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TW200734256A - Stocker - Google Patents

Stocker

Info

Publication number
TW200734256A
TW200734256A TW095142590A TW95142590A TW200734256A TW 200734256 A TW200734256 A TW 200734256A TW 095142590 A TW095142590 A TW 095142590A TW 95142590 A TW95142590 A TW 95142590A TW 200734256 A TW200734256 A TW 200734256A
Authority
TW
Taiwan
Prior art keywords
cassettes
elevating
stocker
shelf body
rail
Prior art date
Application number
TW095142590A
Other languages
Chinese (zh)
Other versions
TWI388479B (en
Inventor
Hiroyuki Kasahara
Original Assignee
Asyst Shinko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Shinko Inc filed Critical Asyst Shinko Inc
Publication of TW200734256A publication Critical patent/TW200734256A/en
Application granted granted Critical
Publication of TWI388479B publication Critical patent/TWI388479B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/0407Storage devices mechanical using stacker cranes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The stocker of the present invention comprises a shelf body 7 (a storage shelf) capable of storing a plurality of cassettes 35 arranged in the vertical direction and the horizontal direction, a rail 28 installed parallel to the shelf body 7, a stacker crane 5 traveling on the rail 28, and a conveyor port 17 for taking/putting the cassettes 35 out/in the stocker 6. The stacker crane 5 comprises a transfer means 36 having an elevating/lowering frame 32 for elevating/lowering in the vertical direction, a linear slide fork 33 which is installed on the elevating/lowering frame 32 and capable of advancing or retracting to/from the shelf body 7, and a conveyor table 34 having a roller 30 which receives the cassettes 35 from the transfer means 36 and delivers them to the conveyor port 17.
TW095142590A 2005-11-18 2006-11-17 Warehousing TWI388479B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005334037A JP4967318B2 (en) 2005-11-18 2005-11-18 Stocker

Publications (2)

Publication Number Publication Date
TW200734256A true TW200734256A (en) 2007-09-16
TWI388479B TWI388479B (en) 2013-03-11

Family

ID=38048697

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142590A TWI388479B (en) 2005-11-18 2006-11-17 Warehousing

Country Status (5)

Country Link
JP (1) JP4967318B2 (en)
KR (1) KR101363836B1 (en)
CN (1) CN101312894A (en)
TW (1) TWI388479B (en)
WO (1) WO2007058315A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI602131B (en) * 2016-05-26 2017-10-11 台灣積體電路製造股份有限公司 Storage system and method for controlling the storage system
US10913599B2 (en) 2019-04-17 2021-02-09 Industrial Technology Research Institute Picking rack

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JP5278724B2 (en) 2007-07-26 2013-09-04 株式会社ダイフク Goods storage equipment
KR101489718B1 (en) 2008-09-05 2015-02-04 가부시키가이샤 다이후쿠 Article storage facility and method of operating the same
JP5467764B2 (en) * 2008-12-11 2014-04-09 日揮株式会社 Processing equipment
JP5490398B2 (en) * 2008-12-11 2014-05-14 日揮株式会社 Processing equipment
PT10396T (en) * 2009-02-05 2009-08-05 Gurgis Gamil Azer Geris MOBILE PHONE WITH ACCESSORIES AND STORAGE ACCESSORIES FOR ACCESSING OBJECTS WITH AUTOMATIC SYSTEM
HU229022B1 (en) * 2009-03-02 2013-07-29 Antal Zombori Storing apparatus for storage
JP5402233B2 (en) * 2009-05-19 2014-01-29 株式会社安川電機 Robot and article transfer system
US9457956B2 (en) 2011-05-31 2016-10-04 Murata Machinery, Ltd. Drawer device and storage device
CN103086111B (en) * 2011-11-02 2015-06-24 中国科学技术大学 Three-dimensional intelligent compact storage system based on conveyor belts
ITTV20120032A1 (en) * 2012-02-29 2013-08-30 Dario Toncelli PLANT FOR FORMING SHEETS PACKAGES
CN102795466B (en) * 2012-07-31 2014-08-20 深圳市华星光电技术有限公司 Warehousing system
CN102897578B (en) * 2012-09-18 2015-10-28 张家港市盛港绿色防火建材有限公司 A kind of feedway for laminator
CN102849508B (en) * 2012-09-18 2015-07-15 张家港市盛港绿色防火建材有限公司 Laminator lifting device with control device
CN102887392B (en) * 2012-09-18 2015-10-28 张家港市盛港绿色防火建材有限公司 A kind of jacking system for laminator feedway
CN102909928B (en) * 2012-09-18 2015-08-26 张家港市盛港绿色防火建材有限公司 A kind of making sheet equipment
CN102849433B (en) * 2012-09-18 2015-11-18 张家港市盛港绿色防火建材有限公司 A kind of laminator feedway control system
CN103832762A (en) * 2012-11-23 2014-06-04 青岛理工大学琴岛学院 Intelligent warehouse system
CN104029972B (en) * 2013-03-08 2016-03-23 深圳中集天达空港设备有限公司 A carrier and its screw lifting device
DE102013005614A1 (en) * 2013-04-04 2014-10-09 Atlantic C Handels- Und Beratungs-Gmbh camp
DE102013006524B4 (en) * 2013-04-16 2020-03-05 Mimot Gmbh Device for storing electrical components accommodated in belt spools
DE102013021532A1 (en) * 2013-09-13 2015-03-19 Schaefer Förderanlagen- und Maschinenbau GmbH Device for loading / unloading a load carrier such as a pallet and the like
JP2016535710A (en) 2013-10-23 2016-11-17 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated Universal part lift device, assembly, and electronic device manufacturing method
CN104444010B (en) * 2014-11-07 2017-01-25 无锡市开维物流装备有限责任公司 Shovel tooth type tray storeroom device
CN104891082B (en) * 2015-05-11 2018-09-25 池州华宇电子科技有限公司 A kind of semiconductor material first in first out automatic access device
CN105253508B (en) * 2015-09-29 2017-09-29 山东兰剑物流科技股份有限公司 A kind of light high-speed piler
CN106586358B (en) * 2015-10-16 2019-10-25 深圳中集天达空港设备有限公司 Storage mechanism and its handling device, access method
CN105416943B (en) * 2015-11-20 2018-08-10 常州工学院 A kind of Electronic control automatic loading and unloading shelf
CN105292897B (en) * 2015-11-20 2017-07-28 常州工学院 A kind of manned handling High Level Rack of lift
CN105314376A (en) * 2015-11-27 2016-02-10 南通恒康数控机械有限公司 Transferring and stacking system for long-distance sponges
CN106865084B (en) * 2015-12-11 2019-08-30 中国国际海运集装箱(集团)股份有限公司 Fork-type stacker and cargo storage and retrieval device
JP6566051B2 (en) * 2016-02-15 2019-08-28 村田機械株式会社 Storage device and transport system
CN106429165A (en) * 2016-08-31 2017-02-22 杨素琴 Plank pushing device
KR102319343B1 (en) * 2017-03-30 2021-11-01 두산공작기계 주식회사 Apparatus for carrying pallet
KR101992015B1 (en) * 2017-08-31 2019-06-21 심명순 In/out handing apparatus for auto ware house
KR101965209B1 (en) * 2017-10-10 2019-04-03 심명순 In/out handing apparatus for auto ware house
TWI628133B (en) * 2017-11-03 2018-07-01 東台精機股份有限公司 Bidirectional carrying vehicle
CN109870983B (en) * 2017-12-04 2022-01-04 北京京东尚科信息技术有限公司 Method and device for processing tray stack image and system for warehousing goods picking
CN108001923A (en) * 2017-12-27 2018-05-08 广州大学 A kind of article automatic storage device
CN109305501B (en) * 2018-09-11 2019-09-27 华中科技大学 A marine intensive automatic intelligent storage system suitable for marine environment
DE102018215780A1 (en) * 2018-09-18 2020-03-19 Robert Bosch Gmbh Device and method for handling storage units
KR101983828B1 (en) * 2018-12-28 2019-05-29 최형식 Logistics Automation Warehouse
CN109941651B (en) * 2019-03-26 2020-07-17 西安航空学院 Intelligent arranging and stacking equipment for new energy automobile lithium battery production
CN110217522A (en) * 2019-03-29 2019-09-10 芜湖金三氏数控科技有限公司 Automobile windshield stereoscopic warehouse and using method thereof
CN112038005A (en) * 2019-09-24 2020-12-04 上海李尔实业交通汽车部件有限公司 Production system and method for wiring harness workshop
CN110723446B (en) * 2019-09-25 2020-12-04 江苏泰治科技股份有限公司 Automatic transceiver for gold and copper wires
CN110963222A (en) * 2019-12-10 2020-04-07 华北理工大学 A library book borrowing device
WO2021209649A1 (en) * 2020-04-14 2021-10-21 Imaz Arce Guillermo Pedro Automated system for the storage and retrieval of dies
CN111703798B (en) * 2020-06-09 2024-01-02 北京极智嘉科技股份有限公司 Transfer robot, box taking method, goods loading method and warehouse logistics system
KR102712592B1 (en) * 2021-03-30 2024-10-04 주식회사 엘지씨엔에스 Multi-level shuttle and multi-level shuttle system
CN113734678A (en) * 2021-08-20 2021-12-03 胡勇 Efficient supporting tire stack goods shelves and stacker of using
CN114887904A (en) * 2022-04-28 2022-08-12 浙江凯乐士科技集团股份有限公司 Sorting system
CN115783609B (en) * 2023-01-09 2023-11-28 青岛华新华义齿技术有限公司 Mechanical arm capable of controlling grabbing force

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JPS5315593B2 (en) * 1974-06-06 1978-05-25
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JPH0556810U (en) * 1992-01-16 1993-07-27 村田機械株式会社 Entry / Exit conveyor of automated warehouse
JPH06305514A (en) * 1993-04-27 1994-11-01 Nippon Filing Co Ltd Article storage device
JPH10120188A (en) * 1996-10-23 1998-05-12 Murata Mach Ltd Article pickup device
JP3386363B2 (en) * 1998-02-27 2003-03-17 株式会社ダイフク Article transfer equipment
JP2002093876A (en) * 2000-09-11 2002-03-29 Nec Kagoshima Ltd Device and method for transfer of semiconductor product

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI602131B (en) * 2016-05-26 2017-10-11 台灣積體電路製造股份有限公司 Storage system and method for controlling the storage system
US10913599B2 (en) 2019-04-17 2021-02-09 Industrial Technology Research Institute Picking rack

Also Published As

Publication number Publication date
WO2007058315A1 (en) 2007-05-24
KR20080077121A (en) 2008-08-21
KR101363836B1 (en) 2014-02-17
TWI388479B (en) 2013-03-11
JP4967318B2 (en) 2012-07-04
JP2007137599A (en) 2007-06-07
CN101312894A (en) 2008-11-26

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees