射極材料之粒徑，和氣密性 容器之黑化、白濁之關係表。 -18- 201003721 第4圖爲表示藉由實驗2使第1圖所示之高壓放電燈 點燈之時之射極材料之濃度及射極材料之粒徑，和氣密性 容器之黑化、白濁之關係表。 第5圖爲沿著第1圖所示之高壓放電燈之電極構件的 剖面之顯微鏡照片。 第6圖A爲表示第1圖所示之高壓放電燈之電極構件 之結晶狀態的顯微鏡照片。 第6圖B爲表示第1圖所示之高壓放電燈之電極構件 之結晶狀態的顯微鏡照片。 第7圖A爲用以比較第6圖A之結晶狀態的顯微鏡 照片。 第7圖B爲用以比較第6圖B之結晶狀態的顯微鏡照 片。 第8圖爲簡化第6圖A、第6圖B所不之結晶狀態之 圖式。 第9圖爲簡化第7圖A、第7圖B所示之結晶狀態之 圖式。 【主要元件符號說明】 11 :高壓放電燈 1 2 :氣密性容器 1 3 :線圈繞組電極 14 :插槽 1 5 :外部導線 -19- 201003721 1 3 1 :電極構件 1 3 2 :線圈 1 3 3 :電極箱 -20-Al, Si, and K are used as a user of the doping material, and the electrode member 131 includes the above, so that the deformation resistance of the electrode member 13 3 can be improved. The inventors of the present invention have confirmed that the content of the dopant material is preferably any one of A1, Si, and K containing a mass percentage of O. OOiKO. Oi, and less than 0.001% by mass cannot be sufficiently obtained by the inclusion. The effect, when the height is more than 0.01% by mass, causes problems in sinterability or workability. Further, by making the electrode member 131 contain the above various doping materials, the crystal of tungsten can be made larger. Therefore, the movement of the emitter material inside the electrode member 113 is inferred. And a method for producing an electrode member 133 having such a doping material, in which a nitrate of a rare earth metal is mixed into a water solution by a predetermined amount, and a predetermined amount of doping A1, S i , The powder of K tungsten, and pure water 'was dried, and the other methods are the same as described above. In addition, by using the electrode member 1 3 1 having a working ratio of 80% or more, the consumption and deformation of the electrode member 13 1 can be further suppressed, and blackening and white turbidity of the airtight container 12 can be suppressed. Hereinafter, this point will be described. The processing ratio indicates the processing ratio when the sintered body is processed into an electrode shape. When the cross-sectional area of the sintered body is S1 and the cross-sectional area of the electrode member 131 is S2, it is [82- 81) / 81] 乂 100 (%) shown by the amount. This processing rate affects the dispersion in the electrode member 131 of the emitter material and the crystal size L/W at the front end of the electrode member 133. That is, -15-201003721, when the processing rate is higher, as the processing progresses from the state of the sintered body to the shape of the electrode, it is finely dispersed by being broken into fine pieces in the tungsten matrix, so the electrode material is easily supplied to the electrode member. 131 surface. Further, the higher the processing rate, the higher the thermal energy loaded by the electrode member 133 from the state of the sintered body to the processing of the electrode shape, and the energy becomes the driving energy for recrystallization of the dissolved tungsten, so that it is easy to generate The large crystal of L / W, the emitter material is easily supplied to the surface of the electrode member 113. Therefore, it is preferable to use the electrode member 131 having a high processing ratio. Specifically, it is preferable to use 80% or more of the electrode member 131. As described above, when the high pressure discharge lamp 11 of the present invention is used, the electrode can be suppressed. The consumption and deformation of the member 133 can suppress blackening and white turbidity of the airtight container 12. Hereinafter, a specific embodiment of the above-described high pressure discharge lamp 1 1 will be described. (Example 1) The high-pressure discharge lamp 1 1 according to the first embodiment is an electrode made of tungsten having a volume percentage of 0.6% 'C e2 〇 3 having an average particle diameter of 3 μηι π at both ends of the hermetic container i 2 . The halide lamp 1 1 of the member 1 3 1 . Hg, Fe, Sn, and Hgl2 are sealed inside the container 1 2 . Further, Ar is enclosed as a sealed gas. In the lamp, the "airtight container" 2 is composed of a quartz tube having a high ultraviolet ray permeability. The outer diameter Φ is 27 mm and the light emitting length is 1 000 mm. The halide lamp U is rated for lighting with a frontal voltage of l, 3l 〇 V, a rated current of 12.2 A, and a rated power of 16 kW. Then, the blackened and white turbid state of both ends of the airtight container 12 of -16-201003721 after 5 hours was observed. As a result, the consumption and deformation of the electrode member 13 1 are suppressed, and the blackening and white turbidity of the airtight container 12 are also suppressed. (Example 2) The high-pressure discharge lamp 1 according to the second embodiment is a halogenated electrode member 131 made of tungsten having a volume percentage of 3.0% and an average particle diameter of 3 μm at both ends of the hermetic container 12. Light 1 1 . Hg, Til, and Nal are sealed inside the container 12. Further, a Ne-Ar mixed gas as a sealed gas is sealed. In the lamp, the airtight container 12 is made of a quartz tube having high light transmittance, and has an outer diameter Φ of 84 mm and an emission length of 1,430 mm. Further, the airtight container 12 has a double structure of an appearance package composed of Φ 120 mm larger than the outer diameter of the container 1 2 . The halide lamp 11 is rated for lighting at a rated voltage of 1,92 5 V, a rated current of 23.4 A, and a rated power of 44 kW. Then, the blackened and white turbid state of both ends of the airtight container 12 after 5 hours was observed. As a result, the consumption and deformation of the electrode member 133 are suppressed, and the blackening and white turbidity of the airtight container 12 are also suppressed. The high pressure discharge lamp 1 of the present invention has been described above. However, the invention is not limited to the above embodiments. For example, the emitter material added to the electrode member 133 may contain an oxide of two or more kinds of rare earths. Even in this case, when the total amount of the rare earth element-containing monomer is included in the above range, the same effect can be obtained. -17- 201003721 Furthermore, even when two or three kinds of doping materials are used, the same effect can be obtained if the 0.001 is in the range of 0·0 0 1 to 0.01% by mass. Further, in the inside of the airtight container 12, any one of a rare gas, mercury, and a halide is also used as a discharge medium. However, the present invention is also applicable to a high pressure discharge lamp 1 1 ' which contains a rare gas as a discharge medium and mercury or a rare gas and a halide in the hermetic container 12. Further, in each of the high-pressure discharge lamps 11 of the above-described AC discharge method, it is possible to suppress blackening and white turbidity by limiting the concentration of the emitter material and the average particle diameter of the emitter material as described above. This system can suppress the temperature rise of the electrode member 131 by using the above-described substance as an emitter material. Therefore, the electrode member 133 shown in each of the above-described high-pressure discharge lamps 11 can also be applied to the cathode of a high-pressure discharge lamp of a DC discharge type. [Schematic description of the drawings] FIG. 1 is a view along an embodiment of the present invention. A cross-sectional view of the shaft of the high pressure discharge lamp. Fig. 2 is a cross-sectional view showing an enlarged portion of an important portion of the high pressure discharge lamp shown in Fig. 1. Fig. 3 is a table showing the relationship between the concentration of the emitter material and the particle diameter of the emitter material when the high pressure discharge lamp shown in Fig. 1 is turned on by the experiment 1, and the blackening and white turbidity of the airtight container. . -18- 201003721 Fig. 4 is a diagram showing the concentration of the emitter material and the particle size of the emitter material when the high pressure discharge lamp shown in Fig. 1 is lit by the experiment 2, and the blackening and white turbidity of the airtight container. The relationship table. Fig. 5 is a photomicrograph of a cross section of an electrode member of the high pressure discharge lamp shown in Fig. 1. Fig. 6A is a photomicrograph showing the crystal state of the electrode member of the high pressure discharge lamp shown in Fig. 1. Fig. 6B is a photomicrograph showing the crystal state of the electrode member of the high pressure discharge lamp shown in Fig. 1. Fig. 7A is a photomicrograph for comparing the crystal state of Fig. 6A. Fig. 7B is a photomicrograph for comparing the crystal state of Fig. 6B. Fig. 8 is a view for simplifying the state of crystallization of Fig. 6 and Fig. 6B. Fig. 9 is a view for simplifying the crystal state shown in Fig. 7A and Fig. 7B. [Description of main component symbols] 11 : High pressure discharge lamp 1 2 : Hermetic container 1 3 : Coil winding electrode 14 : Slot 1 5 : External wire 19 - 201003721 1 3 1 : Electrode member 1 3 2 : Coil 1 3 3: electrode box-20-