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TW200734185A - Monolithic fluid injection device and method of manufacturing the same - Google Patents

Monolithic fluid injection device and method of manufacturing the same

Info

Publication number
TW200734185A
TW200734185A TW095108130A TW95108130A TW200734185A TW 200734185 A TW200734185 A TW 200734185A TW 095108130 A TW095108130 A TW 095108130A TW 95108130 A TW95108130 A TW 95108130A TW 200734185 A TW200734185 A TW 200734185A
Authority
TW
Taiwan
Prior art keywords
injection device
fluid injection
layer
monolithic fluid
manufacturing
Prior art date
Application number
TW095108130A
Other languages
Chinese (zh)
Other versions
TWI271320B (en
Inventor
Guang-Ren Shen
Wei-Lin Chen
Yi-Zhi Hong
Original Assignee
Benq Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Benq Corp filed Critical Benq Corp
Priority to TW95108130A priority Critical patent/TWI271320B/en
Application granted granted Critical
Publication of TWI271320B publication Critical patent/TWI271320B/en
Publication of TW200734185A publication Critical patent/TW200734185A/en

Links

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

A monolithic fluid injection device and method of manufacturing the same are provided. The monolithic fluid injection device comprises a substrate having a first surface, and a manifold is created through the substrate. A protective layer is formed on the first surface of the substrate. A electroplate seed layer is formed on the protective layer. A metal structural layer is formed on the electroplate seed layer. A chamber is formed between the first surface of the substrate and the metal structural layer. A nozzle is created through the protective layer, the electroplate seed layer and the metal structural layer communicating with the chamber. The monolithic fluid injection device may further comprise a chemical resistant metal film covering the metal structural layer and extending in the nozzle.
TW95108130A 2006-03-10 2006-03-10 Monolithic fluid injection device and method of manufacturing the same TWI271320B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95108130A TWI271320B (en) 2006-03-10 2006-03-10 Monolithic fluid injection device and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95108130A TWI271320B (en) 2006-03-10 2006-03-10 Monolithic fluid injection device and method of manufacturing the same

Publications (2)

Publication Number Publication Date
TWI271320B TWI271320B (en) 2007-01-21
TW200734185A true TW200734185A (en) 2007-09-16

Family

ID=38435125

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95108130A TWI271320B (en) 2006-03-10 2006-03-10 Monolithic fluid injection device and method of manufacturing the same

Country Status (1)

Country Link
TW (1) TWI271320B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107757127B (en) * 2017-10-30 2023-05-26 苏州工业园区纳米产业技术研究院有限公司 Nozzle structure, preparation method of nozzle structure and micro-electromechanical ink-jet printing head

Also Published As

Publication number Publication date
TWI271320B (en) 2007-01-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees