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TW200741157A - Cooling/heating apparatus and mounting apparatus - Google Patents

Cooling/heating apparatus and mounting apparatus

Info

Publication number
TW200741157A
TW200741157A TW096107560A TW96107560A TW200741157A TW 200741157 A TW200741157 A TW 200741157A TW 096107560 A TW096107560 A TW 096107560A TW 96107560 A TW96107560 A TW 96107560A TW 200741157 A TW200741157 A TW 200741157A
Authority
TW
Taiwan
Prior art keywords
cooling
transfer medium
cylinder chamber
driving mechanism
heating
Prior art date
Application number
TW096107560A
Other languages
Chinese (zh)
Other versions
TWI393849B (en
Inventor
Masataka Hatta
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200741157A publication Critical patent/TW200741157A/en
Application granted granted Critical
Publication of TWI393849B publication Critical patent/TWI393849B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A cooling/heating apparatus for circulating the cooled or heated transfer medium to a load to thereby cool or heat the load includes a heat transfer medium circulation path and a Stirling heat engine. The Stirling heat engine includes a first and a second cylinder chamber; a first and a second piston for expanding or compressing an operation gas in the first and the second cylinder chamber; and a driving mechanism for driving the first and the second piston. When the driving mechanism is driven in a forward direction, the operation gas is expanded in the first cylinder chamber and its temperature decreases, thus cooling the heat transfer medium, whereas, when the driving mechanism is driven in a backward direction, the operation gas is compressed in the first cylinder chamber and its temperature increases, thus heating the heat transfer medium.
TW096107560A 2006-03-06 2007-03-05 Cooling and heating devices and loading devices TWI393849B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006060361A JP2007240035A (en) 2006-03-06 2006-03-06 Cooling/heating device and mounting device

Publications (2)

Publication Number Publication Date
TW200741157A true TW200741157A (en) 2007-11-01
TWI393849B TWI393849B (en) 2013-04-21

Family

ID=38470297

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096107560A TWI393849B (en) 2006-03-06 2007-03-05 Cooling and heating devices and loading devices

Country Status (5)

Country Link
US (1) US7610756B2 (en)
JP (1) JP2007240035A (en)
KR (1) KR100841122B1 (en)
CN (1) CN100473919C (en)
TW (1) TWI393849B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI692643B (en) * 2019-04-16 2020-05-01 漢民測試系統股份有限公司 Semiconductor test equipment

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US20080294981A1 (en) * 2007-05-21 2008-11-27 Advancis.Com, Inc. Page clipping tool for digital publications
US9558980B2 (en) * 2008-04-30 2017-01-31 Axcelis Technologies, Inc. Vapor compression refrigeration chuck for ion implanters
DE102009009208A1 (en) * 2009-02-17 2010-08-26 Danfoss Compressors Gmbh Individual environment-temperature control device for use as e.g. writing table unit, has air flow guide directing air to temperature influencing device, which is designed as part of stirling-cooling device
US8910486B2 (en) * 2010-07-22 2014-12-16 Flir Systems, Inc. Expander for stirling engines and cryogenic coolers
CN102971518B (en) * 2011-02-10 2015-07-08 丰田自动车株式会社 Cooling system
JP5715444B2 (en) * 2011-02-28 2015-05-07 東京エレクトロン株式会社 Mounting device
JP5632317B2 (en) 2011-03-19 2014-11-26 東京エレクトロン株式会社 Cooling device operating method and inspection device
US9021800B2 (en) * 2011-03-22 2015-05-05 The Boeing Company Heat exchanger and associated method employing a stirling engine
CN102513334B (en) * 2011-12-31 2015-03-25 胡昀 Cooling water circulating system for garbage disposers
JP6034231B2 (en) * 2012-07-25 2016-11-30 株式会社Kelk Temperature control device for semiconductor manufacturing apparatus, PID constant calculation method in semiconductor manufacturing, and operation method of temperature control device for semiconductor manufacturing device
TWI618597B (en) * 2014-04-15 2018-03-21 Cooling system for machining fluid of machine tool and use method thereof
CN106705507A (en) * 2015-11-17 2017-05-24 谢德音 Refrigerant piping device
US11837479B2 (en) * 2016-05-05 2023-12-05 Applied Materials, Inc. Advanced temperature control for wafer carrier in plasma processing chamber
JP7032644B2 (en) * 2018-03-22 2022-03-09 株式会社東京精密 Prober cooling system
US11099211B1 (en) * 2018-10-27 2021-08-24 PsiQuantum Corp. Cryogenic probe card
US10781771B1 (en) * 2019-09-22 2020-09-22 Ghasem Kahe Automatic cooling system for combustion engine
KR102508040B1 (en) * 2020-05-20 2023-03-08 시바우라 메카트로닉스 가부시끼가이샤 Cooling device, substrate processing device, cooling method, and substrate processing method
JP2023023042A (en) * 2021-08-04 2023-02-16 株式会社ディスコ Constant temperature liquid supply device
KR102562102B1 (en) * 2023-03-02 2023-08-02 (주)본씨앤아이 Cooling system for semiconductor facilities using eco-friendly refrigerant

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02303361A (en) * 1989-05-18 1990-12-17 Fujitsu Ltd Power source circuit
JP3367141B2 (en) * 1993-04-28 2003-01-14 アイシン精機株式会社 Object cooling device
KR100238947B1 (en) * 1997-03-31 2000-01-15 윤종용 Semiconductor Wafer Mounting Device
TW426798B (en) * 1998-02-06 2001-03-21 Sanyo Electric Co Stirling apparatus
JP3968610B2 (en) * 1998-05-27 2007-08-29 Ｓｍｃ株式会社 Cooling and heating equipment for semiconductor processing liquid
JP2002098627A (en) * 2001-01-26 2002-04-05 Sanyo Electric Co Ltd Stirling refrigerating machine and heat shock tester
JP4055892B2 (en) * 2002-05-31 2008-03-05 東京エレクトロン株式会社 Refrigerant temperature control method, cooling method and cooling device
JP3883061B2 (en) * 2002-08-12 2007-02-21 三洋電機株式会社 Stirling cold supply system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI692643B (en) * 2019-04-16 2020-05-01 漢民測試系統股份有限公司 Semiconductor test equipment

Also Published As

Publication number Publication date
US20070204610A1 (en) 2007-09-06
CN100473919C (en) 2009-04-01
KR20070091558A (en) 2007-09-11
TWI393849B (en) 2013-04-21
CN101033896A (en) 2007-09-12
US7610756B2 (en) 2009-11-03
KR100841122B1 (en) 2008-06-24
JP2007240035A (en) 2007-09-20

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees