TW200923571A - A pellicle, a pellicle-receiving container for receiving a pellicle, and a method for storing a pellicle in a pellicle-receiving container - Google Patents

Abstract

The purpose of the invention is to provide a pellicle, a pellicle-receiving container for receiving a pellicle and a method for storing a pellicle in a pellicle-receiving container, especially for a large pellicle that is stored in the pellicle-receiving container without the use of a separator. To achieve the purpose, an area without the coating of a mask adhesive is formed on a portion of the end face of the pellicle frame having the mask adhesive, and the uncoated area is mounted on a pellicle frame support comprised of silicone gel or materials alike inside the pellicle-receiving container. Next, the pellicle frame is held fixed inside the pellicle-receiving container using a pin inserted into a hole provided on a side of the pellicle frame and a pin holder. A separator is not needed since the adhesive layer can be protected without using the separator.

Description

200923571 VI. Description of the Invention: [Technical Fields of the Invention] The invention relates to a protective film assembly used as a dustproof device in the manufacture of semiconductors such as semi-conducting, printed substrates or liquid crystal displays, in particular, A large protective film module used in the manufacture of liquid crystal displays. [Prior Art] In the manufacture of products such as LSIs, super LSIs, and liquid crystal display panels, the semiconductor crystals or liquid crystals are used to illuminate the smudges, but the reticle or the retort (below) If it is only ash, if it is ash, it will absorb light and bend the light. Therefore, in addition to deforming the transferred pattern and roughening the edge, the substrate will be stained and the size and quality will be damaged. The appearance of the ^ far and other operations are usually carried out in a clean room, but even so often, it is still very difficult to clean the hood. Therefore, we attached the protective film assembly for the device to the surface of the mask and then exposed it. At this time, the foreign matter is not 2= The focus is on the reticle image ^: To affect the lithography stepping, the foreign matter on the aging part will not be transferred to the W-sewing protective film module, and the light transmission is good. The composition of nitrocellulose, i ϊ ϊ 脂 , , , , , , , , 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 硝 硝 硝 硝 硝 硝 硝 硝 硝 硝 硝:«, and rely on the female layer for 200923571 kg, the partition must be made of the entire piece of raw material without seams. If there is a difference in height such as recording, the shape will be transferred to the adhesive mask layer, and the mask will be stabilized. Therefore, for the large lion (four) membrane module, ^ : is a large protective film module with a length of more than 500 mm, in addition to the system, it is difficult to completely apply the release agent completely, and the separation is manufactured and obtained. It is not easy. Protecting the transfer agent, in the protective thin piece _ ί t (4) the agent is stored on the lower side (the protective film assembly side), but in order to omit the sighing shoulder f placed on the upper side, the protective film Adhesive; by: column adhesive protection storage capacity 'internal change = direction =: = = There is currently no document J shows two If % appropriate. Therefore, and the protective film unit storage container. ❿m 濩 濩 濩 以 以 系 系 系 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利 利In this technical content, due to the soil, the Ming (> according to the patent document ^ «, the indispensable components. The search and the separation of the document in the literature 1 the entire width of the protective film frame is still a mask layer The end face is provided with a groove portion to provide 2), and the I degree of the material in the groove portion is finer (refer to the patent for avoiding the layer of the agent because the surface layer is ^^^ with the layer of the splicer). However, the final method does not use the force part (four) to form a convex shape, thereby improving the flat and finer protrusion of the surface by this "J^4)o^5 200923571; Therefore, the protective film button is pulled out, and the latter is provided with a protruding area on the partition, and i, , -==== assists us from the mask layer "[[[li]]] Japanese Patent Application Laid-Open No. Hei. No. Hei. No. 2007-286483 [Patent Document 4] Japanese Patent Application No. 2007-28648 The problem to be solved by the invention] a protective film group 2, which at least causes any obstacle, [technical means for solving the problem] 'Being formed in the protective film frame _ is not to be connected to the upper and lower end faces of the protective film frame, and the protective film assembly of the present invention accommodates one piece of ΐ 与 and the protective film sheet storage surface for sealing the tray The uncoated mask (4) that is placed on the pellicle frame is only connected to the pellicle assembly, and the tray is supported by the way to support the aborigines. We can use the resin, rubber, and polystones. Difficult axis material, protection = 2 200923571 pieces of the inner protective film group area are placed on the protective film frame to support the adjacent wood, and the fixed pin inserted on the mechanism with the mask adhesive is placed on the machine' Moreover, it will be held in the fixing pin to keep the fixing pin insertion hole on the side of the anti-small thin chest (four) film frame [Compared with the previous storage and internal fixation of the protective film assembly. Preservation_Protection film assembly storage, large-scale anti-smashing policy There is no obstacle in the inner bar, so it can solve the problem. The special procedures for the secret operation are reduced to the manufacturing method. The following is a description of the best aspect of the present invention. invention It is not limited to the top view in which the protective film module is housed in the protective film unit 2 and the area where the unshielded mask is removed. The component storage container tray 14 is provided with an elastic body (not shown) such as rubber, and the insertion hole 17 is provided with a hole b in the side surface. If so, the thin frame 11 is provided. ^ίίΓί ^ 纟 'There is no county paste isolation to protect the secret layer 12, but 200923571 omits the partition part. Here, the defense (four) hall _ method, for example, you can also use the f side or __诚相端_Storage and other components check the sweet side and then 'support the material of the frame support portion 18 on the protective thin 臈 assembly, the polyamine, the dirty, 'for example, can make the yam, qing ===slip=, the quality can also be rubber. For example, the leg and the gel are ί. The enamel is more suitable to use the ΐ 与 与 and the protective film frame to rub, greatly reducing the generation of dust and electric properties. Various guides such as carbon or metal (powder) are accommodated in the piano to prevent the conveyance Or from the protective film group, the foreign matter film module is electrostatically charged to reduce the static electricity. When the 4-phase component is adhered, it may cause electrostatic damage to the mask pattern. ^The health, quantity or shape of the frame portion 18 is protected from 8 places, but we can store it according to the storage. The shape of the anti-theft device is appropriately set. Basically, as long as the lamella film frame is moved, the gap between the masks 18 can be ensured, that is, the cow accommodating tray 14 and the protective raft frame support [implementation of the invention] of the present invention. The invention is not limited to this. A protective film assembly as shown in Fig. 2 was fabricated. First of all, using the machine 200923571 'smart plus the leaky 刺 刺 仙 仙 difficult to record the edge size l_mm, short side f 〇 r, height 5.8 face, width 13mm protective film frame 21, two two f face to implement black oxygen skin reduction . (10) After the water-repellent film frame is washed and dried, ST benzene is diluted with Shiqi oxygen-killing agent (Shin-Etsu Chemical Co., Ltd. i37; 37 (Κ)) Cloth, made out, cover layer 22. Further, the cross-sectional shape of the masking agent layer 22 is formed to have a width of half. At this time, since the width of the protective film frame is 4 mm for the coating layer, the width of the layer is 4 mm, so the outer side is formed with a width of 9 mm, and the first step is to dilute the stone oxide with the benzene. (Shares f ίίί3: Γ0): Then, it is coated on the protective film frame and waits for its ▲ dry = size is deleted TM surface and surface touch rub: mold coating method _ resin (Asahi Glass Co., Ltd. ; can be named: .;) 2nd eve A-shaped material 1 / square protective film unit storage container, for the thickness of 5mm black (company name 'company name, - parel) 2 product reading thin 臈 assembly Storage container tray

Co., Ltd., ^ mouth I and T 〇 mn; 透 ff electrostatic fun resin (T0RY protective film assembly storage vacuum forming method to produce a soil ABS trace mountain / body in the protective film assembly storage container tray 14 is fitted After the position of the fixed pin 17 and the fixed lock holding mechanism 16 which are made by the force of 31 = 2, the position of the fixing hole holding mechanism 16 is ίίίί: outside: the inside of the jig hole portion b on the side surface, adjusted μ, in the protective film assembly storage container In the position of the disc, the area of the uncoated matte #4 in the (4) is 8: ^05^3=, condensed (Shin-Etsu Chemical Industry Co., Ltd., the product is 8mm in diameter, thickness 4mm frame support portion 18. 200923571 After the protective fine assembly is cleaned in the dust-free 1 pure water, the protective film assembly is housed and the protective film assembly is fixed by the fixing pin 17 with the fixing pin 17. The protective film group a containing the pellicle film assembly, 廿* L 夂 and the action of returning to the level after being held for 1 minute is performed. 3 J: Surname... Attachment = inspection of foreign matter adhesion of the pellicle component in the darkroom ;:;2===The foreign body has not increased. Also, the = layer is not fully wealthy. Traces, health, masks and madness's ability to protect the bonding layer even without the isolation part, so the problem can be solved by the problem of the bamboo and the protective film group = ί. === In addition to the cost of the body 2 === body, the invention can achieve the above-mentioned low-cost overall manufacturing salty. The result of the government is very high in the price of the knot. [Simplified illustration] BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a top view and a schematic view of a solid medium: = a protective film assembly, a container showing a protective film assembly of the present invention. [Main component symbol description] 12 13 14 15 16 11 protective film frame mask bonding Layer (mask adhesive protective film protective film assembly storage container tray anti-3 vine film assembly storage container cover body fixing pin retaining mechanism bean 200923571 17 fixing pin 18 frame support portion 21 protective film frame 22 mask adhesive layer 23 film Adhesive layer 24 protective film a (mask adhesive) uncoated region b (disposed on the side of pellicle frame 11) hole portion AA hatching line BB hatching line 11

Claims (1)

200923571 VII. Patent application scope: The second protective film module is characterized in that the in-plane protection of the surface is adhered to the layer of the adhesive layer required to be adhered to the mask and the uncoated mask adhesive is formed on the crucible 35. Inserting the hole; inserting a non-penetrating hole portion, the fixing pin can accommodate the device--the way to fix the 4 thin two and the end face does not contact the protective film assembly to receive the tray, and the feature of the protective film assembly is : ° The upper cover of the storage unit of the diaphragm assembly, which is supported by a frame support portion that supports the protection_component; and the area of the uncoated mask on the 4 can be fixed. 3 upper pin retaining mechanism, the fixed pin retaining mechanism protective film assembly 上下 the upper and lower end faces of the protective film frame are not in contact with 3, and the protective film frame is also fixed. The protective film assembly storage container of the protective thin article, wherein: the red group system of the gel is _ fat, rubber, and poly-wei-burning: a protective film component storage container according to the second or third item of the patent scope of May 5, f Anti-turf scale scale riding antistatic. The method, the uncoated scaled area on the square protective film frame 1 m of the protective film assembly in the protective film module storage container is placed on the surface of the mouth ==== the pin is inserted in the protective film . Fix the anti-edge component to the protective film component. Figure: 12