TW200904646A - Pagewidth printhead with more than 100000 nozzles - Google Patents

Abstract

A pagewidth inkjet printhead that has an array of droplet ejectors for ejecting drops of printing fluid onto print media fed passed the printhead in a media feed direction. Each drop ejector having a nozzle and an actuator for ejecting a drop of printing fluid through the nozzle. The array has more than 100000 of the droplet ejectors and extends in a direction transverse to the media feed direct between 200mm and 330mm. A pagewidth printhead with a large number of nozzles extending the width of the media provides a high nozzle pitch and a very high 'true' print resolution - i. e. the high number of dots per inch is achieved by a high number of nozzles per inch.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to the field of printing, and more particularly to an ink jet print head for high resolution printing. [Prior Art] The quality of printed images depends largely on the resolution of the printer, so efforts are constantly being made to improve the print resolution of the printer. The print resolution is closely dependent on the droplet volume and the spacing of the printer's addressable locations on the media substrate. The spacing between the nozzles on the ink jet head need not be as small as the spacing between the addressable locations on the media substrate. A nozzle that prints a point at an addressable location and a nozzle that prints a dot at an addressable location can be separated by any distance. Regardless of the spacing between the nozzles on the printhead, the movement of the printhead relative to the media, or the movement of the media relative to the printhead, or both, allows the printhead to eject droplets at each addressable position. At the extremes of the load, the same nozzle can print adjacent droplets due to the proper relative motion between the print head and the media. Excessive movement of the media relative to the print head reduces the print rate. In the case of a page-width printhead, scanning the printhead for multiple passes of a single packet of media, or by passing the media multiple times through the printhead, reduces the print rate per minute of printed pages. In addition, each nozzle can be spaced along the media feed path or in the scan direction so that each addressable location on the media is less than the physical spacing of adjacent nozzles. It can be understood that at most -4-200904646 nozzles are spaced apart in a large section of the paper path or scanning direction, which violates the pocket design. More importantly, the paper needs to be carefully controlled to feed the paper, and the precision printer controls the number of nozzle firings. The problem with large nozzle arrays is greater in terms of page width print heads. To a plurality of nozzles spaced apart in a large length of paper path, the nozzle array needs to have relatively large areas. By definition, the nozzle array must extend across the width of the media, but the size of the nozzle array in the media feed direction should be as small as possible. Extending a relatively long distance array in the media feed direction requires a complex print cylinder that maintains the spacing between the nozzle and the media surface throughout the array. Some printers are designed to use a wide vacuum drum across the printhead to get the control needed for the media. In view of this issue, there is a strong incentive to increase the nozzle density (ie the number of nozzles per unit area) on the print head to increase the addressable position and resolution of the printer while maintaining the array (in the medium feed direction) ) Small width. SUMMARY OF THE INVENTION Accordingly, the present invention provides a printhead for an inkjet printer comprising: an array of nozzles disposed in adjacent columns, each nozzle having an ejection orifice and for arranging columns Printing fluid is ejected through corresponding actuators of the ejection orifice, each actuator having electrodes spaced apart from each other in the lateral direction of the columns; and a drive circuit for transmitting electrical power to the electrodes; wherein adjacent columns are present The electrodes of the actuators have opposite polarities, so the actuators in adjacent columns have opposite current flow directions -5 - 200904646 by making the polarity of the electrodes in adjacent columns the opposite The perforations in the power plane of the CMOS can be maintained at the outer edge of the adjacent column. This moves a row of narrow, resistive bridges between the perforations to a position where current does not flow through the bridge. This eliminates the impedance of the bridge from the actuator drive circuit. By reducing the impedance loss of the actuator on the power supply side remote from the print head integrated circuit, the droplet ejection characteristics of all the nozzles of the entire array can be made uniform. Preferably, the electrodes in each column are offset from the adjacent actuators in the lateral direction of the column so that the electrodes of each of the second actuators are collinear. In another preferred form, the offset is less than 40 microns. In a particularly preferred form, the offset is less than 30 microns. Preferably, the array nozzle is fabricated on an elongated wafer substrate, the wafer substrate extending parallel to the columns of the array, and the driving circuit is a CMOS layer on a surface of the wafer substrate, Power and data are supplied to the CMOS layers along the long edges of the wafer substrate. In another preferred form, the CMOS layer has a top metal layer forming a power plane with a positive voltage so that the electrodes having a negative voltage are connected to vias formed in the holes in the power plane. In yet another preferred form, the CMOS layer has a drive field effect transistor (FET) for each of the actuators in the bottom metal layer. Preferably, the CMOS layer has a metal layer having a thickness of less than 0.3 microns. In some embodiments, the actuators are heater elements for generating a vapor bubble within the printing fluid such that droplets of the printing fluid are ejected from the ejection orifice. Preferably, the heater elements are beams suspended between their individual electrodes so that the heater elements are submerged within the printing fluid. Preferably, the injection holes are elliptical, and the long axis of the injection holes is parallel to -6-200904646 on the longitudinal axis of the beam. In another preferred form, the major axes of the injection holes in one of the columns and the major axes of the injection holes in adjacent columns are collinear, such that in one of the columns Each nozzle is aligned with one of the nozzles in the adjacent column. Preferably, the major axes of adjacent orifices are separated by less than 50 microns. In another preferred form, the major axes of adjacent orifices are separated by less than 25 microns. In a particularly preferred form, the major axes of adjacent orifices are spaced apart by less than 16 microns. In a particular embodiment, the printhead has a nozzle pitch of more than 1 600 nozzles per n (npi) in the lateral direction of the media feed direction. In a preferred embodiment, the nozzle pitch is greater than 3000 npi. In a particularly preferred embodiment, the print head has a print resolution per dot (dpi) equal to the nozzle pitch. In a particular embodiment, the printhead is a pagewidth printhead that is configured to print an A4-size medium. Preferably, the array has more than 100,000 nozzles. Accordingly, the present invention provides an ink jet printhead for a printer that can be printed on a substrate with different print resolutions, the ink jet printhead comprising an array of nozzles, each nozzle having a spray hole and a corresponding actuator for jetting the print stream® through the spray hole; and a print engine controller for feeding the print data to the nozzle of the array; wherein during use, by The print material is assigned to a single nozzle between at least two nozzles of the array, and the print engine controller can selectively reduce the print resolution. 200904646 The present invention recognizes that some printing jobs do not require the best resolution of the print head - lower resolution is well suited for the purpose of the document to be printed. This is especially true when the print head has a very high resolution (for example, greater than 1 200 dpi). By selecting a lower resolution, the print engine controller (PEC) can treat two or more laterally adjacent (but not touching) nozzles in a printhead with fewer nozzles as a single virtual nozzle. The adjacent nozzles then share the printed material - the dots required by the virtual nozzle are alternately printed by each actual nozzle. This is used to extend the working life of all nozzles. Preferably, the position of the two nozzles in the array is set such that the two nozzles are the closest neighbors in the transverse direction of the movement of the print head relative to the substrate. Preferably, the print engine controller shares the print data equally to the two nozzles in the array. In another preferred form, the two nozzle centers are separated by less than 20 microns. In a particularly preferred form, the printhead is a pagewidth printhead and the centers of the two nozzles are spaced apart by less than 16 microns in the transverse direction of the media feed direction. In a particular embodiment, the two nozzle centers are spaced apart by less than 8 microns in the transverse direction of the media feed direction. In a particular embodiment, the printhead has a nozzle pitch of more than 1 600 nozzles per n (npi) in the transverse direction of the media feed direction. In the preferred embodiment, the nozzle pitch is greater than 3 000 npi. In a particularly preferred embodiment, the print head has a print resolution per dot (dpi) equal to the nozzle pitch. In a particular embodiment, the printhead is constructed for printing A4 size media and the printhead has more than 100,000 nozzles

Q In some embodiments, when printing at a lower print resolution, the print -8-200904646 watch machine operates at a higher print rate. Preferably, the higher printing rate is more than 60 pages per minute. In a preferred form, the print engine controller halves the color plane halftones printed by the adjacent nozzles in a high frequency vibration matrix. The high frequency vibration matrix is optimized for each The lateral displacement of the jetted droplets. Accordingly, the present invention provides an ink jet printhead comprising: an array of nozzles disposed in adjacent columns; each nozzle having an ejection orifice, a chamber for receiving a printing fluid, and a corresponding actuation The actuator is for injecting the printing fluid through the injection hole; each chamber has an individual inlet to re-print the printing fluid, the printing fluid is ejected by the actuator; and the printing fluid supply Channels extending parallel to the adjacent columns to supply printing fluid to the actuators of each nozzle in the array via the respective inlets; wherein the nozzle inlets are constructed in one of the adjacent columns The re-injection flow rate is different from the re-injection flow rate of the nozzle inlets in the other column of the adjacent columns. The nozzle constructed in accordance with the present invention allows the ink supply channels on one side to be in a series. Since the supply passage is not only supplied to one row of nozzles on one side, the above construction allows the nozzle density on the surface of the print head to be large. However, because the flow rate through each inlet of the column is different, the columns that are further away from the supply channel do not have significantly longer re-injection times. Preferably, the nozzle inlets are constructed in one of the adjacent columns such that the re-injection flow rate is different from the inlet of the nozzles in the other column of the adjacent columns -9-200904646 The flow rate is injected, so the chamber re-injection time of all the nozzles in the array is approximately uniform. In another preferred form, the inlet closest to the column of supply channels is narrower than the column away from the supply channel. In some embodiments, there are two adjacent rows of nozzles on either side of the supply channel. Preferably, the inlet has a flow damped configuration. In a particularly preferred form, the flow damped configuration is the column 'designing the position of the column' to create a flow barrier. Columns in the inlet of one column and columns in the inlets of other columns create varying degrees of obstacles. Preferably the column produces a bubble trap or trap between the side of the column and the inlet side wall. Preferably, the column diffuses to propagate pressure pulses within the print fluid to reduce crosstalk between the nozzles. In some embodiments, the actuators are heater elements for generating a vapor bubble within the printing fluid such that droplets of the printing fluid are ejected from the ejection orifice. Preferably, the heater elements are beams suspended between their individual electrodes so that the heater elements are submerged within the printing fluid. Preferably, the injection holes are elliptical and the major axis of the injection holes is parallel to the longitudinal axis of the beam. Preferably, the major axes of adjacent injection holes are spaced apart by less than 50 microns. In another preferred form, the major axes of adjacent jets are spaced less than 25 microns apart. In a particularly preferred form, the major axes of adjacent orifices are spaced apart by less than 16 microns. In a particular embodiment, the printhead has a nozzle pitch of more than 1 600 nozzles per n (npi) in the lateral direction of the media feed direction. In a preferred embodiment, the nozzle pitch is greater than 3000 npi. In a particularly preferred embodiment, the print head has a print resolution per dot (dpi) equal to the nozzle pitch. In a particular embodiment, the printhead is a page width -10-200904646 printhead that is configured to print an A4-size medium. Preferably, the array has more than 100,000 nozzles. Accordingly, the present invention provides an ink jet printhead comprising: an array of nozzles disposed in a series of columns; each nozzle having an ejection orifice, a chamber for holding a printing fluid, and a heater element; a heater element for generating a vapor bubble in the printing fluid contained in the chamber to eject a droplet of the printing fluid through the ejection orifice; wherein the nozzle, the heater element, and the chamber All are elongate structures having a long dimension 'the lengths respectively exceed the other dimensions of each elongate configuration; and the individual dimensions of the nozzle, the heater, and the chamber are parallel And extending perpendicular to the column direction. In order to increase the nozzle density of the columns, each of the nozzle assemblies - the chamber, the orifice, and the heater element are constructed to form an elongate configuration - the elongate structures are all aligned in the transverse direction of the column direction. This increases the nozzle pitch of the column or the number of nozzles per turn (npi) while allowing a sufficiently large chamber volume and droplet volume to be maintained for proper pigment density. This also avoids the need to extend the large distance in the paper feed direction (in the case of a page width printer) or in the scanning direction (in the case of scanning a print head). Preferably, each column in the array is offset relative to its adjacent column, so that none of the equal lengths of the nozzles in a column does not match any of the same length dimensions in the adjacent column. Collinear. In another preferred form, the printhead is a pagewidth printhead for printing to a media substrate fed through the printhead in a media feed direction, such that the nozzles are of equal length Size -11 - 200904646, parallel to the media feed direction. Preferably, the length of each second nozzle is in the login. In a particularly preferred form, the "all" nozzles of the nozzles are formed in a flat top layer that partially defines the chamber; the stomach has a surface of the surface, except the outer surface Other than the ejector hole, the rest is flat. In a particularly preferred form, the nozzle of the array is formed on the underlying substrate. The substrate extends parallel to the top layer and is between the top layer and the substrate. The extended sidewall partially defines the chamber 'designing the shape of the sidewall' such that the interior surface of the sidewall is at least partially elliptical. Preferably, the side wall is elliptical except for the inlet opening for the printing fluid. In a particularly preferred form, the minor axes of the nozzles in one of the columns are partially overlapped with the minor axes of the nozzles in the adjacent column of the media feed direction. In another preferred form, the injection holes are elliptical. Preferably, the heater elements are beams suspended between their individual electrodes such that during use, the heater elements are submerged within the print fluid. Preferably, the vapor bubble generated by the heater element is elliptical in cross section parallel to the injection hole. In some embodiments, the printhead further includes a supply channel adjacent the array, the array extending parallel to the columns. In a preferred form, the nozzles of the array are nozzles of the first array, and the nozzles of the second array are formed on the other side of the supply channel; the second array is a mirror image of the first array, but relative to The first array is offset such that none of the long axes of the ejection holes in the first array are collinear with any of the long axes of the second array. Preferably, the long axes of the injection holes -12-200904646 in the first array, from the long axes of the injection holes in the second array, to the transverse direction of the medium feed direction The direction offset is less than 20 microns. In a particularly preferred form, the offset is about 8 microns. In some embodiments, the print head has a nozzle pitch of more than 1 600 nozzles per n (npi) in the transverse direction of the media feed direction. In a particularly preferred form, the substrate has a width in the media feed direction of less than 3 mm. Accordingly, the present invention provides an ink jet printhead comprising: an array of nozzles for ejecting droplets of printing fluid to a printing medium as it moves in a printing direction relative to the printing head The printing medium; wherein the nozzles in the array are spaced apart from each other by less than 1 〇 micrometer in the vertical direction of the printing direction. Since the nozzles are spaced less than 10 microns in the vertical direction of the printing direction, the print head has a very high "true" print resolution - that is, by the high number of nozzles per turn reaching the height of each turn Points. Preferably, the nozzles in the array spaced apart from each other by less than 10 microns in the vertical direction of the printing direction are also spaced apart from each other by less than 150 microns in the printing direction. In another preferred form the array has more than 700 nozzles per square millimeter. Preferably, the array of nozzles is supported on a plurality of monolithic wafer substrates, each of which supports more than 10,000 of the nozzles. In another preferred form, each single wafer substrate supports more than 12,000 of the nozzles. In a particularly preferred form, the plurality of monolithic wafer substrates are mounted end-to-end -13-200904646 to form a table for mounting in the printer to feed more than 100,000 media in the media feed direction. The nozzles extend 200 mm to the middle in the transverse direction of the direction, the array having more than 140,000 i selectively, the print head further comprising each of the nozzles, the actuators having the same The lateral directions of the columns individually drive the transistors and the actuators of the power supply in adjacent columns, so the actuators in adjacent columns. Preferably, the electrical rows of each of the columns are offset in the lateral direction, so in each of the second, in a particularly preferred embodiment, the elongated wafer substrate extends flat on the small liquid crystal circular substrates. And along the length of the wafer substrate, in some embodiments, the print head PEC) is used to send print data to the P during use, by using a single nozzle between the print nozzles Prints the print resolution. Preferably, this is provided such that the two nozzles are the closest neighbors in the transverse direction of the print head. The page width print head of the print data is equally shared by the controller, and the print is constructed to pass through the print head; the print head is fed to the medium at 330 mm. In some embodiments the nozzles are equal. A plurality of actuators are respectively disposed in the adjacent columns, each of the uniformly spaced electrodes for connection to: wherein the electrodes have opposite polarities with opposite current flow directions from adjacent ones The electrodes are collinear to the electrodes of the actuator. The drop ejector is fabricated to supply power and data at the edges of the columns of the actuators. Having a print engine controller (nozzles of column I; wherein at least two controllers assigned to the array are selectively depressible) - a preferred form of movement of the nozzles in the array to the substrate of the print medium The column prints the two nozzles in the array. -14- 200904646 Preferably, the two nozzle centers are separated by less than 40 microns. In a particularly preferred form, the print head is a page width print head And the nozzle centers are spaced apart by less than meters in the transverse direction of the medium feed direction. Preferably, the adjacent nozzle centers are spaced apart by less than 8 microns in the medium feed direction. Preferably, the print head In the transverse direction of the media direction, there is a nozzle pitch of more than 1600 nozzles per n (npi). In another preferred form, the nozzle pitch is greater than npi. Therefore, the present invention provides a spray for use. A printhead circuit for an inkjet print head, the printhead integrated circuit comprising: a single wafer substrate supporting an array of small droplet ejectors for ejecting droplets of printing fluid onto a print medium , each droplet spray has a nozzle and an actuator The actuator is adapted to pass droplets of the printing fluid through the nozzle; wherein the array has more than 1 0000 of such small droplet ejectors. Since a large number of small droplet ejectors are fabricated on a single wafer 'nozzle The array has a high nozzle pitch and the print head has a very high true "print resolution" - that is, the number of high points achieved by the high number of nozzles per turn. Preferably, the array has more than 12,000 The droplets are sprayed. In another preferred form, the printing medium moves in a direction relative to the printing print; and the nozzles in the array are in the vertical direction of the column direction 'separated from each other by less than 1 μm. In the special form, in the vertical direction of the printing direction, the two 6 micro-horizon are separated from each other by a spray of 3 000 integrators, and the jet is sprayed. "Injectors of each ejector head are -15-200904646. The nozzles in the array of ι〇 microns are also spaced apart from each other by less than 150 μm in the printing direction. In an embodiment, the array has more than 7 per square millimeter 00 such small droplet ejectors. In a particularly preferred form, the actuators are disposed in adjacent columns, each actuator having electrodes spaced apart from each other in the lateral direction of the columns for connection To individual drive transistors and a power supply; the electrodes of the actuators in adjacent columns have opposite polarities, so the actuators in adjacent columns have opposite current flow directions. In yet another preferred form, the electrodes in each column are offset from their adjacent actuators in the lateral direction of the column so that the electrodes of each of the second actuators are collinear. In a particular embodiment, the monolithic wafer substrate is elongate and extends parallel to the columns of the actuators, so that in use, power and data are supplied along the long edge of the wafer substrate. . In some forms, the inkjet printhead includes a plurality of printhead integrated circuits, and further includes a print engine controller (PEC) for feeding printed data to the array of droplet dischargers; The print engine controller can selectively reduce the print resolution during use by assigning print data to a single droplet ejector between at least two droplet ejector of the array. Preferably, the position of the two nozzles in the array is set such that the two nozzles are the closest neighbors in the transverse direction of the movement of the print head relative to the print medium substrate. In a particularly preferred form, the print engine controller equally shares the print data to the two nozzles in the array. Optionally, the center of the two nozzles is spaced less than 40 microns apart. In a particularly preferred embodiment, the print head is a page-16-200904646 wide print head, and the center of the two nozzles are spaced apart by less than 16 microns in the transverse direction of the media feed direction. In yet another preferred form, the adjacent nozzle centers are spaced apart by less than 8 microns in the transverse direction of the media feed direction. In some embodiments, the inkjet printhead includes a plurality of printhead integrated circuits that are mounted end-to-end to form a pagewidth printhead for a printer to construct the printer to The medium feed direction feeds the medium through the print head; the print head has more than 1 000 such nozzles, and the print head extends 200 mm to 330 in the lateral direction of the medium feed direction Millimeter. In another preferred form, the array has more than 140,000 of the nozzles. Preferably, the array of droplet discharges has a nozzle pitch of more than 1600 nozzles per n (npi) in the transverse direction of the media feed direction. Preferably, the nozzle pitch is greater than 3000 npi. Accordingly, the present invention provides a printhead integrated circuit for an inkjet printhead, the printhead integrated circuit comprising: a planar array of small droplet ejector, each droplet ejector having a data distribution a circuit, a drive transistor, a print fluid inlet, an actuator, a chamber, and a nozzle; a chamber is constructed to hold the print fluid adjacent the nozzle' so that the drive transistor drives the actuator during use, Spraying small droplets of the printing fluid through the nozzle; wherein the array has more than 700 such small droplet ejectors per square millimeter, due to the high density of small droplet ejectors fabricated on the wafer substrate, The nozzle array has a high nozzle pitch, and the print head has a very high -17-200904646 "true" print resolution - that is, the number of high nozzles per turn reaches the high number of dots per turn . Preferably, when the printing medium moves in a printing direction relative to the printing head, the array ejects droplets of the printing fluid onto the printing medium; and the nozzles in the array , in the vertical direction of the printing direction, are separated from each other by less than 10 μm. In another preferred form, the nozzles spaced apart from each other by less than 10 microns in the vertical direction of the printing direction are also spaced apart from each other by less than 1 50 micrometers in the printing direction. In a particular embodiment, a plurality of print head integrated circuits are used within the ink jet print head, each of the print head integrated circuits having more than one of the small droplet ejectors, and preferably, More than 1 2000 such nozzle unit cells. In some embodiments, the printhead integrated circuit is elongate and mounted end to end, so the printhead has more than 100,000 such small droplet ejectors, and the printhead is The medium feed direction extends 200 mm to 330 mm in the lateral direction. In another preferred form, the printhead has more than 140,000 such small droplet ejectors. In some preferred forms, the actuators are disposed in adjacent columns, each actuator having electrodes spaced apart from each other in the lateral direction of the columns for connection to a corresponding drive transistor and a power source a supply; wherein the electrodes of the actuators in adjacent columns have opposite polarities, so the actuators in adjacent columns have opposite current flow directions -18-200904646 preferably, In these embodiments, the electrodes in each column are offset from their adjacent actuators in the lateral direction of the column, so the electrodes of each of the second actuators are collinear. In another preferred form, the elongate wafer substrate extends parallel to the columns of the actuators and supplies power and data along the long edges of the wafer substrate. In a particular embodiment, the printhead includes a print engine controller (PEC) for feeding print data to the nozzles of the array; wherein during printing, the print data is assigned to the array A single nozzle between at least two nozzles, the print engine controller selectively reducing the print resolution. Preferably, the position of the two nozzles in the array is such that the two nozzles are the closest neighbors in the transverse direction of movement of the print head relative to the print media substrate. In another preferred form, the print engine controller equally shares the print data to the two nozzles in the array. Preferably, the two nozzle centers are separated by less than 40 microns. In a particularly preferred form, the printhead is a pagewidth printhead and the two nozzle centers are spaced apart by less than 16 microns in the transverse direction of the media feed direction. In still another preferred form, the centers of the adjacent nozzles are spaced apart by less than 8 microns in the transverse direction of the media feed direction. In some forms, the printhead has a nozzle pitch of more than 1 600 nozzles per n (npi) in the transverse direction of the media feed direction. Preferably, the nozzle pitch is greater than 3 000 npi. Accordingly, the present invention provides a pagewidth inkjet printhead comprising: an array of droplet ejection injectors for ejecting droplets of a printing fluid onto a printing medium, the printing medium being Feeding through the printhead in the media feed direction; each drop ejector having a nozzle, and an actuator for ejecting droplets of the print fluid through the nozzle; wherein the array has more than 10,000 The droplet ejection injectors, and the array extends 200 mm to 330 mm in the lateral direction of the medium feed direction. A page-width printhead with a large number of nozzles extending across the width of the media, providing a high nozzle pitch and a very high "true" print resolution, ie a high number of dots per turn per high number of nozzles Preferably, the array has more than 140,000 such small droplet ejectors. In another preferred form, the nozzles are spaced apart from each other by less than 1 〇 micrometer in the vertical direction of the media feed direction. In a particularly preferred form, the nozzles spaced apart from each other by less than 10 microns in the vertical direction of the media feed direction are also spaced apart from each other by less than 150 microns in the media feed direction. In a particular embodiment, the array droplet ejector is supported on a plurality of monolithic wafer substrates, each monolithic wafer substrate supporting more than 100,000 droplet ejection injectors, and preferably more than 1 2000 A small droplet ejector. In these embodiments, it is desirable for the array to have more than 700 droplet ejection devices per square millimeter. Optionally, the actuators are disposed in adjacent columns, each actuator having electrodes spaced apart from each other in the lateral direction of the columns for connection to an individual drive transistor and a power supply; The electrodes of the actuators in adjacent columns have opposite polarities -20-200904646, so the actuators in adjacent columns have opposite current flow directions. Preferably, the electrodes in each column are offset from their adjacent actuators in the lateral direction of the column so that the electrodes of each of the second actuators are collinear. In a particularly preferred embodiment, the droplet ejection injectors are fabricated on an elongate wafer substrate that extends parallel to the columns of the actuators and along the The long edge of the wafer substrate supplies power and data. In some embodiments, the printhead has a print engine controller (PEC) for feeding print data to the nozzles of the array; wherein during use, at least the print data is dispensed to the array A single nozzle between the two nozzles, the print engine controller selectively reducing the print resolution. Preferably, the position of the two nozzles in the array is such that the two nozzles are most adjacent in the transverse direction of movement of the print head relative to the printing medium substrate. In a particularly preferred form, the print engine controller shares the printed material equally to the two nozzles in the array. Preferably, the two nozzles are spaced apart by less than 40 microns. In a particularly preferred form, the printhead is a pagewidth printhead and the center of the two nozzles are spaced less than 16 microns apart in the transverse direction of the media feed direction. Preferably, the adjacent nozzle centers are spaced apart by less than 8 microns in the lateral direction of the media feed direction. Preferably, the printhead has a nozzle pitch of more than 1600 nozzles per n (npi) in the transverse direction of the media feed direction. In another preferred form, the nozzle pitch is greater than 3 000 npi. Accordingly, the present invention provides a printhead integrated circuit for an ink jet printer comprising: -21 - 200904646 A monolithic wafer substrate supporting an array of small droplet ejectors 'for ejecting droplets of printing fluid onto a printing medium, each droplet ejector having a nozzle and an actuator, The actuator is configured to eject droplets of the printing fluid through the nozzle; the array is formed on the monolithic wafer substrate by a series of photolithography etching and deposition steps; the steps involve a photo imaging device, which will The exposed area is exposed to light that is focused to project a pattern onto the monolithic substrate; wherein the array has more than 10,000 of the small droplet ejectors that are constructed to be exposed by the exposed area Surrounded by. The present invention configures the nozzle array such that the droplet ejector density is very high and reduces the number of exposure steps required. Preferably, the exposed area is less than 900 mm2. Preferably, the monolithic wafer substrate is surrounded by the exposed area. In another preferred form, the optical imaging device is a stepper that simultaneously exposes the entire mask. Optionally, the light imaging device is a scanner that scans a narrow band of light through the exposure area to expose the mask. Preferably, the single wafer substrate supports more than 12,000 droplet ejection injectors. In these embodiments, it is desirable for the array to have more than 700 small droplet ejectors per square millimeter. In some embodiments, the printhead integrated circuit is assembled to a pagewidth printhead having other similar printhead integrated circuits for ejecting droplets of the print fluid onto the print medium, the print The medium is fed through the print head in the media feed direction; wherein the array has more than 100,000 such small droplet ejectors, and the -22-200904646 array is in the lateral direction of the medium feed direction Extend 200 mm to 3 30 mm. In another preferred form, the nozzles are spaced apart from each other by less than 1 〇 micrometer in the vertical direction of the media feed direction. Preferably, the print head has more than 14,000 items of such small droplet ejectors. In a particularly preferred form, the nozzles ' spaced apart from each other by less than 10 microns in the vertical direction of the media feed direction are also spaced apart from each other by less than 150 microns. Optionally, the actuators are disposed in adjacent columns, each actuator having electrodes 'separated from each other in the lateral direction of the columns for connection to an individual drive transistor and a power supply; The electrodes of the actuators in adjacent columns have opposite polarities, so the actuators in adjacent columns have opposite current flow directions. Preferably, the electrodes in each column are offset from their adjacent actuators in the lateral direction of the column so that the electrodes of each of the second actuators are collinear. In a particularly preferred embodiment, the droplet ejection injectors are fabricated on an elongate wafer substrate that extends parallel to the columns of the actuators and along the The long edge of the wafer substrate supplies power and data. In some embodiments, the printhead has a print engine controller (PEC) for feeding print data to the nozzles of the array; wherein during use, at least the print data is dispensed to the array A single nozzle between the two nozzles, the print engine controller selectively reducing the print resolution. Preferably, the position of the two nozzles in the array is set such that the two nozzles are the closest neighbors in the transverse direction of the movement of the print head relative to the printing medium substrate. In a particularly preferred form, the print guide -23-200904646 engine controller equally shares the print data to the two nozzles in the array. Preferably, the two nozzle centers are separated by less than 40 microns. In a particularly preferred form, the printhead is a pagewidth printhead and the center of the two nozzles are spaced less than 16 microns apart in the transverse direction of the media feed direction. Preferably, the adjacent nozzle centers are spaced apart by less than 8 microns in the lateral direction of the media feed direction. Preferably, the printhead has a nozzle pitch of more than 1600 nozzles per n (npi) in the transverse direction of the media feed direction. In another preferred form, the nozzle pitch is greater than 3000 npi. [Embodiment] The same lithography etching as described in USSN 11/246687 (our file number MNN001US) filed on October 11, 2005, is used. And a deposition step, the print head integrated circuit (1C) shown in the drawing is fabricated. I would like to refer to the contents of this case for reference. The general worker will understand that the print head integrated circuit shown in the drawing has a chamber, a nozzle, and a heater electrode structure, which requires the use of USSN 11 /246687 filed on October 11, 2005 (our File number MNN00 1US) The different exposure masks shown in the figure. However, the process steps for forming the cantilever heater element, the chamber, and the injection orifice remain the same. Similarly, a complementary metal oxide semiconductor (CMOS) layer is formed in the same manner as discussed in USSN 1 1 /246687 (our file number MNN001US) filed on January 1, 2005, except for driving field effects. Outside the transistor (FET). Because of the higher density of the heater elements, the drive FET needs to be relatively small. -24- 200904646 Link Printhead Integrated Circuit Applicants have developed a number of printhead devices that use a series of printhead integrated circuits that are joined together to form a page width column Print head. In this manner, the print head integrated circuits can be combined into print heads. The range of applications in which the print heads are used is printed from a wide format to cameras and handsets with built-in printers. Each of the print head integrated circuits is mounted end to end on the support member to form a page width print head. The support member mounts the print head assembly circuit into the printer and distributes the ink to the individual integrated circuits. An example of this type of print head is described in USSN 1 1 /293 820, and the description of the case is hereby incorporated by reference. It should be understood that the term "ink" as used herein shall be interpreted to mean any printing fluid, unless the context clearly indicates that it is merely a coloring agent for image printing media. The print head integrated circuit can similarly inject ink, adhesive, medicament, or other functional fluid. 1A shows a schematic view of a pagewidth printhead 100 having a series of print head integrated circuits 92 mounted to a support member 94. The curved side 96 allows the nozzles of one of the print head integrated circuits 92 to overlap with the nozzles of adjacent print head integrated circuits in the paper feed direction. The nozzles of each of the print head integrated circuits 92 are overlapped to provide a continuous print across the junction between the two print head integrated circuits 92. This avoids "banding" in the printed results. In this manner, the individual print head circuits are connected, and any number of print heads can be fabricated using only a different number of print head integrated circuits. The end-to-end configuration of the print head integrated circuit 92 requires the supply of power -25-200904646 and data to the bond pads along the long side of each of the print head integrated circuits 92. The control of these connections, and the connected integrated circuit with the print engine controller (PEC), is described in detail in the application No. 11/544764 (our file number PUA001US) of October 10, 2006. 3200 dpi print heads Figure 1B shows a section of the nozzle array on the 3200 dpi (dot/吋) print head that the applicant has recently issued. The printhead has a true (true) 3200 dpi resolution because the nozzle pitch is 3200 dpi instead of a printer with a 3200 dpi addressable position but a nozzle pitch of less than 200 dpi. The cross-section shown in Figure 1 B shows eight unit cells of the nozzle array and the top layer is removed. The outline of the injection hole 2 has been shown for the purpose of illustration. "Unit cell" is the smallest repeating unit of the nozzle array and has a complete droplet ejector and four "half droplet ejector on either side of the complete ejector" "." Figure 2 shows a unit cell. The nozzles extend in the transverse direction of the media feed direction 8. The nozzles in the middle four rows are a pigment channel 4. One of the two sides of the ink supply supply passage 6 extends. The ink from the opposite side of the wafer flows to the ink supply path 6 via the ink feed tube 14. The upper and lower ink supply channels 1 〇, 丨 2 are separate pigment channels (although for larger pigment densities, they can print the same color of ink - for example, C C Μ Μ Y print head). The columns 20, 22 above the feed channel 6 are laterally offset in the media feed direction 8. The columns 24, 26 below the supply channel 6 are similarly biased in the direction of the media. Furthermore, columns 20, 22 and columns 24, 26 are offset relative to one another -26-200904646. Thus, the combined nozzle pitch of columns 20 through 26 in the transverse direction of the media feed direction is one quarter of the nozzle pitch of any individual column. The nozzle pitch along each column is approximately 32 microns (nominally 3 1 . 75 micron), so the combined nozzle pitch of all columns of a pigment channel is about 8 microns (nominal 7. 9375 microns). This is equal to the nozzle pitch of 3200 npi, so the print head has a resolution of 3 200 dpi. Unit cell Figure 2 is a unit cell of a nozzle array. Each unit cell has the equivalent of four droplet ejectors (two complete droplet ejectors and four "half droplet ejectors" on either side of the complete injectors). The droplet ejector is a nozzle, chamber, drive FET, and drive circuit for a single microelectromechanical (MEMS) fluid ejection device. The average worker will understand that for convenience, the droplet ejector is usually referred to simply as a nozzle; however, it is clear from the use of the content, whether the term refers only to the orifice or the entire MEMS device. The ink feed tube 14 is fed to the upper two nozzle rows 18 via the upper ink supply passage 1 . The lower nozzle row 16 is a different pigment channel that is fed by the feed channel 6. Each nozzle has a combined chamber 28 and a heater element 30 extending between the electrodes 34 and 36. Each chamber is elliptical and offset from each other, so its minor axes overlap laterally in the direction of media feed. This configuration allows the chamber volume, nozzle area, and heater size to be substantially the same as the 1 60 0 dpi print shown in the above-referenced USSN 11/246687 application filed on October 11, 2005 (our file MNN00 1US). head. Similarly, the chamber wall 32 is maintained at 4 microns thick, and the face -27-200904646 of the contacts 34, 36 is still 10 microns Χίο microns. Figure 3 shows a unit cell replica pattern constituting a nozzle array. Each unit cell 38 translates across the wafer to a width X. Adjacent columns are mirrored and shifted by half a width: 〇. 5x = y. As mentioned above, this provides a combined nozzle pitch of 0 for a pigment channel (20, 22, 24, 26). 25x. In the illustrated embodiment, x = 3 1. 75 and y = 7. 93 75. This provides a resolution of 3 20 0 dpi without reducing the size of the heater, chamber, or nozzle. Therefore, when working at 3 2 0 0 dp i, the printing density is 1 600 dpi printed on the USSN 11 /2 46687 reference (our file MNN001US) filed on January 1st, 1st, 2005. The head is still high; or the print head can be operated at 1 600 dpi to extend the life of the nozzle with a good print density. This feature of the print head is discussed further below. The heater contact arrangement heater element 30 and the size of the individual contacts 3 4, 3 6 are the same as the 1 600 dpi of the USSN 11/246687 reference file (Our file MNN00 1US) filed on October 11, 2005. Print the head. However, because there are twice the number of contacts, there are twice the number of FET contacts (negative contacts) that interrupt the "power plane (CMOS metal layer with positive voltage)". The germanium density of the holes in the power plane' produces a high impedance between the thin metal sheets between the holes. This impedance detracts from the overall efficiency of the printhead and reduces the drive pulses of some heaters relative to other heaters. 4 is a cross-sectional view of a wafer, a CMOS drive circuit 56, and a heater, -28-200904646. The driving circuit 56 of each of the printed head integrated circuits is fabricated on the wafer substrate 48 in a plurality of metal layers 40, 42, 44, 45, and the dielectric materials 41, 43 and 47 separate the metal layers. 46 passes through the layers to establish the desired interlayer connection. The drive circuit 56 has a drive FET (field effect transistor) 58 for each actuator 30, and the source 54 of the FET 58 is connected to the power plane 4 (connected to the position voltage of the power supply) The metal layer), and the drain 52 is connected to the ground plane 42 (a metal layer at zero voltage or ground). Additionally, each of the electrodes 34, 36 or each of the actuators 30 is coupled to a ground plane 42 and a power plane 40. The power plane 40 is typically the uppermost metal layer and the ground plane 42 is the first layer below the power plane (separated by the dielectric layer 41). Actuator 30, ink chamber 28, and nozzle 2 are fabricated on top of power plane metal layer 40. Etching through this layer forms apertures 46 so that negative electrode 34 can be connected to the ground plane and ink flow path 14 can extend from the back of wafer substrate 48 to ink chamber 28. As the nozzle density increases, the density of these holes or punctuations through the power plane also increases. Because of the large density of perforations that pass through the power plane, the gap between the perforations becomes smaller. A thin layer of metal layer that passes through these gaps is a relatively high resistance point. Since the power plane is connected to the supply along the side of the printhead integrated circuit, the current flowing to the actuator on the non-supply side of the printhead integrated circuit may have to pass through a series of these impedance gaps. The parasitic resistance added to the non-supply side actuator affects its drive current and affects the droplet ejection characteristics of these nozzles. The printhead uses several countermeasures to solve this problem. First, the adjacent columns -29-200904646 actuators have opposite current flow directions, i.e., the polarity of the electrodes in one of the columns changes in adjacent columns. For the purposes of this aspect of the printhead, the two rows of nozzles adjacent to the supply passage 6 are considered to be a single row as shown in Figure 5A, rather than being staggered as shown in the previous figures. The two columns A, B extend longitudinally along the length of the printhead integrated circuit. All of the negative electrodes 34 are along the outer edges of the adjacent columns A, B. Power is supplied from one side (referred to as edge 6 2 ), and current flows through only a row of thin resistive metal segments 64 before flowing through heater elements 30 in both columns. Therefore, the direction of current flow in column A and the direction of current flow in column B are opposite. The corresponding circuit diagram illustrates the benefits of this configuration. Because of the impedance RA of the thin section between the negative electrodes 34 of column A, the power supply V+ voltage drops. However, the positive electrode 36 of all the heaters 30 is at the same voltage (Va = Vb) with respect to the ground. The voltage drops as it traverses all of the heaters 30 of the two columns A and B (resistances Rha, RHB, respectively). The impedance of the thin bridge portion 66 between the negative electrodes 34 of the column B is deleted in the circuits of the columns A and B. 〇 Figure 5B shows the case where the polarity of the electrodes of the two adjacent columns is not reversed. In this case, the entire row of resistive segments 66 of column B is presented in the circuit. The supply voltage V + drops through the impedance Ra to the voltage of the positive electrode 36 of the VA-...column A. From there, after the impedance RHA of the column A heater, the voltage drops to ground. However, the voltage VA passes through the impedance Rb of the thin section 66 between the column B negative electrodes 34, and the voltage at the column B positive electrode 36 falls from Va to Vb. Therefore, the voltage drop across column B heater 30 is less than the voltage drop across column A. This changes the drive pulse and thus changes the droplet ejection characteristics. -30- 200904646 A second strategy for maintaining the integrity of the power plane is to interlace the adjacent pairs of electrodes in each column. Referring to Figure 6, each of the negative electrodes 34 is now staggered 'so each second electrode is laterally displaced to the column. The heater contacts 3 4 and 3 6 of adjacent columns are likewise staggered. This is used to make the gaps 64, 66 between the holes through the power plane 40 wider. The wider gap has less electrical resistance' and the voltage drop from the heater on the power supply side of the printhead integrated circuit is smaller. Figure 7 shows a larger section of the power plane 40. The electrodes 34 in the staggered columns 41, 44 correspond to the pigment channels fed by the feed channel 6. The half of the nozzles of the staggered columns 42, 43 with respect to the pigment channels on either side are fed by the feed channel 1 和 and by the feed channel 12 to the pigment channel. It will be appreciated that the five-pigment channel printhead integrated circuit has nine columns of negative electrodes that induce the resistance of the heater in the nozzle furthest from the power supply side. The gap between the negative electrodes is widened, greatly reducing the impedance generated by the components. This promotes more uniform droplet ejection characteristics throughout the nozzle array. Efficient Manufacturing The above characteristics increase the density of the nozzles on the wafer. Each individual integrated circuit is approximately 22 mm long, less than 3 mm wide, and can support more than 100,000 nozzles. This represents a significant increase in the number of nozzles in the applicant's 1 600 dpi print head integrated circuit (see the example of USSN 11/246687 (our file MNN00 1 US) filed on October 11, 2005). mouth. In fact, an array of 3 200 dpi print head nozzles -31 - 200904646, as shown in Figure 12, was fabricated with 1 2 800 nozzles. Since the entire nozzle array is located within the exposure range of the lithography stepper or scanner used to expose the mask (mask), the lithography manufacturing efficiency of so many (more than 10,000) nozzles is efficient. . Fig. 14 schematically shows an optical lithography stepper. Light source 102 emits a parallel ray 104 of a particular wavelength through a mask 106 having a pattern to be transmitted to integrated circuit 92. The pattern is focused through a lens 108 for reducing features and is projected onto a wafer stage 110 carrying an integrated circuit (or so-called "die") 92. The area of the wafer stage 110 illuminated by the light 104 is referred to as the exposure area 112. Unfortunately, the size of the exposure zone 112 is limited to maintain the accuracy of the projection pattern - the entire wafer tray cannot be exposed at the same time. The vast majority of lithographic steppers have an exposure area of less than 30 mm x 30 mm. A stepper manufactured by a major manufacturer (ASML, The Netherlands) has an exposed area of 22 mm x 22 mm, which is typical in the industry. The stepper exposes a portion of a die or grain and then steps to another die or another portion of the same die. Having as many nozzles as possible on a single substrate facilitates the compact printhead design and facilitates the precise relationship of the assemblies of the integrated circuits on the support to each other. The nozzle array constructed in the present invention has more than 10,000 nozzles in the exposure zone. In fact, the entire integrated circuit can be located in the exposure area, so a single substrate can be equipped with more than 1 4000 nozzles, without having to step and realign each pattern, the average worker will understand that the above technology can be Applied to fabricating nozzle arrays with photolithographic scanners. 15A to 15C illustrate the operation of the scanner. -32- 200904646 In the scanner, the light source 102 emits a narrower beam of light 104 with a width sufficient to illuminate the entire width of the mask 1〇6. The narrow beam 104 is focused through a smaller lens aperture 8 and projected onto a portion of the integrated circuitry 92 within the re-exposed area 112. The mask 106 and the wafer table 11 are moved relative to each other in opposite directions' so that the pattern of the mask is scanned through the entire exposure area 1 12 . Obviously, this type of optical imaging device is also suitable for efficiently producing a print head integrated circuit having a large number of nozzles. Flat External Nozzle Surface As described above, the print head integrated circuit is fabricated in accordance with the steps outlined in the USSN 1 1 / 2466 8 7 (our file MNN 001US) cross-referenced application filed on Oct. 11, 2005. Only change the exposure mask pattern to provide different chamber and heater configurations. For example, as described in USSN 11/246687 (our file MNN 00 1US) filed on October 11, 2005, the top layer and the chamber wall are integrated constructions - suitable top and wall materials A single plasma lifts chemical vapor deposition (PECVD). Suitable top materials can be tantalum nitride, hafnium oxide, hafnium oxynitride, aluminum nitride, and the like. The top and walls are deposited on a scaffold layer of sacrificial photoresist to form an integrated construction on the passivation layer of the CMOS. FIG. 8 shows a pattern etched into the sacrificial layer 72. The pattern consists of a chamber wall 32 and a columnar structure 68 (discussed below) which are all of uniform thickness. In the illustrated embodiment, the thickness of the walls and posts is 4 microns. These configurations are relatively thin so that when the deposited top and wall materials cool, there is little depression, if any, in the inner surface of the top layer 70 of -33-200904646. The thick construction in the uranium engraving pattern will maintain a relatively large volume of top/wall material. As the material cools and contracts, the outer surface pulls inward to create a depression. These depressions make the outer surface uneven, which is detrimental to the maintenance of the print head. If you wipe or erase the print head, paper dust and other contaminants will remain in the recess. As shown in Figure 9, the outer surface of the top layer 72 is flat and featureless except for the nozzle 2. It is easier to remove dust and dried ink by wiping or wiping off. Refilling the ink flow Referring to Figure 10, each ink inlet is supplied with four nozzles except that fewer nozzles are supplied to the entrance of the longitudinal end of the array. The random nozzle inlet 14 is advantageous during the initial injection and in the case of bubble blockage. As indicated by the flow line 74, the refill flow to the chamber 28 remote from the inlet 14 is longer than the refill flow to the chamber 28 adjacent the supply passage 6. For uniform droplet ejection characteristics, it is desirable for each nozzle in the array to have the same ink re-injection time. As shown in Figure 11, the inlet 76 adjacent the chamber and the inlet 78 remote from the chamber are designed to be different sizes. Similarly, the position of the columnar structure 68 is designed to provide different levels of flow restriction to the adjacent nozzle inlet 76 and the remote nozzle inlet 78. The size of the inlet and the position of the column adjust the fluid drag so that the re-injection time of all nozzles in the array is uniform. The position of the column can also be designed to dampen the pressure pulse generated by the steam bubble in the chamber 28 -34 - 200904646. A damping pulse that moves through the inlet prevents fluid crosstalk between the nozzles. Further, the gaps 80, 82 between the sides of the column 68 and the inlets 76, 78 can be used as effective bubble traps or traps for the larger bubbles contained in the ink refilling stream. Extended Nozzle Life Figure 12 shows a cross-section of a pigment channel in a nozzle array with dimensions required for 3200 dpi resolution. It should be understood that the "real" 3200 dpi is a very high resolution -... better than the photographic quality. This resolution goes beyond many printing jobs. Usually the resolution of 1 600 d p is appropriate. In view of this, by sharing the printed data between two adjacent nozzles, the print head integrated circuit sacrifices resolution. In this manner, the print material normally sent to one of the 1 600 dpi print heads is instead sent to the adjacent nozzles in the 3200 dpi print head. This mode of operation extends the life of the nozzle by more than two times and allows the printer to operate at very high print rates. In 3 2 0 0 dp i mode, the printer prints at 60 ppm (full color A4), and in 1600 dpi mode, the rate approaches 120 ppm. An additional benefit of the 1 60 0 dpi mode is that it is possible to use a print head integrated circuit with a print engine controller (PEC) and a flexible printed circuit board that can only be constructed at a resolution of 1 600 dpi. As shown in Figure 12, the nozzle 83 and the nozzle 84 are laterally offset only 7. 9 3 75 microns. The two nozzles are further spaced apart in absolute relationship, but the displacement in the paper feed direction may indicate the timing of the firing sequence of the nozzles. Since the lateral displacement of 8 microns between adjacent nozzles is small, -35-200904646, this shift can be ignored for the purpose of presentation. However, this shift can be resolved by optimizing the high frequency vibration (d i t h e r ) if desired. Bubbles, Chambers, and Nozzle Matching Figure 13 is an enlarged view of the nozzle array. Both the injection hole and the chamber wall are elliptical. Configuring the long axis parallel to the media feed direction allows for a high nozzle pitch in the lateral direction of the feed direction while maintaining the desired chamber volume. Furthermore, arranging the short axes of the chambers causes the short axes to overlap in the lateral direction, which also improves the nozzle packing density. Heater 30 is a cantilever beam that extends between its individual electrodes 34 and 36. The elongate beam heater element produces bubbles that are generally elliptical (in a section parallel to the plane of the wafer). The matching bubble 90, the chamber 28, and the ejection orifice 2 promote energy efficient droplet ejection. Low energy droplet ejection is important for a "self-cooling" print head. Conclusion The printhead integrated circuit shown in the figure provides a choice of "real" 3200 dpi resolution and a much higher print rate than the 1 600 dpi print rate. Sharing lower resolution prints extends nozzle life and provides compatibility with existing 1 600 dpi print engine controllers and flexible printed circuit boards. A uniform thickness chamber wall pattern has a flat outer nozzle surface that is less prone to blockage. In addition, the actuator contact configuration and the elongated nozzle configuration provide a high nozzle pitch in the lateral direction of the media feed direction while maintaining a thin nozzle array of -36-200904646 parallel to the media feed direction. The specific embodiments described above are to be considered in all respects as illustrative and illustrative BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a schematic view showing the construction of a joint print head integrated circuit; FIG. 1B is a partial plan view of the nozzle array on the print head integrated circuit of the present invention; FIG. 2 is a unit cell of the nozzle array; Figure 3 shows a replica pattern of a unit cell constituting a nozzle array; Figure 4 is a schematic cross-sectional view of a CMOS layer and a heater element passing through a nozzle; Figure 5A schematically shows an electrode having opposite polarity in an adjacent actuator column Figure 5B shows schematically the electrode configuration with typical electrode characteristics in adjacent actuator columns; Figure 6 shows the electrode configuration of the print head integrated circuit of Figure 1; Figure 7 shows the power plane profile of the CMOS layer Figure 8 shows the pattern of the sacrificial mesa layer etched into the top/sidewall layer; Figure 9 shows the outer surface at the top after etching the nozzle holes; Figure 1 shows the ink supply flow of the nozzles; Figure 11 shows the different columns to each Different inlets of the chamber; Figure 1 2 shows the nozzle spacing for a pigment channel; Figure 13 shows an enlarged view of the nozzle array -37-200904646 with matching elliptical channels and orifices; Figure 14 is a photolithography step machine A schematic diagram of the photolithography stepper is schematically illustrated in Figs. 15A to 15C. [Main component symbol description] 2 : (spray) hole (Fig. 1B) 2 : Nozzle (Fig. 4) 6 : (ink) supply channel 8: medium (paper) feed direction 1 〇: upper ink supply channel 1 2 : lower Ink supply channel 1 4 : Ink feed tube (Fig. 1 B ) 1 4 : Ink flow path (Fig. 4) 14: Nozzle inlet (Fig. 10) 1 6 : Lower nozzle column 1 8 : Upper nozzle column 20 : 歹 [| 22 : 歹 IJ 24 : Column 26 : Column 28 : Chamber 3 0 : Heater element ( Figure 2 ) 30 : Actuator ( Figure 4 ) 32 : Chamber wall - 38 - 200904646 3 4 : (Negative) electrode ( Contact) 3 6: (Positive) electrode (contact) 3 8 : Unit package 40: Power plane (metal layer) 41: Dielectric layer (material) (Fig. 4) 41 : 歹 1J (Fig. 7) 42 : Ground Plane (metal layer) (Fig. 4) 42 : 歹 [J (Fig. 7) 43 : Dielectric layer (material) (Fig. 4) 43 : 歹 [J (Fig. 7) 44: Metal layer (Fig. 4) 44 : 歹!] (Fig. 7) 46: (guide) hole 47: dielectric layer (material) 4 8 : wafer substrate 5 2 : drain 5 4 : source 56: (CMOS) drive circuit 5 8 : field effect transistor 62: Edge 64: Impedance metal section 64: Clearance (Fig. 6) 66_ Bridge (Fig. 5A) 66: Impedance section (Fig. 5B) -39- 20090464 6 6 6 : gap (Fig. 6) 6 8 : column (structure) 7 0 : top layer 72 : sacrificial layer 74 : flow line 76 : inlet 78 : inlet 80 : gap 82 : gap 83 : nozzle 8 4 : nozzle 9 0: bubble 9 2 : print head integrated circuit 94 : support member 96 : curved side 9 8 : bond pad 100 : page width print head 1 〇 2 : light source 104 : light (ray) 1 0 6 : mask 1 0 8 : Lens 1 1 〇: Wafer table 1 12 : Exposure area -40

Claims (1)

200904646 X. Patent Application 1. A wide-width inkjet printhead comprising: an array of small droplet ejectors for ejecting droplets of printing fluid onto a printing medium, the printing medium being Feeding through the printhead in the media feed direction; each drop ejector has a nozzle, and an actuator for ejecting droplets of the print fluid through the nozzle; wherein the array has more than 1 〇 One of the small droplet ejectors' and the array extends 200 mm to 330 mm in the transverse direction of the medium feed direction. 2. The page wide inkjet printhead of claim 1, wherein the array has more than 14,000 such droplet ejection injectors. 3. The pagewidth inkjet printhead of claim 1, wherein the nozzles are spaced apart from each other by less than 10 microns in a vertical direction of the media feed direction. 4. The pagewidth inkjet printhead of claim 3, wherein the nozzles are spaced apart from each other by less than 10 microns in a vertical direction of the media feed direction, in the medium feed direction They are separated from each other by less than 150 microns. 5. The page width inkjet printhead of claim 1, wherein the array droplet ejection device is supported on a plurality of monolithic wafer substrates, each of which supports more than 10,000 wafer substrates Small droplet ejector. 6. The pagewidth inkjet printhead of claim 5, wherein each of the single wafer substrates supports more than 12,000 droplet ejection injectors. 7. The page width inkjet printhead of claim 1, wherein the array of -41 - 200904646 has more than 700 small droplet ejectors per square millimeter. 8. The inkjet printhead of claim 1, wherein the actuators are disposed in adjacent columns, and each actuator has electrodes spaced apart from each other in a lateral direction of the columns for Connected to an individual drive transistor and a power supply; wherein the electrodes of the actuators in adjacent columns have opposite polarities, so the actuators in adjacent columns have opposite current flows The ink jet print head of claim 8, wherein the electrodes in each column are offset from the adjacent actuators in the lateral direction of the column, so each second The electrodes of the actuator are collinear. 10. The inkjet printhead of claim 8, wherein the droplet ejection injectors are fabricated on an elongate wafer substrate that is parallel to the actuators The columns extend and supply power and data along the long edges of the wafer substrate. 11. The inkjet printhead of claim 6 further comprising a print engine controller (PEC) for feeding printed data to the nozzles of the array; wherein during use The print data is assigned to a single nozzle between at least two nozzles of the array. The print engine controller can selectively reduce the print resolution. 12. The inkjet printhead of claim 11, wherein the positions of the two nozzles in the array are set such that the two nozzles are in the print-42-200904646 head relative to the print media substrate The transverse direction of the motion is the closest neighbor 〇 13. The inkjet print head described in claim 12, wherein the print engine controller equally shares the print data to the array Two nozzles. 14. The inkjet printhead of claim 13 wherein the two nozzle centers are spaced apart by less than 40 microns. 15. The inkjet printhead of claim 14, wherein the printhead is a pagewidth printhead, and the two nozzle centers are spaced apart by less than 16 in a lateral direction of the media feed direction. Micron. The ink jet print head of claim 13, wherein the adjacent nozzle centers are spaced apart by less than 8 μm in the transverse direction of the medium feed direction. 17. The inkjet printhead of claim 11, wherein the printhead has a nozzle pitch of more than 1600 nozzles per n (npi) in a lateral direction of the media feed direction. . 18. The inkjet printhead of claim 17, wherein the nozzle pitch is greater than 3 000 npi. -43-