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TW200736405A - Coating equipment and coating method - Google Patents

Coating equipment and coating method

Info

Publication number
TW200736405A
TW200736405A TW095110281A TW95110281A TW200736405A TW 200736405 A TW200736405 A TW 200736405A TW 095110281 A TW095110281 A TW 095110281A TW 95110281 A TW95110281 A TW 95110281A TW 200736405 A TW200736405 A TW 200736405A
Authority
TW
Taiwan
Prior art keywords
coating
equipment
coating equipment
coating method
substrate holder
Prior art date
Application number
TW095110281A
Other languages
Chinese (zh)
Other versions
TWI376422B (en
Inventor
Ga-Lane Chen
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW95110281A priority Critical patent/TWI376422B/en
Publication of TW200736405A publication Critical patent/TW200736405A/en
Application granted granted Critical
Publication of TWI376422B publication Critical patent/TWI376422B/en

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

The present invention relates to a coating equipment and a coating method. The coating equipment includes a substrate holder and at least one evaporator for providing film material. The substrate holder can rock in a certain angle, so as to change an angle for vapor deposition onto a substrate in a coating process.
TW95110281A 2006-03-24 2006-03-24 Coating equipment and coating method TWI376422B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95110281A TWI376422B (en) 2006-03-24 2006-03-24 Coating equipment and coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95110281A TWI376422B (en) 2006-03-24 2006-03-24 Coating equipment and coating method

Publications (2)

Publication Number Publication Date
TW200736405A true TW200736405A (en) 2007-10-01
TWI376422B TWI376422B (en) 2012-11-11

Family

ID=48087807

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95110281A TWI376422B (en) 2006-03-24 2006-03-24 Coating equipment and coating method

Country Status (1)

Country Link
TW (1) TWI376422B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI480403B (en) * 2010-10-26 2015-04-11 Hon Hai Prec Ind Co Ltd Deposition device
TWI485282B (en) * 2013-05-02 2015-05-21 Everdisplay Optronics Shanghai Ltd Method and equipment to improve the uniformity of packaging film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI480403B (en) * 2010-10-26 2015-04-11 Hon Hai Prec Ind Co Ltd Deposition device
TWI485282B (en) * 2013-05-02 2015-05-21 Everdisplay Optronics Shanghai Ltd Method and equipment to improve the uniformity of packaging film

Also Published As

Publication number Publication date
TWI376422B (en) 2012-11-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees