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TW200912292A - A method for defects enhancement - Google Patents

A method for defects enhancement Download PDF

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Publication number
TW200912292A
TW200912292A TW97125277A TW97125277A TW200912292A TW 200912292 A TW200912292 A TW 200912292A TW 97125277 A TW97125277 A TW 97125277A TW 97125277 A TW97125277 A TW 97125277A TW 200912292 A TW200912292 A TW 200912292A
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TW97125277A
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Lev Reznik
Avi Levy
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Camtek Ltd
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Abstract

A method for defect enhancement, the method includes: displaying, during a verification process, a first image of a portion of an electrical circuit that is associated with a suspected defect; applying on the first image at least one morphological operation to provide a processed image in response to a type of the suspected defect; and displaying the processed image.

Description

200912292 10 15 \ 20 九、發明說明: t發明所屬」 參考申請案 這個申請案主張2007年7月6曰提出申請的美國臨時專 利序列號第60/948,193號案的優先權,其在此以务⑽ 牡此以參照形式被 併入本文。 做 本發明是關於用以凸顯缺陷之方法。 t先前技術3 發明背景 驗證過程期間操作員必須執行對在—I义 无則檢驗步驟期 間發現的疑似缺陷的視覺驗證。在它們的φ1 ^ 丰碰 7我w過程的各種 v驟期間,被檢驗且然後被驗證的物件可以是諸女1 於印刷電路板或晶圓之類的被檢驗物件的電路檢驗 限 驗證系統向操作員連續地呈現被檢驗物件 缺陷的區域的視訊影像。 、有疑似 操作員期望非常迅速地識別所呈現之影像上的疑心 陷且執行下面操作的其中一個:⑴標示它(作 以缺 ^ ^ 、邛為嚴重缺陷), I )為後續修復標示它,或者(iii)(立即)修復它。 操作員花費在這操作上的時間主要視缺陷多、 顯不的影像内識別出而定。 、此被在 顯示的影像未必包括缺陷的清晰影像。有此 破看到,有些*能被看到,有祕難發現等等。缺、很少 由於下面原因中的至少一個,這些困難可 在藉由使用非常低角度的照明所獲得的一現.⑴ 豕中,淺短路 -技術領域】 5 200912292 (shallow short)(電連接不應被互相連接的兩個導體的導電 材料)可被較容易地檢測,而在使用其他類型的照明所得到 的影像中,它們很少被看到,(ii)諸如缺失的鑽孔、突出、 刻痕及其他之各種缺陷可能很少被看到,且即使被看到 5 時,(操作員對)它們的檢測也可能會非常長。 以上提及的這些困難強烈影響處理的通量及驗證過程 的品質。 為了在驗證系統上被清晰地看到,淺缺陷需要非常高 的擴散照明。高擴散照明需要在缺陷附近放置照明光學器 10 件,因而妨礙操作員接觸缺陷、修復它或標示它(或者至少 使這些任務高度複雜化)。 需要加速該驗證過程,且尤其需要凸顯淺缺陷的影像。 【發明内容3 發明概要 15 一種用以凸顯缺陷之方法,該方法包括以下步驟:在 驗證過程期間顯示一電路之與一疑似缺陷有關聯的一部分 的一第一影像;根據該疑似缺陷的類型在該第一影像上應 用至少一個形態學運算以提供一已處理影像;及顯示該已 處理影像。 20 一種用以凸顯缺陷之方法,該方法包括以下步驟:在 驗證過程期間顯示一電路之與一疑似缺陷有關聯的一部分 的一第一影像;產生代表該第一影像的第一色帶資訊與該 第一影像的第二色帶資訊之間的差異的色帶影像内差異資 訊;及顯示該色帶影像内差異資訊。 200912292 圖式簡單說明 «下面結合附圖的詳 二 目的、特徵及優 彳田述中本發明的前述及其他 同的參考符號始钦將隻侍較明顯。圖中,不同視圖中的相 第1圖說明Γ终代表相同的元件’其中: 第2圖說明根:發明的一實施例的一方法; 第3,圖是根摅發明的一實施例的一方法; 部分的影像及£ 本發明的各種實施例的印刷電路板的 10 15 括臨限資訊的―影像。# “,的-第-影像及包 【實施冷式】 較佳實施例之詳細說明 〜藉由制.的工具 '方法及元件,本發明可以被實 施因此,讀工具、元件及方法的細節在此不詳細地提 出。=先^苗述中’為了提供本發明的一徹底的理解,許 多特定細節被提出。然而,應該認識到的是在不憑藉特定 提出的細節的情況下,本發明可以被實施。 在本揭露中,只有本發明的示範實施例及僅它的通用 性(versatility)的一些實例被顯示及描述。需理解的是本發 明能夠在各種其他組合與環境中使用,且能夠在如這裏所 表達的本發明的概念的範圍内變化及修改。 已經被顯示的是’各種形態學(morphological)功能可以 被應用到疑似缺陷的影像上’其中藉由使用與該疑似缺陷 的類型有關聯的一形怨學功能’每一疑似缺陷類型可以被 20 200912292 凸現。 凸顯缺陷可加速驗證過程且使其更加準確。 形態學功能簡化該影像同時維持一已成像物件内的主要 形狀特性。形態學膨脹(diiati〇n)功能擴展形狀,形態學侵蝕 5 (_i〇n)功能收縮形狀,形態學斷開(〇pening)功能先侵蝕再膨 張衫像内的形狀’及形態學閉合(closing)功能先膨脹再侵|虫 -影像内的形狀。藉由使用適當的矩陣,這些形態學功能中 的每-個可被實施。每—形態學功能可以被應用―或多次。 已經被顯示的是,該形態學閉合功能的應用凸顯短 10路,該形態學斷開功能的應用凸顯缺失的鑽孔,該形態學 侵姓功能的應用凸顯刻痕,及該形態學膨脹功能的應用凸 顯突出。 以上提及的形態學功能的每一個能以二進制模式或以 灰階模式被應用。例如,當以二進制模式應用該形態學閉 15 口功此時3χ3滿矩形矩陣被使用,而當以灰階模式應用 該形‘禮學閉合功能時,一如空矩形矩陣被使用。 這些开y怨學功能根據將被發現的缺陷的類型而被應 用這些類里可以提前被知道,可以被估計,可以根據先 刖發現的缺陷的類型,可以以感興趣之類型被定義等等。 20这些形態學功能可以一個接一個地被應用。 這二开y心干功能被應用在一電路之多個部分的影像 上根據缺心檢測步驟,該電路之該等部分包括一缺陷。 藉由使用這些形態學功能,各種類型(與不同的形態學 功能有關聯的每-類型)的缺_凸顯。 200912292 一已處理影像是在一物件的一部分的一影像上應用一 形態學功能的結果。該已處理影像能以不同方式被顯示: 顯示在一額外的視窗中、直接顯示在現場實時影像上、在 實際圖片上以強彩色標示等類似的方式。 5 為了凸顯不同類型的不同缺陷,一單一影像可以藉由 不同的形態學功能被處理。 該等形態學功能的應用可以由操作員觸發,但是也可 以自動觸發,例如-根據缺陷檢測過程的結果。例如-以某一 確定程度(level of certainty)被檢測出的缺陷,及此外或可選 10 擇地,難以觀察的缺陷,可以觸發一或較多形態學功能的 應用。 一或較多形態學功能的應用的結果能以各種方式及在 不同時間被提供給操作員。從一或較多個形態學功能的應 用中得到的資訊可以作為一單獨影像被顯示,可以附加在 15 原始影像上被顯示,可以改變顯示的色彩等等。一或較多 個視窗可以被分配以顯示不同的已處理影像,及此外或可 選擇地,已預先處理的影像。 第1圖說明根據本發明的一實施例的用以凸顯缺陷的 方法100。 20 方法100開始於在驗證過程期間顯示一電路之與一疑 似缺陷有關聯的一部分的一第一影像的步驟110。 步驟110後面是步驟120,其決定是否在該影像上應用 一形態學功能,及如果是,決定應用哪一個形態學功能。 如果回答是肯定的,則步驟120後面是步驟130,其根 9 200912292 據該疑似缺陷的類型在該第一影像上應用至少一個形態學 功能以提供一已處理影像。 步驟130包括步驟132、134、136及138中的至少一個步 驟。 5 步驟13 2包括如果該疑似缺陷是一短路則在該第一影 像上應用一形態學閉合功能。步驟134包括如果該疑似缺陷 是一缺失的鑽孔則在該第一影像上應用一形態學斷開功 能。步驟136包括如果該疑似缺陷類型是刻痕則在該第一影 像上應用一形態學侵蝕。步驟138包括如果該疑似缺陷類型 10 是突出則在該第一影像上應用一形態學膨脹功能。 步驟130可以包括根據疑似缺陷的可能類型在該已處 理影像上應用多個形態學功能以提供多個已處理影像。在 這種情況下,步驟140可以包括顯示該等多個已處理影像。 步驟130後面是顯示該已處理影像的步驟140。 15 步驟140後面可以是接收操作員對所顯示資訊的回應 的步驟150。操作員可以要求應用另一形態學功能,可以標 示一缺陷,可以修復該缺陷或決定忽略它。 要注意的是,該等形態學功能的應用可以在顯示該第 一影像之前。例如,方法1〇〇可以只包括步驟120、130及 20 140 。 第2圖說明根據本發明的一實施例的用以凸顯缺陷的 方法101。 方法101與方法100的不同之處在於其包括步驟160及 170而不是步驟140。 10 200912292 步驟160包括執行額外的處理(例如應用一非形態學功 能),且步驟170包括顯示該額外處理的結果(例如應用該非 形態學功能的結果)。要注意的是,步驟的一組合可以被提 供,其中該額外處理可以是即便在沒有應用形態學運算的 5 情況下也被執行的唯一處理。 步驟160可以包括下面步驟中的至少一個:⑴步驟 161,其產生代表在該第一影像與該已處理影像之間的關係 的一第二影像。(ii)步驟162,其產生代表在該第一影像與 該已處理影像之間的差異的一差異影像。(iii)步驟163,其 10 產生代表該第一影像與該已處理影像之間在某一色帶 (color band)内的差異的色帶影像間差異資訊。(iv)步驟 164,其產生代表該第一影像的第一色帶資訊與該第一影像 的第二色帶資訊之間的差異的色帶影像内差異。(v)步驟 165,其定限該色帶影像内差異資訊以提供臨限資訊。(vi) 15 步驟166,其用一增益因數乘該色帶影像内差異資訊以提供 放大的色帶影像内差異資訊;(vii)步驟167,其定限該放大 的色帶影像内差異資訊以提供放大的值資訊。(viii)步驟 16 8,其定限色帶影像内差異資訊以提供多個臨限資訊;(i X) 步驟16 9,其定限該放大的色帶影像内差異資訊以提供多個 20 放大的臨限資訊。 方便地,該第一色帶是一紅色帶,及該第二色帶是一 綠色帶。 方便地,該放大增加該影像的動態範圍,及此外或可 選擇地,該定限(thresholding)包括將像素的灰階與被設定 11 200912292 為一最大灰階值的某一分數(例如85%)的一臨限值相比較。 步驟170可以包括顯示在步驟160期間產生的至少一個 影像(或資訊)。步驟Π〇可以包括顯示下面影像(或資訊)中 的至少一個或其等之組合:第二影像、差異影像、色帶影 5 像間差異資訊、色帶影像内差異資訊、臨限資訊、放大的 臨限資訊、臨限資訊或多個放大的臨限資訊。 步驟170可以包括在一主視窗内(該原始影像被顯示在 其中的視窗)、在一單獨視窗中、以一覆加的方式及類似的 方式顯示該已處理影像或資訊。 10 如果多於一個視窗被使用,則使用者可以被允許在視 窗之間雙態觸變或一次被呈現給多於一個視窗。 步驟170可以包括產生一已處理影像,在該已處理影像 中缺陷在一均勻背景下被說明。方便地,已著色的缺陷在 一黑色背景下被顯示。 15 方法100可以包括一初始化步驟,該初始化步驟包括決 定感興趣之缺陷是哪種(些)類型。這可以包括定義指定至少 一個感興趣之缺陷類型的一驗證“工作”。此定義決定步驟 120期間哪種形態學功能將被應用。 如果多於一個單一感興趣之缺陷類型被定義,則方法 20 100可以包括應用多於一個單一形態學功能。 要注意的是,該方法可以被一電腦程式產品應用,該 電腦程式產品包括儲存用以執行方法100或101的任一步驟 (或步驟的組合)的指令的電腦可讀媒體。它可以包括,例如 用以在一驗證過程期間顯示一電路之與一疑似缺陷有關聯 12 200912292 的一部分的一第一影像的指令;用以根據該疑似缺陷的類 型在該第一影像上應用至少一個形態學運算以提供一已處 理影像的指令;及用以顯示該已處理影像的指令。 根據一實施例,一方法被提供。它包括方法101的某些 5 步驟,諸如:⑴在驗證過程期間顯示一電路之與一疑似缺 陷有關聯的一部分的一第一影像;(ii)產生代表在該第一影 像的第一色帶資訊與該第一影像的第二色帶資訊之間的差 異的色帶影像内差異資訊;及(iii)顯示該色帶影像内差異資 訊。這方法可以被用於使顏色差異脫色。這些差異可以代 10 表本應該位在一金層下面的一銅層,該金層已經被破壞而 顯露出下面的銅。此外或可選擇地,這方法可以包括下面 中的至少一個:⑴在該第一影像上應用一區塊分析(blob analysis)以提供一已經過區塊-分析影像,(ii)顯示該已經過 區塊-分析影像,(iii)顯示該已經過區塊-分析影像及該色帶 15 影像内差異資訊。 第11圖說明:⑴第一影像1100,(ii)代表如從該第一影 像計算出的色帶影像内差異資訊的已處理影像1120 ; (iii) 說明色帶影像内差異資訊(以藍色顯示)與檢測第一影像 1100的最亮元件的一已經過區塊-分析影像之一組合的已 20 進一步處理的影像1130,及(iv)為第一影像1100與色帶影像 内差異資訊(以白色顯示)之一組合的組合影像1140。 要注意的是,以上提及的方法中的任一個可以被一驗 證站應用,該驗證站包括一顯示器、一處理器及一人機介 面。該顯示器可以在一驗證過程期間顯示一電路之與一疑 13 200912292 似缺陷有關聯的一部分的一第一影像。該處理器可以根據 該疑似缺陷的類型在該第一影像上應用至少一個形態學運 算以提供一已處理影像。然後該顯示器可以顯示該已處理 影像。 籍由使用習知的工具、方法及元件,本發明可以被實 施。因此,這種工具、元件及方法的細節在此不詳細地提 出。在先前描述中,為了提供本發明的一徹底的理解,, 多特定細節被提出。然而,應該認識到的是在不憑藉特定 ^出的細節的情況下,本發明可以被實施。 在本揭露中,只本發明的示範實施例及僅它的通用性 的一些實例被顯示及描述。需理解的是本發明能夠在各種 其他組合與環境中使用,且能夠在這裏所表達的本發明的 概念的範圍内變化及修改。 【阚式簡單說明】 第1圖說明根據本發明的一實施例的一方法; 第2圖說明根據本發明的一實施例的一方法; 第3-10圖是根據本發明的各種實施例的印刷電路板的 部分的影像及印刷電路板的部分的已處理影像;及 第11圖說明根據本發明的一實施例的一第一影像及包 括臨限資訊的一影像。 【主要元件符號說明】 WO-lOl...方法 1120…已處理影像 U0-170. · ·步雜 已進一步處理的影像 1100_ · ·第一景多像 1140…組合景多像 14200912292 10 15 \ 20 IX. Invention Description: t invention belongs to this application. This application claims the priority of the US Provisional Patent Serial No. 60/948,193 filed on July 6, 2007, which is hereby incorporated by reference. (10) This is incorporated herein by reference. The present invention relates to a method for highlighting defects. Prior Art 3 Background of the Invention During the verification process, the operator must perform visual verification of the suspected defects found during the test procedure. During the various v-steps of their φ1 ^ bumping 7 I w process, the object that is inspected and then verified may be the circuit verification limit verification system of the tested object of the printed circuit board or wafer. The operator continuously presents a video image of the area of the object being inspected for defects. It is suspected that the operator expects to identify the suspicion on the presented image very quickly and perform one of the following operations: (1) mark it (for the absence of ^^, 邛 is a serious defect), I) mark it for subsequent repairs, Or (iii) (immediately) fix it. The time that the operator spends on this operation is mainly determined by the fact that there are many defects and no visible images. The image being displayed does not necessarily include a clear image of the defect. With this broken, some * can be seen, secrets are found and so on. Lack, rarely due to at least one of the following reasons, these difficulties can be obtained by using very low angle illumination. (1) 豕, shallow short circuit - technical field] 5 200912292 (shallow short) (electrical connection is not The conductive materials of the two conductors that should be connected to each other can be detected more easily, and in images obtained using other types of illumination, they are rarely seen, (ii) such as missing holes, protrusions, Scoring and other defects may be rarely seen, and even if they are seen 5, they may be very long (operator's). These difficulties mentioned above strongly influence the throughput of the process and the quality of the verification process. In order to be clearly seen on the verification system, shallow defects require very high diffusion illumination. High-diffusion illumination requires placing 10 pieces of illumination optics near the defect, preventing the operator from touching the defect, repairing it, or marking it (or at least making these tasks highly complex). It is necessary to speed up the verification process, and in particular, it is necessary to highlight images of shallow defects. SUMMARY OF INVENTION Summary of the Invention 15 A method for highlighting a defect, the method comprising the steps of: displaying a first image of a portion of a circuit associated with a suspected defect during the verification process; Applying at least one morphological operation on the first image to provide a processed image; and displaying the processed image. 20 A method for highlighting a defect, the method comprising the steps of: displaying a first image of a portion of a circuit associated with a suspected defect during the verification process; generating a first ribbon information representative of the first image a difference in the in-band image of the difference between the second ribbon information of the first image; and displaying the difference information in the image of the ribbon. 200912292 Schematic description of the drawings « The following two objects, features and advantages of the present invention will be more apparent. In the drawings, the first figure in the different views illustrates that the end represents the same element 'where: FIG. 2 illustrates a method of a first embodiment of the invention; and FIG. 3 is a view of an embodiment of the invention. Method; part of the image and the "image" of the printed circuit board of the various embodiments of the present invention. # ", - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - This is not a detailed description of the present invention. In order to provide a thorough understanding of the invention, many specific details are set forth. However, it should be appreciated that the invention may be practiced without the specific details presented. In the present disclosure, only some exemplary embodiments of the present invention and only some examples of its versatility are shown and described. It is to be understood that the present invention can be used in various other combinations and environments, and capable of Variations and modifications within the scope of the inventive concept as expressed herein have been shown that 'various morphological functions can be applied to images of suspected defects' by which the type of suspected defect is used There is an associated one-of-a-kind quest function. Each suspected defect type can be highlighted by 20 200912292. Highlighting defects can speed up the verification process and make it more accurate. The morphological function simplifies the image while maintaining the main shape characteristics of an imaged object. The morphological expansion (diiati〇n) function expands the shape, the morphological erosion 5 (_i〇n) functional contraction shape, morphological disconnection (〇pening The function first erodes the shape of the re-expanded shirt's shape and the morphological closing function first expands and invades the shape of the insect-image. By using the appropriate matrix, each of these morphological functions can be Implementation. Each morphological function can be applied - or multiple times. It has been shown that the application of this morphological closure function highlights a short 10-way, the application of this morphological disconnection function highlights the missing borehole, the morphology The application of the function of the aggression highlights the nick, and the application of the morphological expansion function is prominent. Each of the morphological functions mentioned above can be applied in binary mode or in grayscale mode. For example, when applied in binary mode Morphology closed 15 mouths at this time 3 χ 3 full rectangular matrix is used, and when the shape of the ritual closure function is applied in grayscale mode, an empty rectangular matrix is used. These classes can be known in advance depending on the type of defect to be discovered, can be estimated, can be defined according to the type of defect discovered first, can be defined by the type of interest, etc. 20 These morphological functions can One after the other is applied. The two open y function functions are applied to images of portions of a circuit according to a cardiac detection step, and the portions of the circuit include a defect. By using these morphological functions, The absence of each type (per-type associated with different morphological functions). 200912292 A processed image is the result of applying a morphological function to an image of a portion of an object. Different ways are displayed: displayed in an additional window, directly on the live image of the scene, highlighted in strong colors on the actual picture, and the like. 5 In order to highlight different types of different defects, a single image can be processed by different morphological functions. The application of these morphological functions can be triggered by the operator, but can also be triggered automatically, for example - depending on the outcome of the defect detection process. For example, a defect detected at a certain level of certainty, and, in addition or alternatively, a defect that is difficult to observe, may trigger the application of one or more morphological functions. The results of the application of one or more morphological functions can be provided to the operator in a variety of ways and at different times. Information obtained from the application of one or more morphological functions can be displayed as a single image, can be displayed on the 15 original image, can change the color of the display, and the like. One or more windows may be assigned to display different processed images, and additionally or alternatively, pre-processed images. Figure 1 illustrates a method 100 for highlighting defects in accordance with an embodiment of the present invention. The method 100 begins with a step 110 of displaying a first image of a portion of a circuit associated with a suspected defect during the verification process. Step 110 is followed by step 120, which determines if a morphological function is applied to the image and, if so, which morphological function to apply. If the answer is yes, then step 120 is followed by step 130, the root 9 200912292 applying at least one morphological function on the first image to provide a processed image based on the type of suspected defect. Step 130 includes at least one of steps 132, 134, 136, and 138. 5 Step 13 2 includes applying a morphological closure function to the first image if the suspected defect is a short circuit. Step 134 includes applying a morphological disconnect function to the first image if the suspected defect is a missing hole. Step 136 includes applying a morphological erosion to the first image if the suspected defect type is a score. Step 138 includes applying a morphological expansion function to the first image if the suspected defect type 10 is highlighted. Step 130 can include applying a plurality of morphological functions on the processed image to provide a plurality of processed images in accordance with a possible type of suspected defect. In this case, step 140 may include displaying the plurality of processed images. Step 130 is followed by a step 140 of displaying the processed image. Step 140 may be followed by step 150 of receiving an operator response to the displayed information. The operator can request the application of another morphological function that can indicate a defect that can be fixed or decided to ignore it. It should be noted that the application of such morphological functions can be prior to displaying the first image. For example, method 1 can include only steps 120, 130, and 20 140 . Figure 2 illustrates a method 101 for highlighting defects in accordance with an embodiment of the present invention. Method 101 differs from method 100 in that it includes steps 160 and 170 instead of step 140. 10 200912292 Step 160 includes performing additional processing (e.g., applying a non-morphological function), and step 170 includes displaying the results of the additional processing (e.g., applying the results of the non-morphological function). It is to be noted that a combination of steps may be provided, wherein the additional processing may be the only processing that is performed even if no morphological operations are applied. Step 160 can include at least one of the following steps: (1) Step 161, which produces a second image representative of the relationship between the first image and the processed image. (ii) Step 162, which produces a difference image representative of the difference between the first image and the processed image. (iii) Step 163, wherein 10 produces inter-panel image difference information representative of a difference between the first image and the processed image within a certain color band. (iv) Step 164, which produces a difference in the intra-panel image representing the difference between the first ribbon information of the first image and the second ribbon information of the first image. (v) Step 165, which limits the difference information in the ribbon image to provide the threshold information. (vi) 15 Step 166, which multiplies the difference information in the ribbon image by a gain factor to provide the difference information in the enlarged image of the ribbon; (vii) Step 167, which limits the difference information in the enlarged image of the ribbon to Provides amplified value information. (viii) Step 168, which limits the difference information within the ribbon image to provide a plurality of threshold information; (i X) Step 16 9, which limits the difference information within the enlarged ribbon image to provide a plurality of 20 magnifications Threshold information. Conveniently, the first ribbon is a red ribbon and the second ribbon is a green ribbon. Conveniently, the zooming increases the dynamic range of the image, and in addition or alternatively, the thresholding includes a grayscale of the pixel and a certain fraction (eg, 85%) that is set to 11200912292 as a maximum grayscale value. A comparison of the thresholds. Step 170 can include displaying at least one image (or information) generated during step 160. The step Π〇 may include displaying at least one of the following images (or information) or a combination thereof: the second image, the difference image, the ribbon image 5, the difference information between the images, the difference information within the ribbon image, the threshold information, and the magnification Threshold information, threshold information or multiple magnified threshold information. Step 170 can include displaying the processed image or information in a main window (the window in which the original image is displayed), in a separate window, in an overlay manner, and the like. 10 If more than one window is used, the user can be allowed to toggle between windows or be presented to more than one window at a time. Step 170 can include generating a processed image in which the defect is illustrated in a uniform background. Conveniently, the colored defects are displayed on a black background. The method 100 can include an initialization step that includes determining which type(s) the defect of interest is. This can include defining a verification "work" that specifies at least one type of defect of interest. This definition determines which morphological function will be applied during step 120. If more than one single defect type of interest is defined, method 20 100 can include applying more than one single morphological function. It is noted that the method can be applied by a computer program product comprising a computer readable medium storing instructions for performing any of the steps (or combinations of steps) of method 100 or 101. It may include, for example, an instruction to display a first image of a circuit associated with a suspected defect 12 200912292 during a verification process; to apply at least the first image based on the type of the suspected defect A morphological operation to provide an instruction to process an image; and an instruction to display the processed image. According to an embodiment, a method is provided. It includes certain 5 steps of method 101, such as: (1) displaying a first image of a portion of a circuit associated with a suspected defect during the verification process; (ii) generating a first color band representative of the first image a difference in the intra-panel image of the difference between the information and the second ribbon information of the first image; and (iii) displaying the difference information within the image of the ribbon. This method can be used to discolor the color difference. These differences can be found in a copper layer below a gold layer that has been destroyed to reveal the underlying copper. Additionally or alternatively, the method can include at least one of: (1) applying a blob analysis on the first image to provide an already-block-analyzed image, and (ii) displaying the past Block-analyze the image, (iii) display the information about the difference between the block-analyzed image and the image of the band 15. Figure 11 illustrates: (1) the first image 1100, (ii) the processed image 1120 representing the difference information in the ribbon image calculated from the first image; (iii) the difference information in the ribbon image (in blue) Displaying 20 further processed images 1130 combined with one of the block-analyzed images detecting the brightest component of the first image 1100, and (iv) being the first image 1100 and the in-band image difference information ( A combined image 1140 of one of the combinations shown in white. It is to be noted that any of the above mentioned methods can be applied by a verification station comprising a display, a processor and a human machine interface. The display can display a first image of a portion of a circuit that is associated with a defect like a defect during a verification process. The processor can apply at least one morphological operation on the first image to provide a processed image based on the type of suspected defect. The display can then display the processed image. The present invention can be implemented by using conventional tools, methods and elements. Therefore, details of such tools, components and methods are not mentioned in detail herein. In the previous description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, it should be appreciated that the invention may be practiced without the specific details. In the present disclosure, only some exemplary embodiments of the present invention and only some examples of its versatility are shown and described. It is to be understood that the present invention is capable of use in various other combinations and environments, and can be varied and modified within the scope of the inventive concepts disclosed herein. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 illustrates a method in accordance with an embodiment of the present invention; FIG. 2 illustrates a method in accordance with an embodiment of the present invention; and FIGS. 3-10 are diagrams in accordance with various embodiments of the present invention. An image of a portion of the printed circuit board and a processed image of a portion of the printed circuit board; and FIG. 11 illustrates a first image and an image including the threshold information in accordance with an embodiment of the present invention. [Major component symbol description] WO-lOl...method 1120...processed image U0-170. · ·Steps Image processed further 1100_ · ·First scene multi-image 1140...Combination scene multi-image 14

Claims (1)

200912292 10 15 20 十、申請專利範圍: L —種用以凸現缺陷之方法,該方法包含以下步驟: 在-驗證過程期間顯示一電路之與—疑似缺陷有 關聯的一部分的一第一影像; 根據該疑似缺陷的類型在該第一影像上應用至少 —形態學運算以提供一已處理影像;及 一 ^ 顯示該已處理影像。 2·如申請專利第丨項所述之方法,其包含以下步驟· 如果該疑似缺賴料-短路,則在該第-影像上應用 一形態學閉合功能。 " 3·如申請專利第】項所述之方法,其包含以下步驟. 如果該疑似缺陷類型是—缺失的鑽孔,則在該第— 上應用一形態學斷開功能。 ^ 4. 如申請專利範圍第!項所述之方法,其包含以下 如果該疑似缺陷類型是刻痕,則在該第一影像 形態學侵蝕功能。 …用— 5. 如申請專利範圍第!項所述之方法,其包含以下 如果該疑似缺陷類型是突出,則在該第一 形態學膨脹功能。 馮用一6. 如申請專利範圍第1項所述之方法,其包含以下步驟. 根據疑似缺陷之可能的類型在該已處理 用多個形態學功能以提供多個已處理影像 顯示該等多個已處理影像。7·如申請專利範圍第1項所述之方法,其包含以下步驟 影像上應 及 15 200912292 產生代表該第_影像與該已處理影像之 的一第二影像;及顯示該第二影像。 範圍第1項所述之方法,其包切下步驟: ^代表該第—影像與該已處理影像之間的差異的一 差異影像及顯示該差異影像。 、 9.如申請專利範圍第1項所述之方法,其包含以下步驟: 產生代表該第一影像與該已處理影像之間在草一 色帶内的差異的色帶影像間差異資訊;及 ” 10 15 20 顯示該色帶影像間差異資訊。 1〇.如令請專利範圍第1項所述之方法,其包含以下步驟· 色第—影像與該已處理影像之間在某一 色T内的差異的色帶差異資訊;及 顯示該色帶差異資訊_自該_ 理影像中的一影像的-組合。 已處 u·如”專利第1項所述之方法,其包含以下步驟: 產生代表該第一影像的第一次4 像的第二色帶資訊之 :該第-影 訊;及 差/、的色T影像内差異資 顯示該色帶影像内差異資訊。 12·如申請專利範圍第1項所述之方法,其包含以下步驟: 像的第一影像的第—色帶資訊與該第-影 ,二色帶資訊之間的差異的色帶影像内差異資 机,及 ' 顯示該第—影像與該色帶影像内差異資訊的一組 16 200912292 合。 .申請專利範圍第1項所述之方法,其包含以下步驟: 產生代表該第一影像的第一色帶資訊與該第—參 5 10 的第二色帶f訊之間的差異的色帶影像㈣異資訊; 定限該色帶影像内差異資訊以提供—臨限資訊;及 顯示該臨限資訊。 •如申凊專利範圍第1項所述之方法,其包含以下步驟: 產生代表該第-影像的第—色帶資訊與該第—影 的第二色帶資訊之間的差異的色帶影像内差異資訊; 用一增盈因數乘該色帶影像内差異資訊以提供放 大的色帶影像内差異資訊; 的色帶影像内差異資訊以提供-放大 顯示該放大的臨限資訊。 15·如申請專·圍第丨項所述之方法,其包含以下步驟: 產生代表該第-影像的第_色帶資訊與該第_影 像的第二色帶資訊之間的差異的色帶影像内差異資气. 1定限該色帶影像内差異資訊以提供多個臨限資 矾:及 ' 顯示該等臨限資訊。 16‘如申請專利項所述之方法,其包含以下步驟·· 產生代表該第一影像的第—色帶資訊與該第_影 像的第_色帶資訊之間的差異的色帶影像内差異資訊; 用-增益因數乘該色帶影像内差異資訊以提供放 17 200912292 大的色帶影像内差異資訊; 定限該放大的色帶影像内差異資訊以提供多個放 大的臨限資訊;及 顯示該等多個放大的臨限資訊。 如申請專利範圍第!項所述之方法,其包含以下步驟· 產生代表該第一影像的綠色帶資訊與該第一影像 的紅色帶資訊之間的差異的色帶影像内差異資訊·及 顯示該色帶影像内差異資訊。 8·如申請專利範圍第!項所述之方法,其包含以下步驟·· 產生代表該第一影像的紅色帶資訊與該第一影像 綠色帶資訊之間的差異的色帶影像内Μ資^.及 八顯示該第-影像與該色帶影像内差異資訊的一組 15 20 .如申睛專利範圍第i項所述之方法,其包含以下步驟. 產生代表該第-影像的綠色帶資 的紅色帶資訊之間的差異的色帶影像内差異二广像 义限該㈣影像内差異資訊以提供—臨限資訊·及 顯示該臨限資訊。 月專利範圍第1項所述之方法,其包含以下步驟. 產生代表該第—影像的紅色帶資訊與該第—則 …色帶資訊之間的ϋ異的色帶影像㈣異資訊. 用-增益因數乘耗帶影㈣差異資訊以提供潑 大的色帶影像内差異資訊; 定限該放大的色帶影像内差異資訊以提供—放大 18 200912292 的臨限資訊;及 顯示該放大的臨限資訊。 μ·如申請專利範圍第丨項所述 窜“ 在其包含同時顯示該 第一衫像及該已處理影像。 22.—種用以凸現缺陷之方法,該方法包含以下步驟·· 在-驗證過程期間顯示一電路之與一疑似缺陷有 關聯的一部分的一第一影像,· 產生代表該第一影像的第-色帶資訊與該第— 像的第H纽之_差異的色帶影像縣異資訊: 顯示該色帶影像内差異資訊。 玎如申請專利範圍第22項所述之方法,其包含以下步驟· 顯不該第-影像與該色帶影像内差異資訊的—έ且人。 24·如申請專利範圍第22項所述之方法,其包含以下步驟. 定限該色帶影像内差異資訊以提供—臨限資訊;及 顯示該臨限資訊。 25_如申料圍第η顿叙方法,其包含町步驟. 用—增益因數乘該色帶影像内差異資訊以提供放大的 色帶影像内差異資訊;定限該放大的色帶影像内差里資 讯以提供一放大的臨限資訊;及顯示該放大的臨限ί •如申凊專利範ϋ第22項所述之方法,其包含以下步驟 2該第-影像上應用-區塊分析以提供—已經過區也 刀析影像;及顯示該已經過區塊分析影像。 27.如申請專利範圍第22項所述之方法,其包含以下步驟·· 19 200912292 在該第一影像上應用一區塊分析以提供一已經過區塊-分析影像;及顯示該已經過區塊-分析影像及該色帶影 像内差異資訊。 20200912292 10 15 20 X. Patent application scope: L—a method for highlighting a defect, the method comprising the steps of: displaying a first image of a circuit associated with a suspected defect during the verification process; The type of suspected defect applies at least a morphological operation on the first image to provide a processed image; and a ^ displays the processed image. 2. The method of claim 2, comprising the steps of: applying a morphological closure function to the first image if the suspected defect-short circuit occurs. < 3. The method of claim 2, comprising the following steps. If the suspected defect type is a missing hole, a morphological disconnection function is applied to the first. ^ 4. If you apply for a patent scope! The method of claim 7, comprising the following if the suspected defect type is a score, the first image morphology is eroded. ...use - 5. If you apply for a patent scope! The method of the item, comprising the following if the suspected defect type is prominent, then the first morphological expansion function. Feng Yongyi. The method of claim 1, which comprises the following steps. According to the possible types of suspected defects, the processed multiple morphological functions are used to provide a plurality of processed images to display the plurality of Processed images. 7. The method of claim 1, comprising the steps of: generating an image on the image and 15 200912292 representing a second image representing the image and the processed image; and displaying the second image. The method of claim 1, wherein the step of cutting comprises: ^ representing a difference image between the first image and the processed image and displaying the difference image. 9. The method of claim 1, comprising the steps of: generating a difference between the image of the ribbon image representing a difference between the first image and the processed image in the grass color ribbon; and 10 15 20 Displaying the difference information between the ribbon images. The method described in claim 1 includes the following steps: color-image and the processed image are within a certain color T The difference in the ribbon difference information; and the display of the ribbon difference information - a combination of an image from the image. The method of the first aspect of the patent, comprising the following steps: generating a representative The second color band information of the first 4 images of the first image: the first video; and the difference between the color and the color T image display the difference information in the color image. 12. The method of claim 1, comprising the steps of: a difference in the color of the image between the first image of the first image and the difference between the first image and the two color information. The opportunity, and a set of 16 200912292 showing the difference between the first image and the image in the ribbon image. The method of claim 1, comprising the steps of: generating a ribbon representing a difference between the first ribbon information of the first image and the second ribbon f of the first parameter Image (4) Different information; limit the difference information in the image of the ribbon to provide - threshold information; and display the threshold information. The method of claim 1, comprising the steps of: generating a ribbon image representing a difference between the first ribbon information of the first image and the second ribbon information of the first image Internal difference information; multiplying the difference information in the ribbon image by a gain factor to provide the difference information in the enlarged image of the ribbon; and the difference information in the ribbon image to provide an enlarged display of the magnified threshold information. 15. The method of claim 1, wherein the method comprises the steps of: generating a ribbon representing a difference between the _th ribbon information of the first image and the second ribbon information of the _th image Differences in image quality. 1 Limit the difference information in the image of the ribbon to provide multiple marginal assets: and 'display the threshold information. 16' The method of claim 1, comprising the steps of: generating a difference in the intra-panel image of the difference between the first ribbon information representing the first image and the _th ribbon information of the first image Information; multiply the difference information in the ribbon image by the -gain factor to provide the difference information in the ribbon image of the 2009 200912292; limit the difference information in the enlarged image of the ribbon to provide a plurality of enlarged threshold information; Display the multiple magnified threshold information. Such as the scope of patent application! The method of the present invention includes the steps of: generating a difference in intra-band image information representing a difference between the green band information of the first image and the red band information of the first image, and displaying the difference in the image of the ribbon News. 8. If you apply for a patent scope! The method of the present invention includes the following steps: generating a color difference between the red band information representing the first image and the first image green band information, and displaying the first image And a method of the difference information in the image of the ribbon, wherein the method of the invention of the invention includes the following steps: generating a difference between the red band information representing the green image of the first image The difference between the two images of the ribbon image is limited to the (4) intra-image difference information to provide - the threshold information and display the threshold information. The method of claim 1, comprising the following steps: generating a different color band image (four) different information between the red band information representing the first image and the first - band information. Gain factor multiplication and consumption (4) difference information to provide a large difference in intra-band image information; limit the difference information within the magnified ribbon image to provide - magnify the threshold information of 200912292; and display the threshold of the enlargement News. μ· As described in the scope of the patent application, “the first shirt image and the processed image are displayed at the same time. 22. A method for highlighting defects, the method includes the following steps. During the process, a first image of a portion of a circuit associated with a suspected defect is displayed, and a ribbon image county representing a difference between the first ribbon information of the first image and the second color of the first image is generated. Different information: Displaying the difference information in the image of the ribbon. For example, the method described in claim 22 includes the following steps: displaying the information of the difference between the first image and the image of the ribbon image. 24. The method of claim 22, comprising the steps of: limiting the difference information in the ribbon image to provide - threshold information; and displaying the threshold information. The method of the method includes a step of multiplying the difference information in the image of the ribbon to obtain the difference information in the enlarged image of the ribbon; and limiting the information in the image of the enlarged image to provide an enlarged Threshold information; and The method according to claim 22, which comprises the following step 2: applying the image-block analysis on the first image to provide an image that has been over-zoned; and displaying 27. The method of claim 22, wherein the method of claim 22 includes the following steps: 19 200912292 applying a block analysis on the first image to provide a block-analysis Image; and display the block-analyzed image and the difference information in the image of the ribbon.
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US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge

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JP5371099B2 (en) * 2009-05-19 2013-12-18 株式会社日本マイクロニクス Visual inspection device and visual inspection method
US20140010952A1 (en) * 2012-01-02 2014-01-09 Noam ROSENSTEIN Pcb repair of defective interconnects by deposition of conductive ink
CN113252682B (en) * 2021-04-15 2022-12-16 首钢集团有限公司 Method for improving accuracy of surface quality detection system for identifying strip steel surface defects

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

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