200938803 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種雙光探針檢測透明物體之厚度與 間隙的裝置及方法’尤指—種採用多域測器鎖定共輕焦 面的位置’配合利韓散法、刀緣法及臨界角法或:他; 實施之方法’而可達到精準的定位及測量出透明物體其厚 度與間隙之目的者。 【先前技術】 ❹ 製造液晶顯示器產業的晶圓廠商為了因應tft_lcd面 板輕薄平大的要求，物在平面起伏、表面粗度、密度、比 重等品質有一定的標準，因此對於基板的耐熱度、化學、 機械、電氣等性質均有參數上的限定，使得物之平坦度檢 測佔整個液晶螢幕顯示效能其中的重要一環。 有關玻璃厚度檢測的相關研究相當的多，大致上的擺 ❹》又方式主要可以分為穿透式與反射式兩種；就量測行為主 要可以分為接觸式與非接觸式兩種，隨著量测技術的進 步，目前非接觸式的光學量測技術，已經慢慢成為主流。 而目前非接觸式的光學量測技術有利用雷射超音波來 決疋玻璃厚度的方法，這種方法也是屬於非接觸式量测， 量測物體除了物外，玻璃瓶也屬量测範圍，由於玻璃厚度 量測在生產製造時之檢測提供非常重要之資訊，將這些資 訊加以即時監控以得到高品質之線上產品。後來，為了改 200938803 善玻璃檢驗時之逮度及精度，有—種新型非接觸式獲取玻 璃表面城度及厚度之方法被研究，其量測原理主要是利 疋律去量測，藉由描述光線行進於不同介質間的 關係而得破璃表面粗之縫度及厚度。上述諸項之既有技 術’雖共同可以達到一定的量測精度，但於實際使用上卻 仍存在著諸多的缺點。 【發明内容】 © 本《明之第一目的，在於提供-種減少測量的時間， 降低因環境漂移而產生的誤差，提高測量精度的檢測透明 物體之厚度與間隙的裝置。 —本發明之第二目的，在於提供一種採用兩顆光學讀寫 頭做為量測之用，目的在比對與校正等效厚度與實際厚度 的關係，以達透明物體其厚度與間隙的檢測方法。 "本發明之第二目的，在於提供一種兩個共軛焦探頭於 平〇移動後，在待測物下表面所得到兩個s曲線之中心點 距離’即得等效厚度’因而達到透明物體其厚度檢測的目 的。 達成上述發明目的之雙共軛焦雷射檢測透明物體其厚 度與間隙的裝置，其包括： 二光學讀取裝置，分別提供產生光束，其一顆作為檢 測源光學讀取裝置，另—顆作為參考源光學讀取裝置； 一聚焦物鏡’提供該光束聚焦與改變該光束距離；及 200938803 . # 一基準面’提供該光學讀取裝置的聚焦點掃描； 測量前，將檢測源光學讀取裝置與參考源光學讀取裝 置先做一次無待測物的掃描，可測得檢測源光學讀取裝置 的聚焦點掃描到基準距離（S1)，而參考源光學讀取裝置的 聚焦點掃到基準面的距離（R1)，（R1)減去（S1)可得一高度 差△。再將透明之待測物放置在檢測源光學讀取裝置之基 準面上，再測量一次後，檢測源光學讀取裝置可得檢測源 ❹讀取裝置的聚焦點掃到待測物上表面的距離（S2)與空氣間 隔（gap)，經由下列式子計算： SI = R1 — △ t — S1 — S2 — gap 可獲得待測物實際量測之更準確的厚度（t)。 【實施方式】 I ·本發明之基本特徵及原理 ❹ 請參看圖五、六（a)及六（b)，本發明所提供之雙光探 針檢測透明物體其厚度與間隙的裝置與方法，主要包括有： 二光學讀取裝置（31)(310)，分別提供產生光束，其一 顆作為檢測源光學讀取裝置（31)，另一顆作為參考源光學 讀取裝置（310); 二聚焦物鏡（311 )(312) ’提供該光束聚焦而形成光探 針（313)(314)與改變該光束距離；及 一基準面（33) ’供置放待測物，並提供該光學讀取裝 7 200938803 置的聚焦點掃描。 如圖一至四（a)、四（b)所示，市面上之共軛焦雷射光 碟機中的光學讀取裝置（0pt i ca丨pickup Head)即有共軛焦 檢測的架構；其共軛焦量測系統包括：雷射二極體G丨）、 分光鏡（13)、準直透鏡（14)、聚焦物鏡（15)等。當光學讀 寫頭的雷射二極體（11)發射光束後，再經分光鏡（13)(Beam Splitter)反射至準直透鏡（14)，再經由聚焦物鏡（15)聚焦 ❹到待測物（32)上，反射光束則循原路經由準直透鏡（14)、 分光鏡（13)後投射在位置檢測器（本發明以四象限檢測器 (16)為例）上，之後再利用像散法進行鎖焦的工作。 由於採用像散法鎖焦及四象限檢測器（丨6)(圖一中a、 B、C、D)，雖然玻璃的反射率很低，但只要能鎖定共輛焦 面的位置就可精準的定位及測量，因此厚度與間隙只要小 於聚焦物鏡（15)的焦距都可精準的測量。其雷射二極體（11) ❹之波長λ =650 nm，ΝΑ=0· 67，則依據繞射理論，可得聚焦 光點半徑（r)如下式： r — 0.61-^— = 0.592 urn ΝΑ 故雷射二極體（11)，以物鏡（objective)進行聚焦，即 是利用光學成像時所產生的像散像差（aberrat ion)來判斷 是否聚焦。像散是指垂直方向與水平方向的光學倍率不 同，因此各有一個焦點，如圖二所示，其子午光線的成像 200938803 位置（Ft)與弧矢光線的成像位置（F〇不同，子午光線的成像 位置（Ft)與弧矢光線的成像位置（ps)不重合。因此對一物點 而言’成像便不再會是一個點’有可能如子午光線的成像 位置（Ft)為一水平線，弧矢光線的成像位置（Fs)為一垂直 線’在兩者之間可能是橢圓或圓。雷射二極體（1 1 )即是利 用此一方式經由聚焦物鏡（15)，聚焦在四象限檢測器（16) 上，根據光點的像散現象，判讀聚焦的情形，如圖三。當 ©垂直與水平焦距不同，則物體偏離透鏡前焦點或後焦點位 置時，成像光點是一個橢圓形，若物體在合焦位置時，成 像光點為一圓形，藉由四象限檢測器（16)及相關的訊號處 理，由聚焦誤差訊號（F0CUS Error Signal): FES=(A+C)-(B+D) (3-l) 可得一 S曲線，基本上s曲線的線性區為共軛焦系統可 量測的範圍，曲線的中心點對應於合焦的位置，其餘皆為 ❹離焦。 共輛焦雷射整體的量測系統，是透過光學讀取裝置所產 生之光束，經由聚焦物鏡（15)聚焦至待測物（32)上，藉由 移動平台掃描的方式進行厚度與間隙的量測，光路形式如 圖四（a)所示，其中待測物（32)為一透明材質的物體。當光 束經過聚焦物鏡（15)聚焦於焦點上形成一個光探針，而待 測物（32)往上移動時，當表面達到聚焦物鏡（15)焦點位置 時，此時為合焦的狀態，正好對應於共軛焦測量曲線的中 200938803 心點。當待測物（32)繼續往上移動待測物（32)等效厚声 (t )的距離，則焦點位於待測物（32)底面，且同樣的對應 到測量曲線的中心點位置，因為光在介質中的折射作用Y 只需移動待測物（32)等效厚度（t，）的距離，即鎖焦到底 面，而並非移動實際厚度（t)的距離才鎖焦到待測物&。底 層，這種的現象，可經由光學原理的分析得知。 _200938803 IX. Description of the Invention: [Technical Field] The present invention relates to a device and method for detecting the thickness and gap of a transparent object by a dual optical probe, in particular, a multi-domain detector for locking a common focal plane The position 'coordinating the Lee Han method, the knife edge method and the critical angle method or: he; the method of implementation' can achieve accurate positioning and measurement of the thickness and clearance of transparent objects. [Prior Art] 晶圆 In order to meet the requirements of the tft_lcd panel, the wafer manufacturer in the liquid crystal display industry has certain standards for the quality of the plane undulation, surface roughness, density, and specific gravity. Therefore, the heat resistance and chemistry of the substrate are required. The mechanical, electrical and other properties have limitations on the parameters, making the flatness detection of the material account for an important part of the overall LCD display performance. There are quite a lot of related researches on glass thickness detection. The general method can be divided into two types: transmissive and reflective. The measurement behavior can be divided into contact and non-contact. With the advancement of measurement technology, the current non-contact optical measurement technology has gradually become the mainstream. At present, the non-contact optical measurement technology has a method of using laser ultrasonic waves to determine the thickness of the glass. This method is also a non-contact measurement. In addition to the object, the glass bottle is also a measurement range. Since glass thickness measurement provides very important information for inspection during manufacturing, this information is monitored in real time to obtain high quality online products. Later, in order to change the degree and accuracy of the 200938803 good glass inspection, a new type of non-contact method for obtaining the surface quality and thickness of the glass surface was studied. The measurement principle is mainly to measure the law, by description The light travels through the relationship between different media to obtain the thick seam and thickness of the broken glass surface. Although the above-mentioned various technologies have a certain measurement accuracy, there are still many disadvantages in practical use. SUMMARY OF THE INVENTION The first object of the present invention is to provide a device for reducing the thickness of a transparent object and reducing the error caused by environmental drift and improving the measurement accuracy. - A second object of the present invention is to provide a measurement using two optical read/write heads for the purpose of measuring and correcting the relationship between the equivalent thickness and the actual thickness to detect the thickness and the gap of the transparent object. method. "The second object of the present invention is to provide a distance between the center points of two s-curves obtained on the lower surface of the object to be tested after the two conjugate focal probes are moved, that is, the equivalent thickness is obtained, thereby achieving transparency. The purpose of object thickness detection. A device for detecting the thickness and the gap of a transparent object by the double conjugate focal laser which achieves the above object, comprising: two optical reading devices respectively providing a light beam, one of which serves as a detection source optical reading device, and another one serves as a reference a source optical reading device; a focusing objective 'provides the beam to focus and change the beam distance; and 200938803. #a datum surface' provides a focus point scan of the optical reading device; before measuring, the source optical reading device is detected The reference source optical reading device first performs scanning without the object to be tested, and can measure the focus point of the detecting source optical reading device to the reference distance (S1), and the focus point of the reference source optical reading device sweeps to the reference surface The distance (R1), (R1) minus (S1) gives a height difference Δ. Then, the transparent object to be tested is placed on the reference surface of the optical reading device of the detection source, and after one measurement, the detection source of the source optical reading device can scan the focus of the source device to the upper surface of the object to be tested. The distance (S2) and the air gap (gap) are calculated by the following equation: SI = R1 - Δt - S1 - S2 - gap A more accurate thickness (t) of the actual measurement of the object to be tested can be obtained. [Embodiment] I. Basic features and principles of the present invention ❹ Referring to Figures 5, 6(a) and 6(b), the apparatus and method for detecting the thickness and gap of a transparent object by the dual optical probe provided by the present invention, The utility model mainly comprises: two optical reading devices (31) (310) respectively for generating a light beam, one of which serves as a detection source optical reading device (31) and the other as a reference source optical reading device (310); Focusing objective lens (311) (312) 'provides the beam to focus to form optical probe (313) (314) and to change the beam distance; and a reference plane (33) for placing the object to be tested and providing the optical reading Pick up the focus point scan of 7 200938803. As shown in Figures 1 to 4(a) and 4(b), the optical reading device (0pt i ca丨pickup Head) in a conjugated-focus laser disc machine on the market has an architecture for conjugate focal detection; its conjugate The focal measurement system includes: a laser diode G丨), a beam splitter (13), a collimating lens (14), a focusing objective (15), and the like. When the laser diode (11) of the optical pickup emits a light beam, it is reflected by a beam splitter (13) (Beam Splitter) to the collimating lens (14), and then focused by the focusing objective (15) to be tested. On the object (32), the reflected beam is then projected through the collimating lens (14) and the beam splitter (13) and then projected on the position detector (the four-quadrant detector (16) of the present invention is taken as an example), and then used. The astigmatism method works for locking the focus. Due to the astigmatism lock focus and four-quadrant detector (丨6) (a, B, C, D in Figure 1), although the reflectivity of the glass is very low, as long as the position of the common focal plane can be locked, it can be accurate. The positioning and measurement, so the thickness and the gap can be accurately measured as long as the focal length of the focusing objective (15) is smaller. The wavelength of the laser diode (11) λ = 650 nm, ΝΑ = 0.66, according to the diffraction theory, the focal spot radius (r) can be obtained as follows: r - 0.61-^- = 0.592 urn雷 Therefore, the laser diode (11) is focused by an objective lens, that is, the astigmatism aberration generated by optical imaging is used to judge whether or not focusing is performed. Astigmatism means that the optical magnifications in the vertical direction and the horizontal direction are different, so each has a focus. As shown in Fig. 2, the imaging of the meridional ray is at the position of the 200938803 (Ft) and the imaging position of the sagittal ray (F〇 is different, the meridional ray The imaging position (Ft) does not coincide with the imaging position (ps) of the sagittal ray. Therefore, for an object point, 'imaging will no longer be a point'. It is possible that the imaging position (Ft) of the meridional ray is a horizontal line. The imaging position (Fs) of the sagittal ray is a vertical line 'may be an ellipse or a circle between the two. The laser diode (1 1 ) is focused by the focusing objective (15) in this way. On the four-quadrant detector (16), according to the astigmatism phenomenon of the light spot, the case of focusing is interpreted, as shown in Fig. 3. When the vertical and horizontal focal lengths are different, the imaging spot is when the object deviates from the front focus or the back focus position of the lens. An elliptical shape. If the object is in the focus position, the imaging spot is a circle. The four-quadrant detector (16) and associated signal processing are used by the F0CUS Error Signal: FES=(A+ C)-(B+D) (3-l) can get a S Line, basically the linear region of the s-curve is the measurable range of the conjugate focal system, the center point of the curve corresponds to the position of the focus, and the rest is the defocusing. The overall measurement system of the common focal laser is through The light beam generated by the optical reading device is focused on the object to be tested (32) via the focusing objective lens (15), and the thickness and the gap are measured by scanning the moving platform. The optical path form is as shown in FIG. 4(a). The object to be tested (32) is an object of a transparent material. When the beam is focused by a focusing objective lens (15) to form a light probe, and the object to be tested (32) moves upward, when the surface reaches the focusing objective lens (15) In the focus position, the state of focus at this time corresponds to the midpoint of 200938803 in the conjugate focal measurement curve. When the object to be tested (32) continues to move upwards (32) equivalent thick sound The distance of (t), the focus is on the bottom surface of the object to be tested (32), and the same corresponds to the center point position of the measurement curve, because the refractive effect of light in the medium Y only needs to move the equivalent thickness of the object to be tested (32) (t,) the distance, that is, the lock to the bottom, and The actual distance traveled thickness (t) of the lock only to power DUT &. underlying this phenomenon, may be analyzed by known optical principles. _
(3-2) (3-3) (3-4) 由圖四（b)及Snell定律可知 1 -sin^. = nr sm9r 且由上圖之幾何關係可得 Μ> = ί'\ΆΠθι =η〇Χ\Θτ t ^ t^et _^>/»r2-sin2^ tanA —~^/l-sin2^ 其中t為待測物（32)的實際厚度，t，&密介質中待測 物（32)受折射影響之等效㈣厚度，為光束之入射角， 為光束之折射角，1為待測物（32)之折射率，從（3 4) 式可得實際厚度⑴㈣介質中的等效厚度& )、待測物 (32)之折射率nr、入射光的角度有關，即七為七，、⑴及 Θ】的函數。此推導公式的主要用意在暸 為一 等效厚度（t，），與實際的厚度有差。 的旱X為 Π.本發明之實施例 測方法在實施 平移台每移動 明配合參看圖五及圖十所示，本發明的量 時可有兩種方式，第一種為步階式的掃描， 200938803 一步抓取該點信號後，再繼續移 蒋叙沾祕 > 步’直到走完所要 移動的i«仃程，測量時間較長。第 卽伞较a . 裡為連續掃描的量測， 1十移口 一次走完整個行程並不停頓 ^^^ ^ 貝且在移動平台運動 的问時抓取信號，測量時間較短。 (i)步階式的掃描方式 本發明所採用之步階式量測方法，其系統的架構如圖 所不。首域由指令控制移動平台（18)上下做垂直移 動，當先束經聚焦物鏡（3⑴聚焦至待測物⑽的上表面 後’反射回四象限檢測器，透過資料操取卡⑽將訊號摘 取至電腦(20)處理，可得一個s曲線。移動平台⑽繼續 移動可在待測物（32)下表面得到另一個s曲線，藉由兩個s 曲線之中心點距離，可得—等效厚度（t，），達到檢測的目 的。 本發明的移動平台（丨8)可以一光柵的讀值作為移動距 離的依據，最高解析度為100nm。在光學系統上，利用共軛 焦光學讀取裝置（31)，其NA=0.67，；l=650nin;為避免其聚 焦物鏡（311)(312)微小的震動所造成的量測誤差，共軛焦 光學讀取裝置（31)的音圈（π)部份必須固定（音圈請配合 參看圖一所示）。在移動平台（18)方面，採用三軸移動平台 (18) ’垂直方向（Z軸）精度為i〇〇nm，最大行程1〇mm，其餘 兩軸的精度為20nm，最大行程50mm ;在軟體的部分，採用 VB與Labview為開發移動平台（18)，用來系統控制與訊號 11 200938803 處理。 根據（3-4)式’若ni與Θ i是未知數，單顆探頭無法檢 測玻璃的厚度。因此，本發明採用兩顆光學讀取裝置 (31)(310)做為量測之用，目的在比對與校正等效厚度（t’ ） 與實際厚度（t)的關係，等效確認參數0 ^及m之後，只需 一顆光學讀取裝置（31)即可精準檢測待測物（32)。 量測時，以反射鏡當基準面（33)，以一顆光學讀取裝 〇置（31)作為檢測源光學讀取裝置（31)(test)，另一顆光學 讀取裝置（310)作為參考源光學讀取裝置（31〇) (Ref erence) ’如圖六所示。測量前先以二光學讀取裝置 (31) (310)對無置放待測物之基準面（33)做一次掃描，可測 得檢測源光學讀取裝置（31)的聚焦點掃到基準面（33)的距 離（SO ’並測得參考源光學讀取裝置（310)的聚焦點掃到基 準面（33)的距離（R!)，（R,)減去（so可得一高度差（△)。 & 確認檢測源光學讀取裝置（31)與參考源光學讀取裝置 (310)的高度差（A )後，再將待測物（32)放置在檢測源光學 讀取裝置（31)之基準面（33)之上，再測量一次後，檢測源 光學讀取裝置（31)可得S2與gap而如圖六（b)。檢測源光學 讀取裝置（31)的聚焦點掃到待測物（3 2 )上表面的距離 (so，參考源光學讀取裝置（310)的聚焦點掃到基準面（33) 上表面的距離（R,)，經由下列各式的計算： (3-5) iSj = — Δ 12 200938803 可得待測物（32)—個實際測量的精確厚度（t)值其中 gap為待測物（32)與基準面（33)間存在的空氣間隙。 依據圖五的系統架構與測量方式而得到的結果，在量測 前必須先檢測出基準面（33)，透過移動平台（18)掃描基準 面（33)可得如圖七（a)、圖七（b)的結果，分別為檢測源光 學讀取裝置（31)與參考源光學讀取裝置（31〇)測量之s曲 ❹線，圖七（a)為參考源，圖七（b)為測試源。測試時以每步 lem逐步移動lmm，透過讀取s曲線的中心點座標，可找 出兩顆光學讀取裝置（31)(310)的高度差（△)與兩顆光學 凟取裝置（31)(310)的基準點。檢測的結果可得參考源的 K0. 9266mm)及檢測源的Sl(〇 9388mm)，計算後可得△ = 12. 3 y m 〇 本發明採用多項式曲線擬合（p〇lyn〇mial cUrve ❹Fitting)結合内插法（interpolati〇n meth〇d)做為分析s 曲線中心點的方法，由於圖六（a)、圖六（b)及圖七（a)、圖 七（b)操作中的移動平台（18)之移動步階為j以m，而檢測源 S曲線中心點位於0.938〜0.939//m之間，無法直接判斷 FES=0的座標，因此以多項式曲線的方式處理資料，結果便 如圖八所示。接下來，本發明將大小3〇mmx3〇mm，厚度為 0.7nira的玻璃基板當做待測物（32) ’檢測結果則如圖九 (a)、圖九（b)。從圖九（b)中可看到三個s曲線，分別為玻 13 200938803 璃表面、底面與基準面（33)面，經由圖六（b)的方式，可計 算得出厚度t= 〇· 6999 mm。 (i i )連續掃描的測量方式 本發明採用連續掃描的測量方式，主要的目的在減少 測量的時間，降低因環境漂移而產生的誤差，希望提高測 量的精度，其整個系統的組成架構如圖十，主要是將控制 器與光栅之間的回饋切斷，另行處理。為了移動的同時同 ❹步擷取位置座標與檢測的信號，必須直接讀取並處理光拇 的信號。本發明採用資料擷取卡（19)(DAQ)直接讀取光柵信 號，透過軟體的方式來辨別移動的距離，同時再以多通道 抓取檢測源光學讀取裝置（31)與參考源光學讀取裝置（31〇) 内的四象限檢測器（16)訊號。由於光栅的位置訊號與四象 限檢測器（16)的訊號是同步處理，因此可減少誤差。本發 明仍以VB與Labview為開發移動平台（18)來建構自動量測 〇的系統。 本發明以連續掃描的測量方式縮短檢測時間，並探討 對系統精度的影響1先針對厚度G.7mm的玻璃掃描檢測， 以O.Smm/sec的速度移動，在3.67秒内完成測量 結果如圖十-（a)、圓十-（b)。圖十―⑷為參考源光學讀 取裝置⑽）掃絲準面（33)的結果，圖十—⑻為檢測源 光學讀取裝置（31)量測待測物（32)的結果。由於擷取頻率 遠大於移動速度’本發日月利㈣域平均的方式處理訊號， 200938803 透過每一位置取信號平均的方式， j以/肖減雜訊的影響， 如圖十二（a)、圖十二（b)，亦可 用移動平均法（Running Αν叫e Method)進行信號處理。此一方法的基本構想是對 原始資料取前後共2K+1筆信號平均，其數學式表達如下： G, ^ Κ 2K + \ (3-7) W，7 = 1，2,3，····，^ν}(3-2) (3-3) (3-4) From Fig. 4(b) and Snell's law, 1 -sin^. = nr sm9r is obtained and the geometric relationship of the above figure can be obtained Μ> = ί'\ΆΠ θι = 〇Χ〇Χ\Θτ t ^ t^et _^>/»r2-sin2^ tanA —~^/l-sin2^ where t is the actual thickness of the object to be tested (32), t, & dense medium The equivalent (4) thickness of the object (32) affected by the refraction is the angle of incidence of the beam, which is the refraction angle of the beam, 1 is the refractive index of the object to be tested (32), and the actual thickness (1) (4) is obtained from (3 4) The equivalent thickness in the &), the refractive index nr of the object to be tested (32), and the angle of the incident light, that is, a function of seven, seven, (1), and Θ. The main purpose of this derivation formula is to be an equivalent thickness (t,), which is different from the actual thickness. The method of measuring the embodiment of the present invention is as shown in Fig. 5 and Fig. 10, and the amount of the present invention can be used in two ways. The first type is a step type scanning. , 200938803 After grabbing the signal in one step, continue to move the Jiang Xu digestive > step 'until the i« course to move, the measurement time is longer. The first parachute is a continuous scan measurement, and the tenth shifting port takes a complete trip without stopping ^^^ ^ and grabs the signal when the mobile platform moves. The measurement time is short. (i) Step-by-step scanning method The step-by-step measurement method adopted by the present invention has a system architecture as shown in the figure. The first field is vertically moved by the instruction control mobile platform (18). When the first beam is focused by the focusing objective (3(1) to the upper surface of the object to be tested (10), it is reflected back to the four-quadrant detector, and the signal is extracted through the data acquisition card (10). To the computer (20) processing, an s curve can be obtained. The moving platform (10) continues to move to obtain another s curve on the lower surface of the object to be tested (32), and the distance between the center points of the two s curves is obtained. Thickness (t,), for the purpose of detection. The mobile platform (丨8) of the present invention can use the reading value of a grating as the basis of the moving distance, and the highest resolution is 100 nm. On the optical system, optical reading using conjugate focal length Device (31), NA = 0.67,; l = 650nin; to avoid the measurement error caused by the slight vibration of the focusing objective (311) (312), the voice coil of the conjugate focal optical reading device (31) The π) part must be fixed (the voice coil should be shown with reference to Figure 1.) In the mobile platform (18), the three-axis mobile platform (18) is used. The vertical direction (Z-axis) accuracy is i〇〇nm, the maximum stroke. 1〇mm, the other two axes have an accuracy of 20nm and a maximum stroke of 50mm In the software part, VB and Labview are used to develop the mobile platform (18) for system control and signal 11 200938803. According to the formula (3-4), if the ni and Θ i are unknown, the single probe cannot detect the glass. Therefore, the present invention uses two optical reading devices (31) (310) for measurement purposes, in order to compare and correct the relationship between the equivalent thickness (t') and the actual thickness (t), etc. After confirming the parameters 0 ^ and m, only one optical reading device (31) can accurately detect the object to be tested (32). When measuring, use the mirror as the reference surface (33) to read optically. The pickup device (31) serves as a detection source optical reading device (31) (test), and the other optical reading device (310) serves as a reference source optical reading device (31 〇) (Ref erence). As shown in the figure, the second optical reading device (31) (310) is used to scan the reference surface (33) of the object to be tested without measuring the focus point of the optical reading device (31). Sweep the distance to the reference plane (33) (SO' and measure the focus point of the reference source optical reading device (310) to the reference plane (33) From (R!), (R,) minus (so can obtain a height difference (?). & Confirm the difference in height between the detection source optical reading device (31) and the reference source optical reading device (310) (A After that, the object to be tested (32) is placed on the reference surface (33) of the optical reading device (31) of the detection source, and after one measurement, the optical reading device (31) of the detection source can obtain S2 and gap. And as shown in Fig. 6(b), the distance from the focus point of the detection source optical reading device (31) to the upper surface of the object to be tested (3 2 ) (so, the focus point of the reference source optical reading device (310) is swept The distance (R,) of the upper surface of the reference plane (33) is calculated by the following equations: (3-5) iSj = - Δ 12 200938803 Available object to be tested (32) - the actual thickness of the actual measurement (t) The value of gap is the air gap existing between the object to be tested (32) and the reference surface (33). According to the system architecture and measurement method shown in Figure 5, the reference plane (33) must be detected before the measurement, and the reference plane (33) can be scanned through the mobile platform (18). Figure 7 (a), Figure The result of the seventh (b) is the s curve line measured by the detection source optical reading device (31) and the reference source optical reading device (31〇), and FIG. 7(a) is the reference source, and FIG. 7(b) For the test source. During the test, the lmm is gradually moved by each step lem. By reading the coordinates of the center point of the s-curve, the height difference (Δ) of the two optical reading devices (31) (310) and the two optical capturing devices (31) can be found. ) (310) the benchmark point. The result of the test can be obtained from the reference source K0. 9266mm) and the detection source S1 (〇9388mm), and the calculation can be obtained △ = 12. 3 ym 〇 The invention adopts polynomial curve fitting (p〇lyn〇mial cUrve ❹Fitting) combined The interpolation method (interpolati〇n meth〇d) is used as the method to analyze the center point of the s curve, because the mobile platform in the operation of Figure 6 (a), Figure 6 (b) and Figure 7 (a), Figure 7 (b) (18) The moving step is j with m, and the center point of the detection source S curve is between 0.938 and 0.939//m. The coordinates of FES=0 cannot be directly judged. Therefore, the data is processed in a polynomial curve, and the result is as follows. Figure 8 shows. Next, the present invention uses a glass substrate having a size of 3 mm x 3 mm and a thickness of 0.7 nira as a test object (32)' as shown in Fig. 9 (a) and Fig. 9 (b). From Fig. 9(b), we can see three s curves, which are glass surface, bottom surface and reference surface (33), respectively. Through the method of Fig. 6(b), the thickness t= 〇· can be calculated. 6999 mm. (ii) Measurement method of continuous scanning The present invention adopts a continuous scanning measurement method, and the main purpose is to reduce the measurement time, reduce the error caused by the environmental drift, and hope to improve the measurement accuracy, and the composition of the whole system is as shown in FIG. The main purpose is to cut off the feedback between the controller and the grating and process it separately. In order to move while taking the position coordinates and detection signals, the signal of the optical thumb must be directly read and processed. The invention adopts the data capture card (19) (DAQ) to directly read the grating signal, and discriminates the moving distance through the software, and simultaneously captures the optical reading device (31) and the reference source optical reading by the multi-channel capture source. Take the four-quadrant detector (16) signal in the device (31〇). Since the position signal of the grating and the signal of the four-quadrant detector (16) are processed synchronously, the error can be reduced. The present invention still uses VB and Labview to develop a mobile platform (18) to construct a system for automatic measurement. The invention shortens the detection time by the continuous scanning measurement method, and discusses the influence on the system precision. 1 Firstly, for the glass scanning detection of the thickness G.7mm, the movement is performed at the speed of O.Smm/sec, and the measurement result is completed in 3.67 seconds. Ten-(a), round ten-(b). Fig. 10 - (4) is the result of the reference source optical reading device (10) sweeping the quasi surface (33), and Fig. 10 - (8) is the result of measuring the object to be tested (32) by the detecting source optical reading device (31). Since the capture frequency is much larger than the moving speed of the current month, the monthly average (four) domain average processing method, 200938803 through the signal averaging method at each position, j is / Xiao minus the influence of noise, as shown in Figure 12 (a) Figure 12 (b), you can also use the moving average method (Running Α 叫 called e Method) for signal processing. The basic idea of this method is to average the 2K+1 pen signal before and after the original data. The mathematical expression is as follows: G, ^ Κ 2K + \ (3-7) W,7 = 1,2,3,·· ··,^ν}
··___V 其中i為位置座標，Κ為窗口參數。移動平均法可以減 少隨機變動的影響’具有平滑數據的作用。但過度的平滑 可能造成訊號處理的失真，因而合理的選用窗口參數κ值， 是運用移動平均數的關鍵。圖十三（a)、圖十三（b)，為透 過移動平均法處理的結果，經過多項式内插法找出s曲線 的中、點’對於圖十二(a)、圖十三⑻所檢測的厚度為 〇· 6998 // m 〇 K.結論 本發明所提供之雙光探針檢測透明物體其厚度與間隙 的裝置，與刖述引證案及其他習用技術相互比較時，更具 有下列之優點： 本發明利用共軛焦的概念設計一套檢測透明物體（如 LCD玻璃基板）的間隙與厚度之系統，建立在以雙顆光學讀 取裝置的量測架構上以精確量測待測物的厚度與間隙。由 於整體架構簡單、快速與精確，適合用來作檢測玻璃基板 的工具之一 ’且誤差可在±0.29 /zm以内。 15 200938803 -」上所述’僅為本發明之一可行實施例，並非用以限 =專利範® ’凡舉依據下列申請專利範ϋ所述之 =特心及其精神而為之其他變化的等效實施，皆應 ;本發β之專利範圍内。本發明所具體界定於申請專 利範圍之結構特徵，未見於同類物品，且具實用性與進少 性’已符合發明專利要件，爰依法具文提出申請，謹請鈎 局依法核予專利，以維護本申請人合法之權益。 Ο【圖式簡單說明】 圖一為習用共軛焦系統架構示意圖； 圖一為驾用像散像差的原理示意圖； 圖二為習用像散法鎖焦方式示意圖； 圖四（a)為共軛焦量系統鎖焦至待測物上表面的示意圖； 圖四（b)為共軛焦量系統鎖焦至待測物下表面的示意圖； ❹圖五為本發明步階式之短焦距量測系統架構圖； 圖八（a)為本發明短焦距量測系統僅測量基準面，找出△ 值； 圖八（b)為本發明短焦距量測系統放上待測物檢測，量測實 際厚度； 圖七（a )係本發明以參考源光學讀取裝置量測基準面的結 果圖； 圖七（b)係本發明以檢測源光學讀取裝置量測基準面的結 果圖； 16 200938803 圖八為本發明多項式曲線擬合法分析s曲線中心值； 圖九（a)係本發明以參考源光學讀取裝置量測玻璃厚度的 結果圖； $九（b)係本發明以檢測源光學讀取裝置量測玻璃厚度的 結果圖， 圖十為本發明連續掃描式之小間距量測系統架構示意圖； 圖十-（a)係本發明以參考源光學讀取裝置連續掃描檢測 〇玻璃厚度之未處理信號的結果圖； 圖十-（b)係本發明以檢測源光學讀取裝置連 測玻璃厚度之核縣_絲冑； 式檢 圖十二（a)係本發明以參考源光學讀取裝置連續掃描檢測 玻璃厚度之經過時域平均處理的結果圖； 圖十-（b)係本發明以檢測源光學讀取裝置連續掃描檢測 玻璃厚度之經過時域平均處理的結果圖； ❹圖十三（a)係本發明以參考源光學讀取裝置連續掃描檢測 玻璃厚度之經過移動平均處理的結果圖；及 圖十三（b)係本發明以檢測源光學讀取裝置連 玻璃厚度之經過移動平均處理的結果圖。 【主要元件符號說明】 (11)雷射二極體 （13)分光鏡 (14)準直透鏡 （15)聚焦物鏡 (16)檢測器 17 200938803 (18)移動平台 （19)資料擷取卡 (20)電腦 （31)(310)光學讀取|| (311)(312)聚焦物鏡 （313)(314)光探針 (32)待測物 （33)基準面 (Ft )子午光線的成像位置 (F〇弧矢光線的成像位置 (t)實際厚度 〇 (t’ ）等效厚度 (6> 〇入射角 (Θ r )折射角 (fir)折射率 檢則源的聚焦點掃到反射鏡時 (&)檢测源的聚隹赴接十。移動的距 (RO東去、 “、、點掃到待測物上表面的靼離 〇 考源的聚焦點掃到反射鏡時移動平台 (△)高度差 勒十 '移動的距截 18··___V where i is the position coordinate and Κ is the window parameter. The moving average method can reduce the effect of random variation' with smooth data. However, excessive smoothing may cause distortion of the signal processing. Therefore, the reasonable selection of the window parameter κ value is the key to using the moving average. Figure 13 (a) and Figure 13 (b) show the results of the moving average method. The polynomial interpolation method is used to find the middle and the point of the s-curve. Figure 12 (a) and Figure 13 (8) The thickness of the test is 〇·6998 // m 〇K. Conclusion The device for detecting the thickness and the gap of a transparent object by the dual-optical probe provided by the present invention has the following advantages when compared with the cited reference and other conventional techniques. Advantages: The present invention utilizes the concept of conjugated coke to design a system for detecting the gap and thickness of a transparent object such as an LCD glass substrate, which is built on a measurement architecture of two optical reading devices to accurately measure the object to be tested. Thickness and clearance. Due to its simple, fast and accurate overall structure, it is suitable for use as one of the tools for detecting glass substrates' and the error can be within ±0.29 /zm. 15 200938803 - "The above description is only one of the possible embodiments of the present invention, and is not intended to be limited to the patents of the patents. Equivalent implementation, all should be; within the scope of this patent. The invention is specifically defined in the structural features of the scope of the patent application, is not found in the same kind of articles, and has practicality and lessness. It has met the requirements of the invention patent, and the application is filed according to law, and the hook office is required to approve the patent according to law. Maintain the legal rights of the applicant. Ο [Simple diagram of the diagram] Figure 1 is a schematic diagram of the conventional conjugate focal system architecture; Figure 1 is a schematic diagram of the principle of driving astigmatic aberration; Figure 2 is a schematic diagram of the conventional astigmatism locking method; Figure 4 (a) is a total Schematic diagram of the yoke focal rate system locking focus to the upper surface of the object to be tested; Figure 4 (b) is a schematic diagram of the conjugate yoke system locking focus to the lower surface of the object to be tested; Figure 5 is a short focal length of the step type of the present invention Figure 8 (a) is a short focal length measurement system of the present invention, which only measures the reference plane and finds the Δ value; FIG. 8(b) shows the short focal length measurement system of the present invention on which the object to be tested is placed and measured. Figure 7 (a) is a result of the measurement of the reference plane by the reference source optical reading device of the present invention; Figure 7 (b) is a result of the measurement of the reference plane by the source optical reading device of the present invention; 200938803 FIG. 8 is a polynomial curve fitting method for analyzing the center value of the s curve according to the present invention; FIG. 9(a) is a graph showing the result of measuring the thickness of the glass by the reference source optical reading device; $9(b) is the detection source of the present invention The result of measuring the thickness of the glass by the optical reading device, Figure 10 is BRIEF DESCRIPTION OF THE DRAWINGS FIG. 10(a) is a diagram showing the result of continuous scanning of an unprocessed signal for detecting the thickness of a beryllium glass by a reference source optical reading device; FIG. 10-(b) The invention adopts a detection source optical reading device for continuously measuring the thickness of the glass, and the invention has a time-domain average processing method for continuously scanning and detecting the thickness of the glass by the reference source optical reading device. Figure 10-(b) is a graph showing the results of the time-domain averaging process of continuously detecting the thickness of the glass by the source optical reading device of the present invention; Figure 13 (a) shows the optical reading of the reference source of the present invention. The result of the moving average processing of the continuous scanning and detecting glass thickness of the apparatus; and FIG. 13(b) is a result of the moving average processing of the glass optical thickness of the detecting source optical reading apparatus of the present invention. [Main component symbol description] (11) Laser diode (13) Beam splitter (14) Collimating lens (15) Focusing objective lens (16) Detector 17 200938803 (18) Mobile platform (19) Data capture card ( 20) Computer (31) (310) optical reading | | (311) (312) focusing objective (313) (314) optical probe (32) object (33) reference plane (Ft) imaging position of meridional light (F成像 sagittal ray imaging position (t) actual thickness 〇(t') equivalent thickness (6> 〇 incident angle (Θ r ) refraction angle (fir) refractive index detection source when the focus point is swept to the mirror (&) The source of the detection source is connected to the tenth. The moving distance (RO east to go, ",, the point sweeps to the upper surface of the object to be tested, the focus point of the test source is swept to the mirror when moving the platform ( △) height difference Le ten 'moving distance cut 18