TW200742768A - Process for producing ultra-planarized surface indium-tin oxides - Google Patents
Process for producing ultra-planarized surface indium-tin oxidesInfo
- Publication number
- TW200742768A TW200742768A TW095116387A TW95116387A TW200742768A TW 200742768 A TW200742768 A TW 200742768A TW 095116387 A TW095116387 A TW 095116387A TW 95116387 A TW95116387 A TW 95116387A TW 200742768 A TW200742768 A TW 200742768A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- thin film
- planarized surface
- tin oxides
- producing ultra
- Prior art date
Links
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- Manufacturing Of Electric Cables (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The present invention mainly provides the process for producing ultra-planarized surface indium-tin oxides, wherein the surface of a substrate is coated a thin film by a sol-gel method in order to improve the surface of the substrate in favor of the subsequent crystallization growth direction. The ITO layer is then deposited on the thin film of the substrate at a predetermined height by the magnetron sputtering method at room temperature. By utilizing the above-mentioned process, the ITO thin film layer can be deposited about 200 nm in thickness at 200 Watt of sputtering power without the need of heating. The disclosed invention can simplify the process and reduce the surface roughness efficiently to achieve the effect of planarized surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095116387A TW200742768A (en) | 2006-05-09 | 2006-05-09 | Process for producing ultra-planarized surface indium-tin oxides |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095116387A TW200742768A (en) | 2006-05-09 | 2006-05-09 | Process for producing ultra-planarized surface indium-tin oxides |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200742768A true TW200742768A (en) | 2007-11-16 |
Family
ID=57914186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095116387A TW200742768A (en) | 2006-05-09 | 2006-05-09 | Process for producing ultra-planarized surface indium-tin oxides |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200742768A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111149230A (en) * | 2017-08-04 | 2020-05-12 | 维特罗平板玻璃有限责任公司 | Flash Annealing of Transparent Conductive Oxides and Semiconductor Coatings |
CN116409939A (en) * | 2022-11-16 | 2023-07-11 | 中建材玻璃新材料研究院集团有限公司 | A method for preparing ITO transparent conductive film glass by liquid phase roller coating magnetron sputtering |
-
2006
- 2006-05-09 TW TW095116387A patent/TW200742768A/en unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111149230A (en) * | 2017-08-04 | 2020-05-12 | 维特罗平板玻璃有限责任公司 | Flash Annealing of Transparent Conductive Oxides and Semiconductor Coatings |
CN111149230B (en) * | 2017-08-04 | 2023-09-19 | 维特罗平板玻璃有限责任公司 | Flash Annealing of Transparent Conducting Oxides and Semiconducting Coatings |
US12032124B2 (en) | 2017-08-04 | 2024-07-09 | Vitro Flat Glass Llc | Flash annealing of transparent conductive oxide and semiconductor coatings |
CN116409939A (en) * | 2022-11-16 | 2023-07-11 | 中建材玻璃新材料研究院集团有限公司 | A method for preparing ITO transparent conductive film glass by liquid phase roller coating magnetron sputtering |
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