TW200734256A - Stocker - Google Patents
StockerInfo
- Publication number
- TW200734256A TW200734256A TW095142590A TW95142590A TW200734256A TW 200734256 A TW200734256 A TW 200734256A TW 095142590 A TW095142590 A TW 095142590A TW 95142590 A TW95142590 A TW 95142590A TW 200734256 A TW200734256 A TW 200734256A
- Authority
- TW
- Taiwan
- Prior art keywords
- cassettes
- elevating
- stocker
- shelf body
- rail
- Prior art date
Links
- 230000003028 elevating effect Effects 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The stocker of the present invention comprises a shelf body 7 (a storage shelf) capable of storing a plurality of cassettes 35 arranged in the vertical direction and the horizontal direction, a rail 28 installed parallel to the shelf body 7, a stacker crane 5 traveling on the rail 28, and a conveyor port 17 for taking/putting the cassettes 35 out/in the stocker 6. The stacker crane 5 comprises a transfer means 36 having an elevating/lowering frame 32 for elevating/lowering in the vertical direction, a linear slide fork 33 which is installed on the elevating/lowering frame 32 and capable of advancing or retracting to/from the shelf body 7, and a conveyor table 34 having a roller 30 which receives the cassettes 35 from the transfer means 36 and delivers them to the conveyor port 17.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005334037A JP4967318B2 (en) | 2005-11-18 | 2005-11-18 | Stocker |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200734256A true TW200734256A (en) | 2007-09-16 |
TWI388479B TWI388479B (en) | 2013-03-11 |
Family
ID=38048697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095142590A TWI388479B (en) | 2005-11-18 | 2006-11-17 | Warehousing |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4967318B2 (en) |
KR (1) | KR101363836B1 (en) |
CN (1) | CN101312894A (en) |
TW (1) | TWI388479B (en) |
WO (1) | WO2007058315A1 (en) |
Cited By (2)
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---|---|---|---|---|
TWI602131B (en) * | 2016-05-26 | 2017-10-11 | 台灣積體電路製造股份有限公司 | Storage system and method for controlling the storage system |
US10913599B2 (en) | 2019-04-17 | 2021-02-09 | Industrial Technology Research Institute | Picking rack |
Families Citing this family (52)
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JP5278724B2 (en) | 2007-07-26 | 2013-09-04 | 株式会社ダイフク | Goods storage equipment |
KR101489718B1 (en) | 2008-09-05 | 2015-02-04 | 가부시키가이샤 다이후쿠 | Article storage facility and method of operating the same |
JP5467764B2 (en) * | 2008-12-11 | 2014-04-09 | 日揮株式会社 | Processing equipment |
JP5490398B2 (en) * | 2008-12-11 | 2014-05-14 | 日揮株式会社 | Processing equipment |
PT10396T (en) * | 2009-02-05 | 2009-08-05 | Gurgis Gamil Azer Geris | MOBILE PHONE WITH ACCESSORIES AND STORAGE ACCESSORIES FOR ACCESSING OBJECTS WITH AUTOMATIC SYSTEM |
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US9457956B2 (en) | 2011-05-31 | 2016-10-04 | Murata Machinery, Ltd. | Drawer device and storage device |
CN103086111B (en) * | 2011-11-02 | 2015-06-24 | 中国科学技术大学 | Three-dimensional intelligent compact storage system based on conveyor belts |
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CN102909928B (en) * | 2012-09-18 | 2015-08-26 | 张家港市盛港绿色防火建材有限公司 | A kind of making sheet equipment |
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CN104029972B (en) * | 2013-03-08 | 2016-03-23 | 深圳中集天达空港设备有限公司 | A carrier and its screw lifting device |
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JP2016535710A (en) | 2013-10-23 | 2016-11-17 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Universal part lift device, assembly, and electronic device manufacturing method |
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CN104891082B (en) * | 2015-05-11 | 2018-09-25 | 池州华宇电子科技有限公司 | A kind of semiconductor material first in first out automatic access device |
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CN105416943B (en) * | 2015-11-20 | 2018-08-10 | 常州工学院 | A kind of Electronic control automatic loading and unloading shelf |
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Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5315593B2 (en) * | 1974-06-06 | 1978-05-25 | ||
JPH02119411U (en) * | 1989-03-10 | 1990-09-26 | ||
JPH0556810U (en) * | 1992-01-16 | 1993-07-27 | 村田機械株式会社 | Entry / Exit conveyor of automated warehouse |
JPH06305514A (en) * | 1993-04-27 | 1994-11-01 | Nippon Filing Co Ltd | Article storage device |
JPH10120188A (en) * | 1996-10-23 | 1998-05-12 | Murata Mach Ltd | Article pickup device |
JP3386363B2 (en) * | 1998-02-27 | 2003-03-17 | 株式会社ダイフク | Article transfer equipment |
JP2002093876A (en) * | 2000-09-11 | 2002-03-29 | Nec Kagoshima Ltd | Device and method for transfer of semiconductor product |
-
2005
- 2005-11-18 JP JP2005334037A patent/JP4967318B2/en not_active Expired - Fee Related
-
2006
- 2006-11-17 CN CNA2006800431612A patent/CN101312894A/en active Pending
- 2006-11-17 KR KR1020087011848A patent/KR101363836B1/en not_active Expired - Fee Related
- 2006-11-17 WO PCT/JP2006/322999 patent/WO2007058315A1/en active Application Filing
- 2006-11-17 TW TW095142590A patent/TWI388479B/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602131B (en) * | 2016-05-26 | 2017-10-11 | 台灣積體電路製造股份有限公司 | Storage system and method for controlling the storage system |
US10913599B2 (en) | 2019-04-17 | 2021-02-09 | Industrial Technology Research Institute | Picking rack |
Also Published As
Publication number | Publication date |
---|---|
WO2007058315A1 (en) | 2007-05-24 |
KR20080077121A (en) | 2008-08-21 |
KR101363836B1 (en) | 2014-02-17 |
TWI388479B (en) | 2013-03-11 |
JP4967318B2 (en) | 2012-07-04 |
JP2007137599A (en) | 2007-06-07 |
CN101312894A (en) | 2008-11-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |