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TW200741172A - A measuring apparatus for the thin film thickness using interference technology of laser - Google Patents

A measuring apparatus for the thin film thickness using interference technology of laser

Info

Publication number
TW200741172A
TW200741172A TW095114333A TW95114333A TW200741172A TW 200741172 A TW200741172 A TW 200741172A TW 095114333 A TW095114333 A TW 095114333A TW 95114333 A TW95114333 A TW 95114333A TW 200741172 A TW200741172 A TW 200741172A
Authority
TW
Taiwan
Prior art keywords
thin film
measuring apparatus
film thickness
laser
interference technology
Prior art date
Application number
TW095114333A
Other languages
Chinese (zh)
Other versions
TWI290614B (en
Inventor
Da-Long Cheng
Hsin-Hsien Wu
Jenn-Kai Tsai
Hsuan-Kai Lin
Original Assignee
Advance Design Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advance Design Technology Inc filed Critical Advance Design Technology Inc
Priority to TW95114333A priority Critical patent/TWI290614B/en
Publication of TW200741172A publication Critical patent/TW200741172A/en
Application granted granted Critical
Publication of TWI290614B publication Critical patent/TWI290614B/en

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention discloses a measuring apparatus for the thin film thickness, comprising a laser source, a first lens, a second lens, a device-under-test (DUT) unit and a CCD camera. The measuring apparatus according to the present invention has several advantages, such as ease fabrication, ease operation, low cost and simultaneously thickness observation of the overall of thin film.
TW95114333A 2006-04-21 2006-04-21 A measuring apparatus for the thin film thickness using interference technology of laser TWI290614B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95114333A TWI290614B (en) 2006-04-21 2006-04-21 A measuring apparatus for the thin film thickness using interference technology of laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95114333A TWI290614B (en) 2006-04-21 2006-04-21 A measuring apparatus for the thin film thickness using interference technology of laser

Publications (2)

Publication Number Publication Date
TW200741172A true TW200741172A (en) 2007-11-01
TWI290614B TWI290614B (en) 2007-12-01

Family

ID=39327537

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95114333A TWI290614B (en) 2006-04-21 2006-04-21 A measuring apparatus for the thin film thickness using interference technology of laser

Country Status (1)

Country Link
TW (1) TWI290614B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI464054B (en) * 2010-12-06 2014-12-11 Koa Glass Co Ltd Decorative glass container and method for producing decorative glass container

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5660026B2 (en) 2011-12-28 2015-01-28 信越半導体株式会社 Film thickness distribution measurement method
WO2013186879A1 (en) * 2012-06-13 2013-12-19 株式会社シンクロン Device for measuring film thickness and device for forming film
TWI486550B (en) * 2014-01-20 2015-06-01 Nat Univ Tsing Hua An Optical Interferometry Based On-Line Real-Time Thickness Measurement Apparatus and Method Thereof
TWI509215B (en) * 2015-07-02 2015-11-21 Ta Jen Kuo A high accuracy apparatus and method of photoelectric glass substrate in real-time identification
JP7202106B2 (en) * 2018-08-31 2023-01-11 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing method and substrate processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI464054B (en) * 2010-12-06 2014-12-11 Koa Glass Co Ltd Decorative glass container and method for producing decorative glass container

Also Published As

Publication number Publication date
TWI290614B (en) 2007-12-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees